WO2021082180A1 - Dt-star material laser cutting lens etchant and use method therefor - Google Patents
Dt-star material laser cutting lens etchant and use method therefor Download PDFInfo
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- WO2021082180A1 WO2021082180A1 PCT/CN2019/123277 CN2019123277W WO2021082180A1 WO 2021082180 A1 WO2021082180 A1 WO 2021082180A1 CN 2019123277 W CN2019123277 W CN 2019123277W WO 2021082180 A1 WO2021082180 A1 WO 2021082180A1
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- Prior art keywords
- strengthened glass
- chemically strengthened
- acid solution
- parts
- laser cutting
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Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
- C03C15/02—Surface treatment of glass, not in the form of fibres or filaments, by etching for making a smooth surface
Definitions
- the invention belongs to the technical field of glass etching, and particularly relates to a DT-STAR material laser cutting lens etching solution and a use method thereof.
- the thickness of the DT-STAR glass material is 0.55mm, and the etching reduction is 50um.
- the etching process is relatively complicated, the production cycle is long, and the yield is low, which requires further improvement.
- the present invention discloses a DT-STAR material laser cutting lens etching solution and a method of use. After the acid solution is etched, the chemically strengthened glass surface is etched without pitting and scratches, and the glass is defective. The rate reaches 0%, and the product quality is stable.
- the technical content of the present invention is as follows:
- the technical point of the DT-STAR material laser cutting lens etching solution of the present invention is that the laser acid solution for chemically strengthened glass is calculated in parts by weight, and its preparation raw materials include: 30-35 parts of sulfuric acid solution, 10-12 Parts of hydrofluoric acid solution and 55-60 parts of water.
- the thickness of the chemically strengthened glass is 0.5 to 0.6 mm
- the hardness of the chemically strengthened glass is 7-9 in Mohs
- the melting point of the chemically strengthened glass is 2000 -3000°C
- the light transmittance of the chemically strengthened glass is 90-100%
- the density of the chemically strengthened glass is 20-30 g/cm 3 .
- the weight fraction of sulfuric acid molecules contained in the sulfuric acid solution is 75-98.3 wt%.
- the weight fraction of hydrofluoric acid molecules contained in the hydrofluoric acid solution is 10-40 wt%, and the content of chlorides contained in the hydrofluoric acid solution is 0 to 40% by weight. 0.001wt%, the content of sulfate contained in the hydrofluoric acid solution is 0-0.002wt%.
- the weight ratio of the sulfuric acid solution and the hydrofluoric acid solution is 2.5-3:1.
- the present invention also provides a laser etching method using the above-mentioned laser acid for etching chemically strengthened glass.
- the technical point is that the laser etching method includes the following steps:
- S1 respectively take pretreated chemically strengthened glass, coat photoresist on its outer surface, and pattern the photoresist;
- step S2 takes the chemically strengthened glass processed in step S1, and places it in the acid solution for wet etching treatment;
- S3 takes the chemically strengthened glass cleaning treatment processed in step S2.
- the method for pretreatment of the chemically strengthened glass in step S1 is: take the chemically strengthened glass and sequentially perform the first pre-cleaning, the first polishing, the second pre-cleaning, The second polishing, the third pre-cleaning, the fourth pre-cleaning and washing.
- the etching thinning of the chemically strengthened glass after cleaning in the step S3 is 40-60 ⁇ m.
- the DT-STAR material laser cutting lens etching solution of the present invention is based on parts by weight, including 30 to 35 parts of sulfuric acid solution, 10 to 12 parts of hydrofluoric acid solution and 55 to 60 parts of water, prepared by using the present invention
- the quality temperature of chemically strengthened glass products, the surface of chemically strengthened glass has no large area pits and scratches, the defect rate is 0%, the preparation is simple, and no polishing treatment is required.
- the DT-STAR material laser cutting lens etching solution is calculated in parts by weight, and its preparation raw materials include: 32 parts of sulfuric acid solution, 11 parts of hydrofluoric acid solution and 57 parts of water, as shown in Table 1.
- the thickness of the chemically strengthened glass is 0.55mm
- the hardness of the chemically strengthened glass is 8 Mohs
- the melting point of the chemically strengthened glass is 2500°C
- the light transmittance of the chemically strengthened glass is 95%
- the density of the chemically strengthened glass is 25 g/cm 3 .
- the weight fraction of sulfuric acid molecules contained in the sulfuric acid solution is 80 wt%.
- the weight fraction of hydrofluoric acid molecules contained in the hydrofluoric acid solution is 25wt%
- the content of chlorides contained in the hydrofluoric acid solution is 0.0005wt%
- the sulfuric acid contained in the hydrofluoric acid solution The salt content is 0.001% by weight.
- the weight ratio of sulfuric acid solution and hydrofluoric acid solution is 2.9:1.
- a method for laser etching using the above-mentioned laser acid for etching chemically strengthened glass includes the following steps:
- S1 respectively take pretreated chemically strengthened glass, coat photoresist on its outer surface, and pattern the photoresist;
- step S2 takes the chemically strengthened glass processed in step S1, and places it in the acid solution for wet etching treatment;
- S3 takes the chemically strengthened glass cleaning treatment processed in step S2.
- the method for pretreatment of the chemically strengthened glass in step S1 is: take the chemically strengthened glass and sequentially perform the first pre-cleaning, the first polishing, the second pre-cleaning, The second polishing, the third pre-cleaning, the fourth pre-cleaning and washing.
- the etching thinning of the chemically strengthened glass after cleaning in step S3 is 50 ⁇ m.
- the DT-STAR material laser cutting lens etching solution is calculated in parts by weight, and its preparation materials include: 30 parts of sulfuric acid solution, 10 parts of hydrofluoric acid solution and 60 parts of water, as shown in Table 1.
- the thickness of the chemically strengthened glass is 0.5mm
- the hardness of the chemically strengthened glass is 7 Mohs
- the melting point of the chemically strengthened glass is 2000°C
- the light transmittance of the chemically strengthened glass is 90%
- the density of the chemically strengthened glass is 20 g/cm 3 .
- the weight fraction of sulfuric acid molecules contained in the sulfuric acid solution is 75 wt%.
- the weight fraction of hydrofluoric acid molecules contained in the hydrofluoric acid solution is 10wt%
- the content of chlorides contained in the hydrofluoric acid solution is 0wt%
- the sulfates contained in the hydrofluoric acid solution The content is 0wt%.
- the weight ratio of sulfuric acid solution and hydrofluoric acid solution is 3:1.
- a method for laser etching using the above-mentioned laser acid for etching chemically strengthened glass includes the following steps:
- S1 respectively take pretreated chemically strengthened glass, coat photoresist on its outer surface, and pattern the photoresist;
- step S2 takes the chemically strengthened glass processed in step S1, and places it in the acid solution for wet etching treatment;
- S3 takes the chemically strengthened glass cleaning treatment processed in step S2.
- the method for pretreatment of the chemically strengthened glass in step S1 is: take the chemically strengthened glass and sequentially perform the first pre-cleaning, the first polishing, the second pre-cleaning, The second polishing, the third pre-cleaning, the fourth pre-cleaning and washing.
- the etching thinning of the chemically strengthened glass after cleaning in step S3 is 40 ⁇ m.
- the DT-STAR material laser cutting lens etching solution is calculated in parts by weight, and its preparation raw materials include: 35 parts of sulfuric acid solution, 12 parts of hydrofluoric acid solution and 55 parts of water, as shown in Table 1.
- the thickness of the chemically strengthened glass is 0.6mm
- the hardness of the chemically strengthened glass is 9 Mohs
- the melting point of the chemically strengthened glass is 3000°C
- the light transmittance of the chemically strengthened glass is 100%
- the density of the chemically strengthened glass is 30 g/cm 3 .
- the weight fraction of sulfuric acid molecules contained in the sulfuric acid solution is 98.3% by weight.
- the weight fraction of hydrofluoric acid molecules contained in the hydrofluoric acid solution is 40% by weight
- the chloride content contained in the hydrofluoric acid solution is 0.001% by weight
- the sulfuric acid contained in the hydrofluoric acid solution is 0.001% by weight.
- the salt content is 0.002wt%.
- the weight ratio of sulfuric acid solution and hydrofluoric acid solution is 2.9:1.
- a method for laser etching using the above-mentioned laser acid for etching chemically strengthened glass includes the following steps:
- S1 respectively take pretreated chemically strengthened glass, coat photoresist on its outer surface, and pattern the photoresist;
- step S2 takes the chemically strengthened glass processed in step S1, and places it in the acid solution for wet etching treatment;
- S3 takes the chemically strengthened glass cleaning treatment processed in step S2.
- the method for pretreatment of the chemically strengthened glass in step S1 is: take the chemically strengthened glass and sequentially perform the first pre-cleaning, the first polishing, the second pre-cleaning, The second polishing, the third pre-cleaning, the fourth pre-cleaning and washing.
- the etching thinning amount of the chemically strengthened glass after cleaning in step S3 is 60 ⁇ m.
- the acid solution in Comparative Example 1 is calculated in parts by weight, and its formula includes: 32 parts of sulfuric acid, 11 parts of hydrofluoric acid, 23 parts of hydrochloric acid, and 35 parts of water.
- the other operations are the same as those of Example 1, as shown in Table 1. Show.
- the acid solution in Comparative Example 1 is calculated in parts by weight, and its formula includes: 33 parts of sulfuric acid, 11 parts of hydrofluoric acid, 17 parts of hydrochloric acid, and 42 parts of water.
- the other operations are the same as in Example 1, as shown in Table 1. Show.
- the acid solution in Comparative Example 1 is calculated in parts by weight, and its formula includes: 32 parts of sulfuric acid, 11 parts of hydrofluoric acid, 12 parts of hydrochloric acid, and 48 parts of water.
- the other operations are the same as in Example 2, as shown in Table 1. Show.
- the acid solution in Comparative Example 1 is calculated in parts by weight, and its formula includes: 33 parts of sulfuric acid, 11 parts of hydrofluoric acid, 8 parts of hydrochloric acid, and 52 parts of water.
- the other operations are the same as in Example 3, as shown in Table 1. Show.
- the acid solution in Comparative Example 1 is calculated in parts by weight, and its formula includes: 32 parts of sulfuric acid, 11 parts of hydrofluoric acid, 5 parts of hydrochloric acid, and 57 parts of water.
- the other operations are the same as in Example 2, as shown in Table 1. Show.
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- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
Description
Claims (8)
- DT-STAR材质激光切割镜片蚀刻液,其特征在于:所述的化学强化玻璃用激光酸液按重量份数计,其制备原料包括:30~35份的硫酸溶液、10~12份的氢氟酸溶液和55~60份的水。The DT-STAR material laser cutting lens etching solution is characterized in that the laser acid solution for chemically strengthened glass is calculated in parts by weight, and its preparation raw materials include: 30 to 35 parts of sulfuric acid solution, 10 to 12 parts of hydrogen fluoride Acid solution and 55-60 parts of water.
- 根据权利要求1所述的DT-STAR材质激光切割镜片蚀刻液,其特征在于:所述的化学强化玻璃的厚度为0.5~0.6mm,所述的化学强化玻璃的硬度为摩氏为7~9,所述的化学强化玻璃的熔点为2000~3000℃,所述的化学强化玻璃的透光率为90~100%,所述的化学强化玻璃的密度为20~30g/cm 3。 The DT-STAR material laser cutting lens etching solution according to claim 1, wherein the thickness of the chemically strengthened glass is 0.5 to 0.6 mm, and the hardness of the chemically strengthened glass is 7 to 9 on the Mohs scale. The melting point of the chemically strengthened glass is 2000-3000°C, the light transmittance of the chemically strengthened glass is 90-100%, and the density of the chemically strengthened glass is 20-30 g/cm 3 .
- 根据权利要求1所述的DT-STAR材质激光切割镜片蚀刻液,其特征在于:所述的硫酸溶液中含有的硫酸分子的重量分数为75~98.3wt%。The DT-STAR material laser cutting lens etching solution according to claim 1, wherein the weight fraction of sulfuric acid molecules contained in the sulfuric acid solution is 75-98.3 wt%.
- 根据权利要求1所述的DT-STAR材质激光切割镜片蚀刻液,其特征在于:所述的氢氟酸溶液中含有的氢氟酸分子的重量分数为10~40wt%,所述的氢氟酸溶液中含有的氯化物的含量为0~0.001wt%,所述的氢氟酸溶液中含有的硫酸盐的含量为0~0.002wt%。The DT-STAR material laser cutting lens etching solution according to claim 1, wherein the weight fraction of hydrofluoric acid molecules contained in the hydrofluoric acid solution is 10-40% by weight, and the hydrofluoric acid The content of the chloride contained in the solution is 0-0.001 wt%, and the content of the sulfate contained in the hydrofluoric acid solution is 0-0.002 wt%.
- 根据权利要求1所述的DT-STAR材质激光切割镜片蚀刻液,其特征在于:所述的硫酸溶液和氢氟酸溶液的重量之比为2.5~3:1。The DT-STAR material laser cutting lens etching solution according to claim 1, wherein the weight ratio of the sulfuric acid solution and the hydrofluoric acid solution is 2.5-3:1.
- 一种使用权利要求1所述的DT-STAR材质激光切割镜片蚀刻液进行激光刻蚀的方法,其特征在于:所述的激光刻蚀方法包括以下步骤:A method for laser etching using the DT-STAR material laser cutting lens etching solution of claim 1, wherein the laser etching method comprises the following steps:S1分别取经预处理的化学强化玻璃,于其外表面上涂覆光刻胶,并将所述光刻胶图形化;S1 respectively take pretreated chemically strengthened glass, coat photoresist on its outer surface, and pattern the photoresist;S2取经步骤S1处理的化学强化玻璃,置于所述的酸液中进行湿法刻蚀处理;S2 takes the chemically strengthened glass processed in step S1, and places it in the acid solution for wet etching treatment;S3取经步骤S2处理的化学强化玻璃清洗处理。S3 takes the chemically strengthened glass cleaning treatment processed in step S2.
- 根据权利要求6所述的DT-STAR材质激光切割镜片蚀刻液的使用方法,其特征在于:所述的步骤S1中化学强化玻璃的预处理的方法为:取化学强化玻璃,依次经第一次预清洗、第一次抛光、第二次预清洗、第二次抛光、第三次预清洗、第四次预清洗和水洗。The method of using DT-STAR material laser cutting lens etching solution according to claim 6, characterized in that: the pretreatment method of chemically strengthened glass in step S1 is: take chemically strengthened glass and sequentially pass through the first Pre-cleaning, first polishing, second pre-cleaning, second polishing, third pre-cleaning, fourth pre-cleaning and water washing.
- 根据权利要求6所述的DT-STAR材质激光切割镜片蚀刻液的使用方法,其特征在于:所述的步骤S3中清洗后的化学强化玻璃的蚀刻减薄量40~60μm。The method of using DT-STAR material laser cutting lens etching solution according to claim 6, characterized in that the chemically strengthened glass after cleaning in the step S3 has an etching thinning amount of 40-60 μm.
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CN103265179A (en) * | 2013-05-27 | 2013-08-28 | 苏州扬清芯片科技有限公司 | Manufacture method of glass micro-channel |
CN103803805A (en) * | 2013-12-30 | 2014-05-21 | 江西沃格光电股份有限公司 | Mixed acid liquor for secondary reinforcement of OGS glass and secondary reinforcement method for OGS glass |
JP2019108243A (en) * | 2017-12-19 | 2019-07-04 | 凸版印刷株式会社 | Open hole formation method and manufacturing method of glass substrate having open hole |
CN110455798A (en) * | 2019-08-19 | 2019-11-15 | 四川旭虹光电科技有限公司 | The test method of devitrification of glass temperature |
CN110803869A (en) * | 2019-11-25 | 2020-02-18 | 苏州博洋化学股份有限公司 | Glass thinning liquid |
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