WO2021100151A1 - Touch sensor and method for manufacturing touch sensor - Google Patents
Touch sensor and method for manufacturing touch sensor Download PDFInfo
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- WO2021100151A1 WO2021100151A1 PCT/JP2019/045459 JP2019045459W WO2021100151A1 WO 2021100151 A1 WO2021100151 A1 WO 2021100151A1 JP 2019045459 W JP2019045459 W JP 2019045459W WO 2021100151 A1 WO2021100151 A1 WO 2021100151A1
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
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- the present invention relates to a touch sensor, a display device including the touch sensor, and a method for manufacturing the touch sensor. More specifically, the manufacture of a touch sensor with an integrated cover panel, a display device including the touch sensor, and a touch sensor with an integrated cover panel. It's about the method.
- Touch sensors are used in various types of display systems that provide information to users, such as portable terminals, laptop computers, smartphones, smart pads, and smart TVs. Recently, with the development of electronic devices, a method of inputting a command signal by using a touch has been used in addition to a method of inputting by using an operation key or a dial.
- a touch sensor is one of the input devices that form an interface between an information communication device that uses various displays and a user, and the user uses an input tool such as a finger or a touch pen to use a touch pad or a touch screen. Direct contact or proximity to it enables an interface between the information communication device and the user.
- the touch sensor can be easily used by anyone regardless of age or sex simply by touching an input tool such as a finger or a touch pen, ATM (Automated Teller Machine), PDA (Personal Digital Assistant), mobile phone, etc. It is used in a wide variety of equipment, and its fields are also widely used in a wide range of fields such as banks, government offices, tourism and transportation information.
- the latest vehicle dashboard display is being actively developed as a curved free-form liquid crystal display.
- a touch sensor capable of supporting curved surface design and display systems of various shapes is desired.
- a general method is to attach a thin glass or resin film on which the touch sensor is formed to a curved glass or resin cover panel along the curved surface. It has become a target. In this case, the number of processes due to the manufacturing process and bonding of each part increases, the yield decreases due to foreign matter contamination, bonding problems, etc., and the stability and gas barrier properties of the adhesive due to the use of resin film and adhesive. The deterioration of reliability such as these has become an issue. It also has the problem of being vulnerable to external vibration, shock and high heat. Therefore, the durability of the product is lowered, and it is difficult to apply it to a device such as a vehicle interior accompanied by vibration and high heat.
- JP-A-2017-31030 Japanese Unexamined Patent Publication No. 2013-245158
- the present invention has been made in consideration of such circumstances, and an object of the present invention is to provide a touch sensor capable of supporting a display system having various curved surface designs and shapes, particularly a touch sensor capable of supporting an in-vehicle display system. ..
- the touch sensor of the present invention is a touch sensor having the following features, and is a method for manufacturing the touch sensor.
- a method for manufacturing a touch sensor with an integrated cover panel which comprises forming a touch sensor circuit directly on a cover panel having a curved surface shape, and comprising a method for manufacturing a touch sensor with an integrated cover panel having a curved surface shape.
- a method for manufacturing a touch sensor with an integrated cover panel which comprises using a photomask having a curved surface shape, as described in (1) above. ..
- a touch sensor with integrated cover panel that can be used for display systems with various curved surface designs and shapes, especially a touch sensor with integrated cover panel that can be used for in-vehicle display systems.
- the cover panel is mainly described as being made of glass (cover glass), but a resin cover panel may also be used. It can also be applied to fabricate a wiring pattern (circuit) on a curved glass or resin panel (plate) other than the cover panel. For example, a wiring pattern (circuit) formed on a curved (curved surface) shaped glass or resin panel (plate), which is mounted on a switch having a curved surface shape, a biometric information sensing device, or the like. Can also be applied. [Construction of cover glass]
- the cover glass according to the present invention is a component of a display device, for example, a touch panel display, and is mounted on a wearable terminal together with a display device such as a liquid crystal panel.
- the surface shape of the cover glass is not particularly limited, but for example, it preferably has the same surface shape as the surface shape of the display device, and may have a curved surface shape.
- the curvature in this case is not particularly limited, but may be about 10 to 5000 with a curvature (R), but in the present invention, one having a curved surface shape with a curvature (R) of 700 to 1500 is preferably used, and 500. Those having a curved surface shape of ⁇ 1500 are particularly preferably used.
- the thickness of the cover glass is preferably 0.3 mm or more and 2.0 mm or less, and more preferably 0.7 mm or more and 1.5 mm or less. This is because if it is less than 0.3 mm, the strength is not sufficient, and if it exceeds 2.0 mm, the weight increases due to the increase in the thickness of the entire display device, which is not preferable for in-vehicle use.
- any composition of the glass material usually used as the cover glass can be preferably used.
- the glass constituting the cover glass according to the present invention is subjected to a strengthening treatment.
- the strengthening treatment is preferably performed after producing glass having a curved (curved surface) shape.
- the curved (curved surface) shape is formed after the strengthening treatment because there is a risk of cracking or breakage.
- the strengthening treatment include an ion exchange treatment. More specifically, for example, after producing a cover glass having the same surface shape as the surface of the display device, the cover glass is immersed in a molten salt of potassium nitrate (KNO 3).
- the cover panel integrated touch sensor according to the present invention is manufactured by a conventional method such as a photolithography method and etching.
- a photolithography method in order to prepare a photomask for performing a photolithography method, it is preferable to first prepare a thin thin film photomask. This is because when the photolithography method is applied directly to the cover glass using a thin film photomask made of resin, it is not possible to bring the photomask into close contact with the cover glass, such as floating. Therefore, as the thin film photomask, it is preferable to use a thin film made of glass.
- the thin plate photomask is formed after a light-shielding film is formed on a flat glass plate having a thickness that can be easily deformed on a curved surface by a conventional method such as a vacuum sputtering method or a vapor deposition method. , Produced by conventional methods such as photolithography and etching.
- the thickness of the glass used in this case is preferably a thickness that can be easily deformed on a curved surface by its own weight. For example, 0.7 mm or less is preferable, 0.5 mm or less is more preferable, and 0.3 mm or less is further preferable. Further, from the viewpoint of strength, it is preferably 0.05 mm or more. [Making a curved photomask]
- the photomask for performing the photolithography method for example, a cover using tempered glass as a material, having a thickness having sufficient strength, and having the same surface shape as the surface shape of the display device. It is preferable that curved glass having the same surface shape as glass is produced by a conventional method such as a photolithography method and etching using the thin plate photomask.
- a curved glass having a thickness equal to or less than that of the cover glass is preferably used.
- 0.3 mm or more and 2.0 mm or less are preferable, and 0.7 mm or more and 1.5 mm or less are more preferable. This is because if it is less than 0.3 mm, the strength is not sufficient, and it is preferable that the photomask has the same surface shape as the cover glass from the viewpoint of adhesion when the photomask is set on the cover glass.
- a light-shielding film is formed on a curved surface glass by a conventional method such as a vacuum sputtering method or a thin-film deposition method, and then the light-shielding film of the thin photomask is installed so as to be in contact with the curved surface glass.
- a curved photomask is produced by a method and a conventional method such as etching.
- the thin photomask is made of a glass plate having a thickness that can be easily deformed on a curved surface, it is easily deformed by its own weight and comes into close contact with the curved glass.
- the touch sensor with integrated cover panel is, for example, directly used the curved photomask on a cover glass having the same surface shape as the surface shape of the display device to etch the touch sensor circuit with a photolithography method. It is produced by the conventional method of. Since the curved photomask is made of curved glass having the same surface shape as the cover glass having the same surface shape as the surface shape of the display device, it adheres to the cover glass having the same surface shape as the surface of the display device. It will be.
- the cover panel integrated touch sensor is covered with, for example, a transparent electrode in the X-axis direction, a transparent electrode in the Y-axis direction, a jumper wiring and an insulating layer formed in a region where the two intersect, and a decorative frame region. It is composed of lead-out wiring and a protective layer formed on the whole.
- the transparent electrode in the X-axis direction, the transparent electrode in the Y-axis direction, and the jumper wiring can be formed by using a transparent conductive material.
- the transparent conductive material include metal oxides such as indium tin oxide (ITO), tin oxide, and zinc oxide, laminates of Mo / Al / Mo (molybdenum / aluminum / molybdenum), Au (gold), and Ag ( Silver), Cu (copper), Ag alloy, Cu alloy and the like can be used.
- ITO indium tin oxide
- tin oxide zinc oxide
- laminates of Mo / Al / Mo (molybdenum / aluminum / molybdenum), Au (gold), and Ag ( Silver), Cu (copper), Ag alloy, Cu alloy and the like can be used.
- Such a material is formed into a film by a sputtering method, a vacuum vapor deposition method, or the like.
- an ITO film is formed by heat sputtering by a DC magnetron sputtering method, a novolac-based positive resist is applied on the entire surface thereof, and baking, mask exposure, and development are further performed.
- etching can be performed with, for example, aqua regia, oxalic acid, ferric chloride aqueous solution, iodic acid aqueous solution, phosphoric acid aqueous solution, etc.
- the positive resist can be further peeled off to form a transparent electrode.
- the same transparent conductive material may be used in forming the transparent electrode in the X-axis direction, the transparent electrode in the Y-axis direction, and the jumper wiring.
- the insulating layer can be formed, for example, by applying a negative resist, baking it, and then subjecting it to proximity exposure through a patterned mask and developing it.
- the lead-out wiring is made of a metal material and connects the transparent electrode in the X-axis direction and the transparent electrode in the Y-axis direction located at the peripheral edge of the display region to the control circuit, for example, Mo / Al / Mo (molybdenum). It can be formed by the photolitho method and etching described above using a laminate of (aluminum / molybdenum), Au (gold), Ag (silver), Cu (copper), Ag alloy, and Cu alloy.
- Soda lime glass was placed on the mold and heated to near the softening temperature (730 ° C.) to prepare curved glass (thickness 1.1 mm, curvature (R) 1400) having little residual stress. [Making a thin photomask]
- a chromium (Cr) film was formed on a thin film of glass (thickness 0.21 mm), and then a chromium oxide (CrO x ) film was formed. Subsequently, a positive photosensitive resin composition (photoresist) was applied. Further, after irradiating (exposing) UV with a predetermined photomask, the photosensitive resin composition (photoresist) at the exposed portion is removed by immersing in an alkaline developer, and etching and photoresist are performed. A thin plate photomask was produced by removing it. [Making a curved photomask]
- a curved photomask was produced using the cover glass produced above.
- a chromium (Cr) film was formed on the cover glass (convex surface), and then a chromium oxide (CrO x ) film was formed.
- a positive photosensitive resin composition photoresist
- the photosensitive resin composition (photoresist) at the exposed portion is removed by immersing in an alkaline developer, and etching is performed. By removing the photoresist, a curved photomask having a light-shielding pattern formed on a convex surface was produced.
- a negative type photosensitive resin composition (photoresist) was applied onto the cover glass (concave surface) produced above. Further, after irradiating (exposing) UV with the curved photomask produced above, the photosensitive resin composition (photoresist) at the exposed portion is removed by immersing in an alkaline developer to remove the photosensitive resin composition (photoresist). An insulating layer was formed on the concave surface.
- ITO indium tin oxide
- photoresist positive photosensitive resin composition
- a touch sensor with integrated cover panel that can be used for display systems with various curved surface designs and shapes, especially a touch sensor with integrated cover panel that can be used for in-vehicle display systems.
Abstract
[Problem] The present invention considers such matters to provide a touch sensor that can be applied to a display system of various curved surface designs and shapes and, in particular, a touch sensor that can be applied to a vehicle-mounted display system. [Solution] The present invention is a method for manufacturing a cover panel integrated-type touch sensor, the method using a photomask that has a curved shape to form a direct contact touch sensor circuit on a cover panel having a curved shape.
Description
本発明は、タッチセンサー、これを含む表示装置、およびタッチセンサーの製造方法に関するもので、さらに詳細には、カバーパネル一体型タッチセンサー、これを含む表示装置、およびカバーパネル一体型タッチセンサーの製造方法に関するものである。
The present invention relates to a touch sensor, a display device including the touch sensor, and a method for manufacturing the touch sensor. More specifically, the manufacture of a touch sensor with an integrated cover panel, a display device including the touch sensor, and a touch sensor with an integrated cover panel. It's about the method.
一般に、電子通信技術の発展を通じて多様な電子機器が作られており、このような電子機器は次第に使用者の操作便宜性とともにデザインの美観を強調する傾向にある。このような傾向につれて強調されるのは、キーボードあるいはキーパッドで代表される入力装置の多角化である。
In general, various electronic devices have been made through the development of electronic communication technology, and such electronic devices gradually tend to emphasize the aesthetics of design as well as the convenience of operation by the user. What is emphasized along with this tendency is the diversification of input devices represented by keyboards or keypads.
タッチセンサーは、携帯用端末、ノートパソコン、スマートフォン、スマートパッド、スマートＴＶなど、使用者に情報を提供する多様な種類のディスプレイシステムに用いられている。最近では電子機器の発展とともに操作キー、ダイヤルなどを利用して入力する方法の他にタッチを利用して命令信号を入力する方法が用いられている。
Touch sensors are used in various types of display systems that provide information to users, such as portable terminals, laptop computers, smartphones, smart pads, and smart TVs. Recently, with the development of electronic devices, a method of inputting a command signal by using a touch has been used in addition to a method of inputting by using an operation key or a dial.
タッチセンサーは、各種ディスプレイを利用する情報通信機器と使用者間のインターフェースを構成する入力装置の一つであって、使用者が指やタッチペンなどの入力道具を利用してタッチパッドまたはタッチスクリーンを直接接触するかまたはこれに近接することによって、情報通信機器と使用者間のインターフェースを可能とさせる。
A touch sensor is one of the input devices that form an interface between an information communication device that uses various displays and a user, and the user uses an input tool such as a finger or a touch pen to use a touch pad or a touch screen. Direct contact or proximity to it enables an interface between the information communication device and the user.
タッチセンサーは、指またはタッチペンなどの入力道具に接触するだけで老若男女を問わず誰しも容易に使用することができるため、ＡＴＭ（Ａｕｔｏｍａｔｅｄ Ｔｅｌｌｅｒ Ｍａｃｈｉｎｅ）、ＰＤＡ（Ｐｅｒｓｏｎａｌ Ｄｉｇｉｔａｌ Ａｓｓｉｓｔａｎｔ）、携帯電話などの多様な機器で活用されており、その分野も、銀行、官公庁、観光および交通案内などの広い分野で多用されている。
Since the touch sensor can be easily used by anyone regardless of age or sex simply by touching an input tool such as a finger or a touch pen, ATM (Automated Teller Machine), PDA (Personal Digital Assistant), mobile phone, etc. It is used in a wide variety of equipment, and its fields are also widely used in a wide range of fields such as banks, government offices, tourism and transportation information.
最近では、健康または医療関連製品と車両にタッチセンサーを適用しようとする試みが続いている。特に、タッチパネルはタッチスクリーンとともに使用されるかディスプレイシステムに独自に使用され得るため、その活用度が高まっている。
Recently, attempts have been made to apply touch sensors to health or medical products and vehicles. In particular, since the touch panel can be used together with the touch screen or independently used in the display system, its utilization is increasing.
最新の車両のダッシュボード表示は、曲面フリーフォーム液晶表示へ開発が活発化している。特に、車内デザイン性の多様化に伴い、曲面デザインや、様々な形状のディスプレイシステムに対応できるタッチセンサーが望まれている。
The latest vehicle dashboard display is being actively developed as a curved free-form liquid crystal display. In particular, with the diversification of vehicle interior design, a touch sensor capable of supporting curved surface design and display systems of various shapes is desired.
タッチ面が曲面形状となっているタッチセンサーを作製する場合、曲面形状のガラス製もしくは樹脂製のカバーパネルに対し、タッチセンサーを形成した薄板ガラスもしくは樹脂フィルムを曲面に沿って貼り合わせる手法が一般的となっている。
この場合、各部品の製造工程や貼り合わせによる工程数の増加、異物混入、貼り合わせ等の不具合による歩留まりの低下、さらには樹脂フィルムおよび接着剤を使用することによる接着剤の安定性、ガスバリア性等の信頼性の低下が課題となっている。
また、外部振動および衝撃や高熱に脆弱な問題がある。したがって、製品の耐久性が低下し、振動および高熱が伴われる車両室内等の装置への適用が難しい。 When manufacturing a touch sensor with a curved touch surface, a general method is to attach a thin glass or resin film on which the touch sensor is formed to a curved glass or resin cover panel along the curved surface. It has become a target.
In this case, the number of processes due to the manufacturing process and bonding of each part increases, the yield decreases due to foreign matter contamination, bonding problems, etc., and the stability and gas barrier properties of the adhesive due to the use of resin film and adhesive. The deterioration of reliability such as these has become an issue.
It also has the problem of being vulnerable to external vibration, shock and high heat. Therefore, the durability of the product is lowered, and it is difficult to apply it to a device such as a vehicle interior accompanied by vibration and high heat.
この場合、各部品の製造工程や貼り合わせによる工程数の増加、異物混入、貼り合わせ等の不具合による歩留まりの低下、さらには樹脂フィルムおよび接着剤を使用することによる接着剤の安定性、ガスバリア性等の信頼性の低下が課題となっている。
また、外部振動および衝撃や高熱に脆弱な問題がある。したがって、製品の耐久性が低下し、振動および高熱が伴われる車両室内等の装置への適用が難しい。 When manufacturing a touch sensor with a curved touch surface, a general method is to attach a thin glass or resin film on which the touch sensor is formed to a curved glass or resin cover panel along the curved surface. It has become a target.
In this case, the number of processes due to the manufacturing process and bonding of each part increases, the yield decreases due to foreign matter contamination, bonding problems, etc., and the stability and gas barrier properties of the adhesive due to the use of resin film and adhesive. The deterioration of reliability such as these has become an issue.
It also has the problem of being vulnerable to external vibration, shock and high heat. Therefore, the durability of the product is lowered, and it is difficult to apply it to a device such as a vehicle interior accompanied by vibration and high heat.
タッチ面が曲面形状となっているタッチセンサーを製造する方法としては、ガラス板の一方の面のみをエッチングによって薄化し、厚み差によって生じる内部応力差を利用してガラス本体部の湾曲形状を形成して製造する方法（例えば、特許文献１参照）、また、ガラス板のトップ面が凹面となるように、研磨工程を経ることによって製造する方法（例えば、特許文献２参照）、が知られている。
As a method of manufacturing a touch sensor having a curved touch surface, only one surface of the glass plate is thinned by etching, and the curved shape of the glass body is formed by utilizing the internal stress difference caused by the difference in thickness. (For example, see Patent Document 1), and a method for manufacturing by going through a polishing step so that the top surface of the glass plate becomes a concave surface (for example, see Patent Document 2). There is.
しかしながら、内部応力差を利用する方法、および研磨によって製造する方法では、曲率（Ｒ）を大きくすることは困難であり、近年の車内デザイン性の多様化に対応することはできない。
However, it is difficult to increase the curvature (R) by the method using the internal stress difference and the method of manufacturing by polishing, and it is not possible to cope with the diversification of the interior design in recent years.
本発明はこのような事情を考慮してなされたもので、様々な曲面デザインや形状のディスプレイシステムに対応できるタッチセンサー、特に車載用のディスプレイシステムに対応できるタッチセンサーを提供することを目的とする。
The present invention has been made in consideration of such circumstances, and an object of the present invention is to provide a touch sensor capable of supporting a display system having various curved surface designs and shapes, particularly a touch sensor capable of supporting an in-vehicle display system. ..
上記課題を解決するべく鋭意検討の結果、本発明のタッチセンサーは以下の特徴を有するタッチセンサーであり、当該タッチセンサーの製造方法である。
（１）カバーパネル一体型タッチセンサーの製造方法であって、曲面形状を有するカバーパネルに直接タッチセンサー回路を形成することを特徴とする、曲面形状を有するカバーパネル一体型タッチセンサーの製造方法。
（２）カバーパネル一体型タッチセンサーの製造方法であって、曲面形状を有するフォトマスクを使用することを特徴とする、上記（１）記載の曲面形状を有するカバーパネル一体型タッチセンサーの製造方法。
（３）前記曲面形状を有するフォトマスクが、前記曲面形状を有するカバーパネルと同一形状を有する曲面ガラスを使用することを特徴とする、上記（２）記載の曲面形状を有するカバーパネル一体型タッチセンサーの製造方法。
（４）前記曲面形状を有するカバーパネルがガラス製である、上記（１）～（３）のいずれかに記載の曲面形状を有するカバーパネル一体型タッチセンサーの製造方法。
（５）前記曲面形状を有するカバーパネルの曲率（Ｒ）が５００～１５００の曲面形状を有する、上記（１）～（４）のいずれかに記載の曲面形状を有するカバーパネル一体型タッチセンサーの製造方法。
（６）上記（１）～（５）記載の製造方法によって製造された、カバーパネル一体型タッチセンサー。
（７）上記（１）～（５）記載の製造方法によって製造された、カバーパネル一体型タッチセンサーを含む表示装置。 As a result of diligent studies to solve the above problems, the touch sensor of the present invention is a touch sensor having the following features, and is a method for manufacturing the touch sensor.
(1) A method for manufacturing a touch sensor with an integrated cover panel, which comprises forming a touch sensor circuit directly on a cover panel having a curved surface shape, and comprising a method for manufacturing a touch sensor with an integrated cover panel having a curved surface shape.
(2) A method for manufacturing a touch sensor with an integrated cover panel, which comprises using a photomask having a curved surface shape, as described in (1) above. ..
(3) The cover panel integrated touch having the curved surface shape according to the above (2), wherein the photomask having the curved surface shape uses curved glass having the same shape as the cover panel having the curved surface shape. How to make the sensor.
(4) The method for manufacturing a cover panel integrated touch sensor having a curved surface shape according to any one of (1) to (3) above, wherein the cover panel having the curved surface shape is made of glass.
(5) The cover panel integrated touch sensor having a curved surface shape according to any one of (1) to (4) above, which has a curved surface shape having a curvature (R) of 500 to 1500 of the cover panel having the curved surface shape. Production method.
(6) A touch sensor with an integrated cover panel manufactured by the manufacturing methods described in (1) to (5) above.
(7) A display device including a cover panel integrated touch sensor manufactured by the manufacturing methods described in (1) to (5) above.
（１）カバーパネル一体型タッチセンサーの製造方法であって、曲面形状を有するカバーパネルに直接タッチセンサー回路を形成することを特徴とする、曲面形状を有するカバーパネル一体型タッチセンサーの製造方法。
（２）カバーパネル一体型タッチセンサーの製造方法であって、曲面形状を有するフォトマスクを使用することを特徴とする、上記（１）記載の曲面形状を有するカバーパネル一体型タッチセンサーの製造方法。
（３）前記曲面形状を有するフォトマスクが、前記曲面形状を有するカバーパネルと同一形状を有する曲面ガラスを使用することを特徴とする、上記（２）記載の曲面形状を有するカバーパネル一体型タッチセンサーの製造方法。
（４）前記曲面形状を有するカバーパネルがガラス製である、上記（１）～（３）のいずれかに記載の曲面形状を有するカバーパネル一体型タッチセンサーの製造方法。
（５）前記曲面形状を有するカバーパネルの曲率（Ｒ）が５００～１５００の曲面形状を有する、上記（１）～（４）のいずれかに記載の曲面形状を有するカバーパネル一体型タッチセンサーの製造方法。
（６）上記（１）～（５）記載の製造方法によって製造された、カバーパネル一体型タッチセンサー。
（７）上記（１）～（５）記載の製造方法によって製造された、カバーパネル一体型タッチセンサーを含む表示装置。 As a result of diligent studies to solve the above problems, the touch sensor of the present invention is a touch sensor having the following features, and is a method for manufacturing the touch sensor.
(1) A method for manufacturing a touch sensor with an integrated cover panel, which comprises forming a touch sensor circuit directly on a cover panel having a curved surface shape, and comprising a method for manufacturing a touch sensor with an integrated cover panel having a curved surface shape.
(2) A method for manufacturing a touch sensor with an integrated cover panel, which comprises using a photomask having a curved surface shape, as described in (1) above. ..
(3) The cover panel integrated touch having the curved surface shape according to the above (2), wherein the photomask having the curved surface shape uses curved glass having the same shape as the cover panel having the curved surface shape. How to make the sensor.
(4) The method for manufacturing a cover panel integrated touch sensor having a curved surface shape according to any one of (1) to (3) above, wherein the cover panel having the curved surface shape is made of glass.
(5) The cover panel integrated touch sensor having a curved surface shape according to any one of (1) to (4) above, which has a curved surface shape having a curvature (R) of 500 to 1500 of the cover panel having the curved surface shape. Production method.
(6) A touch sensor with an integrated cover panel manufactured by the manufacturing methods described in (1) to (5) above.
(7) A display device including a cover panel integrated touch sensor manufactured by the manufacturing methods described in (1) to (5) above.
様々な曲面デザインや形状のディスプレイシステムに対応できるカバーパネル一体型タッチセンサー、特に車載用のディスプレイシステムに対応できるカバーパネル一体型タッチセンサーを提供することができる。
We can provide a touch sensor with integrated cover panel that can be used for display systems with various curved surface designs and shapes, especially a touch sensor with integrated cover panel that can be used for in-vehicle display systems.
以下、本発明の一側面に係るタッチセンサー及びタッチセンサーの製造方法の好適な実施形態について詳細に説明する。なお、本明細書においては、カバーパネルをガラス製のもの（カバーガラス）として主に説明するが、樹脂製のカバーパネルでもよい。また、カバーパネル以外の湾曲形状をなすガラス、または樹脂製のパネル（板）に配線パターン（回路）を作製することにも適用できる。例えば、湾曲（曲面）形状をなすガラスや樹脂製のパネル（板）に配線パターン（回路）を形成したものであって、曲面形状を有するスイッチ、もしくは生体情報センシングデバイスなどに搭載されるものにも適用できる。
［カバーガラスの構成］ Hereinafter, a preferred embodiment of the touch sensor and the method for manufacturing the touch sensor according to one aspect of the present invention will be described in detail. In this specification, the cover panel is mainly described as being made of glass (cover glass), but a resin cover panel may also be used. It can also be applied to fabricate a wiring pattern (circuit) on a curved glass or resin panel (plate) other than the cover panel. For example, a wiring pattern (circuit) formed on a curved (curved surface) shaped glass or resin panel (plate), which is mounted on a switch having a curved surface shape, a biometric information sensing device, or the like. Can also be applied.
[Construction of cover glass]
［カバーガラスの構成］ Hereinafter, a preferred embodiment of the touch sensor and the method for manufacturing the touch sensor according to one aspect of the present invention will be described in detail. In this specification, the cover panel is mainly described as being made of glass (cover glass), but a resin cover panel may also be used. It can also be applied to fabricate a wiring pattern (circuit) on a curved glass or resin panel (plate) other than the cover panel. For example, a wiring pattern (circuit) formed on a curved (curved surface) shaped glass or resin panel (plate), which is mounted on a switch having a curved surface shape, a biometric information sensing device, or the like. Can also be applied.
[Construction of cover glass]
本発明に係るカバーガラスは、表示装置、例えばタッチパネル式ディスプレイの構成部品であり、液晶パネル等の表示装置と共にウェアラブル端末に搭載されるものである。
カバーガラスの表面形状は、特に制限はないが、例えば、表示装置の表面形状と同じ表面形状を有することが好ましく、曲面形状を有するものであってもよい。この場合の曲率は、特に制限はないが、曲率（Ｒ）１０～５０００程度であってもよいが、本発明においては曲率（Ｒ）７００～１５００の曲面形状を有するものが好ましく用いられ、５００～１５００の曲面形状を有するものが特に好ましく用いられる。
また、カバーガラスの厚さは、０．３ｍｍ以上、２．０ｍｍ以下が好ましく、０．７ｍｍ以上、１．５ｍｍ以下がより好ましい。０．３ｍｍ未満では強度が十分ではなく、２．０ｍｍ超では表示装置全体の厚さが増えることによる重量増となり、車載用としては好ましくないからである。 The cover glass according to the present invention is a component of a display device, for example, a touch panel display, and is mounted on a wearable terminal together with a display device such as a liquid crystal panel.
The surface shape of the cover glass is not particularly limited, but for example, it preferably has the same surface shape as the surface shape of the display device, and may have a curved surface shape. The curvature in this case is not particularly limited, but may be about 10 to 5000 with a curvature (R), but in the present invention, one having a curved surface shape with a curvature (R) of 700 to 1500 is preferably used, and 500. Those having a curved surface shape of ~ 1500 are particularly preferably used.
The thickness of the cover glass is preferably 0.3 mm or more and 2.0 mm or less, and more preferably 0.7 mm or more and 1.5 mm or less. This is because if it is less than 0.3 mm, the strength is not sufficient, and if it exceeds 2.0 mm, the weight increases due to the increase in the thickness of the entire display device, which is not preferable for in-vehicle use.
カバーガラスの表面形状は、特に制限はないが、例えば、表示装置の表面形状と同じ表面形状を有することが好ましく、曲面形状を有するものであってもよい。この場合の曲率は、特に制限はないが、曲率（Ｒ）１０～５０００程度であってもよいが、本発明においては曲率（Ｒ）７００～１５００の曲面形状を有するものが好ましく用いられ、５００～１５００の曲面形状を有するものが特に好ましく用いられる。
また、カバーガラスの厚さは、０．３ｍｍ以上、２．０ｍｍ以下が好ましく、０．７ｍｍ以上、１．５ｍｍ以下がより好ましい。０．３ｍｍ未満では強度が十分ではなく、２．０ｍｍ超では表示装置全体の厚さが増えることによる重量増となり、車載用としては好ましくないからである。 The cover glass according to the present invention is a component of a display device, for example, a touch panel display, and is mounted on a wearable terminal together with a display device such as a liquid crystal panel.
The surface shape of the cover glass is not particularly limited, but for example, it preferably has the same surface shape as the surface shape of the display device, and may have a curved surface shape. The curvature in this case is not particularly limited, but may be about 10 to 5000 with a curvature (R), but in the present invention, one having a curved surface shape with a curvature (R) of 700 to 1500 is preferably used, and 500. Those having a curved surface shape of ~ 1500 are particularly preferably used.
The thickness of the cover glass is preferably 0.3 mm or more and 2.0 mm or less, and more preferably 0.7 mm or more and 1.5 mm or less. This is because if it is less than 0.3 mm, the strength is not sufficient, and if it exceeds 2.0 mm, the weight increases due to the increase in the thickness of the entire display device, which is not preferable for in-vehicle use.
本発明に係るカバーガラスを構成するガラス材料の組成としては、カバーガラスとして通常使用されるガラス材料の組成（例えば、特許文献１参照）であれば、いずれも好ましく使用できる。
As the composition of the glass material constituting the cover glass according to the present invention, any composition of the glass material usually used as the cover glass (see, for example, Patent Document 1) can be preferably used.
本発明に係るカバーガラスを構成するガラスには強化処理を施すことが好ましい。強化処理を施すことによって、ひび割れ、破損から防ぐことができるからである。
強化処理は、湾曲（曲面）形状をなすガラスを作製した後に行うのが好ましい。強化処理後に湾曲（曲面）形状を形成するのは、ひび割れ、破損の恐れがあるからである。また、湾曲（曲面）形状をなすガラスの稜部（エッジ）を含めたすべての面に対して強化処理を行うことができるという利点も得られる。
強化処理としては、例えばイオン交換処理が挙げられる。より具体的には、例えば、表示装置の表面と同じ表面形状を有するカバーガラスを作製した後、硝酸カリウム（ＫＮＯ３）の溶融塩にカバーガラスを浸漬させる。これにより、ガラス結晶中のナトリウムがカリウムに置換され、ガラス結晶の硬度が高められる。なお、この場合、カバーガラスは両面に加え、端面（ガラスカット稜部）にも圧縮応力層が形成され、強化処理されることとなる。
［薄板フォトマスクの作製］ It is preferable that the glass constituting the cover glass according to the present invention is subjected to a strengthening treatment. This is because it is possible to prevent cracks and breakages by applying the strengthening treatment.
The strengthening treatment is preferably performed after producing glass having a curved (curved surface) shape. The curved (curved surface) shape is formed after the strengthening treatment because there is a risk of cracking or breakage. In addition, there is an advantage that all surfaces including the ridges (edges) of glass having a curved (curved surface) shape can be strengthened.
Examples of the strengthening treatment include an ion exchange treatment. More specifically, for example, after producing a cover glass having the same surface shape as the surface of the display device, the cover glass is immersed in a molten salt of potassium nitrate (KNO 3). As a result, sodium in the glass crystal is replaced with potassium, and the hardness of the glass crystal is increased. In this case, in addition to both sides of the cover glass, a compressive stress layer is formed on the end face (glass cut ridge) and is strengthened.
[Making a thin photomask]
強化処理は、湾曲（曲面）形状をなすガラスを作製した後に行うのが好ましい。強化処理後に湾曲（曲面）形状を形成するのは、ひび割れ、破損の恐れがあるからである。また、湾曲（曲面）形状をなすガラスの稜部（エッジ）を含めたすべての面に対して強化処理を行うことができるという利点も得られる。
強化処理としては、例えばイオン交換処理が挙げられる。より具体的には、例えば、表示装置の表面と同じ表面形状を有するカバーガラスを作製した後、硝酸カリウム（ＫＮＯ３）の溶融塩にカバーガラスを浸漬させる。これにより、ガラス結晶中のナトリウムがカリウムに置換され、ガラス結晶の硬度が高められる。なお、この場合、カバーガラスは両面に加え、端面（ガラスカット稜部）にも圧縮応力層が形成され、強化処理されることとなる。
［薄板フォトマスクの作製］ It is preferable that the glass constituting the cover glass according to the present invention is subjected to a strengthening treatment. This is because it is possible to prevent cracks and breakages by applying the strengthening treatment.
The strengthening treatment is preferably performed after producing glass having a curved (curved surface) shape. The curved (curved surface) shape is formed after the strengthening treatment because there is a risk of cracking or breakage. In addition, there is an advantage that all surfaces including the ridges (edges) of glass having a curved (curved surface) shape can be strengthened.
Examples of the strengthening treatment include an ion exchange treatment. More specifically, for example, after producing a cover glass having the same surface shape as the surface of the display device, the cover glass is immersed in a molten salt of potassium nitrate (KNO 3). As a result, sodium in the glass crystal is replaced with potassium, and the hardness of the glass crystal is increased. In this case, in addition to both sides of the cover glass, a compressive stress layer is formed on the end face (glass cut ridge) and is strengthened.
[Making a thin photomask]
本発明に係るカバーパネル一体型タッチセンサーは、フォトリソ法とエッチングなどの常法によって製造される。
本発明では、フォトリソ法を行うためのフォトマスクを作製のために、初めに薄膜の薄板フォトマスクを作製することが好ましい。樹脂製の薄膜フォトマスクを使用して、前記カバーガラスに対して直接フォトリソ法を適用した場合、フォトマスクをセットするときに、浮きが発生するなど、密着させることができないからである。
したがって、薄膜の薄板フォトマスクとしては、ガラス製の薄膜を使用して作製することが好ましい。 The cover panel integrated touch sensor according to the present invention is manufactured by a conventional method such as a photolithography method and etching.
In the present invention, in order to prepare a photomask for performing a photolithography method, it is preferable to first prepare a thin thin film photomask. This is because when the photolithography method is applied directly to the cover glass using a thin film photomask made of resin, it is not possible to bring the photomask into close contact with the cover glass, such as floating.
Therefore, as the thin film photomask, it is preferable to use a thin film made of glass.
本発明では、フォトリソ法を行うためのフォトマスクを作製のために、初めに薄膜の薄板フォトマスクを作製することが好ましい。樹脂製の薄膜フォトマスクを使用して、前記カバーガラスに対して直接フォトリソ法を適用した場合、フォトマスクをセットするときに、浮きが発生するなど、密着させることができないからである。
したがって、薄膜の薄板フォトマスクとしては、ガラス製の薄膜を使用して作製することが好ましい。 The cover panel integrated touch sensor according to the present invention is manufactured by a conventional method such as a photolithography method and etching.
In the present invention, in order to prepare a photomask for performing a photolithography method, it is preferable to first prepare a thin thin film photomask. This is because when the photolithography method is applied directly to the cover glass using a thin film photomask made of resin, it is not possible to bring the photomask into close contact with the cover glass, such as floating.
Therefore, as the thin film photomask, it is preferable to use a thin film made of glass.
本発明において、薄板フォトマスクは、例えば、曲面上に容易に変形させることができる厚さの平板のガラス板に対し、真空スパッタリング法または蒸着法などの常法によって、遮光膜を成膜した後、フォトリソ法とエッチングなどの常法によって作製される。
この場合に使用するガラスの厚さは、自重により曲面上に容易に変形させることができる厚さであることが好ましい。例えば、０．７ｍｍ以下が好ましく、０．５ｍｍ以下がより好ましく、０．３ｍｍ以下がさらに好ましい。また、強度の観点から、０．０５ｍｍ以上であることが好ましい。
［曲面フォトマスクの作製］ In the present invention, the thin plate photomask is formed after a light-shielding film is formed on a flat glass plate having a thickness that can be easily deformed on a curved surface by a conventional method such as a vacuum sputtering method or a vapor deposition method. , Produced by conventional methods such as photolithography and etching.
The thickness of the glass used in this case is preferably a thickness that can be easily deformed on a curved surface by its own weight. For example, 0.7 mm or less is preferable, 0.5 mm or less is more preferable, and 0.3 mm or less is further preferable. Further, from the viewpoint of strength, it is preferably 0.05 mm or more.
[Making a curved photomask]
この場合に使用するガラスの厚さは、自重により曲面上に容易に変形させることができる厚さであることが好ましい。例えば、０．７ｍｍ以下が好ましく、０．５ｍｍ以下がより好ましく、０．３ｍｍ以下がさらに好ましい。また、強度の観点から、０．０５ｍｍ以上であることが好ましい。
［曲面フォトマスクの作製］ In the present invention, the thin plate photomask is formed after a light-shielding film is formed on a flat glass plate having a thickness that can be easily deformed on a curved surface by a conventional method such as a vacuum sputtering method or a vapor deposition method. , Produced by conventional methods such as photolithography and etching.
The thickness of the glass used in this case is preferably a thickness that can be easily deformed on a curved surface by its own weight. For example, 0.7 mm or less is preferable, 0.5 mm or less is more preferable, and 0.3 mm or less is further preferable. Further, from the viewpoint of strength, it is preferably 0.05 mm or more.
[Making a curved photomask]
本発明において、ガラス製の薄膜フォトマスクを使用して、前記カバーガラスに対して直接フォトリソ法を適用した場合、薄膜であるがゆえに、フォトマスクをセットするとき、または取り除くとき等において、破損するリスクが高く、作業効率の低下をもたらす。
したがって、本発明においては、フォトリソ法を行うためのフォトマスクとしては、例えば、材質として強化ガラスを用い、十分な強度を有する厚さを有し、表示装置の表面形状と同じ表面形状を有するカバーガラスと同じ表面形状を有する曲面ガラスに対し、前記薄板フォトマスクを使用して、フォトリソ法とエッチングなどの常法によって作製されることが好ましい。
フォトマスクとしては、曲面ガラスの厚さはカバーガラスと同程度の厚さ以下のものが好ましく用いられる。例えば、０．３ｍｍ以上、２．０ｍｍ以下が好ましく、０．７ｍｍ以上、１．５ｍｍ以下がより好ましい。０．３ｍｍ未満では強度が十分ではなく、また、フォトマスクを前記カバーガラスにセットするときの密着性の観点から、前記カバーガラスと同じ表面形状を有することが好ましいからである。 In the present invention, when a thin film photomask made of glass is used and the photolithography method is applied directly to the cover glass, the photomask is damaged when it is set or removed because it is a thin film. The risk is high and the work efficiency is reduced.
Therefore, in the present invention, as the photomask for performing the photolithography method, for example, a cover using tempered glass as a material, having a thickness having sufficient strength, and having the same surface shape as the surface shape of the display device. It is preferable that curved glass having the same surface shape as glass is produced by a conventional method such as a photolithography method and etching using the thin plate photomask.
As the photomask, a curved glass having a thickness equal to or less than that of the cover glass is preferably used. For example, 0.3 mm or more and 2.0 mm or less are preferable, and 0.7 mm or more and 1.5 mm or less are more preferable. This is because if it is less than 0.3 mm, the strength is not sufficient, and it is preferable that the photomask has the same surface shape as the cover glass from the viewpoint of adhesion when the photomask is set on the cover glass.
したがって、本発明においては、フォトリソ法を行うためのフォトマスクとしては、例えば、材質として強化ガラスを用い、十分な強度を有する厚さを有し、表示装置の表面形状と同じ表面形状を有するカバーガラスと同じ表面形状を有する曲面ガラスに対し、前記薄板フォトマスクを使用して、フォトリソ法とエッチングなどの常法によって作製されることが好ましい。
フォトマスクとしては、曲面ガラスの厚さはカバーガラスと同程度の厚さ以下のものが好ましく用いられる。例えば、０．３ｍｍ以上、２．０ｍｍ以下が好ましく、０．７ｍｍ以上、１．５ｍｍ以下がより好ましい。０．３ｍｍ未満では強度が十分ではなく、また、フォトマスクを前記カバーガラスにセットするときの密着性の観点から、前記カバーガラスと同じ表面形状を有することが好ましいからである。 In the present invention, when a thin film photomask made of glass is used and the photolithography method is applied directly to the cover glass, the photomask is damaged when it is set or removed because it is a thin film. The risk is high and the work efficiency is reduced.
Therefore, in the present invention, as the photomask for performing the photolithography method, for example, a cover using tempered glass as a material, having a thickness having sufficient strength, and having the same surface shape as the surface shape of the display device. It is preferable that curved glass having the same surface shape as glass is produced by a conventional method such as a photolithography method and etching using the thin plate photomask.
As the photomask, a curved glass having a thickness equal to or less than that of the cover glass is preferably used. For example, 0.3 mm or more and 2.0 mm or less are preferable, and 0.7 mm or more and 1.5 mm or less are more preferable. This is because if it is less than 0.3 mm, the strength is not sufficient, and it is preferable that the photomask has the same surface shape as the cover glass from the viewpoint of adhesion when the photomask is set on the cover glass.
本発明においては、例えば、曲面ガラスに対し、真空スパッタリング法または蒸着法などの常法によって、遮光膜を成膜した後、前記薄板フォトマスクの遮光膜が曲面ガラスに接するように設置し、フォトリソ法とエッチングなどの常法によって曲面フォトマスクが作製される。
ここで、薄板フォトマスクは、曲面上に容易に変形させることができる厚さのガラス板から作製されたものであるため、自重によって容易に変形し、曲面ガラスに密着することとなる。
［カバーパネル一体型タッチセンサーの製造］ In the present invention, for example, a light-shielding film is formed on a curved surface glass by a conventional method such as a vacuum sputtering method or a thin-film deposition method, and then the light-shielding film of the thin photomask is installed so as to be in contact with the curved surface glass. A curved photomask is produced by a method and a conventional method such as etching.
Here, since the thin photomask is made of a glass plate having a thickness that can be easily deformed on a curved surface, it is easily deformed by its own weight and comes into close contact with the curved glass.
[Manufacturing of touch sensor with integrated cover panel]
ここで、薄板フォトマスクは、曲面上に容易に変形させることができる厚さのガラス板から作製されたものであるため、自重によって容易に変形し、曲面ガラスに密着することとなる。
［カバーパネル一体型タッチセンサーの製造］ In the present invention, for example, a light-shielding film is formed on a curved surface glass by a conventional method such as a vacuum sputtering method or a thin-film deposition method, and then the light-shielding film of the thin photomask is installed so as to be in contact with the curved surface glass. A curved photomask is produced by a method and a conventional method such as etching.
Here, since the thin photomask is made of a glass plate having a thickness that can be easily deformed on a curved surface, it is easily deformed by its own weight and comes into close contact with the curved glass.
[Manufacturing of touch sensor with integrated cover panel]
本発明において、カバーパネル一体型タッチセンサーは、例えば、表示装置の表面形状と同じ表面形状を有するカバーガラスに対し、直接、前記曲面フォトマスクを使用して、タッチセンサー回路をフォトリソ法とエッチングなどの常法によって作製される。
曲面フォトマスクは、表示装置の表面形状と同じ表面形状を有するカバーガラスと同じ表面形状を有する曲面ガラスから作製されたものであるため、表示装置の表面と同じ表面形状を有するカバーガラスに密着することとなる。 In the present invention, the touch sensor with integrated cover panel is, for example, directly used the curved photomask on a cover glass having the same surface shape as the surface shape of the display device to etch the touch sensor circuit with a photolithography method. It is produced by the conventional method of.
Since the curved photomask is made of curved glass having the same surface shape as the cover glass having the same surface shape as the surface shape of the display device, it adheres to the cover glass having the same surface shape as the surface of the display device. It will be.
曲面フォトマスクは、表示装置の表面形状と同じ表面形状を有するカバーガラスと同じ表面形状を有する曲面ガラスから作製されたものであるため、表示装置の表面と同じ表面形状を有するカバーガラスに密着することとなる。 In the present invention, the touch sensor with integrated cover panel is, for example, directly used the curved photomask on a cover glass having the same surface shape as the surface shape of the display device to etch the touch sensor circuit with a photolithography method. It is produced by the conventional method of.
Since the curved photomask is made of curved glass having the same surface shape as the cover glass having the same surface shape as the surface shape of the display device, it adheres to the cover glass having the same surface shape as the surface of the display device. It will be.
本発明において、カバーパネル一体型タッチセンサーは、例えば、Ｘ軸方向の透明電極、Ｙ軸方向の透明電極、両者の交差する領域に形成されるジャンパ配線と絶縁層、加飾額縁領域で覆われる引き出し配線、さらには全体に形成される保護層等により構成される。
In the present invention, the cover panel integrated touch sensor is covered with, for example, a transparent electrode in the X-axis direction, a transparent electrode in the Y-axis direction, a jumper wiring and an insulating layer formed in a region where the two intersect, and a decorative frame region. It is composed of lead-out wiring and a protective layer formed on the whole.
前記Ｘ軸方向の透明電極、Ｙ軸方向の透明電極及びジャンパ配線は、透明導電材料を用いて形成することができる。透明導電材料としては、例えば酸化インジウム・スズ（ＩＴＯ）、酸化スズ、酸化亜鉛などの金属酸化物、Ｍｏ／Ａｌ／Ｍｏ（モリブデン／アルミニウム／モリブデン）の積層体や、Ａｕ（金）、Ａｇ（銀）、Ｃｕ（銅）、Ａｇ合金、Ｃｕ合金などをもちいることができる。このような材料をスパッタリング法や真空蒸着法等で成膜する。具体的には、例えばＩＴＯを用いて、ＤＣマグネトロンスパッタ方式にて加熱スパッタによりＩＴＯ膜を形成し、その全面上にノボラック系ポジレジストを塗布して、さらにベーキング、マスク露光、現像を行う。その後、例えば王水、シュウ酸、塩化第二鉄水溶液、ヨウ素酸水溶液、燐酸水溶液などを用いてエッチングし、さらにポジレジストを剥離して透明電極を形成することができる。なお、前記Ｘ軸方向の透明電極、Ｙ軸方向の透明電極及びジャンパ配線の形成において、同じ透明導電材料を用いてもよい。
The transparent electrode in the X-axis direction, the transparent electrode in the Y-axis direction, and the jumper wiring can be formed by using a transparent conductive material. Examples of the transparent conductive material include metal oxides such as indium tin oxide (ITO), tin oxide, and zinc oxide, laminates of Mo / Al / Mo (molybdenum / aluminum / molybdenum), Au (gold), and Ag ( Silver), Cu (copper), Ag alloy, Cu alloy and the like can be used. Such a material is formed into a film by a sputtering method, a vacuum vapor deposition method, or the like. Specifically, for example, using ITO, an ITO film is formed by heat sputtering by a DC magnetron sputtering method, a novolac-based positive resist is applied on the entire surface thereof, and baking, mask exposure, and development are further performed. After that, etching can be performed with, for example, aqua regia, oxalic acid, ferric chloride aqueous solution, iodic acid aqueous solution, phosphoric acid aqueous solution, etc., and the positive resist can be further peeled off to form a transparent electrode. The same transparent conductive material may be used in forming the transparent electrode in the X-axis direction, the transparent electrode in the Y-axis direction, and the jumper wiring.
前記絶縁層は、例えばネガ型レジストを塗布、ベーキングし、その後、パターンを施したマスクを介してプロキシミティ露光し、現像を経て形成することができる。
The insulating layer can be formed, for example, by applying a negative resist, baking it, and then subjecting it to proximity exposure through a patterned mask and developing it.
前記引き出し配線は金属材料からなり、表示領域の周縁部に位置する前記Ｘ軸方向の透明電極、Ｙ軸方向の透明電極と制御回路とを接続するものであり、例えばＭｏ／Ａｌ／Ｍｏ（モリブデン／アルミニウム／モリブデン）の積層体や、Ａｕ（金）、Ａｇ（銀）、Ｃｕ（銅）、Ａｇ合金、Ｃｕ合金を用いて、上記で説明したフォトリソ法とエッチングにより形成することができる。
The lead-out wiring is made of a metal material and connects the transparent electrode in the X-axis direction and the transparent electrode in the Y-axis direction located at the peripheral edge of the display region to the control circuit, for example, Mo / Al / Mo (molybdenum). It can be formed by the photolitho method and etching described above using a laminate of (aluminum / molybdenum), Au (gold), Ag (silver), Cu (copper), Ag alloy, and Cu alloy.
上記で説明したＸ軸方向の透明電極、Ｙ軸方向の透明電極、ジャンパ配線、絶縁層、引き出し配線を形成したガラス基板全面に保護層を形成することで、より優れた信頼性を付与することができる。
By forming a protective layer on the entire surface of the glass substrate on which the transparent electrode in the X-axis direction, the transparent electrode in the Y-axis direction, the jumper wiring, the insulating layer, and the lead-out wiring described above are formed, more excellent reliability can be imparted. Can be done.
以下に、本発明を実施例によりさらに具体的に説明するが、本発明はこれら実施例により限定されるものではない。
［カバーガラスの作製］ Hereinafter, the present invention will be described in more detail with reference to Examples, but the present invention is not limited to these Examples.
[Making cover glass]
［カバーガラスの作製］ Hereinafter, the present invention will be described in more detail with reference to Examples, but the present invention is not limited to these Examples.
[Making cover glass]
型の上にソーダライムガラスを乗せて、軟化温度付近（７３０℃）まで温度をかけて、残留応力が少ない曲面ガラス（厚さ１．１ｍｍ、曲率（Ｒ）１４００）を作製した。
［薄板フォトマスクの作製］ Soda lime glass was placed on the mold and heated to near the softening temperature (730 ° C.) to prepare curved glass (thickness 1.1 mm, curvature (R) 1400) having little residual stress.
[Making a thin photomask]
［薄板フォトマスクの作製］ Soda lime glass was placed on the mold and heated to near the softening temperature (730 ° C.) to prepare curved glass (thickness 1.1 mm, curvature (R) 1400) having little residual stress.
[Making a thin photomask]
薄膜のガラス（厚さ０．２１ｍｍ）の上に、クロム（Ｃｒ）膜を製膜した後、酸化クロム（ＣｒＯｘ）膜を製膜した。続いて、ポジ型の感光性樹脂組成物（フォトレジスト）を塗布した。さらに、所定のフォトマスクを使用してＵＶを照射（露光）した後、アルカリ系現像液に浸漬することにより露光された箇所の感光性樹脂組成物（フォトレジスト）を除去し、エッチング、フォトレジスト除去を行うことによって薄板フォトマスクを作製した。
［曲面フォトマスクの作製］ A chromium (Cr) film was formed on a thin film of glass (thickness 0.21 mm), and then a chromium oxide (CrO x ) film was formed. Subsequently, a positive photosensitive resin composition (photoresist) was applied. Further, after irradiating (exposing) UV with a predetermined photomask, the photosensitive resin composition (photoresist) at the exposed portion is removed by immersing in an alkaline developer, and etching and photoresist are performed. A thin plate photomask was produced by removing it.
[Making a curved photomask]
［曲面フォトマスクの作製］ A chromium (Cr) film was formed on a thin film of glass (thickness 0.21 mm), and then a chromium oxide (CrO x ) film was formed. Subsequently, a positive photosensitive resin composition (photoresist) was applied. Further, after irradiating (exposing) UV with a predetermined photomask, the photosensitive resin composition (photoresist) at the exposed portion is removed by immersing in an alkaline developer, and etching and photoresist are performed. A thin plate photomask was produced by removing it.
[Making a curved photomask]
前記作製のカバーガラスを用いて曲面フォトマスクを作製した。カバーガラスの上（凸面）に、クロム（Ｃｒ）膜を製膜した後、酸化クロム（ＣｒＯｘ）膜を製膜した。続いて、ポジ型の感光性樹脂組成物（フォトレジスト）を塗布した。さらに、前記作製の薄板フォトマスクを使用してＵＶを照射（露光）した後、アルカリ系現像液に浸漬することにより露光された箇所の感光性樹脂組成物（フォトレジスト）を除去し、エッチング、フォトレジスト除去を行うことによって、凸面に遮光パターンが形成された曲面フォトマスクを作製した。
［カバーパネル一体型タッチセンサーの製造］ A curved photomask was produced using the cover glass produced above. A chromium (Cr) film was formed on the cover glass (convex surface), and then a chromium oxide (CrO x ) film was formed. Subsequently, a positive photosensitive resin composition (photoresist) was applied. Further, after irradiating (exposing) UV using the thin plate photomask produced above, the photosensitive resin composition (photoresist) at the exposed portion is removed by immersing in an alkaline developer, and etching is performed. By removing the photoresist, a curved photomask having a light-shielding pattern formed on a convex surface was produced.
[Manufacturing of touch sensor with integrated cover panel]
［カバーパネル一体型タッチセンサーの製造］ A curved photomask was produced using the cover glass produced above. A chromium (Cr) film was formed on the cover glass (convex surface), and then a chromium oxide (CrO x ) film was formed. Subsequently, a positive photosensitive resin composition (photoresist) was applied. Further, after irradiating (exposing) UV using the thin plate photomask produced above, the photosensitive resin composition (photoresist) at the exposed portion is removed by immersing in an alkaline developer, and etching is performed. By removing the photoresist, a curved photomask having a light-shielding pattern formed on a convex surface was produced.
[Manufacturing of touch sensor with integrated cover panel]
前記作製のカバーガラスの上（凹面）に、ネガ型の感光性樹脂組成物（フォトレジスト）を塗布した。さらに、前記作製の曲面フォトマスクを使用してＵＶを照射（露光）した後、アルカリ系現像液に浸漬することにより露光された箇所の感光性樹脂組成物（フォトレジスト）を除去することによって、凹面に絶縁層を形成した。
A negative type photosensitive resin composition (photoresist) was applied onto the cover glass (concave surface) produced above. Further, after irradiating (exposing) UV with the curved photomask produced above, the photosensitive resin composition (photoresist) at the exposed portion is removed by immersing in an alkaline developer to remove the photosensitive resin composition (photoresist). An insulating layer was formed on the concave surface.
次に、透明導電材料として酸化インジウム・スズ（ＩＴＯ）を用い、ＩＴＯ膜を凹面に形成した後、ポジ型の感光性樹脂組成物（フォトレジスト）を塗布した。さらに、前記作製の曲面フォトマスクを使用してＵＶを照射（露光）した後、アルカリ系現像液に浸漬することにより露光された箇所の感光性樹脂組成物（フォトレジスト）を除去し、エッチング、フォトレジスト除去を行うことによって、凹面にパターン形成されたカバーパネル一体型タッチセンサーを製造した。
Next, indium tin oxide (ITO) was used as a transparent conductive material, an ITO film was formed on a concave surface, and then a positive photosensitive resin composition (photoresist) was applied. Further, after irradiating (exposing) UV with the curved photomask produced above, the photosensitive resin composition (photoresist) at the exposed portion is removed by immersing in an alkaline developer, and etching is performed. By removing the photoresist, a touch sensor with an integrated cover panel having a concave pattern was manufactured.
様々な曲面デザインや形状のディスプレイシステムに対応できるカバーパネル一体型タッチセンサー、特に車載用のディスプレイシステムに対応できるカバーパネル一体型タッチセンサーを提供することができる。
We can provide a touch sensor with integrated cover panel that can be used for display systems with various curved surface designs and shapes, especially a touch sensor with integrated cover panel that can be used for in-vehicle display systems.
１ タッチセンサー
２ カバーパネル
1 Touch sensor 2 Cover panel
２ カバーパネル
1 Touch sensor 2 Cover panel
Claims (7)
- カバーパネル一体型タッチセンサーの製造方法であって、曲面形状を有するカバーパネルに直接タッチセンサー回路を形成することを特徴とする、曲面形状を有するカバーパネル一体型タッチセンサーの製造方法。 A method for manufacturing a touch sensor with an integrated cover panel, which is a method for manufacturing a touch sensor with an integrated cover panel having a curved surface shape, which comprises forming a touch sensor circuit directly on a cover panel having a curved surface shape.
- カバーパネル一体型タッチセンサーの製造方法であって、曲面形状を有するフォトマスクを使用することを特徴とする、請求項１記載の曲面形状を有するカバーパネル一体型タッチセンサーの製造方法。 The method for manufacturing a cover panel integrated touch sensor according to claim 1, wherein a photomask having a curved surface shape is used, which is a method for manufacturing a cover panel integrated touch sensor.
- 前記曲面形状を有するフォトマスクが、前記曲面形状を有するカバーパネルと同一形状を有する曲面ガラスを使用することを特徴とする、請求項２記載の曲面形状を有するカバーパネル一体型タッチセンサーの製造方法。 The method for manufacturing a cover panel integrated touch sensor having a curved surface shape according to claim 2, wherein the photomask having a curved surface shape uses curved glass having the same shape as the cover panel having the curved surface shape. ..
- 前記曲面形状を有するカバーパネルがガラス製である、請求項１～請求項３のいずれか一項に記載の曲面形状を有するカバーパネル一体型タッチセンサーの製造方法。 The method for manufacturing a cover panel integrated touch sensor having a curved surface shape according to any one of claims 1 to 3, wherein the cover panel having the curved surface shape is made of glass.
- 前記曲面形状を有するカバーパネルの曲率（Ｒ）が５００～１５００の曲面形状を有する、請求項１～請求項４のいずれか一項に記載の曲面形状を有するカバーパネル一体型タッチセンサーの製造方法。 The method for manufacturing a cover panel integrated touch sensor having a curved surface shape according to any one of claims 1 to 4, wherein the cover panel having a curved surface shape has a curvature (R) of 500 to 1500. ..
- 請求項１～請求項５のいずれかに記載の製造方法によって製造された、カバーパネル一体型タッチセンサー。 A touch sensor with an integrated cover panel manufactured by the manufacturing method according to any one of claims 1 to 5.
- 請求項１～請求項５のいずれかに記載の製造方法によって製造された、カバーパネル一体型タッチセンサーを含む表示装置。
A display device including a cover panel integrated touch sensor manufactured by the manufacturing method according to any one of claims 1 to 5.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2019/045459 WO2021100151A1 (en) | 2019-11-20 | 2019-11-20 | Touch sensor and method for manufacturing touch sensor |
| TW109135833A TW202134843A (en) | 2019-11-20 | 2020-10-16 | Touch sensor and manufacturing method thereof |
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| PCT/JP2019/045459 WO2021100151A1 (en) | 2019-11-20 | 2019-11-20 | Touch sensor and method for manufacturing touch sensor |
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| WO2021100151A1 true WO2021100151A1 (en) | 2021-05-27 |
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|---|---|---|---|---|
| JP2016081503A (en) * | 2014-10-14 | 2016-05-16 | 鴻海精密工業股▲ふん▼有限公司 | Curved-surfaced touch device and method for manufacturing the same |
| JP2018512657A (en) * | 2015-03-02 | 2018-05-17 | エルジー イノテック カンパニー リミテッド | Cover substrate and display device including the same |
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- 2019-11-20 WO PCT/JP2019/045459 patent/WO2021100151A1/en active Application Filing
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016081503A (en) * | 2014-10-14 | 2016-05-16 | 鴻海精密工業股▲ふん▼有限公司 | Curved-surfaced touch device and method for manufacturing the same |
| JP2018512657A (en) * | 2015-03-02 | 2018-05-17 | エルジー イノテック カンパニー リミテッド | Cover substrate and display device including the same |
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