WO2020239993A1

WO2020239993A1 - Coating apparatus, evaporation device and coating source

Info

Publication number: WO2020239993A1
Application number: PCT/EP2020/065015
Authority: WO
Inventors: Markus Fuhr
Original assignee: Schneider Gmbh & Co. Kg
Priority date: 2019-05-29
Filing date: 2020-05-29
Publication date: 2020-12-03
Also published as: DE102019003764A1

Abstract

The present invention relates to a coating source for the in particular hydrophobic coating of preferably optical workpieces. The coating source is flexible and elongate. Furthermore, the present invention relates to an evaporation device for evaporating coating material from a flexible, elongated coating source, wherein the evaporation device comprises a guide preferably for guiding and heating the coating source. Furthermore, the present invention relates to a coating apparatus with such an evaporation device.

Description

Coating apparatus, evaporation device and coating source

The present invention relates to a coating apparatus for coating one or more work- pieces with a coating material according to the preamble of claim 1 , an evaporation device for evaporating a coating material according to the preamble of claim 20, and a method for coating according to the preamble of claim 25.

The present invention relates to the coating of in particular optical workpieces with a coating material, in particular for a hydrophobic and/or oleophobic coating. Such a coating is in particular provided to reduce water spots and/or dirt adhesion on the workpieces. In the case of optical workpieces, the hydrophobic and/or oleophobic coating is usually applied onto anti-reflection layers or onto mirror or reflection layers, but can also be applied to mineral glasses or similar materials that are only coated with hard lacquer or are uncoated or the like.

In general, two different approaches to the application of such layers are common. Especially for large workpieces and/or flat glass, wet chemical methods are often used, i.e. coating by dipping the workpieces in a solution or sprinkling, spraying and/or spin coating of the workpieces with a solution. However, these methods have the disadvantage that the durability of the coating is rather low. In the other method, the coating is applied from a gaseous phase, preferably in a vacuum.

WO 2006/045527 A1 describes a method for coating from a gaseous phase and a corresponding apparatus. A tablet-like or pill-like carrier of a porous material is pro- vided which is provided with the coating material. The apparatus has a vacuum chamber in which lenses for coating are held by a holder. The apparatus also has an evaporation module which heats the carrier so that the coating material evaporates from the carrier and is deposited on the lenses as a hydrophobic coating. The disadvantage here is that the evaporated coating material is not evenly or uniformly distributed. Rather, a preferential direction of evaporation is created starting from the carrier, in particular in the form of a club, which can lead to an uneven coating of the workpieces. This is particularly problematic for flat and/or large-area workpieces and/or if a large number of workpieces, which together form a large coating surface, are to be coated. In addition, only so-called batch operation is possible here, i.e. only discontinuous operation in which the carrier has to be replaced by a new carrier at regular intervals, in particular after each coating process. However, especially with coatings in a vacuum, this is associated with additional effort, since the vacuum must be re- established after a change.

Against this background, object of the present invention is to provide a coating apparatus, an evaporation device and a method, wherein a simple, efficient, uniform and/or cost-efficient coating, in particular also of large-area workpieces, and/or a simple, compact and/or cost-efficient structure is or are made possible.

The above object is solved by a coating apparatus according to claim 1 , an evaporation device according to claim 20, or a method according to claim 25. Advantageous further developments are subject of the sub-claims.

One aspect of the present invention relates to a coating source comprising a carrier in which the coating material is received or contained, the coating source and/or carrier being flexible and elongated. In particular, the coating source and/or the carrier is designed to be band-like, thread-like, wire-like and/or rope-like. This provides in a simple manner a coating source in which the coating material is distributed more uniformly during evaporation, in particular over a greater distance, than in the case of a coating source in tablet or pill form, which in particular leads to a more uniform coating of in particular linear, flat and/or large-area workpieces. According to one aspect of the invention, the coating source is produced by immersing or soaking the carrier in a solution containing the coating material such that the carrier absorbs and/or becomes saturated with the solution. In this way, a very simple production of the coating source is enabled. The elongated structure of the coating source particularly allows its use as an "endless source". This preferably means that the same coating source can be used for a plurality of coating processes. In particular, the coating source is much longer than is necessary for one coating process. In a coating process, the coating source is preferably heated only in portions or only over a portion and/or its coating material is evaporated only in portions or only from a portion. For a further coating process, the coating source can then be moved further along and/or a further portion of the coating source can be heated and/or coating material from the further portion can be evaporated. It is therefore not necessary to change the coating source after a coating process; instead, only a next portion of the elongated coating source needs to be fed or guided into a corre- sponding evaporation device. This can in particular be performed in a vacuum. Thus, continuous operation is made possible by the proposed coating source. This is conducive to particularly efficient, simple and/or cost-effective coating.

A "coating process" in the sense of the present invention is preferably the operation or process in which coating material is continuously and/or uniformly evaporated from a portion of the coating source and/or in which the workpiece(s) is/are continuously and/or uniformly coated with evaporated coating material. The terms "evaporation process" and/or "evaporation cycle" should preferably be understood as synonymous with "coating process". In particular, a coating process is completed when the coating source or a portion thereof and/or the workpiece(s) need to be changed.

Particularly preferably, the carrier is designed as a woven, knitted or warp-knitted mesh. This preferably ensures that the carrier has sufficient interspace volume to accommodate the coating material in these interspaces. This allows a simple, efficient, uniform and/or cost-effective coating. In particular, the coating material can also be distributed inhomogeneously in the carrier, since it can be distributed over the longitudinal extent of the coating source or a portion of the coating source during evaporation and therefore still lead to a uniform distribution and/or coating. It is therefore not necessary to ensure a homogeneous distribution of the coating material in the carrier. This is conducive to a particularly simple and/or cost-effective production of the coating source.

The carrier is preferably made entirely or partially of metal or a metal alloy. This preferably ensures particularly good and/or uniform heat transfer. This is conducive to efficient and/or uniform evaporation of the coating material from the coating source.

Particularly preferably, the coating source is windable, coilable or reelable. This enables a particularly space-saving arrangement of the coating source, for example in or on a winding device and/or a winding drum. In an advantageous way, the portion of the coating source which is not heated and/or whose coating material is not evaporated, in particular if the coating source is designed as an endless source as described above, can be present in wound or coiled form and thus in a spacesaving manner. Preferably, the coating source can then be arranged completely inside the vacuum chamber. A vacuum feed-through for the coating source can thus be dispensed with. This is conducive to a particularly simple, compact and/or cost- effective construction and/or simple, efficient and/or cost-effective coating, in particular the continuous operation mentioned above is enabled or simplified.

Another aspect of the present invention, which may also be realised independently, relates to a coating apparatus for coating one or more workpieces with coating material, the coating apparatus comprising an evaporation device for evaporating the coating material from a flexible, elongated coating source. Advantageously, this provides a coating apparatus in which a flexible, elongated coating source can be used. This results in corresponding advantages, in particular a simple, efficient and/or cost-effective coating and/or a simple, compact and/or cost-effective construction of the coating apparatus.

Preferably, the coating apparatus has an elongated holding device for one or more workpieces, the holding device being elongated and/or extending parallel to the evaporation device and/or coating source. Thus, in an advantageous way, the workpiece(s) is/are arranged or can be arranged along the longitudinal extension of the evaporation device and/or coating source. In particular, the coating apparatus is designed to evaporate the coating material over the entire longitudinal extension of the holding device or the coating chamber or vacuum chamber. This enables a par- ticularly uniform coating of all workpieces.

Preferably, the coating apparatus comprises a first coating chamber for a first coating and a second coating chamber for a second coating, the two chambers being separable from each other, wherein the evaporation device is provided in the sec- ond coating chamber for coating by thermal evaporation. The first coating is preferably carried out by sputtering. This allows for a very compact coating apparatus in which at least two different coatings are possible.

Particularly preferably, the first coating is an antireflection coating or a reflection coating, and/or the second coating is a hydrophobic and/or oleophobic coating. Preferably the coating apparatus has a winding device and/or a winding drum for unwinding and/or rewinding or winding up the coating source. In an advantageous way, the coating source can be present (partially) wound or coiled in the coating apparatus, in particular the vacuum chamber. This is conducive to a particularly simple, compact and/or cost-effective construction.

Particularly preferably, the winding device is designed to unwind a portion of the coating source provided with the coating material for the evaporation of the coating material, for example from a first drum of the winding device, and/or to (re)wind a used portion of the coating source, in particular after the evaporation of the coating material, for example onto a second drum of the winding device. In this way, preferably always only the portion of the coating source actually required for the evaporation process is unwound. This is conducive to a particularly simple, compact and/or cost-effective construction.

Preferably, the coating apparatus and/or the evaporation device has a preferably elongated guide for guiding the coating source. Particularly preferably, the guide is designed in such a way that the guided coating source preferably contacts or rests or lies against the guide, in particular tensioned, over the entire longitudinal exten- sion of the guide. This is conducive to efficient coating; in particular, the guide can ensure that the coating source has an optimum distance from the workpiece(s) for the coating.

Preferably, the guide is designed to heat the coating source, in particular over the entire longitudinal extension of the guide. This is conducive to a particularly simple and/or compact construction in which the guide is designed both to guide and heat the coating source. In addition, a particularly simple and/or efficient heat transfer to the coating source is made possible, in particular when the coating source rests against the guide as described above. This is conducive to particularly simple, effi- dent and/or cost-effective coating, in which in particular a constant evaporation rate over a defined period of time and/or particularly uniform coating is made possible.

Another aspect of the present invention, which may also be realised independently, relates to an evaporation device for evaporating a coating material, the evaporation device comprising a guide for guiding and heating a flexible, elongated coating source provided with the coating material. In particular, the guide is designed for heating and/or for a contact between the coating source and the guide over the en- tire longitudinal extension of the guide. This allows corresponding advantages to be achieved.

Another aspect of the present invention, which may also be realised independently, relates to a method for coating one or more workpieces with a coating material. In this method, a flexible, elongated coating source provided with the coating material is produced and/or provided as described above, and/or the proposed coating apparatus is used for the coating. This allows corresponding advantages to be achieved.

Preferably, the coating source is heated portion by portion so that only the coating material of a respective portion of the coating source is evaporated.

The coating source is preferably subsequently moved further along, so that a fur- ther portion of the coating source is heated, whereby coating material is evaporated from the further portion. In an advantageous way, this allows the same coating source to be used for a plurality of coating processes, in particular as an endless source. In particular, the same coating source can be used for a plurality, in particular a large number, of coating processes. In particular, a continuous coating opera- tion is made possible. This is conducive to particularly simple, efficient and/or cost- effective coating.

The aforementioned aspects as well as the features and aspects of the present invention that follow from the further description and claims can be realized inde- pendently of each other, but also in any combination.

Further aspects, advantages and features of the present invention follow from the claims and the following description of a preferred embodiment based on the drawings. It shows:

Fig. 1 a schematic section of a coating apparatus in a first coating position;

Fig. 2 a schematic section of the coating apparatus according to Fig. 1 in a second coating position;

Fig. 3 a schematic view of a coating source; Fig. 4 a schematic perspective view of an evaporation device; Fig. 5 a schematic section of the evaporation device according to Fig. 4; Fig. 6 a detail of the evaporation device according to Fig. 4; and Fig. 7 a further detail of the evaporation device according to Fig. 4.

In the figures, some of which are not to scale and are only schematic, the same reference signs are used for the same, similar or corresponding parts and components, resulting in corresponding or comparable characteristics and advantages, even if no repeated description is given.

Fig. 1 and Fig. 2 show a proposed coating apparatus 1 each in a schematic sec- tion. Figs. 1 and 2 show the coating apparatus 1 in different coating positions or when applying different coatings to workpieces 2.

The coating apparatus 1 is designed for the coating of one or more in particular optical substrates or workpieces 2.

The term "optical substrate" or "optical workpiece" should preferably be understood broadly and may include a variety of light-transmissive, partly light transmissive or reflective objects. An "optical workpiece" or "optical substrate" may, for example, be an optical lens, a lens for spectacles, an optical visor for a helmet, for example for a motorcycle helmet or ski helmet, a screen or display of a mobile phone, a car window, a car mirror or the like, or a blank for any of these objects. In particular, the term "optical substrate" or "optical workpiece" in the sense of the present invention covers both smaller workpieces 2, such as lenses or spectacle lenses, and work- pieces 2 with larger surface, such as helmet visors or car windows.

However, the present invention is preferably not limited to the coating of optical substrates or optical workpieces 2. In particular, the coating apparatus 1 can also be designed and/or used for coating other workpieces 2, in particular substrates or workpieces 2 which are to be provided with a hydrophobic and/or oleophobic coating. The surface to be coated on a workpiece 2 can be flat or curved, in particular convex and/or concave. It is also possible for a workpiece 2 to have both flat and curved surfaces to be coated. In the example shown in Figs. 1 and 2, the workpieces 2 have curved, in particular convexly curved, surfaces to be coated. The workpieces 2 in the illustrated example are particularly preferred helmet visors, for example for motorcycle helmets and/or ski helmets. However, the proposed coating apparatus 1 can preferably also be designed and/or used for coating other, in particular flat and/or curved, work- pieces 2.

The coating apparatus 1 is preferably designed for the application of a plurality of, in particular different, coatings. The coating apparatus 1 is preferably designed for a first coating or main coating, in particular an antireflection coating or a mirror or reflection coating, and a second or final coating, in particular a hydrophobic and/or oleophobic coating. However, it is also possible for the coating apparatus 1 to be designed for one coating only, in particular a hydrophobic and/or oleophobic coating. Preferably, the coating apparatus 1 has a coating chamber, in particular a vacuum chamber or main chamber 3, for a (first) coating, in particular a main coating and/or antireflection coating or mirror coating / reflection coating.

Preferably, the coating apparatus 1 has a (further) coating chamber, in particular a (further) vacuum chamber or antechamber 4, for a (second or further) coating, in particular a final coating and/or hydrophobic and/or oleophobic coating.

In particular, the coating apparatus 1 thus has two chambers 3, 4, which are preferably separated or separable or spaced apart from each other.

Preferably, the two chambers 3, 4 are connected and/or share an opening or passage. This opening or passage can preferably be closed, in particular gas-tight, such that the chambers 3, 4 are separated/disconnected from each other. In particular, when separated/disconnected, different vacuums may be established in the different chambers 3, 4. However, the main chamber 3 is preferably only optional. In particular, the coating apparatus 1 may also have only the antechamber 4 and/or be designed for only one coating (process), preferably a hydrophobic and/or oleophobic coating (process).

Preferably the coating apparatus 1 or the antechamber 4 has a door 5. The door 5 is preferably swivel-mounted or can preferably be pivoted or swung open. The antechamber 4 and the optional main chamber 3 is/are preferably accessible via the door 5. The door 5 can preferably be closed gas-tight, so that a vacuum can be generated in the chambers 3, 4.

The coating in the main chamber 3 and/or the first coating and/or main coating and/or antireflection coating or mirror coating / reflection coating is preferably carried out by cathode evaporation / sputtering. In this process, atoms are released from a solid body, the so-called target, by the impact of high-energy ions and enter into a gas phase. Particularly preferably, the coating process is carried out by so- called magnetron sputtering, in which a magnetic field is arranged behind the cathode or target in addition to an applied electric field. The coating apparatus 1 or main chamber 3 preferably has at least one sputter source / target 3A. The coating apparatus 1 or main chamber 1 preferably has a plurality of sputter sources / targets 3A, especially in pairs. In the illustrative example, the coating apparatus 1 or main chamber 3 preferably has six sputter sources / targets 3A and/or three pairs of sputter sources / targets 3A.

The sputter sources / targets 3A are preferably cylindrical.

The sputter sources / targets 3A are preferably arranged in the main chamber 3 in such a way that one or more workpieces 2 can be coated in the main chamber 3 from several sides, in the example shown from three sides, in particular simultaneously.

The coating in main chamber 3 is preferably carried out in a vacuum, in particular in a high vacuum, and/or at an (absolute) pressure of less than 0.001 mbar. Preferably, the coating apparatus 1 or main chamber 3 has a vacuum pump or the like (not shown) to evacuate the main chamber 3 accordingly. The coating in the antechamber 4 and/or the second/further coating and/or final coating and/or hydrophobic and/or oleophobic coating is preferably carried out by thermal evaporation. In this process, a coating material B is heated or warmed up to a temperature near the boiling point of the coating material B. This is done in particular by means of an electrical heater, but can also be done in another way, for example by means of a laser. The heating causes a material vapour to form which moves to the substrate(s) or workpiece(s) 2 and is deposited or condensed on its/their surface(s). As a result, a thin layer of the evaporated / vaporized coating material is formed on the surface of the substrate(s) or workpiece(s) 2.

In the sense of the present invention, the terms "evaporating" and "evaporation" are preferably broadly understood as a process during which the coating material B changes into a gaseous phase. In particular, the term "evaporation" in the sense of the present invention can also be understood as sublimation, i.e. a direct transition of the coating material B from the solid to the gaseous phase. However, it is also possible that the coating material B first temporarily changes into a liquid phase and then into the gaseous phase. Preferably, the term "evaporation" in the present invention can also be replaced by "sublimation" as required. The same applies to replacing the term "evaporating" by the term "sublimating".

Further, the terms "evaporating" and "evaporation" may also be replaced by the terms "vaporizing" and "vaporization", which are particularly preferably to be understood as equivalent in the sense of the present invention. In particular, the evaporation process may also take place at or above the boiling point of the coating materi- al B.

The temperature at which the coating material B evaporates / sublimates is preferably more than 300 °C, in particular more than 400 °C, and/or less than 600 °C, in particular less than 500 °C. The evaporation temperature / sublimation temperature can be close to the decomposition temperature of the coating material B.

The gaseous coating material B is preferably deposited on the workpiece(s) 2 and forms there an in particular hydrophobic and/or oleophobic coating and/or is in par- ticular chemically coupled to the surface to be coated. As coating material B, in particular for hydrophobic and/or oleophobic coating, silicon compounds are used in particular, particularly preferably silicon dioxide or compounds based on silicon dioxide and/or organosilicon compounds. In addition, fluorine-based compounds are also possible, in particular (hydro)fluorocarbon compounds, perfluorinated polyethers or fluorinated organic silicon compounds. Other substances or materials that have hydrophobic and/or oleophobic properties as coatings can also be used, for example tetramethyldisiloxane.

The hydrophobic and/or oleophobic coating is characterized in particular by a con- tact angle with ultrapure water of > 1 10° and/or a surface energy of < 30 mN/m per meter. For an exemplary workpiece 2 designed as a plastic spectacle lens of 70 mm diameter with a diopter of -2.00, the sliding angle with the convex side on a finely structured cotton base is preferably < 6°. The coating in the antechamber 4 is preferably carried out in a vacuum, in particular in a low or medium vacuum, if necessary also in a high vacuum. Preferably, the coating is carried out at an (absolute) pressure greater than 0.01 mbar, in particular greater than 1 mbar and/or less than 50 mbar, in particular less than 40 mbar. However, higher or lower pressures are also possible, as required. Preferably, the coating apparatus 1 or antechamber 4 has a vacuum pump or the like (not shown) to evacuate the antechamber 4 accordingly.

It may also be advantageous to carry out the coatings in the main chamber 3 and antechamber 4 at the same pressure or vacuum, and/or to keep the chambers 3, 4 at the same pressure or vacuum, in particular a pressure of less than 0.001 mbar or a high vacuum, for example if the coatings in the main chamber 3 and antechamber 4 are carried out directly after each other or together. In this case the coating apparatus 1 may have a common vacuum pump for both chambers 3, 4. In addition, there is no need for an air lock or the like between the chambers 3, 4.

The coating apparatus 1 and/or antechamber 4 preferably has at least one evaporation device 6. The evaporation device 6 is arranged in particular in the antechamber 4. In the illustrative example according to Figs. 1 and 2, only one evaporation device 6 is arranged in the coating apparatus 1 and/or antechamber 4. However, it is also possible to use a plurality of evaporation devices 6 for the coating process and/or to arrange a plurality of evaporation devices 6 in the coating apparatus 1 and/or antechamber 4, in particular for a simultaneous coating from several sides. In particular, a coating of workpieces 2 on both sides and/or a coating of two opposite surfaces of the same workpiece 2 can be realized in this way.

The evaporation device 6 can preferably be swivelled/pivoted. In particular, the coating apparatus 1 and/or the evaporation device 6 has a swivel device 7 for this purpose. Preferably, the evaporation device 6 can be swivelled or advanced or adjusted to the workpiece(s) 2 by means of the swivel device 7 for coating and/or an optimum coating distance between the evaporation device 6 and the workpiece(s) 2 can be set/adjusted.

The evaporation device 6 is preferably designed to evaporate and/or sublime the coating material B, in particular from a coating source 10, in order to coat the work- pieces 2, in particular for a hydrophobic and/or oleophobic coating. The evaporation device 6 is particularly preferably designed to heat or warm the coating material B, which is preferably present in the solid state, so that the coating material B evaporates and/or sublimates and/or forms an in particular linear and/or elongated evaporation cloud. A particularly preferred design/construction of the evaporation device 6 will be explained in more detail later with reference to Figs. 4 to 7.

The coating apparatus 1 preferably has a holding device 8 for the workpiece(s) 2. The holding device 8 is preferably designed to hold a plurality of workpieces 2 for the coating(s).

The coating apparatus 1 can have a plurality of holding devices 8, for example one holding device 8 per chamber 3, 4 and/or a separate holding device 8 for each of the different coatings. However, the coating apparatus 1 has particularly preferably only one (common) holding device 8.

Particularly preferably, the (common) holding device 8 for the respective coating in the respective chamber 3, 4 is movable, rotatable and/or pivotable. Preferably, the coating apparatus 1 has a guide rail 9, in particular in the antechamber 4, for guided displacement or guided shifting of the holding device 8. The coating apparatus 1 , the main chamber 3, the antechamber 4, the targets 3A, the evaporation device 6, the holding device 8, a holding portion 8A of the holding device 8 and/or the surface to be coated, which can in particular also comprise a plurality of workpieces 2, is/are preferably oblong or elongated, in particular in the direction of the drawing plane of the figures 1 and 2 or transversely or perpendicularly to the section shown in figures 1 and 2.

Particularly preferably, the section shown in Figs. 1 and 2 is a horizontal section and/or the coating apparatus 1 , main chamber 3, antechamber 4, targets 3A, evap- oration device 6, holding device 8, the holding portion 8A and/or the surface to be coated extends/extend in vertical direction. However, it is also possible that the section shown in Figures 1 and 2 is a vertical section and/or the coating apparatus 1 , main chamber 3, antechamber 4, targets 3A, evaporation device 6, holding device 8, the holding portion 8A and/or the surface to be coated extends/extend in the horizontal direction.

Preferably, the targets 3A, the evaporation device 6, the holding device 8, the holding portion 8A and/or the surface to be coated extend parallel to each other and/or have at least substantially the same longitudinal extension and/or extend at least substantially over the entire length of one dimension, in particular the height, of the coating apparatus 1 , main chamber 3 and/or antechamber 4.

The longitudinal extension of the coating apparatus 1 , main chamber 3, antechamber 4, targets 3A, evaporation device 6, holding device 8, the holding portion 8A and/or the surface to be coated is preferably greater than 1 m, in particular greater than 1.5 m and/or less than 3.5 m, in particular less than 3 m.

The main chamber 3 and/or antechamber 4 are at least essentially square, rectangular, polygonal, for example octagonal, or round or circular in a section transverse or perpendicular to their longitudinal extension and/or height, in particular the section shown in Figs. 1 and 2. In the illustrative example, preferably the main chamber 3 is designed as a rectangle with additional niches for the targets 3A and/or the antechamber 4 is designed as an octagon. However, other solutions are also possible here. The diameter or the diagonal of the cross-section of the main chamber 3 and/or antechamber 4 and/or the width of the chambers 3, 4 is preferably each larger than 0.5 m and/or smaller than 2 m. Preferably the holding device 8 can be placed completely in the antechamber 4 and/or rotated around its full circumference or by 360° in the antechamber 4.

In the following, a particularly preferred design/embodiment of the holding device 8 and the coating apparatus 1 with such a holding device 8 is described in more de- tail, referring to Figs. 1 and 2.

The holding device 8 preferably has at least one holding portion 8A. The holding portion 8A is preferably designed to hold one or more workpieces 2. The holding portion 8A is preferably cylindrical and/or elongated or oblong. The holding portion 8A is preferably designed as a collecting stand.

The holding portion 8A is preferably designed to hold a plurality of workpieces 2 along its length / longitudinal extent and/or in rows. If the holding device 8 and/or the holding portion 8A is vertically aligned, the workpieces 2 are or can be arranged in particular one above the other in the holding portion 8A. In the case of optical helmet visors as workpieces 2, preferably more than 5, in particular more than 10, and/or less than 20 workpieces 2 / helmet visors are arranged or can be arranged along the length / longitudinal extent of the holding portion 8A and/or the holding device 8 and/or one above the other.

In the illustrative example shown in Figs. 1 and 2, the holding portion 8A can preferably hold two (vertical) rows of workpieces 2, in particular arranged opposite of each other. Flowever, other solutions are also possible here. For example, in the case of smaller workpieces 2, such as lenses, these could be arranged in rows along the circumference of the holding portion 8A.

The holding portion 8A is preferably rotatable or turnable around its longitudinal axis A1. Preferably by rotating the holding portion 8A around the axis A1 , an optimal alignment of the workpieces 2 to the targets 3A and/or the evaporation device 6 for the respective coating is possible. Particularly preferably, the holding device 8 has two holding portions 8A, which are connected to each other by a connecting portion 8B.

In cross-section, the connecting portion 8B is preferably cross-shaped, as shown in Figs. 1 and 2 in particular.

Preferably the (entire) holding device 8, in particular the holding portions 8A and the connecting portion 8B, can be rotated around an axis A2, in particular in the antechamber 4.

The axis A2 preferably runs parallel to the axis A1 and/or the longitudinal extension of the coating apparatus 1 , antechamber 4 and/or holding device 8. Particularly preferably, the axis A2 is located centrally between the two holding portions 8A and/or runs, in particular centrally, through the connecting portion 8B.

Fig. 1 shows the coating apparatus 1 / holding device 8 in a first coating position and/or main coating position and/or during coating in main chamber 3, preferably with one holding portion 8A inside the main chamber 3 and the other holding portion 8A, if present, in the antechamber 4.

In the first coating position, the connecting portion 8B is preferably used/provided as a particularly gas-tight seal between the chambers 3 and 4, in particular the connecting portion 8B being pressed against an opening between the antechamber 4 and the main chamber 3.

The connecting portion 8B is preferably designed as a door or closure for the in particular gas-tight closing of the main chamber 3.

Preferably, in the first or main coating position, only coating in the main chamber 3 takes place. Optionally, however, the workpieces 2 in the holding portion 8A located in the antechamber 4 can be coated already by means of the evaporation device 6.

Preferably, the holding portion 8A rotates around the axis A1 during coating in the main chamber 3 to ensure a coating as uniform as possible. Alternatively, the holding portion 8A rotates only between two coating processes to change the workpieces 2 to be coated, for example by 180°. After coating in the main chamber 3, the holding device 8 is preferably brought into a second coating position and/or final coating position, which is shown in particular in Fig. 2. For this purpose, the holding device 8 is preferably displaced or moved, in particular linearly, via the guide rail 9 until the holding device 8 is located in particular centrally in the antechamber 4. In particular, the axis A2 is then arranged in the centre of the antechamber 4. The two holding portions 8A are then preferably arranged completely in the antechamber 4. Then the holding device 8 is rotated around the axis A2, in particular so that the holding device 8 is arranged diagonally or at an angle (with respect to the door 5, guide rail 9 and/or opening to the main chamber 3) in the antechamber 4 and/or so that the workpieces 2 previously coated in the main chamber 3 and/or the holding portion 8A holding these workpieces 2 face/faces the evaporation device 6. In the illustrative example according to Fig. 2, this is the holding portion 8A shown in the bottom left corner of Fig. 2. Flere, the holding device 8 is thus preferably turned/rotated by approximately 135°.

In the second coating position, preferably the second/further coating and/or final coating and/or hydrophobic and/or oleophobic coating is carried out.

Preferably, the holding portion 8A is rotated around the axis A1 during coating in the antechamber 4 to ensure uniform coating of the workpieces 2. Alternatively, the holding portion 8A rotates only between two coating processes to change the workpieces 2 to be coated, for example by 180°.

If a second/further holding portion 8A is provided, which also carries workpieces 2 to be coated, this holding portion 8A is then moved into the main chamber 3 and/or brought into the first coating position, in particular by rotating again about the axis A2 and moving on the guide rail 9.

Preferably, the main chamber 3 is sealed gas-tight and/or is separated from the antechamber 4 after insertion of the second holding portion 8A, in particular by means of the connecting portion 8B.

Then the workpieces 2 of the second holding portion 8A are analogously coated in the main chamber 3. Particularly preferably, the workpieces 2 arranged in the first holding portion 8A, which have been coated according to the previously described process preferably in both the main chamber 3 and the antechamber 4, are changed, while the work- pieces 2 in the second holding portion 8A are coated in the main chamber 3.

To change the coated workpieces 2 of the first holding portion 8A, preferably door 5 is opened and/or the antechamber 4 is ventilated. The vacuum in the main chamber 3 is not affected by this, in particular due to the gas-tight sealing by means of the connecting portion 8B.

Preferably, to make it easier to reach the first holding portion 8A and/or the coated workpieces 2 for changing the workpieces 2, the evaporation device 6 can be swivelled to the side or away, in particular by means of the swivel device 7. In an ad- vantageous way, the evaporation device 6 can be moved by means of the swivel device 7 preferably into an evaporating position and a changing position.

The coated workpieces 2 are preferably removed from the first holding portion 8A and new workpieces 2 or workpieces 2 to be coated are inserted into the first hold- ing portion 8A. Alternatively, it is also possible to remove the entire first holding portion 8A with the coated workpieces 2 and replace it with a further holding portion 8A with workpieces 2 to be coated. In particular, the holding portions 8A can be or are arranged in a detachable or exchangeable manner at the connecting portion 8B. After changing, the antechamber 4 is preferably sealed gas-tight, in particular by closing the door 5, and is brought back to the desired vacuum and/or the desired (absolute) pressure.

Then the coating apparatus 1 is again in the initial state shown in Fig. 1 , in which one of the holding portions 8A is arranged in the main chamber 3, whose workpieces 2 are coated in the main chamber 3, while the other holding portion 8A with workpieces 2 still to be coated is arranged in the antechamber 4.

The method steps described above are then preferably repeated.

The described method and/or the coating apparatus 1 preferably enables a continuous coating process, in which in particular a change of coated workpieces 2 with simultaneous coating of workpieces 2 in the main chamber 3 is realized in an advantageous way. This is particularly advantageous because the coating in the main chamber 3 usually takes longer than the coating in the antechamber 4. By changing the workpieces 2 during this longer coating, (time) optimized operation is achieved.

The method steps described above can also be implemented in any other order. For example, all workpieces 2 can first be coated in the main chamber 3 and only then in the antechamber 4. For this purpose, preferably after coating the workpieces 2 received in the first holding portion 8A in the main chamber 3, the holding de- vice 8 is moved into the antechamber 4, turned there by 180° and then the other holding portion 8A is moved into the main chamber 3 and its workpieces 2 are coated. Preferably, all workpieces 2 are subsequently coated in the antechamber 4. For example, it is also possible to provide a second evaporation device 6 opposite the (first) evaporation device 6 in the antechamber 4, so that workpieces 2 can be coated simultaneously at both holding portions 8A.

It is also possible to have a coating in the antechamber 4 first and a subsequent coating in the main chamber 3. As mentioned before, the first coating and/or main coating and/or anti-reflection coating or mirror coating / reflective coating is only optional. Thus, it is also possible that the coating apparatus 1 only has the antechamber 4 and/or one or more evaporation devices 6, but no main chamber 3 and/or targets 3A. In this case, the holding device 8 can also be arranged stationary or immovable or only rotatable in the antechamber 4. It is also not mandatory to use the main chamber 3 in a proposed coating process or to coat the workpiece(s) 2 in the main chamber 3, even if the coating apparatus 1 has the main chamber 3.

Fig. 3 shows a schematic diagram of a portion of a proposed coating source 10.

The coating source 10 is preferably designed or provided for use in the coating apparatus 1 and/or the evaporation device 6 and/or for providing coating material B for an in particular hydrophobic and/or oleophobic coating of the workpieces 2. Preferably, the coating apparatus 1 and/or evaporation device 6 comprises the coating source 10. The coating source 10 preferably has a carrier 10A. The carrier 10A is preferably designed for receiving and/or holding the coating material B and/or for releasing the coating material B, in particular by heating, in particular as a gaseous phase. Preferably, the carrier 10A is porous and/or has a plurality, in particular a large number, of interstitial spaces / intermediate spaces and/or a large interspace / interstitial volume in which the coating material B is or can be absorbed / received.

The coating material B is preferably waxy and/or is preferably present in solid or cured form in the carrier 10A.

Fig. 3 shows the coating source 10 as an example with coating material B only partially contained in carrier 10A or with carrier 10A only partially filled, while another portion of the coating source 10 (in Fig. 3 on the left side) is shown with empty car- rier 10A / without coating material B. For example, the coating material B in this portion may already have completely evaporated from the carrier 10A.

The coating source 10 and/or carrier 10A is preferably linear, elongated and/or oblong. Particularly preferably, the coating source 10 and/or the carrier 10A is flexible and/or bendable, in particular both filled and empty or both with and without coating material B.

Preferably, the coating source 10 is strip-like, band-like, belt-like, strand-like, thread-like, wire-like and/or rope-like and/or in the form of a strip, band, belt, strand, thread, wire or rope. In particular, the length or longitudinal extension of the coating source 10 and/or carrier 10A is several/multiple times greater than its diameter.

The length or longitudinal extension of the coating source 10 and/or carrier 10A preferably corresponds at least to the length or longitudinal extension of the evapo- ration device 6 and/or the holding device 8 and/or the surface to be coated of the workpiece 2 or the workpieces 2. Particularly preferably, the length or longitudinal extension of the coating source 10 and/or the carrier 10A is several/multiple times longer than the evaporation device 6 and/or the holding device 8 and/or the surface to be coated, in particular by more than twice, particularly preferably by more than five times, especially preferably by more than ten or twenty times. The length of the coating source 10 and/or carrier 10A is preferably at least 2 m, in particular at least 4 m, particularly preferably at least 10 m, especially preferably at least 20 m and/or at most 60 m, in particular at most 40 m, and/or about 20 m or 25 m.

Particularly preferably, the coating source 10 and/or the carrier 10A can be coiled/wound and/or can be arranged in a coil / spiral. In particular, the coating source 10 or the carrier 10A, in particular both filled and empty or both with and without coating material B, can be wound/coiled and unwound/uncoiled, for exam- pie on a winding drum, winding roller or the like.

The coating source 10 and/or the carrier 10A preferably has a round or circular cross-section or a rectangular or square cross-section. Alternatively, the coating source 10 and/or the carrier 10A can also be designed strip-like or planar and/or preferably at least substantially flat in cross-section.

The diameter or diagonal of the coating source 10 and/or carrier 10A is preferably greater than 1 cm or 5 cm and/or smaller than 30 cm or 20 cm. Particularly preferably, the carrier 10A is in the form of woven, knitted or warp- knitted mesh (wire) and/or has a plurality and/or large number of interspaces to absorb/receive/accommodate the coating material B.

The carrier 10A is preferably made of a metal or metal alloy. For example, the car- rier 10A can be made of stainless-steel wire and/or steel wool. Particularly preferably, the carrier 10A is made of an alloy containing nickel and/or copper. For example, the carrier 10A may be made of a nickel-copper alloy and/or an alloy known under the trade name "Monel". "Monel" is an alloy consisting of about 65% nickel, 33% copper and 2% iron.

Alternatively, the carrier 10A can also be made of a ceramic material, for example on an AIO_x basis.

The carrier 10A is preferably temperature stable and/or retains its properties even at high temperatures or temperatures required for the evaporation of the coating material B, in particular temperatures above 450 °C or 500 °C. The following describes a particularly preferred method for the production of the coating source 10 and/or for providing the carrier 10A with the coating material B.

The coating material B, in particular for a hydrophobic and/or oleophobic coating, particularly preferably silicon dioxide or based on silicon dioxide, is received or dissolved in a (highly) volatile and/or low-boiling solvent. The solvent used is preferably halogenated hydrocarbons, in particular polyfluorinated hydrocarbons.

Preferably, the proportion of coating material B in the solution thus prepared is at most 20 %, in particular at most 10 %, particularly preferably at most 2 %, the remainder preferably consisting of solvent.

The (empty) carrier 10A is preferably immersed or soaked in the solution. As a result, the carrier 10A preferably absorbs or soaks the solution and/or becomes satu- rated with the solution and/or the solvent diffuses or drags the coating material B into the carrier 10A, in particular its interspaces.

Preferably no overdosage of solution and/or coating material B is possible and/or the coating source 10 and/or carrier 10A saturates itself.

Preferably, the carrier 10A is moved or drawn through the solution, in particular continuously and/or at a constant speed.

Then, or after the carrier 10A is saturated, the coating source 10 is removed from the solution and dried or allowed to dry. Thereby, the (highly) volatile and/or low- boiling solvent evaporates. After the drying and/or evaporating of the solvent, preferably at least essentially only the, in particular cured, coating material B, remains in the coating source 10 and/or carrier 10A. The proportion of solvent remaining in the coating source 10 and/or carrier 10A is preferably less than 1 % of the coating material B in the coating source 10 and/or the carrier 10A.

By the manufacturing process described above, preferably a mass of more than 20 mg, in particular more than 30 mg and/or of less than 60 mg, in particular less than 50 mg and/or of about 40 mg of coating material B is introduced into or absorbed or received by the carrier 10A preferably per two metres of length of the coating source 10 and/or carrier 10A. Preferably, sufficient coating material B is absorbed or received so that the coating can be applied in (only) one coating process and/or heating process and/or so that when a portion of the coating source 10 is heated during a coating process and/or over a period of about one hour, an in particular continuous release or evaporation of the coating material B is made possible and/or so that the coating material B after a coating process and/or after about one hour is at least substantially completely evaporated from the heated portion of the carrier 10A and/or coating source 10.

Figs. 4 to 7 show the proposed evaporation device 6. Fig. 4 shows the evaporation device 6 in a schematic, perspective view. Fig. 5 is a section along the cutting line V-V shown in Fig. 4. Figs. 6 and 7 show details of the respective ends of the evaporator 6 in an enlarged view.

The evaporation device 6 is preferably linear, oblong or elongated and/or designed to hold the coating source 10 and/or to evaporate the coating material B from the coating source 10.

The evaporation device 6 preferably extends at least substantially over the entire longitudinal extension of the surface to be coated of the workpiece(s) 2 and/or of the holding device 8 and/or of one dimension, in particular the height, of the coating apparatus 1 and/or antechamber 4. When installed, the evaporation device 6 preferably extends in vertical or horizontal direction.

The longitudinal extension of the evaporation device 6 is preferably greater than 1 m, in particular greater than 1.5 m and/or less than 3 m, in particular less than

2.5 m and/or is about 2 m.

Particularly preferably, the evaporation device 6 is designed as or is a linear evaporator.

The evaporation device 6 is preferably pivotable or movable and/or mounted pivotably or movably in the coating apparatus 1 and/or antechamber 4, as already described in connection with Figs. 1 and 2. In particular, the coating apparatus 1 or the evaporation device 6 has the swivel device 7. The swivel device 7 preferably has at least one swivel bearing 7A and/or at least one swivel arm 7B, in the illustrative example preferably two swivel bearings 7A and/or two swivel arms 7B. Particularly preferably, the coating apparatus 1 , evaporation device 6 and/or swivel device 7 has a swivel bearing 7A and/or a swivel arm 7B at each of the respective ends of the evaporation device 6, as shown in particular in Figs. 4, 6 and 7. When the evaporation device 6 is vertically aligned, the swivel device 7 has, in particular, one swivel bearing 7A and/or one swivel arm 7B each at the upper and lower ends of the evaporation device 6.

Preferably, the evaporation device 6 is connected or connectable via the (respective) swivel arm 7B with the (respective) swivel bearing 7A and/or with the coating apparatus 1 and/or antechamber 4 and/or with a wall of the antechamber 4.

Preferably, the (respective) swivel arm 7B is hinged and/or swivel-mounted at both its ends, in particular at both the evaporation device 6 and the swivel bearing 7A. In particular, the swivel arm 7B is preferably pivotable about two axes arranged at its ends.

Preferably, the swivel device 7 and/or the respective swivel bearing 7A is partly arranged outside the antechamber 4 and/or is passed through a wall of the antechamber 4. The respective passages are preferably sealed gas-tight in such a way that the desired vacuum can be or is realized in the antechamber 4 and/or the main chamber 3.

Preferably, the swivel device 7 can be operated from outside the antechamber 4 and/or the evaporation device 6 can be swivelled from outside the antechamber 4. Particularly preferably, it is possible to swivel the evaporation device 6 and/or to operate the swivel device 7 in vacuum and/or without ventilation and/or without opening the antechamber 4.

The swivel device 7 may be operated and/or swivelled manually and/or by a drive, in particular electrically. In particular, an automatic swivelling or advancing of the evaporation device 6 is also possible, when the holding device 8 is in the (second) coating position and/or before the coating process with the evaporation device 6 starts. In the case of an automated and/or (electrically) driven swivel device 7, the swivel device 7 may also be arranged completely in the antechamber 4.

The evaporation device 6 preferably has a guide 6A for the coating source 10. In particular, the guide 6A is designed for guiding and/or heating or warming the coating source 10.

The guide 6A preferably extends at least substantially over the entire longitudinal extension of the evaporation device 6 and/or the holding device 8 and/or the sur- face to be coated of the workpiece(s) 2.

Preferably, the guide 6A is designed in such a way that the coating source 10 can be or is centrally guided in the guide 6A. Preferably, the guide 6A is designed for guiding and/or heating the coating source 10 along the longitudinal extension of the coating source 10 and/or is designed such that the longitudinal extension of the coating source 10 is parallel to the longitudinal extension of the guide 6A when guided and/or heated. Preferably, the coating source 10 or a (free or unwound) portion of the coating source 10 extends parallel to the evaporation device 6, guide 6A, holding device 8, holding portion 8A, surface of the workpiece(s) 2 to be coated and/or of one dimension, in particular the height, of the coating apparatus 1 and/or antechamber 4. Preferably, the coating source 10 extends in vertical or horizontal direction.

Particularly preferably, the coating source 10 or a (free or unwound) portion of the coating source 10 extends at least essentially over the entire longitudinal extension of the evaporation device 6, guide 6A, holding device 8, holding portion 8A, surface of the workpiece(s) 2 to be coated and/or of one dimension, in particular the height, of the coating apparatus 1 and/or antechamber 4.

Particularly preferably, the guide 6A is U-shaped or V-shaped in cross section and/or in a section transverse or perpendicular to its longitudinal extension, as shown in particular in Fig. 5.

The guide 6A is preferably plate-like and/or designed as a (metal) plate or (metal) sheet. The guide 6A is preferably made of a material with high thermal conductivity and/or a metal or metal alloy. The guide 6A is particularly preferably made of tantalum or a tantalum alloy.

The wall thickness of the guide 6A is preferably at most 1 mm, in particular at most 0.5 mm.

The guide 6A can be pre-loaded, pre-stressed and/or curved/bent, in particular to compensate for the thermal expansion of the guide 6A during the evaporation process.

The guide 6A is preferably bent and/or (in a front view) convex over its longitudinal extension, as shown in particular in Fig. 4. In particular, the guide 6A curves/bends outwards and/or in the coating position in the direction of the workpiece(s) 2 and/or the holding device 8.

The guide 6A is preferably designed and/or bent in such a way that the coating source 10 and/or a (free or unwound) portion of the coating source 10 preferably contacts and/or lies against the guide 6A at least substantially over the entire longitudinal extension of the guide 6A. This is realized in particular by the convex curvature/bend and/or by the curvature/bend towards the outside, as shown in Fig. 4.

Particularly preferably, the coating source 10 lies tensioned against the guide 6A and/or is guided tensioned in the guide 6A.

Preferably, the coating source 10 or a portion of the coating source 10 is in contact with and/or lies against the guide 6A at least essentially over the entire length of the guide 6A, in particular centred, during the coating process.

Preferably, the evaporation device 6 has a heater or heating device 6B, in particular an electric one. In the illustrative example, the heating device 6B is implemented by a plurality of, in particular four, heating wires 6C. The heating device 6B and/or the heating wires 6C is/are preferably designed to heat or warm up the guide 6A and/or coating source 10. Particularly preferably, the heating device 6B and/or heating wires 6C is/are in direct contact with the guide 6A and/or lies/lie directly against the guide 6A. This is conducive to a particularly good heat transfer. Preferably, the coating source 10 is heated directly by the guide 6A and/or indirectly by the heating device 6B and/or the heating wires 6C.

The heat transfer from the evaporation device 6, guide 6A, heating device 6B and/or heating wires 6C to the coating source 10 and/or coating material B is pref- erably by thermal conduction and/or thermal radiation.

Preferably, the evaporation device 6, guide 6A, heating device 6B and/or heating wires 6C is/are designed to heat, in particular uniformly, the coating source 10 and/or the coating material B contained therein over the entire longitudinal extent of the guide 6A and/or of the portion of the coating source 10 received/held/guided in the guide 6A and/or over the entire width of the coating source 10.

Preferably, the evaporation device 6, guide 6A, heating device 6B and/or heating wires 6C is/are designed to heat the coating source 10 and/or the coating material B contained therein to a temperature at which the coating material B vaporizes/evaporates or sublimates from the coating source 10 and/or to a temperature of more than 300 °C, in particular more than 400 °C, and/or of less than 600 °C, in particular less than 500 °C. The coating apparatus 1 or evaporation device 6 preferably has a current feedthrough 1 1 , in particular as shown in Figs. 4 and 6.

The current feed-through 1 1 is preferably arranged at one end of the evaporation device 6, for example at the upper end in the case of vertical alignment.

Via the current feed-through 1 1 the evaporation device 6, in particular the heating device 6B and/or the heating wires 6C, can be supplied with electric current. If necessary, other devices of the coating apparatus 1 and/or evaporation device 6, which are arranged in the antechamber 4, can also be supplied with electricity via the current feed-through 1 1 , for example an electric drive of the swivel device 7, a winding drive 12C, a vacuum pump or the like. Preferably, one or more power cables are fed or guided from the outside into the coating apparatus 1 and/or antechamber 4 via the current feed-through 11. The current feed-through 1 1 is preferably sealed gas-tight in such a way that the desired vacuum can be realized in the antechamber 4. The current feed-through 1 1 is thus used or provided in particular to lead power cables into the chambers 3, 4 from the outside in a sealed manner. For reasons of a clear illustration, such power cables are not shown in the figures.

The coating apparatus 1 or evaporation device 6 preferably has a coiling or winding device 12. A preferred embodiment of the winding device 12 is shown in Figs. 6 and 7. For reasons of a clear illustration, the coating source 10 is not shown in Figs. 6 and 7.

The winding device 12 is preferably designed to unwind / uncoil / unreel / unroll and/or to (re)wind / (re)coil / reel / roll up the coating source 10.

The winding device 12 is designed particularly preferably for winding up used/empty portions of the coating source 10 and/or for unwinding portions of the coating source 10 filled with coating material B.

Preferably, the winding device 12 has at least one winding roll, reel or drum 12A, which is arranged in particular at one end of the evaporation device 6. Particularly preferably, the winding device 12 has two winding rolls, reels or drums 12A and/or one winding roll, reel or drum 12A at each of the two respective ends of the evapo- ration device 6.

Preferably, the coating source 10 is or can be (partially) wound/coiled on the winding drum(s) 12A. The winding drums 12A are in particular designed as flat discs, around whose circumferential surface the coating source 10 is wound/coiled or windable/coilable.

The winding drum(s) 12A is/are preferably rotatably mounted on the coating apparatus 1 and/or the evaporation device 6. Preferably, the coating apparatus 1 , evaporation device 6 and/or winding device 12 (each) has a feed-through or guide element 12B behind the (respective) winding drum 12A. Through the guide element 12B the coating source 10 can preferably be led/guided from the winding drum 12A to the guide 6A or vice versa.

The coating source 10 is preferably guided from the (respective) winding drum 12A to the guide 6A through a (respective) opening 13 of the winding device 12 and/or evaporation device 6. The (respective) guide element 12B is preferably arranged between the (respective) winding drum 12A and opening 13.

Particularly preferably, the coating source 10 is deflected/redirected from or by the (respective) guide element 12B, for example from an at least substantially horizontal orientation on the (respective) winding drum 12A to a substantially vertical orientation in the guide 6A.

The (respective) guide element 12B is preferably funnel-shaped. This allows a par- ticularly defined guidance of the coating source 10 from or to the guide 6A.

Preferably, the (respective) guide element 12B has a notch, which is in particular designed to redirect the coating source 10 in the desired way. Preferably the coating apparatus 1 , evaporation device 6 and/or winding device 12 has two winding drums 12A, wherein the coating source 10 is partially wound on both winding drums 12A and/or is guided between the winding drums 12A in the guide 6A longitudinally stretched and/or unwound, in particular tensioned. Particularly preferably, the already used or empty portion of the coating source 10 and/or the carrier 10A is wound on one of the two winding drums 12A, in the illustrative example in particular at the lower end of the evaporation device 6.

Particularly preferably, the portion of the coating source 10 for the current coating process is guided between the two winding drums 12A in the guide 6A longitudinally stretched and/or unwound and/or tensioned.

Particularly preferably, a further portion of the coating source 10, still filled with coating material B, is wound on the other of the two winding drums 12A for further coating processes and/or as a supply, in the illustrative example in particular at the upper end of the evaporation device 6. Preferably, the coating source 10 runs from one of the two winding drums 12A, optionally through the guide element 12B and/or opening 13, via the guide 6A, optionally through another opening 13 and/or guide element 12B, to the other winding drum 12A.

Preferably, the guide 6A extends at least essentially over the entire distance between the two winding drums 12A and/or (the free or unwound portion of) the coating source 10 is guided and/or heated at least essentially over the entire distance between the two winding drums 12A.

However, it is also possible that the winding device 12 is only designed for winding up used/empty portions of the coating source 10 or only for unwinding portions of the coating source 10 for (further) coating processes and/or that correspondingly only one winding drum 12A is provided.

The winding device 12 preferably has a winding drive 12C for unwinding and/or (re)winding the coating source 10.

In the illustrative example according to Fig. 7, the winding drive 12C is shown as manual drive or as (hand) crank. However, other solutions are also possible here, in particular mechanically and/or automatically operated winding drives, for example an electric winding drive 12C.

Preferably the winding drive 12C can be operated in vacuum and/or without ventila- tion and/or without opening the antechamber 4 and/or door 5. In the case of a manually operated winding drive 12C, the winding drive 12C is preferably partially arranged outside the antechamber 4 to allow actuation from outside.

By actuating the winding drive 12C, for example by turning an appropriate hand crank, the winding drum(s) 12A is/are preferably set in rotation, which causes the coating source 10 to be wound up and/or unwound.

In particular, with two winding drums 12A, by actuating the winding drive 12C, the coating source 10 is unwound from one of the two winding drums 12A and/or wound onto the other winding drum 12A, preferably simultaneously. Preferably, at least one of the two winding drums 12A is directly set in rotation by actuating the winding drive 12C. The other winding drum 12A is preferably also set in rotation, which can also be done either directly by the winding drive 12C or indirectly via the coating source 10.

A particularly preferred coating method using the proposed coating apparatus 1 and/or evaporation device 6, in particular for a hydrophobic and/or oleophobic coating, is described in the following. First the workpiece(s) 2 and/or the holding device 8 with the workpiece(s) 2 is/are brought into the desired coating position, in particular as shown in Fig. 2. Optionally, the workpiece(s) 2 may have already been coated beforehand with a (first) layer, in particular an antireflection layer or a mirroring or reflecting layer, in particular in the main chamber 3 and/or the coating position shown in Fig. 1. Flowever, it is also possible that such a coating has been applied in another apparatus or that such a coating is not intended or provided.

Preferably, a vacuum, in particular a low vacuum or medium vacuum, if necessary also a high vacuum, is already present in the antechamber 4. Alternatively, the an- techamber 4 is brought to a vacuum, for example by means of a vacuum pump.

The evaporation device 6 is preferably swivelled and/or advanced towards the workpiece(s) 2 and/or the holding device 8. In particular, the distance between the evaporation device 6 and the workpiece(s) 2 and/or holding device 8 is adjusted in such a way that a particularly uniform coating of the workpiece(s) 2 is made possible.

The swivelling and/or advancing of the evaporation device 6 is performed in particular by means of the swivel device 7. The swivelling and/or advancing can be done automatically or by a user. When actuated by a user, the swivelling or advancing is preferably carried out from outside the antechamber 4, for example by a signal triggered by the user or manually, in which case the swivel device 7 is preferably accessible from the outside. When the evaporation device 6 and the workpiece(s) 2 and/or holding device 8 is/are in the desired position, the coating process and/or heating process and/or evaporation process is preferably started. In particular, the coating source 10 or the portion of the coating source 10 that is unwound/uncoiled and/or arranged in the guide 6A is warmed or heated. This is carried out particularly preferably by the heating device 6B and/or the heating wires 6C, which is/are in particular electrically heatable. The heating can be started automatically or by a user. It is also possible to preheat the evaporation device 6 and/or coating source 10 already before starting the coating process and/or evaporation process.

The heating of the coating source 10 by the heating device 6B and/or heating wires 6C is preferably only indirect, namely via the guide 6A. In particular, the coating source 10 is heated (directly) by the guide 6A.

By heating, the coating material B preferably evaporates or sublimates from the coating source 10. In the case of evaporation, the coating material B first becomes liquid and then changes into the gaseous phase. In this case, the liquid coating material B is preferably held in the respective interstitial spaces of the coating source 10 and/or carrier 10A, in particular by adhesive forces. The liquefied coating material B therefore does not flow within the coating source 10 and/or carrier 10A.

Heating is preferably uniform over the entire longitudinal extension of the evaporator device 6, holding device 8, workpiece(s) 2 and/or guide 6A. Preferably, the coating material B is evaporated or sublimated uniformly over this longitudinal extension from the coating source 10 and/or carrier 10A.

The gaseous coating material B preferably condenses evenly or uniformly on the surface to be coated of the workpiece(s) 2 and couples in particular chemically to the surface to be coated, so that the desired coating is formed. Such a coating process preferably takes longer than 30 minutes and/or less than two hours, particularly preferably about one hour.

The essential parameter(s) for the evaporation rate is/are preferably the temperature, the filling quantity of the heated portion of the coating source 10 and/or the time/duration of the warming or heating process. In particular, the evaporation rate also depends on the thickness and/or diameter of the coating source 10. The smaller the thickness and/or diameter of the coating Source 10, the higher the evaporation rate, since a thinner coating source 10 is easier or faster to heat.

Preferably, a constant evaporation rate is achieved over a defined period of time, in particular the average time between heat-up or warm-up and gradual emptying of the heated or warmed portion of the coating source 10.

Preferably, the coating process is finished and/or the workpieces 2 are coated when the coating material B has at least substantially completely evaporated or sublimated from the heated portion of the coating source 10.

For a further coating process the used portion of the coating source 10 in the guide 6A is replaced by an unused portion, preferably by means of the winding device 12 and/or by actuating the winding drive 12C.

The used and/or empty portion of the coating source 10 located in the guide 6A is preferably wound up, in particular by actuating the winding drive 12C, in particular onto one of the winding drums 12A, in the illustrative example the winding drum 12A arranged at the lower end of the evaporation device 6.

Preferably, a further/unused portion of the coating source 10, which is provided with coating material B for a further coating process, is unwound, in particular simultaneously with the winding up of the used portion, in particular from the other winding drum 12A, in the illustrative example the winding drum 12A arranged at the upper end.

This winding process and/or the actuation of the winding drive 12C is performed automatically or by a user, for example by a signal or manually. Particularly preferably, the winding process is performed in vacuum and/or without ventilation.

Subsequently, a further coating process can be carried out. As required, this is carried out again on the workpiece(s) 2 already coated in the previous coating process, in particular if the previous coating was still incomplete, or on workpieces 2 still to be coated. In the latter case, workpieces 2 are preferably changed in the vacuum and/or without ventilation. As an alternative to the previously described feeding of (an unused portion of) the coating source 10 and/or replacement of a used portion by an unused portion by unwinding and rewinding by means of a winding device 12, other feed- ing/replacement is also possible, for example by means of a feed device or the like, in particular without winding and/or unwinding the coating source 10.

As an alternative to the above described piece-wise or portion-wise feeding/replacement of coating source 10, it is also possible that the coating source 10 is continuously moving. In particular, the coating source 10 then moves continuously during the coating process in the guide 6A and/or is continuously unwound and/or rewound.

As already mentioned at the beginning, several evaporation devices 6 may be pro- vided for simultaneous coating. For example, in the case of large-area workpieces 2, several evaporation devices 6 can be distributed around the workpiece 2. Alternatively, only one evaporation device 6 may be provided, which, however, is designed to guide a plurality of proposed coating sources 10 and/or has a plurality of guides 6A. For example, the evaporation device 6 could be designed to evaporate coating material B from two coating sources 10, wherein the coating sources 10 preferably move in opposite directions to each other when continuously moving.

The above described method and/or the proposed construction of the coating source 10, the evaporation device 6 and/or the coating apparatus 1 preferably al- lows continuous operation in vacuum. Flowever, batch operation is still possible as an option. Preferably, however, even with batch operation, it is not necessary to change the coating source 10 after each batch, i.e. after the coating of one group of workpieces 2. Preferably more than 5, in particular more than 10, especially preferably more than 15 coating processes are possible before the coating source 10 has to be completely changed and/or before the coating material B has completely evaporated from the coating source 10. For example, if the evaporation device 6 and/or the guide 6A is two metres long, i.e. coating material B evaporates over a length of about two metres per coating process, and the coating source 10 is 20 metres long, ten coating processes are possible. Changing the (entire) coating source 10 is preferably done by replacing the winding drums 12A with the used coating source 10 by new winding drums 12A with a new or unused coating source 10. Although the method described above and/or the use of the coating source 10 in a coating apparatus 1 and/or evaporation device 6 as described above is preferred, the present invention is not limited thereto.

For example, as required, it is also possible to use the proposed coating source 10 in a device designed for point-wise evaporation, for example for smaller workpieces 2, such as lenses. In this case, preferably only a short portion of the coating source 10 is heated per coating process. For example, the coating source 10 may be wrapped around a heating pin in the heating area. The workpiece(s) 2, for example a plurality of lenses, especially preferably four lenses, are preferably arranged cen- trally above or below the heating pin and are coated simultaneously. After the coating or after the coating process, the coating source 10 is pulled a few centimetres further so that an unused portion is located on the heating pin. Another coating process can then take place. In this way, a large number of coating processes are possible with the same coating source 10.

Individual aspects, features and method steps of the present invention can be realized independently of each other, but also in any combination.

In particular, the present invention relates also to any one of the following aspects which can be realized independently or in any combination, also in combination with any aspects described above or in the claims:

1. Coating apparatus (1 ) for coating one or more workpieces (2) with a coating material (B),

characterized,

in that the coating apparatus (1 ) comprises an evaporation device (6) for evaporating the coating material (B) from a flexible, elongated coating source (10).

2. Coating apparatus according to aspect 1 , characterized in that the coating apparatus (1 ) comprises a winding device (12) for unwinding and/or winding up the coating source (10). 3. Coating apparatus according to aspect 1 or 2, characterized in that the coating apparatus (1 ) and/or evaporation device (6) comprises a guide (6A) for guiding the coating source (10).

4. Coating apparatus according to aspect 3, characterized in that the guide (6A) is designed for heating the coating source (10) over the entire longitudinal extension of the guide (6A) and/or such that the coating source (10) lies against the guide (6A) over the entire longitudinal extension of the guide (6A).

5. Coating apparatus according to one of the preceding aspects, characterized in that the coating apparatus (1 ) comprises a holding device (8) for one or more workpieces (2), the holding device (8) being elongated and/or extending parallel to the evaporation device (6) and/or coating source (10), wherein the coating appa- ratus (1 ) is designed for evaporation of the coating material (B) over the entire longitudinal extension of the holding device (8) or a coating chamber and/or vacuum chamber (4).

6. Evaporation device (6) for evaporating a coating material (B),

characterized,

in that the evaporation device (6) comprises a guide (6A) for guiding and heating a flexible, elongated coating source (10) provided with the coating material (B).

7. Evaporation device according to aspect 6, characterized in that the guide (6A) is designed for heating the coating source (10) over the entire longitudinal extension of the guide (6A) and/or such that the coating source (10) lies against the guide (6A) over the entire longitudinal extension of the guide (6A).

8. Coating source (10) with a carrier (10A) and with a coating material (B) received by the carrier (10A) for an in particular hydrophobic coating of preferably optical workpieces (2),

characterized,

in that the coating source (10) and/or the carrier (10A) is flexible and elongate. 9. Coating source according to aspect 8, characterised in that the coating source (10) and/or the carrier (10A) is band-like, thread-like, wire-like, rope-like and/or windable. 10. Coating source according to aspect 8 or 9, characterised in that the carrier

(10A) is formed as a knitted mesh.

11. Method for coating one or more workpieces (2) with a coating material (B), characterized,

in that a flexible, elongated coating source (10) provided with the coating material (B) is heated in portions so that only the coating material (B) of a respective portion of the coating source (10) is evaporated at a time.

12. Method according to aspect 1 1 , characterized in that the coating source (10) is subsequently moved further along, so that heating of a further portion of the coating source (10) takes place, whereby the coating material (B) of the further portion is evaporated.

Reference character list:

1 Coating apparatus

2 Workpiece

3 Main chamber / vacuum chamber

3A Target

4 Antechamber / (additional) vacuum chamber

5 Door

6 Evaporation device

6A Guide

6B Heating device

6C Heating wire

7 Swivel device

7A Swivel bearing

7B Swivel arm

8 Holding device

8A Holding portion

8B Connecting portion

9 Guide rail

10 Coating source

10A Carrier

11 Current feed-through

12 Winding device

12A Winding drum

12B guide element / feed-through

12C Winding drive

13 Opening

A1 Rotation axis (holding portion)

A2 Rotation axis (holding device)

B Coating material

Claims

Claims:

wherein the coating apparatus (1 ) comprises an evaporation device (6) for evaporating the coating material (B) from a flexible, elongated coating source (10), characterized

in that the coating apparatus (1 ) comprises an elongated holding device (8) for one or more workpieces (2), extending parallel to the evaporation device (6) with at least substantially the same longitudinal extension as the evaporation device (6), and/or

in that the coating apparatus (1 ) comprises a first coating chamber (3) for a first coating and a second coating chamber (4) for a second coating, the two coating chambers (3, 4) being separable from each other, wherein the evaporation device (6) is provided in the second coating chamber (4) for coating by thermal evaporation, and/or

in that the evaporation device (6) is constructed according to one of claims 20 to 24.

2. Coating apparatus according to claim 1 , characterized in that the first coating chamber (3) comprises one or more targets (3A) for coating by sputtering.

3. Coating apparatus according to claim 1 or 2, characterized in that the first coating is an antireflection coating or a reflection coating, and/or in that the second coating is a hydrophobic and/or oleophobic coating.

4. Coating apparatus according to one of the preceding claims, characterized in that the coating apparatus (1 ) has a swivel device (7) by means of which the evaporation device (6) can be swivelled, advanced and/or adjusted to the one or more workpieces (2) for coating.

5. Coating apparatus according to one of the preceding claims, characterized in that the holding device (8) for the respective coating in the respective chamber (3, 4) is movable, rotatable and/or pivotable.

6. Coating apparatus according to one of the preceding claims, characterized in that the coating apparatus (1 ) has a guide rail (9) for guided displacement or guided shifting of the holding device (8).

7. Coating apparatus according to one of the preceding claims, characterized in that the holding device (8) has at least one holding portion (8A) designed to hold the one or more workpieces (2), wherein the holding portion (8A) is cylindrical and/or elongated and/or designed to hold a plurality of workpieces (2) along its lon- gitudinal extent and/or in rows and/or one above the other.

8. Coating apparatus according to claim 7, characterized in that the holding portion (8A) is rotatable around its longitudinal axis (A1 ).

9. Coating apparatus according to claim 7 or 8, characterized in that the holding device (8) has two holding portions (8A) which are connected to each other by a connecting portion (8B).

10. Coating apparatus according to claim 9, characterized in that the holding de- vice (8) is rotatable around an axis (A2) that is located centrally between the two holding portions (8A) and/or runs, in particular centrally, through the connecting portion (8B).

11. Coating apparatus according to claim 9 or 10, characterized in that the con- necting portion (8B) is designed as a door or closure for the gas-tight closing of the first coating chamber (3).

12. Coating apparatus according to one of claims 9 to 11 , characterized in that in a first coating position and/or during the first coating in the first coating chamber (3), one holding portion (8A) is inside the first coating chamber (3) and the other holding portion (8A) is in the second holding chamber (4).

13. Coating apparatus according to claims 1 1 and 12, characterized in that the connecting portion (8B) is provided as a gas-tight seal between the two coating chambers (3, 4) in the first coating position.

14. Coating apparatus according to one of claims 9 to 13, characterized in that in a second coating position and/or during the second coating in the second coating chamber (4), the two holding portions (8A) are arranged completely in the second coating chamber (4) and/or the holding device (8), in particular an axis (A2) of the holding device (8) that is located centrally between the two holding portions (8A), is located centrally in the second coating chamber (4).

15. Coating apparatus according to one of the preceding claims, characterized in that the coating apparatus (1 ) comprises a winding device (12) for unwinding and/or winding up the coating source (10).

16. Coating apparatus according to one of the preceding claims, characterized in that the coating apparatus (1 ) and/or evaporation device (6) comprises a guide (6A) for guiding the coating source (10).

17. Coating apparatus according to claim 16, characterized in that the coating apparatus (1 ) comprises the coating source (10), wherein the guide (6A) and the coating source (10) extend parallel to each other.

18. Coating apparatus according to claim 16 or 17, characterized in that the guide

(6A) is designed for heating the coating source (10) over the entire longitudinal extension of the guide (6A) and/or such that the coating source (10) lies against the guide (6A) over the entire longitudinal extension of the guide (6A).

19. Coating apparatus according to one of the preceding claims, characterized in that the coating apparatus (1 ) is designed for evaporation of the coating material (B) over the entire longitudinal extension of the holding device (8) or a coating chamber (4).

20. Evaporation device (6) for evaporating a coating material (B),

characterized,

in that the evaporation device (6) comprises a guide (6A) for guiding and heating a flexible, elongated coating source (10) provided with the coating material (B), wherein the guide (6A) is bent and/or wherein the guide (6A) is designed such that the longitudinal extension of the coating source (10) is parallel to the longitudinal extension of the guide (6A) when guided.

21. Evaporation device according to claim 20, characterized in that the guide (6A) is designed for heating the coating source (10) over the entire longitudinal extension of the guide (6A) and/or such that the coating source (10) lies against the guide (6A) over the entire longitudinal extension of the guide (6A).

22. Evaporation device according to claim 20 or 21 , characterized in that the guide (6A) extends at least substantially over the entire longitudinal extension of the evaporation device (6).

23. Evaporation device according to one of claims 20 to 22, characterized in that the guide (6A) is U-shaped or V-shaped in a section transverse and/or perpendicular to its longitudinal extension.

24. Evaporation device according to one of claims 20 to 23, characterized in that the evaporation device (6) comprises a winding device (12) for unwinding and/or winding up the coating source (10).

25. Method for coating one or more workpieces (2) with a coating material (B), characterized,

in that a coating source (10) is produced by immersing or soaking a flexible and elongated carrier (10A) in a solution containing the coating material (B) such that the carrier (10A) absorbs and/or becomes saturated with the solution, and/or in that a coating apparatus (1 ) according to one of claims 1 to 19 is used.

26. Method according to claim 25, characterized in that the carrier (10A) is wire- like and/or rope-like and/or is formed as a woven or knitted mesh.

27. Method according to claim 25 or 26, characterized in that the coating source (10) is dried or allowed to dry after removing it from the solution such that a solvent evaporates from the coating source (10) and essentially only the, in particular cured, coating material (B), remains in the coating source (10) and/or carrier (10A).

28. Method according to one of claims 25 to 27, characterized in that the coating source (10) provided with the coating material (B) is heated in portions in a coating process so that only the coating material (B) of a respective portion of the coating source (10) is evaporated at a time.

29. Method according to claim 28, characterized in that the coating source (10) is subsequently moved further along, so that heating of a further portion of the coating source (10) takes place, whereby the coating material (B) of the further portion is evaporated.

30. Method according to one of claims 25 to 27, characterized in that the coating source (10) moves continuously during a coating process in the guide (6A).

31. Method according to one of claims 25 to 30, characterized in that a holding device (8) of the coating apparatus (1 ) is brought from a first coating position in the first coating chamber (3) to a second coating position in the second coating cham- ber (4) by moving it via a guide rail (9).