WO2021107055A1 - Wheel support structure, holder, holder unit, and holder assembly - Google Patents

Wheel support structure, holder, holder unit, and holder assembly Download PDF

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Publication number
WO2021107055A1
WO2021107055A1 PCT/JP2020/044114 JP2020044114W WO2021107055A1 WO 2021107055 A1 WO2021107055 A1 WO 2021107055A1 JP 2020044114 W JP2020044114 W JP 2020044114W WO 2021107055 A1 WO2021107055 A1 WO 2021107055A1
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WO
WIPO (PCT)
Prior art keywords
wheel
holder
support
state
scribing
Prior art date
Application number
PCT/JP2020/044114
Other languages
French (fr)
Japanese (ja)
Inventor
康智 岡島
良太 阪口
一磨 長谷田
Original Assignee
三星ダイヤモンド工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三星ダイヤモンド工業株式会社 filed Critical 三星ダイヤモンド工業株式会社
Priority to KR1020227017425A priority Critical patent/KR20220104712A/en
Priority to JP2021561519A priority patent/JPWO2021107055A1/ja
Priority to CN202080081645.6A priority patent/CN114728437A/en
Publication of WO2021107055A1 publication Critical patent/WO2021107055A1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/22—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
    • B28D1/24—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising with cutting discs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
    • B28D7/04—Accessories specially adapted for use with machines or devices of the preceding groups for supporting or holding work or conveying or discharging work
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/027—Scoring tool holders; Driving mechanisms therefor
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/10—Glass-cutting tools, e.g. scoring tools
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/10—Glass-cutting tools, e.g. scoring tools
    • C03B33/105—Details of cutting or scoring means, e.g. tips
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Definitions

  • the present invention relates to a wheel support structure, a holder, a holder unit, and a holder assembly.
  • a scribe device is used for scribe processing of workpieces such as brittle material substrates.
  • the scribe device scans the scribing wheel against the workpiece to form a scribe line on the workpiece.
  • Patent Document 1 describes an example of a conventional scribe device.
  • An object of the present invention is to provide a wheel support structure, a holder, a holder unit, and a holder assembly that contribute to improving the quality of the workpiece.
  • the wheel support structure includes a central support portion that supports the scribing wheel so that the scribing wheel rotates around a rotation center axis parallel to the width direction of the holder, and a center surface of the scribing wheel with respect to the rotation center axis. It is provided with a side support portion that supports the side surface of the scribing wheel that is tilted.
  • wheel side surface wheel center surface
  • tilted state means the state of the scribing wheel in which the center surface of the wheel is tilted with respect to the center axis of rotation.
  • pressing torque When an inclined scribing wheel is pressed against an workpiece, the torque that rotates the scribing wheel so that the wheel center surface approaches a state orthogonal to the rotation center axis (hereinafter referred to as "pressing torque") acts on the scribing wheel. To do.
  • the side of the wheel is pressed against the side support. Since the wheel side surface of the tilted scribing wheel on which the pressing torque acts is supported by the side support portion, the state of the scribing wheel with respect to the holder is stable. This contributes to the improvement of the quality of the work piece.
  • the side surface support portion includes a support surface that contacts the side surface.
  • the support surface defines an arrangement space in which the scribing wheel is arranged.
  • the support surface has a role of supporting the side surface of the wheel and a role of defining the arrangement space, so that the configuration of the wheel support structure is simplified.
  • the support surface is inclined with respect to the front-rear direction of the holder.
  • the function of the side support portion that supports the side surface of the scribing wheel in the inclined state is realized, and the configuration of the wheel support structure is simplified.
  • the side surface includes a first wheel side surface and a second wheel side surface, and the side surface support portion supports the first wheel side surface and the second wheel side surface.
  • the side surface of each wheel is supported by the side support portion, so that the state of the scribing wheel is further stabilized.
  • the side surface support portion is located on one of the front and rear sides of the first wheel side surface with respect to the rotation center axis, and the rotation center of the second wheel side surface. Supports a portion located on the other side of the front and the rear with respect to the shaft.
  • the side surface of each wheel is supported so as to receive the pressing torque on both sides of the scribing wheel, so that the state of the scribing wheel is further stabilized.
  • a central support portion that supports the scribing wheel so that the scribing wheel rotates around a rotation center axis parallel to or intersecting the width direction of the holder, and a center surface of the scribing wheel are the rotation center axes.
  • a side support portion that supports the side surface of the scribing wheel that is inclined with respect to the side surface is provided, the side surface support portion includes a support surface that contacts the side surface, and the support surface is inclined with respect to the front-rear direction of the holder.
  • the wheel side surface of the tilted scribing wheel on which the pressing torque acts is supported by the side support portion, so that the posture of the scribing wheel with respect to the holder is stable. This contributes to the improvement of the quality of the work piece.
  • the holder according to the present invention has the wheel support structure.
  • the holder unit according to the present invention includes the holder, the scribing wheel, and a pin that supports the scribing wheel.
  • the holder assembly according to the present invention includes the holder unit and a holder joint that connects the holder unit to the holder joint holder so that the holder unit can rotate with respect to the holder joint holder.
  • the wheel support structure, holder, holder unit, and holder assembly according to the present invention contribute to the improvement of the quality of the workpiece.
  • FIG. 2 is a cross-sectional view of the holder unit. Side view of the holder assembly (1). Side view (2) of the holder assembly. Side view of the holder assembly (3).
  • the figure (1) which shows the 1st form of a wheel support structure.
  • the figure (2) which shows the 1st form of a wheel support structure.
  • FIG. 3 shows a first form of a wheel support structure.
  • the figure (1) which shows the 2nd form of a wheel support structure.
  • the figure (2) which shows the 2nd form of a wheel support structure.
  • FIG. 3 shows a second form of the wheel support structure.
  • FIG. 1 which shows the 3rd form of a wheel support structure.
  • the figure (2) which shows the 3rd form of a wheel support structure.
  • the figure (1) which shows the 4th form of a wheel support structure.
  • FIG. 2 shows a fourth form of the wheel support structure.
  • FIG. 3 shows a fourth form of the wheel support structure.
  • Front view of the holder. Rear view of the holder.
  • the scribe head 10 shown in FIGS. 1 and 2 is used for scribe processing of a work piece.
  • the workpiece includes, for example, a substrate.
  • the substrate includes, for example, a brittle material substrate.
  • the brittle material substrate includes, for example, at least one of a glass substrate, a ceramic substrate, a silicon substrate, a compound semiconductor substrate, a sapphire substrate, and a quartz substrate.
  • the ceramic substrate includes, for example, at least one of low temperature fired ceramics and high temperature fired ceramics.
  • the scribe head 10 is incorporated in a scribe processing apparatus for scribe processing an workpiece.
  • the scribe processing device includes a scanning device and a scribe head 10. The scribe head 10 is attached to the scanning device.
  • the scanning device is configured so that the position of the scribe head 10 with respect to the workpiece can be arbitrarily changed.
  • the scanning apparatus includes at least one of a first scanning section and a second scanning section.
  • the first scanning unit changes the position of the scribe head 10 in a direction parallel to the work surface of the work piece.
  • the second scanning unit changes the position of the scribe head 10 in a direction perpendicular to the work surface of the work piece.
  • the scribe head 10 includes a base 11, a connecting structure 20, a holder joint holder 40, and a holder assembly 50.
  • the base 11 is attached to the scanning device. The relationship between the base 11 and the scanning device will be illustrated. In the first example, the base 11 is attached to the first scanning portion of the scanning device. In the second example, the base 11 is attached to the second scanning portion of the scanning device.
  • the holder joint holder 40 is attached to the base 11 via the connecting structure 20. The configuration of the connecting structure 20 will be illustrated. In the first example, the connecting structure 20 connects the holder joint holder 40 to the base 11 so that the holder joint holder 40 can move in a predetermined direction with respect to the base 11.
  • the predetermined direction includes, for example, at least one of a direction perpendicular to the work surface of the work piece and a direction parallel to the work surface of the work piece.
  • the connecting structure 20 connects the holder joint holder 40 to the base 11 so that the holder joint holder 40 cannot move with respect to the base 11.
  • the connecting structure 20 includes a rail 21 and a slider 22.
  • the rail 21 is attached to one of the base 11 and the holder joint holder 40.
  • the slider 22 is attached to the other of the base 11 and the holder joint holder 40.
  • the rail 21 is attached to the base 11.
  • the slider 22 is attached to the holder joint holder 40.
  • the connecting structure 20 allows relative movement of the base 11 and the holder joint holder 40, for example, in a direction perpendicular to the work surface of the work piece.
  • the holder joint holder 40 is configured so that a state in which the holder assembly 50 is held and a state in which the holder assembly 50 is not held can be selected.
  • the holder assembly 50 includes a holder joint 100 and a holder unit 200.
  • the holder joint 100 supports the holder unit 200 and is configured so that it can be attached to and detached from the holder joint holder 40.
  • the holder unit 200 includes a holder 300 and a scribing wheel 800.
  • the holder 300 is coupled to the holder joint 100.
  • the scribing wheel 800 is supported by the holder 300 so that it can rotate with respect to the holder 300.
  • the holder unit 200 is connected to the holder joint holder 40 via the holder joint 100.
  • the scribe head 10 further includes a load adjusting unit 30.
  • the load adjusting unit 30 adjusts the force for pressing the scribing wheel 800 against the workpiece.
  • the load adjusting unit 30 includes an actuator 31 and a bracket 32.
  • the bracket 32 is attached to the base 11.
  • the actuator 31 is attached to the bracket 32.
  • the actuator 31 pushes, for example, the holder joint holder 40, the rail 21 attached to the holder joint holder 40, or the slider 22 attached to the holder joint holder 40 toward the workpiece.
  • the actuator 31 includes, for example, at least one of a power cylinder, a solenoid, an electric motor, a servomotor, and a linear actuator.
  • the power cylinder includes, for example, at least one of a hydraulic cylinder, a pneumatic cylinder, a hydraulic cylinder, and an electric cylinder.
  • the scribing wheel 800 includes a main body 810 and a cutting edge portion 820.
  • the basic structure of the scribing wheel 800 is classified into, for example, a first structure and a second structure.
  • the entire scribing wheel 800 including the main body 810 and the cutting edge portion 820 is formed of a single high hardness material.
  • the scribing wheel 800 includes a main body 810 formed of a high hardness material and a cutting edge portion 820 formed of a high hardness material different from the main body 810.
  • the high hardness material include cemented carbide, polycrystalline diamond, and single crystal diamond.
  • the polycrystalline diamond is, for example, a diamond sintered body (Poly-Crystalline Diamond, abbreviated as PCD) or a nano-polycrystalline diamond (Nano-Polycrystalline Diamond, abbreviated as NPD).
  • the main body 810 is provided around the wheel central axis 801 which is the central axis of the scribing wheel 800.
  • the direction along the wheel central axis 801 is referred to as the axial direction of the scribing wheel 800.
  • the wheel center surface 802, which is the center surface of the scribing wheel 800, is defined to pass through the center of the scribing wheel 800 in the axial direction of the scribing wheel 800 and be orthogonal to the wheel center axis 801.
  • the scribing wheel 800 is symmetrical or asymmetric with respect to the wheel center plane 802. In the example shown in FIG. 3, the scribing wheel 800 is symmetrical with respect to the wheel center plane 802.
  • the shape of the main body 810 is a ring.
  • the cutting edge portion 820 is provided on the outer side of the scribing wheel 800 in the radial direction with respect to the main body 810.
  • the blade edge portion 820 constitutes the blade of the scribing wheel 800.
  • the shape of the cutting edge portion 820 is a ring.
  • the thickness of the cutting edge portion 820 becomes thinner toward the outer side in the radial direction of the scribing wheel 800.
  • a ridge line 821 corresponding to the circumference of the scribing wheel 800 is formed at the tip of the cutting edge portion 820.
  • the main body 810 includes an inner peripheral surface 811, a wheel hole 812, a chamfer 813, and a wheel side surface 830.
  • the inner peripheral surface 811 defines the wheel hole 812.
  • the wheel hole 812 penetrates the main body 810 in the axial direction of the scribing wheel 800.
  • the wheel hole 812 is circular.
  • the chamfer 813 is formed around the wheel hole 812.
  • the wheel side surface 830 includes a first wheel side surface 831 and a second wheel side surface 832. In one example, the side surfaces 831 and 832 of each wheel are flat.
  • the wheel side surfaces 831 and 832 are parallel to the wheel center surface 802.
  • the first wheel side surface 831 is provided on one side of the scribing wheel 800 in the axial direction with respect to the wheel center surface 802.
  • the second wheel side surface 832 is provided on the other side of the scribing wheel 800 in the axial direction with respect to the wheel center surface 802.
  • a boundary portion 840 is formed between the outer circumference of the wheel side surface 830 and the cutting edge portion 820.
  • the boundary portion 840 is an edge formed between the wheel side surface 830 and the outer surface of the cutting edge portion 820, or a portion corresponding thereto.
  • the holder 300 includes a holder body 400 and a wheel support structure 500.
  • the holder body 400 is connected to the holder joint holder 40 via the holder joint 100.
  • the wheel support structure 500 includes a central support portion 600.
  • the center support portion 600 defines the wheel rotation center axis 601 which is the rotation center axis of the scribing wheel 800.
  • the central support portion 600 supports the scribing wheel 800 so that the scribing wheel 800 rotates around the wheel rotation center axis 601.
  • the wheel rotation center axis 601 is parallel to the width direction of the holder 300 or intersects the width direction of the holder 300 in a plan view of the holder unit 200, for example.
  • the central support 600 includes a pin 610 and a pin support 620.
  • pin 610 is a cylinder.
  • the pin 610 includes a first end 611, a second end 612 supported by the pin support 620, and an intermediate 613 supporting the scribing wheel 800.
  • the pin support portion 620 is provided on the holder body 400.
  • the central axis of the pin 610 defines the wheel rotation central axis 601.
  • the relationship between the holder body 400 and the pin support portion 620 will be illustrated.
  • the holder body 400 and the pin support portion 620 form a single object.
  • the individually configured holder body 400 and the pin support portion 620 are coupled.
  • the pin support portion 620 includes a first support portion 621, a second support portion 622, and an arrangement surface 630.
  • An arrangement space 310 in which the scribing wheel 800 is arranged is formed between the first support portion 621 and the second support portion 622.
  • the placement surface 630 defines the placement space 310.
  • the arrangement surface 630 includes a first arrangement surface 631 and a second arrangement surface 632.
  • the first arrangement surface 631 is provided on the first support portion 621.
  • the first arrangement surface 631 is located on the first side portion 311 of the arrangement space 310.
  • the second arrangement surface 632 is provided on the second support portion 622.
  • the second arrangement surface 632 is located on the second side portion 312 of the arrangement space 310.
  • the first support portion 621 is formed with a first pin insertion hole 621A into which the first end portion 611 of the pin 610 is inserted.
  • the first pin insertion hole 621A penetrates the first support portion 621.
  • the second support portion 622 is formed with a second pin insertion hole 622A into which the second end portion 612 of the pin 610 is inserted.
  • the second pin insertion hole 622A penetrates the second support portion 622.
  • the central axes of the pin insertion holes 621A and 622A are coaxial.
  • the scribing wheel 800 is arranged in the arrangement space 310.
  • the pin 610 is inserted into the wheel hole 812, the first pin insertion hole 621A, and the second pin insertion hole 622A, and is supported by the support portions 621 and 622, respectively.
  • the scribing wheel 800 is supported by the intermediate portion 613 of the pin 610.
  • the fit between the pin 610 and the scribing wheel 800 is a clearance fit.
  • the fit between the ends 611, 612 of the pin 610 and the pin insertion holes 621A, 622A is a clearance fit, an intermediate fit, or a tight fit.
  • a clearance 602 is formed between the inner peripheral surface 811 of the scribing wheel 800 and the outer peripheral surface 614 of the intermediate portion 613 of the pin 610.
  • the relationship between the wheel rotation center axis 601 and the width direction of the holder 300 in the plan view of the holder unit 200 is mainly the center axis of the pin insertion holes 621A and 622A and the width direction of the holder 300.
  • the central axes of the pin insertion holes 621A and 622A are parallel to the width direction of the holder 300.
  • the wheel rotation center axis 601 is parallel to the width direction of the holder 300.
  • the central axes of the pin insertion holes 621A and 622A intersect in the width direction of the holder 300.
  • the wheel rotation center axis 601 intersects in the width direction of the holder 300.
  • the outer openings of the pin insertion holes 621A and 622A are provided with a closing portion 640 for preventing the pin 610 from falling off.
  • the configuration of the closed portion 640 will be illustrated.
  • the closing portion 640 is provided outside the pin supporting portion 620.
  • the closing portion 640 is provided in the pin insertion holes 621A and 622A, respectively.
  • the relationship between the closing portion 640 and the pin supporting portion 620 will be illustrated.
  • the closing portion 640 is configured to be attached to and detached from the pin support portion 620.
  • the closing portion 640 is fixed to the pin support portion 620 by the fixing means.
  • Fixing means include, for example, at least one of caulking, bonding, and welding.
  • the central support portion 600 includes a support shaft and a shaft support portion.
  • the shaft support portion is provided on the holder body 400.
  • the shaft support includes a first support 621 and a second support 622.
  • An arrangement space 310 in which the scribing wheel 800 is arranged is formed between the first support portion 621 and the second support portion 622.
  • the support shaft includes a first support shaft provided on the first support portion 621 and a second support shaft provided on the second support portion 622.
  • the first support shaft is integrally formed with the first support portion 621.
  • the second support shaft is integrally formed with the second support portion 622.
  • Each support shaft is inserted into the wheel hole 812 of the scribing wheel 800.
  • the central axis of each support shaft defines the wheel rotation central shaft 601.
  • the holder body 400 and the pin support portion 620 or the shaft support portion form a single object.
  • the individually configured holder body 400 is coupled to the pin support portion 620 or the shaft support portion.
  • the holder body 400 and the pin support portion 620 or the shaft support portion may be inseparable or separable.
  • FIG. 7 shows an example of the first form.
  • the holder 300 and the holder joint 100 are individually configured so as to be detachable.
  • FIG. 8 shows a first example of the second form.
  • FIG. 9 shows a second example of the second form.
  • the holder joint 100 includes the base 110.
  • the base 110 is attached to the holder joint holder 40.
  • the base 110 includes a bearing 120 and a shaft 130.
  • the bearing portion 120 supports the shaft 130.
  • the shaft 130 is provided on the holder body 400. The relationship between the shaft 130 and the holder body 400 will be illustrated.
  • the shaft 130 and the holder body 400 form a single object.
  • the individually configured shaft 130 and the holder body 400 are coupled.
  • the bearing portion 120 includes one or more radial bearings 121.
  • the bearing portion 120 further includes at least one of the case 122, the stopper 140, and the spacer in addition to the configuration of the first example.
  • FIG. 7 shows a bearing portion 120 of the second example including two radial bearings 121, a case 122, and a stopper 140.
  • the inner ring 121A of the radial bearing 121 is fixed to the shaft 130.
  • the case 122 houses the radial bearing 121.
  • the outer ring 121B of the radial bearing 121 is fixed to the case 122.
  • the shaft 130, the inner ring 121A, and the holder 300 rotate about the central axis LA of the shaft 130 with respect to the outer ring 121B and the case 122.
  • the bearing portion 120 includes a spacer
  • a spacer is provided between one radial bearing 121 and the other radial bearing 121. The spacer is fixed to the shaft 130.
  • the stopper 140 includes, for example, a first stopper 141 and a second stopper 142.
  • the first stopper 141 is provided at the tip of the shaft 130.
  • the first stopper 141 includes a first regulation surface 141A that regulates the movement of the radial bearing 121.
  • the second stopper 142 is provided at the base of the shaft 130.
  • the second stopper 142 includes a second regulation surface 142A that regulates the movement of the radial bearing 121.
  • the configuration of the first stopper 141 will be illustrated.
  • the first stopper 141 includes a threaded fastener that meshes with the female thread portion of the shaft 130. Threaded fasteners include, for example, screws or bolts.
  • the head of the threaded fastener constitutes the first regulatory surface 141A.
  • the end surface of the inner ring 121A of one of the radial bearings 121 comes into contact with the first regulation surface 141A.
  • the configuration of the second stopper 142 will be illustrated.
  • the second stopper 142 includes a flange provided around the shaft 130.
  • the end face of the flange constitutes the second regulation surface 142A.
  • the end surface of the inner ring 121A of the other radial bearing 121 comes into contact with the second regulation surface 142A.
  • the holder joint 100 includes a base 110 and a holder mounting portion 150.
  • the holder mounting portion 150 includes a base 160.
  • the base 160 includes, for example, a first plate 161 and a second plate 162.
  • the first plate 161 determines the position of the holder 300 with respect to the direction along the central axis LA of the shaft 130.
  • the second plate 162 determines the position of the holder 300 with respect to the direction orthogonal to the central axis LA of the axis 130.
  • the shaft 130 is provided on the base 160. The relationship between the shaft 130 and the base 160 will be illustrated.
  • the shaft 130 and the base 160 form a single object.
  • the individually configured shaft 130 and the base 160 are coupled.
  • the shaft 130 and the base 160 may be inseparable or separable.
  • the shaft 130 is provided on, for example, the first plate 161.
  • the holder joint 100 includes a base 110 and a holder mounting portion 150.
  • the holder mounting portion 150 includes a socket 170.
  • the socket 170 includes, for example, an arrangement space 170A.
  • the arrangement space 170A is formed so that the holder body 400 can be arranged.
  • the shaft 130 is provided in the socket 170. The relationship between the shaft 130 and the socket 170 will be illustrated.
  • the shaft 130 and the socket 170 form a single object.
  • the individually configured shaft 130 and the socket 170 are coupled.
  • the shaft 130 and the socket 170 may be inseparable or separable.
  • the bearing portion 120 included in the holder 300 and the holder joint 100 of the second form shown in FIGS. 8 and 9 is configured in the same manner as the bearing portion 120 included in the holder 300 and the holder joint 100 of the first form, for example.
  • the shaft 130, the inner ring 121A, the holder mounting portion 150, and the holder 300 rotate around the central axis LA of the shaft 130 with respect to the outer ring 121B and the case 122.
  • the wheel central axis 801 and the contact point between the scribing wheel 800 and the surface to be machined are located on the central axis LB of the holder 300.
  • the relationship between the central axis LA of the shaft 130 and the wheel central axis 801 will be illustrated.
  • a trail is set between the central axis LA of the shaft 130 and the wheel central axis 801.
  • no trail is set between the central axis LA of the shaft 130 and the wheel central axis 801.
  • the trail is the distance between the intersection of the central axis LA of the shaft 130 and the work surface and the contact point between the scribing wheel 800 and the work piece.
  • the central axis LA of the shaft 130 and the central axis LB of the holder 300 are parallel to each other.
  • the distance between the central axis LA of the shaft 130 and the central axis LB of the holder 300 corresponds to a trail.
  • the trail is set, when the wheel central axis 801 is located behind the central axis LA of the shaft 130 in the scanning direction DS of the scribing wheel 800, the straightness of the scribing wheel 800 is increased.
  • the holder assembly 50 When the holder assembly 50 includes the holder 300 and the holder joint 100 of the second form, the holder assembly 50 further includes a connecting structure 210.
  • the connecting structure 210 connects the holder joint 100 and the holder 300.
  • the connecting structure 210 is at least a mechanical coupling portion 211 that connects the holder joint 100 and the holder 300 by a mechanical coupling method and a magnetic coupling portion 212 that connects the holder joint 100 and the holder 300 by a magnetic coupling method. Including one.
  • the connecting structure 210 includes a mechanical coupling portion 211.
  • the configuration of the mechanical coupling portion 211 will be illustrated.
  • the mechanical coupling portion 211 connects the holder mounting portion 150 and the holder main body 400 with a screwed fastener. Threaded fasteners include screws or bolts.
  • the mechanical coupling portion 211 connects the holder mounting portion 150 and the holder main body 400 by a fitting portion.
  • the fitting portion includes a first fitting portion provided on one of the holder mounting portion 150 and the holder main body 400, and a second fitting portion provided on the other side of the holder mounting portion 150 and the holder main body 400.
  • FIG. 7 shows the mechanical coupling portion 211 of the first example.
  • the mechanical coupling portion 211 includes a female screw portion provided in the holder mounting portion 150, a through hole provided in the holder main body 400, and a threaded fastener.
  • the threaded fastener is inserted into the through hole of the holder body 400 and meshes with the female threaded portion of the holder mounting portion 150.
  • the holder body 400 is fixed to the holder mounting portion 150 by the screwed fastener.
  • the connecting structure 210 includes a magnetic coupling portion 212.
  • the configuration of the magnetic coupling portion 212 will be illustrated.
  • the magnetic coupling portion 212 includes a permanent magnet provided in the socket 170 and a magnetic material provided in the holder body 400.
  • the magnetic coupling portion 212 includes a magnetic material provided in the socket 170 and a permanent magnet provided in the holder body 400.
  • the magnetic coupling portion 212 includes a permanent magnet provided in the socket 170 and a permanent magnet provided in the holder body 400.
  • the holder 300 is held in the socket 170 by the magnetic force acting between the permanent magnet and the magnetic material or the magnetic force acting between the permanent magnet and the permanent magnet.
  • the holder mounting portion 150 further includes a holder regulating portion 180.
  • the holder regulating portion 180 contacts the holder 300 so that the position of the holder 300 with respect to the socket 170 is stable.
  • the holder regulating unit 180 includes, for example, a pin 181.
  • the pin 181 is provided in the arrangement space 170A. Pin 181 is supported by socket 170.
  • the holder 300 further includes an inclined surface 330.
  • the inclined surface 330 is inclined with respect to the central axis LB of the holder 300 in the side view of the holder 300.
  • the inclined surface 330 includes a first end portion 331 and a second end portion 332 with respect to the direction along the central axis LB of the holder 300.
  • the first end 331 is farther from the scribing wheel 800 than the second end 332.
  • the inclined surface 330 is inclined so that the first end portion 331 is closer to the central axis LB of the holder 300 than the second end portion 332.
  • the inclined surface 330 comes into contact with the pin 181.
  • the contact between the inclined surface 330 and the pin 181 determines the position of the holder 300 with respect to the socket 170 in the direction along the central axis LB of the holder 300.
  • a force in a direction orthogonal to the central axis LA of the shaft 130 acts on the holder 300.
  • a part of the outer peripheral surface of the holder body 400 is pressed against the inner peripheral surface of the socket 170.
  • a first reference surface 301 and a second reference surface 302 are defined.
  • the first reference surface 301 is parallel to the first axis that defines the height direction of the holder 300 and the second axis that defines the front-rear direction of the holder 300.
  • the second reference surface 302 is parallel to the first axis that defines the height direction of the holder 300 and the third axis that defines the width direction of the holder 300.
  • the front-rear direction of the holder 300 is orthogonal to the height direction of the holder 300.
  • the width direction of the holder 300 is orthogonal to the height direction of the holder 300.
  • the first axis and the second axis are orthogonal to each other.
  • the first axis and the third axis are orthogonal to each other.
  • the second axis and the third axis are orthogonal to each other.
  • the first reference plane 301 is defined at the center of the holder 300 in the width direction.
  • the second reference surface 302 is defined at the center of the holder 300 in the front-rear direction.
  • the central axis LB of the holder 300 is parallel to the first axis.
  • the first reference plane 301 and the second reference plane 302 are orthogonal to each other.
  • first reference plane 301 and the second reference plane 302 will be referred to as follows.
  • the region in front of the second reference surface 302 in the front-rear direction of the holder 300 is referred to as "front region RA".
  • the region behind the second reference surface 302 in the front-rear direction of the holder 300 is referred to as a "rear region RB”.
  • One region with respect to the first reference plane 301 in the width direction of the holder 300 is referred to as a "first lateral region RC”.
  • second lateral region RD One region with respect to the first reference plane 301 in the width direction of the holder 300.
  • the first lateral region RC is the region where the first side portion 311 of the arrangement space 310 is located with respect to the first reference surface 301.
  • the second side region RD is an region in which the second side portion 312 of the arrangement space 310 is located with respect to the first reference surface 301.
  • the wheel support structure 500 further includes a side support portion 700.
  • the side support portion 700 supports the wheel side surface 830 of the inclined scribing wheel 800.
  • the tilted state of the scribing wheel 800 is a state in which the wheel center surface 802 is tilted with respect to the wheel rotation center axis 601 in the plan view of the holder unit 200.
  • the wheel side surface 830 includes a contact portion 830A and a non-contact portion 830B.
  • the contact portion 830A is a portion that comes into contact with the side surface support portion 700 when the scribing wheel 800 is stationary or the scribing wheel 800 is rotated.
  • the contact portion 830A includes a radial outer portion of the wheel side surface 830.
  • the outer portion in the radial direction includes a portion adjacent to the boundary portion 840.
  • the non-contact portion 830B is a portion that does not come into contact with the side surface support portion 700 in either a stationary state of the scribing wheel 800 or a rotated state of the scribing wheel 800.
  • the non-contact portion 830B includes a radial inner portion of the wheel side surface 830.
  • the inner portion in the radial direction includes at least a portion adjacent to the chamfer 813.
  • the state in which the scribing wheel 800 is not in contact with the workpiece is referred to as a “reference state”.
  • the state before the scribing wheel 800 is pressed against the workpiece and scanning is started is referred to as an "initial contact state”.
  • the side support portion 700 includes the support surface 710.
  • the support surface 710 supports the wheel side surface 830 of the inclined scribing wheel 800.
  • the support surface 710 defines a placement space 310.
  • the arrangement surface 630 of the pin support portion 620 includes the support surface 710.
  • the support surface 710 includes a first support surface 711 located on the first side portion 311 of the arrangement space 310 and a second support surface 712 located on the second side portion 312 of the arrangement space 310.
  • the first support surface 711 is included in the first arrangement surface 631.
  • the second support surface 712 is included in the second arrangement surface 632.
  • the wheel rotation center axis 601 is parallel to the width direction of the holder 300.
  • the support surface 710 is inclined with respect to the front-rear direction of the holder 300 in the plan view of the holder unit 200.
  • the state in which the support surface 710 is inclined with respect to the front-rear direction of the holder 300 means a state in which at least one of the support surfaces 711 and 712 is inclined with respect to the front-rear direction of the holder 300. In the illustrated example, both the support surfaces 711 and 712 are inclined with respect to the front-rear direction of the holder 300.
  • the first support surface 711 is inclined so as to approach the first reference surface 301 in the front region RA.
  • the second support surface 712 is inclined so as to be separated from the first reference surface 301 in the front region RA.
  • the first support surface 711 and the second support surface 712 are parallel to each other.
  • the distance between the first support surface 711 and the second support surface 712 is larger than the thickness of the main body 810 of the scribing wheel 800.
  • the reference state of the wheel support structure 500 of the first form includes, for example, the first to sixth reference states.
  • the wheel center surface 802 is inclined with respect to the wheel rotation center axis 601.
  • the scribing wheel 800 is in an inclined state.
  • the first support surface 711 and the first wheel side surface 831 face each other in the width direction of the holder 300.
  • the second support surface 712 and the second wheel side surface 832 face each other in the width direction of the holder 300.
  • the wheel center surface 802 is inclined with respect to the front-rear direction of the holder 300 and is parallel to the support surface 710.
  • the first support surface 711 and the first wheel side surface 831 are parallel.
  • the contact portion 830A and the non-contact portion 830B of the first wheel side surface 831 do not come into contact with the first support surface 711.
  • a space is formed between the first support surface 711 and the first wheel side surface 831.
  • the second support surface 712 and the second wheel side surface 832 are parallel.
  • the contact portion 830A and the non-contact portion 830B of the second wheel side surface 832 do not come into contact with the second support surface 712.
  • a space is formed between the second support surface 712 and the second wheel side surface 832.
  • the first wheel side surface 831 contacts the first support surface 711, and the second wheel side surface 832 does not contact the second support surface 712. Other points are the same as the first reference state.
  • the second wheel side surface 832 is in contact with the second support surface 712, and the first wheel side surface 831 is not in contact with the first support surface 711. Other points are the same as the first reference state.
  • the support surface 710 and the wheel side surface 830 are non-parallel, and the wheel side surface 830 does not come into contact with the support surface 710. Other points are the same as the first reference state.
  • the relationship between the wheel side surface 830 and the support surface 710 is different from the first to fourth reference states, and as in the sixth reference state below, the side surfaces 831 and 832 are the support surfaces 711 and 712, respectively. It is also different from the state of contact with.
  • the wheel center surface 802 is tilted with respect to the wheel rotation center axis 601.
  • the scribing wheel 800 is in an inclined state.
  • the first support surface 711 and the first wheel side surface 831 face each other in the width direction of the holder 300.
  • the second support surface 712 and the second wheel side surface 832 face each other in the width direction of the holder 300.
  • the wheel center surface 802 is inclined with respect to the front-rear direction of the holder 300 and the support surface 710.
  • the first support surface 711 and the first wheel side surface 831 are non-parallel. A part of the contact portion 830A of the first wheel side surface 831 comes into contact with the first support surface 711 in the front region RA. The other portion of the contact portion 830A of the first wheel side surface 831 and the non-contact portion 830B do not come into contact with the first support surface 711. A space is formed between the other portion of the contact portion 830A of the first wheel side surface 831 and the non-contact portion 830B and the first support surface 711.
  • the second support surface 712 and the second wheel side surface 832 are non-parallel. A part of the contact portion 830A of the second wheel side surface 832 comes into contact with the second support surface 712 in the rear region RB. Other parts of the contact portion 830A and the non-contact portion 830B of the second wheel side surface 832 do not come into contact with the second support surface 712. A space is formed between the other portion of the contact portion 830A of the second wheel side surface 832 and the non-contact portion 830B and the second support surface 712.
  • the scribing wheel 800 in the reference state is pressed against the workpiece, and the state of the scribing wheel 800 changes from the reference state to the initial contact state.
  • the scribing wheel 800 receives a reaction force from the work piece. Due to this reaction force, the pressing torque, which is the torque for rotating the scribing wheel 800 in the first rotation direction around the central axis parallel to the wheel center surface 802, acts on the scribing wheel 800.
  • the first rotation direction is the direction in which the scribing wheel 800 rotates so that the wheel center surface 802 approaches a state orthogonal to the wheel rotation center axis 601.
  • the inclination of the wheel center surface 802 with respect to the front-rear direction of the holder 300 becomes small.
  • the state of the scribing wheel 800 is substantially the same as the sixth reference state shown in FIG. 11 in the initial contact state.
  • the scribing wheel 800 is the first in the transition to the initial contact state until the side surfaces 831 and 832 of the wheels come into contact with the corresponding support surfaces 711 and 712. Rotate in the direction of rotation.
  • the scribing wheel 800 When transitioning from the sixth reference state shown in FIG. 11 to the initial contact state, the scribing wheel 800 does not substantially rotate in the first rotation direction.
  • the state of the scribing wheel 800 In the initial contact state, the state of the scribing wheel 800 is an inclined state, and the wheel side surface 830 is pressed against the support surface 710 by the pressing torque acting on the scribing wheel 800.
  • the contact portion 830A of the first wheel side surface 831 is pressed against the first support surface 711.
  • the contact portion 830A of the second wheel side surface 832 is pressed against the second support surface 712.
  • the first support surface 711 supports the first wheel side surface 831. In one example, the first support surface 711 supports a portion of the first wheel side surface 831 located on either the front side or the rear side with respect to the second reference surface 302. In the illustrated example, the first support surface 711 supports a portion of the contact portion 830A of the first wheel side surface 831 that is located in the front region RA. In another example, the first support surface 711 supports a portion of the contact portion 830A of the first wheel side surface 831 that is located in the rear region RB.
  • the second support surface 712 supports the second wheel side surface 832.
  • the second support surface 712 supports a portion of the second wheel side surface 832 located on the other side of the front and rear of the second reference surface 302.
  • the second support surface 712 supports a portion of the contact portion 830A of the second wheel side surface 832 that is located in the rear region RB.
  • the second support surface 712 supports a portion of the contact portion 830A of the second wheel side surface 832 that is located in the front region RA.
  • the state of the scribing wheel 800 with respect to the holder 300 is stable.
  • a portion of the first wheel side surface 831 located on one of the front side and the rear side with respect to the second reference surface 302 is supported by the first support surface 711 with respect to the second reference surface 302 of the second wheel side surface 832.
  • the state of the scribing wheel 800 with respect to the holder 300 is more stable.
  • the scanning direction DS is, for example, a direction parallel to the front-rear direction of the holder 300 in the reference state.
  • the scribing wheel 800 rotates around the wheel rotation center axis 601 and receives a reaction force from the workpiece.
  • the torque for rotating the holder unit 200 in the second rotation direction (hereinafter referred to as "scanning torque") around the central axis LA of the shaft 130 of the holder joint 100 is the holder.
  • the second rotation direction is the direction in which the holder unit 200 rotates so that the wheel center surface 802 approaches a state parallel to the scanning direction DS in the plan view of the holder unit 200.
  • the wheel center surface 802 is tilted with respect to the front-rear direction of the holder 300 in the initial contact state
  • the wheel center surface 802 is tilted with respect to the scanning direction DS immediately after the transition from the initial contact state to the scanning state.
  • the holder unit 200 rotates in the second rotation direction due to the scanning torque, and the wheel center surface 802 becomes parallel to the scanning direction DS as shown in FIG.
  • the wheel center surface 802 is parallel to the scanning direction DS when transitioning from the initial contact state to the scanning state.
  • the scribing wheel 800 receives a reaction force from the workpiece, the torque at the time of pressing continuously acts on the scribing wheel 800, and the state in which the wheel side surface 830 is supported by the support surface 710 is maintained. Therefore, a slight change in the posture of the scribing wheel 800 during scanning of the scribing wheel 800 is suppressed, and the straightness of the scribing wheel 800 is improved. This contributes to the uniformity of the scribe line formed on the work piece and the improvement of the quality of the work piece.
  • FIGS. 10 to 2 In the second form of the wheel support structure 500 shown in FIGS. 13 to 15, the relationship between the width direction of the holder 300 and the wheel rotation center axis 601 in the plan view of the holder unit 200 is shown in FIGS. 10 to 2. It is different from the wheel support structure 500 of the form. Other points are substantially the same as those of the first form.
  • the central support portion 600 includes an inclined structure 650.
  • the inclined structure 650 is configured such that the wheel rotation center axis 601 is inclined with respect to the width direction of the holder 300 in the plan view of the holder unit 200.
  • the tilted structure 650 includes pins 610 and pin insertion holes 621A, 622A, respectively.
  • the first pin insertion hole 621A is formed in the first support portion 621 so that its central axis is inclined with respect to the width direction of the holder 300 in the plan view of the holder unit 200.
  • the second pin insertion hole 622A is formed in the second support portion 622 so that its central axis is inclined with respect to the width direction of the holder 300 in the plan view of the holder unit 200.
  • the central axes of the pin insertion holes 621A and 622A are coaxial.
  • the wheel rotation center axis 601 intersects the width direction of the holder 300 in the plan view of the holder unit 200.
  • the reference state of the wheel support structure 500 of the second form includes the first to sixth reference states as in the wheel support structure 500 of the first form.
  • FIG. 13 shows the first reference state in the wheel support structure 500 of the second form.
  • FIG. 14 shows a sixth reference state in the wheel support structure 500 of the second form.
  • Each reference state in the wheel support structure 500 of the second form conforms to the corresponding reference state in the wheel support structure 500 of the first form.
  • the state of the scribing wheel 800 changes from the reference state to the initial contact state. Regardless of the transition from any of the first to fifth reference states to the initial contact state, the state of the scribing wheel 800 is substantially the same as the sixth reference state shown in FIG. 14 in the initial contact state.
  • the transition from the reference state to the initial contact state in the wheel support structure 500 of the second form and the initial contact state conform to the corresponding states in the wheel support structure 500 of the first form.
  • the initial contact state transitions to the scanning state.
  • the wheel center surface 802 is parallel to the scanning direction DS as shown in FIG.
  • the transition from the initial contact state to the scanning state in the wheel support structure 500 of the second form and the scanning state conform to the corresponding states in the wheel support structure 500 of the first form.
  • the side support portion 700 includes the protrusion 720.
  • the protrusion 720 supports the wheel side surface 830 of the inclined scribing wheel 800.
  • the projecting portion 720 projects from the arrangement surface 630 toward the arrangement space 310.
  • the placement surface 630 is parallel to the front-back direction of the holder 300.
  • the distance between the first arrangement surface 631 and the second arrangement surface 632 is larger than the thickness of the main body 810 of the scribing wheel 800.
  • the protrusion 720 includes a first protrusion 721 located on the first side portion 311 of the arrangement space 310 and a second protrusion 722 located on the second side portion 312 of the arrangement space 310.
  • the first protrusion 721 is provided in a portion of the first arrangement surface 631 located in the front region RA.
  • the second protrusion 722 is provided on a portion of the second arrangement surface 632 located in the rear region RB.
  • the height of the first protrusion 721 with respect to the first arrangement surface 631 and the height of the second protrusion 722 with respect to the second arrangement surface 632 are equal to each other.
  • the reference state of the wheel support structure 500 of the third form includes, for example, the first to seventh reference states.
  • the wheel center surface 802 is tilted with respect to the wheel rotation center axis 601.
  • the scribing wheel 800 is in an inclined state.
  • the first arrangement surface 631 and the first wheel side surface 831 face each other in the width direction of the holder 300.
  • the second arrangement surface 632 and the second wheel side surface 832 face each other in the width direction of the holder 300.
  • the wheel center surface 802 is inclined with respect to the front-rear direction of the holder 300 and the arrangement surface 630.
  • the first arrangement surface 631 and the first wheel side surface 831 are non-parallel. A part of the contact portion 830A of the first wheel side surface 831 contacts the first protrusion 721 in the front region RA. The other portion of the contact portion 830A of the first wheel side surface 831 and the non-contact portion 830B do not come into contact with the first arrangement surface 631. A space is formed between the other portion of the contact portion 830A of the first wheel side surface 831 and the non-contact portion 830B and the first arrangement surface 631.
  • the second arrangement surface 632 and the second wheel side surface 832 are non-parallel. A part of the contact portion 830A of the second wheel side surface 832 comes into contact with the second protrusion 722 in the rear region RB. The other portion of the contact portion 830A of the second wheel side surface 832 and the non-contact portion 830B do not come into contact with the second arrangement surface 632. A space is formed between the other portion of the contact portion 830A of the second wheel side surface 832 and the non-contact portion 830B and the second arrangement surface 632.
  • the first wheel side surface 831 does not come into contact with the first protrusion 721.
  • Other points are the same as the first reference state.
  • the third reference state the first wheel side surface 831 does not come into contact with the first protrusion 721.
  • a part of the contact portion 830A of the second wheel side surface 832 comes into contact with the second arrangement surface 632 in the front region RA.
  • Other points are the same as the first reference state.
  • the fourth reference state the second wheel side surface 832 does not come into contact with the second protrusion 722.
  • Other points are the same as the first reference state.
  • the fifth reference state the second wheel side surface 832 does not come into contact with the second protrusion 722.
  • a part of the contact portion 830A of the first wheel side surface 831 comes into contact with the first arrangement surface 631 in the rear region RB. Other points are the same as the first reference state.
  • a part of the contact portion 830A of the first wheel side surface 831 comes into contact with the first arrangement surface 631 in the rear region RB.
  • a part of the contact portion 830A of the second wheel side surface 832 comes into contact with the second arrangement surface 632 in the front region RA.
  • Other points are the same as the first reference state.
  • the seventh reference state the first wheel side surface 831 does not come into contact with the first protrusion 721.
  • the second wheel side surface 832 does not come into contact with the second protrusion 722. Other points are the same as the first reference state.
  • the scribing wheel 800 When the scribing wheel 800 is pressed against the work piece, it transitions from the reference state to the initial contact state. Regardless of the transition from any of the second to seventh reference states to the initial contact state, the state of the scribing wheel 800 is substantially the same as the first reference state shown in FIG. 16 in the initial contact state. When the reference state is any of the second to seventh reference states, the scribing wheel 800 is the first in the transition to the initial contact state until the side surfaces 831 and 832 of the wheels come into contact with the corresponding protrusions 721 and 722. Rotate in the direction of rotation.
  • the scribing wheel 800 When transitioning from the first reference state shown in FIG. 16 to the initial contact state, the scribing wheel 800 does not substantially rotate in the first rotation direction.
  • the state of the scribing wheel 800 In the initial contact state, the state of the scribing wheel 800 is an inclined state, and the wheel side surface 830 is pressed against the support surface 710 by the pressing torque acting on the scribing wheel 800.
  • the contact portion 830A of the first wheel side surface 831 is pressed against the first protrusion 721.
  • the contact portion 830A of the second wheel side surface 832 is pressed against the second protrusion 722.
  • the first protrusion 721 supports the first wheel side surface 831.
  • the first protrusion 721 supports a portion of the first wheel side surface 831 located on either the front or the rear with respect to the second reference surface 302.
  • the first protrusion 721 supports a portion of the contact portion 830A of the first wheel side surface 831 that is located in the front region RA.
  • the first protrusion 721 supports a portion of the contact portion 830A of the first wheel side surface 831 that is located in the rear region RB.
  • the second protrusion 722 supports the second wheel side surface 832.
  • the second protrusion 722 supports a portion of the second wheel side surface 832 that is located on the other side of the front and rear of the second reference surface 302.
  • the second protrusion 722 supports a portion of the contact portion 830A of the second wheel side surface 832 that is located in the rear region RB.
  • the second protrusion 722 supports a portion of the contact portion 830A of the second wheel side surface 832 that is located in the front region RA.
  • the initial contact state transitions to the scanning state.
  • the wheel center surface 802 is parallel to the scanning direction DS as shown in FIG.
  • the state of transition from the initial contact state to the scanning state in the wheel support structure 500 of the third form, and the scanning state conform to the corresponding state in the wheel support structure 500 of the first form.
  • the central support portion 600 includes an inclined structure 650.
  • the inclined structure 650 is configured such that the wheel rotation center axis 601 is inclined with respect to the width direction of the holder 300 in the plan view of the holder unit 200.
  • the tilted structure 650 includes pins 610 and pin insertion holes 621A, 622A, respectively.
  • the intermediate portion 613 of the pin 610 is inclined with respect to the first end portion 611 and the second end portion 612.
  • the central axis of the first end portion 611 and the central axis of the second end portion 612 are parallel.
  • the central axis of the intermediate portion 613 intersects the central axes of the respective end portions 611 and 612.
  • the central axis of the intermediate portion 613 defines the wheel rotation central axis 601.
  • the first pin insertion hole 621A is formed in the first support portion 621 so that its central axis is parallel to the width direction of the holder 300 in the plan view of the holder unit 200.
  • the central axis of the first pin insertion hole 621A is located in one of the front region RA and the rear region RB.
  • the second pin insertion hole 622A is formed in the second support portion 622 so that its central axis is parallel to the width direction of the holder 300 in the plan view of the holder unit 200.
  • the central axis of the second pin insertion hole 622A is located on the other side of the front region RA and the rear region RB.
  • the central axis of the first pin insertion hole 621A and the central axis of the second pin insertion hole 622A are parallel to each other.
  • the wheel rotation center axis 601 is seen in the plan view of the holder unit 200. Intersect in the width direction of the holder 300.
  • the side support portion 700 includes the support surface 710.
  • the support surface 710 supports the wheel side surface 830 of the inclined scribing wheel 800.
  • the support surface 710 defines a placement space 310.
  • the arrangement surface 630 of the pin support portion 620 includes the support surface 710.
  • the support surface 710 includes a first support surface 711 located on the first side portion 311 of the arrangement space 310 and a second support surface 712 located on the second side portion 312 of the arrangement space 310.
  • the first support surface 711 is included in the first arrangement surface 631.
  • the second support surface 712 is included in the second arrangement surface 632.
  • the support surface 710 is parallel to the front-rear direction of the holder 300 in the plan view of the holder unit 200.
  • the distance between the first support surface 711 and the second support surface 712 is larger than the thickness of the main body 810 of the scribing wheel 800.
  • the reference state of the wheel support structure 500 of the fourth form includes, for example, the first to seventh reference states.
  • the wheel center surface 802 is tilted with respect to the wheel rotation center axis 601.
  • the scribing wheel 800 is in an inclined state.
  • the first arrangement surface 631 and the first wheel side surface 831 face each other in the width direction of the holder 300.
  • the second arrangement surface 632 and the second wheel side surface 832 face each other in the width direction of the holder 300.
  • the wheel center surface 802 is parallel to the front-rear direction of the holder 300 and the arrangement surface 630.
  • the first support surface 711 and the first wheel side surface 831 are parallel.
  • the contact portion 830A and the non-contact portion 830B of the first wheel side surface 831 do not come into contact with the first support surface 711.
  • a space is formed between the first support surface 711 and the first wheel side surface 831.
  • the second support surface 712 and the second wheel side surface 832 are parallel.
  • the contact portion 830A and the non-contact portion 830B of the second wheel side surface 832 do not come into contact with the second support surface 712.
  • a space is formed between the second support surface 712 and the second wheel side surface 832.
  • the first wheel side surface 831 contacts the first support surface 711, and the second wheel side surface 832 does not contact the second support surface 712. Other points are the same as the first reference state.
  • the second wheel side surface 832 is in contact with the second support surface 712, and the first wheel side surface 831 is not in contact with the first support surface 711. Other points are the same as the first reference state.
  • the wheel center surface 802 is inclined with respect to the front-rear direction of the holder 300 and the arrangement surface 630. A part of the contact portion 830A of the first wheel side surface 831 comes into contact with the first support surface 711 in the front region RA. The second wheel side surface 832 does not come into contact with the second support surface 712.
  • the wheel center surface 802 is inclined with respect to the front-rear direction of the holder 300 and the arrangement surface 630.
  • a part of the contact portion 830A of the second wheel side surface 832 comes into contact with the second support surface 712 in the rear region RB.
  • the first wheel side surface 831 does not come into contact with the first support surface 711.
  • Other points are the same as the first reference state.
  • the relationship between the wheel side surface 830 and the support surface 710 is different from the first to fifth reference states, and the side surfaces 831 and 832 are the support surfaces 711 and 712, respectively, as in the following seventh reference state. It is also different from the state of contact with.
  • the wheel center surface 802 is tilted with respect to the wheel rotation center axis 601.
  • the scribing wheel 800 is in an inclined state.
  • the first support surface 711 and the first wheel side surface 831 face each other in the width direction of the holder 300.
  • the second support surface 712 and the second wheel side surface 832 face each other in the width direction of the holder 300.
  • the wheel center surface 802 is inclined with respect to the front-rear direction of the holder 300 and the support surface 710.
  • the first support surface 711 and the first wheel side surface 831 are non-parallel. A part of the contact portion 830A of the first wheel side surface 831 comes into contact with the first support surface 711 in the front region RA. The other portion of the contact portion 830A of the first wheel side surface 831 and the non-contact portion 830B do not come into contact with the first support surface 711. A space is formed between the other portion of the contact portion 830A of the first wheel side surface 831 and the non-contact portion 830B and the first support surface 711.
  • the second support surface 712 and the second wheel side surface 832 are non-parallel. A part of the contact portion 830A of the second wheel side surface 832 comes into contact with the second support surface 712 in the rear region RB. Other parts of the contact portion 830A and the non-contact portion 830B of the second wheel side surface 832 do not come into contact with the second support surface 712. A space is formed between the other portion of the contact portion 830A of the second wheel side surface 832 and the non-contact portion 830B and the second support surface 712.
  • the scribing wheel 800 When the scribing wheel 800 is pressed against the work piece, it transitions from the reference state to the initial contact state. Regardless of the transition from any of the first to sixth reference states to the initial contact state, the state of the scribing wheel 800 is substantially the same as the seventh reference state shown in FIG. 19 in the initial contact state.
  • the scribing wheel 800 is the first in the transition to the initial contact state until the side surfaces 831 and 832 of each wheel come into contact with the corresponding support surfaces 711 and 712. Rotate in the direction of rotation.
  • the initial contact state in the wheel support structure 500 of the fourth form conforms to the corresponding state in the wheel support structure 500 of the first form.
  • the initial contact state transitions to the scanning state.
  • the wheel center surface 802 is parallel to the scanning direction DS as shown in FIG.
  • the transition from the initial contact state to the scanning state in the wheel support structure 500 of the fourth form and the scanning state conform to the corresponding states in the wheel support structure 500 of the first form.
  • FIG. 25 shows a cross section of the holder unit 200 along the line 25-25 of FIG.
  • the shape of the holder 300 as a whole is approximately a cylinder.
  • the surface 320 of the holder 300 includes an outer peripheral surface 321, a top plane 322, an upper plane 323, a lower plane 324, a side plane 325, a bottom plane 326, and an inclined surface 330.
  • the outer peripheral surface 321 corresponds to the side surface of the cylinder in the holder 300.
  • the top flat surface 322 corresponds to the end face of the upper 410 of the holder body 400.
  • the top plane 322 is orthogonal to the first reference plane 301.
  • the upper flat surface 323 is formed in front of the upper portion 410 of the holder body 400.
  • the upper plane 323 is parallel to the second reference plane 302.
  • the lower flat surface 324 is formed on the front surface of the lower portion 430 of the holder main body 400 and the front surface of the support portions 621 and 622.
  • the lower plane 324 is parallel to the second reference plane 302.
  • the side flat surface 325 is formed on the side surface of the lower portion 430 of the holder body 400 and the side surfaces of the support portions 621 and 622, respectively.
  • the side plane 325 is parallel to the first reference plane 301.
  • the bottom flat surface 326 corresponds to the bottom surface of each of the support portions 621 and 622.
  • the bottom plane 326 is orthogonal to the first reference plane 301.
  • the inclined surface 330 is formed below the upper plane 323 in front of the intermediate portion 420 of the holder body 400. In the side view of the holder 300, the inclined surface 330 is inclined with respect to the second reference surface 302. In the side view of the holder 300, the inclined surface 330 is formed in front of the holder 300 with respect to the upper plane 323. The first end portion 331 of the inclined surface 330 forms a boundary between the upper plane 323 and the inclined surface 330.
  • the holder 300 includes a recess 340.
  • the recess 340 includes a front recess 341 and a side recess 342.
  • the front recess 341 is formed on the front surface of the lower portion 430 of the holder body 400 and the front surface of the support portions 621 and 622.
  • the front recess 341 is recessed toward the central axis LB of the holder 300 with respect to the intermediate portion 420 of the holder body 400.
  • the lower plane 324 corresponds to the bottom surface of the front recess 341.
  • the lower plane 324 which is the bottom surface of the front recess 341, is parallel to the upper plane 323.
  • the side recesses 342 are formed on the side surface of the lower portion 430 of the holder body 400 and the side surfaces of the support portions 621 and 622.
  • the side recess 342 is recessed toward the central axis LB of the holder 300 with respect to the intermediate portion 420 of the holder body 400.
  • the side plane 325 corresponds to the bottom surface of the side recess 342.
  • the pin insertion holes 621A and 622A are formed below the side surface recesses 342 in the support portions 621 and 622. The configuration of each support portion 621 and 622 will be illustrated.
  • an opening groove 623 is formed in the lower portion of the pin insertion holes 621A and 622A in the support portions 621 and 622.
  • the opening groove 623 opens in the bottom plane 326.
  • the opening groove 623 is connected to the pin insertion holes 621A and 622A and is parallel to the pin insertion holes 621A and 622A.
  • the opening groove 623 is not formed in the lower portion of the pin insertion holes 621A and 622A in the support portions 621 and 622.
  • the arrangement space 310 opens in the lower plane 324.
  • the arrangement space 310 opens to the outer peripheral surface 321.
  • the arrangement space 310 opens in the bottom plane 326.
  • the support surface 710 is inclined with respect to the front-rear direction of the holder 300.
  • the support surface 710 is inclined with respect to a plane orthogonal to the upper plane 323 and the lower plane 324.
  • the support surface 710 is also inclined with respect to the side plane 325.
  • the first support surface 711 and the second support surface 712 are parallel to each other.
  • the scribing wheel 800 is arranged in the arrangement space 310 so that the wheel center surface 802 is inclined with respect to the front-rear direction of the holder 300.
  • the description of the above embodiment is not intended to limit the possible forms of the wheel support structure or the like according to the present invention.
  • the wheel support structure and the like according to the present invention may take a form different from the form exemplified in the embodiment.
  • One example thereof is a form in which a part of the configuration of the embodiment is replaced, changed, or omitted, or a new configuration is added to the embodiment.
  • Holder joint holder 50 Holder assembly 100: Holder joint 200: Holder unit 300: Holder 310: Arrangement space 500: Wheel support structure 600: Center support part 610: Pin 700: Side support part 710: Support surface 800: Scribing Wheel 801: Wheel center axis 802: Wheel center surface 830: Wheel side surface 831: First wheel side surface 832: Second wheel side surface

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  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mining & Mineral Resources (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)

Abstract

This wheel support structure (500) comprises a central support part (600) and a lateral surface support part (700). The central support part (600) supports a scribing wheel (800) such that the scribing wheel (800) rotates about a central axis of rotation parallel with the width direction of the holder (300). The lateral surface support part (700) supports a wheel lateral surface (830) of the scribing wheel (800) with a wheel central surface (802) thereof inclined with respect to the central axis of rotation.

Description

ホイール支持構造、ホルダ、ホルダユニット、および、ホルダアセンブリWheel support structure, holder, holder unit, and holder assembly
　本発明はホイール支持構造、ホルダ、ホルダユニット、および、ホルダアセンブリに関する。 The present invention relates to a wheel support structure, a holder, a holder unit, and a holder assembly.
　脆性材料基板等の被加工物のスクライブ加工にスクライブ装置が用いられる。スクライブ装置は被加工物に対してスクライビングホイールを走査し、被加工物にスクライブラインを形成する。特許文献１には、従来のスクライブ装置の一例が記載されている。 A scribe device is used for scribe processing of workpieces such as brittle material substrates. The scribe device scans the scribing wheel against the workpiece to form a scribe line on the workpiece. Patent Document 1 describes an example of a conventional scribe device.
特開２０１８－１４０５９７号公報Japanese Unexamined Patent Publication No. 2018-140597
　スクライブ加工時におけるスクライビングホイールの姿勢が安定しない場合、スクライブ加工された被加工物の品質が低下するおそれがある。 If the posture of the scribing wheel is not stable during scribe processing, the quality of the scribed work piece may deteriorate.
　本発明の目的は被加工物の品質の向上に寄与するホイール支持構造、ホルダ、ホルダユニット、および、ホルダアセンブリを提供することである。 An object of the present invention is to provide a wheel support structure, a holder, a holder unit, and a holder assembly that contribute to improving the quality of the workpiece.
　本発明に関するホイール支持構造はホルダの幅方向に平行な回転中心軸まわりでスクライビングホイールが回転するように前記スクライビングホイールを支持する中心支持部と、前記スクライビングホイールの中心面が前記回転中心軸に対して傾斜した前記スクライビングホイールの側面を支持する側面支持部とを備える。 The wheel support structure according to the present invention includes a central support portion that supports the scribing wheel so that the scribing wheel rotates around a rotation center axis parallel to the width direction of the holder, and a center surface of the scribing wheel with respect to the rotation center axis. It is provided with a side support portion that supports the side surface of the scribing wheel that is tilted.
　以下の説明では、ホイール側面、ホイール中心面、傾斜状態という用語が使用される場合がある。ホイール側面はスクライビングホイールの側面を意味する。ホイール中心面はスクライビングホイールの中心面を意味する。傾斜状態はホイール中心面が回転中心軸に対して傾斜したスクライビングホイールの状態を意味する。 In the following explanation, the terms wheel side surface, wheel center surface, and tilted state may be used. The side of the wheel means the side of the scribing wheel. The wheel center plane means the center plane of the scribing wheel. The tilted state means the state of the scribing wheel in which the center surface of the wheel is tilted with respect to the center axis of rotation.
　傾斜状態のスクライビングホイールが被加工物に押し付けられた場合、ホイール中心面が回転中心軸に直交する状態に近づくようにスクライビングホイールを回転させるトルク(以下「押付時トルク」という)がスクライビングホイールに作用する。ホイール側面は側面支持部に押し付けられる。押付時トルクが作用した傾斜状態のスクライビングホイールのホイール側面が側面支持部に支持されるため、ホルダに対するスクライビングホイールの状態が安定する。これは被加工物の品質の向上に寄与する。 When an inclined scribing wheel is pressed against an workpiece, the torque that rotates the scribing wheel so that the wheel center surface approaches a state orthogonal to the rotation center axis (hereinafter referred to as "pressing torque") acts on the scribing wheel. To do. The side of the wheel is pressed against the side support. Since the wheel side surface of the tilted scribing wheel on which the pressing torque acts is supported by the side support portion, the state of the scribing wheel with respect to the holder is stable. This contributes to the improvement of the quality of the work piece.
　前記ホイール支持構造の一例では、前記側面支持部は側面に接触する支持面を含む。 In an example of the wheel support structure, the side surface support portion includes a support surface that contacts the side surface.
　上記ホイール支持構造によれば、側面支持部における応力集中が抑えられる。 According to the above wheel support structure, stress concentration in the side support portion can be suppressed.
　前記ホイール支持構造の一例では、前記支持面は前記スクライビングホイールが配置される配置空間を規定する。 In an example of the wheel support structure, the support surface defines an arrangement space in which the scribing wheel is arranged.
　上記ホイール支持構造によれば、支持面がホイール側面を支持する役割と、配置空間を規定する役割とを持つため、ホイール支持構造の構成が簡略化される。 According to the wheel support structure, the support surface has a role of supporting the side surface of the wheel and a role of defining the arrangement space, so that the configuration of the wheel support structure is simplified.
　前記ホイール支持構造の一例では、前記支持面は前記ホルダの前後方向に対して傾斜する。 In an example of the wheel support structure, the support surface is inclined with respect to the front-rear direction of the holder.
　上記ホイール支持構造によれば、支持面の傾斜の設定により、傾斜状態のスクライビングホイールの側面を支持するという側面支持部の機能が実現され、ホイール支持構造の構成が簡略化される。 According to the above wheel support structure, by setting the inclination of the support surface, the function of the side support portion that supports the side surface of the scribing wheel in the inclined state is realized, and the configuration of the wheel support structure is simplified.
　前記ホイール支持構造の一例では、前記側面は第１ホイール側面および第２ホイール側面を含み、前記側面支持部は前記第１ホイール側面および前記第２ホイール側面を支持する。 In an example of the wheel support structure, the side surface includes a first wheel side surface and a second wheel side surface, and the side surface support portion supports the first wheel side surface and the second wheel side surface.
　上記ホイール支持構造によれば、各ホイール側面が側面支持部に支持されるため、スクライビングホイールの状態がさらに安定する。 According to the above wheel support structure, the side surface of each wheel is supported by the side support portion, so that the state of the scribing wheel is further stabilized.
　前記ホイール支持構造の一例では、前記側面支持部は前記第１ホイール側面のうちの前記回転中心軸に対して前方および後方の一方に位置する部分と、前記第２ホイール側面のうちの前記回転中心軸に対して前方および後方の他方に位置する部分とを支持する。 In an example of the wheel support structure, the side surface support portion is located on one of the front and rear sides of the first wheel side surface with respect to the rotation center axis, and the rotation center of the second wheel side surface. Supports a portion located on the other side of the front and the rear with respect to the shaft.
　上記ホイール支持構造によれば、押付時トルクをスクライビングホイールの両側で受けるように各ホイール側面が支持されるため、スクライビングホイールの状態がさらに安定する。 According to the above wheel support structure, the side surface of each wheel is supported so as to receive the pressing torque on both sides of the scribing wheel, so that the state of the scribing wheel is further stabilized.
　本発明に関するホイール支持構造はホルダの幅方向に平行または交差する回転中心軸まわりでスクライビングホイールが回転するように前記スクライビングホイールを支持する中心支持部と、前記スクライビングホイールの中心面が前記回転中心軸に対して傾斜した前記スクライビングホイールの側面を支持する側面支持部とを備え、前記側面支持部は前記側面に接触する支持面を含み、前記支持面は前記ホルダの前後方向に対して傾斜する。 In the wheel support structure according to the present invention, a central support portion that supports the scribing wheel so that the scribing wheel rotates around a rotation center axis parallel to or intersecting the width direction of the holder, and a center surface of the scribing wheel are the rotation center axes. A side support portion that supports the side surface of the scribing wheel that is inclined with respect to the side surface is provided, the side surface support portion includes a support surface that contacts the side surface, and the support surface is inclined with respect to the front-rear direction of the holder.
　上記ホイール支持構造によれば、押付時トルクが作用した傾斜状態のスクライビングホイールのホイール側面が側面支持部に支持されるため、ホルダに対するスクライビングホイールの姿勢が安定する。これは被加工物の品質の向上に寄与する。 According to the above wheel support structure, the wheel side surface of the tilted scribing wheel on which the pressing torque acts is supported by the side support portion, so that the posture of the scribing wheel with respect to the holder is stable. This contributes to the improvement of the quality of the work piece.
　本発明に関するホルダは前記ホイール支持構造を備える。 The holder according to the present invention has the wheel support structure.
　上記ホルダによれば、ホイール支持構造と同様の効果が得られる。 According to the above holder, the same effect as the wheel support structure can be obtained.
　本発明に関するホルダユニットは前記ホルダと、前記スクライビングホイールと、前記スクライビングホイールを支持するピンとを備える。 The holder unit according to the present invention includes the holder, the scribing wheel, and a pin that supports the scribing wheel.
　上記ホルダユニットによれば、ホイール支持構造と同様の効果が得られる。 According to the above holder unit, the same effect as the wheel support structure can be obtained.
　本発明に関するホルダアセンブリは前記ホルダユニットと、ホルダジョイント保持具に対して回転できるように前記ホルダユニットを前記ホルダジョイント保持具に連結するホルダジョイントとを備える。 The holder assembly according to the present invention includes the holder unit and a holder joint that connects the holder unit to the holder joint holder so that the holder unit can rotate with respect to the holder joint holder.
　上記ホルダアセンブリによれば、ホイール支持構造と同様の効果が得られる。 According to the above holder assembly, the same effect as the wheel support structure can be obtained.
　本発明に関するホイール支持構造、ホルダ、ホルダユニット、および、ホルダアセンブリは被加工物の品質の向上に寄与する。 The wheel support structure, holder, holder unit, and holder assembly according to the present invention contribute to the improvement of the quality of the workpiece.
スクライブヘッドの側面図。Side view of the scribe head. スクライブヘッドの正面図。Front view of the scribe head. スクライビングホイールの側面図。Side view of the scribing wheel. スクライビングホイールの断面図。Sectional view of the scribing wheel. ホルダユニットの断面図(１)。Sectional drawing (1) of a holder unit. ホルダユニットの断面図(２)。FIG. 2 is a cross-sectional view of the holder unit. ホルダアセンブリの側面図(１)。Side view of the holder assembly (1). ホルダアセンブリの側面図(２)。Side view (2) of the holder assembly. ホルダアセンブリの側面図(３)。Side view of the holder assembly (3). ホイール支持構造の第１形態を示す図(１)。The figure (1) which shows the 1st form of a wheel support structure. ホイール支持構造の第１形態を示す図(２)。The figure (2) which shows the 1st form of a wheel support structure. ホイール支持構造の第１形態を示す図(３)。FIG. 3 shows a first form of a wheel support structure. ホイール支持構造の第２形態を示す図(１)。The figure (1) which shows the 2nd form of a wheel support structure. ホイール支持構造の第２形態を示す図(２)。The figure (2) which shows the 2nd form of a wheel support structure. ホイール支持構造の第２形態を示す図(３)。FIG. 3 shows a second form of the wheel support structure. ホイール支持構造の第３形態を示す図(１)。The figure (1) which shows the 3rd form of a wheel support structure. ホイール支持構造の第３形態を示す図(２)。The figure (2) which shows the 3rd form of a wheel support structure. ホイール支持構造の第４形態を示す図(１)。The figure (1) which shows the 4th form of a wheel support structure. ホイール支持構造の第４形態を示す図(２)。FIG. 2 shows a fourth form of the wheel support structure. ホイール支持構造の第４形態を示す図(３)。FIG. 3 shows a fourth form of the wheel support structure. ホルダの正面図。Front view of the holder. ホルダの背面図。Rear view of the holder. ホルダの側面図。Side view of the holder. ホルダの底面図。Bottom view of the holder. ホルダの断面図。Sectional view of the holder.
　図１、図２に示されるスクライブヘッド１０は被加工物のスクライブ加工に用いられる。被加工物は例えば基板を含む。基板は例えば脆性材料基板を含む。脆性材料基板は例えばガラス基板、セラミックス基板、シリコン基板、化合物半導体基板、サファイア基板、および、石英基板の少なくとも１つを含む。セラミックス基板は例えば低温焼成セラミックスおよび高温焼成セラミックスの少なくとも１つを含む。スクライブヘッド１０は被加工物をスクライブ加工するスクライブ加工装置に組み込まれる。一例では、スクライブ加工装置は走査装置およびスクライブヘッド１０を備える。スクライブヘッド１０は走査装置に取り付けられる。走査装置は被加工物に対するスクライブヘッド１０の位置を任意に変更できるように構成される。一例では、走査装置は第１走査部および第２走査部の少なくとも１つを含む。第１走査部は被加工物の被加工面に対して平行な方向に関するスクライブヘッド１０の位置を変更する。第２走査部は被加工物の被加工面に対して垂直な方向に関するスクライブヘッド１０の位置を変更する。 The scribe head 10 shown in FIGS. 1 and 2 is used for scribe processing of a work piece. The workpiece includes, for example, a substrate. The substrate includes, for example, a brittle material substrate. The brittle material substrate includes, for example, at least one of a glass substrate, a ceramic substrate, a silicon substrate, a compound semiconductor substrate, a sapphire substrate, and a quartz substrate. The ceramic substrate includes, for example, at least one of low temperature fired ceramics and high temperature fired ceramics. The scribe head 10 is incorporated in a scribe processing apparatus for scribe processing an workpiece. In one example, the scribe processing device includes a scanning device and a scribe head 10. The scribe head 10 is attached to the scanning device. The scanning device is configured so that the position of the scribe head 10 with respect to the workpiece can be arbitrarily changed. In one example, the scanning apparatus includes at least one of a first scanning section and a second scanning section. The first scanning unit changes the position of the scribe head 10 in a direction parallel to the work surface of the work piece. The second scanning unit changes the position of the scribe head 10 in a direction perpendicular to the work surface of the work piece.
　スクライブヘッド１０はベース１１、連結構造２０、ホルダジョイント保持具４０、および、ホルダアセンブリ５０を備える。ベース１１は走査装置に取り付けられる。ベース１１と走査装置との関係について例示する。第１例では、ベース１１は走査装置の第１走査部に取り付けられる。第２例では、ベース１１は走査装置の第２走査部に取り付けられる。ホルダジョイント保持具４０は連結構造２０を介してベース１１に取り付けられる。連結構造２０の構成について例示する。第１例では、連結構造２０はホルダジョイント保持具４０がベース１１に対して所定方向に移動できるようにホルダジョイント保持具４０をベース１１に連結する。所定方向は例えば被加工物の被加工面に対して垂直な方向、および、被加工物の被加工面に対して平行な方向の少なくとも一方を含む。第２例では、連結構造２０はホルダジョイント保持具４０がベース１１に対して移動できないようにホルダジョイント保持具４０をベース１１に連結する。 The scribe head 10 includes a base 11, a connecting structure 20, a holder joint holder 40, and a holder assembly 50. The base 11 is attached to the scanning device. The relationship between the base 11 and the scanning device will be illustrated. In the first example, the base 11 is attached to the first scanning portion of the scanning device. In the second example, the base 11 is attached to the second scanning portion of the scanning device. The holder joint holder 40 is attached to the base 11 via the connecting structure 20. The configuration of the connecting structure 20 will be illustrated. In the first example, the connecting structure 20 connects the holder joint holder 40 to the base 11 so that the holder joint holder 40 can move in a predetermined direction with respect to the base 11. The predetermined direction includes, for example, at least one of a direction perpendicular to the work surface of the work piece and a direction parallel to the work surface of the work piece. In the second example, the connecting structure 20 connects the holder joint holder 40 to the base 11 so that the holder joint holder 40 cannot move with respect to the base 11.
　図１、図２は第１例の連結構造２０を示す。連結構造２０はレール２１およびスライダ２２を含む。レール２１はベース１１およびホルダジョイント保持具４０の一方に取り付けられる。スライダ２２はベース１１およびホルダジョイント保持具４０の他方に取り付けられる。図示される例では、レール２１はベース１１に取り付けられる。スライダ２２はホルダジョイント保持具４０に取り付けられる。連結構造２０は例えば被加工物の被加工面に対して垂直な方向において、ベース１１とホルダジョイント保持具４０との相対的な移動を許容する。 1 and 2 show the connection structure 20 of the first example. The connecting structure 20 includes a rail 21 and a slider 22. The rail 21 is attached to one of the base 11 and the holder joint holder 40. The slider 22 is attached to the other of the base 11 and the holder joint holder 40. In the illustrated example, the rail 21 is attached to the base 11. The slider 22 is attached to the holder joint holder 40. The connecting structure 20 allows relative movement of the base 11 and the holder joint holder 40, for example, in a direction perpendicular to the work surface of the work piece.
　ホルダジョイント保持具４０はホルダアセンブリ５０を保持する状態と、ホルダアセンブリ５０を保持しない状態とを選択できるように構成される。ホルダアセンブリ５０はホルダジョイント１００およびホルダユニット２００を備える。ホルダジョイント１００はホルダユニット２００を支持し、ホルダジョイント保持具４０に着脱できるように構成される。ホルダユニット２００はホルダ３００およびスクライビングホイール８００を含む。ホルダ３００はホルダジョイント１００に結合する。スクライビングホイール８００はホルダ３００に対して回転できるようにホルダ３００に支持される。ホルダユニット２００はホルダジョイント１００を介してホルダジョイント保持具４０に連結される。 The holder joint holder 40 is configured so that a state in which the holder assembly 50 is held and a state in which the holder assembly 50 is not held can be selected. The holder assembly 50 includes a holder joint 100 and a holder unit 200. The holder joint 100 supports the holder unit 200 and is configured so that it can be attached to and detached from the holder joint holder 40. The holder unit 200 includes a holder 300 and a scribing wheel 800. The holder 300 is coupled to the holder joint 100. The scribing wheel 800 is supported by the holder 300 so that it can rotate with respect to the holder 300. The holder unit 200 is connected to the holder joint holder 40 via the holder joint 100.
　スクライブヘッド１０は荷重調節部３０をさらに備える。荷重調節部３０はスクライビングホイール８００を被加工物に押し付ける力を調節する。荷重調節部３０はアクチュエータ３１およびブラケット３２を含む。ブラケット３２はベース１１に取り付けられる。アクチュエータ３１はブラケット３２に取り付けられる。アクチュエータ３１は例えばホルダジョイント保持具４０、ホルダジョイント保持具４０に取り付けられるレール２１、または、ホルダジョイント保持具４０に取り付けられるスライダ２２を被加工物に向けて押す。アクチュエータ３１は例えば動力シリンダ、ソレノイド、電動機、サーボモータ、および、リニアアクチュエータの少なくとも１つを含む。動力シリンダは例えば油圧シリンダ、空圧シリンダ、水圧シリンダ、および、電動シリンダの少なくとも１つを含む。 The scribe head 10 further includes a load adjusting unit 30. The load adjusting unit 30 adjusts the force for pressing the scribing wheel 800 against the workpiece. The load adjusting unit 30 includes an actuator 31 and a bracket 32. The bracket 32 is attached to the base 11. The actuator 31 is attached to the bracket 32. The actuator 31 pushes, for example, the holder joint holder 40, the rail 21 attached to the holder joint holder 40, or the slider 22 attached to the holder joint holder 40 toward the workpiece. The actuator 31 includes, for example, at least one of a power cylinder, a solenoid, an electric motor, a servomotor, and a linear actuator. The power cylinder includes, for example, at least one of a hydraulic cylinder, a pneumatic cylinder, a hydraulic cylinder, and an electric cylinder.
　図３、図４に示されるように、スクライビングホイール８００は本体８１０および刃先部８２０を含む。スクライビングホイール８００の基礎的構造は例えば第１構造および第２構造に分類される。第１構造では、本体８１０および刃先部８２０を含むスクライビングホイール８００の全体が単一の高硬度材料により形成される。第２構造では、スクライビングホイール８００は高硬度材料により形成される本体８１０、および、本体８１０とは異なる高硬度材料により形成される刃先部８２０を含む。高硬度材料としては例えば超硬合金、多結晶ダイヤモンド、および、単結晶ダイヤモンドが挙げられる。多結晶ダイヤモンドは例えばダイヤモンド焼結体(Poly-Crystalline Diamond、略称はPCD)、または、ナノ多結晶ダイヤモンド(Nano-Polycrystalline Diamond、略称はNPD)である。 As shown in FIGS. 3 and 4, the scribing wheel 800 includes a main body 810 and a cutting edge portion 820. The basic structure of the scribing wheel 800 is classified into, for example, a first structure and a second structure. In the first structure, the entire scribing wheel 800 including the main body 810 and the cutting edge portion 820 is formed of a single high hardness material. In the second structure, the scribing wheel 800 includes a main body 810 formed of a high hardness material and a cutting edge portion 820 formed of a high hardness material different from the main body 810. Examples of the high hardness material include cemented carbide, polycrystalline diamond, and single crystal diamond. The polycrystalline diamond is, for example, a diamond sintered body (Poly-Crystalline Diamond, abbreviated as PCD) or a nano-polycrystalline diamond (Nano-Polycrystalline Diamond, abbreviated as NPD).
　本体８１０はスクライビングホイール８００の中心軸であるホイール中心軸８０１まわりに設けられる。以下では、ホイール中心軸８０１に沿う方向をスクライビングホイール８００の軸方向と称する。スクライビングホイール８００の中心面であるホイール中心面８０２はスクライビングホイール８００の軸方向においてスクライビングホイール８００の中心を通過し、ホイール中心軸８０１に直交するように規定される。スクライビングホイール８００はホイール中心面８０２に対して対称または非対称である。図３に示される例では、スクライビングホイール８００はホイール中心面８０２に対して対称である。 The main body 810 is provided around the wheel central axis 801 which is the central axis of the scribing wheel 800. Hereinafter, the direction along the wheel central axis 801 is referred to as the axial direction of the scribing wheel 800. The wheel center surface 802, which is the center surface of the scribing wheel 800, is defined to pass through the center of the scribing wheel 800 in the axial direction of the scribing wheel 800 and be orthogonal to the wheel center axis 801. The scribing wheel 800 is symmetrical or asymmetric with respect to the wheel center plane 802. In the example shown in FIG. 3, the scribing wheel 800 is symmetrical with respect to the wheel center plane 802.
　図３に示されるスクライビングホイール８００の側面視では、本体８１０の形状は環である。刃先部８２０は本体８１０に対してスクライビングホイール８００の径方向の外方に設けられる。刃先部８２０はスクライビングホイール８００の刃を構成する。スクライビングホイール８００の側面視では、刃先部８２０の形状は環である。刃先部８２０の厚さはスクライビングホイール８００の径方向の外方に向かうにつれて薄くなる。刃先部８２０の先端には、スクライビングホイール８００の円周に相当する稜線８２１が形成される。 In the side view of the scribing wheel 800 shown in FIG. 3, the shape of the main body 810 is a ring. The cutting edge portion 820 is provided on the outer side of the scribing wheel 800 in the radial direction with respect to the main body 810. The blade edge portion 820 constitutes the blade of the scribing wheel 800. In the side view of the scribing wheel 800, the shape of the cutting edge portion 820 is a ring. The thickness of the cutting edge portion 820 becomes thinner toward the outer side in the radial direction of the scribing wheel 800. A ridge line 821 corresponding to the circumference of the scribing wheel 800 is formed at the tip of the cutting edge portion 820.
　本体８１０は内周面８１１、ホイール孔８１２、面取り８１３、および、ホイール側面８３０を含む。内周面８１１はホイール孔８１２を規定する。ホイール孔８１２は本体８１０をスクライビングホイール８００の軸方向に貫通する。ホイール孔８１２は円形である。面取り８１３はホイール孔８１２の周囲に形成される。ホイール側面８３０は第１ホイール側面８３１および第２ホイール側面８３２を含む。一例では、各ホイール側面８３１、８３２は平面である。各ホイール側面８３１、８３２はホイール中心面８０２に対して平行である。第１ホイール側面８３１はホイール中心面８０２に対してスクライビングホイール８００の軸方向の一方に設けられる。第２ホイール側面８３２はホイール中心面８０２に対してスクライビングホイール８００の軸方向の他方に設けられる。ホイール側面８３０の外周と刃先部８２０との間には境界部８４０が形成される。境界部８４０はホイール側面８３０と刃先部８２０の外面との間に形成されるエッジ、または、これに相当する部分である。 The main body 810 includes an inner peripheral surface 811, a wheel hole 812, a chamfer 813, and a wheel side surface 830. The inner peripheral surface 811 defines the wheel hole 812. The wheel hole 812 penetrates the main body 810 in the axial direction of the scribing wheel 800. The wheel hole 812 is circular. The chamfer 813 is formed around the wheel hole 812. The wheel side surface 830 includes a first wheel side surface 831 and a second wheel side surface 832. In one example, the side surfaces 831 and 832 of each wheel are flat. The wheel side surfaces 831 and 832 are parallel to the wheel center surface 802. The first wheel side surface 831 is provided on one side of the scribing wheel 800 in the axial direction with respect to the wheel center surface 802. The second wheel side surface 832 is provided on the other side of the scribing wheel 800 in the axial direction with respect to the wheel center surface 802. A boundary portion 840 is formed between the outer circumference of the wheel side surface 830 and the cutting edge portion 820. The boundary portion 840 is an edge formed between the wheel side surface 830 and the outer surface of the cutting edge portion 820, or a portion corresponding thereto.
　図５、図６はホルダ３００の一例を示す。ホルダ３００はホルダ本体４００およびホイール支持構造５００を備える。ホルダ本体４００はホルダジョイント１００を介してホルダジョイント保持具４０に連結される。ホイール支持構造５００は中心支持部６００を備える。中心支持部６００はスクライビングホイール８００の回転中心軸であるホイール回転中心軸６０１を規定する。中心支持部６００はホイール回転中心軸６０１まわりでスクライビングホイール８００が回転するようにスクライビングホイール８００を支持する。ホイール回転中心軸６０１は例えばホルダユニット２００の平面視においてホルダ３００の幅方向に平行、または、ホルダ３００の幅方向に交差する。 5 and 6 show an example of the holder 300. The holder 300 includes a holder body 400 and a wheel support structure 500. The holder body 400 is connected to the holder joint holder 40 via the holder joint 100. The wheel support structure 500 includes a central support portion 600. The center support portion 600 defines the wheel rotation center axis 601 which is the rotation center axis of the scribing wheel 800. The central support portion 600 supports the scribing wheel 800 so that the scribing wheel 800 rotates around the wheel rotation center axis 601. The wheel rotation center axis 601 is parallel to the width direction of the holder 300 or intersects the width direction of the holder 300 in a plan view of the holder unit 200, for example.
　中心支持部６００の構成について例示する。図５、図６に示される中心支持部６００の第１例では、中心支持部６００はピン６１０およびピン支持部６２０を含む。一例では、ピン６１０は円柱である。ピン６１０はピン支持部６２０に支持される第１端部６１１、第２端部６１２、および、スクライビングホイール８００を支持する中間部６１３を含む。ピン支持部６２０はホルダ本体４００に設けられる。ピン６１０の中心軸はホイール回転中心軸６０１を規定する。ホルダ本体４００およびピン支持部６２０の関係について例示する。第１例では、ホルダ本体４００とピン支持部６２０とは単一の物体を構成する。第２例では、個別に構成されたホルダ本体４００とピン支持部６２０とが結合される。 The configuration of the central support portion 600 will be illustrated. In the first example of the central support 600 shown in FIGS. 5 and 6, the central support 600 includes a pin 610 and a pin support 620. In one example, pin 610 is a cylinder. The pin 610 includes a first end 611, a second end 612 supported by the pin support 620, and an intermediate 613 supporting the scribing wheel 800. The pin support portion 620 is provided on the holder body 400. The central axis of the pin 610 defines the wheel rotation central axis 601. The relationship between the holder body 400 and the pin support portion 620 will be illustrated. In the first example, the holder body 400 and the pin support portion 620 form a single object. In the second example, the individually configured holder body 400 and the pin support portion 620 are coupled.
　ピン支持部６２０は第１支持部６２１、第２支持部６２２、および、配置面６３０を含む。第１支持部６２１と第２支持部６２２との間には、スクライビングホイール８００が配置される配置空間３１０が形成される。配置面６３０は配置空間３１０を規定する。配置面６３０は第１配置面６３１および第２配置面６３２を含む。第１配置面６３１は第１支持部６２１に設けられる。第１配置面６３１は配置空間３１０の第１側部３１１に位置する。第２配置面６３２は第２支持部６２２に設けられる。第２配置面６３２は配置空間３１０の第２側部３１２に位置する。 The pin support portion 620 includes a first support portion 621, a second support portion 622, and an arrangement surface 630. An arrangement space 310 in which the scribing wheel 800 is arranged is formed between the first support portion 621 and the second support portion 622. The placement surface 630 defines the placement space 310. The arrangement surface 630 includes a first arrangement surface 631 and a second arrangement surface 632. The first arrangement surface 631 is provided on the first support portion 621. The first arrangement surface 631 is located on the first side portion 311 of the arrangement space 310. The second arrangement surface 632 is provided on the second support portion 622. The second arrangement surface 632 is located on the second side portion 312 of the arrangement space 310.
　第１支持部６２１には、ピン６１０の第１端部６１１が挿入される第１ピン挿入孔６２１Ａが形成される。第１ピン挿入孔６２１Ａは第１支持部６２１を貫通する。第２支持部６２２には、ピン６１０の第２端部６１２が挿入される第２ピン挿入孔６２２Ａが形成される。第２ピン挿入孔６２２Ａは第２支持部６２２を貫通する。各ピン挿入孔６２１Ａ、６２２Ａの中心軸は同軸である。 The first support portion 621 is formed with a first pin insertion hole 621A into which the first end portion 611 of the pin 610 is inserted. The first pin insertion hole 621A penetrates the first support portion 621. The second support portion 622 is formed with a second pin insertion hole 622A into which the second end portion 612 of the pin 610 is inserted. The second pin insertion hole 622A penetrates the second support portion 622. The central axes of the pin insertion holes 621A and 622A are coaxial.
　スクライビングホイール８００は配置空間３１０に配置される。ピン６１０はホイール孔８１２、第１ピン挿入孔６２１Ａ、および、第２ピン挿入孔６２２Ａに挿入され、各支持部６２１、６２２に支持される。スクライビングホイール８００はピン６１０の中間部６１３に支持される。ピン６１０とスクライビングホイール８００とのはめあいはすきまばめである。ピン６１０の各端部６１１、６１２と各ピン挿入孔６２１Ａ、６２２Ａとのはめあいはすきまばめ、中間ばめ、または、しまりばめである。スクライビングホイール８００の内周面８１１とピン６１０の中間部６１３の外周面６１４との間には、クリアランス６０２が形成される。 The scribing wheel 800 is arranged in the arrangement space 310. The pin 610 is inserted into the wheel hole 812, the first pin insertion hole 621A, and the second pin insertion hole 622A, and is supported by the support portions 621 and 622, respectively. The scribing wheel 800 is supported by the intermediate portion 613 of the pin 610. The fit between the pin 610 and the scribing wheel 800 is a clearance fit. The fit between the ends 611, 612 of the pin 610 and the pin insertion holes 621A, 622A is a clearance fit, an intermediate fit, or a tight fit. A clearance 602 is formed between the inner peripheral surface 811 of the scribing wheel 800 and the outer peripheral surface 614 of the intermediate portion 613 of the pin 610.
　ピン６１０が円柱である場合、ホルダユニット２００の平面視におけるホイール回転中心軸６０１とホルダ３００の幅方向との関係は主に各ピン挿入孔６２１Ａ、６２２Ａの中心軸とホルダ３００の幅方向との関係に応じて設定される。第１例では、各ピン挿入孔６２１Ａ、６２２Ａの中心軸はホルダ３００の幅方向に平行である。ホイール回転中心軸６０１はホルダ３００の幅方向に平行である。第２例では、ピン挿入孔６２１Ａ、６２２Ａの中心軸はホルダ３００の幅方向に交差する。ホイール回転中心軸６０１はホルダ３００の幅方向に交差する。 When the pin 610 is a cylinder, the relationship between the wheel rotation center axis 601 and the width direction of the holder 300 in the plan view of the holder unit 200 is mainly the center axis of the pin insertion holes 621A and 622A and the width direction of the holder 300. Set according to the relationship. In the first example, the central axes of the pin insertion holes 621A and 622A are parallel to the width direction of the holder 300. The wheel rotation center axis 601 is parallel to the width direction of the holder 300. In the second example, the central axes of the pin insertion holes 621A and 622A intersect in the width direction of the holder 300. The wheel rotation center axis 601 intersects in the width direction of the holder 300.
　各ピン挿入孔６２１Ａ、６２２Ａの外側の開口には、ピン６１０の脱落を防止する閉塞部６４０が設けられる。閉塞部６４０の構成について例示する。図５に示される第１例では、閉塞部６４０はピン支持部６２０の外部に設けられる。図６に示される第２例では、閉塞部６４０は各ピン挿入孔６２１Ａ、６２２Ａ内に設けられる。閉塞部６４０とピン支持部６２０との関係について例示する。第１例では、閉塞部６４０はピン支持部６２０に着脱できるように構成される。第２例では、閉塞部６４０は固定手段によりピン支持部６２０に固定される。固定手段は例えば、カシメ、接着、および、溶接の少なくとも１つを含む。 The outer openings of the pin insertion holes 621A and 622A are provided with a closing portion 640 for preventing the pin 610 from falling off. The configuration of the closed portion 640 will be illustrated. In the first example shown in FIG. 5, the closing portion 640 is provided outside the pin supporting portion 620. In the second example shown in FIG. 6, the closing portion 640 is provided in the pin insertion holes 621A and 622A, respectively. The relationship between the closing portion 640 and the pin supporting portion 620 will be illustrated. In the first example, the closing portion 640 is configured to be attached to and detached from the pin support portion 620. In the second example, the closing portion 640 is fixed to the pin support portion 620 by the fixing means. Fixing means include, for example, at least one of caulking, bonding, and welding.
　中心支持部６００の第２例では、中心支持部６００は支持軸および軸支持部を含む。軸支持部はホルダ本体４００に設けられる。軸支持部は第１支持部６２１および第２支持部６２２を含む。第１支持部６２１と第２支持部６２２との間には、スクライビングホイール８００が配置される配置空間３１０が形成される。支持軸は第１支持部６２１に設けられる第１支持軸、および、第２支持部６２２に設けられる第２支持軸を含む。第１支持軸は第１支持部６２１と一体的に構成される。第２支持軸は第２支持部６２２と一体的に構成される。各支持軸はスクライビングホイール８００のホイール孔８１２に挿入される。各支持軸の中心軸はホイール回転中心軸６０１を規定する。 In the second example of the central support portion 600, the central support portion 600 includes a support shaft and a shaft support portion. The shaft support portion is provided on the holder body 400. The shaft support includes a first support 621 and a second support 622. An arrangement space 310 in which the scribing wheel 800 is arranged is formed between the first support portion 621 and the second support portion 622. The support shaft includes a first support shaft provided on the first support portion 621 and a second support shaft provided on the second support portion 622. The first support shaft is integrally formed with the first support portion 621. The second support shaft is integrally formed with the second support portion 622. Each support shaft is inserted into the wheel hole 812 of the scribing wheel 800. The central axis of each support shaft defines the wheel rotation central shaft 601.
　ホルダ本体４００とピン支持部６２０または軸支持部との関係について例示する。第１例では、ホルダ本体４００とピン支持部６２０または軸支持部とは単一の物体を構成する。第２例では、個別に構成されたホルダ本体４００とピン支持部６２０または軸支持部とが結合される。ホルダ本体４００とピン支持部６２０または軸支持部とは分離できない形態、または、分離できる形態を取り得る。 The relationship between the holder body 400 and the pin support portion 620 or the shaft support portion will be illustrated. In the first example, the holder body 400 and the pin support portion 620 or the shaft support portion form a single object. In the second example, the individually configured holder body 400 is coupled to the pin support portion 620 or the shaft support portion. The holder body 400 and the pin support portion 620 or the shaft support portion may be inseparable or separable.
　ホルダ３００およびホルダジョイント１００の形態について説明する。第１形態では、ホルダ３００とホルダジョイント１００とは分離できないように一体的に構成される。図７は第１形態の一例を示す。第２形態では、ホルダ３００とホルダジョイント１００とは着脱できるように個別に構成される。図８は第２形態の第１例を示す。図９は第２形態の第２例を示す。 The form of the holder 300 and the holder joint 100 will be described. In the first form, the holder 300 and the holder joint 100 are integrally configured so as not to be separated. FIG. 7 shows an example of the first form. In the second form, the holder 300 and the holder joint 100 are individually configured so as to be detachable. FIG. 8 shows a first example of the second form. FIG. 9 shows a second example of the second form.
　図７に示される第１形態では、ホルダジョイント１００は基部１１０を含む。基部１１０はホルダジョイント保持具４０に取り付けられる。基部１１０は軸受部１２０および軸１３０を含む。軸受部１２０は軸１３０を支持する。軸１３０はホルダ本体４００に設けられる。軸１３０とホルダ本体４００との関係について例示する。第１例では、軸１３０とホルダ本体４００とは単一の物体を構成する。第２例では、個別に構成された軸１３０とホルダ本体４００とが結合される。 In the first form shown in FIG. 7, the holder joint 100 includes the base 110. The base 110 is attached to the holder joint holder 40. The base 110 includes a bearing 120 and a shaft 130. The bearing portion 120 supports the shaft 130. The shaft 130 is provided on the holder body 400. The relationship between the shaft 130 and the holder body 400 will be illustrated. In the first example, the shaft 130 and the holder body 400 form a single object. In the second example, the individually configured shaft 130 and the holder body 400 are coupled.
　軸受部１２０の構成について例示する。第１例では、軸受部１２０は１または複数のラジアルベアリング１２１を含む。第２例では、軸受部１２０は第１例の構成に加え、ケース１２２、ストッパ１４０、および、スペーサの少なくとも１つをさらに含む。図７は２つのラジアルベアリング１２１、ケース１２２、および、ストッパ１４０を含む第２例の軸受部１２０を示す。ラジアルベアリング１２１の内輪１２１Ａは軸１３０に固定される。ケース１２２はラジアルベアリング１２１を収容する。ラジアルベアリング１２１の外輪１２１Ｂはケース１２２に固定される。軸１３０、内輪１２１Ａ、および、ホルダ３００は外輪１２１Ｂおよびケース１２２に対して軸１３０の中心軸ＬＡまわりで回転する。軸受部１２０にスペーサが含まれる例では、一方のラジアルベアリング１２１と他方のラジアルベアリング１２１との間にスペーサが設けられる。スペーサは軸１３０に固定される。 The configuration of the bearing portion 120 will be illustrated. In the first example, the bearing portion 120 includes one or more radial bearings 121. In the second example, the bearing portion 120 further includes at least one of the case 122, the stopper 140, and the spacer in addition to the configuration of the first example. FIG. 7 shows a bearing portion 120 of the second example including two radial bearings 121, a case 122, and a stopper 140. The inner ring 121A of the radial bearing 121 is fixed to the shaft 130. The case 122 houses the radial bearing 121. The outer ring 121B of the radial bearing 121 is fixed to the case 122. The shaft 130, the inner ring 121A, and the holder 300 rotate about the central axis LA of the shaft 130 with respect to the outer ring 121B and the case 122. In the example in which the bearing portion 120 includes a spacer, a spacer is provided between one radial bearing 121 and the other radial bearing 121. The spacer is fixed to the shaft 130.
　ストッパ１４０は例えば第１ストッパ１４１および第２ストッパ１４２を含む。第１ストッパ１４１は軸１３０の先端に設けられる。第１ストッパ１４１はラジアルベアリング１２１の移動を規制する第１規制面１４１Ａを含む。第２ストッパ１４２は軸１３０の根元に設けられる。第２ストッパ１４２はラジアルベアリング１２１の移動を規制する第２規制面１４２Ａを含む。 The stopper 140 includes, for example, a first stopper 141 and a second stopper 142. The first stopper 141 is provided at the tip of the shaft 130. The first stopper 141 includes a first regulation surface 141A that regulates the movement of the radial bearing 121. The second stopper 142 is provided at the base of the shaft 130. The second stopper 142 includes a second regulation surface 142A that regulates the movement of the radial bearing 121.
　第１ストッパ１４１の構成について例示する。第１ストッパ１４１は軸１３０の雌ねじ部にかみ合うねじ付きファスナを含む。ねじ付きファスナは例えばねじまたはボルトを含む。ねじ付きファスナのヘッドは第１規制面１４１Ａを構成する。一方のラジアルベアリング１２１の内輪１２１Ａの端面は第１規制面１４１Ａに接触する。第２ストッパ１４２の構成について例示する。第２ストッパ１４２は軸１３０の周囲に設けられるフランジを含む。フランジの端面は第２規制面１４２Ａを構成する。他方のラジアルベアリング１２１の内輪１２１Ａの端面は第２規制面１４２Ａに接触する。 The configuration of the first stopper 141 will be illustrated. The first stopper 141 includes a threaded fastener that meshes with the female thread portion of the shaft 130. Threaded fasteners include, for example, screws or bolts. The head of the threaded fastener constitutes the first regulatory surface 141A. The end surface of the inner ring 121A of one of the radial bearings 121 comes into contact with the first regulation surface 141A. The configuration of the second stopper 142 will be illustrated. The second stopper 142 includes a flange provided around the shaft 130. The end face of the flange constitutes the second regulation surface 142A. The end surface of the inner ring 121A of the other radial bearing 121 comes into contact with the second regulation surface 142A.
　図８に示される第２形態の第１例では、ホルダジョイント１００は基部１１０およびホルダ取付部１５０を含む。ホルダ取付部１５０はベース１６０を含む。ベース１６０は例えば第１プレート１６１および第２プレート１６２を含む。第１プレート１６１は軸１３０の中心軸ＬＡに沿う方向に関するホルダ３００の位置を決める。第２プレート１６２は軸１３０の中心軸ＬＡに直交する方向に関するホルダ３００の位置を決める。軸１３０はベース１６０に設けられる。軸１３０とベース１６０との関係について例示する。第１例では、軸１３０とベース１６０とは単一の物体を構成する。第２例では、個別に構成された軸１３０とベース１６０とが結合される。軸１３０およびベース１６０は分離できない形態、または、分離できる形態を取り得る。軸１３０は例えば第１プレート１６１に設けられる。 In the first example of the second form shown in FIG. 8, the holder joint 100 includes a base 110 and a holder mounting portion 150. The holder mounting portion 150 includes a base 160. The base 160 includes, for example, a first plate 161 and a second plate 162. The first plate 161 determines the position of the holder 300 with respect to the direction along the central axis LA of the shaft 130. The second plate 162 determines the position of the holder 300 with respect to the direction orthogonal to the central axis LA of the axis 130. The shaft 130 is provided on the base 160. The relationship between the shaft 130 and the base 160 will be illustrated. In the first example, the shaft 130 and the base 160 form a single object. In the second example, the individually configured shaft 130 and the base 160 are coupled. The shaft 130 and the base 160 may be inseparable or separable. The shaft 130 is provided on, for example, the first plate 161.
　図９に示される第２形態の第２例では、ホルダジョイント１００は基部１１０およびホルダ取付部１５０を含む。ホルダ取付部１５０はソケット１７０を含む。ソケット１７０は例えば配置空間１７０Ａを含む。配置空間１７０Ａはホルダ本体４００を配置できるように形成される。軸１３０はソケット１７０に設けられる。軸１３０とソケット１７０との関係について例示する。第１例では、軸１３０とソケット１７０とは単一の物体を構成する。第２例では、個別に構成された軸１３０とソケット１７０とが結合される。軸１３０およびソケット１７０は分離できない形態、または、分離できる形態を取り得る。 In the second example of the second form shown in FIG. 9, the holder joint 100 includes a base 110 and a holder mounting portion 150. The holder mounting portion 150 includes a socket 170. The socket 170 includes, for example, an arrangement space 170A. The arrangement space 170A is formed so that the holder body 400 can be arranged. The shaft 130 is provided in the socket 170. The relationship between the shaft 130 and the socket 170 will be illustrated. In the first example, the shaft 130 and the socket 170 form a single object. In the second example, the individually configured shaft 130 and the socket 170 are coupled. The shaft 130 and the socket 170 may be inseparable or separable.
　図８、図９の第２形態のホルダ３００およびホルダジョイント１００に含まれる軸受部１２０は例えば第１形態のホルダ３００およびホルダジョイント１００に含まれる軸受部１２０と同様に構成される。軸１３０、内輪１２１Ａ、ホルダ取付部１５０、および、ホルダ３００は外輪１２１Ｂおよびケース１２２に対して軸１３０の中心軸ＬＡまわりで回転する。 The bearing portion 120 included in the holder 300 and the holder joint 100 of the second form shown in FIGS. 8 and 9 is configured in the same manner as the bearing portion 120 included in the holder 300 and the holder joint 100 of the first form, for example. The shaft 130, the inner ring 121A, the holder mounting portion 150, and the holder 300 rotate around the central axis LA of the shaft 130 with respect to the outer ring 121B and the case 122.
　一例では、ホルダアセンブリ５０の側面視において、ホイール中心軸８０１、および、スクライビングホイール８００と被加工面との接触点はホルダ３００の中心軸ＬＢ上に位置する。軸１３０の中心軸ＬＡとホイール中心軸８０１との関係について例示する。第１例では、軸１３０の中心軸ＬＡとホイール中心軸８０１との間にトレールが設定される。第２例では、軸１３０の中心軸ＬＡとホイール中心軸８０１との間にトレールが設定されない。 In one example, in the side view of the holder assembly 50, the wheel central axis 801 and the contact point between the scribing wheel 800 and the surface to be machined are located on the central axis LB of the holder 300. The relationship between the central axis LA of the shaft 130 and the wheel central axis 801 will be illustrated. In the first example, a trail is set between the central axis LA of the shaft 130 and the wheel central axis 801. In the second example, no trail is set between the central axis LA of the shaft 130 and the wheel central axis 801.
　トレールは軸１３０の中心軸ＬＡと被加工面との交点と、スクライビングホイール８００と被加工物との接触点との距離である。図７～図９に示されるホルダアセンブリ５０の側面視では、軸１３０の中心軸ＬＡとホルダ３００の中心軸ＬＢとは平行である。軸１３０の中心軸ＬＡとホルダ３００の中心軸ＬＢとの距離がトレールに相当する。トレールが設定される形態では、スクライビングホイール８００の走査方向ＤＳにおいてホイール中心軸８０１が軸１３０の中心軸ＬＡよりも後方に位置する場合、スクライビングホイール８００の直進性が高くなる。 The trail is the distance between the intersection of the central axis LA of the shaft 130 and the work surface and the contact point between the scribing wheel 800 and the work piece. In the side view of the holder assembly 50 shown in FIGS. 7 to 9, the central axis LA of the shaft 130 and the central axis LB of the holder 300 are parallel to each other. The distance between the central axis LA of the shaft 130 and the central axis LB of the holder 300 corresponds to a trail. In the form in which the trail is set, when the wheel central axis 801 is located behind the central axis LA of the shaft 130 in the scanning direction DS of the scribing wheel 800, the straightness of the scribing wheel 800 is increased.
　ホルダアセンブリ５０に第２形態のホルダ３００およびホルダジョイント１００が含まれる場合、ホルダアセンブリ５０は連結構造２１０をさらに備える。連結構造２１０はホルダジョイント１００とホルダ３００とを連結する。連結構造２１０は例えば機械的な結合方法によりホルダジョイント１００とホルダ３００とを連結する機械結合部２１１、および、磁気的な結合方法によりホルダジョイント１００とホルダ３００とを連結する磁気結合部２１２の少なくとも１つを含む。 When the holder assembly 50 includes the holder 300 and the holder joint 100 of the second form, the holder assembly 50 further includes a connecting structure 210. The connecting structure 210 connects the holder joint 100 and the holder 300. The connecting structure 210 is at least a mechanical coupling portion 211 that connects the holder joint 100 and the holder 300 by a mechanical coupling method and a magnetic coupling portion 212 that connects the holder joint 100 and the holder 300 by a magnetic coupling method. Including one.
　図８に示される例では、連結構造２１０は機械結合部２１１を含む。機械結合部２１１の構成について例示する。第１例では、機械結合部２１１はねじ付きファスナによりホルダ取付部１５０とホルダ本体４００とを連結する。ねじ付きファスナはねじまたはボルトを含む。第２例では、機械結合部２１１は嵌合部によりホルダ取付部１５０とホルダ本体４００とを連結する。嵌合部はホルダ取付部１５０およびホルダ本体４００の一方に設けられる第１嵌合部と、ホルダ取付部１５０およびホルダ本体４００の他方に設けられる第２嵌合部とを含む。図７は第１例の機械結合部２１１を示す。機械結合部２１１はホルダ取付部１５０に設けられる雌ねじ部、ホルダ本体４００に設けられる貫通孔、および、ねじ付きファスナを含む。ねじ付きファスナはホルダ本体４００の貫通孔に挿入され、ホルダ取付部１５０の雌ねじ部にかみ合う。ねじ付きファスナによりホルダ本体４００がホルダ取付部１５０に固定される。 In the example shown in FIG. 8, the connecting structure 210 includes a mechanical coupling portion 211. The configuration of the mechanical coupling portion 211 will be illustrated. In the first example, the mechanical coupling portion 211 connects the holder mounting portion 150 and the holder main body 400 with a screwed fastener. Threaded fasteners include screws or bolts. In the second example, the mechanical coupling portion 211 connects the holder mounting portion 150 and the holder main body 400 by a fitting portion. The fitting portion includes a first fitting portion provided on one of the holder mounting portion 150 and the holder main body 400, and a second fitting portion provided on the other side of the holder mounting portion 150 and the holder main body 400. FIG. 7 shows the mechanical coupling portion 211 of the first example. The mechanical coupling portion 211 includes a female screw portion provided in the holder mounting portion 150, a through hole provided in the holder main body 400, and a threaded fastener. The threaded fastener is inserted into the through hole of the holder body 400 and meshes with the female threaded portion of the holder mounting portion 150. The holder body 400 is fixed to the holder mounting portion 150 by the screwed fastener.
　図９に示される例では、連結構造２１０は磁気結合部２１２を含む。磁気結合部２１２の構成について例示する。第１例では、磁気結合部２１２はソケット１７０に設けられる永久磁石、および、ホルダ本体４００に設けられる磁性体を含む。第２例では、磁気結合部２１２はソケット１７０に設けられる磁性体、および、ホルダ本体４００に設けられる永久磁石を含む。第３例では、磁気結合部２１２はソケット１７０に設けられる永久磁石、および、ホルダ本体４００に設けられる永久磁石を含む。永久磁石と磁性体との間に働く磁力、または、永久磁石と永久磁石との間に働く磁力によりホルダ３００がソケット１７０に保持される。 In the example shown in FIG. 9, the connecting structure 210 includes a magnetic coupling portion 212. The configuration of the magnetic coupling portion 212 will be illustrated. In the first example, the magnetic coupling portion 212 includes a permanent magnet provided in the socket 170 and a magnetic material provided in the holder body 400. In the second example, the magnetic coupling portion 212 includes a magnetic material provided in the socket 170 and a permanent magnet provided in the holder body 400. In the third example, the magnetic coupling portion 212 includes a permanent magnet provided in the socket 170 and a permanent magnet provided in the holder body 400. The holder 300 is held in the socket 170 by the magnetic force acting between the permanent magnet and the magnetic material or the magnetic force acting between the permanent magnet and the permanent magnet.
　連結構造２１０に磁気結合部２１２が含まれる場合、一例では、ホルダ取付部１５０はホルダ規制部１８０をさらに備える。ホルダ規制部１８０はソケット１７０に対するホルダ３００の位置が安定するようにホルダ３００に接触する。ホルダ規制部１８０は例えばピン１８１を含む。ピン１８１は配置空間１７０Ａに設けられる。ピン１８１はソケット１７０に支持される。ホルダ３００は傾斜面３３０をさらに含む。傾斜面３３０はホルダ３００の側面視においてホルダ３００の中心軸ＬＢに対して傾斜する。傾斜面３３０はホルダ３００の中心軸ＬＢに沿う方向に関する第１端部３３１および第２端部３３２を含む。第１端部３３１は第２端部３３２よりもスクライビングホイール８００から遠い。傾斜面３３０は第１端部３３１が第２端部３３２よりもホルダ３００の中心軸ＬＢに近くなるように傾斜する。 When the connecting structure 210 includes the magnetic coupling portion 212, in one example, the holder mounting portion 150 further includes a holder regulating portion 180. The holder regulating portion 180 contacts the holder 300 so that the position of the holder 300 with respect to the socket 170 is stable. The holder regulating unit 180 includes, for example, a pin 181. The pin 181 is provided in the arrangement space 170A. Pin 181 is supported by socket 170. The holder 300 further includes an inclined surface 330. The inclined surface 330 is inclined with respect to the central axis LB of the holder 300 in the side view of the holder 300. The inclined surface 330 includes a first end portion 331 and a second end portion 332 with respect to the direction along the central axis LB of the holder 300. The first end 331 is farther from the scribing wheel 800 than the second end 332. The inclined surface 330 is inclined so that the first end portion 331 is closer to the central axis LB of the holder 300 than the second end portion 332.
　磁気結合部２１２によりホルダ３００がソケット１７０に保持された状態では、傾斜面３３０はピン１８１に接触する。傾斜面３３０とピン１８１との接触により、ホルダ３００の中心軸ＬＢに沿う方向に関するソケット１７０に対するホルダ３００の位置が決められる。ホルダアセンブリ５０の側面視において、軸１３０の中心軸ＬＡと直交する方向の力がホルダ３００に働く。この力によりホルダ本体４００の外周面の一部がソケット１７０の内周面に押し付けられる。 When the holder 300 is held in the socket 170 by the magnetic coupling portion 212, the inclined surface 330 comes into contact with the pin 181. The contact between the inclined surface 330 and the pin 181 determines the position of the holder 300 with respect to the socket 170 in the direction along the central axis LB of the holder 300. In the side view of the holder assembly 50, a force in a direction orthogonal to the central axis LA of the shaft 130 acts on the holder 300. By this force, a part of the outer peripheral surface of the holder body 400 is pressed against the inner peripheral surface of the socket 170.
　図１０～図２０はホルダユニット２００の平面視におけるホルダユニット２００のモデルを示す。ホルダ３００に対しては例えば第１基準面３０１および第２基準面３０２が規定される。第１基準面３０１はホルダ３００の高さ方向を規定する第１軸、および、ホルダ３００の前後方向を規定する第２軸に平行である。第２基準面３０２はホルダ３００の高さ方向を規定する第１軸、および、ホルダ３００の幅方向を規定する第３軸に平行である。ホルダ３００の側面視においてホルダ３００の前後方向はホルダ３００の高さ方向に直交する。ホルダ３００の正面視においてホルダ３００の幅方向はホルダ３００の高さ方向に直交する。第１軸と第２軸とは直交する。第１軸と第３軸とは直交する。第２軸と第３軸とは直交する。図示される例では、第１基準面３０１はホルダ３００の幅方向の中心に規定される。第２基準面３０２はホルダ３００の前後方向の中心に規定される。ホルダ３００の中心軸ＬＢは第１軸に平行である。第１基準面３０１と第２基準面３０２とは直交する。 10 to 20 show a model of the holder unit 200 in a plan view of the holder unit 200. For the holder 300, for example, a first reference surface 301 and a second reference surface 302 are defined. The first reference surface 301 is parallel to the first axis that defines the height direction of the holder 300 and the second axis that defines the front-rear direction of the holder 300. The second reference surface 302 is parallel to the first axis that defines the height direction of the holder 300 and the third axis that defines the width direction of the holder 300. In the side view of the holder 300, the front-rear direction of the holder 300 is orthogonal to the height direction of the holder 300. When viewed from the front of the holder 300, the width direction of the holder 300 is orthogonal to the height direction of the holder 300. The first axis and the second axis are orthogonal to each other. The first axis and the third axis are orthogonal to each other. The second axis and the third axis are orthogonal to each other. In the illustrated example, the first reference plane 301 is defined at the center of the holder 300 in the width direction. The second reference surface 302 is defined at the center of the holder 300 in the front-rear direction. The central axis LB of the holder 300 is parallel to the first axis. The first reference plane 301 and the second reference plane 302 are orthogonal to each other.
　以下では、第１基準面３０１および第２基準面３０２により規定される領域をそれぞれ次のように称する。ホルダ３００の前後方向において第２基準面３０２に対する前方の領域を「前方領域ＲＡ」と称する。ホルダ３００の前後方向において第２基準面３０２に対する後方の領域を「後方領域ＲＢ」と称する。ホルダ３００の幅方向において第１基準面３０１に対する一方の領域を「第１側方領域ＲＣ」と称する。ホルダ３００の幅方向において第１基準面３０１に対する他方の領域を「第２側方領域ＲＤ」と称する。図示される例では、第１側方領域ＲＣは第１基準面３０１に対して配置空間３１０の第１側部３１１が位置する領域である。第２側方領域ＲＤは第１基準面３０１に対して配置空間３１０の第２側部３１２が位置する領域である。 In the following, the regions defined by the first reference plane 301 and the second reference plane 302 will be referred to as follows. The region in front of the second reference surface 302 in the front-rear direction of the holder 300 is referred to as "front region RA". The region behind the second reference surface 302 in the front-rear direction of the holder 300 is referred to as a "rear region RB". One region with respect to the first reference plane 301 in the width direction of the holder 300 is referred to as a "first lateral region RC". The other region with respect to the first reference plane 301 in the width direction of the holder 300 is referred to as a "second lateral region RD". In the illustrated example, the first lateral region RC is the region where the first side portion 311 of the arrangement space 310 is located with respect to the first reference surface 301. The second side region RD is an region in which the second side portion 312 of the arrangement space 310 is located with respect to the first reference surface 301.
　ホイール支持構造５００は側面支持部７００をさらに備える。側面支持部７００は傾斜状態のスクライビングホイール８００のホイール側面８３０を支持する。スクライビングホイール８００の傾斜状態はホルダユニット２００の平面視においてホイール中心面８０２がホイール回転中心軸６０１に対して傾斜した状態である。 The wheel support structure 500 further includes a side support portion 700. The side support portion 700 supports the wheel side surface 830 of the inclined scribing wheel 800. The tilted state of the scribing wheel 800 is a state in which the wheel center surface 802 is tilted with respect to the wheel rotation center axis 601 in the plan view of the holder unit 200.
　図３に示されるように、ホイール側面８３０は接触部８３０Ａおよび非接触部８３０Ｂを含む。接触部８３０Ａはスクライビングホイール８００が静止した状態、または、スクライビングホイール８００が回転した状態において側面支持部７００に接触する部分である。一例では、接触部８３０Ａはホイール側面８３０における径方向の外方の部分を含む。径方向の外方の部分は境界部８４０に隣り合う部分を含む。非接触部８３０Ｂはスクライビングホイール８００が静止した状態、および、スクライビングホイール８００が回転した状態のいずれにおいても側面支持部７００に接触しない部分である。一例では、非接触部８３０Ｂはホイール側面８３０における径方向の内方の部分を含む。径方向の内方の部分は面取り８１３に隣り合う部分を少なくとも含む。 As shown in FIG. 3, the wheel side surface 830 includes a contact portion 830A and a non-contact portion 830B. The contact portion 830A is a portion that comes into contact with the side surface support portion 700 when the scribing wheel 800 is stationary or the scribing wheel 800 is rotated. In one example, the contact portion 830A includes a radial outer portion of the wheel side surface 830. The outer portion in the radial direction includes a portion adjacent to the boundary portion 840. The non-contact portion 830B is a portion that does not come into contact with the side surface support portion 700 in either a stationary state of the scribing wheel 800 or a rotated state of the scribing wheel 800. In one example, the non-contact portion 830B includes a radial inner portion of the wheel side surface 830. The inner portion in the radial direction includes at least a portion adjacent to the chamfer 813.
　図１０～図２０を参照して、ホイール支持構造５００に関するいくつかの形態について説明する。以下では、スクライビングホイール８００が被加工物に接触していない状態を「基準状態」と称する。スクライビングホイール８００が被加工物に押し付けられ、走査が開始される前の状態を「初期接触状態」と称する。 With reference to FIGS. 10 to 20, some forms of the wheel support structure 500 will be described. Hereinafter, the state in which the scribing wheel 800 is not in contact with the workpiece is referred to as a “reference state”. The state before the scribing wheel 800 is pressed against the workpiece and scanning is started is referred to as an "initial contact state".
　図１０～図１２に示されるホイール支持構造５００の第１形態では、側面支持部７００は支持面７１０を含む。支持面７１０は傾斜状態のスクライビングホイール８００のホイール側面８３０を支持する。一例では、支持面７１０は配置空間３１０を規定する。ピン支持部６２０の配置面６３０は支持面７１０を含む。支持面７１０は配置空間３１０の第１側部３１１に位置する第１支持面７１１、および、配置空間３１０の第２側部３１２に位置する第２支持面７１２を含む。第１支持面７１１は第１配置面６３１に含まれる。第２支持面７１２は第２配置面６３２に含まれる。 In the first form of the wheel support structure 500 shown in FIGS. 10 to 12, the side support portion 700 includes the support surface 710. The support surface 710 supports the wheel side surface 830 of the inclined scribing wheel 800. In one example, the support surface 710 defines a placement space 310. The arrangement surface 630 of the pin support portion 620 includes the support surface 710. The support surface 710 includes a first support surface 711 located on the first side portion 311 of the arrangement space 310 and a second support surface 712 located on the second side portion 312 of the arrangement space 310. The first support surface 711 is included in the first arrangement surface 631. The second support surface 712 is included in the second arrangement surface 632.
　ホイール回転中心軸６０１はホルダ３００の幅方向に平行である。支持面７１０はホルダユニット２００の平面視においてホルダ３００の前後方向に対して傾斜する。支持面７１０がホルダ３００の前後方向に対して傾斜する状態とは、各支持面７１１、７１２の少なくとも１つがホルダ３００の前後方向に対して傾斜する状態をいう。図示される例では、各支持面７１１、７１２の両方がホルダ３００の前後方向に対して傾斜する。第１支持面７１１は前方領域ＲＡにおいて第１基準面３０１に接近するように傾斜する。第２支持面７１２は前方領域ＲＡにおいて第１基準面３０１から離れるように傾斜する。第１支持面７１１と第２支持面７１２とは平行である。第１支持面７１１と第２支持面７１２との距離はスクライビングホイール８００の本体８１０の厚さよりも大きい。 The wheel rotation center axis 601 is parallel to the width direction of the holder 300. The support surface 710 is inclined with respect to the front-rear direction of the holder 300 in the plan view of the holder unit 200. The state in which the support surface 710 is inclined with respect to the front-rear direction of the holder 300 means a state in which at least one of the support surfaces 711 and 712 is inclined with respect to the front-rear direction of the holder 300. In the illustrated example, both the support surfaces 711 and 712 are inclined with respect to the front-rear direction of the holder 300. The first support surface 711 is inclined so as to approach the first reference surface 301 in the front region RA. The second support surface 712 is inclined so as to be separated from the first reference surface 301 in the front region RA. The first support surface 711 and the second support surface 712 are parallel to each other. The distance between the first support surface 711 and the second support surface 712 is larger than the thickness of the main body 810 of the scribing wheel 800.
　第１形態のホイール支持構造５００の基準状態は例えば第１～第６基準状態を含む。
　図１０に示される第１基準状態では、ホイール中心面８０２はホイール回転中心軸６０１に対して傾斜する。スクライビングホイール８００は傾斜状態である。ホルダ３００の幅方向において第１支持面７１１と第１ホイール側面８３１とが対向する。ホルダ３００の幅方向において第２支持面７１２と第２ホイール側面８３２とが対向する。ホイール中心面８０２はホルダ３００の前後方向に対して傾斜し、支持面７１０に平行である。 The reference state of the wheel support structure 500 of the first form includes, for example, the first to sixth reference states.
In the first reference state shown in FIG. 10, the wheel center surface 802 is inclined with respect to the wheel rotation center axis 601. The scribing wheel 800 is in an inclined state. The first support surface 711 and the first wheel side surface 831 face each other in the width direction of the holder 300. The second support surface 712 and the second wheel side surface 832 face each other in the width direction of the holder 300. The wheel center surface 802 is inclined with respect to the front-rear direction of the holder 300 and is parallel to the support surface 710.
　第１支持面７１１と第１ホイール側面８３１とは平行である。第１ホイール側面８３１の接触部８３０Ａおよび非接触部８３０Ｂは第１支持面７１１に接触しない。第１支持面７１１と第１ホイール側面８３１との間には空間が形成される。第２支持面７１２と第２ホイール側面８３２とは平行である。第２ホイール側面８３２の接触部８３０Ａおよび非接触部８３０Ｂは第２支持面７１２に接触しない。第２支持面７１２と第２ホイール側面８３２との間には空間が形成される。 The first support surface 711 and the first wheel side surface 831 are parallel. The contact portion 830A and the non-contact portion 830B of the first wheel side surface 831 do not come into contact with the first support surface 711. A space is formed between the first support surface 711 and the first wheel side surface 831. The second support surface 712 and the second wheel side surface 832 are parallel. The contact portion 830A and the non-contact portion 830B of the second wheel side surface 832 do not come into contact with the second support surface 712. A space is formed between the second support surface 712 and the second wheel side surface 832.
　第２基準状態では、第１ホイール側面８３１が第１支持面７１１に接触し、第２ホイール側面８３２は第２支持面７１２に接触しない。その他の点は第１基準状態と同様である。第３基準状態では、第２ホイール側面８３２は第２支持面７１２に接触し、第１ホイール側面８３１は第１支持面７１１に接触しない。その他の点は第１基準状態と同様である。第４基準状態では、支持面７１０とホイール側面８３０とが非平行であり、ホイール側面８３０が支持面７１０に接触しない。その他の点は第１基準状態と同様である。第５基準状態では、ホイール側面８３０と支持面７１０との関係が第１～第４基準状態とは異なり、さらに以下の第６基準状態のように各側面８３１、８３２が各支持面７１１、７１２に接触した状態とも異なる。 In the second reference state, the first wheel side surface 831 contacts the first support surface 711, and the second wheel side surface 832 does not contact the second support surface 712. Other points are the same as the first reference state. In the third reference state, the second wheel side surface 832 is in contact with the second support surface 712, and the first wheel side surface 831 is not in contact with the first support surface 711. Other points are the same as the first reference state. In the fourth reference state, the support surface 710 and the wheel side surface 830 are non-parallel, and the wheel side surface 830 does not come into contact with the support surface 710. Other points are the same as the first reference state. In the fifth reference state, the relationship between the wheel side surface 830 and the support surface 710 is different from the first to fourth reference states, and as in the sixth reference state below, the side surfaces 831 and 832 are the support surfaces 711 and 712, respectively. It is also different from the state of contact with.
　図１１に示される第６基準状態では、ホイール中心面８０２はホイール回転中心軸６０１に対して傾斜する。スクライビングホイール８００は傾斜状態である。ホルダ３００の幅方向において第１支持面７１１と第１ホイール側面８３１とが対向する。ホルダ３００の幅方向において第２支持面７１２と第２ホイール側面８３２とが対向する。ホイール中心面８０２はホルダ３００の前後方向および支持面７１０に対して傾斜する。 In the sixth reference state shown in FIG. 11, the wheel center surface 802 is tilted with respect to the wheel rotation center axis 601. The scribing wheel 800 is in an inclined state. The first support surface 711 and the first wheel side surface 831 face each other in the width direction of the holder 300. The second support surface 712 and the second wheel side surface 832 face each other in the width direction of the holder 300. The wheel center surface 802 is inclined with respect to the front-rear direction of the holder 300 and the support surface 710.
　第１支持面７１１と第１ホイール側面８３１とは非平行である。第１ホイール側面８３１の接触部８３０Ａの一部は前方領域ＲＡにおいて第１支持面７１１に接触する。第１ホイール側面８３１の接触部８３０Ａの他の部分、および、非接触部８３０Ｂは第１支持面７１１に接触しない。第１ホイール側面８３１の接触部８３０Ａの他の部分、および、非接触部８３０Ｂと第１支持面７１１との間には空間が形成される。 The first support surface 711 and the first wheel side surface 831 are non-parallel. A part of the contact portion 830A of the first wheel side surface 831 comes into contact with the first support surface 711 in the front region RA. The other portion of the contact portion 830A of the first wheel side surface 831 and the non-contact portion 830B do not come into contact with the first support surface 711. A space is formed between the other portion of the contact portion 830A of the first wheel side surface 831 and the non-contact portion 830B and the first support surface 711.
　第２支持面７１２と第２ホイール側面８３２とは非平行である。第２ホイール側面８３２の接触部８３０Ａの一部は後方領域ＲＢにおいて第２支持面７１２に接触する。第２ホイール側面８３２の接触部８３０Ａの他の部分、および、非接触部８３０Ｂは第２支持面７１２に接触しない。第２ホイール側面８３２の接触部８３０Ａの他の部分、および、非接触部８３０Ｂと第２支持面７１２との間には空間が形成される。 The second support surface 712 and the second wheel side surface 832 are non-parallel. A part of the contact portion 830A of the second wheel side surface 832 comes into contact with the second support surface 712 in the rear region RB. Other parts of the contact portion 830A and the non-contact portion 830B of the second wheel side surface 832 do not come into contact with the second support surface 712. A space is formed between the other portion of the contact portion 830A of the second wheel side surface 832 and the non-contact portion 830B and the second support surface 712.
　スクライブ加工時には、基準状態のスクライビングホイール８００が被加工物に押し付けられ、スクライビングホイール８００の状態が基準状態から初期接触状態に遷移する。スクライビングホイール８００が被加工物に押し付けられることにともない、スクライビングホイール８００は被加工物から反力を受ける。この反力により、ホイール中心面８０２に平行な中心軸まわりでスクライビングホイール８００を第１回転方向に回転させるトルクである押付時トルクがスクライビングホイール８００に作用する。第１回転方向はホイール中心面８０２がホイール回転中心軸６０１に直交する状態に近づくようにスクライビングホイール８００が回転する方向である。スクライビングホイール８００が第１回転方向に回転する場合、ホルダ３００の前後方向に対するホイール中心面８０２の傾きが小さくなる。 At the time of scribe processing, the scribing wheel 800 in the reference state is pressed against the workpiece, and the state of the scribing wheel 800 changes from the reference state to the initial contact state. As the scribing wheel 800 is pressed against the work piece, the scribing wheel 800 receives a reaction force from the work piece. Due to this reaction force, the pressing torque, which is the torque for rotating the scribing wheel 800 in the first rotation direction around the central axis parallel to the wheel center surface 802, acts on the scribing wheel 800. The first rotation direction is the direction in which the scribing wheel 800 rotates so that the wheel center surface 802 approaches a state orthogonal to the wheel rotation center axis 601. When the scribing wheel 800 rotates in the first rotation direction, the inclination of the wheel center surface 802 with respect to the front-rear direction of the holder 300 becomes small.
　第１～第５基準状態のいずれから初期接触状態に遷移した場合でも、初期接触状態ではスクライビングホイール８００の状態は図１１に示される第６基準状態と実質的に同様の状態になる。基準状態が第１～第５基準状態のいずれかである場合、初期接触状態への遷移にともない、各ホイール側面８３１、８３２が対応する支持面７１１、７１２に接触するまでスクライビングホイール８００が第１回転方向に回転する。 Regardless of the transition from any of the first to fifth reference states to the initial contact state, the state of the scribing wheel 800 is substantially the same as the sixth reference state shown in FIG. 11 in the initial contact state. When the reference state is any of the first to fifth reference states, the scribing wheel 800 is the first in the transition to the initial contact state until the side surfaces 831 and 832 of the wheels come into contact with the corresponding support surfaces 711 and 712. Rotate in the direction of rotation.
　図１１に示される第６基準状態から初期接触状態に遷移する場合、スクライビングホイール８００は実質的には第１回転方向に回転しない。初期接触状態では、スクライビングホイール８００の状態は傾斜状態であり、スクライビングホイール８００に作用する押付時トルクによりホイール側面８３０は支持面７１０に押し付けられる。第１ホイール側面８３１の接触部８３０Ａは第１支持面７１１に押し付けられる。第２ホイール側面８３２の接触部８３０Ａは第２支持面７１２に押し付けられる。 When transitioning from the sixth reference state shown in FIG. 11 to the initial contact state, the scribing wheel 800 does not substantially rotate in the first rotation direction. In the initial contact state, the state of the scribing wheel 800 is an inclined state, and the wheel side surface 830 is pressed against the support surface 710 by the pressing torque acting on the scribing wheel 800. The contact portion 830A of the first wheel side surface 831 is pressed against the first support surface 711. The contact portion 830A of the second wheel side surface 832 is pressed against the second support surface 712.
　第１支持面７１１は第１ホイール側面８３１を支持する。一例では、第１支持面７１１は第１ホイール側面８３１のうちの第２基準面３０２に対して前方および後方の一方に位置する部分を支持する。図示される例では、第１支持面７１１は第１ホイール側面８３１の接触部８３０Ａのうちの前方領域ＲＡに位置する部分を支持する。他の例では、第１支持面７１１は第１ホイール側面８３１の接触部８３０Ａのうちの後方領域ＲＢに位置する部分を支持する。 The first support surface 711 supports the first wheel side surface 831. In one example, the first support surface 711 supports a portion of the first wheel side surface 831 located on either the front side or the rear side with respect to the second reference surface 302. In the illustrated example, the first support surface 711 supports a portion of the contact portion 830A of the first wheel side surface 831 that is located in the front region RA. In another example, the first support surface 711 supports a portion of the contact portion 830A of the first wheel side surface 831 that is located in the rear region RB.
　第２支持面７１２は第２ホイール側面８３２を支持する。一例では、第２支持面７１２は第２ホイール側面８３２のうちの第２基準面３０２に対して前方および後方の他方に位置する部分を支持する。図示される例では、第２支持面７１２は第２ホイール側面８３２の接触部８３０Ａのうちの後方領域ＲＢに位置する部分を支持する。他の例では、第２支持面７１２は第２ホイール側面８３２の接触部８３０Ａのうちの前方領域ＲＡに位置する部分を支持する。 The second support surface 712 supports the second wheel side surface 832. In one example, the second support surface 712 supports a portion of the second wheel side surface 832 located on the other side of the front and rear of the second reference surface 302. In the illustrated example, the second support surface 712 supports a portion of the contact portion 830A of the second wheel side surface 832 that is located in the rear region RB. In another example, the second support surface 712 supports a portion of the contact portion 830A of the second wheel side surface 832 that is located in the front region RA.
　押付時トルクが作用する傾斜状態のスクライビングホイール８００のホイール側面８３０が側面支持部７００に支持されるため、ホルダ３００に対するスクライビングホイール８００の状態が安定する。第１ホイール側面８３１のうちの第２基準面３０２に対して前方および後方の一方に位置する部分が第１支持面７１１に支持され、第２ホイール側面８３２のうちの第２基準面３０２に対して前方および後方の他方に位置する部分が第２支持面７１２に支持される例では、ホルダ３００に対するスクライビングホイール８００の状態がより安定する。 Since the wheel side surface 830 of the inclined scribing wheel 800 on which the pressing torque acts is supported by the side surface support portion 700, the state of the scribing wheel 800 with respect to the holder 300 is stable. A portion of the first wheel side surface 831 located on one of the front side and the rear side with respect to the second reference surface 302 is supported by the first support surface 711 with respect to the second reference surface 302 of the second wheel side surface 832. In the example in which the portion located on the other side of the front and the rear is supported by the second support surface 712, the state of the scribing wheel 800 with respect to the holder 300 is more stable.
　スクライブ加工では、初期接触状態からスクライビングホイール８００を走査方向ＤＳに走査する走査状態に遷移する。走査方向ＤＳは例えば基準状態におけるホルダ３００の前後方向に平行な方向である。走査状態では、スクライビングホイール８００はホイール回転中心軸６０１まわりで回転し、被加工物から反力を受ける。トレールが設定されたホルダアセンブリ５０では、この反力により、ホルダジョイント１００の軸１３０の中心軸ＬＡまわりでホルダユニット２００を第２回転方向に回転させるトルク(以下「走査時トルク」という)がホルダユニット２００に作用する。第２回転方向はホルダユニット２００の平面視においてホイール中心面８０２が走査方向ＤＳに平行な状態に近づくようにホルダユニット２００が回転する方向である。 In the scribe processing, the transition from the initial contact state to the scanning state in which the scribing wheel 800 is scanned in the scanning direction DS. The scanning direction DS is, for example, a direction parallel to the front-rear direction of the holder 300 in the reference state. In the scanning state, the scribing wheel 800 rotates around the wheel rotation center axis 601 and receives a reaction force from the workpiece. In the holder assembly 50 in which the trail is set, due to this reaction force, the torque for rotating the holder unit 200 in the second rotation direction (hereinafter referred to as "scanning torque") around the central axis LA of the shaft 130 of the holder joint 100 is the holder. Acts on unit 200. The second rotation direction is the direction in which the holder unit 200 rotates so that the wheel center surface 802 approaches a state parallel to the scanning direction DS in the plan view of the holder unit 200.
　初期接触状態においてホイール中心面８０２がホルダ３００の前後方向に対して傾斜する例では、初期接触状態から走査状態に遷移した直後、ホイール中心面８０２は走査方向ＤＳに対して傾斜している。走査時トルクによりホルダユニット２００が第２回転方向に回転し、図１２に示されるようにホイール中心面８０２が走査方向ＤＳに平行な状態になる。初期接触状態においてホイール中心面８０２がホルダ３００の前後方向に平行な例では、初期接触状態から走査状態に遷移した場合にホイール中心面８０２は走査方向ＤＳに平行である。 In the example in which the wheel center surface 802 is tilted with respect to the front-rear direction of the holder 300 in the initial contact state, the wheel center surface 802 is tilted with respect to the scanning direction DS immediately after the transition from the initial contact state to the scanning state. The holder unit 200 rotates in the second rotation direction due to the scanning torque, and the wheel center surface 802 becomes parallel to the scanning direction DS as shown in FIG. In the example in which the wheel center surface 802 is parallel to the front-rear direction of the holder 300 in the initial contact state, the wheel center surface 802 is parallel to the scanning direction DS when transitioning from the initial contact state to the scanning state.
　走査状態では、スクライビングホイール８００は被加工物から反力を受け、押付時トルクがスクライビングホイール８００に継続的に作用し、ホイール側面８３０が支持面７１０に支持された状態が維持される。このため、スクライビングホイール８００の走査中におけるスクライビングホイール８００の微小な姿勢の変化が抑えられ、スクライビングホイール８００の直進性が向上する。これは被加工物に形成されるスクライブラインの均一性、および、被加工物の品質の向上に寄与する。 In the scanning state, the scribing wheel 800 receives a reaction force from the workpiece, the torque at the time of pressing continuously acts on the scribing wheel 800, and the state in which the wheel side surface 830 is supported by the support surface 710 is maintained. Therefore, a slight change in the posture of the scribing wheel 800 during scanning of the scribing wheel 800 is suppressed, and the straightness of the scribing wheel 800 is improved. This contributes to the uniformity of the scribe line formed on the work piece and the improvement of the quality of the work piece.
　図１３～図１５に示されるホイール支持構造５００の第２形態では、ホルダユニット２００の平面視におけるホルダ３００の幅方向とホイール回転中心軸６０１との関係が図１０～図２に示される第１形態のホイール支持構造５００とは異なる。その他の点は第１形態と実質的に同様である。 In the second form of the wheel support structure 500 shown in FIGS. 13 to 15, the relationship between the width direction of the holder 300 and the wheel rotation center axis 601 in the plan view of the holder unit 200 is shown in FIGS. 10 to 2. It is different from the wheel support structure 500 of the form. Other points are substantially the same as those of the first form.
　中心支持部６００は傾斜構造６５０を含む。傾斜構造６５０はホルダユニット２００の平面視においてホルダ３００の幅方向に対してホイール回転中心軸６０１が傾斜するように構成される。一例では、傾斜構造６５０はピン６１０および各ピン挿入孔６２１Ａ、６２２Ａを含む。第１ピン挿入孔６２１Ａはホルダユニット２００の平面視において自身の中心軸がホルダ３００の幅方向に対して傾斜するように第１支持部６２１に形成される。第２ピン挿入孔６２２Ａはホルダユニット２００の平面視において自身の中心軸がホルダ３００の幅方向に対して傾斜するように第２支持部６２２に形成される。各ピン挿入孔６２１Ａ、６２２Ａの中心軸は同軸である。ピン６１０が各ピン挿入孔６２１Ａ、６２２Ａに挿入された状態では、ホルダユニット２００の平面視においてホイール回転中心軸６０１はホルダ３００の幅方向に交差する。 The central support portion 600 includes an inclined structure 650. The inclined structure 650 is configured such that the wheel rotation center axis 601 is inclined with respect to the width direction of the holder 300 in the plan view of the holder unit 200. In one example, the tilted structure 650 includes pins 610 and pin insertion holes 621A, 622A, respectively. The first pin insertion hole 621A is formed in the first support portion 621 so that its central axis is inclined with respect to the width direction of the holder 300 in the plan view of the holder unit 200. The second pin insertion hole 622A is formed in the second support portion 622 so that its central axis is inclined with respect to the width direction of the holder 300 in the plan view of the holder unit 200. The central axes of the pin insertion holes 621A and 622A are coaxial. When the pin 610 is inserted into the pin insertion holes 621A and 622A, the wheel rotation center axis 601 intersects the width direction of the holder 300 in the plan view of the holder unit 200.
　第２形態のホイール支持構造５００の基準状態は第１形態のホイール支持構造５００と同様に第１～第６基準状態を含む。図１３は第２形態のホイール支持構造５００における第１基準状態を示す。図１４は第２形態のホイール支持構造５００における第６基準状態を示す。第２形態のホイール支持構造５００における各基準状態は第１形態のホイール支持構造５００における対応する基準状態に準じる。 The reference state of the wheel support structure 500 of the second form includes the first to sixth reference states as in the wheel support structure 500 of the first form. FIG. 13 shows the first reference state in the wheel support structure 500 of the second form. FIG. 14 shows a sixth reference state in the wheel support structure 500 of the second form. Each reference state in the wheel support structure 500 of the second form conforms to the corresponding reference state in the wheel support structure 500 of the first form.
　基準状態のスクライビングホイール８００が被加工物に押し付けられることにより、スクライビングホイール８００の状態が基準状態から初期接触状態に遷移する。第１～第５基準状態のいずれから初期接触状態に遷移した場合でも、初期接触状態ではスクライビングホイール８００の状態は図１４に示される第６基準状態と実質的に同様の状態になる。第２形態のホイール支持構造５００における基準状態から初期接触状態への遷移の様子、および、初期接触状態は第１形態のホイール支持構造５００における対応する状態に準じる。 When the scribing wheel 800 in the reference state is pressed against the workpiece, the state of the scribing wheel 800 changes from the reference state to the initial contact state. Regardless of the transition from any of the first to fifth reference states to the initial contact state, the state of the scribing wheel 800 is substantially the same as the sixth reference state shown in FIG. 14 in the initial contact state. The transition from the reference state to the initial contact state in the wheel support structure 500 of the second form and the initial contact state conform to the corresponding states in the wheel support structure 500 of the first form.
　スクライビングホイール８００の走査の開始にともない、初期接触状態から走査状態に遷移する。走査状態では、図１５に示されるようにホイール中心面８０２が走査方向ＤＳに平行な状態になる。第２形態のホイール支持構造５００における初期接触状態から走査状態への遷移の様子、および、走査状態は第１形態のホイール支持構造５００における対応する状態に準じる。 With the start of scanning of the scribing wheel 800, the initial contact state transitions to the scanning state. In the scanning state, the wheel center surface 802 is parallel to the scanning direction DS as shown in FIG. The transition from the initial contact state to the scanning state in the wheel support structure 500 of the second form and the scanning state conform to the corresponding states in the wheel support structure 500 of the first form.
　図１６、図１７に示されるホイール支持構造５００の第３形態では、側面支持部７００は突出部７２０を含む。突出部７２０は傾斜状態のスクライビングホイール８００のホイール側面８３０を支持する。突出部７２０は配置面６３０から配置空間３１０に向けて突出する。一例では、配置面６３０はホルダ３００の前後方向に平行である。第１配置面６３１と第２配置面６３２との距離はスクライビングホイール８００の本体８１０の厚さよりも大きい。 In the third form of the wheel support structure 500 shown in FIGS. 16 and 17, the side support portion 700 includes the protrusion 720. The protrusion 720 supports the wheel side surface 830 of the inclined scribing wheel 800. The projecting portion 720 projects from the arrangement surface 630 toward the arrangement space 310. In one example, the placement surface 630 is parallel to the front-back direction of the holder 300. The distance between the first arrangement surface 631 and the second arrangement surface 632 is larger than the thickness of the main body 810 of the scribing wheel 800.
　突出部７２０は配置空間３１０の第１側部３１１に位置する第１突出部７２１、および、配置空間３１０の第２側部３１２に位置する第２突出部７２２を含む。第１突出部７２１は第１配置面６３１のうちの前方領域ＲＡに位置する部分に設けられる。第２突出部７２２は第２配置面６３２のうちの後方領域ＲＢに位置する部分に設けられる。第１配置面６３１に対する第１突出部７２１の高さと第２配置面６３２に対する第２突出部７２２の高さとは等しい。 The protrusion 720 includes a first protrusion 721 located on the first side portion 311 of the arrangement space 310 and a second protrusion 722 located on the second side portion 312 of the arrangement space 310. The first protrusion 721 is provided in a portion of the first arrangement surface 631 located in the front region RA. The second protrusion 722 is provided on a portion of the second arrangement surface 632 located in the rear region RB. The height of the first protrusion 721 with respect to the first arrangement surface 631 and the height of the second protrusion 722 with respect to the second arrangement surface 632 are equal to each other.
　第３形態のホイール支持構造５００の基準状態は例えば第１～第７基準状態を含む。
　図１６に示される第１基準状態では、ホイール中心面８０２はホイール回転中心軸６０１に対して傾斜する。スクライビングホイール８００は傾斜状態である。ホルダ３００の幅方向において第１配置面６３１と第１ホイール側面８３１とが対向する。ホルダ３００の幅方向において第２配置面６３２と第２ホイール側面８３２とが対向する。ホイール中心面８０２はホルダ３００の前後方向および配置面６３０に対して傾斜する。 The reference state of the wheel support structure 500 of the third form includes, for example, the first to seventh reference states.
In the first reference state shown in FIG. 16, the wheel center surface 802 is tilted with respect to the wheel rotation center axis 601. The scribing wheel 800 is in an inclined state. The first arrangement surface 631 and the first wheel side surface 831 face each other in the width direction of the holder 300. The second arrangement surface 632 and the second wheel side surface 832 face each other in the width direction of the holder 300. The wheel center surface 802 is inclined with respect to the front-rear direction of the holder 300 and the arrangement surface 630.
　第１配置面６３１と第１ホイール側面８３１とは非平行である。第１ホイール側面８３１の接触部８３０Ａの一部は前方領域ＲＡにおいて第１突出部７２１に接触する。第１ホイール側面８３１の接触部８３０Ａの他の部分、および、非接触部８３０Ｂは第１配置面６３１に接触しない。第１ホイール側面８３１の接触部８３０Ａの他の部分、および、非接触部８３０Ｂと第１配置面６３１との間には空間が形成される。 The first arrangement surface 631 and the first wheel side surface 831 are non-parallel. A part of the contact portion 830A of the first wheel side surface 831 contacts the first protrusion 721 in the front region RA. The other portion of the contact portion 830A of the first wheel side surface 831 and the non-contact portion 830B do not come into contact with the first arrangement surface 631. A space is formed between the other portion of the contact portion 830A of the first wheel side surface 831 and the non-contact portion 830B and the first arrangement surface 631.
　第２配置面６３２と第２ホイール側面８３２とは非平行である。第２ホイール側面８３２の接触部８３０Ａの一部は後方領域ＲＢにおいて第２突出部７２２に接触する。第２ホイール側面８３２の接触部８３０Ａの他の部分、および、非接触部８３０Ｂは第２配置面６３２に接触しない。第２ホイール側面８３２の接触部８３０Ａの他の部分、および、非接触部８３０Ｂと第２配置面６３２との間には空間が形成される。 The second arrangement surface 632 and the second wheel side surface 832 are non-parallel. A part of the contact portion 830A of the second wheel side surface 832 comes into contact with the second protrusion 722 in the rear region RB. The other portion of the contact portion 830A of the second wheel side surface 832 and the non-contact portion 830B do not come into contact with the second arrangement surface 632. A space is formed between the other portion of the contact portion 830A of the second wheel side surface 832 and the non-contact portion 830B and the second arrangement surface 632.
　第２基準状態では、第１ホイール側面８３１は第１突出部７２１に接触しない。その他の点は第１基準状態と同様である。第３基準状態では、第１ホイール側面８３１は第１突出部７２１に接触しない。第２ホイール側面８３２の接触部８３０Ａの一部は前方領域ＲＡにおいて第２配置面６３２に接触する。その他の点は第１基準状態と同様である。第４基準状態では、第２ホイール側面８３２は第２突出部７２２に接触しない。その他の点は第１基準状態と同様である。第５基準状態では、第２ホイール側面８３２は第２突出部７２２に接触しない。第１ホイール側面８３１の接触部８３０Ａの一部は後方領域ＲＢにおいて第１配置面６３１に接触する。その他の点は第１基準状態と同様である。第６基準状態では、第１ホイール側面８３１の接触部８３０Ａの一部は後方領域ＲＢにおいて第１配置面６３１に接触する。第２ホイール側面８３２の接触部８３０Ａの一部は前方領域ＲＡにおいて第２配置面６３２に接触する。その他の点は第１基準状態と同様である。第７基準状態では、第１ホイール側面８３１は第１突出部７２１に接触しない。第２ホイール側面８３２は第２突出部７２２に接触しない。その他の点は第１基準状態と同様である。 In the second reference state, the first wheel side surface 831 does not come into contact with the first protrusion 721. Other points are the same as the first reference state. In the third reference state, the first wheel side surface 831 does not come into contact with the first protrusion 721. A part of the contact portion 830A of the second wheel side surface 832 comes into contact with the second arrangement surface 632 in the front region RA. Other points are the same as the first reference state. In the fourth reference state, the second wheel side surface 832 does not come into contact with the second protrusion 722. Other points are the same as the first reference state. In the fifth reference state, the second wheel side surface 832 does not come into contact with the second protrusion 722. A part of the contact portion 830A of the first wheel side surface 831 comes into contact with the first arrangement surface 631 in the rear region RB. Other points are the same as the first reference state. In the sixth reference state, a part of the contact portion 830A of the first wheel side surface 831 comes into contact with the first arrangement surface 631 in the rear region RB. A part of the contact portion 830A of the second wheel side surface 832 comes into contact with the second arrangement surface 632 in the front region RA. Other points are the same as the first reference state. In the seventh reference state, the first wheel side surface 831 does not come into contact with the first protrusion 721. The second wheel side surface 832 does not come into contact with the second protrusion 722. Other points are the same as the first reference state.
　スクライビングホイール８００が被加工物に押し付けられることにより基準状態から初期接触状態に遷移する。第２～第７基準状態のいずれから初期接触状態に遷移した場合でも、初期接触状態ではスクライビングホイール８００の状態は図１６に示される第１基準状態と実質的に同様の状態になる。基準状態が第２～第７基準状態のいずれかである場合、初期接触状態への遷移にともない、各ホイール側面８３１、８３２が対応する突出部７２１、７２２に接触するまでスクライビングホイール８００が第１回転方向に回転する。 When the scribing wheel 800 is pressed against the work piece, it transitions from the reference state to the initial contact state. Regardless of the transition from any of the second to seventh reference states to the initial contact state, the state of the scribing wheel 800 is substantially the same as the first reference state shown in FIG. 16 in the initial contact state. When the reference state is any of the second to seventh reference states, the scribing wheel 800 is the first in the transition to the initial contact state until the side surfaces 831 and 832 of the wheels come into contact with the corresponding protrusions 721 and 722. Rotate in the direction of rotation.
　図１６に示される第１基準状態から初期接触状態に遷移する場合、スクライビングホイール８００は実質的には第１回転方向に回転しない。初期接触状態では、スクライビングホイール８００の状態は傾斜状態であり、スクライビングホイール８００に作用する押付時トルクによりホイール側面８３０は支持面７１０に押し付けられる。第１ホイール側面８３１の接触部８３０Ａは第１突出部７２１に押し付けられる。第２ホイール側面８３２の接触部８３０Ａは第２突出部７２２に押し付けられる。 When transitioning from the first reference state shown in FIG. 16 to the initial contact state, the scribing wheel 800 does not substantially rotate in the first rotation direction. In the initial contact state, the state of the scribing wheel 800 is an inclined state, and the wheel side surface 830 is pressed against the support surface 710 by the pressing torque acting on the scribing wheel 800. The contact portion 830A of the first wheel side surface 831 is pressed against the first protrusion 721. The contact portion 830A of the second wheel side surface 832 is pressed against the second protrusion 722.
　第１突出部７２１は第１ホイール側面８３１を支持する。一例では、第１突出部７２１は第１ホイール側面８３１のうちの第２基準面３０２に対して前方および後方の一方に位置する部分を支持する。図示される例では、第１突出部７２１は第１ホイール側面８３１の接触部８３０Ａのうちの前方領域ＲＡに位置する部分を支持する。他の例では、第１突出部７２１は第１ホイール側面８３１の接触部８３０Ａのうちの後方領域ＲＢに位置する部分を支持する。 The first protrusion 721 supports the first wheel side surface 831. In one example, the first protrusion 721 supports a portion of the first wheel side surface 831 located on either the front or the rear with respect to the second reference surface 302. In the illustrated example, the first protrusion 721 supports a portion of the contact portion 830A of the first wheel side surface 831 that is located in the front region RA. In another example, the first protrusion 721 supports a portion of the contact portion 830A of the first wheel side surface 831 that is located in the rear region RB.
　第２突出部７２２は第２ホイール側面８３２を支持する。一例では、第２突出部７２２は第２ホイール側面８３２のうちの第２基準面３０２に対して前方および後方の他方に位置する部分を支持する。図示される例では、第２突出部７２２は第２ホイール側面８３２の接触部８３０Ａのうちの後方領域ＲＢに位置する部分を支持する。他の例では、第２突出部７２２は第２ホイール側面８３２の接触部８３０Ａのうちの前方領域ＲＡに位置する部分を支持する。 The second protrusion 722 supports the second wheel side surface 832. In one example, the second protrusion 722 supports a portion of the second wheel side surface 832 that is located on the other side of the front and rear of the second reference surface 302. In the illustrated example, the second protrusion 722 supports a portion of the contact portion 830A of the second wheel side surface 832 that is located in the rear region RB. In another example, the second protrusion 722 supports a portion of the contact portion 830A of the second wheel side surface 832 that is located in the front region RA.
　スクライビングホイール８００の走査の開始にともない、初期接触状態から走査状態に遷移する。走査状態では、図１７に示されるようにホイール中心面８０２が走査方向ＤＳに平行な状態になる。第３形態のホイール支持構造５００における初期接触状態から走査状態への遷移の様子、および、走査状態は第１形態のホイール支持構造５００における対応する状態に準じる。 With the start of scanning of the scribing wheel 800, the initial contact state transitions to the scanning state. In the scanning state, the wheel center surface 802 is parallel to the scanning direction DS as shown in FIG. The state of transition from the initial contact state to the scanning state in the wheel support structure 500 of the third form, and the scanning state conform to the corresponding state in the wheel support structure 500 of the first form.
　図１８～図２０に示されるホイール支持構造５００の第４形態では、中心支持部６００は傾斜構造６５０を含む。傾斜構造６５０はホルダユニット２００の平面視においてホルダ３００の幅方向に対してホイール回転中心軸６０１が傾斜するように構成される。一例では、傾斜構造６５０はピン６１０および各ピン挿入孔６２１Ａ、６２２Ａを含む。ピン６１０の中間部６１３は第１端部６１１および第２端部６１２に対して傾斜する。第１端部６１１の中心軸と第２端部６１２の中心軸とは平行である。中間部６１３の中心軸は各端部６１１、６１２の中心軸に交差する。中間部６１３の中心軸はホイール回転中心軸６０１を規定する。 In the fourth form of the wheel support structure 500 shown in FIGS. 18 to 20, the central support portion 600 includes an inclined structure 650. The inclined structure 650 is configured such that the wheel rotation center axis 601 is inclined with respect to the width direction of the holder 300 in the plan view of the holder unit 200. In one example, the tilted structure 650 includes pins 610 and pin insertion holes 621A, 622A, respectively. The intermediate portion 613 of the pin 610 is inclined with respect to the first end portion 611 and the second end portion 612. The central axis of the first end portion 611 and the central axis of the second end portion 612 are parallel. The central axis of the intermediate portion 613 intersects the central axes of the respective end portions 611 and 612. The central axis of the intermediate portion 613 defines the wheel rotation central axis 601.
　第１ピン挿入孔６２１Ａはホルダユニット２００の平面視において自身の中心軸がホルダ３００の幅方向に平行するように第１支持部６２１に形成される。第１ピン挿入孔６２１Ａの中心軸は前方領域ＲＡおよび後方領域ＲＢの一方に位置する。第２ピン挿入孔６２２Ａはホルダユニット２００の平面視において自身の中心軸がホルダ３００の幅方向に対して平行するように第２支持部６２２に形成される。第２ピン挿入孔６２２Ａの中心軸は前方領域ＲＡおよび後方領域ＲＢの他方に位置する。第１ピン挿入孔６２１Ａの中心軸と第２ピン挿入孔６２２Ａの中心軸とは平行である。 The first pin insertion hole 621A is formed in the first support portion 621 so that its central axis is parallel to the width direction of the holder 300 in the plan view of the holder unit 200. The central axis of the first pin insertion hole 621A is located in one of the front region RA and the rear region RB. The second pin insertion hole 622A is formed in the second support portion 622 so that its central axis is parallel to the width direction of the holder 300 in the plan view of the holder unit 200. The central axis of the second pin insertion hole 622A is located on the other side of the front region RA and the rear region RB. The central axis of the first pin insertion hole 621A and the central axis of the second pin insertion hole 622A are parallel to each other.
　ピン６１０の第１端部６１１が第１ピン挿入孔６２１Ａに挿入され、第２端部６１２が第２ピン挿入孔６２２Ａに挿入された状態では、ホルダユニット２００の平面視においてホイール回転中心軸６０１はホルダ３００の幅方向に交差する。 In a state where the first end portion 611 of the pin 610 is inserted into the first pin insertion hole 621A and the second end portion 612 is inserted into the second pin insertion hole 622A, the wheel rotation center axis 601 is seen in the plan view of the holder unit 200. Intersect in the width direction of the holder 300.
　側面支持部７００は支持面７１０を含む。支持面７１０は傾斜状態のスクライビングホイール８００のホイール側面８３０を支持する。一例では、支持面７１０は配置空間３１０を規定する。ピン支持部６２０の配置面６３０は支持面７１０を含む。支持面７１０は配置空間３１０の第１側部３１１に位置する第１支持面７１１、および、配置空間３１０の第２側部３１２に位置する第２支持面７１２を含む。第１支持面７１１は第１配置面６３１に含まれる。第２支持面７１２は第２配置面６３２に含まれる。支持面７１０はホルダユニット２００の平面視においてホルダ３００の前後方向に平行である。第１支持面７１１と第２支持面７１２との距離はスクライビングホイール８００の本体８１０の厚さよりも大きい。 The side support portion 700 includes the support surface 710. The support surface 710 supports the wheel side surface 830 of the inclined scribing wheel 800. In one example, the support surface 710 defines a placement space 310. The arrangement surface 630 of the pin support portion 620 includes the support surface 710. The support surface 710 includes a first support surface 711 located on the first side portion 311 of the arrangement space 310 and a second support surface 712 located on the second side portion 312 of the arrangement space 310. The first support surface 711 is included in the first arrangement surface 631. The second support surface 712 is included in the second arrangement surface 632. The support surface 710 is parallel to the front-rear direction of the holder 300 in the plan view of the holder unit 200. The distance between the first support surface 711 and the second support surface 712 is larger than the thickness of the main body 810 of the scribing wheel 800.
　第４形態のホイール支持構造５００の基準状態は例えば第１～第７基準状態を含む。
　図１８に示される第１基準状態では、ホイール中心面８０２はホイール回転中心軸６０１に対して傾斜する。スクライビングホイール８００は傾斜状態である。ホルダ３００の幅方向において第１配置面６３１と第１ホイール側面８３１とが対向する。ホルダ３００の幅方向において第２配置面６３２と第２ホイール側面８３２とが対向する。ホイール中心面８０２はホルダ３００の前後方向および配置面６３０に対して平行である。 The reference state of the wheel support structure 500 of the fourth form includes, for example, the first to seventh reference states.
In the first reference state shown in FIG. 18, the wheel center surface 802 is tilted with respect to the wheel rotation center axis 601. The scribing wheel 800 is in an inclined state. The first arrangement surface 631 and the first wheel side surface 831 face each other in the width direction of the holder 300. The second arrangement surface 632 and the second wheel side surface 832 face each other in the width direction of the holder 300. The wheel center surface 802 is parallel to the front-rear direction of the holder 300 and the arrangement surface 630.
　第１支持面７１１と第１ホイール側面８３１とは平行である。第１ホイール側面８３１の接触部８３０Ａおよび非接触部８３０Ｂは第１支持面７１１に接触しない。第１支持面７１１と第１ホイール側面８３１との間には空間が形成される。第２支持面７１２と第２ホイール側面８３２とは平行である。第２ホイール側面８３２の接触部８３０Ａおよび非接触部８３０Ｂは第２支持面７１２に接触しない。第２支持面７１２と第２ホイール側面８３２との間には空間が形成される。 The first support surface 711 and the first wheel side surface 831 are parallel. The contact portion 830A and the non-contact portion 830B of the first wheel side surface 831 do not come into contact with the first support surface 711. A space is formed between the first support surface 711 and the first wheel side surface 831. The second support surface 712 and the second wheel side surface 832 are parallel. The contact portion 830A and the non-contact portion 830B of the second wheel side surface 832 do not come into contact with the second support surface 712. A space is formed between the second support surface 712 and the second wheel side surface 832.
　第２基準状態では、第１ホイール側面８３１が第１支持面７１１に接触し、第２ホイール側面８３２は第２支持面７１２に接触しない。その他の点は第１基準状態と同様である。第３基準状態では、第２ホイール側面８３２は第２支持面７１２に接触し、第１ホイール側面８３１は第１支持面７１１に接触しない。その他の点は第１基準状態と同様である。第４基準状態では、ホイール中心面８０２はホルダ３００の前後方向および配置面６３０に対して傾斜する。第１ホイール側面８３１の接触部８３０Ａの一部は前方領域ＲＡにおいて第１支持面７１１に接触する。第２ホイール側面８３２は第２支持面７１２に接触しない。その他の点は第１基準状態と同様である。第５基準状態では、ホイール中心面８０２はホルダ３００の前後方向および配置面６３０に対して傾斜する。第２ホイール側面８３２の接触部８３０Ａの一部は後方領域ＲＢにおいて第２支持面７１２に接触する。第１ホイール側面８３１は第１支持面７１１に接触しない。その他の点は第１基準状態と同様である。第６基準状態では、ホイール側面８３０と支持面７１０との関係が第１～第５基準状態とは異なり、さらに以下の第７基準状態のように各側面８３１、８３２が各支持面７１１、７１２に接触した状態とも異なる。 In the second reference state, the first wheel side surface 831 contacts the first support surface 711, and the second wheel side surface 832 does not contact the second support surface 712. Other points are the same as the first reference state. In the third reference state, the second wheel side surface 832 is in contact with the second support surface 712, and the first wheel side surface 831 is not in contact with the first support surface 711. Other points are the same as the first reference state. In the fourth reference state, the wheel center surface 802 is inclined with respect to the front-rear direction of the holder 300 and the arrangement surface 630. A part of the contact portion 830A of the first wheel side surface 831 comes into contact with the first support surface 711 in the front region RA. The second wheel side surface 832 does not come into contact with the second support surface 712. Other points are the same as the first reference state. In the fifth reference state, the wheel center surface 802 is inclined with respect to the front-rear direction of the holder 300 and the arrangement surface 630. A part of the contact portion 830A of the second wheel side surface 832 comes into contact with the second support surface 712 in the rear region RB. The first wheel side surface 831 does not come into contact with the first support surface 711. Other points are the same as the first reference state. In the sixth reference state, the relationship between the wheel side surface 830 and the support surface 710 is different from the first to fifth reference states, and the side surfaces 831 and 832 are the support surfaces 711 and 712, respectively, as in the following seventh reference state. It is also different from the state of contact with.
　図１９に示される第７基準状態では、ホイール中心面８０２はホイール回転中心軸６０１に対して傾斜する。スクライビングホイール８００は傾斜状態である。ホルダ３００の幅方向において第１支持面７１１と第１ホイール側面８３１とが対向する。ホルダ３００の幅方向において第２支持面７１２と第２ホイール側面８３２とが対向する。ホイール中心面８０２はホルダ３００の前後方向および支持面７１０に対して傾斜する。 In the seventh reference state shown in FIG. 19, the wheel center surface 802 is tilted with respect to the wheel rotation center axis 601. The scribing wheel 800 is in an inclined state. The first support surface 711 and the first wheel side surface 831 face each other in the width direction of the holder 300. The second support surface 712 and the second wheel side surface 832 face each other in the width direction of the holder 300. The wheel center surface 802 is inclined with respect to the front-rear direction of the holder 300 and the support surface 710.
　第１支持面７１１と第１ホイール側面８３１とは非平行である。第１ホイール側面８３１の接触部８３０Ａの一部は前方領域ＲＡにおいて第１支持面７１１に接触する。第１ホイール側面８３１の接触部８３０Ａの他の部分、および、非接触部８３０Ｂは第１支持面７１１に接触しない。第１ホイール側面８３１の接触部８３０Ａの他の部分、および、非接触部８３０Ｂと第１支持面７１１との間には空間が形成される。 The first support surface 711 and the first wheel side surface 831 are non-parallel. A part of the contact portion 830A of the first wheel side surface 831 comes into contact with the first support surface 711 in the front region RA. The other portion of the contact portion 830A of the first wheel side surface 831 and the non-contact portion 830B do not come into contact with the first support surface 711. A space is formed between the other portion of the contact portion 830A of the first wheel side surface 831 and the non-contact portion 830B and the first support surface 711.
　第２支持面７１２と第２ホイール側面８３２とは非平行である。第２ホイール側面８３２の接触部８３０Ａの一部は後方領域ＲＢにおいて第２支持面７１２に接触する。第２ホイール側面８３２の接触部８３０Ａの他の部分、および、非接触部８３０Ｂは第２支持面７１２に接触しない。第２ホイール側面８３２の接触部８３０Ａの他の部分、および、非接触部８３０Ｂと第２支持面７１２との間には空間が形成される。 The second support surface 712 and the second wheel side surface 832 are non-parallel. A part of the contact portion 830A of the second wheel side surface 832 comes into contact with the second support surface 712 in the rear region RB. Other parts of the contact portion 830A and the non-contact portion 830B of the second wheel side surface 832 do not come into contact with the second support surface 712. A space is formed between the other portion of the contact portion 830A of the second wheel side surface 832 and the non-contact portion 830B and the second support surface 712.
　スクライビングホイール８００が被加工物に押し付けられることにより基準状態から初期接触状態に遷移する。第１～第６基準状態のいずれから初期接触状態に遷移した場合でも、初期接触状態ではスクライビングホイール８００の状態は図１９に示される第７基準状態と実質的に同様の状態になる。基準状態が第１～第６基準状態のいずれかである場合、初期接触状態への遷移にともない、各ホイール側面８３１、８３２が対応する支持面７１１、７１２に接触するまでスクライビングホイール８００が第１回転方向に回転する。第４形態のホイール支持構造５００における初期接触状態は第１形態のホイール支持構造５００における対応する状態に準じる。 When the scribing wheel 800 is pressed against the work piece, it transitions from the reference state to the initial contact state. Regardless of the transition from any of the first to sixth reference states to the initial contact state, the state of the scribing wheel 800 is substantially the same as the seventh reference state shown in FIG. 19 in the initial contact state. When the reference state is any of the first to sixth reference states, the scribing wheel 800 is the first in the transition to the initial contact state until the side surfaces 831 and 832 of each wheel come into contact with the corresponding support surfaces 711 and 712. Rotate in the direction of rotation. The initial contact state in the wheel support structure 500 of the fourth form conforms to the corresponding state in the wheel support structure 500 of the first form.
　スクライビングホイール８００の走査の開始にともない、初期接触状態から走査状態に遷移する。走査状態では、図２０に示されるようにホイール中心面８０２が走査方向ＤＳに平行な状態になる。第４形態のホイール支持構造５００における初期接触状態から走査状態への遷移の様子、および、走査状態は第１形態のホイール支持構造５００における対応する状態に準じる。 With the start of scanning of the scribing wheel 800, the initial contact state transitions to the scanning state. In the scanning state, the wheel center surface 802 is parallel to the scanning direction DS as shown in FIG. The transition from the initial contact state to the scanning state in the wheel support structure 500 of the fourth form and the scanning state conform to the corresponding states in the wheel support structure 500 of the first form.
　図２１～図２５を参照して、図９に示されるホルダユニット２００の具体的構成について説明する。図２５は図２３の２５－２５線に沿うホルダユニット２００の断面を示す。ホルダ３００の形状は全体としてはおおよそ円柱である。一例では、ホルダ３００の表面３２０は外周面３２１、頂部平面３２２、上部平面３２３、下部平面３２４、側部平面３２５、底部平面３２６、および、傾斜面３３０を含む。外周面３２１はホルダ３００における円柱の側面に相当する。 The specific configuration of the holder unit 200 shown in FIG. 9 will be described with reference to FIGS. 21 to 25. FIG. 25 shows a cross section of the holder unit 200 along the line 25-25 of FIG. The shape of the holder 300 as a whole is approximately a cylinder. In one example, the surface 320 of the holder 300 includes an outer peripheral surface 321, a top plane 322, an upper plane 323, a lower plane 324, a side plane 325, a bottom plane 326, and an inclined surface 330. The outer peripheral surface 321 corresponds to the side surface of the cylinder in the holder 300.
　頂部平面３２２はホルダ本体４００の上部４１０の端面に相当する。頂部平面３２２は第１基準面３０１に直交する。上部平面３２３はホルダ本体４００の上部４１０の正面に形成される。上部平面３２３は第２基準面３０２に平行である。下部平面３２４はホルダ本体４００の下部４３０の正面および各支持部６２１、６２２の正面に形成される。下部平面３２４は第２基準面３０２に平行である。側部平面３２５はホルダ本体４００の下部４３０の側面および各支持部６２１、６２２の側面に形成される。側部平面３２５は第１基準面３０１に平行である。底部平面３２６は各支持部６２１、６２２の底面に相当する。底部平面３２６は第１基準面３０１に直交する。 The top flat surface 322 corresponds to the end face of the upper 410 of the holder body 400. The top plane 322 is orthogonal to the first reference plane 301. The upper flat surface 323 is formed in front of the upper portion 410 of the holder body 400. The upper plane 323 is parallel to the second reference plane 302. The lower flat surface 324 is formed on the front surface of the lower portion 430 of the holder main body 400 and the front surface of the support portions 621 and 622. The lower plane 324 is parallel to the second reference plane 302. The side flat surface 325 is formed on the side surface of the lower portion 430 of the holder body 400 and the side surfaces of the support portions 621 and 622, respectively. The side plane 325 is parallel to the first reference plane 301. The bottom flat surface 326 corresponds to the bottom surface of each of the support portions 621 and 622. The bottom plane 326 is orthogonal to the first reference plane 301.
　傾斜面３３０はホルダ本体４００の中間部４２０の正面において上部平面３２３の下方に形成される。ホルダ３００の側面視において傾斜面３３０は第２基準面３０２に対して傾斜する。ホルダ３００の側面視において傾斜面３３０は上部平面３２３に対してホルダ３００の前方に形成される。傾斜面３３０の第１端部３３１は上部平面３２３と傾斜面３３０との境界を形成する。 The inclined surface 330 is formed below the upper plane 323 in front of the intermediate portion 420 of the holder body 400. In the side view of the holder 300, the inclined surface 330 is inclined with respect to the second reference surface 302. In the side view of the holder 300, the inclined surface 330 is formed in front of the holder 300 with respect to the upper plane 323. The first end portion 331 of the inclined surface 330 forms a boundary between the upper plane 323 and the inclined surface 330.
　ホルダ３００は凹部３４０を含む。一例では、凹部３４０は正面凹部３４１および側面凹部３４２を含む。正面凹部３４１はホルダ本体４００の下部４３０の正面および各支持部６２１、６２２の正面に形成される。ホルダ３００の側面視において正面凹部３４１はホルダ本体４００の中間部４２０に対してホルダ３００の中心軸ＬＢに向けて窪む。下部平面３２４は正面凹部３４１の底面に相当する。正面凹部３４１の底面である下部平面３２４は上部平面３２３に平行である。 The holder 300 includes a recess 340. In one example, the recess 340 includes a front recess 341 and a side recess 342. The front recess 341 is formed on the front surface of the lower portion 430 of the holder body 400 and the front surface of the support portions 621 and 622. In the side view of the holder 300, the front recess 341 is recessed toward the central axis LB of the holder 300 with respect to the intermediate portion 420 of the holder body 400. The lower plane 324 corresponds to the bottom surface of the front recess 341. The lower plane 324, which is the bottom surface of the front recess 341, is parallel to the upper plane 323.
　側面凹部３４２はホルダ本体４００の下部４３０の側面および各支持部６２１、６２２の側面に形成される。ホルダ３００の正面視において側面凹部３４２はホルダ本体４００の中間部４２０に対してホルダ３００の中心軸ＬＢに向けて窪む。側部平面３２５は側面凹部３４２の底面に相当する。各ピン挿入孔６２１Ａ、６２２Ａは各支持部６２１、６２２において側面凹部３４２の下方に形成される。各支持部６２１、６２２の構成について例示する。図示される第１例では、各支持部６２１、６２２における各ピン挿入孔６２１Ａ、６２２Ａの下部には開口溝６２３が形成される。開口溝６２３は底部平面３２６に開口する。開口溝６２３は各ピン挿入孔６２１Ａ、６２２Ａに繋がり、各ピン挿入孔６２１Ａ、６２２Ａに平行である。第２例では、各支持部６２１、６２２における各ピン挿入孔６２１Ａ、６２２Ａの下部には開口溝６２３は形成されない。 The side recesses 342 are formed on the side surface of the lower portion 430 of the holder body 400 and the side surfaces of the support portions 621 and 622. In the front view of the holder 300, the side recess 342 is recessed toward the central axis LB of the holder 300 with respect to the intermediate portion 420 of the holder body 400. The side plane 325 corresponds to the bottom surface of the side recess 342. The pin insertion holes 621A and 622A are formed below the side surface recesses 342 in the support portions 621 and 622. The configuration of each support portion 621 and 622 will be illustrated. In the first example shown, an opening groove 623 is formed in the lower portion of the pin insertion holes 621A and 622A in the support portions 621 and 622. The opening groove 623 opens in the bottom plane 326. The opening groove 623 is connected to the pin insertion holes 621A and 622A and is parallel to the pin insertion holes 621A and 622A. In the second example, the opening groove 623 is not formed in the lower portion of the pin insertion holes 621A and 622A in the support portions 621 and 622.
　ホルダユニット２００の正面視では、配置空間３１０は下部平面３２４に開口する。ホルダユニット２００の背面視では、配置空間３１０は外周面３２１に開口する。ホルダユニット２００の底面視では、配置空間３１０は底部平面３２６に開口する。支持面７１０はホルダ３００の前後方向に対して傾斜する。支持面７１０は上部平面３２３および下部平面３２４に直交する平面に対して傾斜する。支持面７１０は側部平面３２５に対しても傾斜する。第１支持面７１１と第２支持面７１２とは平行である。スクライビングホイール８００はホイール中心面８０２がホルダ３００の前後方向に対して傾斜するように配置空間３１０に配置される。 In the front view of the holder unit 200, the arrangement space 310 opens in the lower plane 324. In the rear view of the holder unit 200, the arrangement space 310 opens to the outer peripheral surface 321. In the bottom view of the holder unit 200, the arrangement space 310 opens in the bottom plane 326. The support surface 710 is inclined with respect to the front-rear direction of the holder 300. The support surface 710 is inclined with respect to a plane orthogonal to the upper plane 323 and the lower plane 324. The support surface 710 is also inclined with respect to the side plane 325. The first support surface 711 and the second support surface 712 are parallel to each other. The scribing wheel 800 is arranged in the arrangement space 310 so that the wheel center surface 802 is inclined with respect to the front-rear direction of the holder 300.
　なお、上記実施形態の説明は本発明に関するホイール支持構造等が取り得る形態を制限することを意図していない。本発明に関するホイール支持構造等は実施形態に例示された形態とは異なる形態を取り得る。その一例は、実施形態の構成の一部を置換、変更、もしくは、省略した形態、または、実施形態に新たな構成を付加した形態である。 Note that the description of the above embodiment is not intended to limit the possible forms of the wheel support structure or the like according to the present invention. The wheel support structure and the like according to the present invention may take a form different from the form exemplified in the embodiment. One example thereof is a form in which a part of the configuration of the embodiment is replaced, changed, or omitted, or a new configuration is added to the embodiment.
　４０　：ホルダジョイント保持具
　５０　：ホルダアセンブリ
　１００：ホルダジョイント
　２００：ホルダユニット
　３００：ホルダ
　３１０：配置空間
　５００：ホイール支持構造
　６００：中心支持部
　６１０：ピン
　７００：側面支持部
　７１０：支持面
　８００：スクライビングホイール
　８０１：ホイール中心軸
　８０２：ホイール中心面
　８３０：ホイール側面
　８３１：第１ホイール側面
　８３２：第２ホイール側面 40: Holder joint holder 50: Holder assembly 100: Holder joint 200: Holder unit 300: Holder 310: Arrangement space 500: Wheel support structure 600: Center support part 610: Pin 700: Side support part 710: Support surface 800: Scribing Wheel 801: Wheel center axis 802: Wheel center surface 830: Wheel side surface 831: First wheel side surface 832: Second wheel side surface

Claims (10)

  1. 　ホルダの幅方向に平行な回転中心軸まわりでスクライビングホイールが回転するように前記スクライビングホイールを支持する中心支持部と、
    　前記スクライビングホイールの中心面が前記回転中心軸に対して傾斜した前記スクライビングホイールの側面を支持する側面支持部とを備える
    　ホイール支持構造。     A central support portion that supports the scribing wheel so that the scribing wheel rotates around a rotation center axis parallel to the width direction of the holder.
    A wheel support structure including a side support portion for supporting a side surface of the scribing wheel in which a central surface of the scribing wheel is inclined with respect to the rotation center axis.
  2. 　前記側面支持部は前記側面に接触する支持面を含む
    　請求項１に記載のホイール支持構造。     The wheel support structure according to claim 1, wherein the side surface support portion includes a support surface that contacts the side surface.
  3. 　前記支持面は前記スクライビングホイールが配置される配置空間を規定する
    　請求項２に記載のホイール支持構造。     The wheel support structure according to claim 2, wherein the support surface defines an arrangement space in which the scribing wheel is arranged.
  4. 　前記支持面は前記ホルダの前後方向に対して傾斜する
    　請求項２または３に記載のホイール支持構造。     The wheel support structure according to claim 2 or 3, wherein the support surface is inclined with respect to the front-rear direction of the holder.
  5. 　前記側面は第１ホイール側面および第２ホイール側面を含み、
    　前記側面支持部は前記第１ホイール側面および前記第２ホイール側面を支持する
    　請求項１～４のいずれか一項に記載のホイール支持構造。     The side surface includes a first wheel side surface and a second wheel side surface.
    The wheel support structure according to any one of claims 1 to 4, wherein the side surface support portion supports the first wheel side surface and the second wheel side surface.
  6. 　前記側面支持部は前記第１ホイール側面のうちの前記回転中心軸に対して前方および後方の一方に位置する部分と、前記第２ホイール側面のうちの前記回転中心軸に対して前方および後方の他方に位置する部分とを支持する
    　請求項５に記載のホイール支持構造。     The side surface support portion is located on one of the front and rear sides of the first wheel side surface with respect to the rotation center axis, and the front and rear portions of the second wheel side surface with respect to the rotation center axis. The wheel support structure according to claim 5, which supports a portion located on the other side.
  7. 　ホルダの幅方向に平行または交差する回転中心軸まわりでスクライビングホイールが回転するように前記スクライビングホイールを支持する中心支持部と、
    　前記スクライビングホイールの中心面が前記回転中心軸に対して傾斜した前記スクライビングホイールの側面を支持する側面支持部とを備え、
    　前記側面支持部は前記側面に接触する支持面を含み、
    　前記支持面は前記ホルダの前後方向に対して傾斜する
    　ホイール支持構造。     A central support portion that supports the scribing wheel so that the scribing wheel rotates around a rotation center axis parallel to or intersecting the width direction of the holder.
    A side support portion for supporting a side surface of the scribing wheel whose central surface is inclined with respect to the rotation center axis is provided.
    The side surface support includes a support surface that contacts the side surface.
    A wheel support structure in which the support surface is inclined with respect to the front-rear direction of the holder.
  8. 　請求項１～７のいずれか一項に記載のホイール支持構造を備える
    　ホルダ。     A holder having the wheel support structure according to any one of claims 1 to 7.
  9. 　請求項８に記載のホルダと、
    　前記スクライビングホイールと、
    　前記スクライビングホイールを支持するピンとを備える
    　ホルダユニット。     The holder according to claim 8 and
    With the scribing wheel
    A holder unit including a pin that supports the scribing wheel.
  10. 　請求項９に記載のホルダユニットと、
    　ホルダジョイント保持具に対して回転できるように前記ホルダユニットを前記ホルダジョイント保持具に連結するホルダジョイントとを備える
    　ホルダアセンブリ。     The holder unit according to claim 9 and
    Holder assembly A holder assembly comprising a holder joint that connects the holder unit to the holder joint holder so that it can rotate with respect to the holder.
PCT/JP2020/044114 2019-11-29 2020-11-26 Wheel support structure, holder, holder unit, and holder assembly WO2021107055A1 (en)

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KR1020227017425A KR20220104712A (en) 2019-11-29 2020-11-26 Wheel support structure, holder, holder unit and holder assembly
JP2021561519A JPWO2021107055A1 (en) 2019-11-29 2020-11-26
CN202080081645.6A CN114728437A (en) 2019-11-29 2020-11-26 Wheel support structure, support unit and support assembly

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JP2019-216200 2019-11-29
JP2019216200 2019-11-29

Publications (1)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2394138A (en) * 1944-02-07 1946-02-05 Robert W Barrett Glass cutter
JP2017226108A (en) * 2016-06-21 2017-12-28 三星ダイヤモンド工業株式会社 Scribing device and holder unit
JP2019098606A (en) * 2017-11-30 2019-06-24 三星ダイヤモンド工業株式会社 Scribing wheel, tip holder provided with the scribing wheel, support pin, and, tip holder provided with the support pin
JP2019116083A (en) * 2017-12-27 2019-07-18 三星ダイヤモンド工業株式会社 Scribe device and holder unit

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JP5332344B2 (en) * 2008-06-30 2013-11-06 三星ダイヤモンド工業株式会社 Chip holder and holder unit
JP2018140597A (en) 2017-02-28 2018-09-13 三星ダイヤモンド工業株式会社 Cutter holder mounting structure and holder joint

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2394138A (en) * 1944-02-07 1946-02-05 Robert W Barrett Glass cutter
JP2017226108A (en) * 2016-06-21 2017-12-28 三星ダイヤモンド工業株式会社 Scribing device and holder unit
JP2019098606A (en) * 2017-11-30 2019-06-24 三星ダイヤモンド工業株式会社 Scribing wheel, tip holder provided with the scribing wheel, support pin, and, tip holder provided with the support pin
JP2019116083A (en) * 2017-12-27 2019-07-18 三星ダイヤモンド工業株式会社 Scribe device and holder unit

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KR20220104712A (en) 2022-07-26

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