WO2021081882A1 - Reaming etching solution, etching process and electrode foil - Google Patents

Reaming etching solution, etching process and electrode foil Download PDF

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Publication number
WO2021081882A1
WO2021081882A1 PCT/CN2019/114664 CN2019114664W WO2021081882A1 WO 2021081882 A1 WO2021081882 A1 WO 2021081882A1 CN 2019114664 W CN2019114664 W CN 2019114664W WO 2021081882 A1 WO2021081882 A1 WO 2021081882A1
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Prior art keywords
gallium
liquid metal
based liquid
solution
hole
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PCT/CN2019/114664
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French (fr)
Chinese (zh)
Inventor
余英凤
何凤荣
邓利松
朱荣贵
向云刚
温益凡
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东莞东阳光科研发有限公司
乳源瑶族自治县东阳光化成箔有限公司
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Priority to CN201980101239.9A priority Critical patent/CN114600210B/en
Priority to PCT/CN2019/114664 priority patent/WO2021081882A1/en
Publication of WO2021081882A1 publication Critical patent/WO2021081882A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G9/00Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
    • H01G9/004Details
    • H01G9/04Electrodes or formation of dielectric layers thereon
    • H01G9/048Electrodes or formation of dielectric layers thereon characterised by their structure
    • H01G9/055Etched foil electrodes

Definitions

  • the invention belongs to the technical field of electrode materials for capacitors, and specifically relates to a hole-expanding corrosion solution, a corrosion process and an electrode foil prepared by the corrosion process.
  • the anode foil for aluminum electrolytic capacitors generally generates a large number of vertical tunnel holes on its surface through electrochemical corrosion to increase its effective surface area, thereby increasing the capacity of the electrode foil; then a dense aluminum oxide film is formed on the surface of the corrosion hole through chemical conversion.
  • the voltage resistance of aluminum electrolytic capacitors is determined by the thickness of the oxide film, but its capacity, tensile strength and bending performance depend on the corrosion technology.
  • the conventional corrosion foil manufacturing process mainly includes pre-treatment, primary pore corrosion, secondary pore expansion corrosion, post-treatment and other processes.
  • the primary pores are carried out in the sulfuric acid-hydrochloric acid mixture to form high-density, uniform and small tunnel holes.
  • the secondary hole expansion is generally carried out in nitric acid solution.
  • the diameter of the small tunnel hole is enlarged to a degree larger than the thickness of the high-pressure oxide film to obtain a high specific volume. Corrosion determines the density of the tunnel hole, the uniformity of the hole distribution and The depth of the hole, etc.
  • a large number of studies have found that the tunnel hole in the aluminum foil is tapered after the hole is formed. When the hole is expanded, the tunnel hole will continue to be tapered.
  • the diameter of a part of the tunnel hole is always smaller than the thickness of the high-pressure oxide film. Blocking causes an increase in useless holes and limits the increase in capacity.
  • the hydrogen ions in the pores interact with aluminum metal to continue to consume, and a large amount of aluminum ions are enriched inside the pores, making the external hydrogen ion solution unable to enter quickly, resulting in insufficient reaming depth or horizontal branch holes. The capacity and bending performance of the corroded foil are reduced.
  • the present invention addresses the problems of insufficient reaming depth, too many branch holes or small holes in the reaming stage of the existing corrosion process, which leads to the reduction of the capacity of the corroded foil and the deterioration of the bending performance, and provides a reaming etching solution and Corrosion process.
  • the first object of the present invention is to provide a hole-reaming etching solution, the etching solution comprising a gallium-based liquid metal nanoparticle dispersion liquid, the gallium-based liquid metal nanoparticle dispersion liquid is composed of gallium-based liquid metal in polystyrene sulfonate Dispersed in a polymer solution of acid and sodium polystyrene sulfonate, wherein the mass fraction of the gallium-based liquid metal in the gallium-based liquid metal nanoparticle dispersion is 0.3-1.5%.
  • the mass ratio of the polystyrene sulfonic acid and sodium polystyrene sulfonate is 20:80-50:50.
  • the etching solution further includes a nitric acid solution with a concentration of 5-20 wt%, and the mass of the gallium-based liquid metal nanoparticle dispersion is 0.1-5% of the mass of the nitric acid solution.
  • the gallium-based liquid metal includes gallium and indium, and the mass ratio of gallium to indium is 60-75:40-25.
  • the second object of the present invention is to provide a method for preparing the above-mentioned hole expanding etching solution, which includes:
  • the gallium-based liquid metal is added dropwise to the above-mentioned polymer solution, mixed and processed to obtain a liquid metal nanoparticle dispersion, wherein the mass fraction of the gallium-based liquid metal in the gallium-based liquid metal nanoparticle dispersion is 0.3 -1.5%;
  • the above-mentioned gallium-based liquid metal nanoparticle dispersion is added dropwise to a nitric acid solution with a concentration of 5-20wt%, and mixed treatment to obtain a hole-expanding etching solution, wherein the mass of the gallium-based liquid metal nanoparticle dispersion is equal to that of the nitric acid solution. 0.1%-5%.
  • the mass ratio of the polystyrene sulfonic acid and sodium polystyrene sulfonate is 20:80-50:50.
  • the gallium-based liquid metal includes gallium and indium, and the mass ratio of gallium to indium is 60-75:40-25.
  • the gallium-based liquid metal is coated with a polymer solution first, and then mixed with a nitric acid solution.
  • a polymer protective layer is formed on the surface, and then prepared into nano particles, which can stably exist in the aqueous solution, so that it can be used in an aqueous environment, and the pore expansion corrosion is more uniform.
  • the gallium-based liquid metal is added dropwise to the above-mentioned polymer solution and mixed by stirring and ultrasonic vibration, the stirring speed is 800-2000 rpm, and the ultrasonic vibration frequency is 20-40 KHz.
  • the gallium-based liquid metal nanoparticle dispersion is added dropwise to a nitric acid solution with a concentration of 5-20 wt%, and mixed by stirring and ultrasonic vibration, the stirring speed is 2000-4000 rpm, and the ultrasonic vibration frequency is 20 -40KHz.
  • the third object of the present invention is to provide an electrode foil etching process that uses the above-mentioned hole-expanding etching solution to perform hole-expanding etching.
  • gallium-based liquid metal nanoparticles enter the corroded hole to efficiently corrode the hole wall and the aluminum matrix at the bottom of the hole. Because of its phagocytosis of aluminum, it reduces the expansion of the tapered hole and the enrichment of aluminum ions. And the consumption of hydrogen ions accelerate the rapid entry of hydrogen ions into the holes, increase the depth of the hole expansion, reduce the generation of branch holes or small holes, improve the corrosion efficiency and capacity, and improve the consistency of the corrosion foil.
  • the etching process of the electrode foil includes:
  • Drying drying the aluminum foil after the second water washing to obtain an electrode foil.
  • the temperature of washing the aluminum foil in the sodium hydroxide solution is 30-60° C., and the washing time is 15-30s; the temperature of washing in pure water is room temperature, and the time is 15-30s.
  • the conditions for the pores are: the temperature is 40-80° C., the current density is 0.5-3.0 A/cm 2 , and the time for pores is 5-20s.
  • the temperature of the one-time washing is room temperature, and the time is 15-30s.
  • the conditions for the hole expansion are: the temperature is 20-50° C., the current density is 0.1-1 A/cm 2 , and the hole expansion time is 20-50 s.
  • the temperature of the second water washing is room temperature, and the time is 15-30s.
  • the drying temperature is 100-300°C, and the time is 2-10 min.
  • the present invention provides electrode foils prepared by the etching process described in the present invention.
  • the present invention also provides an aluminum electrolytic capacitor including the above-mentioned electrode foil.
  • the present invention has the following technical effects:
  • gallium-based liquid metal is introduced in the process of hole expansion and corrosion.
  • the gallium-based liquid metal is highly corrosive to aluminum and has high corrosion efficiency.
  • gallium-based liquid metal is coated to form a polymer protective layer on its surface, and then prepared into nano-particles, which stably exist in an aqueous solution, so that they can be used in an aqueous environment and expand the hole. Corrosion is more uniform.
  • the gallium-based liquid metal nanoparticles enter the corroded hole to efficiently corrode the hole wall and the aluminum matrix at the bottom of the hole. Because of its corrosive effect on aluminum, it reduces the expansion and expansion of the tapered hole.
  • the enrichment of aluminum ions and the consumption of hydrogen ions accelerate the rapid entry of hydrogen ions into the holes, increase the depth of hole expansion, reduce the generation of branch holes or small holes, improve the corrosion efficiency and capacity, and improve the consistency of the corroded foil.
  • the electrode foil (etched foil) prepared by the etching process of the present invention has an electrostatic capacity increased by at least about 7%, bending at least increased by about 35%, and a reduction in corrosion thinning 2 ⁇ m, which improves the utilization rate of aluminum foil.
  • FIG. 1 Scanning electron microscope (SEM) morphology of the cross-section of the corroded foil prepared in Example 1 of the present invention
  • FIG. 2 Scanning electron microscope (SEM) morphology of the cross-section of the corroded foil prepared in Comparative Example 1 of the present invention.
  • the preparation of the hole reaming etching solution includes:
  • gallium-based liquid metal nanoparticle dispersion is added dropwise to a nitric acid solution with a concentration of 5-20wt%, and mixed treatment to obtain a pore-reaming etching solution, wherein the quality of the gallium-based liquid metal nanoparticle dispersion is a nitric acid solution 0.1-5% of the quality.
  • the gallium-based liquid metal includes gallium and indium, and the mass ratio of gallium to indium is 60-75:40-25.
  • Examples of the mass ratio of gallium and indium include but are not limited to: 60:40, 61:39, 62:38, 63:37, 64:36, 65:35, 66:34, 67:33, 68:32 , 69:31, 70:30, 71:39, 72:28, 73:27, 74:26, 75:25.
  • a polymer solution of polystyrene sulfonic acid and sodium polystyrene sulfonate is used to coat the gallium-based liquid metal to prepare a gallium-based liquid metal nanoparticle dispersion, and the polystyrene sulfonic acid and polystyrene are limited.
  • the mass ratio of sodium ethylene sulfonate is 20:80-50:50.
  • polystyrene sulfonic acid is easy to form a film on the surface of gallium-based liquid metal and has a slow dissolution rate in aqueous solution
  • polystyrene sulfonate has a slower film-forming ability on the surface of gallium-based liquid metal, but it is in an aqueous solution.
  • the dissolution rate is relatively fast.
  • the speed of polymer film formation on the surface of gallium-based liquid metal can be controlled by the mixing and compounding of polystyrene sulfonic acid and sodium polystyrene sulfonate, thereby regulating the size of gallium-based liquid metal nanoparticles; while ensuring gallium
  • the surface polymer film will not dissolve quickly after the liquid metal nanoparticles are added to the pore expansion corrosion. After they enter the corrosion holes, the surface polymer film can dissolve as soon as possible to release the gallium-based liquid metal nanoparticles.
  • the mass ratio of the polystyrene sulfonic acid and sodium polystyrene sulfonate is 20:80-50:50.
  • Examples of the mass ratio of polystyrene sulfonic acid and sodium polystyrene sulfonate include, but are not limited to: 20:80, 25:75, 30:70, 35:65, 40:60, 45:55, 50: 50.
  • the dropping acceleration of the gallium-based liquid metal is 1-20 mL/min.
  • the dropping rate of the gallium-based liquid metal is 1-10mL/min, for example: 1mL/min, 2mL/min, 3mL/min, 4mL/min, 5mL/min, 6mL/min, 7mL/min min, 8mL/min, 9mL/min, 10mL/min.
  • the dropping rate of the gallium-based liquid metal is 10-20mL/min, for example: 10mL/min, 11mL/min, 12mL/min, 13mL/min, 14mL/min, 15mL/min, 16mL/min min, 17mL/min, 18mL/min, 19mL/min, 20mL/min.
  • the gallium-based liquid metal is added dropwise to the above-mentioned polymer solution, and mixed by stirring and ultrasonic vibration, and the stirring speed is 800-2000rpm (800rpm, 900rpm, 1000rpm, 2100rpm, 1200rpm, 1300rpm, 1400rpm, 1500rpm, 1600rpm, 1700rpm, 1800rpm, 1900rpm, 2000rpm), the frequency of the ultrasonic oscillation is 20-40KHz (20KHz, 25KHz, 30KHz, 35KHz, 40KHz).
  • the mass fraction of the gallium-based liquid metal is 0.5-1.5%, for example: 0.5%, 0.6%, 0.7%, 0.8%, 0.9%, 1.0% , 1.1%, 1.2%, 1.3%, 1.4%, 1.5%.
  • step 3 the specific processing conditions are as follows:
  • the dropping rate is 0.1-5 mL/min.
  • the dropping rate is 0.1-0.5 mL/min, for example: 0.1 mL/min, 0.2 mL/min, 0.3 mL/min, 0.4 mL/min, 0.5 mL/min.
  • other preferred ranges of the dropping rate may include: 0.5-1.0 mL/min, 1.0-2.0 mL/min, 2.0-3.0 mL/min, 3.0-4.0 mL/min, 4.0-5.0 mL/min min.
  • the gallium-based liquid metal nanoparticle dispersion is added dropwise to a nitric acid solution with a concentration of 5-20wt%, and mixed by stirring and ultrasonic vibration, and the stirring speed is 2000-4000rpm (2000rpm, 2300rpm, 2500rpm, 2800rpm, 3000rpm, 3300rpm, 3500rpm, 3800rpm, 4000rpm), the frequency of ultrasonic vibration is 20-40KHz (20KHz, 25KHz, 30KHz, 35KHz, 40KHz).
  • the added amount of the gallium-based liquid metal nanoparticle dispersion is 0.1% to 5%, that is, preferably, in the pore expanding etching solution, the mass of the gallium-based liquid metal nanoparticle dispersion is nitric acid. 0.3%-5% of the mass of the solution.
  • the mass of the gallium-based liquid metal nanoparticle dispersion is 0.3%-1% of the mass of the nitric acid solution, for example: 0.3%, 0.4%, 0.5%, 0.6%, 0.7%, 0.8%, 0.9% %,1%.
  • the mass of the gallium-based liquid metal nanoparticle dispersion is 1% to 5% of the mass of the nitric acid solution, for example: 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4 %, 4.5%, 5%.
  • the concentration of the nitric acid solution may include: 5wt%, 6wt%, 8wt%, 10wt%, 12wt%, 15wt%, 18wt%, 20wt%.
  • the method for preparing the hole-reaming etching solution includes:
  • gallium-based liquid metal nanoparticle dispersion is added dropwise to a nitric acid solution with a concentration of 5-20wt% at a rate of 0.1-5mL/min, and stirring and ultrasonic vibration are applied at a flow rate of 0.1-5mL/min, stirring The speed is 2000-4000rpm, the ultrasonic oscillation frequency is 20-40KHz, and the pore expansion etching solution is obtained, wherein the mass of the gallium-based liquid metal nanoparticle dispersion liquid is 0.1-5% of the mass of the nitric acid solution.
  • the etching process of the electrode foil includes:
  • Drying drying the aluminum foil after the second water washing to obtain an electrode foil.
  • the aluminum foil Before pore corrosion, the aluminum foil generally needs to be cleaned and pre-treated, the purpose is to remove the oil stain and oxide layer on the surface of the aluminum foil.
  • the pretreatment can be carried out in an alkaline solution or/and an acid solution.
  • the pre-processing includes:
  • the aluminum foil in 1-5g/L (for example: 1g/L, 2g/L, 3g/L, 4g/L, 5g/L) sodium hydroxide solution at 30-60°C (for example: 30°C, 35 °C, 40°C, 45°C, 50°C, 55°C, 60°C) washing for 15-30s, and then placed in pure water at room temperature for 15-30s.
  • 1-5g/L for example: 1g/L, 2g/L, 3g/L, 4g/L, 5g/L
  • sodium hydroxide solution at 30-60°C (for example: 30°C, 35 °C, 40°C, 45°C, 50°C, 55°C, 60°C) washing for 15-30s, and then placed in pure water at room temperature for 15-30s.
  • the pre-treatment is: washing the aluminum foil in a 3 g/L sodium hydroxide solution at 50° C. for 15 seconds, and then washing it in pure water at room temperature for 15 seconds.
  • the pore etching solution is a mixed solution of sulfuric acid with a concentration of 20-60 wt% and hydrochloric acid with a concentration of 1-10 wt%.
  • the concentration of sulfuric acid in the mixed solution is 20-40wt%, for example: 20wt%, 23wt%, 25wt%, 28wt%, 30wt%, 33wt%, 35wt%, 38wt%, 40wt%.
  • the concentration of sulfuric acid in the mixed solution is 40-60wt%, for example: 40wt%, 43wt%, 45wt%, 48wt%, 50wt%, 53wt%, 55wt%, 58wt%, 60wt%.
  • the concentration of hydrochloric acid in the mixed solution is 1-5 wt%, for example: 1 wt%, 2 wt%, 3 wt%, 4 wt%, 5 wt%.
  • the concentration of hydrochloric acid in the mixed solution is 5-10wt%, for example: 5wt%, 6wt%, 7wt%, 8wt%, 9wt%, 10wt%.
  • the pore etching solution is a mixed solution of sulfuric acid with a concentration of 40 wt% and hydrochloric acid with a concentration of 5 wt%.
  • the hole temperature is 40-60°C, for example: 40°C, 45°C, 50°C, 55°C, 60°C.
  • the pore temperature is 60-80°C, for example: 60°C, 65°C, 70°C, 75°C, 80°C.
  • the current density of the holes is 1-3A/cm 2 , for example: 1A/cm 2 , 1.5A/cm 2 , 1.8A/cm 2 , 2A/cm 2 , 2.5A/cm 2 , 2.8 A/cm 2 , 3A/cm 2 .
  • the time for making holes is 5-10s, for example: 5s, 6s, 7s, 8s, 9s, 10s.
  • the time for making holes is 10-20s, for example: 10s, 11s, 12s, 13s, 14s, 15s, 16s, 17s, 18s, 19s, 20s.
  • the aluminum foil after the pore treatment is placed in pure water and washed for 30 seconds at room temperature.
  • gallium-based liquid metal is used to replace part of the acid solution for corrosion to achieve the purpose of hole expansion.
  • the gallium-based liquid metal is coated, and the gallium-based liquid metal is coated with a polymer solution to obtain a gallium-based liquid metal nanoparticle dispersion. Then mix it with an acid solution to obtain a hole-expanding etching solution.
  • gallium-based liquid metal nanoparticles quickly enter the corrosion hole under the action of electric power, and efficiently corrode the hole wall and the aluminum matrix at the bottom of the hole. On the one hand, it reduces the expansion of the tapered hole and the consumption of hydrogen ions; On the one hand, unlike conventional acid corrosion, the corrosion effect of gallium-based liquid metal on aluminum is phagocytosis, which does not produce aluminum ions, reduces the concentration of aluminum ions in the solution, accelerates the rapid entry of hydrogen ions into the pores, and increases the depth of hole expansion. , Reduce the generation of branch holes or small holes, improve the corrosion efficiency and capacity, and improve the consistency of the corroded foil.
  • the pore reaming etching solution includes a gallium-based liquid metal nanoparticle dispersion
  • the gallium-based liquid metal nanoparticle dispersion is composed of a polymer of gallium-based liquid metal in polystyrene sulfonic acid and sodium polystyrene sulfonate. Dispersed in the solution, wherein the mass fraction of the gallium-based liquid metal is 0.3-1.5%.
  • the mass ratio of the polystyrene sulfonic acid and sodium polystyrene sulfonate is 20:80-50:50.
  • the gallium-based liquid metal includes gallium and indium, and the mass ratio of gallium to indium is 60-75:40-25.
  • the gallium-based liquid metal has a low melting point, has good fluidity after being in a liquid state, and has a low surface tension. It is easy to disperse in a polymer solution and facilitates the preparation of gallium-based liquid metal nanoparticles.
  • Examples of the mass ratio of gallium and indium include but are not limited to: 60:40, 61:39, 62:38, 63:37, 64:36, 65:35, 66:34, 67:33, 68:32 , 69:31, 70:30, 71:39, 72:28, 73:27, 74:26, 75:25.
  • examples of the mass ratio of polystyrene sulfonic acid and sodium polystyrene sulfonate include, but are not limited to: 20:80, 25:75, 30:70, 35:65, 40:60 , 45:55, 50:50.
  • the mass fraction of the gallium-based liquid metal is 0.5-1.5%, for example: 0.5%, 0.6%, 0.7%, 0.8%, 0.9%, 1.0% , 1.1%, 1.2%, 1.3%, 1.4%, 1.5%.
  • the acid solution may include: hydrochloric acid solution, nitric acid solution, etc., preferably nitric acid solution.
  • the concentration of the nitric acid solution is 5-20wt%, for example: 5wt%, 6wt%, 8wt%, 10wt%, 12wt%, 15wt%, 18wt%, 20wt%.
  • the mass of the gallium-based liquid metal nanoparticle dispersion is 0.1-5% of the mass of the nitric acid solution, that is, preferably, the mass of the gallium-based liquid metal nanoparticle dispersion is It is 0.3%-5% of the mass of the nitric acid solution.
  • the gallium-based liquid metal nanoparticle dispersion When the gallium-based liquid metal nanoparticle dispersion is added in a small amount, only part of the holes can be corroded, and the effect is not obvious.
  • the addition amount is too high, in addition to part of the gallium-based liquid metal nanoparticles entering the hole to corrode, some remain in the solution, corroding the hole of the hole, causing the expansion of the tapered hole and the phenomenon of merging, which will corrode the foil. The capacity is reduced.
  • the mass of the gallium-based liquid metal nanoparticle dispersion is 0.3%-1% of the mass of the nitric acid solution, for example: 0.3%, 0.4%, 0.5%, 0.6%, 0.7%, 0.8%, 0.9% %,1%.
  • the mass of the gallium-based liquid metal nanoparticle dispersion is 1% to 5% of the mass of the nitric acid solution, for example: 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4 %, 4.5%, 5%.
  • the conditions for the hole expansion are: the temperature is 20-50° C., the current density is 0.1-1 A/cm2, and the hole expansion time is 20-50s.
  • the expansion temperature may include: 20°C, 25°C, 30°C, 35°C, 40°C, 45°C, and 50°C.
  • the current density of the reaming is 0.1-1A/cm 2 , for example: 0.1A/cm 2 , 0.2A/cm 2 , 0.3A/cm 2 , 0.4A/cm 2 , 0.5A/cm 2 , 0.6A/cm 2 cm 2 , 0.7A/cm 2 , 0.8A/cm 2 , 0.9A/cm 2 , 1A/cm 2 .
  • the time for the holes can be listed as: 20s, 23s, 25s, 28s, 30s, 33s, 35s, 38s, 40s, 43s, 45s, 48s, 50s.
  • the conditions for forming the holes are: a temperature of 50° C., a current density of 0.5 A/cm 2 , and a hole forming time of 30 seconds.
  • the aluminum foil after the hole expansion treatment is placed in pure water and washed for 20 seconds at room temperature.
  • the aluminum foil after the second water washing is dried at 100-300° C. for 2-10 minutes to obtain electrode foil.
  • the drying temperature may include: 100°C, 120°C, 150°C, 180°C, 200°C, 220°C, 250°C, 280°C, and 300°C.
  • the drying time may include: 2min, 3min, 4min, 5min, 6min, 7min, 8min, 9min, 10min.
  • the etching process of the electrode foil includes:
  • Pore place the pre-treated aluminum foil in a mixed solution of 20-60wt% sulfuric acid and 1-10wt% hydrochloric acid to make holes at a temperature of 40-80°C and a current density of 0.5-3.0A /cm 2 , the time for making holes is 5-20s;
  • Drying drying the aluminum foil after the second water washing to obtain an electrode foil.
  • room temperature in the present invention refers to a temperature of 20-30°C.
  • Pre-treatment Use 3g/L sodium hydroxide solution to treat the aluminum foil to remove the oil and oxide layer on the surface. The temperature is 50°C, and the treatment time is 15s. Then the aluminum foil is cleaned in pure water at room temperature 15s.
  • Pore formation the pre-treated aluminum foil is energized in an etching bath solution, which is a mixed solution of sulfuric acid with a concentration of 40 wt% and hydrochloric acid with a concentration of 5 wt%, at a temperature of 40°C, and a current
  • the density is 1.8A/cm 2
  • the hole making time is 20s.
  • Reaming The aluminum foil washed with water is placed in the reaming etching solution prepared in step 3) and then electrified for reaming treatment.
  • the temperature is 50° C.
  • the current density is 0.5 A/cm 2
  • the reaming time is 30 seconds.
  • FIG. 1 The cross-sectional scanning electron microscope (SEM) morphology of the electrode foil (etched foil) obtained in this embodiment is shown in FIG. 1. It can be seen from the figure that the hole diameter and length of the corroded foil are relatively uniform, the thickness of the middle sandwich layer is uniform, and the hole reaming depth is consistent.
  • Pre-treatment Use 3g/L sodium hydroxide solution to treat the aluminum foil to remove the oil and oxide layer on the surface. The temperature is 50°C, and the treatment time is 15s. Then the aluminum foil is cleaned in pure water at room temperature 15s.
  • Pore formation the pre-treated aluminum foil is energized in an etching bath solution, which is a mixed solution of sulfuric acid with a concentration of 40 wt% and hydrochloric acid with a concentration of 5 wt%, at a temperature of 40°C, and a current
  • the density is 1.8A/cm 2
  • the hole making time is 20s.
  • Reaming The aluminum foil washed with water is placed in the reaming etching solution prepared in step 3) and then electrified for reaming treatment.
  • the temperature is 50° C.
  • the current density is 0.5 A/cm 2
  • the reaming time is 30 seconds.
  • Pre-treatment Use 3g/L sodium hydroxide solution to treat the aluminum foil to remove the oil and oxide layer on the surface. The temperature is 50°C, and the treatment time is 15s. Then the aluminum foil is cleaned in pure water at room temperature 15s.
  • Pore formation the pre-treated aluminum foil is energized in an etching bath solution, which is a mixed solution of sulfuric acid with a concentration of 40 wt% and hydrochloric acid with a concentration of 5 wt%, at a temperature of 40°C, and a current
  • the density is 1.8A/cm 2
  • the hole making time is 20s.
  • Reaming The aluminum foil washed with water is placed in the reaming etching solution prepared in step 3) and then electrified for reaming treatment.
  • the temperature is 50° C.
  • the current density is 0.5 A/cm 2
  • the reaming time is 30 seconds.
  • Pre-treatment Use 3g/L sodium hydroxide solution to treat the aluminum foil to remove the oil and oxide layer on the surface. The temperature is 50°C, and the treatment time is 15s. Then the aluminum foil is cleaned in pure water at room temperature 15s.
  • Pore formation the pre-treated aluminum foil is energized in an etching bath solution, which is a mixed solution of sulfuric acid with a concentration of 40 wt% and hydrochloric acid with a concentration of 5 wt%, at a temperature of 40°C, and a current
  • the density is 1.8A/cm 2
  • the hole making time is 20s.
  • Reaming The aluminum foil washed with water is placed in the reaming etching solution prepared in step 3) and then electrified for reaming treatment.
  • the temperature is 50° C.
  • the current density is 0.5 A/cm 2
  • the reaming time is 30 seconds.
  • Pre-treatment Use 3g/L sodium hydroxide solution to treat the aluminum foil to remove the oil and oxide layer on the surface. The temperature is 50°C, and the treatment time is 15s. Then the aluminum foil is cleaned in pure water at room temperature 15s.
  • Pore formation the pre-treated aluminum foil is energized in an etching bath solution, which is a mixed solution of sulfuric acid with a concentration of 40wt% and hydrochloric acid at a concentration of 5wt%, at a temperature of 40°C, and a current
  • the density is 1.8A/cm 2
  • the hole making time is 20s.
  • Reaming The aluminum foil washed with water is placed in a 6% nitric acid reaming solution and electrified for reaming treatment, the temperature is 50°C, the current density is 0.5A/cm 2 , and the reaming time is 30s.
  • FIG. 2 The cross-sectional scanning electron microscope (SEM) morphology of the electrode foil (etched foil) obtained in this embodiment is shown in FIG. 2. It can be seen from the figure that the pore size and length of the corroded foil are uneven, the thickness uniformity of the middle sandwich layer is very poor, even perforation occurs, and the consistency of the reaming depth is not good.
  • Pre-treatment Use 3g/L sodium hydroxide solution to process the aluminum foil to remove the oil stains and oxide layers on the surface.
  • the temperature is 50°C
  • the treatment time is 15s
  • the aluminum foil is cleaned in pure water at room temperature. 15s.
  • Pore formation the pre-treated aluminum foil is energized in an etching bath solution, which is a mixed solution of 40wt% sulfuric acid and 5wt% hydrochloric acid, at a temperature of 40°C, and a current
  • the density is 1.8A/cm 2
  • the hole making time is 20s.
  • One-time washing Wash the aluminum foil after pore treatment in pure water for 30s at room temperature.
  • Reaming The aluminum foil washed with water is placed in the reaming etching solution prepared in step 3) and then electrified for reaming treatment.
  • the temperature is 50° C.
  • the current density is 0.5 A/cm 2
  • the reaming time is 30 seconds.
  • Pre-treatment Use 3g/L sodium hydroxide solution to treat the aluminum foil to remove the oil and oxide layer on the surface. The temperature is 50°C, and the treatment time is 15s. Then the aluminum foil is cleaned in pure water at room temperature 15s.
  • Pore formation the pre-treated aluminum foil is energized in an etching bath solution, which is a mixed solution of sulfuric acid with a concentration of 40 wt% and hydrochloric acid with a concentration of 5 wt%, at a temperature of 40°C, and a current
  • the density is 1.8A/cm 2
  • the hole making time is 20s.
  • Reaming The aluminum foil washed with water is placed in the reaming etching solution prepared in step 3) and then electrified for reaming treatment.
  • the temperature is 50° C.
  • the current density is 0.5 A/cm 2
  • the reaming time is 30 seconds.
  • Pre-treatment Use 3g/L sodium hydroxide solution to treat the aluminum foil to remove the oil and oxide layer on the surface. The temperature is 50°C, and the treatment time is 15s. Then the aluminum foil is cleaned in pure water at room temperature 15s.
  • Pore formation the pre-treated aluminum foil is energized in an etching bath solution, which is a mixed solution of sulfuric acid with a concentration of 40 wt% and hydrochloric acid with a concentration of 5 wt%, at a temperature of 40°C, and a current
  • the density is 1.8A/cm 2
  • the hole making time is 20s.
  • Reaming The aluminum foil washed with water is placed in the reaming etching solution prepared in step 3) and then electrified for reaming treatment.
  • the temperature is 50° C.
  • the current density is 0.5 A/cm 2
  • the reaming time is 30 seconds.
  • Pre-treatment Use 3g/L sodium hydroxide solution to treat the aluminum foil to remove the oil and oxide layer on the surface. The temperature is 50°C, and the treatment time is 15s. Then the aluminum foil is cleaned in pure water at room temperature 15s.
  • Pore formation the pre-treated aluminum foil is energized in an etching bath solution, which is a mixed solution of sulfuric acid with a concentration of 40 wt% and hydrochloric acid with a concentration of 5 wt%, at a temperature of 40°C, and a current
  • the density is 1.8A/cm 2
  • the hole making time is 20s.
  • Reaming The aluminum foil washed with water is placed in the reaming etching solution prepared in step 3) and then electrified for reaming treatment.
  • the temperature is 50° C.
  • the current density is 0.5 A/cm 2
  • the reaming time is 30 seconds.
  • the corrosion foil prepared by the corrosion process of the present invention has a reduction of 2 ⁇ m in corrosion thinning compared with the existing corrosion process (Comparative Example 1), a capacity increase of at least about 7%, and a bending increase of at least about 35%, effectively reducing the generation of branch holes or small holes, improving corrosion efficiency and capacity.
  • the mass ratio of polystyrene sulfonic acid and sodium polystyrene sulfonate is 10:90.
  • the polymer film formed on the surface of the liquid metal is mainly sodium polystyrene sulfonate. After being added to the reaming solution, the polymer film on the surface of the gallium-based liquid metal nanoparticles quickly dissolves, and the gallium-based liquid metal is released. Part of the aluminum foil is corroded on the surface of the aluminum foil and the openings of the holes, resulting in an increase in the thinning of the aluminum foil, an enlarged tapered hole, and a decrease in capacity.

Abstract

Disclosed are a reaming etching solution, an etching process and an electrode foil prepared by the etching process in the technical field of electrode materials for capacitors. The reaming etching solution contains a gallium-based liquid metal nanoparticle dispersion, which is obtained by dispersing a gallium-based liquid metal in a polymer solution of a polystyrene sulfonic acid and sodium polystyrenesulfonate, wherein the mass fraction of the gallium-based liquid metal is 0.3%-1.5%. The electrode foil prepared by the etching process for reaming a hole with a reaming etching solution has an increased hole depth, reduced branch holes or small holes, a good hole consistency, and higher electrostatic capacitance and anti-bending strength.

Description

扩孔腐蚀液、腐蚀工艺及电极箔Reaming corrosive liquid, corrosion process and electrode foil 技术领域Technical field
本发明属于电容器用电极材料技术领域,具体涉及扩孔腐蚀液、腐蚀工艺及由该腐蚀工艺制备的电极箔。The invention belongs to the technical field of electrode materials for capacitors, and specifically relates to a hole-expanding corrosion solution, a corrosion process and an electrode foil prepared by the corrosion process.
背景技术Background technique
随着电子设备整机小型化的发展,对铝电解电容器的体积缩小和比容提高提出了迫切需要。电极箔作为铝电解电容器中的核心材料,对电容器的各种特性起决定性作用。铝电解电容器用阳极箔一般通过电化学腐蚀在其表面生成大量的垂直隧道孔以增大其有效表面积,从而提高电极箔的容量;然后通过化成在腐蚀孔洞表面产生一层致密的氧化铝膜。铝电解电容器的耐压性能由氧化膜的厚度决定,但其容量、抗拉强度和折弯性能取决于腐蚀技术。With the development of miniaturization of electronic equipment, there is an urgent need for aluminum electrolytic capacitors to reduce their volume and increase their specific capacitance. As the core material of aluminum electrolytic capacitors, electrode foil plays a decisive role in the various characteristics of the capacitor. The anode foil for aluminum electrolytic capacitors generally generates a large number of vertical tunnel holes on its surface through electrochemical corrosion to increase its effective surface area, thereby increasing the capacity of the electrode foil; then a dense aluminum oxide film is formed on the surface of the corrosion hole through chemical conversion. The voltage resistance of aluminum electrolytic capacitors is determined by the thickness of the oxide film, but its capacity, tensile strength and bending performance depend on the corrosion technology.
常规的腐蚀箔制造工艺流程主要包括前处理、一级发孔腐蚀、二级扩孔腐蚀、后处理等工序。一级发孔在硫酸-盐酸混合液中进行,形成高密度、均匀细小的隧道孔。二级扩孔一般在硝酸溶液中进行,将细小的隧道孔的直径扩大到大于高压化成氧化膜厚度的程度,以获取高的比容,腐蚀决定了隧道孔的密度、孔的分布均匀性以及孔的深度等。大量研究发现,发孔后铝箔中的隧道孔呈锥状,扩孔时将使得隧道孔继续保持锥状,其结果使得总有一部分隧道孔的直径小于高压化成氧化膜的厚度,在化成中被堵死,导致无用孔增多,限制了容量的提高。此外随着扩孔深度的增加,孔内氢离子与铝金属作用持续消耗,大量铝离子富集在孔洞内部,使得外部氢离子溶液无法快速进入,导致扩孔深度不够或者产生横向枝孔,也降低了腐蚀箔的容量和折弯性能。The conventional corrosion foil manufacturing process mainly includes pre-treatment, primary pore corrosion, secondary pore expansion corrosion, post-treatment and other processes. The primary pores are carried out in the sulfuric acid-hydrochloric acid mixture to form high-density, uniform and small tunnel holes. The secondary hole expansion is generally carried out in nitric acid solution. The diameter of the small tunnel hole is enlarged to a degree larger than the thickness of the high-pressure oxide film to obtain a high specific volume. Corrosion determines the density of the tunnel hole, the uniformity of the hole distribution and The depth of the hole, etc. A large number of studies have found that the tunnel hole in the aluminum foil is tapered after the hole is formed. When the hole is expanded, the tunnel hole will continue to be tapered. As a result, the diameter of a part of the tunnel hole is always smaller than the thickness of the high-pressure oxide film. Blocking causes an increase in useless holes and limits the increase in capacity. In addition, as the reaming depth increases, the hydrogen ions in the pores interact with aluminum metal to continue to consume, and a large amount of aluminum ions are enriched inside the pores, making the external hydrogen ion solution unable to enter quickly, resulting in insufficient reaming depth or horizontal branch holes. The capacity and bending performance of the corroded foil are reduced.
发明内容Summary of the invention
本发明针对现有的腐蚀工艺在扩孔阶段存在扩孔深度不够、枝孔或小孔过多,从而导致腐蚀箔的容量降低和折弯性能变差的问题,提供一种扩孔腐蚀液和腐蚀工艺。The present invention addresses the problems of insufficient reaming depth, too many branch holes or small holes in the reaming stage of the existing corrosion process, which leads to the reduction of the capacity of the corroded foil and the deterioration of the bending performance, and provides a reaming etching solution and Corrosion process.
本发明的第一目的在于,提供一种扩孔腐蚀液,所述腐蚀液包含镓基液态金属纳米颗粒分散液,所述镓基液态金属纳米颗粒分散液由镓基液态金属在聚苯乙烯磺酸和聚苯乙烯磺酸钠的高分子溶液中分散得到,其中,所述镓基液态金属在所述镓基液态金属纳米颗粒分散液中的质量分数为0.3-1.5%,。The first object of the present invention is to provide a hole-reaming etching solution, the etching solution comprising a gallium-based liquid metal nanoparticle dispersion liquid, the gallium-based liquid metal nanoparticle dispersion liquid is composed of gallium-based liquid metal in polystyrene sulfonate Dispersed in a polymer solution of acid and sodium polystyrene sulfonate, wherein the mass fraction of the gallium-based liquid metal in the gallium-based liquid metal nanoparticle dispersion is 0.3-1.5%.
优选地,所述聚苯乙烯磺酸和聚苯乙烯磺酸钠的质量比为20:80-50:50。Preferably, the mass ratio of the polystyrene sulfonic acid and sodium polystyrene sulfonate is 20:80-50:50.
优选地,所述腐蚀液进一步包括浓度为5-20wt%的硝酸溶液,所述镓基液态金属纳米颗粒分散液的质量为硝酸溶液质量的0.1-5%。Preferably, the etching solution further includes a nitric acid solution with a concentration of 5-20 wt%, and the mass of the gallium-based liquid metal nanoparticle dispersion is 0.1-5% of the mass of the nitric acid solution.
优选地,所述镓基液态金属包括镓和铟,所述镓和铟的质量比为60-75:40-25。Preferably, the gallium-based liquid metal includes gallium and indium, and the mass ratio of gallium to indium is 60-75:40-25.
本发明的第二目的在于,提供上述扩孔腐蚀液的制备方法,包括:The second object of the present invention is to provide a method for preparing the above-mentioned hole expanding etching solution, which includes:
将聚苯乙烯磺酸和聚苯乙烯磺酸钠按照一定的质量比混合,得到高分子溶液;Mixing polystyrene sulfonic acid and sodium polystyrene sulfonate according to a certain mass ratio to obtain a polymer solution;
将镓基液态金属滴加到上述高分子溶液中,混合处理,得到液态金属纳米颗粒分散液,其中,所述镓基液态金属在所述镓基液态金属纳米颗粒分散液中的质量分数为0.3-1.5%;The gallium-based liquid metal is added dropwise to the above-mentioned polymer solution, mixed and processed to obtain a liquid metal nanoparticle dispersion, wherein the mass fraction of the gallium-based liquid metal in the gallium-based liquid metal nanoparticle dispersion is 0.3 -1.5%;
将上述镓基液态金属纳米颗粒分散液滴加到浓度为5-20wt%的硝酸溶液中,混合处理, 得到扩孔腐蚀液,其中,镓基液态金属纳米颗粒分散液的质量为硝酸溶液质量的0.1%-5%。The above-mentioned gallium-based liquid metal nanoparticle dispersion is added dropwise to a nitric acid solution with a concentration of 5-20wt%, and mixed treatment to obtain a hole-expanding etching solution, wherein the mass of the gallium-based liquid metal nanoparticle dispersion is equal to that of the nitric acid solution. 0.1%-5%.
优选地,所述聚苯乙烯磺酸和聚苯乙烯磺酸钠的质量比为20:80-50:50。Preferably, the mass ratio of the polystyrene sulfonic acid and sodium polystyrene sulfonate is 20:80-50:50.
优选地,所述镓基液态金属包括镓和铟,所述镓和铟的质量比为60-75:40-25。Preferably, the gallium-based liquid metal includes gallium and indium, and the mass ratio of gallium to indium is 60-75:40-25.
所述制备方法先对镓基液态金属进行高分子溶液的包覆处理,再与硝酸溶液混合。通过对镓基液态金属进行包覆处理,在其表面形成高分子保护层,然后制备成纳米微颗粒,可以稳定地存在于水溶液中,使得其在水性环境下可以使用,扩孔腐蚀更均匀。In the preparation method, the gallium-based liquid metal is coated with a polymer solution first, and then mixed with a nitric acid solution. By coating the gallium-based liquid metal, a polymer protective layer is formed on the surface, and then prepared into nano particles, which can stably exist in the aqueous solution, so that it can be used in an aqueous environment, and the pore expansion corrosion is more uniform.
优选地,将镓基液态金属滴加到上述高分子溶液中,通过搅拌和超声震荡的方式进行混合,所述搅拌速度为800-2000rpm,所述超声震荡的频率为20-40KHz。Preferably, the gallium-based liquid metal is added dropwise to the above-mentioned polymer solution and mixed by stirring and ultrasonic vibration, the stirring speed is 800-2000 rpm, and the ultrasonic vibration frequency is 20-40 KHz.
优选地,将镓基液态金属纳米颗粒分散液滴加到浓度为5-20wt%硝酸溶液中,通过搅拌和超声震荡的方式进行混合,所述搅拌速度为2000-4000rpm,超声震荡的频率为20-40KHz。Preferably, the gallium-based liquid metal nanoparticle dispersion is added dropwise to a nitric acid solution with a concentration of 5-20 wt%, and mixed by stirring and ultrasonic vibration, the stirring speed is 2000-4000 rpm, and the ultrasonic vibration frequency is 20 -40KHz.
本发明的第三目的在于,提供一种使用上述扩孔腐蚀液进行扩孔腐蚀的电极箔的腐蚀工艺。The third object of the present invention is to provide an electrode foil etching process that uses the above-mentioned hole-expanding etching solution to perform hole-expanding etching.
在腐蚀扩孔过程中,镓基液态金属纳米颗粒进入腐蚀孔洞内,对孔壁以及孔底铝基体进行高效腐蚀,因其对铝的吞噬作用,减少锥形孔的扩大、铝离子的富集和氢离子的消耗,加速氢离子快速进入孔洞内,增加扩孔深度,减少枝孔或小孔的产生,提高腐蚀效率和容量,改善腐蚀箔的一致性。In the process of corrosive hole expansion, gallium-based liquid metal nanoparticles enter the corroded hole to efficiently corrode the hole wall and the aluminum matrix at the bottom of the hole. Because of its phagocytosis of aluminum, it reduces the expansion of the tapered hole and the enrichment of aluminum ions. And the consumption of hydrogen ions accelerate the rapid entry of hydrogen ions into the holes, increase the depth of the hole expansion, reduce the generation of branch holes or small holes, improve the corrosion efficiency and capacity, and improve the consistency of the corrosion foil.
进一步优选地,所述电极箔的腐蚀工艺包括:Further preferably, the etching process of the electrode foil includes:
1)前处理:将铝箔置于1-5g/L氢氧化钠溶液中进行洗涤,然后置于纯水中清洗;1) Pre-treatment: Wash the aluminum foil in 1-5g/L sodium hydroxide solution, and then clean it in pure water;
2)发孔:将前处理后的铝箔置于浓度为20-60wt%的硫酸和1-10wt%的盐酸的混合溶液中进行发孔;2) Pore: place the pre-treated aluminum foil in a mixed solution of 20-60wt% sulfuric acid and 1-10wt% hydrochloric acid to make holes;
3)一次水洗;将发孔处理后的铝箔置于纯水中清洗;3) Wash once with water; wash the aluminum foil with pores in pure water;
4)扩孔:将一次水洗后的铝箔置于包含镓基液态金属纳米颗粒分散液的扩孔腐蚀液进行扩孔;4) Hole reaming: the aluminum foil washed once with water is placed in a hole-reaming etching solution containing a gallium-based liquid metal nanoparticle dispersion liquid for reaming;
5)二次水洗:将扩孔处理后的铝箔在纯水中清洗;5) Secondary water washing: Wash the aluminum foil after the hole expansion treatment in pure water;
6)干燥:将二次水洗后的铝箔干燥,得到电极箔。6) Drying: drying the aluminum foil after the second water washing to obtain an electrode foil.
优选地,前处理中,所述铝箔在氢氧化钠溶液洗涤的温度为30-60℃,洗涤时间为15-30s;所述纯水中清洗的温度为室温,时间为15-30s。Preferably, in the pretreatment, the temperature of washing the aluminum foil in the sodium hydroxide solution is 30-60° C., and the washing time is 15-30s; the temperature of washing in pure water is room temperature, and the time is 15-30s.
优选地,发孔中,所述发孔的条件为:温度为40-80℃,电流密度为0.5-3.0A/cm 2,发孔的时间为5-20s。 Preferably, in the pores, the conditions for the pores are: the temperature is 40-80° C., the current density is 0.5-3.0 A/cm 2 , and the time for pores is 5-20s.
优选地,所述一次水洗的温度为室温,时间为15-30s。Preferably, the temperature of the one-time washing is room temperature, and the time is 15-30s.
所述扩孔腐蚀液的具体组成如上所述。The specific composition of the hole expanding etching solution is as described above.
优选地,所述扩孔的条件为:温度为20-50℃,电流密度为0.1-1A/cm 2,扩孔的时间为20-50s。 Preferably, the conditions for the hole expansion are: the temperature is 20-50° C., the current density is 0.1-1 A/cm 2 , and the hole expansion time is 20-50 s.
优选地,所述二次水洗的温度为室温,时间为15-30s。Preferably, the temperature of the second water washing is room temperature, and the time is 15-30s.
任选地,所述干燥的温度为100-300℃,时间为2-10min。Optionally, the drying temperature is 100-300°C, and the time is 2-10 min.
另一方面,本发明提供由本发明所述的腐蚀工艺制备得到的电极箔。In another aspect, the present invention provides electrode foils prepared by the etching process described in the present invention.
另一方面,本发明还提供包含上述电极箔的铝电解电容器。On the other hand, the present invention also provides an aluminum electrolytic capacitor including the above-mentioned electrode foil.
与现有技术相比,本发明具有以下技术效果:Compared with the prior art, the present invention has the following technical effects:
(1)本发明在扩孔腐蚀过程中引入镓基液态金属,镓基液态金属对铝有很强的腐蚀性,腐蚀效率高。(1) In the present invention, gallium-based liquid metal is introduced in the process of hole expansion and corrosion. The gallium-based liquid metal is highly corrosive to aluminum and has high corrosion efficiency.
(2)本发明采用对镓基液态金属进行包覆处理,在其表面形成高分子保护层,然后制备成纳米微颗粒,稳定地存在于水溶液中,使得其在水性环境下可以使用,扩孔腐蚀更均匀。(2) In the present invention, gallium-based liquid metal is coated to form a polymer protective layer on its surface, and then prepared into nano-particles, which stably exist in an aqueous solution, so that they can be used in an aqueous environment and expand the hole. Corrosion is more uniform.
(3)本发明的腐蚀扩孔过程中,镓基液态金属纳米颗粒进入腐蚀孔洞内,对孔壁以及孔底铝基体进行高效腐蚀,因其对铝的腐蚀作用,减少锥形孔的扩大、铝离子的富集和氢离子的消耗,加速氢离子快速进入孔洞内,增加扩孔深度,减少枝孔或小孔的产生,提高腐蚀效率和容量,改善腐蚀箔的一致性。(3) During the corrosive hole expansion process of the present invention, the gallium-based liquid metal nanoparticles enter the corroded hole to efficiently corrode the hole wall and the aluminum matrix at the bottom of the hole. Because of its corrosive effect on aluminum, it reduces the expansion and expansion of the tapered hole. The enrichment of aluminum ions and the consumption of hydrogen ions accelerate the rapid entry of hydrogen ions into the holes, increase the depth of hole expansion, reduce the generation of branch holes or small holes, improve the corrosion efficiency and capacity, and improve the consistency of the corroded foil.
(4)本发明腐蚀工艺制备得到的电极箔(腐蚀箔),与传统腐蚀工艺得到的腐蚀箔相比,静电容量至少提升约7%,折弯至少提升约35%,且腐蚀减薄量降低了2μm,提高了铝箔的利用率。(4) Compared with the etched foil obtained by the traditional etching process, the electrode foil (etched foil) prepared by the etching process of the present invention has an electrostatic capacity increased by at least about 7%, bending at least increased by about 35%, and a reduction in corrosion thinning 2μm, which improves the utilization rate of aluminum foil.
附图说明Description of the drawings
图1:本发明实施例1制备的腐蚀箔截面扫描电镜(SEM)形貌;Figure 1: Scanning electron microscope (SEM) morphology of the cross-section of the corroded foil prepared in Example 1 of the present invention;
图2:本发明对比例1制备的腐蚀箔截面扫描电镜(SEM)形貌。Figure 2: Scanning electron microscope (SEM) morphology of the cross-section of the corroded foil prepared in Comparative Example 1 of the present invention.
具体实施方式Detailed ways
现对本发明提供的扩孔腐蚀液的制备和腐蚀工艺进行详细说明。The preparation and etching process of the hole expanding etching solution provided by the present invention will now be described in detail.
1、扩孔腐蚀液的制备1. Preparation of corrosive solution for reaming
根据本发明提供的实施方式,所述扩孔腐蚀液的制备包括:According to the embodiment provided by the present invention, the preparation of the hole reaming etching solution includes:
1)将聚苯乙烯磺酸和聚苯乙烯磺酸钠按照一定的质量比混合,得到高分子溶液;1) Mixing polystyrene sulfonic acid and sodium polystyrene sulfonate according to a certain mass ratio to obtain a polymer solution;
2)将镓基液态金属滴加到上述高分子溶液中,混合处理,得到镓基液态金属纳米颗粒分散液,其中,镓基液态金属的质量分数为0.3-1.5%;2) Adding the gallium-based liquid metal dropwise to the above-mentioned polymer solution and mixing processing to obtain a gallium-based liquid metal nanoparticle dispersion, wherein the mass fraction of the gallium-based liquid metal is 0.3-1.5%;
3)将上述镓基液态金属纳米颗粒分散液滴加到浓度为5-20wt%硝酸溶液中,混合处理,得到扩孔腐蚀液,其中,所述镓基液态金属纳米颗粒分散液质量为硝酸溶液质量的0.1-5%。3) The above-mentioned gallium-based liquid metal nanoparticle dispersion is added dropwise to a nitric acid solution with a concentration of 5-20wt%, and mixed treatment to obtain a pore-reaming etching solution, wherein the quality of the gallium-based liquid metal nanoparticle dispersion is a nitric acid solution 0.1-5% of the quality.
优选地,所述镓基液态金属包括镓和铟,所述镓和铟的质量比为60-75:40-25。Preferably, the gallium-based liquid metal includes gallium and indium, and the mass ratio of gallium to indium is 60-75:40-25.
所述镓和铟的质量比的实例包括但不限于:60:40、61:39、62:38、63:37、64:36、65:35、66:34、67:33、68:32、69:31、70:30、71:39、72:28、73:27、74:26、75:25。Examples of the mass ratio of gallium and indium include but are not limited to: 60:40, 61:39, 62:38, 63:37, 64:36, 65:35, 66:34, 67:33, 68:32 , 69:31, 70:30, 71:39, 72:28, 73:27, 74:26, 75:25.
本发明中使用聚苯乙烯磺酸和聚苯乙烯磺酸钠的高分子溶液对镓基液态金属进行包覆处理,制备镓基液态金属纳米颗粒分散液,并且限定聚苯乙烯磺酸和聚苯乙烯磺酸钠的质量比为20:80-50:50。是因为:聚苯乙烯磺酸易于在镓基液态金属表面成膜且在水溶液中的溶解速率较慢,而聚苯乙烯磺酸钠在镓基液态金属表面成膜能力较慢但其在水溶液中溶解速率较快,通过聚苯乙烯磺酸和聚苯乙烯磺酸钠的混合复配来控制镓基液态金属表面的高分子成膜速度,进而调控镓基液态金属纳米颗粒的尺寸;同时确保镓基液态金属纳米颗粒在加入到扩孔腐蚀 中后,表面高分子膜不会快速溶解,待其进入到腐蚀孔洞内后,表面高分子膜能尽快溶解,释放出镓基液态金属纳米颗粒。In the present invention, a polymer solution of polystyrene sulfonic acid and sodium polystyrene sulfonate is used to coat the gallium-based liquid metal to prepare a gallium-based liquid metal nanoparticle dispersion, and the polystyrene sulfonic acid and polystyrene are limited. The mass ratio of sodium ethylene sulfonate is 20:80-50:50. The reason is: polystyrene sulfonic acid is easy to form a film on the surface of gallium-based liquid metal and has a slow dissolution rate in aqueous solution, while polystyrene sulfonate has a slower film-forming ability on the surface of gallium-based liquid metal, but it is in an aqueous solution. The dissolution rate is relatively fast. The speed of polymer film formation on the surface of gallium-based liquid metal can be controlled by the mixing and compounding of polystyrene sulfonic acid and sodium polystyrene sulfonate, thereby regulating the size of gallium-based liquid metal nanoparticles; while ensuring gallium The surface polymer film will not dissolve quickly after the liquid metal nanoparticles are added to the pore expansion corrosion. After they enter the corrosion holes, the surface polymer film can dissolve as soon as possible to release the gallium-based liquid metal nanoparticles.
优选地,所述聚苯乙烯磺酸和聚苯乙烯磺酸钠的质量比为20:80-50:50。Preferably, the mass ratio of the polystyrene sulfonic acid and sodium polystyrene sulfonate is 20:80-50:50.
所述聚苯乙烯磺酸和聚苯乙烯磺酸钠的质量比的实例包括但不限于:20:80、25:75、30:70、35:65、40:60、45:55、50:50。Examples of the mass ratio of polystyrene sulfonic acid and sodium polystyrene sulfonate include, but are not limited to: 20:80, 25:75, 30:70, 35:65, 40:60, 45:55, 50: 50.
步骤2)的包覆处理中,具体条件如下:In the coating treatment of step 2), the specific conditions are as follows:
所述镓基液态金属的滴加速度为1-20mL/min。The dropping acceleration of the gallium-based liquid metal is 1-20 mL/min.
在一些实施方式中,所述镓基液态金属的滴加速度为1-10mL/min,例如:1mL/min、2mL/min、3mL/min、4mL/min、5mL/min、6mL/min、7mL/min、8mL/min、9mL/min、10mL/min。In some embodiments, the dropping rate of the gallium-based liquid metal is 1-10mL/min, for example: 1mL/min, 2mL/min, 3mL/min, 4mL/min, 5mL/min, 6mL/min, 7mL/min min, 8mL/min, 9mL/min, 10mL/min.
在一些实施方式中,所述镓基液态金属的滴加速度为10-20mL/min,例如:10mL/min、11mL/min、12mL/min、13mL/min、14mL/min、15mL/min、16mL/min、17mL/min、18mL/min、19mL/min、20mL/min。In some embodiments, the dropping rate of the gallium-based liquid metal is 10-20mL/min, for example: 10mL/min, 11mL/min, 12mL/min, 13mL/min, 14mL/min, 15mL/min, 16mL/min min, 17mL/min, 18mL/min, 19mL/min, 20mL/min.
优选地,将镓基液态金属滴加到上述高分子溶液中,通过搅拌和超声震荡的方式进行混合,所述搅拌速度为800-2000rpm(800rpm、900rpm、1000rpm、2100rpm、1200rpm、1300rpm、1400rpm、1500rpm、1600rpm、1700rpm、1800rpm、1900rpm、2000rpm),所述超声震荡的频率为20-40KHz(20KHz、25KHz、30KHz、35KHz、40KHz)。Preferably, the gallium-based liquid metal is added dropwise to the above-mentioned polymer solution, and mixed by stirring and ultrasonic vibration, and the stirring speed is 800-2000rpm (800rpm, 900rpm, 1000rpm, 2100rpm, 1200rpm, 1300rpm, 1400rpm, 1500rpm, 1600rpm, 1700rpm, 1800rpm, 1900rpm, 2000rpm), the frequency of the ultrasonic oscillation is 20-40KHz (20KHz, 25KHz, 30KHz, 35KHz, 40KHz).
在一些实施方式中,所述镓基液态金属纳米颗粒分散液中,镓基液态金属的质量分数为0.5-1.5%,例如:0.5%、0.6%、0.7%、0.8%、0.9%、1.0%、1.1%、1.2%、1.3%、1.4%、1.5%。In some embodiments, in the gallium-based liquid metal nanoparticle dispersion, the mass fraction of the gallium-based liquid metal is 0.5-1.5%, for example: 0.5%, 0.6%, 0.7%, 0.8%, 0.9%, 1.0% , 1.1%, 1.2%, 1.3%, 1.4%, 1.5%.
步骤3)中,具体处理条件如下:In step 3), the specific processing conditions are as follows:
所述滴加速度为0.1-5mL/min。The dropping rate is 0.1-5 mL/min.
在一些实施方式中,所述滴加速度为0.1-0.5mL/min,例如:0.1mL/min、0.2mL/min、0.3mL/min、0.4mL/min、0.5mL/min。In some embodiments, the dropping rate is 0.1-0.5 mL/min, for example: 0.1 mL/min, 0.2 mL/min, 0.3 mL/min, 0.4 mL/min, 0.5 mL/min.
在一些实施方式中,所述滴加速度的其他优选范围可列举:0.5-1.0mL/min、1.0-2.0mL/min、2.0-3.0mL/min、3.0-4.0mL/min、4.0-5.0mL/min。In some embodiments, other preferred ranges of the dropping rate may include: 0.5-1.0 mL/min, 1.0-2.0 mL/min, 2.0-3.0 mL/min, 3.0-4.0 mL/min, 4.0-5.0 mL/min min.
优选地,将镓基液态金属纳米颗粒分散液滴加到浓度为5-20wt%硝酸溶液中,通过搅拌和超声震荡的方式进行混合,所述搅拌速度为2000-4000rpm(2000rpm、2300rpm、2500rpm、2800rpm、3000rpm、3300rpm、3500rpm、3800rpm、4000rpm),超声震荡的频率为20-40KHz(20KHz、25KHz、30KHz、35KHz、40KHz)。Preferably, the gallium-based liquid metal nanoparticle dispersion is added dropwise to a nitric acid solution with a concentration of 5-20wt%, and mixed by stirring and ultrasonic vibration, and the stirring speed is 2000-4000rpm (2000rpm, 2300rpm, 2500rpm, 2800rpm, 3000rpm, 3300rpm, 3500rpm, 3800rpm, 4000rpm), the frequency of ultrasonic vibration is 20-40KHz (20KHz, 25KHz, 30KHz, 35KHz, 40KHz).
优选地,所述镓基液态金属纳米颗粒分散液的添加量为0.1%-5%,即,优选地,所述扩孔腐蚀液中,所述镓基液态金属纳米颗粒分散液的质量为硝酸溶液质量的0.3%-5%。Preferably, the added amount of the gallium-based liquid metal nanoparticle dispersion is 0.1% to 5%, that is, preferably, in the pore expanding etching solution, the mass of the gallium-based liquid metal nanoparticle dispersion is nitric acid. 0.3%-5% of the mass of the solution.
在一些实施方式中,所述镓基液态金属纳米颗粒分散液的质量为硝酸溶液质量的0.3%-1%,例如:0.3%、0.4%、0.5%、0.6%、0.7%、0.8%、0.9%、1%。In some embodiments, the mass of the gallium-based liquid metal nanoparticle dispersion is 0.3%-1% of the mass of the nitric acid solution, for example: 0.3%, 0.4%, 0.5%, 0.6%, 0.7%, 0.8%, 0.9% %,1%.
在一些实施方式中,所述镓基液态金属纳米颗粒分散液的质量为硝酸溶液质量的1%-5%,例如:1%、1.5%、2%、2.5%、3%、3.5%、4%、4.5%、5%。In some embodiments, the mass of the gallium-based liquid metal nanoparticle dispersion is 1% to 5% of the mass of the nitric acid solution, for example: 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4 %, 4.5%, 5%.
所述硝酸溶液的浓度可列举:5wt%、6wt%、8wt%、10wt%、12wt%、15wt%、18wt%、20wt%。The concentration of the nitric acid solution may include: 5wt%, 6wt%, 8wt%, 10wt%, 12wt%, 15wt%, 18wt%, 20wt%.
在一些实施方式中,所述扩孔腐蚀液的制备方法包括:In some embodiments, the method for preparing the hole-reaming etching solution includes:
1)将聚苯乙烯磺酸和聚苯乙烯磺酸钠按照20:80-50:50的质量比混合,得到高分子溶液;1) Mixing polystyrene sulfonic acid and sodium polystyrene sulfonate in a mass ratio of 20:80-50:50 to obtain a polymer solution;
2)将镓基液态金属以1-20mL/min的速度滴加到上述高分子溶液中,并施加搅拌和超声震荡,搅拌速度为800-2000rpm,超声震荡频率为20-40KHz,流量为1-20mL/min,得到镓基液态金属纳米颗粒分散液,其中,镓基液态金属的质量分数为0.3-1.5%;2) Add the gallium-based liquid metal dropwise to the above polymer solution at a speed of 1-20mL/min, and apply stirring and ultrasonic vibration. The stirring speed is 800-2000rpm, the ultrasonic vibration frequency is 20-40KHz, and the flow rate is 1- 20 mL/min to obtain a gallium-based liquid metal nanoparticle dispersion, wherein the mass fraction of the gallium-based liquid metal is 0.3-1.5%;
3)将上述镓基液态金属纳米颗粒分散液以0.1-5mL/min的速度滴加到浓度为5-20wt%的硝酸溶液中,并施加搅拌和超声震荡,流量为0.1-5mL/min,搅拌速度为2000-4000rpm,超声震荡频率为20-40KHz,得到扩孔腐蚀液,其中,镓基液态金属纳米颗粒分散液的质量为硝酸溶液质量的0.1-5%。3) The above-mentioned gallium-based liquid metal nanoparticle dispersion is added dropwise to a nitric acid solution with a concentration of 5-20wt% at a rate of 0.1-5mL/min, and stirring and ultrasonic vibration are applied at a flow rate of 0.1-5mL/min, stirring The speed is 2000-4000rpm, the ultrasonic oscillation frequency is 20-40KHz, and the pore expansion etching solution is obtained, wherein the mass of the gallium-based liquid metal nanoparticle dispersion liquid is 0.1-5% of the mass of the nitric acid solution.
2、电极箔的腐蚀工艺2. Corrosion process of electrode foil
根据本发明提供的实施方式,所述电极箔的腐蚀工艺包括:According to the embodiment provided by the present invention, the etching process of the electrode foil includes:
1)前处理:将铝箔置于1-5g/L氢氧化钠溶液中进行洗涤,然后置于纯水中清洗;1) Pre-treatment: Wash the aluminum foil in 1-5g/L sodium hydroxide solution, and then clean it in pure water;
2)发孔:将前处理后的铝箔置于浓度为20-60wt%的硫酸和1-10wt%的盐酸的混合溶液中进行发孔;2) Pore: place the pre-treated aluminum foil in a mixed solution of 20-60wt% sulfuric acid and 1-10wt% hydrochloric acid to make holes;
3)一次水洗;将发孔处理后的铝箔置于纯水中清洗;3) Wash once with water; wash the aluminum foil with pores in pure water;
4)扩孔:将一次水洗后的铝箔置于包含镓基液态金属纳米颗粒分散液的扩孔腐蚀液进行扩孔;4) Hole reaming: the aluminum foil washed once with water is placed in a hole-reaming etching solution containing a gallium-based liquid metal nanoparticle dispersion liquid for reaming;
5)二次水洗:将扩孔处理后的铝箔在纯水中清洗;5) Secondary water washing: Wash the aluminum foil after the hole expansion treatment in pure water;
6)干燥:将二次水洗后的铝箔干燥,得到电极箔。6) Drying: drying the aluminum foil after the second water washing to obtain an electrode foil.
具体地,各步骤的工艺条件如下:Specifically, the process conditions of each step are as follows:
1)、前处理1), pre-treatment
发孔腐蚀之前,一般需要对铝箔进行清洗前处理,目的在于除掉铝箔表面的油污和氧化层。所述前处理可以在碱溶液或/和酸溶液中进行。Before pore corrosion, the aluminum foil generally needs to be cleaned and pre-treated, the purpose is to remove the oil stain and oxide layer on the surface of the aluminum foil. The pretreatment can be carried out in an alkaline solution or/and an acid solution.
本发明的实施方式中,所述前处理包括:In the embodiment of the present invention, the pre-processing includes:
将铝箔置于1-5g/L(例如:1g/L、2g/L、3g/L、4g/L、5g/L)氢氧化钠溶液中,于30-60℃(例如:30℃、35℃、40℃、45℃、50℃、55℃、60℃)洗涤15-30s,然后置于纯水中室温下清洗15-30s。Put the aluminum foil in 1-5g/L (for example: 1g/L, 2g/L, 3g/L, 4g/L, 5g/L) sodium hydroxide solution at 30-60℃ (for example: 30℃, 35 ℃, 40℃, 45℃, 50℃, 55℃, 60℃) washing for 15-30s, and then placed in pure water at room temperature for 15-30s.
在一些实施方式中,所述前处理为:将铝箔置于3g/L氢氧化钠溶液中50℃洗涤15s,然后置于纯水中室温下清洗15s。In some embodiments, the pre-treatment is: washing the aluminum foil in a 3 g/L sodium hydroxide solution at 50° C. for 15 seconds, and then washing it in pure water at room temperature for 15 seconds.
2)发孔2) Hair holes
发孔腐蚀液为浓度为20-60wt%的硫酸和1-10wt%的盐酸的混合溶液。The pore etching solution is a mixed solution of sulfuric acid with a concentration of 20-60 wt% and hydrochloric acid with a concentration of 1-10 wt%.
在一些实施方式中,所述混合溶液中,硫酸的浓度为20-40wt%,例如:20wt%、23wt%、25wt%、28wt%、30wt%、33wt%、35wt%、38wt%、40wt%。In some embodiments, the concentration of sulfuric acid in the mixed solution is 20-40wt%, for example: 20wt%, 23wt%, 25wt%, 28wt%, 30wt%, 33wt%, 35wt%, 38wt%, 40wt%.
在一些实施方式中,所述混合溶液中,硫酸的浓度为40-60wt%,例如:40wt%、43wt%、45wt%、48wt%、50wt%、53wt%、55wt%、58wt%、60wt%。In some embodiments, the concentration of sulfuric acid in the mixed solution is 40-60wt%, for example: 40wt%, 43wt%, 45wt%, 48wt%, 50wt%, 53wt%, 55wt%, 58wt%, 60wt%.
在一些实施方式中,所述混合溶液中,盐酸的浓度为1-5wt%,例如:1wt%、2wt%、3wt%、4wt%、5wt%。In some embodiments, the concentration of hydrochloric acid in the mixed solution is 1-5 wt%, for example: 1 wt%, 2 wt%, 3 wt%, 4 wt%, 5 wt%.
在一些实施方式中,所述混合溶液中,盐酸的浓度为5-10wt%,例如:5wt%、6wt%、7wt%、8wt%、9wt%、10wt%。In some embodiments, the concentration of hydrochloric acid in the mixed solution is 5-10wt%, for example: 5wt%, 6wt%, 7wt%, 8wt%, 9wt%, 10wt%.
在一些实施方式中,所述发孔腐蚀液为浓度为40wt%的硫酸和5wt%的盐酸的混合溶液。In some embodiments, the pore etching solution is a mixed solution of sulfuric acid with a concentration of 40 wt% and hydrochloric acid with a concentration of 5 wt%.
在一些实施方式中,发孔温度为40-60℃,例如:40℃、45℃、50℃、55℃、60℃。In some embodiments, the hole temperature is 40-60°C, for example: 40°C, 45°C, 50°C, 55°C, 60°C.
在一些实施方式中,发孔温度为60-80℃,例如:60℃、65℃、70℃、75℃、80℃。In some embodiments, the pore temperature is 60-80°C, for example: 60°C, 65°C, 70°C, 75°C, 80°C.
在一些实施方式中,发孔的电流密度为1-3A/cm 2,例如:1A/cm 2、1.5A/cm 2、1.8A/cm 2、2A/cm 2、2.5A/cm 2、2.8A/cm 2、3A/cm 2In some embodiments, the current density of the holes is 1-3A/cm 2 , for example: 1A/cm 2 , 1.5A/cm 2 , 1.8A/cm 2 , 2A/cm 2 , 2.5A/cm 2 , 2.8 A/cm 2 , 3A/cm 2 .
在一些实施方式中,发孔的时间为5-10s,例如:5s、6s、7s、8s、9s、10s。In some embodiments, the time for making holes is 5-10s, for example: 5s, 6s, 7s, 8s, 9s, 10s.
在一些实施方式中,发孔的时间为10-20s,例如:10s、11s、12s、13s、14s、15s、16s、17s、18s、19s、20s。In some embodiments, the time for making holes is 10-20s, for example: 10s, 11s, 12s, 13s, 14s, 15s, 16s, 17s, 18s, 19s, 20s.
3)一次水洗3) One wash
将发孔处理后的铝箔置于纯水中室温下清洗15-30s:例如:15s、16s、17s、18s、19s、20s、21s、22s、23s、24s、25s、26s、27s、28s、29s、30s。Place the aluminum foil after the hole treatment in pure water for 15-30s at room temperature: for example: 15s, 16s, 17s, 18s, 19s, 20s, 21s, 22s, 23s, 24s, 25s, 26s, 27s, 28s, 29s , 30s.
在一些实施方式中,将发孔处理后的铝箔置于纯水中室温下清洗30s。In some embodiments, the aluminum foil after the pore treatment is placed in pure water and washed for 30 seconds at room temperature.
4)扩孔4) Reaming
本发明中使用镓基液态金属代替部分的酸溶液进行腐蚀来达到扩孔的目的。但是由于镓基液态金属在水中的分散性较差,因此,对镓基液态金属进行了包覆处理,使用高分子溶液对镓基液态金属进行包覆处理得到镓基液态金属纳米颗粒分散液,然后再将其与酸溶液混合,得到扩孔腐蚀液。In the present invention, gallium-based liquid metal is used to replace part of the acid solution for corrosion to achieve the purpose of hole expansion. However, due to the poor dispersibility of gallium-based liquid metal in water, the gallium-based liquid metal is coated, and the gallium-based liquid metal is coated with a polymer solution to obtain a gallium-based liquid metal nanoparticle dispersion. Then mix it with an acid solution to obtain a hole-expanding etching solution.
扩孔腐蚀过程中,加电作用下,镓基液态金属纳米颗粒快速进入腐蚀孔洞内,对孔壁以及孔底铝基体进行高效腐蚀,一方面减少锥形孔的扩大和氢离子的消耗;另一方面,不同于常规的酸腐蚀,镓基液态金属对铝的腐蚀作用为吞噬作用,不产生铝离子,减少了溶液中铝离子的富集,加速氢离子快速进入孔洞内,增加扩孔深度,减少枝孔或小孔的产生,提高腐蚀效率和容量,改善腐蚀箔的一致性。In the process of hole expansion and corrosion, gallium-based liquid metal nanoparticles quickly enter the corrosion hole under the action of electric power, and efficiently corrode the hole wall and the aluminum matrix at the bottom of the hole. On the one hand, it reduces the expansion of the tapered hole and the consumption of hydrogen ions; On the one hand, unlike conventional acid corrosion, the corrosion effect of gallium-based liquid metal on aluminum is phagocytosis, which does not produce aluminum ions, reduces the concentration of aluminum ions in the solution, accelerates the rapid entry of hydrogen ions into the pores, and increases the depth of hole expansion. , Reduce the generation of branch holes or small holes, improve the corrosion efficiency and capacity, and improve the consistency of the corroded foil.
具体地,所述扩孔腐蚀液包括镓基液态金属纳米颗粒分散液,所述镓基液态金属纳米颗粒分散液由镓基液态金属在聚苯乙烯磺酸和聚苯乙烯磺酸钠的高分子溶液中分散得到,其中,镓基液态金属的质量分数为0.3-1.5%。Specifically, the pore reaming etching solution includes a gallium-based liquid metal nanoparticle dispersion, and the gallium-based liquid metal nanoparticle dispersion is composed of a polymer of gallium-based liquid metal in polystyrene sulfonic acid and sodium polystyrene sulfonate. Dispersed in the solution, wherein the mass fraction of the gallium-based liquid metal is 0.3-1.5%.
优选地,所述聚苯乙烯磺酸和聚苯乙烯磺酸钠的质量比为20:80-50:50。Preferably, the mass ratio of the polystyrene sulfonic acid and sodium polystyrene sulfonate is 20:80-50:50.
优选地,所述镓基液态金属包括镓和铟,所述镓和铟的质量比为60-75:40-25。Preferably, the gallium-based liquid metal includes gallium and indium, and the mass ratio of gallium to indium is 60-75:40-25.
在此比例组成下,镓基液态金属的熔点较低,且成液态后流动性很好,表面张力较小,在高分子溶液中易于分散,便于镓基液态金属纳米颗粒的制备。With this composition, the gallium-based liquid metal has a low melting point, has good fluidity after being in a liquid state, and has a low surface tension. It is easy to disperse in a polymer solution and facilitates the preparation of gallium-based liquid metal nanoparticles.
所述镓和铟的质量比的实例包括但不限于:60:40、61:39、62:38、63:37、64:36、65:35、66:34、67:33、68:32、69:31、70:30、71:39、72:28、73:27、74:26、75:25。Examples of the mass ratio of gallium and indium include but are not limited to: 60:40, 61:39, 62:38, 63:37, 64:36, 65:35, 66:34, 67:33, 68:32 , 69:31, 70:30, 71:39, 72:28, 73:27, 74:26, 75:25.
根据本发明的实施方式,所述聚苯乙烯磺酸和聚苯乙烯磺酸钠的质量比的实例包括但不限于:20:80、25:75、30:70、35:65、40:60、45:55、50:50。According to an embodiment of the present invention, examples of the mass ratio of polystyrene sulfonic acid and sodium polystyrene sulfonate include, but are not limited to: 20:80, 25:75, 30:70, 35:65, 40:60 , 45:55, 50:50.
在一些实施方式中,所述镓基液态金属纳米颗粒分散液中,镓基液态金属的质量分数为0.5-1.5%,例如:0.5%、0.6%、0.7%、0.8%、0.9%、1.0%、1.1%、1.2%、1.3%、1.4%、1.5%。In some embodiments, in the gallium-based liquid metal nanoparticle dispersion, the mass fraction of the gallium-based liquid metal is 0.5-1.5%, for example: 0.5%, 0.6%, 0.7%, 0.8%, 0.9%, 1.0% , 1.1%, 1.2%, 1.3%, 1.4%, 1.5%.
镓基液态金属的含量过低时,在后续扩孔中,作用效果不明显;如果加入量过高,则不易于在高分子溶液中的分散,且颗粒尺寸会较大,不易于后面进入到腐蚀孔洞内。When the content of gallium-based liquid metal is too low, the effect is not obvious in the subsequent hole expansion; if the added amount is too high, it will not be easy to disperse in the polymer solution, and the particle size will be large, and it will not be easy to enter later. Corrosion in the hole.
进一步地,所述酸溶液可列举:盐酸溶液、硝酸溶液等,优选硝酸溶液。Further, the acid solution may include: hydrochloric acid solution, nitric acid solution, etc., preferably nitric acid solution.
根据本发明的实施方式,所述硝酸溶液的浓度为5-20wt%,例如:5wt%、6wt%、8wt%、10wt%、12wt%、15wt%、18wt%、20wt%。According to an embodiment of the present invention, the concentration of the nitric acid solution is 5-20wt%, for example: 5wt%, 6wt%, 8wt%, 10wt%, 12wt%, 15wt%, 18wt%, 20wt%.
优选地,所述镓基液态金属纳米颗粒分散液的质量为硝酸溶液质量的0.1-5%,即,优选地,所述扩孔腐蚀液中,所述镓基液态金属纳米颗粒分散液的质量为硝酸溶液质量的0.3%-5%。Preferably, the mass of the gallium-based liquid metal nanoparticle dispersion is 0.1-5% of the mass of the nitric acid solution, that is, preferably, the mass of the gallium-based liquid metal nanoparticle dispersion is It is 0.3%-5% of the mass of the nitric acid solution.
镓基液态金属纳米颗粒分散液添加量较少时,仅能对部分孔洞进行腐蚀,作用效果不明显。添加量过高时,除了部分镓基液态金属纳米颗粒进入孔洞内进行腐蚀,同时会有部分残留在溶液中,对孔洞的洞口进行腐蚀,造成锥形孔的扩大和并孔现象,使得腐蚀箔容量降低。When the gallium-based liquid metal nanoparticle dispersion is added in a small amount, only part of the holes can be corroded, and the effect is not obvious. When the addition amount is too high, in addition to part of the gallium-based liquid metal nanoparticles entering the hole to corrode, some remain in the solution, corroding the hole of the hole, causing the expansion of the tapered hole and the phenomenon of merging, which will corrode the foil. The capacity is reduced.
在一些实施方式中,所述镓基液态金属纳米颗粒分散液的质量为硝酸溶液质量的0.3%-1%,例如:0.3%、0.4%、0.5%、0.6%、0.7%、0.8%、0.9%、1%。In some embodiments, the mass of the gallium-based liquid metal nanoparticle dispersion is 0.3%-1% of the mass of the nitric acid solution, for example: 0.3%, 0.4%, 0.5%, 0.6%, 0.7%, 0.8%, 0.9% %,1%.
在一些实施方式中,所述镓基液态金属纳米颗粒分散液的质量为硝酸溶液质量的1%-5%,例如:1%、1.5%、2%、2.5%、3%、3.5%、4%、4.5%、5%。In some embodiments, the mass of the gallium-based liquid metal nanoparticle dispersion is 1% to 5% of the mass of the nitric acid solution, for example: 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4 %, 4.5%, 5%.
优选地,所述扩孔的条件为:温度为20-50℃,电流密度为0.1-1A/cm2,扩孔时间为20-50s。Preferably, the conditions for the hole expansion are: the temperature is 20-50° C., the current density is 0.1-1 A/cm2, and the hole expansion time is 20-50s.
所述扩孔温度可列举:20℃、25℃、30℃、35℃、40℃、45℃、50℃。The expansion temperature may include: 20°C, 25°C, 30°C, 35°C, 40°C, 45°C, and 50°C.
所述扩孔的电流密度为0.1-1A/cm 2,例如:0.1A/cm 2、0.2A/cm 2、0.3A/cm 2、0.4A/cm 2、0.5A/cm 2、0.6A/cm 2、0.7A/cm 2、0.8A/cm 2、0.9A/cm 2、1A/cm 2The current density of the reaming is 0.1-1A/cm 2 , for example: 0.1A/cm 2 , 0.2A/cm 2 , 0.3A/cm 2 , 0.4A/cm 2 , 0.5A/cm 2 , 0.6A/cm 2 cm 2 , 0.7A/cm 2 , 0.8A/cm 2 , 0.9A/cm 2 , 1A/cm 2 .
所述发孔的时间可列举:20s、23s、25s、28s、30s、33s、35s、38s、40s、43s、45s、48s、50s。The time for the holes can be listed as: 20s, 23s, 25s, 28s, 30s, 33s, 35s, 38s, 40s, 43s, 45s, 48s, 50s.
在一些实施方式中,所述发孔的条件为:温度为50℃,电流密度为0.5A/cm 2,发孔时间为30s。 In some embodiments, the conditions for forming the holes are: a temperature of 50° C., a current density of 0.5 A/cm 2 , and a hole forming time of 30 seconds.
5)二次水洗5) Secondary washing
将扩孔处理后的铝箔置于纯水中室温下清洗15-30s:例如:15s、16s、17s、18s、19s、20s、21s、22s、23s、24s、25s、26s、27s、28s、29s、30s。Place the expanded aluminum foil in pure water for 15-30s at room temperature: for example: 15s, 16s, 17s, 18s, 19s, 20s, 21s, 22s, 23s, 24s, 25s, 26s, 27s, 28s, 29s , 30s.
在一些实施方式中,将扩孔处理后的铝箔置于纯水中室温下清洗20s。In some embodiments, the aluminum foil after the hole expansion treatment is placed in pure water and washed for 20 seconds at room temperature.
6)干燥6) Dry
将二次水洗后的铝箔在100-300℃干燥2-10min,得到电极箔。The aluminum foil after the second water washing is dried at 100-300° C. for 2-10 minutes to obtain electrode foil.
所述干燥温度可列举:100℃、120℃、150℃、180℃、200℃、220℃、250℃、280℃、300℃。The drying temperature may include: 100°C, 120°C, 150°C, 180°C, 200°C, 220°C, 250°C, 280°C, and 300°C.
所述干燥时间可列举:2min、3min、4min、5min、6min、7min、8min、9min、10min。The drying time may include: 2min, 3min, 4min, 5min, 6min, 7min, 8min, 9min, 10min.
根据本发明的实施方式,所述电极箔的腐蚀工艺包括:According to an embodiment of the present invention, the etching process of the electrode foil includes:
1)前处理:将铝箔置于1-5g/L氢氧化钠溶液中进行洗涤,然后置于纯水中清洗;1) Pre-treatment: Wash the aluminum foil in 1-5g/L sodium hydroxide solution, and then clean it in pure water;
2)发孔:将前处理后的铝箔置于浓度为20-60wt%的硫酸和1-10wt%的盐酸的混合溶液中进行发孔,温度为40-80℃,电流密度为0.5-3.0A/cm 2,发孔的时间为5-20s; 2) Pore: place the pre-treated aluminum foil in a mixed solution of 20-60wt% sulfuric acid and 1-10wt% hydrochloric acid to make holes at a temperature of 40-80°C and a current density of 0.5-3.0A /cm 2 , the time for making holes is 5-20s;
3)一次水洗;将发孔处理后的铝箔置于纯水中清洗;3) Wash once with water; wash the aluminum foil with pores in pure water;
4)扩孔:将一次水洗后的铝箔置于包含镓基液态金属纳米颗粒分散液的扩孔腐蚀液进行扩孔,温度为20-50℃,电流密度为0.1-1A/cm 2,扩孔时间为20-50s; 4) Hole expansion: Place the aluminum foil washed once in a hole expansion corrosion solution containing a gallium-based liquid metal nanoparticle dispersion liquid for hole expansion, the temperature is 20-50℃, the current density is 0.1-1A/cm 2 , and the hole is expanded. The time is 20-50s;
5)二次水洗:将扩孔处理后的铝箔在纯水中清洗;5) Secondary water washing: Wash the aluminum foil after the hole expansion treatment in pure water;
6)干燥:将二次水洗后的铝箔干燥,得到电极箔。6) Drying: drying the aluminum foil after the second water washing to obtain an electrode foil.
本发明所述“室温”是指温度为20-30℃。The "room temperature" in the present invention refers to a temperature of 20-30°C.
以下所述的是本发明的优选实施方式,本发明所保护的不限于以下优选实施方式。应当指出,对于本领域的技术人员来说在此发明创造构思的基础上,做出的若干变形和改进,都属于本发明的保护范围。The following are the preferred embodiments of the present invention, and the protection of the present invention is not limited to the following preferred embodiments. It should be pointed out that for those skilled in the art, a number of modifications and improvements made on the basis of the inventive concept of this invention belong to the protection scope of the present invention.
实施例1Example 1
1)将聚苯乙烯磺酸和聚苯乙烯磺酸钠按照质量比为30:70混合,得到高分子溶液。1) Mixing polystyrene sulfonic acid and sodium polystyrene sulfonate in a mass ratio of 30:70 to obtain a polymer solution.
2)将镓基液态金属(镓:铟=65:35)以3mL/min的速度滴加到上述高分子溶液中,并施加搅拌和超声震荡,搅拌速度为1500rpm,超声波震荡频率为35KHz,得到镓基液态金属纳米颗粒分散液,其中,镓基液态金属的质量分数0.8%。2) Add the gallium-based liquid metal (gallium: indium=65:35) dropwise to the above polymer solution at a speed of 3mL/min, and apply stirring and ultrasonic vibration, the stirring speed is 1500rpm, and the ultrasonic vibration frequency is 35KHz, to obtain The gallium-based liquid metal nanoparticle dispersion liquid, wherein the mass fraction of the gallium-based liquid metal is 0.8%.
3)将上述镓基液态金属纳米颗粒分散液以0.5mL/min的速度滴加到浓度为6wt%的硝酸溶液中,并施加搅拌和超声震荡,搅拌速度为3500rpm,超声震荡频率为40KHz,得到扩孔腐蚀液,其中,镓基液态金属纳米颗粒分散液的质量为硝酸溶液质量的1.5%。3) The above-mentioned gallium-based liquid metal nanoparticle dispersion was added dropwise to a 6 wt% nitric acid solution at a speed of 0.5 mL/min, and stirring and ultrasonic vibration were applied, the stirring speed was 3500 rpm, and the ultrasonic vibration frequency was 40 KHz to obtain A hole-expanding etching solution, wherein the mass of the gallium-based liquid metal nanoparticle dispersion liquid is 1.5% of the mass of the nitric acid solution.
4)前处理:使用3g/L的氢氧化钠溶液对铝箔进行处理,除掉表面的油污和氧化层,温度为50℃,处理处理时间为15s,然后将铝箔置于纯水中室温下清洗15s。4) Pre-treatment: Use 3g/L sodium hydroxide solution to treat the aluminum foil to remove the oil and oxide layer on the surface. The temperature is 50℃, and the treatment time is 15s. Then the aluminum foil is cleaned in pure water at room temperature 15s.
5)发孔:将前处理后的铝箔在腐蚀槽液中加电进行发孔处理,所述腐蚀槽液为浓度为40wt%的硫酸和5wt%的盐酸的混合溶液,温度为40℃,电流密度为1.8A/cm 2,发孔时间为20s。 5) Pore formation: the pre-treated aluminum foil is energized in an etching bath solution, which is a mixed solution of sulfuric acid with a concentration of 40 wt% and hydrochloric acid with a concentration of 5 wt%, at a temperature of 40°C, and a current The density is 1.8A/cm 2 , and the hole making time is 20s.
6)一次水洗:将发孔处理后的铝箔在纯水中清洗30s,室温条件。6) One-time washing: Wash the aluminum foil with pores in pure water for 30s at room temperature.
7)扩孔:将经水洗后的铝箔置于步骤3)制备的扩孔腐蚀液中加电进行扩孔处理,温度为50℃,电流密度为0.5A/cm 2,扩孔时间为30s。 7) Reaming: The aluminum foil washed with water is placed in the reaming etching solution prepared in step 3) and then electrified for reaming treatment. The temperature is 50° C., the current density is 0.5 A/cm 2 , and the reaming time is 30 seconds.
8)二次水洗:将扩孔处理后的铝箔在在纯水中室温下清洗20s。8) Secondary water washing: Wash the expanded aluminum foil in pure water at room temperature for 20 seconds.
9)干燥:将二次水洗后的铝箔在220℃下进行干燥,干燥时间为3min。9) Drying: The aluminum foil after the second water washing is dried at 220°C, and the drying time is 3 minutes.
本实施方式得到的电极箔(腐蚀箔)的截面扫描电镜(SEM)形貌如图1所示。由图可知,腐蚀箔孔洞孔径和长度尺寸较为均一,中间夹心层厚度均匀,扩孔深度一致性较好。The cross-sectional scanning electron microscope (SEM) morphology of the electrode foil (etched foil) obtained in this embodiment is shown in FIG. 1. It can be seen from the figure that the hole diameter and length of the corroded foil are relatively uniform, the thickness of the middle sandwich layer is uniform, and the hole reaming depth is consistent.
实施例2Example 2
1)将聚苯乙烯磺酸和聚苯乙烯磺酸钠按照质量比为20:80混合,得到高分子溶液。1) Mixing polystyrene sulfonic acid and sodium polystyrene sulfonate in a mass ratio of 20:80 to obtain a polymer solution.
2)将镓基液态金属(镓:铟=60:40)以15mL/min的速度滴加到上述高分子溶液中,并施加搅拌和超声震荡,搅拌速度为1000rpm,超声波震荡频率为20KHz,得到镓基液态金属纳米颗粒分散液,其中,镓基液态金属的质量分数0.5%。2) Add the gallium-based liquid metal (gallium: indium=60:40) dropwise to the above polymer solution at a rate of 15mL/min, and apply stirring and ultrasonic vibration, the stirring speed is 1000rpm, the ultrasonic vibration frequency is 20KHz, and the result is The gallium-based liquid metal nanoparticle dispersion liquid, wherein the mass fraction of the gallium-based liquid metal is 0.5%.
3)将上述镓基液态金属纳米颗粒分散液以0.1mL/min的速度滴加到浓度为15wt%的硝酸溶液中,并施加搅拌和超声震荡,搅拌速度为4000rpm,超声震荡频率为40KHz,得到扩孔腐蚀液,其中,镓基液态金属纳米颗粒分散液的质量为硝酸溶液质量的0.3%。3) The above-mentioned gallium-based liquid metal nanoparticle dispersion was added dropwise to a nitric acid solution with a concentration of 15 wt% at a speed of 0.1 mL/min, and stirring and ultrasonic vibration were applied, the stirring speed was 4000 rpm, and the ultrasonic vibration frequency was 40 KHz to obtain A hole-expanding etching solution, wherein the mass of the gallium-based liquid metal nanoparticle dispersion liquid is 0.3% of the mass of the nitric acid solution.
4)前处理:使用3g/L的氢氧化钠溶液对铝箔进行处理,除掉表面的油污和氧化层,温度为50℃,处理处理时间为15s,然后将铝箔置于纯水中室温下清洗15s。4) Pre-treatment: Use 3g/L sodium hydroxide solution to treat the aluminum foil to remove the oil and oxide layer on the surface. The temperature is 50℃, and the treatment time is 15s. Then the aluminum foil is cleaned in pure water at room temperature 15s.
5)发孔:将前处理后的铝箔在腐蚀槽液中加电进行发孔处理,所述腐蚀槽液为浓度为40wt%的硫酸和5wt%的盐酸的混合溶液,温度为40℃,电流密度为1.8A/cm 2,发孔时间为20s。 5) Pore formation: the pre-treated aluminum foil is energized in an etching bath solution, which is a mixed solution of sulfuric acid with a concentration of 40 wt% and hydrochloric acid with a concentration of 5 wt%, at a temperature of 40°C, and a current The density is 1.8A/cm 2 , and the hole making time is 20s.
6)一次水洗:将发孔处理后的铝箔在纯水中清洗30s,室温条件。6) One-time washing: Wash the aluminum foil with pores in pure water for 30s at room temperature.
7)扩孔:将经水洗后的铝箔置于步骤3)制备的扩孔腐蚀液中加电进行扩孔处理,温度为50℃,电流密度为0.5A/cm 2,扩孔时间为30s。 7) Reaming: The aluminum foil washed with water is placed in the reaming etching solution prepared in step 3) and then electrified for reaming treatment. The temperature is 50° C., the current density is 0.5 A/cm 2 , and the reaming time is 30 seconds.
8)二次水洗:将扩孔处理后的铝箔在在纯水中室温下清洗20s。8) Secondary water washing: Wash the expanded aluminum foil in pure water at room temperature for 20 seconds.
9)干燥:将二次水洗后的铝箔在220℃下进行干燥,干燥时间为3min。9) Drying: The aluminum foil after the second water washing is dried at 220°C, and the drying time is 3 minutes.
实施例3Example 3
1)将聚苯乙烯磺酸和聚苯乙烯磺酸钠按照质量比为50:50混合,得到高分子溶液。1) Mixing polystyrene sulfonic acid and sodium polystyrene sulfonate in a mass ratio of 50:50 to obtain a polymer solution.
2)将镓基液态金属(镓:铟=75:25)以5mL/min的速度滴加到上述高分子溶液中,并施加搅拌和超声震荡,搅拌速度为800rpm,超声波震荡频率为40KHz,得到镓基液态金属纳米颗粒分散液,其中,镓基液态金属的质量分数1.5%。2) Add the gallium-based liquid metal (gallium: indium=75:25) dropwise to the above polymer solution at a speed of 5mL/min, and apply stirring and ultrasonic vibration, the stirring speed is 800rpm, and the ultrasonic vibration frequency is 40KHz to obtain The gallium-based liquid metal nanoparticle dispersion liquid, wherein the mass fraction of the gallium-based liquid metal is 1.5%.
3)将上述镓基液态金属纳米颗粒分散液以0.1mL/min的速度滴加到浓度为20wt%的硝酸溶液中,并施加搅拌和超声震荡,搅拌速度为2000rpm,超声震荡频率为40KHz,得到扩孔腐蚀液,其中,镓基液态金属纳米颗粒分散液的质量为硝酸溶液质量的5%。3) The above-mentioned gallium-based liquid metal nanoparticle dispersion was added dropwise to a nitric acid solution with a concentration of 20 wt% at a rate of 0.1 mL/min, and stirring and ultrasonic vibration were applied, the stirring speed was 2000 rpm, and the ultrasonic vibration frequency was 40 KHz to obtain A hole expanding etching solution, wherein the mass of the gallium-based liquid metal nanoparticle dispersion liquid is 5% of the mass of the nitric acid solution.
4)前处理:使用3g/L的氢氧化钠溶液对铝箔进行处理,除掉表面的油污和氧化层,温度为50℃,处理处理时间为15s,然后将铝箔置于纯水中室温下清洗15s。4) Pre-treatment: Use 3g/L sodium hydroxide solution to treat the aluminum foil to remove the oil and oxide layer on the surface. The temperature is 50℃, and the treatment time is 15s. Then the aluminum foil is cleaned in pure water at room temperature 15s.
5)发孔:将前处理后的铝箔在腐蚀槽液中加电进行发孔处理,所述腐蚀槽液为浓度为40wt%的硫酸和5wt%的盐酸的混合溶液,温度为40℃,电流密度为1.8A/cm 2,发孔时间为20s。 5) Pore formation: the pre-treated aluminum foil is energized in an etching bath solution, which is a mixed solution of sulfuric acid with a concentration of 40 wt% and hydrochloric acid with a concentration of 5 wt%, at a temperature of 40°C, and a current The density is 1.8A/cm 2 , and the hole making time is 20s.
6)一次水洗:将发孔处理后的铝箔在纯水中清洗30s,室温条件。6) One-time washing: Wash the aluminum foil with pores in pure water for 30s at room temperature.
7)扩孔:将经水洗后的铝箔置于步骤3)制备的扩孔腐蚀液中加电进行扩孔处理,温度为50℃,电流密度为0.5A/cm 2,扩孔时间为30s。 7) Reaming: The aluminum foil washed with water is placed in the reaming etching solution prepared in step 3) and then electrified for reaming treatment. The temperature is 50° C., the current density is 0.5 A/cm 2 , and the reaming time is 30 seconds.
8)二次水洗:将扩孔处理后的铝箔在在纯水中室温下清洗20s。8) Secondary water washing: Wash the expanded aluminum foil in pure water at room temperature for 20 seconds.
9)干燥:将二次水洗后的铝箔在220℃下进行干燥,干燥时间为3min。9) Drying: The aluminum foil after the second water washing is dried at 220°C, and the drying time is 3 minutes.
实施例4Example 4
1)将聚苯乙烯磺酸和聚苯乙烯磺酸钠按照质量比为40:60混合,得到高分子溶液。1) Mixing polystyrene sulfonic acid and sodium polystyrene sulfonate in a mass ratio of 40:60 to obtain a polymer solution.
2)将镓基液态金属(镓:铟=70:30)以20mL/min的速度滴加到上述高分子溶液中,并施加搅拌和超声震荡,搅拌速度为2000rpm,超声波震荡频率为40KHz,得到镓基液态金属纳米颗粒分散液,其中,镓基液态金属的质量分数0.8%。2) Add gallium-based liquid metal (gallium: indium=70:30) dropwise to the above polymer solution at a speed of 20 mL/min, and apply stirring and ultrasonic vibration, the stirring speed is 2000 rpm, and the ultrasonic vibration frequency is 40 KHz, to obtain The gallium-based liquid metal nanoparticle dispersion liquid, wherein the mass fraction of the gallium-based liquid metal is 0.8%.
3)将上述镓基液态金属纳米颗粒分散液以0.1mL/min的速度滴加到浓度为8wt%的硝酸 溶液中,并施加搅拌和超声震荡,搅拌速度为2000rpm,超声震荡频率为40KHz,得到扩孔腐蚀液,其中,镓基液态金属纳米颗粒分散液的质量为硝酸溶液质量的为5%。3) The above-mentioned gallium-based liquid metal nanoparticle dispersion was added dropwise to a nitric acid solution with a concentration of 8 wt% at a rate of 0.1 mL/min, and stirring and ultrasonic vibration were applied, the stirring speed was 2000 rpm, and the ultrasonic vibration frequency was 40 KHz to obtain A hole-expanding etching solution, wherein the mass of the gallium-based liquid metal nanoparticle dispersion is 5% of the mass of the nitric acid solution.
4)前处理:使用3g/L的氢氧化钠溶液对铝箔进行处理,除掉表面的油污和氧化层,温度为50℃,处理处理时间为15s,然后将铝箔置于纯水中室温下清洗15s。4) Pre-treatment: Use 3g/L sodium hydroxide solution to treat the aluminum foil to remove the oil and oxide layer on the surface. The temperature is 50℃, and the treatment time is 15s. Then the aluminum foil is cleaned in pure water at room temperature 15s.
5)发孔:将前处理后的铝箔在腐蚀槽液中加电进行发孔处理,所述腐蚀槽液为浓度为40wt%的硫酸和5wt%的盐酸的混合溶液,温度为40℃,电流密度为1.8A/cm 2,发孔时间为20s。 5) Pore formation: the pre-treated aluminum foil is energized in an etching bath solution, which is a mixed solution of sulfuric acid with a concentration of 40 wt% and hydrochloric acid with a concentration of 5 wt%, at a temperature of 40°C, and a current The density is 1.8A/cm 2 , and the hole making time is 20s.
6)一次水洗:将发孔处理后的铝箔在纯水中清洗30s,室温条件。6) One-time washing: Wash the aluminum foil with pores in pure water for 30s at room temperature.
7)扩孔:将经水洗后的铝箔置于步骤3)制备的扩孔腐蚀液中加电进行扩孔处理,温度为50℃,电流密度为0.5A/cm 2,扩孔时间为30s。 7) Reaming: The aluminum foil washed with water is placed in the reaming etching solution prepared in step 3) and then electrified for reaming treatment. The temperature is 50° C., the current density is 0.5 A/cm 2 , and the reaming time is 30 seconds.
8)二次水洗:将扩孔处理后的铝箔在在纯水中室温下清洗20s。8) Secondary water washing: Wash the expanded aluminum foil in pure water at room temperature for 20 seconds.
9)干燥:将二次水洗后的铝箔在220℃下进行干燥,干燥时间为3min。9) Drying: The aluminum foil after the second water washing is dried at 220°C, and the drying time is 3 minutes.
对比例1Comparative example 1
1)前处理:使用3g/L的氢氧化钠溶液对铝箔进行处理,除掉表面的油污和氧化层,温度为50℃,处理处理时间为15s,然后将铝箔置于纯水中室温下清洗15s。1) Pre-treatment: Use 3g/L sodium hydroxide solution to treat the aluminum foil to remove the oil and oxide layer on the surface. The temperature is 50℃, and the treatment time is 15s. Then the aluminum foil is cleaned in pure water at room temperature 15s.
2)发孔:将前处理后的铝箔在腐蚀槽液中加电进行发孔处理,所述腐蚀槽液为浓度为40wt%的硫酸和5wt%的盐酸的混合溶液,温度为40℃,电流密度为1.8A/cm 2,发孔时间为20s。 2) Pore formation: the pre-treated aluminum foil is energized in an etching bath solution, which is a mixed solution of sulfuric acid with a concentration of 40wt% and hydrochloric acid at a concentration of 5wt%, at a temperature of 40°C, and a current The density is 1.8A/cm 2 , and the hole making time is 20s.
3)一次水洗:将发孔处理后的铝箔在纯水中清洗30s,室温条件。3) One-time washing: Wash the aluminum foil with pores in pure water for 30s at room temperature.
4)扩孔:将经水洗后的铝箔置于6%的硝酸扩孔液中加电进行扩孔处理,温度为50℃,电流密度为0.5A/cm 2,扩孔时间为30s。 4) Reaming: The aluminum foil washed with water is placed in a 6% nitric acid reaming solution and electrified for reaming treatment, the temperature is 50°C, the current density is 0.5A/cm 2 , and the reaming time is 30s.
5)二次水洗:将扩孔处理后的铝箔在在纯水中室温下清洗20s。5) Secondary water washing: Wash the expanded aluminum foil in pure water at room temperature for 20 seconds.
6)干燥:将二次水洗后的铝箔在220℃下进行干燥,干燥时间为3min。6) Drying: The aluminum foil after the second water washing is dried at 220°C, and the drying time is 3 minutes.
本实施方式得到的电极箔(腐蚀箔)的截面扫描电镜(SEM)形貌如图2所示。由图可知,腐蚀箔孔洞孔径和长度尺寸参差不齐,中间夹心层厚度均匀性很差,甚至出现了穿孔现象,扩孔深度一致性不好。The cross-sectional scanning electron microscope (SEM) morphology of the electrode foil (etched foil) obtained in this embodiment is shown in FIG. 2. It can be seen from the figure that the pore size and length of the corroded foil are uneven, the thickness uniformity of the middle sandwich layer is very poor, even perforation occurs, and the consistency of the reaming depth is not good.
对比例2Comparative example 2
1)将镓基液态金属(镓:铟=65:35)以0.5mL/min的速度滴加到浓度为6wt%的硝酸溶液中,并施加搅拌和超声震荡,搅拌速度为3500rpm,超声震荡频率为40KHz,得到扩孔腐蚀液,其中,镓基液态金属纳米颗粒分散液的质量为硝酸溶液质量的1.5%。1) Add gallium-based liquid metal (gallium: indium=65:35) dropwise to a 6wt% nitric acid solution at a speed of 0.5mL/min, and apply stirring and ultrasonic vibration. The stirring speed is 3500rpm and the ultrasonic vibration frequency It is 40KHz to obtain a hole-expanding etching solution, wherein the mass of the gallium-based liquid metal nanoparticle dispersion liquid is 1.5% of the mass of the nitric acid solution.
2)前处理:使用3g/L的氢氧化钠溶液对铝箔进行处理,除掉表面的油污和氧化层,温度为50℃,处理处理时间为15s,然后将铝箔置于纯水中室温下清洗15s。2) Pre-treatment: Use 3g/L sodium hydroxide solution to process the aluminum foil to remove the oil stains and oxide layers on the surface. The temperature is 50℃, the treatment time is 15s, and then the aluminum foil is cleaned in pure water at room temperature. 15s.
3)发孔:将前处理后的铝箔在腐蚀槽液中加电进行发孔处理,所述腐蚀槽液为浓度为40wt%的硫酸和5wt%的盐酸的混合溶液,温度为40℃,电流密度为1.8A/cm 2,发孔时间为20s。 3) Pore formation: the pre-treated aluminum foil is energized in an etching bath solution, which is a mixed solution of 40wt% sulfuric acid and 5wt% hydrochloric acid, at a temperature of 40°C, and a current The density is 1.8A/cm 2 , and the hole making time is 20s.
4)一次水洗:将发孔处理后的铝箔在纯水中清洗30s,室温条件。4) One-time washing: Wash the aluminum foil after pore treatment in pure water for 30s at room temperature.
5)扩孔:将经水洗后的铝箔置于步骤3)制备的扩孔腐蚀液中加电进行扩孔处理,温度 为50℃,电流密度为0.5A/cm 2,扩孔时间为30s。 5) Reaming: The aluminum foil washed with water is placed in the reaming etching solution prepared in step 3) and then electrified for reaming treatment. The temperature is 50° C., the current density is 0.5 A/cm 2 , and the reaming time is 30 seconds.
6)二次水洗:将扩孔处理后的铝箔在在纯水中室温下清洗20s。6) Secondary water washing: Wash the expanded aluminum foil in pure water at room temperature for 20 seconds.
7)干燥:将二次水洗后的铝箔在220℃下进行干燥,干燥时间为3min。7) Drying: The aluminum foil after the second water washing is dried at 220°C, and the drying time is 3 minutes.
对比例3Comparative example 3
1)将聚苯乙烯磺酸和聚苯乙烯磺酸钠按照质量比为10:90混合,得到高分子溶液。1) Mixing polystyrene sulfonic acid and sodium polystyrene sulfonate in a mass ratio of 10:90 to obtain a polymer solution.
2)将镓基液态金属(镓:铟=65:35)以3mL/min的速度滴加到上述高分子溶液中,并施加搅拌和超声震荡,搅拌速度为1500rpm,超声波震荡频率为35KHz,得到镓基液态金属纳米颗粒分散液,其中,镓基液态金属的质量分数0.8%。2) Add the gallium-based liquid metal (gallium: indium=65:35) dropwise to the above polymer solution at a speed of 3mL/min, and apply stirring and ultrasonic vibration, the stirring speed is 1500rpm, and the ultrasonic vibration frequency is 35KHz, to obtain The gallium-based liquid metal nanoparticle dispersion liquid, wherein the mass fraction of the gallium-based liquid metal is 0.8%.
3)将上述镓基液态金属纳米颗粒分散液以0.5mL/min的速度滴加到浓度为6wt%的硝酸溶液中,并施加搅拌和超声震荡,搅拌速度为3500rpm,超声震荡频率为40KHz,得到扩孔腐蚀液,其中,镓基液态金属纳米颗粒分散液的质量为硝酸溶液质量的1.5%。3) The above-mentioned gallium-based liquid metal nanoparticle dispersion was added dropwise to a 6 wt% nitric acid solution at a speed of 0.5 mL/min, and stirring and ultrasonic vibration were applied, the stirring speed was 3500 rpm, and the ultrasonic vibration frequency was 40 KHz to obtain A hole-expanding etching solution, wherein the mass of the gallium-based liquid metal nanoparticle dispersion liquid is 1.5% of the mass of the nitric acid solution.
4)前处理:使用3g/L的氢氧化钠溶液对铝箔进行处理,除掉表面的油污和氧化层,温度为50℃,处理处理时间为15s,然后将铝箔置于纯水中室温下清洗15s。4) Pre-treatment: Use 3g/L sodium hydroxide solution to treat the aluminum foil to remove the oil and oxide layer on the surface. The temperature is 50℃, and the treatment time is 15s. Then the aluminum foil is cleaned in pure water at room temperature 15s.
5)发孔:将前处理后的铝箔在腐蚀槽液中加电进行发孔处理,所述腐蚀槽液为浓度为40wt%的硫酸和5wt%的盐酸的混合溶液,温度为40℃,电流密度为1.8A/cm 2,发孔时间为20s。 5) Pore formation: the pre-treated aluminum foil is energized in an etching bath solution, which is a mixed solution of sulfuric acid with a concentration of 40 wt% and hydrochloric acid with a concentration of 5 wt%, at a temperature of 40°C, and a current The density is 1.8A/cm 2 , and the hole making time is 20s.
6)一次水洗:将发孔处理后的铝箔在纯水中清洗30s,室温条件。6) One-time washing: Wash the aluminum foil with pores in pure water for 30s at room temperature.
7)扩孔:将经水洗后的铝箔置于步骤3)制备的扩孔腐蚀液中加电进行扩孔处理,温度为50℃,电流密度为0.5A/cm 2,扩孔时间为30s。 7) Reaming: The aluminum foil washed with water is placed in the reaming etching solution prepared in step 3) and then electrified for reaming treatment. The temperature is 50° C., the current density is 0.5 A/cm 2 , and the reaming time is 30 seconds.
8)二次水洗:将扩孔处理后的铝箔在在纯水中室温下清洗20s。8) Secondary water washing: Wash the expanded aluminum foil in pure water at room temperature for 20 seconds.
9)干燥:将二次水洗后的铝箔在220℃下进行干燥,干燥时间为3min。9) Drying: The aluminum foil after the second water washing is dried at 220°C, and the drying time is 3 minutes.
对比例4Comparative example 4
1)将聚苯乙烯磺酸和聚苯乙烯磺酸钠按照质量比为30:70混合,得到高分子溶液。1) Mixing polystyrene sulfonic acid and sodium polystyrene sulfonate in a mass ratio of 30:70 to obtain a polymer solution.
2)将镓基液态金属(镓:铟=50:50)以3mL/min的速度滴加到上述高分子溶液中,并施加搅拌和超声震荡,搅拌速度为1500rpm,超声波震荡频率为35KHz,得到镓基液态金属纳米颗粒分散液,其中,镓基液态金属的质量分数0.8%。2) Add the gallium-based liquid metal (gallium: indium=50:50) dropwise to the above polymer solution at a speed of 3mL/min, and apply stirring and ultrasonic vibration, the stirring speed is 1500rpm, and the ultrasonic vibration frequency is 35KHz, to obtain The gallium-based liquid metal nanoparticle dispersion liquid, wherein the mass fraction of the gallium-based liquid metal is 0.8%.
3)将上述镓基液态金属纳米颗粒分散液以0.5mL/min的速度滴加到浓度为6wt%的硝酸溶液中,并施加搅拌和超声震荡,搅拌速度为3500rpm,超声震荡频率为40KHz,得到扩孔腐蚀液,其中,镓基液态金属纳米颗粒分散液的质量为硝酸溶液质量的1.5%。3) The above-mentioned gallium-based liquid metal nanoparticle dispersion was added dropwise to a 6 wt% nitric acid solution at a speed of 0.5 mL/min, and stirring and ultrasonic vibration were applied, the stirring speed was 3500 rpm, and the ultrasonic vibration frequency was 40 KHz to obtain A hole-expanding etching solution, wherein the mass of the gallium-based liquid metal nanoparticle dispersion liquid is 1.5% of the mass of the nitric acid solution.
4)前处理:使用3g/L的氢氧化钠溶液对铝箔进行处理,除掉表面的油污和氧化层,温度为50℃,处理处理时间为15s,然后将铝箔置于纯水中室温下清洗15s。4) Pre-treatment: Use 3g/L sodium hydroxide solution to treat the aluminum foil to remove the oil and oxide layer on the surface. The temperature is 50℃, and the treatment time is 15s. Then the aluminum foil is cleaned in pure water at room temperature 15s.
5)发孔:将前处理后的铝箔在腐蚀槽液中加电进行发孔处理,所述腐蚀槽液为浓度为40wt%的硫酸和5wt%的盐酸的混合溶液,温度为40℃,电流密度为1.8A/cm 2,发孔时间为20s。 5) Pore formation: the pre-treated aluminum foil is energized in an etching bath solution, which is a mixed solution of sulfuric acid with a concentration of 40 wt% and hydrochloric acid with a concentration of 5 wt%, at a temperature of 40°C, and a current The density is 1.8A/cm 2 , and the hole making time is 20s.
6)一次水洗:将发孔处理后的铝箔在纯水中清洗30s,室温条件。6) One-time washing: Wash the aluminum foil with pores in pure water for 30s at room temperature.
7)扩孔:将经水洗后的铝箔置于步骤3)制备的扩孔腐蚀液中加电进行扩孔处理,温度为50℃,电流密度为0.5A/cm 2,扩孔时间为30s。 7) Reaming: The aluminum foil washed with water is placed in the reaming etching solution prepared in step 3) and then electrified for reaming treatment. The temperature is 50° C., the current density is 0.5 A/cm 2 , and the reaming time is 30 seconds.
8)二次水洗:将扩孔处理后的铝箔在在纯水中室温下清洗20s。8) Secondary water washing: Wash the expanded aluminum foil in pure water at room temperature for 20 seconds.
9)干燥:将二次水洗后的铝箔在220℃下进行干燥,干燥时间为3min。9) Drying: The aluminum foil after the second water washing is dried at 220°C, and the drying time is 3 minutes.
对比例5Comparative example 5
1)将聚苯乙烯磺酸和聚苯乙烯磺酸钠按照质量比为30:70混合,得到高分子溶液。1) Mixing polystyrene sulfonic acid and sodium polystyrene sulfonate in a mass ratio of 30:70 to obtain a polymer solution.
2)将镓基液态金属(镓:铟=65:35)以3mL/min的速度滴加到上述高分子溶液中,并施加搅拌和超声震荡,搅拌速度为1500rpm,超声波震荡频率为35KHz,得到镓基液态金属纳米颗粒分散液,其中,镓基液态金属的质量分数0.8%。2) Add the gallium-based liquid metal (gallium: indium=65:35) dropwise to the above polymer solution at a speed of 3mL/min, and apply stirring and ultrasonic vibration, the stirring speed is 1500rpm, and the ultrasonic vibration frequency is 35KHz, to obtain The gallium-based liquid metal nanoparticle dispersion liquid, wherein the mass fraction of the gallium-based liquid metal is 0.8%.
3)将上述镓基液态金属纳米颗粒分散液以0.5mL/min的速度滴加到浓度为6wt%的硝酸溶液中,并施加搅拌和超声震荡,搅拌速度为3500rpm,超声震荡频率为40KHz,得到扩孔腐蚀液,其中,镓基液态金属纳米颗粒分散液的质量为硝酸溶液质量的8%。3) The above-mentioned gallium-based liquid metal nanoparticle dispersion was added dropwise to a 6 wt% nitric acid solution at a speed of 0.5 mL/min, and stirring and ultrasonic vibration were applied, the stirring speed was 3500 rpm, and the ultrasonic vibration frequency was 40 KHz to obtain A hole-expanding etching solution, wherein the mass of the gallium-based liquid metal nanoparticle dispersion is 8% of the mass of the nitric acid solution.
4)前处理:使用3g/L的氢氧化钠溶液对铝箔进行处理,除掉表面的油污和氧化层,温度为50℃,处理处理时间为15s,然后将铝箔置于纯水中室温下清洗15s。4) Pre-treatment: Use 3g/L sodium hydroxide solution to treat the aluminum foil to remove the oil and oxide layer on the surface. The temperature is 50℃, and the treatment time is 15s. Then the aluminum foil is cleaned in pure water at room temperature 15s.
5)发孔:将前处理后的铝箔在腐蚀槽液中加电进行发孔处理,所述腐蚀槽液为浓度为40wt%的硫酸和5wt%的盐酸的混合溶液,温度为40℃,电流密度为1.8A/cm 2,发孔时间为20s。 5) Pore formation: the pre-treated aluminum foil is energized in an etching bath solution, which is a mixed solution of sulfuric acid with a concentration of 40 wt% and hydrochloric acid with a concentration of 5 wt%, at a temperature of 40°C, and a current The density is 1.8A/cm 2 , and the hole making time is 20s.
6)一次水洗:将发孔处理后的铝箔在纯水中清洗30s,室温条件。6) One-time washing: Wash the aluminum foil with pores in pure water for 30s at room temperature.
7)扩孔:将经水洗后的铝箔置于步骤3)制备的扩孔腐蚀液中加电进行扩孔处理,温度为50℃,电流密度为0.5A/cm 2,扩孔时间为30s。 7) Reaming: The aluminum foil washed with water is placed in the reaming etching solution prepared in step 3) and then electrified for reaming treatment. The temperature is 50° C., the current density is 0.5 A/cm 2 , and the reaming time is 30 seconds.
8)二次水洗:将扩孔处理后的铝箔在在纯水中室温下清洗20s。8) Secondary water washing: Wash the expanded aluminum foil in pure water at room temperature for 20 seconds.
9)干燥:将二次水洗后的铝箔在220℃下进行干燥,干燥时间为3min。9) Drying: The aluminum foil after the second water washing is dried at 220°C, and the drying time is 3 minutes.
性能测试Performance Testing
根据国家标准《SJ/T 11140-2012铝电解电容器用电极箔》记载的标准检测方法,对上述实施例和对比例制备的铝电解电容器用电极箔进行性能测试,检测结果如表1所示。According to the standard detection method described in the national standard "SJ/T 11140-2012 Electrode Foil for Aluminum Electrolytic Capacitors", the performance test of the electrode foils for aluminum electrolytic capacitors prepared in the above examples and comparative examples was performed. The test results are shown in Table 1.
表1Table 1
Figure PCTCN2019114664-appb-000001
Figure PCTCN2019114664-appb-000001
Figure PCTCN2019114664-appb-000002
Figure PCTCN2019114664-appb-000002
从上表数据可以看到,采用本发明的腐蚀工艺制备的腐蚀箔,相对于现有腐蚀工艺(对比例1)腐蚀减薄量降低了2μm,容量提升至少约7%,折弯至少提升约35%,有效减少枝孔或小孔的产生,提高腐蚀效率和容量。It can be seen from the data in the above table that the corrosion foil prepared by the corrosion process of the present invention has a reduction of 2μm in corrosion thinning compared with the existing corrosion process (Comparative Example 1), a capacity increase of at least about 7%, and a bending increase of at least about 35%, effectively reducing the generation of branch holes or small holes, improving corrosion efficiency and capacity.
从对比例2可以看到,镓基液态金属未经过包覆处理,直接添加在扩孔液中,腐蚀减薄量最大,因镓基液态金属在水溶液中分散性较差,其大量聚集作用于铝箔表面,对铝箔进行在吞噬,使得表面腐蚀量增加,导致容量降低和折弯性能变差。It can be seen from Comparative Example 2 that the gallium-based liquid metal is directly added to the reaming solution without coating treatment, and the amount of corrosion and thinning is the largest. Because the gallium-based liquid metal has poor dispersibility in the aqueous solution, its large amount of aggregation acts on On the surface of the aluminum foil, the aluminum foil is swallowed, which increases the amount of surface corrosion, resulting in a decrease in capacity and poor bending performance.
从对比例3可以看到,聚苯乙烯磺酸和聚苯乙烯磺酸钠质量比为10:90。在液态金属表面形成的高分子膜以聚苯乙烯磺酸钠为主,在添加到扩孔液中后,镓基液态金属纳米颗粒表面的高分子膜快速溶解,镓基液态金属被释放出来,部分在铝箔表面和孔洞的洞口对铝箔进行腐蚀,导致铝箔减薄量增加,锥形孔扩大,容量降低。It can be seen from Comparative Example 3 that the mass ratio of polystyrene sulfonic acid and sodium polystyrene sulfonate is 10:90. The polymer film formed on the surface of the liquid metal is mainly sodium polystyrene sulfonate. After being added to the reaming solution, the polymer film on the surface of the gallium-based liquid metal nanoparticles quickly dissolves, and the gallium-based liquid metal is released. Part of the aluminum foil is corroded on the surface of the aluminum foil and the openings of the holes, resulting in an increase in the thinning of the aluminum foil, an enlarged tapered hole, and a decrease in capacity.
从对比例4可以看到,镓基液态金属组成比例为镓:铟=50:50时,镓基液态金属流动性较差,制备的镓基液态金属纳米颗粒尺寸较大,无法进入腐蚀孔洞内部,停留在铝箔表面或者孔洞口,导致铝箔减薄量增加,锥形孔扩大,容量降低。It can be seen from Comparative Example 4 that when the composition ratio of gallium-based liquid metal is gallium:indium=50:50, the fluidity of gallium-based liquid metal is poor, and the prepared gallium-based liquid metal nanoparticles are large in size and cannot enter the corrosion hole. , Staying on the surface of the aluminum foil or the opening of the hole, resulting in an increase in the thinning of the aluminum foil, the expansion of the tapered hole, and the reduction of the capacity.
从对比例5可以看到,当镓基液态金属纳米颗粒分散液在扩孔液中的质量分数增加到为8%时,镓基液态金属纳米颗粒浓度较高,迁移速率较慢,使得部分进入到孔洞内,同时也有部分会停留在铝箔表面或者洞口,导致铝箔减薄量增加,锥形孔扩大,容量降低。It can be seen from Comparative Example 5 that when the mass fraction of the gallium-based liquid metal nanoparticle dispersion in the reaming solution is increased to 8%, the concentration of the gallium-based liquid metal nanoparticle is higher and the migration rate is slower, which makes part of the In the hole, some will stay on the surface of the aluminum foil or the hole at the same time, which causes the thinning of the aluminum foil to increase, the tapered hole to expand, and the capacity to decrease.
尽管对本发明已做出了详细的说明,并列出了一些具体实例,但对本领域技术人员而言,只要不脱离本发明的精神,对本方法所做的各种调整均被视为包含在本发明的范围内。Although the present invention has been described in detail, and some specific examples have been listed, for those skilled in the art, as long as they do not depart from the spirit of the present invention, various adjustments made to the method are deemed to be included in the present invention. Within the scope of the invention.

Claims (14)

  1. 一种扩孔腐蚀液,其特征在于,所述腐蚀液包含镓基液态金属纳米颗粒分散液,所述镓基液态金属纳米颗粒分散液由镓基液态金属在聚苯乙烯磺酸和聚苯乙烯磺酸钠的高分子溶液中分散得到,其中,所述镓基液态金属在所述液态金属纳米颗粒分散液中的质量分数为0.3-1.5%。A hole expanding etching solution, characterized in that the etching solution comprises a gallium-based liquid metal nanoparticle dispersion liquid, and the gallium-based liquid metal nanoparticle dispersion liquid is composed of gallium-based liquid metal in polystyrene sulfonic acid and polystyrene It is obtained by dispersing in a polymer solution of sodium sulfonate, wherein the mass fraction of the gallium-based liquid metal in the liquid metal nanoparticle dispersion is 0.3-1.5%.
  2. 根据权利要求1所述的扩孔腐蚀液,其特征在于,所述聚苯乙烯磺酸和聚苯乙烯磺酸钠的质量比为20:80-50:50。The pore expanding etching solution according to claim 1, wherein the mass ratio of the polystyrene sulfonic acid and sodium polystyrene sulfonate is 20:80-50:50.
  3. 根据权利要求1所述的扩孔腐蚀液,其特征在于,所述腐蚀液进一步包括浓度为5-20wt%的硝酸溶液,所述镓基液态金属纳米颗粒分散液的质量为硝酸溶液质量的0.1-5%。The reaming etching solution according to claim 1, wherein the etching solution further comprises a nitric acid solution with a concentration of 5-20 wt%, and the mass of the gallium-based liquid metal nanoparticle dispersion is 0.1 of the mass of the nitric acid solution. -5%.
  4. 根据权利要求1所述的扩孔腐蚀液,其特征在于,所述镓基液态金属包括镓和铟,所述镓和铟的质量比为60-75:40-25。The hole expanding etching solution according to claim 1, wherein the gallium-based liquid metal comprises gallium and indium, and the mass ratio of gallium to indium is 60-75:40-25.
  5. 一种扩孔腐蚀液的制备方法,其特征在于,所述制备方法包括:A method for preparing a hole-expanding etching solution, characterized in that, the preparation method includes:
    将聚苯乙烯磺酸和聚苯乙烯磺酸钠按照一定的质量比混合,得到高分子溶液;Mixing polystyrene sulfonic acid and sodium polystyrene sulfonate according to a certain mass ratio to obtain a polymer solution;
    将镓基液态金属滴加到上述高分子溶液中,混合处理,得到液态金属纳米颗粒分散液,其中,所述镓基液态金属在所述镓基液态金属纳米颗粒分散液中的质量分数为0.3-1.5%;The gallium-based liquid metal is added dropwise to the above-mentioned polymer solution, mixed and processed to obtain a liquid metal nanoparticle dispersion, wherein the mass fraction of the gallium-based liquid metal in the gallium-based liquid metal nanoparticle dispersion is 0.3 -1.5%;
    将上述镓基液态金属纳米颗粒分散液滴加到浓度为5-20wt%的硝酸溶液中,混合处理,得到扩孔腐蚀液,其中,所述液态金属纳米颗粒分散液的质量为硝酸溶液质量的0.1-5%。The above-mentioned gallium-based liquid metal nanoparticle dispersion is added dropwise to a nitric acid solution with a concentration of 5-20% by weight, and mixed processing is performed to obtain a pore expansion etching solution, wherein the mass of the liquid metal nanoparticle dispersion is equal to that of the nitric acid solution 0.1-5%.
  6. 根据权利要求5所述的扩孔腐蚀液的制备方法,其特征在于,所述聚苯乙烯磺酸和聚苯乙烯磺酸钠的质量比为20:80-50:50。The method for preparing a hole expanding etching solution according to claim 5, wherein the mass ratio of the polystyrene sulfonic acid and sodium polystyrene sulfonate is 20:80-50:50.
  7. 根据权利要求5所述的扩孔腐蚀液的制备方法,其特征在于,所述镓基液态金属包括镓和铟,所述镓和铟的质量比为60-75:40-25。The method for preparing a hole expanding etching solution according to claim 5, wherein the gallium-based liquid metal comprises gallium and indium, and the mass ratio of gallium to indium is 60-75:40-25.
  8. 一种电极箔的腐蚀工艺,其特征在于,使用权利要求1-4任一项所述的扩孔腐蚀液进行扩孔。An etching process for electrode foil, which is characterized in that the hole expansion etching solution according to any one of claims 1 to 4 is used for hole expansion.
  9. 根据权利要求8所述的电极箔的腐蚀工艺,其特征在于,所述腐蚀工艺包括:8. The etching process of electrode foil according to claim 8, wherein the etching process comprises:
    1)前处理:将铝箔置于1-5g/L氢氧化钠溶液中进行洗涤,然后置于纯水中清洗;1) Pre-treatment: Wash the aluminum foil in 1-5g/L sodium hydroxide solution, and then clean it in pure water;
    2)发孔:将前处理后的铝箔置于浓度为20-60wt%的硫酸和1-10wt%的盐酸的混合溶液中进行发孔;2) Pore: place the pre-treated aluminum foil in a mixed solution of 20-60wt% sulfuric acid and 1-10wt% hydrochloric acid to make holes;
    3)一次水洗;将发孔处理后的铝箔置于纯水中清洗;3) Wash once with water; wash the aluminum foil with pores in pure water;
    4)扩孔:将一次水洗后的铝箔置于权利要求1-4任一项所述的扩孔腐蚀液进行扩孔;4) Reaming: Place the aluminum foil washed with water once in the reaming etching solution according to any one of claims 1 to 4 for reaming;
    5)二次水洗:将扩孔处理后的铝箔在纯水中清洗;5) Secondary water washing: Wash the aluminum foil after the hole expansion treatment in pure water;
    6)干燥:将二次水洗后的铝箔干燥,得到电极箔。6) Drying: drying the aluminum foil after the second water washing to obtain an electrode foil.
  10. 根据权利要求9所述的电极箔的腐蚀工艺,其特征在于,前处理中,所述铝箔在氢氧化钠溶液洗涤的温度为30-60℃,洗涤时间为15-30s;所述纯水中清洗的温度为室温,时间为15-30s。The electrode foil corrosion process according to claim 9, characterized in that, in the pretreatment, the temperature of washing the aluminum foil in the sodium hydroxide solution is 30-60°C, and the washing time is 15-30s; the pure water The cleaning temperature is room temperature and the time is 15-30s.
  11. 根据权利要求9所述的电极箔的腐蚀工艺,其特征在于,所述发孔的条件为:温度为40-80℃,电流密度为0.5-3.0A/cm 2,发孔的时间为5-20s; The corrosion process of electrode foil according to claim 9, wherein the conditions for the hole formation are: temperature is 40-80°C, current density is 0.5-3.0 A/cm 2 , and the hole formation time is 5- 20s;
    任选地,所述扩孔的条件为:温度为20-50℃,电流密度为0.1-1A/cm 2,扩孔时间为20-50s。 Optionally, the conditions for the hole expansion are: the temperature is 20-50° C., the current density is 0.1-1 A/cm 2 , and the hole expansion time is 20-50 s.
  12. 根据权利要求9所述的电极箔的腐蚀工艺,其特征在于,所述一次水洗和二次水洗的温度为室温,时间为15-30s;The electrode foil corrosion process according to claim 9, wherein the temperature of the first water washing and the second water washing is room temperature, and the time is 15-30s;
    任选地,所述干燥的温度为100-300℃,时间为2-10min。Optionally, the drying temperature is 100-300°C, and the time is 2-10 min.
  13. 一种电极箔,其特征在于,根据权利要求8~12任一项所述的腐蚀工艺制备得到。An electrode foil, characterized in that it is prepared according to the etching process of any one of claims 8-12.
  14. 铝电解电容器,其特征在于,包括权利要求13所述的电极箔。An aluminum electrolytic capacitor is characterized by comprising the electrode foil according to claim 13.
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