WO2020259198A1 - 一种布拉格光栅外腔激光器模块合束装置及合束方法 - Google Patents
一种布拉格光栅外腔激光器模块合束装置及合束方法 Download PDFInfo
- Publication number
- WO2020259198A1 WO2020259198A1 PCT/CN2020/093137 CN2020093137W WO2020259198A1 WO 2020259198 A1 WO2020259198 A1 WO 2020259198A1 CN 2020093137 W CN2020093137 W CN 2020093137W WO 2020259198 A1 WO2020259198 A1 WO 2020259198A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- light
- beam combining
- bragg grating
- block
- compared
- Prior art date
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/065—Mode locking; Mode suppression; Mode selection ; Self pulsating
- H01S5/0657—Mode locking, i.e. generation of pulses at a frequency corresponding to a roundtrip in the cavity
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
- H01S5/4031—Edge-emitting structures
- H01S5/4062—Edge-emitting structures with an external cavity or using internal filters, e.g. Talbot filters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/0225—Out-coupling of light
- H01S5/02251—Out-coupling of light using optical fibres
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/024—Arrangements for thermal management
- H01S5/02407—Active cooling, e.g. the laser temperature is controlled by a thermo-electric cooler or water cooling
- H01S5/02415—Active cooling, e.g. the laser temperature is controlled by a thermo-electric cooler or water cooling by using a thermo-electric cooler [TEC], e.g. Peltier element
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/14—External cavity lasers
- H01S5/141—External cavity lasers using a wavelength selective device, e.g. a grating or etalon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/14—External cavity lasers
- H01S5/141—External cavity lasers using a wavelength selective device, e.g. a grating or etalon
- H01S5/142—External cavity lasers using a wavelength selective device, e.g. a grating or etalon which comprises an additional resonator
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4012—Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
- H01S3/0813—Configuration of resonator
- H01S3/0815—Configuration of resonator having 3 reflectors, e.g. V-shaped resonators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/02208—Mountings; Housings characterised by the shape of the housings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/023—Mount members, e.g. sub-mount members
- H01S5/02325—Mechanically integrated components on mount members or optical micro-benches
- H01S5/02326—Arrangements for relative positioning of laser diodes and optical components, e.g. grooves in the mount to fix optical fibres or lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4006—Injection locking
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
- H01S5/4031—Edge-emitting structures
- H01S5/4068—Edge-emitting structures with lateral coupling by axially offset or by merging waveguides, e.g. Y-couplers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
- H01S5/4087—Array arrangements, e.g. constituted by discrete laser diodes or laser bar emitting more than one wavelength
Definitions
- the application relates to the field of laser technology, and in particular to a beam combining device and a beam combining method of a Bragg grating external cavity laser module.
- High-power laser chips are often used as pump sources for solid-state lasers (such as sheet, fiber and slab lasers). Therefore, their efficiency, laser emission space and spectral characteristics determine the performance of solid-state lasers. High-power laser chips are also directly processed with materials (such as surface treatment, welding, additive manufacturing, cutting) and other industrial fields, and they have shown the potential to replace solid-state and fiber lasers. The increase in output power and brightness is the main driving force for the expansion of the application range of direct high-power laser chips. High-power, high-brightness laser output is usually obtained through beam combining technology.
- Laser beam combining technology is one of the effective methods to obtain high-brightness, high-power semiconductor laser output.
- Spectral beam combining uses external cavity feedback to lock the wavelengths of different laser chips at a certain wavelength, and uses dispersive elements to combine beams of different wavelengths.
- the beam quality will deteriorate. If the laser chips are in the same external cavity, the directivity of each laser chip needs to be strictly controlled to ensure that all the laser chips can be oscillated. Otherwise, partial locking of some laser chips will also cause the beam quality and efficiency to decrease.
- VBG grating Bragg grating
- the prior art VBG grating external cavity laser module beam combining device includes a plurality of light emitting modules, Fourier transform lenses and gratings arranged side by side and spaced at a required interval.
- Each light-emitting module includes a laser unit that can emit laser light, and a Bragg grating with different wavelengths emitted by the receiving laser unit.
- the Bragg grating has a preset locking wavelength, so that the different lasers emitted by each laser unit can be locked at the preset wavelength.
- Each light-emitting module locks the laser of different wavelengths to form parallel light, and then the parallel light is incident on the Fourier transform lens, which is focused on the grating by the Fourier transform lens, and then formed after diffraction by the grating The combined light shines out.
- the laser wavelength actually locked by the Bragg grating of each light-emitting module differs from the preset locked laser wavelength, resulting in the combination of the transmission grating output
- There is a deviation between the laser wavelength contained in the beam and the theoretical laser wavelength contained in the combined beam resulting in a decrease in the quality and power of the combined beam.
- the prior art VBG grating external cavity laser module beam combining device is difficult to detect or judge In the combined light, which wavelengths of laser light have deviations from the theoretical wavelength laser.
- the technical problem to be solved by the present application is that it is difficult for the existing VBG grating external cavity laser module beam combining device to detect or determine which wavelengths of laser light in the combined light differ from the theoretical wavelength laser.
- the purpose of this application is to provide a beam combining device for Bragg grating external cavity laser modules, which includes at least two light-emitting modules spaced apart and arranged side by side, and any one of the light-emitting modules includes a laser unit capable of emitting laser light and is used for receiving the The Bragg grating of the laser light emitted by the laser unit; among them, one of the light-emitting modules is used as a reference light-emitting module; the focusing optical element arranged on the output optical path of all the light-emitting modules; the focusing arranged on the output optical path of the focusing optical element Combining element at position; also includes
- the light splitting element is arranged on the output light path of the beam combining element
- the dispersive element is arranged on any output optical path of the light splitting element, and is used to disperse the combined light into dispersed light consistent with the relative positional relationship of the laser of each wavelength between the focusing optical element and the beam combining element ;
- a conversion optical element arranged on the output optical path of the dispersive element, and used to transmit the dispersed light into parallel light;
- the image acquisition mechanism is arranged on the output optical path of the conversion optical element, and is used to collect the blocks illuminated by the parallel light on the output optical path of the conversion optical element.
- the beam combining device of the Bragg grating external cavity laser module there are at least three light-emitting modules, and all the light-emitting modules are arranged side by side at equal intervals.
- the beam combining element and the dispersive element are both gratings.
- the beam combining element and the dispersive element are both transmissive gratings or reflective gratings, and the combined light passes through the beam combining element
- the diffraction angle is the grating blaze angle of the beam combining element
- the incident angle of the combined light beam incident on the dispersive element is the grating blaze angle of the dispersive element.
- any of the light-emitting modules further includes an optical fiber arranged on the output optical path of the Bragg grating.
- the beam combining device of a Bragg grating external cavity laser module further includes a temperature control device, and the temperature control device includes
- the temperature control element is arranged on the Bragg grating
- a temperature detection element for detecting the temperature of the Bragg grating
- a controller is electrically connected to both the temperature adjustment element and the temperature detection element, and the controller controls the temperature increase or decrease of the temperature adjustment element according to the detection signal of the temperature detection element.
- the purpose of this application is also to provide the beam combining method of the above-mentioned Bragg grating external cavity laser module beam combining device, which includes the following steps:
- the image includes a reference block and a number of blocks to be compared, wherein the reference block corresponds to the output wavelength of the reference light-emitting module laser, the block to be compared and other light-emitting modules One-to-one correspondence of the output wavelength of the laser;
- the picture block to be compared exceeds the range of the respective preset picture block, adjust the lock wavelength of the Bragg grating in the light emitting module corresponding to the picture block to be compared so that the picture block to be compared falls into the respective corresponding Within the preset tiles.
- the beam combining method of the beam combining device of the Bragg grating external cavity laser module in the step of determining whether the block to be compared falls within the range of the respective preset block,
- the difference between the picture block to be compared and the respective preset picture block is not more than 2 pixels, it indicates that the picture block to be compared falls within the range of the respective preset picture block.
- the beam combining method of the Bragg grating external cavity laser module beam combining device Preferably, the beam combining method of the Bragg grating external cavity laser module beam combining device,
- the locking wavelength of the Bragg grating is adjusted.
- the reference image is equal to the spacing between any adjacent preset tiles.
- a beam combining device for VBG grating external cavity laser modules provided by this application includes a plurality of light emitting modules arranged side by side.
- the light emitting modules adopt Bragg gratings for wavelength locking; the output light enters the beam combining element after passing through the focusing optical element.
- the beam is combined under the action of the beam combining element, and part of the combined light is reflected to the dispersive element after the action of the beam splitting element to disperse into sub-beams with different exit angles, and form parallel light under the action of the transforming optical element, and on the image acquisition mechanism
- the light-emitting module can not perform wavelength locking judgment and detection, which causes the problem of low beam quality of the beam combining device.
- the beam combining device has a simple structure, rapid judgment and detection, and convenient adjustment.
- each light-emitting module includes multiple laser chips, and the multiple laser chips are arranged in steps to achieve spatial beam combining, and multiple laser chips in each module emit The laser is locked at the same wavelength, there is no crosstalk, and it also solves the problem of limited beam combining unit in spatial beam combining, and can integrate multiple lasers in a smaller space, making the entire laser chip module smaller in size; also A larger number of single-tube beams can be coupled into the optical fiber, thereby having a larger output power, and the combined output beam has high brightness.
- a VBG grating external cavity laser module beam combining device provided by this application includes a temperature control device connected to the Bragg grating.
- the temperature control device includes a heating element, a temperature detection element and a controller, and the luminescence collected by the image acquisition mechanism When the block corresponding to the module has a deviation, the controller controls the heating element to turn on or off according to the detection signal of the temperature detection element.
- the temperature control device adjusts the temperature of the Bragg grating of the deviation light-emitting module to make the output of the light-emitting module The light reaches the preset locked wavelength.
- a beam combining method for a beam combining device of a VBG grating external cavity laser module is to acquire an image through an image acquisition device, and use the block formed by the reference light emitting module on the image acquisition mechanism as a reference block, and other blocks
- each block corresponds to a laser with the output wavelength of the light-emitting module
- use the reference block as a reference to obtain the respective preset block range corresponding to each block to be compared
- compare the block to be compared with each The preset block range comparison determine whether the block to be compared falls within the corresponding preset block range; if the block to be compared exceeds the range of the respective preset block, adjust the corresponding block to be compared
- the wavelength of the Bragg in the light-emitting module is locked, so that the picture block to be compared falls within the respective preset picture block range.
- the preset block range of the block of the module Calculate the preset block range of the block of the module to be compared on the image capture mechanism based on the block of the reference module on the image capture mechanism, and then compare the block of the block to be compared from the image capture with the preset block range , To determine whether there is a deviation, that is, whether it falls within the preset block range, use the relationship between the deviation and the diffraction angle after the dispersive element, and then convert it into wavelength according to the grating equation, and use the relationship between wavelength and Bragg grating temperature to convert it into For the temperature difference, the locked wavelength can be adjusted by adjusting the temperature of the Bragg grating; the beam combining method is simple, and the adjustment is quick and effective.
- FIG. 1 is a structural diagram of the light-emitting module of this application directly outputting laser light and the beam combining element is a transmissive grating;
- FIG. 2 is a structural diagram of the light-emitting module of this application directly outputting laser light and the beam combining element is a reflective grating;
- FIG. 3 is a structural diagram of the light-emitting module of this application in which the laser is coupled into the optical fiber to realize the pigtail output and the beam combining element is a transmissive grating;
- FIG. 4 is a structural diagram of the light-emitting module of this application in which the laser is coupled into the optical fiber to realize the pigtail output and the beam combining element is a reflective grating;
- Figure 5 is a structural diagram of the light-emitting module of this application.
- Figure 6 is a schematic diagram of the light path of the light-emitting module of this application.
- FIG. 7 is a structural diagram of the temperature control element of this application.
- FIG. 8 is a schematic structural diagram of the theoretical position range of the blocks on the image acquisition mechanism of the light-emitting module of this application;
- FIG. 9 is a schematic structural diagram of the light-emitting module of the application when the block to be compared on the image acquisition mechanism is shifted to the left;
- FIG. 10 is a schematic diagram of the structure of the light-emitting module of the application when the block to be compared on the image acquisition mechanism is shifted to the right.
- 1-light-emitting module 100-reference light-emitting module; 101-10N-light-emitting module; 101'-10N'-light-emitting module; 11-laser unit; 111-11n-laser single tube chip; 12-fast-axis collimating lens; 121 -12n-fast-axis collimating lens; 13-slow-axis collimating lens; 131-13n-slow-axis collimating lens; 14-reflection mirror; 141-14n-reflection mirror; 15-light exit hole; 16-Bragg grating; 17 -Temperature control device; 18-heat conducting glass; 19-wire;
- connection should be interpreted broadly unless otherwise clearly specified and limited.
- it can be a fixed connection or a detachable connection. Connected or integrally connected; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication between two components.
- connection should be interpreted broadly unless otherwise clearly specified and limited.
- it can be a fixed connection or a detachable connection. Connected or integrally connected; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication between two components.
- the beam combining device of the VBG grating external cavity laser module of this embodiment includes multiple light emitting modules 1, a focusing optical element 2, a beam combining element 3, a beam splitting element 4, and a dispersive element 5.
- the beam splitting element 4 divides the combined light into reflected light and transmitted light, part of the combined light passes through the beam splitting element 4 for output, and the other part of the combined light reflects To the dispersive element 5 on the optical path of the reflected light, the dispersive element 5 disperses the combined light into dispersed light consistent with the relative positional relationship of the laser of each wavelength between the focusing optical element 2 and the combining element 3, that is, the light-emitting module 1
- the exit angle ⁇ n of the output light after passing through the dispersive element 5 forms a one-to-one correspondence with the incident angle ⁇ n on the beam combining element 3.
- the first light-emitting module is incident on the beam combining element 3 at an incident angle ⁇ 1 , in the angle beta] 1 from the dispersive element exit, the N-th light emitting modules incident angle [alpha] N incident beam combining element 3 to an angle beta] N from the dispersive element emitted; each of the light emitting module output light is a laminated beam elements 3
- the light beams after being dispersed by the dispersive element 5 form parallel spaced light under the transforming action of the transforming optical element 6, and the output light wavelength of each light-emitting module 1 is formed on the image acquisition mechanism 7 on the exit surface of the transforming optical element 6. Corresponding tiles.
- the light-emitting modules in this application are two, three, four, five, etc., and the specific number is not limited. One of them is used as a reference module, and the other light-emitting modules are set symmetrically on the upper and lower sides of the reference module with reference to the reference module. It can also be that all other light-emitting modules are arranged on the upper side or all on the lower side of the reference module.
- the center wavelength of each light-emitting module 1 after being wavelength-locked by the Bragg grating 16 is different; for example, the center wavelength of the output light of the reference light-emitting module 100 after being wavelength-locked by the Bragg grating 16 ⁇ 0 , the center wavelength of the output light of the light-emitting module 101 is ⁇ 1 , the center wavelength of the output light of the light-emitting module 101 ′ is ⁇ -1, the center wavelength of the output light of the light - emitting module 10N is ⁇ N , and the output light center of the light-emitting module 10N′
- the wavelength is ⁇ -N, and the center wavelength of other light-emitting modules can be deduced by analogy.
- the Bragg grating 16 of the present application is a vertical reflective Bragg grating, the reflectivity is in the range of 10% to 30%, the reflection bandwidth is less than 1 nm, the temperature drift coefficient is about 0.01 nm/°C, and the temperature and wavelength are linearly related to meet the following relationships formula:
- ⁇ (T) is the central wavelength at the temperature T
- ⁇ 0 is the central wavelength at the temperature T 0
- 0.01 is the coefficient of wavelength drift with temperature, in nm/°C
- the beam splitting element 4 of the present application may be an existing non-polarization flat beam splitter, or a cube type, which is not specifically limited.
- the main purpose is to divide the output light emitted by the light-emitting module into two beams of reflected light and transmitted light.
- the specific structure and working principle are not described and limited here, and can be selected according to actual needs.
- the light-emitting module 1 of the present application is a square box-shaped laser module with a laser unit 11 for emitting laser light.
- the laser unit 11 is a single-tube laser chip, arranged in steps in the fast axis direction.
- the upper side of the light emitting module 1 (the upper left corner as shown in Fig. 1) is provided with a light exit hole 15 for emitting laser light.
- the reflective surfaces of the multiple reflectors 14 are arranged toward the light exit hole 15, and the reflector A Bragg grating 16 is arranged between 14 and the light exit hole 15, and the Bragg grating 16 is connected to a temperature control device 17 through a heating element.
- the multiple laser units 11 in each light-emitting module 1 are arranged side by side in the slow axis direction, that is, in the horizontal direction, and are arranged in steps along the fast axis direction, that is, in the vertical direction; specifically, as shown in FIG.
- each light-emitting module 1 includes multiple The single-tube laser chips 111-11n, and multiple single-tube laser chips 111-11n are arranged on the multi-level steps in a one-to-one correspondence, arranged in a step array and the height difference between two adjacent laser single-tube chips is equal;
- the exit surface of the tube chip is provided with a collimating system and a mirror in sequence.
- the collimating system includes a fast axis collimating lens and a fast axis collimating lens arranged in sequence along the exit surface of a single laser tube chip for compressing the divergence angle in the fast axis direction of the laser.
- a slow-axis collimating lens used to compress the divergence angle of the slow-axis direction of the laser.
- the reflecting mirror 14 is arranged on the exit surface of the slow-axis collimating lens, and a plurality of reflecting mirrors 14 are correspondingly arranged on another row of multi-step steps.
- the steps are arranged, and the height difference between two adjacent mirrors 14 is also equal; the light emitted by multiple laser single-tube chips is completely collimated by the collimating system, and moves in the fast axis direction under the action of the corresponding mirrors.
- a larger number of single-tube laser chips can be arranged in a smaller space.
- the reflector 14 is a 45-degree reflector and is arranged perpendicular to the horizontal plane, and is at 45° with the optical axis of the collimating system composed of the fast-axis collimator lens and the slow-axis collimator lens.
- the multiple reflectors 14 are arranged to realize multiple semiconductor lasers.
- the laser light emitted by the tube chip is combined spatially, and forms a spatially combined beam after the action of the reflector 14.
- the spatially combined beam is incident on the Bragg grating 16, a part of the spatially combined light passes through the Bragg grating 16 as the output light, and the other part serves as the output light.
- the feedback light returns to the inside of the laser single-tube chip to lock the wavelength of the laser emitted by the semiconductor laser single-tube chip.
- the Bragg grating 16 and the laser single-tube chip form an external cavity.
- the feedback light forms a mode competition inside the chip to achieve wavelength Select so that the light-emitting module 1 outputs at a locked wavelength.
- the front cavity surface of the laser single tube chip of the present application is plated with an anti-reflection film chip, but it is not specifically limited.
- the fast-axis collimating lens 12 and the slow-axis collimating lens 13 of the present application are collimating lenses currently on the market, and their specific structures and working principles are not described and limited herein, and can be selected according to actual needs.
- the fast-axis collimator lens 12 and the slow-axis collimator lens 13 of the present application are both coated with anti-reflection coatings. Due to the reduction of beam reflection, the transmittance after coating should be within the range of the wavelength of the laser chip's beam. More than 99%, there is no limitation.
- the principle of the light path of the light-emitting module 1 of the present application is shown in FIG. 6, the laser light emitted by the laser single tube chip 111 is collimated by the fast axis collimating lens 121 in the fast axis direction, and the light collimated in the fast axis direction reaches the slow axis collimation.
- the light collimated in the fast axis direction is collimated in the slow axis direction by the slow axis collimating lens 131 to become a fully collimated light, and the completely collimated light is reflected by the exit surface of the slow axis collimating lens 131 141 is reflected and emitted from the module; the light emitted from the laser single-tube chip 112 with a step height difference with the laser single-tube chip 111 is collimated by the fast-axis collimating lens 122 and the slow-axis collimating lens 132 and then reaches the mirror 142, and is reflected
- the mirror 142 and the reflector 141 also have a step height difference.
- the light emitted by the laser single tube chip 112 is emitted by the reflector 142 and then passes over the reflector 141 to achieve beam combination with the light emitted by the laser single tube chip 111 in the fast axis direction.
- the laser light emitted by a single laser tube chip arranged in multiple steps is spatially combined to form the output light of the light emitting module 1.
- Each light-emitting module 1 includes multiple laser single-tube chips.
- the multiple laser single-tube chips are arranged in a step height difference. More semiconductor laser single-tubes can be integrated in a smaller space. After the light beams are spatially combined, they can be directly output or coupled into the optical fiber 8 through an aspherical focusing lens (not shown) to form a pigtail light emitting module, thereby having a larger output power.
- the beam combining element 3 of the present application is a grating, which is set toward the convex surface of the Fourier transform lens.
- the polarization of the beam combining element 3 should be consistent with the polarization of the light beam emitted by the light emitting module; the diffraction efficiency of the grating should be above 90% in the corresponding polarization direction ;
- the center wavelength of the grating is in the range of ⁇ 0 ⁇ n ; the grating is placed at a blaze angle relative to the optical axis; it can be a transmissive grating or a reflective grating.
- the dispersive element 5 of the present application is a grating, and the center wavelength of the grating is in the range of ⁇ 0 to ⁇ n ; it can be a transmissive grating or a reflective grating. Its structure and working principle are not described and limited here, and can be based on actual conditions. Need to choose.
- the combining element 3 and the dispersing element 4 of the present application are placed at respective blaze angles relative to the optical axis; for example, the output light of each light-emitting module 1 passes through the combining element 3 and the combined light combined with the combining element 3 has a diffraction angle ⁇ Littrow exits, a part of the outgoing beam after the beam splitting element 4 is incident on the dispersing element 5 at a diffraction angle ⁇ Littrow ; the two diffraction angles can be equal or unequal, depending on the combining element 3 and the dispersing element 5 Whether it is the same grating, if it is the same grating, the diffraction angles of the two are equal; if they are not the same grating, they are not equal; correspondingly, when the beam combining element 3 and the dispersive element 5 are the same grating, the light-emitting module 1
- the incident angle ⁇ n of the output light incident on the beam combining element 3 is equal to the exit angle
- the beam combining element 3 and the dispersive element 5 of the present application can be both transmissive gratings and reflective gratings at the same time.
- One of the transmissive gratings and the other reflective grating can also be used.
- the specific selection is not limited, as long as it can be realized After combining the beams, disperse again; as shown in Figures 1 to 4, the output light of the light-emitting module located above the reference module 100 passes through the combining element 3, the light splitting element 4 and the dispersing element 5, and the exit direction is to the right, and is located at After the output light of the light emitting module under the reference module 100 passes through the combining element 3, the light splitting element 4, and the dispersing element 5, the exit direction is to the left.
- the focusing optical element 2 of the present application is a Fourier transform lens.
- the Fourier transform lens is a cylindrical lens with a flat surface and a convex surface. The flat side faces the light-emitting module 1 and the convex side faces away from the light-emitting module 1 and faces the combining element. 3 settings.
- the specific structure and working principle are not described and limited here, and Fourier transform lenses with different focal lengths can be selected according to actual needs. For example, it is known from the above formula that in order to obtain more beam combining units within the same spectral width, a long focal length Fourier transform lens can be selected, which can be selected according to actual needs.
- the focusing optical element 2 of the present application may also be other common focusing optical elements, as long as it can achieve focusing and incident laser light of different wavelengths emitted by different light-emitting modules to the beam combining element.
- the conversion optical element 6 of the present application is an existing ordinary conversion cylindrical lens, as long as it can transform the sub-beams with different exit angles dispersed by the dispersive element 5 into parallel sub-beams.
- the specific structure and principle will not be described. limited.
- the temperature control device 17 of the present application includes a temperature adjustment element, which is connected to the Bragg grating 16; a temperature detection element (not shown), used to detect the temperature of the Bragg grating 16; a controller (not shown), and the temperature adjustment element and The temperature detection elements are electrically connected, and the controller controls the heating or cooling of the heating element according to the detection signal of the temperature detection element; the temperature adjustment element includes a heating element or a refrigeration element; when the temperature needs to be raised, the heating element is turned on; when the temperature needs to be cooled, it is turned on Refrigeration components. As shown in FIG.
- the temperature control device 16 of the present application is a common TEC temperature control device on the existing market, and its specific structure and working principle are not described and limited here, and it is in contact with the Bragg grating 16 through the thermally conductive glass 18 , Is electrically connected to the controller through a wire 19, the controller is connected to the image acquisition mechanism 7, and a closed loop connection is formed between the image acquisition mechanism 7 and the Bragg grating 16; the output light of the light-emitting module 1 is collected by the image acquisition mechanism 7 in the image acquisition mechanism The above imaging block is compared with the preset block range to determine whether there is a deviation.
- the controller converts the deviation into the wavelength deviation of the laser emitted by the light-emitting module 1, and then converts it into the Bragg grating corresponding to the light-emitting module 1.
- the temperature deviation of the Bragg grating 16 and the wavelength the temperature difference between the Bragg grating 16 of the light-emitting module 1 and the preset Bragg grating 16 is obtained, and the temperature of the Bragg grating 16 is adjusted by the temperature control device 17
- the temperature causes the wavelength of the laser light emitted by the light-emitting module 1 to reach the preset wavelength range, and wavelength locking is achieved.
- the image acquisition mechanism 7 of the present application is a CCD, such as a linear CCD or an area CCD, which is not particularly limited. Of course, it can also be other image acquisition devices in the prior art. The specific structure and working principle of the image acquisition device are not described here. Definition and description.
- the dispersion characteristics of the grating, the n-th emission center wavelength modules need to be locked in the [lambda] n, the n-th light emitting modules lock the wavelength [lambda] n and the reference reference module
- the lock wavelength ⁇ 0 corresponding to 100 satisfies the following geometric relationship:
- ⁇ 0 is the center wavelength of the reference light-emitting module
- ⁇ n is the center wavelength of the n-th light-emitting module
- d is the grating period of the grating
- p is the interval of the light-emitting module
- f TL is the focal length of the focusing optical element
- ⁇ Ltirrow is the grating Flare angle
- the wavelength and incident angle satisfy the following geometric relationship
- ⁇ n is the center wavelength of the output light of the nth light-emitting module
- ⁇ n is the incident angle of the output light of the nth light-emitting module to the beam combining element 3
- ⁇ Littrow is the grating blaze angle of the beam combining element 3.
- the center wavelength of the output light of the nth light-emitting module needs to be locked at ⁇ n , and the locked wavelength is calculated as
- the combined beam wavelength interval is proportional to the grating period and the light-emitting module interval, and inversely proportional to the focal length of the focusing optical element; therefore, the combined beam wavelength interval can be reduced by selecting a long focal length focusing optical element method, so that the More beam combining units can be accommodated in the same wide spectral range, thereby providing system power and increasing the output beam brightness of the system.
- the beam combining element 3 of this system is a transmissive grating.
- the transmissive grating is placed at a blaze angle ⁇ Littrow relative to the optical axis.
- the laser light emitted by the n laser chips 11 of the n light-emitting modules passes through the collimation system. After being completely collimated, the beams are combined in the fast axis direction by the reflection mirror to reach the Bragg grating 16, and the wavelength is locked by the Bragg grating 16 and output from the light exit 15 to the Fourier transform lens.
- different light-emitting modules 1 The position information of the emitted lasers of different wavelengths is converted into angle information and then focused and incident on the surface of the transmissive grating at different incident angles ⁇ n . Under the action of the transmissive grating, different sub-beams have the same diffraction angle ⁇ Littrow (combined beam). The grating blaze angle of element 3) is output to form combined light. The combined light irradiates the surface of the beam splitter 4, and is divided into reflected light and transmitted light under the action of the beam splitter 4.
- the transmitted light passes through the beam splitter 4 and is output, and the reflected light passes through after the reflective spectral element 4 at an incident angle ⁇ Littrow (dispersive element 5 of the grating blaze angle) is incident to the grating surface; under the action of the dispersion grating redispersed into sub-beams at different angles, ⁇ n of each sub-beam output, converting incident
- the optical element 6 forms parallel light output of each sub-beam under the action of the transforming optical element 6 and vertically imaged it on the CCD, forming evenly spaced blocks on the CCD.
- the transmissive grating of the present application is a transmissive grating on the existing market, and its specific structure and working principle are not limited and described herein, and can be selected according to actual needs.
- the beam combining element 3 of this system is a reflective grating.
- the reflective grating is placed at a blaze angle ⁇ Littrow relative to the optical axis.
- the laser light emitted by the n laser chips 11 of the n light-emitting modules 1 is collimated After the system is fully collimated, the beams are combined in the fast axis direction by the reflection mirror, and then reach the Bragg grating 16. After the wavelength is locked by the Bragg grating 16, the output from the light hole 15 to the Fourier transform lens will be different after Fourier transform.
- each beam has the same reflection angle ⁇ Littrow ( The grating blaze angle of the beam combining element is output to form combined light.
- the combined light is reflected to the surface of the beam splitting element 4, and is divided into reflected light and transmitted light under the action of the beam splitting element 4.
- the transmitted light is output through the beam splitting element, and the reflected light passes through
- the beam splitting element 4 is also incident on the grating surface with ⁇ Littrow (the grating blaze angle of the dispersive element) after reflection, and is re-dispersed into sub-beams of different angles under the action of the dispersion of the grating, and each sub-beam is output as ⁇ n and incident to the transformation optical element 6.
- the sub-beams are formed into parallel light output and vertically imaged on the CCD, forming equally spaced blocks on the CCD.
- the reflective grating of the present application is a reflective grating on the existing market, and its specific structure and working principle are not limited and described herein, and can be selected according to actual needs.
- the above ⁇ Littrow and ⁇ Littrow are equal when the beam combining element 3 and the dispersive element 5 are the same grating, and are not equal when they are not the same grating; in the same way, the above ⁇ n and ⁇ n beam combining element 3 and the dispersive element 5 are It is equal when the same grating is used, and different when it is not the same grating.
- the beam combining method of this implementation is based on the beam combining device of the Bragg grating external cavity laser module in Embodiment 1, as shown in FIG. 1 to FIG. 10, and includes the following steps:
- the image includes a reference block and a number of blocks to be compared, where the reference block corresponds to the laser light of the output wavelength ( ⁇ 0 ) of the reference light-emitting module 100 (the light-emitting module labeled ⁇ 0 in FIG. 1 ), to be compared
- the blocks correspond to the lasers of the output wavelengths of other light-emitting modules (the light-emitting modules marked ⁇ 1 - ⁇ N and ⁇ -1 - ⁇ -N in Figure 1);
- the block to be compared exceeds the range of the respective preset block, adjust the lock wavelength of the Bragg grating in the light-emitting module corresponding to the block to be compared, so that the block to be compared falls into the range of the respective preset block Inside.
- the difference between the block to be compared and the respective preset block is not more than 2 pixels, it indicates that the block to be compared falls within the range of the respective preset block.
- the locked wavelength of the Bragg grating can be adjusted.
- the distance between the reference tile and its neighboring preset tile is different from any neighboring preset tile. The spacing between them is equal.
- the above-mentioned preset block range can be used for each block to be compared and the reference block To describe the location interval.
- the combined light beam combined by the beam combining element 3 and the beam combining element are emitted at a diffraction angle ⁇ Littrow , and a part of the outgoing beam after the action of the beam splitting element 4 is incident on the dispersive element 5 at ⁇ Littrow .
- the light-emitting module to be compared (the light-emitting module whose output wavelength is ⁇ 1 - ⁇ N and ⁇ -1 - ⁇ -N is marked in the figure) is up and down relative to the reference light-emitting module 100 (the light-emitting module whose output wavelength is ⁇ 0 is marked in the figure) Symmetrical arrangement, the block to be compared formed on the image acquisition mechanism 7 by the output light of the module to be compared is symmetrical with respect to the reference block on the image acquisition mechanism 7 of the output light of the reference reference module 100; by the above formula (7 ) It is known that the locked wavelength of the output light of the light-emitting module 1 decreases by ⁇ from top to bottom, and the corresponding wavelength of the corresponding block on the image acquisition mechanism 7 also gradually decreases by ⁇ from left to right. The corresponding wavelengths of the tiles are equally spaced, so the intervals between adjacent tiles are also equal;
- the theoretical interval value p 0 between adjacent blocks can be calculated, and thus, the preset block range of the block to be compared on the image acquisition mechanism 7 of each module to be illuminated can be obtained;
- the light-emitting module with the locked wavelength ⁇ 0 as a reference, and its block on the image acquisition mechanism 7 is used as a reference block.
- the theoretical interval between the block to be compared and the reference block is pre-existed in the controller Inside.
- the imaged blocks of the output light of the light-emitting module on the image acquisition mechanism are all in the theoretical position, that is, the imaged blocks of the output light of each light-emitting module on the image acquisition mechanism are all within the preset block range .
- the image acquisition mechanism 7 collects the actual image information of the blocks of each light-emitting module 1.
- the image acquisition mechanism processes the actual image information, converts the image information into position information, and obtains the processed image.
- the image acquisition mechanism 7 collects each light-emitting module.
- the actual position information of the blocks of module 1 is fed back to the controller, and the controller analyzes the actual intervals between the blocks to be compared and the reference blocks of each light-emitting module to be compared; the actual blocks of the reference blocks are collected
- the controller performs calculation and analysis to obtain the preset block range of each module to be compared.
- the controller compares the actual block of each light-emitting module to be compared with the corresponding preset block range to determine the actual picture Whether the block falls within the preset block range, that is, whether there is a deviation from the preset block range, the controller converts the block deviation into the wavelength deviation of the output light of the light-emitting module corresponding to the block, and then according to the Bragg grating 16
- the temperature drift characteristic converts the wavelength deviation into the temperature deviation, and then obtains the specific values of whether the temperature should rise or fall, and the rise and fall, and then the controller controls the temperature control device 17 to adjust the temperature of the Bragg grating 16 to realize the adjustment and realize multiple light-emitting modules ⁇ .
- the block to be compared of the nth light-emitting module read by the controller has a deviation from the preset block range, and suppose this deviation is L (left deviation is a negative value, as shown in Figure 9; right deviation is a positive value, As shown in Figure 10), it can be seen from the characteristics of the grating that the diffraction angle of the output light of the light-emitting module 1 to be compared at the dispersive element 5 is set to ⁇ n ', according to the geometric relationship
- the controller compares the actual locked wavelength with the theoretically calculated locking wavelength of the light-emitting module (calculated by the above formula (8));
- the geometric relationship between the temperature and the wavelength of the Bragg grating 16 in the above embodiment 1 is converted from the wavelength deviation to the temperature deviation.
- the light-emitting module is obtained
- the actual temperature of the Bragg grating 16 of 1 is then compared with the preset temperature to obtain specific values of whether the temperature should increase or decrease, and the increase and decrease;
- the temperature of the Bragg grating 16 is adjusted by the temperature control device 17 to raise or lower the temperature to adjust the lock wavelength of the corresponding light-emitting module 1.
- the temperature detection element detects the actual temperature of the Bragg grating 16, and the controller controls the temperature according to the calculated and analyzed temperature difference.
- the heating or cooling element is turned on, and the heat is transferred to the Bragg grating 16 through the thermally conductive glass; when the temperature detecting element detects that the temperature of the Bragg grating 16 reaches the preset value, the controller controls the heating or cooling element to turn off; the thermally conductive element is in contact with the Bragg grating Heat exchange occurs.
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
Description
Claims (10)
- 一种布拉格光栅外腔激光器模块合束装置,包括至少两个间隔且并排布置的发光模块(1),任一所述发光模块(1)包括激光单元(11),及用于接收所述激光单元(11)发射出的激光的布拉格光栅(16);其中,一个所述发光模块(1)作为基准发光模块(100);设在所有所述发光模块(1)的输出光路上的聚焦光学元件(2);设在所述聚焦光学元件(2)的输出光路的聚焦位置处的合束元件(3);其特征在于,还包括分光元件(4),设在所述合束元件(3)的输出光路上;色散元件(5),设在所述分光元件(4)的任一输出光路上,用于将合束光分散为与所述聚焦光学元件(2)和所述合束元件(3)之间的各个波长的激光相对位置关系一致的分散光;变换光学元件(6),设在所述色散元件(5)的输出光路上,用于将所述分散光透射为平行光;图像采集机构(7),设在所述变换光学元件(6)的输出光路上,用于采集所述变换光学元件(6)的输出光路上的平行光照射的图块。
- 根据权利要求1所述的一种布拉格光栅外腔激光器模块合束装置,其特征在于,所述发光模块(1)为至少三个,所有所述发光模块(1)等间距并列排布。
- 根据权利要求1或2所述的一种布拉格光栅外腔激光器模块合束装置,其特征在于,所述合束元件(3)和所述色散元件(5)均为光栅。
- 根据权利要求3所述的一种布拉格光栅外腔激光器模块合束装置,其特征在于,所述合束元件(3)和所述色散元件(5)均为透射式光栅或反射式光栅,所述合束光经所述合束元件(3)的衍射角为所述合束元件(3)的光栅闪耀角,所述合束光入射至所述色散元件(5)的入射角为所述色散元件(5)的光栅闪耀角。
- 根据权利要求1-4任一项所述的一种布拉格光栅外腔激光器模块合束装置,其特征在于,任一所述发光模块还包括设在所述布拉格光栅(16)的输出光路上的光纤(8)。
- 根据权利要求1-5中任一项所述的一种布拉格光栅外腔激光器模块合束装置,其特征在于,还包括温控装置(17),所述温控装置(17)包括调温元件,设在所述布拉格光栅(16)上;温度检测元件,用于检测所述布拉格光栅(16)的温度;控制器,与所述调温元件和所述温度检测元件均电连接,所述控制器根据所述温度 检测元件的检测信号,控制所述调温元件的升温或降温。
- 一种基于权利要求1-6任一项所述的布拉格光栅外腔激光器模块合束装置的合束方法,其特征在于,包括以下步骤:获取图像,所述图像包括参考图块及若干个待比较图块,其中所述参考图块对应于所述基准发光模块的输出波长的激光,所述待比较图块与其他的所述发光模块的输出波长的激光一一对应;基于所述参考图块,获取各个待比较图块各自对应的预设图块范围;将任一所述待比较图块与各自对应的预设图块范围比较;判断所述待比较图块是否落入各自对应的预设图块范围内;若待比较图块超出各自对应的预设图块范围外,调整该所述待比较图块对应的所述发光模块中布拉格光栅的锁定波长,以使该所述待比较图块落入各自对应的预设图块范围内。
- 根据权利要求7所述的布拉格光栅外腔激光器模块合束装置的合束方法,其特征在于,在判断所述待比较图块是否落入各自对应的预设图块范围内的步骤中,待比较图块与各自对应的预设图块的偏差不大于2个像素点,则表明所述待比较图块落入各自对应的预设图块范围内。
- 根据权利要求7或8所述的布拉格光栅外腔激光器模块合束装置的合束方法,其特征在于,在所述若待比较图块超出各自对应的预设图块范围外,调整该所述待比较图块对应的所述发光模块中布拉格光栅的锁定波长的步骤中,通过调整该所述待比较图块对应的所述发光模块中布拉格光栅的温度,以调整该所述布拉格光栅的锁定波长。
- 根据权利要求7-9中任一项所述的布拉格光栅外腔激光器模块合束装置的合束方法,其特征在于,在基于所述参考图块,获取各个待比较图块各自对应的预设图块范围的步骤中,所述参考图块与其相邻的预设图块之间的间距,与任意相邻的预设图块之间的间距相等。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US17/622,964 US11631966B2 (en) | 2019-06-27 | 2020-05-29 | Beam combining device and beam combining method for Bragg grating external-cavity laser module |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910569713.2 | 2019-06-27 | ||
CN201910569713.2A CN110323672B (zh) | 2019-06-27 | 2019-06-27 | 一种布拉格光栅外腔激光器模块合束装置及合束方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2020259198A1 true WO2020259198A1 (zh) | 2020-12-30 |
Family
ID=68120501
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/CN2020/093137 WO2020259198A1 (zh) | 2019-06-27 | 2020-05-29 | 一种布拉格光栅外腔激光器模块合束装置及合束方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US11631966B2 (zh) |
CN (1) | CN110323672B (zh) |
WO (1) | WO2020259198A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115096177A (zh) * | 2022-01-06 | 2022-09-23 | 同济大学 | 一种用子光束位置监测激光合束系统光束的装置及方法 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110323672B (zh) * | 2019-06-27 | 2020-12-01 | 苏州长光华芯光电技术有限公司 | 一种布拉格光栅外腔激光器模块合束装置及合束方法 |
CN110854674A (zh) * | 2019-10-31 | 2020-02-28 | 苏州长光华芯光电技术有限公司 | 一种半导体激光器光栅外腔光谱合束装置 |
CN110854654B (zh) * | 2019-11-18 | 2021-06-15 | 无锡锐科光纤激光技术有限责任公司 | 一种半闭环控制激光器 |
CN112652950B (zh) * | 2020-11-26 | 2021-12-14 | 苏州长光华芯光电技术股份有限公司 | 一种波长锁定半导体激光器系统 |
CN112531462B (zh) * | 2020-12-04 | 2021-12-03 | 苏州长光华芯光电技术股份有限公司 | 一种布拉格光栅外腔半导体激光器模块合束装置 |
CN112993747B (zh) * | 2021-02-08 | 2022-05-27 | 苏州长光华芯光电技术股份有限公司 | 一种波长锁定半导体激光器系统 |
CN113644544B (zh) * | 2021-08-11 | 2022-09-06 | 苏州长光华芯光电技术股份有限公司 | 一种波长锁定半导体激光器系统 |
CN114243452A (zh) * | 2022-02-24 | 2022-03-25 | 深圳市星汉激光科技股份有限公司 | 一种半导体激光器的互锁光路 |
CN115128820B (zh) * | 2022-08-30 | 2022-11-08 | 中国科学院长春光学精密机械与物理研究所 | 啁啾反射式体布拉格光栅反馈的光谱合束装置及方法 |
CN115995756A (zh) * | 2023-03-23 | 2023-04-21 | 苏州长光华芯半导体激光创新研究院有限公司 | 一种波长锁定系统和波长锁定方法 |
JP7387077B1 (ja) * | 2023-04-24 | 2023-11-27 | 三菱電機株式会社 | レーザ装置およびレーザ加工機 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030206336A1 (en) * | 2002-05-02 | 2003-11-06 | Fujitsu Limited | Variable wavelength light source apparatus and optical amplifier using same |
CN1658453A (zh) * | 2004-02-18 | 2005-08-24 | 中国科学院半导体研究所 | 混合集成的可调谐半导体激光器 |
CN103078253A (zh) * | 2012-12-28 | 2013-05-01 | 西安炬光科技有限公司 | 一种窄光谱高功率半导体激光器耦合装置及方法 |
CN103904557A (zh) * | 2014-03-25 | 2014-07-02 | 中国科学院半导体研究所 | 激光器合束装置和方法 |
CN104901149A (zh) * | 2015-05-05 | 2015-09-09 | 中国科学院上海光学精密机械研究所 | 基于三块衍射光栅的光谱合束系统 |
CN105140769A (zh) * | 2015-09-28 | 2015-12-09 | 湖北航天技术研究院总体设计所 | 一种光谱合成光束重叠检测调整装置 |
CN108254930A (zh) * | 2018-03-19 | 2018-07-06 | 谱诉光电科技(苏州)有限公司 | 色散分光型滤光方法及装置 |
CN110323672A (zh) * | 2019-06-27 | 2019-10-11 | 苏州长光华芯光电技术有限公司 | 一种布拉格光栅外腔激光器模块合束装置及合束方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8526110B1 (en) * | 2009-02-17 | 2013-09-03 | Lockheed Martin Corporation | Spectral-beam combining for high-power fiber-ring-laser systems |
WO2011130131A1 (en) * | 2010-04-12 | 2011-10-20 | Lockheed Martin Corporation | Beam diagnostics and feedback system and method for spectrally beam-combined lasers |
CN103441419A (zh) * | 2013-08-30 | 2013-12-11 | 中国科学院上海光学精密机械研究所 | 基于达曼光栅的光纤激光全光反馈被动相干合束系统 |
US11646549B2 (en) * | 2014-08-27 | 2023-05-09 | Nuburu, Inc. | Multi kW class blue laser system |
-
2019
- 2019-06-27 CN CN201910569713.2A patent/CN110323672B/zh active Active
-
2020
- 2020-05-29 WO PCT/CN2020/093137 patent/WO2020259198A1/zh active Application Filing
- 2020-05-29 US US17/622,964 patent/US11631966B2/en active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030206336A1 (en) * | 2002-05-02 | 2003-11-06 | Fujitsu Limited | Variable wavelength light source apparatus and optical amplifier using same |
CN1658453A (zh) * | 2004-02-18 | 2005-08-24 | 中国科学院半导体研究所 | 混合集成的可调谐半导体激光器 |
CN103078253A (zh) * | 2012-12-28 | 2013-05-01 | 西安炬光科技有限公司 | 一种窄光谱高功率半导体激光器耦合装置及方法 |
CN103904557A (zh) * | 2014-03-25 | 2014-07-02 | 中国科学院半导体研究所 | 激光器合束装置和方法 |
CN104901149A (zh) * | 2015-05-05 | 2015-09-09 | 中国科学院上海光学精密机械研究所 | 基于三块衍射光栅的光谱合束系统 |
CN105140769A (zh) * | 2015-09-28 | 2015-12-09 | 湖北航天技术研究院总体设计所 | 一种光谱合成光束重叠检测调整装置 |
CN108254930A (zh) * | 2018-03-19 | 2018-07-06 | 谱诉光电科技(苏州)有限公司 | 色散分光型滤光方法及装置 |
CN110323672A (zh) * | 2019-06-27 | 2019-10-11 | 苏州长光华芯光电技术有限公司 | 一种布拉格光栅外腔激光器模块合束装置及合束方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115096177A (zh) * | 2022-01-06 | 2022-09-23 | 同济大学 | 一种用子光束位置监测激光合束系统光束的装置及方法 |
CN115096177B (zh) * | 2022-01-06 | 2023-08-04 | 同济大学 | 一种用子光束位置监测激光合束系统光束的装置及方法 |
Also Published As
Publication number | Publication date |
---|---|
CN110323672A (zh) | 2019-10-11 |
US20220271501A1 (en) | 2022-08-25 |
US11631966B2 (en) | 2023-04-18 |
CN110323672B (zh) | 2020-12-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2020259198A1 (zh) | 一种布拉格光栅外腔激光器模块合束装置及合束方法 | |
WO2018010224A1 (zh) | 一种激光合束装置 | |
US9391713B2 (en) | High brightness dense wavelength multiplexing laser | |
US7873091B2 (en) | Laser diode illuminator device and method for optically conditioning the light beam emitted by the same | |
WO2014115194A1 (ja) | 光源、光源ユニットおよびそれを用いた光源モジュール | |
JP6157194B2 (ja) | レーザ装置および光ビームの波長結合方法 | |
CN104049445A (zh) | 发光装置及投影系统 | |
WO2016035349A1 (ja) | レーザー光学装置及び画像投影装置 | |
CN102208753A (zh) | 多波长联合外腔半导体激光器 | |
CN214044331U (zh) | 一种蓝光多单管平行双光栅外腔反馈合束装置 | |
US7769068B2 (en) | Spectral-narrowing diode laser array system | |
CN103197422A (zh) | 一种基于双光栅的波长可调谐激光相干合束系统 | |
US20220320829A1 (en) | Wavelength beam combining device including output control unit for controlling light source unit to have variable output | |
CN113644544B (zh) | 一种波长锁定半导体激光器系统 | |
Romanova et al. | Design of an optical illumination system for a tunable source with acousto-optical filtering | |
CN102868089B (zh) | 利用单光栅外腔反馈实现多半导体激光合束的装置及方法 | |
US20210184429A1 (en) | Laser device | |
CN111326952A (zh) | 基于片上调控半导体激光芯片的光谱合束装置 | |
JP2008511131A (ja) | ダイオードレーザ | |
CN111694160A (zh) | 一种激光光源装置 | |
JP2014120621A (ja) | 半導体レーザ装置 | |
CN113948970A (zh) | 一种基于后腔外腔光谱调控的光谱合束装置 | |
CN219086442U (zh) | 自适应反馈等光程蓝光半导体激光单管阵列光谱合束装置 | |
CN114465088B (zh) | 一种波长锁定系统 | |
CN114813050B (zh) | 一种多模蓝光单管激光模式测量装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 20831726 Country of ref document: EP Kind code of ref document: A1 |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 20831726 Country of ref document: EP Kind code of ref document: A1 |
|
32PN | Ep: public notification in the ep bulletin as address of the adressee cannot be established |
Free format text: NOTING OF LOSS OF RIGHTS PURSUANT TO RULE 112(1) EPC (EPO FORM 1205A DATED 25.05.2022) |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 20831726 Country of ref document: EP Kind code of ref document: A1 |