WO2020213257A1 - Outil de coupe - Google Patents

Outil de coupe Download PDF

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Publication number
WO2020213257A1
WO2020213257A1 PCT/JP2020/008141 JP2020008141W WO2020213257A1 WO 2020213257 A1 WO2020213257 A1 WO 2020213257A1 JP 2020008141 W JP2020008141 W JP 2020008141W WO 2020213257 A1 WO2020213257 A1 WO 2020213257A1
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WO
WIPO (PCT)
Prior art keywords
base material
interface
layer
gas
cutting edge
Prior art date
Application number
PCT/JP2020/008141
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English (en)
Japanese (ja)
Inventor
保樹 城戸
アノンサック パサート
晋 奥野
今村　晋也
Original Assignee
住友電工ハードメタル株式会社
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Filing date
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Application filed by 住友電工ハードメタル株式会社 filed Critical 住友電工ハードメタル株式会社
Publication of WO2020213257A1 publication Critical patent/WO2020213257A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B51/00—Tools for drilling machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23C—MILLING
    • B23C5/00—Milling-cutters
    • B23C5/16—Milling-cutters characterised by physical features other than shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D77/00—Reaming tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23F—MAKING GEARS OR TOOTHED RACKS
    • B23F21/00—Tools specially adapted for use in machines for manufacturing gear teeth
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23G—THREAD CUTTING; WORKING OF SCREWS, BOLT HEADS, OR NUTS, IN CONJUNCTION THEREWITH
    • B23G5/00—Thread-cutting tools; Die-heads
    • B23G5/02—Thread-cutting tools; Die-heads without means for adjustment
    • B23G5/06—Taps
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides

Definitions

  • the cutting tool according to this disclosure is A cutting tool including a rake face, a flank surface, and a cutting edge portion connecting the rake face and the flank surface.
  • a base material and an AlTiN layer provided on the base material are provided.
  • the AlTiN layer contains cubic Al x Ti 1-x N crystal grains.
  • the atomic ratio x of Al in the above Al x Ti 1-x N is 0.7 or more and 0.95 or less.
  • the AlTiN layer includes a central portion and includes a central portion. The central portion has a virtual plane D parallel to the first interface passing through a point 1 ⁇ m away from the first interface on the side of the base material and a thickness direction from the second interface opposite to the side of the base material.
  • the first interface is parallel to the second interface and Electron backscatter using an electric field radiation scanning microscope with respect to the cross section when the AlTiN layer is cut on the plane including the normal of the second interface on the rake face and the normal of the second interface on the flank surface.
  • the central portion of the rake face is a crystal grain of Al x Ti 1-x N whose normal direction of the (111) plane is within ⁇ 15 ° with respect to the normal direction of the second interface on the rake face. Occupies 80% or more of the area
  • the central portion of the flank is a crystal grain of Al x Ti 1-x N whose normal direction of the (111) plane is within ⁇ 15 ° with respect to the normal direction of the second interface on the flank.
  • the area ratio occupied by the crystal grains of the Al x Ti 1-x N having the normal direction of the (111) plane within ⁇ 15 ° with respect to the normal direction of the cutting edge portion is 80% or more
  • the normal direction of the cutting edge portion is the virtual plane C including the boundary line between the rake face and the cutting edge portion of the base material and the boundary line between the flank surface and the cutting edge portion of the base material. Normal direction.
  • FIG. 1 is a perspective view illustrating one aspect of a cutting tool.
  • FIG. 2 is a cross-sectional view taken along the line XX of FIG.
  • FIG. 3 is a partially enlarged view of FIG.
  • FIG. 4 is a cross-sectional view illustrating another shape of the cutting edge portion.
  • FIG. 5 is a cross-sectional view further illustrating another shape of the cutting edge portion.
  • FIG. 6 is a schematic cross-sectional view illustrating one aspect of a cutting tool.
  • FIG. 7 is a schematic cross-sectional view illustrating another aspect of the cutting tool.
  • FIG. 8 is a schematic cross-sectional view further illustrating another aspect of the cutting tool.
  • FIG. 9 is a schematic view of a color map created based on the cross section of the AlTiN layer.
  • FIG. 10 is a schematic cross-sectional view of a CVD apparatus used for manufacturing a cutting tool according to the present embodiment.
  • FIG. 11 is a schematic cross-sectional view of a gas introduction pipe of a CVD apparatus used for manufacturing a cutting tool according to the present embodiment.
  • the present disclosure has been made in view of the above circumstances, and an object of the present disclosure is to provide a cutting tool having excellent crater wear resistance and flank wear resistance.
  • the cutting tool according to the present disclosure is A cutting tool including a rake face, a flank surface, and a cutting edge portion connecting the rake face and the flank surface.
  • a base material and an AlTiN layer provided on the base material are provided.
  • the AlTiN layer contains cubic Al x Ti 1-x N crystal grains.
  • the atomic ratio x of Al in the above Al x Ti 1-x N is 0.7 or more and 0.95 or less.
  • the AlTiN layer includes a central portion and includes a central portion. The central portion has a virtual plane D parallel to the first interface passing through a point 1 ⁇ m away from the first interface on the side of the base material and a thickness direction from the second interface opposite to the side of the base material.
  • the first interface is parallel to the second interface and Electron backscatter using an electric field radiation scanning microscope with respect to the cross section when the AlTiN layer is cut on the plane including the normal of the second interface on the rake face and the normal of the second interface on the flank surface.
  • the central portion of the rake face is a crystal grain of Al x Ti 1-x N whose normal direction of the (111) plane is within ⁇ 15 ° with respect to the normal direction of the second interface on the rake face. Occupies 80% or more of the area
  • the central portion of the flank is a crystal grain of Al x Ti 1-x N whose normal direction of the (111) plane is within ⁇ 15 ° with respect to the normal direction of the second interface on the flank.
  • the area ratio occupied by the crystal grains of the Al x Ti 1-x N having the normal direction of the (111) plane within ⁇ 15 ° with respect to the normal direction of the cutting edge portion is 80% or more
  • the normal direction of the cutting edge portion is the virtual plane C including the boundary line between the rake face and the cutting edge portion of the base material and the boundary line between the flank surface and the cutting edge portion of the base material. Normal direction.
  • the cutting tool has excellent crater wear resistance and flank wear resistance by having the above-mentioned configuration.
  • crater wear resistance means resistance to wear on the rake face.
  • “Fluffing surface wear resistance” means resistance to wear on the flank.
  • the thickness of the AlTiN layer is 2.5 ⁇ m or more and 20 ⁇ m or less.
  • the underlayer is at least one element selected from the group consisting of Group 4 elements, Group 5 elements, Group 6 elements and aluminum in the periodic table, and at least one selected from the group consisting of carbon, nitrogen, oxygen and boron. It consists of a compound consisting of elements.
  • the surface layer has at least one element selected from the group consisting of Group 4 elements, Group 5 elements, Group 6 elements and aluminum in the periodic table, and at least one selected from the group consisting of carbon, nitrogen, oxygen and boron. It consists of a compound consisting of elements.
  • the present embodiment is not limited to this.
  • the notation in the form of "X to Y” means the upper and lower limits of the range (that is, X or more and Y or less), and when the unit is not described in X and the unit is described only in Y, X The unit of and the unit of Y are the same.
  • the compound is represented by a chemical formula such as "TiN" in which the composition ratio of the constituent elements is not limited, the chemical formula is any conventionally known composition ratio (element ratio). Shall include.
  • the above chemical formula shall include not only the stoichiometric composition but also the non-stoichiometric composition.
  • the chemical formula of "TiN” includes not only the stoichiometric composition “Ti 1 N 1 " but also a non-stoichiometric composition such as “Ti 1 N 0.8 ". This also applies to the description of compounds other than "TiN”.
  • the cutting tool according to this disclosure is A cutting tool including a rake face, a flank surface, and a cutting edge portion connecting the rake face and the flank surface.
  • a base material and an AlTiN layer provided on the base material are provided.
  • the AlTiN layer contains cubic Al x Ti 1-x N crystal grains.
  • the atomic ratio x of Al in the above Al x Ti 1-x N is 0.7 or more and 0.95 or less.
  • the AlTiN layer includes a central portion and includes a central portion. The central portion has a virtual plane D parallel to the first interface passing through a point 1 ⁇ m away from the first interface on the side of the base material and a thickness direction from the second interface opposite to the side of the base material.
  • the first interface is parallel to the second interface and Electron backscatter using an electric field radiation scanning microscope with respect to the cross section when the AlTiN layer is cut on the plane including the normal of the second interface on the rake face and the normal of the second interface on the flank surface.
  • the central portion of the rake face is a crystal grain of Al x Ti 1-x N whose normal direction of the (111) plane is within ⁇ 15 ° with respect to the normal direction of the second interface on the rake face. Occupies 80% or more of the area
  • the central portion of the flank is a crystal grain of Al x Ti 1-x N whose normal direction of the (111) plane is within ⁇ 15 ° with respect to the normal direction of the second interface on the flank.
  • the area ratio occupied by the crystal grains of the Al x Ti 1-x N having the normal direction of the (111) plane within ⁇ 15 ° with respect to the normal direction of the cutting edge portion is 80% or more
  • the normal direction of the cutting edge portion is the virtual plane C including the boundary line between the rake face and the cutting edge portion of the base material and the boundary line between the flank surface and the cutting edge portion of the base material. Normal direction.
  • "parallel" is a concept that includes not only geometric parallelism but also substantially parallelism.
  • the surface-coated cutting tool 1 of the present embodiment includes a base material 10 and an AlTiN layer 11 provided on the base material 10 (hereinafter, may be simply referred to as a “cutting tool”) (for example, FIG. 6).
  • the cutting tool 1 may further include a base layer 12 provided between the base material 10 and the AlTiN layer 11 (FIG. 7).
  • the cutting tool 1 may further include a surface layer 13 provided on the AlTiN layer 11 (FIG. 8). Other layers such as the base layer 12 and the surface layer 13 will be described later.
  • each of the above-mentioned layers provided on the base material 10 may be collectively referred to as a "coating". That is, the cutting tool 1 includes a coating film 14 provided on the base material 10, and the coating film includes the AlTiN layer 11. Further, the coating film 14 may further include the base layer 12 or the surface layer 13.
  • the above-mentioned cutting tools include, for example, a drill, an end mill (for example, a ball end mill), a cutting edge exchangeable cutting tip for a drill, a cutting edge exchangeable cutting tip for an end mill, a cutting edge exchangeable cutting tip for milling, and a cutting edge exchangeable cutting tip for turning. , Metal saws, cutting tools, reamers, taps, etc.
  • the cutting tool includes a rake face, a flank, and a cutting edge portion connecting the rake face and the flank.
  • the "scooping surface” means a surface for scooping out chips scraped from a work material.
  • “Fleeing surface” means a surface whose part is in contact with the work material.
  • FIG. 1 is a perspective view illustrating one aspect of a cutting tool.
  • FIG. 2 is a cross-sectional view taken along the line XX of FIG.
  • a cutting tool having such a shape is used as a cutting edge exchangeable cutting tip such as a cutting edge exchangeable cutting tip for turning.
  • the cutting tool 1 shown in FIGS. 1 and 2 has a surface including an upper surface, a lower surface, and four side surfaces, and has a quadrangular prism shape that is slightly thin in the vertical direction as a whole. Further, the cutting tool 1 is formed with through holes penetrating the upper and lower surfaces, and at the boundary portions of the four side surfaces, the adjacent side surfaces are connected by an arc surface.
  • the upper surface and the lower surface form a rake face 1a
  • the four side surfaces (and the arc surface connecting them to each other) form a flank surface 1b
  • the arc surface connecting the rake face 1a and the flank surface 1b Form the cutting edge portion 1c (FIG. 2).
  • FIG. 3 is a partially enlarged view of FIG.
  • a virtual plane A, a virtual boundary line AA, a virtual plane B, and a virtual boundary line BB are shown.
  • the virtual plane A corresponds to an extension of the rake face 1a.
  • the boundary line AA is a boundary line between the rake face 1a and the cutting edge surface 1c.
  • the virtual plane B corresponds to an extension of the flank surface 1b.
  • the boundary line BB is a boundary line between the flank surface 1b and the cutting edge surface 1c.
  • the cutting edge portion 1c is an arc surface (honing), and the rake face 1a and the flank surface 1b are connected via the cutting edge portion 1c.
  • the virtual plane A and the virtual plane B are shown in a line shape, and the boundary line AA and the boundary line BB are shown in a dot shape.
  • the cutting edge portion 1c is an arc surface (honing)
  • the shape of the cutting edge portion 1c is not limited to this.
  • the cutting edge portion 1c may have a flat shape (negative land).
  • the cutting edge portion 1c may have a shape in which a flat surface and an arc surface are mixed (a shape in which a honing and a negative land are combined).
  • the rake face 1a and the flank surface 1b are connected via the cutting edge portion 1c, and the virtual plane A, the boundary line AA, the virtual plane B, And the boundary line BB is set.
  • the cutting edge portion 1c can be determined only from that shape. This is because the cutting edge portion 1c in this case is not included in either the virtual plane A or the virtual plane B, and can be visually distinguished from the rake face 1a and the flank surface 1b.
  • the cutting edge portion 1c is generally the surface of the base material 10 in the cutting tool 1 described later, and may be a surface formed by subjecting the ridges of the intersecting surfaces to a machining process. ..
  • the base material 10 is formed by machining at least a part of the surface of the base material precursor made of a sintered body or the like, and the cutting edge portion 1c is chamfered by the machining treatment. It may include a surface formed through.
  • the base material 10 in the cutting tool has a rake face 1a, a flank surface 1b, and a cutting edge portion 1c connecting the rake face 1a and the flank surface 1b.
  • the base material of the present embodiment any base material conventionally known as this type of base material can be used.
  • the base material is a cemented carbide (for example, a tungsten carbide (WC) -based cemented carbide, a cemented carbide containing Co in addition to WC, and a carbide such as Cr, Ti, Ta, Nb in addition to WC.
  • a cemented carbide for example, a tungsten carbide (WC) -based cemented carbide, a cemented carbide containing Co in addition to WC, and a carbide such as Cr, Ti, Ta, Nb in addition to WC.
  • Cemented carbide, etc. cermet (mainly composed of TiC, TiN, TiCN, etc.), high-speed steel, ceramics (titanium carbide, silicon carbide, silicon nitride, aluminum nitride, aluminum oxide, etc.), cubic crystal It is preferable to contain at least one selected from the group consisting of a type boron nitride sintered body (cBN sintered body) and a diamond sintered body.
  • cBN sintered body type boron nitride sintered body
  • diamond sintered body a type boron nitride sintered body
  • cemented carbide particularly WC-based cemented carbide
  • cermet particularly TiCN-based cermet
  • a cemented carbide When a cemented carbide is used as a base material, the effect of this embodiment is shown even if such a cemented carbide contains an abnormal phase called a free carbon or an ⁇ phase in the structure.
  • the base material used in the present embodiment may have a modified surface.
  • a de ⁇ layer may be formed on the surface thereof, or in the case of cermet, a surface hardened layer may be formed, and even if the surface is modified in this way, the present embodiment The effect of is shown.
  • the coating film according to the present embodiment includes an AlTiN layer provided on the base material.
  • the "coating” covers at least a part of the above-mentioned base material (for example, a rake surface in contact with chips during cutting, a flank surface in contact with a work material, etc.), thereby causing fracture resistance and abrasion resistance in a cutting tool. It has the effect of improving various properties such as (crater wear resistance, flank wear resistance, etc.) and peel resistance.
  • the coating is not limited to a part of the base material, but preferably covers the entire surface of the base material. However, even if a part of the base material is not coated with the coating film or the composition of the coating film is partially different, it does not deviate from the scope of the present embodiment.
  • the thickness of the coating film is preferably 2.5 ⁇ m or more and 30 ⁇ m or less, and more preferably 3 ⁇ m or more and 25 ⁇ m or less.
  • the thickness of the coating means the total thickness of each of the layers constituting the coating.
  • the "layer constituting the coating film” include an AlTiN layer, a base layer, and a surface layer, which will be described later.
  • the thickness of the coating film is, for example, measured at any 10 points in a cross-sectional sample parallel to the normal direction of the surface of the base material using a scanning transmission electron microscope (STEM), and the thickness of the 10 points measured. It can be calculated by taking the average value. The same applies to the case of measuring the thickness of each of the AlTiN layer, the base layer, the surface layer and the like, which will be described later.
  • the scanning transmission electron microscope include JEM-2100F (trade name) manufactured by JEOL Ltd.
  • AlTiN layer contains cubic Al x Ti 1-x N crystal grains (hereinafter, may be simply referred to as “crystal grains”). That is, the AlTiN layer is a layer containing polycrystalline Al x Ti 1-x N.
  • the "crystal grains of Al x Ti 1-x N” are composed of a layer made of AlN (aluminum nitride) (hereinafter, may be referred to as "AlN layer”) and TiN (titanium nitride). It means a crystal grain of a composite crystal in which layers (hereinafter, may be referred to as “TiN layer”) are alternately laminated.
  • the AlN layer includes a part in which Al is replaced with Ti.
  • the TiN layer includes a part of which Ti is replaced with Al.
  • both the AlN layer and the TiN layer have an FCC structure (Face-Centered Cubic structure).
  • both the AlN layer and the TiN layer have an HCP structure (Hexagonal Close-Packed structure).
  • the atomic ratio x of Al (aluminum) in the above Al x Ti 1-x N is 0.7 or more and 0.95 or less, and preferably 0.8 or more and 0.9 or less.
  • the above x uses a scanning electron microscope (SEM) or an energy dispersive X-ray analysis (EDX: Energy Dispersive X-ray spectroscopy) device attached to the TEM for the crystal grains in the AlTiN layer appearing in the above cross-sectional sample. It is possible to obtain it by analyzing it.
  • the atomic ratio x of Al obtained at this time is a value obtained as the average of all the crystal grains of Al x Ti 1-x N. Specifically, each of the 10 arbitrary points in the AlTiN layer of the cross-sectional sample is measured to obtain the value of the above x, and the average value of the obtained 10 points is defined as x in the Al x Ti 1-x N. To do.
  • the "arbitrary 10 points" are selected from crystal grains different from each other in the AlTiN layer.
  • Examples of the EDX device include JED-2300 (trade name) manufactured by JEOL Ltd. Not only Al, but also the atomic ratios of Ti and N can be calculated by the above method.
  • the AlTiN layer may be provided directly above the base material as long as the effect of the cutting tool according to the present embodiment is not impaired, or may be provided via another layer such as a base layer described later. It may be provided on the base material.
  • the state of being "provided on the base material” can be grasped as the state of being "arranged on the base material”. That is, it is understood that the AlTiN layer may be arranged directly above the base material, or may be arranged on the base material via another layer such as a base layer described later. You can also.
  • the AlTiN layer may be provided with another layer such as a surface layer on the AlTiN layer. Further, the AlTiN layer may be the outermost surface of the coating film.
  • the AlTiN layer has the following characteristics. That is, the AlTiN layer includes a central portion, and the central portion includes a virtual plane D parallel to the first interface passing through a point 1 ⁇ m away from the first interface on the base material side in the thickness direction, and the base. It is a region sandwiched between the virtual plane E parallel to the second interface, which passes through a point 1 ⁇ m away from the second interface opposite to the material side in the thickness direction. The first interface is parallel to the second interface. Electron backscatter using an electric field radiation scanning microscope with respect to the cross section when the AlTiN layer is cut on the plane including the normal of the second interface on the rake face and the normal of the second interface on the flank surface.
  • the central portion of the rake face is a crystal grain of Al x Ti 1-x N whose normal direction of the (111) plane is within ⁇ 15 ° with respect to the normal direction of the second interface on the rake face. (Hereinafter, also referred to as "(111) plane-oriented crystal grains”) occupies 80% or more.
  • the central portion of the flank is a crystal grain of Al x Ti 1-x N whose normal direction of the (111) plane is within ⁇ 15 ° with respect to the normal direction of the second interface on the flank.
  • the area ratio occupied by the crystal grains of the Al x Ti 1-x N having the normal direction of the (111) plane within ⁇ 15 ° with respect to the normal direction of the cutting edge portion is It is 80% or more.
  • the normal direction of the base material at the cutting edge is the boundary line between the rake surface and the cutting edge portion of the base material, and the boundary line between the flank surface and the cutting edge portion of the base material. Is the normal direction of the virtual plane C including.
  • the first interface 11a of the AlTiN layer 11 shown in FIG. 9 is an interface located on the side of the base material 10, and the second interface 11b is an interface located opposite to the side of the base material 10.
  • the first interface 11a is parallel to the second interface 11b.
  • the second interface 11b is the surface of the AlTiN layer 11.
  • the first interface 11a is a straight line L1 that passes through the point farthest from the base material on the base material side and is parallel to the main surface of the base material in the normal direction of the main surface of the base material in the color map.
  • the second interface 11b passes through the farthest point from the base material on the side opposite to the base material and parallel to the main surface of the base material in the normal direction of the main surface of the base material in the color map. It is a straight line passing through the center of the straight line M1 and the straight line M2 on the side opposite to the base material and passing through the point closest to the base material and parallel to the main surface of the base material.
  • the AlTiN layer is formed on the base material based on the manufacturing method described later. Then, the formed AlTiN layer is cut so as to obtain a cross section perpendicular to the AlTiN layer including the base material. That is, the AlTiN layer is cut so as to be exposed on a plane including the normal of the second interface on the rake face and the normal of the second interface on the flank. Then, the cut surface is polished with water-resistant abrasive paper (one containing a SiC abrasive grain abrasive as an abrasive).
  • water-resistant abrasive paper one containing a SiC abrasive grain abrasive as an abrasive.
  • the surface of the AlTiN layer 11 (or the surface of the coating film when another layer is formed on the AlTiN layer 11) is adhered and fixed on a sufficiently large holding flat plate using wax or the like. After that, it shall be cut in the direction perpendicular to the flat plate with a rotary blade cutting machine (cut so that the rotary blade and the flat plate are as perpendicular as possible).
  • This cutting can be performed at any portion of the AlTiN layer 11 as long as it is performed in such a vertical direction, but it is preferable to cut the vicinity of the cutting edge portion 1c as described later.
  • the above polishing shall be performed using the above water resistant abrasive paper (# 400, # 800, # 1500 shall be used in order).
  • the number (#) of the water-resistant abrasive paper means the difference in the particle size of the abrasive, and the larger the number, the smaller the particle size of the abrasive.
  • the polished surface is further smoothed by an ion milling treatment with Ar ions.
  • the conditions for the ion milling process are as follows. Acceleration voltage: 6kV
  • the above-mentioned smoothed cross section is subjected to a field emission scanning electron microscope (FE-SEM) (product name: "SU6600", Hitachi) equipped with an electron backscatter diffraction device (EBSD device). Observe using (manufactured by High Technologies America), and perform EBSD analysis on the obtained observation image.
  • FE-SEM field emission scanning electron microscope
  • EBSD device electron backscatter diffraction device
  • the high current mode is used in combination with the aperture diameter of 60 ⁇ m or 120 ⁇ m.
  • Data collection is performed in 0.1 ⁇ m / step steps for 100 ⁇ 500 points corresponding to a surface region (observation region) of 10 ⁇ m (thickness direction of the AlTiN layer) ⁇ 50 ⁇ m (direction parallel to the interface of the AlTiN layer) on the cross section. Do it at.
  • the number of measurement fields at this time is 3 or more.
  • the above EBSD analysis result is analyzed using commercially available software (trade name: "orientation Imaging microscopic Ver 6.2", manufactured by EDAX), and the above color map is created. Specifically, first, the crystal orientation of each crystal grain contained in the cross section of the AlTiN layer 11 is specified.
  • the crystal orientation of each crystal grain specified here is a crystal observed when each crystal grain appearing in the cross section of the AlTiN layer 11 is viewed in a plan view from the normal direction of the cross section (the direction penetrating the paper surface in FIG. 9). The orientation.
  • the crystal orientation of each crystal grain in the normal direction of the surface of the AlTiN layer 11 that is, the second interface 11b
  • a color map is created based on the specified crystal orientation.
  • the method of "Cristal Direction MAP" included in the above software can be used.
  • the color map is created over the entire area in the thickness direction of the AlTiN layer 11 observed on the cut surface.
  • crystal grains whose part is out of the measurement field of view are also counted as one.
  • each region surrounded by a solid line and having hatched diagonal lines is each (111) plane-oriented crystal grain 11d. Further, each region surrounded by a solid line and having no hatching is a crystal grain that does not correspond to the (111) plane-oriented crystal grain. That is, in FIG. 9, the crystal grains 11d whose normal direction of the (111) plane is within ⁇ 15 ° with respect to the normal direction of the second interface 11b of the AlTiN layer 11 are hatched with diagonal lines.
  • the color map is originally expressed in color, it is schematically expressed in monotone in the present specification for convenience. Further, although there is a region shown in black in FIG. 9, this is regarded as a region of crystal grains whose crystal orientation has not been specified in the above method.
  • the crystal orientation of the crystal grains of Al x Ti 1-x N is determined at the central portion 11c of the AlTiN layer 11 as shown in FIG.
  • the central portion 11c has a virtual plane D parallel to the first interface 11a passing through a point 1 ⁇ m away from the first interface 11a on the base material side and a second interface opposite to the base material side. It is a region sandwiched between the virtual plane E parallel to the second interface 11b passing through a point 1 ⁇ m away from 11b in the thickness direction.
  • the virtual plane D and the virtual plane E can be set on the created color map based on the distance from the first interface 11a or the second interface 11b.
  • the central portion 11c of the cutting edge portion 1c is set by the following method. First, the AlTiN layer is divided into a plurality of regions for each range in which the curves showing each of the first interface 11a and the second interface 11b in the color map can be approximated to a straight line. Next, the central portion 11c is set for each divided region according to the above method. The set of the central portion 11c for each of the divided regions set in this way is referred to as the central portion 11c of the cutting edge portion 1c.
  • the (111) plane-oriented crystal grains in the cutting edge portion 1c are the boundary line AA between the rake face and the cutting edge portion of the base material and the base material.
  • it means a crystal grain whose normal direction of the (111) plane is within ⁇ 15 ° with respect to the normal direction of the virtual plane C including the boundary line BB between the flank surface and the cutting edge portion.
  • the central portion of the rake face, said Al x Ti comprised within ⁇ 15 ° with respect to the normal direction of the second surface in the normal direction the rake face (111) plane 1-
  • the area ratio of the xN crystal grains is 80% or more, preferably 81% or more and 98% or less, and more preferably 81% or more and 95% or less.
  • the area ratio is an area ratio based on the entire area of the central portion 11c in the color map.
  • the normal direction of the (111) plane is within ⁇ 15 ° with respect to the normal direction of the second interface on the flank.
  • Al x Ti 1- The area ratio of the xN crystal grains is 80% or more, preferably 81% or more and 98% or less, and more preferably 81% or more and 95% or less.
  • the area ratio is an area ratio based on the entire area of the central portion 11c in the color map.
  • the central portion of the cutting edge portion is a crystal grain of Al x Ti 1-x N in which the normal direction of the (111) plane is within ⁇ 15 ° with respect to the normal direction of the cutting edge portion.
  • the area ratio occupied by is 80% or more, preferably 81% or more and 98% or less, and more preferably 81% or more and 95% or less.
  • the normal direction of the cutting edge portion 1c is the boundary line AA between the rake face 1a and the cutting edge portion 1c of the base material 10 and the boundary between the flank surface 1b and the cutting edge portion 1c of the base material 10. It is the normal direction of the virtual plane C including the line BB (FIGS. 3 to 5).
  • the area ratio is an area ratio based on the entire area of the central portion 11c in the color map.
  • the area ratio of the (111) plane-oriented crystal grains in the central portion of the AlTiN layer is 80% or more in all of the rake face, the flank surface, and the cutting edge portion.
  • the plane-oriented crystal grains have a close-packed structure and high hardness. Therefore, the cutting tool is excellent in crater wear resistance and flank wear resistance.
  • the above-mentioned cutting tool can be suitably used for high-speed machining of a particularly hard work material (for example, gray cast iron).
  • the AlTiN layer contains cubic Al x Ti 1-x N crystal grains.
  • the AlTiN layer may further contain hexagonal Al x Ti 1-x N crystal grains as long as the effects of the present disclosure are not impaired.
  • the cubic Al x Ti 1-x N crystal grains and the hexagonal Al x Ti 1-x N crystal grains are distinguished by, for example, a pattern of diffraction peaks obtained by X-ray diffraction.
  • the hexagonal Al Based on the total amount of the cubic Al x Ti 1-x N (c) crystal grains and the hexagonal Al x Ti 1-x N (h) crystal grains, the hexagonal Al
  • the content ratio (h / (c + h)) of the crystal grains of x Ti 1-x N is preferably 0 to 15% by volume, and more preferably 0 to 10% by volume.
  • the content ratio can be obtained, for example, by analyzing the pattern of the diffraction peak obtained by X-ray diffraction. The specific method is as follows.
  • An X-ray spectrum of the AlTiN layer in the above-mentioned cross-sectional sample is obtained by using an X-ray diffractometer (“MiniFlex 600” (trade name) manufactured by Rigaku).
  • the conditions of the X-ray diffractometer at this time are as follows, for example.
  • Characteristic X-ray Cu-K ⁇ (wavelength 1.54 ⁇ ) Tube voltage: 45kV Tube current: 40mA
  • Filter Multi-layer mirror
  • Optical system Concentrated method X-ray diffraction method: ⁇ -2 ⁇ method.
  • the peak intensity of Al x Ti 1-x N of the cubic (Ic) the peak intensity of Al x Ti 1-x N of hexagonal and (Ih).
  • the "peak intensity” means the height (cps) of the peak in the X-ray spectrum.
  • the peak intensity shall be the value excluding the background.
  • the content ratio of the hexagonal Al x Ti 1-x N based on the total amount of the cubic Al x Ti 1-x N and the hexagonal Al x Ti 1-x N ( Volume%) is calculated by the following formula.
  • Content ratio (volume%) of the hexagonal Al x Ti 1-x N Ih / (Ih + Ic) ⁇ 100
  • the thickness of the AlTiN layer is preferably 2.5 ⁇ m or more and 20 ⁇ m or less, more preferably 3 ⁇ m or more and 20 ⁇ m or less, and further preferably 5 ⁇ m or more and 15 ⁇ m or less. As a result, the above-mentioned excellent effects can be exhibited.
  • the thickness of the AlTiN layer is less than 2.5 ⁇ m, the degree of improvement in wear resistance (crater wear resistance, flank wear resistance) due to the presence of the AlTiN layer tends to be low.
  • the thickness of the AlTiN layer exceeds 20 ⁇ m, the interfacial stress due to the difference in the coefficient of linear expansion between the AlTiN layer and the other layers increases, and the Al x Ti 1-x N crystal grains may fall off from the AlTiN layer. is there.
  • the coating film further includes a base layer provided between the base material and the AlTiN layer, and the base layer is composed of Group 4 elements, Group 5 elements, Group 6 elements and aluminum (Al) of the periodic table. It is preferably composed of a compound consisting of at least one element selected from the group and at least one element selected from the group consisting of carbon, nitrogen, oxygen and boron.
  • Group 4 elements of the periodic table include titanium (Ti), zirconium (Zr), and hafnium (Hf).
  • Group 5 elements of the periodic table include vanadium (V), niobium (Nb), tantalum (Ta) and the like.
  • Examples of the Group 6 element of the periodic table include chromium (Cr), molybdenum (Mo), and tungsten (W).
  • the underlayer is preferably made of a compound represented by TiCN. Such a base layer exerts a strong adhesion to the AlTiN layer. As a result, the peeling resistance of the coating film is improved.
  • the thickness of the base layer is preferably 0.1 ⁇ m or more and 20 ⁇ m or less, and more preferably 1 ⁇ m or more and 15 ⁇ m or less. Such a thickness can be confirmed by observing the vertical cross section of the base material and the coating film using a scanning transmission electron microscope (STEM) or the like as described above.
  • STEM scanning transmission electron microscope
  • the coating further includes a surface layer provided on the AlTiN layer.
  • the surface layer is at least one element selected from the group consisting of Group 4 elements, Group 5 elements, Group 6 elements and aluminum (Al) of the periodic table, and at least selected from the group consisting of carbon, nitrogen, oxygen and boron. It is preferably composed of a compound composed of one element.
  • Examples of the compound contained in the surface layer include Al 2 O 3 and TiN.
  • the thickness of the surface layer is preferably 0.1 ⁇ m or more and 3 ⁇ m or less, and more preferably 0.3 ⁇ m or more and 2 ⁇ m or less. Such a thickness can be confirmed by observing the vertical cross section of the base material and the coating film using a scanning transmission electron microscope (STEM) or the like as described above.
  • STEM scanning transmission electron microscope
  • the coating film may further contain other layers as long as the effect of the cutting tool according to the present embodiment is not impaired.
  • the other layers may have a different composition from the AlTiN layer, the base layer, or the surface layer, or may be the same.
  • Examples of the compound contained in the other layer include TiN, TiCN, TiBN, Al 2 O 3 and the like.
  • the order of laminating the other layers is not particularly limited.
  • an intermediate layer provided between the base layer and the AlTiN layer can be mentioned.
  • the thickness of the other layers is not particularly limited as long as the effects of the present embodiment are not impaired, and examples thereof include 0.1 ⁇ m and more and 20 ⁇ m or less.
  • the method for manufacturing a cutting tool is The first step of preparing the base material (hereinafter, may be simply referred to as “first step”) and The second step of forming the AlTiN layer on the base material by using the chemical vapor deposition method (hereinafter, may be simply referred to as “second step”).
  • the third step of blasting the AlTiN layer (hereinafter, may be simply referred to as “third step”) is included.
  • the second step includes a first gas containing a halide gas of aluminum and a halide gas of titanium, a second gas containing a halide gas of aluminum, a halide gas of titanium and an ammonia gas, and an ammonium gas.
  • Each of the three gases includes spraying onto the substrate in an atmosphere of 650 ° C. or higher and 900 ° C. or lower and 0.5 kPa or higher and 30 kPa or lower.
  • the base material is prepared.
  • a cemented carbide base material is prepared as a base material.
  • the cemented carbide base material may be a commercially available product or may be produced by a general powder metallurgy method.
  • WC powder and Co powder or the like are mixed by a ball mill or the like to obtain a mixed powder.
  • the mixed powder is dried, it is molded into a predetermined shape (for example, SEET13T3AGSN-G) to obtain a molded product. Further, by sintering the molded product, a WC-Co-based cemented carbide (sintered product) is obtained.
  • a base material made of a WC-Co-based cemented carbide can be produced by subjecting the sintered body to a predetermined cutting edge processing such as honing treatment.
  • a predetermined cutting edge processing such as honing treatment.
  • any substrate other than the above can be prepared as long as it is a conventionally known substrate as this type of substrate.
  • ⁇ Second step A step of ejecting each of the first gas, the second gas, and the third gas onto the base material to form an AlTiN layer>
  • a first gas containing a halide gas of aluminum and a halide gas of titanium a first gas containing a halide gas of aluminum and a halide gas of titanium
  • a second gas containing a halide gas of aluminum, a halide gas of titanium and an ammonia gas a third gas containing ammonia gas are contained.
  • Each of the gases is ejected onto the substrate in an atmosphere of 650 ° C. or higher and 900 ° C. or lower and 0.5 kPa or higher and 30 kPa or lower.
  • This step can be performed using, for example, the CVD apparatus described below.
  • FIG. 10 shows a schematic cross-sectional view of an example of a CVD apparatus used for manufacturing the cutting tool of the present embodiment.
  • the CVD apparatus 50 includes a plurality of base material setting jigs 52 for installing the base material 10 and a reaction vessel 53 made of heat-resistant alloy steel containing the base material setting jig 52. ing. Further, a temperature control device 54 for controlling the temperature inside the reaction vessel 53 is provided around the reaction vessel 53.
  • the base material 10 is preferably installed on the protrusion provided on the base material setting jig 52. By installing in this way, a uniform film can be formed on each of the rake face, the flank surface, and the cutting edge portion.
  • a gas introduction pipe 58 having a first gas introduction pipe 55, a second gas introduction pipe 56, and a third gas introduction pipe 57 joined adjacent to each other vertically fills the space inside the reaction vessel 53. It extends in the direction and is rotatably provided about the vertical direction.
  • the first gas introduced into the first gas introduction pipe 55, the second gas introduced into the second gas introduction pipe 56, and the third gas introduced into the third gas introduction pipe 57 Is not mixed inside the gas introduction pipe 58 (FIG. 11).
  • each of the first gas introduction pipe 55, the second gas introduction pipe 56 and the third gas introduction pipe 57 has the first gas introduction pipe 55, the second gas introduction pipe 56 and the third gas introduction pipe 57, respectively.
  • a plurality of through holes for ejecting the gas flowing inside onto the base material 10 installed on the base material setting jig 52 are provided.
  • the through hole for ejecting the above-mentioned gas is sufficiently spaced from the base material 10.
  • reaction vessel 53 is provided with a gas exhaust pipe 59 for exhausting the gas inside the reaction vessel 53 to the outside, and the gas inside the reaction vessel 53 passes through the gas exhaust pipe 59. The gas is discharged from the gas exhaust port 60 to the outside of the reaction vessel 53.
  • the above-mentioned first gas, second gas and third gas are introduced into the first gas introduction pipe 55, the second gas introduction pipe 56 and the third gas introduction pipe 57, respectively.
  • the temperatures of the first gas, the second gas, and the third gas in each gas introduction pipe are not particularly limited as long as they are not liquefied.
  • the first gas and the second gas are placed in the reaction vessel 53 having an atmosphere of 650 ° C. or higher and 900 ° C. or lower (preferably 700 ° C. or higher and 770 ° C. or lower) and 0.5 kPa or higher and 30 kPa or lower (preferably 2 kPa or higher and 5 kPa or lower).
  • the third gas is repeatedly ejected in this order.
  • the gas introduction pipe 58 Since the gas introduction pipe 58 has a plurality of through holes, the introduced first gas, second gas, and third gas are ejected into the reaction vessel 53 from different through holes. At this time, the gas introduction pipe 58 rotates at a rotation speed of, for example, 2 to 4 rpm around the above-mentioned axis as shown by the rotation arrow in FIG. As a result, the first gas, the second gas, and the third gas can be repeatedly ejected to the base material 10 in this order.
  • the first gas includes a halide gas of aluminum and a halide gas of titanium.
  • the aluminum halide gas examples include aluminum chloride gas (AlCl 3 gas, Al 2 Cl 6 gas) and the like.
  • AlCl 3 gas is used.
  • the concentration (volume%) of the halide gas of aluminum is preferably 0.3% by volume or more and 1.5% by volume or less, and 0.8% by volume or more and 0.87 by volume, based on the total volume of the first gas. More preferably, it is by volume or less.
  • titanium halide gas examples include titanium (IV) chloride gas (TiCl 4 gas) and titanium (III) chloride gas (TiCl 3 gas). Titanium (IV) chloride gas is preferably used.
  • the concentration (volume%) of the halide gas of titanium is preferably 0.1% by volume or more and 1% by volume or less, preferably 0.1% by volume or more and 0.2% by volume, based on the total volume of the first gas. The following is more preferable.
  • the molar ratio of the halide gas of aluminum in the first gas is preferably 0.5 or more and 0.9 or less based on the total number of moles of the halide gas of aluminum and the halide gas of titanium. More preferably, it is 8 or more and 0.87 or less.
  • the first gas may contain hydrogen gas or may contain an inert gas such as argon gas.
  • concentration (volume%) of the inert gas is preferably 5% by volume or more and 70% by volume or less, and more preferably 20% by volume or more and 60% by volume or less, based on the total volume of the first gas.
  • Hydrogen gas usually occupies the balance of the first gas.
  • the flow rate of the first gas when ejected onto the base material is preferably 20 to 40 L / min.
  • the second gas includes a halide gas of aluminum, a halide gas of titanium, and an ammonia gas.
  • a halide gas of aluminum As the halogenated gas of aluminum and the halide gas of titanium, the gas exemplified in the above (first gas) column can be used.
  • the aluminum halide gas and the titanium halide gas used for the first gas, respectively, and the aluminum halide gas and the titanium halide gas used for the second gas are the same. It may be different or it may be different.
  • the concentration (volume%) of the halide gas of aluminum is preferably 4% by volume or more and 5% by volume or less based on the total volume of the second gas, and is 4.3% by volume or more and 4.5% by volume or less. More preferably.
  • the concentration (volume%) of the halide gas of titanium is preferably 0.1% by volume or more and 1% by volume or less, and 0.5% by volume or more and 0.8% by volume, based on the total volume of the second gas. The following is more preferable.
  • the molar ratio of the halide gas of aluminum in the second gas is preferably 0.82 or more and 0.95 or less, preferably 0.85 or less, based on the total number of moles of the halide gas of aluminum and the halide gas of titanium. More preferably, it is 0.9 or more and 0.9 or less.
  • the concentration (volume%) of ammonia gas is preferably 5% by volume or more and 15% by volume or less, and more preferably 10% by volume or more and 12% by volume or less, based on the total volume of the second gas.
  • the second gas may contain hydrogen gas or may contain an inert gas such as argon gas.
  • concentration (volume%) of the inert gas is preferably 5% by volume or more and 50% by volume or less, and more preferably 15% by volume or more and 17% by volume or less, based on the total volume of the second gas.
  • Hydrogen gas usually occupies the balance of the second gas.
  • the flow rate of the second gas when ejected onto the base material is preferably 20 to 40 L / min.
  • the third gas includes ammonia gas. Further, the third gas may contain hydrogen gas or may contain an inert gas such as argon gas.
  • the concentration (volume%) of ammonia gas is preferably 2% by volume or more and 30% by volume or less, and more preferably 2% by volume or more and 10% by volume or less, based on the total volume of the third gas.
  • Hydrogen gas usually occupies the balance of the third gas.
  • the flow rate of the third gas when ejected onto the base material is preferably 10 to 20 L / min.
  • ⁇ Third step Blasting process>
  • the coating film is blasted.
  • the blasting conditions include the following conditions. By carrying out the blast treatment, compressive residual stress can be applied to the coating film.
  • Conditions for blasting Media Zirconia particles, 500g Projection angle: 45 ° Projection distance: 50 mm Projection time: 3 seconds
  • additional steps may be appropriately performed as long as the effects of the present embodiment are not impaired.
  • additional step include a step of forming a base layer between the base material and the AlTiN layer, a step of forming a surface layer on the AlTiN layer, and the like.
  • the method of forming the base layer and the surface layer is not particularly limited, and examples thereof include a method of forming by a CVD method or the like.
  • the third step is performed after the surface layer is formed.
  • the AlTiN layer is formed by the CVD method. Therefore, the adhesion of the coating film to the substrate (film adhesion) is improved as compared with the case where the coating film is formed by the PVD method.
  • a surface-coated cutting tool including a rake face, a flank surface, and a cutting edge portion connecting the rake face and the flank surface.
  • a base material and an AlTiN layer provided on the base material are provided.
  • the AlTiN layer contains cubic Al x Ti 1-x N crystal grains.
  • the atomic ratio x of Al in the Al x Ti 1-x N is 0.7 or more and 0.95 or less.
  • the AlTiN layer includes a central portion and includes a central portion. The central portion has a virtual plane D parallel to the first interface passing through a point 1 ⁇ m away from the first interface on the side of the base material and a thickness direction from the second interface opposite to the side of the base material.
  • the first interface is parallel to the second interface and Electron backscatter using an electric field radiation scanning microscope with respect to the cross section when the AlTiN layer is cut on a plane including the normal of the second interface on the rake face and the normal of the second interface on the flank surface.
  • the central portion of the rake face is a crystal grain of Al x Ti 1-x N whose normal direction of the (111) plane is within ⁇ 15 ° with respect to the normal direction of the second interface on the rake face. Occupies 80% or more of the area
  • the central portion of the flank is a crystal grain of Al x Ti 1-x N whose normal direction of the (111) plane is within ⁇ 15 ° with respect to the normal direction of the second interface on the flank.
  • the normal direction of the cutting edge portion is the virtual plane C including the boundary line between the rake face and the cutting edge portion of the base material and the boundary line between the flank surface and the cutting edge portion of the base material.
  • a surface coating cutting tool that is in the normal direction. (Appendix 2) The surface coating cutting tool according to Appendix 1, wherein the AlTiN layer has a thickness of 2.5 ⁇ m or more and 20 ⁇ m or less.
  • (Appendix 3) Further including a base layer provided between the base material and the AlTiN layer, The underlayer is composed of at least one element selected from the group consisting of Group 4 elements, Group 5 elements, Group 6 elements and Al in the periodic table, and at least one selected from the group consisting of carbon, nitrogen, oxygen and boron.
  • (Appendix 4) Further including a surface layer provided on the AlTiN layer, The surface layer has at least one element selected from the group consisting of Group 4 elements, Group 5 elements, Group 6 elements and Al in the periodic table, and at least one selected from the group consisting of carbon, nitrogen, oxygen and boron.
  • base material a base material made of cemented carbide shown in Table 1 below (hereinafter, may be simply referred to as “base material”) was prepared (first step). Specifically, first, the raw material powder having the compounding composition (mass%) shown in Table 1 was uniformly mixed. “Remaining” in Table 1 indicates that WC occupies the balance of the compounding composition (mass%).
  • the mixed powder is pressure-molded into a predetermined shape and then sintered at 1300 to 1500 ° C. for 1 to 2 hours to obtain the above-mentioned base material (base material shape (JIS standard): SEET13T3AGSN-G, cutter diameter). 100) was obtained.
  • base material shape JIS standard
  • SEET13T3AGS N-G has the shape of a cutting tip with a replaceable cutting edge for milling.
  • a coating was formed on the surface of the base material by forming the base layer, the AlTiN layer and the surface layer shown in Table 8 on the surface of the base material.
  • the CVD method was mainly used to prepare the coating film.
  • a method for producing each layer constituting the coating film will be described.
  • AlTiN layer Under the film forming conditions shown in Table 2, the first gas, the second gas, and the third gas having the compositions shown in Tables 3 to 5, respectively, are repeatedly ejected in this order onto the surface of the base material.
  • AlTiN layer was prepared (second step).
  • the base material was installed on a protrusion provided on the base material setting jig.
  • the through hole for ejecting the above-mentioned gas and the above-mentioned base material were installed so as to have a sufficient distance (for example, 5 cm).
  • an AlTiN layer was prepared on the surface of the base layer.
  • the AlTiN layer represented by the identification symbol [1] in Table 6 is formed under the conditions of a temperature of 780 ° C., a pressure of 3 kPa, and a rotation speed of the gas introduction pipe of 2 rpm (identification symbol 2-a in Table 2), in Table 3.
  • first gas represented by identification symbol 3-a (0.83 vol% of AlCl 3, 0.17% by volume of TiCl 4, 60 vol% of Ar, balance H 2, gas flow rate 20L / min), Table 4 AlCl 3, 0.8 vol% of TiCl 4, 10 vol% of NH 3, 15% by volume of Ar, balance H 2, gas of the second gas (4.3 vol% represented by identification symbol 4-a
  • the flow rate of 40 L / min) and the third gas (2% by volume NH 3 , the rest is H 2 , and the gas flow rate of 10 L / min) indicated by the identification symbol 5-a in Table 5 are repeated in this order on the surface of the base material.
  • To prepare an AlTiN layer The AlTiN layer represented by the identification symbol [8] in Table 6 was prepared by a known PVD method. Table 6 shows the composition and the like of the prepared AlTiN layer.
  • the cutting tool according to this embodiment was produced by the above steps.
  • the cutting tools of sample numbers 1 and 4 to 10 include a base material, an AlTiN layer provided on the base material, and a base layer provided between the base material and the AlTiN layer. , A cutting tool.
  • the cutting tools of sample numbers 2 and 3 are on the base material, the AlTiN layer provided on the base material, the base layer provided between the base material and the AlTiN layer, and the AlTiN layer.
  • each characteristic of the cutting tool was evaluated as follows.
  • the cutting tools of sample numbers 1 to 7 correspond to the examples.
  • the cutting tools of sample numbers 8 to 10 correspond to comparative examples.
  • the thickness of the coating film and the underlying layer, AlTiN layer, and surface layer constituting the coating film is determined by using a scanning transmission electron microscope (STEM) (manufactured by JEOL Ltd., trade name: JEM-2100F). Arbitrary 10 points in the cross-sectional sample parallel to the normal direction of No. 1 were measured for each layer, and the average value of the thicknesses of the measured 10 points was taken. The results are shown in Table 8. The notation "none" in the "surface layer” column indicates that the surface layer is not present in the coating.
  • STEM scanning transmission electron microscope
  • the AlTiN layer has a structure represented by the identification symbol [1] in Table 6, and the thickness is 5.0 ⁇ m. Show that.
  • the notation such as "TiCN (1.0)” indicates that the corresponding layer is a TiCN layer having a thickness of 1.0 ⁇ m.
  • the cutting tool was cut so that a cross section perpendicular to the surface (or interface) of the AlTiN layer in the coating was obtained.
  • the cut surface was polished with water-resistant abrasive paper (manufactured by Noritake Coated Abrasive (NCA), trade name: WATERPROOF PAPER, # 400, # 800, # 1500) to prepare a processed surface of the AlTiN layer. did.
  • NCA Noritake Coated Abrasive
  • the processed surface was further smoothed by an ion milling treatment with Ar ions.
  • the conditions for the ion milling process are as follows.
  • the thickness of the machined surface is 10 ⁇ m (thickness of AlTiN layer).
  • the above-mentioned color map was prepared for the observation region of (direction) ⁇ 50 ⁇ m (direction parallel to the interface of the AlTiN layer).
  • the focused electron beam used in the analysis was set so that reflection occurred in the AlN layer in the crystal grains of Al x Ti 1-x N.
  • the number of created color maps was set to 3.
  • the crystal orientation of each crystal grain contained in the cross section of the AlTiN layer was specified.
  • the crystal orientation of each crystal grain specified here is the crystal orientation observed when each crystal grain appearing in the cross section of the AlTiN layer is viewed in a plan view from the normal direction of the cross section (the direction penetrating the paper surface in FIG. 9). Is. Then, based on the crystal orientation of each of the obtained crystal grains, the crystal orientation of each crystal grain in the normal direction of the second interface of the AlTiN layer was specified. Then, a color map was created based on the specified crystal orientation (for example, FIG. 9).
  • the area ratio occupied by the (111) plane-oriented crystal grains in the central portion of the AlTiN layer was determined using commercially available software (trade name: "Orientation Imaging Microscopic Ver 6.2", manufactured by EDAX). It was. The results are shown in Table 6.
  • the central portion includes a virtual plane D parallel to the first interface passing through a point 1 ⁇ m away from the first interface on the side of the base material and a second interface opposite to the side of the base material. It is a region sandwiched between the virtual plane E parallel to the second interface passing through a point 1 ⁇ m away from the thickness direction. (For example, FIG. 9).
  • the first interface and the second interface are defined as follows in the color map.
  • colors are displayed separately so that the region of the AlTiN layer and the region other than the AlTiN layer can be distinguished.
  • a straight line L1 passing through the point farthest from the base material on the base material side and parallel to the main surface of the base material and the group on the base material side.
  • the straight line passing through the point closest to the material and passing through the center with the straight line L2 parallel to the main surface of the base material was defined as the first interface 11a (for example, FIG. 9).
  • Table 6 shows the area ratio of (111) plane-oriented crystal grains on each of the rake face, the cutting edge portion, and the flank face.
  • the cutting edge portion with respect to the normal direction of the virtual plane C including the boundary line AA between the rake face and the cutting edge portion on the base material and the boundary line BB between the flank surface and the cutting edge portion on the base material.
  • Crystal grains having a normal direction of the (111) plane within ⁇ 15 ° were defined as (111) plane-oriented crystal grains.
  • the cutting tools of sample numbers 1 to 7 obtained good results with a cutting distance of 2.4 m or more in continuous machining.
  • the cutting tools of sample numbers 1 to 7 were normally worn (normal wear).
  • the cutting tools of sample numbers 8 to 10 had a cutting distance of 1.2 m or less in continuous machining.
  • the cutting tools of sample numbers 8 and 10 had abnormally large crater wear and flank wear (abnormal wear). In the cutting tools of sample numbers 9 and 10, a defect was confirmed at the cutting edge portion. From the above results, it was found that the cutting tool of the example was excellent in crater wear resistance and flank wear resistance.
  • 1 Cutting tool 1a rake plane, 1b flank surface, 1c cutting edge part, 10 base material, 11 AlTiN layer, 11a first interface, 11b second interface, 11c AlTiN layer central part, crystal grains with 11d (111) orientation , 12 base layer, 13 surface layer, 14 coating, 50 CVD device, 52 base material set jig, 53 reaction vessel, 54 temperature control device, 55 1st gas introduction tube, 56 2nd gas introduction tube, 57 3rd gas Introduction pipe, 58 gas introduction pipe, 59 gas exhaust pipe, 60 gas exhaust port, A virtual plane A, B virtual plane B, C virtual plane C, D virtual plane D, E virtual plane E, AA boundary line AA, BB boundary Line BB, L1 straight line L1, L2 straight line L2, M1 straight line M1, M2 straight line M2

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  • Cutting Tools, Boring Holders, And Turrets (AREA)

Abstract

La présente invention concerne un outil de coupe comprenant une face de coupe, une dépouille et un bord de coupe, l'outil de coupe comprenant un matériau de base et une couche d'AlTiN ; la couche d'AlTiN contient des grains cristallins cubiques d'AlxTi1-xN ; le rapport atomique x d'Al est compris dans la plage de 0,7-0,95 ; la couche d'AlTiN comprend une partie centrale ; l'orientation cristalline de chacun des grains cristallins d'AlxTi1-xN est identifiée par une analyse d'images de diffraction par rétrodiffusion d'électrons par rapport à la section transversale obtenue par la découpe de la couche d'AlTiN sur un plan comprenant la normale à la face de coupe et la normale à la dépouille ; et dans une palette de couleurs créée sur cette base, le rapport de surface occupé par les grains cristallins orientés dans le plan (111) dans la partie centrale de la face de coupe est supérieur ou égal à 80 %, le rapport de surface occupé par les des grains cristallins orientés dans le plan (111) dans la partie centrale de la dépouille est supérieur ou égal à 80 % et le rapport de surface occupé par les grains orientés dans le plan (111) dans la partie centrale du bord de coupe est de 80 % ou plus.
PCT/JP2020/008141 2019-04-17 2020-02-27 Outil de coupe WO2020213257A1 (fr)

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JP2019-078669 2019-04-17
JP2019078669 2019-04-17

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WO2020213257A1 true WO2020213257A1 (fr) 2020-10-22

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015163423A (ja) * 2014-01-31 2015-09-10 三菱マテリアル株式会社 高速断続切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP2016064485A (ja) * 2014-09-25 2016-04-28 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP2019005855A (ja) * 2017-06-26 2019-01-17 三菱マテリアル株式会社 硬質被覆層が優れた耐チッピング性を発揮する表面被覆切削工具

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015163423A (ja) * 2014-01-31 2015-09-10 三菱マテリアル株式会社 高速断続切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP2016064485A (ja) * 2014-09-25 2016-04-28 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP2019005855A (ja) * 2017-06-26 2019-01-17 三菱マテリアル株式会社 硬質被覆層が優れた耐チッピング性を発揮する表面被覆切削工具

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