WO2021068663A1

WO2021068663A1 - Flat disc six-dimensional force sensor based on eddy current effect, detection method, and smart device

Info

Publication number: WO2021068663A1
Application number: PCT/CN2020/111126
Authority: WO
Inventors: 王拓; 刘白露; 黄伟才; 汤易升
Original assignee: 珠海格力电器股份有限公司
Priority date: 2019-10-08
Filing date: 2020-08-25
Publication date: 2021-04-15
Also published as: CN110987244A; CN110987244B

Abstract

A flat disc six-dimensional force sensor based on an eddy current effect, a detection method, and a smart device, the force sensor comprising: an outer shell (1), an elastic body (2), a first probe (3), a second probe (4), a third probe (5), and a fourth probe (6), the elastic body (2) being arranged inside the outer shell (1), the elastic body (2) comprising a bottom plate, a detection plate (202), and a first boss (201), support columns (209) being arranged between the bottom plate and the detection plate (202), the detection plate (202) being positioned above the bottom plate, the first boss (201) being arranged above the detection plate (202), a sink (206) being arranged on the lower surface of the detection plate (202), the first probe (3), the second probe (4), the third probe (5), and the fourth probe (6) respectively being uniformly distributed on the bottom plate and not being in contact with the detection plate (202), and the first probe (3), the second probe (4), the third probe (5), and the fourth probe (6) being capable of sensing the amount of deformation and the direction of deformation of the elastic body (2) by means of the current exciting eddy current magnetic field changes. The present force sensor has the characteristics of having a small volume and strong bearing capacity and being interference-resistant, and the force measurement range and accuracy of the sensor can be adjusted directly from the machine body, being highly flexible.

Description

Flat disc type six-dimensional force sensor based on electric eddy current effect, detection method and intelligent equipment

This disclosure takes the patent document filed on October 8, 2019 with the application number 201910949542.6 and titled "A flat disk six-dimensional force sensor based on the electric eddy current effect, detection method and smart device" as the priority document, which The entire content is incorporated into this disclosure by reference.

Technical field

The present disclosure relates to the technical field of force sensors, and in particular to a flat disk six-dimensional force sensor based on an electric eddy current effect, a detection method and an intelligent device.

Background technique

With the rapid development of intelligent equipment, sensors are being used more and more widely as a medium for robots to interact with the external environment. At present, miniaturization, simplification, high load, and high precision are the main directions for the development of six-dimensional force sensors.

Existing force sensors mainly use resistance strain gauges for detection. By designing a suitable elastomer structure, the strain gauges are pasted at the position with the greatest strain. For example, a six-dimensional RSS force sensor in the prior art known to the inventor is formed by connecting two platforms and six elastic bodies in the middle. The surfaces of the elastic bodies are all attached with strain gauges, which are rotated by the rod length and elasticity. The sub-thickness dimension change can be designed into six-dimensional force sensors with different ranges and sensitivities, which have the characteristics of small error and high sensitivity; another type of strain-type six-dimensional force sensor in the prior art known to the inventor, through the use of multiple The elastic body and the reasonable design of the strain gauge bridge design can eliminate the coupling between dimensions. The elastic body of the special structure makes the sensor have good rigidity and sensitivity.

However, the above-mentioned sensors have a large volume, occupying a large space, and are difficult to apply in a narrow space, and because the connection of the strain gauge and the elastic body is realized by the pasting process, the strain gauge force sensor will cause larger creep, hysteresis and other problems. , Resulting in low measurement accuracy of the sensor, especially when the dynamic measurement is relatively serious, the frequency response is not high; in addition, the grid wire of the strain gauge is a metal wire, and it is difficult to promote the use of the strain type force sensor in the occasion of large magnetic interference.

Summary of the invention

In view of the shortcomings of the prior art, the present disclosure proposes a flat disk six-dimensional force sensor based on the electric eddy current effect, a detection method and an intelligent device.

In order to achieve the above objectives, the present disclosure adopts the following technical solutions:

A flat disk six-dimensional force sensor based on the electric eddy current effect, comprising a housing, an elastic body, a first probe, a second probe, a third probe, and a fourth probe. The elastic body is arranged inside the housing. The elastic body includes a bottom plate, a detection plate, and a first boss. A pillar is provided between the bottom plate and the detection plate, the detection plate is located above the bottom plate, and the first boss is disposed on the detection plate. Above, a sink groove is provided on the lower surface of the detection board, and the first probe, the second probe, the third probe, and the fourth probe are respectively evenly distributed on the bottom plate and are not in contact with the When the detection board is in contact, the first probe, the second probe, the third probe, and the fourth probe can excite the eddy current magnetic field to change by current to induce the deformation amount and direction of the elastic body. When there is force loading, the elastic body deforms. The change of the eddy current magnetic field excited by the inductance coil with high-frequency DC current induces the deformation amount and direction of the elastic body, and then collects the voltage at both ends of the coil through a general acquisition circuit. The voltage-force characteristic curve can be obtained by changing, and the magnitude and direction of the force can be detected.

Further, the housing has a hollow cylindrical structure, the top surface of the housing is provided with four evenly distributed first through holes, the center of the housing is provided with a second through hole, and the radius of the second through hole is larger than the radius of the second through hole. The radius of the first via. The shell mainly plays a role of safety protection. The first through hole is used for positioning and fixing, and the second through hole is used to avoid the elastic body to avoid affecting the detection of the elastic body.

Further, the first boss has an annular boss structure, and four evenly distributed screw holes are provided on the first boss. The screw holes are used for the installation and fixation of the load, and the evenly distributed setting can make the installation of the load more stable.

Further, the detection board has a thin-walled plate structure, and the detection board is provided with four uniformly distributed first through holes, and the first through holes correspond to the positions of the first through holes. The first through hole corresponds to the first through hole, and is mainly used for positioning and fixing the elastic body.

Further, the pillar is specifically a bottleneck-shaped structure with a circular arc transition structure, and the inner diameter of the first boss is greater than the maximum outer diameter of the pillar. It avoids the ineffective force measurement of the sensor due to stress concentration or obstruction of force transmission during detection, which effectively guarantees the reliability and stability of sensor detection.

Further, the bottom plate is provided with four evenly distributed second through holes, and the second through holes correspond to the positions of the first through holes. The second through hole corresponds to the first through hole and is mainly used for the fixed installation of the sensor.

Further, four evenly distributed second bosses are provided on the bottom plate, the second bosses are arranged 45° apart from the second through hole, and the second bosses are all provided with internal threads, The position of the internal thread is directly opposite to one side of the sink groove. The internal thread is mainly used for installation corresponding to the external thread of the sensing probe, so that the sensing probe can be stably mounted on the second boss and avoiding contact with the second through hole.

Further, a flange is provided on the outer side of the bottom plate, and a groove is provided on the bottom of the bottom plate. The flange is mainly used to limit the housing, and the groove is mainly used for positioning and fixing.

Further, a third through hole is provided in the middle of the elastic body. The third through hole is mainly used for the installation limit of the elastic body.

Further, the first probe includes a probe holder and a coil, the coil is arranged in the probe holder, the probe holder is specifically a columnar structure, the outer circumference of the probe holder is provided with an external thread, and the outside of the probe holder is also Four partial notches are opened, and the end of the probe holder is provided with a straight groove. The external thread on the probe holder is used to fit the housing, and the notch and straight groove are convenient for screwing the probe.

Further, the inside of the probe holder is hollow, and a cylinder is arranged at the center of the inside of the probe holder. The inner hollow is easy to assemble with the coil, and the cylinder plays a role in positioning.

Further, the coil is specifically a hollow cylindrical structure, a fourth through hole is provided in the center of the coil, and the inner diameter of the fourth through hole is consistent with the outer diameter of the cylinder. It is convenient to assemble the coil and the probe bracket to ensure the accuracy of the installation.

Further, the structure of the second probe, the structure of the third probe, and the structure of the fourth probe are consistent with the structure of the first probe. The design of this structure facilitates the lead-out of the signal line and the adjustment of the detection distance. The distance from the detection surface can be adjusted by screwing to adjust the range of the sensor's measuring force.

Further, the first probe, the second probe, the third probe, and the fourth probe are all arranged at a distance of 0.3-1 mm from the lower surface of the detection board. Since the sensor probe is not in contact with the elastic body, it can allow the sensor to have a larger load capacity and a larger amount of deformation. At the same time, the frequency of the eddy current field can reach hundreds of kilohertz, which has a higher resolution and can effectively resist larger The range of magnetic field interference, therefore, the present disclosure has the characteristics of small size, high resolution, and anti-interference.

A flat disk six-dimensional force detection method based on the electric eddy current effect, using the flat disk six-dimensional force detection sensor based on the electric eddy current effect as described above, and the specific method is as follows: The body deforms, and the change in the eddy current magnetic field excited by the inductance coil with high-frequency DC current induces the deformation amount and direction of the elastic body, and then collects the voltage change at both ends of the coil through a general acquisition circuit to obtain the voltage—— The force characteristic curve is the magnitude of the detected force.

Further, in the detection process, the direction of the force is judged by the detection feedback data of the first probe, the second probe, the third probe, and the fourth probe.

An intelligent device includes a sensor, and the sensor is specifically a flat disc type six-dimensional force detection sensor based on the eddy current effect as described in any one of the above.

The beneficial effects of a flat disk six-dimensional force sensor based on the electric eddy current effect, a detection method and an intelligent device provided by the present disclosure are: it solves the problems of creep and hysteresis of the strain sensor; saves space under heavy load and can It can be used to detect forces and moments in various directions in occasions with narrow gaps; fast response speed, high dynamic force measurement accuracy; simple structure, high sensitivity, anti-interference, light and thin, high bearing capacity, etc.; its thickness can be as thin as within 5mm, far It is lighter and thinner than the ordinary strain-type six-dimensional force sensor. Due to the use of eddy current measurement, it also has a very high response frequency, and the measurement is more sensitive and flexible.

Description of the drawings

Figure 1 is a cross-sectional view of the overall structure of the present disclosure;

Figure 2 is a bottom schematic diagram of the overall structure of the present disclosure;

Figure 3 is a schematic diagram of the structure of the elastomer of the present disclosure;

Figure 4 is a cross-sectional view of the elastomer structure of the present disclosure;

FIG. 5 is a schematic diagram of the position of the elastic body slot hole in the first embodiment of the disclosure; FIG.

FIG. 6 is a schematic diagram of the position of the elastic body slot hole in the embodiment 2 of the disclosure; FIG.

FIG. 7 is a schematic diagram of the position of the elastic body slot hole in the third embodiment of the disclosure; FIG.

FIG. 8 is a schematic diagram of the position of the elastic body slot hole in Embodiment 4 of the disclosure; FIG.

9 is a cross-sectional view of the position of the elastic body slot hole in Embodiment 1 of the disclosure;

Fig. 10 Schematic diagram A of the structure of the probe holder of the present disclosure;

FIG. 11 is a schematic diagram B of the structure of the probe holder of the present disclosure;

Fig. 12 is a schematic diagram of the coil structure of the present disclosure.

In the figure: 1. Housing; 2. Elastomer; 3. First probe; 4. Second probe; 5. Third probe; 6. Fourth probe; 201. First boss; 202. Inspection board; 203. First through hole; 204, second through hole; 205, flange; 206, sink groove; 207, second boss; 208, internal thread; 209, bottleneck pillar; 210, third through hole; 211, concave Slot; 212, screw hole; 401, probe holder; 402, coil; 411, external thread; 412, straight slot; 413, notch; 414, cylinder; 421, fourth through hole.

Detailed ways

The technical solutions in the embodiments of the present disclosure will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, rather than all the embodiments. All other embodiments obtained by a person of ordinary skill in the art without creative work shall fall within the protection scope of the present disclosure.

Embodiment 1: A flat disk six-dimensional force sensor based on the eddy current effect.

A flat disk six-dimensional force sensor based on the eddy current effect, as shown in Figures 1 to 12, includes a housing 1, an elastic body 2, a first probe 3, a second probe 4, a third probe 5, and a fourth probe 6; Wherein, the housing 1 is a hollow cylindrical 414 structure, the top surface is provided with four uniformly distributed first through holes and a second through hole in the center, used to avoid the elastic body 2, the housing 1 can play a safety protection Function; The elastic body 2 is an integrally formed three-layer disc structure, including a bottom plate, a detection plate 202 and a first boss 201, the first boss 201 is an annular boss, the first boss 201 is provided with four A uniformly distributed screw hole 212 is used for the installation and fixation of the load; the detection board 202 is a thin-walled plate structure with four uniformly distributed first through holes 203 arranged on it, and the four first through holes on the housing 1 The lower surface of the detection board 202 is the detection surface, and four sinks 206 are arranged on the upper surface; a bottleneck-shaped pillar 209 is arranged between the bottom plate and the detection board 202 for the supporting connection between the bottom plate and the detection plate 202; There are four evenly distributed second through holes 204, the positions corresponding to the first through holes 203, and are used to fix the sensor; four evenly distributed second bosses 207 are provided 45° apart from the second through holes 204, each Each second boss 207 is provided with an internal thread 208; a flange 205 is provided on the outer side to limit the position of the housing 1; a groove 211 is provided on the bottom surface; and a third through hole 210 is provided in the middle of the entire elastic body. The second probe 4 is composed of a probe holder 401 and a coil 402. The probe holder 401 is a columnar structure with external threads 411 on the outer circumference and four evenly distributed gaps 413 , The interior is hollow, the middle position is provided with a cylinder 414, and the end is provided with a straight slot 412 to facilitate the screwing of the probe; the coil 402 is a hollow cylinder 414 structure with a fourth through hole 421 in the center, the inner diameter of which is the same as that of the probe holder 401 The outer diameter of the inner cylinder 414 of the same; the first probe 3, the third probe 5, and the fourth probe 6 have the same external structure as the second probe 4.

In this embodiment, the housing 1 and the elastic body 2 are connected by a cold press interference fit, and the four first through holes on the housing 1 correspond to the four first through holes 203 on the elastic body 2 one-to-one; The first probe 3, the second probe 4, the third probe 5 and the fourth probe 6 are respectively threadedly connected with the internal thread 208 on the elastic body 2 through the external thread 411 thereon. Among them, the material of the elastic body 2 is stainless steel, the material of the probe holder 401 is plastic, and the coil 402 is wound by copper wire.

The first probe 3, the second probe 4, the third probe 5, and the fourth probe 6 should be screwed to the position 0.5mm from the bottom surface of the detection board 202. The distance between the probe and the detection surface is necessary, and it is generally linear in the inductor coil 402. Within the range and outside the elastic deformation range of the elastic body, otherwise the inductance coil 402 will be damaged when it is close to the deformation limit of the elastic body; the corresponding position of the internal thread 208 should be directly opposite to the side of the slot 206. The positions of the counterbore 206 and the slot of the internal thread 208 are shown in FIG. 5, and the counterbore 206 in each direction is on the same side of each shaft. The distance between the position of the probe and the center of the bottleneck pillar 209 is necessary. As the distance increases, the force/torque range of the sensor decreases but the sensitivity increases.

The inner diameter of the first boss 201 should be greater than the maximum outer diameter of the bottleneck pillar 209. As the difference between these two dimensions increases, the sensor's measuring force range decreases and the sensitivity increases; the screw hole on the first boss 201 The position direction of 212 corresponds to the position direction of the internal thread 208; the screw hole 212 on the first boss 201 is inside the internal thread 208, which is suitable for bearing large loads and is an implementation of a large-range disk type six-dimensional force sensor the way.

When there is a force loading, the elastic body 2 is deformed, and the change of the eddy current magnetic field causes the magnetic flux passing through the inductor coil 402 to change, so that the voltage across the coil 402 changes, and then the voltage change across the coil 402 is collected by a general acquisition circuit. The voltage-force characteristic curve is obtained, and the deformation amount and the deformation direction of the elastic body 2 can be judged by the voltage changes of the different inductance coils 402, and the magnitude and direction of the force loading can be judged.

The working principle of this sensor is as follows: When the sensor is used, the probe is powered first. Based on the eddy current effect, there is a stable eddy current magnetic field on the detection surface of the elastomer 2, and then when the force is detected, it will cause the elastomer 2 to generate front, back, left, and right. The tilt or displacement in a certain direction causes the eddy current magnetic field excited by the probe to change, and the respective impedance of the probes arranged on the circumference will change, and then the impedance of the probe will change, and then the voltage at both ends of the probe can be obtained. Force-voltage characteristic curve, the optimal linearity segment is the effective range of the six-dimensional force sensor.

Embodiment 2: A flat disk six-dimensional force sensor based on the eddy current effect.

The difference from Embodiment 1 is that, as shown in Figure 6, the positions of the two countersinks 206 on one axis are on one side of the axis, and the positions of the two countersinks 206 on the other axis are symmetrically distributed at 180°. .

Embodiment 3: A flat disk six-dimensional force sensor based on the eddy current effect.

The difference from Embodiment 1 is that, as shown in Figure 7, the first boss 201 can also be arranged outside the internal thread 208. The advantage of this embodiment is that it has high detection sensitivity and is suitable for small-range, small-load measurements. In theory, the larger the inner diameter of the first boss 201 under this structure type, the larger the diameter of the index circle where the internal thread 208 is located, and the higher the resolution of the small load.

Embodiment 4: A flat disk six-dimensional force sensor based on the eddy current effect.

The difference from Embodiment 2 is that, as shown in Figure 8, the first boss 201 can also be arranged outside the female thread 208. The advantage of this embodiment is that it has high detection sensitivity and is suitable for small-range, small-load measurements. In theory, the larger the inner diameter of the first boss 201 under this structure type, the larger the diameter of the index circle where the internal thread 208 is located, and the higher the resolution of the small load.

Embodiment 5: A flat disc type six-dimensional force detection method based on the electric eddy current effect.

A flat disc six-dimensional force detection method based on the electric eddy current effect, using the flat disc six-dimensional force detection sensor based on the electric eddy current effect as described in Example 1. The specific method is as follows: 2 Deformation occurs. The change in the eddy current magnetic field excited by the inductance coil 402 with high-frequency DC current is used to induce the deformation amount and direction of the elastic body 2, and then the voltage change at both ends of the coil 402 is collected by a general acquisition circuit. Voltage-force characteristic curve, that is, the magnitude of the detected force.

In the detection process, the direction of the force is judged by the detection feedback data of the first probe 3, the second probe 4, the third probe 5 and the fourth probe 6. Specifically: if the feedback distance of the first probe 3, the second probe 4, the third probe 5 and the fourth probe 6 is increased (decreased) at the same time, and the amount of change is the same, the force direction is the Z direction; if the first probe 3 The feedback distance from the second probe 4 is reduced (increased), the feedback distance of the third probe 5 and the fourth probe 6 is increased (decreased), and the amount of change is the same, the force direction is the torque around the Z direction; if the first probe 3 The feedback distance increases (decreases), the feedback distance of the third probe 5 decreases (increases), the feedback distance of the second probe 4 and the fourth probe 6 decreases (increases) at the same time, then the force direction is the X direction; if The feedback distance of the second probe 4 is increased (decreased), the feedback distance of the fourth probe 6 is decreased (increased), and the amount of change is the same, while the feedback distance of the first probe 3 and the third probe 5 remains unchanged or slightly increased at the same time (Decrease) and the amount of change is the same, the force direction is the torque around the X direction; similarly, if the feedback distance of the second probe 4 is increased (decreased), the feedback distance of the fourth probe 6 is decreased (increased), and the first The feedback distance of the first probe 3 and the third probe 5 is increased (decreased) at the same time, the force direction is the Y direction; if the feedback distance of the first probe 3 is increased (decreased), the feedback distance of the third probe 5 is decreased (increased) ), and the amount of change is the same, while the feedback distance of the second probe 4 and the fourth probe 6 remains the same or at the same time slightly decreases (increases) and the amount of change is the same, the force direction is the torque around the Y direction.

Embodiment 6: A flat disc type six-dimensional force detection method based on the electric eddy current effect.

The difference from Embodiment 5 is that the flat disk type six-dimensional force detection sensor based on the electric eddy current effect as described in Embodiment 2 is used. The specific method is as follows: When a force is loaded, the elastic body 2 is deformed. The change of the eddy current magnetic field excited by the inductance coil 402 of the high-frequency direct current induces the deformation amount and direction of the elastic body 2, and then the voltage change at both ends of the coil 402 is collected by a general acquisition circuit to obtain the voltage-force characteristic curve. That is, the magnitude of the detected force.

In the detection process, the direction of the force is judged by the detection feedback data of the first probe 3, the second probe 4, the third probe 5 and the fourth probe 6. Specifically: if the feedback distance of the first probe 3, the second probe 4, the third probe 5, and the fourth probe 6 is increased (decreased) at the same time, and the amount of change is the same, the force direction is the Z direction; if only the third probe 5 The feedback distance is increased (decreased), the feedback distance of the first probe 3, the second probe 4, and the fourth probe 6 is decreased (increased), and the amount of change is the same, the force direction is the torque around the Z direction; The feedback distance of one probe 3 increases (decreases) or does not change, the feedback distance of the third probe 5 decreases (increases) or does not change, the feedback distance of the second probe 4 decreases (increases), and the feedback distance of the fourth probe 6 Increase (decrease), the force direction is the X direction; if the feedback distance of the second probe 4 increases (decreases), the feedback distance of the fourth probe 6 decreases (increases), and the amount of change is the same, and the first probe The feedback distance of 3 and the third probe 5 is unchanged or slightly increased (decreased) at the same time and the change is the same, the force direction is the torque around the X direction; similarly, if the feedback distance of the second probe 4 is increased (decreased) ) Or unchanged, the feedback distance of the fourth probe 6 is reduced (increased) or unchanged, and the feedback distance of the first probe 3 and the third probe 5 is increased (decreased) at the same time, the force direction is the Y direction; The feedback distance of the probe 3 increases (decreases), the feedback distance of the third probe 5 decreases (increases), and the amount of change is the same, while the feedback distance of the second probe 4 remains the same or slightly decreases (increases), the fourth probe 6 The feedback distance is unchanged or slightly increased (decreased), then the force direction is the torque around the Y direction.

Embodiment 7: A smart device.

An intelligent device includes a sensor, and the sensor is specifically a flat disk type six-dimensional force detection sensor based on the electric eddy current effect as described in any one of embodiments 1-4.

The above are only the preferred embodiments of the present disclosure, but the present disclosure should not be limited to the content disclosed in the embodiments and drawings. Therefore, all equivalents or modifications made without departing from the spirit of the present disclosure are It falls into the scope of protection of the present disclosure.

Claims

A flat disk six-dimensional force sensor based on the electric eddy current effect, which is characterized by comprising a housing, an elastic body, a first probe, a second probe, a third probe, and a fourth probe. The elastic body is arranged on the housing. Inside, the elastic body includes a bottom plate, a detection plate and a first boss, a pillar is provided between the bottom plate and the detection plate, the detection plate is located above the bottom plate, and the first boss is arranged on Above the detection board, a sink groove is provided on the lower surface of the detection board, and the first probe, the second probe, the third probe, and the fourth probe are respectively evenly distributed on the bottom plate and Without contacting the detection board, the first probe, the second probe, the third probe, and the fourth probe can stimulate the eddy current magnetic field to change by current to induce the deformation amount and direction of the elastic body.
The flat disk six-dimensional force sensor based on the electric eddy current effect according to claim 1, wherein the housing is a hollow cylindrical structure, and the top surface of the housing is provided with four first through holes uniformly distributed, so The center of the housing is provided with a second via hole, and the radius of the second via hole is larger than the radius of the first via hole.
The flat disk six-dimensional force sensor based on the electric eddy current effect according to claim 1, wherein the first boss has a ring-shaped boss structure, and four uniformly distributed force sensors are provided on the first boss. Screw holes.
The flat disk six-dimensional force sensor based on the electric eddy current effect of claim 2, wherein the detection plate is a thin-walled plate structure, and the detection plate is provided with four uniformly distributed first through holes , The position of the first through hole corresponds to the position of the first through hole.
The flat disk six-dimensional force sensor based on the electric eddy current effect according to claim 1, wherein the pillar is a bottleneck-shaped structure and a circular arc transition structure, and the inner diameter of the first boss is larger than the inner diameter of the first boss. The maximum outer diameter of the pillar.
The flat disk six-dimensional force sensor based on the electric eddy current effect of claim 4, wherein the bottom plate is provided with four evenly distributed second through holes, and the second through holes are connected to the first through holes. One through hole position corresponds.
The flat disk six-dimensional force sensor based on the electric eddy current effect according to claim 6, characterized in that: the bottom plate is provided with four evenly distributed second bosses, the second bosses and the first The two through holes are arranged at an interval of 45°, and the second bosses are all provided with internal threads, and the position of the internal threads is directly opposite to one side of the sink groove.
The flat disk six-dimensional force sensor based on the electric eddy current effect according to claim 1, wherein a flange is provided on the outer side of the bottom plate, and a groove is provided at the bottom of the bottom plate.
The flat disk six-dimensional force sensor based on the eddy current effect of claim 1, wherein a third through hole is provided in the middle of the elastic body.
The flat disk six-dimensional force sensor based on the electric eddy current effect according to claim 1, wherein the first probe comprises a probe holder and a coil, the coil is arranged in the probe holder, and the probe holder is specifically In a cylindrical structure, an external thread is provided on the outer circumference of the probe holder, four partial notches are also opened on the outer side of the probe holder, and a straight groove is provided at the end of the probe holder.
The flat disk six-dimensional force sensor based on the electric eddy current effect of claim 10, wherein the probe holder is hollow inside, and a cylinder is provided at the center of the probe holder.
The flat disk six-dimensional force sensor based on the eddy current effect of claim 11, wherein the coil is specifically a hollow cylindrical structure, and the center of the coil is provided with a fourth through hole, and the fourth through hole The size of the inner diameter is consistent with the outer diameter of the cylinder.
The flat disk six-dimensional force sensor based on the electric eddy current effect of claim 12, wherein the structure of the second probe, the structure of the third probe, and the structure of the fourth probe are the same as those of the fourth probe. The structure of the first probe is the same.
The flat disk six-dimensional force sensor based on the electric eddy current effect according to claim 1, wherein the first probe, the second probe, the third probe and the fourth probe are all arranged in The position is 0.3-1mm away from the lower surface of the detection board.
A flat disc type six-dimensional force detection method based on the electric eddy current effect, characterized in that the flat disc type six-dimensional force detection sensor based on the electric eddy current effect according to any one of claims 1-14 is used, and the specific method is as follows : When there is force loading, the elastic body is deformed. The change of the eddy current magnetic field excited by the inductance coil with high-frequency DC current induces the deformation amount and direction of the elastic body, and then collects the two ends of the coil through a general acquisition circuit. The voltage change can get the voltage-force characteristic curve, that is, the magnitude of the detected force.
The flat disc type six-dimensional force detection method based on the electric eddy current effect of claim 15, wherein the detection feedback data of the first probe, the second probe, the third probe, and the fourth probe are used to judge during the detection process. The direction of the force.
An intelligent device, comprising a sensor, characterized in that the sensor is specifically the flat disc type six-dimensional force detection sensor based on the eddy current effect according to any one of claims 1-14.