WO2020187600A1 - Machine for the plasma treatment of containers, and method for controlling the treatment machine - Google Patents

Machine for the plasma treatment of containers, and method for controlling the treatment machine Download PDF

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Publication number
WO2020187600A1
WO2020187600A1 PCT/EP2020/055955 EP2020055955W WO2020187600A1 WO 2020187600 A1 WO2020187600 A1 WO 2020187600A1 EP 2020055955 W EP2020055955 W EP 2020055955W WO 2020187600 A1 WO2020187600 A1 WO 2020187600A1
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WO
WIPO (PCT)
Prior art keywords
circuit
fixed
mobile
cavity
sensor
Prior art date
Application number
PCT/EP2020/055955
Other languages
French (fr)
Inventor
Yves-Alban Duclos
David Gariou
Original Assignee
Sidel Participations
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Publication of WO2020187600A1 publication Critical patent/WO2020187600A1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32394—Treating interior parts of workpieces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32816—Pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32816—Pressure
    • H01J37/32834—Exhausting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/3299—Feedback systems

Definitions

  • TITLE Plasma container processing machine and method for controlling the
  • the present invention relates to a plasma container treatment machine, comprising:
  • a rotating joint having at least one fixed opening and at least one movable and structured opening to ensure a tight connection between the fixed opening and the movable opening
  • At least one station mobile relative to the frame and designed to apply a coating forming a barrier on an internal face of the containers, said mobile station comprising at least one cavity for receiving at least a first container to be treated, the mobile station comprising a mobile circuit sealingly connecting the movable opening to the cavity, so that the stationary pumping unit is able to establish a vacuum in the cavity, and
  • At least one local pressure sensor designed to measure pressure inside the mobile station.
  • the plasma treatment of containers makes it possible to apply a barrier coating on the inside of the containers, and thus to increase the impermeability of the container, in particular to gases.
  • the quality of the vacuum on machines for plasma treatment of containers made of thermoplastic material is a crucial element intervening in the final quality of the coating applied: a bad vacuum during the deposition of the coating, linked to a micro-leak, has the consequences of poor barrier performance of the coating.
  • a container with an uneven coating applied is porous, which is undesirable.
  • gas is liable to escape from the container during its storage, and thus lead to a reduction in the quality of the drink contained in the container.
  • the coating also helps prevent the ingress of ambient air into the container, which could oxidize and degrade the contents of the container.
  • the arrangement of numerous absolute pressure sensors on the machine does not make it possible to detect micro-leaks in the vacuum circuit that are potentially harmful to the container treatment process.
  • the Applicant's European patent EP2024104 teaches a procedure making it possible to correct the disparity in the adjustment of the sensor zeros. However, a bias generated by micro-leaks is integrated into the correction. Leaks are then no longer measured.
  • One of the aims of the invention is to overcome the above drawbacks.
  • the present invention relates to a machine for processing containers of the aforementioned type, the machine further comprising a reference pressure sensor and an element for placing the reference pressure sensor in controlled communication with the fixed circuit.
  • the controlled communication element having an open configuration to allow passage of a fluid between the reference pressure sensor and the fixed vacuum circuit, and a closed configuration to prevent the flow of a fluid between the reference pressure sensor and the fixed vacuum circuit, so that the reference pressure sensor is able to measure the pressure inside the mobile station in parallel with the measurement made by the local pressure sensor when the The controlled communication element is in open configuration.
  • the reference sensor is configured to allow a calibration correction of the local pressure sensor in the event of a measurement error thereof.
  • the calibration correction by the reference sensor makes it possible to harmonize the measurements of the local sensors and to reduce these dispersions.
  • the arrangement of the reference sensor on the fixed vacuum circuit allows the use of only one reference sensor for the calibration correction of several local sensors.
  • the reference sensor is isolated from the fixed vacuum circuit by a controlled communication element, so as to protect the reference sensor from all attacks, for example dust, carbon or grease, during production phases and thus preserve its measurement performance and extend its service life
  • the reference pressure sensor has a lower measurement error than each local sensor.
  • the reference sensor thus ensures a very precise pressure measurement with regard to the pressure prevailing in the fixed vacuum circuit, as well as inside the mobile station when the controlled communication element is in the open configuration.
  • the machine includes a comparison device suitable for comparing the pressures measured by the reference pressure sensor and by one of at least one local pressure sensor.
  • the result of the comparison makes it possible to detect an operating fault of the local sensor whose pressure measurement is compared with the reference sensor, and the calibration of the local sensor can be corrected according to the result in the event of a fault detected.
  • the mobile circuit comprises a main portion
  • the mobile station comprises at least one proximal isolation valve structured to switch in a controllable manner between a closed configuration in which the main portion of the mobile circuit is fluidly isolated from a portion proximal of the movable circuit, which proximal portion is fluidly connected to the movable opening of the rotary joint, and an open configuration in which the main portion of the movable circuit is in fluid communication with the movable opening of the rotary joint;
  • the mobile station comprises at least one cavity isolation valve structured to switch in a controllable manner between a closed configuration in which the main portion of the mobile circuit is fluidly isolated from a distal portion of the mobile circuit, which distal portion is connected fluidly to the cavity, and an open configuration in which the main portion of the movable circuit is in fluid communication with the cavity;
  • one of the at least one local sensor is a local circuit sensor, in fluid communication with the main portion of the mobile circuit;
  • the at least one local sensor is a local cavity sensor in fluid communication with the cavity
  • the treatment cavity comprises a container connection nozzle designed to receive in a sealed manner a neck of the container to be treated, the mobile circuit further comprising an internal portion of the circuit fluidly connecting the main portion of the mobile vacuum circuit to said nozzle;
  • the mobile station comprises a container isolation valve structured to switch in a controllable manner between a closed configuration in which the main portion of the mobile circuit is fluidly isolated from the connection nozzle of the container, and an open configuration in which the main portion of the mobile circuit is in fluid communication with the interior of the container to be treated.
  • valve arrangements make it possible to selectively isolate the different portions of the mobile vacuum circuit from one another or from the rotating joint, so as to be able to measure the pressure in the different portions of the mobile vacuum circuit and thus identify the presence of micro-leaks in one of the portions. This also allows the mobile station to be placed in communication with the fixed vacuum circuit during production, to allow pumping of the cavity and the container.
  • the fixed pumping group includes a pre-pumping group and a pushed pumping group
  • the mobile circuit of the mobile station is connected by the rotary joint on the one hand to the fixed pre-pumping circuit and on the other hand to a fixed pushed pumping circuit, the communication element controlled by open configuration is arranged to put the reference pressure sensor in fluid communication with the fixed pushed pumping circuit.
  • the arrangement of the reference pressure sensor on the fixed high pressure pumping circuit ensures the quality of the vacuum created by the high pressure pumping unit, determining the quality of the coating applied to the internal face of the container.
  • the rotary joint is a distribution device allowing the flow of a fluid between the fixed opening and the at least one movable opening on one or more angular sectors, called passing sectors, and preventing the flow of a fluid between the fixed opening and the movable opening on one or more angular sectors, complementary to the passing sector or sectors;
  • the rotary joint comprises a first fixed opening and a second fixed opening arranged downstream of the first fixed opening in the direction of rotation of the rotary joint
  • the fixed vacuum circuit comprises a fixed pre-pumping circuit connecting the pre-pumping unit to the first fixed opening and a fixed pushed pumping circuit connecting the pushed pumping unit to the second fixed opening, the controlled communication element connecting the reference pressure sensor to the fixed pushed pumping circuit.
  • a subject of the present invention is also a method for controlling the plasma container processing machine according to the invention, the method comprising a phase of correcting the calibration of a mobile circuit sensor in fluid communication with a main portion of the device. mobile circuit, during which:
  • the cavity is fluidly isolated from the main portion of the mobile circuit
  • the fixed pumping unit continues the vacuuming of the assembly comprising the fixed circuit, the rotating joint and the main portion of the mobile vacuum circuit, and after a predetermined time, the pressure is measured simultaneously in the fixed circuit by the reference pressure sensor, and in the main portion of the mobile circuit by said circuit sensor,
  • an average deviation of the pressure measured by the circuit sensor is determined with respect to the measurement of the reference pressure sensor, and the calibration of the mobile circuit sensor is corrected by removing said deviation.
  • the process includes:
  • a phase of checking the tightness of the fixed vacuum circuit during which the assembly comprising the fixed circuit, the rotating joint and the mobile station is evacuated by the fixed pumping unit; then the mobile station is fluidly isolated from the rotating joint, then the stationary pumping unit continues the evacuation of the assembly comprising the fixed circuit, the rotating joint and the mobile station, and after a predetermined time, the pressure in the circuit fixed is measured by the reference pressure sensor, and an alert signal is issued if the pressure measured in the fixed circuit is greater than a validation pressure of the fixed circuit, and / or
  • a phase of checking the tightness of a main portion of the mobile circuit during which the assembly comprising the fixed circuit, the rotating joint and the mobile station is placed under vacuum; then the main portion of the mobile circuit is fluidly isolated on the one hand from the cavity and on the other hand from the rotary joint, a time pressure drift in the main portion of the mobile circuit is measured, and a warning signal is emitted if the time pressure drift obtained in the main portion of the mobile circuit is greater than a prerecorded drift acceptable for the mobile circuit;
  • the plasma container treatment machine comprises a plurality of mobile processing stations, each connected to a mobile opening of the rotating joint specific to said mobile processing station, the method comprising said phase of checking the tightness of the fixed circuit of empty, then for each of the mobile processing stations, at least one of said phases taken from:
  • the tightness of the fixed vacuum circuit, the cavity and the main portion of the mobile vacuum circuit is checked to ensure excellent vacuum quality during production.
  • a leak is detected and signaled in the fixed circuit, the cavity or the main portion of the mobile circuit, it allows the process to be interrupted and to intervene where the leak is detected before continuing the monitoring process. .
  • the method includes a phase of checking the tightness of the fixed pre-pumping circuit by the circuit sensor.
  • Figure 1 shows a partial schematic top view of a container processing machine according to the invention
  • Figure 2 is a sectional elevation view showing a mobile processing station equipping the machine of Figure 1;
  • Figure 3 is a diagram of the container processing machine according to a particular embodiment.
  • a plasma container treatment machine 1 comprising a frame 2 on which are mounted one or more treatment stations 3 movable relative to the frame 2 and designed to apply a coating forming a barrier on an internal face of containers 4 previously shaped, typically by blow molding or stretch blow molding from a blank of thermoplastic material such as polyethylene terephthalate (PET).
  • the treatment machine 1 further comprises at least one pumping unit 5 fixed relative to the frame 2, and a rotating joint 8.
  • the frame 2 is typically a carousel around which the mobile station or stations 3 are mounted.
  • the stationary pumping group 5 comprises a plurality of pumps suitable for establishing a vacuum in different parts of the machine 1, which will be detailed below.
  • the stationary pumping group 5 comprises a pre-pumping group 6 and a pushed pumping group 7.
  • the pushing group 7 typically has a deeper pumping capacity than the pre-pumping group 6. That is to say that the high pumping allows to go down to a lower vacuum pressure than the pre-pumping.
  • the pre-pumping group 6 typically includes 1 to 2 pumps mounted in parallel with each other, this pump, or each of the pumps may have one or two successive pumping stages in series with each other.
  • the high pumping group 7 typically comprises three pumping stages in series with each other in order to obtain a higher vacuum. However, to balance the flow rates of each pump stage, the most upstream pump stage may have two or three pumps in parallel with each other. In other words, the pushed pumping group 7 can typically comprise five pumps, and three pumping stages.
  • the pre-pumping group 6 is able to establish a vacuum of 80 pbars for 1 stage, 15 pbars for 2 stages and the pushed pumping group 7 is able to establish a vacuum of 5 pbars for 3 pumping stages.
  • the rotating seal 8 has at least one fixed opening 9 and at least one movable opening 10 and is structured to provide a sealed connection between the fixed opening 9 and the movable opening 10.
  • the rotating joint 8 advantageously comprises a first fixed opening 11 and a second fixed opening 12 disposed downstream of the first opening 1 1 fixed in the direction of rotation of the rotating joint 8.
  • the first fixed opening 1 1 is suitable for being connected to the pre-pumping group 6.
  • the second fixed opening 12 is suitable for being connected to the pushed pumping group 7.
  • the rotating joint 8 comprises several angular sectors 13 and the rotating joint 8 is a distribution device allowing the flow of a fluid between the fixed opening 9 and the movable opening 10 over one or more angular sectors, called passing sectors, and preventing the flow of a fluid between the fixed opening 9 and said movable opening 10 on one or more angular sectors 13, complementary to the passing sector or sectors.
  • the machine 1 further comprises a fixed vacuum circuit 15 sealingly connecting the stationary pumping group 5 to the fixed opening 9 of the rotating joint 8.
  • the fixed vacuum circuit 15 comprises a fixed pre-pumping circuit 16 connecting the pre-pumping group 6. pumping to the first fixed opening 1 1 of the rotary joint and a fixed pushed pumping circuit 17 connecting the pumping group 7 to the second fixed opening 12.
  • FIG. 2 is shown an example of a mobile processing station 3.
  • the machine 1 comprises twenty-four mobile stations 3.
  • the mobile station 3 comprises at least one cavity 20 for receiving at least a first container 4 to be treated.
  • the container 4 typically comprises a body 21, comprising an internal face 22 and an external face 23, and a neck 24.
  • the cavity 20 is typically made of a conductive material, for example steel or (preferably) aluminum or an aluminum alloy.
  • the mobile station 3 comprises a generator 25 of low power electromagnetic microwaves at a frequency of 2.45 GHz, connected by a waveguide 26 to the cavity 20.
  • an enclosure 27 made of a material suitable for transmitting electromagnetic microwaves, such as quartz.
  • the cavity 20 and the enclosure 27 are closed by a removable cover 28 allowing the sealed installation of the container 4 in the enclosure 27.
  • the cover 28 is crossed by an injector 29 for the introduction into the container 4 of a precursor gas, such as acetylene.
  • the cavity 20 comprises a nozzle 30 for connecting the container 4 designed to receive in a sealed manner the neck 24 of the container 4 to be treated.
  • the connection nozzle 30 is typically mounted on the cover 28.
  • each mobile station 3 comprises two cavities 20 so as to simultaneously process two containers 4.
  • the mobile station 3 comprises a mobile vacuum circuit 32 sealingly connecting the mobile opening 10 of the rotating seal 8 to each cavity 20, so that the stationary pumping unit 5 is able to establish a vacuum in each cavity 20.
  • the mobile circuit 32 comprises a main portion 33, an internal portion 34 fluidly connecting the main portion 33 to the nozzle 30 for connecting the container 4, a proximal portion 35 fluidly connected to the movable opening 10 of the rotating joint 8, and a distal portion 36, fluidly connected to the cavity 20.
  • the stationary pumping group 5 comprises a pre-pumping group 6 and a pushed pumping group 7
  • the mobile circuit 32 of the mobile station 3 is connected by the rotating joint 8 on the one hand to the fixed pre-pumping circuit 16 and on the other hand to the fixed pushed pumping circuit 17.
  • the mobile station 3 comprises at least one proximal isolation valve 40 structured to switch in a controllable manner between a closed configuration in which the main portion 33 of the mobile circuit 32 is fluidically isolated from the proximal portion 35 of the mobile circuit 32. , and an open configuration in which the main portion 33 of the movable circuit 32 is in fluid communication with the movable opening 10 of the rotating joint 8.
  • the mobile station 3 comprises a container isolation valve 41 structured to switch in a controllable manner between a closed configuration in which the main portion 33 of the mobile circuit 32 is fluidly isolated from the nozzle 30 for connecting the container 4. , and an open configuration in which the main portion 33 of the mobile circuit 32 is in fluid communication with the interior of the container 4 to be treated.
  • the mobile station 3 comprises at least one cavity isolation valve 42 structured to controllably switch between a closed configuration in which the main portion 33 of the mobile circuit 32 is fluidly isolated from the distal portion 36 of the circuit. 32 mobile, and an open configuration in which the main portion 33 of the mobile circuit 32 is in fluid communication with the cavity 20.
  • the machine 1 further comprises at least one local pressure sensor 43, 44 designed to measure a pressure inside the mobile station 3.
  • the local pressure sensor 43, 44 is suitable for measuring the pressure inside the cavity 20 or inside the first mobile circuit 32, connected to said cavity 20.
  • one of the at least one local sensor 43, 44 is a local circuit sensor 43, in fluid communication with the main portion 33 of the mobile circuit 32, and / or one of the at least one sensor 43, 44 local is a local cavity sensor 44 in fluid communication with cavity 20.
  • each mobile circuit 32 is provided with a local circuit sensor 43, and each mobile station 3 comprises a local cavity sensor 44, even in the case where the station 3 comprises a plurality of cavities 20.
  • the machine 1 further comprises a reference pressure sensor 45 and an element 46 for placing the reference pressure sensor 45 in controlled communication with the fixed vacuum circuit 15.
  • the reference pressure sensor 45 is suitable for measuring the pressure in the fixed vacuum circuit 15.
  • the reference pressure sensor 45 is able to measure the pressure inside the mobile station 3 in parallel with the measurement made by the local pressure sensor 43, 44 when the element 46 of commanded communication. is in open configuration.
  • the reference pressure sensor 45 is a thermostatically controlled sensor. This increases the stability of the measurements made by the sensor 45.
  • the reference sensor 45 has a lower measurement error than each local sensor 43, 44.
  • measurement error of a sensor is meant a difference between a value indicated by a signal generated by the sensor and the unknown exact value of the pressure to which the sensor is exposed.
  • This measurement error combines precision, linearity, original calibration and time drift.
  • precision is understood to mean the value of the modification threshold of the measured pressure which causes a modification of the signal generated by the sensor.
  • linearity it is understood the constancy of the variation of the signal generated by the sensor divided by the variation of the pressure to which the sensor is exposed.
  • original calibration is meant the adjustment of a reference pressure to a reference value of the generated signal.
  • time drift is meant the increase in the deviation of the measurement from the true value over time.
  • the reference pressure sensor 45 has a measurement error of less than 1 pbar.
  • each local sensor 43, 44 has a measurement error of less than 5 pbar (standard deviation of 1, 2 pbar).
  • the controlled communication element 46 is typically a solenoid valve.
  • the controlled communication element 46 has an open configuration to allow passage of a fluid between the reference pressure sensor 45 and the fixed vacuum circuit, and a closed configuration to prevent the flow of a fluid. between the reference pressure sensor 45 and the fixed vacuum circuit 15.
  • the element 46 for the controlled communication of the reference pressure sensor 45 makes it possible to isolate the reference pressure sensor 45 from the fixed vacuum circuit 15 when it is not in use, and thus to slow down wear and tear. to reduce the pollution of the reference pressure sensor 45, for example by dust, carbon or grease during normal operation of the treatment machine.
  • the controlled communication element 46 connects the reference pressure sensor 45 to the circuit 17 fixed pumping pushed.
  • the machine 1 further comprises a comparison device, not shown, suitable for comparing the pressures measured by the reference pressure sensor 45 and by one of at least one local pressure sensor 43, 44.
  • a comparison device not shown, suitable for comparing the pressures measured by the reference pressure sensor 45 and by one of at least one local pressure sensor 43, 44.
  • the rotating joint 8 is rotated to place the stationary pumping unit 5 in fluid communication with the mobile circuit 32, and with the interior of the cavity 20.
  • the fixed pre-pumping circuit 16 is placed in fluid communication with the first fixed opening 11 of the rotating joint 8.
  • the fixed pushed pumping circuit 17 is placed in fluid communication with the second fixed opening 12 of the rotating joint 8.
  • a movable opening 9 of the rotating joint 8 is placed in fluid communication with the mobile circuit 32 of the mobile station 3.
  • the fixed pre-pumping group 6 puts the mobile circuit 32 of the mobile station 3 under vacuum.
  • the proximal isolation valve 40 and the cavity isolation valve 42 are in the open configuration, the container isolation valve 41 is in the closed configuration.
  • the main portion 33 of the movable circuit 32 is in fluid communication with the movable opening 10 of the rotary joint 8 and with the cavity 20.
  • cavity isolation valve 42 is placed in the closed configuration.
  • the fixed high-pumping group 7 then evacuates the interior of the container 4.
  • the proximal isolation valve 40 and the container isolation valve 41 are in the open configuration
  • the valve 42 for isolating the container. cavity are in closed configuration.
  • the main portion 33 of the mobile circuit 32 is in fluid communication with the mobile opening 10 of the rotary joint 8 and with the interior of the container 4 to be treated.
  • the vessel isolation valve 41 When the pressure inside the vessel 4 reaches the high vacuum pressure, the vessel isolation valve 41 is in the open configuration, and the cavity isolation valve 42 is set to the closed configuration.
  • the injector 29 introduces a precursor gas, such as acetylene into the vessel 4 and the electromagnetic microwave generator 25 generates electromagnetic microwaves in order to break up the gas molecules, and to deposit a barrier coating on it. the inside of the container 4.
  • a precursor gas such as acetylene
  • the control method comprises a phase of correcting the calibration of the circuit sensor 43, the circuit sensor 43 being in fluid communication with the main portion 33 of the mobile circuit 32.
  • An assembly comprising the fixed circuit 15, the rotating joint 8 and the mobile station 3 is evacuated by the fixed pumping group 5.
  • the proximal isolation valve 40, the vessel isolation valve 41, and / or the cavity isolation valve 42 are in the open configuration.
  • the main portion 33 of the movable circuit 32 is in fluid communication with the movable opening 10 of the rotary joint 8, and the main portion 33 of the movable circuit 32 is in fluid communication with the cavity 20.
  • the cavity 20 is fluidly isolated from the main portion 33 of the mobile circuit 32.
  • the cavity isolation valve 42 and the vessel isolation valve 41 are in the closed configuration.
  • the stationary pumping group 5 continues the evacuation of the assembly comprising the fixed circuit 15, the rotating joint 8 and the mobile station 3, and after a predetermined time, the pressure is measured simultaneously in the fixed vacuum circuit 15. by the reference pressure sensor 45, and in the main portion 33 of the mobile circuit 32 by said circuit sensor 43.
  • An average deviation of the pressure measured by the circuit sensor 43 is determined relative to the measurement of the reference pressure sensor 45, and the calibration of the circuit sensor 43 is corrected by removing said deviation.
  • the method can comprise one or more of the control phases described below, namely: a phase of checking the tightness of the fixed vacuum circuit, and / or a phase of checking the tightness of the vacuum circuit. the cavity 20 and / or a control phase of the main portion 33 of the mobile vacuum circuit 32. These various checks can take place without a container 4 being introduced into cavity 20.:
  • the proximal isolation valve 40, the vessel isolation valve 41, and the cavity isolation valve 42 are in the open configuration.
  • the main portion 33 of the movable circuit 32 is in fluid communication with the movable opening 10 of the rotary joint 8, the main portion 33 of the movable circuit 32 is in fluid communication with the cavity 20.
  • the proximal isolation valve 40 is placed in the closed configuration.
  • the vessel isolation valve 41 and the cavity isolation valve 42 can remain in the open configuration, but it is preferable to close them both. It reinforces the isolation.
  • the stationary pumping group 5 continues the evacuation of the assembly comprising the fixed circuit 15, the rotating joint 8 and the proximal portion 35 of the mobile vacuum circuit 32.
  • the pressure in the fixed circuit 15 is measured by the reference pressure sensor 45, and an alert signal is emitted if the pressure measured in the fixed circuit 15 is greater than a validation pressure of the circuit 15. fixed.
  • a validation pressure of the fixed circuit 15 this means that there is probably a micro-leak in the fixed circuit 15.
  • the validation pressure of the fixed circuit 15 is for example equal to 10 pbars.
  • the method may include a phase of checking the tightness of the fixed pre-pumping circuit 16. pumping by reference sensor 45:
  • the assembly comprising the fixed circuit 15, the rotating joint 8 and the mobile station 3 is evacuated by the pre-pumping group 6.
  • the proximal isolation valve 40, the vessel isolation valve 41 and / or the cavity isolation valve 42 are in the open configuration.
  • the main portion 33 of the movable circuit 32 is in fluid communication with the movable opening 10 of the rotary joint 8, and the main portion 33 of the movable circuit 32 is in fluid communication with the cavity 20.
  • the proximal isolation valve 40 is placed in the closed configuration, the container isolation valve 41 and the cavity isolation valve 42 can remain in the open configuration, but it is preferable to close them also.
  • the pre-pumping group 6 continues the evacuation of the assembly comprising the fixed circuit 15, the rotating joint 8 and the proximal portion 35 of the mobile vacuum circuit 32.
  • the pressure in the fixed pre-pumping circuit 16 is measured by the reference pressure sensor 45, and an alert signal is emitted if the pressure measured in the fixed pre-pumping circuit 16 is greater. at a validation pressure of the fixed pre-pumping circuit 16.
  • the validation pressure of the fixed pre-pumping circuit 16 is for example equal to 20 pbars for a group with 2 stages and 80 pbars for a group with 1 stage.
  • the method comprises:
  • No container 4 is introduced into the cavity 20.
  • the valve 41 places the main portion 33 of the mobile circuit 32 in communication with the cavity 20.
  • the proximal isolation valve 40, the container isolation valve 41, and / or the cavity isolation valve 42 are in the open configuration.
  • the part 33 main of the movable circuit 32 is in fluid communication with the movable opening 10 of the rotary joint 8, and the main portion 33 of the movable circuit 32 is in fluid communication with the cavity 20.
  • the cavity 20 is fluidly isolated from the main portion 33 of the mobile circuit 32.
  • the cavity isolation valve 42 and the vessel isolation valve 41 are placed in the closed configuration, the proximal isolation valve 40 remains in the open configuration.
  • the pressure in the cavity 20 is measured by the local cavity sensor 44, and an alert signal is emitted if the pressure measured in the cavity 20 is above a pre-recorded pressure ceiling acceptable for the cavity 20. .
  • the pressure measured in cavity 20 is greater than a pre-recorded pressure ceiling acceptable for cavity 20, it means that there is a micro-leak in cavity 20.
  • the prerecorded pressure ceiling per unit of acceptable time for the cavity 20 is for example equal to 1 mbar / s.
  • the method comprises:
  • the proximal isolation valve 40, the vessel isolation valve 41, and the cavity isolation valve 42 are in the open configuration.
  • the main portion 33 of the movable circuit 32 is in fluid communication with the movable opening 10 of the rotary joint 8
  • the main portion 33 of the movable circuit 32 is in fluid communication with the interior of the container 4 to be treated
  • the main portion 33 of the mobile circuit 32 is in fluid communication with the cavity 20.
  • the main portion 33 of the mobile circuit 32 is fluidly isolated on the one hand from the cavity 20 and on the other hand from the rotating joint 8.
  • the cavity isolation valve 42 and the vessel isolation valve 41 and the proximal isolation valve 40 are placed in the closed configuration.
  • a temporal drift of the pressure in the main portion 33 of the mobile circuit 32 is measured, and an alert signal is emitted if the temporal drift of the pressure obtained in the main portion 33 of the mobile circuit 32 is greater than an acceptable prerecorded drift for the mobile circuit 32.
  • pressure over time it is understood that the pressure in the main portion 33 of the mobile circuit 32 increases over time, due to the presence of leaks in the mobile circuit 32.
  • a prerecorded drift acceptable for the mobile circuit 32 and for example less than 1 pbar / s.
  • the machine 1 comprises a plurality of mobile treatment stations 3, each connected to a movable opening 10 of the rotating joint 8 specific to said mobile treatment station 3, the method comprising said phase of checking the tightness of the circuit 15. fixed vacuum, then for each of the mobile processing stations 3, at least one of said phases taken from:
  • the method according to the invention makes it possible to accurately and reliably measure the drifts of each local pressure sensor 43, 44, and thus correct the measurement errors during the method, and to allow a reduction of the internal vacuum control ranges to detect more finely possible defects of the process.
  • the method also makes it possible to inform a user of possible leaks in the container processing machine 1 by locating a defect on numerous parts of the machine 1. This makes it possible to intervene in the part comprising the defect, by interrupting the process and correcting the sealing defect, before continuing with the measurements. This ensures that the fault does not affect the following measures.
  • the treatment machine 1 comprises a plurality of fixed pumping groups 5.
  • control method is preferably implemented to check the correct operation of each of these pumping units, in a manner similar to what has been described previously.

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Abstract

The machine (1) for the plasma treatment of containers comprises: a structure (2), a rotary seal (8), at least one pumping unit (5) that is fixed relative to the structure (2), a fixed vacuum circuit (15) sealingly connecting the fixed pumping unit (5) to the fixed opening (9) of the rotary seal (8), at least one station (3) that is able to move relative to the structure (2) and designed to apply a barrier-forming coating to an internal face of the containers (4), at least one local pressure sensor (43, 44) designed to measure a pressure inside the mobile station (3), a reference pressure sensor (45) able to measure the pressure inside the mobile station (3), and a communication element (46) for placing the reference pressure sensor (45), on command, in communication with the fixed vacuum circuit (15).

Description

DESCRIPTION DESCRIPTION
TITRE : Machine de traitement de récipients par plasma et procédé de contrôle de la TITLE: Plasma container processing machine and method for controlling the
machine de traitement processing machine
La présente invention concerne une machine de traitement de récipients par plasma, comprenant : The present invention relates to a plasma container treatment machine, comprising:
- un bâti, - a frame,
- un joint tournant présentant au moins une ouverture fixe et au moins une ouverture mobile et structurée pour assurer un raccordement étanche entre l’ouverture fixe et l’ouverture mobile, - a rotating joint having at least one fixed opening and at least one movable and structured opening to ensure a tight connection between the fixed opening and the movable opening,
- au moins un groupe de pompage fixe par rapport au bâti, - at least one pumping unit fixed in relation to the frame,
- un circuit fixe de vide raccordant de manière étanche le groupe de pompage fixe à l’ouverture fixe du joint tournant, - a fixed vacuum circuit sealingly connecting the fixed pumping unit to the fixed opening of the rotating joint,
- au moins une station mobile par rapport au bâti et conçue pour appliquer un revêtement formant barrière sur une face interne des récipients, ladite station mobile comprenant au moins une cavité pour recevoir au moins un premier récipient à traiter, la station mobile comprenant un circuit mobile raccordant de manière étanche l’ouverture mobile à la cavité, de sorte que le groupe de pompage fixe est apte à établir un vide dans la cavité, et - at least one station mobile relative to the frame and designed to apply a coating forming a barrier on an internal face of the containers, said mobile station comprising at least one cavity for receiving at least a first container to be treated, the mobile station comprising a mobile circuit sealingly connecting the movable opening to the cavity, so that the stationary pumping unit is able to establish a vacuum in the cavity, and
- au moins un capteur local de pression conçu pour mesurer une pression à l’intérieur de la station mobile. - at least one local pressure sensor designed to measure pressure inside the mobile station.
Le traitement de récipients par plasma permet d’appliquer un revêtement formant barrière sur la face interne des récipients, et ainsi d’augmenter l’imperméabilité du récipient, notamment aux gaz. The plasma treatment of containers makes it possible to apply a barrier coating on the inside of the containers, and thus to increase the impermeability of the container, in particular to gases.
La qualité du vide sur les machines de traitement par plasma des récipients en matériau thermoplastique, est un élément crucial intervenant dans la qualité finale du revêtement appliqué : un mauvais vide lors du dépôt du revêtement, lié à une micro-fuite, a pour conséquences de mauvaises performances barrière du revêtement. Un récipient dont le revêtement n’est pas appliqué uniformément est poreux, ce qui n’est pas souhaitable. Par exemple, lorsque le récipient est rempli d’une boisson gazeuse, du gaz est susceptible de s’échapper du récipient pendant son stockage, et ainsi d’entraîner une diminution de qualité de la boisson contenue dans le récipient. Le revêtement permet également d’éviter la pénétration d’air ambiant dans le récipient, ce qui pourrait oxyder le contenu du récipient et le dégrader. La disposition de nombreux capteurs de pression absolue sur la machine ne permet pas de détecter les micro-fuites dans le circuit de vide potentiellement néfastes pour le procédé de traitement des récipients. Cela est dû notamment à une disparité du réglage des zéros des différents capteurs, qui peut atteindre une dizaine de microbars, et à la bande passante des capteurs, du fait de l'inertie du pompage des molécules de gaz dans le capteur dont la durée est de quelques secondes, ainsi que la durée du traitement d’un récipient. The quality of the vacuum on machines for plasma treatment of containers made of thermoplastic material is a crucial element intervening in the final quality of the coating applied: a bad vacuum during the deposition of the coating, linked to a micro-leak, has the consequences of poor barrier performance of the coating. A container with an uneven coating applied is porous, which is undesirable. For example, when the container is filled with a carbonated drink, gas is liable to escape from the container during its storage, and thus lead to a reduction in the quality of the drink contained in the container. The coating also helps prevent the ingress of ambient air into the container, which could oxidize and degrade the contents of the container. The arrangement of numerous absolute pressure sensors on the machine does not make it possible to detect micro-leaks in the vacuum circuit that are potentially harmful to the container treatment process. This is due in particular to a disparity in the adjustment of the zeros of the various sensors, which can reach ten microbars, and to the passband of the sensors, due to the inertia of the pumping of the gas molecules in the sensor, the duration of which is seconds, as well as the duration of treatment of a container.
Le brevet européen EP2024104 de la Demanderesse enseigne une procédure permettant de corriger la disparité de réglage des zéros capteurs. Cependant, un biais généré par des micros-fuites est intégré dans la correction. Les fuites ne sont alors plus mesurées. The Applicant's European patent EP2024104 teaches a procedure making it possible to correct the disparity in the adjustment of the sensor zeros. However, a bias generated by micro-leaks is integrated into the correction. Leaks are then no longer measured.
L’un des buts de l’invention est de pallier les inconvénients ci-dessus. One of the aims of the invention is to overcome the above drawbacks.
A cet effet, la présente invention a pour objet une machine de traitement de récipients du type précité, la machine comprenant en outre un capteur de pression de référence et un élément de mise en communication commandée du capteur de pression de référence avec le circuit fixe de vide, l’élément de mise en communication commandée présentant une configuration ouverte pour permettre le passage d’un fluide entre le capteur de pression de référence et le circuit fixe de vide, et une configuration fermée pour empêcher l’écoulement d’un fluide entre le capteur de pression de référence et le circuit fixe de vide, de sorte que le capteur de pression de référence est apte à mesurer la pression à l’intérieur de la station mobile en parallèle de la mesure faite par le capteur local de pression lorsque l’élément de mise en communication commandée est en configuration ouverte. To this end, the present invention relates to a machine for processing containers of the aforementioned type, the machine further comprising a reference pressure sensor and an element for placing the reference pressure sensor in controlled communication with the fixed circuit. vacuum, the controlled communication element having an open configuration to allow passage of a fluid between the reference pressure sensor and the fixed vacuum circuit, and a closed configuration to prevent the flow of a fluid between the reference pressure sensor and the fixed vacuum circuit, so that the reference pressure sensor is able to measure the pressure inside the mobile station in parallel with the measurement made by the local pressure sensor when the The controlled communication element is in open configuration.
Ainsi, le capteur de référence est configuré pour permettre une correction de calibration du capteur local de pression en cas d’erreur de mesure de celui-ci. En outre, si des dispersions de mesures importantes sont observées entre différents capteurs locaux, la correction de calibration par le capteur de référence permet d’harmoniser les mesures des capteurs locaux et de diminuer ces dispersions. La disposition du capteur de référence sur le circuit fixe de vide permet de n’utiliser qu’un seul capteur de référence pour la correction de calibration de plusieurs capteurs locaux. De plus, le capteur de référence est isolé du circuit fixe de vide par un élément de mise en communication commandée, de façon à préserver le capteur de référence de toutes agressions, par exemple de la poussière, du carbone ou de la graisse, au cours de phases de production et ainsi préserver ses performances de mesure et prolonger sa durée de vie Thus, the reference sensor is configured to allow a calibration correction of the local pressure sensor in the event of a measurement error thereof. In addition, if significant measurement dispersions are observed between different local sensors, the calibration correction by the reference sensor makes it possible to harmonize the measurements of the local sensors and to reduce these dispersions. The arrangement of the reference sensor on the fixed vacuum circuit allows the use of only one reference sensor for the calibration correction of several local sensors. In addition, the reference sensor is isolated from the fixed vacuum circuit by a controlled communication element, so as to protect the reference sensor from all attacks, for example dust, carbon or grease, during production phases and thus preserve its measurement performance and extend its service life
Selon d’autres caractéristiques de la machine de traitement, le capteur de pression de référence présente une erreur de mesure plus faible que chaque capteur local. Le capteur de référence assure ainsi une mesure de pression très précise quant à la pression régnant dans le circuit fixe de vide, ainsi qu’à l’intérieur de la station mobile lorsque l’élément de mise en communication commandée est en configuration ouverte. According to other characteristics of the treatment machine, the reference pressure sensor has a lower measurement error than each local sensor. The reference sensor thus ensures a very precise pressure measurement with regard to the pressure prevailing in the fixed vacuum circuit, as well as inside the mobile station when the controlled communication element is in the open configuration.
Selon d’autres caractéristiques de la machine de traitement, la machine comprend un dispositif de comparaison propre à comparer les pressions mesurées par le capteur de pression de référence et par l’un des au moins un capteur local de pression. According to other characteristics of the treatment machine, the machine includes a comparison device suitable for comparing the pressures measured by the reference pressure sensor and by one of at least one local pressure sensor.
Le résultat issu de la comparaison permet de détecter un défaut de fonctionnement du capteur local dont la mesure de pression est comparée avec le capteur de référence, et la calibration du capteur local pourra être corrigée en fonction du résultat en cas de défaut détecté. The result of the comparison makes it possible to detect an operating fault of the local sensor whose pressure measurement is compared with the reference sensor, and the calibration of the local sensor can be corrected according to the result in the event of a fault detected.
Selon d’autres caractéristiques de la machine de traitement prises isolément ou selon toute combinaison techniquement envisageable : According to other characteristics of the treatment machine taken in isolation or in any technically conceivable combination:
- le circuit mobile comprend une portion principale, et avantageusement, la station mobile comprend au moins une vanne d’isolement proximale structurée pour passer de manière commandable entre une configuration fermée dans laquelle la portion principale du circuit mobile est isolée fluidiquement par rapport à une portion proximale du circuit mobile, laquelle portion proximale est raccordée fluidiquement à l’ouverture mobile du joint tournant, et une configuration ouverte dans laquelle la portion principale du circuit mobile est en communication fluidique avec l’ouverture mobile du joint tournant ; the mobile circuit comprises a main portion, and advantageously, the mobile station comprises at least one proximal isolation valve structured to switch in a controllable manner between a closed configuration in which the main portion of the mobile circuit is fluidly isolated from a portion proximal of the movable circuit, which proximal portion is fluidly connected to the movable opening of the rotary joint, and an open configuration in which the main portion of the movable circuit is in fluid communication with the movable opening of the rotary joint;
- la station mobile comprend au moins une vanne d’isolement de cavité structurée pour passer de manière commandable entre une configuration fermée dans laquelle la portion principale du circuit mobile est isolé fluidiquement par rapport à une portion distale du circuit mobile, laquelle portion distale est raccordée fluidiquement à la cavité, et une configuration ouverte dans laquelle la portion principale du circuit mobile est en communication fluidique avec la cavité ; - the mobile station comprises at least one cavity isolation valve structured to switch in a controllable manner between a closed configuration in which the main portion of the mobile circuit is fluidly isolated from a distal portion of the mobile circuit, which distal portion is connected fluidly to the cavity, and an open configuration in which the main portion of the movable circuit is in fluid communication with the cavity;
- l’un des au moins un capteur local est un capteur local de circuit, en communication fluidique avec la portion principale du circuit mobile; - one of the at least one local sensor is a local circuit sensor, in fluid communication with the main portion of the mobile circuit;
- et/ou l’un des au moins un capteur local est un capteur local de cavité en communication fluidique avec la cavité ; - and / or one of the at least one local sensor is a local cavity sensor in fluid communication with the cavity;
- la cavité de traitement comprend une buse de raccordement du récipient conçue pour recevoir de manière étanche un col du récipient à traiter, le circuit mobile comprenant en outre une portion interne de circuit reliant fluidiquement la portion principale du circuit mobile de vide à ladite buse ; the treatment cavity comprises a container connection nozzle designed to receive in a sealed manner a neck of the container to be treated, the mobile circuit further comprising an internal portion of the circuit fluidly connecting the main portion of the mobile vacuum circuit to said nozzle;
- la station mobile comprend une vanne d’isolement de récipient structurée pour passer de manière commandable entre une configuration fermée dans laquelle la portion principale du circuit mobile est isolée fluidiquement par rapport à la buse de raccordement du récipient, et une configuration ouverte dans laquelle la portion principale du circuit mobile est en communication fluidique avec l’intérieur du récipient à traiter. - the mobile station comprises a container isolation valve structured to switch in a controllable manner between a closed configuration in which the main portion of the mobile circuit is fluidly isolated from the connection nozzle of the container, and an open configuration in which the main portion of the mobile circuit is in fluid communication with the interior of the container to be treated.
De telles dispositions de vannes permettent d’isoler sélectivement les différentes portions du circuit mobile de vide les unes par rapport aux autres ou par rapport au joint tournant, de façon à pouvoir mesurer la pression dans les différentes portions du circuit mobile de vide et ainsi identifier la présence de micro-fuites dans l’une des portions. Cela permet également de mettre en communication la station mobile avec le circuit fixe de vide au cours de la production, pour permettre le pompage de la cavité et du récipient. Such valve arrangements make it possible to selectively isolate the different portions of the mobile vacuum circuit from one another or from the rotating joint, so as to be able to measure the pressure in the different portions of the mobile vacuum circuit and thus identify the presence of micro-leaks in one of the portions. This also allows the mobile station to be placed in communication with the fixed vacuum circuit during production, to allow pumping of the cavity and the container.
Selon d’autres caractéristiques de la machine de traitement : According to other characteristics of the processing machine:
- le groupe de pompage fixe comprend un groupe de pré-pompage et un groupe de pompage poussé, - the fixed pumping group includes a pre-pumping group and a pushed pumping group,
- et avantageusement, le circuit mobile de la station mobile est raccordé par le joint tournant d’une part au circuit fixe de pré-pompage et d’autre part à un circuit fixe de pompage poussé, l’élément de mise en communication commandée en configuration ouverte est agencé pour mettre en communication fluidique le capteur de pression de référence avec le circuit fixe de pompage poussé. - And advantageously, the mobile circuit of the mobile station is connected by the rotary joint on the one hand to the fixed pre-pumping circuit and on the other hand to a fixed pushed pumping circuit, the communication element controlled by open configuration is arranged to put the reference pressure sensor in fluid communication with the fixed pushed pumping circuit.
La disposition du capteur de pression de référence sur le circuit fixe de pompage poussé permet de s’assurer de la qualité du vide créé par le groupe de pompage poussé, déterminant pour la qualité du revêtement appliqué sur la face interne du récipient. The arrangement of the reference pressure sensor on the fixed high pressure pumping circuit ensures the quality of the vacuum created by the high pressure pumping unit, determining the quality of the coating applied to the internal face of the container.
Selon d’autres caractéristiques de la machine de traitement prises isolément ou selon toute combinaison techniquement envisageable : According to other characteristics of the treatment machine taken in isolation or in any technically conceivable combination:
- le joint tournant est un dispositif de distribution autorisant l’écoulement d’un fluide entre l’ouverture fixe et l’au moins une ouverture mobile sur un ou plusieurs secteurs angulaires, dits secteurs passants, et empêchant l’écoulement d’un fluide entre l’ouverture fixe et l’ouverture mobile sur un ou plusieurs secteurs angulaires, complémentaires du ou des secteurs passants ; - the rotary joint is a distribution device allowing the flow of a fluid between the fixed opening and the at least one movable opening on one or more angular sectors, called passing sectors, and preventing the flow of a fluid between the fixed opening and the movable opening on one or more angular sectors, complementary to the passing sector or sectors;
- le joint tournant comprend une première ouverture fixe et une deuxième ouverture fixe disposée en aval de la première ouverture fixe dans le sens de rotation du joint tournant, le circuit fixe de vide comprend un circuit fixe de pré-pompage raccordant le groupe de pré pompage à la première ouverture fixe et un circuit fixe de pompage poussé raccordant le groupe de pompage poussé à la deuxième ouverture fixe, l’élément de mise en communication commandée raccordant le capteur de pression de référence au circuit fixe de pompage poussé. - the rotary joint comprises a first fixed opening and a second fixed opening arranged downstream of the first fixed opening in the direction of rotation of the rotary joint, the fixed vacuum circuit comprises a fixed pre-pumping circuit connecting the pre-pumping unit to the first fixed opening and a fixed pushed pumping circuit connecting the pushed pumping unit to the second fixed opening, the controlled communication element connecting the reference pressure sensor to the fixed pushed pumping circuit.
De cette façon, le joint tournant est connecté à la fois aux groupes de pompage fixes, et par intermittence à chacun des circuits mobiles, permettant de connecter fluidiquement tour à tour chaque circuit mobile avec les groupes de pompage fixe. La présente invention a également pour objet un procédé de contrôle de la machine de traitement de récipients par plasma selon l’invention, le procédé comprenant une phase de correction de la calibration d’un capteur de circuit mobile en communication fluidique avec une portion principale du circuit mobile, au cours de laquelle : In this way, the rotary joint is connected both to the fixed pumping groups, and intermittently to each of the mobile circuits, making it possible to connect each mobile circuit in turn fluidly with the fixed pumping groups. A subject of the present invention is also a method for controlling the plasma container processing machine according to the invention, the method comprising a phase of correcting the calibration of a mobile circuit sensor in fluid communication with a main portion of the device. mobile circuit, during which:
- un ensemble comprenant le circuit fixe, le joint tournant et la station mobile est mis sous vide, - an assembly comprising the fixed circuit, the rotating joint and the mobile station is placed under vacuum,
- puis la cavité est isolée fluidiquement par rapport à la portion principale du circuit mobile, - then the cavity is fluidly isolated from the main portion of the mobile circuit,
- puis le groupe de pompage fixe poursuit la mise sous vide de l’ensemble comprenant le circuit fixe, le joint tournant et la portion principale du circuit mobile de vide, et après une durée prédéterminée, la pression est mesurée simultanément dans le circuit fixe par le capteur de pression de référence, et dans la portion principale du circuit mobile par ledit capteur de circuit, - then the fixed pumping unit continues the vacuuming of the assembly comprising the fixed circuit, the rotating joint and the main portion of the mobile vacuum circuit, and after a predetermined time, the pressure is measured simultaneously in the fixed circuit by the reference pressure sensor, and in the main portion of the mobile circuit by said circuit sensor,
- un écart moyen de la pression mesurée par le capteur de circuit est déterminé par rapport à la mesure du capteur de pression de référence, et la calibration du capteur de circuit mobile est corrigée en retirant ledit écart. an average deviation of the pressure measured by the circuit sensor is determined with respect to the measurement of the reference pressure sensor, and the calibration of the mobile circuit sensor is corrected by removing said deviation.
Il est ainsi possible de détecter un défaut de fonctionnement du capteur de circuit à l’aide du capteur de référence, et de corriger la calibration du capteur de circuit lorsque nécessaire, de façon à limiter les erreurs de mesure du capteur de circuit qui pourraient entraîner une poursuite ou un arrêt intempestifs de production dans le cas d’une fuite non détectée ou au contraire d’une fuite détectée à tort. It is thus possible to detect a malfunction of the circuit sensor using the reference sensor, and to correct the calibration of the circuit sensor when necessary, in order to limit the measurement errors of the circuit sensor which could cause an untimely continuation or stop of production in the event of an undetected leak or, on the contrary, of a wrongly detected leak.
Selon d’autres caractéristiques du procédé de contrôle prises isolément ou selon toute combinaison techniquement envisageable : According to other characteristics of the control process taken in isolation or in any technically conceivable combination:
le procédé comprend : the process includes:
a) une phase de contrôle de l’étanchéité du circuit fixe de vide, au cours de laquelle l’ensemble comprenant le circuit fixe, le joint tournant et la station mobile est mis sous vide par le groupe de pompage fixe ; puis la station mobile est isolée fluidiquement du joint tournant, puis le groupe de pompage fixe poursuit la mise sous vide de l’ensemble comprenant le circuit fixe, le joint tournant et la station mobile, et après une durée prédéterminée, la pression dans le circuit fixe est mesurée par le capteur de pression de référence, et un signal d’alerte est émis si la pression mesurée dans le circuit fixe est supérieure à une pression de validation du circuit fixe, et/ou a) a phase of checking the tightness of the fixed vacuum circuit, during which the assembly comprising the fixed circuit, the rotating joint and the mobile station is evacuated by the fixed pumping unit; then the mobile station is fluidly isolated from the rotating joint, then the stationary pumping unit continues the evacuation of the assembly comprising the fixed circuit, the rotating joint and the mobile station, and after a predetermined time, the pressure in the circuit fixed is measured by the reference pressure sensor, and an alert signal is issued if the pressure measured in the fixed circuit is greater than a validation pressure of the fixed circuit, and / or
b) une phase de contrôle de l’étanchéité de la cavité, au cours de laquelle l’ensemble comprenant le circuit fixe, le joint tournant et la station mobile est mis sous vide; puis la cavité est isolée fluidiquement d’une portion principale du circuit mobile, et après une durée prédéterminée, la pression dans la cavité est mesurée par un capteur local de cavité, et un signal d’alerte est émis si la pression mesurée dans la cavité est supérieure à un plafond de pression préenregistré acceptable pour la cavité, et/ou b) a phase of checking the tightness of the cavity, during which the assembly comprising the fixed circuit, the rotating joint and the mobile station is placed under vacuum; then the cavity is fluidly isolated from a main portion of the mobile circuit, and after a predetermined time, the pressure in the cavity is measured by a local sensor of cavity, and an alert signal is issued if the pressure measured in the cavity is greater than a pre-recorded pressure ceiling acceptable for the cavity, and / or
c) une phase de contrôle de l’étanchéité d’une portion principale du circuit mobile, au cours de laquelle l’ensemble comprenant le circuit fixe, le joint tournant et la station mobile est mis sous vide; puis la portion principale du circuit mobile est isolée fluidiquement d’une part de la cavité et d’autre part du joint tournant, une dérive temporelle de la pression dans la portion principale du circuit mobile est mesurée, et un signal d’alerte est émis si la dérive temporelle de la pression obtenue dans la portion principale du circuit mobile est supérieure à une dérive préenregistrée acceptable pour le circuit mobile ; c) a phase of checking the tightness of a main portion of the mobile circuit, during which the assembly comprising the fixed circuit, the rotating joint and the mobile station is placed under vacuum; then the main portion of the mobile circuit is fluidly isolated on the one hand from the cavity and on the other hand from the rotary joint, a time pressure drift in the main portion of the mobile circuit is measured, and a warning signal is emitted if the time pressure drift obtained in the main portion of the mobile circuit is greater than a prerecorded drift acceptable for the mobile circuit;
- la machine de traitement de récipients par plasma comprend une pluralité de stations de traitement mobiles, chacune raccordée à une ouverture mobile du joint tournant propre à ladite station de traitement mobile, le procédé comprenant ladite phase de contrôle de l’étanchéité du circuit fixe de vide, puis pour chacune des stations de traitement mobile, au moins l’une desdites phases prises parmi : the plasma container treatment machine comprises a plurality of mobile processing stations, each connected to a mobile opening of the rotating joint specific to said mobile processing station, the method comprising said phase of checking the tightness of the fixed circuit of empty, then for each of the mobile processing stations, at least one of said phases taken from:
- une phase de contrôle de l’étanchéité de la cavité de ladite station de traitement mobile, - a phase of checking the leaktightness of the cavity of said mobile treatment station,
- une phase de contrôle de l’étanchéité d’une portion principale du circuit mobile de ladite station de traitement mobile. - a phase of checking the tightness of a main portion of the mobile circuit of said mobile treatment station.
L’étanchéité du circuit fixe de vide, de la cavité et de la portion principale du circuit mobile de vide est vérifiée de façon à assurer une excellente qualité de vide au cours de la production. En outre, lorsqu’une fuite est détectée et signalée dans le circuit fixe, la cavité ou la portion principale du circuit mobile, cela permet d’interrompre le procédé et d’intervenir là où la fuite est détectée avant de poursuivre le procédé de contrôle. The tightness of the fixed vacuum circuit, the cavity and the main portion of the mobile vacuum circuit is checked to ensure excellent vacuum quality during production. In addition, when a leak is detected and signaled in the fixed circuit, the cavity or the main portion of the mobile circuit, it allows the process to be interrupted and to intervene where the leak is detected before continuing the monitoring process. .
Selon d’autres caractéristiques du procédé de contrôle : According to other characteristics of the control process:
le procédé comprend une phase de contrôle de l’étanchéité du circuit fixe de pré pompage par le capteur de circuit. the method includes a phase of checking the tightness of the fixed pre-pumping circuit by the circuit sensor.
Ainsi, une fois la calibration du capteur de circuit corrigée, celui-ci peut être utilisé pour vérifier l’étanchéité du circuit fixe de pré-pompage. Thus, once the calibration of the circuit sensor has been corrected, it can be used to check the tightness of the fixed pre-pumping circuit.
[Fig.1] La figure 1 représente une vue schématique partielle de dessus d’une machine de traitement de récipients selon l’invention ; [Fig.1] Figure 1 shows a partial schematic top view of a container processing machine according to the invention;
[Fig.2] la figure 2 représente une vue d’élévation en coupe montrant une station de traitement mobile équipant la machine de la figure 1 ; [Fig.2] Figure 2 is a sectional elevation view showing a mobile processing station equipping the machine of Figure 1;
[Fig.3] la figure 3 est un schéma de la machine de traitement de récipients selon un mode de réalisation particulier. [Fig.3] Figure 3 is a diagram of the container processing machine according to a particular embodiment.
Sur la figure 1 est représentée une machine 1 de traitement de récipients par plasma comprenant un bâti 2 sur lequel sont montées une ou plusieurs stations 3 de traitement mobiles par rapport au bâti 2 et conçues pour appliquer un revêtement formant barrière sur une face interne de récipients 4 préalablement mis en forme typiquement par soufflage ou étirage soufflage à partir d’une ébauche en matière thermoplastique tel que du polyéthylène téréphtalate (PET). La machine 1 de traitement comprend en outre au moins un groupe 5 de pompage fixe par rapport au bâti 2, et un joint 8 tournant. In Figure 1 is shown a plasma container treatment machine 1 comprising a frame 2 on which are mounted one or more treatment stations 3 movable relative to the frame 2 and designed to apply a coating forming a barrier on an internal face of containers 4 previously shaped, typically by blow molding or stretch blow molding from a blank of thermoplastic material such as polyethylene terephthalate (PET). The treatment machine 1 further comprises at least one pumping unit 5 fixed relative to the frame 2, and a rotating joint 8.
Le bâti 2 est typiquement un carrousel autour duquel sont montées la ou les stations 3 mobiles. The frame 2 is typically a carousel around which the mobile station or stations 3 are mounted.
Le groupe 5 de pompage fixe comprend une pluralité de pompes propres à établir un vide dans différentes parties de la machine 1 , qui seront détaillées ci-après. The stationary pumping group 5 comprises a plurality of pumps suitable for establishing a vacuum in different parts of the machine 1, which will be detailed below.
Avantageusement, le groupe 5 de pompage fixe comprend un groupe 6 de pré pompage et un groupe 7 de pompage poussé. Le groupe 7 de pompage poussé a typiquement une capacité de pompage plus profonde que le groupe 6 de pré-pompage. C’est-à-dire que le pompage poussé permet de descendre à une pression de vide plus basse que le pré-pompage. Advantageously, the stationary pumping group 5 comprises a pre-pumping group 6 and a pushed pumping group 7. The pushing group 7 typically has a deeper pumping capacity than the pre-pumping group 6. That is to say that the high pumping allows to go down to a lower vacuum pressure than the pre-pumping.
Le groupe 6 de pré-pompage comprend typiquement 1 à 2 pompes montées en parallèle l’une de l’autre, cette pompe, ou chacune des pompes pouvant comporter un ou deux étages successifs de pompage en série l’un de l’autre. The pre-pumping group 6 typically includes 1 to 2 pumps mounted in parallel with each other, this pump, or each of the pumps may have one or two successive pumping stages in series with each other.
Le groupe 7 de pompage poussé comprend typiquement trois étages de pompage en série l’un de l’autre de manière à obtenir un vide plus poussé. Toutefois, pour équilibrer les débits de chaque étage de pompage, l’étage de pompage le plus amont peut comporter deux ou trois pompes en parallèle l’une de l’autre. Autrement dit, le groupe 7 de pompage poussé peut comprendre typiquement cinq pompes, et trois étages de pompage. The high pumping group 7 typically comprises three pumping stages in series with each other in order to obtain a higher vacuum. However, to balance the flow rates of each pump stage, the most upstream pump stage may have two or three pumps in parallel with each other. In other words, the pushed pumping group 7 can typically comprise five pumps, and three pumping stages.
Typiquement, le groupe 6 de pré-pompage est propre à établir un vide de 80 pbars pour 1 étage, 15 pbars pour 2 étages et le groupe 7 de pompage poussé est propre à établir un vide de 5 pbars pour 3 étages de pompage. Typically, the pre-pumping group 6 is able to establish a vacuum of 80 pbars for 1 stage, 15 pbars for 2 stages and the pushed pumping group 7 is able to establish a vacuum of 5 pbars for 3 pumping stages.
Le joint 8 tournant présente au moins une ouverture 9 fixe et au moins une ouverture 10 mobile et est structuré pour assurer un raccordement étanche entre l’ouverture 9 fixe et l’ouverture 10 mobile. The rotating seal 8 has at least one fixed opening 9 and at least one movable opening 10 and is structured to provide a sealed connection between the fixed opening 9 and the movable opening 10.
Dans le mode de réalisation où le groupe 5 de pompage fixe comprend un groupe 6 de pré-pompage et un groupe 7 de pompage poussé, le joint 8 tournant comprend avantageusement une première ouverture 11 fixe et une deuxième ouverture 12 fixe disposée en aval de la première ouverture 1 1 fixe dans le sens de rotation du joint 8 tournant. La première ouverture 1 1 fixe est propre à être raccordée au groupe de pré pompage 6. La deuxième ouverture 12 fixe est propre à être raccordée au groupe 7 de pompage poussé. De préférence, le joint 8 tournant comprend plusieurs secteurs 13 angulaires et le joint 8 tournant est un dispositif de distribution autorisant l’écoulement d’un fluide entre l’ouverture 9 fixe et l’ouverture 10 mobile sur un ou plusieurs secteurs angulaires, dits secteurs passants, et empêchant l’écoulement d’un fluide entre l’ouverture 9 fixe et ladite ouverture 10 mobile sur un ou plusieurs secteurs 13 angulaires, complémentaires du ou des secteurs passants. In the embodiment where the stationary pumping group 5 comprises a pre-pumping group 6 and a pushed pumping group 7, the rotating joint 8 advantageously comprises a first fixed opening 11 and a second fixed opening 12 disposed downstream of the first opening 1 1 fixed in the direction of rotation of the rotating joint 8. The first fixed opening 1 1 is suitable for being connected to the pre-pumping group 6. The second fixed opening 12 is suitable for being connected to the pushed pumping group 7. Preferably, the rotating joint 8 comprises several angular sectors 13 and the rotating joint 8 is a distribution device allowing the flow of a fluid between the fixed opening 9 and the movable opening 10 over one or more angular sectors, called passing sectors, and preventing the flow of a fluid between the fixed opening 9 and said movable opening 10 on one or more angular sectors 13, complementary to the passing sector or sectors.
Pour la réalisation concrète du joint tournant, l’homme du métier pourra se référer à la demande internationale WO-05/8631 de la Demanderesse. For the concrete realization of the rotating joint, those skilled in the art may refer to the Applicant's international application WO-05/8631.
La machine 1 comprend en outre un circuit 15 fixe de vide raccordant de manière étanche le groupe 5 de pompage fixe à l’ouverture 9 fixe du joint 8 tournant. The machine 1 further comprises a fixed vacuum circuit 15 sealingly connecting the stationary pumping group 5 to the fixed opening 9 of the rotating joint 8.
Dans le mode de réalisation où le groupe 5 de pompage fixe comprend un groupe 6 de pré-pompage et un groupe 7 de pompage poussé, le circuit 15 fixe de vide comprend un circuit 16 fixe de pré-pompage raccordant le groupe 6 de pré-pompage à la première ouverture 1 1 fixe du joint tournant et un circuit 17 fixe de pompage poussé raccordant le groupe 7 de pompage poussé à la deuxième ouverture 12 fixe. In the embodiment where the fixed pumping group 5 comprises a pre-pumping group 6 and a high pumping group 7, the fixed vacuum circuit 15 comprises a fixed pre-pumping circuit 16 connecting the pre-pumping group 6. pumping to the first fixed opening 1 1 of the rotary joint and a fixed pushed pumping circuit 17 connecting the pumping group 7 to the second fixed opening 12.
Sur la figure 2 est représenté un exemple de station de traitement 3 mobile. Selon un exemple, la machine 1 comprend vingt-quatre stations 3 mobiles. In FIG. 2 is shown an example of a mobile processing station 3. According to one example, the machine 1 comprises twenty-four mobile stations 3.
La station 3 mobile comprend au moins une cavité 20 pour recevoir au moins un premier récipient 4 à traiter. Le récipient 4 comprend typiquement un corps 21 , comprenant une face 22 interne et une face 23 externe, et un col 24. The mobile station 3 comprises at least one cavity 20 for receiving at least a first container 4 to be treated. The container 4 typically comprises a body 21, comprising an internal face 22 and an external face 23, and a neck 24.
La cavité 20 est typiquement réalisée dans un matériau conducteur, par exemple en acier ou (de préférence) en aluminium ou dans un alliage d’aluminium. The cavity 20 is typically made of a conductive material, for example steel or (preferably) aluminum or an aluminum alloy.
La station 3 mobile comprend un générateur 25 de micro-ondes électromagnétiques de faible puissance à une fréquence de 2,45 GHz, relié par un guide d’ondes 26 à la cavité 20. The mobile station 3 comprises a generator 25 of low power electromagnetic microwaves at a frequency of 2.45 GHz, connected by a waveguide 26 to the cavity 20.
A l’intérieur de la cavité 20 est disposée une enceinte 27 réalisée dans un matériau propre à transmettre les micro-ondes électromagnétiques, tel que du quartz. Inside the cavity 20 is disposed an enclosure 27 made of a material suitable for transmitting electromagnetic microwaves, such as quartz.
La cavité 20 et l’enceinte 27 sont fermées par un couvercle 28 amovible permettant la mise en place étanche du récipient 4 dans l’enceinte 27. Le couvercle 28 est traversé par un injecteur 29 pour l’introduction dans le récipient 4 d’un gaz précurseur, tel que de l’acétylène. The cavity 20 and the enclosure 27 are closed by a removable cover 28 allowing the sealed installation of the container 4 in the enclosure 27. The cover 28 is crossed by an injector 29 for the introduction into the container 4 of a precursor gas, such as acetylene.
La cavité 20 comprend une buse 30 de raccordement du récipient 4 conçue pour recevoir de manière étanche le col 24 du récipient 4 à traiter. La buse 30 de raccordement est typiquement montée sur le couvercle 28. The cavity 20 comprises a nozzle 30 for connecting the container 4 designed to receive in a sealed manner the neck 24 of the container 4 to be treated. The connection nozzle 30 is typically mounted on the cover 28.
De préférence, chaque station 3 mobile comprend deux cavités 20 de sorte à traiter simultanément deux récipients 4. La station 3 mobile comprend un circuit 32 mobile de vide raccordant de manière étanche l’ouverture 10 mobile du joint 8 tournant à chaque cavité 20, de sorte que le groupe 5 de pompage fixe est apte à établir un vide dans chaque cavité 20. Preferably, each mobile station 3 comprises two cavities 20 so as to simultaneously process two containers 4. The mobile station 3 comprises a mobile vacuum circuit 32 sealingly connecting the mobile opening 10 of the rotating seal 8 to each cavity 20, so that the stationary pumping unit 5 is able to establish a vacuum in each cavity 20.
Comme représenté sur la figure 3, le circuit 32 mobile comprend une portion 33 principale, une portion 34 interne reliant fluidiquement la portion 33 principale à la buse 30 de raccordement du récipient 4, une portion 35 proximale raccordée fluidiquement à l’ouverture 10 mobile du joint tournant 8, et une portion 36 distale, raccordée fluidiquement à la cavité 20. As shown in Figure 3, the mobile circuit 32 comprises a main portion 33, an internal portion 34 fluidly connecting the main portion 33 to the nozzle 30 for connecting the container 4, a proximal portion 35 fluidly connected to the movable opening 10 of the rotating joint 8, and a distal portion 36, fluidly connected to the cavity 20.
Avantageusement, dans le mode de réalisation où le groupe 5 de pompage fixe comprend un groupe 6 de pré-pompage et un groupe 7 de pompage poussé, le circuit 32 mobile de la station 3 mobile est raccordé par le joint 8 tournant d’une part au circuit 16 fixe de pré-pompage et d’autre part au circuit 17 fixe de pompage poussé. Advantageously, in the embodiment where the stationary pumping group 5 comprises a pre-pumping group 6 and a pushed pumping group 7, the mobile circuit 32 of the mobile station 3 is connected by the rotating joint 8 on the one hand to the fixed pre-pumping circuit 16 and on the other hand to the fixed pushed pumping circuit 17.
Avantageusement, la station 3 mobile comprend au moins une vanne 40 d’isolement proximale structurée pour passer de manière commandable entre une configuration fermée dans laquelle la portion 33 principale du circuit 32 mobile est isolée fluidiquement par rapport à la portion 35 proximale du circuit 32 mobile, et une configuration ouverte dans laquelle la portion 33 principale du circuit 32 mobile est en communication fluidique avec l’ouverture 10 mobile du joint 8 tournant. Advantageously, the mobile station 3 comprises at least one proximal isolation valve 40 structured to switch in a controllable manner between a closed configuration in which the main portion 33 of the mobile circuit 32 is fluidically isolated from the proximal portion 35 of the mobile circuit 32. , and an open configuration in which the main portion 33 of the movable circuit 32 is in fluid communication with the movable opening 10 of the rotating joint 8.
Avantageusement encore, la station 3 mobile comprend une vanne 41 d’isolement de récipient structurée pour passer de manière commandable entre une configuration fermée dans laquelle la portion 33 principale du circuit 32 mobile est isolée fluidiquement par rapport à la buse 30 de raccordement du récipient 4, et une configuration ouverte dans laquelle la portion 33 principale du circuit 32 mobile est en communication fluidique avec l’intérieur du récipient 4 à traiter. Also advantageously, the mobile station 3 comprises a container isolation valve 41 structured to switch in a controllable manner between a closed configuration in which the main portion 33 of the mobile circuit 32 is fluidly isolated from the nozzle 30 for connecting the container 4. , and an open configuration in which the main portion 33 of the mobile circuit 32 is in fluid communication with the interior of the container 4 to be treated.
De préférence, la station 3 mobile comprend au moins une vanne 42 d’isolement de cavité structurée pour passer de manière commandable entre une configuration fermée dans laquelle la portion 33 principale du circuit 32 mobile est isolée fluidiquement par rapport à la portion 36 distale du circuit 32 mobile, et une configuration ouverte dans laquelle la portion 33 principale du circuit 32 mobile est en communication fluidique avec la cavité 20. Preferably, the mobile station 3 comprises at least one cavity isolation valve 42 structured to controllably switch between a closed configuration in which the main portion 33 of the mobile circuit 32 is fluidly isolated from the distal portion 36 of the circuit. 32 mobile, and an open configuration in which the main portion 33 of the mobile circuit 32 is in fluid communication with the cavity 20.
La machine 1 comprend en outre au moins un capteur 43, 44 local de pression conçu pour mesurer une pression à l’intérieur de la station 3 mobile. The machine 1 further comprises at least one local pressure sensor 43, 44 designed to measure a pressure inside the mobile station 3.
Plus particulièrement, le capteur 43, 44 local de pression est propre à mesurer la pression à l’intérieur de la cavité 20 ou à l’intérieur du premier circuit 32 mobile, raccordé à ladite cavité 20. De préférence, l’un des au moins un capteur 43, 44 local est un capteur 43 local de circuit, en communication fluidique avec la portion 33 principale du circuit 32 mobile, et/ou l’un des au moins un capteur 43, 44 local est un capteur 44 local de cavité en communication fluidique avec la cavité 20. More particularly, the local pressure sensor 43, 44 is suitable for measuring the pressure inside the cavity 20 or inside the first mobile circuit 32, connected to said cavity 20. Preferably, one of the at least one local sensor 43, 44 is a local circuit sensor 43, in fluid communication with the main portion 33 of the mobile circuit 32, and / or one of the at least one sensor 43, 44 local is a local cavity sensor 44 in fluid communication with cavity 20.
De préférence, chaque circuit 32 mobile est pourvu d’un capteur 43 local de circuit, et chaque station 3 mobile comprend un capteur 44 local de cavité, même dans le cas où la station 3 comprend une pluralité de cavités 20. Preferably, each mobile circuit 32 is provided with a local circuit sensor 43, and each mobile station 3 comprises a local cavity sensor 44, even in the case where the station 3 comprises a plurality of cavities 20.
La machine 1 comprend en outre un capteur 45 de pression de référence et un élément 46 de mise en communication commandée du capteur 45 de pression de référence avec le circuit 15 fixe de vide. The machine 1 further comprises a reference pressure sensor 45 and an element 46 for placing the reference pressure sensor 45 in controlled communication with the fixed vacuum circuit 15.
Le capteur 45 de pression de référence est propre à mesurer la pression dans le circuit 15 fixe de vide. The reference pressure sensor 45 is suitable for measuring the pressure in the fixed vacuum circuit 15.
En outre, le capteur 45 de pression de référence est apte à mesurer la pression à l’intérieur de la station 3 mobile en parallèle de la mesure faite par le capteur 43, 44 local de pression lorsque l’élément 46 de mise en communication commandée est en configuration ouverte. In addition, the reference pressure sensor 45 is able to measure the pressure inside the mobile station 3 in parallel with the measurement made by the local pressure sensor 43, 44 when the element 46 of commanded communication. is in open configuration.
De préférence, le capteur 45 de pression de référence est un capteur thermostaté. Cela permet d’augmenter la stabilité des mesures réalisées par le capteur 45. Preferably, the reference pressure sensor 45 is a thermostatically controlled sensor. This increases the stability of the measurements made by the sensor 45.
De préférence, le capteur de référence 45 présente une erreur de mesure plus faible que chaque capteur 43, 44 local. Preferably, the reference sensor 45 has a lower measurement error than each local sensor 43, 44.
Par « erreur de mesure d’un capteur», il est entendu un écart entre une valeur indiquée par un signal généré par le capteur et la valeur exacte inconnue de la pression à laquelle est exposé le capteur. Cette erreur de mesure cumule la précision, la linéarité, la calibration d’origine et la dérive temporelle. Par « précision », il est entendu la valeur du seuil de modification de la pression mesurée qui entraîne une modification du signal généré par le capteur. Par « linéarité », il est entendu la constance de la variation du signal généré par le capteur divisé par la variation de la pression à laquelle est exposé le capteur. Par « calibration d’origine », il est entendu l’ajustement d’une pression de référence à une valeur de référence du signal généré. Par « dérive temporelle », il est entendu l’augmentation de l’écart de la mesure avec la vraie valeur au cours du temps. By "measurement error of a sensor" is meant a difference between a value indicated by a signal generated by the sensor and the unknown exact value of the pressure to which the sensor is exposed. This measurement error combines precision, linearity, original calibration and time drift. The term “precision” is understood to mean the value of the modification threshold of the measured pressure which causes a modification of the signal generated by the sensor. By “linearity”, it is understood the constancy of the variation of the signal generated by the sensor divided by the variation of the pressure to which the sensor is exposed. By "original calibration" is meant the adjustment of a reference pressure to a reference value of the generated signal. By "time drift" is meant the increase in the deviation of the measurement from the true value over time.
Par exemple, le capteur 45 de pression de référence a une erreur de mesure inférieure à 1 pbar. Par exemple, chaque capteur 43, 44 local a une erreur de mesure inférieure à 5 pbar (écart-type de 1 ,2pbar). For example, the reference pressure sensor 45 has a measurement error of less than 1 pbar. For example, each local sensor 43, 44 has a measurement error of less than 5 pbar (standard deviation of 1, 2 pbar).
L’élément 46 de mise en communication commandée est typiquement une électrovanne. L’élément 46 de mise en communication commandée présente une configuration ouverte pour permettre le passage d’un fluide entre le capteur 45 de pression de référence et le circuit 15 fixe de vide, et une configuration fermée pour empêcher l’écoulement d’un fluide entre le capteur 45 de pression de référence et le circuit 15 fixe de vide. The controlled communication element 46 is typically a solenoid valve. The controlled communication element 46 has an open configuration to allow passage of a fluid between the reference pressure sensor 45 and the fixed vacuum circuit, and a closed configuration to prevent the flow of a fluid. between the reference pressure sensor 45 and the fixed vacuum circuit 15.
L’élément 46 de mise en communication commandée du capteur 45 de pression de référence permet d’isoler le capteur 45 de pression de référence du circuit 15 fixe de vide lorsqu’il n’est pas utilisé, et ainsi de ralentir l’usure et de diminuer la pollution du capteur 45 de pression de référence, par exemple par de la poussière, du carbone ou de la graisse au cours du fonctionnement normal de la machine de traitement. The element 46 for the controlled communication of the reference pressure sensor 45 makes it possible to isolate the reference pressure sensor 45 from the fixed vacuum circuit 15 when it is not in use, and thus to slow down wear and tear. to reduce the pollution of the reference pressure sensor 45, for example by dust, carbon or grease during normal operation of the treatment machine.
Avantageusement, dans le mode de réalisation où le groupe 5 de pompage fixe comprend un groupe 6 de pré-pompage et un groupe 7 de pompage poussé, l’élément 46 de mise en communication commandée raccorde le capteur 45 de pression de référence au circuit 17 fixe de pompage poussé. Advantageously, in the embodiment where the stationary pumping group 5 comprises a pre-pumping group 6 and a pushed pumping group 7, the controlled communication element 46 connects the reference pressure sensor 45 to the circuit 17 fixed pumping pushed.
De préférence, la machine 1 comprend en outre un dispositif de comparaison, non représenté, propre à comparer les pressions mesurées par le capteur 45 de pression de référence et par l’un des au moins un capteur 43, 44 local de pression. Preferably, the machine 1 further comprises a comparison device, not shown, suitable for comparing the pressures measured by the reference pressure sensor 45 and by one of at least one local pressure sensor 43, 44.
Grâce au capteur de référence 45, il est possible de contrôler l’étanchéité de la machine 1 de manière simple, tel que cela est décrit ci-après. Thanks to the reference sensor 45, it is possible to check the tightness of the machine 1 in a simple manner, as described below.
Un fonctionnement normal de la machine 1 va maintenant être décrit, c’est-à-dire lorsque la machine 1 dépose un revêtement barrière sur la face 22 interne du récipient 4. On commence par introduire un récipient 4 à traiter dans la cavité 20 d’une station 3 mobile, le récipient 4 à traiter est maintenu par le col 24. Normal operation of the machine 1 will now be described, that is to say when the machine 1 deposits a barrier coating on the internal face 22 of the container 4. We begin by introducing a container 4 to be treated in the cavity 20 d. 'a mobile station 3, the container 4 to be treated is held by the neck 24.
Le joint 8 tournant est mis en rotation pour mettre en communication fluidique au fur et à mesure le groupe 5 de pompage fixe avec le circuit 32 mobile, et avec l’intérieur de la cavité 20. The rotating joint 8 is rotated to place the stationary pumping unit 5 in fluid communication with the mobile circuit 32, and with the interior of the cavity 20.
En particulier, le circuit 16 fixe de pré-pompage est mis en communication fluidique avec la première ouverture 1 1 fixe du joint 8 tournant. In particular, the fixed pre-pumping circuit 16 is placed in fluid communication with the first fixed opening 11 of the rotating joint 8.
Le circuit 17 fixe de pompage poussé est mis en communication fluidique avec la deuxième ouverture 12 fixe du joint 8 tournant. The fixed pushed pumping circuit 17 is placed in fluid communication with the second fixed opening 12 of the rotating joint 8.
Une ouverture mobile 9 du joint 8 tournant est mise en communication fluidique avec le circuit 32 mobile de la station 3 mobile. A movable opening 9 of the rotating joint 8 is placed in fluid communication with the mobile circuit 32 of the mobile station 3.
Le groupe 6 fixe de pré-pompage met sous vide le circuit 32 mobile de la station 3 mobile. Pour ce faire, la vanne 40 d’isolement proximale et la vanne 42 d’isolement de cavité sont en configuration ouverte, la vanne 41 d’isolement de récipient est en configuration fermée. La portion 33 principale du circuit 32 mobile est en communication fluidique avec l’ouverture 10 mobile du joint tournant 8 et avec la cavité 20. Lorsque l’intérieur de la cavité 20 est sous vide, la vanne 42 d’isolement de cavité est mise en configuration fermée. The fixed pre-pumping group 6 puts the mobile circuit 32 of the mobile station 3 under vacuum. To do this, the proximal isolation valve 40 and the cavity isolation valve 42 are in the open configuration, the container isolation valve 41 is in the closed configuration. The main portion 33 of the movable circuit 32 is in fluid communication with the movable opening 10 of the rotary joint 8 and with the cavity 20. When the interior of cavity 20 is under vacuum, cavity isolation valve 42 is placed in the closed configuration.
Le groupe 7 fixe de pompage poussé met ensuite sous vide l’intérieur du récipient 4. Pour ce faire, la vanne 40 d’isolement proximale et la vanne 41 d’isolement de récipient sont en configuration ouverte, la vanne 42 d’isolement de cavité sont en configuration fermée. La portion 33 principale du circuit 32 mobile est en communication fluidique avec l’ouverture 10 mobile du joint tournant 8 et avec l’intérieur du récipient 4 à traiter. The fixed high-pumping group 7 then evacuates the interior of the container 4. To do this, the proximal isolation valve 40 and the container isolation valve 41 are in the open configuration, the valve 42 for isolating the container. cavity are in closed configuration. The main portion 33 of the mobile circuit 32 is in fluid communication with the mobile opening 10 of the rotary joint 8 and with the interior of the container 4 to be treated.
Lorsque la pression à l’intérieur du récipient 4 atteint la pression du vide poussé, la vanne 41 d’isolement de récipient est en configuration ouverte, et la vanne 42 d’isolement de cavité est mise configuration fermée. When the pressure inside the vessel 4 reaches the high vacuum pressure, the vessel isolation valve 41 is in the open configuration, and the cavity isolation valve 42 is set to the closed configuration.
L’injecteur 29 introduit un gaz précurseur, tel que de l’acétylène dans le récipient 4 et le générateur 25 de micro-ondes électromagnétiques génère des micro-ondes électromagnétiques afin de casser les molécules de gaz, et de déposer un revêtement formant barrière sur la face interne du récipient 4. The injector 29 introduces a precursor gas, such as acetylene into the vessel 4 and the electromagnetic microwave generator 25 generates electromagnetic microwaves in order to break up the gas molecules, and to deposit a barrier coating on it. the inside of the container 4.
Un procédé de contrôle de la machine va maintenant être décrit. A method of controlling the machine will now be described.
Le procédé de contrôle comprend une phase de correction de la calibration du capteur 43 de circuit, le capteur 43 de circuit étant en communication fluidique avec la portion 33 principale du circuit 32 mobile. The control method comprises a phase of correcting the calibration of the circuit sensor 43, the circuit sensor 43 being in fluid communication with the main portion 33 of the mobile circuit 32.
Pour ce contrôle, aucun récipient 4 n’est introduit dans la cavité 20. Dès lors, tant la vanne 41 d’isolement de récipient, que la vanne 42 d’isolement de cavité peuvent mettre en communication la portion 33 principale du circuit 32 mobile avec la cavité 20. For this check, no receptacle 4 is introduced into the cavity 20. Consequently, both the receptacle isolation valve 41 and the cavity isolation valve 42 can put the main portion 33 of the mobile circuit 32 into communication. with the cavity 20.
Un ensemble comprenant le circuit 15 fixe, le joint 8 tournant et la station 3 mobile est mis sous vide par le groupe 5 de pompage fixe. An assembly comprising the fixed circuit 15, the rotating joint 8 and the mobile station 3 is evacuated by the fixed pumping group 5.
Pour ce faire, la vanne 40 d’isolement proximale, la vanne 41 d’isolement de récipient, et/ou la vanne 42 d’isolement de cavité sont en configuration ouverte. La portion 33 principale du circuit 32 mobile est en communication fluidique avec l’ouverture 10 mobile du joint tournant 8, et la portion 33 principale du circuit 32 mobile est en communication fluidique avec la cavité 20. To do this, the proximal isolation valve 40, the vessel isolation valve 41, and / or the cavity isolation valve 42 are in the open configuration. The main portion 33 of the movable circuit 32 is in fluid communication with the movable opening 10 of the rotary joint 8, and the main portion 33 of the movable circuit 32 is in fluid communication with the cavity 20.
Puis la cavité 20 est isolée fluidiquement par rapport à la portion 33 principale du circuit 32 mobile. Pour ce faire, la vanne 42 d’isolement de cavité et la vanne 41 d’isolement de récipient sont en configuration fermée. Then the cavity 20 is fluidly isolated from the main portion 33 of the mobile circuit 32. To do this, the cavity isolation valve 42 and the vessel isolation valve 41 are in the closed configuration.
Puis le groupe 5 de pompage fixe poursuit la mise sous vide de l’ensemble comprenant le circuit fixe 15, le joint 8 tournant et la station 3 mobile, et après une durée prédéterminée, la pression est mesurée simultanément dans le circuit 15 fixe de vide par le capteur 45 de pression de référence, et dans la portion 33 principale du circuit 32 mobile par ledit capteur 43 de circuit. Un écart moyen de la pression mesurée par le capteur 43 de circuit est déterminé par rapport à la mesure du capteur 45 de pression de référence, et la calibration du capteur 43 de circuit est corrigée en retirant ledit écart. Then the stationary pumping group 5 continues the evacuation of the assembly comprising the fixed circuit 15, the rotating joint 8 and the mobile station 3, and after a predetermined time, the pressure is measured simultaneously in the fixed vacuum circuit 15. by the reference pressure sensor 45, and in the main portion 33 of the mobile circuit 32 by said circuit sensor 43. An average deviation of the pressure measured by the circuit sensor 43 is determined relative to the measurement of the reference pressure sensor 45, and the calibration of the circuit sensor 43 is corrected by removing said deviation.
Il est ainsi possible d’obtenir une calibration de chaque capteur 43 de circuit à l’aide de la pression mesurée par le capteur 45 de pression de référence, et de limiter la variabilité entre les capteurs de circuit 43 de chaque circuit 32 mobile. It is thus possible to obtain a calibration of each circuit sensor 43 using the pressure measured by the reference pressure sensor 45, and to limit the variability between the circuit sensors 43 of each mobile circuit 32.
Avantageusement, le procédé peut comprendre l’une ou plusieurs des phases de contrôle décrites ci-après, à savoir : une phase de contrôle de l’étanchéité du circuit 15 fixe de vide, et/ou une phase de contrôle de l’étanchéité de la cavité 20 et/ou une phase de contrôle de la portion 33 principale du circuit 32 mobile de vide. Ces différents contrôles peuvent avoir lieu sans qu’un récipient 4 ne soit introduit dans la cavité 20. : Advantageously, the method can comprise one or more of the control phases described below, namely: a phase of checking the tightness of the fixed vacuum circuit, and / or a phase of checking the tightness of the vacuum circuit. the cavity 20 and / or a control phase of the main portion 33 of the mobile vacuum circuit 32. These various checks can take place without a container 4 being introduced into cavity 20.:
a) Lors de la phase de contrôle de l’étanchéité du circuit 15 fixe de vide, l’ensemble comprenant le circuit 15 fixe, le joint 8 tournant et la station 3 mobile est mis sous vide par le groupe 5 de pompage fixe. a) During the phase of checking the tightness of the fixed vacuum circuit 15, the assembly comprising the fixed circuit 15, the rotating joint 8 and the mobile station 3 is evacuated by the fixed pumping group 5.
Pour ce faire, la vanne 40 d’isolement proximale, la vanne 41 d’isolement de récipient, et la vanne 42 d’isolement de cavité sont en configuration ouverte. La portion 33 principale du circuit 32 mobile est en communication fluidique avec l’ouverture 10 mobile du joint tournant 8, la portion 33 principale du circuit 32 mobile est en communication fluidique avec la cavité 20. To do this, the proximal isolation valve 40, the vessel isolation valve 41, and the cavity isolation valve 42 are in the open configuration. The main portion 33 of the movable circuit 32 is in fluid communication with the movable opening 10 of the rotary joint 8, the main portion 33 of the movable circuit 32 is in fluid communication with the cavity 20.
Puis la station 3 mobile est isolée fluidiquement du joint 8 tournant. Then the mobile station 3 is fluidly isolated from the rotating joint 8.
Pour ce faire, la vanne 40 d’isolement proximale est mise en configuration fermée. Par ailleurs, la vanne 41 d’isolement de récipient et la vanne 42 d’isolement de cavité peuvent rester en configuration ouverte, mais il est préférable de les fermer toutes les deux. Cela renforce l’isolement. To do this, the proximal isolation valve 40 is placed in the closed configuration. On the other hand, the vessel isolation valve 41 and the cavity isolation valve 42 can remain in the open configuration, but it is preferable to close them both. It reinforces the isolation.
Puis le groupe 5 de pompage fixe poursuit la mise sous vide de l’ensemble comprenant le circuit fixe 15, le joint 8 tournant et la portion 35 proximale du circuit 32 mobile de vide. Then the stationary pumping group 5 continues the evacuation of the assembly comprising the fixed circuit 15, the rotating joint 8 and the proximal portion 35 of the mobile vacuum circuit 32.
Après une durée prédéterminée, la pression dans le circuit 15 fixe est mesurée par le capteur 45 de pression de référence, et un signal d’alerte est émis si la pression mesurée dans le circuit 15 fixe est supérieure à une pression de validation du circuit 15 fixe. Lorsque la pression mesurée dans le circuit 15 fixe est supérieure à une pression de validation du circuit 15 fixe, cela signifie qu’il existe vraisemblablement une micro-fuite dans le circuit fixe 15. After a predetermined period, the pressure in the fixed circuit 15 is measured by the reference pressure sensor 45, and an alert signal is emitted if the pressure measured in the fixed circuit 15 is greater than a validation pressure of the circuit 15. fixed. When the pressure measured in the fixed circuit 15 is greater than a validation pressure of the fixed circuit 15, this means that there is probably a micro-leak in the fixed circuit 15.
La pression de validation du circuit 15 fixe est par exemple égale à 10 pbars. The validation pressure of the fixed circuit 15 is for example equal to 10 pbars.
Cela permet de s’assurer de la qualité du vide à l’intérieur du circuit 15 fixe. De préférence, dans le mode de réalisation où le groupe 5 de pompage fixe comprend un groupe 6 de pré-pompage et un groupe 7 de pompage poussé, le procédé peut comprendre une phase de contrôle de l’étanchéité du circuit 16 fixe de pré-pompage par le capteur 45 de référence : This makes it possible to ensure the quality of the vacuum inside the fixed circuit 15. Preferably, in the embodiment where the stationary pumping group 5 comprises a pre-pumping group 6 and a pushing pumping group 7, the method may include a phase of checking the tightness of the fixed pre-pumping circuit 16. pumping by reference sensor 45:
Au cours de la phase de contrôle du circuit 16 fixe de vide, l’ensemble comprenant le circuit fixe 15, le joint 8 tournant et la station 3 mobile est mis sous vide par le groupe 6 de pré-pompage. During the control phase of the fixed vacuum circuit 16, the assembly comprising the fixed circuit 15, the rotating joint 8 and the mobile station 3 is evacuated by the pre-pumping group 6.
Pour ce faire, la vanne 40 d’isolement proximale, la vanne 41 d’isolement de récipient et/ou la vanne 42 d’isolement de cavité sont en configuration ouverte. La portion 33 principale du circuit 32 mobile est en communication fluidique avec l’ouverture 10 mobile du joint tournant 8, et la portion 33 principale du circuit 32 mobile est en communication fluidique avec la cavité 20. To do this, the proximal isolation valve 40, the vessel isolation valve 41 and / or the cavity isolation valve 42 are in the open configuration. The main portion 33 of the movable circuit 32 is in fluid communication with the movable opening 10 of the rotary joint 8, and the main portion 33 of the movable circuit 32 is in fluid communication with the cavity 20.
Puis la station 3 mobile est isolée fluidiquement du joint 8 tournant. Then the mobile station 3 is fluidly isolated from the rotating joint 8.
Pour ce faire, la vanne 40 d’isolement proximale est mise en configuration fermée, la vanne 41 d’isolement de récipient la vanne 42 d’isolement de cavité peuvent rester en configuration ouverte, mais on préférera les fermer également. To do this, the proximal isolation valve 40 is placed in the closed configuration, the container isolation valve 41 and the cavity isolation valve 42 can remain in the open configuration, but it is preferable to close them also.
Puis le groupe 6 de pré-pompage poursuit la mise sous vide de l’ensemble comprenant le circuit 15 fixe, le joint 8 tournant et la portion 35 proximale du circuit 32 mobile de vide. Then the pre-pumping group 6 continues the evacuation of the assembly comprising the fixed circuit 15, the rotating joint 8 and the proximal portion 35 of the mobile vacuum circuit 32.
Après une durée prédéterminée, la pression dans le circuit 16 fixe de pré-pompage est mesurée par le capteur 45 de pression de référence, et un signal d’alerte est émis si la pression mesurée dans le circuit 16 fixe de pré-pompage est supérieure à une pression de validation du circuit fixe de pré-pompage 16. After a predetermined period, the pressure in the fixed pre-pumping circuit 16 is measured by the reference pressure sensor 45, and an alert signal is emitted if the pressure measured in the fixed pre-pumping circuit 16 is greater. at a validation pressure of the fixed pre-pumping circuit 16.
Si la pression mesurée dans le circuit 16 fixe de pré-pompage est supérieure à une pression de validation du circuit fixe de pré-pompage 16, cela signifie qu’il existe vraisemblablement une micro-fuite dans le circuit fixe de pré-pompage 16. If the pressure measured in the fixed pre-pumping circuit 16 is greater than a validation pressure of the fixed pre-pumping circuit 16, this means that there is likely a micro-leak in the fixed pre-pumping circuit 16.
La pression de validation du circuit 16 fixe de pré-pompage est par exemple égale à 20pbars pour un groupe à 2 étages et 80 pbars pour un groupe à 1 étage. The validation pressure of the fixed pre-pumping circuit 16 is for example equal to 20 pbars for a group with 2 stages and 80 pbars for a group with 1 stage.
En variante ou en complément, le procédé comprend : As a variant or in addition, the method comprises:
b) une phase de contrôle de l’étanchéité de la cavité 20, au cours de laquelle l’ensemble comprenant le circuit fixe 15, le joint 8 tournant et la station 3 mobile est mis sous vide par le groupe 5 de pompage fixe. b) a phase of checking the sealing of the cavity 20, during which the assembly comprising the fixed circuit 15, the rotating joint 8 and the mobile station 3 is evacuated by the fixed pumping group 5.
Aucun récipient 4 n’est introduit dans la cavité 20. La vanne 41 met en communication la portion 33 principale du circuit 32 mobile avec la cavité 20. No container 4 is introduced into the cavity 20. The valve 41 places the main portion 33 of the mobile circuit 32 in communication with the cavity 20.
Pour ce faire, la vanne 40 d’isolement proximale, la vanne 41 d’isolement de récipient, et/ou la vanne 42 d’isolement de cavité sont en configuration ouverte. La portion 33 principale du circuit 32 mobile est en communication fluidique avec l’ouverture 10 mobile du joint tournant 8, et la portion 33 principale du circuit 32 mobile est en communication fluidique avec la cavité 20. To do this, the proximal isolation valve 40, the container isolation valve 41, and / or the cavity isolation valve 42 are in the open configuration. The part 33 main of the movable circuit 32 is in fluid communication with the movable opening 10 of the rotary joint 8, and the main portion 33 of the movable circuit 32 is in fluid communication with the cavity 20.
Puis la cavité 20 est isolée fluidiquement de la portion 33 principale du circuit 32 mobile. Then the cavity 20 is fluidly isolated from the main portion 33 of the mobile circuit 32.
Pour ce faire, la vanne 42 d’isolement de cavité et la vanne 41 d’isolement de récipient sont mises en configuration fermée, la vanne 40 d’isolement proximale reste en configuration ouverte. To do this, the cavity isolation valve 42 and the vessel isolation valve 41 are placed in the closed configuration, the proximal isolation valve 40 remains in the open configuration.
Après une durée prédéterminée, la pression dans la cavité 20 est mesurée par le capteur local de cavité 44, et un signal d’alerte est émis si la pression mesurée dans la cavité 20 est supérieure à un plafond de pression préenregistré acceptable pour la cavité 20. After a predetermined time, the pressure in the cavity 20 is measured by the local cavity sensor 44, and an alert signal is emitted if the pressure measured in the cavity 20 is above a pre-recorded pressure ceiling acceptable for the cavity 20. .
Si la pression mesurée dans la cavité 20 est supérieure à un plafond de pression préenregistré acceptable pour la cavité 20, cela signifie qu’il existe une micro-fuite dans la cavité 20. If the pressure measured in cavity 20 is greater than a pre-recorded pressure ceiling acceptable for cavity 20, it means that there is a micro-leak in cavity 20.
Le plafond de pression préenregistré par unité de temps acceptable pour la cavité 20 est par exemple égal à 1 mbars/s. The prerecorded pressure ceiling per unit of acceptable time for the cavity 20 is for example equal to 1 mbar / s.
En variante ou en complément, le procédé comprend : As a variant or in addition, the method comprises:
c) une phase de contrôle de l’étanchéité d’une portion 33 principale du circuit 32 mobile, au cours de laquelle l’ensemble comprenant le circuit 15 fixe, le joint 8 tournant et la station 3 mobile est mis sous vide par le groupe 5 de pompage fixe. c) a phase of checking the tightness of a main portion 33 of the mobile circuit 32, during which the assembly comprising the fixed circuit 15, the rotating joint 8 and the mobile station 3 is evacuated by the group 5 fixed pumping.
Pour ce faire, la vanne 40 d’isolement proximale, la vanne 41 d’isolement de récipient, et la vanne 42 d’isolement de cavité sont en configuration ouverte. La portion 33 principale du circuit 32 mobile est en communication fluidique avec l’ouverture 10 mobile du joint tournant 8, la portion 33 principale du circuit 32 mobile est en communication fluidique avec l’intérieur du récipient 4 à traiter, et la portion 33 principale du circuit 32 mobile est en communication fluidique avec la cavité 20. To do this, the proximal isolation valve 40, the vessel isolation valve 41, and the cavity isolation valve 42 are in the open configuration. The main portion 33 of the movable circuit 32 is in fluid communication with the movable opening 10 of the rotary joint 8, the main portion 33 of the movable circuit 32 is in fluid communication with the interior of the container 4 to be treated, and the main portion 33 of the mobile circuit 32 is in fluid communication with the cavity 20.
Puis la portion 33 principale du circuit 32 mobile est isolée fluidiquement d’une part de la cavité 20 et d’autre part du joint 8 tournant. Then the main portion 33 of the mobile circuit 32 is fluidly isolated on the one hand from the cavity 20 and on the other hand from the rotating joint 8.
Pour ce faire, la vanne 42 d’isolement de cavité et la vanne 41 d’isolement de récipient et la vanne 40 d’isolement proximale sont mises en configuration fermée. To do this, the cavity isolation valve 42 and the vessel isolation valve 41 and the proximal isolation valve 40 are placed in the closed configuration.
Une dérive temporelle de la pression dans la portion 33 principale du circuit 32 mobile est mesurée, et un signal d’alerte est émis si la dérive temporelle de la pression obtenue dans la portion 33 principale du circuit 32 mobile est supérieure à une dérive préenregistrée acceptable pour le circuit 32 mobile. Par « dérive temporelle de la pression », il est entendu que la pression dans la portion 33 principale du circuit 32 mobile augmente au cours du temps, du fait de la présence de fuites dans le circuit 32 mobile. A temporal drift of the pressure in the main portion 33 of the mobile circuit 32 is measured, and an alert signal is emitted if the temporal drift of the pressure obtained in the main portion 33 of the mobile circuit 32 is greater than an acceptable prerecorded drift for the mobile circuit 32. By “pressure over time”, it is understood that the pressure in the main portion 33 of the mobile circuit 32 increases over time, due to the presence of leaks in the mobile circuit 32.
Une dérive préenregistrée acceptable pour le circuit 32 mobile et par exemple inférieure à 1 pbar/s. A prerecorded drift acceptable for the mobile circuit 32 and for example less than 1 pbar / s.
De préférence, la machine 1 comprend une pluralité de stations de traitement mobiles 3, chacune raccordée à une ouverture 10 mobile du joint 8 tournant propre à ladite station de traitement mobile 3, le procédé comprenant ladite phase de contrôle de l’étanchéité du circuit 15 fixe de vide, puis pour chacune des stations de traitement mobile 3, au moins l’une desdites phases prises parmi : Preferably, the machine 1 comprises a plurality of mobile treatment stations 3, each connected to a movable opening 10 of the rotating joint 8 specific to said mobile treatment station 3, the method comprising said phase of checking the tightness of the circuit 15. fixed vacuum, then for each of the mobile processing stations 3, at least one of said phases taken from:
- une phase de contrôle de l’étanchéité de la cavité 20 de ladite station de traitement mobile 3, - a phase of checking the leaktightness of the cavity 20 of said mobile treatment station 3,
- une phase de contrôle de l’étanchéité de la portion 33 principale du circuit 32 mobile de ladite station de traitement mobile 3. - a phase of checking the tightness of the main portion 33 of the mobile circuit 32 of said mobile treatment station 3.
Le procédé selon l’invention permet de mesurer finement et sûrement les dérives de chaque capteur local 43, 44 de pression, et ainsi corriger les erreurs de mesures pendant le procédé, et de permettre une réduction des plages de contrôle du vide interne pour détecter plus finement d'éventuels défauts du procédé. The method according to the invention makes it possible to accurately and reliably measure the drifts of each local pressure sensor 43, 44, and thus correct the measurement errors during the method, and to allow a reduction of the internal vacuum control ranges to detect more finely possible defects of the process.
Le procédé permet également d'informer un utilisateur d'éventuels défauts d'étanchéité de la machine 1 de traitement de récipients en localisant un défaut sur de nombreuses parties de la machine 1 . Cela permet d’intervenir dans la partie comprenant le défaut, en interrompant le procédé et en corrigeant le défaut d’étanchéité, avant de poursuivre les mesures. Ainsi, on s’assure que le défaut ne se répercute pas dans les mesures suivantes. The method also makes it possible to inform a user of possible leaks in the container processing machine 1 by locating a defect on numerous parts of the machine 1. This makes it possible to intervene in the part comprising the defect, by interrupting the process and correcting the sealing defect, before continuing with the measurements. This ensures that the fault does not affect the following measures.
Selon une variante, la machine 1 de traitement comprend une pluralité de groupes 5 de pompage fixes. According to a variant, the treatment machine 1 comprises a plurality of fixed pumping groups 5.
Selon cette variante, le procédé de contrôle est de préférence mis en oeuvre pour vérifier le bon fonctionnement de chacun de ces groupes de pompage, de façon similaire à ce qui a été décrit auparavant. According to this variant, the control method is preferably implemented to check the correct operation of each of these pumping units, in a manner similar to what has been described previously.

Claims

REVENDICATIONS
1. Machine (1 ) de traitement de récipients (4) par plasma, comprenant : 1. Machine (1) for treating containers (4) by plasma, comprising:
un bâti (2), a frame (2),
un joint (8) tournant présentant au moins une ouverture (9) fixe et au moins une ouverture (10) mobile et structuré pour assurer un raccordement étanche entre l’ouverture (9) fixe et l’ouverture (10) mobile, a rotating seal (8) having at least one fixed opening (9) and at least one movable and structured opening (10) to ensure a tight connection between the fixed opening (9) and the movable opening (10),
au moins un groupe (5) de pompage fixe par rapport au bâti (2), at least one pumping unit (5) fixed relative to the frame (2),
- un circuit (15) fixe de vide raccordant de manière étanche le groupe (5) de pompage fixe à l’ouverture (9) fixe du joint (8) tournant, - a fixed vacuum circuit (15) sealingly connecting the fixed pumping unit (5) to the fixed opening (9) of the rotating seal (8),
au moins une station (3) mobile par rapport au bâti (2) et conçue pour appliquer un revêtement formant barrière sur une face interne des récipients (4), ladite station (3) mobile comprenant au moins une cavité (20) pour recevoir au moins un premier récipient (4) à traiter, la station (3) mobile comprenant un circuit (32) mobile de vide raccordant de manière étanche l’ouverture (10) mobile à la cavité (20), de sorte que le groupe (5) de pompage fixe est apte à établir un vide dans la cavité (20), et at least one station (3) movable with respect to the frame (2) and designed to apply a barrier coating on an internal face of the containers (4), said mobile station (3) comprising at least one cavity (20) for receiving the at least a first container (4) to be treated, the mobile station (3) comprising a mobile vacuum circuit (32) sealingly connecting the mobile opening (10) to the cavity (20), so that the group (5) ) fixed pumping device is able to establish a vacuum in the cavity (20), and
au moins un capteur (43,44) local de pression conçu pour mesurer une pression à l’intérieur de la station (3) mobile, at least one local pressure sensor (43,44) designed to measure pressure inside the mobile station (3),
caractérisée en ce que la machine (1 ) comprend en outre un capteur (45) de pression de référence et un élément (46) de mise en communication commandée du capteur (45) de pression de référence avec le circuit (15) fixe de vide, l’élément (46) de mise en communication commandée présentant une configuration ouverte pour permettre le passage d’un fluide entre le capteur (45) de pression de référence et le circuit (15) fixe de vide, et une configuration fermée pour empêcher l’écoulement d’un fluide entre le capteur (45) de pression de référence et le circuit (15) fixe de vide, de sorte que le capteur (45) de pression de référence est apte à mesurer la pression à l’intérieur de la station (3) mobile en parallèle de la mesure faite par le capteur (43,44) local de pression lorsque l’élément (46) de mise en communication commandée est en configuration ouverte. characterized in that the machine (1) further comprises a reference pressure sensor (45) and an element (46) for placing the reference pressure sensor (45) in controlled communication with the fixed vacuum circuit (15) , the controlled communication member (46) having an open configuration to allow passage of fluid between the reference pressure sensor (45) and the fixed vacuum circuit (15), and a closed configuration to prevent the flow of a fluid between the reference pressure sensor (45) and the fixed vacuum circuit (15), so that the reference pressure sensor (45) is able to measure the pressure within the mobile station (3) in parallel with the measurement made by the local pressure sensor (43,44) when the controlled communication element (46) is in the open configuration.
2. Machine (1 ) de traitement selon la revendication 1 , dans laquelle le capteur (45) de pression de référence présente une erreur de mesure plus faible que chaque capteur (43,44) local. 2. Processing machine (1) according to claim 1, wherein the reference pressure sensor (45) has a lower measurement error than each local sensor (43,44).
3. Machine (1 ) de traitement selon l’une des revendications précédentes, comprenant un dispositif de comparaison propre à comparer les pressions mesurées par le capteur (45) de pression de référence et par l’un des au moins un capteur (43,44) local de pression. 3. Processing machine (1) according to one of the preceding claims, comprising a comparison device suitable for comparing the pressures measured by the reference pressure sensor (45) and by one of the at least one sensor (43, 44) pressure room.
4. Machine (1 ) de traitement de récipients (4) selon l’une des revendications précédentes, dans laquelle le circuit (32) mobile comprend une portion (33) principale, 4. Machine (1) for processing containers (4) according to one of the preceding claims, wherein the mobile circuit (32) comprises a main portion (33),
et avantageusement, la station (3) mobile comprend au moins une vanne (40) d’isolement proximale structurée pour passer de manière commandable entre une configuration fermée dans laquelle la portion (33) principale du circuit (32) mobile est isolée fluidiquement par rapport à une portion (35) proximale du circuit (32) mobile, laquelle portion (35) proximale est raccordée fluidiquement à l’ouverture (10) mobile du joint (8) tournant, et une configuration ouverte dans laquelle la portion (33) principale du circuit (32) mobile est en communication fluidique avec l’ouverture (10) mobile du joint (8) tournant and advantageously, the mobile station (3) comprises at least one proximal isolation valve (40) structured to switch in a controllable manner between a closed configuration in which the main portion (33) of the mobile circuit (32) is fluidly isolated from to a proximal portion (35) of the movable circuit (32), which proximal portion (35) is fluidly connected to the movable opening (10) of the rotating joint (8), and to an open configuration in which the main portion (33) of the movable circuit (32) is in fluid communication with the movable opening (10) of the rotating joint (8)
5. Machine (1) de traitement de récipients (4) selon la revendication précédente, dans laquelle la station (3) mobile comprend au moins une vanne (42) d’isolement de cavité structurée pour passer de manière commandable entre une configuration fermée dans laquelle la portion (33) principale du circuit (32) mobile est isolé fluidiquement par rapport à une portion (36) distale du circuit (32) mobile, laquelle portion (36) distale est raccordée fluidiquement à la cavité (20), et une configuration ouverte dans laquelle la portion (33) principale du circuit (32) mobile est en communication fluidique avec la cavité (20). 5. Machine (1) for processing containers (4) according to the preceding claim, wherein the mobile station (3) comprises at least one structured cavity isolation valve (42) for controllably switching between a closed configuration in wherein the main portion (33) of the movable circuit (32) is fluidly isolated from a distal portion (36) of the movable circuit (32), which distal portion (36) is fluidly connected to the cavity (20), and a open configuration in which the main portion (33) of the mobile circuit (32) is in fluid communication with the cavity (20).
6. Machine (1 ) de traitement de récipients (4) selon la revendication précédente, dans laquelle l’un des au moins un capteur (43,44) local est un capteur (43) local de circuit, en communication fluidique avec la portion (33) principale du circuit (32) mobile; 6. Machine (1) for processing containers (4) according to the preceding claim, wherein one of the at least one local sensor (43,44) is a local circuit sensor (43), in fluid communication with the portion. (33) main circuit (32) mobile;
et/ou l’un des au moins un capteur (43,44) local est un capteur (44) local de cavité en communication fluidique avec la cavité (20). and / or one of the at least one local sensor (43,44) is a local cavity sensor (44) in fluid communication with the cavity (20).
7. Machine (1 ) de traitement de récipients (4) selon l’une des revendications 4 à 6, dans laquelle la cavité (20) de traitement comprend une buse (30) de raccordement du récipient (4) conçue pour recevoir de manière étanche un col du récipient (4) à traiter, le circuit mobile (32) comprenant en outre une portion (34) interne de circuit reliant fluidiquement la portion principale (33) du circuit mobile (32) de vide à ladite buse (30). 7. Machine (1) for processing containers (4) according to one of claims 4 to 6, wherein the treatment cavity (20) comprises a nozzle (30) for connecting the container (4) designed to receive so seals a neck of the container (4) to be treated, the mobile circuit (32) further comprising an internal portion (34) of the circuit fluidly connecting the main portion (33) of the mobile vacuum circuit (32) to said nozzle (30) .
8. Machine (1 ) de traitement de récipients (4) selon la revendication précédente, dans laquelle la station mobile (3) comprend une vanne (41 ) d’isolement de récipient structurée pour passer de manière commandable entre une configuration fermée dans laquelle la portion (33) principale du circuit (32) mobile est isolée fluidiquement par rapport à la buse (30) de raccordement du récipient (4), et une configuration ouverte dans laquelle la portion (33) principale du circuit (32) mobile est en communication fluidique avec l’intérieur du récipient (4) à traiter. 8. Machine (1) for processing containers (4) according to the preceding claim, wherein the mobile station (3) comprises a container isolation valve (41) structured to controllably switch between a closed configuration in which the main portion (33) of the movable circuit (32) is fluidly isolated from the nozzle (30) for connecting the container (4), and an open configuration in which the main portion (33) of the movable circuit (32) is in fluid communication with the interior of the container (4) to be treated.
9. Machine (1 ) de traitement de récipients (4) selon l’une des revendications précédentes, dans laquelle le groupe (5) de pompage fixe comprend un groupe (6) de pré-pompage et un groupe (7) de pompage poussé, et avantageusement, le circuit (32) mobile de la station (3) mobile est raccordé par le joint (8) tournant d’une part au circuit (16) fixe de pré pompage et d’autre part à un circuit (17) fixe de pompage poussé, l’élément (46) de mise en communication commandée en configuration ouverte est agencé pour mettre en communication fluidique le capteur (45) de pression de référence avec le circuit (17) fixe de pompage poussé. 9. Machine (1) for processing containers (4) according to one of the preceding claims, wherein the stationary pumping group (5) comprises a pre-pumping group (6) and a pushing pumping group (7). , and advantageously, the mobile circuit (32) of the mobile station (3) is connected by the rotating joint (8) on the one hand to the fixed pre-pumping circuit (16) and on the other hand to a circuit (17) stationary pressure pumping element (46) controlled in open configuration is arranged to put the reference pressure sensor (45) in fluid communication with the stationary push pumping circuit (17).
10. Machine (1 ) de traitement de récipients (4) selon l’une des revendications précédentes, dans laquelle le joint (8) tournant est un dispositif de distribution autorisant l’écoulement d’un fluide entre l’ouverture(9) fixe et l’au moins une ouverture (10) mobile sur un ou plusieurs secteurs angulaires, dits secteurs passants, et empêchant l’écoulement d’un fluide entre l’ouverture (9) fixe et l’ouverture (10) mobile sur un ou plusieurs secteurs (13) angulaires, complémentaires du ou des secteurs passants. 10. Machine (1) for processing containers (4) according to one of the preceding claims, wherein the rotating joint (8) is a distribution device allowing the flow of a fluid between the opening (9) fixed. and the at least one opening (10) movable over one or more angular sectors, called pass-through sectors, and preventing the flow of a fluid between the fixed opening (9) and the opening (10) movable on one or several angular sectors (13), complementary to the passing sector or sectors.
11. Machine (1 ) de traitement de récipients (4) selon les revendications 9 et 10 prises dans leur ensemble, dans laquelle le joint (8) tournant comprend une première ouverture (11 ) fixe et une deuxième ouverture (12) fixe disposée en aval de la première ouverture (11 ) fixe dans le sens de rotation du joint (8) tournant, le circuit (15) fixe de vide comprend un circuit (16) fixe de pré pompage raccordant le groupe (6) de pré-pompage à la première ouverture (11 ) fixe et un circuit (17) fixe de pompage poussé raccordant le groupe (7) de pompage poussé à la deuxième ouverture (12) fixe, l’élément de mise en (46) communication commandée raccordant le capteur (45)de pression de référence au circuit (17) fixe de pompage poussé. 11. Machine (1) for processing containers (4) according to claims 9 and 10 taken as a whole, wherein the rotating joint (8) comprises a first fixed opening (11) and a second fixed opening (12) arranged downstream of the first fixed opening (11) in the direction of rotation of the rotating joint (8), the fixed vacuum circuit (15) comprises a circuit (16 ) fixed pre-pumping connecting the pre-pumping group (6) to the first fixed opening (11) and a fixed high-pressure pumping circuit (17) connecting the high-pressure pumping group (7) to the second fixed opening (12) , the controlled communication setting element (46) connecting the reference pressure sensor (45) to the fixed pressure pumping circuit (17).
12. Procédé de contrôle d’une machine (1 ) de traitement de récipients (4) par plasma selon l’une quelconque des revendications 6 à 1 1 , dépendantes de la revendication 6, le procédé comprenant une phase de correction de la calibration d’un capteur (43) local de circuit (32) mobile en communication fluidique avec une portion (33) principale du circuit (32) mobile, au cours de laquelle : 12. A method of controlling a machine (1) for treating containers (4) by plasma according to any one of claims 6 to 11, dependent on claim 6, the method comprising a phase of correcting the calibration of 'a local mobile circuit (32) sensor (43) in fluid communication with a main portion (33) of the mobile circuit (32), during which:
un ensemble comprenant le circuit (15) fixe, le joint (8) tournant et la station (3) mobile est mis sous vide, an assembly comprising the fixed circuit (15), the rotating joint (8) and the mobile station (3) is placed under vacuum,
puis la cavité (20) est isolée fluidiquement par rapport à la portion (33) principale du circuit (32) mobile, then the cavity (20) is fluidly isolated from the main portion (33) of the mobile circuit (32),
puis le groupe (5) de pompage fixe poursuit la mise sous vide de l’ensemble comprenant le circuit (15) fixe, le joint (8) tournant et la portion (33) principale du circuit (32) mobile de vide, et après une durée prédéterminée, la pression est mesurée simultanément dans le circuit (15) fixe par le capteur (45) de pression de référence, et dans la portion (33) principale du circuit (32) mobile par ledit capteur (43) de circuit, then the stationary pumping group (5) continues the evacuation of the assembly comprising the stationary circuit (15), the rotating joint (8) and the main portion (33) of the mobile vacuum circuit (32), and after a predetermined time, the pressure is measured simultaneously in the fixed circuit (15) by the reference pressure sensor (45), and in the main portion (33) of the mobile circuit (32) by said circuit sensor (43),
un écart moyen de la pression mesurée par le capteur (43) local de circuit est déterminé par rapport à la mesure du capteur (45) de pression de référence, et la calibration du capteur (43) local de circuit (32) mobile est corrigée en retirant ledit écart. an average deviation of the pressure measured by the local circuit sensor (43) is determined relative to the measurement of the reference pressure sensor (45), and the calibration of the mobile circuit (32) local sensor (43) is corrected by removing said gap.
13. Procédé de contrôle selon la revendication précédente d’une machine (1 ) de traitement de récipients (4) par plasma selon l’une quelconque des revendications 6 à 1 1 , dépendantes de la revendication 6, le procédé comprenant 13. A control method according to the preceding claim of a machine (1) for treating containers (4) by plasma according to any one of claims 6 to 11, dependent on claim 6, the method comprising
a) une phase de contrôle de l’étanchéité du circuit (15) fixe de vide, au cours de laquelle l’ensemble comprenant le circuit (15) fixe, le joint (8) tournant et la station (3) mobile est mis sous vide par le groupe (5) de pompage fixe ; puis la station (3) mobile est isolée fluidiquement du joint (8) tournant, puis le groupe (5) de pompage fixe poursuit la mise sous vide de l’ensemble comprenant le circuit (15) fixe, le joint (8) tournant , et après une durée prédéterminée, la pression dans le circuit (15) fixe est mesurée par le capteur (45) de pression de référence, et un signal d’alerte est émis si la pression mesurée dans le circuit (15) fixe est supérieure à une pression de validation du circuit (15) fixe, et/ou a) a phase of checking the tightness of the fixed vacuum circuit (15), during which the assembly comprising the fixed circuit (15), the rotating seal (8) and the mobile station (3) is evacuated by the stationary pumping group (5); then the mobile station (3) is fluidly isolated from the rotating seal (8), then the stationary pumping unit (5) continues the evacuation of the assembly comprising the fixed circuit (15), the rotating seal (8), and after a predetermined time, the pressure in the fixed circuit (15) is measured by the reference pressure sensor (45), and an alert signal is issued if the pressure measured in the fixed circuit (15) is greater than a fixed circuit validation pressure (15), and / or
b) une phase de contrôle de l’étanchéité de la cavité (20), au cours de laquelle l’ensemble comprenant le circuit (15) fixe, le joint (8) tournant et la station (3) mobile est mis sous vide; puis la cavité (20) est isolée fluidiquement d’une portion (33) principale du circuit (32) mobile, et après une durée prédéterminée, la pression dans la cavité (20) est mesurée par un capteur (44) local de cavité (20), et un signal d’alerte est émis si la pression mesurée dans la cavité (20) est supérieure à un plafond de pression préenregistré acceptable pour la cavité (20), et/ou b) a phase of checking the leaktightness of the cavity (20), during which the assembly comprising the fixed circuit (15), the rotating seal (8) and the mobile station (3) is placed under vacuum; then the cavity (20) is fluidly isolated from a main portion (33) of the mobile circuit (32), and after a predetermined time, the pressure in the cavity (20) is measured by a local cavity sensor (44) ( 20), and an alert signal is issued if the pressure measured in the cavity (20) is greater than a pre-recorded pressure ceiling acceptable for the cavity (20), and / or
c) une phase de contrôle de l’étanchéité d’une portion (33) principale du circuit (32) mobile, au cours de laquelle l’ensemble comprenant le circuit (15) fixe, le joint (8) tournant et la station (3) mobile est mis sous vide; puis la portion (33) principale du circuit mobile (32) est isolée fluidiquement d’une part de la cavité (20) et d’autre part du joint (8) tournant, une dérive temporelle de la pression dans la portion (33) principale du circuit (32) mobile est mesurée, et un signal d’alerte est émis si la dérive temporelle de la pression obtenue dans la portion (33) principale du circuit (32) mobile est supérieure à une dérive préenregistrée acceptable pour le circuit (32) mobile. c) a phase of checking the tightness of a main portion (33) of the mobile circuit (32), during which the assembly comprising the fixed circuit (15), the rotating joint (8) and the station ( 3) mobile is put under vacuum; then the main portion (33) of the mobile circuit (32) is fluidly isolated on the one hand from the cavity (20) and on the other hand from the rotating joint (8), a temporal drift of the pressure in the portion (33) main of the movable circuit (32) is measured, and an alert signal is issued if the time drift of the pressure obtained in the main portion (33) of the movable circuit (32) is greater than a prerecorded drift acceptable for the circuit ( 32) mobile.
14. Procédé de contrôle selon la revendication précédente, dans lequel la machine (1) de traitement de récipients (4) par plasma comprend une pluralité de stations (3) de traitement mobiles, chacune raccordée à une ouverture (10) mobile du joint (8) tournant propre à ladite station (3) de traitement mobile, le procédé comprenant ladite phase de contrôle de l’étanchéité du circuit (15) fixe de vide, puis pour chacune des stations (3) de traitement mobile, au moins l’une desdites phases prises parmi : 14. Control method according to the preceding claim, wherein the machine (1) for processing containers (4) by plasma comprises a plurality of mobile processing stations (3), each connected to a movable opening (10) of the seal ( 8) rotating specific to said mobile treatment station (3), the method comprising said phase of checking the tightness of the fixed vacuum circuit (15), then for each of the mobile treatment stations (3), at least the one of said phases taken from:
une phase de contrôle de l’étanchéité de la cavité (20) de ladite station (3)de traitement mobile, une phase de contrôle de l’étanchéité d’une portion (33) principale du circuit (32) mobile de ladite station de traitement mobile. a phase of checking the tightness of the cavity (20) of said mobile treatment station (3), a phase of checking the tightness of a main portion (33) of the mobile circuit (32) of said mobile processing station.
15. Procédé de contrôle selon l’une quelconque des revendications 12 à 14, d’une machine (1 ) de traitement de récipients (4) par plasma selon la revendication 9, le procédé comprenant une phase de contrôle de l’étanchéité du circuit (16) fixe de pré-pompage par le capteur (43) local de circuit. 15. A method of checking according to any one of claims 12 to 14, of a machine (1) for treating containers (4) by plasma according to claim 9, the method comprising a phase of checking the tightness of the circuit. (16) fixed pre-pumping by the local circuit sensor (43).
PCT/EP2020/055955 2019-03-15 2020-03-06 Machine for the plasma treatment of containers, and method for controlling the treatment machine WO2020187600A1 (en)

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FRFR1902700 2019-03-15
FR1902700A FR3093665A1 (en) 2019-03-15 2019-03-15 Plasma container processing machine and processing machine control method

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2791598A1 (en) * 1999-03-30 2000-10-06 Sidel Sa CAROUSEL MACHINE FOR THE TREATMENT OF HOLLOW BODIES COMPRISING AN IMPROVED PRESSURE DISTRIBUTION CIRCUIT AND DISPENSER FOR SUCH A MACHINE
WO2005008631A2 (en) 2003-07-08 2005-01-27 Softek Storage Solutions Corporation Method and apparatus for creating a storage pool by dynamically mapping replication schema to provisioned storage volumes
US20060150909A1 (en) * 2002-05-24 2006-07-13 Stephan Behle Multi-place coating apparatus and process for plasma coating
EP2024104A2 (en) 2006-06-08 2009-02-18 Sidel Participations Machine for plasma treatment of containers comprising an integrated vacuum circuit

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2791598A1 (en) * 1999-03-30 2000-10-06 Sidel Sa CAROUSEL MACHINE FOR THE TREATMENT OF HOLLOW BODIES COMPRISING AN IMPROVED PRESSURE DISTRIBUTION CIRCUIT AND DISPENSER FOR SUCH A MACHINE
US20060150909A1 (en) * 2002-05-24 2006-07-13 Stephan Behle Multi-place coating apparatus and process for plasma coating
WO2005008631A2 (en) 2003-07-08 2005-01-27 Softek Storage Solutions Corporation Method and apparatus for creating a storage pool by dynamically mapping replication schema to provisioned storage volumes
EP2024104A2 (en) 2006-06-08 2009-02-18 Sidel Participations Machine for plasma treatment of containers comprising an integrated vacuum circuit

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