WO2021020615A1

WO2021020615A1 - Heat treatment apparatus

Info

Publication number: WO2021020615A1
Application number: PCT/KR2019/009458
Authority: WO
Inventors: 전용준
Original assignee: (주)에이치아이티오토모티브
Priority date: 2019-07-30
Filing date: 2019-07-30
Publication date: 2021-02-04
Also published as: KR102446159B1; KR20210016051A

Abstract

Disclosed is a heat treatment apparatus improved such that a continuous uniform energy region can be formed on the surface of an object to be treated. The heat treatment apparatus comprises: at least two light source units; a reflective member disposed between the at least two light source units; and at least one lens disposed on the travel path of light emitted from the at least two light source units. The reflective member and the at least one lens are arranged such that the light forms one continuous energy region.

Description

Heat treatment device

The present invention relates to a heat treatment apparatus using a light source.

A high power diode laser (HPDL) is widely used as a light source for heat treatment of an object to be processed.

High-power diode lasers are KW (Kilo Watt) class lasers with reliability and stability required in industrial sites, and square or line laser-beams output from a laser source are especially heat cured and cladding ( It is suitable for fields such as cladding).

The laser used in the heat treatment field is output from a laser source and reaches the object to be processed through a process of being focused by a lens array.

As focused by the lens array, the energy density of the laser-beam increases, but the energy area is reduced.

In order to compensate for the reduced energy region, the energy region of the laser-beam output from the laser source must be enlarged or several laser sources must be used.

When the energy region of the laser-beam is increased, the amount of heat generated by the laser-beam is also increased, and an additional configuration is required to control the increase in the amount of heat generated.

When using multiple laser sources, control the path of the laser beams so that each of the laser beams output from each of the multiple laser sources can be combined to form a uniform and continuous energy region on the surface of the object to be processed. A precise design is required. In addition, since several laser sources must be arranged in a limited space, arrangement of laser sources in consideration of space utilization is required.

An object of the present invention is to provide an improved heat treatment apparatus capable of forming a uniform and continuous energy region on the surface of an object to be treated.

In addition, there is provided a heat treatment apparatus with improved space utilization so that two or more light sources may be disposed inside the heat treatment apparatus.

The subject of the present invention is not limited to the problems mentioned above, and other problems that are not mentioned will be clearly understood by those skilled in the art from the following description.

A heat treatment apparatus according to an embodiment of the present invention for solving the above problem includes at least two light source units; A reflective member disposed between the at least two light source units; And at least one lens disposed on a path of light emitted from the at least two light source units. And the reflective member and the at least one lens are aligned so that light that has passed through the reflective member and the at least one lens forms one continuous energy region.

The at least two light source units include a first light source unit that emits light in a first direction toward the reflective member, and a second light source unit that emits light toward the reflective member in a second direction different from the first direction. It may include.

The first light source unit includes a first housing, and a plurality of first laser diodes disposed inside the first housing to generate light, and the second light source unit includes a second housing, A plurality of second laser diodes disposed inside the second housing to generate light, wherein the first housing and the second housing are formed in a third direction perpendicular to the first direction and the second direction. It may be arranged to overlap in at least some sections along the direction.

The first light source unit includes a first cooler disposed inside the first housing to cool the plurality of first laser diodes, and the second light source unit includes an interior of the second housing. And a second cooler that is disposed in and cools the plurality of second laser diodes, wherein the first cooler is disposed to overlap with the second housing along the third direction, and the second cooler is It may be disposed to overlap with the first housing along the third direction.

The reflective member may be configured to change a path of light emitted from the first light source unit and the second light source unit into the first direction, the second direction, and a fourth direction perpendicular to the third direction.

In addition, a heat treatment apparatus according to an embodiment of the present invention includes a first light source unit that emits light in a first direction; A second light source unit emitting light in a second direction different from the first direction; And a light guide array configured to guide light emitted from the first light source unit and the second light source unit. Including, the light guide array, by switching a path of light passing through the light guide array, the light passing through the light guide array may be configured to form one continuous energy region.

The light guide array includes a first reflective member for switching a traveling path of light emitted from the first light source unit, and a second reflecting member for switching a traveling path of light emitted from the second light source unit, and the second The first reflective member and the second reflective member may be disposed to have different inclination angles.

The first reflective member may be disposed parallel to the second reflective member.

The first reflective member and the second reflective member may be disposed to contact each other.

The light guide array may include a plurality of lenses arranged to change the density of light passing through the first reflective member and the second reflective member.

In addition, a heat treatment apparatus according to an embodiment of the present invention includes: a first light source unit including a first non-emission area and a first light emission area; A second light source unit including a second non-emission area and a second light emission area; And a light guide array through which light emitted from at least one of the first light source unit and the second light source unit passes. Including, wherein the light guide array is configured to change a path of light passing through the light guide array, so that the light passing through the light guide array forms one continuous energy region, and the first non-emission The region is disposed to overlap the second emission region in at least a partial section, and the second non-emission region is arranged to overlap the first emission region in at least a partial section.

A plurality of laser diodes configured to emit light may be disposed in the first emission region, and a cooler for cooling the plurality of laser diodes may be disposed in the first non-emission region. .

The light guide array includes a reflective member for switching a traveling path of light emitted from the first light source unit and the second light source unit, and at least one lens configured to change a density of light passing through the reflective member. can do.

According to the present invention, since a uniform and continuous energy region is formed on the surface of an object to be treated, the heat treatment quality is improved.

In addition, since the space utilization of the heat treatment device is improved, it is possible to downsize the heat treatment device including two or more light sources.

In addition, the energy region formed on the surface of the object to be treated can be easily adjusted.

1 is a perspective view schematically showing the configuration of a heat treatment apparatus according to an embodiment of the present invention.

2 is a perspective view of light source units.

3 is a front view of FIG. 1.

Figure 4 is a side view of Figure 1;

5 is a plan view of FIG. 1.

6 is a diagram illustrating a path of light emitted from light source units in FIG. 3.

FIG. 7 is a diagram illustrating a path of light emitted from light source units in FIG. 4.

8 is a diagram showing an energy region formed by a heat treatment apparatus according to an embodiment of the present invention.

9 is a perspective view schematically showing the configuration of a heat treatment apparatus according to another embodiment of the present invention.

10 is a view showing an energy region enlarged and formed by a heat treatment apparatus according to another embodiment of the present invention.

Hereinafter, various embodiments will be described in more detail with reference to the accompanying drawings. The embodiments described in this specification may be variously modified. Certain embodiments may be depicted in the drawings and described in detail in the detailed description. However, specific embodiments disclosed in the accompanying drawings are only intended to facilitate understanding of various embodiments. Therefore, the technical idea is not limited by the specific embodiments disclosed in the accompanying drawings, and it should be understood to include all equivalents or substitutes included in the spirit and scope of the invention.

In the present specification, when it is described that a certain constituent element is formed “on” another constituent element, the case where another constituent element is present between the certain constituent element and the other constituent element is not excluded. That is, the certain component may be formed in direct contact with the other component, or another component may be interposed between the certain component and the other component.

Terms including ordinal numbers such as first and second may be used to describe various elements, but these elements are not limited by the above-described terms. The above-described terms are used only for the purpose of distinguishing one component from other components.

In the present specification, terms such as "comprises" or "have" are intended to designate the presence of features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, but one or more other features. It is to be understood that the presence or addition of elements or numbers, steps, actions, components, parts, or combinations thereof, does not preclude in advance. When a component is referred to as being "connected" or "connected" to another component, it is understood that it may be directly connected or connected to the other component, but other components may exist in the middle. Should be. On the other hand, when a component is referred to as being "directly connected" or "directly connected" to another component, it should be understood that there is no other component in the middle.

Meanwhile, a "module" or "unit" for a component used in the present specification performs at least one function or operation. And, the "module" or "unit" may perform a function or operation by hardware, software, or a combination of hardware and software. In addition, a plurality of "modules" or a plurality of "units" excluding "module" or "unit" to be performed in specific hardware or performed by at least one processor may be integrated into at least one module. Singular expressions include plural expressions unless the context clearly indicates otherwise.

In addition, in describing the present invention, when it is determined that a detailed description of a related known function or configuration may unnecessarily obscure the subject matter of the present invention, the detailed description thereof will be abbreviated or omitted.

1 is a perspective view schematically showing a configuration of a heat treatment apparatus according to an embodiment of the present invention, and FIG. 2 is a perspective view of light source units. 3 is a front view of FIG. 1, FIG. 4 is a side view of FIG. 1, and FIG. 5 is a plan view of FIG. 1.

1 to 5, the heat treatment apparatus 100 according to an embodiment of the present invention is configured to guide light emitted from a plurality of light source units 110 and a plurality of light source units 110. It includes a light guide array 120.

The plurality of light source units 110 includes a first light source unit 110A and a second light source unit 110B. The first light source unit 110A and the second light source unit 110B are disposed to emit light in different directions. The first light source unit 110A and the second light source unit 110B are disposed to overlap each other in at least some sections.

The first light source unit 110A is disposed inside the first housing 111, a plurality of first light sources 112 that are disposed inside the first housing 111 to generate light, and the first housing 111 It is configured to include a first cooler 113 configured to cool the plurality of first light sources 112.

The first housing 111 has a substantially rectangular parallelepiped shape, and light generated from the plurality of first light sources 112 passes through one side of the first housing 111 and can be emitted to the outside of the first housing 111. The opening 111a is formed so that it is.

The plurality of first light sources 112 are arranged in the width direction W1 and the height direction H1 of the first housing 111 along the opening 111a, and form a stack.

The plurality of first light sources 112 include a light emitting diode (LED), an organic light emitting diode (OLED), a quantum dot light emitting diode (QDLED), and a laser diode (LD). : Laser Diode), etc., but it is preferable to be composed of the most suitable laser diode (LD) to obtain high output for heat treatment.

The first cooler 113 is disposed on one or both sides of the plurality of first light sources 112 to cool the plurality of first light sources 112.

The first cooler 113 is provided in an air-cooled structure including a fan (not shown) and a heat exchange fin (not shown), or a radiator (not shown) and a pump (not shown) configured to circulate cooling water. City) may be provided in a water-cooled structure including.

As shown in FIG. 2, the first housing 111 includes a first accommodating portion 111b in which a plurality of first light sources 112 are disposed and a second accommodating portion 111c in which the first cooler 113 is disposed. ). The second accommodating portions 111c are disposed on both sides of the first accommodating portion 111b, respectively. The second accommodating portion 111c may be disposed only on one side of the first accommodating portion 111b or may be disposed above and below the first accommodating portion 111b according to the position of the first cooler 113.

Other components other than the first cooler 113 may be further disposed in the second accommodating part 111c. A buffer member (not shown) may be disposed in the second accommodating portion 111c to absorb shocks applied from the inside or outside. In addition, electrical equipment (not shown) such as a substrate for supplying power to the plurality of first light sources 112 may be disposed in the second accommodating portion 111c.

The light generated by the plurality of first light sources 112 disposed in the first accommodating part 111b is emitted in a shape corresponding to the opening 111a through the opening 111a, and the first light emitting region L1 is formed. To form. The first light-emitting region L1 has a shape corresponding to one surface of the first receiving portion 111b.

A first non-emissive area NL1 from which light is not emitted is positioned on both sides of the first emission area L1, and the first non-emissive area NL1 has a shape corresponding to one surface of the second receiving part 111c. Have.

The second light source unit 110B is disposed inside the second housing 116, a plurality of second light sources 117 disposed inside the second housing 116 to generate light, and the second housing 116 And a second cooler 118 configured to cool the plurality of second light sources 117.

The second housing 116 has a substantially rectangular parallelepiped shape, and light generated from the plurality of second light sources 117 passes through one side of the second housing 116 and can be emitted to the outside of the second housing 116. The opening 116a is formed so that it is.

The plurality of second light sources 117 are arranged in the width direction W2 and the height direction H2 of the second housing 116 along the opening 116a, and form a stack.

The plurality of second light sources 117 is a light emitting diode (LED: Light Emitting Diode), an organic light emitting diode (OLED: Organic Light Emitting Diode), a quantum dot light emitting diode (QDLED: Quantum-Dot Light Emitting Diode), a laser diode (LD : Laser Diode), etc., but it is preferable to be composed of the most suitable laser diode (LD) to obtain high output for heat treatment.

The second cooler 118 is disposed on one or both sides of the plurality of second light sources 117 to cool the plurality of second light sources 117.

The second cooler 118 is provided in an air-cooled structure including a fan (not shown) and a heat exchange fin (not shown), or a radiator (not shown) and a pump (not shown) configured to circulate cooling water. City) may be provided in a water-cooled structure including.

The second housing 116 includes a first accommodating portion 116b in which a plurality of second light sources 117 are disposed, and a second accommodating portion 116c in which the second cooler 118 is disposed. The second accommodating portions 116c are disposed on both sides of the first accommodating portion 116b, respectively. The second accommodating portion 116c may be disposed only on one side of the first accommodating portion 116b or may be disposed above and below the first accommodating portion 116b according to the position of the second cooler 118.

Other components other than the second cooler 118 may be further disposed in the second accommodating part 116c. A buffer member (not shown) for absorbing an impact applied from the inside or outside may be disposed in the second accommodating portion 116c. In addition, electrical equipment (not shown) such as a substrate for supplying power to the plurality of second light sources 117 may be disposed in the second accommodating portion 116c.

The light generated by the plurality of second light sources 117 disposed in the first accommodating portion 116b is emitted in a shape corresponding to the opening 116a through the opening 116a, and the second light emitting area L2 is formed. To form. The second light-emitting area L2 has a shape corresponding to one surface of the first accommodating part 116b.

A second non-emission area NL2 from which light is not emitted is positioned on both sides of the second emission area L2, and the second non-emission area NL2 has a shape corresponding to one surface of the second receiving part 116c. Have.

Inside the heat treatment apparatus 100, the first light source unit 110A is disposed to emit light in the first direction D1, and the second light source unit 110B is disposed to emit light in the second direction D2. do. The second direction D2 is a direction different from the first direction D1, and the drawing shows an example in which the second direction D2 is perpendicular to the first direction D1.

As shown in FIG. 5, the first light source unit 110A and the second light source unit 110B have at least some sections along a third direction D3 different from the first direction D1 and the second direction D2. They are arranged to overlap each other in (S1). 5 illustrates an example in which the third direction D3 is perpendicular to both the first direction D1 and the second direction D2, but the third direction D3 is the first direction D1 and the second direction ( D2) may be in an oblique direction instead of being perpendicular to each other, and even if the third direction (D3) is not perpendicular to the first direction (D1) and the second direction (D2), adjustment of the arrangement position of the reflective member 122 to be described later, etc. Through this, the traveling path of light can be controlled to a set point.

When each light emitted from the first light source unit 110A and the second light source unit 110B and reflected by the reflective member 122 to be described later is viewed toward the traveling direction, the first light source unit 110A and The second light source units 110B are disposed to overlap each other in at least a partial section S1.

The first non-emissive area NL1 is disposed to overlap the second light-emitting area L2, and the second non-emissive area NL2 is disposed to overlap the first light-emitting area L1. The first cooler 113 accommodated in the second accommodating portion 111c corresponding to the first non-emission area NL1 is a first accommodating portion 116b corresponding to the second emitting area L2 of the second housing 116. ) And the second cooler 118 accommodated in the second accommodating portion 116c corresponding to the second non-emission area NL2 corresponds to the first light emitting area L1 of the first housing 111 It is disposed so as to overlap with the first accommodating portion 111b.

Therefore, space is saved within the heat treatment apparatus 100 in the third direction D3 by the width of the first non-emitting area NL1 or the width of the second non-emissive area NL2, improving space utilization, and heat treatment. It is advantageous in miniaturizing the device 100.

The width of the first non-emitting area NL1 or the width of the second non-emissive area NL2 is substantially the same as the width of the section S1 where the first light source unit 110A and the second light source unit 110B overlap. can do.

The light guide array 120 includes a reflective member 122 configured to reflect light emitted from the first light source unit 110A and the second light source unit 110B, and a path of light reflected by the reflective member 122 And a lens assembly 124 disposed thereon and configured to change the intensity of light passing through the reflective member 122.

The reflective member 122 is disposed between the first light source unit 110A and the second light source unit 110B.

The reflective member 122 includes a first reflective member 122a that switches a path of light emitted from the first light source unit 110A and a second reflective member that switches a path of light emitted from the second light source unit 110B. It includes a member 122b.

The first reflective member 122a is directed toward the first light source unit 110A so that the light emitted from the first light source unit 110A is reflected by the first reflective member 122a and proceeds toward the lens assembly 124. It is formed obliquely.

The second reflective member 122b is directed toward the second light source unit 110B so that the light emitted from the second light source unit 110B is reflected by the second reflective member 122b and proceeds toward the lens assembly 124. It is formed obliquely. That is, the first reflective member 122a and the second reflective member 122b are disposed to have different inclination angles α and β, respectively.

The first reflective member 122a and the second reflective member 122b are arranged side by side in a line along the third direction D3, and the first reflective member 122a and the second reflective member 122b may contact each other. have.

The first reflective member 122a and the second reflective member 122b may be integrally formed.

At least one of the first reflective member 122a and the second reflective member 122b may be replaced with a refractive member. That is, the light emitted from the first light source unit 110A or the second light source unit 110B may be refracted while passing through the refracting member to proceed to the lens assembly 124 to be described later.

The lens assembly 124 includes a first lens assembly 124a and a second lens assembly 124b spaced apart from each other along a path through which light reflected by the first and second

reflective members

122a and 122b travels. ) Can be included.

Each of the first lens assembly 124a and the second lens assembly 124b includes at least one concave lens, a convex lens, a flat mirror, a concave mirror, a convex mirror, a refractive lens, a diffractive lens, a Fresnel lens, and a gradient index. It may be composed of a lens (Gradient Index Lens) or a combination thereof.

The first lens assembly 124a changes the width (Lw, see FIG. 7) of the light (Lr, see FIG. 6) reflected by the first and second

reflective members

122a and 122b to reduce the energy of light. The density is adjusted and the energy of the light Lr is controlled to have uniformity along the width direction FA of the light.

In the second lens assembly 124b, the light (Lu, see FIG. 6) that has passed through the first lens assembly 124a may travel in parallel along a direction SA perpendicular to the width direction FA of the light Lu. It performs a function of collimating the light (Lu).

6 is a diagram illustrating a path of light emitted from light source units in FIG. 3, and FIG. 7 is a diagram illustrating a path of light emitted from light source units in FIG. 4.

6 and 7, the light emitted from the first light source unit 110A and the second light source unit 110B is reflected by the first reflective member 122a and the second reflective member 122b, respectively. As a result, the progress path is switched and proceeds along the fourth direction D4 perpendicular to the third direction D3.

The light Lr reflected by the first reflective member 122a and the second reflective member 122b and traveled along the fourth direction D4 changes in width while passing through the first lens assembly 124a. It has a uniform energy along the width direction FA of (Lr).

Collimating so that the light (Lu) passing through the first lens assembly (124a) proceeds in parallel along the direction (SA) perpendicular to the width direction (FA) of the light (Lu) while passing through the second lens assembly 124b. Then, it is incident on the surface of the object to be treated. Light (Li) passing through the second lens assembly 124b and incident on the surface of the object to be processed forms a uniform and continuous energy region (E, see FIG. 8) on the surface of the object through the above-described process.

As described above, the first non-emissive area NL1 is disposed to overlap the second light-emitting area L2, and the second non-emissive area NL2 is disposed to overlap the first light-emitting area L1. Accordingly, the first emission area L1 and the second emission area L2 are continuously connected along the third direction D3. The light emitted by the successively connected first light-emitting area L1 and second light-emitting area L2 is reflected while passing through the light guide array 120, its density is changed, and after passing through a process of collimating, A uniform and continuous energy region E is formed on the surface of the object to be processed.

As shown in FIG. 8, light emitted from the first light-emitting area L1 of the first light source unit 110A is reflected by the first reflective member 122a (see FIGS. 1 to 5), and the lens assembly 124 1 to 5), forming a uniform and continuous first energy region E1 having a constant length, respectively, in a width direction FA of light and a direction SA perpendicular to the width direction FA of light. .

The light emitted from the second light emitting area L2 of the second light source unit 110B is reflected by the second reflective member 122b (see FIGS. 1 to 5), and the lens assembly 124 (see FIGS. 1 to 5) While passing through, a uniform and continuous second energy region E2 having a constant length is formed in the width direction FA and the direction SA perpendicular to the width direction FA of the light.

The first energy region E1 formed by the first emission region L1 and the second energy region E2 formed by the second emission region L2 are continuously connected to one enlarged energy region E. =E1+E2) is formed.

That is, the first light emitting area L1 of the first light source unit 110A and the second light source unit 110B are arranged so that the second light emitting area L2 is continuously connected along the third direction D3. The area of the energy region of light reaching the surface of the treated object can be easily enlarged.

The heat treatment apparatus may further include a prism (not shown) configured to change a traveling angle of light passing through the light guide array 120. The prism allows the propagation angle of light passing through the light guide array 120 to be changed within approximately 1 to 10 degrees, so that the light reflected by the object to be processed is transmitted to the plurality of light source units 110 or the light guide array 120 ) To reach and damage it.

9 is a perspective view schematically showing a configuration of a heat treatment apparatus according to another embodiment of the present invention, and FIG. 10 is a view showing an energy region enlarged by the heat treatment apparatus according to another embodiment of the present invention.

Components that overlap with the heat treatment apparatus 100 according to an exemplary embodiment described above are given the same reference numerals and detailed descriptions thereof will be omitted.

The heat treatment apparatus 200 according to another embodiment includes a plurality of light source units 210, and the plurality of light source units 210 includes a first light source unit 210A, a second light source unit 210B, and a third It includes a light source unit (210C).

The first light source unit 210A and the second light source unit 210B are disposed to emit light in different directions.

The third light source unit 210C is arranged to emit light in the same direction as the first light source unit 210A and to emit light in a different direction from the second light source unit 210B. That is, the first light source unit 210A, the second light source unit 210B, and the third light source unit 210C are sequentially disposed along the third direction D3.

The first light source unit 210A and the second light source unit 210B are disposed to overlap each other in at least a partial section S1, and the second light source unit 210B and the third light source unit 210C are at least partially They are arranged to overlap each other in the section S2.

The heat treatment apparatus 200 according to another exemplary embodiment includes a third reflective member 222 that switches a path of light emitted from the second light source unit 210C.

As shown in FIG. 10, by adding the third light source unit 210C, the area E of energy formed by light reaching the surface of the object to be processed is formed by the third light source unit 210C. The energy region E3 formed by the light emitting region L3 may be enlarged. Conversely, since the third light source unit 210C is removed, an area of energy formed by light incident on the surface of the object to be processed may be reduced. Therefore, it is possible to easily adjust the energy region of light reaching the surface of the object to be treated.

In the above, preferred embodiments of the present invention have been illustrated and described, but the present invention is not limited to the specific embodiments described above, and is generally used in the technical field to which the present invention belongs without departing from the gist of the present invention claimed in the claims. Various modifications are possible by those skilled in the art of course, and these modifications should not be understood individually from the technical idea or perspective of the present invention.

Claims

At least two light source units;

A reflective member disposed between the at least two light source units; And

At least one lens disposed on a path of light emitted from the at least two light source units; Including,

The reflective member and the at least one lens are arranged so that the light passing through the reflective member and the at least one lens forms one continuous energy region.
The method of claim 1,

The at least two light source units,

A first light source unit emitting light in a first direction toward the reflective member,

And a second light source unit that emits light in a second direction different from the first direction toward the reflective member.
The method of claim 2,

The first light source unit includes a first housing, and a plurality of first laser diodes disposed inside the first housing to generate light,

The second light source unit includes a second housing, and a plurality of second laser diodes disposed inside the second housing to generate light,

The first housing and the second housing are disposed to overlap in at least some sections along the first direction and a third direction different from the second direction.
The method of claim 3,

The first light source unit includes a first cooler disposed inside the first housing to cool the plurality of first laser diodes,

The second light source unit includes a second cooler disposed inside the second housing to cool the plurality of second laser diodes,

The first cooler is disposed to overlap the second housing along the third direction, and the second cooler is disposed to overlap the first housing along the third direction.
The method of claim 3,

The reflective member is configured to change the traveling path of light emitted from the first light source unit and the second light source unit into the first direction, the second direction, and a fourth direction perpendicular to the third direction.
A first light source unit emitting light in a first direction;

A second light source unit emitting light in a second direction different from the first direction; And

A light guide array guiding the light emitted from the first light source unit and the second light source unit; Including,

The light guide array is configured to change a traveling path of light passing through the light guide array so that the light passing through the light guide array forms one continuous energy region.
The method of claim 6,

The light guide array,

A first reflective member for switching a traveling path of light emitted from the first light source unit,

Including a second reflective member for switching a path of light emitted from the second light source unit,

The first reflective member and the second reflective member are arranged to have different inclination angles.
The method of claim 7,

The first reflective member is disposed in parallel with the second reflective member.
The method of claim 7,

The first reflective member and the second reflective member are disposed to contact each other.
The method of claim 7,

The light guide array includes a plurality of lenses arranged to change the density of light passing through the first reflective member and the second reflective member.
A first light source unit including a first non-emission area and a first light emission area;

A second light source unit including a second non-emission area and a second light emission area; And

A light guide array through which light emitted from at least one of the first light source unit and the second light source unit passes; Including,

The light guide array is configured to change a traveling path of light passing through the light guide array, so that the light passing through the light guide array forms one continuous energy region,

The first non-emissive region overlaps the second emission region in at least a partial section, and the second non-emission region overlaps the first emission region in at least a partial section.
The method of claim 11,

A plurality of laser diodes configured to emit light are disposed in the first emission region,

A heat treatment apparatus in which a cooler for cooling the plurality of laser diodes is disposed in the first non-emission area.
The method of claim 11,

The light guide array,

A reflective member for switching a traveling path of light emitted from the first light source unit and the second light source unit,

Heat treatment apparatus including at least one lens configured to change the density of light passing through the reflective member.
At least two light source units;

A refractive member disposed between the at least two light source units; And

At least one lens disposed on a path of light emitted from the at least two light source units; Including,

The refracting member and the at least one lens are arranged such that light passing through the refracting member and the at least one lens forms one continuous energy region.