EP1761705A1 - Vacuum pumping circuit and machine for treating containers equipped with same - Google Patents

Vacuum pumping circuit and machine for treating containers equipped with same

Info

Publication number
EP1761705A1
EP1761705A1 EP05762949A EP05762949A EP1761705A1 EP 1761705 A1 EP1761705 A1 EP 1761705A1 EP 05762949 A EP05762949 A EP 05762949A EP 05762949 A EP05762949 A EP 05762949A EP 1761705 A1 EP1761705 A1 EP 1761705A1
Authority
EP
European Patent Office
Prior art keywords
valve
chamber
pumping circuit
piston
vacuum pumping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP05762949A
Other languages
German (de)
French (fr)
Other versions
EP1761705B1 (en
Inventor
Damien Cirette
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sidel Participations SAS
Original Assignee
Sidel Participations SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sidel Participations SAS filed Critical Sidel Participations SAS
Publication of EP1761705A1 publication Critical patent/EP1761705A1/en
Application granted granted Critical
Publication of EP1761705B1 publication Critical patent/EP1761705B1/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/12—Valves; Arrangement of valves arranged in or on pistons

Definitions

  • the present invention relates to a vacuum pumping circuit and a machine for processing containers, especially bottles.
  • the present invention more particularly relates to a vacuum pumping circuit of a container processing machine by depositing an inner barrier coating by means of a microwave plasma comprising:
  • valve guided in sliding along a substantially vertical axis in a corresponding opening in the upper transverse wall of the upper chamber, between a closed down axial position in which the head of the valve closes the connection orifice, and a high open axial position, of the type in which the valve comprises a rod which extends axially upwards outside the upper chamber, the valve stem being connected to means capable of controlling the valve at least towards its open position .
  • the present invention aims to overcome these disadvantages.
  • the invention proposes a vacuum pumping circuit of the type described above, characterized in that the valve stem is provided with a section forming a piston which constitutes the movable upper wall of a control chamber communicating with the upper chamber, the piston having an upper face permanently subjected to the pressure of the atmospheric air and a lower face subjected to the pressure in the control chamber so that when the pressure in the lower chamber reaches the final value; , the valve is kept in the closed position under the effect of the pressure differential between the two faces of the piston.
  • the upper transverse wall comprises an annular spacer which is interposed axially between the opening and the control chamber, which comprises a central duct for axial guiding of the valve stem, and which is provided with channels making the connection between the chamber command and the upper chamber;
  • a vacuum-tight metal bellows is interposed axially between the outer peripheral edge of the piston and the outer peripheral edge of an axial section of the spacer; forming the outer peripheral wall of the control chamber along the valve stem;
  • valve comprises an axial skirt which is linked in axial sliding with the valve stem and which envelops the bellows and the piston;
  • the upper end section of the valve stem cooperates with means, such as a cam mechanism, so as to control the sliding of the valve towards its open position;
  • the cam mechanism comprises a control surface which controls the movement of the valve towards its closed position
  • the head of the valve is attached to the lower end of the valve stem;
  • connection orifice comprises an upper transverse flange
  • valve head has a lower transverse closure surface which is provided with an annular sealing gasket and which is designed to come into axial tight support against the transverse flange; when the valve is in its closed position;
  • the invention also proposes a machine for treating containers; in particular bottles, by deposition of an inner coating forming a barrier by means of a microwave plasma, in particular with a view to enabling the conditioning of oxidic-sensitive liquids in the containers, comprising at least one treatment station for a container each treatment station comprising:
  • a treatment chamber which is intended to contain the container and which delimits a cavity around the container
  • a cover which is provided to close the enclosure hermetically and which comprises a pumping conduit sealingly connected inside the container, characterized in that the cover is equipped with a pumping circuit according to the invention.
  • FIG. 1 is an axial sectional view which shows schematically a processing station of the machine equipped with a vacuum pumping circuit made according to the teachings of the invention during a first pumping phase;
  • FIG. 2 is a view similar to that of FIG. 1, which represents the treatment station during a second pumping phase;
  • FIG. 3 is an axial sectional view which schematically shows a connecting portion of the vacuum pumping circuit equipped with a valve occupying its open axial position;
  • Figure 4 is a view similar to that of Figure 4 which shows the valve in the closed axial position
  • FIG. 5 is a perspective view which shows schematically the lid equipped with the valve according to the teachings of the invention when it occupies its closed position.
  • FIGs 1 and 2 there is shown partially a machine 10 for processing containers 12, here shown in the form of bottles, which is equipped with a vacuum pumping circuit 14 made in accordance with the teachings of the invention.
  • the machine 10 is intended to deposit an inner barrier coating by means of a microwave plasma, in particular to allow the conditioning of a liquid-sensitive liquid in the containers 12.
  • the machine 10 has a plurality of processing stations 16 which can be circumferentially distributed evenly over a rotating carousel (not shown), each treatment station 16 being provided to process a container 12 at a time.
  • the treatment station 16 comprises a treatment chamber 18 which is designed to contain the receptacle 12 and which delimits a cavity 20 around the receptacle 12.
  • the container 12 is arranged here vertically with its opening upwards.
  • the treatment station 16 also comprises a cover 22 which is provided to close the enclosure 18 in a hermetic manner, delimiting the upper end of the cavity 20, and which comprises a pumping conduit 24 sealingly connected inside. of the container 12.
  • the pumping duct 24 is connected by a first end 26 to a vacuum pump 28.
  • the second end 30 of the pumping conduit 24 communicates with the cavity 20 of the treatment chamber 18 via a connecting portion 32 which is arranged here in an end portion of the cover 22.
  • the lid 22 also comprises an injector 33 of a precursor gas, for example acetylene in the case of a carbonaceous deposit, which injector is provided with an injection tube 35 extending axially inside the container 12.
  • a precursor gas for example acetylene in the case of a carbonaceous deposit
  • the connecting portion 32 is shown in greater detail in FIGS. 3 and 4.
  • the connecting portion 32 of the vacuum pumping circuit 14 comprises an upper chamber 34 and a chamber lower 36 which communicate through a connection port 38.
  • the lower chamber 36 is connected to the cavity 20 delimited by the treatment chamber 18 and the upper chamber 34 is connected to the pumping conduit 24 at the second end 30.
  • the connecting portion 32 comprises a valve 40 which is slidably guided along a substantially vertical axis A1, between a closed down axial position, which is shown in FIGS. 2 and 4, in which the head 42 of the valve 40 comes to close. connection port 38, and a high open axial position, which is shown in FIGS. 1 and 3.
  • a vertical axial orientation along the axis A1 of sliding of the valve 40 is defined in a nonlimiting manner. Elements will be described as transversal with reference to this axis A1.
  • the valve 40 is slidably mounted in a corresponding opening 44 of the upper transverse wall 46 of the upper chamber 34.
  • the upper transverse wall 46 is constituted here by the upper transverse wall of the lid 22.
  • the valve 40 comprises a rod 48 which extends axially upwards outside the upper chamber 34 and which is connected to means 50 capable of controlling the sliding of the valve 40 at least towards its open position.
  • the rod 48 is provided with a section forming a piston 52 which constitutes the movable upper wall of a control chamber 54 communicating with the upper chamber 34.
  • the piston 52 here has a generally cylindrical shape coaxial with the rod 48 and is made integrally with the rod 48.
  • the piston 52 has a transverse upper face 56, which is subjected continuously to atmospheric air pressure and a lower face 58, also transverse, which is subjected to the pressure prevailing in the control chamber 54.
  • the upper transverse wall 46 comprises an annular spacer 60 which is interposed axially between the opening 44 and the control chamber 54.
  • the spacer 60 comprises a generally cylindrical and tubular main body which is traversed axially, from its lower end to its upper end, by a central duct 64.
  • the rod 48 is guided axially by the internal axial walls of the central duct 64.
  • the spacer 60 comprises an upper portion 66, in the form of a radial flange whose upper transverse face 68 is arranged axially vis-à-vis the lower face 58 of the piston 52 so as to define axially the control chamber 54.
  • the lower end section 70 of the spacer 60 is here screwed into the opening 44 until a lower radial flange 72 of the spacer 60 comes into axial tight support against the upper face 74 of the transverse wall superior 46.
  • the lower radial flange 72 is provided here with an O-ring 76 which interposes axially between the lower radial flange 72 and the upper transverse wall 46.
  • the spacer 60 is provided with axial channels 78 which are arranged in its radial thickness and which make the connection between the control chamber 54 and the upper chamber 34.
  • Each axial channel 78 opens into the outer axial face 80 of the upper end section of the spacer 60 and ⁇ in the bottom end transverse face 82 of the spacer 60.
  • a vacuum-tight metal bellows 84 is interposed axially between the outer peripheral edge of the lower face 58 of the piston 52 and the outer peripheral edge of the radial flange constituting the upper portion 66 of the spacer.
  • the bellows 84 is coaxial with the rod 48 and constitutes the outer peripheral wall of the control chamber 54 along the rod 48.
  • the valve 40 comprises an axial skirt 86 which is axially slidably connected to the rod 48 and which surrounds the bellows 84 and the piston 52.
  • the head 42 of the valve 40 here has a cylindrical shape and is attached to the lower end of the rod 48.
  • connection orifice 38 here comprises a transverse rim 88 upper.
  • the head 42 of the valve 40 has a bottom transverse surface 90 of closure which is provided with an annular sealing gasket 92 and which is designed to bear tightly against the transverse flange 88 when the valve 40 is in its closed position. as shown in Figures 2 and 4.
  • the means 50 capable of controlling the sliding of the valve 40 at least towards its open position are constituted by a cam mechanism which cooperates with the upper end section 94 of the rod 48 so as to controlling the sliding of the valve 40 to its open position and controlling the movement of the valve 40 to its closed position.
  • the cam mechanism 50 here comprises a lever 96 which is pivotally mounted on the cover 22 about a transverse axis A2. The pivoting of the lever 96 is linked to the sliding of the valve 40 by means of a set of rods 98.
  • the lever 96 carries a roller 100 which is provided to cooperate with a control surface (not shown) of the machine 10.
  • the control surface has a plurality of sections that are provided to cause pivoting of the lever 96 and drive the valve 40 adequately to one of its two extreme axial positions.
  • the method of treatment of the container 12 by the machine 10 comprises a preliminary step during which the vacuum pumping circuit 14 causes a decrease in the pressure inside the cavity 20 to a determined value, said external final value.
  • Ia final internal value PFJ n t is about 0.1 mbar and the final external value pF ⁇ Xt is about 50 mbar, so that the vacuum is greater in the container 12 in the cavity 20.
  • the preliminary step is followed by a processing step in which the final values pF ext , pF in t are maintained in the cavity 20 and in the container 12 to allow the deposition of the inner coating in the container 12.
  • the precursor gas is injected into the container 12, via the injector 33, and subjected to the action of microwaves so that it switches to the state of plasma and causes barrier coating deposition (carbonized when the precursor is acetylene-based) on the inner walls of the container 12.
  • This deposit constitutes an inner barrier coating, for example against oxygen molecules and carbon dioxide .
  • the preliminary step comprises a first phase, which is illustrated in FIG. 1, during which the pumping is performed simultaneously in the cavity 20 and in the container 12 and a second phase, which is illustrated in FIG. from which the pumping is carried out only in the container 12.
  • the first phase ends when the pressure in the cavity 20 reaches the external final value pF ⁇ X t-
  • the pressure decreases inside the vacuum pump circuit 14, in particular in the upper chamber 34 which communicates with the control chamber 54.
  • the pressure in the control chamber 54 therefore decreases simultaneously, which creates a pressure differential between the upper face 56 and the lower face 58 of the piston 52, since the upper face 56 is subjected to the atmospheric pressure prevailing outside. of the vacuum pump circuit 14.
  • the cam mechanism 50 holds the valve 40 in the open position until the pressure in the cavity 20 reaches its external final value pF ext .
  • the cam mechanism 50 controls the displacement of the valve 40 so that it gradually descends to its closed position (FIGS. 2 and 4).
  • the vacuum pump circuit 14 continues the pumping only in the container 12 until reaching the internal final value pFj nt , which is lower than the pressure in the cavity 20.
  • the processing step can be implemented.
  • the vacuum is maintained in the cavity 20, by the hermetic closure of the chamber 18, and in the container 12, by continuous pumping and regulated by means of the vacuum pump 28.
  • the interior of the container 12 and the cavity 20 are returned to atmospheric pressure.
  • the cam mechanism 50 controls the opening of the valve 40.
  • valve 40 does not require the action of the cam mechanism 50 or the action of an elastic return means to be retained. axially in its closed position. Indeed, the valve 40 is held in its closed position under the sole action of the pressure differential between the two faces of the piston 52.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Closures For Containers (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Stereo-Broadcasting Methods (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Fluid-Driven Valves (AREA)

Abstract

The invention concerns a vacuum pumping circuit comprising: an upper chamber (34) and a lower chamber (36) communicating via a connecting orifice (38), and comprising a valve (40) provided with a rod slidably guided along a vertical axis (A1) to close the connecting orifice (38). The invention is characterized in that the valve rod (48) is provided with a section forming a piston (52) which forms the mobile upper wall of a control chamber (54) communicating with the upper chamber (34), the piston (52) including an upper surface (56) subjected to the pressure of atmospheric air and a lower surface (58) subjected to the pressure prevailing in the control chamber (54). The invention also concerns a machine equipped with said pumping circuit.

Description

"Circuit de pompage à vide et machine de traitement de récipients équipée de ce circuit" "Vacuum pump circuit and container processing machine equipped with this circuit"
La présente invention concerne un circuit de pompage à vide et une machine de traitement de récipients, notamment de bouteilles.The present invention relates to a vacuum pumping circuit and a machine for processing containers, especially bottles.
La présente invention concerne plus particulièrement un circuit de pompage à vide d'une machine de traitement de récipients par dépôt d'un revêtement interne formant barrière au moyen d'un plasma micro-ondes comportant :The present invention more particularly relates to a vacuum pumping circuit of a container processing machine by depositing an inner barrier coating by means of a microwave plasma comprising:
- une chambre supérieure et une chambre inférieure qui communiquent par un orifice de raccordement, la chambre inférieure étant raccordée à une cavité et la chambre supérieure étant raccordée à une pompe à vide qui est prévue pour faire le vide dans la cavité jusqu'à ce que la pression dans la cavité atteigne une valeur déterminée dite valeur finale,an upper chamber and a lower chamber communicating via a connecting orifice, the lower chamber being connected to a cavity and the upper chamber being connected to a vacuum pump which is intended to evacuate the cavity until the pressure in the cavity reaches a determined value called final value,
- et comportant une soupape guidée en coulissement suivant un axe sensiblement vertical dans une ouverture correspondante de la paroi transversale supérieure de la chambre supérieure, entre une position axiale basse fermée, dans laquelle la tête de la soupape vient fermer l'orifice de raccordement, et une position axiale haute ouverte, du type dans lequel la soupape comporte une tige qui s'étend axialement vers le haut en dehors de la chambre supérieure, la tige de soupape étant reliée à des moyens susceptibles de commander la soupape au moins vers sa position ouverte.and comprising a valve guided in sliding along a substantially vertical axis in a corresponding opening in the upper transverse wall of the upper chamber, between a closed down axial position in which the head of the valve closes the connection orifice, and a high open axial position, of the type in which the valve comprises a rod which extends axially upwards outside the upper chamber, the valve stem being connected to means capable of controlling the valve at least towards its open position .
Pour maintenir la soupape en position fermée, par exemple le temps de traiter un récipient en réalisant le dépôt du revêtement interne, il est connu d'utiliser un ressort à boudin de compression qui sollicite axialement la soupape vers sa position fermée.To maintain the valve in the closed position, for example the time to treat a container by performing the deposition of the inner liner, it is known to use a compression coil spring which biases the valve axially towards its closed position.
Cette solution n'est pas complètement satisfaisante car le ressort pose des problèmes de fiabilité. Il arrive notamment que le ressort casse sous les sollicitations mécaniques auxquelles il est soumis. Dans le cas d'un circuit de pompage équipant un poste de traitement agencé sur un carrousel rotatif, il est également connu de maintenir la soupape en position fermée au moyen d'un système à came, par exemple au moyen d'un galet solidaire de la tige de soupape et d'une surface de commande fixe.This solution is not completely satisfactory because the spring poses reliability problems. It happens in particular that the spring breaks under the mechanical stresses to which it is subjected. In the case of a pumping circuit fitted to a treatment station arranged on a rotary carousel, it is also known to maintain the valve in the closed position by means of a cam system, for example by means of a roller secured to the valve stem and a fixed control surface.
Cette solution n'est pas non plus complètement satisfaisante car elle nécessite une surface de commande de longueur importante, ainsi que des ajustements précis pour assurer l'étanchéité de la fermeture. De plus, l'usure du galet ou de la surface de commande peut détériorer l'étanchéité de la soupape.This solution is also not completely satisfactory because it requires a control surface of long length, as well as precise adjustments to ensure the tightness of the closure. In addition, wear of the roller or the control surface can damage the seal of the valve.
La présente invention vise notamment à remédier à ces inconvénients.The present invention aims to overcome these disadvantages.
Dans ce but, l'invention propose un circuit de pompage à vide du type décrit précédemment, caractérisé en ce que la tige de soupape est pourvue d'un tronçon formant un piston qui constitue la paroi supérieure mobile d'une chambre de commande communicant avec la chambre supérieure, le piston comportant une face supérieure soumise en permanence à la pression de l'air atmosphérique et une face inférieure soumise à la pression régnant dans la chambre de commande de manière que, lorsque la pression dans la chambre inférieure atteint la valeur finale, la soupape est maintenue en position fermée sous l'effet du différentiel de pression entre les deux faces du piston.For this purpose, the invention proposes a vacuum pumping circuit of the type described above, characterized in that the valve stem is provided with a section forming a piston which constitutes the movable upper wall of a control chamber communicating with the upper chamber, the piston having an upper face permanently subjected to the pressure of the atmospheric air and a lower face subjected to the pressure in the control chamber so that when the pressure in the lower chamber reaches the final value; , the valve is kept in the closed position under the effect of the pressure differential between the two faces of the piston.
Selon d'autres caractéristiques de l'invention :According to other features of the invention:
- Ia paroi transversale supérieure comporte une entretoise annulaire qui est intercalée axialement entre l'ouverture et la chambre de commande, qui comporte un conduit central pour le guidage axial de la tige de soupape, et qui est pourvue de canaux réalisant le raccordement entre la chambre de commande et la chambre supérieure ;- The upper transverse wall comprises an annular spacer which is interposed axially between the opening and the control chamber, which comprises a central duct for axial guiding of the valve stem, and which is provided with channels making the connection between the chamber command and the upper chamber;
- un soufflet métallique étanche au vide est interposé axialement entre le bord périphérique externe du piston et le bord périphérique externe d'un tronçon axial de l'entretoise de manière à former la paroi périphérique externe de la chambre de commande le long de la tige de soupape ;a vacuum-tight metal bellows is interposed axially between the outer peripheral edge of the piston and the outer peripheral edge of an axial section of the spacer; forming the outer peripheral wall of the control chamber along the valve stem;
- la soupape comporte une jupe axiale qui est liée en coulissement axial à la tige de soupape et qui enveloppe le soufflet et le piston ;the valve comprises an axial skirt which is linked in axial sliding with the valve stem and which envelops the bellows and the piston;
- le tronçon d'extrémité supérieure de la tige de soupape coopère avec des moyens, tels qu'un mécanisme à came, de manière à commander le coulissement de la soupape vers sa position ouverte ;the upper end section of the valve stem cooperates with means, such as a cam mechanism, so as to control the sliding of the valve towards its open position;
- le mécanisme à came comporte une surface de commande qui contrôle le déplacement de la soupape vers sa position fermée ;the cam mechanism comprises a control surface which controls the movement of the valve towards its closed position;
- la tête de la soupape est rapportée sur l'extrémité inférieure de la tige de soupape ;the head of the valve is attached to the lower end of the valve stem;
- l'orifice de raccordement comporte un rebord transversal supérieur, et la tête de la soupape comporte une surface transversale inférieure de fermeture qui est pourvue d'un joint annulaire d'étanchéité et qui est prévue pour venir en appui axial étanche contre le rebord transversal lorsque la soupape occupe sa position fermée ;the connection orifice comprises an upper transverse flange, and the valve head has a lower transverse closure surface which is provided with an annular sealing gasket and which is designed to come into axial tight support against the transverse flange; when the valve is in its closed position;
L'invention propose aussi une machine de traitement de récipients; en particulier des bouteilles, par dépôt d'un revêtement interne formant barrière au moyen d'un plasma micro-ondes, notamment en vue de permettre le conditionnement de liquides oxydo-sensibles dans les récipients, comportant au moins un poste de traitement pour un récipient, chaque poste de traitement comprenant :The invention also proposes a machine for treating containers; in particular bottles, by deposition of an inner coating forming a barrier by means of a microwave plasma, in particular with a view to enabling the conditioning of oxidic-sensitive liquids in the containers, comprising at least one treatment station for a container each treatment station comprising:
- une enceinte de traitement qui est prévue pour contenir le récipient et qui délimite autour du récipient une cavité,a treatment chamber which is intended to contain the container and which delimits a cavity around the container,
- et, un couvercle qui est prévu pour fermer l'enceinte de manière hermétique et qui comporte un conduit de pompage raccordé de manière étanche à l'intérieur du récipient, caractérisée en ce que le couvercle est équipé d'un circuit de pompage selon l'une quelconque des revendications précédentes, en ce que la chambre inférieure est raccordée de manière étanche à la cavité délimitée par l'enceinte, et en ce que la chambre supérieure est raccordée au conduit de pompage.and a cover which is provided to close the enclosure hermetically and which comprises a pumping conduit sealingly connected inside the container, characterized in that the cover is equipped with a pumping circuit according to the invention. any of the claims previous, in that the lower chamber is sealingly connected to the cavity defined by the enclosure, and in that the upper chamber is connected to the pumping conduit.
D'autres caractéristiques et avantages de l'invention apparaîtront à la lecture de la description détaillée qui suit pour la compréhension de laquelle on se reportera aux dessins annexés dans lesquels :Other features and advantages of the invention will appear on reading the detailed description which follows for the understanding of which reference will be made to the appended drawings in which:
- la figure 1 est une vue en coupe axiale qui représente schématiquement un poste de traitement de la machine équipé d'un circuit de pompage à vide réalisé conformément aux enseignements de l'invention au cours d'une première phase de pompage ;- Figure 1 is an axial sectional view which shows schematically a processing station of the machine equipped with a vacuum pumping circuit made according to the teachings of the invention during a first pumping phase;
- Ia figure 2 est une vue similaire à la celle de la figure 1 qui représente le poste de traitement au cours d'une seconde phase de pompage ;FIG. 2 is a view similar to that of FIG. 1, which represents the treatment station during a second pumping phase;
- la figure 3 est une vue en coupe axiale qui représente schématiquement une portion de raccordement du circuit de pompage à vide équipée d'une soupape occupant sa position axiale ouverte ;- Figure 3 is an axial sectional view which schematically shows a connecting portion of the vacuum pumping circuit equipped with a valve occupying its open axial position;
- la figure 4 est une vue similaire à celle de la figure 4 qui représente la soupape en position axiale fermée ;- Figure 4 is a view similar to that of Figure 4 which shows the valve in the closed axial position;
- la figure 5 est une vue en perspective qui représente schématiquement le couvercle équipé de la soupape conforme aux enseignements de l'invention lorsqu'elle occupe sa position fermée.- Figure 5 is a perspective view which shows schematically the lid equipped with the valve according to the teachings of the invention when it occupies its closed position.
Dans la description qui va suivre, des éléments identiques, similaires ou analogues seront désignés par les mêmes chiffres de référence.In the following description, identical, similar or similar elements will be designated by the same reference numerals.
Sur les figures 1 et 2, on a représenté partiellement une machine 10 de traitement de récipients 12, ici représentés sous la forme de bouteilles, qui est équipée d'un circuit de pompage à vide 14 réalisé conformément aux enseignements de l'invention.In Figures 1 and 2, there is shown partially a machine 10 for processing containers 12, here shown in the form of bottles, which is equipped with a vacuum pumping circuit 14 made in accordance with the teachings of the invention.
La machine 10 vise à réaliser le dépôt d'un revêtement interne formant barrière au moyen d'un plasma micro-ondes, notamment en vue de permettre le conditionnement d'un liquide oxydo-sensible dans les récipients 12.The machine 10 is intended to deposit an inner barrier coating by means of a microwave plasma, in particular to allow the conditioning of a liquid-sensitive liquid in the containers 12.
De manière classique, la machine 10 comporte plusieurs postes de traitement 16 qui peuvent être répartis circonférentiellement de manière régulière sur un carrousel rotatif (non représenté), chaque poste de traitement 16 étant prévu pour traiter un récipient 12 à la fois.Typically, the machine 10 has a plurality of processing stations 16 which can be circumferentially distributed evenly over a rotating carousel (not shown), each treatment station 16 being provided to process a container 12 at a time.
Sur les figures, on a représenté partiellement un seul poste de traitement 16.In the figures, there is shown partially a single processing station 16.
Le poste de traitement 16 comprend une enceinte 18 de traitement qui est prévue pour contenir le récipient 12 et qui délimite autour du récipient 12 une cavité 20.The treatment station 16 comprises a treatment chamber 18 which is designed to contain the receptacle 12 and which delimits a cavity 20 around the receptacle 12.
Le récipient 12 est agencé ici de manière verticale avec son ouverture vers le haut.The container 12 is arranged here vertically with its opening upwards.
Le poste de traitement 16 comprend aussi un couvercle 22 qui est prévu pour fermer l'enceinte 18 de manière hermétique, en délimitant l'extrémité supérieure de la cavité 20, et qui comporte un conduit 24 de pompage raccordé de manière étanche à l'intérieur du récipient 12.The treatment station 16 also comprises a cover 22 which is provided to close the enclosure 18 in a hermetic manner, delimiting the upper end of the cavity 20, and which comprises a pumping conduit 24 sealingly connected inside. of the container 12.
Le conduit 24 de pompage est raccordé, par une première extrémité 26, à une pompe à vide 28.The pumping duct 24 is connected by a first end 26 to a vacuum pump 28.
La seconde extrémité 30 du conduit 24 de pompage communique avec la cavité 20 de l'enceinte 18 de traitement par l'intermédiaire d'une portion 32 de raccordement qui est agencée ici dans une portion d'extrémité du couvercle 22.The second end 30 of the pumping conduit 24 communicates with the cavity 20 of the treatment chamber 18 via a connecting portion 32 which is arranged here in an end portion of the cover 22.
Le couvercle 22 comporte aussi un injecteur 33 d'un gaz précurseur, par exemple de l'acétylène dans le cas d'un dépôt carboné, lequel injecteur est muni d'un tube d'injection 35 s'étendant axialement à l'intérieur du récipient 12.The lid 22 also comprises an injector 33 of a precursor gas, for example acetylene in the case of a carbonaceous deposit, which injector is provided with an injection tube 35 extending axially inside the container 12.
La portion 32 de raccordement est représentée de manière plus détaillée sur les figures 3 et 4.The connecting portion 32 is shown in greater detail in FIGS. 3 and 4.
La portion 32 de raccordement du circuit de pompage à vide 14 comporte une chambre supérieure 34 et une chambre inférieure 36 qui communiquent par un orifice 38 de raccordement.The connecting portion 32 of the vacuum pumping circuit 14 comprises an upper chamber 34 and a chamber lower 36 which communicate through a connection port 38.
Selon le mode de réalisation représenté ici, la chambre inférieure 36 est raccordée à la cavité 20 délimitée par l'enceinte 18 de traitement et la chambre supérieure 34 est raccordée au conduit 24 de pompage au niveau de la seconde extrémité 30.According to the embodiment shown here, the lower chamber 36 is connected to the cavity 20 delimited by the treatment chamber 18 and the upper chamber 34 is connected to the pumping conduit 24 at the second end 30.
La portion 32 de raccordement comporte une soupape 40 qui est guidée en coulissement suivant un axe A1 sensiblement vertical, entre une position axiale basse fermée, qui est représentée sur les figures 2 et 4, dans laquelle la tête 42 de la soupape 40 vient fermer l'orifice 38 de raccordement, et une position axiale haute ouverte, qui est représentée sur les figures 1 et 3.The connecting portion 32 comprises a valve 40 which is slidably guided along a substantially vertical axis A1, between a closed down axial position, which is shown in FIGS. 2 and 4, in which the head 42 of the valve 40 comes to close. connection port 38, and a high open axial position, which is shown in FIGS. 1 and 3.
Dans la suite de la description, on définit à titre non limitatif une orientation axiale verticale suivant l'axe A1 de coulissement de la soupape 40. Des éléments seront qualifiés de transversaux en référence à cet axe A1.In the remainder of the description, a vertical axial orientation along the axis A1 of sliding of the valve 40 is defined in a nonlimiting manner. Elements will be described as transversal with reference to this axis A1.
La soupape 40 est montée à coulissement dans une ouverture 44 correspondante de la paroi transversale supérieure 46 de la chambre supérieure 34.The valve 40 is slidably mounted in a corresponding opening 44 of the upper transverse wall 46 of the upper chamber 34.
La paroi transversale supérieure 46 est constituée ici par la paroi transversale supérieure du couvercle 22.The upper transverse wall 46 is constituted here by the upper transverse wall of the lid 22.
La soupape 40 comporte une tige 48 qui s'étend axialement vers le haut en dehors de la chambre supérieure 34 et qui est reliée à des moyens 50 susceptibles de commander le coulissement de la soupape 40 au moins vers sa position ouverte.The valve 40 comprises a rod 48 which extends axially upwards outside the upper chamber 34 and which is connected to means 50 capable of controlling the sliding of the valve 40 at least towards its open position.
Conformément aux enseignements de l'invention, la tige 48 est pourvue d'un tronçon formant un piston 52 qui constitue la paroi supérieure mobile d'une chambre de commande 54 communicant avec la chambre supérieure 34.According to the teachings of the invention, the rod 48 is provided with a section forming a piston 52 which constitutes the movable upper wall of a control chamber 54 communicating with the upper chamber 34.
Le piston 52 a ici une forme globalement cylindrique coaxiale à Ia tige 48 et il est réalisé venu de matière avec la tige 48. Le piston 52 comporte une face supérieure 56, transversale, qui est soumise en permanence à la pression de l'air atmosphérique et une face inférieure 58, transversale également, qui est soumise à la pression régnant dans la chambre de commande 54.The piston 52 here has a generally cylindrical shape coaxial with the rod 48 and is made integrally with the rod 48. The piston 52 has a transverse upper face 56, which is subjected continuously to atmospheric air pressure and a lower face 58, also transverse, which is subjected to the pressure prevailing in the control chamber 54.
Avantageusement, la paroi transversale supérieure 46 comporte une entretoise 60 annulaire qui est intercalée axialement entre l'ouverture 44 et la chambre de commande 54.Advantageously, the upper transverse wall 46 comprises an annular spacer 60 which is interposed axially between the opening 44 and the control chamber 54.
L'entretoise 60 comporte un corps principal globalement cylindrique et tubulaire qui est traversé axialement, depuis son extrémité inférieure jusqu'à son extrémité supérieure, par un conduit central 64.The spacer 60 comprises a generally cylindrical and tubular main body which is traversed axially, from its lower end to its upper end, by a central duct 64.
La tige 48 est guidée axialement par les parois axiales internes du conduit central 64.The rod 48 is guided axially by the internal axial walls of the central duct 64.
L'entretoise 60 comporte une portion 66, supérieure, en forme de collerette radiale dont la face transversale supérieure 68 est agencée axialement en vis-à-vis de la face inférieure 58 du piston 52 de manière à délimiter axialement la chambre de commande 54.The spacer 60 comprises an upper portion 66, in the form of a radial flange whose upper transverse face 68 is arranged axially vis-à-vis the lower face 58 of the piston 52 so as to define axially the control chamber 54.
Le tronçon d'extrémité inférieure 70 de l'entretoise 60 est ici vissé dans l'ouverture 44 jusqu'à ce qu'une collerette radiale inférieure 72 de l'entretoise 60 vienne en appui axial étanche contre la face supérieure 74 de la paroi transversale supérieure 46.The lower end section 70 of the spacer 60 is here screwed into the opening 44 until a lower radial flange 72 of the spacer 60 comes into axial tight support against the upper face 74 of the transverse wall superior 46.
La collerette radiale inférieure 72 est munie ici d'un joint torique 76 d'étanchéité qui s'interpose axialement entre la collerette radiale inférieure 72 et la paroi transversale supérieure 46.The lower radial flange 72 is provided here with an O-ring 76 which interposes axially between the lower radial flange 72 and the upper transverse wall 46.
L'entretoise 60 est pourvue de canaux 78 axiaux qui sont aménagés dans son épaisseur radiale et qui réalisent le raccordement entre la chambre de commande 54 et la chambre supérieure 34.The spacer 60 is provided with axial channels 78 which are arranged in its radial thickness and which make the connection between the control chamber 54 and the upper chamber 34.
Chaque canal 78 axial débouche dans Ia face axiale externe 80 du tronçon d'extrémité supérieure de l'entretoise 60 et δ dans la face transversale d'extrémité inférieure 82 de l'entretoise 60.Each axial channel 78 opens into the outer axial face 80 of the upper end section of the spacer 60 and δ in the bottom end transverse face 82 of the spacer 60.
Avantageusement, un soufflet 84 métallique étanche au vide est interposé axialement entre le bord périphérique externe de la face inférieure 58 du piston 52 et Ie bord périphérique externe de la collerette radiale constituant la portion 66 supérieure de l'entretoise.Advantageously, a vacuum-tight metal bellows 84 is interposed axially between the outer peripheral edge of the lower face 58 of the piston 52 and the outer peripheral edge of the radial flange constituting the upper portion 66 of the spacer.
Le soufflet 84 est coaxial à la tige 48 et il constitue la paroi périphérique externe de la chambre de commande 54 Ie long de la tige 48.The bellows 84 is coaxial with the rod 48 and constitutes the outer peripheral wall of the control chamber 54 along the rod 48.
De préférence, la soupape 40 comporte une jupe axiale 86 qui est liée en coulissement axial à la tige 48 et qui enveloppe le soufflet 84 et le piston 52.Preferably, the valve 40 comprises an axial skirt 86 which is axially slidably connected to the rod 48 and which surrounds the bellows 84 and the piston 52.
La tête 42 de la soupape 40 a ici une forme cylindrique et elle est rapportée sur l'extrémité inférieure de la tige 48.The head 42 of the valve 40 here has a cylindrical shape and is attached to the lower end of the rod 48.
L'orifice 38 de raccordement comporte ici un rebord transversal 88 supérieur.The connection orifice 38 here comprises a transverse rim 88 upper.
La tête 42 de la soupape 40 comporte une surface transversale inférieure 90 de fermeture qui est pourvue d'un joint 92 annulaire d'étanchéité et qui est prévue pour venir en appui axial étanche contre le rebord transversal 88 lorsque la soupape 40 occupe sa position fermée, telle que représentée sur les figures 2 et 4.The head 42 of the valve 40 has a bottom transverse surface 90 of closure which is provided with an annular sealing gasket 92 and which is designed to bear tightly against the transverse flange 88 when the valve 40 is in its closed position. as shown in Figures 2 and 4.
De préférence, comme illustré sur les figures, les moyens 50 susceptibles de commander le coulissement de la soupape 40 au moins vers sa position ouverte sont constitués par un mécanisme à came qui coopère avec le tronçon d'extrémité supérieure 94 de la tige 48 de façon à commander le coulissement de la soupape 40 vers sa position ouverte et qui contrôle le déplacement de la soupape 40 vers sa position fermée.Preferably, as illustrated in the figures, the means 50 capable of controlling the sliding of the valve 40 at least towards its open position are constituted by a cam mechanism which cooperates with the upper end section 94 of the rod 48 so as to controlling the sliding of the valve 40 to its open position and controlling the movement of the valve 40 to its closed position.
Le mécanisme 50 à came comporte ici un levier 96 qui est monté pivotant sur le couvercle 22 autour d'un axe A2 transversal. Le pivotement du levier 96 est lié au coulissement de la soupape 40 par l'intermédiaire d'un jeu de biellettes 98.The cam mechanism 50 here comprises a lever 96 which is pivotally mounted on the cover 22 about a transverse axis A2. The pivoting of the lever 96 is linked to the sliding of the valve 40 by means of a set of rods 98.
Le levier 96 porte un galet 100 qui est prévu pour coopérer avec une surface de commande (non représentée) de la machine 10.The lever 96 carries a roller 100 which is provided to cooperate with a control surface (not shown) of the machine 10.
La surface de commande comporte plusieurs tronçons qui sont prévus pour provoquer le pivotement du levier 96 et entraîner la soupape 40 de manière adéquate vers l'une de ses deux positions axiales extrêmes.The control surface has a plurality of sections that are provided to cause pivoting of the lever 96 and drive the valve 40 adequately to one of its two extreme axial positions.
On décrit maintenant le fonctionnement de la machine 10 et du circuit de pompage à vide 14 qui l'équipe.The operation of the machine 10 and the vacuum pump circuit 14 which equips it is now described.
Le procédé de traitement du récipient 12 par la machine 10 comporte une étape préliminaire au cours de laquelle le circuit de pompage à vide 14 provoque une diminution de la pression à l'intérieur de la cavité 20 jusqu'à une valeur déterminée dite valeur finale externe pFΘXt et une diminution de la pression à l'intérieur du récipient 12 jusqu'à une valeur déterminée dite valeur finale interne pFint.The method of treatment of the container 12 by the machine 10 comprises a preliminary step during which the vacuum pumping circuit 14 causes a decrease in the pressure inside the cavity 20 to a determined value, said external final value. pF ΘX t and a decrease in the pressure inside the container 12 to a determined value called internal final value pF in t.
Généralement Ia valeur finale interne pFjnt est d'environ 0,1 mbar et la valeur finale externe pFΘXt est d'environ 50 mbar, de manière que le vide soit plus important dans le récipient 12 que dans la cavité 20.Generally Ia final internal value PFJ n t is about 0.1 mbar and the final external value pF ΘXt is about 50 mbar, so that the vacuum is greater in the container 12 in the cavity 20.
L'étape préliminaire est suivie d'une étape de traitement au cours de laquelle les valeurs finales pFext, pFint sont maintenues dans la cavité 20 et dans le récipient 12 pour permettre le dépôt du revêtement interne dans le récipient 12.The preliminary step is followed by a processing step in which the final values pF ext , pF in t are maintained in the cavity 20 and in the container 12 to allow the deposition of the inner coating in the container 12.
Au cours de l'étape de traitement, le gaz précurseur est injecté dans le récipient 12, par l'intermédiaire de l'injecteur 33, et soumis à l'action de micro-ondes de sorte qu'il passe à l'état de plasma et provoque un dépôt de revêtement barrière (carboné lorsque le précurseur est à base d'acétylène) sur les parois internes du récipient 12. Ce dépôt constitue un revêtement interne formant barrière, par exemple à rencontre des molécules de dioxygène et de dioxyde de carbone. L'étape préliminaire comporte une première phase, qui est illustrée par la figure 1 , au cours de laquelle le pompage est réalisé simultanément dans la cavité 20 et dans le récipient 12 et une seconde phase, qui est illustrée par la figure 2, au cours de laquelle le pompage est réalisé uniquement dans le récipient 12.During the treatment step, the precursor gas is injected into the container 12, via the injector 33, and subjected to the action of microwaves so that it switches to the state of plasma and causes barrier coating deposition (carbonized when the precursor is acetylene-based) on the inner walls of the container 12. This deposit constitutes an inner barrier coating, for example against oxygen molecules and carbon dioxide . The preliminary step comprises a first phase, which is illustrated in FIG. 1, during which the pumping is performed simultaneously in the cavity 20 and in the container 12 and a second phase, which is illustrated in FIG. from which the pumping is carried out only in the container 12.
La première phase se termine lorsque la pression dans la cavité 20 atteint la valeur finale externe pFΘXt-The first phase ends when the pressure in the cavity 20 reaches the external final value pF ΘX t-
Pendant la première phase, la pression diminue à l'intérieur du circuit de pompage à vide 14, en particulier dans la chambre supérieure 34 qui communique avec la chambre de commande 54.During the first phase, the pressure decreases inside the vacuum pump circuit 14, in particular in the upper chamber 34 which communicates with the control chamber 54.
La pression dans la chambre de commande 54 diminue donc simultanément, ce qui crée un différentiel de pression entre la face supérieure 56 et la face inférieure 58 du piston 52, puisque la face supérieure 56 est soumise à la pression atmosphérique qui règne à l'extérieur du circuit de pompage à vide 14.The pressure in the control chamber 54 therefore decreases simultaneously, which creates a pressure differential between the upper face 56 and the lower face 58 of the piston 52, since the upper face 56 is subjected to the atmospheric pressure prevailing outside. of the vacuum pump circuit 14.
Par conséquent, une force axiale d'appui, résultant de ce différentiel de pression, sollicite axialement la soupape 40 vers le bas.Consequently, an axial bearing force, resulting from this pressure differential, axially urges the valve 40 downwards.
Avantageusement, le mécanisme 50 à came maintient la soupape 40 en position ouverte jusqu'à ce que la pression dans la cavité 20 atteigne sa valeur finale externe pFext.Advantageously, the cam mechanism 50 holds the valve 40 in the open position until the pressure in the cavity 20 reaches its external final value pF ext .
Lorsque la pression dans la cavité 20 se rapproche de la valeur finale externe pFΘXt, le mécanisme 50 à came contrôle le déplacement de Ia soupape 40 de manière qu'elle descende progressivement jusqu'à sa position fermée (figures 2 et 4).When the pressure in the cavity 20 approaches the external end value pF ΘX t, the cam mechanism 50 controls the displacement of the valve 40 so that it gradually descends to its closed position (FIGS. 2 and 4).
Lorsque la soupape 40 occupe sa position fermée, la seconde phase de l'étape préliminaire est mise en œuvre.When the valve 40 is in its closed position, the second phase of the preliminary step is implemented.
Pendant la seconde phase, le circuit de pompage à vide 14 continue le pompage uniquement dans le récipient 12 jusqu'à atteindre la valeur finale interne pFjnt, qui est inférieure à la pression dans la cavité 20. A la fin de la seconde phase, l'étape de traitement peut être mise en œuvre.During the second phase, the vacuum pump circuit 14 continues the pumping only in the container 12 until reaching the internal final value pFj nt , which is lower than the pressure in the cavity 20. At the end of the second phase, the processing step can be implemented.
Pendant l'étape de traitement, le vide est maintenu dans la cavité 20, par la fermeture hermétique de l'enceinte 18, et dans le récipient 12, par un pompage continu et régulé au moyen de la pompe à vide 28.During the treatment step, the vacuum is maintained in the cavity 20, by the hermetic closure of the chamber 18, and in the container 12, by continuous pumping and regulated by means of the vacuum pump 28.
A la fin de l'étape de traitement, l'intérieur du récipient 12 et la cavité 20 sont remis à la pression atmosphérique.At the end of the treatment step, the interior of the container 12 and the cavity 20 are returned to atmospheric pressure.
A cet effet, le mécanisme 50 à came commande l'ouverture de la soupape 40.For this purpose, the cam mechanism 50 controls the opening of the valve 40.
On note que, pendant la seconde phase de l'étape préliminaire et pendant l'étape de traitement, la soupape 40 ne nécessite ni l'action du mécanisme 50 à came, ni l'action d'un moyen de rappel élastique pour être retenue axialement dans sa position fermée. En effet, la soupape 40 est maintenue dans sa position fermée sous la seule action du différentiel de pression entre les deux faces du piston 52. It is noted that during the second phase of the preliminary step and during the processing step, the valve 40 does not require the action of the cam mechanism 50 or the action of an elastic return means to be retained. axially in its closed position. Indeed, the valve 40 is held in its closed position under the sole action of the pressure differential between the two faces of the piston 52.

Claims

REVENDICATIONS
1. Circuit de pompage à vide (14) d'une machine de traitement de récipients (12) par dépôt d'un revêtement interne formant barrière au moyen d'un plasma micro-ondes comportant :A vacuum pumping circuit (14) of a container processing machine (12) by depositing an inner barrier coating by means of a microwave plasma comprising:
- une chambre supérieure (34) et une chambre inférieure (36) qui communiquent par un orifice (38) de raccordement, la chambre inférieure (36) étant raccordée à une cavité (20) et la chambre supérieure (34) étant raccordée à une pompe à vide (28) qui est prévue pour faire le vide dans la cavité (20) jusqu'à ce que la pression dans la cavité (20) atteigne une valeur déterminée dite valeur finale (pFΘXt),an upper chamber (34) and a lower chamber (36) communicating via a connection orifice (38), the lower chamber (36) being connected to a cavity (20) and the upper chamber (34) being connected to a vacuum pump (28) which is designed to evacuate the cavity (20) until the pressure in the cavity (20) reaches a determined value called final value (pF ΘXt ),
- et comportant une soupape (40) guidée en coulissement suivant un axe (A1 ) sensiblement vertical dans une ouverture (44) correspondante de la paroi transversale supérieure (46) de la chambre supérieure (34), entre une position axiale basse fermée, dans laquelle la tête (42) de la soupape (40) vient fermer l'orifice (38) de raccordement, et une position axiale haute ouverte, du type dans lequel la soupape (40) comporte une tige (48) qui s'étend axialement vers le haut en dehors de la chambre supérieure (34), la tige (48) de soupape étant reliée à des moyens (50) susceptibles de commander la soupape (40) au moins vers sa position ouverte, caractérisé en ce que la tige (48) de soupape est pourvue d'un tronçon formant un piston (52) qui constitue la paroi supérieure mobile d'une chambre de commande (54) communicant avec la chambre supérieure (34), le piston (52) comportant une face supérieure (56) soumise en permanence à la pression de l'air atmosphérique et une face inférieure (58) soumise à la pression régnant dans la chambre de commande (54) de manière que, lorsque la pression dans la chambre inférieure (36) atteint la valeur finale (pFθXt), la soupape (40) est maintenue en position fermée sous l'effet du différentiel de pression entre les deux faces (56, 58) du piston (52). and having a valve (40) slidably guided along a substantially vertical axis (A1) in a corresponding aperture (44) of the upper transverse wall (46) of the upper chamber (34), between a closed down axial position, in a which head (42) of the valve (40) closes the orifice (38) connection, and a high open axial position, of the type in which the valve (40) comprises a rod (48) which extends axially upwardly out of the upper chamber (34), the valve stem (48) being connected to means (50) capable of controlling the valve (40) at least towards its open position, characterized in that the stem (40) 48) is provided with a section forming a piston (52) which constitutes the movable upper wall of a control chamber (54) communicating with the upper chamber (34), the piston (52) having an upper face ( 56) continuously subjected to the atmospheric air pressure and one side in lower (58) subjected to the pressure prevailing in the control chamber (54) so that, when the pressure in the lower chamber (36) reaches the final value (pF θXt ), the valve (40) is held in the closed position under the effect of the pressure differential between the two faces (56, 58) of the piston (52).
2. Circuit de pompage à vide (14) selon la revendication précédente, caractérisé en ce que la paroi transversale supérieure (46) comporte une entretoise (60) annulaire qui est intercalée axialement entre l'ouverture (44) et la chambre de commande (54), qui comporte un conduit central (64) pour le guidage axial de la tige (48) de soupape, et qui est pourvue de canaux (78) réalisant le raccordement entre la chambre de commande (54) et la chambre supérieure (34).2. vacuum pumping circuit (14) according to the preceding claim, characterized in that the upper transverse wall (46) comprises an annular spacer (60) which is interposed axially between the opening (44) and the control chamber ( 54), which includes a central duct (64) for axial guiding of the valve stem (48), and which is provided with channels (78) connecting the control chamber (54) to the upper chamber (34). ).
3. Circuit de pompage à vide (14) selon la revendication précédente, caractérisé en ce qu'un soufflet (84) métallique étanche au vide est interposé axialement entre le bord périphérique externe du piston (52) et le bord périphérique externe d'une portion (66) de l'entretoise (60) de manière à former la paroi périphérique externe de la chambre de commande (54) le long de la tige (48) de soupape.3. vacuum pumping circuit (14) according to the preceding claim, characterized in that a vacuum-tight metal bellows (84) is interposed axially between the outer peripheral edge of the piston (52) and the outer peripheral edge of a portion (66) of the spacer (60) to form the outer peripheral wall of the control chamber (54) along the valve stem (48).
4. Circuit de pompage à vide (14) selon la revendication précédente, caractérisé en ce que la soupape (40) comporte une jupe axiale (86) qui est liée en coulissement axial à la tige (48) de soupape et qui enveloppe le soufflet (84) et le piston (52).4. vacuum pumping circuit (14) according to the preceding claim, characterized in that the valve (40) comprises an axial skirt (86) which is axially slidably connected to the valve stem (48) and which surrounds the bellows (84) and the piston (52).
5. Circuit de pompage à vide (14) selon l'une quelconque des revendications précédentes, caractérisé en ce que les moyens (50) susceptibles de commander la soupape (40) au moins vers sa position ouverte sont constitués par un mécanisme (50) à came qui coopère avec le tronçon d'extrémité supérieure de la tige (48) de soupape de manière à commander le coulissement de la soupape (40) vers sa position ouverte.5. vacuum pumping circuit (14) according to any one of the preceding claims, characterized in that the means (50) capable of controlling the valve (40) at least towards its open position are constituted by a mechanism (50) cam member which cooperates with the upper end portion of the valve stem (48) to control the sliding of the valve (40) to its open position.
6. Circuit de pompage à vide (14) selon la revendication précédente, caractérisé en ce que le mécanisme (50) à came comporte une surface de commande qui contrôle le déplacement de la soupape (40) vers sa position fermée.6. vacuum pumping circuit (14) according to the preceding claim, characterized in that the cam mechanism (50) comprises a control surface which controls the movement of the valve (40) to its closed position.
7. Circuit de pompage à vide (14) selon l'une quelconque des revendications précédentes, caractérisé en ce que la tête (42) de la soupape est rapportée sur l'extrémité inférieure de la tige (48) de soupape. Vacuum pump circuit (14) according to one of the preceding claims, characterized in that the valve head (42) is attached to the lower end of the valve stem (48).
8. Circuit de pompage à vide (14) selon l'une quelconque des revendications précédentes, caractérisé en ce que l'orifice (38) de raccordement comporte un rebord transversal (88) supérieur, et en ce que la tête (42) de la soupape (40) comporte une surface transversale inférieure de fermeture qui est pourvue d'un joint (92) annulaire d'étanchéité et qui est prévue pour venir en appui axial étanche contre le rebord transversal (88) lorsque la soupape 40 occupe sa position fermée.Vacuum pumping circuit (14) according to one of the preceding claims, characterized in that the connection opening (38) has an upper transverse flange (88), and in that the head (42) of the valve (40) has a lower transverse sealing surface which is provided with an annular sealing gasket (92) and which is provided to bear tightly against the transverse flange (88) when the valve 40 is in its position. closed.
9. Machine (10) de traitement de récipients (12) par dépôt d'un revêtement interne formant barrière au moyen d'un plasma micro-ondes, comportant au moins un poste de traitement (16) pour un récipient (12), chaque poste de traitement (16) comprenant :9. Machine (10) for treating containers (12) by depositing an inner barrier coating using a microwave plasma, comprising at least one treatment station (16) for a container (12), each treatment station (16) comprising:
- une enceinte (18) de traitement qui est prévue pour contenir la bouteille (12) et qui délimite autour du récipient (12) une cavité (20),a chamber (18) for treatment which is intended to contain the bottle (12) and which delimits a cavity (20) around the container (12),
- et, un couvercle (22) qui est prévu pour fermer l'enceinte (18) de manière hermétique et qui comporte un conduit (24) de pompage raccordé de manière étanche à l'intérieur du récipient (12), caractérisée en ce que le couvercle (22) est équipé d'un circuit de pompage à vide (14) selon l'une quelconque des revendications précédentes, en ce que la chambre inférieure (36) est raccordée de manière étanche à la cavité (20) délimitée par l'enceinte (18), et en ce que la chambre supérieure (34) est raccordée au conduit (24) de pompage. and a cover (22) which is provided for hermetically closing the enclosure (18) and which comprises a pumping conduit (24) sealingly connected inside the container (12), characterized in that the lid (22) is equipped with a vacuum pump circuit (14) according to any one of the preceding claims, in that the lower chamber (36) is sealingly connected to the cavity (20) delimited by the enclosure (18), and in that the upper chamber (34) is connected to the pumping conduit (24).
EP05762949A 2004-06-30 2005-06-27 Vacuum pumping circuit and machine for treating containers equipped with same Not-in-force EP1761705B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0451366A FR2872555B1 (en) 2004-06-30 2004-06-30 VACUUM PUMPING CIRCUIT AND CONTAINER TREATMENT MACHINE EQUIPPED WITH SAID CIRCUIT
PCT/EP2005/052985 WO2006010679A1 (en) 2004-06-30 2005-06-27 Vacuum pumping circuit and machine for treating containers equipped with same

Publications (2)

Publication Number Publication Date
EP1761705A1 true EP1761705A1 (en) 2007-03-14
EP1761705B1 EP1761705B1 (en) 2008-03-19

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP05762949A Not-in-force EP1761705B1 (en) 2004-06-30 2005-06-27 Vacuum pumping circuit and machine for treating containers equipped with same

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US (1) US8083854B2 (en)
EP (1) EP1761705B1 (en)
JP (1) JP4838243B2 (en)
CN (1) CN100441870C (en)
AT (1) ATE389806T1 (en)
DE (1) DE602005005481T2 (en)
ES (1) ES2304018T3 (en)
FR (1) FR2872555B1 (en)
MX (1) MXPA06014985A (en)
PT (1) PT1761705E (en)
WO (1) WO2006010679A1 (en)

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US20070248479A1 (en) 2007-10-25
CN1977110A (en) 2007-06-06
DE602005005481T2 (en) 2009-04-30
PT1761705E (en) 2008-04-10
JP4838243B2 (en) 2011-12-14
WO2006010679A1 (en) 2006-02-02
DE602005005481D1 (en) 2008-04-30
MXPA06014985A (en) 2007-07-11
ATE389806T1 (en) 2008-04-15
US8083854B2 (en) 2011-12-27
EP1761705B1 (en) 2008-03-19
FR2872555A1 (en) 2006-01-06
FR2872555B1 (en) 2006-10-06
ES2304018T3 (en) 2008-09-01
CN100441870C (en) 2008-12-10

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