WO2021082180A1 - Dt-star material laser cutting lens etchant and use method therefor - Google Patents

Dt-star material laser cutting lens etchant and use method therefor Download PDF

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Publication number
WO2021082180A1
WO2021082180A1 PCT/CN2019/123277 CN2019123277W WO2021082180A1 WO 2021082180 A1 WO2021082180 A1 WO 2021082180A1 CN 2019123277 W CN2019123277 W CN 2019123277W WO 2021082180 A1 WO2021082180 A1 WO 2021082180A1
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Prior art keywords
strengthened glass
chemically strengthened
acid solution
parts
laser cutting
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PCT/CN2019/123277
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French (fr)
Chinese (zh)
Inventor
郑资来
陈光进
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惠州市清洋实业有限公司
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Publication of WO2021082180A1 publication Critical patent/WO2021082180A1/en

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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C03C15/02Surface treatment of glass, not in the form of fibres or filaments, by etching for making a smooth surface

Definitions

  • the invention belongs to the technical field of glass etching, and particularly relates to a DT-STAR material laser cutting lens etching solution and a use method thereof.
  • the thickness of the DT-STAR glass material is 0.55mm, and the etching reduction is 50um.
  • the etching process is relatively complicated, the production cycle is long, and the yield is low, which requires further improvement.
  • the present invention discloses a DT-STAR material laser cutting lens etching solution and a method of use. After the acid solution is etched, the chemically strengthened glass surface is etched without pitting and scratches, and the glass is defective. The rate reaches 0%, and the product quality is stable.
  • the technical content of the present invention is as follows:
  • the technical point of the DT-STAR material laser cutting lens etching solution of the present invention is that the laser acid solution for chemically strengthened glass is calculated in parts by weight, and its preparation raw materials include: 30-35 parts of sulfuric acid solution, 10-12 Parts of hydrofluoric acid solution and 55-60 parts of water.
  • the thickness of the chemically strengthened glass is 0.5 to 0.6 mm
  • the hardness of the chemically strengthened glass is 7-9 in Mohs
  • the melting point of the chemically strengthened glass is 2000 -3000°C
  • the light transmittance of the chemically strengthened glass is 90-100%
  • the density of the chemically strengthened glass is 20-30 g/cm 3 .
  • the weight fraction of sulfuric acid molecules contained in the sulfuric acid solution is 75-98.3 wt%.
  • the weight fraction of hydrofluoric acid molecules contained in the hydrofluoric acid solution is 10-40 wt%, and the content of chlorides contained in the hydrofluoric acid solution is 0 to 40% by weight. 0.001wt%, the content of sulfate contained in the hydrofluoric acid solution is 0-0.002wt%.
  • the weight ratio of the sulfuric acid solution and the hydrofluoric acid solution is 2.5-3:1.
  • the present invention also provides a laser etching method using the above-mentioned laser acid for etching chemically strengthened glass.
  • the technical point is that the laser etching method includes the following steps:
  • S1 respectively take pretreated chemically strengthened glass, coat photoresist on its outer surface, and pattern the photoresist;
  • step S2 takes the chemically strengthened glass processed in step S1, and places it in the acid solution for wet etching treatment;
  • S3 takes the chemically strengthened glass cleaning treatment processed in step S2.
  • the method for pretreatment of the chemically strengthened glass in step S1 is: take the chemically strengthened glass and sequentially perform the first pre-cleaning, the first polishing, the second pre-cleaning, The second polishing, the third pre-cleaning, the fourth pre-cleaning and washing.
  • the etching thinning of the chemically strengthened glass after cleaning in the step S3 is 40-60 ⁇ m.
  • the DT-STAR material laser cutting lens etching solution of the present invention is based on parts by weight, including 30 to 35 parts of sulfuric acid solution, 10 to 12 parts of hydrofluoric acid solution and 55 to 60 parts of water, prepared by using the present invention
  • the quality temperature of chemically strengthened glass products, the surface of chemically strengthened glass has no large area pits and scratches, the defect rate is 0%, the preparation is simple, and no polishing treatment is required.
  • the DT-STAR material laser cutting lens etching solution is calculated in parts by weight, and its preparation raw materials include: 32 parts of sulfuric acid solution, 11 parts of hydrofluoric acid solution and 57 parts of water, as shown in Table 1.
  • the thickness of the chemically strengthened glass is 0.55mm
  • the hardness of the chemically strengthened glass is 8 Mohs
  • the melting point of the chemically strengthened glass is 2500°C
  • the light transmittance of the chemically strengthened glass is 95%
  • the density of the chemically strengthened glass is 25 g/cm 3 .
  • the weight fraction of sulfuric acid molecules contained in the sulfuric acid solution is 80 wt%.
  • the weight fraction of hydrofluoric acid molecules contained in the hydrofluoric acid solution is 25wt%
  • the content of chlorides contained in the hydrofluoric acid solution is 0.0005wt%
  • the sulfuric acid contained in the hydrofluoric acid solution The salt content is 0.001% by weight.
  • the weight ratio of sulfuric acid solution and hydrofluoric acid solution is 2.9:1.
  • a method for laser etching using the above-mentioned laser acid for etching chemically strengthened glass includes the following steps:
  • S1 respectively take pretreated chemically strengthened glass, coat photoresist on its outer surface, and pattern the photoresist;
  • step S2 takes the chemically strengthened glass processed in step S1, and places it in the acid solution for wet etching treatment;
  • S3 takes the chemically strengthened glass cleaning treatment processed in step S2.
  • the method for pretreatment of the chemically strengthened glass in step S1 is: take the chemically strengthened glass and sequentially perform the first pre-cleaning, the first polishing, the second pre-cleaning, The second polishing, the third pre-cleaning, the fourth pre-cleaning and washing.
  • the etching thinning of the chemically strengthened glass after cleaning in step S3 is 50 ⁇ m.
  • the DT-STAR material laser cutting lens etching solution is calculated in parts by weight, and its preparation materials include: 30 parts of sulfuric acid solution, 10 parts of hydrofluoric acid solution and 60 parts of water, as shown in Table 1.
  • the thickness of the chemically strengthened glass is 0.5mm
  • the hardness of the chemically strengthened glass is 7 Mohs
  • the melting point of the chemically strengthened glass is 2000°C
  • the light transmittance of the chemically strengthened glass is 90%
  • the density of the chemically strengthened glass is 20 g/cm 3 .
  • the weight fraction of sulfuric acid molecules contained in the sulfuric acid solution is 75 wt%.
  • the weight fraction of hydrofluoric acid molecules contained in the hydrofluoric acid solution is 10wt%
  • the content of chlorides contained in the hydrofluoric acid solution is 0wt%
  • the sulfates contained in the hydrofluoric acid solution The content is 0wt%.
  • the weight ratio of sulfuric acid solution and hydrofluoric acid solution is 3:1.
  • a method for laser etching using the above-mentioned laser acid for etching chemically strengthened glass includes the following steps:
  • S1 respectively take pretreated chemically strengthened glass, coat photoresist on its outer surface, and pattern the photoresist;
  • step S2 takes the chemically strengthened glass processed in step S1, and places it in the acid solution for wet etching treatment;
  • S3 takes the chemically strengthened glass cleaning treatment processed in step S2.
  • the method for pretreatment of the chemically strengthened glass in step S1 is: take the chemically strengthened glass and sequentially perform the first pre-cleaning, the first polishing, the second pre-cleaning, The second polishing, the third pre-cleaning, the fourth pre-cleaning and washing.
  • the etching thinning of the chemically strengthened glass after cleaning in step S3 is 40 ⁇ m.
  • the DT-STAR material laser cutting lens etching solution is calculated in parts by weight, and its preparation raw materials include: 35 parts of sulfuric acid solution, 12 parts of hydrofluoric acid solution and 55 parts of water, as shown in Table 1.
  • the thickness of the chemically strengthened glass is 0.6mm
  • the hardness of the chemically strengthened glass is 9 Mohs
  • the melting point of the chemically strengthened glass is 3000°C
  • the light transmittance of the chemically strengthened glass is 100%
  • the density of the chemically strengthened glass is 30 g/cm 3 .
  • the weight fraction of sulfuric acid molecules contained in the sulfuric acid solution is 98.3% by weight.
  • the weight fraction of hydrofluoric acid molecules contained in the hydrofluoric acid solution is 40% by weight
  • the chloride content contained in the hydrofluoric acid solution is 0.001% by weight
  • the sulfuric acid contained in the hydrofluoric acid solution is 0.001% by weight.
  • the salt content is 0.002wt%.
  • the weight ratio of sulfuric acid solution and hydrofluoric acid solution is 2.9:1.
  • a method for laser etching using the above-mentioned laser acid for etching chemically strengthened glass includes the following steps:
  • S1 respectively take pretreated chemically strengthened glass, coat photoresist on its outer surface, and pattern the photoresist;
  • step S2 takes the chemically strengthened glass processed in step S1, and places it in the acid solution for wet etching treatment;
  • S3 takes the chemically strengthened glass cleaning treatment processed in step S2.
  • the method for pretreatment of the chemically strengthened glass in step S1 is: take the chemically strengthened glass and sequentially perform the first pre-cleaning, the first polishing, the second pre-cleaning, The second polishing, the third pre-cleaning, the fourth pre-cleaning and washing.
  • the etching thinning amount of the chemically strengthened glass after cleaning in step S3 is 60 ⁇ m.
  • the acid solution in Comparative Example 1 is calculated in parts by weight, and its formula includes: 32 parts of sulfuric acid, 11 parts of hydrofluoric acid, 23 parts of hydrochloric acid, and 35 parts of water.
  • the other operations are the same as those of Example 1, as shown in Table 1. Show.
  • the acid solution in Comparative Example 1 is calculated in parts by weight, and its formula includes: 33 parts of sulfuric acid, 11 parts of hydrofluoric acid, 17 parts of hydrochloric acid, and 42 parts of water.
  • the other operations are the same as in Example 1, as shown in Table 1. Show.
  • the acid solution in Comparative Example 1 is calculated in parts by weight, and its formula includes: 32 parts of sulfuric acid, 11 parts of hydrofluoric acid, 12 parts of hydrochloric acid, and 48 parts of water.
  • the other operations are the same as in Example 2, as shown in Table 1. Show.
  • the acid solution in Comparative Example 1 is calculated in parts by weight, and its formula includes: 33 parts of sulfuric acid, 11 parts of hydrofluoric acid, 8 parts of hydrochloric acid, and 52 parts of water.
  • the other operations are the same as in Example 3, as shown in Table 1. Show.
  • the acid solution in Comparative Example 1 is calculated in parts by weight, and its formula includes: 32 parts of sulfuric acid, 11 parts of hydrofluoric acid, 5 parts of hydrochloric acid, and 57 parts of water.
  • the other operations are the same as in Example 2, as shown in Table 1. Show.

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  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
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  • Surface Treatment Of Glass (AREA)

Abstract

A DT-STAR material laser cutting lens etchant and a use method therefor. In terms of parts by weight, the etchant comprises 30-35 parts of a sulfuric acid solution, 10-12 parts of a hydrofluoric acid solution, and 55-60 parts of water. A chemically-strengthened glass product prepared and produced using the etchant is stable in terms of quality, has no large area of pitting and scratches on the surface and a 0% defective rate, is simple to prepare, and obviates the need for a polishing treatment.

Description

DT-STAR材质激光切割镜片蚀刻液及其使用方法DT-STAR material laser cutting lens etching solution and its use method 技术领域Technical field
本发明属于玻璃蚀刻技术领域,特别涉及DT-STAR材质激光切割镜片蚀刻液及其使用方法。The invention belongs to the technical field of glass etching, and particularly relates to a DT-STAR material laser cutting lens etching solution and a use method thereof.
背景技术Background technique
手机用镜片玻璃经过激光切割磨边之后,会使使得镜片玻璃的边缘有很多微裂纹,从而导致玻璃的抗弯强度很低,一般低于200MP。为了增强镜片玻璃的强度,常使用氢氟酸蚀刻蚀玻璃边缘表面,去除微裂纹,并提升玻璃强度和抗冲击性;同时,通过氢氟酸蚀刻液蚀刻减薄。After laser cutting and edging of the lens glass for mobile phones, there will be many micro-cracks on the edge of the lens glass, resulting in a very low bending strength of the glass, generally less than 200MP. In order to enhance the strength of the lens glass, hydrofluoric acid is often used to etch the edge surface of the glass, remove microcracks, and improve the strength and impact resistance of the glass; at the same time, it is thinned by etching with hydrofluoric acid etching solution.
目前,DT-STAR玻璃的材质的厚度为0.55MM,蚀刻减薄量为50um,激光切割镜片传统的蚀刻工艺采用的蚀刻液中,硫酸30%,氢氟酸10%,盐酸20%,或加活性剂0.01%,水40%,以当前的蚀刻液,结合现有点蚀刻工艺,其蚀刻后,玻璃表面呈现大面积麻点和无规则的划伤,不良率为100%,为满足出货,需要进行100%抛光,严重制约到生产产能及交付能力,产品品质稳定性无法确保,因而导致刻蚀的工艺相对复杂,生产周期长,成品率低等问题,需要进一步的改进。At present, the thickness of the DT-STAR glass material is 0.55mm, and the etching reduction is 50um. In the etching solution used in the traditional etching process of laser cutting lenses, sulfuric acid 30%, hydrofluoric acid 10%, hydrochloric acid 20%, or add Active agent 0.01%, water 40%, with the current etching solution, combined with the existing spot etching process, after the etching, the glass surface shows a large area of pitting and irregular scratches, the defect rate is 100%, in order to meet the shipment, 100% polishing is required, which severely restricts production capacity and delivery capacity, and product quality stability cannot be ensured. As a result, the etching process is relatively complicated, the production cycle is long, and the yield is low, which requires further improvement.
发明内容Summary of the invention
本发明针对现有技术的不足,本发明公开了DT-STAR材质激光切割镜片蚀刻液及其使用方法,该酸液蚀刻后,其中刻蚀化学强化玻璃表无麻点和划伤,玻璃的不良率达到0%,产品品质稳定性良好,本发明的技术内容如下:In view of the shortcomings of the prior art, the present invention discloses a DT-STAR material laser cutting lens etching solution and a method of use. After the acid solution is etched, the chemically strengthened glass surface is etched without pitting and scratches, and the glass is defective. The rate reaches 0%, and the product quality is stable. The technical content of the present invention is as follows:
本发明的DT-STAR材质激光切割镜片蚀刻液,其技术点在于:所述的化学强化玻璃用激光酸液按重量份数计,其制备原料包括:30~35份的硫酸溶液、10~12份的氢氟酸溶液和55~60份的水。The technical point of the DT-STAR material laser cutting lens etching solution of the present invention is that the laser acid solution for chemically strengthened glass is calculated in parts by weight, and its preparation raw materials include: 30-35 parts of sulfuric acid solution, 10-12 Parts of hydrofluoric acid solution and 55-60 parts of water.
在本发明的有的实施例中,所述的化学强化玻璃的厚度为0.5~0.6mm,所述的化学强化玻璃的硬度为摩氏为7~9,所述的化学强化玻璃的熔点为2000~3000℃,所述的化学强化玻璃的透光率为90~100%,所述的化学强化玻璃的密度为20~30g/cm 3In some embodiments of the present invention, the thickness of the chemically strengthened glass is 0.5 to 0.6 mm, the hardness of the chemically strengthened glass is 7-9 in Mohs, and the melting point of the chemically strengthened glass is 2000 -3000°C, the light transmittance of the chemically strengthened glass is 90-100%, and the density of the chemically strengthened glass is 20-30 g/cm 3 .
在本发明的有的实施例中,所述的硫酸溶液中含有的硫酸分子的重量分数为75~98.3wt%。In some embodiments of the present invention, the weight fraction of sulfuric acid molecules contained in the sulfuric acid solution is 75-98.3 wt%.
在本发明的有的实施例中,所述的氢氟酸溶液中含有的氢氟酸分子的重量分数为10~40wt%,所述的氢氟酸溶液中含有的氯化物的含量为0~0.001wt%,所述的氢氟酸溶液中含有的硫酸盐的含量为0~0.002wt%。In some embodiments of the present invention, the weight fraction of hydrofluoric acid molecules contained in the hydrofluoric acid solution is 10-40 wt%, and the content of chlorides contained in the hydrofluoric acid solution is 0 to 40% by weight. 0.001wt%, the content of sulfate contained in the hydrofluoric acid solution is 0-0.002wt%.
在本发明的有的实施例中,所述的硫酸溶液和氢氟酸溶液的重量之比为2.5~3:1。In some embodiments of the present invention, the weight ratio of the sulfuric acid solution and the hydrofluoric acid solution is 2.5-3:1.
本发明还提供了一种使用上述的刻蚀化学强化玻璃用激光酸液进行激光刻蚀的方法,其技术点在于:所述的激光刻蚀方法包括以下步骤:The present invention also provides a laser etching method using the above-mentioned laser acid for etching chemically strengthened glass. The technical point is that the laser etching method includes the following steps:
S1分别取经预处理的化学强化玻璃,于其外表面上涂覆光刻胶,并将所述光刻胶图形化;S1 respectively take pretreated chemically strengthened glass, coat photoresist on its outer surface, and pattern the photoresist;
S2取经步骤S1处理的化学强化玻璃,置于所述的酸液中进行湿法刻蚀处理;S2 takes the chemically strengthened glass processed in step S1, and places it in the acid solution for wet etching treatment;
S3取经步骤S2处理的化学强化玻璃清洗处理。S3 takes the chemically strengthened glass cleaning treatment processed in step S2.
在本发明的有的实施例中,所述的步骤S1中化学强化玻璃的预处理的方法为:取化学强化玻璃,依次经第一次预清洗、第一次抛光、第二次预清洗、第二次抛光、第三次预清洗、第四次预清洗和水洗。In some embodiments of the present invention, the method for pretreatment of the chemically strengthened glass in step S1 is: take the chemically strengthened glass and sequentially perform the first pre-cleaning, the first polishing, the second pre-cleaning, The second polishing, the third pre-cleaning, the fourth pre-cleaning and washing.
在本发明的有的实施例中,所述的步骤S3中清洗后的化学强化玻璃的蚀刻减薄量40~60μm。In some embodiments of the present invention, the etching thinning of the chemically strengthened glass after cleaning in the step S3 is 40-60 μm.
与现有技术相比,本发明的有益效果为:Compared with the prior art, the beneficial effects of the present invention are:
本发明的DT-STAR材质激光切割镜片蚀刻液按重量份数计,包括30~35份的硫酸溶液、10~12份的氢氟酸溶液和55~60份的水,使用本发明制备得到的化学强化玻璃产品质量温度,化学强化玻璃表面无大面积麻点和划伤,不良率为0%,制备简单,无需进行抛光处理。The DT-STAR material laser cutting lens etching solution of the present invention is based on parts by weight, including 30 to 35 parts of sulfuric acid solution, 10 to 12 parts of hydrofluoric acid solution and 55 to 60 parts of water, prepared by using the present invention The quality temperature of chemically strengthened glass products, the surface of chemically strengthened glass has no large area pits and scratches, the defect rate is 0%, the preparation is simple, and no polishing treatment is required.
具体实施方式Detailed ways
下面将对本发明实施例中的技术方案进行清楚、完整地描述,以使本领域的技术人员能够更好的理解本发明的优点和特征,从而对本发明的保护范围做出更为清楚的界定。本发明所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例,基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动的前提下所获得的所有其他实施例,都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be described clearly and completely below, so that those skilled in the art can better understand the advantages and features of the present invention, so as to make a clearer definition of the protection scope of the present invention. The described embodiments of the present invention are only a part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other implementations obtained by those of ordinary skill in the art without creative work Examples are all within the protection scope of the present invention.
实施例1Example 1
DT-STAR材质激光切割镜片蚀刻液按重量份数计,其制备原料包括:32份的硫酸溶液、11份的氢氟酸溶液和57份的水,如表1所示。The DT-STAR material laser cutting lens etching solution is calculated in parts by weight, and its preparation raw materials include: 32 parts of sulfuric acid solution, 11 parts of hydrofluoric acid solution and 57 parts of water, as shown in Table 1.
其中,化学强化玻璃的厚度为0.55mm,所述的化学强化玻璃的硬度为摩氏为8,所述的化学强化玻璃的熔点为2500℃,所述的化学强化玻璃的透光率为95%,所述的化学强化玻璃的密度为25g/cm 3Wherein, the thickness of the chemically strengthened glass is 0.55mm, the hardness of the chemically strengthened glass is 8 Mohs, the melting point of the chemically strengthened glass is 2500°C, and the light transmittance of the chemically strengthened glass is 95% The density of the chemically strengthened glass is 25 g/cm 3 .
其中,硫酸溶液中含有的硫酸分子的重量分数为80wt%。Wherein, the weight fraction of sulfuric acid molecules contained in the sulfuric acid solution is 80 wt%.
其中,氢氟酸溶液中含有的氢氟酸分子的重量分数为25wt%,所述的氢氟酸溶液中含有的氯化物的含量为0.0005wt%,所述的氢氟酸溶液中含有的硫酸盐的含量为0.001wt%。Wherein, the weight fraction of hydrofluoric acid molecules contained in the hydrofluoric acid solution is 25wt%, the content of chlorides contained in the hydrofluoric acid solution is 0.0005wt%, and the sulfuric acid contained in the hydrofluoric acid solution The salt content is 0.001% by weight.
其中,硫酸溶液和氢氟酸溶液的重量之比为2.9:1。Among them, the weight ratio of sulfuric acid solution and hydrofluoric acid solution is 2.9:1.
一种使用上述的刻蚀化学强化玻璃用激光酸液进行激光刻蚀的方法包括以 下步骤:A method for laser etching using the above-mentioned laser acid for etching chemically strengthened glass includes the following steps:
S1分别取经预处理的化学强化玻璃,于其外表面上涂覆光刻胶,并将所述光刻胶图形化;S1 respectively take pretreated chemically strengthened glass, coat photoresist on its outer surface, and pattern the photoresist;
S2取经步骤S1处理的化学强化玻璃,置于所述的酸液中进行湿法刻蚀处理;S2 takes the chemically strengthened glass processed in step S1, and places it in the acid solution for wet etching treatment;
S3取经步骤S2处理的化学强化玻璃清洗处理。S3 takes the chemically strengthened glass cleaning treatment processed in step S2.
在本发明的有的实施例中,所述的步骤S1中化学强化玻璃的预处理的方法为:取化学强化玻璃,依次经第一次预清洗、第一次抛光、第二次预清洗、第二次抛光、第三次预清洗、第四次预清洗和水洗。In some embodiments of the present invention, the method for pretreatment of the chemically strengthened glass in step S1 is: take the chemically strengthened glass and sequentially perform the first pre-cleaning, the first polishing, the second pre-cleaning, The second polishing, the third pre-cleaning, the fourth pre-cleaning and washing.
其中,步骤S3中清洗后的化学强化玻璃的蚀刻减薄量50μm。Among them, the etching thinning of the chemically strengthened glass after cleaning in step S3 is 50 μm.
实施例2Example 2
DT-STAR材质激光切割镜片蚀刻液按重量份数计,其制备原料包括:30份的硫酸溶液、10份的氢氟酸溶液和60份的水,如表1所示。The DT-STAR material laser cutting lens etching solution is calculated in parts by weight, and its preparation materials include: 30 parts of sulfuric acid solution, 10 parts of hydrofluoric acid solution and 60 parts of water, as shown in Table 1.
其中,化学强化玻璃的厚度为0.5mm,所述的化学强化玻璃的硬度为摩氏为7,所述的化学强化玻璃的熔点为2000℃,所述的化学强化玻璃的透光率为90%,所述的化学强化玻璃的密度为20g/cm 3Wherein, the thickness of the chemically strengthened glass is 0.5mm, the hardness of the chemically strengthened glass is 7 Mohs, the melting point of the chemically strengthened glass is 2000°C, and the light transmittance of the chemically strengthened glass is 90% The density of the chemically strengthened glass is 20 g/cm 3 .
其中,硫酸溶液中含有的硫酸分子的重量分数为75wt%。Wherein, the weight fraction of sulfuric acid molecules contained in the sulfuric acid solution is 75 wt%.
其中,氢氟酸溶液中含有的氢氟酸分子的重量分数为10wt%,所述的氢氟酸溶液中含有的氯化物的含量为0wt%,所述的氢氟酸溶液中含有的硫酸盐的含量为0wt%。Wherein, the weight fraction of hydrofluoric acid molecules contained in the hydrofluoric acid solution is 10wt%, the content of chlorides contained in the hydrofluoric acid solution is 0wt%, and the sulfates contained in the hydrofluoric acid solution The content is 0wt%.
其中,硫酸溶液和氢氟酸溶液的重量之比为3:1。Among them, the weight ratio of sulfuric acid solution and hydrofluoric acid solution is 3:1.
一种使用上述的刻蚀化学强化玻璃用激光酸液进行激光刻蚀的方法包括以下步骤:A method for laser etching using the above-mentioned laser acid for etching chemically strengthened glass includes the following steps:
S1分别取经预处理的化学强化玻璃,于其外表面上涂覆光刻胶,并将所述光刻胶图形化;S1 respectively take pretreated chemically strengthened glass, coat photoresist on its outer surface, and pattern the photoresist;
S2取经步骤S1处理的化学强化玻璃,置于所述的酸液中进行湿法刻蚀处理;S2 takes the chemically strengthened glass processed in step S1, and places it in the acid solution for wet etching treatment;
S3取经步骤S2处理的化学强化玻璃清洗处理。S3 takes the chemically strengthened glass cleaning treatment processed in step S2.
在本发明的有的实施例中,所述的步骤S1中化学强化玻璃的预处理的方法为:取化学强化玻璃,依次经第一次预清洗、第一次抛光、第二次预清洗、第二次抛光、第三次预清洗、第四次预清洗和水洗。In some embodiments of the present invention, the method for pretreatment of the chemically strengthened glass in step S1 is: take the chemically strengthened glass and sequentially perform the first pre-cleaning, the first polishing, the second pre-cleaning, The second polishing, the third pre-cleaning, the fourth pre-cleaning and washing.
其中,步骤S3中清洗后的化学强化玻璃的蚀刻减薄量40μm。Among them, the etching thinning of the chemically strengthened glass after cleaning in step S3 is 40 μm.
实施例3Example 3
DT-STAR材质激光切割镜片蚀刻液按重量份数计,其制备原料包括:35份的硫酸溶液、12份的氢氟酸溶液和55份的水,如表1所示。The DT-STAR material laser cutting lens etching solution is calculated in parts by weight, and its preparation raw materials include: 35 parts of sulfuric acid solution, 12 parts of hydrofluoric acid solution and 55 parts of water, as shown in Table 1.
其中,化学强化玻璃的厚度为0.6mm,所述的化学强化玻璃的硬度为摩氏为9,所述的化学强化玻璃的熔点为3000℃,所述的化学强化玻璃的透光率为100%,所述的化学强化玻璃的密度为30g/cm 3Wherein, the thickness of the chemically strengthened glass is 0.6mm, the hardness of the chemically strengthened glass is 9 Mohs, the melting point of the chemically strengthened glass is 3000°C, and the light transmittance of the chemically strengthened glass is 100% The density of the chemically strengthened glass is 30 g/cm 3 .
其中,硫酸溶液中含有的硫酸分子的重量分数为98.3wt%。Among them, the weight fraction of sulfuric acid molecules contained in the sulfuric acid solution is 98.3% by weight.
其中,氢氟酸溶液中含有的氢氟酸分子的重量分数为40wt%,所述的氢氟酸溶液中含有的氯化物的含量为0.001wt%,所述的氢氟酸溶液中含有的硫酸盐的含量为0.002wt%。Wherein, the weight fraction of hydrofluoric acid molecules contained in the hydrofluoric acid solution is 40% by weight, the chloride content contained in the hydrofluoric acid solution is 0.001% by weight, and the sulfuric acid contained in the hydrofluoric acid solution is 0.001% by weight. The salt content is 0.002wt%.
其中,硫酸溶液和氢氟酸溶液的重量之比为2.9:1。Among them, the weight ratio of sulfuric acid solution and hydrofluoric acid solution is 2.9:1.
一种使用上述的刻蚀化学强化玻璃用激光酸液进行激光刻蚀的方法包括以下步骤:A method for laser etching using the above-mentioned laser acid for etching chemically strengthened glass includes the following steps:
S1分别取经预处理的化学强化玻璃,于其外表面上涂覆光刻胶,并将所述 光刻胶图形化;S1 respectively take pretreated chemically strengthened glass, coat photoresist on its outer surface, and pattern the photoresist;
S2取经步骤S1处理的化学强化玻璃,置于所述的酸液中进行湿法刻蚀处理;S2 takes the chemically strengthened glass processed in step S1, and places it in the acid solution for wet etching treatment;
S3取经步骤S2处理的化学强化玻璃清洗处理。S3 takes the chemically strengthened glass cleaning treatment processed in step S2.
在本发明的有的实施例中,所述的步骤S1中化学强化玻璃的预处理的方法为:取化学强化玻璃,依次经第一次预清洗、第一次抛光、第二次预清洗、第二次抛光、第三次预清洗、第四次预清洗和水洗。In some embodiments of the present invention, the method for pretreatment of the chemically strengthened glass in step S1 is: take the chemically strengthened glass and sequentially perform the first pre-cleaning, the first polishing, the second pre-cleaning, The second polishing, the third pre-cleaning, the fourth pre-cleaning and washing.
其中,步骤S3中清洗后的化学强化玻璃的蚀刻减薄量60μm。Among them, the etching thinning amount of the chemically strengthened glass after cleaning in step S3 is 60 μm.
对比例1Comparative example 1
对比例1中酸液按重量份数计,其配方包括:32份的硫酸、11份的氢氟酸、23份的盐酸和水为35份,其他操作跟实施例1相同,如表1所示。The acid solution in Comparative Example 1 is calculated in parts by weight, and its formula includes: 32 parts of sulfuric acid, 11 parts of hydrofluoric acid, 23 parts of hydrochloric acid, and 35 parts of water. The other operations are the same as those of Example 1, as shown in Table 1. Show.
对比例2Comparative example 2
对比例1中酸液按重量份数计,其配方包括:33份的硫酸、11份的氢氟酸、17份的盐酸和水为42份,其他操作跟实施例1相同,如表1所示。The acid solution in Comparative Example 1 is calculated in parts by weight, and its formula includes: 33 parts of sulfuric acid, 11 parts of hydrofluoric acid, 17 parts of hydrochloric acid, and 42 parts of water. The other operations are the same as in Example 1, as shown in Table 1. Show.
对比例3Comparative example 3
对比例1中酸液按重量份数计,其配方包括:32份的硫酸、11份的氢氟酸、12份的盐酸和水为48份,其他操作跟实施例2相同,如表1所示。The acid solution in Comparative Example 1 is calculated in parts by weight, and its formula includes: 32 parts of sulfuric acid, 11 parts of hydrofluoric acid, 12 parts of hydrochloric acid, and 48 parts of water. The other operations are the same as in Example 2, as shown in Table 1. Show.
对比例4Comparative example 4
对比例1中酸液按重量份数计,其配方包括:33份的硫酸、11份的氢氟酸、8份的盐酸和水为52份,其他操作跟实施例3相同,如表1所示。The acid solution in Comparative Example 1 is calculated in parts by weight, and its formula includes: 33 parts of sulfuric acid, 11 parts of hydrofluoric acid, 8 parts of hydrochloric acid, and 52 parts of water. The other operations are the same as in Example 3, as shown in Table 1. Show.
对比例5Comparative example 5
对比例1中酸液按重量份数计,其配方包括:32份的硫酸、11份的氢氟酸、5份的盐酸和水为57份,其他操作跟实施例2相同,如表1所示。The acid solution in Comparative Example 1 is calculated in parts by weight, and its formula includes: 32 parts of sulfuric acid, 11 parts of hydrofluoric acid, 5 parts of hydrochloric acid, and 57 parts of water. The other operations are the same as in Example 2, as shown in Table 1. Show.
表1Table 1
Figure PCTCN2019123277-appb-000001
Figure PCTCN2019123277-appb-000001
最后应当说明的是,以上实施例仅用以说明本发明的技术方案,而非对本发明保护范围的限制,尽管参照较佳实施例对本发明作了详细地说明,本领域的普通技术人员应当理解,可以对本发明的技术方案进行修改或者等同替换,而不脱离本发明技术方案的实质和范围。Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the scope of protection of the present invention. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand The technical solution of the present invention can be modified or equivalently replaced without departing from the essence and scope of the technical solution of the present invention.

Claims (8)

  1. DT-STAR材质激光切割镜片蚀刻液,其特征在于:所述的化学强化玻璃用激光酸液按重量份数计,其制备原料包括:30~35份的硫酸溶液、10~12份的氢氟酸溶液和55~60份的水。The DT-STAR material laser cutting lens etching solution is characterized in that the laser acid solution for chemically strengthened glass is calculated in parts by weight, and its preparation raw materials include: 30 to 35 parts of sulfuric acid solution, 10 to 12 parts of hydrogen fluoride Acid solution and 55-60 parts of water.
  2. 根据权利要求1所述的DT-STAR材质激光切割镜片蚀刻液,其特征在于:所述的化学强化玻璃的厚度为0.5~0.6mm,所述的化学强化玻璃的硬度为摩氏为7~9,所述的化学强化玻璃的熔点为2000~3000℃,所述的化学强化玻璃的透光率为90~100%,所述的化学强化玻璃的密度为20~30g/cm 3The DT-STAR material laser cutting lens etching solution according to claim 1, wherein the thickness of the chemically strengthened glass is 0.5 to 0.6 mm, and the hardness of the chemically strengthened glass is 7 to 9 on the Mohs scale. The melting point of the chemically strengthened glass is 2000-3000°C, the light transmittance of the chemically strengthened glass is 90-100%, and the density of the chemically strengthened glass is 20-30 g/cm 3 .
  3. 根据权利要求1所述的DT-STAR材质激光切割镜片蚀刻液,其特征在于:所述的硫酸溶液中含有的硫酸分子的重量分数为75~98.3wt%。The DT-STAR material laser cutting lens etching solution according to claim 1, wherein the weight fraction of sulfuric acid molecules contained in the sulfuric acid solution is 75-98.3 wt%.
  4. 根据权利要求1所述的DT-STAR材质激光切割镜片蚀刻液,其特征在于:所述的氢氟酸溶液中含有的氢氟酸分子的重量分数为10~40wt%,所述的氢氟酸溶液中含有的氯化物的含量为0~0.001wt%,所述的氢氟酸溶液中含有的硫酸盐的含量为0~0.002wt%。The DT-STAR material laser cutting lens etching solution according to claim 1, wherein the weight fraction of hydrofluoric acid molecules contained in the hydrofluoric acid solution is 10-40% by weight, and the hydrofluoric acid The content of the chloride contained in the solution is 0-0.001 wt%, and the content of the sulfate contained in the hydrofluoric acid solution is 0-0.002 wt%.
  5. 根据权利要求1所述的DT-STAR材质激光切割镜片蚀刻液,其特征在于:所述的硫酸溶液和氢氟酸溶液的重量之比为2.5~3:1。The DT-STAR material laser cutting lens etching solution according to claim 1, wherein the weight ratio of the sulfuric acid solution and the hydrofluoric acid solution is 2.5-3:1.
  6. 一种使用权利要求1所述的DT-STAR材质激光切割镜片蚀刻液进行激光刻蚀的方法,其特征在于:所述的激光刻蚀方法包括以下步骤:A method for laser etching using the DT-STAR material laser cutting lens etching solution of claim 1, wherein the laser etching method comprises the following steps:
    S1分别取经预处理的化学强化玻璃,于其外表面上涂覆光刻胶,并将所述光刻胶图形化;S1 respectively take pretreated chemically strengthened glass, coat photoresist on its outer surface, and pattern the photoresist;
    S2取经步骤S1处理的化学强化玻璃,置于所述的酸液中进行湿法刻蚀处理;S2 takes the chemically strengthened glass processed in step S1, and places it in the acid solution for wet etching treatment;
    S3取经步骤S2处理的化学强化玻璃清洗处理。S3 takes the chemically strengthened glass cleaning treatment processed in step S2.
  7. 根据权利要求6所述的DT-STAR材质激光切割镜片蚀刻液的使用方法,其特征在于:所述的步骤S1中化学强化玻璃的预处理的方法为:取化学强化玻璃,依次经第一次预清洗、第一次抛光、第二次预清洗、第二次抛光、第三次预清洗、第四次预清洗和水洗。The method of using DT-STAR material laser cutting lens etching solution according to claim 6, characterized in that: the pretreatment method of chemically strengthened glass in step S1 is: take chemically strengthened glass and sequentially pass through the first Pre-cleaning, first polishing, second pre-cleaning, second polishing, third pre-cleaning, fourth pre-cleaning and water washing.
  8. 根据权利要求6所述的DT-STAR材质激光切割镜片蚀刻液的使用方法,其特征在于:所述的步骤S3中清洗后的化学强化玻璃的蚀刻减薄量40~60μm。The method of using DT-STAR material laser cutting lens etching solution according to claim 6, characterized in that the chemically strengthened glass after cleaning in the step S3 has an etching thinning amount of 40-60 μm.
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