WO2021093008A1 - High-precision gyroscope - Google Patents

High-precision gyroscope Download PDF

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Publication number
WO2021093008A1
WO2021093008A1 PCT/CN2019/120473 CN2019120473W WO2021093008A1 WO 2021093008 A1 WO2021093008 A1 WO 2021093008A1 CN 2019120473 W CN2019120473 W CN 2019120473W WO 2021093008 A1 WO2021093008 A1 WO 2021093008A1
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mass
moving
moving mass
frame
spring beam
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PCT/CN2019/120473
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French (fr)
Chinese (zh)
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孟珍奎
刘雨微
张睿
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瑞声声学科技(深圳)有限公司
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Publication of WO2021093008A1 publication Critical patent/WO2021093008A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams

Definitions

  • the invention relates to a sensor device, in particular to a high-precision gyroscope used in portable electronic products.
  • gyroscopes are widely used in various portable electronic devices such as mobile phones, IPADs, etc., to detect the deflection of physical quantities, the angular velocity of rotation when tilting, and to achieve 3D actions, which are favored by consumers.
  • a related art gyroscope includes a substrate, four sensor units arranged in a matrix arranged on the substrate, and an anchor block located on the same level as the sensor unit, and the anchor block fixes the sensor unit to the sensor unit through an insulating layer. ⁇ Said base.
  • the sensing unit includes a rectangular mass, four rectangular and hollow moving mass frames surrounding the mass and parallel to the four sides and spaced apart, and four moving mass frames extending inward from the moving mass frame.
  • Moving comb teeth, fixed comb teeth fixed to the base and located in the frame of the moving mass block, the moving comb teeth and the fixed comb teeth are alternately arranged to form a capacitor structure; the mass block and the moving mass
  • the block frame is connected by a first spring beam, and the moving mass frame is fixedly connected with the anchor block by a second spring beam.
  • the change of the position of the moving comb tooth changes the capacitance between it and the fixed comb tooth to realize detection.
  • the structure of the spring beam between the mass and the frame of the moving mass determines the resonant frequency properties of the gyroscope.
  • the second elastic spring beam avoids the first spring beam.
  • the length of the structure is limited by the side length of the mass, which is generally less than one-third of the side length, which limits the flexibility and bandwidth of the gyroscope frequency design of the related technology, and is affected by external forces due to the limitation of the spring beam structure And there is the defect of poor quality factor Q value.
  • the technical problem to be solved by the present invention is to provide a high-precision gyroscope with large frequency bandwidth, high quality factor Q value and higher precision.
  • the present invention provides a high-precision gyroscope, which includes a base with a rectangular structure, a sensing unit provided on the top surface of the base, and a multi-function sensor located on the same level as the sensing unit.
  • a plurality of anchor blocks are arranged around the sensing unit at intervals, and the anchor blocks fix the sensing unit on the base through an insulating layer; the sensing unit includes:
  • the mass is in a rectangular structure, and includes two first side walls that are opposed and spaced apart along a first direction and two second side walls that are opposed and spaced apart along a second direction, and the masses are stacked Supported on the base; the first direction and the second direction are perpendicular to each other and the enclosed plane is parallel to the base;
  • the moving mass includes four moving masses which are respectively arranged around the surrounding sides of the mass, and the four moving masses are respectively parallel to the two first side walls and the two second side walls and are connected to each other.
  • a first spring beam, the first spring beam forms an elastic connection between the mass and the moving mass
  • a moving mass frame comprising two first moving mass frames opposite and spaced apart along the first direction and two second moving mass frames opposite and spaced apart along the second direction Frame; two first moving mass frames and two second moving mass frames are arranged around the surrounding sides of the mass, and are located on the side of the moving mass away from the mass;
  • the first moving mass frame includes a first frame body and a first moving comb tooth portion having a plurality of first moving comb teeth.
  • the plurality of first moving comb teeth are formed by two oppositely arranged first moving comb teeth.
  • the second moving mass frame includes a second frame body and a second moving comb tooth portion having a plurality of second moving comb teeth, and a plurality of the second moving masses
  • the comb teeth are respectively extended inwardly from the two long axis edges of the second frame body oppositely arranged along the first direction;
  • the fixed comb teeth include two first fixed comb tooth parts and two second fixed comb tooth parts respectively fixed to the base, and the two first fixed comb tooth parts are connected to two The first mobile comb-tooth portion is matched, and the two second fixed comb-tooth portions are matched with the two second mobile comb-tooth portions respectively;
  • the first fixed comb-tooth portion has a plurality of first fixed combs, and A plurality of first movable comb teeth of the first movable comb tooth part that are matched with the first movable comb tooth part are interleaved with each other and spaced apart from each other to form a first capacitor;
  • the second fixed comb tooth part has a plurality of second fixed comb teeth , And the plurality of second movable comb teeth of the second movable comb tooth portion that are matched with the second movable comb teeth are interleaved with each other and are spaced apart from each other to form a second capacitor; and
  • a second spring beam the second spring beam includes a plurality of and is respectively located between the moving mass and the moving mass frame that are disposed oppositely, and forms an elastic connection between the two, and the second spring beam It extends to form a fixation with the anchor block.
  • the sensing unit further includes a connecting part located between the moving mass and the frame of the moving mass which are arranged oppositely, and the connecting part forms a rigid connection between the two.
  • the second moving mass is located between the moving mass and the first moving mass frame, or between the moving mass and the second moving mass frame.
  • Each of the spring beams includes two spring beams.
  • the two second spring beams are arranged opposite to each other at intervals and extend in a direction parallel to the corresponding moving mass.
  • the corresponding connecting portion is located between the two second spring beams.
  • Each of the sensing units is configured with four anchor blocks, and the four anchor blocks are respectively located at the four corners of the mass block.
  • the connecting portion has a rectangular structure or a fence shape.
  • the mass block further includes a first relief groove recessed from the first side wall in the second direction to the inside thereof, and from the second side wall to the inside thereof in the first direction A recessed second relief groove; a plurality of the first spring beams respectively extend into the corresponding first relief groove or the second relief groove.
  • each of the first side walls is provided with two mutually spaced apart first relief grooves
  • each of the second side walls is provided with two mutually spaced apart second relief grooves
  • each Two first spring beams are arranged between the moving mass block and the mass block.
  • the sensing unit includes at least four and arranged in a matrix; the high-precision gyroscope further includes a third spring beam, and the third spring beam includes a plurality of and is located between two adjacent sensing units.
  • the two moving mass frames of the two adjacent sensing units are elastically connected.
  • the third spring beams located between the two moving mass frames of the two adjacent sensing units are arranged parallel to the two moving mass frames.
  • the high-precision gyroscope further includes a plurality of beams fixed to the base, the beams are arranged at intervals on the outer periphery of the matrix formed by the four sensing units, and two adjacent sensing units At the same time, it is fixedly connected with the same cross beam.
  • the cross beam is connected to a side of the moving mass frame away from the mass.
  • the moving mass is added between the mass and the moving mass frame, and the mass and the moving mass are separated by a first spring beam.
  • Connection: the moving mass is connected to the moving mass frame through the second spring beam, and the second spring beam extends to the anchor block and is fixed to the base by the anchor block.
  • the frequency bandwidth is increased; and through the extension of the moving mass, the matching degree of the sensing unit in the first direction and the second direction (ie X, Y direction) can be adjusted, so that the mismatch of the XY axis due to process problems is more It is easy to compensate, thereby effectively improving the quality factor Q value; the first spring beam and the second spring beam realize flexible design due to the mass block setting, improve the reliability, and make the precision and performance of the high-precision gyroscope better.
  • the design of the moving mass can delay the lack of reliability of the first spring beam and the first spring beam caused by unnecessary vibrations, and can make the first spring beam and the first spring beam have sufficient strength to determine the frequency On the basis of this, increase the frequency bandwidth and strengthen the support of the connection.
  • Figure 1 is a schematic diagram of the three-dimensional structure of the high-precision gyroscope of the present invention
  • Figure 2 is a top view of the high-precision gyroscope of the present invention.
  • Fig. 3 is an enlarged view of the part shown in A in Fig. 2, which shows one of the sensing units;
  • Fig. 4 is a schematic diagram of the effect of the motion state of the high-precision gyroscope of the present invention, in which Fig. (a) is the driving mode, and Fig. (b) is the sensing mode.
  • the present invention provides a high-precision gyroscope 100, which includes a base 1, a sensing unit 2, an anchor block 3, and a beam 4.
  • the sensing unit 2 is arranged on the top surface of the base 1, and the anchor block 3 includes a plurality of anchor blocks 3 and is located on the same level as the sensing unit 2.
  • a plurality of anchor blocks 3 are arranged around the sensing unit 2 at intervals, and the anchor blocks 3 are insulated
  • the layer fixes the sensing unit 2 on the base 1.
  • an X-Y axis two-dimensional coordinate system is established, and the first direction is defined as the X axis direction, the second direction is the Y axis direction, and the first direction and the second direction are perpendicular to each other.
  • the base 1 is rectangular.
  • the sensing unit 2 includes a plurality of and is distributed in a matrix.
  • the sensing unit 2 includes four and forms a matrix arrangement as an example for description, of course, it is not limited to this number. That is, in this embodiment, the sensing unit 2 includes at least four and is arranged in a matrix.
  • the sensing unit 2 includes a mass 21, a moving mass 22, a first spring beam 23, a moving mass frame 24, a fixed comb 25, a second spring beam 26 and a connecting part 27.
  • the mass 21 has a rectangular structure, which is stacked and supported on the base 1.
  • the mass 21 includes two first sidewalls 211 opposite and spaced apart along the first direction, two second sidewalls 212 opposite and spaced apart along the second direction, and the first sidewall 211 runs along the first sidewall.
  • the first relief groove 213 is recessed in two directions, and the second relief groove 214 is recessed inward by the second side wall 212 along the first direction.
  • the first direction and the second direction are perpendicular to each other and the enclosed plane is parallel to the base 1.
  • each of the first side walls 211 is provided with two mutually spaced apart first relief grooves 213, and each of the second side walls 213 is provided with two mutually spaced apart second relief grooves 213.
  • Bit slot 214 is provided.
  • the moving mass 22 includes four and is respectively arranged around the circumference of the mass 21, and the four moving masses 22 are respectively parallel to the two first side walls 211 and the two second side walls 212 and It is arranged at intervals with the mass block 21.
  • the increase of the moving mass 22 increases the Coriolis force, thereby enhancing the overall sensing performance.
  • the first spring beam 23 includes multiple, and the first spring beam 23 elastically connects the mass block 21 and the moving mass block 22. More preferably, the plurality of first spring beams 23 respectively extend into the corresponding first relief groove 213 or the second relief groove 214, thereby connecting the mass 21 and the moving mass 22Connect.
  • first relief groove 213 and the second relief groove 214 can make the design length of the first spring beam 23 longer and improve its design flexibility.
  • Each first side wall 211 is provided with two first relief grooves 213, and each second side wall is provided with a second relief groove 214, so that the corresponding moving mass 22 and the mass 21 are
  • the moving mass frame 24 includes two first moving mass frames 241 opposite and spaced apart along the first direction, and two second moving mass frames 242 opposite and spaced along the second direction.
  • the two first moving mass frames 241 and the two second moving mass frames 242 are arranged around the surrounding sides of the mass 21, and are both located on the moving mass 22 away from the mass 21 One side.
  • the first moving mass frame 241 includes a first frame body 2411 and a first moving comb tooth portion 2413 having a plurality of first moving comb teeth 2412, and the plurality of first moving comb teeth 2412 are formed by the first frame body 2411.
  • the two opposite long axis sides of the main body 2411 respectively extend inwardly along the second direction.
  • the second moving mass frame 242 includes a second frame body 2421 and a second moving comb tooth portion 2423 having a plurality of second moving comb teeth 2422.
  • the plurality of second moving comb teeth 2422 are formed by the second frame
  • the two opposite long axis sides of the main body 2421 respectively extend toward the inside of the main body 2421 along the first direction.
  • the fixed comb tooth 25 includes two first fixed comb tooth parts 251 and two second fixed comb tooth parts 252 respectively fixed to the base 1.
  • the two first fixed comb tooth parts 251 are connected to the two One of the first mobile comb-tooth parts 2413 matches, and the two second fixed comb-tooth parts 252 match the two second mobile comb-tooth parts 2423 respectively.
  • the first fixed comb tooth portion 251 has a plurality of first fixed comb teeth 2511, and the plurality of first movable comb teeth 2412 of the first movable comb tooth portion 2413 matched therewith are interlaced and interleaved with each other. They are separated from each other to form a first capacitor, which serves as a driving capacitor to realize an inverted driving mode, as shown in Fig. 4a.
  • the second fixed comb tooth portion 252 has a plurality of second fixed comb teeth 2521, and the plurality of second movable comb teeth 2422 of the second movable comb tooth portion 2423 matched with the second movable comb tooth portion 2423 are alternately inserted and spaced apart from each other.
  • a second capacitor is formed as a detection capacitor to realize the sensing mode, as shown in Figure 4b.
  • the first moving comb-tooth portion 2413 and the second moving comb-tooth portion 2423 Respectively move relative to the first fixed comb-tooth portion 251 and the second fixed comb-tooth portion 252, so as to change the capacitance values of the detection capacitor and the driving capacitor, and the first fixed comb-tooth portion 251 and the second fixed comb-tooth portion
  • the part 252 applies a voltage to the outer lead electrode and measures the capacitance (or the amount of change in the capacitance).
  • the second spring beam 26 includes a plurality of and is respectively located between the moving mass 21 and the moving mass frame 22 that are disposed oppositely, and forms an elastic connection between the two, and the second spring beam 26 extends To form a fixation with the anchor block 3.
  • each of the sensing units 2 is configured with four anchor blocks 3, and the four anchor blocks 3 are respectively located at the four corners of the mass block 21.
  • the second spring beam 26 includes a plurality of spring beams, and they are respectively located between the moving mass 22 and the first moving mass frame 241 which are arranged oppositely, and are located between the moving mass 22 and the first moving mass frame 241 which are arranged oppositely. Between the second moving mass frame 242.
  • each of the second spring beams 26 in between includes two, forming a group.
  • the two second spring beams 26 of the same group are arranged opposite to each other and extend in a direction parallel to the moving mass 22 corresponding to the same group.
  • the first spring beam 23 and the second spring beam 26 arranged between the mass and the moving mass frame 24 do not interfere with each other, which effectively improves the first spring beam.
  • the design flexibility of the first spring beam 23 and the second spring beam 26 greatly improves the resonance frequency properties of the high-precision gyroscope 100 and improves its sensing accuracy and performance.
  • the sensing unit 2 further includes a connecting portion 27 located between the moving mass 22 and the moving mass frame 24 that are arranged oppositely. Those form a rigid connection.
  • the corresponding connecting portion 27 is located between the two second spring beams 26 and is spaced apart from each other.
  • the connecting portion 27 has a rectangular structure or a fence shape. Of course, it is not limited to this. The structure and shape of the connecting portion 27 can be adjusted and designed according to the required rigidity.
  • the high-precision gyroscope 100 further includes a third spring beam 5, and the third spring beam 5 includes a plurality of and is located between two adjacent sensing units 2 and connects two adjacent sensing units 2 to each other.
  • the two moving mass frames 24 of the unit 2 form an elastic connection.
  • the third spring beam 5 located between the two moving mass frames 24 of the two adjacent sensing units 2 is arranged parallel to the two moving mass frames 24. This structure can also increase the length design of the third spring beam 5 and has better flexibility.
  • the third spring beam 5 also improves the resonant frequency properties of the high-precision gyroscope 100.
  • the third spring beam 5 is also called a coupled spring beam, which is used to synchronize the movement of the anti-phase driving mode and the sensing mode to further improve the accuracy.
  • the resonant frequency of the high-precision gyroscope 100 is:
  • k k1+k2+k3
  • k1 is the stiffness of the first spring beam 23
  • k2 is the stiffness of the second spring beam 26
  • k3 is the stiffness of the third spring beam 5, that is, the stiffness of the coupling spring beam. Therefore, the present invention effectively improves the resonance frequency properties of the high-precision gyroscope 100 through the design of the moving mass 22, the first spring beam 23, the second spring beam 26, and the third spring beam 5.
  • the cross beam 4 includes a plurality of and is fixed to the base 1 respectively.
  • the cross beam 4 includes four.
  • Four cross beams 4 are arranged at intervals on the outer periphery of the matrix formed by the four sensing units, and two adjacent sensing units 2 are fixedly connected to the same cross beam 4 at the same time.
  • the cross beam 4 is connected to a side of the moving mass frame 24 of the sensing unit 2 away from the mass 21.
  • the beam 4 forms a lever mechanism. Due to the rigidity of the lever mechanism, the low-frequency in-phase mode is eliminated from both the driving mode and the sensing mode, so that it can completely mechanically resist external shocks and vibrations and improve reliability and accuracy.
  • the moving mass is added between the mass and the moving mass frame, and the mass and the moving mass are separated by a first spring beam.
  • Connection: the moving mass is connected to the moving mass frame through the second spring beam, and the second spring beam extends to the anchor block and is fixed to the base by the anchor block.
  • the frequency bandwidth is increased; and through the extension of the moving mass, the matching degree of the sensing unit in the first direction and the second direction (ie X, Y direction) can be adjusted, so that the mismatch of the XY axis due to process problems is more It is easy to compensate, thereby effectively improving the quality factor Q value; the first spring beam and the second spring beam realize flexible design due to the mass block setting, improve the reliability, and make the precision and performance of the high-precision gyroscope better.
  • the design of the moving mass can delay the lack of reliability of the first spring beam and the first spring beam caused by unnecessary vibrations, and can make the first spring beam and the first spring beam have sufficient strength to determine the frequency On the basis of this, increase the frequency bandwidth and strengthen the support of the connection.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

A high-precision gyroscope (100), comprising a base (1) having a rectangular structure, sensing units (2) provided on the top surface of the base (1), and a plurality of anchor blocks (3) located on the same layer as the sensing units (2); the plurality of anchor blocks (3) are provided at intervals around the sensing units (2), and the anchor blocks (3) fix the sensing units (2) on the base (1) by means of an insulating layer. The sensing units (2) each comprise: a mass block (21), mobile mass blocks (22) provided around the periphery of the mass block (21), first spring beams (23) forming elastic connection between the mass block (21) and the mobile mass blocks (22), mobile mass block frames (24) provided around the mass block (21) and each located at the side of each mobile mass block (22) away from the mass block (21), comb teeth connected to the mobile mass block frames (24) and fixed comb teeth (25) forming capacitors with the mobile comb teeth, and second spring beams (26) connecting the mobile mass blocks (22) and the mobile mass block frames (24), the second spring beams (26) extending to be fixed with the anchor blocks (3). Compared with the related art, the high-precision gyroscope (100) has a large frequency bandwidth, a high quality factor Q value and high precision.

Description

高精度陀螺仪High-precision gyroscope 【技术领域】【Technical Field】
本发明涉及一种传感器装置，尤其涉及一种运用于便携式电子产品的高精度陀螺仪。The invention relates to a sensor device, in particular to a high-precision gyroscope used in portable electronic products.
【背景技术】【Background technique】
随着电子技术的发展，陀螺仪被普遍运用到各种便携式电子设备比如手机、IPAD等，用于检测物理量偏转，倾斜时的转动角速度，用以实现3D动作，得到消费者的青睐。With the development of electronic technology, gyroscopes are widely used in various portable electronic devices such as mobile phones, IPADs, etc., to detect the deflection of physical quantities, the angular velocity of rotation when tilting, and to achieve 3D actions, which are favored by consumers.
相关技术的陀螺仪包括基底、设置于基底上的呈矩阵排列的四个传感单元以及位于与所述传感单元相同层面的锚块，所述锚块将传感单元通过绝缘层固定于所述基底。所述传感单元包括呈矩形的质量块、环绕所述质量块且与分别其四边平行且间隔设置的呈矩形且中空的四个移动质量块框架、由所述移动质量块框架向内延伸的移动梳齿、固定于所述基座并位于所述移动质量块框架内的固定梳齿，所述移动梳齿与所述固定梳齿交错设置形成电容结构；所述质量块与所述移动质量块框架通过第一弹簧梁连接，所述移动质量块框架通过第二弹簧梁与所述锚块固定连接。移动梳齿位置变化使得其与固定梳齿之间的电容发生变化，实现检测。A related art gyroscope includes a substrate, four sensor units arranged in a matrix arranged on the substrate, and an anchor block located on the same level as the sensor unit, and the anchor block fixes the sensor unit to the sensor unit through an insulating layer.说基。 Said base. The sensing unit includes a rectangular mass, four rectangular and hollow moving mass frames surrounding the mass and parallel to the four sides and spaced apart, and four moving mass frames extending inward from the moving mass frame. Moving comb teeth, fixed comb teeth fixed to the base and located in the frame of the moving mass block, the moving comb teeth and the fixed comb teeth are alternately arranged to form a capacitor structure; the mass block and the moving mass The block frame is connected by a first spring beam, and the moving mass frame is fixedly connected with the anchor block by a second spring beam. The change of the position of the moving comb tooth changes the capacitance between it and the fixed comb tooth to realize detection.
质量块与移动质量块框架之间的弹簧梁结构决定了陀螺仪的共振频率性质，而相关技术的陀螺仪中，由于第一弹簧梁的存在，第二弹弹簧梁为避让第一弹簧梁，其结构的长度受质量块的边长限制，一般小于三分之一边长，从而限制相关技术的陀螺仪频率的设计的灵活性和带宽，并因弹簧梁结构限制使得其受外力冲地影响而存在品质因素Q值不佳的缺陷。The structure of the spring beam between the mass and the frame of the moving mass determines the resonant frequency properties of the gyroscope. In the related art gyroscope, due to the existence of the first spring beam, the second elastic spring beam avoids the first spring beam. The length of the structure is limited by the side length of the mass, which is generally less than one-third of the side length, which limits the flexibility and bandwidth of the gyroscope frequency design of the related technology, and is affected by external forces due to the limitation of the spring beam structure And there is the defect of poor quality factor Q value.
因此，有必要提供一种改进的高精度陀螺仪来解决上述问题。Therefore, it is necessary to provide an improved high-precision gyroscope to solve the above-mentioned problems.
【发明内容】[Summary of the invention]
本发明要解决的技术问题是提供一种频率带宽大、品质因素Q值高且 精度更高的高精度陀螺仪。The technical problem to be solved by the present invention is to provide a high-precision gyroscope with large frequency bandwidth, high quality factor Q value and higher precision.
为解决上述技术问题，本发明提供了一种高精度陀螺仪，包括呈矩形结构的基座、设置于所述基座顶面的传感单元，以及位于与所述传感单元相同层面的多个锚块，多个锚块环绕所述传感单元间隔设置，所述锚块通过绝缘层将所述传感单元固定于所述基座上；所述传感单元包括：In order to solve the above technical problems, the present invention provides a high-precision gyroscope, which includes a base with a rectangular structure, a sensing unit provided on the top surface of the base, and a multi-function sensor located on the same level as the sensing unit. A plurality of anchor blocks are arranged around the sensing unit at intervals, and the anchor blocks fix the sensing unit on the base through an insulating layer; the sensing unit includes:
质量块，所述质量块呈矩形结构，包括沿第一方向相对且间隔设置的两个第一侧壁和沿第二方向相对且间隔设置的两个第二侧壁，所述质量块叠设支撑于所述基座；所述第一方向与所述第二方向相互垂直且围成的平面与所述基座平行；The mass is in a rectangular structure, and includes two first side walls that are opposed and spaced apart along a first direction and two second side walls that are opposed and spaced apart along a second direction, and the masses are stacked Supported on the base; the first direction and the second direction are perpendicular to each other and the enclosed plane is parallel to the base;
移动质量块，所述移动质量块包括四个并分别环设于所述质量块的四周侧，四个所述移动质量块分别平行于两个第一侧壁及两个第二侧壁并与所述质量块间隔设置；The moving mass includes four moving masses which are respectively arranged around the surrounding sides of the mass, and the four moving masses are respectively parallel to the two first side walls and the two second side walls and are connected to each other. The mass block interval setting;
第一弹簧梁，所述第一弹簧梁将所述质量块和所述移动质量块形成弹性连接；A first spring beam, the first spring beam forms an elastic connection between the mass and the moving mass;
移动质量块框架，所述移动质量块框架包括沿所述第一方向相对且间隔设置的两个第一移动质量块框架和沿所述第二方向相对且间隔设置的两个第二移动质量块框架；两个所述第一移动质量块框架和两个第二移动质量块框架环设于所述质量块的四周侧，且均位于所述移动质量块的远离所述质量块的一侧；所述第一移动质量块框架包括第一框架本体和具有多个第一移动梳齿的第一移动梳齿部，多个所述第一移动梳齿由所述第一框架本体相对设置的两长轴边分别沿第二方向向其内部延伸；所述第二移动质量块框架包括第二框架本体和具有多个第二移动梳齿的第二移动梳齿部，多个所述第二移动梳齿由所述第二框架本体相对设置的两长轴边分别沿第一方向向其内部延伸；A moving mass frame comprising two first moving mass frames opposite and spaced apart along the first direction and two second moving mass frames opposite and spaced apart along the second direction Frame; two first moving mass frames and two second moving mass frames are arranged around the surrounding sides of the mass, and are located on the side of the moving mass away from the mass; The first moving mass frame includes a first frame body and a first moving comb tooth portion having a plurality of first moving comb teeth. The plurality of first moving comb teeth are formed by two oppositely arranged first moving comb teeth. The long axis sides respectively extend inwardly along the second direction; the second moving mass frame includes a second frame body and a second moving comb tooth portion having a plurality of second moving comb teeth, and a plurality of the second moving masses The comb teeth are respectively extended inwardly from the two long axis edges of the second frame body oppositely arranged along the first direction;
固定梳齿，所述固定梳齿包括分别固定于所述基座的两个第一固定梳齿部和两个第二固定梳齿部，两个所述第一固定梳齿部分别与两个所述第一移动梳齿部匹配，两个第二固定梳齿部分别与两个所述第二移动梳齿部匹配；所述第一固定梳齿部具有多个第一固定梳齿，且分别和与其匹配的 所述第一移动梳齿部的多个第一移动梳齿相互交错插设并相互间隔，形成第一电容；所述第二固定梳齿部具有多个第二固定梳齿，且分别和与其匹配的所述第二移动梳齿部的多个第二移动梳齿相互交错插设并相互间隔，形成第二电容；以及Fixed comb teeth, the fixed comb teeth include two first fixed comb tooth parts and two second fixed comb tooth parts respectively fixed to the base, and the two first fixed comb tooth parts are connected to two The first mobile comb-tooth portion is matched, and the two second fixed comb-tooth portions are matched with the two second mobile comb-tooth portions respectively; the first fixed comb-tooth portion has a plurality of first fixed combs, and A plurality of first movable comb teeth of the first movable comb tooth part that are matched with the first movable comb tooth part are interleaved with each other and spaced apart from each other to form a first capacitor; the second fixed comb tooth part has a plurality of second fixed comb teeth , And the plurality of second movable comb teeth of the second movable comb tooth portion that are matched with the second movable comb teeth are interleaved with each other and are spaced apart from each other to form a second capacitor; and
第二弹簧梁，所述第二弹簧梁包括多个且分别位于相对设置的所述移动质量块和所述移动质量块框架之间，并将二者形成弹性连接，且所述第二弹簧梁延伸至与所述锚块形成固定。A second spring beam, the second spring beam includes a plurality of and is respectively located between the moving mass and the moving mass frame that are disposed oppositely, and forms an elastic connection between the two, and the second spring beam It extends to form a fixation with the anchor block.
优选的，所述传感单元还包括位于相对设置的所述移动质量块和所述移动质量块框架之间的连接部，所述连接部将二者形成刚性连接。Preferably, the sensing unit further includes a connecting part located between the moving mass and the frame of the moving mass which are arranged oppositely, and the connecting part forms a rigid connection between the two.
优选的，位于相对设置的所述移动质量块与所述第一移动质量块框架之间，或位于相对设置的所述移动质量块与所述第二移动质量块框架之间的所述第二弹簧梁均包括两个，两个第二弹簧梁间隔相对设置，且沿平行于与其对应的所述移动质量块的方向延伸，对应设置的所述连接部位于两个所述第二弹簧梁之间且相互间隔；每一所述传感单元配置四个所述锚块，且四个所述锚块分别位于所述质量块的四个角的位置。Preferably, the second moving mass is located between the moving mass and the first moving mass frame, or between the moving mass and the second moving mass frame. Each of the spring beams includes two spring beams. The two second spring beams are arranged opposite to each other at intervals and extend in a direction parallel to the corresponding moving mass. The corresponding connecting portion is located between the two second spring beams. Each of the sensing units is configured with four anchor blocks, and the four anchor blocks are respectively located at the four corners of the mass block.
优选的，所述连接部呈矩形结构或栅栏状。Preferably, the connecting portion has a rectangular structure or a fence shape.
优选的，所述质量块还包括由所述第一侧壁沿所述第二方向向其内部凹陷的第一让位槽，以及由所述第二侧壁沿所述第一方向向其内部凹陷的第二让位槽；多个所述第一弹簧梁分别延伸至与其对应的所述第一让位槽内或所述第二让位槽内。Preferably, the mass block further includes a first relief groove recessed from the first side wall in the second direction to the inside thereof, and from the second side wall to the inside thereof in the first direction A recessed second relief groove; a plurality of the first spring beams respectively extend into the corresponding first relief groove or the second relief groove.
优选的，每一所述第一侧壁设有两个相互间隔的所述第一让位槽，每一所述第二侧壁设有两个相互间隔的所述第二让位槽；每一所述移动质量块与所述质量块之间设有两个所述第一弹簧梁。Preferably, each of the first side walls is provided with two mutually spaced apart first relief grooves, and each of the second side walls is provided with two mutually spaced apart second relief grooves; each Two first spring beams are arranged between the moving mass block and the mass block.
优选的，所述传感单元包括至少四个且呈矩阵排列；所述高精度陀螺仪还包括第三弹簧梁，所述第三弹簧梁包括多个且分别位于相邻两个传感单元之间，并将相邻的两个所述传感单元的两个所述移动质量块框架形成弹性连接。Preferably, the sensing unit includes at least four and arranged in a matrix; the high-precision gyroscope further includes a third spring beam, and the third spring beam includes a plurality of and is located between two adjacent sensing units. The two moving mass frames of the two adjacent sensing units are elastically connected.
优选的，位于相邻的两个所述传感单元的两个所述移动质量块框架之 间的所述第三弹簧梁平行于该两个移动质量块框架设置。Preferably, the third spring beams located between the two moving mass frames of the two adjacent sensing units are arranged parallel to the two moving mass frames.
优选的，所述高精度陀螺仪还包括固定于所述基座的多个横梁，所述横梁间隔设置于四个所述传感单元形成的矩阵外周，相邻的两个所述传感单元同时与同一个所述横梁固定连接。Preferably, the high-precision gyroscope further includes a plurality of beams fixed to the base, the beams are arranged at intervals on the outer periphery of the matrix formed by the four sensing units, and two adjacent sensing units At the same time, it is fixedly connected with the same cross beam.
优选的，所述横梁连接于所述移动质量块框架的远离所述质量块的一侧。Preferably, the cross beam is connected to a side of the moving mass frame away from the mass.
与相关技术相比，本发明高精度陀螺仪中，通过在所述质量块与所述移动质量块框架之间增加设置了所述移动质量块，通过第一弹簧梁将质量块与移动质量块连接，通过第二弹簧梁将移动质量块与移动质量块框架连接，且第二弹簧梁延伸至锚块并通过锚块固定于基座。移动质量块的增加使得第一弹簧梁和第二弹簧梁的设计相互不会形成干涉，有效的提高了第一弹簧梁和第二弹簧梁的设计灵活度，实现根据频率要求进行结构设计调整，从而使得频率带宽增大；而且通过移动质量块的延长，可调整传感单元在第一方向与第二方向(即X，Y方向)的匹配度，使得X-Y轴由于工艺问题造成的失配更容易补偿，从而有效提高品质因素Q值；第一弹簧梁和第二弹簧梁因质量块的设置后实现了灵活设计，提高了可靠性，并使该高精度陀螺仪的精度及性能更优，另外，移动质量块的设计可以延缓不必要的震动带来的第一弹簧梁及第一弹簧梁可靠性不足，且可使第一弹簧梁及第一弹簧梁有足够的强度，从而在确定频率的基础上，增加频率带宽，增强连接的支撑力度。Compared with the related art, in the high-precision gyroscope of the present invention, the moving mass is added between the mass and the moving mass frame, and the mass and the moving mass are separated by a first spring beam. Connection: the moving mass is connected to the moving mass frame through the second spring beam, and the second spring beam extends to the anchor block and is fixed to the base by the anchor block. The increase of the moving mass makes the design of the first spring beam and the second spring beam not interfere with each other, which effectively improves the design flexibility of the first spring beam and the second spring beam, and realizes the structural design adjustment according to the frequency requirements. As a result, the frequency bandwidth is increased; and through the extension of the moving mass, the matching degree of the sensing unit in the first direction and the second direction (ie X, Y direction) can be adjusted, so that the mismatch of the XY axis due to process problems is more It is easy to compensate, thereby effectively improving the quality factor Q value; the first spring beam and the second spring beam realize flexible design due to the mass block setting, improve the reliability, and make the precision and performance of the high-precision gyroscope better. In addition, the design of the moving mass can delay the lack of reliability of the first spring beam and the first spring beam caused by unnecessary vibrations, and can make the first spring beam and the first spring beam have sufficient strength to determine the frequency On the basis of this, increase the frequency bandwidth and strengthen the support of the connection.
【附图说明】【Explanation of the drawings】
为了更清楚地说明本发明实施例中的技术方案，下面将对实施例描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其它的附图，其中：In order to explain the technical solutions in the embodiments of the present invention more clearly, the following will briefly introduce the drawings needed in the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative work, other drawings can be obtained based on these drawings, among which:
图1为本发明高精度陀螺仪的立体结构示意图；Figure 1 is a schematic diagram of the three-dimensional structure of the high-precision gyroscope of the present invention;
图2为本发明高精度陀螺仪的俯视图；Figure 2 is a top view of the high-precision gyroscope of the present invention;
图3为图2中A所示部分的放大图，其示为其中一个传感单元；Fig. 3 is an enlarged view of the part shown in A in Fig. 2, which shows one of the sensing units;
图4为本发明高精度陀螺仪的运动状态效果示意图，其中图(a)为驱动模态，图(b)为感测模态。Fig. 4 is a schematic diagram of the effect of the motion state of the high-precision gyroscope of the present invention, in which Fig. (a) is the driving mode, and Fig. (b) is the sensing mode.
【具体实施方式】【Detailed ways】
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅是本发明的一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其它实施例，都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.
请同时参阅图1-3，本发明提供了一种高精度陀螺仪100，包括基座1、传感单元2、锚块3以及横梁4。Please refer to FIGS. 1-3 at the same time. The present invention provides a high-precision gyroscope 100, which includes a base 1, a sensing unit 2, an anchor block 3, and a beam 4.
传感单元2设置于所述基座1顶面，锚块3包括多个且位于与传感单元2同层面，多个锚块3环绕所述传感单元2间隔设置，锚块3通过绝缘层将所述传感单元2固定于所述基座1上。The sensing unit 2 is arranged on the top surface of the base 1, and the anchor block 3 includes a plurality of anchor blocks 3 and is located on the same level as the sensing unit 2. A plurality of anchor blocks 3 are arranged around the sensing unit 2 at intervals, and the anchor blocks 3 are insulated The layer fixes the sensing unit 2 on the base 1.
本实施方式中，为了方便说明，建立X-Y轴二维坐标系，定义第一方向为X轴方向、第二方向为Y轴方向，所述第一方向及所述第二方向相互垂直。In this embodiment, for the convenience of description, an X-Y axis two-dimensional coordinate system is established, and the first direction is defined as the X axis direction, the second direction is the Y axis direction, and the first direction and the second direction are perpendicular to each other.
所述基座1呈矩形。The base 1 is rectangular.
所述传感单元2包括多个且呈矩阵分布，本实施方式中，以传感单元2包括四个并形成矩阵排布为例进行说明，当然不限于该数量。即，本实施方式中，所述传感单元2包括至少四个且呈矩阵排列。The sensing unit 2 includes a plurality of and is distributed in a matrix. In this embodiment, the sensing unit 2 includes four and forms a matrix arrangement as an example for description, of course, it is not limited to this number. That is, in this embodiment, the sensing unit 2 includes at least four and is arranged in a matrix.
具体的，传感单元2包括质量块21、移动质量块22、第一弹簧梁23、移动质量块框架24、固定梳齿25、第二弹簧梁26以及连接部27。Specifically, the sensing unit 2 includes a mass 21, a moving mass 22, a first spring beam 23, a moving mass frame 24, a fixed comb 25, a second spring beam 26 and a connecting part 27.
所述质量块21呈矩形结构，其叠设支撑于所述基座1。质量块21包括沿第一方向相对且间隔设置的两个第一侧壁211、沿第二方向相对且间隔设置的两个第二侧壁212、由所述第一侧壁211沿所述第二方向向其内部凹陷的第一让位槽213，以及由所述第二侧壁212沿所述第一方向向其内部凹陷的第二让位槽214。所述第一方向与所述第二方向相互垂直且围成的平面与所述基座1平行。The mass 21 has a rectangular structure, which is stacked and supported on the base 1. The mass 21 includes two first sidewalls 211 opposite and spaced apart along the first direction, two second sidewalls 212 opposite and spaced apart along the second direction, and the first sidewall 211 runs along the first sidewall. The first relief groove 213 is recessed in two directions, and the second relief groove 214 is recessed inward by the second side wall 212 along the first direction. The first direction and the second direction are perpendicular to each other and the enclosed plane is parallel to the base 1.
更优的，每一所述第一侧壁211设有两个相互间隔的所述第一让位槽213，每一所述第二侧壁213设有两个相互间隔的所述第二让位槽214。More preferably, each of the first side walls 211 is provided with two mutually spaced apart first relief grooves 213, and each of the second side walls 213 is provided with two mutually spaced apart second relief grooves 213. Bit slot 214.
所述移动质量块22包括四个并分别环设于所述质量块21的四周侧，四个所述移动质量块22分别平行于两个第一侧壁211及两个第二侧壁212并与所述质量块21间隔设置。所述移动质量块22的增加提高了科里奥利力，进而增强整体传感性能。The moving mass 22 includes four and is respectively arranged around the circumference of the mass 21, and the four moving masses 22 are respectively parallel to the two first side walls 211 and the two second side walls 212 and It is arranged at intervals with the mass block 21. The increase of the moving mass 22 increases the Coriolis force, thereby enhancing the overall sensing performance.
所述第一弹簧梁23包括多个，第一弹簧梁23将所述质量块21和所述移动质量块22形成弹性连接。更优的，多个所述第一弹簧梁23分别延伸至与其对应的所述第一让位槽213内或所述第二让位槽214内，从而将所述质量块21与移动质量块22连接。The first spring beam 23 includes multiple, and the first spring beam 23 elastically connects the mass block 21 and the moving mass block 22. More preferably, the plurality of first spring beams 23 respectively extend into the corresponding first relief groove 213 or the second relief groove 214, thereby connecting the mass 21 and the moving mass 22Connect.
第一让位槽213和第二让位槽214的设置可使得第一弹簧梁23设计长度更长，提高其设计灵活性。每一第一侧壁211设两个第一让位槽213，每一第二侧壁设第二让位槽214，则对应的每一所述移动质量块22与所述质量块21之间均设有两个第一弹簧梁23，也就是说，将每个移动质量块22分别连接至第一侧壁211或第二侧壁212的第一弹簧梁23均设置两个，该结构设计加强了连接强度，提高了连接时的对称稳定性，有利于精度提高。The arrangement of the first relief groove 213 and the second relief groove 214 can make the design length of the first spring beam 23 longer and improve its design flexibility. Each first side wall 211 is provided with two first relief grooves 213, and each second side wall is provided with a second relief groove 214, so that the corresponding moving mass 22 and the mass 21 are There are two first spring beams 23, that is, two first spring beams 23 that connect each moving mass 22 to the first side wall 211 or the second side wall 212 are provided. This structural design Strengthen the connection strength, improve the symmetrical stability of the connection, which is conducive to the improvement of accuracy.
移动质量块框架24包括沿所述第一方向相对且间隔设置的两个第一移动质量块框架241和沿所述第二方向相对且间隔设置的两个第二移动质量块框架242。两个所述第一移动质量块框架241和两个第二移动质量块框架242环设于所述质量块21的四周侧，且均位于所述移动质量块22的远离所述质量块21的一侧。The moving mass frame 24 includes two first moving mass frames 241 opposite and spaced apart along the first direction, and two second moving mass frames 242 opposite and spaced along the second direction. The two first moving mass frames 241 and the two second moving mass frames 242 are arranged around the surrounding sides of the mass 21, and are both located on the moving mass 22 away from the mass 21 One side.
所述第一移动质量块框架241包括第一框架本体2411和具有多个第一移动梳齿2412的第一移动梳齿部2413，多个所述第一移动梳齿2412由所述第一框架本体2411相对设置的两长轴边分别沿第二方向向其内部延伸形成。The first moving mass frame 241 includes a first frame body 2411 and a first moving comb tooth portion 2413 having a plurality of first moving comb teeth 2412, and the plurality of first moving comb teeth 2412 are formed by the first frame body 2411. The two opposite long axis sides of the main body 2411 respectively extend inwardly along the second direction.
所述第二移动质量块框架242包括第二框架本体2421和具有多个第二移动梳齿2422的第二移动梳齿部2423，多个所述第二移动梳齿2422由所 述第二框架本体2421相对设置的两长轴边分别沿第一方向向其内部延伸形成。The second moving mass frame 242 includes a second frame body 2421 and a second moving comb tooth portion 2423 having a plurality of second moving comb teeth 2422. The plurality of second moving comb teeth 2422 are formed by the second frame The two opposite long axis sides of the main body 2421 respectively extend toward the inside of the main body 2421 along the first direction.
所述固定梳齿25包括分别固定于所述基座1的两个第一固定梳齿部251和两个第二固定梳齿部252，两个所述第一固定梳齿部251分别与两个所述第一移动梳齿部2413匹配，两个第二固定梳齿部252分别与两个所述第二移动梳齿部2423匹配。The fixed comb tooth 25 includes two first fixed comb tooth parts 251 and two second fixed comb tooth parts 252 respectively fixed to the base 1. The two first fixed comb tooth parts 251 are connected to the two One of the first mobile comb-tooth parts 2413 matches, and the two second fixed comb-tooth parts 252 match the two second mobile comb-tooth parts 2423 respectively.
具体的，所述第一固定梳齿部251具有多个第一固定梳齿2511，且分别和与其匹配的所述第一移动梳齿部2413的多个第一移动梳齿2412相互交错插设并相互间隔，形成第一电容，作为驱动电容，实现反相驱动模态，如图4a所示。Specifically, the first fixed comb tooth portion 251 has a plurality of first fixed comb teeth 2511, and the plurality of first movable comb teeth 2412 of the first movable comb tooth portion 2413 matched therewith are interlaced and interleaved with each other. They are separated from each other to form a first capacitor, which serves as a driving capacitor to realize an inverted driving mode, as shown in Fig. 4a.
所述第二固定梳齿部252具有多个第二固定梳齿2521，且分别和与其匹配的所述第二移动梳齿部2423的多个第二移动梳齿2422相互交错插设并相互间隔，形成第二电容，作为检测电容，实现感测模态，如图4b所示。The second fixed comb tooth portion 252 has a plurality of second fixed comb teeth 2521, and the plurality of second movable comb teeth 2422 of the second movable comb tooth portion 2423 matched with the second movable comb tooth portion 2423 are alternately inserted and spaced apart from each other. , A second capacitor is formed as a detection capacitor to realize the sensing mode, as shown in Figure 4b.
第一移动质量块框架241及第二移动质量块框架242分别带动第一移动梳齿部2413和第二移动梳齿部2423运动时，第一移动梳齿部2413和第二移动梳齿部2423分别相对于与之对应的第一固定梳齿部251和第二固定梳齿部252运动，从而改变检测电容、驱动电容的电容值，并可第一固定梳齿部251和第二固定梳齿部252外上外引电极施加电压和测量该电容(或该电容的变化量)。When the first moving mass frame 241 and the second moving mass frame 242 drive the first moving comb-tooth portion 2413 and the second moving comb-tooth portion 2423, respectively, the first moving comb-tooth portion 2413 and the second moving comb-tooth portion 2423 Respectively move relative to the first fixed comb-tooth portion 251 and the second fixed comb-tooth portion 252, so as to change the capacitance values of the detection capacitor and the driving capacitor, and the first fixed comb-tooth portion 251 and the second fixed comb-tooth portion The part 252 applies a voltage to the outer lead electrode and measures the capacitance (or the amount of change in the capacitance).
所述第二弹簧梁26包括多个且分别位于相对设置的所述移动质量块21和所述移动质量块框架22之间，并将二者形成弹性连接，且所述第二弹簧梁26延伸至与所述锚块3形成固定。本实施方式中，每一所述传感单元2配置四个所述锚块3，且四个所述锚块3分别位于所述质量块21的四个角的位置。The second spring beam 26 includes a plurality of and is respectively located between the moving mass 21 and the moving mass frame 22 that are disposed oppositely, and forms an elastic connection between the two, and the second spring beam 26 extends To form a fixation with the anchor block 3. In this embodiment, each of the sensing units 2 is configured with four anchor blocks 3, and the four anchor blocks 3 are respectively located at the four corners of the mass block 21.
也就是说，第二弹簧梁26包括多个，且分别位于相对设置的所述移动质量块22与所述第一移动质量块框架241之间，以及位于相对设置的所述移动质量块22与所述第二移动质量块框架242之间。In other words, the second spring beam 26 includes a plurality of spring beams, and they are respectively located between the moving mass 22 and the first moving mass frame 241 which are arranged oppositely, and are located between the moving mass 22 and the first moving mass frame 241 which are arranged oppositely. Between the second moving mass frame 242.
本实施方式中，位于相对设置的所述移动质量块22与所述第一移动质 量块框架241之间，或位于相对设置的所述移动质量块22与所述第二移动质量块框架242之间的所述第二弹簧梁26均包括两个，形成一组，同一组的两个第二弹簧梁26间隔相对设置，且沿平行于与其对应的所述移动质量块22的方向延伸。In this embodiment, it is located between the moving mass 22 and the first moving mass frame 241 which are arranged oppositely, or between the moving mass 22 and the second moving mass frame 242 which are arranged oppositely. Each of the second spring beams 26 in between includes two, forming a group. The two second spring beams 26 of the same group are arranged opposite to each other and extend in a direction parallel to the moving mass 22 corresponding to the same group.
上述结构中，因移动质量块22的设置，使得设置于质量块与移动质量块框架24之间的第一弹簧梁23及第二弹簧梁26相互之间不存在干涉，则有效的提高了第一弹簧梁23及第二弹簧梁26的设计灵活度，极大程度的改善了高精度陀螺仪100的共振频率性质，提高其传感精度与性能。In the above structure, due to the arrangement of the moving mass 22, the first spring beam 23 and the second spring beam 26 arranged between the mass and the moving mass frame 24 do not interfere with each other, which effectively improves the first spring beam. The design flexibility of the first spring beam 23 and the second spring beam 26 greatly improves the resonance frequency properties of the high-precision gyroscope 100 and improves its sensing accuracy and performance.
本实施方式中，为了调节增加上述部件的连接刚度，传感单元2还包括位于相对设置的所述移动质量块22和所述移动质量块框架24之间的连接部27，连接部27将二者形成刚性连接。In this embodiment, in order to adjust and increase the connection rigidity of the above-mentioned components, the sensing unit 2 further includes a connecting portion 27 located between the moving mass 22 and the moving mass frame 24 that are arranged oppositely. Those form a rigid connection.
更优的，对应设置的连接部27位于两个所述第二弹簧梁26之间且相互间隔。More preferably, the corresponding connecting portion 27 is located between the two second spring beams 26 and is spaced apart from each other.
根据所需的刚度来调节第二弹簧梁26的长度及同一组的两个第二弹簧梁26间的距离，而增加的连接部27的连接方式可以加强刚度。本实施方式中，所述连接部27呈矩形结构或栅栏状，当然不限于此，根据需要加强的刚度可对连接部27的结构形状进行调整设计。The length of the second spring beam 26 and the distance between the two second spring beams 26 in the same group are adjusted according to the required rigidity, and the connection manner of the increased connecting portion 27 can enhance the rigidity. In this embodiment, the connecting portion 27 has a rectangular structure or a fence shape. Of course, it is not limited to this. The structure and shape of the connecting portion 27 can be adjusted and designed according to the required rigidity.
所述高精度陀螺仪100还包括第三弹簧梁5，所述第三弹簧梁5包括多个且分别位于相邻两个传感单元2之间，并将相邻的两个所述传感单元2的两个所述移动质量块框架24形成弹性连接。The high-precision gyroscope 100 further includes a third spring beam 5, and the third spring beam 5 includes a plurality of and is located between two adjacent sensing units 2 and connects two adjacent sensing units 2 to each other. The two moving mass frames 24 of the unit 2 form an elastic connection.
本实施方式中，位于相邻的两个所述传感单元2的两个所述移动质量块框架24之间的所述第三弹簧梁5平行于该两个移动质量块框架24设置。该结构同样可增加第三弹簧梁5的长度设计，灵活性更好。In this embodiment, the third spring beam 5 located between the two moving mass frames 24 of the two adjacent sensing units 2 is arranged parallel to the two moving mass frames 24. This structure can also increase the length design of the third spring beam 5 and has better flexibility.
第三弹簧梁5同样也改善了所述高精度陀螺仪100的谐振频率性质。，第三弹簧梁5也叫耦合弹簧梁，用于使反相驱动模态和感测模态的运动同步，进一步提高精度。The third spring beam 5 also improves the resonant frequency properties of the high-precision gyroscope 100. The third spring beam 5 is also called a coupled spring beam, which is used to synchronize the movement of the anti-phase driving mode and the sensing mode to further improve the accuracy.
高精度陀螺仪100的谐振频率为:The resonant frequency of the high-precision gyroscope 100 is:
Figure PCTCN2019120473-appb-000001
Figure PCTCN2019120473-appb-000001
其中，k＝k1+k2+k3,k1为第一弹簧梁23的刚度；k2为第二弹簧梁26的刚度；k3为第三弹簧梁5的钢度，即耦合弹簧梁的刚度。故，本发明通过移动质量块22、第一弹簧梁23、第二弹簧梁26以及第三弹簧梁5的设计，有效的改善了高精度陀螺仪100的谐振频率性质。Among them, k=k1+k2+k3, k1 is the stiffness of the first spring beam 23; k2 is the stiffness of the second spring beam 26; k3 is the stiffness of the third spring beam 5, that is, the stiffness of the coupling spring beam. Therefore, the present invention effectively improves the resonance frequency properties of the high-precision gyroscope 100 through the design of the moving mass 22, the first spring beam 23, the second spring beam 26, and the third spring beam 5.
横梁4包括多个且分别固定于所述基座1，本实施方式中，横梁4包括四个。四个横梁4间隔设置于四个所述传感单元形成的矩阵外周，相邻的两个所述传感单元2同时与同一个所述横梁4固定连接。The cross beam 4 includes a plurality of and is fixed to the base 1 respectively. In this embodiment, the cross beam 4 includes four. Four cross beams 4 are arranged at intervals on the outer periphery of the matrix formed by the four sensing units, and two adjacent sensing units 2 are fixedly connected to the same cross beam 4 at the same time.
具体的，横梁4连接于传感单元2的移动质量块框架24的远离质量块21的一侧。Specifically, the cross beam 4 is connected to a side of the moving mass frame 24 of the sensing unit 2 away from the mass 21.
横梁4形成杠杆机构，由于杠杆机构的刚性，从驱动模态和感测模态都消除了低频同相模式，从而能够完全机械地抵抗外部冲击和振动，提高可靠性和精度。The beam 4 forms a lever mechanism. Due to the rigidity of the lever mechanism, the low-frequency in-phase mode is eliminated from both the driving mode and the sensing mode, so that it can completely mechanically resist external shocks and vibrations and improve reliability and accuracy.
与相关技术相比，本发明高精度陀螺仪中，通过在所述质量块与所述移动质量块框架之间增加设置了所述移动质量块，通过第一弹簧梁将质量块与移动质量块连接，通过第二弹簧梁将移动质量块与移动质量块框架连接，且第二弹簧梁延伸至锚块并通过锚块固定于基座。移动质量块的增加使得第一弹簧梁和第二弹簧梁的设计相互不会形成干涉，有效的提高了第一弹簧梁和第二弹簧梁的设计灵活度，实现根据频率要求进行结构设计调整，从而使得频率带宽增大；而且通过移动质量块的延长，可调整传感单元在第一方向与第二方向(即X，Y方向)的匹配度，使得X-Y轴由于工艺问题造成的失配更容易补偿，从而有效提高品质因素Q值；第一弹簧梁和第二弹簧梁因质量块的设置后实现了灵活设计，提高了可靠性，并使该高精度陀螺仪的精度及性能更优，另外，移动质量块的设计可以延缓不必要的震动带来的第一弹簧梁及第一弹簧梁可靠性不足，且可使第一弹簧梁及第一弹簧梁有足够的强度，从而在确定频率的基础上，增加频率带宽， 增强连接的支撑力度。Compared with the related art, in the high-precision gyroscope of the present invention, the moving mass is added between the mass and the moving mass frame, and the mass and the moving mass are separated by a first spring beam. Connection: the moving mass is connected to the moving mass frame through the second spring beam, and the second spring beam extends to the anchor block and is fixed to the base by the anchor block. The increase of the moving mass makes the design of the first spring beam and the second spring beam not interfere with each other, which effectively improves the design flexibility of the first spring beam and the second spring beam, and realizes the structural design adjustment according to the frequency requirements. As a result, the frequency bandwidth is increased; and through the extension of the moving mass, the matching degree of the sensing unit in the first direction and the second direction (ie X, Y direction) can be adjusted, so that the mismatch of the XY axis due to process problems is more It is easy to compensate, thereby effectively improving the quality factor Q value; the first spring beam and the second spring beam realize flexible design due to the mass block setting, improve the reliability, and make the precision and performance of the high-precision gyroscope better. In addition, the design of the moving mass can delay the lack of reliability of the first spring beam and the first spring beam caused by unnecessary vibrations, and can make the first spring beam and the first spring beam have sufficient strength to determine the frequency On the basis of this, increase the frequency bandwidth and strengthen the support of the connection.
以上所述的仅是本发明的实施方式，在此应当指出，对于本领域的普通技术人员来说，在不脱离本发明创造构思的前提下，还可以做出改进，但这些均属于本发明的保护范围。The above are only the embodiments of the present invention. It should be pointed out here that for those of ordinary skill in the art, improvements can be made without departing from the inventive concept of the present invention, but these all belong to the present invention. The scope of protection.

Claims (10)

  1. 一种高精度陀螺仪，包括呈矩形结构的基座、设置于所述基座顶面的传感单元，以及位于与所述传感单元相同层面的多个锚块，多个所述锚块环绕所述传感单元间隔设置，所述锚块通过绝缘层将所述传感单元固定于所述基座上，其特征在于，所述传感单元包括：A high-precision gyroscope includes a base in a rectangular structure, a sensing unit arranged on the top surface of the base, and a plurality of anchor blocks located on the same level as the sensing unit, and a plurality of the anchor blocks It is arranged at intervals around the sensing unit, and the anchor block fixes the sensing unit on the base through an insulating layer, wherein the sensing unit includes:
    质量块，所述质量块呈矩形结构，包括沿第一方向相对且间隔设置的两个第一侧壁和沿第二方向相对且间隔设置的两个第二侧壁，所述质量块叠设支撑于所述基座；所述第一方向与所述第二方向相互垂直且围成的平面与所述基座平行；The mass is in a rectangular structure, and includes two first side walls that are opposed and spaced apart along a first direction and two second side walls that are opposed and spaced apart along a second direction, and the masses are stacked Supported on the base; the first direction and the second direction are perpendicular to each other and the enclosed plane is parallel to the base;
    移动质量块，所述移动质量块包括四个并分别环设于所述质量块的四周侧，四个所述移动质量块分别平行于两个第一侧壁及两个第二侧壁并与所述质量块间隔设置；The moving mass includes four moving masses which are respectively arranged around the surrounding sides of the mass, and the four moving masses are respectively parallel to the two first side walls and the two second side walls and are connected to each other. The mass block interval setting;
    第一弹簧梁，所述第一弹簧梁将所述质量块和所述移动质量块形成弹性连接；A first spring beam, the first spring beam forms an elastic connection between the mass and the moving mass;
    移动质量块框架，所述移动质量块框架包括沿所述第一方向相对且间隔设置的两个第一移动质量块框架和沿所述第二方向相对且间隔设置的两个第二移动质量块框架；两个所述第一移动质量块框架和两个第二移动质量块框架环设于所述质量块的四周侧，且均位于所述移动质量块的远离所述质量块的一侧；所述第一移动质量块框架包括第一框架本体和具有多个第一移动梳齿的第一移动梳齿部，多个所述第一移动梳齿由所述第一框架本体相对设置的两长轴边分别沿第二方向向其内部延伸；所述第二移动质量块框架包括第二框架本体和具有多个第二移动梳齿的第二移动梳齿部，多个所述第二移动梳齿由所述第二框架本体相对设置的两长轴边分别沿第一方向向其内部延伸；A moving mass frame comprising two first moving mass frames opposite and spaced apart along the first direction and two second moving mass frames opposite and spaced apart along the second direction Frame; two first moving mass frames and two second moving mass frames are arranged around the surrounding sides of the mass, and are located on the side of the moving mass away from the mass; The first moving mass frame includes a first frame body and a first moving comb tooth portion having a plurality of first moving comb teeth. The plurality of first moving comb teeth are formed by two oppositely arranged first moving comb teeth. The long axis sides respectively extend inwardly along the second direction; the second moving mass frame includes a second frame body and a second moving comb tooth portion having a plurality of second moving comb teeth, and a plurality of the second moving masses The comb teeth are respectively extended inwardly from the two long axis edges of the second frame body oppositely arranged along the first direction;
    固定梳齿，所述固定梳齿包括分别固定于所述基座的两个第一固定梳齿部和两个第二固定梳齿部，两个所述第一固定梳齿部分别与两个所述第一移动梳齿部匹配，两个第二固定梳齿部分别与两个所述第二移动梳齿部 匹配；所述第一固定梳齿部具有多个第一固定梳齿，且分别和与其匹配的所述第一移动梳齿部的多个第一移动梳齿相互交错插设并相互间隔，形成第一电容；所述第二固定梳齿部具有多个第二固定梳齿，且分别和与其匹配的所述第二移动梳齿部的多个第二移动梳齿相互交错插设并相互间隔，形成第二电容；以及Fixed comb teeth, the fixed comb teeth include two first fixed comb tooth parts and two second fixed comb tooth parts respectively fixed to the base, and the two first fixed comb tooth parts are connected to two The first mobile comb-tooth portion is matched, and the two second fixed comb-tooth portions are matched with the two second mobile comb-tooth portions respectively; the first fixed comb-tooth portion has a plurality of first fixed combs, and A plurality of first movable comb teeth of the first movable comb tooth part that are matched with the first movable comb tooth part are interleaved with each other and spaced apart from each other to form a first capacitor; the second fixed comb tooth part has a plurality of second fixed comb teeth , And the plurality of second movable comb teeth of the second movable comb tooth portion that are matched with the second movable comb teeth are interleaved with each other and are spaced apart from each other to form a second capacitor; and
    第二弹簧梁，所述第二弹簧梁包括多个且分别位于相对设置的所述移动质量块和所述移动质量块框架之间，并将二者形成弹性连接，且所述第二弹簧梁延伸至与所述锚块形成固定。A second spring beam, the second spring beam includes a plurality of and is respectively located between the moving mass and the moving mass frame that are disposed oppositely, and forms an elastic connection between the two, and the second spring beam It extends to form a fixation with the anchor block.
  2. 根据权利要求1所述的高精度陀螺仪，其特征在于，所述传感单元还包括位于相对设置的所述移动质量块和所述移动质量块框架之间的连接部，所述连接部将二者形成刚性连接。The high-precision gyroscope according to claim 1, wherein the sensing unit further comprises a connecting part located between the moving mass and the frame of the moving mass that are arranged oppositely, and the connecting part The two form a rigid connection.
  3. 根据权利要求2所述的高精度陀螺仪，其特征在于，位于相对设置的所述移动质量块与所述第一移动质量块框架之间，或位于相对设置的所述移动质量块与所述第二移动质量块框架之间的所述第二弹簧梁均包括两个，两个第二弹簧梁间隔相对设置，且沿平行于与其对应的所述移动质量块的方向延伸，对应设置的所述连接部位于两个所述第二弹簧梁之间且相互间隔；每一所述传感单元配置四个所述锚块，且四个所述锚块分别位于所述质量块的四个角的位置。The high-precision gyroscope according to claim 2, characterized in that it is located between the moving mass and the first moving mass frame which are arranged oppositely, or is located between the moving mass and the first moving mass which are arranged oppositely. Each of the second spring beams between the second moving mass frames includes two, and the two second spring beams are arranged opposite to each other at intervals and extend in a direction parallel to the corresponding moving mass. The connecting portion is located between the two second spring beams and is spaced apart from each other; each of the sensing units is configured with four anchor blocks, and the four anchor blocks are respectively located at the four corners of the mass block s position.
  4. 根据权利要求2所述的高精度陀螺仪，其特征在于，所述连接部呈矩形结构或栅栏状。The high-precision gyroscope according to claim 2, wherein the connecting portion has a rectangular structure or a fence shape.
  5. 根据权利要求1所述的高精度陀螺仪，其特征在于，所述质量块还包括由所述第一侧壁沿所述第二方向向其内部凹陷的第一让位槽，以及由所述第二侧壁沿所述第一方向向其内部凹陷的第二让位槽；多个所述第一弹簧梁分别延伸至与其对应的所述第一让位槽内或所述第二让位槽内。The high-precision gyroscope according to claim 1, wherein the mass block further comprises a first relief groove recessed from the first side wall in the second direction along the second direction, and the mass The second side wall is recessed inwardly of the second relief groove along the first direction; a plurality of the first spring beams respectively extend into the corresponding first relief groove or the second relief groove槽内。 In the slot.
  6. 根据权利要求5所述的高精度陀螺仪，其特征在于，每一所述第一侧壁设有两个相互间隔的所述第一让位槽，每一所述第二侧壁设有两个相互间隔的所述第二让位槽；每一所述移动质量块与所述质量块之间设有两个所述第一弹簧梁。The high-precision gyroscope according to claim 5, wherein each of the first sidewalls is provided with two mutually spaced first relief grooves, and each of the second sidewalls is provided with two There are two mutually spaced second relief grooves; two first spring beams are arranged between each of the moving masses and the masses.
  7. 根据权利要求1～6任意一项所述的高精度陀螺仪，其特征在于，所述传感单元包括至少四个且呈矩阵排列；所述高精度陀螺仪还包括第三弹簧梁，所述第三弹簧梁包括多个且分别位于相邻两个所述传感单元之间，并将相邻的两个所述传感单元的两个所述移动质量块框架形成弹性连接。The high-precision gyroscope according to any one of claims 1 to 6, wherein the sensing unit includes at least four and arranged in a matrix; the high-precision gyroscope further includes a third spring beam, the The third spring beam includes a plurality of and is respectively located between two adjacent sensing units, and elastically connects the two moving mass frames of the two adjacent sensing units.
  8. 根据权利要求7所述的高精度陀螺仪，其特征在于，位于相邻的两个所述传感单元的两个所述移动质量块框架之间的所述第三弹簧梁平行于该两个移动质量块框架设置。The high-precision gyroscope according to claim 7, wherein the third spring beam located between the two moving mass frames of the two adjacent sensing units is parallel to the two Mobile mass frame settings.
  9. 根据权利要求7所述的高精度陀螺仪，其特征在于，所述高精度陀螺仪还包括固定于所述基座的多个横梁，所述横梁间隔设置于四个所述传感单元形成的矩阵外周，相邻的两个所述传感单元同时与同一个所述横梁固定连接。The high-precision gyroscope according to claim 7, wherein the high-precision gyroscope further comprises a plurality of beams fixed to the base, and the beams are arranged at intervals formed by the four sensing units. At the periphery of the matrix, two adjacent sensing units are simultaneously fixedly connected to the same cross beam.
  10. 根据权利要求9所述的高精度陀螺仪，其特征在于，所述横梁连接于所述移动质量块框架的远离所述质量块的一侧。The high-precision gyroscope according to claim 9, wherein the beam is connected to a side of the moving mass frame away from the mass.
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