WO2021078449A1 - Sensor mit durch aussparung geöffneter membran zur konzentrationsmessung eines analysefluids - Google Patents
Sensor mit durch aussparung geöffneter membran zur konzentrationsmessung eines analysefluids Download PDFInfo
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- WO2021078449A1 WO2021078449A1 PCT/EP2020/076282 EP2020076282W WO2021078449A1 WO 2021078449 A1 WO2021078449 A1 WO 2021078449A1 EP 2020076282 W EP2020076282 W EP 2020076282W WO 2021078449 A1 WO2021078449 A1 WO 2021078449A1
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- membrane
- sensor
- measuring
- volume
- layer
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
- G01N27/18—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by changes in the thermal conductivity of a surrounding material to be tested
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/18—Investigating or analyzing materials by the use of thermal means by investigating thermal conductivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T90/00—Enabling technologies or technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02T90/40—Application of hydrogen technology to transportation, e.g. using fuel cells
Definitions
- the invention relates to a sensor for measuring a concentration of an analysis fluid based on a thermal conductivity principle, with at least one analysis heating element arranged on a measuring membrane for heating the analysis fluid, with a reference heating element arranged on a reference membrane for heating at least one reference gas.
- the invention also relates to a method for producing such a sensor.
- the gas or gas mixture to be measured directly influences the conductivity of a gas-sensitive sensor element.
- This change in resistance serves as a measured variable for a concentration of the gas or gas mixture.
- the gas-sensitive sensor element can be a sensor layer or a heating element.
- one or more heating elements in the form of platinum heaters can be arranged on a membrane. The heating of the heating elements and / or sensor elements depends on the thermal conductivity of the surrounding gas or gas mixture. These heating elements can be operated with constant current or with constant power and be warmer than an ambient temperature.
- the better thermal conductivity of hydrogen of 1810 pW / cmK compared to the thermal conductivity of air of 260 pW / cmK can be used to measure a hydrogen concentration. If there is hydrogen in the vicinity of the heating element, the higher thermal conductivity of the hydrogen and thus greater heat dissipation, the temperature of the heating element and thus its resistance is reduced. This change in resistance or the additional heating power that has to be applied to keep the heating element at a constant temperature is proportional to the concentration of hydrogen. Since the thermal conductivity depends on the ambient temperature, the ambient temperature can be measured, for example, by means of a further temperature sensor.
- the object on which the invention is based can be seen in proposing a sensor which can be operated reliably at high humidity and at high pressure.
- a sensor for measuring a concentration of an analysis fluid based on a thermal conductivity principle has at least one analysis heating element arranged on a measuring membrane for heating the analysis fluid and at least one reference heating element arranged on a reference membrane for heating at least one reference gas.
- the measuring membrane and the reference membrane are arranged adjacent to one another between a sensor substrate and a cap substrate, the measuring membrane being arranged in a measuring volume and the reference membrane being arranged in a reference volume.
- the measuring membrane and the reference membrane each have at least one coating, the measuring membrane being opened by at least one recess.
- the coating can preferably cover the membrane at least in some areas and thus protect it.
- the coating can cover the electrical lines, such as the heating elements and / or measuring elements arranged on the membranes, and thus protect the electrically conductive vapor deposition from corrosion, oxidation and aging processes.
- the sensor can consist, for example, of three wafer-shaped layers stacked one on top of the other and connected by glass frit or alternatively by an anodic bond or optionally by an adhesive bond.
- the wafer-shaped layers can comprise a cap substrate, a sensor substrate and a socket substrate.
- the sensor can also have further layers, the cap substrate or the wafer-shaped cap layer being optional.
- a reference cavity or a reference volume and a measuring cavity or measuring volume are formed in the sensor. During the production of the sensor, a multiplicity of such sensor sections can be produced and divided into a multiplicity of sensors by a separation step.
- the measuring membrane is preferably arranged in the measuring volume and the reference membrane in the reference volume. Heating elements are integrated into each membrane for carrying out concentration measurements.
- the measurement volumes and the reference volumes are preferably separated from one another, so that an exchange of fluids or moisture is prevented. This allows the sensor to act as a barrier against undesired media at the same time.
- Such an undesirable medium can be, for example, moist air from exhaust gases from a fuel cell vehicle.
- a difference signal can be determined between the analysis heating element and the reference heating element.
- the analysis fluid can be in a gaseous or liquid form. Through the coating the analysis heating element and the reference heating element can be protected from direct contact with the analysis fluid, thus extending the service life of the sensor.
- the measuring membrane Since the measuring membrane has at least one recess, it is designed to be open. This measure can bring about an increase in the sensitivity to measured variables or an increase in the insensitivity to interfering influences. In particular, the problem of deformation of the measuring membrane in the event of externally applied pressures that differ from the ambient pressure can be eliminated by the recess. Such ambient pressures can be, for example, 500 mbar in a silencer of an exhaust pipe. Furthermore, due to the open measuring membrane, new areas of application can be made available for the sensor, which have higher pressures of over 2 bar.
- the senor can also be used in a fuel cell vehicle, for example in an anode path at higher pressure. Furthermore, the sensor can be used, for example, to examine moist exhaust gas or H2 in the exhaust gas of a fuel cell vehicle or in the immediate vicinity of the anode and cathode in the cell stack.
- moist exhaust gas or H2 in the exhaust gas of a fuel cell vehicle or in the immediate vicinity of the anode and cathode in the cell stack.
- An open membrane is to be interpreted to the effect that at least one hole, a recess and the like is arranged in the membrane, and thus an exchange of fluid between the two membrane surfaces is possible.
- an exchange of fluid with an environment or any reservoir can take place.
- the coating can either be removed for a glass frit bond or provided with a thin oxide layer in the following manufacturing processes.
- the analysis heating element and the reference heating element for measuring the concentration can be designed as combined heating / sensor elements. Alternatively, in addition to analysis heating elements, analysis measuring elements and, in addition to the reference heating elements, reference measuring elements can also be provided.
- the opening or recess of the measuring membrane and / or the reference membrane can be produced through one or more holes, for example by means of wet etching processes or plasma etching processes.
- An increase in the sensitivity to the analysis fluid can be attributed to the analysis fluid flowing around the measuring membrane on both sides.
- the recess in the measuring membrane serves to decouple the measuring membrane from the ambient pressure.
- the cap substrate can close the measurement volume in order to separate the measurement volume from the reference volume.
- the at least one analysis heating element and the at least one reference heating element can be connected to an external or sensor-internal evaluation electronics for measuring a change in resistance of the analysis heating element caused by the analysis fluid relative to an electrical resistance of the reference heating element.
- This measure enables the number of electrically conductive tracks and heating elements on the sensor to be minimized.
- conductor track crossings on the sensor can be avoided or minimized.
- the necessary conductor track crossings can be carried out in the evaluation circuit or the evaluation electronics, which usually contain the levels required for this.
- the evaluation electronics can be designed as a complex circuit technology, such as an ASIC or a p-controller. This makes it possible to design the conductor tracks on the measuring chip or the sensor symmetrically, whereby manufacturing tolerances are reduced. In addition, exposure masks and process steps on the sensor can be saved by reducing the number of conductor tracks on the sensor.
- the coating is designed as a one-sided or double-sided coating. The coating can thus span the entire measuring membrane.
- the coating can also include the at least one recess made in the measuring membrane, so that the measuring membrane is completely protected. In this way, damage to the measuring membrane due to high humidity or a change or aging of the embedded heating element or heating resistor due to the accumulation of moisture in the overlying layers can be prevented.
- the reference volume is open on the front and / or on the rear, or the reference volume is designed as a closed volume.
- the reference membrane is preferably shaped as a closed membrane or as an open membrane or membrane provided with one or more recesses. This measure allows the reference membrane to be adapted to different areas of application.
- the measuring volume has at least one fluid channel connected on the front, rear and / or side, the fluid channel being introduced into a cap substrate, a base substrate and / or into the sensor substrate.
- the analysis fluid can be guided through the fluid channel into the measurement volume in different ways.
- the fluid channel can be shaped in such a way that a particularly fast or cost-efficient production of the sensor is made possible.
- the coating has at least one nitride, silicon, oxide, plastic and / or ceramic.
- the measuring membrane can be designed, for example, as an oxide-nitride-oxide membrane; alternatively or additionally, the measuring membrane can also be designed as an oxide membrane.
- the substances listed can be used individually or in combination.
- thin silicon layers, oxidic, nitridic or mixed layers can be used as coatings.
- Thin plastic films or plastic coatings or ceramic materials are also possible as further alternative or additional materials for the coating.
- the measuring volume and the measuring membrane and / or the reference volume and the reference membrane have a rectangular, square or circular cross section. As a result of this measure, the measurement volume and the reference volume can be formed using different manufacturing processes.
- the shape of the reference volume and the measurement volume can be adapted to an external dimension of the sensor.
- the measuring membrane can have a shape that corresponds to the cross section of the measuring volume.
- the reference membrane can also have a shape corresponding to the cross section of the reference volume.
- the measurement volume and the reference volume are dimensioned to be the same or different. If the reference volume is filled with different gases or pressures than the measurement volume, it is advantageous to adjust the thermal conductivity for high accuracy.
- the reference volume and the measurement volume can be dimensioned relative to one another in such a way that the measurement volume has the same thermal conductivity as the reference volume with 0% H2 content.
- a differential bridge voltage or the measurement signal is essentially 0 V or another defined offset, so that the evaluation electronics only detect a signal when there is a significant H2 content.
- the dimensions of the measurement volume and the reference volume can be set by a height of the respective volume and / or by cavern sizes of different sizes.
- the senor has at least two analysis heating elements and at least two reference heating elements, the analysis heating elements and reference heating elements being usable as heating elements and / or measuring elements for a change in resistance.
- At least two resistors can preferably each be arranged on the reference membrane and the measuring membrane. These resistors are connected to one another in the form of a Wheatstone 'see bridge circuit.
- Two reference heating elements and two analysis heating elements can function as measuring resistors at the same time.
- a first and a fourth measuring resistor can be arranged on the measuring membrane and a second and a third measuring resistor can be arranged on the reference membrane.
- the measurement signal can be provided at these positions.
- the measuring resistors can serve both as heating elements and as measuring elements. A design in which the heating elements and the measuring elements are separate is also possible.
- the closed reference membrane separates a first reference volume introduced into the cap substrate from a second reference volume introduced into the sensor substrate, the first reference volume and the second reference volume being filled with the same fluid or with different fluids.
- This measure enables different fluids that cannot be mixed with one another to be connected to the reference membrane in the form of several reference volumes.
- the variable field can be reduced, for example by an H2 gas in a volume on the cap side and an O 2 gas in a volume on the sensor substrate side or on the base side.
- the reference volume can also be divided into more than two volumes.
- a method for producing a sensor is provided.
- a wafer-shaped sensor layer is provided.
- a membrane layer is then deposited on the sensor layer.
- Further intermediate layers are possible here to increase the connection quality and / or to reduce heat transfer between the membrane layer and the sensor layer, as well as the provision of a mechanically stable support structure for the heating elements.
- cutouts are made in the membrane layer by removing material.
- analysis heating elements and reference heating elements in the form of metal coatings on the Membrane layer applied and structured by a suitable method. Then at least one coating is applied to protect the analysis heating elements and reference heating elements and the membrane layer.
- a coating on the base side can be deposited in an intermediate step before the membrane layer is applied.
- a closed or apertured cap layer is then arranged on the membrane layer or on the coating of the membrane layer.
- the membrane layer is exposed by removing material from the sensor layer in order to form the reference volume and the measurement volume. This step can preferably be carried out on the rear or on the base.
- a closed or at least regionally open base layer is arranged on the back of the sensor layer.
- the base layer can be opened or exposed in certain areas.
- This step forms a wafer arrangement with a plurality of interconnected sensors. A large number of individual sensors can be produced by means of a separation process.
- FIG. 1 shows a schematic sectional illustration of a sensor according to a first embodiment with an opened reference volume
- FIG. 2 shows a schematic sectional illustration of a sensor according to a second embodiment with a closed reference volume
- FIG. 3 shows a schematic sectional illustration of a sensor according to a third embodiment with two reference volumes separated from one another
- 4 shows a schematic sectional illustration of a sensor according to a fourth embodiment with a laterally running fluid channel
- FIG. 5 shows a schematic sectional illustration of a sensor according to a fifth embodiment with a measurement volume that is open on both sides
- FIG. 13 shows a plan view of the electrical conductor tracks of the sensor according to a second exemplary embodiment with connected evaluation electronics.
- FIG. 1 shows a schematic sectional illustration of a sensor 1 according to a first embodiment with an open reference volume 2.
- the sensor 1 has a measurement volume 4.
- a reference membrane 6 is arranged in the reference volume 2.
- the measuring volume 4 has a measuring membrane 8.
- the reference volume 2 and the measurement volume 4 are divided up in areas by the reference membrane 6 and the measurement membrane 8, as well as by the cap sub-start 18 and base substrate 20.
- the electrically conductive structures 10 are designed here as reference heating elements 12 for heating at least one reference fluid and as analysis heating elements 14 for heating an analysis fluid, which are shown in FIG. 12 and FIG.
- the reference heating elements 12 and the analysis heating elements 14 serve at the same time for heating and for measuring resistance changes or resistance differences.
- the reference volume 2 and the measurement volume 4 are introduced into a sensor substrate 16 in the form of cavities and extend into a cap substrate 18.
- a base substrate 20 is arranged on the sensor substrate 16 on a side opposite the cap substrate 18.
- the cap substrate 18 is spaced apart from the sensor substrate 16 in the vertical direction V by the membranes 6, 8.
- the substrates 16, 18, 20 are flat and enclose the reference volume 2 and the measurement volume 4 at least in some areas.
- the reference volume 2 is closed on the base side by the base substrate 20.
- the measurement volume 4 is closed on the cap side by the cap substrate 18.
- Fluid channels 24, which serve to supply an analysis fluid into the measurement volume 4 are introduced into the base substrate 20.
- the arrow 26 illustrates the inflow of the analysis fluid.
- the measuring membrane 8 and the reference membrane 6 have a coating 28 which covers the electrically conductive structures 10 on the cap side and thus protects them.
- the coating 28 can consist of a nitride, for example.
- each membrane 6, 8 has at least one recess 30 through which a fluid can pass the membrane 6, 8 without mechanical stress.
- the measurement volume 4 is closed in the region of the cap substrate 18.
- the reference volume 2 is provided with an opening 22 through which the reference volume 2 can carry out a gas exchange with an environment U.
- An analysis gas such as H2, for example, can flow through the fluid channels 24 into the measurement volume 4 through the measurement volume 4 closed on the cap side and remain there at least temporarily.
- the analysis gas can also contain water vapor or air with atmospheric humidity.
- the analysis fluid can be in liquid form or consist of a liquid. It can also be the concentration of any other thermally conductive gas, such as. 02, C02, He, humid air and the like can be measured.
- the Reference volume 2 is open to a housing (not shown) or electronics and is exposed to environmental influences.
- FIG. 2 shows a schematic sectional illustration of a sensor 1 according to a second embodiment with a closed reference volume 2.
- the reference volume 2 is filled with a reference gas which is not exchanged with an environment U.
- a closed reference volume 2 enables fluctuations in the ambient air, such as changes in humidity or influences from interfering gases from the environment, to be avoided.
- the reference volume 2 can be flooded beforehand with a suitable reference fluid, for example when the base substrate 20 or the cap substrate 18 is attached, for example in the case of a bond with glass frit 32.
- a reference fluid can be, for example, synthetic air, N2, O2, CO2, methane and the like.
- FIG. 3 shows a schematic sectional view of a sensor 1 according to a third embodiment with two separate reference volumes 2, 3.
- the reference membrane 6 is closed or designed without a recess 30, whereby different fluids in the vertical direction V above and below the reference membrane 6 can be brought in.
- different gases can be introduced into the reference volumes 2, 3 which cannot be mixed with one another and a reduction enable a variable field.
- 2 H2 gas can be passed into a first cap-side reference volume 3 O2 gas and into a second base-side reference volume 3 O2 gas. It is also possible to create additional gas-filled reference caverns.
- FIG. 4 shows a schematic sectional illustration of a sensor 1 according to a fourth embodiment with a laterally running fluid channel 24.
- the fluid channel does not extend in the vertical direction V through the base substrate 20, but laterally or transversely to the vertical direction V along a boundary between the base substrate 20 and the sensor substrate 16 up to the measurement volume 4.
- FIG. 5 shows a schematic sectional illustration of a sensor 1 according to a fifth embodiment with a measurement volume 4 that is open on both sides.
- an analysis fluid can be supplied on the cap side and on the base side.
- Fluid channels 23 are provided which extend through the cap substrate 18 into the measurement volume 4.
- fluid channels 24 are also arranged in the base substrate 20, through which the analysis fluid can get into the measurement volume 4. Such an arrangement allows the analysis fluid to flow continuously through the measurement volume 4.
- FIGS. 6 to 11 show details from a wafer-shaped arrangement, which is separated into a plurality of sensors 1 in a last step. The separation step is not described or illustrated in more detail here.
- FIG. 6 shows a step in which a wafer-shaped sensor layer 34 is provided.
- the sensor layer 34 can be coated with a dielectric 36, for example.
- the dielectric can be designed as a first membrane layer.
- the electrically conductive structures 10 are applied to the dielectric 36.
- This step can for example be done by sputtering platinum or another metal. Structuring can then be carried out using a lithographic process in combination with an etching process.
- analysis heating elements 14 and reference heating elements 12 can be applied to the membrane layer 36 in the form of metal coatings
- recesses 30 can be introduced into the electrically conductive structures 10 and the membrane layer 36.
- a coating 28 is deposited which serves as protection for the electrically conductive structures 10.
- the recesses 30 can also be made in the electrically conductive structures 10 after the coating 28 has been applied or through the coating 28.
- the coating 28 can consist of an oxide or a nitride or both.
- pressure compensation openings or recesses 30 can be formed.
- the recesses 30 can be introduced into the membrane layer 36, the coating 28 and the electrically conductive structures 10, for example, by a gas phase etching process or by a plasma etching process.
- FIG. 8 shows a further step in which a closed cap layer 38 or a cap layer 38 provided with openings 22, 23 is arranged on the coating 28 of the membrane layer 36.
- a closed cap layer 38 or a cap layer 38 provided with openings 22, 23 is arranged on the coating 28 of the membrane layer 36.
- glass frit 32 By applying glass frit 32, the adhesion between the cap layer 38 and the coating 28 can be made possible.
- the cap layer 38 can already have caverns, which are necessary for the formation of electrical connections 11, reference volume 2 and measurement volume 4.
- an adhesion promoter layer 35 is applied to the sensor substrate 34 in order to improve the joining process of the base substrate 34.
- This adhesion promoter layer 35 can for example consist of an oxide and / or a combination of oxide, nitride or metal oxides. Depending on the configuration of the sensor 1, this adhesion promoter layer 35 can also be structured.
- a further step for producing the sensor 1 is shown in FIG.
- the membrane layer 36 is exposed to form reference volume 2 and measurement volume 4 by removing material from the sensor layer.
- the material can be removed in one or more steps. For example, the material can be removed by grinding or thinning over the entire surface and / or by an etching process.
- the membrane layer 36 can be exposed on the base side, for example, by means of a trench etching process.
- a closed or at least regionally opened base layer 40 is then arranged on sensor layer 34. This step is illustrated in FIG. The introduction of fluid channels 24 into the base layer 40 is shown in FIG. 11, the cap layer 38 and the base layer 40 being ground to a final dimension.
- a plurality of sensors 1 is formed by a separation process.
- openings 22, 23 can also be formed in the cap layer 38. Furthermore, it is possible to introduce the openings 22, 23 in the cap layer 38 through the cutouts 30.
- the process makes it possible to control the depths of all caverns or volumes 2, 4 in the micrometer range.
- the heat transfer can thus be controlled through a specifically shallow or particularly deep cavity in the cap substrate 18 or sensor substrate 16 and through the shape of the volumes 2, 4.
- the shape of the volumes 2, 4 can be designed symmetrically or asymmetrically.
- depths in the range from 6 pm to 600 pm can be generated.
- FIG. 12 shows a plan view of the electrically conductive structures 10, which are designed as electrical conductor tracks of the sensor 1.
- the electrically conductive structures 10 here form a cost-efficient one Wiring form, since these only have one conductor track crossing 42 on the sensor 1.
- the reference heating elements 12 and the analysis heating elements 14 serve at the same time for heating and for measuring resistance changes or resistance differences.
- Two resistors R1-R4 are each formed by the electrically conductive structures 10 on the reference diaphragm 6 and the measuring diaphragm 8. These resistors R1-R4 are connected to one another in the form of a Wheatstone bridge circuit. The resistors R1 and R4 are located on the measuring membrane 8 and the resistors R2 and R3 are located on the reference membrane 6.
- a difference in mid-voltage taps between the resistors R1 and R3 or between R2 and R4 is sensitive to changes in the resistance values and can therefore be used as a measurement signal.
- the resistors R1-R4 serve both as heating and measuring elements. A design in which the heating and measuring elements are separated is also possible.
- the membranes 6, 8 or the corresponding volumes 2, 4 are made the same size and have a square cross-section.
- FIG. 13 shows a top view of the electrically conductive structures 10 of the sensor 1 according to a second exemplary embodiment with connected evaluation electronics 44.
- no conductor track intersection 42 is provided on the sensor 1 here.
- the formation of conductor track crossings 42 for realizing a Wheatstone bridge circuit is shifted to the evaluation electronics 44.
- the bond pads or the electrical connections 11 can be attached to another edge of the sensor 1. For example, the electrical connections 11 be rotated by 90 ° in order to simplify or optimize a later installation of the sensor.
- the reference volume 2 is designed to be larger than the measurement volume 4. This is illustrated by the reference diaphragm 6, which is larger than the measuring diaphragm 8.
- additional measuring or heating resistors can be provided in order, for example, to measure the ambient temperature or to thermally condition the sensor 1 uniformly or constantly.
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Application Number | Priority Date | Filing Date | Title |
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JP2022523401A JP7392135B2 (ja) | 2019-10-21 | 2020-09-21 | リセスによって開口された分析流体の濃度測定のための膜を備えたセンサ |
KR1020227016647A KR20220082065A (ko) | 2019-10-21 | 2020-09-21 | 분석 유체의 농도 측정을 위한, 리세스에 의해 개방된 멤브레인을 가진 센서 |
US17/634,415 US20220317078A1 (en) | 2019-10-21 | 2020-09-21 | Sensor, including a diaphragm that is open through a clearance, for measuring the concentration of an analysis fluid |
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DE102019216129.4 | 2019-10-21 | ||
DE102019216129.4A DE102019216129A1 (de) | 2019-10-21 | 2019-10-21 | Sensor mit verstärkter Membran zur Konzentrationsmessung eines Analysefluids |
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JP (1) | JP7392135B2 (de) |
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DE102020134366A1 (de) | 2020-12-21 | 2022-06-23 | Infineon Technologies Ag | Sensor zum Messen einer Gaseigenschaft |
DE102023101637A1 (de) | 2023-01-24 | 2024-07-25 | Infineon Technologies Ag | Sensor zum Messen einer Gaseigenschaft |
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JPH01155260A (ja) * | 1987-12-14 | 1989-06-19 | Honda Motor Co Ltd | 酸素濃度検出装置 |
US5605612A (en) * | 1993-11-11 | 1997-02-25 | Goldstar Electron Co., Ltd. | Gas sensor and manufacturing method of the same |
JP2004037180A (ja) * | 2002-07-02 | 2004-02-05 | Denso Corp | 集積化センサ装置 |
US7104112B2 (en) * | 2002-09-27 | 2006-09-12 | Honeywell International Inc. | Phased micro analyzer IV |
JP6340967B2 (ja) * | 2014-07-11 | 2018-06-13 | Tdk株式会社 | ガスセンサ |
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2019
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- 2020-09-21 WO PCT/EP2020/076282 patent/WO2021078449A1/de active Application Filing
- 2020-09-21 KR KR1020227016647A patent/KR20220082065A/ko active Search and Examination
- 2020-09-21 JP JP2022523401A patent/JP7392135B2/ja active Active
- 2020-09-21 US US17/634,415 patent/US20220317078A1/en active Pending
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DE102019216129A1 (de) | 2021-04-22 |
US20220317078A1 (en) | 2022-10-06 |
JP7392135B2 (ja) | 2023-12-05 |
JP2022553304A (ja) | 2022-12-22 |
KR20220082065A (ko) | 2022-06-16 |
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