WO2021013796A9 - Vorrichtung und verfahren zur materialbearbeitung mittels laserstrahlung - Google Patents

Vorrichtung und verfahren zur materialbearbeitung mittels laserstrahlung Download PDF

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Publication number
WO2021013796A9
WO2021013796A9 PCT/EP2020/070453 EP2020070453W WO2021013796A9 WO 2021013796 A9 WO2021013796 A9 WO 2021013796A9 EP 2020070453 W EP2020070453 W EP 2020070453W WO 2021013796 A9 WO2021013796 A9 WO 2021013796A9
Authority
WO
WIPO (PCT)
Prior art keywords
laser pulses
workpiece
processed
processing material
laser radiation
Prior art date
Application number
PCT/EP2020/070453
Other languages
English (en)
French (fr)
Other versions
WO2021013796A1 (de
Inventor
Markus Guggenmos
Martin Hartmann
Thomas BUCKERT
Fabian MÜTEL
Original Assignee
Arges Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arges Gmbh filed Critical Arges Gmbh
Priority to JP2022504533A priority Critical patent/JP2022541631A/ja
Priority to CA3148493A priority patent/CA3148493A1/en
Priority to EP20746134.4A priority patent/EP4003249A1/de
Priority to US17/628,551 priority patent/US20220258279A1/en
Publication of WO2021013796A1 publication Critical patent/WO2021013796A1/de
Publication of WO2021013796A9 publication Critical patent/WO2021013796A9/de

Links

Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007—Methods or devices for eye surgery
    • A61F9/008—Methods or devices for eye surgery using laser
    • A61F9/00825—Methods or devices for eye surgery using laser for photodisruption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007—Methods or devices for eye surgery
    • A61F9/008—Methods or devices for eye surgery using laser
    • A61F2009/00861—Methods or devices for eye surgery using laser adapted for treatment at a particular location
    • A61F2009/00872—Cornea
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007—Methods or devices for eye surgery
    • A61F9/008—Methods or devices for eye surgery using laser
    • A61F2009/00897—Scanning mechanisms or algorithms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved

Landscapes

  • Optics & Photonics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Ophthalmology & Optometry (AREA)
  • Surgery (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Vascular Medicine (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Laser Beam Processing (AREA)
  • Lasers (AREA)

Abstract

Die Erfindung betrifft ein Verfahren zur Materialbearbeitung, insbesondere zum Modifizieren von Material und/oder Materialeigenschaften, mittels Laserstrahlung, umfassend folgende Schritte: a) Erzeugen einer Vielzahl von Laserimpulsen (L); b) Steuerung des Auftreffpunkts der Laserimpulse (L) auf einem zu bearbeitenden Werkstück (100), insbesondere Umlenken der Laserimpulse (L) und/oder Bewegen des zu bearbeitenden Werkstücks (100), sodass die Laserimpulse (L) entlang einer vorbestimmten Trajektorie (Z) auf dem zu bearbeitenden Werkstück (100) geführt werden. Erfindungsgemäß wird/werden - ein zeitlicher Impulsabstand (t) zwischen den einzelnen, erzeugten Laserimpulsen (L) und/oder - eine Impulsenergie (Pi) der Laserimpulse (L) und/oder - ein Strahldurchmesser (D) der Laserimpulse (L) und/oder - die vorbestimmte Trajektorie (Z) gezielt mit einem Rauschen beaufschlagt.
PCT/EP2020/070453 2019-07-24 2020-07-20 Vorrichtung und verfahren zur materialbearbeitung mittels laserstrahlung WO2021013796A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2022504533A JP2022541631A (ja) 2019-07-24 2020-07-20 レーザ照射による材料加工装置及び材料加工方法
CA3148493A CA3148493A1 (en) 2019-07-24 2020-07-20 Device and method for processing material by means of laser radiation
EP20746134.4A EP4003249A1 (de) 2019-07-24 2020-07-20 Vorrichtung und verfahren zur materialbearbeitung mittels laserstrahlung
US17/628,551 US20220258279A1 (en) 2019-07-24 2020-07-20 Device and method for processing material by means of laser radiation

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102019120010.5A DE102019120010A1 (de) 2019-07-24 2019-07-24 Vorrichtung und Verfahren zur Materialbearbeitung mittels Laserstrahlung
DE102019120010.5 2019-07-24

Publications (2)

Publication Number Publication Date
WO2021013796A1 WO2021013796A1 (de) 2021-01-28
WO2021013796A9 true WO2021013796A9 (de) 2021-03-18

Family

ID=71786913

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2020/070453 WO2021013796A1 (de) 2019-07-24 2020-07-20 Vorrichtung und verfahren zur materialbearbeitung mittels laserstrahlung

Country Status (6)

Country Link
US (1) US20220258279A1 (de)
EP (1) EP4003249A1 (de)
JP (1) JP2022541631A (de)
CA (1) CA3148493A1 (de)
DE (1) DE102019120010A1 (de)
WO (1) WO2021013796A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102022122964A1 (de) 2022-09-09 2024-03-14 Trumpf Laser Gmbh Vorrichtung und Verfahren zum Bearbeiten eines Materials

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10245717A1 (de) 2002-09-25 2004-04-22 Technische Universität Berlin Verfahren und Vorrichtung zum Erzeugen eines optischen Laserpulses
WO2006063153A2 (en) 2004-12-09 2006-06-15 Electro Scientific Industries, Inc. Multiple-wavelength laser micromachining of semiconductor devices
WO2007084694A2 (en) * 2006-01-20 2007-07-26 Lensar, Inc. System and apparatus for delivering a laser beam to the lens of an eye
DE102009012873B4 (de) * 2009-03-12 2021-08-19 Carl Zeiss Meditec Ag Ophthalmologisches Lasersystem und Steuereinheit
DE102009042003B4 (de) 2009-09-21 2011-12-08 Friedrich-Schiller-Universität Jena Gütegeschalteter Laser
CA2998971A1 (en) * 2015-10-13 2017-04-20 Novartis Ag System and method for reducing post-surgical rainbow effect

Also Published As

Publication number Publication date
DE102019120010A1 (de) 2021-01-28
US20220258279A1 (en) 2022-08-18
EP4003249A1 (de) 2022-06-01
WO2021013796A1 (de) 2021-01-28
JP2022541631A (ja) 2022-09-26
CA3148493A1 (en) 2021-01-28

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