WO2020194988A1 - 圧電ポンプ - Google Patents
圧電ポンプ Download PDFInfo
- Publication number
- WO2020194988A1 WO2020194988A1 PCT/JP2020/000272 JP2020000272W WO2020194988A1 WO 2020194988 A1 WO2020194988 A1 WO 2020194988A1 JP 2020000272 W JP2020000272 W JP 2020000272W WO 2020194988 A1 WO2020194988 A1 WO 2020194988A1
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- WO
- WIPO (PCT)
- Prior art keywords
- opening
- valve
- top plate
- diaphragm
- vibrating
- Prior art date
Links
- 230000002093 peripheral effect Effects 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 9
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 239000004734 Polyphenylene sulfide Substances 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229920000069 polyphenylene sulfide Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000007769 metal material Substances 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
- F04B45/047—Pumps having electric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
- F04B45/041—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms double acting plate-like flexible pumping member
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
Definitions
- the present invention relates to a piezoelectric pump.
- the piezoelectric pump of Patent Document 1 has a diaphragm to which a piezoelectric element is attached, a first top plate and a second top plate arranged to face both main surfaces of the diaphragm, and a first side wall and a second side wall.
- the first side wall connects the diaphragm and the first top plate
- the second side wall connects the diaphragm and the second top plate.
- the space surrounded by the first top plate, the diaphragm, and the first side wall is the first pump chamber
- the space surrounded by the second top plate, the diaphragm, and the second side wall is the second pump chamber. Both pump chambers are separated by a diaphragm.
- the first top plate is provided with a suction port and a discharge port
- the second top plate is also provided with a suction port and a discharge port.
- Each discharge port consists of a plurality of openings and is selectively opened and closed by a film-shaped valve provided in the pump chamber.
- the valve that opens and closes the discharge port repeatedly collides with the edge of the discharge port. If the valve repeatedly collides with the edge of the discharge port, the valve may be damaged and its function as a valve may be deteriorated. As a result, the reliability of the piezoelectric pump may decrease.
- an object of the present invention is to provide a piezoelectric pump with improved reliability in solving the above-mentioned problems.
- the piezoelectric pump of the present invention is arranged with a first top plate forming the first opening and a second top plate forming the first opening at intervals to form the second opening.
- a diaphragm arranged between the top plate, the first top plate and the second top plate and to which a piezoelectric element is attached, and the first top plate and the diaphragm are connected to each other, and between the first top plate and the diaphragm.
- the diaphragm has a vibrating portion to which the piezoelectric element is attached, a frame portion sandwiched between the first side wall and the second side wall, and a connecting portion for connecting the vibrating portion and the frame portion.
- the connection portion forms a third opening that communicates the first pump chamber and the second pump chamber
- the frame portion forms a fourth opening that communicates with the third opening and communicates with the outside.
- the annular first valve provided so as to surround the first opening at a distance from the first opening in a plan view, and in the second pump chamber, in a plan view, the said.
- An annular second valve provided so as to surround the second opening at a distance from the second opening is further provided.
- FIG. 4A Perspective view of the piezoelectric pump according to the first embodiment
- FIG. 4A Partially enlarged view of FIG. 4A
- the figure which shows the positional relationship of the 1st opening, the 1st valve and the 3rd opening when the piezoelectric pump in Embodiment 1 is viewed in a plan view.
- the figure which shows the positional relationship of the 2nd opening, the 2nd valve and the 3rd opening when the piezoelectric pump in Embodiment 1 is viewed in a plan view.
- Top view showing the surface of the diaphragm according to the first embodiment.
- Top view showing the diaphragm in the modified example of the first embodiment Sectional drawing which shows the schematic structure of the piezoelectric pump in Embodiment 2.
- the first top plate forming the first opening, the second top plate arranged at intervals with respect to the first top plate and forming the second opening, and the above.
- a diaphragm arranged between the first top plate and the second top plate and to which a piezoelectric element is attached is connected to the first top plate and the diaphragm, and a first pump chamber is connected between the first top plate and the diaphragm.
- the diaphragm comprises a first side wall forming the above, a second side wall connecting the second top plate and the diaphragm, and forming a second pump chamber between the second top plate and the diaphragm.
- a vibrating portion to which the piezoelectric element is attached, a frame portion sandwiched between the first side wall and the second side wall, and a connecting portion for connecting the vibrating portion and the frame portion.
- a third opening that communicates the first pump chamber and the second pump chamber is formed, and the frame portion forms a fourth opening that communicates with the third opening and communicates with the outside, and the first pump chamber communicates with the outside.
- an annular first valve provided so as to surround the first opening at a distance from the first opening in a plan view and a distance from the second opening in a plan view.
- a piezoelectric pump further comprising an annular second valve provided so as to surround the second opening.
- the design since the first valve and the second valve are arranged apart from the first opening and the second opening, respectively, the design does not hit the edge of the opening, and damage to the valve can be suppressed. it can. This can extend the life of the valve and improve the reliability of the piezoelectric pump.
- the first valve includes a first fixed portion fixed to the first top plate and a first movable portion extending from the first fixed portion, and the second valve.
- the piezoelectric pump according to the first aspect comprising a second fixing portion fixed to the second top plate and a second movable portion extending from the second fixing portion.
- the first valve includes a first fixed portion fixed to the vibrating portion and a first movable portion extending from the first fixed portion
- the second valve is The piezoelectric pump according to the first aspect, which includes a second fixed portion fixed to the vibrating portion and a second movable portion extending from the second fixed portion.
- the first movable portion of the first valve is arranged inside the first fixed portion of the first valve in a plan view, and the second movable portion of the second valve is movable.
- the unit provides the piezoelectric pump according to the second or third aspect, which is arranged inside the second fixing portion of the second valve in a plan view. According to such a configuration, the flow from the first opening or the second opening to the fourth opening through the third opening is suppressed, and the flow from the fourth opening to the third opening is suppressed to the first opening or the second opening. It can promote the flow toward it.
- the first movable portion of the first valve is arranged outside the first fixed portion of the first valve in a plan view, and the second movable portion of the second valve is movable.
- the unit provides the piezoelectric pump according to the second or third aspect, which is arranged outside the second fixing portion of the second valve in a plan view. According to such a configuration, the flow from the 4th opening to the 1st opening or the 2nd opening is suppressed, and the flow from the 1st opening or the 2nd opening to the 4th opening through the 3rd opening is suppressed. It can promote the flow toward it.
- the outer peripheral edge of the vibrating portion is arranged in any one of the first to fifth aspects, which is arranged at a position deviated from the position serving as the vibration node of the vibrating portion.
- the described piezoelectric pump is provided. According to such a configuration, by reliably vibrating the outer peripheral edge of the vibrating portion, it is possible to suppress the vibration of the piezoelectric element from being transmitted to the side wall and the top plate forming the outer shell of the piezoelectric pump. In this way, the leakage of vibration can be reduced and the displacement due to the vibrating portion can be increased.
- the piezoelectric pump according to any one of the first to sixth aspects, wherein the vibrating portion, the connecting portion and the frame portion are integrally configured. .. According to such a configuration, the leakage of vibration can be reduced.
- the vibrating portion and the connecting portion are formed of separate bodies, and the connecting portion is made of a material having a lower elastic modulus than the vibrating portion.
- the connecting portion is made of a material having a lower elastic modulus than the vibrating portion.
- connection portion is thinner than the vibrating portion, and provides the piezoelectric pump according to the eighth aspect. According to such a configuration, the leakage of vibration can be reduced.
- connection portion includes a first connection portion extending outward from the outer peripheral edge of the vibrating portion and a second connecting portion extending outward from the first connecting portion along the outer peripheral edge of the vibrating portion.
- the piezoelectric pump according to any one of the first to ninth aspects which has a connecting portion and a third connecting portion extending from the second connecting portion so as to be connected to the frame portion. According to such a configuration, the leakage of vibration can be reduced.
- FIG. 1 to 3 are diagrams showing a schematic configuration of the piezoelectric pump 2 according to the first embodiment.
- 1 is a perspective view of the piezoelectric pump 2 according to the first embodiment
- FIG. 2 is an exploded perspective view of the piezoelectric pump 2
- FIG. 3 is a vertical sectional view of the piezoelectric pump 2 (AA of FIG. 1). Sectional view).
- the piezoelectric pump 2 is a pump device that transports air using the piezoelectric elements 10 (FIGS. 2 and 3) (may be referred to as "micro blower", "micro pump”, etc.). As shown in FIGS. 1 and 3, the piezoelectric pump 2 sucks air from a plurality of fourth openings 24, which are suction ports, by vibrating the piezoelectric element 10 at high speed, and the first opening 20 and the discharge port, respectively. It is a pump that discharges air from the second opening 22 (FIGS. 2 and 3). 1 to 3 show an example in which a plurality of fourth openings 24 are provided on the side surface of the piezoelectric pump 2, and the first opening 20 and the second opening 22 are provided on the front surface and the back surface of the piezoelectric pump 2.
- the piezoelectric pump 2 includes a first top plate 4, a second top plate 6, a diaphragm 8, a piezoelectric element 10, a first side wall 12, and a second side wall 14.
- a first valve 16 and a second valve 18 are provided.
- the piezoelectric pump 2 has a structure in which the piezoelectric element 10 is attached to the diaphragm 8, and by supplying AC power to the piezoelectric element 10, bending deformation in the unimorph mode is caused.
- a first valve 16 and a second valve 18 that function as valves are built inside the piezoelectric pump 2.
- the first top plate 4 and the second top plate 6 are members constituting the front surface and the back surface of the piezoelectric pump 2, respectively.
- the first top plate 4 and the second top plate 6 are disk-shaped members, respectively, and are arranged at intervals from each other.
- the first opening 20 is formed in the central portion of the first top plate 4, and the second opening 22 is formed in the central portion of the second top plate 6. No other openings are formed in the first top plate 4 and the second top plate 6.
- the materials of the first top plate 4 and the second top plate 6 are, for example, a metal such as stainless steel and aluminum, and a resin such as PPS (polyphenylene sulfide).
- the diaphragm 8 is a member arranged between the first top plate 4 and the second top plate 6.
- a piezoelectric element 10 is attached to the diaphragm 8.
- a plurality of fourth openings 24 are formed on the outer peripheral portion of the diaphragm 8.
- the diaphragm 8 includes a vibrating portion 26, a frame portion 28, and a connecting portion 30. The detailed configuration of the diaphragm 8 will be described later.
- the first side wall 12 and the second side wall 14 are members that form the side wall of the piezoelectric pump 2, respectively.
- the first side wall 12 and the second side wall 14 are annular members, respectively, and form a circular opening in the central portion.
- the material of the first side wall 12 and the second side wall 14 is, for example, metal or resin.
- the first side wall 12 connects the first top plate 4 and the diaphragm 8 to form a first pump chamber 32 between the first top plate 4 and the diaphragm 8.
- the second side wall 14 connects the second top plate 6 and the diaphragm 8, and forms a second pump chamber 34 between the second top plate 6 and the diaphragm 8.
- the first pump chamber 32 and the second pump chamber 34 communicate with each other through the third opening 23 shown in FIG.
- the third opening 23 is an opening formed by the connection portion 30 of the diaphragm 8 described above.
- the first valve 16 and the second valve 18 are valve members that control the flow of air inside the piezoelectric pump 2.
- the first valve 16 and the second valve 18 are annular members, respectively, and form a circular opening in the central portion.
- the first valve 16 is provided in the first pump chamber 32, and the second valve 18 is provided in the second pump chamber 34.
- the material of the first valve 16 and the second valve 18 is, for example, a resin such as polyimide, PET, or PPS.
- the first valve 16 includes a fixed portion 16A and a movable portion 16B.
- the fixed portion 16A is a portion fixed to the first top plate 4, and the movable portion 16B is a movable portion extending from the fixed portion 16A.
- the movable portion 16B is not fixed to any member and functions as a free end (open end).
- the movable portion 16B is provided on the center side closer to the first opening 20 than the fixed portion 16A.
- the second valve 18 includes a fixed portion 18A and a movable portion 18B. Since the fixed portion 18A and the movable portion 18B have the same configurations as the fixed portion 16A and the movable portion 16B of the first valve 16 described above, detailed description thereof will be omitted. As shown in FIG. 3, by providing the second valve 18 in the second pump chamber 34, the air flow from the center to the outside is suppressed in the second pump chamber 34, and the reverse flow F2 from the outside to the center. To promote.
- FIG. 4A is a plan view of the diaphragm 8 to which the piezoelectric element 10 is attached
- FIG. 4B is a partially enlarged view of FIG. 4A.
- the vibrating portion 26, the plurality of frame portions 28, and the plurality of connecting portions 30 are integrally formed.
- the material of the diaphragm 8 is mainly a metal material such as stainless steel or aluminum. All or part of the surface of the diaphragm 8 may be coated with an insulating material such as polyimide.
- the vibrating portion 26 is a disk-shaped portion to which the piezoelectric element 10 is attached.
- the vibrating unit 26 functions as a vibrating member that vibrates together with the piezoelectric element 10.
- the piezoelectric element 10 attached to the vibrating portion 26 is arranged concentrically with the vibrating portion 26.
- the frame portion 28 is an outer peripheral portion of the diaphragm 8.
- the frame portion 28 is sandwiched between the first side wall 12 and the second side wall 14 described above.
- the frame portion 28 constitutes the side wall of the piezoelectric pump 2 together with the first side wall 12 and the second side wall 14.
- the frame portions 28 are provided at a plurality of locations, and a plurality of fourth openings 24 are formed between the frame portions 28.
- the connecting portion 30 is a portion that connects the vibrating portion 26 and the frame portion 28.
- the connecting portion 30 extends outward from the outer peripheral edge 27 of the vibrating portion 26 and is connected to the frame portion 28.
- the connecting portion 30 functions as a supporting portion that supports the vibrating portion 26.
- the connecting portions 30 are provided at a plurality of locations, and a plurality of third openings 23 are formed between the connecting portions 30.
- the third opening 23 and the fourth opening 24 communicate with each other.
- the third opening 23 is an opening that communicates the first pump chamber 32 and the second pump chamber 34
- the fourth opening 24 is an opening that communicates with the outside.
- the first pump chamber 32 and the second pump chamber 34 communicate with the outside through the third opening 23 and the fourth opening 24, respectively.
- the flow F1 in the first pump chamber 32 and the flow F2 in the second pump chamber 34 are promoted, so that the flow flows into the inside of the piezoelectric pump 2 from the fourth opening 24 through the third opening 23.
- F3 and the flow F4 flowing out from the first opening 20 and the second opening 22 are generated.
- arrows F1 to F4 are shown as average flows inside the piezoelectric pump 2.
- connection portion 30 Next, the detailed configuration of the connection portion 30 will be described with reference to FIG. 4B.
- the connection portion 30 includes a first connection portion 30A, a second connection portion 30B, and a third connection portion 30C.
- the first connecting portion 30A is a portion extending outward from the outer peripheral edge 27 of the vibrating portion 26.
- the second connecting portion 30B is a portion extending from the tip of the first connecting portion 30A along the outer peripheral edge 27 of the vibrating portion 26.
- the second connecting portion 30B shown in FIG. 4B has a component R1 toward one side and a component R2 toward the other side along the outer peripheral edge 27 of the vibrating portion 26.
- the third connection portion 30C is a portion extending from the tip of the second connection portion 30B toward the frame portion 28.
- the connecting portion 30 having the second connecting portion 30B functions as a beam for supporting the vibrating portion 26.
- the connecting portion 30 can have a desired flexibility. As a result, when the vibrating portion 26 vibrates, the vibration of the vibrating portion 26 is suppressed from being transmitted to the frame portion 28 via the connecting portion 30, so that leakage of the vibration of the piezoelectric element 10 can be suppressed.
- FIG. 5A is a plan view showing the positional relationship between the first opening 20, the first valve 16 and the third opening 23 when the piezoelectric pump 2 is viewed in a plan view
- FIG. 5B is a plan view when the piezoelectric pump 2 is viewed in a plan view. It is a top view which shows the positional relationship of the 2nd opening 22, the 2nd valve 18 and the 3rd opening 23.
- the first opening 20 is arranged inside the first valve 16 in a plan view, and the third opening 23 is arranged outside the first valve 16 in a plan view.
- the first valve 16 is formed in an annular shape so as to surround the first opening 20 with an interval D1 from the first opening 20, and is also provided with an interval D2 from the third opening 23. According to such a configuration, since the first valve 16 is separated from the first opening 20, even if the movable portion 16B of the first valve 16 moves at high speed when the piezoelectric pump 2 is driven, the first opening 20 The movable portion 16B does not collide with the edge.
- the movable portion 16B of the first valve 16 so as not to collide with the edge of the first opening 20, damage to the first valve 16 can be suppressed and the life of the first valve 16 can be extended. it can. Thereby, the reliability of the piezoelectric pump 2 can be improved.
- the second opening 22 is arranged inside the second valve 18 in a plan view
- the third opening 23 is arranged outside the second valve 18 in a plan view.
- the second valve 18 is formed in an annular shape so as to surround the second opening 22 with a distance D1 from the second opening 22, and is also provided with a gap D2 from the third opening 23.
- the movable portion 18B of the second valve 18 can be designed so as not to collide with the edge of the second opening 22 as in the case of the first valve 16. As a result, damage to the second valve 18 can be suppressed, the life of the second valve 18 can be extended, and the reliability of the piezoelectric pump 2 can be improved.
- FIG. 6 is a plan view showing the front surface of the diaphragm 8 forming the wiring 36
- FIG. 7 is a plan view showing the back surface of the piezoelectric element 10.
- the first wiring 44 and the second wiring 46 are formed as the wiring 36 on the surface of the diaphragm 8.
- a part of the surface of the diaphragm 8 is coated with an insulating material, and the first wiring 44 and the second wiring 46 formed on the diaphragm 8 are electrically insulated.
- the first wiring 44 and the second wiring 46 are formed from the vibrating portion 26 of the diaphragm 8 to the connecting portion 30 and the frame portion 28, and are connected to a drive circuit (not shown) provided outside the piezoelectric pump 2. ing.
- the portions where the first wiring 44 and the second wiring 46 come into contact with the first side wall 12 and the second side wall 14 are coated with an insulating material, and the side walls 12 and 14 are different from each other. It is designed not to be energized.
- a first electrode 38 and a second electrode 40 are formed on the back surface of the piezoelectric element 10.
- An insulating region 42 is provided between the first electrode 38 and the second electrode 40, and the first electrode 38 and the second electrode 40 are electrically insulated.
- the first electrode 38 is formed on most of the back surface of the piezoelectric element 10, and the second electrode 40 is formed on a small portion of the back surface of the piezoelectric element 10.
- the second electrode 40 is formed over the entire surface, and in FIG. 7, a portion where the second electrode 40 is folded back to the back surface side is shown.
- the second wiring is made while the first electrode 38 is in contact with the first wiring 44.
- the second electrode 40 is brought into contact with the 46.
- AC power can be supplied to the first electrode 38 and the second electrode 40, respectively, via two types of wiring, the first wiring 44 and the second wiring 46, to cause the piezoelectric element 10 to undergo a desired bending motion. Can be done.
- FIGS. 8A to 8D are vertical cross-sectional views showing one state when the piezoelectric pump 2 is driven.
- the piezoelectric element 10 attached to the vibrating portion 26 is not shown.
- FIG. 8A shows a state in which the central portion of the diaphragm 8 is most recessed toward the second top plate 6.
- FIG. 8B shows a state in which the central portion of the diaphragm 8 is moved to the side of the first top plate 4 from the state shown in FIG. 8A and becomes flat.
- the central portion of the diaphragm 8 moves from the second top plate 6 side toward the first top plate 4 side (arrow X1), so that the central portion of the first pump chamber 32 Air is pushed toward the first top plate 4, and a flow F5 discharged from the first opening 20 is generated.
- the flow F6 in which the air in the central portion of the first pump chamber 32 goes outward is suppressed by the first valve 16.
- the first valve 16 does not suppress the reverse flow F7 of the air outside the first pump chamber 32 toward the central portion.
- the second pump chamber 34 In the second pump chamber 34, a negative pressure is generated by expanding the space in the central portion upward. As a result, a flow F8 that flows into the second pump chamber 34 from the outside of the piezoelectric pump 2 through the second opening 22 is generated. At this time, the flow F9 from the central portion of the second pump chamber 34 to the outside is suppressed by the second valve 18. On the other hand, the second valve 18 does not suppress the reverse flow F10 of the air outside the second pump chamber 34 toward the central portion.
- the flows of F7 and F10 are generated in the first pump chamber 32 and the second pump chamber 34, respectively, so that the flow F11 flowing into the inside of the piezoelectric pump 2 from the fourth opening 24 through the third opening 23 is promoted.
- FIGS. 8C and 8D The state further advanced from the state shown in FIG. 8B is shown in FIGS. 8C and 8D.
- FIG. 8C shows a state in which the central portion of the diaphragm 8 is most moved to the first top plate 4 side from the state shown in FIG. 8B.
- FIG. 8D shows a state in which the central portion of the diaphragm 8 is moved to the second top plate 6 side from the state shown in FIG. 8C and becomes flat.
- the central portion of the diaphragm 8 moves from the first top plate 4 side toward the second top plate 6 side (arrow X2), so that the central portion of the second pump chamber 34 Air is pushed toward the second top plate 6 to generate a flow F12 discharged from the second opening 22.
- the flow F13 in which the air in the central portion of the second pump chamber 34 goes outward is suppressed by the second valve 18.
- the second valve 18 does not suppress the reverse flow F14 in which the air outside the second pump chamber 34 is directed toward the central portion.
- the first pump chamber 32 In the first pump chamber 32, a negative pressure is generated by expanding the space in the central portion downward. As a result, a flow F15 that flows into the first pump chamber 32 from the outside of the piezoelectric pump 2 through the first opening 20 is generated. At this time, the flow F16 from the central portion of the first pump chamber 32 to the outside is suppressed by the first valve 16. On the other hand, the first valve 16 does not suppress the reverse flow F17 of the air outside the first pump chamber 32 toward the central portion.
- the flows of F17 and F14 are generated in the first pump chamber 32 and the second pump chamber 34, respectively, so that the flow F18 flowing into the inside of the piezoelectric pump 2 from the fourth opening 24 through the third opening 23 is promoted.
- the vibrating section 26 has a vibration node 48.
- the vibration node 48 is a portion that does not displace even if the vibrating portion 26 vibrates.
- the outer peripheral edge 27 of the vibrating portion 26 is located at a position deviated from the vibration node 48. According to such an arrangement, the outer peripheral edge 27 of the vibrating portion 26 can be reliably vibrated, so that the vibration of the vibrating portion 26 is excessively transmitted to the frame portion 28 and the side walls 12 and 14 via the connecting portion 30. Can be suppressed. As a result, leakage of vibration from the piezoelectric element 10 and the vibrating portion 26 can be suppressed.
- the first valve 16 is provided at a distance from the first opening 20 in a plan view as shown in FIG. 5A
- the second valve 18 is provided in FIG. 5B.
- the second opening 22 is provided at a distance from the second opening 22 in a plan view.
- the first valve 16 includes a first fixed portion 16A fixed to the first top plate 4 and a first movable portion 16B extending from the first fixed portion 16A. ..
- the second valve 18 includes a second fixing portion 18A fixed to the second top plate 6 and a second movable portion 18B extending from the second fixing portion 18A.
- the first movable portion 16B of the first valve 16 is arranged inside the first fixed portion 16A of the first valve 16 in a plan view.
- the second movable portion 18B of the second valve 18 is also arranged inside the second fixed portion 18A of the second valve 18 in a plan view.
- the vibrating portion 26, the frame portion 28, and the connecting portion 30 are integrally configured. According to such a configuration, the vibration of the vibrating portion 26 is less likely to be transmitted to the frame portion 28 via the connecting portion 30 as compared with the case where the diaphragm 8 is composed of a plurality of members. As a result, leakage of vibration of the piezoelectric element 10 can be suppressed.
- the first opening 20 and the second opening 22 are arranged at the center of the first pump chamber 32 and the second pump chamber 34 in a plan view, respectively. According to such a configuration, since the first opening 20 and the second opening 22 are located in the portion where the pressure fluctuation is large, high pressure characteristics can be obtained. Further, since the air can be discharged from the portion where the pressure fluctuation is large, the flow velocity of the discharged air can be increased.
- FIG. 9 is a plan view showing the diaphragm 50 in the modified example.
- the diaphragm 50 shown in FIG. 9 includes a vibrating portion 52 to which the piezoelectric element 10 is attached, a connecting portion 54, and a frame portion 56.
- the vibrating portion 52, the connecting portion 54, and the frame portion 56 are separate from each other.
- the vibrating portion 52, the connecting portion 54, and the frame portion 56 are roughly disk-shaped members laminated in order from the top.
- the piezoelectric element 10 is placed on the vibrating portion 52, the vibrating portion 52 is placed on the connecting portion 54, and the connecting portion 54 is placed on the frame portion 56.
- the vibrating portion 52, the connecting portion 54, and the frame portion 56 are all arranged concentrically with the piezoelectric element 10.
- the outer peripheral portion of the connecting portion 54 is partially cut out, and a plurality of third openings 58 are formed.
- the outer peripheral portion of the frame portion 56 is also partially cut out, and a plurality of fourth openings 59 are formed.
- Each of the third opening 58 and each of the fourth opening 59 communicate with each other.
- the third opening 58 is an opening that communicates the first pump chamber 32 and the second pump chamber 34 described above
- the fourth opening 59 is an opening that communicates with the outside of the piezoelectric pump 2. Therefore, air can be sucked into the piezoelectric pump 2 from the fourth opening 59 through the third opening 58.
- the diaphragm 50 can be made of a plurality of types of materials, and the selectivity of the material and the shape can be expanded.
- the connecting portion 54 may be made of a material having a lower elastic modulus than the vibrating portion 52. According to such a configuration, the vibration of the vibrating portion 52 is less likely to be transmitted to the frame portion 56 via the connecting portion 54, and the leakage of the vibration can be reduced.
- the connecting portion 54 may be formed of a resin film such as polyimide, PET, or PPS, and the vibrating portion 52 may be formed of a metal material such as stainless steel or aluminum.
- the thickness of the connecting portion 54 may be made thinner than the thickness of the vibrating portion 52. According to such a configuration, the vibration of the vibrating portion 52 is less likely to be transmitted to the frame portion 56 via the connecting portion 54, and the leakage of the vibration can be further reduced.
- the connecting portion 54 may be formed of a metal foil having a thickness of about 0.01 to 0.2 mm
- the vibrating portion 52 may be formed of a metal plate having a thickness of about 0.3 to 0.5 mm.
- FIG. 10 is a vertical cross-sectional view showing a schematic configuration of the piezoelectric pump 60 of the second embodiment.
- FIG. 11 is a vertical sectional view showing a schematic configuration of the piezoelectric pump 70 according to the third embodiment.
- FIG. 12 is a vertical sectional view showing a schematic configuration of the piezoelectric pump 80 of the fourth embodiment.
- the position of the first valve provided in the first pump chamber 32 and the position of the second valve provided in the second pump chamber 34 are mainly different from those of the first embodiment.
- the piezoelectric pump 60 of the second embodiment includes a first valve 62 and a second valve 64. Similar to the first embodiment, the first valve 62 is fixed to the first top plate 4, and the second valve 64 is fixed to the second top plate 6, but the positions of the fixed portion and the movable portion in the valves 62 and 64. The relationship is different.
- the first valve 62 includes a first fixed portion 62A and a first movable portion 62B, and the first movable portion 62B is arranged outside the first fixed portion 62A in a plan view.
- the second valve 64 includes a second fixed portion 64A and a second movable portion 64B, and the second movable portion 64B is arranged outside the second fixed portion 64A in a plan view.
- the piezoelectric pump 60 flows the flow from the first opening 20 and the second opening 22 toward the fourth opening 24 through the third opening 23. It functions as a pump that produces continuously.
- the piezoelectric pump 70 of the third embodiment includes a first valve 72 and a second valve 74. Unlike the first embodiment, both the first valve 72 and the second valve 74 are fixed to the vibrating portion 26 of the diaphragm 8. Further, in the piezoelectric pump 70 of the third embodiment, the piezoelectric elements 10A and 10B are attached to both the front surface and the back surface of the vibrating portion 26.
- the first valve 72 is fixed to the front surface of the vibrating portion 26, and the second valve 74 is fixed to the back surface of the vibrating portion 26.
- the first valve 72 is attached to the front surface region to which the piezoelectric element 10A is not attached
- the second valve 74 is attached to the back surface region to which the piezoelectric element 10B is not attached.
- the first valve 72 includes a first fixed portion 72A and a first movable portion 72B, and the first movable portion 72B is arranged inside the first fixed portion 72A in a plan view.
- the second valve 74 also includes a second fixed portion 74A and a second movable portion 74B, and the second movable portion 74B is arranged inside the second fixed portion 74A in a plan view.
- the piezoelectric pump 70 flows the flow from the fourth opening 24 to the first opening 20 and the second opening 22 through the third opening 23. It functions as a pump that produces continuously.
- valves 72 and 74 By fixing the valves 72 and 74 to the vibrating portion 26 in this way, the flow path resistance in the vicinity of the top plates 4 and 6 in the internal space of the piezoelectric pump 70 can be reduced, and a high flow rate can be obtained.
- the displacement of the piezoelectric elements 10A and 10B becomes larger than when only one is provided, and the characteristics become higher. Further, since the piezoelectric elements 10A and 10B and the vibrating portion 26 have a vertically symmetrical shape, the diaphragm 8 is less likely to warp even if the temperature changes, and the characteristics are stabilized.
- the piezoelectric pump 80 of the fourth embodiment includes a first valve 82 and a second valve 84. Similar to the third embodiment, the first valve 82 and the second valve 84 are fixed to the vibrating portion 26 of the diaphragm 8, but the positional relationship between the fixed portion and the movable portion in the valves 82 and 84 is the same as that of the third embodiment. different. As a further difference, the shape of the first opening 87 formed in the first top plate 86 and the shape of the second opening 89 formed in the second top plate 88 are also different.
- the first valve 82 includes a first fixed portion 82A and a first movable portion 82B, and the first movable portion 82B is arranged outside the first fixed portion 82A in a plan view.
- the second valve 84 includes a second fixed portion 84A and a second movable portion 84B, and the second movable portion 84B is arranged outside the second fixed portion 84A in a plan view.
- the piezoelectric pump 80 flows the flow from the first opening 87 and the second opening 89 toward the fourth opening 24 through the third opening 23. It functions as a pump that produces continuously.
- valves 82 and 84 and the openings 87 and 89 in the piezoelectric pump 80 of the fourth embodiment will be described with reference to FIGS. 13A and 13B.
- FIG. 13A is a plan view showing the positional relationship between the first opening 87, the first valve 82, and the third opening 23 when the piezoelectric pump 80 is viewed in a plan view.
- FIG. 13B is a plan view showing the positional relationship between the second opening 89, the second valve 84, and the third opening 23 when the piezoelectric pump 80 is viewed in a plan view.
- the first opening 87 is provided at a plurality of locations.
- the plurality of first openings 87 are arranged in a circumferential shape in a plan view.
- the plurality of first openings 87 are all arranged inside the first valve 82.
- the first valve 82 arranged outside the first opening 87 is provided in an annular shape so as to surround the first opening 87 at a distance D3 from the first opening 87.
- the second openings 89 are also provided at a plurality of locations in the same manner.
- the plurality of second openings 89 are arranged in a circumferential shape in a plan view.
- the plurality of second openings 89 are all arranged inside the second valve 84, and the second valve 84 is provided in an annular shape so as to surround the second opening 89 at a distance D3 from the second opening 89.
- the valves 82 and 84 are opened, respectively.
- the design can be designed so as not to hit the edges of 87 and 89. As a result, damage to the valves 82 and 84 can be suppressed, the life of the valves 82 and 84 can be extended, and the reliability of the piezoelectric pump 80 can be improved.
- the flow path resistance at each opening is reduced, and a high flow rate can be obtained.
- the present invention is useful for a piezoelectric pump using a piezoelectric element.
- Piezoelectric pump 4 1st top plate 6 2nd top plate 8
- Diaphragm 10 Piezoelectric element 12 1st side wall 14 2nd side wall 16 1st valve 16A Fixed part 16B Movable part 18 2nd valve 18A Fixed part 18B Movable part 20 1st opening 22 2nd opening 23 3rd opening 24 4th opening 26 Vibrating part 27 Outer peripheral edge 28 Frame part 30 Connection part 30A 1st connection part 30B 2nd connection part 30C 3rd connection part 32 1st pump room 34 2nd pump room 36 Wiring 38 1st electrode 40 2nd electrode 42 Insulation area 44 1st wiring 46 2nd wiring 48 Vibration section 50 Diaphragm 52 Vibration part 54 Connection part 56 Frame part 58 3rd opening 59 4th opening 60
- Piezoelectric pump 72 1st valve 72
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Abstract
Description
図1~図3は、実施の形態1における圧電ポンプ2の概略構成を示す図である。図1は、実施の形態1における圧電ポンプ2の斜視図であり、図2は、圧電ポンプ2の分解斜視図であり、図3は、圧電ポンプ2の縦断面図(図1のA-A断面図)である。
実施の形態1では、ダイヤフラム8を構成する振動部26、枠部28および接続部30が一体的に形成される例について説明したが、このような場合に限らない。ダイヤフラム8を複数の部材で構成する例について、図9を用いて説明する。
本発明に係る実施の形態2~4の圧電ポンプについて説明する。実施の形態2~4では、主に実施の形態1と異なる点について説明する。また、実施の形態1と重複する記載は省略する。
図10に示すように、実施の形態2の圧電ポンプ60は、第1弁62と第2弁64とを備える。実施の形態1と同様に、第1弁62は第1天板4に固定され、第2弁64は第2天板6に固定されるが、弁62、64における固定部と可動部の位置関係が異なっている。
図11に示すように、実施の形態3の圧電ポンプ70は、第1弁72と第2弁74とを備える。実施の形態1とは異なり、第1弁72と第2弁74はともにダイヤフラム8の振動部26に固定されている。さらに実施の形態3の圧電ポンプ70では、振動部26の表面と裏面の両側に圧電素子10A、10Bを貼付している。
図12に示すように、実施の形態4の圧電ポンプ80は、第1弁82と第2弁84とを備える。実施の形態3と同様に、第1弁82と第2弁84はダイヤフラム8の振動部26に固定されているが、弁82、84における固定部と可動部の位置関係が実施の形態3と異なる。さらなる相違点として、第1天板86に形成された第1開口87の形状、並びに、第2天板88に形成された第2開口89の形状も異なっている。
4 第1天板
6 第2天板
8 ダイヤフラム
10 圧電素子
12 第1側壁
14 第2側壁
16 第1弁
16A 固定部
16B 可動部
18 第2弁
18A 固定部
18B 可動部
20 第1開口
22 第2開口
23 第3開口
24 第4開口
26 振動部
27 外周縁
28 枠部
30 接続部
30A 第1接続部
30B 第2接続部
30C 第3接続部
32 第1ポンプ室
34 第2ポンプ室
36 配線
38 第1電極
40 第2電極
42 絶縁領域
44 第1配線
46 第2配線
48 振動の節
50 ダイヤフラム
52 振動部
54 接続部
56 枠部
58 第3開口
59 第4開口
60 圧電ポンプ
62 第1弁
62A 第1固定部
62B 第2可動部
64 第2弁
64A 第1固定部
64B 第2可動部
70 圧電ポンプ
72 第1弁
72A 第1固定部
72B 第1可動部
74 第2弁
74A 第2固定部
74B 第2可動部
80 圧電ポンプ
82 第1弁
82A 第1固定部
82B 第1可動部
84 第2弁
84A 第2固定部
84B 第2可動部
86 第1天板
87 第1開口
88 第2天板
89 第2開口
D1~D3 間隔
F1~F18 流れ
F20~F23 流れ
F30~F33 流れ
F40~F43 流れ
R1 一方側の成分
R2 他方側の成分
Claims (10)
- 第1開口を形成する第1天板と、
前記第1天板に対して間隔を空けて配置され、第2開口を形成する第2天板と、
前記第1天板と前記第2天板の間に配置され、圧電素子が添付されるダイヤフラムと、
前記第1天板と前記ダイヤフラムを連結し、前記第1天板と前記ダイヤフラムの間に第1ポンプ室を形成する第1側壁と、
前記第2天板と前記ダイヤフラムを連結し、前記第2天板と前記ダイヤフラムの間に第2ポンプ室を形成する第2側壁と、を備え、
前記ダイヤフラムは、前記圧電素子が添付される振動部と、前記第1側壁と前記第2側壁によって挟まれる枠部と、前記振動部と前記枠部とを接続する接続部とを有し、
前記接続部は、前記第1ポンプ室と前記第2ポンプ室を連通させる第3開口を形成し、
前記枠部は、前記第3開口に連通するとともに外部に連通する第4開口を形成し、
前記第1ポンプ室において、平面視して前記第1開口から間隔を空けて前記第1開口を囲むように設けられた環状の第1弁と、
前記第2ポンプ室において、平面視して前記第2開口から間隔を空けて前記第2開口を囲むように設けられた環状の第2弁と、をさらに備える、圧電ポンプ。 - 前記第1弁は、前記第1天板に固定される第1固定部と、前記第1固定部から延びる第1可動部とを備え、
前記第2弁は、前記第2天板に固定される第2固定部と、前記第2固定部から延びる第2可動部とを備える、請求項1に記載の圧電ポンプ。 - 前記第1弁は、前記振動部に固定される第1固定部と、前記第1固定部から延びる第1可動部とを備え、
前記第2弁は、前記振動部に固定される第2固定部と、前記第2固定部から延びる第2可動部とを備える、請求項1に記載の圧電ポンプ。 - 前記第1弁の前記第1可動部は、平面視で前記第1弁の前記第1固定部の内側に配置され、
前記第2弁の前記第2可動部は、平面視で前記第2弁の前記第2固定部の内側に配置される、請求項2又は3に記載の圧電ポンプ。 - 前記第1弁の前記第1可動部は、平面視で前記第1弁の前記第1固定部の外側に配置され、
前記第2弁の前記第2可動部は、平面視で前記第2弁の前記第2固定部の外側に配置される、請求項2又は3に記載の圧電ポンプ。 - 前記振動部の外周縁は、前記振動部の振動の節となる位置からずれた位置に配置される、請求項1から5のいずれか1つに記載の圧電ポンプ。
- 前記振動部、前記接続部および前記枠部は一体的に構成されている、請求項1から6のいずれか1つに記載の圧電ポンプ。
- 前記振動部と前記接続部は別体で構成されており、前記接続部は、前記振動部よりも弾性率の低い材料で構成されている、請求項1から6のいずれか1つに記載の圧電ポンプ。
- 前記接続部は、前記振動部よりも薄い、請求項8に記載の圧電ポンプ。
- 前記接続部は、前記振動部の外周縁から外側に延びる第1接続部と、前記第1接続部から前記振動部の前記外周縁に沿って延びる第2接続部と、前記第2接続部から前記枠部に接続されるように延びる第3接続部とを有する、請求項1から9のいずれか1つに記載の圧電ポンプ。
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GB2109326.5A GB2594826B (en) | 2019-03-27 | 2020-01-08 | Piezoelectric pump |
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GB2594826A (en) | 2021-11-10 |
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