WO2021037520A1 - Procédé et dispositif pour découper une pièce à usiner au moyen d'un faisceau laser - Google Patents

Procédé et dispositif pour découper une pièce à usiner au moyen d'un faisceau laser Download PDF

Info

Publication number
WO2021037520A1
WO2021037520A1 PCT/EP2020/072180 EP2020072180W WO2021037520A1 WO 2021037520 A1 WO2021037520 A1 WO 2021037520A1 EP 2020072180 W EP2020072180 W EP 2020072180W WO 2021037520 A1 WO2021037520 A1 WO 2021037520A1
Authority
WO
WIPO (PCT)
Prior art keywords
laser beam
quasi
workpiece
bessel
optical axis
Prior art date
Application number
PCT/EP2020/072180
Other languages
German (de)
English (en)
Inventor
Malte Kumkar
Jonas Kleiner
Daniel FLAMM
Original Assignee
Trumpf Laser- Und Systemtechnik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trumpf Laser- Und Systemtechnik Gmbh filed Critical Trumpf Laser- Und Systemtechnik Gmbh
Publication of WO2021037520A1 publication Critical patent/WO2021037520A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/0006—Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/54—Glass

Definitions

  • the invention relates to a method for cutting a workpiece according to claim 1 and to a laser cutting device according to claim 10.
  • transparent or partially transparent substrates can be separated or cut.
  • Corresponding methods and devices are used, for example, when cutting glasses or other transparent substrates, in particular when Accurately fitting shapes are to be cut out of plate-like workpieces, for example in the production of displays.
  • WO 2012/006736 describes a laser cutting method in which a laser focus is irradiated through a surface of an in particular plate-like workpiece and is displaced along a cutting curve along the surface.
  • the laser focus produces local modifications and / or material tensions in the material. Depending on the design of the separating curve, parts can thereby be separated or separated from the rest of the material.
  • Bessel-like laser beams can be used in laser processing.
  • Such a Bessel-like laser beam or quasi-Bessel laser beam has an elongated focus zone in which the beam has non-diffractive properties, in the sense that the laser beam in the focus zone has an approximately propagation-invariant beam cross-section.
  • the characteristic focus zone of the quasi-Bessel laser beam enables comparatively greater cutting depths and thus the separation of thicker pieces of material.
  • Bessel-like beams can be generated with optics (eg axicon) from a laser beam emitted by a conventional laser light source, for example from a Gaussian beam.
  • the Bessel-like beam emerging from the optics generally initially has a convergence area in the beam path in front of its focus zone, in which the beam area initially tapers starting from the optics.
  • the optical properties in particular the refractive index
  • Such material areas are referred to below as critical areas.
  • the Bessel-like beam can be disturbed and the shifting of the focus zone along the separation curve can be impaired, for example by the fact that the beam is shaded or reflected in the beam path in front of the focus zone and the focus zone can no longer penetrate into the material.
  • the focus area cannot be brought close enough to the mentioned critical area. This can mean that it is not possible to separate the material in the critical areas.
  • the invention is based on the object of improving the reliability and efficiency of laser cutting processes.
  • This object is achieved by the method according to claim 1.
  • areas are separated from the workpiece or areas are cut out of the workpiece.
  • a workpiece is used that is at least partially transparent to the laser beam, e.g. glass.
  • a Bessel-like beam (hereinafter referred to as a quasi-Bessel laser beam) is first generated. This can be done by means of an optical
  • Beam shaping device (for example comprising an axicon element) take place, which is described in more detail below.
  • the quasi-Bessel laser beam propagates along a direction of propagation.
  • the quasi-Bessel laser beam is radiated into the material of the workpiece through a surface of the workpiece, so that the focus of the quasi-Bessel laser beam, which is effective for separation and, in particular, is elongated in the direction of propagation, lies at least partially within the material.
  • the focus zone is then displaced along a separating curve along the surface of the workpiece, in particular parallel to the surface of the workpiece.
  • the focus zone is shifted in such a way that at least in some areas (in a so-called correction section of the separation curve) the normal to the surface with the direction of propagation encloses an acute angle in terms of amount.
  • the acute angle is equal to or greater than the convergence angle which the quasi-Bessel laser beam has when it emerges from the beam-shaping device.
  • the acute angle is particularly included in an apex at an intersection of the direction of propagation with the surface of the workpiece with the local normal there, the acute angle being open in the direction of the beam shaping device (or a beam exit area of the beam shaping device).
  • a quasi-Bessel laser beam can be viewed as an approximate realization of an ideal Bessel beam.
  • the quasi-Bessel laser beam is generated, for example, from an entering laser beam by means of diffractive and / or refractive generated optical elements, as explained in more detail below.
  • various beam components converge in a focus zone, which then has properties similar to a Bessel beam over a certain spatial area.
  • the quasi-Bessel laser beam initially has a convergence zone after its exit from the beam shaping device, which then merges into the focus area.
  • an impairment of the Bessel-like focus zone by the critical areas in the material described at the beginning can be reduced or even compensated for.
  • impairments of the focus zone due to refraction effects (for example on the surface) and / or diffraction effects (for example at points of interference) can be compensated for. Areas can also be reached from the focus zone which are not optically accessible without the described inclination.
  • workpieces can also advantageously be detached from a surrounding material area, that is to say inner contours can be generated in material areas.
  • a separating curve running in a correspondingly closed manner in the workpiece is selected.
  • the inclination of the quasi-Bessel laser beam can cause an angle to the normal that is too large for an inclined workpiece can be avoided, for example with a three-dimensional component. This can reduce aberrations on the workpiece surface.
  • the inclination of the direction of propagation to the surface with respect to a direction of web movement can be sluggish (direction of propagation in the direction of the local movement of the path inclined forwards) or piercing (direction of propagation inclined backwards against the local movement of the path) ).
  • the correction section can be extended over the entire separation curve, that is, the entire separation curve can be traversed with the described inclination.
  • the correction section is selected only in those areas in which faults, critical areas or other shading effects can occur.
  • the described inclination preferably only takes place in those areas of the material of the workpiece in which the refractive index of the material for the laser radiation changes spatially strongly, in particular changes abruptly.
  • the critical areas also occur in the edge areas of the surface.
  • the correction section of the separating curve includes, in particular, any points of intersection or contact points of the separating curve with edge regions of the workpiece.
  • the focus zone can also be displaced parallel to the surface and at least in some areas also perpendicular to the surface along the separation curve.
  • corresponding telescope optics can be provided in the beam path of the beam shaping device, by means of which the position of the Bessel-like zone can be varied within certain limits along the direction of propagation.
  • the quasi-Bessel laser beam is advantageously generated from a Gaussian beam, for example by an axicon element, in particular a conical lens, as will be explained in more detail below.
  • Said inclination can be achieved in various ways, in particular by tilting the workpiece in relation to the beam-shaping device or tilting the beam-shaping device in relation to the workpiece, or by forming a correspondingly inclined beam path when exiting the beam-shaping optics.
  • the named task is also carried out by a
  • a laser cutting device which comprises an optical device for generating the laser beam and a workpiece holder for the needs-based arrangement (in particular holding and positioning) of the workpiece in relation to the laser beam.
  • the optical device comprises a laser light source for emitting an input laser beam and a beam shaping device, in particular comprising an axicon element, for converting the input laser beam into the quasi-Bessel laser beam.
  • the beam shaping device has a beam exit area, for which an optical axis is defined.
  • the quasi-Bessel laser beam exits through the beam exit area and spreads along a direction of propagation, the radiation initially converging at an angle of convergence (especially with respect to the optical axis) after the beam exit area in order to form the Bessel-like radiation zone.
  • the workpiece is positioned in the workpiece holder in such a way that the quasi-Bessel laser beam can be irradiated onto a surface of the workpiece in such a way that the normal of the surface and the direction of propagation are inclined at an acute angle to one another, the amount of which is equal to or greater than the angle of convergence of the quasi-Bessel laser beam as it emerges from the beam shaping device.
  • a laser cutting device is designed in particular to carry out the method described above.
  • the optical device comprises in particular at least one telescope arrangement.
  • Input laser beam may be provided, which is arranged in particular in the beam path in front of the beam shaping device.
  • a second telescope arrangement can be provided, for example, in order to form a focal zone which is elongated in the direction of propagation and to vary its shape and / or orientation.
  • Such a telescope arrangement is preferably arranged in the beam path after the beam shaping device.
  • the inclination can be achieved by tilting the workpiece holder and the optical axis relative to one another, or also by forming an inclined radiation path in the optical device.
  • the optical device can in particular comprise a wedge plate which causes the quasi-Bessel laser beam to be inclined with respect to the optical axis.
  • the wedge plate is in particular rotatable in the
  • Laser separating device arranged so that the direction of the inclination of the quasi-Bessel laser beam can be changed, for example to follow a curved path movement by corresponding rotation of the inclination.
  • the wedge plate is preferably arranged following the beam shaping device along the beam path and in front of the second telescope arrangement.
  • the optical device can comprise at least two wedge plates which cause the quasi-Bessel laser beam to be inclined relative to the optical axis, at least two of the wedge plates being arranged such that they can rotate relative to one another and / or together.
  • the at least two wedge plates are preferably arranged following the beam shaping device along the beam path and in particular in front of the second telescope arrangement.
  • the inclined irradiation of the Bessel-like focus zone can be achieved, for example, by means of the second telescope arrangement.
  • at least one lens of the second telescope arrangement can be displaced transversely to the direction of propagation and / or transversely to the optical axis be arranged.
  • the final lens of the second telescope arrangement can preferably be displaced in the aforementioned manner, for example the final lens of a micro-objective.
  • the inclination of the focus zone can also be changed in that the laser beam, inclined with respect to the optical axis, hits the lens of the second telescope arrangement which is in front in the beam path.
  • This can be achieved, for example, by providing a variable / adjustable beam deflection device in the beam path in front of the second telescope arrangement, by means of which the direction of propagation of the laser beam in front of the second telescope arrangement can be changed.
  • the direction of propagation with respect to the optical axis on the first lens of the second telescope arrangement is changed by an angle alpha 'by means of a piezo-driven mirror.
  • the mirror can also be designed as a reflective, diffractive optical element (DOE), which allows a very compact design.
  • DOE diffractive optical element
  • the beam shaping device preferably comprises an axicon element and / or a diffractive optical element (DOE).
  • DOE diffractive optical element
  • the axicon element and / or the diffractive optical element can preferably be held inclinable with respect to the optical axis. By inclining the element, the quasi-Bessel laser beam or the Bessel-like focus can then be inclined relative to the optical axis.
  • the axicon element and / or the diffractive optical element is mounted rotatably about the optical axis of the beam shaping device. This allows the direction of inclination of the beam path when passing through a curved path movement, so that, for example, the inclination in relation to the local path movement can always be kept constant.
  • the inclination of the beam path in the manner mentioned can also be achieved by means of an Alvarez lens system.
  • the Alvarez lens system is preferably arranged along the beam path on the beam shape of the optical element and in front of the telescope arrangement.
  • An Alvarez lens system preferably comprises two lens elements which are designed to continuously change the sphero-cylindrical effect, the two lenses being arranged in relation to one another in such a way that different spherical and / or cylindrical radii of curvature result when they are mutually displaced.
  • Figure 1 sketched representation of a
  • FIG. 2 sketched representation to explain the displacement of the quasi-Bessel laser beam along a separation curve
  • Figures 3a 3b, 3c sketched representations to explain the problems occurring in critical areas of the material when cutting by means of laser beams;
  • FIG. 4 a sketched representation to explain the beam path in a beam shaping device for a laser cutting device of the type described;
  • FIG. 5 a sketched representation to explain the quasi-Bessel laser beam as it emerges from the beam-shaping device
  • FIG. 7 Sketched representation to explain the advantages that can be achieved by the measures described.
  • FIG. 1 outlines a laser cutting device 10, by means of which areas of a workpiece 12 can be cut off, the workpiece 12 at least partially consisting of a material 14 that is transparent to a laser beam 16.
  • the laser cutting device 10 comprises an optical device 18 for generating the laser beam 16 as well as a workpiece holder 20 for holding and positioning the workpiece 12.
  • the optical device 18 comprises a laser source 22 for emitting an input laser beam 16 ′, which is converted into the laser beam 16 by means of a beam shaping device 24 arranged in the beam path, by means of which the workpiece 12 is machined.
  • the beam shaping device 24 is designed to reshape the input laser beam 16 ′ in such a way that the laser beam 16 emerges in the manner of a quasi-Bessel laser beam from a beam exit region 26 of the beam shaping device 24. After the beam exit area 26, the quasi-Bessel laser beam spreads along a
  • the workpiece 12 is received in the workpiece holder 20 in such a way that the quasi-Bessel laser beam is radiated into the material 14 through a surface 30 of the workpiece 12.
  • the quasi-Bessel laser beam initially converges after exiting the beam exit region 26 of the beam shaping device 24, wherein it spreads overall along the direction of propagation 28.
  • the direction of propagation of the laser beam 16 can be established as a Poynting vector spatially averaged over the beam cross-section.
  • the beam shaping device 24 is designed in such a way that the quasi-Bessel laser beam 16 has a focus zone 32 which is elongated in particular along the direction of propagation 28 and in which the beam 16 has Bessel-like properties, thus propagated in particular along the direction of propagation over a certain area almost without diffraction.
  • a local modification e.g. melting
  • the material 14 takes place in the area of the focus zone 32, which leads to a local separation of the material composite.
  • the focus zone 32 is displaced along a separation curve 34 through the material 14 of the workpiece 12.
  • the dividing curve 34 can run straight or curved.
  • FIG. 3 a sketches a case in which the separating curve 34 runs through an essentially undisturbed material section of the workpiece 12.
  • the beam exit region 26 of the beam shaping device 24 is displaced essentially parallel to the surface 30, which is symbolized by a path movement 38 sketched with an arrow.
  • a case is shown in which the The direction of propagation 28 is oriented essentially perpendicular to the surface 30, that is to say parallel to the normal 36.
  • the focus area 32 produces local modifications in the material 14. Since there are no disruptive material areas, a separation along the separation curve can take place without any problems.
  • the separation curve (symbolized by the path movement 38) approaches an edge 40 of the workpiece 12 or its surface 30.
  • the edge 40 locally abrupt changes in the optical properties of the material 14 occur, in particular abrupt changes Change in the refractive index.
  • local modifications can no longer be introduced over the entire area of the material 14 with the quasi-Bessel laser beam 16, since the focus zone 32 (FIG. 2) can no longer reach all areas of the material 14. Separation of the workpiece 12 in the area of the edge 40 is thus not possible.
  • an optically inaccessible or “shaded area 42” remains, see FIG. 3c.
  • FIG. 4 shows, in a schematic representation, an embodiment of the beam shaping device 24 into which the input laser beam 16 ′ emitted by the laser source 22 is radiated.
  • the laser source 22 emits, for example, a laser beam in the manner of a Gaussian beam, which does not have the properties of a Bessel-like beam.
  • the beam shaping device 24 comprises in particular an optical transformation element 44 for converting the
  • the optical transformation element 44 is designed as an axicon element 46. In principle, however, other configurations are also possible. In general, Gaussian-like rays can be converted into Bessel-like rays, for example by conical lens means. Likewise, the optical transformation element can be designed as a diffractive optical element (DOE) or comprise one. In the example shown, the optical transformation element 44 is preceded by a first telescope arrangement 48 in the beam path. This can serve, for example, to widen the input laser beam 16 'before it is converted into a Bessel-like beam.
  • DOE diffractive optical element
  • the beam shaping device 24 also comprises a second telescope arrangement 50 which is arranged in the beam path following the optical transformation element 44.
  • the second telescope arrangement 50 can be designed, for example, to reduce the spatial extent of the focus zone 32 of the Bessel-like laser beam 16 generated or to shape it with a view to optimal material processing.
  • the second telescope assembly 50 comprises, for example, a first lens means 52 (e.g., converging lens) and an im
  • Closing lens means 54 following the beam path e.g.
  • Converging lens If necessary, further lens means can be provided between the lens means 52 and 54, depending on the design of the telescope optics.
  • the beam shaping device 24, in particular the second telescope arrangement 50, defines an optical axis 56 in the example shown.
  • the beam shaping device 24 is preferably designed in such a way that the focus zone 32 of the quasi-Bessel laser beam 16 can be inclined in relation to the optical axis 56.
  • the closing lens means 54 of the second telescope arrangement can be displaced transversely with respect to the optical axis 56, as a result of which an axial offset of the focus zone 32 can be achieved.
  • An inclination of the Bessel-like focus zone 32 can also be achieved in that at least one wedge plate 58 is provided, which is preferably arranged in the beam path after the optical transformation element 44.
  • the wedge plate 58 is formed in particular from a lens material and can incline the beam path for the formation of the quasi-Bessel laser beam 16 with respect to the optical axis 56.
  • the wedge plate 58 is preferably supported so as to be inclined with respect to the optical axis.
  • the wedge plate 58 can also be held rotatably about the optical axis 56, so that an inclination of the Bessel-like focus zone 32 can be set both in terms of the angle of inclination and in the direction of inclination.
  • FIG. 5 sketches the geometric relationships of the radiation path, starting from the beam exit region 26 of the beam shaping device 24.
  • the quasi-Bessel laser beam 16 is sketched schematically by enveloping marginal rays. Starting from the beam exit region 26, the quasi-Bessel laser beam initially has an angle of convergence ⁇ and, viewed as a whole, spreads along the
  • the direction of propagation coincides with the optical axis, but this is not mandatory, as will be explained in more detail below. If in this configuration the quasi-Bessel If the laser beam 16 is radiated along the normal 36 onto the surface 30 of the workpiece 12, the problems explained in connection with FIGS. 3a, 3b, 3c can occur.
  • the quasi-Bessel laser beam 16 is preferably radiated through the surface 30 of the workpiece 12 in such a way that the (local) normal 36 in the area in which the quasi-Bessel laser beam 16 radiates through the surface 30 of the surface 30 and the direction of propagation 28 are inclined relative to one another in such a way that they enclose an acute angle in terms of amount.
  • the apex of the acute angle lies on the surface 30, in particular formed by the point of intersection of the direction of propagation 28 with the local normal 36 there.
  • the angle is in particular selected such that its absolute value is equal to or greater than the angle of convergence ⁇ .
  • said inclination can be realized, for example, that workpiece 12 and beam shaping device 24 are arranged and oriented in relation to one another in such a way that the optical axis 56 of the beam shaping device 24 and the normal 36 on the surface 30 to each other by the angle are inclined. The direction of propagation 28 can then run on the optical axis 56.
  • Bessel-like laser beam 16 or the focus zone 32 may pass through the means described in connection with FIG. 4 are inclined to the optical axis.
  • the described inclination of the direction of propagation 28 and normal 36 to one another is preferably not provided in the entire area of the separating curve 34 (see FIG. 2).
  • a simple embodiment also results from the fact that the slope described is provided over the entire separation curve. In other words, the correction section can also be extended over the entire separation curve.
  • FIG. 7 outlines the effect achieved by the inclination described.
  • the beam shaping device 24 is designed in such a way that the propagation direction 28 of the exiting quasi-Bessel laser beam 16 no longer runs on the optical axis 56 of the beam shaping device 24 (or the beam exit area 26), but that the propagation direction 28 is inclined to the optical axis 56 is.
  • the inclination is selected such that the angle of inclination is included between the direction of propagation 28 and the normal to the surface 30. Since the inclination is at least as great as the convergence angle ⁇ (see FIG. 6), beam contributions also pass through the surface 30 in the edge regions of the quasi-Bessel laser beam 16 in such a way that they can always fully contribute to the formation of the focus zone 32.
  • the angle of inclination can be selected such that no optically inaccessible areas occur in the material 14, in particular not in areas of the material 14 in which optical properties (eg refractive index) change abruptly.
  • optical properties eg refractive index
  • Irradiation of the quasi-Bessel laser beam 16 at the edge 40 of the workpiece 12 is shown.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Laser Beam Processing (AREA)

Abstract

L'invention concerne la découpe d'une pièce à usiner (12) au moyen d'une modification locale faisant appel à un faisceau laser (16), comprenant les étapes consistant : à générer un faisceau laser quasi-Bessel (16) qui se propage dans une direction de propagation (28) à sa sortie d'un dispositif de formation de faisceau (24) ; à injecter le faisceau laser quasi-Bessel (16) à travers une surface (30) de la pièce à usiner (12), de manière qu'une zone focale (32) active pour la découpe se situe au moins partiellement dans la matière (14) de la pièce à usiner (12) ; à déplacer la zone focale (32) le long d'une courbe de découpe (34) le long de la surface (30) de la pièce à usiner (12) ; le déplacement de cette zone focale (32) étant réalisé de manière que, dans au moins une partie de correction de la courbe de séparation (34), la normale (36) à la surface (30) et la direction de propagation (28) s'étendent de manière inclinée l'une par rapport à l'autre selon un angle aigu (ex), cet angle aigu (ex) étant, en termes de valeurs, supérieur ou égal à l'angle de convergence (ß) du faisceau laser quasi-Bessel (16) à sa sortie d'un dispositif de formation de faisceau (24). Cette invention se rapporte en outre à un dispositif de découpe par laser.
PCT/EP2020/072180 2019-08-29 2020-08-06 Procédé et dispositif pour découper une pièce à usiner au moyen d'un faisceau laser WO2021037520A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102019123239.2 2019-08-29
DE102019123239.2A DE102019123239B4 (de) 2019-08-29 2019-08-29 Verfahren und Vorrichtung zum Trennen eines Werkstücks mittels eines Laserstrahls

Publications (1)

Publication Number Publication Date
WO2021037520A1 true WO2021037520A1 (fr) 2021-03-04

Family

ID=71996006

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2020/072180 WO2021037520A1 (fr) 2019-08-29 2020-08-06 Procédé et dispositif pour découper une pièce à usiner au moyen d'un faisceau laser

Country Status (2)

Country Link
DE (1) DE102019123239B4 (fr)
WO (1) WO2021037520A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114985884A (zh) * 2022-06-01 2022-09-02 中船黄埔文冲船舶有限公司 屏蔽数控切割坡口的方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106994564A (zh) * 2017-04-27 2017-08-01 东莞市盛雄激光设备有限公司 一种激光切割装置及其切割方法
EP3241809A1 (fr) * 2012-11-20 2017-11-08 UAB Altechna R&D Procédé de pre coupe laser d'un materiau en couches ainsi que systéme laser de pre coupe d'un tel matériau
US9878400B1 (en) * 2013-12-20 2018-01-30 Gentex Corporation Device for controlling the direction of a laser beam
CN109590618A (zh) * 2017-09-28 2019-04-09 上海微电子装备（集团）股份有限公司 一种激光切割系统及方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10322375A1 (de) * 2003-05-13 2004-12-02 Carl Zeiss Smt Ag Polarisationsoptimiertes Axiconsystem und Beleuchtungssystem mit einem solchen Axiconsystem
US20060011617A1 (en) * 2004-07-13 2006-01-19 Ricardo Covarrubias Automated laser cutting of optical lenses
KR102088722B1 (ko) 2010-07-12 2020-03-17 로핀-시나르 테크놀로지스 엘엘씨 레이저 필라멘테이션에 의한 재료 가공 방법
EP2754524B1 (fr) * 2013-01-15 2015-11-25 Corning Laser Technologies GmbH Procédé et dispositif destinés au traitement basé sur laser de substrats plats, galette ou élément en verre, utilisant un faisceau laser en ligne
DE102014116957A1 (de) * 2014-11-19 2016-05-19 Trumpf Laser- Und Systemtechnik Gmbh Optisches System zur Strahlformung
US11883903B2 (en) * 2016-07-25 2024-01-30 Amplitude Method and appliance for cutting materials by multi-beam femtosecond laser
CN109843499A (zh) * 2016-10-13 2019-06-04 康宁股份有限公司 在玻璃基材中形成孔和狭缝

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3241809A1 (fr) * 2012-11-20 2017-11-08 UAB Altechna R&D Procédé de pre coupe laser d'un materiau en couches ainsi que systéme laser de pre coupe d'un tel matériau
US9878400B1 (en) * 2013-12-20 2018-01-30 Gentex Corporation Device for controlling the direction of a laser beam
CN106994564A (zh) * 2017-04-27 2017-08-01 东莞市盛雄激光设备有限公司 一种激光切割装置及其切割方法
CN109590618A (zh) * 2017-09-28 2019-04-09 上海微电子装备（集团）股份有限公司 一种激光切割系统及方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114985884A (zh) * 2022-06-01 2022-09-02 中船黄埔文冲船舶有限公司 屏蔽数控切割坡口的方法
CN114985884B (zh) * 2022-06-01 2023-09-19 中船黄埔文冲船舶有限公司 屏蔽数控切割坡口的方法

Also Published As

Publication number Publication date
DE102019123239A1 (de) 2021-03-04
DE102019123239B4 (de) 2023-05-04

Similar Documents

Publication Publication Date Title
DE102013102442B4 (de) Optische Vorrichtung zur Strahlformung
DE69522522T2 (de) Optische Einrichtung zur Werkstoffbearbeitung mittels Laser
EP2152463B1 (fr) Procédé d'usinage de matériau par rayon laser et dispositif pour réaliser le procédé
EP2429755B1 (fr) Dispositif et procédé permettant l'usinage périphérique au laser d'un cordon de matière
WO2004020141A1 (fr) Unite de formation de faisceau possedant deux lentilles axicon et dispositif pourvu de ladite unite permettant d'introduire de l'energie de rayonnement dans une piece constituee d'un metal peu absorbant
DE102018126381A1 (de) Verfahren und Vorrichtung zum Einfügen einer Trennlinie in ein transparentes sprödbrüchiges Material, sowie verfahrensgemäß herstellbares, mit einer Trennlinie versehenes Element
EP2556397A1 (fr) Procédé et système pour générer un faisceau laser présentant différentes caractéristiques de profil de faisceau au moyen d'une fibre à plusieurs gaines
DE102007018400B4 (de) Optisches System für einen Lasermaterialbearbeitungskopf
DE102017114033B4 (de) Vorrichtung und Verfahren zur Abstandsmessung für ein Laserbearbeitungssystem, und Laserbearbeitungssystem
WO2008019681A1 (fr) Procédé et dispositif de traitement de matériel laser
DE102017001658A1 (de) Vorrichtung zur materialbearbeitung mit einem laserstrahl entlang einer bearbeitungsrichtung und verfahren zur materialbearbeitung mit einem laserstrahl
EP2591875B1 (fr) Laser doté d'une lentille de transformation du rayonnement
DE102019219520A1 (de) Verfahren und Bilderzeugungs- und Bilddarstellungsvorrichtung zum Erzeugen eines Bildes in einem Auge eines Benutzers
WO2021037520A1 (fr) Procédé et dispositif pour découper une pièce à usiner au moyen d'un faisceau laser
DE102012208527A1 (de) Vorrichtung zum Laserschneiden eines Werkstückes
DE112018004574T5 (de) Laserbearbeitungsmaschine
DE19825092C2 (de) Lasersystem zur Erzeugung eines fokussierten Laserstrahls mit variablem Fokusdurchmesser
DE102017206461B4 (de) Vorrichtung und Verfahren zum laserbasierten Trennen eines transparenten, sprödbrechenden Werkstücks
DE3339369C2 (de) Neodym-YAG-Lasergerät insbesondere zur ophthalmologischen Behandlung
DE4014837A1 (de) Verfahren und vorrichtungen zum punktweisen optischen ueberstreichen einer vorlage
DE102007047469B3 (de) Verfahren zum spurförmigen Abtragen von dünnen Schichten mittels Laser
DE102019108681A1 (de) Vorrichtung und Verfahren zur Erzeugung eines Doppel- oder Vielfachspots in der Lasermaterialbearbeitung
DE102022110078A1 (de) Vorrichtung und Verfahren zur Modifikation des Strahlprofils eines Laserstrahls
DE102005017014B4 (de) Verfahren zur Formung eines Beleuchtungslaserstrahls und Beleuchtungseinrichtung mit einem Laser
DE202021106275U1 (de) Vorrichtung zum Erzeugen von Filamenten

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 20747332

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 20747332

Country of ref document: EP

Kind code of ref document: A1