WO2020204300A1 - Chemical liquid feeding apparatus for feeding chemical liquid used in inkjet printer for manufacturing display - Google Patents

Chemical liquid feeding apparatus for feeding chemical liquid used in inkjet printer for manufacturing display Download PDF

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Publication number
WO2020204300A1
WO2020204300A1 PCT/KR2019/016241 KR2019016241W WO2020204300A1 WO 2020204300 A1 WO2020204300 A1 WO 2020204300A1 KR 2019016241 W KR2019016241 W KR 2019016241W WO 2020204300 A1 WO2020204300 A1 WO 2020204300A1
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WO
WIPO (PCT)
Prior art keywords
chemical liquid
chemical
liquid container
supply chamber
chemical solution
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PCT/KR2019/016241
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French (fr)
Korean (ko)
Inventor
김광일
강동현
박경용
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캡시스템(주)
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Publication of WO2020204300A1 publication Critical patent/WO2020204300A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B41J2/17503—Ink cartridges
    • B41J2/17506—Refilling of the cartridge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing

Definitions

  • the present invention is a device for supplying a new chemical liquid to a chemical liquid container containing a chemical liquid used in an inkjet printer for manufacturing a display. More specifically, a chemical liquid in which oxygen concentration and humidity in the chemical liquid supply chamber are controlled by supplying an inert gas into the chemical liquid supply chamber. It relates to the supply device.
  • Inkjet printing technology sprays droplets of tens of picoliters (1 trillionths of a liter) or less onto the object to be printed at a frequency of several hundred times per second or more by electromagnetic force or pneumatics, just like spraying ink on paper It means the skill to do. This is attracting attention as a technology that replaces a photolithography process used in a semiconductor process or a display process.
  • FIG. 1 A comparison of the photolithography process and the inkjet printing process is shown in FIG. 1.
  • the photolithography process is a process of forming a pattern by applying an expensive material to a wafer, leaving a necessary part and removing an unnecessary part with a chemical substance, etc., and the process is complicated and expensive. It is required, and there is a problem that environmental pollution occurs.
  • the inkjet printing process has an advantage that the process is very simple as shown in FIG. 1, and there is little waste of materials, so that environmental pollution does not occur.
  • OLED organic light emitting diode
  • Fig. 2 an OLED emitting material (Red Emitter, Green Emitter, Blue Emitter) is sprayed directly onto the substrate using an inkjet head.
  • Red Emitter Green Emitter, Blue Emitter
  • OLED can be mass-produced by coating, it is more active in introducing inkjet printing processes.
  • the inkjet printing process is introduced, production efficiency increases, and mass production is possible without cutting a glass substrate, making it very suitable for producing large-area OLEDs.
  • the inkjet printer which is an equipment implementing such inkjet printing technology
  • a chemical solution containing an OLED light emitting material when the chemical solution is consumed, a new chemical solution must be supplemented or replaced.
  • the cap of the chemical solution container is opened.
  • the solvent may be volatilized, and the chemical solution may be denatured due to oxidation of the chemical solution or moisture in the atmosphere penetrates into the chemical solution.
  • particles in the air may penetrate into the chemical solution, or particles may be generated in the process of oxidation or moisture penetration of the chemical solution, which may cause defects in the OLED chip, and the nozzle of the inkjet head may be blocked by the particles.
  • the present invention was devised to solve this problem, and when supplying a chemical liquid to a chemical liquid container, an inert gas atmosphere is formed and then the lid of the chemical liquid container is opened to prevent volatilization, oxidation, and moisture penetration of the solvent, and automatically It is intended to provide a chemical solution supplying device capable of solving the problem that occurs when opening and closing the chemical liquid container stopper manually by opening and closing the stopper.
  • an embodiment of the chemical liquid supply device is a device for supplying a chemical liquid to a chemical liquid container containing a chemical liquid used in an inkjet printer for manufacturing a display. And a chemical solution supply chamber having an exhaust port through which the internal gas is exhausted; An inert gas supply means for supplying an inert gas to the inert gas inlet; A chemical liquid container cap opening/closing means installed inside the chemical liquid supply chamber and opening and closing the chemical liquid container cap; And a chemical solution supply means for supplying the chemical solution to the chemical solution container, and reduces the oxygen concentration in the chemical solution supply chamber to a predetermined concentration or less by the inert gas supplied into the chemical solution supply chamber.
  • the chemical solution supplying device further comprising an oxygen concentration measuring means installed inside the chemical liquid supplying chamber, when the oxygen concentration measured by the oxygen concentration measuring means is less than the preset concentration ,
  • the chemical liquid container lid can be opened by the chemical liquid container lid opening/closing means.
  • the humidity in the chemical liquid supply chamber may be reduced to a predetermined humidity or less by the inert gas supplied into the chemical liquid supply chamber.
  • the chemical liquid supply apparatus further comprising a humidity measuring means installed inside the chemical liquid supply chamber, and when the humidity measured by the humidity measuring means is less than the preset humidity, the chemical liquid The chemical liquid container cap can be opened by the container cap opening and closing means.
  • a particle measuring means installed inside the chemical liquid supply chamber may be further included.
  • the chemical liquid container cap opening and closing means may include a gripper formed to enclose the chemical liquid container cap.
  • the gripper may include a silicon pad.
  • the chemical solution container further comprises a means for conveying the chemical solution container installed inside the chemical solution supply chamber, wherein the chemical solution container includes the chemical solution container conveying means A chemical liquid container inlet and a chemical liquid container outlet are formed, and the chemical liquid supply chamber includes: an inlet gate for opening and closing the chemical liquid container entrance; And an outlet gate opening and closing the outlet of the chemical liquid container.
  • the chemical liquid container weight measuring means is installed in the chemical liquid supply chamber and measures the weight of the chemical liquid container.
  • the chemical liquid supply apparatus it is installed inside the chemical liquid supply chamber, and a vibration applying means for applying vibration to the chemical liquid container to prevent precipitation of the chemical liquid in the chemical liquid container may be further included.
  • the chemical liquid container lid is opened when the oxygen concentration and humidity are less than the preset oxygen concentration and the preset humidity, so that the solvent is prevented from volatilization or oxidation.
  • the penetration of moisture into the chemical is also prevented.
  • oxidation of the chemical solution or penetration of moisture is prevented, generation of particles is suppressed, thereby preventing a decrease in yield due to generation of particles and clogging of inkjet head nozzles.
  • the chemical liquid container is transported by the conveying means to reduce the risk of accidents due to worker transport, and since the chemical liquid container lid is automatically opened and closed, problems that occur when opening and closing the lid manually do not occur.
  • 1 is a diagram for explaining a comparison between a photolithography process and an inkjet printing process.
  • FIG. 2 is a view for explaining an inkjet printing process used to manufacture an organic light emitting diode.
  • FIG. 3 is a schematic view showing an embodiment of a chemical solution supply device according to the present invention.
  • FIG. 4 is a view for explaining a process of coupling the chemical liquid container stopper to the chemical liquid container by means of opening and closing means for the chemical liquid container lid provided in the chemical liquid supply device according to the present invention.
  • FIG. 5 is a view showing the open torque according to the material of the gripper of the chemical liquid container stopper opening and closing means provided in the chemical liquid supply device according to the present invention.
  • FIG. 3 is a schematic view showing an embodiment of a chemical solution supply device according to the present invention.
  • the chemical liquid supply device 300 is a device for supplying a chemical liquid to a chemical liquid container 310 containing a chemical liquid used in an inkjet printer for manufacturing a display, and includes a chemical liquid supply chamber 320, an inert gas.
  • the chemical solution supply chamber 320 has a receiving portion through which the chemical solution container 310 can be carried in and out, and a process of supplying the chemical solution to the chemical solution container 310 is performed inside the chemical solution supply chamber 320.
  • the chemical liquid supply chamber 320 is formed to be generally sealed.
  • the chemical liquid supply chamber 320 has an inert gas inlet 321 through which inert gas is introduced, and the inert gas inlet 321 is connected to the inert gas supply means 330 and is supplied from the inert gas supply means 330
  • the inert gas is introduced into the chemical solution supply chamber 320 through the inert gas inlet 321.
  • the inert gas may be nitrogen (N 2 ).
  • the chemical liquid is supplied to the chemical liquid container 310 carried into the chemical liquid supply chamber 320 in a nitrogen atmosphere.
  • an exhaust port 322 through which gas is exhausted is formed in the chemical solution supply chamber 320.
  • the inert gas inlet 321 is shown to be formed in the exhaust port 322 at the top, but the present invention is not limited thereto, and the inside of the chemical solution supply chamber 320 An inert gas inlet 321 and an exhaust port 322 are formed so that oxygen (O 2 ) and moisture can be exhausted to the outside of the chemical solution supply chamber 320.
  • the chemical liquid container 310 is supplied with a chemical liquid by a conveying means 370 extending from one outside side of the chemical liquid supply chamber 320 to the inside of the chemical liquid supply chamber 310 and the other external side of the chemical liquid supply chamber 320 It is carried into the chamber 320 and carried out.
  • a chemical liquid container inlet is formed on one side of the chemical liquid supply chamber 320
  • a chemical liquid container outlet is formed on the other side of the chemical liquid supply chamber 320.
  • the chemical solution supply chamber 320 includes an inlet gate 326 for opening and closing the inlet of the chemical solution container and an outlet gate 328 for opening and closing the outlet of the chemical solution container.
  • the entrance gate 326 and the exit gate 328 move up and down as shown in the arrow shown in FIG.
  • the chemical liquid container stopper opening and closing means 340 is installed inside the chemical liquid supply chamber 320 and opens and closes the chemical liquid container stopper 315 of the chemical liquid container 310 carried into the chemical liquid supply chamber 320.
  • the chemical liquid container stopper opening/closing means 340 includes a gripper 342 formed to enclose the chemical liquid container stopper 315.
  • the chemical liquid container cap opening/closing means 340 identifies and determines the position of the chemical liquid container cap 315 through a scanning unit (not shown).
  • the chemical liquid container stopper opening and closing means 340 is lowered as shown in the arrow shown in FIG. 3, and then the gripper Through 342, the chemical liquid container cap 315 is opened.
  • the chemical solution supply means 350 is installed inside the chemical solution supply chamber 320, and when the chemical solution container cap 315 is opened, the chemical solution supply means 350 moves downward as shown in the arrow shown in FIG. ) To supply the chemical solution.
  • the chemical solution supply device 300 uses an oxygen concentration measuring unit 360 and a humidity measuring unit 363 to measure the oxygen concentration and humidity inside the chemical solution supply chamber 320 before opening the chemical solution container cap 315.
  • the chemical solution container cap 315 is opened.
  • the oxygen concentration measuring means 360 may be an oxygen concentration sensor
  • the humidity measuring means 363 may be a humidity sensor.
  • the chemical liquid container cap 315 is opened while the oxygen concentration inside the chemical liquid supply chamber 320 is higher than the preset concentration, the chemical liquid may be oxidized, and the chemical liquid in a state where the humidity inside the chemical liquid supply chamber 320 is higher than the preset humidity.
  • the chemical solution supply device 300 supplies an inert gas into the chemical solution supply chamber 320 to reduce the oxygen concentration to a preset concentration or less, and to reduce the humidity to a preset humidity or less, and then the chemical solution container cap (315) is opened.
  • the particle measuring means 366 may be a particle sensor.
  • the chemical liquid container weight measuring means 380 is installed at a chemical liquid supply position inside the chemical liquid supply chamber 320, and when the chemical liquid container 310 is moved to the chemical liquid supply position, it measures the weight of the chemical liquid container 310, The amount of the chemical solution to be supplied to the chemical solution container 310 is determined on the basis.
  • the chemical liquid container stopper 315 is opened by the chemical liquid container stopper opening and closing means 340, the amount of the chemical liquid determined by the chemical liquid container weight measuring means 380 is supplied to the chemical liquid container 310 by the chemical liquid supply means 350 do.
  • the weight of the chemical liquid container 310 is measured by the chemical liquid container weight measuring means 380 to check whether the chemical liquid supply is complete.
  • the chemical container weight measuring means 380 may be a weight sensor.
  • the vibrating means 390 is installed at a chemical liquid supply position inside the chemical liquid supply chamber 320 and applies vibration to the chemical liquid container 310 so as to prevent the chemical liquid from being precipitated when the chemical liquid is supplied to the chemical liquid container 310.
  • the vibration means 390 may be a vibration plate.
  • the chemical liquid container stopper 315 is coupled to the chemical liquid container 310 using the chemical liquid container stopper opening and closing means 340, and the chemical liquid container 310 is transferred to the chemical liquid container conveying means ( It is carried out to the outside of the chemical solution supply chamber 320 through 370.
  • a process of coupling the chemical liquid container stopper 315 to the chemical liquid container 310 by using the chemical liquid container stopper opening and closing means 340 is shown in FIG. 4.
  • the chemical liquid container stopper opening and closing means 340 couples the chemical liquid container stopper 315 to the chemical liquid container 310 through position control and torque control. Looking in more detail, first, a position to which the chemical liquid container stopper 315 is coupled is determined by position control, and the position of the gripper 342 surrounding the chemical liquid container stopper 315 is moved and lowered. Then, the chemical liquid container stopper opening/closing means 340 is switched to torque control, and a certain torque is applied to the gripper 342, so that the chemical liquid container stopper 315 is tightened and coupled to the chemical liquid container 310.
  • FIG. 4 a process of coupling the chemical liquid container stopper 315 to the chemical liquid container 310 using the chemical liquid container stopper opening and closing means 340 is illustrated, but the chemical liquid container stopper 315 coupled to the chemical liquid container 310
  • the process of opening the chemical liquid container stopper 315 by separating the chemical liquid container can be similarly performed using position control and torque control of the chemical liquid container stopper opening and closing means 340.
  • the gripper 342 provided in the chemical liquid supply device 300 according to the present invention may be formed of a variety of materials, but it is preferably made of a material capable of opening and coupling the chemical liquid container stopper 315 using a smaller torque. Do.
  • the open torque according to the material of the gripper 342 is shown in FIG. 5.
  • the gripper 342 when the material of the gripper 342 is a silicon pad, it has an open torque of 3.5 Nm, compared to the case where the gripper 342 is formed of other materials (EPEM Rubber, Metal Jig). Since it has a small open torque, the gripper 342 is preferably made of a silicon pad material.
  • the chemical liquid container 310 is transported by the chemical liquid container conveying means 370 to reduce the risk of accidents due to worker transport, and since the chemical liquid container cap 315 is automatically opened and closed, problems that occur when opening and closing the cap manually Does not happen.

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  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
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Abstract

The present invention relates to an apparatus for feeding a new chemical liquid to a chemical liquid container for containing a chemical liquid used in an inkjet printer for manufacturing a display and, more specifically, to a chemical liquid feeding apparatus which feeds an inert gas into a chemical liquid feeding chamber so that the oxygen concentration and humidity in the chemical liquid feeding chamber are controlled. An embodiment of the chemical liquid feeding apparatus of the present invention is an apparatus for feeding a chemical liquid into a chemical liquid container for containing a chemical liquid used in an inkjet printer for manufacturing a display, the apparatus comprising: a chemical liquid feeding chamber having an inert gas inlet through which an inert gas is introduced, and an outlet through which an internal gas is discharged; an inert gas feeding means for feeding an inert gas to the inert gas inlet; a means for opening/closing a cap of the chemical liquid container which is provided in the chemical liquid feeding chamber and opens/closes the cap of the chemical liquid container; and a chemical liquid feeding means for feeding a chemical liquid into the chemical liquid container. Due to the inert gas fed into the chemical liquid feeding chamber, the oxygen concentration inside the chemical liquid feeding chamber is reduced to a preset concentration or less.

Description

디스플레이 제조용 잉크젯 프린터에 이용되는 약액을 공급하는 약액 공급 장치A chemical liquid supply device that supplies a chemical liquid used in an inkjet printer for manufacturing displays
본 발명은 디스플레이 제조용 잉크젯 프린터에 이용되는 약액이 담기는 약액 용기에 신규 약액을 공급하는 장치로, 보다 상세하게는 약액 공급 챔버 내에 불활성 기체를 공급하여 약액 공급 챔버 내의 산소 농도와 습도가 조절되는 약액 공급 장치에 관한 것이다.The present invention is a device for supplying a new chemical liquid to a chemical liquid container containing a chemical liquid used in an inkjet printer for manufacturing a display. More specifically, a chemical liquid in which oxygen concentration and humidity in the chemical liquid supply chamber are controlled by supplying an inert gas into the chemical liquid supply chamber. It relates to the supply device.
잉크젯 프린팅(inkjet printing) 기술은 종이에 잉크를 뿌려 인쇄하는 것처럼 수십 피코리터(1조분의 1리터) 이하의 액적(液滴)을 전자기력이나 공압에 의해 초당 수백 번 이상의 빈도로 인쇄할 대상에 분사하는 기술을 의미한다. 이는 반도체 공정이나 디스플레이 공정에 사용되는 포토리소그래피(photolithography) 공정을 대체하는 기술로 주목받고 있다.Inkjet printing technology sprays droplets of tens of picoliters (1 trillionths of a liter) or less onto the object to be printed at a frequency of several hundred times per second or more by electromagnetic force or pneumatics, just like spraying ink on paper It means the skill to do. This is attracting attention as a technology that replaces a photolithography process used in a semiconductor process or a display process.
포토리소그래피 공정과 잉크젯 프린팅 공정의 비교를 도 1에 나타내었다. 포토리소그래피 공정은 도 1에 도시한 바와 같이 고가의 재료를 웨이퍼에 도포한 후, 필요한 부분을 남기고 필요없는 부분을 화학물질 등으로 제거하여 패턴을 형성하는 공정으로, 공정이 복잡하고, 비용이 많이 소요되며, 환경 오염이 발생하는 문제점이 있다. 이에 반해, 잉크젯 프린팅 공정은 도 1에 도시된 바와 같이 공정이 매우 간단하며, 재료의 낭비가 적어 환경 오염이 발생하지 않는 장점이 있다.A comparison of the photolithography process and the inkjet printing process is shown in FIG. 1. As shown in FIG. 1, the photolithography process is a process of forming a pattern by applying an expensive material to a wafer, leaving a necessary part and removing an unnecessary part with a chemical substance, etc., and the process is complicated and expensive. It is required, and there is a problem that environmental pollution occurs. On the other hand, the inkjet printing process has an advantage that the process is very simple as shown in FIG. 1, and there is little waste of materials, so that environmental pollution does not occur.
최근 들어 디스플레이 분야에서 잉크젯 프린팅 공정 도입을 위해 많은 연구가 이루어지고 있는 추세이다. 특히 유기발광다이오드(Organic Light Emitting Diode, OLED) 분야의 경우, 도 2에 도시한 바와 같이 잉크젯 헤드(Inkjet Head)를 이용하여 OLED 발광 소재(Red Emitter, Green Emitter, Blue Emitter)를 직접 기판 위에 분사하여 코팅하는 방식으로 OLED를 양산할 수 있어, 잉크젯 프린팅 공정 도입에 보다 적극적이다. 이러한 잉크젯 프린팅 공정을 도입할 경우 생산 효율이 증가하게 되고, 유리 기판을 자르지 않더라도 양산이 가능하여 대면적 OLED를 생산하기에 매우 적합하다.In recent years, a lot of research is being conducted to introduce an inkjet printing process in the display field. In particular, in the case of the organic light emitting diode (OLED) field, as shown in Fig. 2, an OLED emitting material (Red Emitter, Green Emitter, Blue Emitter) is sprayed directly onto the substrate using an inkjet head. As OLED can be mass-produced by coating, it is more active in introducing inkjet printing processes. When the inkjet printing process is introduced, production efficiency increases, and mass production is possible without cutting a glass substrate, making it very suitable for producing large-area OLEDs.
이러한 잉크젯 프린팅 기술을 구현하는 장비인 잉크젯 프린터는 OLED 발광 소재가 포함된 약액을 이용하여 코팅하게 되므로, 약액이 소모되면 신규 약액을 보충하거나 교환해야 한다. 약액을 교환하거나 보충할 때 약액 용기의 마개를 오픈하게 되는데, 이때 용제가 휘발될 수 있으며, 약액이 산화되거나 대기 중의 수분이 약액으로 침투로 인해 약액의 변성이 발생될 수 있다. 또한, 대기 중의 파티클이 약액으로 침투하거나 약액의 산화나 수분 침투 과정에서 파티클이 발생하여 OLED 칩에 불량을 야기할 수 있으며, 파티클에 의해 잉크젯 헤드의 노즐이 폐색되는 현상이 발생하기도 한다.Since the inkjet printer, which is an equipment implementing such inkjet printing technology, is coated using a chemical solution containing an OLED light emitting material, when the chemical solution is consumed, a new chemical solution must be supplemented or replaced. When the chemical solution is exchanged or replenished, the cap of the chemical solution container is opened. At this time, the solvent may be volatilized, and the chemical solution may be denatured due to oxidation of the chemical solution or moisture in the atmosphere penetrates into the chemical solution. In addition, particles in the air may penetrate into the chemical solution, or particles may be generated in the process of oxidation or moisture penetration of the chemical solution, which may cause defects in the OLED chip, and the nozzle of the inkjet head may be blocked by the particles.
따라서 신규 약액을 공급할 때 약액의 변성을 방지할 수 있는 약액 공급 장치의 개발이 필요한 실정이다.Therefore, there is a need to develop a chemical solution supplying device capable of preventing the denaturation of the chemical solution when supplying a new chemical solution.
상술한 바와 같이, 약액 용기에 신규 약액을 공급할 때에 산화, 수분 침투, 파티클 침투로 인한 수율 감소, 공정 운영 비용 증가 등의 문제가 발생하고 있다. 또한, 종래에는 작업자가 20 L 중량의 약액 용기를 직접 이동하여 수작업으로 신규 약액을 공급함으로써, 20 L 중량의 약액 용기 이동 중 작업자가 사고를 당하거나, 약액이 누출되는 사고가 발생하기도 하며, 약액 용기를 수작업으로 조립할 때 작업자의 숙련도에 따라 품질 편차가 발생하는 문제점이 발생하기도 한다.As described above, when a new chemical solution is supplied to the chemical solution container, problems such as oxidation, moisture penetration, a decrease in yield due to particle penetration, and an increase in process operation cost occur. In addition, conventionally, by manually supplying new chemicals by manually moving a 20L container of chemicals, an accident occurs during the movement of the 20L container or leakage of chemicals. When assembling the container by hand, there is a problem that quality deviation occurs depending on the skill of the operator.
본 발명은 이러한 문제점을 해결하기 위하여 고안된 것으로, 약액 용기에 약액을 공급할 때 불활성 기체 분위기를 형성한 후 약액 용기 마개를 오픈함으로써 용제의 휘발, 산화, 대기 중 수분 침투를 방지하고, 자동으로 약액 용기 마개를 개폐함으로써 수작업으로써 약액 용기 마개를 개폐할 때 발생하는 문제점을 해결할 수 있는 약액 공급 장치를 제공하고자 한다.The present invention was devised to solve this problem, and when supplying a chemical liquid to a chemical liquid container, an inert gas atmosphere is formed and then the lid of the chemical liquid container is opened to prevent volatilization, oxidation, and moisture penetration of the solvent, and automatically It is intended to provide a chemical solution supplying device capable of solving the problem that occurs when opening and closing the chemical liquid container stopper manually by opening and closing the stopper.
다만, 본 실시예가 이루고자 하는 기술적 과제는 상기된 바와 같은 기술적 과제들로 한정되지 않으며, 또 다른 기술적 과제들이 존재할 수 있다.However, the technical problem to be achieved by the present embodiment is not limited to the technical problems as described above, and other technical problems may exist.
상기의 기술적 과제를 해결하기 위한, 본 발명에 따른 약액 공급 장치의 일 실시예는 디스플레이 제조용 잉크젯 프린터에 이용되는 약액이 담기는 약액 용기에 약액을 공급하는 장치로, 불활성 기체가 유입되는 불활성 기체 유입구와 내부 기체가 배기되는 배기구가 형성되어 있는 약액 공급 챔버; 상기 불활성 기체 유입구에 불활성 기체를 공급하는 불활성 기체 공급 수단; 상기 약액 공급 챔버 내부에 설치되며, 상기 약액 용기 마개를 개폐해는 약액 용기 마개 개폐 수단; 및 상기 약액 용기에 약액을 공급하는 약액 공급 수단;을 포함하며, 상기 약액 공급 챔버 내로 공급되는 불활성 기체에 의해 상기 약액 공급 챔버 내부의 산소 농도를 기설정된 농도 이하로 감소시킨다.In order to solve the above technical problem, an embodiment of the chemical liquid supply device according to the present invention is a device for supplying a chemical liquid to a chemical liquid container containing a chemical liquid used in an inkjet printer for manufacturing a display. And a chemical solution supply chamber having an exhaust port through which the internal gas is exhausted; An inert gas supply means for supplying an inert gas to the inert gas inlet; A chemical liquid container cap opening/closing means installed inside the chemical liquid supply chamber and opening and closing the chemical liquid container cap; And a chemical solution supply means for supplying the chemical solution to the chemical solution container, and reduces the oxygen concentration in the chemical solution supply chamber to a predetermined concentration or less by the inert gas supplied into the chemical solution supply chamber.
본 발명에 따른 약액 공급 장치의 일부 실시예들에 있어서, 상기 약액 공급 챔버 내부에 설치되는 산소 농도 측정 수단을 더 포함하고, 상기 산소 농도 측정 수단에 의해 측정된 산소 농도가 상기 기설정된 농도 이하일 때, 상기 약액 용기 마개 개폐 수단에 의해 상기 약액 용기 마개를 오픈할 수 있다.In some embodiments of the chemical solution supplying device according to the present invention, further comprising an oxygen concentration measuring means installed inside the chemical liquid supplying chamber, when the oxygen concentration measured by the oxygen concentration measuring means is less than the preset concentration , The chemical liquid container lid can be opened by the chemical liquid container lid opening/closing means.
본 발명에 따른 약액 공급 장치의 일부 실시예들에 있어서, 상기 약액 공급 챔버 내로 공급되는 불활성 기체에 의해 상기 약액 공급 챔버 내의 습도를 기설정된 습도 이하로 감소시킬 수 있다.In some embodiments of the chemical liquid supply apparatus according to the present invention, the humidity in the chemical liquid supply chamber may be reduced to a predetermined humidity or less by the inert gas supplied into the chemical liquid supply chamber.
본 발명에 따른 약액 공급 장치의 일부 실시예들에 있어서, 상기 약액 공급 챔버 내부에 설치되는 습도 측정 수단을 더 포함하고, 상기 습도 측정 수단에 의해 측정된 습도가 상기 기설정된 습도 이하일 때, 상기 약액 용기 마개 개폐 수단에 의해 상기 약액 용기 마개를 오픈할 수 있다.In some embodiments of the chemical liquid supply apparatus according to the present invention, further comprising a humidity measuring means installed inside the chemical liquid supply chamber, and when the humidity measured by the humidity measuring means is less than the preset humidity, the chemical liquid The chemical liquid container cap can be opened by the container cap opening and closing means.
본 발명에 따른 약액 공급 장치의 일부 실시예들에 있어서, 상기 약액 공급 챔버 내부에 설치되는 파티클 측정 수단을 더 포함할 수 있다.In some embodiments of the chemical liquid supply apparatus according to the present invention, a particle measuring means installed inside the chemical liquid supply chamber may be further included.
본 발명에 따른 약액 공급 장치의 일부 실시예들에 있어서, 상기 약액 용기 마개 개폐 수단은 상기 약액 용기 마개를 감싸쥐도록 형성된 그리퍼(gripper)를 포함할 수 있다.In some embodiments of the chemical liquid supply apparatus according to the present invention, the chemical liquid container cap opening and closing means may include a gripper formed to enclose the chemical liquid container cap.
본 발명에 따른 약액 공급 장치의 일부 실시예들에 있어서, 상기 그리퍼는 실리콘 패드를 포함하여 이루어질 수 있다.In some embodiments of the chemical liquid supply device according to the present invention, the gripper may include a silicon pad.
본 발명에 따른 약액 공급 장치의 일부 실시예들에 있어서, 상기 약액 공급 챔버 내부에 설치되는 상기 약액 용기 반송(搬送) 수단을 더 포함하며, 상기 약액 공급 챔버에는 상기 약액 용기가 상기 약액 용기 반송 수단을 통해 출입할 수 있는 약액 용기 입구와 약액 용기 출구가 형성되어 있고, 상기 약액 공급 챔버는, 상기 약액 용기 입구를 개폐하는 입구 게이트; 및 상기 약액 용기 출구를 개폐하는 출구 게이트;를 포함할 수 있다.In some embodiments of the chemical solution supplying apparatus according to the present invention, the chemical solution container further comprises a means for conveying the chemical solution container installed inside the chemical solution supply chamber, wherein the chemical solution container includes the chemical solution container conveying means A chemical liquid container inlet and a chemical liquid container outlet are formed, and the chemical liquid supply chamber includes: an inlet gate for opening and closing the chemical liquid container entrance; And an outlet gate opening and closing the outlet of the chemical liquid container.
본 발명에 따른 약액 공급 장치의 일부 실시예들에 있어서, 상기 약액 공급 챔버 내부에 설치되며, 상기 약액 용기의 중량을 측정하는 상기 약액 용기 중량 측정 수단을 더 포함할 수 있다.In some embodiments of the chemical liquid supply apparatus according to the present invention, the chemical liquid container weight measuring means is installed in the chemical liquid supply chamber and measures the weight of the chemical liquid container.
본 발명에 따른 약액 공급 장치의 일부 실시예들에 있어서, 상기 약액 공급 챔버 내부에 설치되며, 상기 약액 용기 내의 약액이 침전되는 것이 방지되도록 상기 약액 용기에 진동을 가하는 진동 인가 수단을 더 포함할 수 있다.In some embodiments of the chemical liquid supply apparatus according to the present invention, it is installed inside the chemical liquid supply chamber, and a vibration applying means for applying vibration to the chemical liquid container to prevent precipitation of the chemical liquid in the chemical liquid container may be further included. have.
본 발명에 따르면, 약액 용기를 불활성 분위기에 위치시킨 후 산소 농도와 습도가 기설정된 산소 농도와 기설정된 습도 이하일 때 약액 용기 마개를 오픈하게 되므로, 용제가 휘발되거나 산화되는 것이 방지되며, 대기중의 수분이 약액에 침투하는 것도 방지된다. 또한, 약액의 산화나 수분 침투가 방지되므로 파티클이 발생이 억제되어 파티클 발생에 따른 수율 저하, 잉크젯 헤드 노즐 폐색 등이 방지된다.According to the present invention, after placing the chemical liquid container in an inert atmosphere, the chemical liquid container lid is opened when the oxygen concentration and humidity are less than the preset oxygen concentration and the preset humidity, so that the solvent is prevented from volatilization or oxidation. The penetration of moisture into the chemical is also prevented. In addition, since oxidation of the chemical solution or penetration of moisture is prevented, generation of particles is suppressed, thereby preventing a decrease in yield due to generation of particles and clogging of inkjet head nozzles.
또한, 약액 용기는 반송 수단에 의해 이송되어 작업자 이송에 따른 사고 위험이 감소하며, 약액 용기 마개를 자동으로 개폐하므로 수작업으로 마개를 개폐할 때 발생하는 문제점이 발생하지 않는다.In addition, the chemical liquid container is transported by the conveying means to reduce the risk of accidents due to worker transport, and since the chemical liquid container lid is automatically opened and closed, problems that occur when opening and closing the lid manually do not occur.
도 1은 포토리소그래피 공정과 잉크젯 프린팅 공정을 비교 설명하기 위한 도면이다.1 is a diagram for explaining a comparison between a photolithography process and an inkjet printing process.
도 2는 유기발광다이오드 제조에 이용되는 잉크젯 프린팅 공정을 설명하기 위한 도면이다.2 is a view for explaining an inkjet printing process used to manufacture an organic light emitting diode.
도 3은 본 발명에 따른 약액 공급 장치의 일 실시예를 개략적으로 나타낸 도면이다.3 is a schematic view showing an embodiment of a chemical solution supply device according to the present invention.
도 4는 본 발명에 따른 약액 공급 장치에 구비되는 약액 용기 마개 개폐 수단으로 약액 용기 마개를 약액 용기에 결합하는 과정을 설명하기 위한 도면이다.4 is a view for explaining a process of coupling the chemical liquid container stopper to the chemical liquid container by means of opening and closing means for the chemical liquid container lid provided in the chemical liquid supply device according to the present invention.
도 5는 본 발명에 따른 약액 공급 장치에 구비되는 약액 용기 마개 개폐 수단의 그리퍼의 재질에 따른 오픈 토크를 나타낸 도면이다.5 is a view showing the open torque according to the material of the gripper of the chemical liquid container stopper opening and closing means provided in the chemical liquid supply device according to the present invention.
본 발명의 실시예들은 당해 기술 분야에서 통상의 지식을 가진 자에게 본 발명을 더욱 완전하게 설명하기 위하여 제공되는 것이며, 하기 실시예는 여러 가지 다른 형태로 변형될 수 있으며, 본 발명의 범위가 하기 실시예에 한정되는 것은 아니다. 오히려, 이들 실시예는 본 개시를 더욱 충실하고 완전하게 하고, 당업자에게 본 발명의 사상을 완전하게 전달하기 위하여 제공되는 것이다.The embodiments of the present invention are provided to more completely describe the present invention to those of ordinary skill in the art, and the following examples may be modified in various other forms, and the scope of the present invention is as follows. It is not limited to the examples. Rather, these embodiments are provided to make the present disclosure more faithful and complete, and to completely convey the spirit of the present invention to those skilled in the art.
도면들에 있어서, 예를 들면, 제조 기술 및/또는 공차(tolerance)에 따라, 도시된 형상의 변형들이 예상될 수 있다. 따라서, 본 발명의 실시예는 본 명세서에 도시된 영역의 특정 형상에 제한된 것으로 해석되어서는 아니되며, 예를 들면 제조상 초래되는 형상의 변화를 포함하여야 한다. 동일한 부호는 시종 동일한 요소를 의미한다. 나아가, 도면에서의 다양한 요소와 영역은 개략적으로 그려진 것이다. 따라서, 본 발명은 첨부한 도면에 그려진 상대적인 크기나 간격에 의해 제한되지 않는다.In the drawings, for example, depending on manufacturing techniques and/or tolerances, variations of the illustrated shape can be expected. Accordingly, the embodiments of the present invention should not be construed as being limited to the specific shape of the region shown in the present specification, but should include, for example, a change in shape caused by manufacturing. Identical symbols mean the same elements all the time. Furthermore, various elements and areas in the drawings are schematically drawn. Accordingly, the present invention is not limited by the relative size or spacing drawn in the accompanying drawings.
명세서 전체에서, 어떤 부분이 다른 부분과 "연결"되어 있다고 할 때, 이는 "직접적으로 연결"되어 있는 경우뿐 아니라, 그 중간에 다른 소자나 부재를 사이에 두고 "전기적으로 연결"되어 있는 경우도 포함한다. 또한, 어떤 부분이 어떤 구성요소를 "포함"한다고 할 때, 이는 특별히 반대되는 기재가 없는 한 다른 구성요소를 제외하는 것이 아니라 다른 구성요소를 더 포함할 수 있는 것을 의미하며, 하나 또는 그 이상의 다른 특징이나 숫자, 단계, 동작, 구성요소, 부분품 또는 이들을 조합한 것들의 존재 또는 부가 가능성을 미리 배제하지 않는 것으로 이해되어야 한다.Throughout the specification, when a part is said to be "connected" with another part, it is not only "directly connected", but also "electrically connected" with another element or member interposed therebetween. Include. In addition, when a part "includes" a certain component, it means that other components may be further included, and one or more other components are not excluded unless specifically stated to the contrary. It is to be understood that the presence or addition of features, numbers, steps, actions, elements, parts, or combinations thereof, does not preclude the possibility of preliminary exclusion.
이하, 첨부된 도면을 참조하여 본 발명의 실시예를 상세히 설명하기로 한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.
도 3은 본 발명에 따른 약액 공급 장치의 일 실시예를 개략적으로 나타낸 도면이다.3 is a schematic view showing an embodiment of a chemical solution supply device according to the present invention.
도 3을 참조하면, 본 발명에 따른 약액 공급 장치(300)는 디스플레이 제조용 잉크젯 프린터에 이용되는 약액이 담기는 약액 용기(310)에 약액을 공급하는 장치로, 약액 공급 챔버(320), 불활성 기체 공급 수단(330), 약액 용기 마개 개폐 수단(340), 약액 공급 수단(350), 산소 농도 측정 수단(360), 습도 측정 수단(363), 파티클 측정 수단(366), 약액 용기 반송 수단(370), 약액 용기 중량 측정 수단(380) 및 진동 수단(390)을 구비한다.Referring to FIG. 3, the chemical liquid supply device 300 according to the present invention is a device for supplying a chemical liquid to a chemical liquid container 310 containing a chemical liquid used in an inkjet printer for manufacturing a display, and includes a chemical liquid supply chamber 320, an inert gas. Supply means 330, chemical liquid container stopper opening and closing means 340, chemical liquid supply means 350, oxygen concentration measuring means 360, humidity measuring means 363, particle measuring means 366, chemical liquid container conveying means 370 ), a chemical container weight measuring means 380 and a vibration means 390.
약액 공급 챔버(320)는 약액 용기(310)가 반입, 반출될 수 있는 수용부를 가지며, 약액 공급 챔버(320) 내부에서 약액 용기(310)에 약액이 공급되는 과정이 수행된다. 약액 공급 챔버(320) 내부에 반입된 약액 용기(310)에 약액이 공급될 때, 약액 공급 챔버(320)는 대체적으로 밀폐된 형태가 되도록 형성된다. The chemical solution supply chamber 320 has a receiving portion through which the chemical solution container 310 can be carried in and out, and a process of supplying the chemical solution to the chemical solution container 310 is performed inside the chemical solution supply chamber 320. When the chemical liquid is supplied to the chemical liquid container 310 carried into the chemical liquid supply chamber 320, the chemical liquid supply chamber 320 is formed to be generally sealed.
약액 공급 챔버(320)에는 불활성 기체가 유입되는 불활성 기체 유입구(321)가 형성되어 있으며, 불활성 기체 유입구(321)는 불활성 기체 공급 수단(330)과 연결되어, 불활성 기체 공급 수단(330)에서 공급된 불활성 기체가 불활성 기체 유입구(321)를 통해 약액 공급 챔버(320) 내부로 유입된다. 이때 불활성 기체는 질소(N 2)일 수 있다. 이에 따라, 질소 분위기에서 약액 공급 챔버(320) 내부에 반입된 약액 용기(310)에 약액이 공급된다. 그리고 약액 공급 챔버(320)에는 내부의 기체가 배기되는 배기구(322)가 형성되어 있다. 도 3에서는 불활성 기체 유입구(321)는 상부에 배기구(322)에 형성된 것으로 도시되어 있으나, 이에 한정되지 않으며, 불활성 기체 유입구(321)를 통해 유입된 불활성 기체에 의해 약액 공급 챔버(320) 내부의 산소(O 2)와 수분이 약액 공급 챔버(320) 외부로 배기될 수 있도록, 불활성 기체 유입구(321)와 배기구(322)가 형성된다.The chemical liquid supply chamber 320 has an inert gas inlet 321 through which inert gas is introduced, and the inert gas inlet 321 is connected to the inert gas supply means 330 and is supplied from the inert gas supply means 330 The inert gas is introduced into the chemical solution supply chamber 320 through the inert gas inlet 321. At this time, the inert gas may be nitrogen (N 2 ). Accordingly, the chemical liquid is supplied to the chemical liquid container 310 carried into the chemical liquid supply chamber 320 in a nitrogen atmosphere. In addition, an exhaust port 322 through which gas is exhausted is formed in the chemical solution supply chamber 320. In FIG. 3, the inert gas inlet 321 is shown to be formed in the exhaust port 322 at the top, but the present invention is not limited thereto, and the inside of the chemical solution supply chamber 320 An inert gas inlet 321 and an exhaust port 322 are formed so that oxygen (O 2 ) and moisture can be exhausted to the outside of the chemical solution supply chamber 320.
약액 용기(310)는 약액 공급 챔버(320)의 외부 일측에서부터 약액 공급 챔버(310) 내부 및 약액 공급 챔버(320)의 외부 타측까지 연장 형성되어 있는 반송(搬送) 수단(370)에 의해 약액 공급 챔버(320) 내부로 반입되고 반출된다. 이를 위해, 약액 공급 챔버(320)의 일측면에는 약액 용기 입구가 형성되어 있고, 약액 공급 챔버(320)의 타측면에는 약액 용기 출구가 형성되어 있다. 그리고 약액 공급 챔버(320)는 약액 용기 입구를 개폐하는 입구 게이트(326)와 약액 용기 출구를 개폐하는 출구 게이트(328)를 구비한다. 입구 게이트(326)와 출구 게이트(328)는 도 3에 도시된 화살표와 같이 상하로 이동하여 각각 약액 용기 입구와 약액 용기 출구를 개방하고, 폐쇄한다. 약액 용기(310)가 약액 공급 챔버(320) 내부로 반입 또는 반출될 때에는 입구 게이트(326)와 출구 게이트(328)를 개방하며, 약액 용기(310)에 약액을 공급할 때에는 입구 게이트(326)와 출구 게이트(328)를 폐쇄하여 전체적으로 밀폐된 공간을 형성한다.The chemical liquid container 310 is supplied with a chemical liquid by a conveying means 370 extending from one outside side of the chemical liquid supply chamber 320 to the inside of the chemical liquid supply chamber 310 and the other external side of the chemical liquid supply chamber 320 It is carried into the chamber 320 and carried out. To this end, a chemical liquid container inlet is formed on one side of the chemical liquid supply chamber 320, and a chemical liquid container outlet is formed on the other side of the chemical liquid supply chamber 320. In addition, the chemical solution supply chamber 320 includes an inlet gate 326 for opening and closing the inlet of the chemical solution container and an outlet gate 328 for opening and closing the outlet of the chemical solution container. The entrance gate 326 and the exit gate 328 move up and down as shown in the arrow shown in FIG. 3 to open and close the chemical liquid container inlet and the chemical liquid container outlet, respectively. When the chemical liquid container 310 is brought into or out of the chemical liquid supply chamber 320, the inlet gate 326 and the outlet gate 328 are opened, and when the chemical liquid is supplied to the chemical liquid container 310, the inlet gate 326 and the The exit gate 328 is closed to form an entirely enclosed space.
약액 용기 마개 개폐 수단(340)은 약액 공급 챔버(320) 내부에 설치되며, 약액 공급 챔버(320) 내부로 반입된 약액 용기(310)의 약액 용기 마개(315)를 개폐한다. 약액 용기 마개(315)를 개폐하기 위해 약액 용기 마개 개폐 수단(340)은 약액 용기 마개(315)를 감싸쥐도록 형성된 그리퍼(gripper)(342)를 구비한다. 약액 공급 챔버(320) 내부로 약액 용기(310)가 반입되면, 약액 용기 마개 개폐 수단(340)은 스캔 유닛(미도시)을 통해 약액 용기 마개(315)의 위치를 파악하고 결정한다. 그리고 약액 용기 마개(315) 위치에 맞도록 그리퍼(342)를 약액 용기 마개(315) 상방으로 이동시킨 후, 도 3에 도시된 화살표와 같이 약액 용기 마개 개폐 수단(340)을 하강시킨 후, 그리퍼(342)를 통해 약액 용기 마개(315)를 오픈한다. The chemical liquid container stopper opening and closing means 340 is installed inside the chemical liquid supply chamber 320 and opens and closes the chemical liquid container stopper 315 of the chemical liquid container 310 carried into the chemical liquid supply chamber 320. In order to open and close the chemical liquid container stopper 315, the chemical liquid container stopper opening/closing means 340 includes a gripper 342 formed to enclose the chemical liquid container stopper 315. When the chemical liquid container 310 is carried into the chemical liquid supply chamber 320, the chemical liquid container cap opening/closing means 340 identifies and determines the position of the chemical liquid container cap 315 through a scanning unit (not shown). And after moving the gripper 342 upward to fit the position of the chemical liquid container stopper 315, the chemical liquid container stopper opening and closing means 340 is lowered as shown in the arrow shown in FIG. 3, and then the gripper Through 342, the chemical liquid container cap 315 is opened.
그리고 약액 공급 수단(350)을 이용하여 약액 용기(310) 내에 약액을 공급한다. 약액 공급 수단(350)은 약액 공급 챔버(320) 내부에 설치되며, 약액 용기 마개(315)가 오픈되면 도 3에 도시된 화살표와 같이 약액 공급 수단(350)이 하방으로 이동하여 약액 용기(310)에 약액을 공급한다.Then, the chemical liquid is supplied into the chemical liquid container 310 using the chemical liquid supply means 350. The chemical solution supply means 350 is installed inside the chemical solution supply chamber 320, and when the chemical solution container cap 315 is opened, the chemical solution supply means 350 moves downward as shown in the arrow shown in FIG. ) To supply the chemical solution.
본 발명에 따른 약액 공급 장치(300)는 약액 용기 마개(315)를 오픈하기 전에 약액 공급 챔버(320) 내부의 산소 농도 및 습도를 각각 산소 농도 측정 수단(360) 및 습도 측정 수단(363)을 이용하여 측정하여, 약액 공급 챔버(320) 내부의 산소 농도가 기설정된 농도 이하이고, 습도가 기설정된 습도 이하일 경우에 약액 용기 마개(315)를 오픈한다. 산소 농도 측정 수단(360)은 산소 농도 센서일 수 있으며, 습도 측정 수단(363)은 습도 센서일 수 있다. 약액 공급 챔버(320) 내부의 산소 농도가 기설정된 농도 이상인 상태에서 약액 용기 마개(315)를 오픈하면 약액이 산화될 수 있고, 약액 공급 챔버(320) 내부의 습도가 기설정된 습도 이상인 상태에서 약액 용기 마개(315)를 오픈하면 약액 내로 수분이 침투하여 약액이 변성될 수 있다. 따라서 본 발명에 따른 약액 공급 장치(300)는 약액 공급 챔버(320) 내부로 불활성 기체를 공급하여 산소 농도를 기설정된 농도 이하로 감소시키고, 습도를 기설정된 습도 이하로 감소시킨 뒤, 약액 용기 마개(315)를 오픈한다. The chemical solution supply device 300 according to the present invention uses an oxygen concentration measuring unit 360 and a humidity measuring unit 363 to measure the oxygen concentration and humidity inside the chemical solution supply chamber 320 before opening the chemical solution container cap 315. When the oxygen concentration in the chemical solution supply chamber 320 is less than or equal to the preset concentration and the humidity is less than or equal to the preset humidity, the chemical solution container cap 315 is opened. The oxygen concentration measuring means 360 may be an oxygen concentration sensor, and the humidity measuring means 363 may be a humidity sensor. When the chemical liquid container cap 315 is opened while the oxygen concentration inside the chemical liquid supply chamber 320 is higher than the preset concentration, the chemical liquid may be oxidized, and the chemical liquid in a state where the humidity inside the chemical liquid supply chamber 320 is higher than the preset humidity. When the container cap 315 is opened, moisture may penetrate into the chemical solution and the chemical solution may be denatured. Therefore, the chemical solution supply device 300 according to the present invention supplies an inert gas into the chemical solution supply chamber 320 to reduce the oxygen concentration to a preset concentration or less, and to reduce the humidity to a preset humidity or less, and then the chemical solution container cap (315) is opened.
아울러 약액 용기 마개(315) 오픈 과정이나 약액 공급 과정에서 파티클이 발생할 수 있으며, 발생된 파티클이 약액 내부로 침투하면 잉크젯 프린팅 공정에 악영향을 미치므로, 파티클 측정 수단(366)으로 약액 공급 챔버(320) 내부의 파티클을 측정하여, 이를 기초로 약액 용기(310) 내에 파티클이 침투하지 않도록 한다. 파티클 측정 수단(366)은 파티클 센서일 수 있다.In addition, particles may be generated in the process of opening the chemical container stopper 315 or in the process of supplying the chemical solution, and if the generated particles penetrate into the chemical solution, it adversely affects the inkjet printing process, so the chemical solution supply chamber 320 is used as the particle measuring means 366. ) By measuring the particles inside, the particles do not penetrate into the chemical liquid container 310 based on this. The particle measuring means 366 may be a particle sensor.
약액 용기 중량 측정 수단(380)은 약액 공급 챔버(320) 내부의 약액 공급 위치에 설치되어, 약액 용기(310)가 약액 공급 위치로 이동되었을 때, 약액 용기(310)의 중량을 측정하여, 이를 기초로 해당 약액 용기(310)에 공급하여야 할 약액의 양을 결정한다. 약액 용기 마개 개폐 수단(340)에 의해 약액 용기 마개(315)가 오픈되면, 약액 용기 중량 측정 수단(380)에 의해 결정된 양의 약액이 약액 공급 수단(350)에 의해 약액 용기(310)에 공급된다. 그리고 약액 용기(310)에 약액의 공급이 완료되면 약액 용기 중량 측정 수단(380)에 의해 해당 약액 용기(310)의 중량을 측정하여 약액 공급 완료 여부를 확인한다. 약액 용기 중량 측정 수단(380)은 중량 센서가 이용될 수 있다.The chemical liquid container weight measuring means 380 is installed at a chemical liquid supply position inside the chemical liquid supply chamber 320, and when the chemical liquid container 310 is moved to the chemical liquid supply position, it measures the weight of the chemical liquid container 310, The amount of the chemical solution to be supplied to the chemical solution container 310 is determined on the basis. When the chemical liquid container stopper 315 is opened by the chemical liquid container stopper opening and closing means 340, the amount of the chemical liquid determined by the chemical liquid container weight measuring means 380 is supplied to the chemical liquid container 310 by the chemical liquid supply means 350 do. And when the supply of the chemical liquid to the chemical liquid container 310 is completed, the weight of the chemical liquid container 310 is measured by the chemical liquid container weight measuring means 380 to check whether the chemical liquid supply is complete. The chemical container weight measuring means 380 may be a weight sensor.
진동 수단(390)은 약액 공급 챔버(320) 내부의 약액 공급 위치에 설치되어, 약액 용기(310)에 약액이 공급될 때 약액이 침전되는 것이 방지되도록 약액 용기(310)에 진동을 가한다. 진동 수단(390)은 진동판이 이용될 수 있다.The vibrating means 390 is installed at a chemical liquid supply position inside the chemical liquid supply chamber 320 and applies vibration to the chemical liquid container 310 so as to prevent the chemical liquid from being precipitated when the chemical liquid is supplied to the chemical liquid container 310. The vibration means 390 may be a vibration plate.
약액 용기(310)에 약액 공급이 완료되면, 약액 용기 마개 개폐 수단(340)을 이용하여 약액 용기 마개(315)를 약액 용기(310)에 결합하고, 약액 용기(310)를 약액 용기 반송 수단(370)을 통해 약액 공급 챔버(320) 외부로 반출한다. 약액 용기 마개 개폐 수단(340)을 이용하여 약액 용기 마개(315)를 약액 용기(310)에 결합하는 과정을 도 4에 나타내었다.When the supply of the chemical liquid to the chemical liquid container 310 is completed, the chemical liquid container stopper 315 is coupled to the chemical liquid container 310 using the chemical liquid container stopper opening and closing means 340, and the chemical liquid container 310 is transferred to the chemical liquid container conveying means ( It is carried out to the outside of the chemical solution supply chamber 320 through 370. A process of coupling the chemical liquid container stopper 315 to the chemical liquid container 310 by using the chemical liquid container stopper opening and closing means 340 is shown in FIG. 4.
도 4를 참조하면, 약액 용기 마개 개폐 수단(340)은 위치 제어와 토크 제어를 통해 약액 용기 마개(315)를 약액 용기(310)에 결합한다. 보다 상세히 살펴보면, 우선, 위치 제어로 약액 용기 마개(315)가 결합될 위치를 결정하여 약액 용기 마개(315)를 감싸쥐고 있는 그리퍼(342)의 위치를 이동시키고, 하강시킨다. 그리고 약액 용기 마개 개폐 수단(340)을 토크 제어로 전환하여, 그리퍼(342)에 일정 토크를 인가함으로써, 약액 용기 마개(315)를 조여 약액 용기(310)에 결합시킨다. 그리고 약액 용기 마개(315)를 조이는 동작이 완료되면, 그리퍼(342)와 약액 용기 마개(315)를 분리하고 다시 위치 제어로 전환하고 약액 용기 마개 개폐 수단(340)을 상승시켜, 약액 용기 마개(315)를 약액 용기(310)에 결합 과정을 완료한다.Referring to FIG. 4, the chemical liquid container stopper opening and closing means 340 couples the chemical liquid container stopper 315 to the chemical liquid container 310 through position control and torque control. Looking in more detail, first, a position to which the chemical liquid container stopper 315 is coupled is determined by position control, and the position of the gripper 342 surrounding the chemical liquid container stopper 315 is moved and lowered. Then, the chemical liquid container stopper opening/closing means 340 is switched to torque control, and a certain torque is applied to the gripper 342, so that the chemical liquid container stopper 315 is tightened and coupled to the chemical liquid container 310. And when the operation of tightening the chemical liquid container stopper 315 is completed, the gripper 342 and the chemical liquid container stopper 315 are separated and switched to position control again, and the chemical liquid container stopper opening and closing means 340 is raised, so that the chemical liquid container stopper ( The coupling process 315 to the chemical liquid container 310 is completed.
도 4에서는 약액 용기 마개 개폐 수단(340)을 이용하여 약액 용기(310)에 약액 용기 마개(315)를 결합시키는 과정에 대해 도시하였으나, 약액 용기(310)와 결합되어 있는 약액 용기 마개(315)를 분리시켜 약액 용기 마개(315)를 오픈시키는 과정도 유사하게 약액 용기 마개 개폐 수단(340)의 위치 제어와 토크 제어를 이용하여 수행할 수 있다.In FIG. 4, a process of coupling the chemical liquid container stopper 315 to the chemical liquid container 310 using the chemical liquid container stopper opening and closing means 340 is illustrated, but the chemical liquid container stopper 315 coupled to the chemical liquid container 310 The process of opening the chemical liquid container stopper 315 by separating the chemical liquid container can be similarly performed using position control and torque control of the chemical liquid container stopper opening and closing means 340.
본 발명에 따른 약액 공급 장치(300)에 구비되는 그리퍼(342)는 다양한 재질로 형성될 수 있으나, 보다 작은 토크를 이용하여 약액 용기 마개(315)를 오픈하고 결합할 수 있는 재질로 이루어지는 것이 바람직하다. 그러퍼(342)의 재질에 따른 오픈 토크(open torque)를 도 5에 나타내었다.The gripper 342 provided in the chemical liquid supply device 300 according to the present invention may be formed of a variety of materials, but it is preferably made of a material capable of opening and coupling the chemical liquid container stopper 315 using a smaller torque. Do. The open torque according to the material of the gripper 342 is shown in FIG. 5.
도 5에 도시된 바와 같이 그리퍼(342)의 재질이 실리콘 패드(Silicon Pad)일 경우 3.5 Nm의 오픈 토크를 가져, 다른 재질(EPEM Rubber, Metal Jig)로 그리퍼(342)가 형성되는 경우에 비해 작은 오픈 토크를 가지므로, 그리퍼(342)는 실리콘 패드로 재질로 이루어짐이 바람직하다.As shown in FIG. 5, when the material of the gripper 342 is a silicon pad, it has an open torque of 3.5 Nm, compared to the case where the gripper 342 is formed of other materials (EPEM Rubber, Metal Jig). Since it has a small open torque, the gripper 342 is preferably made of a silicon pad material.
상술한 바와 같이 본 발명에 따르면, 약액 공급 챔버(320) 내에 불활성 기체를 공급하여 산소 농도와 습도를 저하시킨 후, 약액 용기(310)에 약액을 공급하므로, 약액 내의 용제가 휘발되거나 약액이 산화되는 것이 방지되며, 대기중의 수분이 약액에 침투하는 것도 방지된다. 또한, 약액의 산화나 수분 침투가 방지되므로 파티클이 발생이 억제되어 파티클 발생에 따른 수율 저하, 잉크젯 헤드 노즐 폐색 등이 방지된다. 또한, 약액 용기(310)는 약액 용기 반송 수단(370)에 의해 이송되어 작업자 이송에 따른 사고 위험이 감소하며, 약액 용기 마개(315)를 자동으로 개폐하므로 수작업으로 마개를 개폐할 때 발생하는 문제점이 발생하지 않는다.As described above, according to the present invention, since an inert gas is supplied into the chemical liquid supply chamber 320 to reduce the oxygen concentration and humidity, and then the chemical liquid is supplied to the chemical liquid container 310, the solvent in the chemical liquid is volatilized or the chemical liquid is oxidized. This is prevented, and moisture in the atmosphere is also prevented from penetrating the chemical solution. In addition, since oxidation of the chemical solution or penetration of moisture is prevented, generation of particles is suppressed, thereby preventing a decrease in yield due to generation of particles and clogging of inkjet head nozzles. In addition, the chemical liquid container 310 is transported by the chemical liquid container conveying means 370 to reduce the risk of accidents due to worker transport, and since the chemical liquid container cap 315 is automatically opened and closed, problems that occur when opening and closing the cap manually Does not happen.
이상에서 본 발명의 실시예에 대해 도시하고 설명하였으나, 본 발명은 상술한 특정의 실시예에 한정되지 아니하며, 청구범위에서 청구하는 본 발명의 요지를 벗어남이 없이 당해 발명이 속하는 기술분야에서 통상의 지식을 가진 자라면 누구든지 다양한 변형 실시가 가능한 것은 물론이고, 그와 같은 변경은 청구범위 기재의 범위 내에 있게 된다.Although the embodiments of the present invention have been illustrated and described above, the present invention is not limited to the specific embodiments described above, and is not departing from the gist of the present invention claimed in the claims. Anyone with knowledge can implement various modifications, as well as such modifications will be within the scope of the claims.
또한, 본 발명의 범위는 상기 발명의 설명보다는 후술하는 청구범위에 의하여 나타내어지며, 청구범위의 의미 및 범위 그리고 그 균등 개념으로부터 도출되는 모든 변경 또는 변형된 형태가 본 발명의 범위에 포함되는 것으로 해석되어야 한다.In addition, the scope of the present invention is indicated by the claims to be described later rather than the description of the present invention, and all changes or modified forms derived from the meaning and scope of the claims and the concept of equivalents thereof are interpreted as being included in the scope of the present invention. Should be.
[부호의 설명][Explanation of code]
300: 약액 공급 장치300: chemical liquid supply device
310: 약액 용기310: chemical liquid container
315: 약액 용기 마개315: chemical liquid container stopper
320: 약액 공급 챔버320: chemical liquid supply chamber
330: 불활성 기체 공급 수단330: inert gas supply means
340: 약액 용기 마개 개폐 수단340: chemical liquid container cap opening and closing means
350: 약액 공급 수단350: chemical liquid supply means
360: 산소 농도 측정 수단360: oxygen concentration measuring means
363: 습도 측정 수단363: humidity measuring means
366: 파티클 측정 수단366: particle measuring means
370: 약액 용기 반송 수단370: chemical liquid container conveying means
380: 약액 용기 중량 측정 수단380: chemical liquid container weight measuring means
390: 진동 수단390: vibration means

Claims (10)

  1. 디스플레이 제조용 잉크젯 프린터에 이용되는 약액이 담기는 약액 용기에 약액을 공급하는 장치로,A device that supplies a chemical solution to a chemical solution container containing a chemical solution used in an inkjet printer for manufacturing displays,
    불활성 기체가 유입되는 불활성 기체 유입구와 내부 기체가 배기되는 배기구가 형성되어 있는 약액 공급 챔버;A chemical solution supply chamber having an inert gas inlet through which the inert gas is introduced and an exhaust port through which the internal gas is exhausted;
    상기 불활성 기체 유입구에 불활성 기체를 공급하는 불활성 기체 공급 수단;An inert gas supply means for supplying an inert gas to the inert gas inlet;
    상기 약액 공급 챔버 내부에 설치되며, 상기 약액 용기 마개를 개폐해는 약액 용기 마개 개폐 수단; 및A chemical liquid container cap opening and closing means installed inside the chemical liquid supply chamber and opening and closing the chemical liquid container cap; And
    상기 약액 용기에 약액을 공급하는 약액 공급 수단;을 포함하며,Includes; a chemical solution supply means for supplying the chemical solution to the chemical solution container,
    상기 약액 공급 챔버 내로 공급되는 불활성 기체에 의해 상기 약액 공급 챔버 내부의 산소 농도를 기설정된 농도 이하로 감소시키는 것을 특징으로 하는 약액 공급 장치.A chemical liquid supply device, characterized in that the oxygen concentration in the chemical liquid supply chamber is reduced to a preset concentration or less by an inert gas supplied into the chemical liquid supply chamber.
  2. 제1항에 있어서,The method of claim 1,
    상기 약액 공급 챔버 내부에 설치되는 산소 농도 측정 수단을 더 포함하고,Further comprising an oxygen concentration measuring means installed inside the chemical solution supply chamber,
    상기 산소 농도 측정 수단에 의해 측정된 산소 농도가 상기 기설정된 농도 이하일 때, 상기 약액 용기 마개 개폐 수단에 의해 상기 약액 용기 마개를 오픈하는 것을 특징으로 하는 약액 공급 장치.When the oxygen concentration measured by the oxygen concentration measuring means is less than or equal to the preset concentration, the chemical liquid container lid is opened by the chemical liquid container lid open/close means.
  3. 제2항에 있어서,The method of claim 2,
    상기 약액 공급 챔버 내로 공급되는 불활성 기체에 의해 상기 약액 공급 챔버 내의 습도를 기설정된 습도 이하로 감소시키는 것을 특징으로 하는 약액 공급 장치.A chemical liquid supply device, characterized in that the humidity in the chemical liquid supply chamber is reduced to a predetermined humidity or less by an inert gas supplied into the chemical liquid supply chamber.
  4. 제3항에 있어서,The method of claim 3,
    상기 약액 공급 챔버 내부에 설치되는 습도 측정 수단을 더 포함하고,Further comprising a humidity measuring means installed inside the chemical solution supply chamber,
    상기 습도 측정 수단에 의해 측정된 습도가 상기 기설정된 습도 이하일 때, 상기 약액 용기 마개 개폐 수단에 의해 상기 약액 용기 마개를 오픈하는 것을 특징으로 하는 약액 공급 장치.When the humidity measured by the humidity measuring means is less than or equal to the preset humidity, the chemical liquid container lid is opened by the chemical liquid container lid open/close means.
  5. 제1항 내지 제4항 중 어느 한 항에 있어서,The method according to any one of claims 1 to 4,
    상기 약액 공급 챔버 내부에 설치되는 파티클 측정 수단을 더 포함하는 것을 특징으로 하는 약액 공급 장치.A chemical liquid supplying device, characterized in that it further comprises a particle measuring means installed inside the chemical liquid supply chamber.
  6. 제1항 내지 제4항 중 어느 한 항에 있어서,The method according to any one of claims 1 to 4,
    상기 약액 용기 마개 개폐 수단은 상기 약액 용기 마개를 감싸쥐도록 형성된 그리퍼(gripper)를 포함하는 것을 특징으로 하는 약액 공급 장치.The chemical solution container cap opening/closing means comprises a gripper formed to enclose the chemical solution container cap.
  7. 제6항에 있어서,The method of claim 6,
    상기 그리퍼는 실리콘 패드를 포함하여 이루어진 것을 특징으로 하는 약액 공급 장치.The chemical liquid supply device, characterized in that the gripper comprises a silicon pad.
  8. 제1항 내지 제4항 중 어느 한 항에 있어서,The method according to any one of claims 1 to 4,
    상기 약액 공급 챔버 내부에 설치되는 상기 약액 용기 반송(搬送) 수단을 더 포함하며,Further comprising a means for conveying the chemical liquid container installed inside the chemical liquid supply chamber,
    상기 약액 공급 챔버에는 상기 약액 용기가 상기 약액 용기 반송 수단을 통해 출입할 수 있는 약액 용기 입구와 약액 용기 출구가 형성되어 있고,The chemical liquid supply chamber is provided with a chemical liquid container inlet and a chemical liquid container outlet through which the chemical liquid container can enter and exit through the chemical liquid container conveying means,
    상기 약액 공급 챔버는,The chemical solution supply chamber,
    상기 약액 용기 입구를 개폐하는 입구 게이트; 및An inlet gate for opening and closing an inlet of the chemical liquid container; And
    상기 약액 용기 출구를 개폐하는 출구 게이트;를 포함하는 것을 특징으로 하는 약액 공급 장치.And an outlet gate for opening and closing the outlet of the chemical liquid container.
  9. 제1항 내지 제4항 중 어느 한 항에 있어서,The method according to any one of claims 1 to 4,
    상기 약액 공급 챔버 내부에 설치되며, 상기 약액 용기의 중량을 측정하는 상기 약액 용기 중량 측정 수단을 더 포함하는 것을 특징으로 하는 약액 공급 장치.The chemical solution supplying device, further comprising: the chemical solution container weight measuring means installed in the chemical solution supply chamber and measuring the weight of the chemical solution container.
  10. 제1항 내지 제4항 중 어느 한 항에 있어서,The method according to any one of claims 1 to 4,
    상기 약액 공급 챔버 내부에 설치되며, 상기 약액 용기 내의 약액이 침전되는 것이 방지되도록 상기 약액 용기에 진동을 가하는 진동 인가 수단을 더 포함하는 것을 특징으로 하는 약액 공급 장치.And a vibration applying means installed inside the chemical liquid supply chamber and applying vibration to the chemical liquid container so as to prevent the chemical liquid from being precipitated in the chemical liquid container.
PCT/KR2019/016241 2019-04-03 2019-11-25 Chemical liquid feeding apparatus for feeding chemical liquid used in inkjet printer for manufacturing display WO2020204300A1 (en)

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Citations (5)

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Publication number Priority date Publication date Assignee Title
JP3965865B2 (en) * 1999-05-20 2007-08-29 セイコーエプソン株式会社 Mounting module body for liquid detection, liquid container and ink cartridge
KR20120059697A (en) * 2010-12-01 2012-06-11 주성엔지니어링(주) Appratus for supplying source and method for purging pipes of source supplying apparatus
KR20150041587A (en) * 2013-10-08 2015-04-16 도쿄엘렉트론가부시키가이샤 Chemical liquid container replacement device, container mounting module, chemical liquid container replacement method, and substrate processing apparatus
KR20160043043A (en) * 2013-09-25 2016-04-20 오르가노 코포레이션 Substrate treatment method and substrate treatment device
KR20170134879A (en) * 2016-05-27 2017-12-07 세메스 주식회사 Apparatus for treating substrate and Method for replacing bottle

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3965865B2 (en) * 1999-05-20 2007-08-29 セイコーエプソン株式会社 Mounting module body for liquid detection, liquid container and ink cartridge
KR20120059697A (en) * 2010-12-01 2012-06-11 주성엔지니어링(주) Appratus for supplying source and method for purging pipes of source supplying apparatus
KR20160043043A (en) * 2013-09-25 2016-04-20 오르가노 코포레이션 Substrate treatment method and substrate treatment device
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