WO2020253930A1 - Procédé et dispositif pour percer des pièces - Google Patents

Procédé et dispositif pour percer des pièces Download PDF

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Publication number
WO2020253930A1
WO2020253930A1 PCT/EP2019/000186 EP2019000186W WO2020253930A1 WO 2020253930 A1 WO2020253930 A1 WO 2020253930A1 EP 2019000186 W EP2019000186 W EP 2019000186W WO 2020253930 A1 WO2020253930 A1 WO 2020253930A1
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WO
WIPO (PCT)
Prior art keywords
bore
drilling
hole
laser radiation
area
Prior art date
Application number
PCT/EP2019/000186
Other languages
German (de)
English (en)
Inventor
Wolfgang Schulz
Torsten HERMANNS
Stefan Janssen
Ryu SUZUKI
Hideki Moriai
Original Assignee
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Rheinisch-Westfälische Technische Hochschule Aachen
Mitsubishi Heavy Industries Aeronautic Engines Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., Rheinisch-Westfälische Technische Hochschule Aachen, Mitsubishi Heavy Industries Aeronautic Engines Limited filed Critical Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Priority to JP2021575207A priority Critical patent/JP7504135B2/ja
Priority to PCT/EP2019/000186 priority patent/WO2020253930A1/fr
Priority to DE112019007467.9T priority patent/DE112019007467A5/de
Publication of WO2020253930A1 publication Critical patent/WO2020253930A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/388—Trepanning, i.e. boring by moving the beam spot about an axis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/389—Removing material by boring or cutting by boring of fluid openings, e.g. nozzles, jets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/001—Turbines

Definitions

  • the present invention relates to a method for drilling components made of metallic materials and components made of layered, metallic and dielectric materials by means of laser radiation.
  • the present invention also relates to a device with which a corresponding method can be carried out.
  • Laser radiation is used in particular for ablating and drilling metallic materials and composite materials made of dielectric (e.g. ceramic) and metallic layers, known as fusion drilling.
  • metallic materials and composite materials made of dielectric (e.g. ceramic) and metallic layers known as fusion drilling.
  • fusion drilling metallic materials and composite materials made of dielectric (e.g. ceramic) and metallic layers
  • high removal rates are required to create bores, consequently high productivity and high quality, especially good
  • Conicity K r B, t op / r B, offered uhe * the avoidance of a recast, desired.
  • the geometric shape of the bore e.g. cylindrical, conical
  • the morphology of the bore wall e.g. solidified melt / recast
  • Known techniques for drilling with laser radiation are distinguished on the basis of the dominant mechanism for removing the material from the hole being formed. The removal can take place predominantly through expulsion of melt or predominantly through expulsion of evaporated material.
  • the group of drilling techniques with dominant melt expulsion include single pulse drilling (drilling with a single pulse), percussion drilling (multiple pulses with a fixed position of the beam axis of the radiation relative to the workpiece) and trepanning drilling (multiple pulses with the moving position of the beam axis of the radiation relative to the workpiece) .
  • the individual drilling techniques have both advantages and disadvantages.
  • Percussion drilling is a technique in which laser light is irradiated without changing the irradiation position in order to create a hole or a bore at this irradiated position.
  • the percussion drilling requires a small machining time because the irradiation position of the laser light is not moved.
  • Single pulse drilling and percussion drilling have the advantage of high removal rates (high productivity). Disadvantages are too small maximum achievable bore diameter, which is limited by the beam diameter of the laser radiation, poor quality of the bore due to incomplete melt expulsion, due to deposits of solidified melt on the bore wall and / or at the bore inlet and outlet as well as poor precision with regard to the Bore diameter.
  • Trephination drilling is a technique in which the laser light is moved along a circumference of a hole to be formed, the laser light having a spot diameter or beam diameter that is smaller than the hole to be made or the bore to be made in order to thereby forming an opening along this circumference and so the hole or the To create a hole.
  • the shape accuracy of the hole is great, since the irradiation with laser light takes place along the circumference of the hole to be created.
  • Trephination drilling has the disadvantage, however, that long drilling times are required, since a large proportion of the radiation used shines through the component through the existing hole and is not used.
  • Percussion drilling is only used industrially when, regardless of the state of the art, the still existing poor quality of the drilling tion, ie incomplete melt expulsion with layer thicknesses of an adhering, solidified melt of typically more than 100 ⁇ m and thus a low precision of the hole shape, which does not restrict the function of the product.
  • the drilling techniques with a dominant evaporation also include helical drilling and laser eroding.
  • the radiation is rotated around the beam axis in order to compensate for any deviation of the spatial distribution of the laser radiation from a circular symmetry over time.
  • An approximation to the required geometrical shape and the required quality of the bore is currently 'only reachable by the helical drilling or a sequential combination of percussion and helical drilling.
  • DE 101 44 008 A1 describes a method for producing a hole in a workpiece by means of a laser beam.
  • a borehole is drilled with a first diameter which is smaller than the final diameter to be achieved, and in a second step or in further steps the borehole is widened to the diameter to be achieved. Consequently, a percussion bore produced with predominantly melt expulsion is widened to the desired diameter in a second process step by removing material as steam, so that almost no residues of solidified melt remain on the bore wall.
  • Such drilling techniques have the disadvantage that the drilling time is too long or the productivity is too low as a result.
  • the expulsion of the melt is generated by the evaporation of material and is thus controlled solely by the intensity of the laser radiation, which does not allow targeted control of the bore diameter and avoidance of melt deposits, also known as recast.
  • a second method step for smoothing the bore wall by evaporation removal of material is then required, as is indicated in the above-mentioned DE 101 44 008 A1.
  • the prior art which relates to drilling with dominant melt expulsion, as is also described in DE 101 44 008 A1, teaches that a rough and crack-prone layer of re-solidified melt (recast) can occur on the bore wall and to Deviations from the desired, geometric shape of the hole leads. Therefore, according to DE 101 44 008 A1, a recast and the deviations from the required bore diameter are to be removed by reworking and the bore wall to be smoothed by removal by means of evaporation removal.
  • US 5837964 describes a laser machining method in which percussion drilling and trepanning are used in succession. This document describes an aspect ratio greater than 10 and a sequential, successive processing of first percussion drilling and subsequent trepanning.
  • the invention is based on the object of specifying a method for drilling metallic Werkstof and of layered materials made of metallic and dielectric materials, in which at least some of the disadvantages described above with reference to the prior art avoided and, in particular, the required machining time is shortened without reducing the machining accuracy.
  • a device is also to be specified with which the method can be carried out.
  • this object is achieved by a method having the features of independent claim 1 and according to the device by a device having the features of independent claim 12.
  • Advantageous embodiments of the method and the device emerge from the dependent claims.
  • components made of metallic work materials and components made of layered metallic and dielectric materials by single pulse / percussion drilling and trepanning with laser Radiation and drilled with dominant melt ejection.
  • the single pulse drilling is to be regarded as a non-pulsed process, since the energy flux density of the laser radiation is not interrupted in time until the drilling has been completed or the drilling has taken place.
  • Trephination drilling can also be performed both pulsed and non-pulsed without time interruptions (pulse pause).
  • the individual pulse / percussion drilling and the trepanning drilling are carried out simultaneously in terms of time.
  • a high energy flux density of the radiation is set in the overlap area (O) and a low energy flux density is set in the edge area.
  • Drilling in the overlap area (O) and high quality removal of the hole wall in the edge area combines the advantages of the known drilling methods, namely the high productivity of single-pulse or percussion drilling and the high quality of trepanning drilling.
  • the combination of the known drilling methods requires compliance with an interval with maximum and minimum nimal values for the intensity of the laser radiation, with the maximum and minimum values to be observed both in the overlap area (O) and in the edge area R being of different sizes.
  • the setting of the two different intervals for the intensity of the laser radiation is achieved by using pulsed laser radiation with a moving laser beam axis, the movement of the laser beam axis having to take place in such a way that an overlap area (O) is created which is irradiated by each pulse of the laser radiation, and an outer edge area R which is not irradiated by every pulse.
  • the setting according to the invention of the two different intervals for the intensity of the laser radiation is achieved by suitable beam shaping even without moving the laser beam axis.
  • the overlap area is defined as the area that is irradiated with each pulse of the laser radiation.
  • the edge area is defined as the area that lies outside the overlap area and within the laser beam radius.
  • This restriction for the aspect ratio A ⁇ A max is relevant, since for a larger aspect ratio A, greater than 10, in addition to the radiation set according to the invention with which the bore wall (H w ) is directly irradiated and removed at a point A, also from the borehole wall (H w ) at another point B contributes radiation reflected to the ablation at point A.
  • the setting of the laser radiation (LS) according to the invention on the bore wall (H w ) is changed by the reflected radiation and the method can no longer be carried out.
  • An essential measure of the method according to the invention is also to be seen in the division of the bore (H) to be created into a central area or overlap area (O) and an edge area (R).
  • the spatial distribution of the radiation (LS) perpendicular to the bore axis (H a ) of the bore to be reached (H) is set differently in the overlap area (O) and in the edge area (R).
  • the setting of the direction of the Poynting vector ⁇ S>, which is assigned to the laser radiation (LS), in the edge area (R) of the bore to be reached (H) can be done by setting the focus position and Rayleigh length of the laser radiation (LS).
  • a threshold value is defined for the minimum energy flux density required for ablation, which is defined as a number with the dimension Wem 2 for a pulse duration longer than one nanosecond or Jcm 2 for a pulse duration shorter than 10 picoseconds (corresponds to 10 4 Wm 2 or Jm 2 ), which replaces all otherwise known parameters relevant to drilling for characterizing the material to be drilled (melting temperature, heat capacity, thermal conductivity, etc.) and which has a typical value of 10 4 to 10 5 W » cm 2 or 1 for metallic materials to 10 J "cm 2 takes.
  • the laser radiation (LS) is preferably guided during drilling in such a way that its beam axis (B A ) moves along at least one closed trajectory (C) to be traversed once.
  • half the beam diameter (D s ) is selected to be at least as large as half the diameter (De) of the trajectory (C).
  • the movement of the laser radiation (LS) during drilling takes place, for example, with the aid of a scanner.
  • the energy flux density of the radiation (LS) in the overlap area (O) and in the edge area (R) of the borehole (H) to be created can be set differently in terms of the time average. This means that the laser radiation is pulsed while the beam axis (B A ) runs through a closed trajectory curve (C), as well as the time between two consecutive pulses (pulse pause) is changed, and that the path speed v c is changed in terms of the time average.
  • the Poynting vector ( ⁇ $>) is set in the edge area (R) of the bore (H) with a directional component that points to the bore wall (H w ) of the bore (R) to be created. This measure increases the absorption of the incident radiation (LS) and the reflection of the radiation (LS) on deeper areas of the bore wall (Hw) of the bore (H) being formed is avoided or at least reduced to such an extent that the threshold value for the Removal is not exceeded and there is no uncontrolled removal.
  • the limit fluence F th that is the threshold value for a pulse duration shorter than 10 picoseconds, is reached or even fallen below during the formation of the bore or after a finite number of periods of passes, since the bore wall becomes increasingly steeper with each pulse and so the fluence of the radiation incident on the bore wall falls on an increasingly larger area or extent of the bore wall. If the limit fluence F th is reached or undershot, then no further removal is possible and the asymptotic geometrical shape of the bore is achieved. This is the definition and the measurement rule for the values for the limit fluence F th determined from the comparison of simulation and experiment.
  • the geometric shape of the hole approaches a final or asymptotic shape, also referred to as the end shape, and can then not be removed any further.
  • An approach to an asymptotic always means that the result of the drilling, when the asymptotic is reached, no longer depends on the irradiation time, or only weakly when it is approached, and is thus assumed to be reproducible.
  • An asymptotic shape of the bore or asymptotics is understood to mean that bore shape which occurs after a certain number of pulses of laser radiation (pulsed laser radiation) or after a certain irradiation duration (cw laser radiation) and which occurs with all subsequent pulses or subsequent irradiation no longer changes, which is also referred to as a removal stop.
  • the number of pulses of the laser radiation after which the asymptotic is present or an asymptotic is approximated depends on the values of the material, beam and process parameters.
  • An approach to an asymptotic therefore means that the hole shape achieved does not change any more as the irradiation time progresses, or that the result of the hole shape changes only very slightly as the irradiation time progresses, so that the present hole shape is assumed to be reproducible and thus reaches a final shape.
  • reaching the final shape of the hole is determined by setting the laser radiation (LS) to the edge area (R) and a threshold value is defined for reaching the final shape of the hole (H), which is defined as a number with the dimension W » cm 2 for a pulse duration longer than one nanosecond or cm 2 for a pulse duration shorter than 10 picoseconds (corresponds to 10 -4 W * m 2 or J * m ⁇ 2 ), which are all otherwise known parameters relevant for drilling Replaces characterization of the material to be drilled and which assumes a typical value of 10 4 to 10 5 W « cm 2 or 1 to 10 J * cm 2 for metallic materials.
  • the laser radiation deposits the absorbed energy only in the free electrons of the material without noticeable heating of the atoms of the irradiated material.
  • the fluence (F) [J * m 2 ] is defined as the integral of an energy flux density over time, with the fluence being the proportion of energy in the laser radiation (radiation energy) that per Area the material is irradiated, defined and has the SI unit J * m 2 .
  • the bottom of the hole opens, with part of the laser radiation shining through the hole and not being absorbed by the material to be drilled.
  • the bottom of the hole (H b ) is defined here as the progressing end of the hole (H) that forms during drilling.
  • the melt is accelerated less strongly from the area around the hole and is no longer completely expelled from the hole and solidifies on the hole wall.
  • an advantageous measure for drilling with pulsed laser radiation is that when drilling with several pulses (up to the last pulse) the melt is countered before drilling through the overlapping area (O) the direction of propagation of the laser radiation (LS) is driven out of the bore (H). This is achieved by setting the energy flux density of the laser radiation in the overlap area (O) in such a way that the bottom of the hole reaches the material thickness and there is still no through hole. In this way, the remaining volume in order to achieve the final shape of the bore and that still has to be removed and that at least partially remains in the bore as an undesirable recast is as small as possible.
  • the method enables the melt to be expelled from the bore that is being formed without the use of a gas nozzle and only due to the evaporation pressure respectively.
  • the energy flux density in the overlap area, ie the area that is irradiated with each pulse of the laser radiation, and the pulse duration are set so that the bottom of the hole reaches the bottom of the component at the end of the pulse without having reached the above-mentioned asymptotics.
  • the success of a small recast thickness can be determined by measuring the recast thickness, i.e. the thickness of the enamel deposits that solidify on the bore wall and cannot be expelled and that are typically less than 100 ⁇ m for non-rotating components and typically less than 50 for rotating, accelerated components pm should be determined.
  • the intensity and the pulse duration of the radiation used are adjusted in such a way that at the time of drilling through the component on its underside (at the bottom of the hole (H b )) only a minimal, remaining volume of melt needs to be removed in order to ultimately achieve the asymptotics of the hole .
  • the very small remaining volume of material still to be removed is melted and driven partly downwards and partly upwards along the bore wall by the evaporation pressure out of the bore, where it in turn partially solidifies and forms a recast.
  • the energy flux density should not fall below a minimum value and the energy flux density should not exceed a maximum value.
  • the minimum value is determined by the fact that there is no drilling through, defined as no opening of the bottom of the hole on the underside of the component, and the maximum value is determined by the fact that the drilling time to reach the through hole increases suddenly.
  • a sudden increase means that for an energy flux density slightly less than the maximum value, a short drilling time is sufficient to drill through the material, the drilling speed v p assuming large values, typically greater than 1 ms 1 , and that for an energy flux density slightly greater than Maximum value, a long drilling time is required until drilling through and the drilling speed v p assumes small values, typically less than 10 2 ms 1 .
  • an energy flux density of the laser radiation that is too low is not sufficient to drive the melt out of the hole over its entire depth, and that the intensities of the laser radiation that are too high result in a too dense measurement. create tall vapor, which absorbs the laser radiation significantly and thus reduces the drilling speed v p .
  • alpha incremental angle
  • the production of non-circular bore cross-sections requires a beam diameter of the laser radiation that is smaller than the smallest cross-section of the bore, and the bore contour to be generated must be traced along a trajectory.
  • Cross-sectional shape e.g. B. the x-shaped section in the middle of an eight-shaped contour, when tracing the contour at least as large as the beam diameter and thus larger than by using the method according to the invention, since with the method according to the invention, the x-shaped section of the eight-shaped contour only through the Overlap area of the laser beam diameter is irradiated.
  • an eight-shaped bore is produced by setting the increment angle and the pulse pause in such a way that the increment angle between two successive pulses is 180 degrees and the laser radiation is pulsed, the pulse being repeated when reaching 0 and 180 degrees, until the eight-shaped hole shape is reached.
  • an increment angle of 180 degrees and the pulse pause are set in such a way that the increment angle between two successive pulses is 180 degrees and the pulse is repeated when 0 and 180 degrees are reached, with the overlap area being set so large that an elongated hole is created.
  • a three-hole hole this is a hole that z. B.
  • a star-shaped bore is created according to the method according to the invention when incre- angle and pulse pause are set so that the pulses are repeated when reaching 0, 360 * 1 / n, 360 * 2 / n, 360 * (n-1) / (n) degrees, where n is a natural number and 360 / n is a natural number until the star-shaped hole is reached.
  • the diameter of the bore to be created with the method according to the invention increases with the duration of the irradiation and strives for an asymptotic value.
  • the removal per pulse or the drilling speed v p tends to zero and the diameter of the hole is reproducible.
  • the total flow volume for example of fuel filters, is added up from the flow volumes of the individual bores. Turbines are cooled by bores, the diameter and widening of which (conicity) determine the cooling effect.
  • the production of bores in fuel filters and turbine parts is therefore a particularly important field of application of the method according to the invention.
  • the flow behavior when gases and liquids emerge from a borehole are determined by the angle of the borehole wall to the material surface and the widening of the borehole, ie the conicity of the borehole. Maintaining a predefined conicity is crucial for the distribution of cooling gases on material surfaces, for example to protect turbine components. With the method according to the invention, such a conicity can be set in a very defined manner by the Poynting- - >
  • the cylindrical or conical shape of a bore is a prerequisite for a laminar flow of liquids and gases through the bore.
  • the diameter of holes in multi-layer systems consisting of a base material, an adhesion promoter layer and a thermal insulation layer, as is the case in particular in turbine components, must be adjustable independently of the material layer to be drilled through during drilling, so that regardless of the material layer to be drilled through, a smooth bore wall and a bore diameter that widens or narrows evenly with increasing bore depth.
  • this is possible in that first the thermal insulation layer is drilled through, which requires a greater energy flux density for drilling or has a greater value for the threshold fluence, and the drilling duration is selected so that the hole in the thermal insulation layer achieves its asymptotic shape and during subsequent drilling in deeper layers of material with a lower energy flux density or a lower value for the threshold fluence, it is no longer removed.
  • Another surprising property of the method according to the invention can be seen in the fact that a defined conicity can be carried out over the entire depth of the hole when drilling multilayer systems with very different properties for the absorption of laser radiation and heat conduction - ceramic of the thermal insulation layer and metal of the base material.
  • the layers to be drilled first have a surprisingly negligible effect on the drilling process and thus the shape of the hole. This is understood as a consequence of the melt flow, which flows over the ceramic layers drilled first and covers them, whereby the absorption of laser radiation and heat conduction for the thermal insulation layer and the metallic base material become the same and a smooth bore wall is created.
  • the method according to the invention has a melt expulsion counter to the jet direction from the beginning of the drilling up to the time of the drilling through. Since the hole is created in the central area, areas of the hole where there is a lack of quality - here shape deviations due to different material properties - are removed in the further course of drilling and thus do not contribute to the quality of the hole.
  • the melt of the lower-lying metallic layers are driven in the direction of the overlying, for example ceramic layers and cover them, which means that the radiation on the molten material is absorbed from the deeper layers and the heat is dominated by the covering melt.
  • Layers in the area of the hole are not reduced. For example, if the thermal insulation layer of turbine components is damaged, the layers of the components that are thermally and mechanically highly stressed during operation can detach from the base material and protection by the thermal insulation layer is no longer guaranteed. Since the adhesion between the layers is thermally stressed during drilling by the melt flowing out of the hole wall against the direction of the jet, the layers being heated again to the melting temperature of the melt flowing past during each pulse and due to the different thermal expansion in the different layers If the layers result in a thermomechanical shearing effect of different strengths, the pulse pause between two successive pulses must be chosen so large that the heating by heat diffusion can decrease again and there is no accumulation of heat, which would increase the shearing effect.
  • the penetration depth of the heat (scaled the thickness of the thermal insulation layer) in the thermal insulation layer must remain less than 1, otherwise the shearing effect will be too strong, as shown in the graphic in Figure 4 of the drawing.
  • the depth of penetration of the heat into the thermal insulation layer and the temperature on the bore wall of the thermal insulation layer after heating are shown in the time tp and a pulse pause tpause.
  • Ta indicates the ambient temperature
  • Tm indicates the melting temperature.
  • a deposit of solidified melt (recast) on the bore wall is avoided.
  • a defined bore diameter can only be achieved if the geometric shape of the bore is not changed by irregular deposits of solidified melt on the bore wall, which would also affect the drilling progress and the geometric shape of the drilling unsystematically.
  • cracks and stresses can arise in the solidified melt, which can lead to damage during operation of the component.
  • highly stressed components such as turbine blades and fuel filters, avoiding deposits from solidified melt increases their service life.
  • burrs due to solidified melt at the hole outlet is avoided because the method creates a through hole in the overlap area which has a smaller hole diameter than the hole diameter of the edge area after the asymptotic shape of the hole has been reached.
  • the burr that arises at the beginning of the hole at the hole exit in the overlapping area is still Tart-to-tetrachloric acid, and since the two areas are abraded close to each other, a short drilling time is achieved. Avoiding the formation of burrs saves post-processing and reduces the production time, for example of turbine components and fuel filters, and the efficiency of cooling is increased, since otherwise burr formation at the bore outlet reduces the flow resistance of a cooling fluid and thus the efficiency of cooling.
  • the melt can be expelled in the direction opposite to the incident laser radiation by a pressure gradient due to evaporation of the component material at the bottom of the hole, which is much more efficient for small hole diameters in the initial phase of drilling than a pressure gradient due to a driving, external gas jet .
  • an external gas jet is required to expel the melt.
  • the melt expulsion in the overlapping area by pressure gradients due to evaporation is sufficient and an external gas jet is not required.
  • the outflow of dominant portions of the melt from the overlapping area out of the bore and against the incident laser radiation reduces the recast on the bore wall.
  • Very small radii of curvature can be achieved at the trailing edge of the hole.
  • These small radii of curvature ideally a sharp edge, which corresponds to 90 degrees or a right-angled edge, are achieved by increasing the absorption of the laser radiation on the bore wall near the leading edge by adding the Poynting vector ( ⁇ S>) in the edge area (R) of the bore (H) has a directional component which changes with the bore depth and which points to the bore wall (H w ) of the bore (H) to be reached.
  • the resulting melt should detach itself from the leading edge (so there should be no burr), and while the hole is in use, for example as a hole in a nozzle, a fuel, for example, is supposed to detach itself from the trailing edge.
  • the detachment of a liquid flow at the bore opening i.e. both at the leading edge where the bore is made and at the bottom of the component where the bore bottom opens first) is determined by the curvature of the trailing edge. In the case of injection nozzles, the curvature of the trailing edge is decisive for the detachment and the complete burning of the fuel in the combustion chamber.
  • the device according to the invention for drilling components made of metallic materials and components made of layered metallic and dielectric materials has a laser processing device which comprises at least one beam unit which directs laser radiation onto the component, and has a control unit which controls the radiation unit in such a way that that a spot area, defined as a region of the component irradiated with the laser radiation on an upper side, moves along an inner circumferential section, which is a position corresponding to an inner circumference of the bore to be created, and further controls such that part of the spot area creates an area of overlap within the inner peripheral portion of the bore at any point in time.
  • the device uses the irradiation or cross-sectional area of a spot area of the laser radiation that strikes the component, which is smaller than a cross-sectional area of the bore to be created.
  • the laser processing device emits the laser radiation in such a way that a point diameter, which is a diameter of the spot area, is greater than half a length of a diameter of the bore to be created and less than the length of the diameter of the bore.
  • a point diameter which is a diameter of the spot area
  • an excessively high energy flux density of the laser light which is necessary for drilling through and desired for quickly drilling through the overlap area, is advantageously reduced at the edge of the opening, i.e. in the edge area, the reduction in energy flow density leading to a smaller removal volume per pulse and thus the accuracy of the shape the drilling improved.
  • the control unit controls the laser beam unit in such a way that the laser radiation expands an area of the opening in the component, seen in the radial direction to the beam axis, from the overlapping area outwards.
  • an auxiliary fluid supply unit which supplies a fluid to the top of the component and into the bore that is being formed in the component.
  • the laser processing device can have a laser oscillation unit that oscillates the laser radiation in the radial direction with respect to the beam axis, and a galvano scanner unit that changes a position of the spot surface by reflecting the laser radiation, while at the same time an optical path of the laser radiation oscillated by the laser oscillation unit changes, insert.
  • Figures 1 to 3 show in schematic cross-sectional representations the creation of a hole in a component in a time sequence using the method according to the invention in each case in a plane containing the axis of the hole, wherein
  • Figure 1 shows the geometric shape of the bore wall and the bore bottom before the time of drilling through the bore bottom
  • Figure 2 shows the geometric shape of the bore wall at a point in time of drilling through
  • FIG. 3 shows the geometric shape of the bore wall when the bore wall has assumed its predefined geometric shape to be achieved
  • FIG. 4 shows a graph that shows the temperature on the bore wall on the thermal insulation layer after heating by the melt flowing past in a time tp and a pulse pause tpause
  • Figure 5 shows the geometric relationships of a hole to be created in a cross section perpendicular to the hole axis
  • FIGS. 6A to 6E show a chronological sequence of cross-sectional representations corresponding to FIG. 5 of the drilling process for creating the hole by superimposing radiation components in an edge area and in an overlapping area
  • Figure 7 shows in the sequence of images (1) to (4) the progressive drilling through a component
  • FIG. 8 shows, in the sequence of images (1) to (4), a trepanning process as it is used according to the prior art to produce a bore
  • FIG. 9 shows the schematic structure of a device according to a first embodiment with which the method according to the invention can be carried out
  • FIG. 10 shows the structure of FIG. 9 with an additional auxiliary gas supply unit
  • FIG. 11 shows a schematic view of a device for drilling, in a partially sectioned representation, as it can be used in the devices of FIGS. 9 and 10, and with an auxiliary gas supply source assigned to the device for drilling.
  • FIG. 1 shows the cross-sectional representation of a component 1, which has a thickness d perpendicular to its upper side 2, before the point in time of drilling through the bottom of the hole H b .
  • the component 1 consists of a metallic material or of layered metallic and dielectric materials.
  • a bore H is already formed with a bore axis H a , which runs in the plane of the cross section, the bore wall of which is denoted by H w .
  • the drilling speed is denoted by v p and indicates the movement of the bottom of the hole H b in the direction of the hole axis H a .
  • R denotes an edge area which is defined as that area which lies outside the central or overlap area O and is irradiated with a lower energy flux density of the laser radiation LS during drilling.
  • the beam axis B with a beam direction of the laser radiation is moved on a trajectory C with a direction R c and runs through this trajectory C repeatedly until the drilling result sketched in FIG. 3 is achieved.
  • the trajectory C lies in a plane perpendicular to the beam axis B A (beam axis).
  • the bore H in FIG. 1 has not yet penetrated the underside 3 of the component 1 and shows a conical cross-sectional shape. This means that the bore H is still limited by a bore base H b , to which a diameter Do of the overlap area O is assigned.
  • the overlap area O is shown in dashed lines in FIGS. 1 to 3.
  • the melt is consequently accelerated against the beam direction of the beam axis B A of an inserted laser radiation LS out of the hole base H b and expelled from the hole H along the hole wall H w on the upper side 2 of the component 1.
  • the accelerating effect is caused by the evaporation of the material at the bottom of the hole H b and the evaporation pressure or ablation pressure acting on the melt of the material.
  • FIG. 2 now shows, in broken lines, the cross-sectional shape of the overlap region O and the geometric shape of the bore wall H w of the bore H at a point in time at which the component 1 has been drilled through on the underside 3.
  • the point in time of drilling through the component 1 is defined by the fact that the entire width Do of the overlap area O has reached the underside 3 of the material and the orientation of the melt expulsion changes, which means that the melt can now also predominantly on the underside 2 of the component 1 step out.
  • FIG. 3 shows the geometric shape of the bore wall H w of the bore H when the bore wall H w , starting from the shape of the bore H as shown in FIG.
  • FIG. 3 shows that the bore diameter Do in the overlap area is smaller than the bore diameter D H of the entire bore to be made, which also reaches the outer edge, that is the bore wall H w (dashed), of the edge region R.
  • both the single-pulse / percussion drilling and the trepanning drilling are carried out simultaneously in terms of time, ie. H. that the two processes are superimposed by the overlap in the overlap area with pulsed laser radiation LS or superimposed with continuous laser radiation or non-pulsed laser radiation by setting an inner central area or overlap area O with a high energy flux density and an outer area or edge area with a smaller energy flux density.
  • a higher energy flux density means that a maximum value is not exceeded, above which a strong absorption of the laser radiation LS occurs in the metal vapor from removed material and the drilling time increases drastically, suddenly with decreasing energy flux density.
  • a lower energy flux density means that the value does not fall below a minimum value or threshold value, below which there is no more erosion or an ablation stop occurs.
  • FIG. 5 shows the creation of the bore by superimposing radiation components in an edge area R and in an overlapping area O.
  • the beam axis B A runs through a closed trajectory C, and by changing the time between two successive pulses (pulse pause) and the trajectory speed v c the time average of the energy flux density in the edge area is changed.
  • the beam shaping carried out with continuous laser radiation or non-pulsed laser radiation is carried out in such a way that the laser beam axis B A is not moved and the laser radiation LS in the central area O - which in the case of pulsed laser radiation is referred to as the overlap area O of the individual, successive pulses - is larger Has energy flux density smaller than the maximum value and in the edge region has a smaller energy flux density greater than the threshold value of the ablation stop.
  • the bore H shown in cross section in a plan view in FIG. 5 is intended to have a diameter D H with a radius DH / 2 extending from the bore axis H a over the entire thickness d of the component 1 shown in FIGS. 1 to 3 goes out, so that a cylindrical bore wall H w through the component 1 results.
  • a central area O hereinafter also referred to as the overlap area O, to which a diameter D 0 is assigned, is shown hatched.
  • the edge region R adjoins the central region O in the radial direction and extends to the bore wall H w .
  • FIG. 5 From FIG. 5, also from FIGS. 1 to 3, it can be seen that at the beginning of drilling a hole H, which is shown in FIG. 1, a large drilling progress is achieved in the overlapping area O and a comparatively small drilling progress is present in the edge area R. .
  • the top of the component (see also FIGS. 1 to 3) is irradiated with laser radiation LS, the beam axis of which is labeled B A and which, viewed perpendicular to the beam axis B A , has a beam diameter Ds owns.
  • the irradiated area of the upper side of the component is the cross-sectional area S of the laser radiation LS and is also referred to as the spot area S.
  • the laser radiation LS that strikes the component at the spot surface S is now guided according to the invention in such a way that its beam axis B A is guided on a trajectory C, in the example shown on a circular path C, around the bore axis H a , like this Figure 6A illustrates.
  • the direction Re of the beam axis guidance along the circular path C takes place counterclockwise in the example shown in FIGS. 6A to 6E, but this is not absolutely necessary. This beam guidance can also be carried out in a clockwise direction.
  • FIG. 6A now shows, compared with FIG. 5, the illumination or irradiation of the component after two pulses of laser radiation LS, while FIG. 6B shows the illumination or irradiation of the component after three Pulses of the laser radiation LS, which shows FIG. 6C the irradiation of the component after four pulses of the laser radiation and FIG. 6D the pulses of the radiation after a complete revolution.
  • the edge of the spot area S of the last pulse in each case is shown in a thick line.
  • FIGS. 6A to 6E pictures (1) to (4) represents a schematic diagram which shows an example of how a hole (bore) at the bore bottom H is opened.
  • the opening H (hole) in the component 1 is gradually expanded outwards in the radial direction, as can be seen from the increasing black area, starting at the location of the hole axis H a .
  • the edge of the circular area shown in black indicates the respective bore wall H w of the bore H in the component 1.
  • the diameter DH 2 » re , offered to the bore H on the underside of the component 1 is consequently increased until the asymptotic shape of the bore H to be achieved is reached and no further abrasion occurs due to further irradiation of the energy flux density.
  • the laser beam unit irradiates the overlap area O with the laser radiation LS at all times while it moves the spot area S.
  • the time-averaged energy flux density of the laser radiation LS is therefore greater in the overlap area O than in the edge area R.
  • FIG. 7- (2) shows, the opening or hole H at the bottom of the hole is consequently first opened in the overlap area O. With the further irradiation, the opening is enlarged (FIG. 7- (3)) until finally the opening H assumes its full diameter (FIG. 7- (4)).
  • the time span for which the laser light LS is emitted tends to become shorter from the bore axis H a over the edge of the overlap region O in the radial direction outward. Accordingly, the opening that forms is expanded in the radial direction from the overlap area O outwards until the diameter of the opening is up to the predefined bore wall H w is sufficient and the predefined hole H is generated (see also Figure 6E).
  • FIG. 7 also makes it clear through the image sequences (1) to (4) that the single pulse / percussion drilling and the trepanning drilling are carried out simultaneously. Simultaneously means that the laser beam is guided in such a way that the central area O is completely irradiated with each pulse of the laser radiation LS, the beam axis B A being offset from the beam axis B A of a previous pulse and thus only a part of the edge area being irradiated during a pulse becomes.
  • the beam diameter Ds of the laser beam LS should not be set smaller than half the diameter D H of the bore to be reached (Ds> DH / 2) - see Figure 5. This measure ensures that a central area O is formed which has a greater energy flux density is irradiated and for cw radiation is irradiated with radiation during the entire drilling period or is irradiated with each pulse for pulsed radiation.
  • the diameter De of the trajectory C should not be set larger than the beam diameter D s , so that consequently D s ⁇ D c applies - see Figure 5. This measure also ensures that a central area O is formed.
  • the final, asymptotic bore shape is clearly defined by the spatial distribution of the energy flux density of the laser radiation and the movement of the beam axis, with multiple reflections and consequent repeated irradiations being undesirable.
  • Multiple reflections occur with small bore diameters and large bore depths, which means that the aspect ratio is typically greater than 10.
  • the movement of the beam axis B A of the radiation LS can be carried out during drilling with the aid of a scanner, the movement of the beam axis B A along a closed trajectory C with a diameter D c that is to be passed through at least once periodically he follows.
  • the spot area S ie the cross-sectional area of the laser radiation LS perpendicular to the beam axis B A , is smaller than an area of an opening, ie an area over which the bore H is gradually opened.
  • the laser processing device used is able to prevent the concentration of the energy flux density of the laser radiation LS at the edge of the opening by using the method according to the invention, also with the result that a reduction in the dimensional accuracy of the opening is prevented if the spot area S is along the inner Peripheral section I of the bore (see Figure 7) is moved.
  • a trepanning process is shown as it is used according to the prior art for producing a bore.
  • the spot area SX is moved along the inner circumferential section I of a bore contour to be produced, but there is no overlap area which, in terms of time, is overlapped by the spot area at every point in time of the irradiation.
  • a laser processing device that performs such a trepanning processing according to the prior art first emits laser light, represented by a spot area SX1 (see Figure (1)), so that a hole is opened, for example in the center of the hole to be produced.
  • FIG. 9 shows a schematic representation of a first embodiment according to the invention, with which the method described above can be carried out.
  • the device of FIG. 9 comprises at least one laser beam unit 10, the laser radiation LS, which has a beam axis B A and a beam diameter D s , via an optical fiber 11 and an output device 12 of a first galvano scanner unit 13 and from there a second galvano scanner unit 14, which directs the laser radiation LS onto the component 1 via an optical system 15.
  • Both the beam unit 10 and the first and second galvano scanner units 13, 14 are controlled via a control unit 16.
  • the control takes place in such a way that a spot area, defined as an area irradiated with the laser radiation LS on the area of the upper side 2 of the component 1 (see cross-sectional area S in FIGS.
  • the laser radiation LS is pulsed. However, a continuous wave laser or cw radiation can also be used.
  • the laser light LS can with any laser source, such as a YAG laser, a CO2 laser or a disk laser. It is also possible to use the beam shape of the laser radiation, ie a distribution of the energy flux density or intensity distribution perpendicular to its beam axis B A , for example in Gaussian form, in top-hat form or in super-Gaussian form.
  • the glass fiber 11 amplifies the laser light LS by reflecting the laser radiation LS inside the fiber.
  • the diameter of the laser radiation LS emerging from the glass fiber 11 depends on the diameter of the glass fiber 11. Therefore, the radiation diameter, which is required for processing the component 1, can be set in a simple manner by exchanging the glass fiber.
  • the radiation diameter of the laser radiation LS which strikes the upper side 2 of the component 1 can, however, also be carried out, for example, via an appropriate optical system or by using a fiber laser.
  • the glass fiber 11 and the control unit 16 are omitted.
  • bores H with a bore diameter D H of less than 1 mm can be produced.
  • FIG. 10 shows schematically a further device with which the method according to the invention can be carried out.
  • This device is comparable to that of FIG. It differs from the device of FIG. 9 in that an auxiliary gas supply unit 18 is provided.
  • An auxiliary gas is supplied to the component 1 via this auxiliary gas supply unit 18 in such a way that after drilling through in the overlapping area a mass flow of auxiliary gas flows through the bore.
  • This auxiliary gas is used to remove melted material from the bore in the direction of the flowing auxiliary gas by the laser radiation LS.
  • Oxygen, air, nitrogen gas, argon gas or a mixed gas for example, can be used as the auxiliary gas.
  • the bore H instead of an auxiliary gas is supplied with a liquid, for example water by a corresponding water jet.
  • a distance DG between a nozzle outlet 19 and the top 2 of the component 1 is greater than a distance DL between the exit side of the optics 15, seen in the beam direction of the laser radiation LS, and the top 2 of the component 1, in each case in seen in the Z-direction.
  • This setting is used to set a minimum value for the mass flow of auxiliary gas which flows through the bore and is not already discharged at the bore entry to the top of the component. If, however, an inclined hole or an inclined bore is to be drilled into the component 1, as shown for example in FIGS. 1 to 3, the distance D L is selected to be greater than the distance D G.
  • the auxiliary gas supply unit 18 supplies the auxiliary gas under a pressure of at least 400 kPa or more, i.e. H. in a range from 400 kPa to 1000 kPa in order to achieve an expulsion effect on the liquid melt.
  • the auxiliary gas supply unit 18 supplies the auxiliary gas laterally via the nozzle outlet 19 to the component 1, the melt can be ejected or discharged from the bore H.
  • the galvano scanner units 13 and 14 move the position of the spot surface S by reflecting the laser light and at the same time change the optical path of the laser radiation LS. Since this laser processing device carries out the laser processing in such a way that it always has the overlap area O, which is partially overlapped by the cross-sectional area or spot area of the laser radiation LS while moving the spot area S along the inner peripheral portion I of the hole H to be made, a hole can be machined with such a laser machining device that employs a galvano scanner unit.
  • a galvanic scanner unit can accelerate material processing if, for example, when the machining of one hole is completed, the machining of the next hole is started only by adjusting the angles of rotation of the mirror bodies of the galvanic scanner units, whereby the laser radiation in the direction of the next Drilling is directed. It is also provided that a beam splitter is used to guide the laser radiation in order to control several optical systems at the same time. It is also provided to use optics instead of a scanner for beam shaping in order to set the distribution of the radiation in the central area O and in the edge area R of the bore H to be achieved differently for cw processing without interruptions and for pulsed processing in the time average.
  • FIG. 10 Another embodiment of a device is shown schematically in FIG. In contrast to the device in FIG. 10, no galvano scanner unit is provided.
  • the laser radiation LS is coupled into a nozzle cutting head 20 via the glass fiber 11.
  • This nozzle cutting head 20 comprises an optical system 21, a lens cylinder 22 and an auxiliary gas nozzle 23.
  • the nozzle cutting head 20 can be moved along a direction parallel to the upper side or upper side 3 of the component 1, ie along any path of a two-dimensional coordinate plane XY, in order to move the laser radiation LS on a path along the inner circumference of a bore H to be created (see FIGS. 5, 6A to 6E).
  • a support table (not shown) that carries the component 1 could also be moved in order to achieve a relative movement between the nozzle cutting head 20 and the support table.
  • it is advantageous if the masses to be moved are kept small.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

L'invention concerne un procédé permettant de percer des pièces constituées de matériaux métalliques et de pièces constituées de matériaux métalliques et diélectriques stratifiés, selon lequel la répartition spatiale du vecteur de Poynting, qui est associé au rayonnement laser, est ajustée différemment, dans une zone de chevauchement de l'alésage à effectuer, à laquelle sont associés un axe d'alésage, une paroi d'alésage ainsi qu'un fond d'alésage qui augmente à mesure que la profondeur d'alésage progresse, et dans une zone marginale de l'alésage à effectuer, la zone de chevauchement étant définie comme étant la zone qui est soumise à l'action du rayonnement laser à forte densité du flux énergétique, lors du perçage par impulsion unique, et la zone marginale étant définie comme étant la zone qui se situe en dehors de la zone de chevauchement et qui est exposée à une faible densité de flux énergétique du rayonnement laser, densité moins importante que l'énergie de flux énergétique présente dans la zone de chevauchement. La présente invention concerne également un dispositif correspondant.
PCT/EP2019/000186 2019-06-17 2019-06-17 Procédé et dispositif pour percer des pièces WO2020253930A1 (fr)

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PCT/EP2019/000186 WO2020253930A1 (fr) 2019-06-17 2019-06-17 Procédé et dispositif pour percer des pièces
DE112019007467.9T DE112019007467A5 (de) 2019-06-17 2019-06-17 Verfahren und Vorrichtung zum Bohren von Bauteilen

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CN113634926A (zh) * 2021-07-27 2021-11-12 江苏先河激光研究院有限公司 一种基于激光旋切的方孔加工方法及系统
DE102021005297A1 (de) 2021-10-25 2023-04-27 TRUMPF Werkzeugmaschinen SE + Co. KG Verfahren zur Erzeugung angesenkter Löcher

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DE10054853A1 (de) * 2000-11-06 2002-08-01 Bosch Gmbh Robert Verfahren zum Einbringen eines Mikrolochs in ein vorzugsweise metallisches Werkstück und Vorrichtung hierzu
DE10144008A1 (de) 2001-09-07 2003-03-27 Siemens Ag Verfahren und Vorrichtung zum Erzeugen einer Bohrung in einem Werkstück mit Laserstrahlung
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WO2015139840A1 (fr) * 2014-03-21 2015-09-24 Pro-Beam Ag & Co. Kgaa Procédé pour réaliser de petits alésages dans des pièces par modification d'un paramètre d'usinage au cours d'une impulsion de faisceau

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JP4614844B2 (ja) 2005-08-05 2011-01-19 住友重機械工業株式会社 レーザ加工方法及びレーザ加工装置

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US5837964A (en) 1998-01-16 1998-11-17 Chromalloy Gas Turbine Corporation Laser drilling holes in components by combined percussion and trepan drilling
DE10054853A1 (de) * 2000-11-06 2002-08-01 Bosch Gmbh Robert Verfahren zum Einbringen eines Mikrolochs in ein vorzugsweise metallisches Werkstück und Vorrichtung hierzu
DE10144008A1 (de) 2001-09-07 2003-03-27 Siemens Ag Verfahren und Vorrichtung zum Erzeugen einer Bohrung in einem Werkstück mit Laserstrahlung
DE102004014820B4 (de) 2004-03-24 2006-10-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Herstellen von Bohrungen mit großem Aspektverhältnis in metallischen Werkstoffen sowie in geschichteten metallischen Werkstoffen und solchen, die mindestens eine keramische Schicht aufweisen
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US20130020291A1 (en) * 2011-07-19 2013-01-24 Pratt & Whitney Canada Corp. Laser drilling methods of shallow-angled holes
WO2015139840A1 (fr) * 2014-03-21 2015-09-24 Pro-Beam Ag & Co. Kgaa Procédé pour réaliser de petits alésages dans des pièces par modification d'un paramètre d'usinage au cours d'une impulsion de faisceau

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113634926A (zh) * 2021-07-27 2021-11-12 江苏先河激光研究院有限公司 一种基于激光旋切的方孔加工方法及系统
DE102021005297A1 (de) 2021-10-25 2023-04-27 TRUMPF Werkzeugmaschinen SE + Co. KG Verfahren zur Erzeugung angesenkter Löcher

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