WO2021053804A1 - Dispositif de spectroscopie d'absorption de gaz et procédé de spectroscopie d'absorption de gaz - Google Patents

Dispositif de spectroscopie d'absorption de gaz et procédé de spectroscopie d'absorption de gaz Download PDF

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WO2021053804A1
WO2021053804A1 PCT/JP2019/036860 JP2019036860W WO2021053804A1 WO 2021053804 A1 WO2021053804 A1 WO 2021053804A1 JP 2019036860 W JP2019036860 W JP 2019036860W WO 2021053804 A1 WO2021053804 A1 WO 2021053804A1
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gas
measured
concentration
absorption
temperature
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PCT/JP2019/036860
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English (en)
Japanese (ja)
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和音 真野
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株式会社島津製作所
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00—Measuring or testing not otherwise provided for
    • G01D21/02—Measuring two or more variables by means not covered by a single other subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers

Definitions

  • the present invention relates to a gas absorption spectroscope and a gas absorption spectroscopy method for measuring the concentration, temperature, etc. of the gas based on the laser light absorption spectrum of the gas to be measured.
  • This gas absorption spectroscope and gas absorption spectroscopy method can be applied to non-contact and high-speed measurement of gas concentration and gas temperature, for example, in the automobile industry, and in addition, a high temperature / high pressure environment such as combustion gas in a plant furnace. It can be applied in various fields such as gas measurement in Japan.
  • WMS Widelength Modified Spectroscopy
  • a gas absorption spectroscopy in which a laser beam is irradiated to a measurement target gas and the laser beam is measured by a photodetector.
  • the WMS sweeps the wavelength of the laser beam and modulates the wavelength in a sinusoidal manner with a period sufficiently shorter than the sweep period (that is, a sufficiently high frequency f).
  • gas absorption can be measured with high sensitivity by detecting a harmonic of frequency f (generally a second harmonic: 2f) in a photodetector
  • Patent Document 1 Patent Document 1, Non-Patent Documents 1, 2, 3
  • a lock-in amplifier is usually used to detect harmonics, but a method of performing synchronous detection of 2f by digitally sampling the detector signal as it is and performing FFT analysis has also been proposed (Non-Patent Document 4). ).
  • the conventional WMS is excellent in sensitivity and robustness (easiness of measurement), and is therefore suitable for application to an industrial gas absorption spectroscope, but it is difficult to increase the wavelength modulation frequency of the laser.
  • the wavelength modulation frequency becomes high, it becomes difficult to accurately measure the wavelength modulation width. Therefore, in high-speed measurement, there is a problem that the measurement accuracy of gas concentration, gas temperature, etc. is lowered.
  • the absorption spectrum of the gas to be measured is obtained from the change in light intensity with respect to the change in the wavelength of the laser, the absorption spectrum is approximated by an approximate polynomial, and the coefficient of each term of the approximate polynomial is used.
  • a method has been proposed in which an nth-order differential spectrum of an absorption spectrum is created and the temperature, concentration, pressure, etc. of the gas to be measured are measured based on the nth-order differential spectrum (Patent Document 2).
  • the gas concentration, gas temperature, etc. can be measured with high accuracy even in high-speed measurement.
  • a gas other than the measurement target gas is mixed in the measurement target gas, and in such a case, the obtained absorption spectrum itself changes, and the gas of the measurement target gas
  • concentration, gas temperature, etc. cannot be measured accurately (that is, a measurement error occurs).
  • the present invention has been made in view of such circumstances, and an object of the present invention is to have high accuracy even when a gas other than the measurement target gas is mixed in the measurement target gas. It is an object of the present invention to provide a gas absorption spectroscope and a gas absorption spectroscopic method capable of measuring a gas concentration and the like.
  • the gas absorption spectroscope of the present invention includes a light source having a variable wavelength, a light source control unit that changes the wavelength of light emitted from the light source, a gas to be measured, and a mixed gas other than the gas to be measured.
  • the gas cell into which the gas to be measured including the above is introduced the light detector that detects the light intensity of the light emitted from the light source and after passing through the gas cell, and the light intensity change with respect to the wavelength change by the light source control unit.
  • a spectrum creation unit that creates an absorption spectrum of the measurement gas, a physical quantity measurement unit that measures at least one of the temperature and concentration of the measurement target gas based on the absorption spectrum of the measurement target gas, and a gas concentration measurement unit that measures the concentration of the mixed gas. It is characterized by including a physical quantity correction unit that corrects at least one of the temperature and the concentration of the measurement target gas measured by the physical quantity measuring unit based on the concentration of the mixed gas.
  • the "mixed gas” referred to here means a gas other than the gas to be measured existing in the measurement system, and is a concept including a plurality of types of gases.
  • the physical quantity measuring unit has a polynomial approximation unit that approximates the absorption spectrum by an approximate polynomial within a range of the wavelength width corresponding to the wavelength modulation width of WMS at each point of the wavelength, and a coefficient of each term of the approximate polynomial at each point. It has a differential spectrum creation unit that creates a second-order differential spectrum of the absorption spectrum based on the above, and measures at least one of the temperature and concentration of the measurement target gas based on the second-order differential spectrum of the measurement target gas. Can be done. Further, in this case, the gas concentration measuring unit may measure the concentration of the mixed gas based on the second derivative spectrum of the mixed gas.
  • the gas concentration measuring unit may be arranged in the gas cell and may have a concentration sensor for measuring the concentration of the mixed gas.
  • the physical quantity correction unit has an approximate formula showing a change in the peak height of the second-order differential spectrum of the gas to be measured with respect to the concentration of the mixed gas, and the measurement measured by the physical quantity measurement unit by the correction value obtained by the approximate formula. At least one of the temperature and the concentration of the target gas may be corrected. Further, in this case, the approximate expression may be a power function.
  • the physical quantity correction unit has a correction value indicating the relationship between the concentration of the mixed gas and the peak height of the second-order differential spectrum of the measurement target gas, and the temperature of the measurement target gas measured by the physical quantity measurement unit based on the correction value. It is desirable to correct at least one of the and the concentration. Further, in this case, the correction value may be determined based on the change in the Lorentz spread coefficient (Air) with respect to the concentration of the mixed gas.
  • Air Lorentz spread coefficient
  • the physical quantity correction unit may be configured to have a database in which the correction values are stored.
  • the physical quantity measuring unit may measure at least one of the temperature and the concentration of the gas to be measured from the peak height of the second derivative spectrum.
  • the physical quantity correction unit determines the temperature and concentration of the gas to be measured measured by the physical quantity measurement unit based on the pressure of the gas to be measured and the concentration of the mixed gas. At least one may be corrected.
  • the approximate polynomial may be a quadratic polynomial.
  • gas absorption spectroscope may be a cavity ringdown absorption spectroscope.
  • the gas absorption spectroscopy method of the present invention includes a step of irradiating a gas to be measured containing a gas to be measured and a mixed gas other than the gas to be measured with light having a changing wavelength, and a step to be measured.
  • It includes a step of measuring at least one of the temperature and the concentration of the mixed gas, a step of measuring the concentration of the mixed gas, and a step of correcting at least one of the temperature and the concentration of the gas to be measured based on the concentration of the mixed gas. It is a feature.
  • the gas absorption spectroscope and the gas absorption spectroscopic method of the present invention at least one of the temperature and the concentration of the gas to be measured measured by the physical quantity measuring unit is corrected based on the concentration of the mixed gas. Even when other gases are mixed in the gas to be measured, it is possible to measure the gas concentration and temperature with high accuracy.
  • concentration of contaminating gases is a graph showing the relationship between the correction amount (change amount of the peak height of the second derivative spectrum) of the measurement target gas (H 2 O). It is a figure which shows the modification of the gas absorption spectroscope which concerns on embodiment of this invention.
  • FIG. 1 is a diagram showing a schematic configuration of a gas absorption spectroscope according to an embodiment of the present invention.
  • the gas absorption spectroscope 1 of the present embodiment has a gas cell 11 into which a gas to be measured G including a gas TG to be measured and a mixed gas MG other than the gas TG to be measured is introduced, and a gas cell 11.
  • the pressure of the gas G to be measured in the gas cell 11 is detected by the laser light source 12 arranged on one side, the light detector 13 arranged on the other side, the light source control unit 14 that controls the laser light source 12, and the gas cell 11.
  • the pressure sensor 15 is connected to the light detector 13 and the pressure sensor 15, and the output of the light detector 13 and the pressure sensor 15 is quantified and stored, and a measuring unit 20 for performing various calculations is provided.
  • the gas cell 11 is, for example, a member made of glass or resin, which is arranged between the laser light source 12 and the photodetector 13 and is configured to transmit the light from the laser light source 12.
  • the laser light source 12 has a variable wavelength within a range that covers at least the absorption wavelengths of the measurement target gas TG and the mixed gas MG, and is composed of, for example, a quantum cascade laser (QCL) and an injection current control type tunable diode laser. ..
  • QCL quantum cascade laser
  • the light source control unit 14 is a device that controls the laser light source 12 to sweep (change) the wavelength of the laser light source 12 from a predetermined lowest wavelength to the highest wavelength.
  • the photodetector 13 is a device that detects the intensity of light emitted from the laser light source 12 and after passing through the gas cell 11, and is composed of, for example, a photodiode having spectral sensitivity within the wavelength variable range of the laser light source 12. To.
  • the photodetector 13 is connected to the measuring unit 20, and the light intensity information (electric signal) detected by the photodetector 13 is output to the measuring unit 20.
  • the pressure sensor 15 is a sensor whose sensor surface (not shown) is exposed inside the gas cell 11 and detects the pressure of the gas G to be measured.
  • the pressure sensor 15 is connected to the measuring unit 20, and the pressure information (electric signal) detected by the pressure sensor 15 is output to the measuring unit 20.
  • the measuring unit 20 has an A / D converter 25 and an analysis unit 26.
  • the A / D converter 25 digitizes the light intensity information output from the photodetector 13 and the pressure information output from the pressure sensor 15 by the A / D converter 25, and stores the storage device (not shown). ) Is a device that stores in.
  • the analysis unit 26 is a device that performs mathematical calculations on the data (data in the storage device) obtained by the A / D converter 25 and measures the temperature and concentration of the gas TG to be measured (details will be described later). ).
  • FIG. 2 is a flowchart showing a procedure for measuring the temperature and concentration of the gas TG to be measured by using the gas absorption spectroscope 1 according to the present embodiment.
  • the light source control unit 14 controls the laser light source 12, emits a laser beam having a predetermined lowest wavelength (step S1), and sequentially changes the wavelength. And sweep up to the highest wavelength (step S2). Since the light from the laser light source 12 passes through the measured gas G in the gas cell 11, it is absorbed at this time at a wavelength corresponding to the measured gas G (that is, the measurement target gas TG and the mixed gas MG).
  • the intensity of the laser beam that has passed through the gas to be measured G is detected by the photodetector 13.
  • the light intensity information output from the photodetector 13 and the pressure information output from the pressure sensor 15 are digitized by the A / D converter 25 and sent to the analysis unit 26 to be stored in the storage device (non-functioning device). Stored in (shown).
  • the analysis unit 26 acquires the spectrum profile of the gas to be measured G based on the change in the light intensity information (step S3 (spectrum creation unit)).
  • FIG. 3 is a diagram showing an example of the spectrum profile obtained in step S3, and is a profile when the measurement target gas TG is assumed to be H 2 O and the mixed gas MG is assumed to be CO 2.
  • the profile of FIG. 3 H 2 O Concentration: 1%, CO 2 concentration: 10%, temperature: 300 (K), pressure: 1 (atm) as, H 2 O obtained from HITRAN2008 database , which is simulated from the spectral profile of CO 2 , but in reality, the spectral profiles obtained in steps S1 to S3 are used.
  • the measurement target gas TG (H 2 O) and the mixed gas MG (CO 2 ) are introduced into the gas cell 11, so that the spectrum profile obtained in step S3 includes the spectrum profile.
  • the absorption peak of the gas TG (H 2 O) to be measured appears near the wave number: 6955.2 (cm -1 ), and the absorption peak of the mixed gas MG (CO 2 ) appears near the wave number: 6955.7 (cm -1 ). appear.
  • the analysis unit 26 further performs a mathematical calculation described later based on the data of this spectrum profile. More specifically, by performing an operation using a polynomial on the spectrum profile obtained in step S3, processing equivalent to the secondary detection processing of WMS can be performed quickly and easily, and various physical quantities of the gas TG to be measured can be obtained. To measure.
  • Non-Patent Document 1 the spectrum profile of the nth harmonic obtained by synchronous detection by WMS processing is approximately expressed by the following equation (Non-Patent Document 1: Equation 8). From equations (2) and (3) Is obtained. Then, in order to calculate the WMS signal for the wave number ⁇ in the spectrum obtained in step S3, the range of the wave number of [ ⁇ ⁇ a ′ ⁇ ⁇ ⁇ + a ′] is fitted by the least squares method or the like (that is, polynomial approximation). Then, the coefficients b0, b1, b2, b3 ... (that is, the coefficients of the polynomial are obtained), and the ⁇ is sequentially changed to create the profiles of the coefficients b1 and b2 obtained by fitting. It is known to correspond to the WMS profile (Patent Document 2).
  • step S4 polynomial approximation part
  • step S5 coefficient of the polynomial
  • step S6 differential spectrum creation unit
  • FIG. 4 is a diagram showing an example of a quadratic differential curve (secondary differential spectrum) created by the method of the present embodiment.
  • step S7 physical quantity measurement unit
  • the quadratic differential curve The temperature of the gas TG to be measured is measured by measuring the ratio of the magnitudes of the two absorption peaks. Further, the pressure information detected by the pressure sensor 15 is stored as the pressure of the gas TG to be measured.
  • the absorption spectrum of the gas TG to be measured is obtained from the change in light intensity with respect to the change in the wavelength of the laser light source 12, the absorption spectrum is approximated by an approximate polynomial, and absorption is performed based on the coefficients of each term of the approximate polynomial.
  • the second-order differential spectrum of the spectrum is created, the temperature and concentration of the gas TG to be measured can be calculated from the second-order differential spectrum.
  • the peak height of the spectrum profile obtained in step S3 Turned out to fluctuate.
  • FIG. 5 is a spectrum profile of the measurement target gas TG (H 2 O) assuming that the measurement target gas TG is H 2 O and the mixed gas MG is CO 2.
  • FIG. 5A is a profile when the mixed gas MG (CO 2 ) concentration is 5%
  • FIG. 5B is a profile when the mixed gas MG (CO 2 ) concentration is 7%
  • FIG. 5C is a profile when the mixed gas MG (CO 2 ) concentration is 10%.
  • Figure 5 (a), (b) as seen by comparing (c), as the concentration of contaminating gases MG is increased, the absorption is can be seen that less of the measurement target gas TG (H 2 O).
  • step S6 the concentration of the mixed gas MG is calculated based on the quadratic differential curve obtained in step S6 (step S8 (gas concentration measuring unit)), thereby stepping.
  • step S8 gas concentration measuring unit
  • step S9 physical quantity correction unit
  • step S8 the absorption peak of the mixed gas MG (CO 2 ) is detected from the quadratic differential curve obtained in step S6 (that is, the peak of wave number: about 6955.7 (cm -1 )). Is detected), and the concentration of the mixed gas MG is calculated by measuring this peak height. Then, the concentration and temperature correction amount of the measurement target gas TG are calculated from the calculated concentration of the mixed gas MG, and the correction amount is added or multiplied by the temperature and concentration of the measurement target gas TG obtained in step S7. By doing so, the temperature and concentration of the gas TG to be measured are corrected (step S9).
  • FIG. 1 the absorption peak of the mixed gas MG
  • the correction amount of the measurement target gas TG (H 2 O) is obtained from the concentration of the mixed gas MG calculated in step S8 by using the approximate expression of the characteristic curve shown in FIG. There is.
  • the temperature and concentration of the measurement target gas TG corrected in step S9 are displayed on a display device (not shown) together with the pressure data stored in step S7.
  • the gas absorption spectroscope 1 approximates the absorption spectrum of the gas TG to be measured by an approximate polynomial, and creates a quadratic differential spectrum of the absorption spectrum based on the coefficients of each term of the approximate polynomial. Then, the temperature and concentration of the gas TG to be measured are calculated based on the second-order differential spectrum. Therefore, various physical quantities of the gas to be measured can be measured quickly and easily. Further, even when the mixed gas MG is mixed in the measurement target gas TG, the concentration and temperature of the measurement target gas TG are corrected from the concentration of the mixed gas MG, so that highly accurate measurement is possible. It has become.
  • the measurement target gas TG is H 2 O and the mixed gas MG is CO 2 , but the present invention is not limited to such a configuration, and various measurement target gases are not limited to this. It can be applied to TG and mixed gas MG. Further, the mixed gas MG is not limited to one type of gas, and can be applied to a case where a plurality of mixed gas MGs are mixed.
  • the gas absorption spectroscopic apparatus 1 has been described as calculating the temperature and concentration of the measurement target gas TG, but the present invention is not limited to such a configuration, and is not limited to such a configuration. It can be configured to measure at least one of the concentrations.
  • the gas absorption spectroscope 1 corrects the temperature and concentration of the gas TG to be measured based on the concentration of the mixed gas MG, but the measurement target gas TG is corrected based on the concentration and pressure of the mixed gas MG. It is also possible to correct the temperature and concentration of.
  • the concentration of the mixed gas MG is calculated from the quadratic differential curve obtained in step S6.
  • a concentration sensor is arranged in the gas cell 11 and this concentration is calculated. It can also be configured to measure the concentration of the mixed gas MG by a sensor.
  • the correction amount of the measurement target gas TG is obtained by using an approximate expression showing the relationship between the concentration of the mixed gas MG and the correction amount of the measurement target gas TG.
  • the database is not limited to such a configuration, and for example, a database for obtaining a correction value from the relationship between the concentration of the mixed gas MG and the peak height of the second-order differential spectrum of the measurement target gas TG is prepared, and the database is prepared.
  • the correction value may be obtained from (so-called LUT (LookUpTable)).
  • T ⁇ L is the absorbance
  • T is the temperature (K)
  • S (T) is the line intensity (cm -1 / (molecule ⁇ cm). -2 ))
  • l is the optical path length (cm)
  • p is the pressure (atm)
  • c is the concentration
  • ⁇ L is the Lorentz spread coefficient (cm -1).
  • ⁇ is the wave number (cm -1 )
  • ⁇ c is the central wave number (cm -1 )
  • ⁇ air is the Lorentz spread coefficient (Air) (cm -1 / Atm)
  • ⁇ Self is the Lorentz spread coefficient (Self) (cm -1 / atm)
  • n is the Lorentz width temperature coefficient.
  • the measurement procedure described with reference to FIG. 2 is not limited to the case where WMS is adopted as the gas absorption spectroscopy when a single-pass cell or a multi-pass (multiple reflection) cell is used, and the cavity ring-down absorption spectroscopy is performed. It is also applicable when an optical resonator cell such as the method (Cavity Ring-down Absorption Spectroscopy (CRDS)) is used.
  • WMS gas absorption spectroscopy
  • CRDS Cavity Ring-down Absorption Spectroscopy
  • FIG. 7 is a diagram showing a modified example of the gas absorption spectroscope of the present embodiment, and is a diagram showing a measurement system when CRDS is adopted as the gas absorption spectroscopy.
  • the gas absorption spectroscope (cavity ring-down absorption spectroscope) 100 of this modification includes an optical resonator 110 into which a gas to be measured G including a gas TG to be measured and a mixed gas MG other than the gas TG to be measured is introduced.
  • the optical resonator 110 is a Herriott type cell that is arranged between the optical switch 111 and the photodetector 113 and resonates the light from the laser light source 112.
  • the optical resonator 110 includes two mirrors 110a and 110b having high reflectance.
  • the two mirrors 110a and 110b are arranged so as to face each other, and the light from the laser light source 112 incident on the optical resonator 110 is confined between the two mirrors 110a and 110b so that the effective optical path length becomes long. It is configured.
  • the optical resonator 110 of this modification also has a function of a gas cell into which a gas to be measured G including a gas TG to be measured and a mixed gas MG other than the gas TG to be measured is introduced.
  • the optical resonator 4 of this modification is composed of two mirrors 110a and 110b, but a ring-type resonator composed of three or more mirrors may be used.
  • the optical switch 111 is a device arranged between the laser light source 112 and the optical resonator 110 to turn on / off (that is, transmit or block) the light from the laser light source 112.
  • the laser light source 112 has a variable wavelength within a range that covers at least the absorption wavelengths of the measurement target gas TG and the mixed gas MG.
  • the light source control unit 114 is a device that controls the laser light source 112 to sweep (change) the wavelength of the laser light source 112 from a predetermined lowest wavelength to the highest wavelength.
  • the photodetector 113 is a device that detects the intensity of the light emitted from the optical resonator 110, and the light intensity information (electrical signal) detected by the photodetector 113 is output to the measuring unit 120. It has become.
  • the pressure sensor 115 is a sensor whose sensor surface (not shown) is exposed inside the optical resonator 110 and detects the pressure of the gas G to be measured.
  • the pressure information (electrical signal) detected by the pressure sensor 115 is output to the measuring unit 120.
  • the measuring unit 120 has an A / D converter 125 and an analysis unit 126.
  • the A / D converter 125 digitizes the light intensity information output from the photodetector 113 and the pressure information output from the pressure sensor 115 by the A / D converter 125, and stores the storage device (not shown). ) Is a device that stores in.
  • the analysis unit 126 is a device that performs mathematical calculations on the data (data in the storage device) obtained by the A / D converter 125 and measures the temperature and concentration of the gas TG to be measured.
  • the light emitted from the laser light source 112 is incident on the optical resonator 110 into which the measured gas G is introduced through the optical switch 111. Then, when the frequency of the light incident on the optical resonator 110 matches the mode frequency of the optical resonator 110, the optical power is stored in the optical resonator 110. When the light from the laser light source 112 is blocked by the optical switch 111 when the optical power is sufficiently stored in the optical resonator 110, the light stored in the optical resonator 110 reaches several thousand to several in the resonator 110.
  • the attenuation of the light leaking from the optical resonator 110 is measured by the optical detector 113, and the light is measured.
  • the time constant (ring down time) of the attenuation of the absorption coefficient of the gas G to be measured at the frequency of the light incident on the optical cavity 110 at that time (that is, the frequency of the light emitted from the laser light source 112). Can be sought.
  • the absorption spectrum of the gas G to be measured can be obtained as in the gas absorption spectroscopic device 1 of the present embodiment.
  • the extinction coefficient ⁇ of the gas to be measured G is obtained by the following formula (7).
  • c is the speed of light
  • ⁇ is the ring-down time when the gas G to be measured is contained in the optical cavity 110
  • ⁇ 0 is the gas G to be measured is contained in the optical cavity 110. The ring-down time when there is no or when the absorption by the component in the measured gas G is negligible.
  • the effective distance of the light transmitted through the gas G to be measured can be remarkably extended, so that it is possible to detect a very slight absorption of the gas G to be measured. It will be possible.

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Abstract

Le problème à résoudre par la présente invention est de fournir un dispositif de spectroscopie d'absorption de gaz pouvant mesurer une teneur en gaz et similaire avec une précision élevée même lorsqu'un gaz cible de mesure est contaminé par un gaz autre que le gaz cible de mesure. La solution de l'invention porte sur un dispositif de spectroscopie d'absorption de gaz comprenant : une source de lumière à longueur d'onde variable ; une unité de commande de source de lumière permettant de modifier la longueur d'onde de la source de lumière ; une cellule à gaz vers laquelle est introduit un gaz mesuré, le gaz comprenant le gaz cible de mesure et le gaz de contamination autre que le gaz cible de mesure ; un détecteur de lumière permettant de détecter l'intensité optique de la lumière ayant traversé la cellule à gaz ; une unité de création de spectre permettant de créer un spectre d'absorption du gaz mesuré à partir d'un changement de l'intensité optique en réponse au changement d'une longueur d'onde ; une unité de mesure de quantité physique permettant de mesurer la température et/ou la teneur en gaz cible de mesure en fonction du spectre d'absorption du gaz cible de mesure ; une unité de mesure de teneur en gaz permettant de mesurer la teneur en gaz de contamination ; et une unité de correction de quantité physique permettant, en fonction de la teneur en gaz de contamination, de corriger la température et/ou la teneur en gaz cible de mesure mesurée par l'unité de mesure de quantité physique.
PCT/JP2019/036860 2019-09-19 2019-09-19 Dispositif de spectroscopie d'absorption de gaz et procédé de spectroscopie d'absorption de gaz WO2021053804A1 (fr)

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CN113758891A (zh) * 2021-08-18 2021-12-07 清华大学 混合气体组分浓度计算方法、装置、设备及存储介质

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