WO2021107738A1 - Système et procédé de commande de registre de précision rouleau à rouleau utilisant un dispositif de commande de position en 5 dimensions - Google Patents

Système et procédé de commande de registre de précision rouleau à rouleau utilisant un dispositif de commande de position en 5 dimensions Download PDF

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Publication number
WO2021107738A1
WO2021107738A1 PCT/KR2020/017329 KR2020017329W WO2021107738A1 WO 2021107738 A1 WO2021107738 A1 WO 2021107738A1 KR 2020017329 W KR2020017329 W KR 2020017329W WO 2021107738 A1 WO2021107738 A1 WO 2021107738A1
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WIPO (PCT)
Prior art keywords
roll
axis
tension
register
correction
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PCT/KR2020/017329
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English (en)
Korean (ko)
Inventor
신기현
안 둑 구엔호
Original Assignee
주식회사 토바
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Application filed by 주식회사 토바 filed Critical 주식회사 토바
Priority claimed from KR1020200165024A external-priority patent/KR102516387B1/ko
Publication of WO2021107738A1 publication Critical patent/WO2021107738A1/fr

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Definitions

  • the present invention relates to a roll-to-roll register precision control system using a five-dimensional position control device. More specifically, it relates to a roll-to-roll register precision control system using a five-dimensional position control device that can precisely print a printing element on a material by precisely controlling the tension and register error of the material in five directions.
  • semiconductors Since the advent of semiconductor technology, semiconductors have been developed with the goal of smaller size, faster speed, lower power consumption, and lower price per device. Recently, they have been developed to perform various functions in one semiconductor device. have.
  • the thin film used for the semiconductor device must have excellent step coverage while being controlled on an atomic basis.
  • the deposition temperature should be low to prevent diffusion and oxidation at the interface.
  • ALD Atomic Layer Deposition
  • the atomic layer deposition technique has many advantages compared to the conventional deposition method, but the process of periodically supplying raw materials one by one and removing the excess must be repeated.
  • a masking process and a masking removal process after pattern deposition are required in a roll-to-roll continuous process.
  • the existing masking for selective pattern formation uses a photolithography process, so it is not suitable for application to a continuous process system.
  • the present invention has been devised to solve the above problems.
  • An object of the present invention is to provide a roll-to-roll register precision control system and method using a five-dimensional position control device capable of correcting tension and register errors by controlling the material in five axes.
  • a roll-to-roll register precision control system using a five-dimensional position control device for achieving the above object is a supply unit for supplying a material that ensures flexibility, and measures the tension and register error of the material a displacement measuring unit to, a position correcting unit for correcting the position of the material in five axes to control the tension and register error of the material, and printing in which at least one printing element is printed on the material transferred from the position correcting unit It may include a drying unit and a finishing unit in which the material on which the printing element is printed is transported and wound.
  • the supply unit is provided at the center of the winding roll on which the material is wound and rotates the winding roll, and an unwinding roll for supplying the material, and a driving roll for controlling the process speed of the material supplied from the unwinding roll; It may include a control roll for adjusting the tension of the material transferred from the driving roll, and a surface cleaning roll for evenly arranging the surface of the material transferred from the adjustment roll.
  • the displacement measurement unit includes a tension measurement unit including a first tension measurement device for measuring the tension of the material transferred from the supply unit and a second tension measurement device for measuring the tension of the material transferred from the print drying unit; An error measuring device for measuring the register error of the material may be provided.
  • the position correction unit includes a first position correction device for correcting the position of the material according to the displacement value measured by the first tension measuring device, and a displacement value within an error range for the position of the material transferred from the first position correction device. It may include a second position correction device for re-calibrating with , and a position sensor formed in the first position correction device and the second position correction device, respectively, and measuring a register error by measuring the position of the material.
  • the position correction unit is coupled to a circular correction roll that rotates so as to smoothly transport the material, and both sides of the correction roll, and sets the position of the correction roll according to the displacement value of the material on the first x axis, the second x axis,
  • a guide device for correcting at least one of the first z-axis, the second z-axis, and the y-axis, and at least one formed outside the guide device, and a compensation motor for driving a transfer body formed by at least one of a ball screw and a linear motor can do.
  • the guide device is formed at the lower end of one side of the correction roll, and a first x-axis guide for guiding the position of the material in the first x-axis by the transfer member, and a position corresponding to the first x-axis guide, A second x-axis guide for guiding the position of the material in the second x-axis by the transfer member, and a 1z-axis guide formed on the first x-axis guide and guiding the position of the material in the first z-axis by the transfer member A shaft guide, a second z-axis guide formed on the first x-axis guide and guiding the position of the material in the second z-axis by the transfer member, and formed on one side of the compensation roll, to the compensation motor A y-axis guide for controlling the y-axis torque of the correction roll may be provided.
  • the print drying unit may include a printing unit for printing the printing element on the material whose position is corrected by the position correction unit, and a drying unit for drying the printing element printed on the material transferred from the printing unit.
  • a roll-to-roll register precision control method using a five-dimensional position control device for achieving the above object is a roll-to-roll register precision control method using a five-dimensional position control device, (a) A calculation step of calculating the tension and register error acting on the material; (b) a selection step of selecting an option formed of one of x-axis register error control, y-axis register error control, and tension control of the material according to the information calculated in the calculation step; and (c) a correction step of correcting the position of the material according to the register error selected in the selection step.
  • step (c) in the x-axis register error control method of the material, (e-1) photographing the material with an image sensor; (e-2) checking the image captured by the image sensor; (e-3) the correction roll of the position correction unit is corrected in the x-axis; (e-4) confirming the location of the material; may be provided.
  • step (c) in the y-axis register error control method of the material, (f-1) checking the y-axis displacement of the material in the position sensor; (f-2) rotating the correction roll of the position correction unit in the x-axis and z-axis; (f-3) confirming the location of the material; may be provided.
  • step (c) in the method for controlling the tension of the material, (g-1) measuring the tension of the material by a tension measuring unit; (g-2) calculating a displacement value for the tension of the material; (g-3) controlling the tension of the material by adjusting the torque of the correction motor; may be provided.
  • FIG. 1 is a conceptual diagram illustrating a roll-to-roll register precision control system using a five-dimensional position control device according to an embodiment of the present invention.
  • Figure 2 is a conceptual diagram showing a supply unit according to an embodiment of the present invention.
  • FIG 3 is a perspective view showing a tension measuring unit according to an embodiment of the present invention.
  • FIG. 4 is a conceptual diagram illustrating an error measuring apparatus according to an embodiment of the present invention.
  • 5 to 6 are perspective views showing a guide device according to an embodiment of the present invention.
  • FIG. 7 to 10 are exemplary views showing a position correction unit according to an embodiment of the present invention.
  • FIG. 11 is a flowchart illustrating a roll-to-roll register precision control method using a five-dimensional position control device according to another embodiment of the present invention.
  • FIG. 12 is a graph showing a result according to a roll-to-roll register precision control method using a five-dimensional position control apparatus according to another embodiment of the present invention.
  • FIG. 11 is a flowchart illustrating a roll-to-roll register precision control method using a five-dimensional position control device according to an exemplary embodiment of the present invention.
  • step (c) the step (c)
  • step (c)
  • step (c) More preferably, in step (c),
  • (g-3) controlling the tension of the material by adjusting the torque of the correction motor; has a roll-to-roll register precision control method using a five-dimensional position control device comprising a.
  • FIG. 1 is a conceptual diagram illustrating a roll-to-roll register precision control system using a five-dimensional position control device according to an embodiment of the present invention.
  • FIG. 2 is a conceptual diagram illustrating the supply unit 100 according to an embodiment of the present invention.
  • FIG 3 is a perspective view showing the tension measuring unit 220 according to an embodiment of the present invention.
  • a roll-to-roll register precision control system using a five-dimensional position control device according to an embodiment of the present invention as shown in Figs.
  • a displacement measuring unit 200 for measuring the tension and register error of the material 10, and a position information for correcting the position of the material 10 in 5 axes to control the tension and register error of the material 10 The government 300, the print drying unit 400 in which at least one printing element is printed on the material 10 transferred from the position correction unit 300, and the material 10 on which the printing element is printed are transferred. It may be provided with a closing part 500 to be wound.
  • the supply unit 100 may supply a winding roll on which the material 10 to ensure flexibility is wound by a transfer roll formed of a plurality of rolls to print a printing element on the material 10 .
  • the supply unit 100 includes a winding roll formed by being wound in a circular shape by securing flexibility, and provided at the center of the winding roll to rotate the winding roll and supply the material 10 .
  • An unwinding roll 110, a drive roll 120 for controlling the process speed of the material 10 supplied from the unwinding roll 110, and the material 10 transferred from the drive roll 120 It may include a control roll 130 for adjusting the tension, and a surface cleaning roll 140 for evenly arranging the surface of the material 10 transferred from the control roll 130 .
  • the winding roll can be rotated and unwound by the unwinding roll 110, and flexibility is ensured so that it can be transferred in a roll-to-roll device capable of printing circuits, etc., so that it can be formed of a flexible and thin material.
  • the material 10 may be formed to have a predetermined length or to be formed to be long and move without interruption in the roll-to-roll device.
  • a separate motor may be provided for the unwinding roll 110 to rotate the winding roll, and the feed speed and length at which the material 10 is unwound by rotating the unwinding roll 110 by the motor can be adjusted.
  • the driving roll 120 is provided on the upper portion of the material 10 to which the end of the winding roll wound by the unwinding roll 110 is transferred, and to control the tension generated as the material 10 is transferred. In order to do so, the process speed of the material 10 may be adjusted.
  • the driving roll 120 adjusts the rotational speed of the conveying device for conveying the material 10 .
  • the rotational speed of the conveying device and the driving roll 120 is controlled by the control unit so that the printing element stacked on the upper portion of the material 10 is smoothly stacked.
  • a plurality of the conveying device may be provided at the lower portion of the material 10 in order to convey the material 10 progressing from the supply unit 100 to the finishing unit 500, and the conveying device is formed of a roll or a rail.
  • control roll 130 adjusts the tension of the material 10 when the winding roll is unwound by the unwinding roll 110 and is transferred, and the material 10 is smoothly transferred to the surface cleaning roll 140 .
  • the position can be adjusted to be
  • the control roll 130 is provided on the upper and lower portions of the material 10, respectively, to control the position and tension of the material 10, and before being transferred to the surface cleaning roll 140, the upper portion of the material 10 And it is possible to prevent the material 10 from being tangled or folded by first organizing the lower part.
  • the surface on which the printing element is printed can be uniformly arranged by the surface cleaning roll 140 of the material 10 delivered through the control roll 130 .
  • the surface cleaning roll 140 may be cleaned by supplying a gaseous cleaning material (Plasma) to equalize the surface of the material 10 or by cutting the surface of the material 10 and supplying wind. .
  • a gaseous cleaning material Pulsma
  • the displacement measuring unit 200 is formed of a load cell and an image sensor 230 to measure the tension and register error of the material 10 transferred by the transfer device.
  • the displacement measuring unit 200 is installed before the position correcting unit 300 and after the print drying unit 400 , respectively, to measure the displacement value to be corrected by the position correcting unit 300 .
  • the displacement measuring unit 200 includes a tension measuring unit 210 measuring the tension of the material 10 transferred from the supplying unit 100 , and an error measuring device 220 measuring a register error of the material 10 . ) is provided.
  • the tension measuring unit 210 includes a first tension measuring device 211 installed before the position correction unit 300 and a second tension measuring device for measuring the tension of the material 10 transferred from the print drying unit 400 . (212) is provided.
  • the first tension measuring device 211 measures the tension before printing the printing element on the material 10, and is corrected by the position correction unit 300 according to the displacement value measured by the first tension measuring device 211. After that, the printing device is printed in the print drying unit 400 . And when the printing element is printed on the material 10 , the second tension measuring device 212 calculates the tension and register error of the material 10 again to determine whether displacement has occurred.
  • a trigger mark 231 which is a reference point for determining a register error by marking on the material 10, is marked on the upper portion of the material 10 to determine a register error at a predetermined distance from the trigger mark 231
  • An image sensor 230 formed of at least one of a pixel camera, a line scan camera, and a micro sensor to photograph an interval between the register mark 232, the trigger mark 231 and the register mark 232, and the distance measurement
  • the trigger mark 231 may be arbitrarily printed on the material 10 in order to measure a register error, and may be marked at a position that does not overlap with the printing element printed on the material 10 .
  • the register mark 232 is provided at a predetermined distance from the trigger mark 231 and determines whether a register error occurs in the material 10 .
  • the trigger mark 231 and the register mark 232 marked on the material 10 may be marks of various shapes, such as a circle, a line, and a polygon.
  • the image sensor 230 may measure a register error before the register mark 232 is dried. This is to prevent the position of the register mark 232 from being changed during drying.
  • the image sensor 230 can be formed as at least one of a pixel camera, a line scan camera, and a micro sensor to simultaneously photograph the register mark 232 when recognizing the trigger mark 231, the image sensor ( 230), the trigger mark 231 and the register mark 232 may be photographed simultaneously.
  • the calculator 233 may calculate a distance between the trigger mark 231 and the register mark 232 measured by the image sensor 230 .
  • the calculation unit 233 sets the interval between the trigger mark 231 and the register mark 232 marked by the print drying unit 400 as a target value.
  • the interval between the trigger mark 231 and the register mark 232 is set as a target value.
  • the register error and tension disturbance can be determined by the error.
  • the displacement measuring unit 200 measures the displacement of the x-axis, y-axis, and z-axis of the material 10, and then corrects the position of the material 10 in the position correction unit 300, so that the displacement is measured. After the material 10, the raw material is printed at the correct position and can be transported.
  • the tension measurement unit 210 is a term including both the first tension measurement device 211 and the second tension measurement device 212 .
  • the tension measurement unit 210 may derive the displacement value of the material 10 by measuring the tension of the material 10 and calculating the tension and the register error in the control unit.
  • the position correction unit 300 corrects the material 10 in the x-axis, y-axis, and z-axis to correct the register error and the displacement value of the tension measured by the tension measurement unit 210, and the x-axis and By correcting the z-axis in both directions, 5-axis control is possible.
  • the position correction unit 300 is formed with an infrared sensor to measure the displacement of the position corrected material (10).
  • the infrared sensor is formed on one side of the material 10, the material 10 is formed to pass through between the upper and lower parts of the body, and the position of the end of the material 10 passing between the body
  • a position measurement sensor for measuring, and a determination device for determining the displacement of the material (10) by calculating a distance difference between the end position of the material (10) measured by the position measurement sensor and the reference line of the position measurement sensor can do.
  • the body may be coupled to the outer surface of the roll-to-roll device, and a gap may occur between the upper and lower portions of the body so that the material 10 penetrates.
  • the position measuring sensor is provided on the upper portion of the body to emit infrared light to the lower portion of the body to determine the position of the end of the material 10 passing through the infrared rays.
  • the determination device is provided at the lower portion of the body so that infrared light emitted from the upper portion of the body can be introduced, and if the end of the material 10 approaches the infrared and there is no incoming infrared light, the material 10 approaches. It is determined that the position of the material 10 can be determined.
  • the displacement value of the material 10 may be calculated by determining the distance between the target position of the material 10 and the position of the end of the material 10 .
  • the material 10 whose position is corrected by the position correction unit 300 is printed with a printing element by the print drying unit 400 .
  • the print drying unit 400 includes a printing unit 410 in which the printing element is printed on the material 10 transferred from the supply unit 100 , and the printing unit 410 printed on the material 10 by the printing unit 410 .
  • a drying unit 420 for drying the printing element may be provided.
  • a printing element may be smoothly printed on both the lower and upper portions of the material 10.
  • drying unit 420 is the printing unit 410 in order to dry the printing element formed of the functional electronic ink printed in the printing unit 410, the material 10 on which the printing element is printed in the printing unit 410 to be penetrated.
  • the drying unit 420 may be formed in various spans according to the time the printing element is dried with a hot air dryer.
  • the material 10 passes through the drying unit 420, the material 10 is separated from the drying unit 420 by applying heat to the printing element printed on the material 10 to print. You can check whether the drying of the printing element is completed by checking the
  • the material 10 that is dried and transported after the printing element is printed in the print drying unit 400 increases the span length of the print drying unit 400 to increase the possibility of tension disturbance, so the second tension measuring device 212 ) and the error measuring device 220 to measure the displacement values of the tension and resistor errors.
  • the finishing unit 500 may wind up the material 10 when the printing element is printed on the material 10 through at least one printing module.
  • the finishing unit 500 may arrange the surface in order to make the thickness of the printing element constant, and may control the speed and tension in order to smoothly wind the material 10 .
  • FIGS. 7 to 10 are exemplary views showing a position correction unit 300 according to an embodiment of the present invention.
  • the position correcting device corrects the position of the material 10 according to the displacement value measured by the first tension measuring device 211 .
  • a position compensating device 310, a second position compensating device 320 for re-correcting the position of the material 10 transferred from the first position compensating device 310 to a displacement value within an error range, and the first position A position sensor 330 which is formed in each of the compensating device 310 and the second position compensating device 320 and measures the corrected position of the material 10 to re-measure the tension and register error may be provided. .
  • the position correction unit 300 is described to be installed with two position correction devices, but the number of position correction devices is not limited.
  • the position correction unit 300 installs the first position correction device 310 and the second position correction device 320 to be spaced apart from each other, so that the first position correction device 310 has an accuracy of 80 to 90% of the material 10 ) to adjust the error of the displacement value to within 2%, and the second position correction device 320 recalibrates the material 10 corrected by the first position correction device 310 to obtain an accuracy of 90 to 99%.
  • the position sensor 330 re-measures the material 10 whose position has been corrected by the position correction unit 300 by emitting infrared light as described above.
  • the position correction unit 300 formed of the first position correction device 310 and the second position correction device 320 has a circular correction roll 340 that rotates to smoothly transfer the material 10 .
  • a guide device 350 coupled to both sides of the compensation roll 340, respectively, and at least one compensation motor 360 formed outside the guide device 350 may be provided.
  • the correction roll 340 is formed in a circular cross section, and is formed to be larger than the width of the material 10 .
  • the correction roll 340 is formed at the lower end of the material 10 , and as the material 10 is formed to be wrapped, the position of the material 10 is controlled.
  • the position correction unit 300 on which the correction roll 340 is formed is formed to protrude along the z-axis and the x-axis of the material 10 to adjust the tension on the transferred material 10 and simultaneously adjust the position of the material 10 to a certain level. keep it
  • the guide device 350 is formed on both sides of the correction roll 340, respectively, and controls the position of the material 10 in the x-axis and z-axis, and controls the tension in the y-axis.
  • the x-axis and the z-axis are respectively formed on both sides of the correction roll 340 as the 1st x-axis and the 2nd x-axis or the 1st z-axis and the 2nd z-axis.
  • the guide device 350 is capable of 5-axis control by correcting the position of the material 10 in the first x-axis, the second x-axis, the first z-axis, the second z-axis, and the y-axis.
  • the guide device 350 is formed at the lower end of one side of the correction roll 340 , an x-axis guide for guiding the position of the material 10 in the x-axis, and a z-axis guide for the position of the material 10 .
  • a z-axis guide is formed, and a y-axis guide 355 for controlling the tension of the material 10 is formed.
  • the x-axis guide and the z-axis guide is formed with a transfer body 370 formed of at least one of a ball screw and a linear motor for precisely controlling the position of the correction roll 340 is formed, the transfer body 370 is a correction motor ( 360) rotates.
  • the compensating motor 360 is coupled to one side of the compensating roll 340 by a flexible coupling to control the rotation of the compensating roll 340 in order to adjust the tension of the material 10 .
  • the lower end of the x-axis guide is fixed and a transport body 370 is formed therein to move the upper z-axis guide in the x-axis. Accordingly, the correction roll 340 coupled to the z-axis guide moves in the x-axis.
  • This x-axis guide is formed on one side of the compensation roll 340, and the first x-axis guide 351 for guiding the position of the material 10 to the 1 x-axis by the transfer member 370, and the compensation roll
  • the second x-axis guide 352 is formed on the other side of the 340 to correspond to the first x-axis guide 351 and guides the position of the material 10 in the second x-axis by the transfer body 370 . is formed
  • the first x-axis guide 351 and the second x-axis guide 352 rotate the position of the correction roll 340 along the x-axis as they move, respectively.
  • a correction motor 360 is respectively coupled to the 1x-axis guide 351 and the 2ndx-axis guide 352 to drive the transport body 370, and when the position of the material 10 measured by the measurement unit is changed, the 1x The transfer body 370 of the axis guide 351 and the 2x axis guide 352 is driven and corrected.
  • the z-axis guide is formed on the first x-axis guide 351, the first z-axis guide 353 for guiding the position of the material 10 in the first z-axis by the transfer member 370, the first A second z-axis guide 354 is formed on the 1x-axis guide 351 and guides the position of the material 10 in the second z-axis by the transfer member 370 .
  • the first z-axis guide 353 and the second z-axis guide 354 rotate the position of the correction roll 340 in the z-axis.
  • the correction roll 340 is formed in a 'C' shape to form a housing coupled to the transport body 370 of the z-axis guide.
  • the correction roll 340 is changed in position by the x-axis guide and the z-axis guide as both sides are coupled to the housing and rotated.
  • the x-axis guide and the z-axis guide are formed in a 'C' shape, the z-axis guide is coupled to the transport body 370 penetrating the x-axis guide, and the correction roll 340 is attached to the transport body 370 of the z-axis guide. ) of the housing can be combined.
  • the x-axis guide and the z-axis guide rotate the correction roll 340 by the transfer member 370 to correct the position of the material 10 when the position of the material 10 is not constant.
  • the transport body 370 of the first x-axis guide 351 and the second x-axis guide 352 is transported in the same direction and length, and the first z-axis guide 353 is ) and the transfer member 370 of the second z-axis guide 354 are driven to be transferred in the same direction and length to correct a register error occurring in the material 10 .
  • the transfer body 370 of the first x-axis guide 351 and the second x-axis guide 352 is driven in different directions to cause the material 10 to deviate from each other.
  • the interval can be corrected.
  • the z-axis guide is also y-axis and the material 10 is out of a certain distance
  • the material 10 is moved by driving the transport body 370 of the first z-axis guide 353 and the second z-axis guide 354 in different directions. It can be corrected as much as the deviated interval.
  • the y-axis guide 355 is coupled to the side surface of the correction roll 340 and can control the rotation speed of the correction roll 340 to adjust the tension of the material 10 .
  • the correction motor 360 coupled to the y-axis guide 355 adjusts the rotational torque to adjust the tension of the material 10 .
  • the position correction unit 300 corrects the position of the material 10 by the control unit, and the control unit 10 according to the result of the register error measured by the error measurement device 220 of the displacement measurement unit 200 . is corrected on the x-axis and z-axis.
  • the control unit can control the tension of the material 10 by the torque provided by the correction motor 360 of the y-axis guide 355 after measuring the tension of the material 10 by the tension measuring unit 210. have.
  • FIG. 11 is a flowchart illustrating a roll-to-roll register precision control method using a five-dimensional position control device according to another embodiment of the present invention.
  • Step S1100 calculates the tension of the material 10 in the calculation step.
  • the material 10 is supplied from the supply unit 100 , and the displacement measuring unit 200 measures the tension and the resistor error of the material 10 .
  • the tension is measured by the tension measuring device formed of the load cell, and the register error is measured by the error measuring device 220 .
  • the control unit calculates the tension and the register error.
  • step S1200 a selection step of selecting one of the x-axis register error control, y-axis register error control, and tension control of the material 10 is formed according to the displacement values of the tension and register errors calculated in step S1100.
  • Step S1210 is to control the x-axis register error of the material 10 in the selection step, and the image sensor 230 is used to measure the displacement value on the x-axis.
  • Step S1211 is to photograph the material 10 from the image sensor 230, after marking the trigger mark 231 and the register mark 232, and then moving the trigger mark 231 and the register mark 232 are photographed.
  • step S1212 the image captured by the image sensor 230 is checked in step S1212, and the displacement value is calculated by the calculator 233.
  • step S1213 the correction roll 340 of the position correction unit 300 corrects the x-axis using the value of X obtained by using [Equation 1].
  • step S1214 the position of the material 10 whose position has been corrected in the position correction unit 300 is confirmed by using the position sensor 330 .
  • Step S1220 is to control the y-axis register error of the material 10 in the selection step, and utilizes the position sensor 330 to measure the displacement value of the y-axis.
  • Step S1221 measures the amount of displacement in the y-axis of the material 10 in the position sensor 330 .
  • Step S1222 is corrected by rotating the correction roll 340 of the position correction unit 300 described above in the x-axis and z-axis by using the value obtained through [Equation 2] to [Equation 5].
  • V web speed [mm/s]
  • step S1223 the position of the material 10 whose position has been corrected in the position correction unit 300 is confirmed by using the position sensor 330 .
  • Step S1230 is to control the tension of the material 10 in the selection step.
  • Step S1231 measures the tension of the material 10 by the tension measuring device.
  • step S1232 the amount of displacement with respect to the tension of the material 10 is measured, and if it is determined that the tension matches the target, it is maintained without correction. However, if the displacement amount with respect to the tension does not match the target, the tension of the material 10 may be controlled by adjusting the torque of the correction motor 360 in step S1233.
  • Step S1300 is to control the position correction unit as in steps S1213, S1222, and S1233 to perform the x-axis register error control, y-axis register error control, and tension control measured in step S1200.
  • the present invention relates to a roll-to-roll register precision control system using a five-dimensional position control device. More specifically, it relates to a roll-to-roll register precision control system using a five-dimensional position control device that can precisely print a printing element on a material by precisely controlling the tension and register error of the material in five directions. there is a possibility

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  • Inking, Control Or Cleaning Of Printing Machines (AREA)

Abstract

Selon un aspect, la présente invention concerne un système et un procédé de commande de registre de précision rouleau à rouleau utilisant un dispositif de commande de position en 5 dimensions comprenant : une unité d'alimentation qui fournit un matériau qui assure une flexibilité ; une unité de mesure de déplacement qui mesure la tension et l'erreur de registre du matériau ; une unité de correction de position qui corrige la position du matériau selon 5 axes afin de commander la tension et l'erreur de registre du matériau ; une unité d'impression et de séchage dans laquelle au moins un élément d'impression est imprimé sur le matériau transféré à partir de l'unité de correction de position ; et une unité de finition sur laquelle le matériau sur lequel l'élément d'impression est imprimé est transféré et enroulé.
PCT/KR2020/017329 2019-11-28 2020-11-30 Système et procédé de commande de registre de précision rouleau à rouleau utilisant un dispositif de commande de position en 5 dimensions WO2021107738A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR10-2019-0155647 2019-11-28
KR20190155647 2019-11-28
KR10-2020-0165024 2020-11-30
KR1020200165024A KR102516387B1 (ko) 2019-11-28 2020-11-30 5차원 위치 제어 장치를 활용한 롤투롤 레지스터 정밀 제어 시스템 및 방법

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WO2021107738A1 true WO2021107738A1 (fr) 2021-06-03

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130063146A (ko) * 2011-12-06 2013-06-14 주식회사 에스에프에이 인쇄장치
KR101409488B1 (ko) * 2013-04-03 2014-06-18 한국기계연구원 속도, 장력, 중첩정밀도의 독립제어 가능한 롤투롤 인쇄전자 공정 시스템 제어방법
KR20180009913A (ko) * 2016-07-20 2018-01-30 주식회사 토바 롤투롤 박판 초정밀 3차원 위치 제어 시스템
JP2018083332A (ja) * 2016-11-22 2018-05-31 凸版印刷株式会社 間接転写方式カードプリンタおよび搬送ズレの修正方法
JP2018162161A (ja) * 2017-03-24 2018-10-18 株式会社Ｓｃｒｅｅｎホールディングス 基材処理装置および検出方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130063146A (ko) * 2011-12-06 2013-06-14 주식회사 에스에프에이 인쇄장치
KR101409488B1 (ko) * 2013-04-03 2014-06-18 한국기계연구원 속도, 장력, 중첩정밀도의 독립제어 가능한 롤투롤 인쇄전자 공정 시스템 제어방법
KR20180009913A (ko) * 2016-07-20 2018-01-30 주식회사 토바 롤투롤 박판 초정밀 3차원 위치 제어 시스템
JP2018083332A (ja) * 2016-11-22 2018-05-31 凸版印刷株式会社 間接転写方式カードプリンタおよび搬送ズレの修正方法
JP2018162161A (ja) * 2017-03-24 2018-10-18 株式会社Ｓｃｒｅｅｎホールディングス 基材処理装置および検出方法

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