WO2021015061A1 - Illumination device and illumination system - Google Patents

Illumination device and illumination system Download PDF

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Publication number
WO2021015061A1
WO2021015061A1 PCT/JP2020/027418 JP2020027418W WO2021015061A1 WO 2021015061 A1 WO2021015061 A1 WO 2021015061A1 JP 2020027418 W JP2020027418 W JP 2020027418W WO 2021015061 A1 WO2021015061 A1 WO 2021015061A1
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Prior art keywords
parallel light
light
lens
parallel
unit
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PCT/JP2020/027418
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French (fr)
Japanese (ja)
Inventor
拓 栗林
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株式会社アイテックシステム
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Publication of WO2021015061A1 publication Critical patent/WO2021015061A1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
    • F21S2/00—Systems of lighting devices, not provided for in main groups F21S4/00 - F21S10/00 or F21S19/00, e.g. of modular construction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V5/00—Refractors for light sources
    • F21V5/02—Refractors for light sources of prismatic shape
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor

Definitions

  • the present invention relates to a lighting device and a lighting system.
  • a plurality of LEDs arranged side by side in the X direction and a rod-shaped lens that collects light from each LED in the Y direction orthogonal to the X direction are provided to illuminate a line-shaped lighting position.
  • a diffuser plate that diffuses light in the X direction is used in order to reduce unevenness of light at the lighting position.
  • a plurality of point light sources arranged side by side in the X direction and convex lenses corresponding to the plurality of point light sources are provided to illuminate a line-shaped illumination position (see, for example, Patent Document 2). ).
  • the lighting device also uses a diffuser plate that diffuses light in the X direction in order to reduce unevenness of light at the lighting position.
  • Each of the lighting devices is used to illuminate the range detected by the line sensor in a line shape.
  • Each of the above lighting devices may be used for exposure of a photocurable resin.
  • the light source of the former lighting device is a plurality of LEDs arranged side by side in the X direction. Therefore, if the illuminating device and the illuminating position are separated by several tens of centimeters or more or 1 m or more, the unevenness of the light at the illuminating position can be eliminated, but the illuminance at the illuminating position is lowered.
  • a diffuser plate is required to reduce the unevenness of the light at the lighting position.
  • the latter illuminating device also has a convex lens seam, a diffuser plate is required as in the former illuminating device.
  • a lighting device that supplies light having a large amount of parallel light components to the lighting position has also been desired.
  • the present invention has been made in view of such circumstances, and it is possible to supply light with little or no unevenness to the illumination position even when a diffuser plate is not used, and it is possible to reduce the size.
  • the purpose is to provide a lighting device.
  • the lighting device includes a plurality of first parallel light units that are arranged at intervals in the X direction and emit parallel light in the Y direction that is substantially orthogonal to the X direction.
  • a plurality of reflecting members arranged at intervals in the X direction and reflecting the parallel light from the plurality of first parallel light units in a predetermined direction substantially orthogonal to the X direction, and in the X direction.
  • a plurality of second parallel light units that are arranged at intervals from each other and emit parallel light in each of the predetermined directions are provided, and in the X direction, the plurality of second parallel light units are the plurality of reflecting members.
  • Each of the reflecting members does not reflect at least one end of the parallel light from the corresponding first parallel light unit in the X direction.
  • the parallel light from each first parallel light unit is reflected by the reflecting member in a predetermined direction.
  • the plurality of second parallel light units are arranged at intervals in the X direction, and emit parallel light in each predetermined direction.
  • the plurality of second parallel light units are alternately arranged with the plurality of reflecting members. Due to such alternating arrangement, the light from each second parallel light unit passes between the reflecting members and reaches the illumination area.
  • the reflecting members are arranged in the X direction, and this configuration is advantageous for reducing the size of the lighting device.
  • the lighting system according to the second aspect of the present invention is the lighting device and a lens having a length in the longitudinal direction of the lighting area by the lighting device, and the light from the lighting area is directed toward a sensor for inspection.
  • a lens that collects light in the longitudinal direction is provided.
  • the present invention it is possible to supply light with little or no unevenness in the lighting position even when a diffuser plate is not used, and it is possible to provide a lighting device capable of miniaturization.
  • FIG. 2 is a sectional view taken along line III-III in FIG.
  • FIG. 2 is a sectional view taken along line IV-IV in FIG.
  • It is a front view which shows the schematic structure of the lighting apparatus of the 5th modification of this embodiment.
  • It is sectional drawing of the lighting apparatus of the 6th modification of this embodiment.
  • the lighting device 1 of this lighting system illuminates the inspection object in a line shape.
  • the line may have a width of several cm or less than 1 cm.
  • the width of the line is several cm due to the following structure.
  • the illuminating device 1 includes a housing 10 having a length in the X direction and a plurality of reflecting members 20 arranged in the housing 10 at intervals in the X direction.
  • a plurality of first parallel light units 30 arranged at intervals in the X direction and a plurality of second parallel light units 40 arranged at intervals in the X direction are provided.
  • each of the first parallel light units 30 includes a point light source 31 and a lens unit 32 which is a single linear Fresnel lens whose parallel light is light emitted radially from the point light source 31.
  • the point light source 31 is a laser diode, an LED, or the like.
  • the point light source 31 is one end of the optical fiber, and light may be input from the light source device to the other end of the optical fiber.
  • the lens unit 32 has a plurality of prism lenses arranged concentrically, and each prism lens is formed so that the light from the point light source 31 is parallel light.
  • the lens unit 32 may have a single lens or a plurality of lenses as long as the light from the point light source 31 is parallel light. Further, as the lens constituting the lens unit 32, a well-known lens such as a convex lens, a combination of a convex lens and a concave lens, and a linear Fresnel lens can be used.
  • Each first parallel light unit 30 emits parallel light PL1 in the Y direction which is substantially orthogonal to the X direction.
  • the width of the parallel light PL1 in the X direction is several cm, and in this embodiment, it is about 5 cm.
  • the width of the parallel light PL1 in the Z direction may be several cm or less. In the present embodiment, the width of the parallel light PL1 in the Z direction is about 5 cm.
  • the first parallel light unit 30 is covered with the housing 33. Further, the first parallel light unit 30 has a block 34 in which the substrate 31a of the point light source 31 is fixed to one end surface, and the block 34 is attached to the housing 33 so as to be movable in the Y direction. Further, a movement restricting member 35 for fixing the block 34 to the housing 33 so as not to move is also provided.
  • the movement restricting member 35 is a screw member, and the movement restricting member 35 is screwed into the housing 33 and comes into contact with the block 34.
  • the distance between the point light source 31 and the lens unit 32 in the Y direction can be adjusted.
  • the parallel light PL1 can be adjusted to light that slightly expands, light that converges slightly, light that is close to perfect parallel light, and the like. Light that spreads slightly and light that converges slightly are also parallel light in this embodiment.
  • each second parallel light unit 40 includes a point light source 41 and a lens unit 42 which is a single linear Fresnel lens whose parallel light is light emitted radially from the point light source 41. , Equipped with.
  • the point light source 41 is a laser diode, an LED, or the like.
  • the point light source 41 is one end of the optical fiber, and light may be input from the light source device to the other end of the optical fiber.
  • the lens unit 42 has a plurality of prism lenses arranged concentrically, and each prism lens is formed so that the light from the point light source 41 is parallel light.
  • the lens unit 42 may have a single lens or a plurality of lenses as long as the light from the point light source 41 is parallel light. Further, as the lens constituting the lens unit 42, a well-known lens such as a convex lens, a combination of a convex lens and a concave lens, and a linear Fresnel lens can be used.
  • Each second parallel light unit 40 emits parallel light PL2 in the X direction and the Z direction substantially orthogonal to the Y direction.
  • the Z direction may be a direction that intersects the X direction and the Y direction, and may form a predetermined angle such as 45 ° or 30 ° with the Y direction.
  • the width of the parallel light PL2 in the X direction is several cm, and in this embodiment, it is about 5 cm.
  • the width of the parallel light PL2 in the Y direction may be several cm or less. In the present embodiment, the width of the parallel light PL2 in the Y direction is about 5 cm.
  • the second parallel light unit 40 is covered with the housing 43.
  • the second parallel light unit 43 has a block 44 in which the substrate 41a of the point light source 41 is fixed to one end surface, and the block 44 is attached to the housing 43 so as to be movable in the Z direction.
  • a movement restricting member 45 for fixing the block 44 to the housing 43 so as not to move is also provided.
  • the movement restricting member 45 is a screw member, and the movement restricting member 45 is screwed into the housing 43 and comes into contact with the block 44.
  • the housing 33 and the housing 43 function as a part of the housing 10, and in the present embodiment, a plurality of point light sources 31, 41, a plurality of lens portions 32, 42, and a plurality of reflections are contained in the housing 10.
  • a member 20 is provided.
  • the housing 10 has an opening through which the parallel light PL1 from the first parallel light unit 30 and the parallel light PL1 reflected by the reflecting member 20 and the parallel light PL2 from the second parallel light unit 40 pass.
  • 10a is provided.
  • a cover 11 made of a translucent material such as plastic or glass is attached to the opening 10a.
  • the distance between the point light source 41 and the lens portion 42 in the Y direction can be adjusted.
  • the parallel light PL1 can be adjusted to light that slightly expands, light that converges slightly, light that is close to perfect parallel light, and the like. Light that spreads slightly and light that converges slightly are also parallel light in this embodiment.
  • each reflective member 20 is a rectangular flat plate member such as a metal plate or a glass plate.
  • a metal such as silver is vapor-deposited on the reflective surface 20a, which is one surface of each reflective member 20 in the thickness direction, to form a mirror surface.
  • the reflecting surface 20a is a surface of the reflecting member 20 on the side of the first parallel light unit 30.
  • Each reflecting member 20 is arranged at a position corresponding to the corresponding first parallel light unit 30. Further, as shown in FIG. 2, the optical axis L1 of the corresponding first parallel light unit 30 faces the center or the vicinity thereof in the X direction of each reflecting member 20.
  • Each reflecting member 20 reflects the light from the corresponding first parallel light unit 30 in the Z direction.
  • the width of the parallel light PL1 from the first parallel light unit 30 in the X direction is larger than the width of the corresponding reflecting member 20 in the X direction. Therefore, as shown in FIG. 2, there are portions of the parallel light PL1 at both ends in the X direction that are not reflected by the reflecting member 20.
  • a portion of the parallel light PL1 that is not reflected by the reflecting member 20 is formed at one end of the parallel light PL1 in the X direction. In some cases, the other end and the end of the reflective member 20 in the X direction are completely aligned.
  • the present embodiment in which the parallel light PL1 has portions that are not reflected by the reflecting member 20 at both ends in the X direction is preferable.
  • the optical axis L2 of each second parallel light unit 40 is arranged between the reflective members 20 adjacent to each other in the X direction.
  • the optical axis L2 of each second parallel light unit 40 passes through the center of the space between the reflective members 20 adjacent to each other in the X direction or the vicinity thereof in the X direction.
  • both ends of the parallel light PL2 emitted in the Z direction from each second parallel light unit 40 in the X direction are hindered from traveling in the Z direction by the corresponding two reflecting members 20.
  • a plurality of parallel light PL1 and a plurality of parallel light PL2 are alternately arranged in the X direction in the illumination area, and the end of the parallel light PL1 in the X direction and the parallel light PL2 in the X direction.
  • the ends match or almost match.
  • light having a width substantially matching the opening 10a is irradiated.
  • the illuminance becomes uniform or substantially uniform over substantially the entire illumination area.
  • the reflecting members 20 are arranged at intervals in the X direction, and this configuration is advantageous for reducing the size of the lighting device 1.
  • the parallel light PL1 from each first parallel light unit 30 is reflected by the reflecting member 20 in the Z direction.
  • the plurality of second parallel light units 40 are arranged at intervals in the X direction, and irradiate the parallel light PL2 in the Z direction, respectively.
  • the plurality of second parallel light units 40 are alternately arranged with the plurality of reflecting members 20. Due to such an alternating arrangement, the light from each second parallel light unit 40 passes between the reflecting members 20 and reaches the illumination area. With this configuration, it is possible to easily and reliably configure the lighting device 1 that makes the illuminance uniform or substantially uniform over substantially the entire lighting area.
  • the parallel light PL1 emitted from the first parallel light unit 30 to the illumination area and the parallel light PL2 emitted from the second parallel light unit 20 to the illumination area are connected in the X direction, and the overlap of the two parallel lights is None or few. Even if there is an overlap of both parallel lights, the overlap appears regularly. Therefore, when an image of the illumination area is obtained by the sensor, it is possible to adjust the range in which the two parallel lights overlap by image processing.
  • each reflecting member 20 does not reflect the light at the end in the X direction of the parallel light PL1 from the corresponding first parallel light unit 30.
  • This configuration is advantageous for easily and reliably configuring the lighting device 1 that makes the illuminance uniform or substantially uniform over substantially the entire illumination area.
  • each reflecting member 20 blocks and / or reflects the light at the end of the parallel light PL2 in the X direction from at least one second parallel light unit 40 so as not to direct in the Z direction.
  • the surface of each reflecting member 20 opposite to the reflecting surface 20a is subjected to antireflection treatment such as black alumite treatment, and mainly blocks the light at the end of the parallel light PL2 in the X direction.
  • each reflecting member 20 not arranged at the end of the array of the reflecting member 20 blocks and / or blocks the light at the end of the parallel light PL2 of the two adjacent second parallel light units 40 in the X direction. Or it reflects.
  • This configuration is advantageous for more reliably configuring the lighting device 1 that makes the illuminance uniform or substantially uniform over substantially the entire illumination area.
  • the plurality of second parallel light units 40 are alternately arranged with the plurality of first parallel light units 30 in the X direction. This configuration is advantageous for reducing the size of the lighting device 1.
  • the first parallel light unit 30 has a point light source 31 and a lens unit 32 that uses the light from the point light source 31 as parallel light.
  • the second parallel light unit 40 also has a point light source 41 and a lens unit 42 that converts the light from the point light source 41 into parallel light. This configuration is advantageous for reducing the size of the lighting device 1.
  • the lens units 32 and 42 are one linear Fresnel lens, the lighting device 1 can be further miniaturized.
  • a parallel light unit 50 may be provided instead of the second parallel light unit 40.
  • the parallel light unit 50 functions as a second parallel light unit, and the plurality of parallel light units 50 are arranged at the same positions as the second parallel light unit 40 in the X direction.
  • each parallel light unit 50 has a point light source 51 similar to the point light sources 31 and 41, a lens unit 52 similar to the lens units 32 and 42, and a housing 33.
  • 43 has a housing 53 equivalent to, 43, a block 54 similar to blocks 34, 44, and a movement restricting member 55 similar to movement restricting members 35, 45.
  • each parallel light unit 50 has a second reflecting member 21.
  • Each second reflective member 21 is arranged between adjacent reflective members 20 and has an X-direction dimension equal to the X-direction spacing of the adjacent reflective members 20.
  • Each second reflecting member 21 reflects the parallel light PL2 in the Z direction by the reflecting surface 21a on the point light source 51 side. Of the parallel light PL2, the light at the end in the X direction is not reflected by the reflecting surface 21a, or is blocked and / or reflected by the reflecting member 20. Even when such a parallel light unit 50 is used, it is possible to easily and surely configure the lighting device 1 that makes the illuminance uniform or substantially uniform over substantially the entire illumination area.
  • the parallel light unit 50 may be provided.
  • the parallel light unit 50 functions as a third parallel light unit, and the second parallel light unit 40 and the parallel light unit 50 are arranged between the adjacent first parallel light units 30 in the X direction. That is, even in this case, the plurality of second parallel light units 40 and the plurality of parallel light units 50 are alternately arranged with the plurality of reflecting members 20 in the X direction.
  • the second parallel light unit 40 irradiates the parallel light PL2 having an X-direction dimension of approximately 1/2 of the X-direction spacing of the adjacent first parallel light units 20.
  • the second reflecting member 21 of the parallel light unit 50 has an X-direction dimension of approximately 1/2 of the distance between the adjacent first parallel light units 20 in the X-direction.
  • the lighting device 1 that makes the illuminance uniform or substantially uniform over substantially the entire illumination area can be easily and reliably configured.
  • the illuminating device 1 includes a condensing lens unit 61 that converges the light from the illuminating device 1 in the Y direction, and a reparalleling lens unit that spreads the light from the condensing lens unit 61 in the Y direction. It may have 62 and.
  • the reparalleling lens unit 62 can make the light from the condenser lens unit 61 parallel to the irradiation position. As a result, the illuminance of the lighting area can be increased. In some cases, the reparalleling lens portion 62 is not provided. In this case, the light from the illumination device 1 is converged toward the illumination area by the condenser lens unit 61.
  • the condenser lens unit 61 may have a single lens or a plurality of lenses.
  • the reparalleling lens unit 62 may also have a single lens or a plurality of lenses.
  • a well-known lens such as a convex lens, a combination of a convex lens and a concave lens, and a linear Fresnel lens can be used.
  • FIGS. 3 and 7 it is also possible to provide a diffusing lens that diffuses light mainly in the X direction between the lighting device 1 and the lighting area.
  • the diffusing lens various diffusing lenses described in Japanese Patent No. 4457100 can be used, and other known diffusing lenses that diffuse light mainly in the X direction can also be used. In this case, it is possible to increase the light other than the parallel light component in the light in the illumination area. Alternatively, the uniformity of light in the illumination area can be improved.
  • a refracting lens member (FIG. 8) 70 for bending light in the X direction may be provided between the illumination device 1 and the irradiation position.
  • a refracting lens member 70 is provided instead of the cover 11.
  • a refraction lens member 70 is provided between the reparallelized lens portion 62 and the irradiation position.
  • the refraction lens member 70 is provided between the condenser lens portion 61 and the irradiation position.
  • the condenser lens unit 61, the reparalleling lens unit 62, and the refraction lens member 70 may be attached to the housing 10.
  • the illumination device 1 includes a condenser lens unit 61, a reparalleling lens unit 62, and a refraction lens member 70.
  • the refracting lens member 70 has a plurality of prism lenses arranged in the X direction, and each prism lens extends in the Y direction.
  • the refracting lens member 70 it is possible to use a known refracting lens capable of bending parallel light in the Z direction in the X direction. Since the light from the illuminating device 1 contains a large amount of parallel light components, the direction of the light passing through the refracting lens member 70 is constant. This configuration is extremely useful in applications where the object is exposed to light from a specific direction over a wide area.
  • point light sources 31, 41, and 51 may emit visible light, ultraviolet light, or infrared light.
  • the improvement of exposure efficiency and the improvement of exposure uniformity should be realized at a higher level. Is possible.
  • the light from the lighting device 1 reaches the sensor for inspection after being reflected by the inspection target or transmitted through the inspection target. Also in this case, since the light from the lighting device 1 has a large amount of parallel light components, the amount of light detected by the sensor is large. This is advantageous for speeding up the inspection and improving the accuracy of the inspection.
  • the lighting system may be provided with a lens 81 for converging the light from the inspection object in the X direction toward the sensor 82.
  • the illumination area is the surface of the inspection object, the surface on which the inspection object exists, and the like, and the lens 81 has a length in the longitudinal direction of the illumination area. Even when the light from the illuminating device 1 passes through the inspection object, the lens 81 can be provided between the illuminating area and the sensor 82. Since the illuminating device 1 has a large amount of parallel light components, the lens 81 makes it possible to effectively converge the light on the sensor 82 having a smaller dimension in the X direction than the illuminating device 1.
  • the reflecting surfaces 20a and 21a may be convex surfaces that slightly expand the parallel light PL1 and PL2 in the Y direction, or may be concave surfaces that converge the parallel light PL1 and PL2 in the Y direction. Good. Even in this case, the light reflected by the reflecting surfaces 20a and 21a is parallel light when viewed from the Y direction. Such light is also parallel light when viewed in the X direction. Therefore, as in each of the above-described embodiments, it is possible to make the illuminance uniform or substantially uniform over substantially the entire illumination area.
  • the lens portions 32, 52 of the first parallel light unit 30 and the parallel light unit 50 may slightly expand or converge the light in the Z direction or the Y direction.
  • the plurality of reflective members 20 may be a part of one plate P. Further, as shown in FIG. 10, each reflecting member 20 may have a triangular prism shape. Even in this case, the same effect as described above is obtained, but in order to facilitate the adjustment of the overlap of the parallel light PL1 and the parallel light PL2 in the illumination area, it is preferable that each reflecting member 20 has a plate shape.
  • the housing 10 may be enlarged in the Y direction and the Z direction, and the point light source 31 and the point light source 41 may be arranged in the housing 10. It is also possible to omit the mechanism for adjusting the position of the point light source 31 with respect to the lens unit 32 and the mechanism for adjusting the position of the point light source 41 with respect to the lens unit 42. Further, when a portion having a large amount of light is locally formed at a position such as the optical axis L1 of the first parallel light unit 30, and a portion having a large amount of light is locally formed at a position such as the optical axis L2 of the second parallel light unit 40. There is. In this case, since the illumination area has a wide width, if the observation is performed with a sensor or the like while avoiding a portion having a large amount of light, the unevenness of the amount of light in the range viewed by the sensor disappears.
  • the first parallel light unit 30 may reflect the light from the point light source 31 so as to become the parallel light PL1 by the reflector 37.
  • the second parallel light unit 40 may also reflect the light from the point light source 41 so as to become the parallel light PL2 by the reflector 37.
  • Lighting device 10 ... Housing, 10a ... Opening, 20 ... Reflective member, 20a ... Reflective surface, 21 ... Second reflective member, 21a ... Reflective surface, 30 ... First parallel light unit, 31 ... Point light source, 32 ... lens unit, 33 ... housing, 34 ... block, 35 ... movement control member, 40 ... first parallel light unit, 41 ... point light source, 42 ... lens unit, 43 ... housing, 44 ... block, 45 ... movement Regulatory member, 61 ... Condensing lens section, 62 ... Reparalleling lens section, 70 ... Refractive lens member, 81 ... Lens, 82 ... Sensor

Abstract

[Problem] To provide an illumination device that, even when a diffusion plate is not used, can supply beams having little or no unevenness in an illumination position and can also achieve reduction in size. [Solution] This illumination device (1) is provided with: a plurality of first parallel beam units (30) that are arranged in an X direction with a gap therebetween and that each emit parallel beams in a Y direction substantially orthogonal to the X direction; a plurality of reflection members (20) that are arranged in the X direction with a gap therebetween and that each reflect parallel beams from the plurality of first parallel beam units (30) in a predetermined direction substantially orthogonal to the X direction; and a plurality of second parallel beam units (40) that are arranged in the X direction with a gap therebetween and that each emit parallel beams in the predetermined direction, wherein the plurality of second parallel beam units (40) and the plurality of reflection members (20) are alternately arranged in the X direction, and, of the parallel beams from the first parallel beam units (30), at least a beam located at one end in the X direction is not reflected by a corresponding one of the reflection members.

Description

照明装置および照明システムLighting equipment and lighting system
　本発明は、照明装置および照明システムに関する。 The present invention relates to a lighting device and a lighting system.
　この種の照明装置として、Ｘ方向に並設された複数のＬＥＤと、各ＬＥＤからの光をＸ方向と直交するＹ方向に集光する棒状レンズとを備え、ライン状の照明位置を照明するものが知られている（例えば、特許文献１参照。）。当該照明装置では、照明位置の光のムラを低減するために、Ｘ方向に光を拡散する拡散板を用いている。 As this type of lighting device, a plurality of LEDs arranged side by side in the X direction and a rod-shaped lens that collects light from each LED in the Y direction orthogonal to the X direction are provided to illuminate a line-shaped lighting position. Is known (see, for example, Patent Document 1). In the lighting device, a diffuser plate that diffuses light in the X direction is used in order to reduce unevenness of light at the lighting position.
　また、Ｘ方向に並設された複数の点光源と、複数の点光源にそれぞれ対応する凸レンズとを備え、ライン状の照明位置を照明するものが知られている（例えば、特許文献２参照。）。当該照明装置でも、照明位置の光のムラを低減するために、Ｘ方向に光を拡散する拡散板を用いている。 Further, it is known that a plurality of point light sources arranged side by side in the X direction and convex lenses corresponding to the plurality of point light sources are provided to illuminate a line-shaped illumination position (see, for example, Patent Document 2). ). The lighting device also uses a diffuser plate that diffuses light in the X direction in order to reduce unevenness of light at the lighting position.
特許第４４５７１００号公報Japanese Patent No. 4457100 特開２００５－０７９４９５号公報Japanese Unexamined Patent Publication No. 2005-07495
　前記各照明装置は、ラインセンサによって検出される範囲をライン状に照明するために用いられる。前記各照明装置は、光硬化性樹脂の露光のために用いられる場合もある。
　前者の照明装置の光源は、Ｘ方向に並設された複数のＬＥＤである。このため、照明装置と照明位置とを数十ｃｍ以上又は１ｍ以上離せば、照明位置の光のムラを無くすことはできるが、照明位置の照度が低下する。照明位置の照度を上げるために照明装置と照明位置との距離を十数ｃｍ以下にする場合は、照明位置の光のムラを低減するために拡散板が必要になる。 Each of the lighting devices is used to illuminate the range detected by the line sensor in a line shape. Each of the above lighting devices may be used for exposure of a photocurable resin.
The light source of the former lighting device is a plurality of LEDs arranged side by side in the X direction. Therefore, if the illuminating device and the illuminating position are separated by several tens of centimeters or more or 1 m or more, the unevenness of the light at the illuminating position can be eliminated, but the illuminance at the illuminating position is lowered. When the distance between the lighting device and the lighting position is set to 10 cm or less in order to increase the illuminance at the lighting position, a diffuser plate is required to reduce the unevenness of the light at the lighting position.
　後者の照明装置も、凸レンズの継ぎ目があるため、前者の照明装置と同様に拡散板が必要である。
　また、照明位置に平行光成分が多い光を供給する照明装置も望まれていた。 Since the latter illuminating device also has a convex lens seam, a diffuser plate is required as in the former illuminating device.
In addition, a lighting device that supplies light having a large amount of parallel light components to the lighting position has also been desired.
　本発明は、このような事情に鑑みてなされたものであって、拡散板を用いない場合でもムラが少ない又は無い光を照明位置に供給することが可能であり、小型化も図ることが可能な照明装置を提供することを目的とする。 The present invention has been made in view of such circumstances, and it is possible to supply light with little or no unevenness to the illumination position even when a diffuser plate is not used, and it is possible to reduce the size. The purpose is to provide a lighting device.
　本発明の第１の態様に係る照明装置は、Ｘ方向に互いに間隔をおいて配置され、前記Ｘ方向と略直交するＹ方向にそれぞれ平行光を射出する複数の第１平行光ユニットと、前記Ｘ方向に互いに間隔をおいて配置され、前記複数の第１平行光ユニットからの前記平行光をそれぞれ前記Ｘ方向と略直交する所定方向に向かって反射する複数の反射部材と、前記Ｘ方向に互いに間隔をおいて配置され、前記所定方向にそれぞれ平行光を射出する複数の第２平行光ユニットと、を備え、前記Ｘ方向において、前記複数の第２平行光ユニットは、前記複数の反射部材と交互に配置され、前記各反射部材は、対応する前記第１平行光ユニットからの前記平行光のうち前記Ｘ方向の少なくとも一端の光を反射しないものである。 The lighting device according to the first aspect of the present invention includes a plurality of first parallel light units that are arranged at intervals in the X direction and emit parallel light in the Y direction that is substantially orthogonal to the X direction. A plurality of reflecting members arranged at intervals in the X direction and reflecting the parallel light from the plurality of first parallel light units in a predetermined direction substantially orthogonal to the X direction, and in the X direction. A plurality of second parallel light units that are arranged at intervals from each other and emit parallel light in each of the predetermined directions are provided, and in the X direction, the plurality of second parallel light units are the plurality of reflecting members. Each of the reflecting members does not reflect at least one end of the parallel light from the corresponding first parallel light unit in the X direction.
　上記第１の態様では、各第１平行光ユニットからの平行光がそれぞれ反射部材によって所定方向に向かって反射される。また、複数の第２平行光ユニットは、Ｘ方向に互いに間隔をおいて配置され、所定方向にそれぞれ平行光を射出する。また、Ｘ方向において、複数の第２平行光ユニットは複数の反射部材と交互に配置されている。このような交互配置のため、各第２平行光ユニットからの光が反射部材の間を通過して照明エリアに到達する。当該構成によって、照明エリアの略全体に亘って照度を均一又は略均一にする照明システムを容易且つ確実に構成することが可能となる。また、反射部材がＸ方向に並んでおり、当該構成は照明装置の小型化を図るために有利である。 In the first aspect, the parallel light from each first parallel light unit is reflected by the reflecting member in a predetermined direction. Further, the plurality of second parallel light units are arranged at intervals in the X direction, and emit parallel light in each predetermined direction. Further, in the X direction, the plurality of second parallel light units are alternately arranged with the plurality of reflecting members. Due to such alternating arrangement, the light from each second parallel light unit passes between the reflecting members and reaches the illumination area. With this configuration, it is possible to easily and reliably configure a lighting system that makes the illuminance uniform or substantially uniform over substantially the entire illumination area. Further, the reflecting members are arranged in the X direction, and this configuration is advantageous for reducing the size of the lighting device.
　本発明の第２の態様に係る照明システムは、前記照明装置と、前記照明装置による照明エリアの長手方向に長手を有するレンズであり、前記照明エリアからの光を検査用のセンサに向かって前記長手方向に集光するレンズと、を備える。 The lighting system according to the second aspect of the present invention is the lighting device and a lens having a length in the longitudinal direction of the lighting area by the lighting device, and the light from the lighting area is directed toward a sensor for inspection. A lens that collects light in the longitudinal direction is provided.
　本発明によれば、拡散板を用いない場合でも照明位置にムラが少ない又は無い光を供給することが可能であり、小型化も図ることが可能な照明装置の提供が可能となる。 According to the present invention, it is possible to supply light with little or no unevenness in the lighting position even when a diffuser plate is not used, and it is possible to provide a lighting device capable of miniaturization.
本発明の一実施形態に係る照明装置の概略構成を示す斜視図である。It is a perspective view which shows the schematic structure of the lighting apparatus which concerns on one Embodiment of this invention. 本実施形態の照明装置の概略構成を示す正面図である。It is a front view which shows the schematic structure of the lighting apparatus of this embodiment. 図２におけるIII－III線断面図である。FIG. 2 is a sectional view taken along line III-III in FIG. 図２におけるIV－IV線断面図である。FIG. 2 is a sectional view taken along line IV-IV in FIG. 本実施形態の第１変形例の照明装置の断面図である。It is sectional drawing of the lighting apparatus of the 1st modification of this embodiment. 本実施形態の第２変形例の照明装置の断面図である。It is sectional drawing of the lighting apparatus of the 2nd modification of this embodiment. 本実施形態の第３変形例の照明装置の断面図である。It is sectional drawing of the lighting apparatus of the 3rd modification of this embodiment. 本実施形態の第４変形例の屈折レンズ部の正面図である。It is a front view of the refracting lens part of the 4th modification of this embodiment. 本実施形態の第５変形例の照明装置の概略構成を示す正面図である。It is a front view which shows the schematic structure of the lighting apparatus of the 5th modification of this embodiment. 本実施形態の第６変形例の照明装置の断面図である。It is sectional drawing of the lighting apparatus of the 6th modification of this embodiment. 本実施形態の第７変形例の照明装置の断面図である。It is sectional drawing of the lighting apparatus of the 7th modification of this embodiment.
　本発明の一実施形態に係る照明システムについて図面を参照して以下に説明する。
　この照明システムの照明装置１は、検査対象物をライン状に照明するものである。当該ラインは、幅が数ｃｍであってもよく、１ｃｍ以下であってもよい。本実施形態では前記ラインの幅は以下の構造によって数ｃｍとなる。
　この照明装置１は、図１～図４に示されるように、Ｘ方向に長手を有する筐体１０と、筐体１０内にＸ方向に互いに間隔をおいて配置された複数の反射部材２０と、Ｘ方向に互いに間隔をおいて配置された複数の第１平行光ユニット３０と、Ｘ方向に互いに間隔をおいて配置された複数の第２平行光ユニット４０と、を備えている。 The lighting system according to the embodiment of the present invention will be described below with reference to the drawings.
The lighting device 1 of this lighting system illuminates the inspection object in a line shape. The line may have a width of several cm or less than 1 cm. In the present embodiment, the width of the line is several cm due to the following structure.
As shown in FIGS. 1 to 4, the illuminating device 1 includes a housing 10 having a length in the X direction and a plurality of reflecting members 20 arranged in the housing 10 at intervals in the X direction. A plurality of first parallel light units 30 arranged at intervals in the X direction and a plurality of second parallel light units 40 arranged at intervals in the X direction are provided.
　図３等に示されるように、各第１平行光ユニット３０は、点光源３１と、点光源３１から放射状に射出される光を平行光とする１枚のリニアフレネルレンズであるレンズ部３２と、を備える。点光源３１は、レーザーダイオード、ＬＥＤ等である。点光源３１が光ファイバーの一端であり、光ファイバーの他端に光源装置から光を入れてもよい。本実施形態では、レンズ部３２は、同心円状に並んだ複数のプリズムレンズを有し、各プリズムレンズは点光源３１からの光を平行光とするように形成されている。 As shown in FIG. 3 and the like, each of the first parallel light units 30 includes a point light source 31 and a lens unit 32 which is a single linear Fresnel lens whose parallel light is light emitted radially from the point light source 31. , Equipped with. The point light source 31 is a laser diode, an LED, or the like. The point light source 31 is one end of the optical fiber, and light may be input from the light source device to the other end of the optical fiber. In the present embodiment, the lens unit 32 has a plurality of prism lenses arranged concentrically, and each prism lens is formed so that the light from the point light source 31 is parallel light.
　点光源３１からレンズ部３２の全体に亘って均一な光が照射されることが好ましいが、光軸の付近の光が最も強く、光軸から離れるに従って徐々に光量が低下する点光源３１であってもよい。 It is preferable that uniform light is emitted from the point light source 31 over the entire lens unit 32, but the light near the optical axis is the strongest, and the amount of light gradually decreases as the distance from the optical axis increases. You may.
　なお、レンズ部３２は、点光源３１からの光を平行光とするものであればよく、単一又は複数のレンズを有していればよい。また、レンズ部３２を構成するレンズとして、凸レンズ、凸レンズと凹レンズの組合せ、リニアフレネルレンズ等の周知のレンズを用いることが可能である。
　各第１平行光ユニット３０は、Ｘ方向と略直交するＹ方向に平行光ＰＬ１を射出する。平行光ＰＬ１のＸ方向の幅は数ｃｍであり、本実施形態では５ｃｍ程度である。平行光ＰＬ１のＺ方向の幅は数ｃｍであってもよく、１ｃｍ以下であってもよい。本実施形態では平行光ＰＬ１のＺ方向の幅は５ｃｍ程度である。 The lens unit 32 may have a single lens or a plurality of lenses as long as the light from the point light source 31 is parallel light. Further, as the lens constituting the lens unit 32, a well-known lens such as a convex lens, a combination of a convex lens and a concave lens, and a linear Fresnel lens can be used.
Each first parallel light unit 30 emits parallel light PL1 in the Y direction which is substantially orthogonal to the X direction. The width of the parallel light PL1 in the X direction is several cm, and in this embodiment, it is about 5 cm. The width of the parallel light PL1 in the Z direction may be several cm or less. In the present embodiment, the width of the parallel light PL1 in the Z direction is about 5 cm.
　本実施形態では、図３に示されるように、第１平行光ユニット３０は筐体３３によって覆われている。また、第１平行光ユニット３０は、点光源３１の基板３１ａが一端面に固定されたブロック３４を有し、ブロック３４は筐体３３にＹ方向に移動可能に取付けられている。また、筐体３３に対してブロック３４を移動しないように固定する移動規制部材３５も設けられている。本実施形態では、移動規制部材３５はネジ部材であり、移動規制部材３５は筐体３３に螺合しており、ブロック３４に当接する。 In the present embodiment, as shown in FIG. 3, the first parallel light unit 30 is covered with the housing 33. Further, the first parallel light unit 30 has a block 34 in which the substrate 31a of the point light source 31 is fixed to one end surface, and the block 34 is attached to the housing 33 so as to be movable in the Y direction. Further, a movement restricting member 35 for fixing the block 34 to the housing 33 so as not to move is also provided. In the present embodiment, the movement restricting member 35 is a screw member, and the movement restricting member 35 is screwed into the housing 33 and comes into contact with the block 34.
　移動規制部材３５を緩めると共に、ブロック３４をＹ方向に移動することによって、点光源３１とレンズ部３２とのＹ方向の距離を調節することができる。当該調節によって、平行光ＰＬ１を若干拡がる光、若干収束する光、又は完全な平行光に近い光等に調節することができる。若干広がる光および若干収束する光も本実施形態では平行光である。 By loosening the movement restricting member 35 and moving the block 34 in the Y direction, the distance between the point light source 31 and the lens unit 32 in the Y direction can be adjusted. By this adjustment, the parallel light PL1 can be adjusted to light that slightly expands, light that converges slightly, light that is close to perfect parallel light, and the like. Light that spreads slightly and light that converges slightly are also parallel light in this embodiment.
　図４等に示されるように、各第２平行光ユニット４０は、点光源４１と、点光源４１から放射状に射出される光を平行光とする１枚のリニアフレネルレンズであるレンズ部４２と、を備える。点光源４１は、レーザーダイオード、ＬＥＤ等である。点光源４１が光ファイバーの一端であり、光ファイバーの他端に光源装置から光を入れてもよい。本実施形態では、レンズ部４２は、同心円状に並んだ複数のプリズムレンズを有し、各プリズムレンズは点光源４１からの光を平行光とするように形成されている。 As shown in FIG. 4 and the like, each second parallel light unit 40 includes a point light source 41 and a lens unit 42 which is a single linear Fresnel lens whose parallel light is light emitted radially from the point light source 41. , Equipped with. The point light source 41 is a laser diode, an LED, or the like. The point light source 41 is one end of the optical fiber, and light may be input from the light source device to the other end of the optical fiber. In the present embodiment, the lens unit 42 has a plurality of prism lenses arranged concentrically, and each prism lens is formed so that the light from the point light source 41 is parallel light.
　点光源４１からレンズ部４２の全体に亘って均一な光が照射されることが好ましいが、光軸の付近の光が最も強く、光軸から離れるに従って徐々に光量が低下する点光源４１であってもよい。 It is preferable that uniform light is emitted from the point light source 41 over the entire lens portion 42, but the light near the optical axis is the strongest, and the amount of light gradually decreases as the distance from the optical axis increases. You may.
　なお、レンズ部４２は、点光源４１からの光を平行光とするものであればよく、単一又は複数のレンズを有していればよい。また、レンズ部４２を構成するレンズとして、凸レンズ、凸レンズと凹レンズの組合せ、リニアフレネルレンズ等の周知のレンズを用いることが可能である。
　各第２平行光ユニット４０は、Ｘ方向およびＹ方向と略直交するＺ方向に平行光ＰＬ２を射出する。なお、Ｚ方向が、Ｘ方向およびＹ方向と交差する方向であって、Ｙ方向と４５°、３０°等の所定の角度を成す方向であってもよい。 The lens unit 42 may have a single lens or a plurality of lenses as long as the light from the point light source 41 is parallel light. Further, as the lens constituting the lens unit 42, a well-known lens such as a convex lens, a combination of a convex lens and a concave lens, and a linear Fresnel lens can be used.
Each second parallel light unit 40 emits parallel light PL2 in the X direction and the Z direction substantially orthogonal to the Y direction. The Z direction may be a direction that intersects the X direction and the Y direction, and may form a predetermined angle such as 45 ° or 30 ° with the Y direction.
　平行光ＰＬ２のＸ方向の幅は数ｃｍであり、本実施形態では５ｃｍ程度である。平行光ＰＬ２のＹ方向の幅は数ｃｍであってもよく、１ｃｍ以下であってもよい。本実施形態では平行光ＰＬ２のＹ方向の幅は５ｃｍ程度である。 The width of the parallel light PL2 in the X direction is several cm, and in this embodiment, it is about 5 cm. The width of the parallel light PL2 in the Y direction may be several cm or less. In the present embodiment, the width of the parallel light PL2 in the Y direction is about 5 cm.
　本実施形態では、図４に示されるように、第２平行光ユニット４０は筐体４３によって覆われている。また、第２平行光ユニット４３は、点光源４１の基板４１ａが一端面に固定されたブロック４４を有し、ブロック４４は筐体４３にＺ方向に移動可能に取付けられている。また、筐体４３に対してブロック４４を移動しないように固定する移動規制部材４５も設けられている。本実施形態では、移動規制部材４５はネジ部材であり、移動規制部材４５は筐体４３に螺合しており、ブロック４４に当接する。 In the present embodiment, as shown in FIG. 4, the second parallel light unit 40 is covered with the housing 43. Further, the second parallel light unit 43 has a block 44 in which the substrate 41a of the point light source 41 is fixed to one end surface, and the block 44 is attached to the housing 43 so as to be movable in the Z direction. Further, a movement restricting member 45 for fixing the block 44 to the housing 43 so as not to move is also provided. In the present embodiment, the movement restricting member 45 is a screw member, and the movement restricting member 45 is screwed into the housing 43 and comes into contact with the block 44.
　筐体３３および筐体４３は、筐体１０の一部として機能し、本実施形態では、筐体１０の中に複数の点光源３１，４１、複数のレンズ部３２，４２、および複数の反射部材２０が設けられている。
　筐体１０には、第１平行光ユニット３０からの平行光ＰＬ１であって、反射部材２０によって反射された平行光ＰＬ１と、第２平行光ユニット４０からの平行光ＰＬ２とが通過する開口部１０ａが設けられている。本実施形態では、開口部１０ａにプラスチック、ガラス等の透光材料から成るカバー１１が取付けられている。 The housing 33 and the housing 43 function as a part of the housing 10, and in the present embodiment, a plurality of point light sources 31, 41, a plurality of lens portions 32, 42, and a plurality of reflections are contained in the housing 10. A member 20 is provided.
The housing 10 has an opening through which the parallel light PL1 from the first parallel light unit 30 and the parallel light PL1 reflected by the reflecting member 20 and the parallel light PL2 from the second parallel light unit 40 pass. 10a is provided. In the present embodiment, a cover 11 made of a translucent material such as plastic or glass is attached to the opening 10a.
　移動規制部材４５を緩めると共に、ブロック４４をＹ方向に移動することによって、点光源４１とレンズ部４２とのＹ方向の距離を調節することができる。当該調節によって、平行光ＰＬ１を若干拡がる光、若干収束する光、又は完全な平行光に近い光等に調節することができる。若干広がる光および若干収束する光も本実施形態では平行光である。 By loosening the movement restricting member 45 and moving the block 44 in the Y direction, the distance between the point light source 41 and the lens portion 42 in the Y direction can be adjusted. By this adjustment, the parallel light PL1 can be adjusted to light that slightly expands, light that converges slightly, light that is close to perfect parallel light, and the like. Light that spreads slightly and light that converges slightly are also parallel light in this embodiment.
　本実施形態では、各反射部材２０は金属板、ガラス板等の矩形状の平板状部材である。一例では、各反射部材２０の厚さ方向一方の面である反射面２０ａには銀等の金属が蒸着されており、鏡面となっている。反射面２０ａは反射部材２０において第１平行光ユニット３０側の面である。各反射部材２０は、対応する第１平行光ユニット３０に対応した位置に配置されている。また、図２に示されるように、各反射部材２０のＸ方向の中央又はその近傍に、対応する第１平行光ユニット３０の光軸Ｌ１が向いている。各反射部材２０は、対応する第１平行光ユニット３０からの光をＺ方向に反射する。 In the present embodiment, each reflective member 20 is a rectangular flat plate member such as a metal plate or a glass plate. In one example, a metal such as silver is vapor-deposited on the reflective surface 20a, which is one surface of each reflective member 20 in the thickness direction, to form a mirror surface. The reflecting surface 20a is a surface of the reflecting member 20 on the side of the first parallel light unit 30. Each reflecting member 20 is arranged at a position corresponding to the corresponding first parallel light unit 30. Further, as shown in FIG. 2, the optical axis L1 of the corresponding first parallel light unit 30 faces the center or the vicinity thereof in the X direction of each reflecting member 20. Each reflecting member 20 reflects the light from the corresponding first parallel light unit 30 in the Z direction.
　図２に示されるように、第１平行光ユニット３０からの平行光ＰＬ１のＸ方向の幅は、対応する反射部材２０のＸ方向の幅よりも大きい。このため、図２に示されるように、平行光ＰＬ１のＸ方向の両端には、反射部材２０によって反射されない部分がある。なお、第１平行光ユニット３０と反射部材２０のＸ方向の位置を調整することによって、平行光ＰＬ１のＸ方向の一端に反射部材２０によって反射されない部分を作りながら、平行光ＰＬ１のＸ方向の他端と反射部材２０のＸ方向の端を完全に一致させる場合もある。しかし、このような位置調整には手間およびコストがかかるため、平行光ＰＬ１のＸ方向の両端に反射部材２０によって反射されない部分がある本実施形態の方が好ましい。 As shown in FIG. 2, the width of the parallel light PL1 from the first parallel light unit 30 in the X direction is larger than the width of the corresponding reflecting member 20 in the X direction. Therefore, as shown in FIG. 2, there are portions of the parallel light PL1 at both ends in the X direction that are not reflected by the reflecting member 20. By adjusting the positions of the first parallel light unit 30 and the reflecting member 20 in the X direction, a portion of the parallel light PL1 that is not reflected by the reflecting member 20 is formed at one end of the parallel light PL1 in the X direction. In some cases, the other end and the end of the reflective member 20 in the X direction are completely aligned. However, since such position adjustment requires labor and cost, the present embodiment in which the parallel light PL1 has portions that are not reflected by the reflecting member 20 at both ends in the X direction is preferable.
　図２に示されるように、各第２平行光ユニット４０の光軸Ｌ２は、Ｘ方向に隣り合う反射部材２０の間に配置される。本実施形態では、Ｘ方向に隣り合う反射部材２０間の空間のＸ方向の中央又はその近傍を、各第２平行光ユニット４０の光軸Ｌ２が通過する。
　図２に示されるように、各第２平行光ユニット４０からＺ方向に射出される平行光ＰＬ２のＸ方向の両端は、対応する２つの反射部材２０によって、Ｚ方向への進行が妨げられる。 As shown in FIG. 2, the optical axis L2 of each second parallel light unit 40 is arranged between the reflective members 20 adjacent to each other in the X direction. In the present embodiment, the optical axis L2 of each second parallel light unit 40 passes through the center of the space between the reflective members 20 adjacent to each other in the X direction or the vicinity thereof in the X direction.
As shown in FIG. 2, both ends of the parallel light PL2 emitted in the Z direction from each second parallel light unit 40 in the X direction are hindered from traveling in the Z direction by the corresponding two reflecting members 20.
　上記構成によって、図２に示されるように、照明エリアにおいて複数の平行光ＰＬ１と複数の平行光ＰＬ２がＸ方向に交互に並び、平行光ＰＬ１のＸ方向の端と平行光ＰＬ２のＸ方向の端が一致又はほぼ一致する。これにより、照射位置に平行光ＰＬ１，ＰＬ２と略一致する幅の光が照射可能である。本実施形態では、開口部１０ａと略一致する幅の光が照射される。例えば、平行光ＰＬ１のＸ方向の端と平行光ＰＬ２のＸ方向の端が一致することによって、照明エリアの略全体において照度が均一又は略均一となる。 With the above configuration, as shown in FIG. 2, a plurality of parallel light PL1 and a plurality of parallel light PL2 are alternately arranged in the X direction in the illumination area, and the end of the parallel light PL1 in the X direction and the parallel light PL2 in the X direction. The ends match or almost match. As a result, it is possible to irradiate the irradiation position with light having a width substantially matching that of the parallel lights PL1 and PL2. In the present embodiment, light having a width substantially matching the opening 10a is irradiated. For example, when the X-direction end of the parallel light PL1 and the X-direction end of the parallel light PL2 coincide with each other, the illuminance becomes uniform or substantially uniform over substantially the entire illumination area.
　なお、第２平行光ユニット４０と反射部材２０のＸ方向の位置を調整することによって、平行光ＰＬ２のＸ方向の一端に反射部材２０によってＺ方向への進行が妨げられる部分を作りながら、平行光ＰＬ２のＸ方向の他端と反射部材２０のＸ方向の端を完全に一致させることもできる。しかし、このような位置調整には手間およびコストがかかるため、平行光ＰＬ２のＸ方向の両端に反射部材２０によってＺ方向への進行が妨げられる部分がある本実施形態の方が好ましい。 By adjusting the positions of the second parallel light unit 40 and the reflecting member 20 in the X direction, a portion of the parallel light PL2 in the X direction is formed in parallel while the reflecting member 20 hinders the progress in the Z direction. It is also possible to completely match the other end of the optical PL2 in the X direction with the end of the reflecting member 20 in the X direction. However, since such position adjustment requires labor and cost, the present embodiment in which the reflection members 20 hinder the progress in the Z direction at both ends of the parallel light PL2 in the X direction is preferable.
　さらに、第２平行光ユニット４０からの平行光ＰＬ２のＸ方向の寸法を反射部材２０の間隔寸法と一致させることも可能である。この場合、第２平行光ユニット４０と反射部材２０のＸ方向の位置を調整すると、平行光ＰＬ２のＸ方向の両端は反射部材２０によってＺ方向への進行が妨げられない。この場合でも、照明エリアの略全体に亘って照度を均一又は略均一とすることが可能である。
　また、本実施形態では、反射部材２０がＸ方向に間隔をおいて並んでおり、当該構成は照明装置１の小型化を図るために有利である。 Further, it is also possible to match the X-direction dimension of the parallel light PL2 from the second parallel light unit 40 with the spacing dimension of the reflecting member 20. In this case, if the positions of the second parallel light unit 40 and the reflection member 20 in the X direction are adjusted, the reflection members 20 do not hinder the progress of the parallel light PL2 in the Z direction at both ends in the X direction. Even in this case, it is possible to make the illuminance uniform or substantially uniform over substantially the entire illumination area.
Further, in the present embodiment, the reflecting members 20 are arranged at intervals in the X direction, and this configuration is advantageous for reducing the size of the lighting device 1.
　本実施形態では、各第１平行光ユニット３０からの平行光ＰＬ１がそれぞれ反射部材２０によってＺ方向に向かって反射される。また、複数の第２平行光ユニット４０は、Ｘ方向に互いに間隔をおいて配置され、Ｚ方向にそれぞれ平行光ＰＬ２を照射する。また、図２に示されるように、Ｘ方向において、複数の第２平行光ユニット４０は複数の反射部材２０と交互に配置されている。このような交互配置のため、各第２平行光ユニット４０からの光が反射部材２０の間を通過して照明エリアに到達する。当該構成によって、照明エリアの略全体に亘って照度を均一又は略均一にする照明装置１を容易且つ確実に構成することが可能となる。本実施形態では、第１平行光ユニット３０から照明エリアに照射される平行光ＰＬ１と第２平行光ユニット２０から照明エリアに照射される平行光ＰＬ２はＸ方向に連なり、両平行光の重なりは無い又は僅かである。両平行光の重なりがある場合でも、その重なりは規則正しくあらわれる。このため、照明エリアの画像をセンサで得た時に、両平行光の重なりがある範囲を画像処理で調整することが可能である。 In the present embodiment, the parallel light PL1 from each first parallel light unit 30 is reflected by the reflecting member 20 in the Z direction. Further, the plurality of second parallel light units 40 are arranged at intervals in the X direction, and irradiate the parallel light PL2 in the Z direction, respectively. Further, as shown in FIG. 2, in the X direction, the plurality of second parallel light units 40 are alternately arranged with the plurality of reflecting members 20. Due to such an alternating arrangement, the light from each second parallel light unit 40 passes between the reflecting members 20 and reaches the illumination area. With this configuration, it is possible to easily and reliably configure the lighting device 1 that makes the illuminance uniform or substantially uniform over substantially the entire lighting area. In the present embodiment, the parallel light PL1 emitted from the first parallel light unit 30 to the illumination area and the parallel light PL2 emitted from the second parallel light unit 20 to the illumination area are connected in the X direction, and the overlap of the two parallel lights is None or few. Even if there is an overlap of both parallel lights, the overlap appears regularly. Therefore, when an image of the illumination area is obtained by the sensor, it is possible to adjust the range in which the two parallel lights overlap by image processing.
　また、各反射部材２０は、対応する第１平行光ユニット３０からの平行光ＰＬ１のうち、Ｘ方向の端の光を反射しない。当該構成は、照明エリアの略全体に亘って照度を均一又は略均一にする照明装置１を容易且つ確実に構成するために有利である。
　また、各反射部材２０は、少なくとも１つの第２平行光ユニット４０からの平行光ＰＬ２のＸ方向の端の光をＺ方向に向かわないように遮断および／又は反射するものである。本実施形態では、各反射部材２０の反射面２０ａと反対の面は黒アルマイト処理等の反射防止処理が施され、平行光ＰＬ２のＸ方向の端の光を主に遮断する。 Further, each reflecting member 20 does not reflect the light at the end in the X direction of the parallel light PL1 from the corresponding first parallel light unit 30. This configuration is advantageous for easily and reliably configuring the lighting device 1 that makes the illuminance uniform or substantially uniform over substantially the entire illumination area.
Further, each reflecting member 20 blocks and / or reflects the light at the end of the parallel light PL2 in the X direction from at least one second parallel light unit 40 so as not to direct in the Z direction. In the present embodiment, the surface of each reflecting member 20 opposite to the reflecting surface 20a is subjected to antireflection treatment such as black alumite treatment, and mainly blocks the light at the end of the parallel light PL2 in the X direction.
　また、本実施形態では、反射部材２０のアレイの端に配置されていない各反射部材２０は、隣り合う２つの第２平行光ユニット４０の平行光ＰＬ２のＸ方向の端の光を遮断および／又は反射する。当該構成は、照明エリアの略全体に亘って照度を均一又は略均一にする照明装置１をより確実に構成するために有利である。 Further, in the present embodiment, each reflecting member 20 not arranged at the end of the array of the reflecting member 20 blocks and / or blocks the light at the end of the parallel light PL2 of the two adjacent second parallel light units 40 in the X direction. Or it reflects. This configuration is advantageous for more reliably configuring the lighting device 1 that makes the illuminance uniform or substantially uniform over substantially the entire illumination area.
　また、本実施形態では、複数の第２平行光ユニット４０は、Ｘ方向に複数の第１平行光ユニット３０と交互に配置されている。当該構成は、照明装置１の小型化を図るために有利である。 Further, in the present embodiment, the plurality of second parallel light units 40 are alternately arranged with the plurality of first parallel light units 30 in the X direction. This configuration is advantageous for reducing the size of the lighting device 1.
　第１平行光ユニット３０は、点光源３１と、点光源３１からの光を平行光とするレンズ部３２とを有する。また、第２平行光ユニット４０も、点光源４１と、点光源４１からの光を平行光とするレンズ部４２とを有する。当該構成は、照明装置１の小型化を図るために有利である。特に、レンズ部３２，４２が１枚のリニアフレネルレンズであることによって、照明装置１をより小型化できる。 The first parallel light unit 30 has a point light source 31 and a lens unit 32 that uses the light from the point light source 31 as parallel light. Further, the second parallel light unit 40 also has a point light source 41 and a lens unit 42 that converts the light from the point light source 41 into parallel light. This configuration is advantageous for reducing the size of the lighting device 1. In particular, since the lens units 32 and 42 are one linear Fresnel lens, the lighting device 1 can be further miniaturized.
　図５に示されるように、第２平行光ユニット４０の代わりに、平行光ユニット５０が設けられてもよい。この場合、平行光ユニット５０は第２平行光ユニットとして機能し、Ｘ方向において、複数の平行光ユニット５０はそれぞれ第２平行光ユニット４０と同じ位置に配置される。また、各平行光ユニット５０は、Ｙ方向に平行光ＰＬ２を照射するために、点光源３１，４１と同様の点光源５１と、レンズ部３２，４２と同様のレンズ部５２と、筐体３３，４３と同等の筐体５３と、ブロック３４，４４と同様のブロック５４と、移動規制部材３５，４５と同様の移動規制部材５５とを有する。 As shown in FIG. 5, a parallel light unit 50 may be provided instead of the second parallel light unit 40. In this case, the parallel light unit 50 functions as a second parallel light unit, and the plurality of parallel light units 50 are arranged at the same positions as the second parallel light unit 40 in the X direction. Further, in order to irradiate the parallel light PL2 in the Y direction, each parallel light unit 50 has a point light source 51 similar to the point light sources 31 and 41, a lens unit 52 similar to the lens units 32 and 42, and a housing 33. , 43 has a housing 53 equivalent to, 43, a block 54 similar to blocks 34, 44, and a movement restricting member 55 similar to movement restricting members 35, 45.
　また、各平行光ユニット５０は、第２反射部材２１を有する。各第２反射部材２１は、隣り合う反射部材２０の間に配置され、隣り合う反射部材２０のＸ方向の間隔と等しいＸ方向寸法を有する。各第２反射部材２１は、点光源５１側の反射面２１ａによって平行光ＰＬ２をＺ方向に向かって反射する。平行光ＰＬ２のうち、Ｘ方向の端の光は反射面２１ａによって反射されず、又は、反射部材２０によって遮断および／又は反射される。このような平行光ユニット５０が用いられる場合も、照明エリアの略全体に亘って照度を均一又は略均一にする照明装置１を容易且つ確実に構成することができる。 Further, each parallel light unit 50 has a second reflecting member 21. Each second reflective member 21 is arranged between adjacent reflective members 20 and has an X-direction dimension equal to the X-direction spacing of the adjacent reflective members 20. Each second reflecting member 21 reflects the parallel light PL2 in the Z direction by the reflecting surface 21a on the point light source 51 side. Of the parallel light PL2, the light at the end in the X direction is not reflected by the reflecting surface 21a, or is blocked and / or reflected by the reflecting member 20. Even when such a parallel light unit 50 is used, it is possible to easily and surely configure the lighting device 1 that makes the illuminance uniform or substantially uniform over substantially the entire illumination area.
　図６に示されるように、第１平行光ユニット３０および第２平行光ユニット４０に加え、前記平行光ユニット５０が設けられてもよい。この場合、平行光ユニット５０は第３平行光ユニットとして機能し、Ｘ方向において、隣り合う第１平行光ユニット３０の間に第２平行光ユニット４０および平行光ユニット５０が配置される。つまり、この場合でも、Ｘ方向において、複数の第２平行光ユニット４０および複数の平行光ユニット５０は複数の反射部材２０と交互に配置される。 As shown in FIG. 6, in addition to the first parallel light unit 30 and the second parallel light unit 40, the parallel light unit 50 may be provided. In this case, the parallel light unit 50 functions as a third parallel light unit, and the second parallel light unit 40 and the parallel light unit 50 are arranged between the adjacent first parallel light units 30 in the X direction. That is, even in this case, the plurality of second parallel light units 40 and the plurality of parallel light units 50 are alternately arranged with the plurality of reflecting members 20 in the X direction.
　図６の構造の場合、例えば、第２平行光ユニット４０は、隣り合う第１平行光ユニット２０のＸ方向の間隔の略１／２のＸ方向寸法を有する平行光ＰＬ２を照射する。また、平行光ユニット５０の第２反射部材２１は、隣り合う第１平行光ユニット２０のＸ方向の間隔の略１／２のＸ方向寸法を有する。そして、第２平行光ユニット４０から照明エリアに照射される平行光ＰＬ２と平行光ユニット５０から照明エリアに照射される平行光は、前記各実施形態と同様にＸ方向に連なり、両平行光の重なりは無い又は僅かである。 In the case of the structure of FIG. 6, for example, the second parallel light unit 40 irradiates the parallel light PL2 having an X-direction dimension of approximately 1/2 of the X-direction spacing of the adjacent first parallel light units 20. Further, the second reflecting member 21 of the parallel light unit 50 has an X-direction dimension of approximately 1/2 of the distance between the adjacent first parallel light units 20 in the X-direction. Then, the parallel light PL2 emitted from the second parallel light unit 40 to the illumination area and the parallel light emitted from the parallel light unit 50 to the illumination area are continuous in the X direction as in each of the above-described embodiments, and are of both parallel lights. There is no or little overlap.
　また、平行光ＰＬ２のＸ方向の一端の光は反射部材２０によって遮断および／又は反射される。平行光ＰＬ２のＸ方向の他端の光は平行光ユニット５０の第２反射部材２１によって遮断および／又は反射される。
　図５および図６のように構成された場合も、照明エリアの略全体に亘って照度を均一又は略均一にする照明装置１を容易且つ確実に構成することができる。 Further, the light at one end of the parallel light PL2 in the X direction is blocked and / or reflected by the reflecting member 20. The light at the other end of the parallel light PL2 in the X direction is blocked and / or reflected by the second reflecting member 21 of the parallel light unit 50.
Even when configured as shown in FIGS. 5 and 6, the lighting device 1 that makes the illuminance uniform or substantially uniform over substantially the entire illumination area can be easily and reliably configured.
　この照明装置１は、図７に示すように、照明装置１からの光をＹ方向に収束する集光レンズ部６１と、集光レンズ部６１からの光をＹ方向に拡げる再平行化レンズ部６２とを有する場合もある。再平行化レンズ部６２によって、集光レンズ部６１からの光を照射位置に向かって平行光とすることができる。これにより、照明エリアの照度を上げることができる。なお、再平行化レンズ部６２を設けない場合もある。この場合、照明装置１からの光が集光レンズ部６１によって照明エリアに向かって収束する。 As shown in FIG. 7, the illuminating device 1 includes a condensing lens unit 61 that converges the light from the illuminating device 1 in the Y direction, and a reparalleling lens unit that spreads the light from the condensing lens unit 61 in the Y direction. It may have 62 and. The reparalleling lens unit 62 can make the light from the condenser lens unit 61 parallel to the irradiation position. As a result, the illuminance of the lighting area can be increased. In some cases, the reparalleling lens portion 62 is not provided. In this case, the light from the illumination device 1 is converged toward the illumination area by the condenser lens unit 61.
　集光レンズ部６１は、単一又は複数のレンズを有していればよい。再平行化レンズ部６２も、単一又は複数のレンズを有していればよい。当該レンズとして、凸レンズ、凸レンズと凹レンズとの組合せ、リニアフレネルレンズ等の周知のレンズを用いることが可能である。 The condenser lens unit 61 may have a single lens or a plurality of lenses. The reparalleling lens unit 62 may also have a single lens or a plurality of lenses. As the lens, a well-known lens such as a convex lens, a combination of a convex lens and a concave lens, and a linear Fresnel lens can be used.
　図３、図７等において、照明装置１と照明エリアとの間に、光を主にＸ方向に拡散する拡散レンズを設けることも可能である。当該拡散レンズとしては、特許第４４５７１００号公報に記載された各種拡散レンズを用いることも可能であり、光を主にＸ方向い拡散する他の公知の拡散レンズを用いることも可能である。この場合、照明エリアにおける光における平行光成分以外の光を増加することができる。または、照明エリアにおける光の均一性を向上することができる。 In FIGS. 3 and 7, it is also possible to provide a diffusing lens that diffuses light mainly in the X direction between the lighting device 1 and the lighting area. As the diffusing lens, various diffusing lenses described in Japanese Patent No. 4457100 can be used, and other known diffusing lenses that diffuse light mainly in the X direction can also be used. In this case, it is possible to increase the light other than the parallel light component in the light in the illumination area. Alternatively, the uniformity of light in the illumination area can be improved.
　図３、図７等において、照明装置１と照射位置との間に、光をＸ方向に曲げるための屈折レンズ部材（図８）７０が設けられてもよい。例えば、図３において、カバー１１の代わりに屈折レンズ部材７０が設けられる。図７では、例えば、再平行化レンズ部６２と照射位置との間に屈折レンズ部材７０が設けられる。図７において、再平行化レンズ部６２が設けられない場合は、集光レンズ部６１と照射位置との間に屈折レンズ部材７０が設けられる。集光レンズ部６１、再平行化レンズ部６２、および屈折レンズ部材７０が筐体１０に取付けられていてもよい。この場合、照明装置１が集光レンズ部６１、再平行化レンズ部６２、および屈折レンズ部材７０を備える。 In FIGS. 3 and 7, a refracting lens member (FIG. 8) 70 for bending light in the X direction may be provided between the illumination device 1 and the irradiation position. For example, in FIG. 3, a refracting lens member 70 is provided instead of the cover 11. In FIG. 7, for example, a refraction lens member 70 is provided between the reparallelized lens portion 62 and the irradiation position. In FIG. 7, when the reparalleling lens portion 62 is not provided, the refraction lens member 70 is provided between the condenser lens portion 61 and the irradiation position. The condenser lens unit 61, the reparalleling lens unit 62, and the refraction lens member 70 may be attached to the housing 10. In this case, the illumination device 1 includes a condenser lens unit 61, a reparalleling lens unit 62, and a refraction lens member 70.
　屈折レンズ部材７０は、例えば図８に示されるように、Ｘ方向に並んだ複数のプリズムレンズを有し、各プリズムレンズはＹ方向に延びている。屈折レンズ部材７０として、Ｚ方向に向かう平行光をＸ方向に曲げることができる公知の屈折レンズを用いることが可能である。
　照明装置１からの光に平行光成分が多く含まれているため、屈折レンズ部材７０を通過した光の向かう方向が一定となる。当該構成は、対象物に広範囲に亘って特定の方向から光を当てる用途において極めて有用である。 As shown in FIG. 8, for example, the refracting lens member 70 has a plurality of prism lenses arranged in the X direction, and each prism lens extends in the Y direction. As the refracting lens member 70, it is possible to use a known refracting lens capable of bending parallel light in the Z direction in the X direction.
Since the light from the illuminating device 1 contains a large amount of parallel light components, the direction of the light passing through the refracting lens member 70 is constant. This configuration is extremely useful in applications where the object is exposed to light from a specific direction over a wide area.
　なお、点光源３１，４１，５１は可視光を射出するものであってもよく、紫外光を射出するものであってもよく、赤外光を射出するものであってもよい。 Note that the point light sources 31, 41, and 51 may emit visible light, ultraviolet light, or infrared light.
　照明装置１からの光に平行光成分が多いので、照明装置１を光硬化性プラスチック等の露光用に用いる場合、露光の効率の向上および露光の均一性の向上をより高いレベルで実現することが可能となる。
　また、照明装置１を検査に用いる場合、照明装置１からの光が、検査対象物で反射した後、又は、検査対象物を透過した後、検査用のセンサに届く。この場合も、照明装置１からの光に平行光成分が多いので、センサにおいて検出される光の量が多くなる。これは、検査の高速化、検査の精度向上等を図る上で有利である。 Since the light from the illuminating device 1 has a large amount of parallel light components, when the illuminating device 1 is used for exposure of a photocurable plastic or the like, the improvement of exposure efficiency and the improvement of exposure uniformity should be realized at a higher level. Is possible.
Further, when the lighting device 1 is used for inspection, the light from the lighting device 1 reaches the sensor for inspection after being reflected by the inspection target or transmitted through the inspection target. Also in this case, since the light from the lighting device 1 has a large amount of parallel light components, the amount of light detected by the sensor is large. This is advantageous for speeding up the inspection and improving the accuracy of the inspection.
　また、図７に示されるように、当該照明システムに、検査対象物からの光をセンサ８２に向かってＸ方向に収束するためのレンズ８１が設けられてもよい。照明エリアは検査対象物の表面、検査対象物が存在する面等であり、レンズ８１は照明エリアの長手方向に長手を有する。照明装置１からの光が検査対象物を透過する場合も、照明エリアとセンサ８２との間にレンズ８１を設けることが可能である。照明装置１は平行光成分が多いので、レンズ８１によって、照明装置１よりもＸ方向の寸法が小さなセンサ８２に光を効果的に収束することが可能となる。 Further, as shown in FIG. 7, the lighting system may be provided with a lens 81 for converging the light from the inspection object in the X direction toward the sensor 82. The illumination area is the surface of the inspection object, the surface on which the inspection object exists, and the like, and the lens 81 has a length in the longitudinal direction of the illumination area. Even when the light from the illuminating device 1 passes through the inspection object, the lens 81 can be provided between the illuminating area and the sensor 82. Since the illuminating device 1 has a large amount of parallel light components, the lens 81 makes it possible to effectively converge the light on the sensor 82 having a smaller dimension in the X direction than the illuminating device 1.
　なお、図５の実施形態において、反射面２０ａ，２１ａが、平行光ＰＬ１，ＰＬ２をＹ方向に少し拡げる凸面であってもよく、平行光ＰＬ１，ＰＬ２をＹ方向に収束する凹面であってもよい。この場合でも、反射面２０ａ，２１ａによって反射された光はＹ方向から見ると平行光である。このような光もＸ方向について見ると平行光である。このため、前記各実施形態と同様に、照明エリアの略全体において照度を均一又は略均一にすることが可能である。第１平行光ユニット３０および平行光ユニット５０のレンズ部３２，５２が、光をＺ方向又はＹ方向に少し拡げる、又は、収束してもよい。 In the embodiment of FIG. 5, the reflecting surfaces 20a and 21a may be convex surfaces that slightly expand the parallel light PL1 and PL2 in the Y direction, or may be concave surfaces that converge the parallel light PL1 and PL2 in the Y direction. Good. Even in this case, the light reflected by the reflecting surfaces 20a and 21a is parallel light when viewed from the Y direction. Such light is also parallel light when viewed in the X direction. Therefore, as in each of the above-described embodiments, it is possible to make the illuminance uniform or substantially uniform over substantially the entire illumination area. The lens portions 32, 52 of the first parallel light unit 30 and the parallel light unit 50 may slightly expand or converge the light in the Z direction or the Y direction.
　なお、図９に示されるように、前記各実施形態において、複数の反射部材２０が１枚の板Ｐの一部であってもよい。
　また、図１０に示されるように、各反射部材２０が三角柱形状を有していてもよい。この場合でも前述と同様の作用効果を奏するが、照明エリアにおける平行光ＰＬ１と平行光ＰＬ２の重なりの調整を容易にする上で、各反射部材２０が板状である方が好ましい。 As shown in FIG. 9, in each of the above-described embodiments, the plurality of reflective members 20 may be a part of one plate P.
Further, as shown in FIG. 10, each reflecting member 20 may have a triangular prism shape. Even in this case, the same effect as described above is obtained, but in order to facilitate the adjustment of the overlap of the parallel light PL1 and the parallel light PL2 in the illumination area, it is preferable that each reflecting member 20 has a plate shape.
　また、図３等において、筐体１０をＹ方向およびＺ方向に大きくし、筐体１０の中に点光源３１および点光源４１を配置してもよい。また、レンズ部３２に対し点光源３１の位置を調整する機構およびレンズ部４２に対して点光源４１の位置を調整する機構を省くことも可能である。
　また、第１平行光ユニット３０の光軸Ｌ１等の位置に局部的に光量が多い部分ができ、第２平行光ユニット４０の光軸Ｌ２等の位置に局部的に光量が多い部分ができる場合がある。この場合、照明エリアに幅があるので、光量が多い部分を避けてセンサ等で観察すると、センサで見る範囲の光量ムラが無くなる。 Further, in FIG. 3 and the like, the housing 10 may be enlarged in the Y direction and the Z direction, and the point light source 31 and the point light source 41 may be arranged in the housing 10. It is also possible to omit the mechanism for adjusting the position of the point light source 31 with respect to the lens unit 32 and the mechanism for adjusting the position of the point light source 41 with respect to the lens unit 42.
Further, when a portion having a large amount of light is locally formed at a position such as the optical axis L1 of the first parallel light unit 30, and a portion having a large amount of light is locally formed at a position such as the optical axis L2 of the second parallel light unit 40. There is. In this case, since the illumination area has a wide width, if the observation is performed with a sensor or the like while avoiding a portion having a large amount of light, the unevenness of the amount of light in the range viewed by the sensor disappears.
　なお、図１１に示されるように、第１平行光ユニット３０が、点光源３１からの光をリフレクタ３７によって平行光ＰＬ１になるように反射してもよい。また、第２平行光ユニット４０も、点光源４１からの光をリフレクタ３７によって平行光ＰＬ２になるように反射してもよい。 As shown in FIG. 11, the first parallel light unit 30 may reflect the light from the point light source 31 so as to become the parallel light PL1 by the reflector 37. Further, the second parallel light unit 40 may also reflect the light from the point light source 41 so as to become the parallel light PL2 by the reflector 37.
　１…照明装置、１０…筐体、１０ａ…開口部、２０…反射部材、２０ａ…反射面、２１…第２反射部材、２１ａ…反射面、３０…第１平行光ユニット、３１…点光源、３２…レンズ部、３３…筐体、３４…ブロック、３５…移動規制部材、４０…第１平行光ユニット、４１…点光源、４２…レンズ部、４３…筐体、４４…ブロック、４５…移動規制部材、６１…集光レンズ部、６２…再平行化レンズ部、７０…屈折レンズ部材、８１…レンズ、８２…センサ 1 ... Lighting device, 10 ... Housing, 10a ... Opening, 20 ... Reflective member, 20a ... Reflective surface, 21 ... Second reflective member, 21a ... Reflective surface, 30 ... First parallel light unit, 31 ... Point light source, 32 ... lens unit, 33 ... housing, 34 ... block, 35 ... movement control member, 40 ... first parallel light unit, 41 ... point light source, 42 ... lens unit, 43 ... housing, 44 ... block, 45 ... movement Regulatory member, 61 ... Condensing lens section, 62 ... Reparalleling lens section, 70 ... Refractive lens member, 81 ... Lens, 82 ... Sensor

Claims (13)

  1. 　Ｘ方向に互いに間隔をおいて配置され、前記Ｘ方向と略直交するＹ方向にそれぞれ平行光を射出する複数の第１平行光ユニットと、
    　前記Ｘ方向に互いに間隔をおいて配置され、前記複数の第１平行光ユニットからの前記平行光をそれぞれ前記Ｘ方向と略直交する所定方向に向かって反射する複数の反射部材と、
    　前記Ｘ方向に互いに間隔をおいて配置され、前記所定方向にそれぞれ平行光を射出する複数の第２平行光ユニットと、を備え、
    　前記Ｘ方向において、前記複数の第２平行光ユニットは、前記複数の反射部材と交互に配置され、
    　前記各反射部材は、対応する前記第１平行光ユニットからの前記平行光のうち前記Ｘ方向の少なくとも一端の光を反射しないものである、照明装置。     A plurality of first parallel light units that are arranged at intervals in the X direction and emit parallel light in the Y direction that is substantially orthogonal to the X direction.
    A plurality of reflective members arranged at intervals in the X direction and reflecting the parallel light from the plurality of first parallel light units in a predetermined direction substantially orthogonal to the X direction.
    A plurality of second parallel light units, which are arranged at intervals in the X direction and emit parallel light in each of the predetermined directions, are provided.
    In the X direction, the plurality of second parallel light units are arranged alternately with the plurality of reflecting members.
    Each reflecting member is a lighting device that does not reflect light at least one end in the X direction of the parallel light from the corresponding first parallel light unit.
  2. 　前記各反射部材は、対応する前記第１平行光ユニットからの前記平行光のうち、前記Ｘ方向の両端の光を反射しないものである、請求項１に記載の照明装置。 The lighting device according to claim 1, wherein each of the reflecting members does not reflect the light at both ends in the X direction among the parallel light from the corresponding first parallel light unit.
  3. 　前記各反射部材は、少なくとも１つの前記第２平行光ユニットからの前記平行光の前記Ｘ方向の端の光を前記所定方向に向かわないように遮断又は反射するものである、請求項１又は２に記載の照明装置。 Claim 1 or 2 that each reflecting member blocks or reflects the light at the X-direction end of the parallel light from at least one second parallel light unit so as not to direct the predetermined direction. The lighting device described in.
  4. 　前記複数の反射部材の少なくとも１つは、隣り合う２つの前記第２平行光ユニットからの前記平行光の前記Ｘ方向の端の光を前記所定方向に向かわないように遮断又は反射するものである、請求項１又は２に記載の照明装置。 At least one of the plurality of reflecting members blocks or reflects the light at the X-direction end of the parallel light from two adjacent second parallel light units so as not to direct in the predetermined direction. , The lighting device according to claim 1 or 2.
  5. 　前記複数の第２平行光ユニットは、前記Ｘ方向に前記複数の第１平行光ユニットと交互に配置されている、請求項１～４の何れかに記載の照明装置。 The lighting device according to any one of claims 1 to 4, wherein the plurality of second parallel light units are alternately arranged in the X direction with the plurality of first parallel light units.
  6. 　前記各第１平行光ユニットは、点光源と、前記点光源からの光を前記平行光とするレンズ部と、を有する、請求項１～５の何れかに記載の照明装置。 The lighting device according to any one of claims 1 to 5, wherein each of the first parallel light units includes a point light source and a lens portion that uses light from the point light source as the parallel light.
  7. 　前記各第２平行光ユニットは、点光源と、前記点光源からの光を前記平行光とするレンズ部と、を有する、請求項１～６の何れかに記載の照明装置。 The lighting device according to any one of claims 1 to 6, wherein each of the second parallel light units includes a point light source and a lens portion that uses light from the point light source as the parallel light.
  8. 　前記複数の第２平行光ユニットは、点光源と、前記点光源からの光を平行光とするレンズ部と、前記レンズ部からの前記平行光を前記所定方向に向かって反射する第２反射部材と、を有する、請求項１～６の何れかに記載の照明装置。 The plurality of second parallel light units include a point light source, a lens portion that uses light from the point light source as parallel light, and a second reflecting member that reflects the parallel light from the lens portion toward the predetermined direction. The lighting device according to any one of claims 1 to 6, further comprising.
  9. 　前記Ｘ方向に互いに間隔をおいて配置され、前記所定方向にそれぞれ平行光を射出する第３平行光ユニットをさらに備える、請求項１～８の何れかに記載の照明装置。 The lighting device according to any one of claims 1 to 8, further comprising a third parallel light unit that is arranged at intervals in the X direction and emits parallel light in each of the predetermined directions.
  10. 　前記反射部材によって前記所定方向に向かって反射される前記第１平行光ユニットからの前記平行光と、前記複数の第２平行光ユニットからの前記所定方向に向かう前記平行光とを、前記Ｘ方向に屈折させる屈折レンズ部材をさらに備える、請求項１～９の何れかに記載の照明装置。 The parallel light from the first parallel light unit reflected by the reflecting member toward the predetermined direction and the parallel light from the plurality of second parallel light units toward the predetermined direction are directed in the X direction. The lighting device according to any one of claims 1 to 9, further comprising a refracting lens member that refracts the light.
  11. 　前記反射部材によって前記所定方向に向かって反射される前記第１平行光ユニットからの前記平行光と、前記複数の第２平行光ユニットからの前記所定方向に向かう前記平行光とを、前記Ｘ方向と直交する方向に集光する集光レンズ部をさらに備える、請求項１～９の何れかに記載の照明装置。 The parallel light from the first parallel light unit reflected by the reflecting member toward the predetermined direction and the parallel light from the plurality of second parallel light units toward the predetermined direction are combined in the X direction. The lighting device according to any one of claims 1 to 9, further comprising a condensing lens unit that collects light in a direction orthogonal to the above.
  12. 　前記集光レンズ部によって集光された光を平行光とする再平行化レンズ部をさらに備える、請求項１１に記載の照明装置。 The illuminating device according to claim 11, further comprising a reparalleling lens unit that converts the light collected by the condensing lens unit into parallel light.
  13. 　請求項１～１２の何れかに記載の照明装置と、
    　前記照明装置による照明エリアの長手方向に長手を有するレンズであり、前記照明エリアからの光を検査用のセンサに向かって前記長手方向に集光するレンズと、を備える照明システム。     The lighting device according to any one of claims 1 to 12,
    A lighting system including a lens having a length in the longitudinal direction of the illumination area by the illumination device, and a lens that collects light from the illumination area in the longitudinal direction toward a sensor for inspection.
PCT/JP2020/027418 2019-07-25 2020-07-14 Illumination device and illumination system WO2021015061A1 (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007293152A (en) * 2006-04-27 2007-11-08 Seiko Epson Corp Lighting system and projector
JP2019086532A (en) * 2017-11-01 2019-06-06 マクセル株式会社 Projection type video display device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007293152A (en) * 2006-04-27 2007-11-08 Seiko Epson Corp Lighting system and projector
JP2019086532A (en) * 2017-11-01 2019-06-06 マクセル株式会社 Projection type video display device

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