WO2020215535A1 - Nano barium titanate powder and preparation method thereof, ceramic dielectric layer and manufacturing method thereof - Google Patents

Nano barium titanate powder and preparation method thereof, ceramic dielectric layer and manufacturing method thereof Download PDF

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WO2020215535A1
WO2020215535A1 PCT/CN2019/100604 CN2019100604W WO2020215535A1 WO 2020215535 A1 WO2020215535 A1 WO 2020215535A1 CN 2019100604 W CN2019100604 W CN 2019100604W WO 2020215535 A1 WO2020215535 A1 WO 2020215535A1
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nano
barium titanate
titanate powder
titanium dioxide
temperature
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PCT/CN2019/100604
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French (fr)
Chinese (zh)
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瞿海锋
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苏州宝顺美科技有限公司
瞿海锋
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Priority to KR1020217037841A priority Critical patent/KR102590441B1/en
Priority to JP2021563689A priority patent/JP7382083B2/en
Publication of WO2020215535A1 publication Critical patent/WO2020215535A1/en

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    • C01INORGANIC CHEMISTRY
    • C01GCOMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G23/00Compounds of titanium
    • C01G23/003Titanates
    • C01G23/006Alkaline earth titanates
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    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/46Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
    • C04B35/462Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
    • C04B35/465Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates
    • C04B35/468Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on barium titanates
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    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605Treating the starting powders individually or as mixtures
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    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
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    • C01P2004/60Particles characterised by their size
    • C01P2004/64Nanometer sized, i.e. from 1-100 nanometer
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    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/50Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/54Particle size related information
    • C04B2235/5418Particle size related information expressed by the size of the particles or aggregates thereof
    • C04B2235/5454Particle size related information expressed by the size of the particles or aggregates thereof nanometer sized, i.e. below 100 nm
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    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74Physical characteristics
    • C04B2235/78Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
    • C04B2235/781Nanograined materials, i.e. having grain sizes below 100 nm

Definitions

  • the invention relates to nano material synthesis technology, in particular to a nano barium titanate powder and a preparation method thereof, a ceramic dielectric layer and a manufacturing method thereof, and in particular to an industrialized production method of nano barium titanate powder and the method thereof Ceramic dielectric layer made of raw materials.
  • Nano-barium titanate (BaTiO 3 ) is widely used in the electronic ceramic industry because of its high dielectric constant, low dielectric loss, high resistivity, excellent insulation performance and high compressive strength, and is the preparation of multilayer ceramics
  • the basic materials of electronic components such as capacitors (MLCC), positive temperature coefficient thermistors (PTC), and dynamic random access memory (DRAM).
  • Improving the uniformity and compactness of the ceramic dielectric layer and reducing the porosity are effective means to improve the capacitance of electronic components.
  • the Horsfield model it is best to mix barium titanate particles of different particle sizes so that the barium titanate particles of smaller particle size are filled into the gaps formed between the barium titanate particles of relatively large particle size to increase the bulk density .
  • the use of barium titanate powder with a small particle size helps to form smaller crystal grains in the ceramic dielectric layer, form more grain boundaries, and help improve the performance of the ceramic dielectric layer.
  • the particle size of commercially available barium titanate powder particles is mostly above 100 nm, while small-particle nano-barium titanate powder is relatively rare.
  • the mainstream process for preparing nano-barium titanate powder can be roughly divided into solid phase sintering method and liquid phase synthesis method.
  • the solid-phase sintering method is to mix and grind the oxides of the metal elements (Ti and Ba) or their acid salts that make up barium titanate, and then calcinate at a high temperature of about 1100°C to form the required powder through solid-phase reaction .
  • the process of solid phase method is relatively simple, but the particle size of the barium titanate powder produced is large, the particle size distribution is not concentrated, and there are also defects of low purity and unstable performance. It is difficult to satisfy the ceramic dielectric layer for nano titanic acid. Demand for barium powder.
  • the liquid phase synthesis method can be further divided into sol-gel method, hydrothermal method and so on.
  • the hydrothermal method refers to the hydrothermal treatment of a Ba(OH) 2 aqueous solution containing dispersed TiO 2 fine particles in a closed system such as an autoclave to provide a normal pressure condition at a certain temperature and autogenous pressure of water Unattainable special physical and chemical environment to form powder with high crystallinity, high purity and small size.
  • the volume of the TiO 2 dispersion is too large, resulting in longer reaction time, increased energy consumption, and very low equipment yield.
  • the large amount of solvent causes uneven temperature control and other factors, which will also adversely affect the uniformity of the barium titanate powder.
  • the present invention provides a method for preparing nano-barium titanate powder, which uses a high-concentration titanium dioxide aqueous dispersion as a raw material, which not only has a very high yield and meets the needs of industrial production, but also obtains nano-titanic acid Barium powder has the advantages of small particle size, narrow particle size distribution, high purity, and well-developed crystal grains, which can meet the quality requirements of ceramic dielectric layers.
  • the invention provides a nano barium titanate powder, which is prepared by the above preparation method.
  • the nano barium titanate powder has the characteristics of small particle size, narrow particle size distribution, high purity and good crystal grain development, and can meet the requirements of ceramic dielectric layers.
  • the present invention provides a method for manufacturing a ceramic dielectric layer, which includes first preparing the above-mentioned nano barium titanate powder.
  • the manufacturing method can improve the uniformity and compactness of the ceramic dielectric layer and reduce the porosity.
  • the present invention provides a ceramic dielectric layer, which is prepared by the above-mentioned manufacturing method.
  • the ceramic dielectric layer has high uniformity, compactness and low porosity.
  • the present invention provides a method for preparing nano-barium titanate powder, which includes: rapidly mixing the nano-titanium dioxide aqueous dispersion with the barium hydroxide aqueous solution, so that the temperature of the resulting mixed system is relatively higher due to the rapid mixing of the two.
  • the temperature of the barium hydroxide aqueous solution is at least 2°C lower; wherein the mass concentration of the nano-titanium dioxide aqueous dispersion is not less than 20%;
  • the mixed system is subjected to a high-pressure hydrothermal synthesis reaction, and the resulting reaction product is washed and dried to obtain nano-barium titanate powder.
  • the present invention provides a solution, using high-concentration (mass concentration ⁇ 20%) nano-titanium dioxide aqueous dispersion as a raw material.
  • the nano-titanium dioxide aqueous dispersion and barium hydroxide aqueous solution are quickly mixed, and then implemented High-pressure hydrothermal synthesis can not only reduce the amount of solvent (usually deionized water) in the process of high-pressure hydrothermal synthesis reaction, improve production efficiency, but also achieve controllable barium titanate nano-particle size, and can obtain narrower
  • the particle size distribution can also ensure the high purity of the nano barium titanate powder and the good growth of crystal grains, and finally obtain the nano barium titanate powder product with excellent performance.
  • the rapid mixing between the nanometer titanium dioxide aqueous dispersion and the barium hydroxide aqueous solution, or the rapid mixing of the titanium source and the barium source is reflected by the temperature reduction degree of the mixing system, that is, due to the rapid mixing of the two
  • the obvious temperature drop caused directly, excluding the obvious temperature drop caused by external cooling during the mixing process is reflected by the temperature reduction degree of the mixing system.
  • the heating equipment is insufficient to maintain the temperature in a timely manner to reach the temperature of the barium hydroxide aqueous solution before mixing, resulting in a mixed system
  • the temperature is significantly lower than that of barium hydroxide aqueous solution.
  • the decrease of the system temperature is mainly affected by the amount and initial temperature of the nano-TiO2 aqueous dispersion, the addition speed and mixing speed of the nano-TiO2 aqueous dispersion, as well as the power and heat conduction of the system heating equipment; taking into account the conventional electric heating Or the heating power of the heat transfer mode of the heat medium is limited.
  • the aqueous solution of barium hydroxide can be placed in a heated stirred tank, and the amount of nanometer titanium dioxide aqueous dispersion can be injected into the heated stirred tank through a pump or other liquid feeding methods, and supplemented by High-speed stirring and dispersion; or two liquids can be continuously mixed online through a meterable liquid-liquid mixing device.
  • all production methods that can achieve high-speed mixing of liquid and liquid at a certain temperature can be used in the implementation of the technical scheme of the present invention.
  • the feeding or mixing speed should ensure that the temperature of the overall mixed solution tends to balance as soon as possible, so as to avoid the uniformity of the subsequent growth of the barium titanate particles due to the uneven temperature of the mixing system.
  • multiple representative monitoring points can generally be selected to test the temperature changes during the mixing process. It is advisable that the temperature of each monitoring point is reduced by more than 2°C and the reduction range is basically the same.
  • the temperature difference between the temperature of the mixed system and the barium hydroxide aqueous solution before mixing should not be too large, generally controlled at 2-20 °C, usually controlled at 2-10 °C. This can also effectively avoid the precipitation of barium hydroxide caused by a jump in temperature.
  • the aqueous solution of barium hydroxide also needs to contain high concentration of barium. Ions to ensure the molar ratio between barium ions and titanium atoms and the rapid mixing between the barium source and the titanium source.
  • the concentration of barium hydroxide should be close to the saturation concentration. For example, the concentration of barium source is more than 20%, and even can reach more than 50%.
  • the temperature of the barium oxide aqueous solution is not lower than 90°C, generally 90-110°C, which can ensure the ratio between the barium source and the titanium source.
  • the temperature of the nanometer titanium dioxide aqueous dispersion is lower than that of the barium hydroxide aqueous solution.
  • the temperature of the nanometer titanium dioxide aqueous dispersion should not exceed 70°C, and it is generally stored at room temperature. The temperature reaches 70°C.
  • the preparation of the mixed system can be carried out in an atmospheric environment.
  • the preparation of the mixed system can also be carried out under an inert atmosphere, such as under the protection of nitrogen or argon, and the present invention is not particularly limited herein.
  • the preparation of the above-mentioned mixed system can be realized by adding the aqueous dispersion of nanometer titanium dioxide to the aqueous solution of barium hydroxide, or adding the aqueous solution of barium hydroxide to the aqueous dispersion of nanometer titanium dioxide, or The nanometer titanium dioxide aqueous dispersion and the barium hydroxide aqueous solution are mixed in a co-current mixing manner.
  • the nano-titanium dioxide aqueous dispersion is quickly added to the barium hydroxide aqueous solution, so that the temperature of the resulting mixed system is at least 2°C lower than that of the barium hydroxide aqueous solution.
  • the aqueous nano-titanium dioxide dispersion used in the present invention is formed by dispersing nano-titanium dioxide powder in water.
  • the median diameter D50 of the nano-titanium dioxide by volume does not exceed 30 nm.
  • the source of the nano-titanium dioxide powder or the nano-titanium dioxide aqueous dispersion is not particularly limited, and it can be purchased commercially or prepared by itself.
  • the nano-titanium dioxide powder can be prepared according to the process described in the patent application 201610879270.3 or 201610879701.6, and then dispersed in water in proportion to obtain an aqueous nano-titanium dioxide dispersion.
  • the concentration of the aqueous dispersion of titanium dioxide is also beneficial to avoid problems such as agglomeration of the nano-barium titanate powder during the synthesis process. Therefore, the mass concentration of the aqueous dispersion of nano-titanium dioxide is generally controlled to be 20-50%. The inventor found that by setting the mass concentration in this interval, not only can the nanometer barium titanate powder with good dispersibility be obtained, but also the mass concentration of the nanometer titanium dioxide aqueous dispersion is changed within this interval, and the average nanometer barium titanate powder The particle size changes little.
  • the two can fully react to form barium titanate and avoid raw material remaining.
  • an excess of a titanium source or a barium source is more conducive to the positive progress of the reaction toward the synthesis of barium titanate, for example, excess Ba is conducive to reducing the content of titanium dioxide impurities in the reaction product.
  • excess Ba is conducive to reducing the content of titanium dioxide impurities in the reaction product.
  • a large amount of barium surplus will not only cause a waste of barium source, but also may introduce barium carbonate impurities if the reaction product is in contact with air.
  • the molar ratio between Ba ions and Ti atoms is generally controlled to be 1 to 4: 1, so that the final nano barium titanate powder has a higher purity, and it can also ensure titanium dioxide The full response.
  • the high-pressure hydrothermal synthesis reaction conditions in the present invention can be carried out with reference to the current hydrothermal synthesis process of barium titanate.
  • the temperature of the high-pressure hydrothermal synthesis reaction is usually controlled to be 100-250°C, and the pressure is less than 7 MPa.
  • the prepared mixed system is transferred to an autoclave, sealed and heated, and reacted at 100-250°C.
  • the present invention uses high-concentration nano-titanium dioxide aqueous dispersion as the raw material. Compared with the traditional high-pressure hydrothermal synthesis process, the reaction time can be greatly shortened. Generally, it takes about 1 hour, such as 1-24 hours, to complete the high-pressure water. Thermal synthesis reaction.
  • the corresponding high-pressure hydrothermal synthesis reaction conditions can be set reasonably according to the actual demand for nano barium titanate powder, for example, by changing the reaction temperature, reaction time and other conditions to obtain different particle sizes and/ Or nano barium titanate powder with different tetragonal phase (or cubic phase) specific gravity.
  • the temperature is lowered and the reaction product is collected, and then washed and dried to obtain high-quality nano-barium titanate powder.
  • deionized water or deionized water and ethanol are used to wash the reaction product one or more times, and then filtered and dried at 60-90°C to obtain nano-barium titanate powder .
  • the invention provides a nano barium titanate powder, which is prepared by the above preparation method.
  • the nano barium titanate powder provided by the present invention has a very small particle size, and its average particle size is below 100 nm, and can even reach 5-50 nm; the particle size of the nano barium titanate powder is basically normal distribution, and Calculated, the relative standard deviation is below 25%, so the particles of the barium titanate powder are very uniform and the particle size distribution is narrow; the XRD pattern of the nano-barium titanate powder shows that the 2 ⁇ angle is between 44° and 46° The diffraction peak appears as a single peak without obvious splitting, which indicates that the crystal grains are well developed and the crystal form is good; the Ba/Ti ratio is around 1, indicating that the nano barium titanate powder has very high purity. Therefore, the nano barium titanate powder provided by the present invention has very high quality, and can meet the production requirements of the ceramic dielectric layer.
  • the present invention provides a method for manufacturing a ceramic dielectric layer, which includes the following steps:
  • the nano barium titanate powder is prepared according to the aforementioned preparation method; then, the nano barium titanate powder is prepared and fired to obtain a ceramic dielectric layer.
  • nano-barium titanate powders with different particle sizes can be prepared according to requirements, and then mix the nano-barium titanate powders with different particle sizes in proportion, for example, two kinds of nano-titanium with an average particle size of 75nm and 29nm.
  • Barium titanate powder; alternatively, nano barium titanate powder with a single (average) particle size can be used as a raw material; or alternatively, the nano barium titanate powder and particles obtained by the preparation process of the present invention
  • Barium titanate powders with a diameter greater than 100nm are mixed to achieve close packing.
  • the above-mentioned mixing can use the conventional mixing process of ceramic dielectric layer, for example, wet ball milling nano-barium titanate powder of different particle sizes in a planetary ball mill at 450 rpm for 10 hours, and using water or ethanol as a dispersant , And finally the obtained slurry is dried at a temperature of about 80°C.
  • the above-mentioned tableting and firing can also adopt the conventional preparation process of ceramic dielectric layer, such as grinding and mixing the mixed barium titanate powder and polyvinyl alcohol aqueous solution, pressing the original tablet with a press and a mold, and debinding. Sintered into porcelain at a temperature above 1100°C to obtain a ceramic dielectric layer.
  • the invention also provides a ceramic dielectric layer, which is prepared by the above-mentioned manufacturing method. Because the above-mentioned high-quality nano barium titanate powder is used as the raw material, it can ensure the high density and low porosity of the ceramic dielectric layer, avoid holes or cracks in the ceramic dielectric layer, and better meet the requirements of MLCC and other devices The development needs of miniaturization, thinning, and high performance.
  • the method for preparing nano barium titanate powder provided by the present invention firstly quickly mixes a high-concentration nano titanium dioxide aqueous dispersion with a barium hydroxide aqueous solution, and then implements high-pressure hydrothermal synthesis, which solves the problem of the existing hydrothermal synthesis method.
  • nano-barium titanate powder the agglomeration of barium titanate particles caused by excessively high concentration of titanium dioxide, and the problem of low production efficiency and poor product quality caused by low concentration of titanium dioxide is solved.
  • the preparation method of the present invention due to the very high concentration of nano titanium dioxide, the industrial production efficiency is significantly improved; and the obtained nano barium titanate powder has the following advantages:
  • the average particle size is less than 100nm, and can even reach 5-50nm;
  • the nano barium titanate powder provided by the present invention is prepared by the above-mentioned preparation method.
  • the nano barium titanate powder has the advantages of small particle size, narrow particle size distribution, good crystal form, and high purity, and thus can meet the use requirements of ceramic dielectric layers.
  • the method for manufacturing a ceramic dielectric layer provided by the present invention includes the method for preparing the aforementioned nano barium titanate powder. Since the above-mentioned high-quality nano barium titanate powder is prepared and fired, it can help to ensure the high density and low porosity of the ceramic dielectric layer thickness, and avoid holes or cracks in the ceramic dielectric layer.
  • the ceramic dielectric layer provided by the present invention uses the aforementioned nano-barium titanate powder as a raw material, it can ensure the high uniformity, high density and low porosity of the ceramic dielectric layer thickness.
  • Figure 1 is a particle size distribution curve measured when nano titanium dioxide used in Examples 1-10 of the present invention is dispersed in deionized water at a mass concentration of 1%;
  • Figure 2 is a particle size distribution curve measured when nano titanium dioxide used in Examples 1-10 of the present invention is dispersed in deionized water at a mass concentration of 10%;
  • Figure 3 is a particle size distribution curve measured when nano-titania used in Examples 1-10 of the present invention is dispersed in deionized water at a mass concentration of 50%;
  • Example 4 is a transmission electron micrograph of the nano-barium titanate powder prepared in Example 1 of the present invention.
  • Figure 5 is a particle size distribution diagram of nano barium titanate powder prepared in Example 1 of the present invention.
  • Fig. 6 is an XRD pattern of nano barium titanate powder prepared in Example 1 of the present invention.
  • Figure 7 is a scanning electron micrograph of the nano barium titanate powder prepared in Example 2 of the present invention.
  • Figure 8 is a particle size distribution diagram of nano barium titanate powder prepared in Example 2 of the present invention.
  • Figure 9 is an XRD pattern of the nano barium titanate powder prepared in Example 2 of the present invention.
  • Figure 10 is a scanning electron micrograph of the nano barium titanate powder prepared in Example 3 of the present invention.
  • Example 11 is a diagram of the particle size distribution of nano barium titanate powder prepared in Example 3 of the present invention.
  • Figure 12 is an XRD pattern of the nano barium titanate powder prepared in Example 3 of the present invention.
  • Figure 13 is a scanning electron micrograph of the nano barium titanate powder prepared in Comparative Example 1 of the present invention.
  • Figure 15 is a scanning electron micrograph of the nano barium titanate powder prepared in Comparative Example 2 of the present invention.
  • Figure 17 is a scanning electron micrograph of the nano barium titanate powder prepared in Comparative Example 3 of the present invention.
  • Figure 19 shows the XRD spectra of barium titanate dielectric ceramic sheets obtained by mixing and sintering nano barium titanate powders of different particle sizes in different proportions;
  • Fig. 20 is a partial enlarged view of Fig. 19.
  • the relative standard deviation is the ratio of the standard deviation to the measured average value, which is given by the origin software.
  • the nano titanium dioxide powder used in this embodiment has a D50 by volume ⁇ 10nm, and the particle size distribution curves measured by dispersing it in deionized water at a concentration of 1%, 10%, and 50% are shown in Figure 1, respectively. Shown in Figure 2 and Figure 3.
  • the temperature of the high-pressure hydrothermal synthesis reaction was changed to 160°C, and the remaining conditions were the same as in Example 1, to obtain nano-barium titanate powder.
  • the temperature of the high-pressure hydrothermal synthesis reaction was changed to 220°C, and the other conditions were the same as in Example 1, to obtain nano-barium titanate powder.
  • the time of the high-pressure hydrothermal synthesis reaction was changed to 4 hours, and the remaining conditions were the same as in Example 1, to obtain nano-barium titanate powder.
  • the time of the high-pressure hydrothermal synthesis reaction was changed to 24 hours, and the remaining conditions were the same as in Example 1, to obtain nano-barium titanate powder.
  • Example 7-8 The preparation process of Examples 7-8 is basically the same as that of Example 2, except that: the mass concentration of the nanometer titanium dioxide aqueous dispersion in Example 7 is 36%; the mass concentration of the nanometer titanium dioxide aqueous dispersion in Example 8 is 24% .
  • Example 9-10 The preparation process of Examples 9-10 is basically the same as that of Example 2, except that: in Example 9, 710g of barium hydroxide and 1000mL of deionized water are added to a three-necked flask, and stirred at 70°C until dissolved; In Example 10, 710 g of barium hydroxide and 300 mL of deionized water were added to a three-necked flask and stirred at 110° C. to dissolve.
  • the preparation process of Examples 11-12 is basically the same as that of Example 2, except that: the median diameter D50 of nanometer titania by volume in Example 11 is about 18nm; the median diameter of nanometer titania by volume in Example 12 The particle size D50 is about 27nm.
  • the transmission electron microscope (SEM) photographs, particle size distribution diagrams and XRD patterns of the nano-barium titanate powder obtained in Example 1 are shown in Figure 4, Figure 5 and Figure 6, respectively; the nano-titanium obtained in Example 2
  • the scanning electron micrographs, particle size distribution and XRD patterns of the barium oxide powder are shown in Figures 7, 8 and 9 respectively; the scanning electron micrographs and particle size distribution of the nano-barium titanate powder obtained in Example 3
  • the graph and the XRD pattern are shown in FIG. 10, FIG. 11, and FIG. 12 respectively; for the characterization results of other embodiments, refer to FIG. 4 to FIG. 12.
  • the obtained nano barium titanate powder is The average particle size does not exceed 100nm, and can even reach 5-50nm, and the particle size distribution is uniform, the particle size is basically a normal distribution, the particles are well dispersed, and no particle agglomeration is seen. After further calculation, the relative standard deviation of the particle size does not exceed 23%. It can be seen that the preparation method provided by the present invention can obtain a small and uniform nano-barium titanate powder.
  • the diffraction peak of the nano-barium titanate powder obtained in Examples 1-12 with a 2 ⁇ angle between 44° and 46° is a single peak without obvious splitting; the crystals are calculated separately.
  • the lattice constant ratio (c/a) is all around 1.0000, mostly between 1.0000 and 1.0070, indicating that the nano-barium titanate powder has complete crystal grain development, good crystal form, and mainly cubic phase or all cubic phase .
  • the Ba/Ti ratio of the nano-barium titanate powder obtained in Examples 1-12 is around 1, mostly concentrated between 0.990 and 0.999. It can be seen that, The nano barium titanate powder has very high purity.
  • the mass concentration of nanometer titanium dioxide aqueous dispersion is reduced from 48% to 24%
  • the average particle size of nanometer barium titanate powder is reduced from 29nm to 25nm
  • the tetragonal phase content is reduced from 37.9% to 37.5%.
  • a high-concentration (20%-50%) nano-titanium dioxide aqueous dispersion is used as a raw material, and the titanium source and the barium source are quickly mixed before the high-pressure hydrothermal synthesis reaction.
  • It can overcome the defects of large barium titanate particles caused by the low concentration of titanium dioxide in the existing hydrothermal synthesis process for preparing nano-barium titanate, and the particles caused by the high concentration of titanium dioxide cannot obtain small particles due to agglomeration.
  • the defects of the particle size barium titanate can obtain high-quality nano-barium titanate powder with narrow particle size distribution range, complete crystal grain development and high purity.
  • Comparative Example 1 The preparation process of Comparative Example 1 is basically the same as that of Example 2. The only difference is that the quality of the nano-TiO2 powder is kept unchanged (that is, the molar ratio of barium ion to titanium atom is unchanged) when the mixed system is prepared, but the nano-TiO2 The mass concentration is 8%.
  • the specific physical property test results of the nano barium titanate powder are shown in Table 3, and the SEM photo and XRD pattern are shown in Figure 13 and Figure 14 respectively.
  • the average particle size is 33 nm, which is greater than the result obtained in Example 2 (29 nm). It shows that when the concentration of the aqueous dispersion of titanium dioxide is reduced, the average particle size of the obtained nano barium titanate powder becomes larger. In addition, since the concentration of the nanometer titanium dioxide aqueous dispersion is only 8%, the production efficiency of nanometer barium titanate powder is low.
  • Comparative Example 2 The preparation process of Comparative Example 2 is basically the same as that of Example 2. The only difference is that when preparing the mixed system, the nano-titanium dioxide aqueous dispersion is slowly injected into the three-necked flask containing the barium hydroxide aqueous solution, and the mixture is quickly stirred while adding. Evenly, and maintain the temperature of the mixed solution in the range of 90 ⁇ 2°C during the addition.
  • the calculation shows that the average particle size is 37nm, which is significantly higher than that of Example 2 (29nm). It shows that when the titanium dioxide aqueous dispersion is slowly injected, the average particle size of the nano-barium titanate powder becomes larger.
  • Example 2 The nano barium titanate powders obtained in Example 2 and Example 3 are mixed, tableted and fired in different proportions to obtain a ceramic dielectric layer.
  • the specific method is:
  • Ceramic chip production Grind and mix the single powder and formula powder with 5% polyvinyl alcohol aqueous solution separately, press and mold at 8MPa to form a disc with a diameter of 12.7mm and a thickness of about 1mm, and then heat the disc Heat up to 550°C for 4 hours to discharge the glue, continue to heat up to 1150°C, heat for 2 hours to sinter into porcelain, and test the dielectric properties with gold-plated electrodes on the ceramic sheet surface.
  • An Agilent LCR measuring instrument (4294A) was used to detect the density and dielectric constant of the obtained ceramic dielectric layer.
  • the density and dielectric properties of the ceramic dielectric layers obtained in different proportions are shown in Table 4.
  • the nano-barium titanate powders obtained in the examples of the present invention are mixed, sliced and fired in different proportions to obtain the ceramic dielectric layers, all of which have very high density and small pores. Degree, and has good dielectric properties.
  • mixing nano-barium titanate powders with different (average) particle sizes in an appropriate ratio can make the ceramic dielectric layer have a higher density and better dielectric properties.
  • FIG. 19 is the XRD patterns of the ceramic dielectric layers obtained in Examples 13, 15, 16 and 18. It can be clearly seen from FIG. 19 that the ceramic dielectric layers of Examples 13, 15, 16 and 18 all have good crystal structures. Enlarge the peak at about 45° in 2 ⁇ in Fig. 19, that is, Fig. 20. It can be seen that the mixed and fired examples 15 and 16 of the two particle diameters have higher results than those of the examples 13 and 18 fired by the individual particle diameters. The more obvious bimodal structure, with the obvious characteristics of tetragonal phase barium titanate. This shows that barium titanate particles of different particle diameters are mixed, tableted, and calcined in an appropriate ratio to obtain a better tetragonal barium titanate ceramic dielectric layer.

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Abstract

Provided are a nano barium titanate powder and a preparation method thereof, a ceramic dielectric layer and a manufacturing method thereof. The preparation method of the nano barium titanate powder comprises: rapidly mixing a nano titanium dioxide aqueous dispersion at a lower temperature with a barium hydroxide aqueous solution at a higher temperature, so that the temperature of an obtained mixed system is at least 2℃ lower than that of the barium hydroxide aqueous solution due to rapid mixing of the nano titanium dioxide aqueous dispersion and the barium hydroxide aqueous solution; wherein the mass concentration of the nano titanium dioxide aqueous dispersion is not lower than 20%; carrying out a high-pressure hydrothermal synthesis reaction on the mixed system, and washing and drying an obtained reaction product to obtain the nano barium titanate powder. The nano barium titanate powder can be well used for manufacturing the ceramic dielectric layer.

Description

纳米钛酸钡粉体及其制备方法、陶瓷介电层及其制造方法Nano barium titanate powder and preparation method thereof, ceramic dielectric layer and manufacturing method thereof 技术领域Technical field
本发明涉及纳米材料合成技术,具体涉及一种纳米钛酸钡粉体及其制备方法、陶瓷介电层及其制造方法,尤其涉及一种纳米钛酸钡粉体的工业化生产方法以及由此为原料制造的陶瓷介电层。The invention relates to nano material synthesis technology, in particular to a nano barium titanate powder and a preparation method thereof, a ceramic dielectric layer and a manufacturing method thereof, and in particular to an industrialized production method of nano barium titanate powder and the method thereof Ceramic dielectric layer made of raw materials.
背景技术Background technique
纳米钛酸钡(BaTiO 3)因具有高介电常数、低介电损耗、高电阻率,以及优良的绝缘性能和较高的耐压强度,被广泛应用于电子陶瓷工业,是制备多层陶瓷电容器(MLCC)、正温度系数热敏电阻(PTC)、动态随机存储器(DRAM)等电子元器件的基础材料。 Nano-barium titanate (BaTiO 3 ) is widely used in the electronic ceramic industry because of its high dielectric constant, low dielectric loss, high resistivity, excellent insulation performance and high compressive strength, and is the preparation of multilayer ceramics The basic materials of electronic components such as capacitors (MLCC), positive temperature coefficient thermistors (PTC), and dynamic random access memory (DRAM).
提高陶瓷介电层的均匀性和致密性、降低孔隙率,是提高电子元器件电容的有效手段。根据Horsfield模型,最好是将不同粒径的钛酸钡颗粒混合,使较小粒径的钛酸钡颗粒填充到相对大粒径的钛酸钡颗粒之间所形成的空隙中,提高堆积密度。同时,使用小粒径的钛酸钡粉体有助于在陶瓷介电层中形成更小的晶粒,形成更多的晶界,有助于提升陶瓷介电层的性能。但是目前,市售钛酸钡粉体颗粒的粒径多在100nm以上,而小颗粒的纳米钛酸钡粉体则较为少见。Improving the uniformity and compactness of the ceramic dielectric layer and reducing the porosity are effective means to improve the capacitance of electronic components. According to the Horsfield model, it is best to mix barium titanate particles of different particle sizes so that the barium titanate particles of smaller particle size are filled into the gaps formed between the barium titanate particles of relatively large particle size to increase the bulk density . At the same time, the use of barium titanate powder with a small particle size helps to form smaller crystal grains in the ceramic dielectric layer, form more grain boundaries, and help improve the performance of the ceramic dielectric layer. However, at present, the particle size of commercially available barium titanate powder particles is mostly above 100 nm, while small-particle nano-barium titanate powder is relatively rare.
现阶段制取纳米钛酸钡粉体的主流工艺大致可分为固相烧结法和液相合成法。固相烧结法是将组成钛酸钡的金属元素(Ti和Ba)的氧化物或者它们的酸性盐混合、磨细后,在1100℃左右的高温下煅烧,通过固相反应形成所需粉体。固相法工艺较为简单,但生产的钛酸钡粉体的颗粒粒径较大,粒径分布不集中,此外还存在纯度低、性能不稳定的缺陷,难以满足陶瓷介电层对于纳米钛酸钡粉体的需求。At this stage, the mainstream process for preparing nano-barium titanate powder can be roughly divided into solid phase sintering method and liquid phase synthesis method. The solid-phase sintering method is to mix and grind the oxides of the metal elements (Ti and Ba) or their acid salts that make up barium titanate, and then calcinate at a high temperature of about 1100°C to form the required powder through solid-phase reaction . The process of solid phase method is relatively simple, but the particle size of the barium titanate powder produced is large, the particle size distribution is not concentrated, and there are also defects of low purity and unstable performance. It is difficult to satisfy the ceramic dielectric layer for nano titanic acid. Demand for barium powder.
液相合成法又可进一步分为溶胶-凝胶法、水热法等。其中水热法是指在高压反应釜等密闭体系中,将含有分散的TiO 2细粒子的Ba(OH) 2水溶液进行水热处理,在一定的温度以及水的自生压力下,提供一个常压条件无法达到的特殊物理化学环境,以形成结晶度高、纯度高和尺寸较小的粉体。但水热 法的反应体系中,往往需将TiO 2的质量浓度控制在非常低的范围内,一般不超过15%,以避免TiO 2浓度过高造成的颗粒团聚等问题。但是,在低浓度下,TiO 2分散液体积过大,导致反应时间较长、能耗增加、设备的产率非常低。而且,在实际工业生产中,由于溶剂量大导致温度控制不均匀等因素,还会对钛酸钡粉体的均匀性等带来不利影响。 The liquid phase synthesis method can be further divided into sol-gel method, hydrothermal method and so on. The hydrothermal method refers to the hydrothermal treatment of a Ba(OH) 2 aqueous solution containing dispersed TiO 2 fine particles in a closed system such as an autoclave to provide a normal pressure condition at a certain temperature and autogenous pressure of water Unattainable special physical and chemical environment to form powder with high crystallinity, high purity and small size. However, in the hydrothermal reaction system, it is often necessary to control the mass concentration of TiO 2 in a very low range, generally not exceeding 15%, to avoid problems such as particle agglomeration caused by excessive TiO 2 concentration. However, at low concentrations, the volume of the TiO 2 dispersion is too large, resulting in longer reaction time, increased energy consumption, and very low equipment yield. Moreover, in actual industrial production, the large amount of solvent causes uneven temperature control and other factors, which will also adversely affect the uniformity of the barium titanate powder.
鉴于上述情况,期待开发出一种纳米钛酸钡粉体的工业化生产工艺,在二氧化钛浓度较高的情况下,仍旧能够获得满足陶瓷介电层要求的高品质纳米钛酸钡粉体,并获得较高的产率。In view of the above situation, it is expected to develop an industrial production process for nano-barium titanate powder. In the case of a high concentration of titanium dioxide, it is still possible to obtain high-quality nano-barium titanate powder that meets the requirements of the ceramic dielectric layer. Higher yield.
发明内容Summary of the invention
针对上述缺陷,本发明提供一种纳米钛酸钡粉体的制备方法,采用高浓度二氧化钛水分散液作为原料,不仅能够具有非常高的产率,满足工业化生产需求,而且所获得的纳米钛酸钡粉体具有粒径小、粒径分布窄、纯度高、晶粒发育良好的优点,满足陶瓷介电层的品质需求。In view of the above-mentioned defects, the present invention provides a method for preparing nano-barium titanate powder, which uses a high-concentration titanium dioxide aqueous dispersion as a raw material, which not only has a very high yield and meets the needs of industrial production, but also obtains nano-titanic acid Barium powder has the advantages of small particle size, narrow particle size distribution, high purity, and well-developed crystal grains, which can meet the quality requirements of ceramic dielectric layers.
本发明提供一种纳米钛酸钡粉体,是采用上述制备方法制得。该纳米钛酸钡粉体具有粒径小、粒径分布窄、纯度高、晶粒发育良好的特点,能够满足陶瓷介电层的需求。The invention provides a nano barium titanate powder, which is prepared by the above preparation method. The nano barium titanate powder has the characteristics of small particle size, narrow particle size distribution, high purity and good crystal grain development, and can meet the requirements of ceramic dielectric layers.
本发明提供一种陶瓷介电层的制造方法,包括首先制备上述纳米钛酸钡粉体,该制造方法能够提高陶瓷介电层的均匀性和致密性、降低孔隙率。The present invention provides a method for manufacturing a ceramic dielectric layer, which includes first preparing the above-mentioned nano barium titanate powder. The manufacturing method can improve the uniformity and compactness of the ceramic dielectric layer and reduce the porosity.
本发明提供一种陶瓷介电层,是采用上述制造方法制得,该陶瓷介电层具有较高的均匀性、致密性以及较低的孔隙率。The present invention provides a ceramic dielectric layer, which is prepared by the above-mentioned manufacturing method. The ceramic dielectric layer has high uniformity, compactness and low porosity.
为实现上述目的,本发明提供一种纳米钛酸钡粉体的制备方法,包括:将纳米二氧化钛水分散液与氢氧化钡水溶液快速混合,使所得混合体系的温度因二者的快速混合而较氢氧化钡水溶液的温度低至少2℃;其中,纳米二氧化钛水分散液的质量浓度不低于20%;In order to achieve the above objective, the present invention provides a method for preparing nano-barium titanate powder, which includes: rapidly mixing the nano-titanium dioxide aqueous dispersion with the barium hydroxide aqueous solution, so that the temperature of the resulting mixed system is relatively higher due to the rapid mixing of the two. The temperature of the barium hydroxide aqueous solution is at least 2°C lower; wherein the mass concentration of the nano-titanium dioxide aqueous dispersion is not less than 20%;
将该混合体系进行高压水热合成反应,所得反应产物再经洗涤和干燥,得到纳米钛酸钡粉体。The mixed system is subjected to a high-pressure hydrothermal synthesis reaction, and the resulting reaction product is washed and dried to obtain nano-barium titanate powder.
当前采用水热法合成纳米钛酸钡粉体时,若作为钛源的TiO 2浓度高,则易导致纳米钛酸钡颗粒团聚现象十分严重;而TiO 2的浓度过低,又会导致生产效率过低、产品粒径较大等诸多问题。针对此现状,本发明提供了一种解 决方案,采用高浓度(质量浓度≥20%)纳米二氧化钛水分散液为原料,首先将纳米二氧化钛水分散液与氢氧化钡水溶液进行快速混合,然后再实施高压水热合成,不仅能够降低高压水热合成反应过程中溶剂(一般为去离子水)的用量,提高生产效率,而且能够实现钛酸钡纳米颗粒的粒径可控,并能够获得较窄的粒径分布,此外还能确保纳米钛酸钡粉体的高纯度和晶粒良好发育,最终得到性能优异的纳米钛酸钡粉体产品。 When using the hydrothermal method to synthesize nano-barium titanate powder, if the concentration of TiO 2 as the titanium source is high, it will easily cause the agglomeration of nano-barium titanate particles to be very serious; while the concentration of TiO 2 is too low, which will lead to production efficiency Many problems such as too low and large product particle size. In view of this situation, the present invention provides a solution, using high-concentration (mass concentration ≥20%) nano-titanium dioxide aqueous dispersion as a raw material. Firstly, the nano-titanium dioxide aqueous dispersion and barium hydroxide aqueous solution are quickly mixed, and then implemented High-pressure hydrothermal synthesis can not only reduce the amount of solvent (usually deionized water) in the process of high-pressure hydrothermal synthesis reaction, improve production efficiency, but also achieve controllable barium titanate nano-particle size, and can obtain narrower The particle size distribution can also ensure the high purity of the nano barium titanate powder and the good growth of crystal grains, and finally obtain the nano barium titanate powder product with excellent performance.
本发明中,纳米二氧化钛水分散液与氢氧化钡水溶液之间的快速混合,或者说钛源与钡源的快速混合,是通过混合体系的温度降低程度来体现,即因二者的快速混合所直接导致的温度明显降低,而不包括在混合过程中通过外部冷却等手段导致的温度明显降低。在二者快速混合过程中,即使正使用加热设备对体系进行加热,但由于两种温度的液体快速混合,加热设备不足以及时维持温度达到氢氧化钡水溶液在混合前的温度,因此导致混合体系的温度较氢氧化钡水溶液的温度有明显降低。In the present invention, the rapid mixing between the nanometer titanium dioxide aqueous dispersion and the barium hydroxide aqueous solution, or the rapid mixing of the titanium source and the barium source, is reflected by the temperature reduction degree of the mixing system, that is, due to the rapid mixing of the two The obvious temperature drop caused directly, excluding the obvious temperature drop caused by external cooling during the mixing process. In the rapid mixing process of the two, even if heating equipment is being used to heat the system, due to the rapid mixing of the two temperature liquids, the heating equipment is insufficient to maintain the temperature in a timely manner to reach the temperature of the barium hydroxide aqueous solution before mixing, resulting in a mixed system The temperature is significantly lower than that of barium hydroxide aqueous solution.
显而易见的是,这种体系温度的降低主要受到纳米二氧化钛水分散液量与初始温度、纳米二氧化钛水分散液加入速度与混合速度、还有体系加热设备功率与热传导的影响;考虑到常规的电加热或者热介质传热方式的加热功率有限,当初始温度T1的纳米二氧化钛水分散液量快速加入初始温度T2的氢氧化钡水溶液时,不足以弥补温度的降低,而导致混合体系温度T3下降2℃以上;只有当加入速度与混合速度较慢时,加热功率得以补偿体系温度的降低在2℃以内。另外,如果混合速度不足,不但会造成体系中各处温度不均,同时也会造纳米二氧化钛水分散液在体系中分布的不均匀,影响产品的一致性。因此,本专利采用对体系温度降低的定义来判断加入速度与混合速度的快慢。It is obvious that the decrease of the system temperature is mainly affected by the amount and initial temperature of the nano-TiO2 aqueous dispersion, the addition speed and mixing speed of the nano-TiO2 aqueous dispersion, as well as the power and heat conduction of the system heating equipment; taking into account the conventional electric heating Or the heating power of the heat transfer mode of the heat medium is limited. When the initial temperature T1 of the nano-titanium dioxide aqueous dispersion is quickly added to the barium hydroxide aqueous solution at the initial temperature T2, it is not enough to compensate for the decrease in temperature, and the temperature of the mixed system T3 drops by 2℃ Above; only when the addition speed and mixing speed are slow, the heating power can compensate for the decrease in system temperature within 2°C. In addition, if the mixing speed is insufficient, it will not only cause uneven temperature everywhere in the system, but also cause uneven distribution of the nanometer titanium dioxide aqueous dispersion in the system, which will affect the consistency of the product. Therefore, this patent adopts the definition of system temperature reduction to judge the speed of addition and mixing.
具体的,为实现二者的快速混合,在工业生产中,可将氢氧化钡水溶液置于加热搅拌釜中,纳米二氧化钛水分散液量通过泵或其它液体加料方式注入加热搅拌釜,并辅以高速搅拌分散;或者两种液体通过可计量的液液混合装置实现在线的连续混合等。实际中,所有可以实现一定温度下液液高速混合的生产方式均可以用于本发明中技术方案的实施。Specifically, in order to achieve rapid mixing of the two, in industrial production, the aqueous solution of barium hydroxide can be placed in a heated stirred tank, and the amount of nanometer titanium dioxide aqueous dispersion can be injected into the heated stirred tank through a pump or other liquid feeding methods, and supplemented by High-speed stirring and dispersion; or two liquids can be continuously mixed online through a meterable liquid-liquid mixing device. In practice, all production methods that can achieve high-speed mixing of liquid and liquid at a certain temperature can be used in the implementation of the technical scheme of the present invention.
当然,加料或混合速度应保证整体混合溶液的温度尽快趋于平衡,避免因混合体系温度不均而以因此后续钛酸钡颗粒生长尺寸的一致性。在实际工 业生产中,一般可选取多个有代表性的监测点测试混合过程中的温度变化,以各监测点的温度均降低2℃以上且降低幅度基本一致为宜。Of course, the feeding or mixing speed should ensure that the temperature of the overall mixed solution tends to balance as soon as possible, so as to avoid the uniformity of the subsequent growth of the barium titanate particles due to the uneven temperature of the mixing system. In actual industrial production, multiple representative monitoring points can generally be selected to test the temperature changes during the mixing process. It is advisable that the temperature of each monitoring point is reduced by more than 2°C and the reduction range is basically the same.
进一步的,为保证后续钛酸钡颗粒生长尺寸的一致性,混合体系的温度与混合前氢氧化钡水溶液之间的温差也不宜过大,一般控制在2~20℃、通常控制在2~10℃。这样还能够有效避免因温度跳跃下降所导致的氢氧化钡析出。Furthermore, in order to ensure the consistency of the subsequent barium titanate particle growth size, the temperature difference between the temperature of the mixed system and the barium hydroxide aqueous solution before mixing should not be too large, generally controlled at 2-20 ℃, usually controlled at 2-10 ℃. This can also effectively avoid the precipitation of barium hydroxide caused by a jump in temperature.
需要说明的是,由于纳米二氧化钛水分散液中,纳米二氧化钛具有非常高的浓度(≥20%),因此为了实现纳米钛酸钡粉体的高产率,氢氧化钡水溶液也需含有高浓度的钡离子来确保钡离子与钛原子之间的摩尔比以及钡源与钛源之间的快速混合。通常在氢氧化钡水溶液中,氢氧化钡浓度以接近饱和浓度为宜,比如钡源浓度为20%以上,甚至可达到50%以上,因此,为确保氢氧化钡在水中充分溶解,一般控制氢氧化钡水溶液的温度不低于90℃,一般为90~110℃,即可确保钡源与钛源之间的比例。It should be noted that, due to the very high concentration (≥20%) of nanometer titanium dioxide in the aqueous dispersion of nanometer titanium dioxide, in order to achieve high yield of nanometer barium titanate powder, the aqueous solution of barium hydroxide also needs to contain high concentration of barium. Ions to ensure the molar ratio between barium ions and titanium atoms and the rapid mixing between the barium source and the titanium source. Generally, in barium hydroxide aqueous solution, the concentration of barium hydroxide should be close to the saturation concentration. For example, the concentration of barium source is more than 20%, and even can reach more than 50%. Therefore, in order to ensure that barium hydroxide is fully dissolved in water, hydrogen is generally controlled The temperature of the barium oxide aqueous solution is not lower than 90°C, generally 90-110°C, which can ensure the ratio between the barium source and the titanium source.
不难理解,纳米二氧化钛水分散液的温度低于氢氧化钡水溶液,为确保二者快速混合过程中的温度降幅,纳米二氧化钛水分散液的温度以不超过70℃为宜,一般为室温下存放温度至70℃。It is not difficult to understand that the temperature of the nanometer titanium dioxide aqueous dispersion is lower than that of the barium hydroxide aqueous solution. In order to ensure the temperature drop during the rapid mixing process, the temperature of the nanometer titanium dioxide aqueous dispersion should not exceed 70℃, and it is generally stored at room temperature. The temperature reaches 70°C.
本发明中,混合体系的配制可以在大气环境下进行。当然,为避免副反应的发生,混合体系的配制也可以在惰性氛围下进行,比如在氮气、氩气保护下进行,本发明在此不做特别限定。In the present invention, the preparation of the mixed system can be carried out in an atmospheric environment. Of course, in order to avoid the occurrence of side reactions, the preparation of the mixed system can also be carried out under an inert atmosphere, such as under the protection of nitrogen or argon, and the present invention is not particularly limited herein.
如前所述,上述混合体系的配制,可以是将纳米二氧化钛水分散液加入到氢氧化钡水溶液中实现,也可以是将氢氧化钡水溶液加入到纳米二氧化钛水分散液中实现,还可以是将纳米二氧化钛水分散液与氢氧化钡水溶液以并流混合的方式实现混合。As mentioned above, the preparation of the above-mentioned mixed system can be realized by adding the aqueous dispersion of nanometer titanium dioxide to the aqueous solution of barium hydroxide, or adding the aqueous solution of barium hydroxide to the aqueous dispersion of nanometer titanium dioxide, or The nanometer titanium dioxide aqueous dispersion and the barium hydroxide aqueous solution are mixed in a co-current mixing manner.
在本发明优选的实施方案中,是将纳米二氧化钛水分散液快速加入到氢氧化钡水溶液中,使所得到的混合体系的温度较氢氧化钡水溶液的温度低至少2℃。采用此种方式配制混合体系,不涉及对高温氢氧化钡水溶液的投料、输运,对工艺与设备要求较低,更容易实现。In a preferred embodiment of the present invention, the nano-titanium dioxide aqueous dispersion is quickly added to the barium hydroxide aqueous solution, so that the temperature of the resulting mixed system is at least 2°C lower than that of the barium hydroxide aqueous solution. Using this method to prepare a mixed system does not involve the feeding and transportation of high-temperature barium hydroxide aqueous solution, and has lower requirements on the process and equipment, and is easier to implement.
本发明中所使用的纳米二氧化钛水分散液,是将纳米二氧化钛粉体分散到水中而形成。优选的,在纳米二氧化钛水分散液中,纳米二氧化钛以体积计的中位粒径D50不超过30nm。The aqueous nano-titanium dioxide dispersion used in the present invention is formed by dispersing nano-titanium dioxide powder in water. Preferably, in the aqueous nano-titanium dioxide dispersion, the median diameter D50 of the nano-titanium dioxide by volume does not exceed 30 nm.
本发明对于纳米二氧化钛粉体或纳米二氧化钛水分散液的来源不做特别限定,可商购,亦可自行制备。比如可以依照专利申请201610879270.3或201610879701.6中所记载的工艺制得纳米二氧化钛粉体,然后将其按比例分散在水中,即得纳米二氧化钛水分散液。In the present invention, the source of the nano-titanium dioxide powder or the nano-titanium dioxide aqueous dispersion is not particularly limited, and it can be purchased commercially or prepared by itself. For example, the nano-titanium dioxide powder can be prepared according to the process described in the patent application 201610879270.3 or 201610879701.6, and then dispersed in water in proportion to obtain an aqueous nano-titanium dioxide dispersion.
合理控制二氧化钛水分散液的浓度,还有利于避免纳米钛酸钡粉体在合成过程中发生团聚等问题,因此一般控制纳米二氧化钛水分散液的质量浓度为20~50%。发明人研究发现,将质量浓度在此区间内,不仅能够获得分散性良好的纳米钛酸钡粉体,而且在此区间内改变纳米二氧化钛水分散液的质量浓度,纳米钛酸钡粉体的平均粒径变化不大。Reasonable control of the concentration of the aqueous dispersion of titanium dioxide is also beneficial to avoid problems such as agglomeration of the nano-barium titanate powder during the synthesis process. Therefore, the mass concentration of the aqueous dispersion of nano-titanium dioxide is generally controlled to be 20-50%. The inventor found that by setting the mass concentration in this interval, not only can the nanometer barium titanate powder with good dispersibility be obtained, but also the mass concentration of the nanometer titanium dioxide aqueous dispersion is changed within this interval, and the average nanometer barium titanate powder The particle size changes little.
理想状态下,Ba与Ti的摩尔比为1时,能够使二者充分反应生成钛酸钡并避免原料剩余。可以理解,钛源或钡源过量更有利于反应朝着合成钛酸钡的正向进行,比如过量的Ba有利于降低反应产物中二氧化钛杂质的含量。但是钡的大量剩余,不仅会造成钡源的浪费,而且在收集反应产物时,如遇空气接触,还可能会引入碳酸钡杂质。综合考虑水热反应效率以及经济因素,一般控制Ba离子与Ti原子之间的摩尔比为1~4:1,使最终得到的纳米钛酸钡粉体具有较高的纯度,而且还能确保二氧化钛的充分反应。Ideally, when the molar ratio of Ba to Ti is 1, the two can fully react to form barium titanate and avoid raw material remaining. It can be understood that an excess of a titanium source or a barium source is more conducive to the positive progress of the reaction toward the synthesis of barium titanate, for example, excess Ba is conducive to reducing the content of titanium dioxide impurities in the reaction product. However, a large amount of barium surplus will not only cause a waste of barium source, but also may introduce barium carbonate impurities if the reaction product is in contact with air. Considering the hydrothermal reaction efficiency and economic factors, the molar ratio between Ba ions and Ti atoms is generally controlled to be 1 to 4: 1, so that the final nano barium titanate powder has a higher purity, and it can also ensure titanium dioxide The full response.
本发明中的高压水热合成反应条件,可以参照目前水热法合成钛酸钡的工艺进行。在本发明具体实施过程中,通常控制高压水热合成反应的温度为100~250℃,压力小于7MPa。具体的,是将配制好的混合体系转移至高压反应釜中,密封后升温,于100~250℃下反应。The high-pressure hydrothermal synthesis reaction conditions in the present invention can be carried out with reference to the current hydrothermal synthesis process of barium titanate. In the specific implementation of the present invention, the temperature of the high-pressure hydrothermal synthesis reaction is usually controlled to be 100-250°C, and the pressure is less than 7 MPa. Specifically, the prepared mixed system is transferred to an autoclave, sealed and heated, and reacted at 100-250°C.
本发明采用高浓度的纳米二氧化钛水分散液作为原料,相较于传统的高压水热合成工艺,还能够大大缩短反应时间,一般需反应约1小时,比如1~24小时,即可完成高压水热合成反应。The present invention uses high-concentration nano-titanium dioxide aqueous dispersion as the raw material. Compared with the traditional high-pressure hydrothermal synthesis process, the reaction time can be greatly shortened. Generally, it takes about 1 hour, such as 1-24 hours, to complete the high-pressure water. Thermal synthesis reaction.
在本发明具体实施过程中,可根据对于纳米钛酸钡粉体的实际需求,合理设定相应的高压水热合成反应条件,比如通过改变反应温度、反应时间等条件,获得不同粒径和/或不同四方相(或立方相)比重的纳米钛酸钡粉体。In the specific implementation process of the present invention, the corresponding high-pressure hydrothermal synthesis reaction conditions can be set reasonably according to the actual demand for nano barium titanate powder, for example, by changing the reaction temperature, reaction time and other conditions to obtain different particle sizes and/ Or nano barium titanate powder with different tetragonal phase (or cubic phase) specific gravity.
高压水热合成反应完成之后,降温并收集反应产物,再经洗涤和干燥等处理,即可获得高品质的纳米钛酸钡粉体。在本发明具体实施过程中,是采用去离子水,或者采用去离子水和乙醇对反应产物进行洗涤一次或多次,再经过滤以及60~90℃下的干燥,获得纳米钛酸钡粉体。After the high-pressure hydrothermal synthesis reaction is completed, the temperature is lowered and the reaction product is collected, and then washed and dried to obtain high-quality nano-barium titanate powder. In the specific implementation process of the present invention, deionized water or deionized water and ethanol are used to wash the reaction product one or more times, and then filtered and dried at 60-90°C to obtain nano-barium titanate powder .
本发明提供一种纳米钛酸钡粉体,是采用上述制备方法制得。The invention provides a nano barium titanate powder, which is prepared by the above preparation method.
本发明提供的纳米钛酸钡粉体,具有非常小的粒径,其平均粒径在100nm以下,甚至可达到5~50nm;该纳米钛酸钡粉体的粒径基本呈正态分布,经计算,相对标准差在25%以下,因此该钛酸钡粉体的颗粒非常均匀,粒径分布较窄;纳米钛酸钡粉体的XRD图中,2θ角在44°~46°之间的衍射峰表现为一个单峰,无明显的分裂,因此说明晶粒发育完整、晶型良好;Ba/Ti比均在1附近,说明该纳米钛酸钡粉体具有非常高的纯度。因此,本发明提供的纳米钛酸钡粉体具有非常高的品质,能够满足陶瓷介电层的制作需求。The nano barium titanate powder provided by the present invention has a very small particle size, and its average particle size is below 100 nm, and can even reach 5-50 nm; the particle size of the nano barium titanate powder is basically normal distribution, and Calculated, the relative standard deviation is below 25%, so the particles of the barium titanate powder are very uniform and the particle size distribution is narrow; the XRD pattern of the nano-barium titanate powder shows that the 2θ angle is between 44° and 46° The diffraction peak appears as a single peak without obvious splitting, which indicates that the crystal grains are well developed and the crystal form is good; the Ba/Ti ratio is around 1, indicating that the nano barium titanate powder has very high purity. Therefore, the nano barium titanate powder provided by the present invention has very high quality, and can meet the production requirements of the ceramic dielectric layer.
本发明提供一种陶瓷介电层的制造方法,包括如下步骤:The present invention provides a method for manufacturing a ceramic dielectric layer, which includes the following steps:
首先按照前述制备方法制得纳米钛酸钡粉体;然后对纳米钛酸钡粉体进行制片与焙烧,得到陶瓷介电层。First, the nano barium titanate powder is prepared according to the aforementioned preparation method; then, the nano barium titanate powder is prepared and fired to obtain a ceramic dielectric layer.
具体的,可以首先根据需求,制备不同粒径的纳米钛酸钡粉体,然后将不同粒径的纳米钛酸钡粉体按比例混合,比如将平均粒径为75nm和29nm的两种纳米钛酸钡粉体进行混合;或者,也可以将单一(平均)粒径的纳米钛酸钡粉体作为原料;再或者,还可以将本发明的制备工艺所获得的纳米钛酸钡粉体与粒径大于100nm的钛酸钡粉体进行混合,以实现密堆积。Specifically, you can first prepare nano-barium titanate powders with different particle sizes according to requirements, and then mix the nano-barium titanate powders with different particle sizes in proportion, for example, two kinds of nano-titanium with an average particle size of 75nm and 29nm. Barium titanate powder; alternatively, nano barium titanate powder with a single (average) particle size can be used as a raw material; or alternatively, the nano barium titanate powder and particles obtained by the preparation process of the present invention Barium titanate powders with a diameter greater than 100nm are mixed to achieve close packing.
上述混合可以采用陶瓷介电层的常规混合工艺,比如将不同粒径的纳米钛酸钡粉体在行星式球磨机中以450转/分速度湿法球磨10小时,并采用水或乙醇作为分散剂,最终将得到的浆料在80℃左右的温度下烘干。The above-mentioned mixing can use the conventional mixing process of ceramic dielectric layer, for example, wet ball milling nano-barium titanate powder of different particle sizes in a planetary ball mill at 450 rpm for 10 hours, and using water or ethanol as a dispersant , And finally the obtained slurry is dried at a temperature of about 80°C.
上述制片和焙烧亦可采用陶瓷介电层的常规制备工艺,比如将混合后的钛酸钡粉体与聚乙烯醇水溶液研磨混匀,采用压力机和模具压成原片,排胶,在1100℃以上烧结成瓷,得到陶瓷介电层。The above-mentioned tableting and firing can also adopt the conventional preparation process of ceramic dielectric layer, such as grinding and mixing the mixed barium titanate powder and polyvinyl alcohol aqueous solution, pressing the original tablet with a press and a mold, and debinding. Sintered into porcelain at a temperature above 1100°C to obtain a ceramic dielectric layer.
本发明还提供一种陶瓷介电层,是采用上述制造方法制得。由于采用了上述高品质的纳米钛酸钡粉体作为原料,因此能够保证陶瓷介电层的高致密性及低孔隙率,避免陶瓷介电层中出现孔洞或裂纹,更好的满足MLCC等器件微型化、薄片化、高性能的发展需求。The invention also provides a ceramic dielectric layer, which is prepared by the above-mentioned manufacturing method. Because the above-mentioned high-quality nano barium titanate powder is used as the raw material, it can ensure the high density and low porosity of the ceramic dielectric layer, avoid holes or cracks in the ceramic dielectric layer, and better meet the requirements of MLCC and other devices The development needs of miniaturization, thinning, and high performance.
本发明提供的纳米钛酸钡粉体的制备方法,首先将高浓度的纳米二氧化钛水分散液与氢氧化钡水溶液进行快速混合,然后再实施高压水热合成,解决了现有水热合成法制备纳米钛酸钡粉体时,二氧化钛浓度过高所带来的钛 酸钡颗粒团聚,以及解决了二氧化钛浓度过低所带来的生产效率低、产品品质差的问题。采用本发明的制备方法,由于纳米二氧化钛的浓度非常高,因此显著提高了工业生产效率;并且,所获得的纳米钛酸钡粉体具有如下优点:The method for preparing nano barium titanate powder provided by the present invention firstly quickly mixes a high-concentration nano titanium dioxide aqueous dispersion with a barium hydroxide aqueous solution, and then implements high-pressure hydrothermal synthesis, which solves the problem of the existing hydrothermal synthesis method. In the case of nano-barium titanate powder, the agglomeration of barium titanate particles caused by excessively high concentration of titanium dioxide, and the problem of low production efficiency and poor product quality caused by low concentration of titanium dioxide is solved. By adopting the preparation method of the present invention, due to the very high concentration of nano titanium dioxide, the industrial production efficiency is significantly improved; and the obtained nano barium titanate powder has the following advantages:
1)粒径小:平均粒径小于100nm,甚至可达到5~50nm;1) Small particle size: the average particle size is less than 100nm, and can even reach 5-50nm;
2)粒径均匀,粒径分布窄:粒径分布的相对标准差在25%以内;2) Uniform particle size and narrow particle size distribution: the relative standard deviation of the particle size distribution is within 25%;
3)晶粒发育完整、晶型良好:XRD图中,2θ角在44°~46°之间的衍射峰表现为一个单峰,无明显的分裂;3) The crystal grains are well developed and the crystal form is good: in the XRD pattern, the diffraction peak with a 2θ angle between 44° and 46° appears as a single peak without obvious split;
4)纯度高:Ba/Ti比均在1附近,多集中在0.990~0.999之间。4) High purity: Ba/Ti ratios are all around 1, mostly between 0.990 and 0.999.
本发明提供的纳米钛酸钡粉体,是采用上述制备方法制得。该纳米钛酸钡粉体具有粒径小、粒径分布窄、晶型良好、纯度高的优势,因而能够满足陶瓷介电层的使用需求。The nano barium titanate powder provided by the present invention is prepared by the above-mentioned preparation method. The nano barium titanate powder has the advantages of small particle size, narrow particle size distribution, good crystal form, and high purity, and thus can meet the use requirements of ceramic dielectric layers.
本发明提供的陶瓷介电层的制造方法,包括前述纳米钛酸钡粉体的制备方法。由于是对上述高品质的纳米钛酸钡粉体进行制片和焙烧,因此能够有利于保证陶瓷介电层厚度的高致密性及低孔隙率,避免陶瓷介电层中出现孔洞或裂纹。The method for manufacturing a ceramic dielectric layer provided by the present invention includes the method for preparing the aforementioned nano barium titanate powder. Since the above-mentioned high-quality nano barium titanate powder is prepared and fired, it can help to ensure the high density and low porosity of the ceramic dielectric layer thickness, and avoid holes or cracks in the ceramic dielectric layer.
本发明提供的陶瓷介电层,由于采用前述纳米钛酸钡粉体作为原料,因此能够保证该陶瓷介电层厚度的高均匀性、高致密性及低孔隙率。Since the ceramic dielectric layer provided by the present invention uses the aforementioned nano-barium titanate powder as a raw material, it can ensure the high uniformity, high density and low porosity of the ceramic dielectric layer thickness.
附图说明Description of the drawings
图1为本发明实施例1-10中所用纳米二氧化钛以1%的质量浓度分散在去离子水中所测得的粒径分布曲线;Figure 1 is a particle size distribution curve measured when nano titanium dioxide used in Examples 1-10 of the present invention is dispersed in deionized water at a mass concentration of 1%;
图2为本发明实施例1-10中所用纳米二氧化钛以10%的质量浓度分散在去离子水中所测得的粒径分布曲线;Figure 2 is a particle size distribution curve measured when nano titanium dioxide used in Examples 1-10 of the present invention is dispersed in deionized water at a mass concentration of 10%;
图3为本发明实施例1-10中所用纳米二氧化钛以50%的质量浓度分散在去离子水中所测得的粒径分布曲线;Figure 3 is a particle size distribution curve measured when nano-titania used in Examples 1-10 of the present invention is dispersed in deionized water at a mass concentration of 50%;
图4为本发明实施例1中所制得的纳米钛酸钡粉体的透射电镜照片;4 is a transmission electron micrograph of the nano-barium titanate powder prepared in Example 1 of the present invention;
图5为本发明实施例1中所制得的纳米钛酸钡粉体的粒径分布图;Figure 5 is a particle size distribution diagram of nano barium titanate powder prepared in Example 1 of the present invention;
图6为本发明实施例1中所制得的纳米钛酸钡粉体的XRD图谱;Fig. 6 is an XRD pattern of nano barium titanate powder prepared in Example 1 of the present invention;
图7为本发明实施例2中所制得的纳米钛酸钡粉体的扫描电镜照片;Figure 7 is a scanning electron micrograph of the nano barium titanate powder prepared in Example 2 of the present invention;
图8为本发明实施例2中所制得的纳米钛酸钡粉体的粒径分布图;Figure 8 is a particle size distribution diagram of nano barium titanate powder prepared in Example 2 of the present invention;
图9为本发明实施例2中所制得的纳米钛酸钡粉体的XRD图谱;Figure 9 is an XRD pattern of the nano barium titanate powder prepared in Example 2 of the present invention;
图10为本发明实施例3中所制得的纳米钛酸钡粉体的扫描电镜照片;Figure 10 is a scanning electron micrograph of the nano barium titanate powder prepared in Example 3 of the present invention;
图11为本发明实施例3中所制得的纳米钛酸钡粉体的粒径分布图;11 is a diagram of the particle size distribution of nano barium titanate powder prepared in Example 3 of the present invention;
图12为本发明实施例3中所制得的纳米钛酸钡粉体的XRD图谱;Figure 12 is an XRD pattern of the nano barium titanate powder prepared in Example 3 of the present invention;
图13为本发明对比例1中所制得的纳米钛酸钡粉体的扫描电镜照片;Figure 13 is a scanning electron micrograph of the nano barium titanate powder prepared in Comparative Example 1 of the present invention;
图14为本发明对比例1中所制得的纳米钛酸钡粉体的XRD图谱;14 is the XRD pattern of the nano barium titanate powder prepared in Comparative Example 1 of the present invention;
图15为本发明对比例2中所制得的纳米钛酸钡粉体的扫描电镜照片;Figure 15 is a scanning electron micrograph of the nano barium titanate powder prepared in Comparative Example 2 of the present invention;
图16为本发明对比例2中所制得的纳米钛酸钡粉体的XRD图谱;16 is the XRD pattern of the nano barium titanate powder prepared in Comparative Example 2 of the present invention;
图17为本发明对比例3中所制得的纳米钛酸钡粉体的扫描电镜照片;Figure 17 is a scanning electron micrograph of the nano barium titanate powder prepared in Comparative Example 3 of the present invention;
图18为本发明对比例3中所制得的纳米钛酸钡粉体的XRD图谱;18 is the XRD pattern of the nano barium titanate powder prepared in Comparative Example 3 of the present invention;
图19为不同粒径纳米钛酸钡粉体以不同比例混合烧结后获得钛酸钡介电陶瓷片的XRD谱;Figure 19 shows the XRD spectra of barium titanate dielectric ceramic sheets obtained by mixing and sintering nano barium titanate powders of different particle sizes in different proportions;
图20为图19的局部放大图。Fig. 20 is a partial enlarged view of Fig. 19.
具体实施方式Detailed ways
为使本发明实施例的目的、技术方案和优点更加清楚,下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。In order to make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be described clearly and completely in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of the embodiments of the present invention, not all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.
以下实施例和对比例中,利用以下检测技术对纳米钛酸钡粉体或二氧化钛粉体特性进行测试和判定:In the following examples and comparative examples, the following detection techniques are used to test and determine the characteristics of nano-barium titanate powder or titanium dioxide powder:
1、利用马尔文激光粒度仪(Zetasizer Nano ZS)对样品进行分散粒度测试,得到纳米二氧化钛在水中的体积分布分散粒径分布图,并由此可得到体积中位粒径D50。1. Use a Malvern laser particle size analyzer (Zetasizer Nano ZS) to test the dispersion particle size of the sample to obtain the volume distribution and dispersion particle size distribution diagram of nanometer titanium dioxide in water, and from this, the volume median particle size D50 can be obtained.
2、利用扫描电子显微镜或透射电子显微镜观察样品的表面形貌,对约200个颗粒粒径进行统计,得到钛酸钡一次颗粒的平均粒径。2. Observe the surface morphology of the sample with a scanning electron microscope or a transmission electron microscope, and calculate the particle size of about 200 particles to obtain the average particle size of the primary particles of barium titanate.
3、相对标准差为标准偏差与测得的平均值的比值,由origin软件给出。3. The relative standard deviation is the ratio of the standard deviation to the measured average value, which is given by the origin software.
4、利用X射线衍射仪(D8Advance)以步长0.02°、积分时间为2s的参数在20~80°范围内采集X射线衍射图谱,通过Topas软件采用Rietveld法进 行结构精修计算晶格常数比(c/a),其中晶格常数比越接近1,说明晶体结构越接近立方相,反之接近四方相;通过无标样定量分析计算四方相和立方相含量。4. Use an X-ray diffractometer (D8Advance) to collect X-ray diffraction patterns in the range of 20-80° with a step length of 0.02° and an integration time of 2s, and use the Rietveld method to refine the structure to calculate the lattice constant ratio through Topas software (c/a), the closer the lattice constant ratio is to 1, the closer the crystal structure is to the cubic phase, and vice versa. The content of the tetragonal and cubic phases is calculated by quantitative analysis without standard samples.
5、利用BET法分析材料的比表面积。5. Use the BET method to analyze the specific surface area of the material.
6、利用ICP-MS分析测定钛酸钡粉体钡钛比。6. Determine the ratio of barium to titanium of barium titanate powder by ICP-MS analysis.
实施例1Example 1
室温下,将二氧化钛纳米粉体分散在去离子水中,得到质量浓度为48%的纳米二氧化钛水分散液200g;Disperse the titanium dioxide nano powder in deionized water at room temperature to obtain 200 g of a 48% mass concentration of nano titanium dioxide aqueous dispersion;
在氮气保护下,向三口烧瓶中加入710g氢氧化钡和700mL去离子水,于90℃下搅拌至溶解;Under the protection of nitrogen, add 710g of barium hydroxide and 700mL of deionized water to a three-necked flask, and stir at 90℃ to dissolve;
在氢氧化钡不析出的情况下,将纳米二氧化钛水分散液快速加入到三口烧瓶中,测量混合体系的温度降低2~5℃,且在快速加入的过程中快速搅拌,加入完成后,继续搅拌约半小时,得到均匀分散的混合体系;Under the condition that the barium hydroxide does not precipitate, quickly add the nano-titanium dioxide aqueous dispersion to the three-necked flask, measure the temperature of the mixed system to decrease by 2~5℃, and stir quickly during the rapid addition. After the addition is complete, continue to stir About half an hour, a uniformly dispersed mixed system is obtained;
将混合体系转移至反应釜中,密封,于120℃下加热约16小时,冷却后将反应产物取出,用去离子水洗涤产物数次,80℃烘干数小时,得到纳米钛酸钡粉体。Transfer the mixed system to the reaction kettle, seal, heat at 120°C for about 16 hours, take out the reaction product after cooling, wash the product with deionized water several times, and dry at 80°C for several hours to obtain nano-barium titanate powder .
本实施例所用的纳米二氧化钛粉体,其以体积计的D50≤10nm,将其以1%、10%和50%的浓度分散于去离子水中所测得的粒径分布曲线分别如图1、图2和图3所示。The nano titanium dioxide powder used in this embodiment has a D50 by volume ≤ 10nm, and the particle size distribution curves measured by dispersing it in deionized water at a concentration of 1%, 10%, and 50% are shown in Figure 1, respectively. Shown in Figure 2 and Figure 3.
实施例2Example 2
改变高压水热合成反应的温度为160℃,其余条件与实施例1一致,得到纳米钛酸钡粉体。The temperature of the high-pressure hydrothermal synthesis reaction was changed to 160°C, and the remaining conditions were the same as in Example 1, to obtain nano-barium titanate powder.
实施例3Example 3
改变高压水热合成反应的温度为220℃,其余条件与实施例1一致,得到纳米钛酸钡粉体。The temperature of the high-pressure hydrothermal synthesis reaction was changed to 220°C, and the other conditions were the same as in Example 1, to obtain nano-barium titanate powder.
实施例4Example 4
改变高压水热合成反应的时间为4小时,其余条件与实施例1一致,得到纳米钛酸钡粉体。The time of the high-pressure hydrothermal synthesis reaction was changed to 4 hours, and the remaining conditions were the same as in Example 1, to obtain nano-barium titanate powder.
实施例5Example 5
改变高压水热合成反应的时间为24小时,其余条件与实施例1一致,得到纳米钛酸钡粉体。The time of the high-pressure hydrothermal synthesis reaction was changed to 24 hours, and the remaining conditions were the same as in Example 1, to obtain nano-barium titanate powder.
实施例6Example 6
保持去离子水体积不变,降低二氧化钛质量至原来的一半,从而改变二氧化钛和氢氧化钡的摩尔比,其它操作步骤和条件均与实施例1保持一致。Keep the volume of deionized water unchanged, reduce the mass of titanium dioxide to half of the original, thereby changing the molar ratio of titanium dioxide to barium hydroxide, and other operating steps and conditions are the same as in Example 1.
实施例7-8Example 7-8
实施例7-8的制备工艺与实施例2基本一致,区别仅在于:实施例7中纳米二氧化钛水分散液的质量浓度为36%;实施例8中纳米二氧化钛水分散液的质量浓度为24%。The preparation process of Examples 7-8 is basically the same as that of Example 2, except that: the mass concentration of the nanometer titanium dioxide aqueous dispersion in Example 7 is 36%; the mass concentration of the nanometer titanium dioxide aqueous dispersion in Example 8 is 24% .
实施例9-10Examples 9-10
实施例9-10的制备工艺与实施例2基本一致,区别仅在于:实施例9中,是将710g氢氧化钡和1000mL去离子水加入到三口烧瓶中,于70℃下搅拌至溶解;实施例10中,是将710g氢氧化钡和300mL去离子水加入到三口烧瓶中,于110℃下搅拌至溶解。The preparation process of Examples 9-10 is basically the same as that of Example 2, except that: in Example 9, 710g of barium hydroxide and 1000mL of deionized water are added to a three-necked flask, and stirred at 70°C until dissolved; In Example 10, 710 g of barium hydroxide and 300 mL of deionized water were added to a three-necked flask and stirred at 110° C. to dissolve.
实施例11-12Examples 11-12
实施例11-12的制备工艺与实施例2基本一致,区别仅在于:实施例11中纳米二氧化钛以体积计的中位粒径D50约为18nm;实施例12中纳米二氧化钛以体积计的中位粒径D50约为27nm。The preparation process of Examples 11-12 is basically the same as that of Example 2, except that: the median diameter D50 of nanometer titania by volume in Example 11 is about 18nm; the median diameter of nanometer titania by volume in Example 12 The particle size D50 is about 27nm.
前述实施例1-12中合成纳米钛酸钡粉体的反应条件具体参见表1,所获得的纳米钛酸钡粉体的性能测试结果参见表2。The reaction conditions for synthesizing nano-barium titanate powder in the foregoing Examples 1-12 are shown in Table 1, and the performance test results of the obtained nano-barium titanate powder are shown in Table 2.
表1高压水热合成纳米钛酸钡粉体反应条件表Table 1 High-pressure hydrothermal synthesis reaction conditions of nano-barium titanate powder
Figure PCTCN2019100604-appb-000001
Figure PCTCN2019100604-appb-000001
表2高压水热合成纳米钛酸钡粉体物性表Table 2 Physical properties of nanometer barium titanate powder synthesized by high pressure hydrothermal
Figure PCTCN2019100604-appb-000002
Figure PCTCN2019100604-appb-000002
实施例1中所获得的纳米钛酸钡粉体的透射电镜(SEM)照片、粒径分 布图和XRD图谱分别如图4、图5和图6所示;实施例2中所获得的纳米钛酸钡粉体的扫描电镜照片、粒径分布图和XRD图谱分别如图7、图8和图9所示;实施例3中所获得的纳米钛酸钡粉体的扫描电镜照片、粒径分布图和XRD图谱分别如图10、图11和图12所示;其它实施例的表征结果参照图4至图12。The transmission electron microscope (SEM) photographs, particle size distribution diagrams and XRD patterns of the nano-barium titanate powder obtained in Example 1 are shown in Figure 4, Figure 5 and Figure 6, respectively; the nano-titanium obtained in Example 2 The scanning electron micrographs, particle size distribution and XRD patterns of the barium oxide powder are shown in Figures 7, 8 and 9 respectively; the scanning electron micrographs and particle size distribution of the nano-barium titanate powder obtained in Example 3 The graph and the XRD pattern are shown in FIG. 10, FIG. 11, and FIG. 12 respectively; for the characterization results of other embodiments, refer to FIG. 4 to FIG. 12.
根据表2中的比表面积和粒径数据,结合透射电镜照片或扫描电镜照片、粒径分布图可知,采用本发明实施例1-12中的制备方法,所获得的纳米钛酸钡粉体的平均粒径不超过100nm,甚至可达到5~50nm,且粒度分布均匀、颗粒粒径基本呈正态分布,颗粒分散良好,未见颗粒团聚。经进一步计算,颗粒粒径的相对标准差均不超过23%,由此可知,采用本发明所提供的制备方法,能够获得粒径小且均匀的纳米钛酸钡粉体。According to the specific surface area and particle size data in Table 2, combined with transmission electron microscopy photos or scanning electron microscopy photos, and particle size distribution diagrams, it can be seen that using the preparation method in Examples 1-12 of the present invention, the obtained nano barium titanate powder is The average particle size does not exceed 100nm, and can even reach 5-50nm, and the particle size distribution is uniform, the particle size is basically a normal distribution, the particles are well dispersed, and no particle agglomeration is seen. After further calculation, the relative standard deviation of the particle size does not exceed 23%. It can be seen that the preparation method provided by the present invention can obtain a small and uniform nano-barium titanate powder.
进一步结合XRD衍射图谱可知,实施例1-12中所获得的纳米钛酸钡粉体的2θ角在44°~46°之间的衍射峰表现为一个单峰,无明显的分裂;分别计算晶格常数比(c/a),均在1.0000附近,多集中在1.0000~1.0070之间,说明纳米钛酸钡粉体晶粒发育完整、晶型良好,且以立方相为主或均为立方相。Further combining with the XRD diffraction pattern, it can be seen that the diffraction peak of the nano-barium titanate powder obtained in Examples 1-12 with a 2θ angle between 44° and 46° is a single peak without obvious splitting; the crystals are calculated separately. The lattice constant ratio (c/a) is all around 1.0000, mostly between 1.0000 and 1.0070, indicating that the nano-barium titanate powder has complete crystal grain development, good crystal form, and mainly cubic phase or all cubic phase .
根据表2中的Ba/Ti比数据可知,实施例1-12中所获得的纳米钛酸钡粉体,Ba/Ti比均在1附近,多集中在0.990~0.999之间,由此可知,该纳米钛酸钡粉体具有非常高的纯度。According to the Ba/Ti ratio data in Table 2, it can be seen that the Ba/Ti ratio of the nano-barium titanate powder obtained in Examples 1-12 is around 1, mostly concentrated between 0.990 and 0.999. It can be seen that, The nano barium titanate powder has very high purity.
由此可知,采用本发明所提供的制备方法,能够获得粒径小且粒径分布均匀、晶体发育完整、纯度高的高品质纳米钛酸钡粉体。It can be seen that by adopting the preparation method provided by the present invention, high-quality nano-barium titanate powder with small particle size, uniform particle size distribution, complete crystal growth, and high purity can be obtained.
进一步的,根据实施例1-3的测试结果可知,增大水热合成反应的温度,纳米钛酸钡粉体的颗粒粒径随之增大,且立方相含量降低而四方相含量升高。Furthermore, according to the test results of Examples 1-3, it can be known that increasing the temperature of the hydrothermal synthesis reaction increases the particle size of the nano-barium titanate powder, and the cubic phase content decreases while the tetragonal phase content increases.
根据实施例1和4、实施例3和5的测试结果对比可知,延长水热合成反应的时间,纳米钛酸钡粉体的颗粒粒径随之增大,还可能会使四方相比重增大,立方相比重减小。According to the comparison of the test results of Examples 1 and 4, and Examples 3 and 5, it can be seen that extending the time of the hydrothermal synthesis reaction will increase the particle size of the nano-barium titanate powder, which may also increase the specific gravity of the square. , The cubic weight is reduced.
根据实施例2、7和8的测试结果可知,改变纳米二氧化钛水分散液的质量浓度,或者说混合体系中二氧化钛的质量浓度,对纳米钛酸钡粉体的颗粒粒径以及四方相(或立方相)的比重也会有所影响。大致而言,纳米二氧化钛水分散液的质量浓度降低,纳米钛酸钡粉体的颗粒粒径略有降低但降幅不明显,四方相比重也略有降低但同样降幅不大。比如将纳米二氧化钛水分散 液的质量浓度由48%降低至24%,纳米钛酸钡粉体的平均粒径由29nm降低至25nm,四方相含量由37.9%降低至37.5%。According to the test results of Examples 2, 7 and 8, it can be known that changing the mass concentration of nanometer titanium dioxide aqueous dispersion, or the mass concentration of titanium dioxide in the mixed system, has a significant effect on the particle size and tetragonal phase (or cubic phase) of nanometer barium titanate powder. Phase) will also have an impact. Generally speaking, the mass concentration of nanometer titanium dioxide aqueous dispersion is reduced, the particle size of nanometer barium titanate powder is slightly reduced, but the reduction is not obvious, and the relative weight of the square is also slightly reduced, but the reduction is also not large. For example, the mass concentration of nanometer titanium dioxide aqueous dispersion is reduced from 48% to 24%, the average particle size of nanometer barium titanate powder is reduced from 29nm to 25nm, and the tetragonal phase content is reduced from 37.9% to 37.5%.
根据实施例1、11和12测试结果可知,提高纳米二氧化钛水分散液中二氧化钛的中位粒径,纳米钛酸钡粉体的颗粒粒径会随之变大,还会使四方相比重增大,立方相比重减小。According to the test results of Examples 1, 11 and 12, it can be seen that increasing the median diameter of titanium dioxide in the nanometer titanium dioxide aqueous dispersion will increase the particle diameter of nanometer barium titanate powder and increase the specific gravity of the square , The cubic specific weight is reduced.
由此可推知,采用本发明所提供的制备方法,采用高浓度(20%~50%)的纳米二氧化钛水分散液作为原料,在高压水热合成反应之前先进行钛源与钡源的快速混合,能够克服现有水热合成工艺制备纳米钛酸钡技术中,因二氧化钛浓度低所造成的钛酸钡颗粒较大等缺陷,以及因二氧化钛浓度较高所造成的颗粒因发生团聚而无法获得小粒径钛酸钡的缺陷,从而能够得到粒径分布范围较窄、晶粒发育完整以及纯度高的高品质纳米钛酸钡粉体。It can be inferred that, using the preparation method provided by the present invention, a high-concentration (20%-50%) nano-titanium dioxide aqueous dispersion is used as a raw material, and the titanium source and the barium source are quickly mixed before the high-pressure hydrothermal synthesis reaction. , It can overcome the defects of large barium titanate particles caused by the low concentration of titanium dioxide in the existing hydrothermal synthesis process for preparing nano-barium titanate, and the particles caused by the high concentration of titanium dioxide cannot obtain small particles due to agglomeration. The defects of the particle size barium titanate can obtain high-quality nano-barium titanate powder with narrow particle size distribution range, complete crystal grain development and high purity.
对比例1Comparative example 1
对比例1的制备工艺与实施例2基本一致,区别仅在于,在配制混合体系时,保持纳米二氧化钛粉体的质量不变(即钡离子与钛原子的摩尔比不变),但纳米二氧化钛的质量浓度为8%。The preparation process of Comparative Example 1 is basically the same as that of Example 2. The only difference is that the quality of the nano-TiO2 powder is kept unchanged (that is, the molar ratio of barium ion to titanium atom is unchanged) when the mixed system is prepared, but the nano-TiO2 The mass concentration is 8%.
该纳米钛酸钡粉体的具体物性测试结果参见表3,其SEM照片和XRD图谱分别如图13和图14所示。经计算,平均粒径为33nm,大于实施例2所得结果(29nm)。说明当降低二氧化钛水分散液的浓度时,获得的纳米钛酸钡粉体的平均粒径变大。此外,由于纳米二氧化钛水分散液的浓度仅为8%,因此纳米钛酸钡粉体的生产效率较低。The specific physical property test results of the nano barium titanate powder are shown in Table 3, and the SEM photo and XRD pattern are shown in Figure 13 and Figure 14 respectively. After calculation, the average particle size is 33 nm, which is greater than the result obtained in Example 2 (29 nm). It shows that when the concentration of the aqueous dispersion of titanium dioxide is reduced, the average particle size of the obtained nano barium titanate powder becomes larger. In addition, since the concentration of the nanometer titanium dioxide aqueous dispersion is only 8%, the production efficiency of nanometer barium titanate powder is low.
对比例2Comparative example 2
对比例2的制备工艺与实施例2基本一致,区别仅在于,在配制混合体系时,将纳米二氧化钛水分散液缓慢注入到盛放有氢氧化钡水溶液的三口烧瓶中,边加边快速搅拌混匀,并保持加入过程中维持混合液的温度在90±2℃范围内。The preparation process of Comparative Example 2 is basically the same as that of Example 2. The only difference is that when preparing the mixed system, the nano-titanium dioxide aqueous dispersion is slowly injected into the three-necked flask containing the barium hydroxide aqueous solution, and the mixture is quickly stirred while adding. Evenly, and maintain the temperature of the mixed solution in the range of 90±2℃ during the addition.
该纳米钛酸钡粉体的具体物性测试结果参见表3,其SEM照片和XRD图谱分别如图15和图16所示。The specific physical property test results of the nano barium titanate powder are shown in Table 3, and the SEM photo and XRD pattern are shown in Figure 15 and Figure 16 respectively.
经计算可知平均粒径为37nm,明显高于实施例2(29nm)。说明当缓慢 注入二氧化钛水分散液时,纳米钛酸钡粉体的平均粒径变大。The calculation shows that the average particle size is 37nm, which is significantly higher than that of Example 2 (29nm). It shows that when the titanium dioxide aqueous dispersion is slowly injected, the average particle size of the nano-barium titanate powder becomes larger.
对比例3Comparative example 3
在氮气保护下,向三口烧瓶中加入710g氢氧化钡和700mL去离子水,于90℃下搅拌至溶解;然后在氢氧化钡不析出的情况下,将商业5~10nm二氧化钛粉96g加入三口烧瓶中,边加边快速搅拌混匀,得到均匀分散的混合体系,继续搅拌半小时,将混合体系转移至反应釜中,密封,于120℃左右下加热约16小时,冷却后取出反应釜,用去离子水和乙醇洗涤产物数次,80℃左右烘干数小时,得到纳米钛酸钡粉体。Under the protection of nitrogen, add 710g of barium hydroxide and 700mL of deionized water to the three-necked flask, stir at 90℃ until dissolved; then, under the condition of no precipitation of barium hydroxide, add 96g of commercial 5-10nm titanium dioxide powder into the three-necked flask In the process, stir and mix quickly while adding to obtain a uniformly dispersed mixed system. Continue stirring for half an hour. Transfer the mixed system to the reactor, seal it, heat it at about 120°C for about 16 hours, and take out the reactor after cooling. The product was washed with deionized water and ethanol several times, and dried at about 80°C for several hours to obtain nano-barium titanate powder.
该纳米钛酸钡粉体的具体物性测试结果参见表3,其SEM照片和XRD图谱分别如图17至图18所示。The specific physical property test results of the nano barium titanate powder are shown in Table 3, and the SEM pictures and XRD patterns are shown in Figure 17 to Figure 18 respectively.
对比对比例3与实施例2的测试结果,尤其是根据对比例3的SEM照片可明显看出,直接采用纳米二氧化钛作为原料(相当于使用了质量浓度为100%的纳米二氧化钛水分散液作为原料),即使该纳米二氧化钛粉体具有非常小的粒径(5~10nm),所获得的纳米钛酸钡的颗粒团聚现象十分严重,根本无法直接应用,尤其是因无法实现密堆积而不能用于作为陶瓷介电层的原料。Comparing the test results of Comparative Example 3 and Example 2, especially the SEM photos of Comparative Example 3, it is obvious that nano-titanium dioxide is directly used as the raw material (equivalent to using a 100% mass concentration of nano-titanium dioxide aqueous dispersion as the raw material ), even if the nanometer titanium dioxide powder has a very small particle size (5-10nm), the obtained nanometer barium titanate particle agglomeration is very serious and cannot be directly applied at all, especially because it cannot be used for close packing. As a raw material for ceramic dielectric layers.
表3对比例1~3水热合成钛酸钡粉体物性表Table 3 Physical properties of hydrothermally synthesized barium titanate powder in Comparative Examples 1~3
Figure PCTCN2019100604-appb-000003
Figure PCTCN2019100604-appb-000003
实施例13-18Examples 13-18
将实施例2与实施例3得到的纳米钛酸钡粉体按照不同比例进行混合、制片与焙烧,获得陶瓷介电层,具体方法为:The nano barium titanate powders obtained in Example 2 and Example 3 are mixed, tableted and fired in different proportions to obtain a ceramic dielectric layer. The specific method is:
按比例称取不同粒径的钛酸钡粉体,在行星式球磨机中以450转/分钟的速度球磨10小时,将得到的浆料在80℃下烘干。Weigh barium titanate powders of different particle sizes in proportion, ball mill them in a planetary ball mill at a speed of 450 revolutions per minute for 10 hours, and dry the obtained slurry at 80°C.
陶瓷片制作:将单一粉体及配方粉体分别与5%聚乙烯醇水溶液研磨混匀,采用压力机和模具在8MPa下压成直径12.7mm、厚度约1mm的圆片,然后将圆片加热至550℃,保温4小时排胶,继续升温至1150℃,保温2小时烧结成瓷,在陶瓷片表面镀金电极进行介电性能测试。Ceramic chip production: Grind and mix the single powder and formula powder with 5% polyvinyl alcohol aqueous solution separately, press and mold at 8MPa to form a disc with a diameter of 12.7mm and a thickness of about 1mm, and then heat the disc Heat up to 550°C for 4 hours to discharge the glue, continue to heat up to 1150°C, heat for 2 hours to sinter into porcelain, and test the dielectric properties with gold-plated electrodes on the ceramic sheet surface.
采用安捷伦LCR测量仪(4294A)对获得的陶瓷介电层进行密度和介电常数检测。不同配比例得到的陶瓷介电层的密度及介电性能见表4。An Agilent LCR measuring instrument (4294A) was used to detect the density and dielectric constant of the obtained ceramic dielectric layer. The density and dielectric properties of the ceramic dielectric layers obtained in different proportions are shown in Table 4.
表4不同复配比例得到的陶瓷介电层的密度及介电性能Table 4 Density and dielectric properties of ceramic dielectric layers obtained in different compound ratios
Figure PCTCN2019100604-appb-000004
Figure PCTCN2019100604-appb-000004
由表4的测试结果可知,以本发明实施例所获得的纳米钛酸钡粉体按照不同比例进行混合、制片与焙烧获得的陶瓷介电层,均具有非常高的密度和较小的孔隙度,并具有良好的介电性能。尤其是,将不同(平均)粒径的纳米钛酸钡粉体以适当的比例进行混合,能够使陶瓷介电层的密度更高、介电性能更佳。It can be seen from the test results in Table 4 that the nano-barium titanate powders obtained in the examples of the present invention are mixed, sliced and fired in different proportions to obtain the ceramic dielectric layers, all of which have very high density and small pores. Degree, and has good dielectric properties. In particular, mixing nano-barium titanate powders with different (average) particle sizes in an appropriate ratio can make the ceramic dielectric layer have a higher density and better dielectric properties.
图19是实施例13、15、16和18所得到的陶瓷介电层的XRD图谱。根据图19可明显看出,实施例13、15、16和18的陶瓷介电层均具有良好的晶体结构。对图19中2θ为45°左右处的峰进行放大,即图20,可以看出,两种粒径混合烧成的实施例15和16,具有比单独粒径烧成的实施例13与18更为明显的双峰结构,具有显著的四方相钛酸钡特征。这说明了不同粒径的钛酸钡颗粒按照适当比例混合、制片、煅烧,能够获得四方相更好的钛酸钡陶瓷介电层。19 is the XRD patterns of the ceramic dielectric layers obtained in Examples 13, 15, 16 and 18. It can be clearly seen from FIG. 19 that the ceramic dielectric layers of Examples 13, 15, 16 and 18 all have good crystal structures. Enlarge the peak at about 45° in 2θ in Fig. 19, that is, Fig. 20. It can be seen that the mixed and fired examples 15 and 16 of the two particle diameters have higher results than those of the examples 13 and 18 fired by the individual particle diameters. The more obvious bimodal structure, with the obvious characteristics of tetragonal phase barium titanate. This shows that barium titanate particles of different particle diameters are mixed, tableted, and calcined in an appropriate ratio to obtain a better tetragonal barium titanate ceramic dielectric layer.
最后应说明的是:以上各实施例仅用以说明本发明的技术方案,而非对 其限制;尽管参照前述各实施例对本发明进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分或者全部技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本发明各实施例技术方案的范围。Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand: It is still possible to modify the technical solutions described in the foregoing embodiments, or equivalently replace some or all of the technical features; these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the technical solutions of the embodiments of the present invention range.

Claims (10)

  1. 一种纳米钛酸钡粉体的制备方法,其特征在于,包括:A method for preparing nano barium titanate powder, which is characterized in that it comprises:
    将较低温度的纳米二氧化钛水分散液与较高温度的氢氧化钡水溶液快速混合,使所得混合体系的温度因二者的快速混合而较所述氢氧化钡水溶液的温度低至少2℃;其中,所述纳米二氧化钛水分散液的质量浓度不低于20%;The lower temperature nanometer titanium dioxide aqueous dispersion is quickly mixed with the higher temperature barium hydroxide aqueous solution, so that the temperature of the resulting mixed system is at least 2°C lower than the temperature of the barium hydroxide aqueous solution due to the rapid mixing of the two; , The mass concentration of the nanometer titanium dioxide aqueous dispersion is not less than 20%;
    将所述混合体系进行高压水热合成反应,所得反应产物再经洗涤和干燥,得到纳米钛酸钡粉体。The mixed system is subjected to a high-pressure hydrothermal synthesis reaction, and the resulting reaction product is washed and dried to obtain nano barium titanate powder.
  2. 根据权利要求1所述的制备方法,其特征在于,将较低温度的纳米二氧化钛水分散液加入到较高温度的氢氧化钡水溶液中并快速混合,得到所述混合体系。The preparation method according to claim 1, characterized in that the lower temperature nano titanium dioxide aqueous dispersion is added to the higher temperature barium hydroxide aqueous solution and mixed quickly to obtain the mixed system.
  3. 根据权利要求1或2所述的制备方法,其特征在于,所述纳米二氧化钛水分散液的温度不高于70℃;在快速混合之前,控制所述氢氧化钡水溶液的温度不低于90℃。The preparation method according to claim 1 or 2, wherein the temperature of the aqueous dispersion of nanometer titanium dioxide is not higher than 70°C; before the rapid mixing, the temperature of the aqueous solution of barium hydroxide is controlled not to be lower than 90°C .
  4. 根据权利要求1-3任一项所述的制备方法,其特征在于,在所述纳米二氧化钛水分散液中,纳米二氧化钛以体积计的中位粒径≤30nm。The preparation method according to any one of claims 1 to 3, characterized in that, in the aqueous nano-titanium dioxide dispersion, the volume-based median diameter of the nano-titanium dioxide is less than or equal to 30 nm.
  5. 根据权利要求1-3任一项所述的制备方法,其特征在于,在混合体系中,Ba离子与Ti原子之间的摩尔比为1~4:1。The preparation method according to any one of claims 1 to 3, characterized in that, in the mixed system, the molar ratio between Ba ions and Ti atoms is 1 to 4:1.
  6. 根据权利要求1或5所述的制备方法,其特征在于,所述氢氧化钡水溶液的质量浓度不低于20%。The preparation method according to claim 1 or 5, wherein the mass concentration of the aqueous barium hydroxide solution is not less than 20%.
  7. 根据权利要求1所述的制备方法,其特征在于,所述高压水热合成反应的温度为100~250℃,压力小于7MPa,时间不少于1小时。The preparation method according to claim 1, wherein the temperature of the high-pressure hydrothermal synthesis reaction is 100-250°C, the pressure is less than 7 MPa, and the time is not less than 1 hour.
  8. 一种纳米钛酸钡粉体,其特征在于,是采用权利要求1-7任一项所述制备方法制得。A nano barium titanate powder, characterized in that it is prepared by the preparation method of any one of claims 1-7.
  9. 一种陶瓷介电层的制造方法,其特征在于,包括如下步骤:A method for manufacturing a ceramic dielectric layer is characterized in that it comprises the following steps:
    按照权利要求1-7中任一项所述制备方法制得纳米钛酸钡粉体;Prepare nano barium titanate powder according to the preparation method of any one of claims 1-7;
    对纳米钛酸钡粉体进行制片和焙烧,得到陶瓷介电层。The nano barium titanate powder is prepared and fired to obtain a ceramic dielectric layer.
  10. 一种陶瓷介电层,其特征在于,所采用权利要求9所述的制造方法制得。A ceramic dielectric layer, characterized in that it is produced by the manufacturing method of claim 9.
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