WO2020186402A1 - Cavity length measuring device for dielectric cavity - Google Patents

Cavity length measuring device for dielectric cavity Download PDF

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Publication number
WO2020186402A1
WO2020186402A1 PCT/CN2019/078351 CN2019078351W WO2020186402A1 WO 2020186402 A1 WO2020186402 A1 WO 2020186402A1 CN 2019078351 W CN2019078351 W CN 2019078351W WO 2020186402 A1 WO2020186402 A1 WO 2020186402A1
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WO
WIPO (PCT)
Prior art keywords
conductor
cavity
cavity length
inner rod
reflection
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PCT/CN2019/078351
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French (fr)
Chinese (zh)
Inventor
陈昌林
吕欣怀
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江苏弘开传感科技有限公司
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Priority to PCT/CN2019/078351 priority Critical patent/WO2020186402A1/en
Publication of WO2020186402A1 publication Critical patent/WO2020186402A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/48—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using wave or particle radiation means

Definitions

  • the present application relates to measurement technology, and in particular to a cavity length measuring device for measuring dielectric cavity based on microwave principle.
  • the open hollow coaxial cable-Fabry-Perot cavity sensor uses two strong reflection points to measure the cavity length change of the hollow coaxial cable-Fabry-Perot cavity, which can achieve a large range of high-precision measurements.
  • the demodulation accuracy and the resolution of cavity length of the hollow coaxial cable-Fabry Perot cavity sensor need to be improved, so it is not suitable for pressure measurement and other sensors based on strain or diaphragm deflection measurement.
  • the hollow coaxial cable-Fabry Perot cavity sensor uses a contact structure, which will have a certain sliding friction or rolling friction, which will also cause a sensor with extremely high sensitivity. Great error.
  • an embodiment of the present application provides a cavity length measuring device for a dielectric cavity, which may be a contact structure or a non-contact structure, which can realize high-precision measurement of the dielectric cavity length.
  • the cavity length measuring device of the dielectric cavity provided by the embodiment of the present application includes: a sensor and a demodulation device; wherein,
  • the sensor includes an open hollow coaxial cable-Fabry Perot cavity, a first reflection point, a second reflection point, a conductor reflection surface, and a dielectric cavity; wherein, the first reflection point is set in the open At a first position inside the hollow coaxial cable-Fabry-Perot cavity, the second reflection point is set at a second position inside the open-type hollow coaxial cable-Fabry-Perot cavity, The conductor reflection surface is arranged at a third position inside the open hollow coaxial cable-Fabry Perot cavity, and there is no relative movement between the first reflection point and the second reflection point, The reflectivity of the first reflection point and the second reflection point is greater than or equal to a preset threshold; a dielectric cavity is formed between the second reflection point and the conductor reflection surface, and the dielectric in the dielectric cavity is a conductor Or an insulator, which is a solid, liquid or gas; the reflective surface of the conductor can move or deform, causing the cavity length of the dielectric cavity to change; the refractive index of the
  • the demodulation device is connected to the sensor, and the demodulation device includes a demodulation main board and a coaxial cable, and is used to analyze the microwave signal in the open hollow coaxial cable-Fabry Perot cavity , Obtain the resonant frequency/cavity length of the open hollow coaxial cable-Fabry Perot cavity, wherein the cavity length of the open hollow coaxial cable-Fabry Perot cavity is The distance between the first reflection point and the second reflection point, and the distance is affected by the change in the distance between the second reflection point and the conductor reflection surface; when the first reflection point and the second reflection point When the distance between the two reflection points is constant and the distance between the second reflection point and the conductor reflection surface changes, the resonant frequency of the open hollow coaxial cable-Fabry Perot cavity will change , Determining the distance between the second reflection point and the conductor reflection surface based on the change in the resonance frequency, and the distance between the second reflection point and the conductor reflection surface is the cavity length of the dielectric cavity .
  • the senor further includes a housing or a housing plus an inner rod, the housing is the outer conductor of the sensor, and the inner rod is the inner conductor of the sensor;
  • One end of the open hollow coaxial cable-Fabry Perot cavity is connected to a radio frequency coaxial cable adapter, and the radio frequency coaxial cable adapter is connected to the demodulation main board through a coaxial cable; or, One end of the open hollow coaxial cable-Fabry Perot cavity is directly connected to the demodulation main board;
  • the shell end surface and the conductor reflection surface are connected by a conductor, and the inner rod end surface and the conductor reflection surface are connected by an insulator or a resistivity greater than or equal to a preset Threshold conductor connection.
  • the second reflection point is the end surface of the inner rod conductor area; alternatively, the inner rod end surface and the conductor reflection surface are connected by a conductor, and the shell end surface and the conductor reflection surface are connected with an insulator or resistivity Conductor connection greater than or equal to the preset threshold.
  • the second reflection point is the end surface of the conductor area of the outer shell; or, between the end surface of the outer shell and the inner rod and the reflective surface of the conductor, an insulator or a resistivity greater than or equal to the preset threshold is used
  • the conductors are connected and the end faces of the outer shell and the inner rod are on the same section.
  • the second reflection point is the end faces of the outer shell and the inner rod; alternatively, insulators or resistivity are used between the end faces of the outer shell and the inner rod and the conductor reflection surface
  • the conductors greater than or equal to the preset threshold are connected and the end faces of the outer shell and the inner rod are not on the same cross section. In this case, the second reflection point is between the end face of the outer shell and the end face of the inner rod.
  • the cavity length measuring device is a reflective cavity length measuring device, and in the reflective cavity length measuring device:
  • One end of the sensor is connected to a radio frequency coaxial cable adapter, and the radio frequency coaxial cable adapter is connected to the demodulation main board through a coaxial cable; or, one end of the sensor is directly connected to the demodulation main board, that is, the sensor's One end can be connected to the demodulation main board through the first radio frequency coaxial cable adapter, or it can be directly connected to the demodulation main board; or, the demodulation main board is directly connected to the coaxial radio frequency adapter that penetrates the shell wall, and the coaxial radio frequency converter
  • the connector has a section of conductor inserted into the shell;
  • the other end of the sensor is a second reflection point and a conductor reflection surface.
  • the cavity length measuring device is a transmissive cavity length measuring device, and in the transmissive cavity length measuring device:
  • One end of the sensor is connected to a first radio frequency coaxial cable adapter, the housing wall of the sensor is connected to a second radio frequency coaxial cable adapter, and one end of the demodulation main board is connected to the first radio frequency coaxial cable through a coaxial cable.
  • a cable adapter, the other end of the demodulation main board is connected to the second radio frequency coaxial cable adapter through a coaxial cable; or,
  • One end of the sensor is connected to a first radio frequency coaxial cable adapter, one end of the demodulation main board is connected to the first radio frequency coaxial cable adapter through a coaxial cable; the housing wall of the sensor is directly connected to the demodulation main board, That is, the shell wall can be connected to the demodulation main board through the second radio frequency coaxial cable adapter, or it can be directly connected to the demodulation main board; or,
  • One end of the sensor is directly connected to the demodulation main board, that is, one end of the sensor can be connected to the demodulation main board through the first radio frequency coaxial cable adapter, or directly connected to the demodulation main board; the housing wall of the sensor is connected to the second radio frequency A coaxial cable adapter, the second radio frequency coaxial cable adapter is connected to the demodulation main board through a coaxial cable; or,
  • One end of the sensor is directly connected to the demodulation main board, that is, one end of the sensor can be connected to the demodulation main board through the first radio frequency coaxial cable adapter, or it can be directly connected to the demodulation main board; the housing wall of the sensor is directly connected to the demodulation main board.
  • the modulation main board that is, the shell wall can be connected to the demodulation main board through the second radio frequency coaxial cable adapter, or directly connected to the demodulation main board.
  • the cavity length measuring device when the cavity length measuring device is a transmissive cavity length measuring device, the cavity length measuring device has at least the following modes: positive feedback loop mode and no loop mode; wherein,
  • the demodulation main board includes: a directional coupler, a waveform amplifier, and a frequency counter/spectrometer;
  • the demodulation main board is a vector network analyzer, or a microwave generating source plus a scalar network analyzer, or a microwave time domain reflectometer, or a demodulation circuit board for demodulating spectrum.
  • the positive feedback loop mode includes: a microwave positive feedback loop and a positive feedback loop based on an optoelectronic oscillator; wherein,
  • the microwave positive feedback loop includes: a coaxial cable loop, a microwave directional coupler, a microwave amplifier or a microwave power splitter, and each device in the demodulation main board is connected by a coaxial cable loop;
  • the positive feedback loop based on the optoelectronic oscillator includes: high-speed optoelectronic demodulator, laser or light emitting diode light source, fiber loop, fiber coupler, microwave amplifier or optical amplifier, microwave directional coupler or microwave power separation Each device in the demodulation main board is connected through an optical fiber loop.
  • the senor has: a housing or a housing plus an inner rod, and a conductor reflection surface; wherein the housing is formed by a continuous conductor, the inner rod is formed by a continuous conductor, and the conductor reflects The surface is formed by a continuous conductor, the continuous conductor is: a single conductive part, or a plurality of conductive parts connected together, or a conductor plating on an insulator, the material of the conductive part is a conductive material, and the conductive material includes at least: metal , Non-metal; non-metal includes at least: graphite, or carbon fiber, or conductive ceramic;
  • the shape of the conductor reflecting surface is a solid structure, or a plane structure, or a curved structure; the shape of the conductor reflecting surface is a porous structure, or a circular structure, or a long strip structure, or a plurality of conductors are spliced together, or The conductor and the insulator are spliced together; the conductor reflection surface is composed of a single conductor material, or is composed of different kinds of conductor materials, or is composed of a part of a conductor material and a part of an insulator material; the conductor area of the conductor reflection surface is continuous or Non-continuous
  • the placement of the conductor reflection surface meets the following requirements: it is necessary to ensure that the cylinder swept along the axial direction of the envelope surface of the outer shell and the inner rod has an intersection with the area where the conductor reflection surface is located.
  • the axes of the shell and the inner rod are vertical or not; the conductor reflection surface is flat or curved;
  • the change of the end surface distance between the conductor reflection surface and the second reflection point is achieved by at least one of the following methods: movement of the conductor reflection surface; deformation of the conductor reflection surface; The refractive index of the dielectric between the reflection points changes;
  • the size of the conductor reflection surface is greater than or equal to the diameter of the shell, and forms a full coverage of the end surface of the shell; or, the size of the conductor reflection surface is smaller than the diameter of the shell.
  • the cross section of the housing is a closed shape or a non-closed shape
  • the senor When the sensor includes a housing and an inner rod:
  • the outer shell wraps the inner rod, or the outer shell does not wrap the inner rod;
  • the outer shell and the inner rod are two conductor plating layers on a plane, or two conductor parallel rods in space;
  • the housing is coaxial with the inner rod, or the housing and the inner rod are not coaxial.
  • the filled medium is one of the following: vacuum, gas, liquid, solid;
  • the filled medium is one of the following: vacuum, gas, liquid, and solid.
  • the first reflection point and the second reflection point are arranged between the housing and the inner rod; the second reflection point is the housing or the inner rod The end surface of the rod; or, when the outer shell and the inner rod are not in contact with the conductor reflection surface, and the outer shell and the inner rod have different lengths, the second reflection point is located between the outer shell Between the end surface and the inner rod end surface; wherein,
  • the insulator or the conductor with the resistivity greater than or equal to the preset threshold is solid, liquid or gas; for one or two of the first reflection point and the second reflection point, the reflection point may be a conductor or an insulator , The reflection point satisfies the following positional relationship with the outer shell and the inner rod:
  • the reflection point, the outer shell and the inner rod are both connected with a conductor whose resistivity is less than a preset threshold; or,
  • the reflection point is not in contact with the outer shell, or connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold, and the reflection point is connected with the inner rod with a conductor with a resistivity less than the preset threshold; or,
  • the second reflection point and the conductor reflection surface satisfy the following positional relationship:
  • the second reflection point Is the common end face of the outer shell and the inner rod;
  • the second reflection point Is a point between the end face of the outer shell and the end face of the inner rod;
  • the second reflection point is The end face of the inner rod; or
  • the second reflection point is The end face of the shell.
  • the reflective cavity length measuring device in the reflective cavity length measuring device:
  • both the housing and the first end of the inner rod are connected to the radio frequency coaxial cable adapter, and the radio frequency coaxial cable adapter is connected to the solution through a coaxial cable.
  • the first end of the housing and the inner rod is directly connected to the demodulation motherboard, that is, the first end of the housing and the inner rod can be connected to the demodulation motherboard through the first RF coaxial cable adapter, or directly Connecting to the demodulation main board; at least a part of the first reflection point and the second reflection point are set within the envelope range of the housing and the inner rod;
  • the cavity length measuring device has at least the following modes: a positive feedback loop mode and a loop-free mode:
  • the first ends of the housing and the inner rod are both connected to a first radio frequency coaxial cable adapter, and the first radio frequency coaxial cable adapter passes through the first coaxial cable Connect to the demodulation main board; or both the housing and the first end of the inner rod are directly connected to the demodulation main board, that is, the first end of the housing and the inner rod can be connected to the demodulation main board through a first radio frequency coaxial cable adapter
  • the main board can also be directly connected to the demodulation main board;
  • the housing wall is connected to the second radio frequency coaxial cable adapter, and the second radio frequency coaxial cable adapter is connected to the demodulation main board through the second coaxial cable; or
  • the housing wall is directly connected to the demodulation main board, that is, the housing wall can be connected to the demodulation main board through a second radio frequency coaxial cable adapter, or directly connected to the demodulation main board;
  • the first reflection point and the second reflection point are at least A part is arranged within the envelope range of the
  • the first end of the housing is connected to the first radio frequency coaxial cable adapter, and the first radio frequency coaxial cable adapter is connected to the demodulation main board through the first coaxial cable On; or the first end of the housing is directly connected to the demodulation motherboard, that is, the first end of the housing can be connected to the demodulation motherboard through the first radio frequency coaxial cable adapter, or directly connected to the demodulation motherboard; the housing wall Connected to the second radio frequency coaxial cable adapter, the second radio frequency coaxial cable adapter is connected to the demodulation main board through the second coaxial cable; or the housing wall is directly connected to the demodulation main board, that is, the housing wall can be The demodulation main board is connected through the second radio frequency coaxial cable adapter, or it can be directly connected to the demodulation main board; at least a part of the first reflection point and the second reflection point are arranged within the envelope range of the housing;
  • the second radio frequency coaxial cable adapter is arranged between the first reflection point and the second reflection point.
  • the first reflection point is a conductor and is connected to both the inner rod and the outer shell, so that the inner rod and the outer shell are short-circuited;
  • the second reflection point The point is the end face of the outer shell or the inner rod;
  • the internal shape of the housing is circular or rectangular
  • the cross-section of the inner rod is also circular or rectangular
  • the first reflection point forms a short circuit between the housing and the inner rod
  • the second reflection point is a high reflection formed by the disconnection of the end surface of the outer shell or the inner rod
  • the first reflection point is a cross-section with a size smaller than a preset area. At least one or more round rods or square rods can be placed perpendicular to the axis of the inner rod of the sensor, or a cross section can be fixed between the housing and the inner rod.
  • the area of the first reflection point covering the area between the outer shell and the inner rod is smaller than the envelope area between the outer shell and the inner rod;
  • the outer shell and the inner rod form a short circuit, or the resistance of the connecting piece between the outer shell and the inner rod is greater than or equal to a preset threshold, or there is no connecting piece between the outer shell and the inner rod;
  • the second reflection point It is the end face of the outer shell, or the end face of the inner rod, or a point between the end face of the outer shell conductor area and the end face of the inner rod conductor area;
  • the conductor reflection surface is different from the outer shell and the inner rod with a resistivity less than a preset Threshold conductor connection;
  • the positions of the first reflection point and the second reflection point are fixed. By changing the distance between the conductor reflection surface and the second reflection point, the displacement, strain, pressure, angle, or liquid can be adjusted. Measurement of the position or flow velocity; wherein the distance between the conductor reflection surface and the second reflection point is changed by at least one of the following methods: the movement of the conductor reflection surface, the deformation of the conductor reflection surface, and the The change in the refractive index of the medium between the reflective surface of the conductor and the second reflective point.
  • the reflectivity is adjusted by changing the cross-sectional shape and size of the inner rod, and the first reflection point added between the outer shell and the inner rod can be removed, and the radio frequency coaxial cable
  • the connection between the adapter and the housing and the inner rod serves as the first reflection point; where the connection between the radio frequency coaxial cable adapter and the housing and the inner rod serves as the first reflection point, the inner rod
  • the ratio of the diameter to the inner diameter of the housing is between 0 and 1; or,
  • the cavity length measuring device is applied to a pressure sensor
  • One end of the housing and the inner rod is connected to the demodulation device; the other end of the housing is connected to a diaphragm, the connection material is a conductor or an insulator, the diaphragm is a conductor or the first side of the diaphragm is coated with a conductor; the first reflection point is fixed on the housing and the inner Between the rod end surface and the demodulation device, the second reflection point is the end surface of the shell or the inner rod, the first reflection point and the second reflection point are both fixed points; the first side of the diaphragm close to the shell and the inner rod is the conductor reflection surface The end face of the inner rod is not in contact with the first side surface of the diaphragm, or is connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold, and the space between the second reflection point and the reflective surface of the conductor is a dielectric cavity; the diaphragm The second side is the side under pressure, and there is
  • the sensitivity of the pressure sensor can be increased in the following ways: one is to reduce the initial distance between the first side of the diaphragm and the second reflection point; the second is to reduce the thickness of the diaphragm; the third is to increase the diameter of the diaphragm , Enlarge the inner diameter and outer diameter at the end face of the shell, connect the outer ring of the end face of the expanded diameter structure to a diaphragm with a diameter greater than or equal to the diameter of the shell, and the outer ring of the diaphragm is sealed to the end face of the expanded diameter structure.
  • the resonant frequency/cavity length variation determines the cavity length variation of the dielectric cavity, thereby determining the pressure;
  • the type of the Bourdon tube includes at least a C-shaped Bourdon tube, a C-shaped combined Bourdon tube, or a spiral type Bourdon tube, or twist-type Bourdon tube, or round Bourdon tube.
  • the enlarged diameter structure includes at least a bell mouth or an enlarged diameter conductor, and the outer ring of the diaphragm is connected to the end surface of the enlarged diameter structure in a sealed manner;
  • the end surface of the shell should be along the diameter direction, add a cantilever support to both sides, the two support end surfaces are used as the two fulcrums of the beam, and the connecting piece is used to connect, the two ends are rigidly connected or the two ends are hinged.
  • it can be made into a cantilever beam, the end surface of the cantilever beam is fixed with a mass block, and the side of the mass block close to the shell and the end surface of the inner rod is the conductor reflection surface.
  • the open hollow coaxial cable-Fabry determines the change in the distance between the second reflection point of the open hollow coaxial cable-Fabry-Perot resonant cavity and the reflective surface of the conductor, that is, the cavity length of the dielectric cavity
  • the change is ⁇ d, and the relationship between the distance change ⁇ d and the tilt angle change ⁇ needs to be obtained through calibration.
  • the cavity length measuring device adopts two non-parallel and horizontally placed dielectric cavities, which are rigidly fixed to the top, bottom or side wall of the inclinometer respectively; the two cavity length measuring devices, the shell and the inner rod are on the same end surface, the The end surface is used as the second reflection point; in the first working condition below, the top plate is fixed with at least three parallel and equal-length flexible ropes or elastic rods hinged at both ends, and the flexible rope or the elastic rods hinged at both ends are connected to the roof or heavy objects. All fixed points are not on a straight line.
  • the cavity length change of the dielectric cavity is only related to the rope length/pole length and inclination angle, and has nothing to do with the number and position of the rope or rod; the flexible rope or the elastic rod hinged at both ends is suspended from the bottom.
  • the weight has vertical surfaces parallel to the flexible rope or the elastic rods hinged at both ends. These two vertical surfaces are respectively used as the conductor reflection surfaces of the two cavity length measuring devices and are made of conductive materials; the following second In a working condition, one or more elastic rods are used to rigidly connect the top plate and the weight, and the two conductor reflection surfaces on the weight are not parallel;
  • the first working condition Use parallel and equal length flexible ropes or elastic rods hinged at both ends to connect the top plate and the heavy object, fix the inclinometer to the measured object, use three parallel and equal length flexible ropes or both ends
  • Articulated elastic rods that is, three flexible ropes or elastic rods hinged at both ends are connected to the top plate and the weight at three points formed by two triangles congruent, the length of the flexible rope or the elastic rod hinged at both ends is L;
  • the two tilt directions are tilt around the X axis and tilt around the Y axis; a heavy object is suspended under the three ropes as a conductor
  • the normals of the two surfaces of the reflecting surface are the X axis and the Y axis respectively;
  • the axis of the cavity length measuring device of the two dielectric cavities is perpendicular to the two conductor reflecting surfaces, and the shell and the inner rod of the two cavity
  • the second working condition Use an elastic rod to rigidly connect the top plate and a heavy object, and fix the inclinometer to the object to be measured.
  • the lengths of the elastic rods are all Is L, the elastic rod is rigidly connected to the top plate and the weight; when the inclinometer is tilted around both the X-axis and the Y-axis, the second can be obtained by the resonant frequency/variation of the resonant cavity length of the two cavity length measuring devices
  • the change in the distance between the reflection point and the reflective surface of the conductor, that is, the change in the cavity length of the dielectric cavity is ⁇ d 1 and ⁇ d 2.
  • the cavity length changes ⁇ d 1 , ⁇ d 2 and the tilt angle of the two dielectric cavities need to be calibrated The relationship between the quantities ⁇ 1 and ⁇ 2 .
  • the cavity length measuring device is used in a unidirectional inclinometer
  • the inclinometer includes a closed container fixed to the object to be measured, the bottom of the closed container has a certain depth of liquid, the inclinometer uses two pressure sensors The pressure difference is used to determine the inclination angle, which can eliminate the influence of temperature without temperature compensation;
  • the two pressure sensors When the two pressure sensors are rigidly fixed to the top, bottom or sides of the container, the two pressure sensors rotate with the inclination of the object to be measured; the two pressure sensors are placed on the left and right, and the two pressure sensors are parallel to each other.
  • the parallel distance is d; the end faces of the outer shell and the inner rod are below, and the two pressure measuring diaphragms or the end face diaphragms of the Bourdon tube are immersed in the liquid, and the distance from the bottom of the container is equal; when the measured object drives the airtight container in the two pressure sensors
  • the depth of the two pressure sensors immersed in the liquid will also change, so the pressure measured by the two pressure sensors will also change; and because the axes of the two pressure sensors are always parallel, the two pressure sensors are always parallel.
  • the cavity length measuring device is used in a two-way inclinometer
  • Both can be obtained through the resonant frequency/cavity length of the open hollow coaxial cable-Fabry Perot cavity; through the cavity length change of the two dielectric cavities and the normal vector of the two inclined planes, Obtain the horizontal slip amount ⁇ x and the longitudinal separation amount ⁇ z of the medium A relative to the medium B:
  • the axes of the three inclined holes are perpendicular to the three inclined planes; the three inclined planes are The three inclined planes made of the three-inclined carrier fixed to the medium B are the first inclined plane, the second inclined plane and the third inclined plane.
  • the three inclined planes of the three inclined planes are the first cavity length measuring device and the second inclined plane.
  • the first conductor reflecting surface, the second conductor reflecting surface and the third conductor reflecting surface corresponding to the two-cavity length measuring device and the third cavity length measuring device;
  • the slip gauge carrier is fixed on the medium A, the shell of the first cavity length measuring device is fixed in the first inclined hole of the slip gauge carrier, and the shell of the second cavity length measuring device is fixed on the second cavity of the slip gauge carrier.
  • the housing of the third cavity length measuring device is fixed in the third oblique hole of the slip gauge carrier, and the end faces of the housing and the inner rod of the first cavity length measuring device are directly opposite and parallel to the first inclined plane.
  • the end faces of the housing and the inner rod of the second cavity length measuring device are directly opposite and parallel to the second inclined plane.
  • the end faces of the housing and the inner rod of the third cavity length measuring device are directly opposite and parallel to the third inclined plane.
  • the first cavity length measuring device is used to measure the distance change from the second reflection point of the device to the first conductor reflection surface, that is, the cavity length change of the dielectric cavity is ⁇ d 1
  • the second cavity length measuring device uses To measure the change in the distance from the second reflection point of the device to the reflection surface of the second conductor, that is, the change in the cavity length of the dielectric cavity is ⁇ d 2
  • the third cavity length measuring device is used to measure the second reflection point of the device
  • the distance change from the reflective surface of the third conductor that is, the cavity length change of the dielectric cavity is ⁇ d 3 ;
  • the three distance changes, namely the cavity length change of the dielectric cavity ⁇ d 1 , ⁇ d 2 and ⁇ d 3 can all be opened
  • the resonant frequency/cavity length of the hollow coaxial cable-Fabry-Perot cavity can be obtained; the first object can be obtained by the cavity length variation of the three dielectric cavities and the normal vectors of the three inclined planes
  • the cavity length measuring device is applied to a displacement sensor based on a spring and a diaphragm
  • the displacement sensor uses a spring and a diaphragm to convert a larger displacement change into a smaller diaphragm deflection change; the side of the diaphragm close to the cavity length measuring device of the dielectric cavity is the conductor reflection surface; The cavity length measuring device of the dielectric cavity from the reflection point to the conductor reflection surface is made into a displacement sensor.
  • the cavity length measuring device shell and the left end surface of the inner rod are connected to the demodulation device, the right end surface is the second reflection point, and the right end of the second reflection point
  • a diaphragm is placed at a certain distance.
  • the axis of the diaphragm and the inner rod of the housing coincide.
  • the sensitivity of the displacement sensor can be increased by increasing the diameter of the diaphragm.
  • the amount of change becomes a small amount of movement of the inclined plane in the direction of the normal line of the inclined plane;
  • the cavity length measuring device of the dielectric cavity that measures the distance between the second reflection point and the conductor reflection surface is used to make a displacement sensor, the housing of the cavity length measuring device and
  • the end surface of the inner rod conductor area is on a plane, which is the plane where the second reflection point is located, and the plane is parallel to the conductor reflection surface, that is, the axis of the cavity length measuring device is parallel to the normal line of the slope; the slope is the reflection surface of the conductor ;
  • the inclination angle of the inclined plane is a known quantity ⁇ .
  • ⁇ d the change in the distance from the second reflection point of the cavity length measuring device to the reflective surface of the conductor, that is, the change in the cavity length of the dielectric cavity
  • ⁇ d w ⁇ sin ⁇
  • the change in the resonant frequency/cavity length can determine the second reflection point to
  • the amount of change ⁇ d in the cavity length of the dielectric cavity between the reflective surfaces of the conductor is used to determine the magnitude of the displacement; when the maximum and minimum cavity length of the dielectric cavity remain unchanged, the displacement is increased by reducing the slope of the slope The range of the sensor.
  • the cavity length measuring device is applied to a displacement sensor based on a folding lever structure
  • the folded end face of the folding lever on the side with the smaller number of folds is fixed with a conductor reflecting surface, which can change the larger displacement change in the axial direction into a smaller movement of the conductor reflecting surface in the axial direction; use the measurement of the second reflection point to
  • the cavity length measuring device of the dielectric cavity of the distance from the conductor reflection surface is made into a displacement sensor. From left to right, there are the demodulation device, the cavity length measuring device of the dielectric cavity, M folds, fold fixed points, N folds and probe rods.
  • the shell of the cavity length measuring device and the end surface of the inner rod conductor area are on a plane, which is the plane where the second reflection point is located, and the plane is parallel to the conductor reflection surface, that is, the axis of the cavity length measuring device is perpendicular to the conductor reflection
  • the axis of the cavity length measuring device is the same as the movement direction of the folded end face probe;
  • the displacement is reduced by the folding lever structure;
  • the folding lever has multiple rotating shafts, the fixed point of the folding lever structure is close to the conductor reflection surface, there are M folds between the fixed point and the conductor reflection surface, and there are between the fixed point and the displacement sensor probe N folds; half of the length of each fold between the fixed point and the displacement sensor probe is L; half of the length of each fold between the fixed point and the reflective surface of the conductor is a; the displacement if the probe on the right moves The amount is w, then the change in the distance between the second reflection point and the reflective surface of the conductor, that is, the change in cavity length of the dielectric cavity ⁇ d is:
  • the cavity length variation of the open hollow coaxial cable-Fabry Perot cavity can determine the distance variation between the second reflection point and the conductor reflection surface, that is, the cavity length variation of the dielectric cavity is ⁇ d, because the first Between the second reflection point and the reflective surface of the conductor, the cavity length of the dielectric cavity has a limited variation range, so the larger the range of the displacement sensor, the smaller the ratio of Na to ML; the displacement change is always proportional to the cavity length change of the dielectric cavity.
  • the cavity length measuring device is applied to a displacement sensor based on a gear and rack structure
  • the gear and rack structure consists of at least one of the following mechanical structures: gears, double-layer gears, racks, and worms.
  • the gears and rack structures reduce the large displacement changes so that the second reflection point is to the conductor
  • the distance between the reflective surfaces changes slightly, and the change is ⁇ d, that is, the change of the cavity length of the dielectric cavity is ⁇ d; the displacement change is always proportional to ⁇ d; the housing and inner rod of the cavity length measuring device of the dielectric cavity
  • the end surface of the conductor area is on a plane, the plane is the plane where the second reflection point is located, and the plane is parallel to the conductor reflection surface, that is, the axis of the cavity length measuring device is perpendicular to the conductor reflection surface;
  • the probe rod of the displacement sensor has a first rack.
  • the first rack is driven to move.
  • the first rack is connected to the large-diameter gear on the double-layer gear, and the small-diameter gear on the double-layer gear is connected to the second tooth.
  • the end surface of the second rack is fixed with a conductor reflecting surface, the axis of the conductor reflecting surface is parallel to the axis of the cavity length measuring device shell and the inner rod, and the cavity length measuring device is fixed on the substrate; the displacement of the probe rod changes greatly
  • the displacement reduction is carried out by the double-layer gear, so that the second rack with the conductor reflection surface has a smaller displacement change, that is, the distance between the second reflection point and the conductor reflection surface has a smaller change.
  • the probe of the displacement sensor has a first rack.
  • the first rack is driven to move.
  • the first rack is connected to the first gear with a worm.
  • the first gear and the worm share a rotating shaft, and the first gear rotates Drive the worm to rotate;
  • the worm is connected to the second gear, and the larger displacement is reduced by the worm, which drives the second gear to rotate slightly;
  • the second gear is connected to the second rack, and the end surface of the second rack is the reflective surface of the conductor.
  • the axis of the reflecting surface is parallel to the axis of the housing and the inner rod of the cavity length measuring device, and the cavity length measuring device is fixed on the substrate; through calibration, the linear relationship between the displacement and the cavity length change ⁇ d of the dielectric cavity can be obtained.
  • the cavity length measuring device is applied to a refractive index sensor, and the refractive index sensor is a first type of refractive index sensor or a second type of refractive index sensor;
  • the housing and inner rod of the cavity length measuring device of the dielectric cavity are on the left, the conductor reflection surface is on the right, and the right end surface of the inner rod conductor area of each cavity length measuring device is used as the second reflection point.
  • the end surface of the inner rod conductor area is not in contact with the reflective surface of the conductor, or connected by an insulator, or connected by a conductor with a resistivity greater than or equal to a preset threshold; the end surface of the outer conductor area and the inner rod end surface are the same plane, or the outer conductor
  • the end face of the area is on the right side of the inner rod end face, and the shell and the conductor reflection surface are connected with a conductor or insulator or not connected;
  • the conductor reflection surface is at the right end of the second reflection point, and the plane where the second reflection point is parallel to the conductor reflection
  • the geometric distance d between the second reflection point and the conductor reflection surface remains unchanged, that is, the geometric cavity length d of the dielectric cavity remains unchanged; a sealing structure is provided between the outer shell and the inner rod at the left end of the second reflection point, so that The liquid or solid or gas of the refractive index to be measured is filled between the plane where the second reflection point is located and the reflective surface of the conduct
  • the shell and the inner rod are on the left, the conductor reflection surface is on the right, the conductor area of the inner rod is connected to the conductor reflection surface, and the end surface of the shell conductor area is on the left side of the inner rod end surface, that is, on the conductor reflection surface
  • the right end surface of the housing conductor area of each sensor is used as the second reflection point;
  • the end surface of the housing conductor area and the conductor reflection surface are not in contact, or connected with an insulator, or used with a resistivity greater than or equal to a preset threshold Conductor connection;
  • the plane of the second reflection point is parallel to the reflection surface of the conductor, and the geometric distance d between the second reflection point and the reflection surface of the conductor remains unchanged, that is, the cavity length of the dielectric cavity does not change;
  • the cavity length measuring device is applied to a sensor for measuring corrosion;
  • the sensor for measuring corrosion has the following two working conditions:
  • the first working condition is the corrosion of the reflective surface of the conductor.
  • the structure of the sensor for measuring corrosion is the same as that of the refractive index sensor.
  • the distance between the second reflection point and the reflective surface of the conductor remains unchanged, that is, the geometric cavity length of the dielectric cavity d No change;
  • the dielectric cavity between the second reflection point and the reflective surface of the conductor is a cavity, and the carrier of the reflective surface of the conductor is solid or made into a porous structure to increase the corrosion area and increase the sensitivity of the sensor;
  • the material of the reflective surface is a material that can be corroded;
  • the shell and the reflective surface of the conductor are partially connected or connected with a pore structure to make it easier for liquid or gas to penetrate into the dielectric cavity; the material of the reflective surface of the conductor will be corroded.
  • Corrosion products change the refractive index of the dielectric in the dielectric cavity between the second reflection point and the conductor reflection surface, thereby changing the resonant frequency/cavity length of the open hollow coaxial cable-Fabry-Perot cavity , Through the change of the resonant frequency/length of the cavity of the open hollow coaxial cable-Fabry-Perot resonator, the change of the cavity length of the dielectric cavity can be measured, and the change of the refractive index can be obtained to determine the corrosion degree;
  • the second working condition is that the reflective surface of the conductor does not corrode.
  • the carrier of the reflective surface of the conductor does not corrode, it is necessary to ensure that external corrosion products can penetrate into the dielectric cavity area between the shell and the reflective surface of the conductor; the reflective surface of the conductor has a porous structure , Or, the shell and the reflective surface of the conductor are partially connected or connected by a pore structure; when the corrosion product is immersed in the dielectric cavity between the shell and the reflective surface of the conductor, the refractive index of this area changes, thereby changing the open hollow Coaxial cable-Fabry-Perot resonant cavity resonant frequency/cavity length, through the open hollow coaxial cable-Fabry-Perot resonant cavity resonant frequency/resonant cavity length change and dielectric cavity
  • the size of the geometric cavity length d can be used to measure the change in refractive index to determine the degree of corrosion.
  • Figure 2(a) is the working condition where the shell and the inner rod are respectively connected with the reflective surface of the conductor with an insulator or a conductor with a larger resistivity;
  • Figure 2(c) shows the working condition where there is a conductor connection between the inner rod and the conductor reflecting surface, and the shell and the conductor reflecting surface are connected with an insulator or a conductor with a larger resistivity;
  • Figure 3(a) is the reflection or transmission amplitude spectrum of the open hollow coaxial cable-Fabry-Perot resonator according to an embodiment of the application
  • Figure 5 is a cross-sectional view of commonly used reflection points
  • Figure 9(b) is a structural schematic diagram of the outer shell and the inner rod end face of the embodiment of the application in different cross-sectional working conditions
  • Fig. 9(c) is a schematic diagram of the outer shell and the inner rod end surface with an enlarged diameter structure of the embodiment of the application, that is, the schematic diagram of the diaphragm pressure sensor and the acoustic wave sensor;
  • Fig. 9(e) is a schematic diagram of the conductor connected between the inner rod and the outer shell conductor reflection sheet in the embodiment of the application, and there is a conductor or insulator medium between the outer shell and the conductor reflection surface;
  • Figure 10 (a) is a schematic structural diagram of a C-type Bourdon tube pressure sensor according to an embodiment of the application.
  • Fig. 10(b) is a schematic structural diagram of a spiral Bourdon tube pressure sensor according to an embodiment of the application.
  • FIG. 11 is a schematic structural diagram of an acceleration sensor according to an embodiment of the application.
  • Fig. 12(a) is a schematic structural diagram of a first flow velocity sensor according to an embodiment of the application.
  • Fig. 12(b) is a schematic structural diagram of a second flow velocity sensor according to an embodiment of the application.
  • Fig. 12(c) is a schematic structural diagram of a third flow velocity sensor according to an embodiment of the application.
  • Fig. 13(a) is a schematic structural diagram of the first load cell according to an embodiment of the application.
  • Fig. 13(b) is a schematic structural diagram of a second load cell according to an embodiment of the application.
  • FIG. 14 is a schematic structural diagram of a strain gauge according to an embodiment of the application.
  • Fig. 15(a) is a schematic structural diagram of a second horizontally placed unidirectional inclinometer according to an embodiment of the application;
  • Figure 15(b) is a schematic structural diagram of the first horizontally placed unidirectional inclinometer according to an embodiment of the application;
  • 16 is a schematic structural diagram of a horizontally placed bidirectional inclinometer according to an embodiment of the application.
  • Figure 17(a) is a schematic structural diagram of a second type of unidirectional inclinometer based on a pressure sensor according to an embodiment of the application;
  • Figure 17(b) is a schematic structural diagram of a second type of bidirectional inclinometer based on a pressure sensor according to an embodiment of the application;
  • Figure 18 (a) is a schematic diagram of the structure of the XZ direction slip gauge according to an embodiment of the application.
  • Figure 18(b) is a schematic diagram of the structure of the XYZ direction slip gauge according to the embodiment of the application.
  • Figure 19 (a) is a schematic structural diagram of a first displacement sensor based on a spring and a diaphragm according to an embodiment of the application;
  • FIG. 19(b) is a schematic structural diagram of a second displacement sensor based on a spring and a diaphragm according to an embodiment of the application;
  • Fig. 20(a) is a schematic structural diagram of a displacement sensor based on inclined plane for displacement reduction according to an embodiment of the application;
  • Figure 20(b) is a schematic structural diagram of a displacement sensor based on a folding lever structure for displacement reduction according to an embodiment of the application;
  • Figure 20(c) is a schematic structural diagram of a displacement sensor based on double-layer gears for displacement reduction according to an embodiment of the application;
  • Figure 20(d) is a schematic structural diagram of a displacement sensor based on a worm for displacement reduction according to an embodiment of the application;
  • FIG. 21 is a schematic structural diagram of a sensor for measuring refractive index or corrosion according to an embodiment of the application.
  • the outer shell which can be a hollow tube, rod, spring or other continuous conductor
  • the inner rod which can be hollow, solid, or a spring or a continuous conductor of other shapes
  • the first reflection point which can be Conductor or insulator, which can be connected to the shell or inner rod, or not connected, can be any shape or a combination of multiple parts
  • 4- The second reflection point with the same properties as the first reflection point; 5- Resonant cavity, the inside can be It is gas or liquid; 6-coaxial cable adapter; 7-center signal pin of coaxial cable adapter; 8-coaxial cable for transmission; 9-demodulation main board, demodulation spectrum instrument, which can be vector network (Referred to as Vector Network) analyzer, or scalar microwave analyzer, or demodulation circuit board for measuring and demodulating spectrum, does not include transmission lines such as coaxial cables for transmission; 10-second reflection point, dielectric cavity and reflection surface System; 11-Conductor reflective surface, usually conductive materials, in special cases can also be semiconductors or insulators
  • the embodiments of the present application provide a new type of measuring device for measuring the cavity length (dielectric layer thickness) of a dielectric cavity based on the microwave principle.
  • the cavity length measuring device of the dielectric cavity includes a sensor and a demodulation device, and the sensor includes an open type Hollow coaxial cable-Fabry-Perot resonant cavity, first reflection point, second reflection point, conductor reflection surface and dielectric cavity, the cavity length measurement device of the dielectric cavity of the embodiment of the application can pass through the cavity of the dielectric cavity Long-term measurement, combined with some mechanical design, so as to make a sensor that measures various physical parameters.
  • the embodiment of the application combines the cavity length measurement device of the dielectric cavity and the auxiliary mechanical design, and the cavity length measurement device can be modified into the following sensors: diaphragm pressure sensor, Bourdon tube pressure sensor, acceleration sensor, flow rate sensor, load cell (Also called dynamometer), strain gauges, inclinometers, slip sensors, displacement sensors, refractive index sensors, and corrosion sensors.
  • the senor can measure pressure, flow rate, force, strain, tilt angle, slip, displacement, refractive index, corrosion and other parameters with high accuracy based on different mechanical transmission modes.
  • the principle of measurement It is based on the principle of an open hollow coaxial cable-Fabry Perot cavity.
  • the sensor includes an open hollow coaxial cable-Fabry Perot cavity (also referred to as a resonant cavity) and the first reflection
  • the second reflection point, the reflection surface of the conductor and the dielectric cavity it also includes an outer shell and an inner rod (optional).
  • the structure of the open hollow coaxial cable-Fabry Perot cavity is convenient to manufacture ,
  • the two reflection points that is, the first reflection point and the second reflection point
  • the two reflection points do not move relative to each other (generally, the positions of the two reflection points are fixed), and the movement of the conductor reflection surface is used to change the cavity length of the dielectric cavity ( The thickness of the medium layer), which can measure the pressure, flow velocity, force, strain, tilt angle and refractive index under static and dynamic forces.
  • the dielectric in the dielectric cavity can be a conductor or an insulator, and can be a solid, liquid or gas.
  • the temperature compensation of the sensor is very convenient and is not affected by factors such as electromagnetics.
  • the sensor designed in the embodiment of the present application has the advantages of high accuracy, strong anti-interference ability, and strong durability, and has a wide range of application prospects, and is particularly suitable for high-precision measurement of mechanical properties and refractive index of structures under static and dynamic forces. Due to the stable performance of the material used in the sensor, it can easily work between minus sixty degrees and hundreds of degrees above zero, and can work in a larger temperature range by changing the material. In a word, the sensor of the embodiment of the present application is not interfered by any electromagnetic signal, the temperature influence on it is minimal, and temperature compensation is very easy to realize.
  • the open hollow coaxial cable-Fabry-Perot resonant cavity in the embodiment of this application is similar to the traditional optical Fabry-Perot resonant cavity.
  • the difference from the optical Fabry-Perot resonant cavity is that the open hollow
  • the coaxial cable-Fabry Perot cavity is based on the microwave principle. Microwaves resonate in a Fabry-Perot cavity formed by two reflection points as high reflection points on a hollow coaxial cable. The resonance frequency spectrum is coherent with the cavity length.
  • the resonant frequency/cavity length will also be affected by the distance between the second reflection point and the conductor reflection surface, that is, the cavity length of the dielectric cavity, where the second reflection point is between the first reflection point and the conductor reflection surface .
  • the open hollow coaxial cable-Fabry Perot resonator is a resonance phenomenon caused by multi-channel interference, and has the characteristics of high demodulation accuracy, high signal-to-noise ratio, and high cost-effective demodulation device. Therefore, a high-precision dielectric cavity length can be obtained by analyzing the resonance frequency spectrum/cavity length.
  • the embodiment of the present application converts different physical quantities into the cavity length variation of the dielectric cavity through a series of mechanical structures, thereby completing high-precision measurement of each physical quantity.
  • the sensor includes an open hollow coaxial cable-Fabry Perot cavity, a first reflection point, a second reflection point, a conductor reflection surface, and a dielectric cavity; wherein, the first reflection point is set in the open At a first position inside the hollow coaxial cable-Fabry-Perot cavity, the second reflection point is set at a second position inside the open-type hollow coaxial cable-Fabry-Perot cavity, The conductor reflection surface is arranged at a third position inside the open hollow coaxial cable-Fabry Perot cavity, and there is no relative movement between the first reflection point and the second reflection point, The reflectivity of the first reflection point and the second reflection point is greater than or equal to a preset threshold, that is, the first reflection point and the second reflection point are high reflection points; the second reflection point and the conductor reflection surface are different
  • the space is a di
  • Fig. 1 is a schematic diagram of the principle of a sensor provided by an embodiment of the application.
  • the sensor includes: an open hollow coaxial cable-Fabry-Perot cavity 5, a first reflection point 3, and a second reflection point 4 , Conductor reflective surface 11, and dielectric cavity 12.
  • the sensor also includes: a housing 1 and an inner rod 2.
  • the diameters of the inner rod 2 and the outer shell 1 are 2a and 2b, respectively.
  • the electrostatic capacitance is excited by the TEM (Transverse Electric and Magnetic) field of the coaxial line on the aperture.
  • the dielectric layer at the aperture is infinitely thick (ie d ⁇ )
  • the calculation formula of fringe capacitance is shown in formula (1):
  • C is the speed of light in the air
  • L is the physical length between the metal column (ie the first reflection point) and the open end (ie the second reflection point)
  • f is the hollow coaxial
  • ⁇ 1 and ⁇ 2 are the composite reflection coefficients of the two reflection points (ie, the first reflection point and the second reflection point).
  • Adjust the distance d and track the corresponding first-order resonance frequency The relationship between the first-order resonance frequency and the cavity length of the dielectric cavity (the thickness of the dielectric layer) (that is, the distance between the second reflection point and the reflective surface of the conductor) is shown in Figure 3(b).
  • the medium in the dielectric cavity (dielectric layer) is air.
  • the basic idea of using an open hollow coaxial cable-Fabry Perot cavity to make a sensor is based on the accurate calculation of the cavity length (the thickness of the dielectric layer) of the dielectric cavity from the reflection amplitude spectrum or the transmission amplitude spectrum.
  • the cavity length measurement device for measuring the dielectric cavity using the microwave principle in the embodiment of the present application will be described in detail below with reference to the specific structure.
  • the cavity length measurement device of the embodiment of the present application includes a sensor and a demodulation device. In all the embodiments of this application:
  • the outer shell 1 or the inner rod 2 can be a conductor part, or a composite part of multiple conductor parts connected together (to ensure the conductivity of the connection). It can be seen that the outer shell 1 or the inner rod 2 is a continuous conductor respectively.
  • a conductor part drawn in all the drawings does not necessarily represent a simple conductor part, but may also represent a composite conductor part composed of multiple conductor parts through different connection methods.
  • the sensor includes an open hollow coaxial cable-Fabry-Perot cavity 5, a first reflection point 3, a second reflection point 4, a dielectric cavity 12, and a conductor reflection surface 11, wherein the first reflection point 3 Is arranged at a first position inside the open hollow coaxial cable-Fabry Perot cavity, the second reflection point 4 is arranged at a second position inside the cavity, and the first position And the second position are fixed; the reflectivity of the first reflection point 3 and the second reflection point 4 is greater than or equal to a preset threshold; the conductor reflection surface 11 and the second reflection point 4 are separated by a dielectric In the cavity 12 (dielectric layer), the distance between the second reflection point 4 and the conductor reflection surface 11 can be changed, that is, the cavity length of the dielectric cavity can be changed, and the change mode can be realized by the movement or deformation of the conductor reflection surface;
  • the cavity length change of the dielectric cavity can change the resonant frequency/cavity length of the open hollow coaxial cable-Fabry-Perot resonant
  • the demodulation main board 9 of the sensor is composed of a high-performance processor, a microwave transmitting module and a microwave receiving module; it can be a vector network (referred to as vector network) analyzer, or a scalar microwave analyzer, or a demodulator for measuring and demodulating spectrum.
  • the circuit board does not include transmission lines such as coaxial cables for transmission.
  • the demodulation main board 9 obtains the resonant frequency/cavity length of the open hollow coaxial cable-Fabry-Perot resonant cavity in the sensor by demodulating the resonant frequency spectrum, thereby obtaining the cavity length of the dielectric cavity.
  • the demodulation device 100 refers to the general name of the instrument that demodulates the cavity length of the resonant cavity, including all the demodulation boards 9 based on reflection, or transmission, or loops, RF coaxial cable adapters, and the transmission of the sensor connected to the demodulation board.
  • the demodulation device 100 is used to represent all types of demodulation motherboards and all connection methods between the sensors and the demodulation motherboard.
  • the RF coaxial cable adapter used to connect the waveform amplifier is usually connected to the housing between the RF coaxial cable adapter and the other end of the sensor, and the demodulation main board is used for Measure the circumference of the positive feedback loop.
  • This structure can be applied to the diaphragm pressure sensor, Bourdon tube pressure sensor, acceleration sensor, flow rate sensor, load cell (also called dynamometer), strain gauge, inclinometer, slip sensor, displacement described in this application Sensors, refractive index sensors, gas adsorption sensors and corrosion sensors and other sensors.
  • the transmissive cavity length measuring device includes Positive feedback loop mode and no loop mode, where the positive feedback loop includes three working conditions of two reflection points, one reflection point and no reflection point.
  • Example 1 Cavity length measuring device for measuring dielectric cavity using microwave principle
  • a reflective cavity length measuring device in the reflective cavity length measuring device:
  • One end of the sensor is directly connected to the demodulation main board, that is, one end of the sensor can be connected to the demodulation main board through the first radio frequency coaxial cable adapter, or directly connected to the demodulation main board; the housing wall of the sensor is connected to the second radio frequency A coaxial cable adapter, the second radio frequency coaxial cable adapter is connected to the demodulation main board through a coaxial cable; or,
  • One end of the sensor is directly connected to the demodulation main board, that is, one end of the sensor can be connected to the demodulation main board through the first radio frequency coaxial cable adapter, or it can be directly connected to the demodulation main board; the housing wall of the sensor is directly connected to the demodulation main board.
  • the modulation main board that is, the shell wall can be connected to the demodulation main board through the second radio frequency coaxial cable adapter, or directly connected to the demodulation main board.
  • both ends of the housing and the inner rod are connected to the radio frequency coaxial cable adapter, and the radio frequency coaxial cable adapter is connected to the demodulation main board through a coaxial cable
  • the first end of the housing and the inner rod is directly connected to the demodulation motherboard, that is, the first end of the housing and the inner rod can be connected to the demodulation motherboard through the first radio frequency coaxial cable adapter, or directly connected to the demodulation motherboard Adjust the motherboard.
  • At least a part of the first reflection point and the second reflection point are arranged within the envelope range of the outer shell and the inner rod;
  • One end of the sensor is directly connected to the demodulation main board, that is, one end of the sensor can be connected to the demodulation main board through the first radio frequency coaxial cable adapter, or can be directly connected to the demodulation main board; the housing wall of the sensor is connected to the second radio frequency A coaxial cable adapter, the second radio frequency coaxial cable adapter is connected to the demodulation main board through a coaxial cable; or,
  • the cavity length measuring device has at least the following modes: positive feedback loop mode and no loop mode; wherein,
  • the demodulation main board is a vector network analyzer, or a scalar microwave analyzer, or a demodulation circuit board.
  • the first ends of the housing and the inner rod are both connected to the first radio frequency coaxial cable adapter, and the first radio frequency coaxial cable adapter passes through the first radio frequency coaxial cable adapter.
  • the coaxial cable is connected to the demodulation main board; or the first end of the housing and the inner rod are not connected to the demodulation main board through a coaxial cable, that is, the first end of the housing and the inner rod can be connected to the demodulation main board through the first radio frequency.
  • the shaft cable adapter is connected to the demodulation main board, or it can be directly connected to the demodulation main board.
  • the main board connection is adjusted, that is, the housing wall can be connected to the demodulation main board through the second RF coaxial cable adapter, or directly connected to the demodulation main board. At least a part of the first reflection point and the second reflection point are arranged within the envelope range of the housing.
  • each core device is as follows: shell 1, inner rod 2, first reflection point 3, second reflection point 4, open hollow coaxial cable-Fabry Perot cavity 5, conductor reflection surface 11.
  • the inner rod 2 is also a continuous conductor. Like the outer shell 1, the inner rod 2 can also have different geometric shapes.
  • the cross-sectional shape can be round, rectangular or semicircular, etc., can be a straight rod, a curved rod such as a spring, or It can be a connector in which multiple conductors are connected together.
  • the cavity length measuring device can be used without an inner rod, and the required parameters can still be measured by demodulating the signal through the demodulation main board.
  • Figure 4(b) lists the commonly used cross-sectional views of the inner rod.
  • Figure 6 lists the commonly used connection methods between different sections of the inner rod when multiple parts constitute the inner rod.
  • the first reflection point 3 refers to some objects within the envelope of the outer shell and the inner rod, which can be of various shapes, different sizes, conductors or insulators of different materials, or multiple parts. combination. As long as it can play a reflective role. If the reflection point is a conductor connecting the shell and the inner rod, then the reflectivity of this point will be high, if it is not connecting the shell and the inner rod conductor, the reflectivity will be lower.
  • the first reflection point is a cross-section with a size smaller than a preset area, and at least can be placed perpendicular to the axis of the sensor inner rod through one or more round rods or square rods, or between the housing and the inner rod
  • a porous structure with a certain transmittance is fixed, and the area of the first reflection point covering the area between the outer shell and the inner rod is smaller than the envelope area between the outer shell and the inner rod; the first reflection The point forms a short circuit between the shell and the inner rod, or the resistance of the connecting piece between the shell and the inner rod is greater than or equal to a preset threshold.
  • the reflectivity can also be adjusted by changing the cross-sectional shape and size of the inner rod.
  • the first reflection point added between the housing and the inner rod can be removed, and the RF coaxial cable adapter can be connected to the housing and the The connection of the inner rod is used as the first reflection point; wherein, when the connection between the radio frequency coaxial cable adapter and the housing and the inner rod is used as the first reflection point, the ratio of the diameter of the inner rod to the inner diameter of the housing is intermediate Between 0 and 1.
  • the second reflection point 4 is the end face of the shell, or the end face of the inner rod, or the end face of the conductor area of the shell and the inner rod, when the end face of the shell or the inner rod is on a plane and the end face is at a certain distance from the conductor reflection surface, or the shell Or the inner rod has a short-circuit connection with the reflective surface of the conductor, and the end surface of the other element is at a certain distance from the reflective surface of the conductor.
  • the second reflection point 4 is the element with a certain distance between the shell or the inner rod and the reflective surface of the conductor.
  • the second reflection point 4 at this time is a point between the shell and the inner rod end face plane.
  • the second reflection point is a fixed point.
  • Open hollow coaxial cable-Fabry Perot cavity 5 refers to the cavity between the first reflection point and the second reflection point, and between the shell and the inner rod.
  • the medium in the cavity is vacuum , Gas, liquid or solid.
  • the conductor reflection surface 11 refers to a cylinder that is kept at a certain distance from the shell or the end surface of the inner rod. It is necessary to ensure that the envelope surface of the shell and the inner rod is swept along the axial direction and has a certain intersection with the area where the conductor reflection surface is located. At least one of the outer shell 1 and the inner rod 2 does not have a short circuit with the conductor reflection surface 11.
  • the conductor reflective surface 11 may be a single conductor, which may be perforated, and may be of various shapes; it may also be a plurality of unconnected conductors or a plurality of conductors connected by insulators.
  • the dielectric cavity 12 is the dielectric layer, which is the area between the second reflection point 4 and the conductor reflection surface 11, which can be filled with insulating gas, liquid or solid.
  • the vector network analyzer or scalar microwave analyzer or demodulation circuit board 9 is a device for measuring the reflection amplitude spectrum or the transmission amplitude spectrum of the open hollow coaxial cable-Fabry Perot cavity.
  • Figure 1 illustrates the core elements of the sensor provided by the embodiments of the present application, including a housing 1, an inner rod 2, a first reflection point 3, a second reflection point 4, a conductor reflection surface 11, a dielectric cavity 12, and an open hollow concentric Shaft cable-Fabry Perot cavity 5.
  • the first reflection point 3 is arranged at a first position inside the open hollow coaxial cable-Fabry Perot cavity
  • the second reflection point 4 is arranged on the open hollow coaxial cable.
  • the conductor reflection surface 11 At the second position inside the cable-Fabry-Perot cavity, the conductor reflection surface 11 is at the third position inside the open hollow coaxial cable-Fabry-Perot cavity, and the first The reflection point 3 and the second reflection point 4 are fixed, the conductor reflection surface 11 can move, so that the cavity length of the dielectric cavity changes, thereby affecting the resonance of the open hollow coaxial cable-Fabry Perot cavity Frequency / cavity length.
  • Figure 2 (a) shows the case where the shell 1 and the inner rod 2 are respectively connected to the reflective surface 11 of the conductor with an insulator or a conductor with larger resistivity; at this time, the conductive area of the rod in the shell and the reflective surface 11 can be Fill with insulating or conductive solid, liquid or gas. 13 represents dielectric.
  • Figure 2(b) shows a working condition where there is a conductor connection between the housing 1 and the conductor reflecting surface 11 and the inner rod 2 and the conductor reflecting surface 11 are connected by an insulator or a conductor with a resistivity greater than or equal to a preset threshold; Solid, liquid or gas can be filled between the conductor area of the inner rod and the conductor reflection surface 11. 13 indicates an insulator or a conductor whose resistivity is greater than or equal to a preset threshold.
  • Figure 3(b) is a graph showing the relationship between the first-order resonance frequency f and the dielectric cavity length d (dielectric layer thickness) (that is, the distance between the metal plate and the open end of the coaxial cable). It can be seen that the smaller the cavity length of the dielectric cavity, the faster the resonance frequency changes, and the more sensitive the sensor.
  • Fig. 4(a) shows a cross-sectional view of a commonly used housing 1, which can be a ring, a box or various irregular shapes, and the housing can even be a spring or a round rod. It can also be divided into a combination of multiple conductors connected together, as long as the continuous conductor is satisfied.
  • the conductor reflection surface 11 is at the third position inside the open hollow coaxial cable-Fabry-Perot cavity, and the first The reflection point 3 and the second reflection point 4 are fixed and there is no relative movement between the two reflection points.
  • the conductor reflection surface 11 can move relative to the second reflection point 4; the first reflection point 3 and the The reflectivity of the second reflection point 4 is greater than or equal to a preset threshold.
  • the demodulation main board 9 is connected to the sensor, and is used to analyze the microwave signal in the sensor to obtain the cavity length of the sensor, where the cavity length of the sensor is equal to the first reflection point 3 and The distance between the second reflection point 4 and the distance is affected by the change of the distance between the second reflection point 4 and the conductor reflection surface 11.
  • Fig. 7(c) is a schematic structural diagram of a cavity length measuring device in which the demodulation main board is directly connected to the wall of the sensor housing according to an embodiment of the application.
  • One end of the sensor is a sealing device 17 on the end faces of the housing 1 and the inner rod 2.
  • the sealing device 17 can be a conductor, an insulator, a closed or non-closed structure, or a coaxial cable adapter as an end face.
  • the other end of the sensor is the second reflection point 4, the dielectric cavity 12 and the conductor reflection surface 11.
  • the radio frequency coaxial cable adapter 6 is connected to the housing 1 and the inner rod 2 at the left ends of the housing 1 and the inner rod 2, and the other radio frequency coaxial cable adapter 16 is connected to the wall of the housing instead of on the right end surface.
  • the radio frequency coaxial cable adapter 6 is connected to the housing 1 at the left end of the housing 1, and the other radio frequency coaxial cable adapter 16 is connected to the wall of the housing instead of on the right end.
  • the measurement is the cavity length of the resonant cavity between the two reflection points.
  • the cavity length of the resonant cavity is affected by the distance between the second reflection point 4 and the conductor reflection surface 11. That is, it is affected by the length of the dielectric cavity.
  • the circumference of the loop is measured.
  • One end of the demodulation main board 9 is connected to the end faces of the housing 1 and the inner rod 2, and the other end is connected to the housing wall Connect the radio frequency coaxial cable to the adapter 16.
  • the functions of the four structures shown in Fig. 8(a) to Fig. 8(d) are completely the same.
  • the demodulation main board 9 when the demodulation main board 9 is connected to the end of the sensor or the housing wall, it can be connected via a radio frequency coaxial cable adapter or directly.
  • Figure 9(b) is a structural schematic diagram of the shell and the conductor area end surface of the inner rod 2 of the embodiment of the application are different cross-sectional working conditions.
  • the shell 1 and the inner rod 2 and the conductor reflection surface 11 are not in contact or caused by The insulator is connected, or the insulator is connected first, and then the conductor is connected.
  • the conductor area of the rod connection end face demodulation device 100 in the housing does not contact the conductor reflection surface 11.
  • the second reflection point 4 is between the end face of the shell 1 and the end face of the inner rod 2.
  • the connecting material can be a conductor or an insulator, as long as there is a conductor on the side of the conductor reflection surface 11 of the diaphragm;
  • Point 3 is fixed between the housing and inner rod end face 4 and the demodulation device 100.
  • the second reflection point 4 is the end face of the housing 1 or the inner rod 2. Both reflection points are fixed points; the diaphragm 15 is close to the housing 1 and the inner rod.
  • the first side surface of the rod 2 is a conductor reflection surface 11; the end surface of the inner rod 2 is not connected to the first side surface of the diaphragm 15 with a conductor, and there is a small distance.
  • the other side of the diaphragm 15, the second side, is the side under pressure, and the diaphragm is at a certain distance from the end surface of the inner rod, in a non-contact state, or filled with an insulator, the diaphragm is a conductor .
  • the principle is that when the pressure changes, the cavity length of the dielectric cavity between the second reflection point 4 and the first side surface 11 of the diaphragm will also change, thereby changing the resonant frequency/cavity length of the resonant cavity. The amount of change in the cavity length determines the pressure.
  • the second reflection point 4 is the end surface of the shell 1.
  • the first side of the diaphragm 15 close to the housing and the inner rod is the conductor reflection surface 11, that is, at the third position; the inner rod end surface 4 does not contact the first side of the diaphragm (conductor reflection surface), or is connected with an insulator, or used Conductor connection with resistivity greater than or equal to a preset threshold is usually a non-contact structure, that is, there is a small distance between the inner rod end surface 4 and the first side surface (conductor reflection surface) of the diaphragm, and the inner rod 2 end surface reflects the conductor The space between the faces 11 is the dielectric cavity 12.
  • the principle is that when the pressure changes, the deflection of the diaphragm changes, and the distance between the second reflection point 4 and the first side surface 11 of the diaphragm also changes, that is, the cavity length of the dielectric cavity changes, thereby changing the resonance frequency/
  • the cavity length of the resonant cavity is determined by the resonant frequency/cavity length change of the open hollow coaxial cable-Fabry-Perot resonant cavity to determine the cavity length change of the dielectric cavity, thereby determining the pressure.
  • the first side/conductor reflecting surface 11 usually changes from a flat surface to a curved surface. Therefore, the changed deflection is also affected by the comprehensive influence of the deflection of each point of the diaphragm, which is between the minimum deflection and the maximum deflection.
  • the end surfaces of the housing and the inner rod are on the same plane, which is the second reflection point 4.
  • the elastic washer 13 is compressed by pressure, and the deflection of the diaphragm 15 itself is changed to jointly change the distance between the diaphragm 15 and the end surface of the inner rod 4 , Thereby changing the resonant frequency/cavity length of the open hollow coaxial cable-Fabry Perot cavity.
  • One is to reduce the initial distance between the first side surface of the diaphragm 15/conductor reflection surface 11 and the second reflection point 4, that is, to reduce the initial length of the dielectric cavity 12 ;
  • the second is to change the thickness of the diaphragm, reducing the thickness of the diaphragm can increase the sensitivity, and increasing the thickness of the diaphragm can reduce the sensitivity;
  • the third is to increase the diameter of the diaphragm, increase the inner diameter and outer diameter of the end surface of the housing 1, in the expanded diameter structure
  • the outer ring of the end face is connected to a diaphragm with a diameter greater than or equal to the diameter of the housing, and the outer ring of the diaphragm is sealed to the end face of the expanded diameter structure, as shown in Figure 9(c).
  • the second type of pressure sensor is based on the change of the deflection of the Bourdon tube to drive the reflective surface of the conductor to move.
  • the housing 1 and the inner rod 2 of the sensor with a dielectric cavity are connected to a demodulation device.
  • a conductor reflection surface 11 is fixedly connected to point A.
  • the carrier 15 of the conductor reflection surface 11 is a rigid body.
  • the normal line of the conductor reflection surface 11 is parallel to the moving direction of the Bourdon tube at point A after the pressure changes; the conductor reflection surface 11 and The end surfaces of the outer shell 1 and the inner rod 2 are not in contact, or are connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold, and there is a small distance, that is, the cavity length of the dielectric cavity 12; the reflective surface of the conductor 11 The space between the second reflection point 4 and the second reflection point 4 is the dielectric cavity 12; the normal of the conductor reflection surface 11 is parallel to the axis of the housing 1 and the inner rod 2.
  • the resonant frequency/resonant cavity length of the resonant cavity is determined by the change of the resonant frequency/resonant cavity length to determine the cavity length change of the dielectric cavity, thereby determining the pressure.
  • the type of the Bourdon tube includes a C-shaped Bourdon tube, a spiral Bourdon tube, or a Bourdon tube of other shapes, such as a twisted Bourdon tube or a round Bourdon tube.
  • Bourdon tube types include C-type Bourdon tube, as shown in Figure 10(a); in order to have a higher sensitivity, Bourdon tube can also use C-type combined Bourdon tube, spiral Bourdon tube, or twist Bourdon tubes of various shapes, such as type Bourdon tubes or round Bourdon tubes.
  • the spiral Bourdon tube is shown in Figure 10(b), and the axis of the spiral is coincident with the axis of the rod in the housing.
  • Bourdon tubes of other shapes can also be used, as long as it is a bent tube or a broken line tube, it can meet the requirements of using the deflection of the tube to measure the pressure.
  • Embodiment three acceleration sensor
  • FIG. 11 is a schematic diagram of an acceleration sensor according to an embodiment of the application.
  • One end of the housing 1 and the inner rod 2 is connected to the demodulation device 100; the other end of the housing is connected with a structure with a certain rigidity such as a diaphragm or a beam 15, which can be hinged or connected
  • the connecting material 13 can be a conductor or an insulator.
  • the projection of the reflection surface 11 of the conductor and the envelope area of the housing 1 on the normal plane of the rod axis in the housing has a certain intersection; the first reflection point 3 is fixed at Between the shell and inner rod end face and the demodulation device, the second reflection point 4 is the end face plane 4 of the shell or the inner rod, and both reflection points are fixed points; the diaphragm or beam 15 is close to the first part of the shell 1 and the inner rod 2.
  • One side is the conductor reflection surface 11; there is no conductor connection between the end surface of the inner rod 2 and the first side surface of the diaphragm or beam 15, and there is a small distance between the inner rod end surface 4 and the first side surface 11 of the diaphragm.
  • the area is the dielectric cavity 12.
  • a mass 27 with a mass of m is fixed at the center of the second side of the diaphragm or beam 15.
  • F a force
  • the deflection of the center point of the diaphragm or beam 15 is changed, so that the distance between the conductor reflection surface 11 and the second reflection point 4 is changed, that is, the cavity length of the dielectric cavity 12 is changed, and finally the open hollow coaxial cable -The resonant frequency/length of the Fabry-Perot cavity is changed.
  • the open hollow coaxial cable-Fabry Perot resonant cavity resonant frequency / resonant cavity cavity length change can determine the dielectric cavity cavity length change, thereby determining the magnitude of the acceleration.
  • the diameter of the diaphragm or the length of the beam is equal to the outer diameter of the shell or the outer diameter of the expanded diameter area of the shell end.
  • the increase in the thickness of the diaphragm, or the rigidity of the beam, or the weight of the mass can reduce the acceleration sensor.
  • the sensitivity is suitable for the measurement of a large range of acceleration; by expanding the diameter of the diaphragm or increasing the length of the beam, the thickness of the diaphragm decreases or the stiffness of the beam decreases, and the weight of the mass block increases, which can increase the sensitivity of the acceleration sensor. Small range acceleration measurement.
  • the diameter of the diaphragm is increased, it can be realized by adding a bell mouth or an expanded diameter conductor on the end surface of the shell.
  • Embodiment 4 Flow rate sensor
  • Two flow rate sensors are introduced here. The first is to use fluid to generate additional pressure near the baffle.
  • the pressure sensor in the second embodiment is used to measure the additional pressure to determine the flow rate; the second is to use different flow rates to generate different For thrust, the flow rate is determined by measuring the magnitude of the force.
  • Figure 12 (a) and (b) are the first flow rate sensor based on measuring pressure according to an embodiment of the application.
  • the pressure sensor introduced in the second embodiment is used for modification, and the pressure generated by different flow rates is different, which is obtained by measuring the pressure Flow rate.
  • fix the baffle 31 on the right side next to the pressure sensor in Figure 12(a) so that when the fluid 15 impacts the baffle, additional pressure is generated at the displacement of the pressure sensor.
  • the different deflection of the diaphragm 15 of the pressure sensor fixed on the left side of the plate under different pressures measures the additional pressure on the left side of the baffle, and the flow rate is determined by the magnitude of the additional pressure.
  • the pressure sensor can use a diaphragm pressure sensor or a Bourdon tube pressure sensor.
  • the baffle may not be used, and the flow rate can be directly reflected by measuring the pressure, as shown in Figure 12(b).
  • the pressure sensor can use the diaphragm pressure sensor or the Bourdon tube pressure sensor introduced in the second embodiment.
  • the flow rate sensor includes at least a plate hole flow rate sensor, or a U-shaped pipe differential pressure flow rate sensor and other flow rate sensors with different structures.
  • Figure 12(c) is a second type of force-based flow velocity sensor according to an embodiment of the application.
  • the first reflection point is fixed between the housing and the end face of the inner rod and the demodulation device 100, and the second reflection point 4 is the housing or the inner rod.
  • the first reflection point and the second reflection point are both fixed points; when the flow velocity is different, the thrust of the probe 38 on the end face of the probe inserted in the fluid is different, which causes the probe moving distance to change, and a point on the probe will go around
  • the hinge 39 is rotated, the hinge is fixed to the housing 1 of the sensor through the connecting part 37, the other end of the probe rod is connected to the carrier 15 of the conductor reflection surface 11, the conductor reflection surface 11 and the inner rod end surface (the second reflection point 4)
  • the reflective surface 11 of the conductor and the housing 1 are connected by an elastic material.
  • the elastic material can be a conductor or an insulator.
  • the first principle is: when an elastic medium 13 is connected between the housing 1 and the reflective surface 11 of the conductor, the movement of the probe 38 will drive the probe rod to rotate, thereby driving the other end 39 of the probe rod to move in the opposite direction and drive
  • the movement of the carrier 15 of the conductor reflection surface 11 causes the elastic material 13 between the conductor reflection surface 11 and the housing 1 to stretch or compress, which changes the distance between the conductor reflection surface 11 and the second reflection point 4 of the inner rod end surface, namely The cavity length of the dielectric cavity 12 is changed;
  • the second principle is: 13 is a material with greater rigidity, and there is only a very small amount of stretching or compression when stressed, and the carrier 15 of the conductor reflection surface 11 is a thinner diaphragm.
  • dynamometers which can be made by using the stiffness and deformation of the shell, or the stiffness and deflection of the beam or diaphragm of the shell.
  • the strain gauge can be fixed to the object to be tested or buried in the medium to be tested, for example, fixed to steel bars or concrete, the first fixing
  • the initial distance between the point 41 and the second fixing 42 is L.
  • the two fixed points can be driven to move ⁇ d relative to each other, thereby driving the first reflection point 3 and The relative displacement ⁇ d between the conductor reflection surface 11 occurs.
  • the sensor has a first reflection point 3, a second reflection point 4, and a conductor reflection surface 11.
  • the first reflection point 3 is fixed between the housing and the inner rod end surface and the demodulation device 100, and the second reflection point 4 is the housing 1.
  • the first reflection point and the second reflection point are both fixed points; preferably, the end surfaces of the housing 1 and the inner rod 2 are the same section, which is the second reflection point 4.
  • a bracket 54 is fixed on the housing 1 to hang a flexible rope or an elastic rod 53 hinged at both ends, and a weight 52 is suspended under the flexible rope or an elastic rod 53 hinged at both ends.
  • the first working condition when the conductor reflecting surface 11 and the corresponding end surface of the second reflecting point 4 are placed in parallel, two or more parallel and equal length flexible ropes or two
  • the end hinged elastic rod 53 hangs the weight, the plane formed by the four connection points of the flexible rope or elastic rod 53 and the bracket 54 and the weight is parallel to the axis of the outer shell and the inner rod; when these equal-length flexible ropes or hinged ends
  • the connecting line of the fixed point of the elastic rod 53 on the bracket 54 is not perpendicular to the axis of the housing 1 and the inner rod 2
  • the conductor reflection surface 11 and the corresponding end surface of the second reflection point 4 are always parallel, which is more convenient for measurement And calibration.
  • the first working condition use three parallel and equal length flexible ropes or elastic rods 53 with hinged ends to connect the top plate 58 and the weight 55.
  • the flexible ropes or elastic rods are respectively formed by three fixed points fixed to the top plate and the weight.
  • the two triangles are congruent triangles. Fix the inclinometer to the object to be measured.
  • the length of the flexible rope or the elasticity hinged at both ends is L; or use three
  • the elastic rod 53 of equal length is hingedly connected with the top plate 58 and the weight 55.
  • the two tilt directions are tilt around the X axis and tilt around the Y axis;
  • a weight 11 the normals of the two surfaces of the weight as the conductor reflection surface 11 are the X axis and the Y axis, respectively.
  • the end faces of the inner rods of the two cavity length measuring devices 101 are on the same section, and the axes are perpendicular to the two conductor reflection surfaces 11, and the end faces of the housing and the inner rod of the two cavity length measuring devices reflect the two conductors.
  • the surface maintains a certain distance, that is, the cavity length of the dielectric cavity.
  • the three pressure sensors When the three pressure sensors are rigidly fixed to the inside of the container, the three pressure sensors rotate with the inclination of the measured object. As long as the three intersections of the axes of the three pressure sensors and the horizontal plane are not in a straight line, it can be made into a two-way inclinometer; the bottom of the closed container is filled with liquid, and the three pressure sensors are pressure measuring diaphragms or Bourdon tubes The end face film is immersed in the liquid and is equal to the bottom of the container. When the three intersections of the axes of the three pressure sensors and the horizontal plane form a right-angled triangle, the two right-angled sides are the X-axis and Y-axis in the oblique direction respectively.
  • the right end of the diaphragm 15 is a push rod 71 against the center point of the diaphragm.
  • the right side of the push rod has a supporting structure, the right side of the supporting structure is a spring 72, and the right side of the spring also has a supporting structure 73.
  • the supporting mechanism And the probe 74 are one part.
  • angle ⁇ between the inclined surface 11 and the horizontal displacement direction measured by the displacement meter.
  • the range of ⁇ is between -90° and 90°. That is, the inclined surface can be inclined to the left or right.
  • the axis of the displacement meter is always Vertical to the inclined plane, the larger the range of the displacement meter, the smaller the ⁇ .
  • the fold from the fixed point of the fold to the displacement sensor probe is longer, and half of the length of each fold is L; the fold from the fixed point of the fold to the conductor mirror is shorter, and the length of each fold is half Is a.
  • the displacement of the probe on the right is w
  • the change in distance between the second reflection point 4 and the reflective surface 11 of the conductor, that is, the change in cavity length of the dielectric cavity ⁇ d is:
  • the distance d'between the second reflection point and the reflective surface of the conductor can be determined through the resonant frequency of the open hollow coaxial cable-Fabry-Perot resonant cavity/the length of the resonant cavity, that is, after inserting the filler,
  • the cavity length of the dielectric cavity is d'
  • the refractive index of the filled liquid or solid or gas can be obtained by the ratio of d and d'.
  • the housing 1 and the conductive reflective surface 11 may be partially connected.
  • the structure of the conductive reflective surface 11 at least includes a porous structure to facilitate the penetration of liquid or gas into the cavity of the dielectric cavity to measure the refractive index.
  • the shell and inner rod are on the left, the conductor area of the inner rod is connected to the conductor reflection surface 11, and the end surface of the conductor area of the shell is on the left side of the inner rod end surface, that is, on the left side of the conductor reflection surface 11.
  • the right end surface of the conductor area of the housing 1 of the sensor is used as the second reflection point 4; the end surface 4 of the housing conductor area and the conductor reflection surface 11 are not in contact, or connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold .

Abstract

A cavity length measuring device for a dielectric cavity. The cavity length measuring device comprises a sensor and a demodulating device, wherein the sensor comprises an open hollow coaxial cable-Fabry Perot resonant cavity (5), a first reflection point (3), a second reflection point (4), a conductor reflection surface (11), and a dielectric cavity (12). The conductor reflection surface (11) can move or deform to cause the cavity length of the dielectric cavity (12) to change; the distance between the first reflection point (3) and the second reflection point (4) is affected by the change of the distance between the second reflection point (4) and the conductor reflection surface (11); when the distance between the first reflection point (3) and the second reflection point (4) is constant and the distance between the second reflection point (4) and the conductor reflection surface (11) changes, the resonant frequency of the open hollow coaxial cable-Fabry Perot resonant cavity (5) changes, and the distance between the second reflection point (4) and the conductor reflection surface (11) is determined on the basis of the variation of the resonant frequency.

Description

一种电介质腔的腔长测量装置Cavity length measuring device of dielectric cavity 技术领域Technical field
本申请涉及测量技术，尤其涉及一种基于微波原理测量电介质腔的腔长测量装置。The present application relates to measurement technology, and in particular to a cavity length measuring device for measuring dielectric cavity based on microwave principle.
背景技术Background technique
测量技术依据测量对象具有多种类型，例如压强测量、位移测量、应变测量、倾斜角度测量以及力的测量等等，高精度的测量结果是测量技术追求的目标，为此，提出了基于开放式空心同轴电缆-法布里珀罗谐振腔的开放式空心同轴电缆-法布里珀罗谐振腔传感器。There are many types of measurement technology based on measurement objects, such as pressure measurement, displacement measurement, strain measurement, tilt angle measurement, force measurement, etc. High-precision measurement results are the goal pursued by measurement technology. For this reason, an open Hollow coaxial cable-Fabry Perot cavity open hollow coaxial cable-Fabry Perot cavity sensor.
开放式空心同轴电缆-法布里珀罗谐振腔传感器利用两个强反射点，测量空心同轴电缆-法布里珀罗谐振腔的腔长变化量，可以实现大量程高精度的测量。然而，空心同轴电缆-法布里珀罗谐振腔传感器的解调精度和对腔长的分辨率有待提高，所以不适合测量压强等基于应变或膜片挠度测量的传感器。此外，还有一个缺点就是空心同轴电缆-法布里珀罗谐振腔传感器采用的是触接式结构，会有一定的滑动摩擦力或滚动摩擦力，也会对灵敏度要求极高的传感器造成很大的误差。The open hollow coaxial cable-Fabry-Perot cavity sensor uses two strong reflection points to measure the cavity length change of the hollow coaxial cable-Fabry-Perot cavity, which can achieve a large range of high-precision measurements. However, the demodulation accuracy and the resolution of cavity length of the hollow coaxial cable-Fabry Perot cavity sensor need to be improved, so it is not suitable for pressure measurement and other sensors based on strain or diaphragm deflection measurement. In addition, there is another disadvantage that the hollow coaxial cable-Fabry Perot cavity sensor uses a contact structure, which will have a certain sliding friction or rolling friction, which will also cause a sensor with extremely high sensitivity. Great error.
发明内容Summary of the invention
为解决上述技术问题，本申请实施例提供出了一种电介质腔的腔长测量装置，可以是接触式结构或非接触式结构，可以实现对电介质腔腔长的高精度测量。In order to solve the above technical problems, an embodiment of the present application provides a cavity length measuring device for a dielectric cavity, which may be a contact structure or a non-contact structure, which can realize high-precision measurement of the dielectric cavity length.
本申请实施例提供的电介质腔的腔长测量装置，包括：传感器、解调装置；其中，The cavity length measuring device of the dielectric cavity provided by the embodiment of the present application includes: a sensor and a demodulation device; wherein,
所述传感器包括开放式空心同轴电缆-法布里珀罗谐振腔、第一反射点、第二反射点、导体反射面、电介质腔；其中，所述第一反射点设置在所述开放式空心同轴电缆-法布里珀罗谐振腔内部的第一位置处，所述第二反射点设置在所述开放式空心同轴电缆-法布里珀罗谐振腔内部的第二位置处，所述导体反射面设置在所述开放式空心同轴电缆-法布里珀罗谐振腔内部的第三位置处，所述第一反射点和所述第二反射点之间不发生相对移动，所述第一反射点和所述第二反射点的反射率大于等于预设阈值；所述第二反射点与所述导体反射面之间为电介质腔，所述电介质腔腔内的电介质是导体或绝缘体，是固体、液体或气体；所述导体反射面能够发生移动或变形，导致所述电介质腔的腔长发生变化；所述电介质腔的腔内介质的折射率可以发生变化，导致所述电介质腔的腔长发生变化；The sensor includes an open hollow coaxial cable-Fabry Perot cavity, a first reflection point, a second reflection point, a conductor reflection surface, and a dielectric cavity; wherein, the first reflection point is set in the open At a first position inside the hollow coaxial cable-Fabry-Perot cavity, the second reflection point is set at a second position inside the open-type hollow coaxial cable-Fabry-Perot cavity, The conductor reflection surface is arranged at a third position inside the open hollow coaxial cable-Fabry Perot cavity, and there is no relative movement between the first reflection point and the second reflection point, The reflectivity of the first reflection point and the second reflection point is greater than or equal to a preset threshold; a dielectric cavity is formed between the second reflection point and the conductor reflection surface, and the dielectric in the dielectric cavity is a conductor Or an insulator, which is a solid, liquid or gas; the reflective surface of the conductor can move or deform, causing the cavity length of the dielectric cavity to change; the refractive index of the medium in the dielectric cavity can change, causing the The cavity length of the dielectric cavity changes;
所述解调装置与所述传感器相连，所述解调装置包括解调主板和同轴电缆，用于对所述开放式空心同轴电缆-法布里珀罗谐振腔内的微波信号进行分析，得到所述开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔长，其中，所述开放式空心同轴电缆-法布里珀罗谐振腔的腔长为所述第一反射点与所述第二反射点之间的距离，且该距离受到所述第二反射点和所述导体反射面之间距离变化的影响；当所述第一反射点和所述第二反射点之间距离不变且所述第二反射点和所述导体反射面之间距离发生变化时，所述开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率会发生变化，基于所述谐振频率的变化量确定所述第二反射点和所述导体反射面之间的距离，所述第二反射点和所述导体反射面之间距离为所述电介质腔的腔长。The demodulation device is connected to the sensor, and the demodulation device includes a demodulation main board and a coaxial cable, and is used to analyze the microwave signal in the open hollow coaxial cable-Fabry Perot cavity , Obtain the resonant frequency/cavity length of the open hollow coaxial cable-Fabry Perot cavity, wherein the cavity length of the open hollow coaxial cable-Fabry Perot cavity is The distance between the first reflection point and the second reflection point, and the distance is affected by the change in the distance between the second reflection point and the conductor reflection surface; when the first reflection point and the second reflection point When the distance between the two reflection points is constant and the distance between the second reflection point and the conductor reflection surface changes, the resonant frequency of the open hollow coaxial cable-Fabry Perot cavity will change , Determining the distance between the second reflection point and the conductor reflection surface based on the change in the resonance frequency, and the distance between the second reflection point and the conductor reflection surface is the cavity length of the dielectric cavity .
在本申请的一种实施方式中，所述传感器还包括外壳、或者外壳加内杆，所述外壳为所述传感器的外导体，所述内杆为所述传感器的内导体；其中，In an embodiment of the present application, the sensor further includes a housing or a housing plus an inner rod, the housing is the outer conductor of the sensor, and the inner rod is the inner conductor of the sensor; wherein,
所述开放式空心同轴电缆-法布里珀罗谐振腔的一端连接至射频同轴电缆转接头，所述射频同轴电缆转接头通过同轴电缆连接至所述解调主板；或者，所述开放式空心同轴电缆-法布里珀罗谐振腔的一端直接连接至解调主板上；One end of the open hollow coaxial cable-Fabry Perot cavity is connected to a radio frequency coaxial cable adapter, and the radio frequency coaxial cable adapter is connected to the demodulation main board through a coaxial cable; or, One end of the open hollow coaxial cable-Fabry Perot cavity is directly connected to the demodulation main board;
所述开放式空心同轴电缆-法布里珀罗谐振腔的另一端，外壳端面与导体反射面之间用导体连接，内杆端面与导体反射面之间用绝缘体或电阻率大于等于预设阈值的导体连接，这种情况下，第二反射点是内杆导体区域的端面；或者，内杆端面与导体反射面之间用导体连接，外壳端面与导体反射面之间用绝缘体或电阻率大于等于预设阈值的导体连接，这种情况下，第二反射点是外壳导体区域的端面；或者，外壳和内杆端面与导体反射面之间均用绝缘体或电阻率大于等于预设阈值的导体连接且外壳和内杆的端面在同一断面上，这种情况下，第二反射点是外壳和内杆的端面；或者，外壳和内杆端面与导体反射面之间均用绝缘体或电阻率大于等于预设阈值的导体连接且外壳和内杆的端面不在同一断面上，这种情况下，第二反射点介于外壳端面和内杆端面之间。At the other end of the open hollow coaxial cable-Fabry Perot resonant cavity, the shell end surface and the conductor reflection surface are connected by a conductor, and the inner rod end surface and the conductor reflection surface are connected by an insulator or a resistivity greater than or equal to a preset Threshold conductor connection. In this case, the second reflection point is the end surface of the inner rod conductor area; alternatively, the inner rod end surface and the conductor reflection surface are connected by a conductor, and the shell end surface and the conductor reflection surface are connected with an insulator or resistivity Conductor connection greater than or equal to the preset threshold. In this case, the second reflection point is the end surface of the conductor area of the outer shell; or, between the end surface of the outer shell and the inner rod and the reflective surface of the conductor, an insulator or a resistivity greater than or equal to the preset threshold is used The conductors are connected and the end faces of the outer shell and the inner rod are on the same section. In this case, the second reflection point is the end faces of the outer shell and the inner rod; alternatively, insulators or resistivity are used between the end faces of the outer shell and the inner rod and the conductor reflection surface The conductors greater than or equal to the preset threshold are connected and the end faces of the outer shell and the inner rod are not on the same cross section. In this case, the second reflection point is between the end face of the outer shell and the end face of the inner rod.
在本申请的一种实施方式中，所述腔长测量装置为反射式腔长测量装置，在所述反射式腔长测量装置中：In an embodiment of the present application, the cavity length measuring device is a reflective cavity length measuring device, and in the reflective cavity length measuring device:
所述传感器的一端连接射频同轴电缆转接头，所述射频同轴电缆转接头通过同轴电缆连接所述解调主板；或者，所述传感器的一端直接连接在解调主板上，即传感器的一端可以通过第一射频同轴电缆转接头连接解调主板，也可以直接连接解调主板；或者，所述解调主板直接连接在贯穿外壳壁的同轴射频转接头上，该同轴射频转接头有一段导体插入到外壳内部；One end of the sensor is connected to a radio frequency coaxial cable adapter, and the radio frequency coaxial cable adapter is connected to the demodulation main board through a coaxial cable; or, one end of the sensor is directly connected to the demodulation main board, that is, the sensor's One end can be connected to the demodulation main board through the first radio frequency coaxial cable adapter, or it can be directly connected to the demodulation main board; or, the demodulation main board is directly connected to the coaxial radio frequency adapter that penetrates the shell wall, and the coaxial radio frequency converter The connector has a section of conductor inserted into the shell;
所述传感器的另一端为第二反射点和导体反射面。The other end of the sensor is a second reflection point and a conductor reflection surface.
在本申请的一种实施方式中，所述腔长测量装置为透射式腔长测量装置，在所述透射式腔长测量装置中：In one embodiment of the present application, the cavity length measuring device is a transmissive cavity length measuring device, and in the transmissive cavity length measuring device:
所述传感器的一端连接第一射频同轴电缆转接头，所述传感器的外壳壁连接第二射频同轴电缆转接头，所述解调主板的一端通过同轴电缆连接所述第一射频同轴电缆转接头，所述解调主板的另一端通过同轴电缆连接所述第二射频同轴电缆转接头；或者，One end of the sensor is connected to a first radio frequency coaxial cable adapter, the housing wall of the sensor is connected to a second radio frequency coaxial cable adapter, and one end of the demodulation main board is connected to the first radio frequency coaxial cable through a coaxial cable. A cable adapter, the other end of the demodulation main board is connected to the second radio frequency coaxial cable adapter through a coaxial cable; or,
所述传感器的一端连接第一射频同轴电缆转接头，所述解调主板的一端通过同轴电缆连接所述第一射频同轴电缆转接头；所述传感器的外壳壁直接连接解调主板，即外壳壁可以通过第二射频同轴电缆转接头连接解调主板，也可以直接连接解调主板；或者，One end of the sensor is connected to a first radio frequency coaxial cable adapter, one end of the demodulation main board is connected to the first radio frequency coaxial cable adapter through a coaxial cable; the housing wall of the sensor is directly connected to the demodulation main board, That is, the shell wall can be connected to the demodulation main board through the second radio frequency coaxial cable adapter, or it can be directly connected to the demodulation main board; or,
所述传感器的一端直接连接在解调主板上，即传感器的一端可以通过第一射频同轴电缆转接头连接解调主板，也可以直接连接解调主板；所述传感器的外壳壁连接第二射频同轴电缆转接头，所述第二射频同轴电缆转接头通过同轴电缆连接所述解调主板；或者，One end of the sensor is directly connected to the demodulation main board, that is, one end of the sensor can be connected to the demodulation main board through the first radio frequency coaxial cable adapter, or directly connected to the demodulation main board; the housing wall of the sensor is connected to the second radio frequency A coaxial cable adapter, the second radio frequency coaxial cable adapter is connected to the demodulation main board through a coaxial cable; or,
所述传感器的一端直接连接在解调主板上，即传感器的一端可以通过第一射频同轴电缆转接头连接解调主板，也可以直接连接解调主板；所述传感器的外壳壁上直接连接解调主板，即外壳壁可以通过第二射频同轴电缆转接头连接解调主板，也可以直接连接解调主板。One end of the sensor is directly connected to the demodulation main board, that is, one end of the sensor can be connected to the demodulation main board through the first radio frequency coaxial cable adapter, or it can be directly connected to the demodulation main board; the housing wall of the sensor is directly connected to the demodulation main board. The modulation main board, that is, the shell wall can be connected to the demodulation main board through the second radio frequency coaxial cable adapter, or directly connected to the demodulation main board.
在本申请的一种实施方式中，所述腔长测量装置为透射式腔长测量装置时，所述腔长测量装置至少具有以下模式：正反馈环路模式、无环路模式；其中，In an embodiment of the present application, when the cavity length measuring device is a transmissive cavity length measuring device, the cavity length measuring device has at least the following modes: positive feedback loop mode and no loop mode; wherein,
在所述正反馈环路模式中，所述解调主板包括：定向耦合器、波形放大器、计频器/频谱仪；In the positive feedback loop mode, the demodulation main board includes: a directional coupler, a waveform amplifier, and a frequency counter/spectrometer;
在所述无环路模式中，所述解调主板为矢量网络分析仪、或微波发生源加标量网络分析仪、或微波时域反射仪、或解调频谱的解调电路板。In the loop-free mode, the demodulation main board is a vector network analyzer, or a microwave generating source plus a scalar network analyzer, or a microwave time domain reflectometer, or a demodulation circuit board for demodulating spectrum.
在本申请的一种实施方式中，所述正反馈环路模式包括：微波正反馈环路、基于光电振荡器的正反馈环路；其中，In an embodiment of the present application, the positive feedback loop mode includes: a microwave positive feedback loop and a positive feedback loop based on an optoelectronic oscillator; wherein,
在所述微波正反馈环路中，包括：同轴电缆环路、微波定向耦合器、微波放大器或者微波功率分离器，所述解调主板中的各器件通过同轴电缆环路连接；The microwave positive feedback loop includes: a coaxial cable loop, a microwave directional coupler, a microwave amplifier or a microwave power splitter, and each device in the demodulation main board is connected by a coaxial cable loop;
在所述基于光电振荡器的正反馈环路中，包括：高速光电解调器、激光或发光二极管光源、光纤环路、光纤耦合器、微波放大器或者光学放大器、微波定向耦合器或者微波功率分离器，所述解调主板中的各器件通过光纤环路连接。The positive feedback loop based on the optoelectronic oscillator includes: high-speed optoelectronic demodulator, laser or light emitting diode light source, fiber loop, fiber coupler, microwave amplifier or optical amplifier, microwave directional coupler or microwave power separation Each device in the demodulation main board is connected through an optical fiber loop.
在本申请的一种实施方式中，所述传感器内具有：外壳或者外壳加内杆、导体反射面；其中，所述外壳由连续导体形成，所述内杆由连续导体形成，所述导体反射面由连续导体形成，所述连续导体为：单个导电零件、或者多个导电零件连接而成，或者绝缘体上的导体镀层，所述导电零件的材料为导电材料，所述导电材料至少包括：金属、非金属；非金属至少包括：石墨，或碳纤维，或导电陶瓷；In one embodiment of the present application, the sensor has: a housing or a housing plus an inner rod, and a conductor reflection surface; wherein the housing is formed by a continuous conductor, the inner rod is formed by a continuous conductor, and the conductor reflects The surface is formed by a continuous conductor, the continuous conductor is: a single conductive part, or a plurality of conductive parts connected together, or a conductor plating on an insulator, the material of the conductive part is a conductive material, and the conductive material includes at least: metal , Non-metal; non-metal includes at least: graphite, or carbon fiber, or conductive ceramic;
所述导体反射面的形状是实体结构，或者平面结构，或者曲面结构；所述导体反射面的形状是孔隙结构，或者圆形结构，或者长条形结构，或者多个导体拼接而成，或者导体和绝缘体拼接而成；所述导体反射面由单一导体材料构成，或者由不同种类的导体材料构成，或者由一部分导体材料和一部分绝缘体材料构成；所述导体反射面的导体区域是连续的或者非连续的；The shape of the conductor reflecting surface is a solid structure, or a plane structure, or a curved structure; the shape of the conductor reflecting surface is a porous structure, or a circular structure, or a long strip structure, or a plurality of conductors are spliced together, or The conductor and the insulator are spliced together; the conductor reflection surface is composed of a single conductor material, or is composed of different kinds of conductor materials, or is composed of a part of a conductor material and a part of an insulator material; the conductor area of the conductor reflection surface is continuous or Non-continuous
所述导体反射面的摆放满足以下要求：要确保外壳和内杆的包络面沿着轴线方向扫掠出的柱体，与导体反射面所在区域有交集，其中，所述导体反射面与外壳和内杆的轴线垂直或者不垂直；所述导体反射面是平面或者是曲面；The placement of the conductor reflection surface meets the following requirements: it is necessary to ensure that the cylinder swept along the axial direction of the envelope surface of the outer shell and the inner rod has an intersection with the area where the conductor reflection surface is located. The axes of the shell and the inner rod are vertical or not; the conductor reflection surface is flat or curved;
所述导体反射面与第二反射点之间端面距离的变化，通过以下至少一种方式来实现：所述导体反射面的移动；所述导体反射面的变形；所述导体反射面与第二反射点之间的电介质的折射率发生改变；The change of the end surface distance between the conductor reflection surface and the second reflection point is achieved by at least one of the following methods: movement of the conductor reflection surface; deformation of the conductor reflection surface; The refractive index of the dielectric between the reflection points changes;
所述导体反射面的尺寸大于等于外壳的直径，对外壳的端面形成全覆盖；或者，所述导体反射面尺寸小于外壳的直径。The size of the conductor reflection surface is greater than or equal to the diameter of the shell, and forms a full coverage of the end surface of the shell; or, the size of the conductor reflection surface is smaller than the diameter of the shell.
在本申请的一种实施方式中，所述外壳的断面为闭合形状或者非闭合形状；In an embodiment of the present application, the cross section of the housing is a closed shape or a non-closed shape;
所述传感器包括外壳加内杆的情况下：When the sensor includes a housing and an inner rod:
所述外壳包裹所述内杆，或者所述外壳不包裹所述内杆；The outer shell wraps the inner rod, or the outer shell does not wrap the inner rod;
所述外壳和内杆是一个平面上的两条导体镀层，或者是空间上的两个导体平行杆；The outer shell and the inner rod are two conductor plating layers on a plane, or two conductor parallel rods in space;
所述外壳与所述内杆同轴，或者所述外壳与所述内杆不同轴。The housing is coaxial with the inner rod, or the housing and the inner rod are not coaxial.
在本申请的一种实施方式中，在所述第一反射点和所述第二反射点之间，以及所述外壳和所述内杆之间的开放式空心同轴电缆-法布里珀罗谐振腔内，填充的介质为以下之一：真空、气体、液体、固体；In an embodiment of the present application, between the first reflection point and the second reflection point, and between the outer shell and the inner rod, the open hollow coaxial cable-Fabriper In the Luo resonance cavity, the filled medium is one of the following: vacuum, gas, liquid, solid;
在所述第二反射点与所述导体反射面之间的电介质腔腔内，填充的介质为以下之一：真空、气体、液体、固体。In the dielectric cavity between the second reflection point and the conductor reflection surface, the filled medium is one of the following: vacuum, gas, liquid, and solid.
在本申请的一种实施方式中，所述第一反射点和所述第二反射点设置在所述外壳和所述内杆之间；所述第二反射点是所述外壳或所述内杆的端面；或者，当所述外壳和所述内杆都不和所述导体反射面接触，且所述外壳和所述内杆的长度不同时，所述第二反射点介于所述外壳端面和所述内杆端面之间；其中，In an embodiment of the present application, the first reflection point and the second reflection point are arranged between the housing and the inner rod; the second reflection point is the housing or the inner rod The end surface of the rod; or, when the outer shell and the inner rod are not in contact with the conductor reflection surface, and the outer shell and the inner rod have different lengths, the second reflection point is located between the outer shell Between the end surface and the inner rod end surface; wherein,
所述绝缘体或电阻率大于等于预设阈值的导体是固体、液体或气体；对于所述第一反射点和所述第二反射点中的一个或两个反射点，反射点可以是导体或绝缘体，反射点与所述外壳和所述内杆满足如下位置关系：The insulator or the conductor with the resistivity greater than or equal to the preset threshold is solid, liquid or gas; for one or two of the first reflection point and the second reflection point, the reflection point may be a conductor or an insulator , The reflection point satisfies the following positional relationship with the outer shell and the inner rod:
反射点与外壳和内杆均用电阻率小于预设阈值的导体连接；或者，The reflection point, the outer shell and the inner rod are both connected with a conductor whose resistivity is less than a preset threshold; or,
反射点与外壳不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接，反射点与内杆用电阻率小于预设阈值的导体连接；或者，The reflection point is not in contact with the outer shell, or connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold, and the reflection point is connected with the inner rod with a conductor with a resistivity less than the preset threshold; or,
反射点与内杆不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接，反射点与外壳用电阻率小于预设阈值的导体连接；或者，The reflection point is not in contact with the inner rod, or is connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold, and the reflection point is connected with the shell with a conductor with a resistivity less than the preset threshold; or,
反射点与外壳和内杆均不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接；The reflection point is not in contact with the shell and the inner rod, or connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold;
所述第二反射点和所述导体反射面满足如下位置关系：The second reflection point and the conductor reflection surface satisfy the following positional relationship:
外壳和内杆与导体反射面均不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接，且外壳和内杆的导体区域的端面是同一个平面时，第二反射点为外壳和内杆的共同端面；或者，When the shell and the inner rod are not in contact with the reflective surface of the conductor, or are connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold, and the end faces of the conductor area of the shell and the inner rod are on the same plane, the second reflection point Is the common end face of the outer shell and the inner rod; or,
外壳和内杆与导体反射面均不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接，且外壳和内杆的导体区域的端面不是同一个平面时，第二反射点为外壳端面和内杆端面之间的一个点；或者，When the shell and the inner rod are not in contact with the reflective surface of the conductor, or are connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold, and the end faces of the conductor area of the shell and the inner rod are not the same plane, the second reflection point Is a point between the end face of the outer shell and the end face of the inner rod; or,
外壳与导体反射面用电阻率小于预设阈值的导体连接，且内杆与导体反射面不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接时，第二反射点为内杆的端面；或者，When the shell and the reflective surface of the conductor are connected with a conductor with a resistivity less than the preset threshold, and the inner rod is not in contact with the reflective surface of the conductor, or connected with an insulator, or connected with a conductor with a resistivity greater than or equal to the preset threshold, the second reflection point is The end face of the inner rod; or,
外壳与导体反射面不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接，且内杆与导体反射面用电阻率小于预设阈值的导体连接时，第二反射点为外壳的端面。When the shell is not in contact with the reflective surface of the conductor, or connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold, and the inner rod and the reflective surface of the conductor are connected with a conductor with a resistivity less than the preset threshold, the second reflection point is The end face of the shell.
在本申请的一种实施方式中，在反射式腔长测量装置中：In an embodiment of the present application, in the reflective cavity length measuring device:
所述传感器包括外壳加内杆时，所述外壳和所述内杆的第一端均与所述射频同轴电缆转接头连接，所述射频同轴电缆转接头通过同轴电缆连接所述解调主板；或者所述外壳和所述内杆的第一端直接与解调主板连接，即外壳和内杆的第一端可以通过第一射频同轴电缆转接头连接解调主板，也可以直接连接解调主板；所述第一反射点和所述第二反射点至少有一部分设置在所述外壳加内杆的包络范围之内；When the sensor includes a housing and an inner rod, both the housing and the first end of the inner rod are connected to the radio frequency coaxial cable adapter, and the radio frequency coaxial cable adapter is connected to the solution through a coaxial cable. Or the first end of the housing and the inner rod is directly connected to the demodulation motherboard, that is, the first end of the housing and the inner rod can be connected to the demodulation motherboard through the first RF coaxial cable adapter, or directly Connecting to the demodulation main board; at least a part of the first reflection point and the second reflection point are set within the envelope range of the housing and the inner rod;
所述传感器只有外壳且没有内杆时，所述外壳的第一端与所述射频同轴电缆转接头连接，所述射频同轴电缆转接头通过同轴电缆连接所述解调主板；或者外壳的第一端直接与解调主板连接，即外壳的第一端可以通过第一射频同轴电缆转接头连接解调主板，也可以直接连接解调主板；所述第一反射点和所述第二反射点设置在所述外壳的包络范围之内。When the sensor has only a housing and no inner rod, the first end of the housing is connected to the radio frequency coaxial cable adapter, and the radio frequency coaxial cable adapter is connected to the demodulation main board through a coaxial cable; or the housing The first end of the housing is directly connected to the demodulation main board, that is, the first end of the housing can be connected to the demodulation main board through the first radio frequency coaxial cable adapter, or can be directly connected to the demodulation main board; the first reflection point and the second The two reflection points are arranged within the envelope range of the shell.
在本申请的一种实施方式中，在透射式腔长测量装置中，所述腔长测量装置至少具有以下模式：正反馈环路模式、无环路模式：In an embodiment of the present application, in the transmissive cavity length measuring device, the cavity length measuring device has at least the following modes: a positive feedback loop mode and a loop-free mode:
所述传感器包括外壳和内杆时，所述外壳和所述内杆的第一端均与第一射频同轴电缆转接头连接，所述第一射频同轴电缆转接头通过第一同轴电缆连接到解调主板上；或者所述外壳和所述内杆的第一端均直接与解调主板连接，即外壳和内杆的第一端可以通过第一射频同轴电缆转接头连接解调主板，也可以直接连接解调主板；所述外壳壁与第二射频同轴电缆转接头连接，所述第二射频同轴电缆转接头通过第二同轴电缆连接到解调主板上；或者所述外壳壁直接与解调主板连接，即外壳壁可以通过第二射频同轴电缆转接头连接解调主板，也可以直接连接解调主板；所述第一反射点和所述第二反射点至少有一部分设置在所述外壳加内杆的包络范围之内；When the sensor includes a housing and an inner rod, the first ends of the housing and the inner rod are both connected to a first radio frequency coaxial cable adapter, and the first radio frequency coaxial cable adapter passes through the first coaxial cable Connect to the demodulation main board; or both the housing and the first end of the inner rod are directly connected to the demodulation main board, that is, the first end of the housing and the inner rod can be connected to the demodulation main board through a first radio frequency coaxial cable adapter The main board can also be directly connected to the demodulation main board; the housing wall is connected to the second radio frequency coaxial cable adapter, and the second radio frequency coaxial cable adapter is connected to the demodulation main board through the second coaxial cable; or The housing wall is directly connected to the demodulation main board, that is, the housing wall can be connected to the demodulation main board through a second radio frequency coaxial cable adapter, or directly connected to the demodulation main board; the first reflection point and the second reflection point are at least A part is arranged within the envelope range of the outer shell and the inner rod;
所述传感器只有外壳且没有内杆时，所述外壳的第一端与第一射频同轴电缆转接头连接，所述第一射频同轴电缆转接头通过第一同轴电缆连接到解调主板上；或者所述外壳的第一端直接与解调主板连接，即外壳的第一端可以通过第一射频同轴电缆转接头连接解调主板，也可以直接连接解调主板；所述外壳壁与第二射频同轴电缆转接头连接，所述第二射频同轴电缆转接头通过第二同轴电缆连接到解调主板上；或者所述外壳壁直接与解调主板连接，即外壳壁可以通过第二射频同轴电缆转接头连接解调主板，也可以直接连接解调主板；所述第一反射点和所述第二反射点至少有一部分设置在所述外壳的包络范围之内；When the sensor has only a housing and no inner rod, the first end of the housing is connected to the first radio frequency coaxial cable adapter, and the first radio frequency coaxial cable adapter is connected to the demodulation main board through the first coaxial cable On; or the first end of the housing is directly connected to the demodulation motherboard, that is, the first end of the housing can be connected to the demodulation motherboard through the first radio frequency coaxial cable adapter, or directly connected to the demodulation motherboard; the housing wall Connected to the second radio frequency coaxial cable adapter, the second radio frequency coaxial cable adapter is connected to the demodulation main board through the second coaxial cable; or the housing wall is directly connected to the demodulation main board, that is, the housing wall can be The demodulation main board is connected through the second radio frequency coaxial cable adapter, or it can be directly connected to the demodulation main board; at least a part of the first reflection point and the second reflection point are arranged within the envelope range of the housing;
其中，所述第二射频同轴电缆转接头设置在所述第一反射点和所述第二反射点之间。Wherein, the second radio frequency coaxial cable adapter is arranged between the first reflection point and the second reflection point.
在本申请的一种实施方式中，所述第一反射点为导体，且与所述内杆和所述外壳均连接，使所述内 杆和所述外壳之间短路；所述第二反射点为所述外壳或所述内杆的端面；In an embodiment of the present application, the first reflection point is a conductor and is connected to both the inner rod and the outer shell, so that the inner rod and the outer shell are short-circuited; the second reflection point The point is the end face of the outer shell or the inner rod;
当所述外壳为闭合形状时，所述外壳内部形状是圆形或矩形，所述内杆断面也是圆形或矩形，所述第一反射点在所述外壳和所述内杆之间构成短路，所述第二反射点是所述外壳或所述内杆端面断开形成的高反射；When the housing is in a closed shape, the internal shape of the housing is circular or rectangular, the cross-section of the inner rod is also circular or rectangular, and the first reflection point forms a short circuit between the housing and the inner rod , The second reflection point is a high reflection formed by the disconnection of the end surface of the outer shell or the inner rod;
所述第一反射点是一个尺寸小于预设面积的断面，至少可以通过一根或多根圆杆或者方杆垂直于传感器内杆的轴线方向放置，或者在外壳和内杆之间固定一个有一定透射率的多孔结构，所述第一反射点覆盖所述外壳和所述内杆之间区域的面积小于所述外壳和所述内杆之间包络面积；所述第一反射点对所述外壳和所述内杆构成短路，或者所述外壳和所述内杆之间连接件的电阻大于等于预设阈值，或者所述外壳和内杆之间无连接件；所述第二反射点是外壳端面，或内杆端面，或外壳导体区域的端面和内杆导体区域的端面之间的一个点；所述导体反射面与所述外壳和所述内杆不同时用电阻率小于预设阈值的导体连接；The first reflection point is a cross-section with a size smaller than a preset area. At least one or more round rods or square rods can be placed perpendicular to the axis of the inner rod of the sensor, or a cross section can be fixed between the housing and the inner rod. With a porous structure with a certain transmittance, the area of the first reflection point covering the area between the outer shell and the inner rod is smaller than the envelope area between the outer shell and the inner rod; The outer shell and the inner rod form a short circuit, or the resistance of the connecting piece between the outer shell and the inner rod is greater than or equal to a preset threshold, or there is no connecting piece between the outer shell and the inner rod; the second reflection point It is the end face of the outer shell, or the end face of the inner rod, or a point between the end face of the outer shell conductor area and the end face of the inner rod conductor area; the conductor reflection surface is different from the outer shell and the inner rod with a resistivity less than a preset Threshold conductor connection;
所述第一反射点和所述第二反射点的位置固定，通过改变所述导体反射面到第二反射点之间的距离，能够实现对位移、或应变、或压强、或角度、或液位、或流速的测量；其中，通过以下至少一种方式改变所述导体反射面到所述第二反射点之间的距离：所述导体反射面的移动，所述导体反射面的变形，所述导体反射面和第二反射点之间的介质的折射率的改变。The positions of the first reflection point and the second reflection point are fixed. By changing the distance between the conductor reflection surface and the second reflection point, the displacement, strain, pressure, angle, or liquid can be adjusted. Measurement of the position or flow velocity; wherein the distance between the conductor reflection surface and the second reflection point is changed by at least one of the following methods: the movement of the conductor reflection surface, the deformation of the conductor reflection surface, and the The change in the refractive index of the medium between the reflective surface of the conductor and the second reflective point.
在本申请的一种实施方式中，通过改变所述内杆断面形状和尺寸来调节反射率，可去掉在所述外壳和所述内杆之间添加的第一反射点，将射频同轴电缆转接头与所述外壳和所述内杆连接处作为第一反射点；其中，将射频同轴电缆转接头与所述外壳和所述内杆连接处作为第一反射点时，所述内杆直径与所述外壳内径比值介于0到1之间；或者，In an embodiment of the present application, the reflectivity is adjusted by changing the cross-sectional shape and size of the inner rod, and the first reflection point added between the outer shell and the inner rod can be removed, and the radio frequency coaxial cable The connection between the adapter and the housing and the inner rod serves as the first reflection point; where the connection between the radio frequency coaxial cable adapter and the housing and the inner rod serves as the first reflection point, the inner rod The ratio of the diameter to the inner diameter of the housing is between 0 and 1; or,
将第一反射点设置在所述外壳和所述内杆连接射频同轴电缆转接头的位置；或者，将第一反射点设置在所述外壳和所述内杆连接解调频谱的解调电路板的位置，其中，外壳和内杆的第一端面直接连接解调电路板，或者外壳和内杆的第一端面通过射频同轴电缆转接头连接解调电路板。The first reflection point is set at the position where the housing and the inner rod are connected to the RF coaxial cable adapter; or the first reflection point is set at the housing and the inner rod to connect the demodulation circuit of the demodulation spectrum The position of the board, wherein the housing and the first end face of the inner rod are directly connected to the demodulation circuit board, or the first end face of the housing and the inner rod is connected to the demodulation circuit board through a radio frequency coaxial cable adapter.
在本申请的一种实施方式中，所述腔长测量装置应用于压强传感器中；In an embodiment of the present application, the cavity length measuring device is applied to a pressure sensor;
外壳和内杆一端连接解调装置；外壳的另一端连接膜片，连接材料是导体或者是绝缘体，膜片是导体或者膜片的第一侧面有导体镀膜；第一反射点固定在外壳和内杆端面与解调装置之间，第二反射点为外壳或内杆的端面，第一反射点和第二反射点均为固定点；膜片靠近外壳和内杆的第一侧面为导体反射面；内杆端面与膜片的第一侧面不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接，第二反射点与导体反射面之间的空间为电介质腔；膜片的第二侧面是受压的一面，且膜片与内杆的端面之间有一定距离，处于非接触状态，或使用电阻率小于预设阈值的液体或固体填充，即电介质腔的腔内是气体、液体或固体；当压强发生改变时，膜片挠度发生变化，第二反射点到膜片的第一侧面之间的距离会发生变化，即电介质腔的腔长发生变化，从而改变开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔长，通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长变化量确定电介质腔的腔长变化量，从而确定压强的大小；膜片变形后，第一侧面由平面变成曲面，其中，膜片的挠度变化量受到膜片各个点挠度的影响，膜片的挠度变化量介于最小挠度和最大挠度之间；One end of the housing and the inner rod is connected to the demodulation device; the other end of the housing is connected to a diaphragm, the connection material is a conductor or an insulator, the diaphragm is a conductor or the first side of the diaphragm is coated with a conductor; the first reflection point is fixed on the housing and the inner Between the rod end surface and the demodulation device, the second reflection point is the end surface of the shell or the inner rod, the first reflection point and the second reflection point are both fixed points; the first side of the diaphragm close to the shell and the inner rod is the conductor reflection surface The end face of the inner rod is not in contact with the first side surface of the diaphragm, or is connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold, and the space between the second reflection point and the reflective surface of the conductor is a dielectric cavity; the diaphragm The second side is the side under pressure, and there is a certain distance between the diaphragm and the end surface of the inner rod, in a non-contact state, or filled with liquid or solid with a resistivity less than a preset threshold, that is, the cavity of the dielectric cavity is Gas, liquid or solid; when the pressure changes, the deflection of the diaphragm changes, and the distance between the second reflection point and the first side of the diaphragm changes, that is, the cavity length of the dielectric cavity changes, thereby changing the open type Hollow coaxial cable-Fabry-Perot resonant cavity resonant frequency/resonant cavity length, the cavity of the dielectric cavity is determined by the resonant frequency/resonant cavity length change of the open hollow coaxial cable-Fabry-Perot resonant cavity The amount of change is long to determine the size of the pressure; after the diaphragm is deformed, the first side surface changes from a flat surface to a curved surface. The deflection change of the diaphragm is affected by the deflection of each point of the diaphragm, and the deflection change of the diaphragm is between the smallest Between deflection and maximum deflection;
其中，通过以下几种方式能够增大压强传感器的灵敏度：一是减少膜片的第一侧面与第二反射点之间的初始距离；二是减小膜片厚度；三是增大膜片直径，加大外壳端面处的内径和外径，在扩径结构的端面外圈连接直径大于等于外壳直径的膜片，膜片的外圈与扩径结构的端面密封连接。Among them, the sensitivity of the pressure sensor can be increased in the following ways: one is to reduce the initial distance between the first side of the diaphragm and the second reflection point; the second is to reduce the thickness of the diaphragm; the third is to increase the diameter of the diaphragm , Enlarge the inner diameter and outer diameter at the end face of the shell, connect the outer ring of the end face of the expanded diameter structure to a diaphragm with a diameter greater than or equal to the diameter of the shell, and the outer ring of the diaphragm is sealed to the end face of the expanded diameter structure.
在本申请的一种实施方式中，所述腔长测量装置应用于压强传感器中；In an embodiment of the present application, the cavity length measuring device is applied to a pressure sensor;
外壳和内杆一端连接解调装置；外壳和内杆的另一端是切断的端面，不连接任何物体；第一反射点固定在外壳和内杆端面与解调装置之间，第二反射点为外壳或内杆的端面，第一反射点和第二反射点均为固定点；采用波登管测量压强，波登管的端面或管上的一点会产生一定的移动量；针对波登管上A点的移动，在A点固定连接一个导体反射面，该导体反射面为刚体，导体反射面的法线平行于压强改变后波登管在A点处的移动方向；导体反射面与外壳和内杆的端面均不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接，并有一定距离；导体反射面与第二反射点之间的空间为电介质腔；导体反射面的法线平行于外壳和内杆的轴线；One end of the shell and the inner rod is connected to the demodulation device; the other end of the shell and the inner rod is a cut end face, not connected to any objects; the first reflection point is fixed between the shell and the end face of the inner rod and the demodulation device, and the second reflection point is The end face of the outer shell or inner rod, the first reflection point and the second reflection point are fixed points; the pressure is measured by the Bourdon tube, the end face of the Bourdon tube or a point on the tube will produce a certain amount of movement; for the Bourdon tube For the movement of point A, a conductor reflection surface is fixedly connected to point A. The conductor reflection surface is a rigid body. The normal line of the conductor reflection surface is parallel to the moving direction of the Bourdon tube at point A after the pressure changes; the conductor reflection surface and the shell The end faces of the inner rods are not in contact, or are connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold, and have a certain distance; the space between the conductor reflection surface and the second reflection point is a dielectric cavity; the conductor reflection surface The normal of is parallel to the axis of the shell and the inner rod;
将电介质腔的腔长测量装置和波登管基座固定到一个刚性物体上，腔长测量装置和波登管基座不发生相对移动；由于导体反射面的法线、外壳和内杆的轴线、以及A点的移动方向均平行，所以当压强发生改变时，波登管上A点会发生移动，带动导体反射面发生移动，导致导体反射面到第二反射点之间的距离发生变化，即电介质腔的腔长发生变化，从而改变开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长，通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长变化量确定电介质腔的腔长变化量，从而确定压强的大小；所述波登管的类型至少包括C型波登管、或C型组合波登管、或螺旋型波登管、或麻花型波登管、或圆形波登管。Fix the cavity length measuring device and the Bourdon tube base of the dielectric cavity to a rigid object. The cavity length measuring device and the Bourdon tube base do not move relative to each other; due to the normal of the conductor reflection surface, the shell and the axis of the inner rod The moving directions of, and point A are parallel, so when the pressure changes, point A on the Bourdon tube will move, driving the conductor reflection surface to move, resulting in a change in the distance between the conductor reflection surface and the second reflection point. That is, the cavity length of the dielectric cavity changes, thereby changing the resonant frequency/cavity length of the open hollow coaxial cable-Fabry-Perot cavity. The resonant frequency/cavity length variation determines the cavity length variation of the dielectric cavity, thereby determining the pressure; the type of the Bourdon tube includes at least a C-shaped Bourdon tube, a C-shaped combined Bourdon tube, or a spiral type Bourdon tube, or twist-type Bourdon tube, or round Bourdon tube.
在本申请的一种实施方式中，所述腔长测量装置应用于加速度传感器中；In an embodiment of the present application, the cavity length measuring device is used in an acceleration sensor;
外壳和内杆一端连接解调装置；外壳的另一端连接带有一定刚度的结构，所述结构至少包括膜片或梁，连接材料是导体或者是绝缘体；第一反射点固定在外壳和内杆端面与解调装置之间，第二反射点为外壳或内杆的端面，第一反射和第二反射点均为固定点；膜片或梁靠近外壳和内杆的第一侧面为导体反射面；内杆端面与膜片或梁的第一侧面无导体连接，有一定距离；膜片或梁第二侧面中心处固定有一个质量为m的质量块，质量块在加速度为a的情况下，会对膜片或梁产生力F，F＝ma，使得膜片或梁的中心点挠度发生变化，从而使得导体反射面到第二反射点之间的距离发生变化，即电介质腔的腔长发生变化，最终使得开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生变化，通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长变化量确定电介质腔的腔长变化量，从而确定加速度的大小；One end of the shell and the inner rod is connected with a demodulation device; the other end of the shell is connected with a structure with a certain rigidity, the structure at least includes a diaphragm or a beam, and the connecting material is a conductor or an insulator; the first reflection point is fixed on the shell and the inner rod Between the end face and the demodulation device, the second reflection point is the end face of the shell or the inner rod, the first reflection and the second reflection point are both fixed points; the first side of the diaphragm or beam close to the shell and the inner rod is the conductor reflection surface ; The end face of the inner rod is connected to the first side of the diaphragm or beam without a conductor, and there is a certain distance; a mass of m is fixed at the center of the second side of the diaphragm or beam, and the mass is at acceleration a. A force F is generated on the diaphragm or beam, F=ma, so that the deflection of the center point of the diaphragm or beam changes, so that the distance between the conductor reflection surface and the second reflection point changes, that is, the cavity length of the dielectric cavity changes. The change finally causes the resonant frequency/cavity length of the open hollow coaxial cable-Fabry-Perot cavity to change, through the open hollow coaxial cable-Fabry-Perot cavity resonant frequency/cavity The cavity length change determines the cavity length change of the dielectric cavity, thereby determining the magnitude of the acceleration;
膜片的直径或梁的长度与外壳的外径或外壳端面扩径区域的外径相等，增大膜片厚度或梁的刚度，减小质量块的重量，加速度传感器的灵敏度会降低，适合大量程加速度的测量；扩大膜片直径或增大梁的长度，减小膜片厚度或梁的刚度，增加质量块的重量，加速度传感器的灵敏度会增大，适合小量程加速度的测量；当增大膜片直径时，可采用外壳端面加上一个扩径结构来实现，所述扩径结构至少包括喇叭口或扩大直径的导体，膜片的外圈与扩径结构的端面密封连接；当增加梁的长度时，外壳端面要沿着直径方向，向两边分别增加一个悬臂支撑，两个支撑的端面用来作为梁的两个支点，采用连接件进行连接，两端采用刚性连接或者做成两端铰接的简支梁；或者做成悬臂梁，悬臂梁端面固定有质量块，质量块靠近外壳和内杆端面的一侧是导体反射面。The diameter of the diaphragm or the length of the beam is equal to the outer diameter of the shell or the outer diameter of the expanded diameter area of the shell end. Increase the thickness of the diaphragm or the stiffness of the beam, reduce the weight of the mass, and the sensitivity of the acceleration sensor will decrease, which is suitable for a large number of Acceleration measurement; expand the diameter of the diaphragm or increase the length of the beam, reduce the thickness of the diaphragm or the stiffness of the beam, increase the weight of the mass, and the sensitivity of the acceleration sensor will increase, which is suitable for the measurement of small-scale acceleration; The diameter of the sheet can be realized by adding an enlarged diameter structure to the end surface of the shell. The enlarged diameter structure includes at least a bell mouth or an enlarged diameter conductor, and the outer ring of the diaphragm is connected to the end surface of the enlarged diameter structure in a sealed manner; When the length is long, the end surface of the shell should be along the diameter direction, add a cantilever support to both sides, the two support end surfaces are used as the two fulcrums of the beam, and the connecting piece is used to connect, the two ends are rigidly connected or the two ends are hinged. Or it can be made into a cantilever beam, the end surface of the cantilever beam is fixed with a mass block, and the side of the mass block close to the shell and the end surface of the inner rod is the conductor reflection surface.
在本申请的一种实施方式中，所述腔长测量装置应用于流速传感器中，所述流速传感器为第一种流速传感器或第二种流速传感器；In an embodiment of the present application, the cavity length measuring device is applied to a flow rate sensor, and the flow rate sensor is a first type flow rate sensor or a second type flow rate sensor;
在第一种流速传感器中，使用压强传感器进行改装，利用不同流速产生的压强不同，通过测量压强的大小得到流速；所述流速传感器至少包括板孔流速传感器、或U型管压差流速传感器；在流体从左到右运动的情况下，在所述压强传感器旁边固定挡板，使流体冲击到挡板时产生附加压强，利用挡板左边固定的压强传感器测出所述挡板左边的附加压强，通过附加压强的大小确定流速；In the first type of flow rate sensor, the pressure sensor is used for modification, and the pressure generated by different flow rates is used to obtain the flow rate by measuring the size of the pressure; the flow rate sensor includes at least a plate hole flow rate sensor or a U-shaped pipe differential pressure flow rate sensor; When the fluid moves from left to right, the baffle is fixed next to the pressure sensor, so that additional pressure is generated when the fluid impacts the baffle, and the additional pressure on the left side of the baffle is measured by the pressure sensor fixed on the left side of the baffle , Determine the flow rate by the size of the additional pressure;
在第二种流速传感器中，第一反射点固定在外壳和内杆端面与解调装置之间，第二反射点为外壳或内杆的端面，第一反射点和第二反射点均为固定点；流速不同，则对插入流体中的探杆端面探头的推力不同，使得探头移动距离发生变化，且探杆上的一点会绕着铰发生转动，所述铰通过连接零件固定到传感器的外壳上，探杆的另一端连接导体反射面，所述导体反射面和内杆端面之间不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接；其中，在第二种流速传感器的第一种结构中：导体反射面和外壳之间由弹性材料连接，弹性材料是导体或者是绝缘体；测量时，探头的移动会带动探杆发生转动，从而带动探杆另一头发生反向移动，带动导体反射面发生移动，导致导体反射面和外壳之间的弹性材料发生拉伸或压缩，从而改变了导体反射面到第二反射点之间的距离，即改变了电介质腔的腔长；其中，流速越大，对探头产生的推力越大，柔性导体材料的拉伸或压缩量也会越大，电介质腔的腔长变化量也越大，从而使得同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长变化量也越大；在第二种流速传感器的第二种结构中：外壳连接膜片，第二反射点是内杆端面，导体反射面的载体是膜片，流体推动探头产生的力带动探杆另一头发生反向移动，通过连接第二反射点载体的带铰零件挤压膜片的中心点，使膜片的挠度发生变化，电介质腔的腔长发生变化，从而使得同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生变化；所述第一种结构和所述第二种结构均通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长变化量确定电介质腔的腔长变化量，从而确定流速的大小。In the second type of flow rate sensor, the first reflection point is fixed between the housing and the end face of the inner rod and the demodulation device, the second reflection point is the end face of the housing or the inner rod, and the first and second reflection points are fixed Point; the flow rate is different, the thrust of the probe on the end face of the probe inserted in the fluid is different, so that the moving distance of the probe changes, and a point on the probe will rotate around the hinge, the hinge is fixed to the housing of the sensor by connecting parts The other end of the probe rod is connected to the reflective surface of the conductor, and the reflective surface of the conductor and the end surface of the inner rod are not in contact, or connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold; wherein, in the second type In the first structure of the flow sensor: the reflective surface of the conductor and the shell are connected by an elastic material, the elastic material is a conductor or an insulator; during measurement, the movement of the probe will drive the probe to rotate, thereby driving the other end of the probe to reverse To move, drive the conductor reflection surface to move, causing the elastic material between the conductor reflection surface and the shell to stretch or compress, thereby changing the distance between the conductor reflection surface and the second reflection point, that is, changing the cavity of the dielectric cavity Long; among them, the greater the flow rate, the greater the thrust generated on the probe, the greater the stretch or compression of the flexible conductor material, and the greater the change in the cavity length of the dielectric cavity, so that the coaxial cable-Fabry The resonant frequency/length of the resonant cavity of the Perot cavity will change more; in the second structure of the second flow velocity sensor: the shell is connected to the diaphragm, the second reflection point is the end surface of the inner rod, and the carrier of the reflection surface of the conductor It is a diaphragm. The force generated by the fluid pushing the probe drives the other end of the probe to move in the opposite direction. The hinged part connected to the second reflection point carrier squeezes the center point of the diaphragm to change the deflection of the diaphragm. The cavity length changes, so that the resonant frequency/cavity length of the coaxial cable-Fabry-Perot resonant cavity changes; the first structure and the second structure both pass through an open hollow coaxial cable -The resonant frequency of the Fabry-Perot resonant cavity/cavity length variation determines the cavity length variation of the dielectric cavity, thereby determining the size of the flow velocity.
在本申请的一种实施方式中，所述腔长测量装置应用于测力计中，所述测力计为第一种测力计或第二种测力计；In an embodiment of the present application, the cavity length measuring device is applied to a dynamometer, and the dynamometer is a first type dynamometer or a second type dynamometer;
第一种测力计，是利用外壳端面梁或膜片的刚度和挠度做出的测力计；外壳和内杆一端连接解调装置；外壳的另一端连接有带有一定刚度的结构，所述结构至少包括膜片或梁，连接材料是导体或者是绝缘体；第一反射点固定在外壳和内杆端面与解调装置之间，第二反射点为外壳或内杆的端面，第一反射点和第二反射点均为固定点，所以第二反射点到导体反射面之间的距离变化量等于第一反射点到导体反射面之间的距离变化量；膜片或梁靠近外壳和内杆的第一侧面为导体反射面；内杆端面与膜片或梁的第一侧面之间的电介质腔无导体连接，有一定距离；当膜片或梁的中心点受到作用力F时，膜片或梁的中心点挠度发生变化，从而使得导体反射面到第二反射点之间的距离发生变化，即电介质腔的腔长发生变化，最终使得开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生变化，通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长变化量确定电介质腔的腔长变化量，从而确定力的大小；The first type of dynamometer is a dynamometer made using the stiffness and deflection of the shell end beam or diaphragm; one end of the shell and the inner rod is connected with a demodulation device; the other end of the shell is connected with a structure with a certain rigidity, so The structure at least includes a diaphragm or a beam, the connecting material is a conductor or an insulator; the first reflection point is fixed between the shell and the end face of the inner rod and the demodulation device, and the second reflection point is the end face of the shell or the inner rod. The point and the second reflection point are both fixed points, so the change in the distance between the second reflection point and the reflection surface of the conductor is equal to the change in the distance between the first reflection point and the reflection surface of the conductor; the diaphragm or beam is close to the housing and the inner surface. The first side of the rod is the conductor reflection surface; the dielectric cavity between the end face of the inner rod and the diaphragm or the first side of the beam has no conductor connection, and there is a certain distance; when the center point of the diaphragm or the beam receives a force F, the diaphragm The deflection of the center point of the sheet or beam changes, so that the distance between the reflective surface of the conductor and the second reflective point changes, that is, the cavity length of the dielectric cavity changes, and finally the open hollow coaxial cable-Fabry Perot The resonant frequency/cavity length of the resonant cavity changes, and the cavity length change of the dielectric cavity is determined by the resonant frequency of the open hollow coaxial cable-Fabry-Perot resonant cavity/cavity length change to determine the force the size of;
第二种测力计，是利用外壳的刚度和变形做出的测力计；外壳和内杆一端连接解调装置；外壳的另一端连接一个导体反射面，导体反射面的载体的厚度大于等于预设阈值；第一反射点固定在外壳和内杆端面与解调装置之间，第二反射点为内杆的端面，第一反射点和第二反射点均为固定点，所以第二反射 点到导体反射面之间的距离变化量等于第一反射点到导体反射面之间的距离变化量；导体反射面与外壳固定且不和内杆接触，第二反射点与导体反射面之间有一定的距离；当导体反射面的载体受到拉力或压力时，外壳会发生拉伸或压缩，外壳材料的弹性为E，净面积为A，从第一反射点到导体反射面之间的距离为L，受力后，开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生变化，基于开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长的变化量，确定导体反射面到内杆端面之间的距离的变化量，即电介质腔的腔长变化量为Δd，求出的作用力为F＝EA·Δd/L。The second type of dynamometer is a dynamometer made by using the rigidity and deformation of the shell; one end of the shell and the inner rod is connected with the demodulation device; the other end of the shell is connected with a conductive reflective surface, and the thickness of the carrier of the conductive reflective surface is greater than or equal to Preset threshold; the first reflection point is fixed between the shell and the end face of the inner rod and the demodulation device, the second reflection point is the end face of the inner rod, the first reflection point and the second reflection point are both fixed points, so the second reflection The change in the distance between the point and the reflective surface of the conductor is equal to the change in the distance between the first reflective point and the reflective surface of the conductor; the reflective surface of the conductor is fixed to the outer shell and does not contact the inner rod, and the second reflective point is between the reflective surface of the conductor There is a certain distance; when the carrier of the reflective surface of the conductor is stretched or compressed, the shell will be stretched or compressed. The elasticity of the shell material is E, the net area is A, and the distance from the first reflection point to the reflective surface of the conductor Is L. After the force is applied, the resonant frequency/cavity length of the open hollow coaxial cable-Fabry-Perot cavity changes, based on the resonant frequency of the open hollow coaxial cable-Fabry-Perot cavity /The amount of change in the cavity length of the resonant cavity determines the amount of change in the distance between the conductor reflection surface and the end surface of the inner rod, that is, the cavity length change of the dielectric cavity is Δd, and the calculated force is F=EA·Δd/L.
在本申请的一种实施方式中，所述腔长测量装置应用于应变计中；In an embodiment of the present application, the cavity length measuring device is applied to a strain gauge;
所述传感器内具有第一反射点、第二反射点、导体反射面，第一反射点固定在外壳和内杆端面与解调装置之间，第二反射点为外壳或内杆的端面，第一反射点和第二反射点均为固定点；其中，所述第一反射点处的外壳外部固定凸起的结构作为第一固定点，所述导体反射面处的外壳外部固定凸起的结构作为第二固定点，所述第一固定点和所述第二固定点之间的距离为L；所述第二反射点为内杆的端面，距离导体反射面有一定距离，第二反射点与导体反射面之间不接触，中间是电介质腔，或者，在第二反射点和导体反射面之间的电介质腔腔内填充固体或液体；外壳和内杆的一端或外壳的外壳壁上连接解调装置；外壳分段，由两段导体材料构成，两段导体材料之间采用嵌套结构或导体波纹管连接，或者，外壳不分段，应变发生变化时，外壳材料发生拉伸或压缩；内杆是一个刚体，不分段，第二反射点为内杆端面；The sensor has a first reflection point, a second reflection point, and a conductor reflection surface. The first reflection point is fixed between the housing and the end face of the inner rod and the demodulation device, and the second reflection point is the end face of the housing or the inner rod. The first reflection point and the second reflection point are both fixed points; wherein the first reflection point has a fixed convex structure outside the housing as the first fixed point, and the conductor reflection surface has a fixed convex structure outside the housing As the second fixed point, the distance between the first fixed point and the second fixed point is L; the second reflection point is the end surface of the inner rod, and there is a certain distance from the conductor reflection surface, the second reflection point There is no contact with the reflective surface of the conductor, with a dielectric cavity in the middle, or the dielectric cavity between the second reflection point and the reflective surface of the conductor is filled with solid or liquid; the shell and one end of the inner rod or the shell wall of the shell are connected Demodulation device; the shell is segmented, composed of two pieces of conductive material, and the two pieces of conductive material are connected by a nested structure or a conductive corrugated pipe, or the shell is not segmented, and the shell material is stretched or compressed when the strain changes ; The inner rod is a rigid body, not segmented, and the second reflection point is the end face of the inner rod;
通过所述第一固定点和所述第二固定点能够将所述应变计固定到待检测的物体上或者埋入待检测的介质中，所述待检测的物体或介质发生应变时能够带动所述第一固定点和所述第二固定点发生相对移动，从而带动第一反射点和导体反射面之间发生相对位移Δd，由于第一反射点和第二反射点之间的距离固定，第一反射点和导体反射面之间发生的相对位移等于第二反射点和导体反射面之间发生的相对位移，即电介质腔的腔长发生变化，通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长变化量可求出电介质腔的腔长变化量Δd，从而得到应变的大小为ε＝Δd/L。The strain gauge can be fixed to the object to be detected or buried in the medium to be detected through the first fixed point and the second fixed point. When the object or medium to be detected strains, it can drive the strain gauge. The first fixed point and the second fixed point move relative to each other, thereby driving a relative displacement Δd between the first reflection point and the conductor reflection surface. Since the distance between the first reflection point and the second reflection point is fixed, The relative displacement between a reflection point and the reflective surface of the conductor is equal to the relative displacement between the second reflection point and the reflective surface of the conductor, that is, the cavity length of the dielectric cavity changes, through the open hollow coaxial cable-Fabriper The resonant frequency of the resonant cavity/the resonant cavity length change amount can be obtained the cavity length change amount Δd of the dielectric cavity, and the magnitude of the strain is ε=Δd/L.
在本申请的一种实施方式中，所述腔长测量装置应用于单向倾斜仪中；采用一个测量电介质腔的腔长测量装置做成单向倾斜仪；In one embodiment of the present application, the cavity length measuring device is applied to a unidirectional inclinometer; a cavity length measuring device for measuring a dielectric cavity is used to make a unidirectional inclinometer;
所述传感器内具有第一反射点、第二反射点、导体反射面，第一反射点固定在外壳和内杆端面与解调装置之间，第二反射点为外壳和内杆的端面，第一反射点和第二反射点均为固定点；外壳上固定有支架，用来悬挂柔性绳或两端铰接的弹性杆，重物悬挂在柔性绳或两端铰接的弹性杆的下方；重物靠近外壳和内杆端面的第一端面为导体材料制作的导体反射面；当被测物体带动倾斜仪发生倾斜时，支架和第二反射点会随着被测物体发生倾斜，导体反射面和重物则在重力作用下保持原状态或仅发生转动，因此导体反射面和重物会相对第二反射点发生移动，从而使得导体反射面到第二反射点之间的距离发生变化，即电介质腔的腔长发生变化，最终使得开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生变化，通过谐振频率/谐振腔腔长变化量确定倾斜角度的大小；The sensor has a first reflection point, a second reflection point, and a conductor reflection surface. The first reflection point is fixed between the shell and the end face of the inner rod and the demodulation device. The second reflection point is the end face of the shell and the inner rod. The first reflection point and the second reflection point are both fixed points; a bracket is fixed on the shell to hang a flexible rope or an elastic rod hinged at both ends, and the weight is suspended under the flexible rope or the elastic rod hinged at both ends; The first end face close to the end face of the shell and the inner rod is a conductive reflective surface made of conductive material; when the measured object drives the inclinometer to tilt, the bracket and the second reflective point will tilt with the measured object, and the conductive reflective surface will become heavy. The object remains in its original state or only rotates under the action of gravity. Therefore, the reflective surface of the conductor and the heavy object will move relative to the second reflective point, so that the distance between the reflective surface of the conductor and the second reflective point changes, that is, the dielectric cavity The cavity length changes, and finally the resonant frequency/cavity length of the open hollow coaxial cable-Fabry-Perot cavity changes, and the tilt angle is determined by the resonant frequency/cavity length change;
导体反射面与第二反射点对应的端面平行放置时，以下第一种工况采用两根或更多等长柔性绳或两端铰接的弹性杆悬挂重物，当这些等长柔性绳或两端铰接的弹性杆在支架上的固定点的连线不垂直于外壳和内杆的轴线时，倾斜角度改变后，导体反射面与第二反射点对应的端面始终平行；以下第二种工况采用前后放置的两根等长柔性绳悬挂重物，两根柔性绳与支架和重物的四个固定点构成的平面垂直于外壳和内杆的轴线，或两端刚接的弹性杆悬挂重物，倾斜角度改变后，导体反射面与第二反射点对应的端面之间的夹角会发生变化；When the conductor reflection surface is placed parallel to the end surface corresponding to the second reflection point, the following first working condition uses two or more equal length flexible ropes or elastic rods hinged at both ends to suspend heavy objects. When these equal length flexible ropes or two When the connecting line of the fixed point of the end-hinged elastic rod on the bracket is not perpendicular to the axis of the shell and the inner rod, after the inclination angle is changed, the reflection surface of the conductor and the corresponding end surface of the second reflection point are always parallel; the following second working condition Two flexible ropes of equal length placed front and rear are used to suspend the weight. The plane formed by the two flexible ropes, the bracket and the four fixed points of the weight is perpendicular to the axis of the shell and the inner rod, or the elastic rod just connected at both ends is used to suspend the weight. After the tilt angle is changed, the angle between the reflective surface of the conductor and the corresponding end surface of the second reflective point will change;
第一种工况：将所述倾斜仪固定到被测物体上，使用两根平行且等长的左右放置的柔性绳或两端铰接的弹性杆，柔性绳或弹性杆与支架和重物的四个连接点构成的平面平行于外壳和内杆的轴线；弹性杆与支架和重物均采用铰接连接，柔性绳或两端铰接的弹性杆的长度为L，当所述倾斜仪的倾斜角度在所述两根柔性绳或两端铰接的弹性杆构成的平面上发生变化时，导体反射面始终平行于外壳和内杆的端面，通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长变化量确定第二反射点与导体反射面之间的距离变化量，即电介质腔的腔长变化量为Δd，从而得到倾斜角度的变化量为Δθ＝arcsin(Δd/L)；The first working condition: fix the inclinometer to the object to be measured, use two parallel and equal length flexible ropes placed on the left and right or elastic rods hinged at both ends, the flexible rope or elastic rod and the support and the weight The plane formed by the four connection points is parallel to the axis of the shell and the inner rod; the elastic rod is connected with the bracket and the weight by hinge connection, the length of the flexible rope or the elastic rod hinged at both ends is L, when the tilt angle of the inclinometer When a change occurs on the plane formed by the two flexible ropes or the elastic rods hinged at both ends, the reflective surface of the conductor is always parallel to the end faces of the outer shell and the inner rod, through the open hollow coaxial cable-Fabry Perot cavity The change in the resonant frequency/the length of the resonant cavity determines the change in the distance between the second reflection point and the reflective surface of the conductor, that is, the change in the cavity length of the dielectric cavity is Δd, so that the change in the tilt angle is Δθ=arcsin(Δd /L);
第二种工况：将所述倾斜仪固定到被测物体上，采用前后放置的两根等长柔性绳或两端铰接的弹性杆悬挂重物，两根柔性绳或弹性杆与直接和重物的四个固定点构成的平面垂直于外壳和内杆的轴线；或采用两端刚接的弹性杆，弹性杆数量可以是一根弹性杆，或两根弹性杆，或多根弹性杆，弹性杆的两端与支架和重物刚性连接，柔性绳或两端刚接的弹性杆长度为L，当所述倾斜仪的倾斜角度发生变化时，通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长变化量确定开放式空心同轴电缆-法布里珀罗谐振腔第二反射点与导体反射面之间的距离变化量，即电介质腔的腔长变化量为Δd，需要通过标定得到距离变化量Δd与倾斜角度变化量Δθ之间的关系。The second working condition: fix the inclinometer to the object to be measured, and use two equal-length flexible ropes or elastic rods hinged at both ends to suspend the heavy objects. Two flexible ropes or elastic rods and direct weight The plane formed by the four fixed points of the object is perpendicular to the axis of the shell and the inner rod; or elastic rods with just-connected ends are used. The number of elastic rods can be one elastic rod, or two elastic rods, or multiple elastic rods. The two ends of the elastic rod are rigidly connected with the bracket and the weight. The length of the flexible rope or the elastic rod just connected at both ends is L. When the tilt angle of the inclinometer changes, the open hollow coaxial cable-Fabry The change in the resonant frequency/length of the resonant cavity of the Perot cavity determines the change in the distance between the second reflection point of the open hollow coaxial cable-Fabry-Perot resonant cavity and the reflective surface of the conductor, that is, the cavity length of the dielectric cavity The change is Δd, and the relationship between the distance change Δd and the tilt angle change Δθ needs to be obtained through calibration.
在本申请的一种实施方式中，所述腔长测量装置应用于双向倾斜仪中；In an embodiment of the present application, the cavity length measuring device is used in a two-way inclinometer;
采用两个不平行且水平放置的电介质腔的腔长测量装置，分别刚性固定到倾斜仪的顶板、底面或侧壁上；两个腔长测量装置，外壳和内杆在同一个端面上，该端面作为第二反射点；以下第一种工况，顶 板固定有至少三根平行且等长的柔性绳或两端铰接的弹性杆，且柔性绳或两端铰接的弹性杆与顶板或重物的所有固定点不在一条直线上，此时电介质腔的腔长变化量只与绳长/杆长和倾角有关，与绳或杆的数量以及位置无关；柔性绳或两端铰接的弹性杆底部悬挂重物，且重物上有与柔性绳或两端铰接的弹性杆平行的竖直面，这两个竖直面分别作为两个腔长测量装置的导体反射面，由导体材料制作；以下第二种工况，使用一根或多根弹性杆刚性连接顶板和重物，且重物上的两个导体反射面不平行；The cavity length measuring device adopts two non-parallel and horizontally placed dielectric cavities, which are rigidly fixed to the top, bottom or side wall of the inclinometer respectively; the two cavity length measuring devices, the shell and the inner rod are on the same end surface, the The end surface is used as the second reflection point; in the first working condition below, the top plate is fixed with at least three parallel and equal-length flexible ropes or elastic rods hinged at both ends, and the flexible rope or the elastic rods hinged at both ends are connected to the roof or heavy objects. All fixed points are not on a straight line. At this time, the cavity length change of the dielectric cavity is only related to the rope length/pole length and inclination angle, and has nothing to do with the number and position of the rope or rod; the flexible rope or the elastic rod hinged at both ends is suspended from the bottom. The weight has vertical surfaces parallel to the flexible rope or the elastic rods hinged at both ends. These two vertical surfaces are respectively used as the conductor reflection surfaces of the two cavity length measuring devices and are made of conductive materials; the following second In a working condition, one or more elastic rods are used to rigidly connect the top plate and the weight, and the two conductor reflection surfaces on the weight are not parallel;
第一种工况：使用平行且等长柔性绳或两端铰接的弹性杆连接顶板和重物，将所述倾斜仪固定到被测物体上，使用三根平行且等长的柔性绳或两端铰接的弹性杆，即三根柔性绳或两端铰接的弹性杆分别与顶板和重物连接的三个点构成的两个三角形全等，柔性绳或两端铰接的弹性杆长度为L；当所述三根柔性绳或两端铰接的弹性杆与顶板的三个交点不在一条直线上时，两个倾斜方向分别为绕X轴倾斜和绕Y轴倾斜；三根绳下方悬挂有一个重物，作为导体反射面的两个面的法线分别为X轴和Y轴；两个电介质腔的腔长测量装置的轴线分别垂直于这两个导体反射面，两个腔长测量装置的外壳和内杆的端面与这两个导体反射面保持一定的距离；当倾斜仪绕着X轴和Y轴均发生倾斜后，两个腔长测量装置的第二反射点到导体反射面之间的距离发生变化，使得开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生变化，可求出两个腔长测量装置的第二反射点到导体反射面之间的距离变化量，即电介质腔的腔长变化量分别为Δd 1和Δd 2；通过第一个腔长测量装置的第二反射点到导体反射面之间的距离变化量Δd 1和绳长L的大小，可确定出倾斜仪绕X轴的倾斜角度变化量Δθ 1＝arcsin(Δd 1/L)；通过第二个腔长测量装置的第二反射点到导体反射面之间的电介质腔的腔长变化量Δd 2和绳长L的大小，可确定出倾斜仪绕Y轴的倾斜角度变化量Δθ 2＝arcsin(Δd 2/L)；只要柔性绳或两端铰接的弹性杆的数量大于等于3根，所有柔性绳或两端铰接的弹性杆都等长且平行放置，且所有柔性绳或两端铰接的弹性杆与顶板的固定点的连线不在一条直线上，两个方向的倾斜角度均可使用该工况的计算方法求得；其中，当使用三个或以上与顶板固定点不在一条直线上的平行且等长的弹性杆铰接连接顶板和重物时，计算方法同所述第一种工况； The first working condition: Use parallel and equal length flexible ropes or elastic rods hinged at both ends to connect the top plate and the heavy object, fix the inclinometer to the measured object, use three parallel and equal length flexible ropes or both ends Articulated elastic rods, that is, three flexible ropes or elastic rods hinged at both ends are connected to the top plate and the weight at three points formed by two triangles congruent, the length of the flexible rope or the elastic rod hinged at both ends is L; When the three intersections of the three flexible ropes or the elastic rods hinged at both ends and the top plate are not in a straight line, the two tilt directions are tilt around the X axis and tilt around the Y axis; a heavy object is suspended under the three ropes as a conductor The normals of the two surfaces of the reflecting surface are the X axis and the Y axis respectively; the axis of the cavity length measuring device of the two dielectric cavities is perpendicular to the two conductor reflecting surfaces, and the shell and the inner rod of the two cavity length measuring devices The end surface keeps a certain distance from the two conductor reflection surfaces; when the inclinometer is tilted around the X axis and Y axis, the distance between the second reflection point of the two cavity length measuring devices and the conductor reflection surface changes. The resonant frequency/cavity length of the open hollow coaxial cable-Fabry Perot cavity is changed, and the distance change between the second reflection point of the two cavity length measuring devices and the conductor reflection surface can be obtained , That is, the cavity length change of the dielectric cavity is Δd 1 and Δd 2 respectively ; the distance change Δd 1 and the rope length L from the second reflection point of the first cavity length measuring device to the conductor reflection surface can be Determine the inclination angle change of the inclinometer around the X axis Δθ 1 = arcsin(Δd 1 /L); the cavity length change of the dielectric cavity between the second reflection point of the second cavity length measuring device and the reflective surface of the conductor Δd 2 and rope length L can determine the tilt angle change of the inclinometer around the Y axis Δθ 2 = arcsin(Δd 2 /L); as long as the number of flexible ropes or elastic rods hinged at both ends is greater than or equal to 3, All flexible ropes or elastic rods hinged at both ends are of equal length and placed in parallel, and all flexible ropes or elastic rods hinged at both ends are not in a straight line with the fixed point of the top plate, and tilt angles in both directions can be used The calculation method of this working condition is obtained; among them, when three or more parallel and equal-length elastic rods that are not in a straight line with the fixed point of the top plate are used to articulate the top plate and the heavy object, the calculation method is the same as the first method. condition;
第二种工况：使用弹性杆刚性连接顶板和重物，将所述倾斜仪固定到被测物体上，使用一根弹性杆，或两根弹性杆，或三根以上弹性杆，弹性杆长度均为L，弹性杆与顶板和重物刚性连接；当倾斜仪绕着X轴和Y轴均发生倾斜后，通过两个腔长测量装置的谐振频率/谐振腔腔长变化量可求出第二反射点与导体反射面之间的距离变化量，即电介质腔的腔长变化量为Δd 1和Δd 2，需要通过标定得到两个介质腔的腔长变化量Δd 1、Δd 2与倾斜角度变化量Δθ 1、Δθ 2之间的关系。 The second working condition: Use an elastic rod to rigidly connect the top plate and a heavy object, and fix the inclinometer to the object to be measured. Use one elastic rod, or two elastic rods, or more than three elastic rods. The lengths of the elastic rods are all Is L, the elastic rod is rigidly connected to the top plate and the weight; when the inclinometer is tilted around both the X-axis and the Y-axis, the second can be obtained by the resonant frequency/variation of the resonant cavity length of the two cavity length measuring devices The change in the distance between the reflection point and the reflective surface of the conductor, that is, the change in the cavity length of the dielectric cavity is Δd 1 and Δd 2. The cavity length changes Δd 1 , Δd 2 and the tilt angle of the two dielectric cavities need to be calibrated The relationship between the quantities Δθ 1 and Δθ 2 .
在本申请的一种实施方式中，所述腔长测量装置应用于单向倾斜仪中；In an embodiment of the present application, the cavity length measuring device is used in a unidirectional inclinometer;
使用两个压强传感器做成单向倾斜仪，所述倾斜仪包括一个固定到被测物体上的密闭容器，所述密闭容器的底部有一定深度的液体，所述倾斜仪利用两个压强传感器的压强差值来确定倾斜角度，这样可以消除温度的影响，无需温度补偿；Use two pressure sensors to make a unidirectional inclinometer, the inclinometer includes a closed container fixed to the object to be measured, the bottom of the closed container has a certain depth of liquid, the inclinometer uses two pressure sensors The pressure difference is used to determine the inclination angle, which can eliminate the influence of temperature without temperature compensation;
当两个压强传感器刚性固定到容器内部的顶板、底板或侧面时，两个压强传感器随着被测物体的倾斜发生转动；两个压强传感器左右放置，两个压强传感器轴线平行且两条轴线的平行间距为d；外壳和内杆的端面在下方，两个测压膜片或波登管端面膜片浸入液体中，并且距离容器底部相等；当被测物体带动密闭容器在两个压强传感器的轴线构成的平面内发生倾斜时，两个压强传感器浸入液体的深度也会发生变化，所以两个压强传感器测出的压强也会发生变化；又由于两个压强传感器的轴线始终平行，所以两个压强传感器的轴线间距随着倾斜角度的变化也会发生变化；通过两个压强传感器的压强变化量求出浸入深度的变化量ΔL 1和ΔL 2，最终得到倾斜角度的变化量为Δθ＝arctan[(ΔL 2-ΔL 1)/d]； When the two pressure sensors are rigidly fixed to the top, bottom or sides of the container, the two pressure sensors rotate with the inclination of the object to be measured; the two pressure sensors are placed on the left and right, and the two pressure sensors are parallel to each other. The parallel distance is d; the end faces of the outer shell and the inner rod are below, and the two pressure measuring diaphragms or the end face diaphragms of the Bourdon tube are immersed in the liquid, and the distance from the bottom of the container is equal; when the measured object drives the airtight container in the two pressure sensors When the plane formed by the axis is tilted, the depth of the two pressure sensors immersed in the liquid will also change, so the pressure measured by the two pressure sensors will also change; and because the axes of the two pressure sensors are always parallel, the two pressure sensors are always parallel. The axis spacing of the pressure sensor will also change with the change of the tilt angle; the changes in the immersion depth ΔL 1 and ΔL 2 are obtained from the pressure changes of the two pressure sensors, and the change in the tilt angle is finally obtained as Δθ=arctan[ (ΔL 2 -ΔL 1 )/d];
当两个左右放置的压强传感器的顶部通过柔性绳或两端铰接的弹性杆连接到容器内部的顶板时，两个固定点之间的间距是d，在重力作用下，两个压强传感器的轴线始终竖直，不随着被测物体的倾斜发生转动；外壳和内杆的端面在下方，两个测压膜片或波登管端面膜片浸入液体中，并且距离容器底部相等；当被测物体带动密闭容器在两个压强传感器的轴线构成的平面内发生倾斜时，两个压强传感器浸入液体的深度也会发生变化，所以两个压强传感器测出的压强也会发生变化，通过两个压强传感器的压强变化量求出浸入深度的变化量ΔL 1和ΔL 2，最终得到倾斜角度的度变化量为Δθ＝arcsin[(ΔL 2-ΔL 1)/d]。 When the tops of the two pressure sensors placed on the left and right are connected to the top plate inside the container by flexible ropes or elastic rods hinged at both ends, the distance between the two fixed points is d. Under the action of gravity, the axis of the two pressure sensors It is always vertical and does not rotate with the tilt of the measured object; the end faces of the outer shell and the inner rod are below, and the two pressure measuring diaphragms or Bourdon tube end diaphragms are immersed in the liquid and are equal to the bottom of the container; when the measured object When the airtight container is driven to tilt in the plane formed by the axes of the two pressure sensors, the depth of the two pressure sensors immersed in the liquid will also change, so the pressure measured by the two pressure sensors will also change, through the two pressure sensors Calculate the change in immersion depth ΔL 1 and ΔL 2 from the pressure change of, and finally get the degree change of the inclination angle as Δθ=arcsin[(ΔL 2 -ΔL 1 )/d].
在本申请的一种实施方式中，所述腔长测量装置应用于双向倾斜仪中；In an embodiment of the present application, the cavity length measuring device is used in a two-way inclinometer;
使用三个压强传感器做成双向倾斜仪，所述倾斜仪包括一个固定到被测物体上的密闭容器，所述密闭容器的底部有一定深度的液体，所述倾斜后利用三个压强传感器的压强差值来确定倾斜角度，这样可以消除温度的影响，无需温度补偿；Three pressure sensors are used to make a two-way inclinometer. The inclinometer includes a closed container fixed to the object to be measured. The bottom of the closed container has a certain depth of liquid. After the tilt, the pressure of the three pressure sensors is used. The difference is used to determine the tilt angle, which can eliminate the influence of temperature without temperature compensation;
当三个压强传感器刚性固定到容器内部时，三个压强传感器随着被测物体的倾斜发生转动；三个压强传感器的轴线与水平面的三个交点不在一条直线上；所述密闭容器的底部装有液体，所述三个压强传感器测压膜片或波登管端面膜片浸入液体中，并且距离容器底部相等；当所述三个压强传感器的轴线与水平面的三个交点构成一个直角三角形时，两个直角边分别是倾斜方向的X轴和Y轴；第一个压强传感器和第二个压强传感器轴线的平行间距为d 1，第二个压强传感器和第三个压强传感器之间轴线的平行间距为d 2；当倾斜仪绕着X轴和Y轴均发生倾斜后，第一个压强传感器和第二个压强传感器浸入液体的深 度也会发生变化，所以两个压强传感器测出的压强也会发生变化，通过两个压强传感器的压强变化量求出浸入深度的变化量ΔL 1和ΔL 2，再根据平行间距d 1的大小，可以确定出倾斜仪绕X轴的倾斜角度变化量为Δθ 1＝arctan[(ΔL 2-ΔL 1)/d 1]；第二个压强传感器和第三个压强传感器浸入液体的深度也会发生变化，所以两个压强传感器测出的压强也会发生变化，通过两个压强传感器的压强变化量求出浸入深度的变化量ΔL 2和ΔL 3，再根据平行间距d 2的大小，可以确定出倾斜仪绕Y轴的倾斜角度变化量为Δθ 2＝arctan[(ΔL 3-ΔL 2)/d 2]； When the three pressure sensors are rigidly fixed to the inside of the container, the three pressure sensors rotate with the inclination of the measured object; the three intersections of the axes of the three pressure sensors and the horizontal plane are not in a straight line; the bottom of the closed container is installed When there is liquid, the three pressure sensor pressure measuring diaphragms or the Bourdon tube end diaphragm are immersed in the liquid and are equal to the bottom of the container; when the three intersections of the axes of the three pressure sensors and the horizontal plane form a right triangle , The two right-angle sides are the X-axis and Y-axis in the tilt direction respectively; the parallel distance between the axis of the first pressure sensor and the second pressure sensor is d 1 , the axis between the second pressure sensor and the third pressure sensor The parallel spacing is d 2 ; when the inclinometer is tilted around the X axis and Y axis, the depth of the first pressure sensor and the second pressure sensor immersed in the liquid will also change, so the pressure measured by the two pressure sensors Changes will also occur. The changes in immersion depth ΔL 1 and ΔL 2 are obtained from the pressure changes of the two pressure sensors, and then according to the parallel spacing d 1 , the tilt angle change of the inclinometer around the X axis can be determined as Δθ 1 = arctan[(ΔL 2 -ΔL 1 )/d 1 ]; the depth of the second pressure sensor and the third pressure sensor immersed in the liquid will also change, so the pressure measured by the two pressure sensors will also change Calculate the immersion depth changes ΔL 2 and ΔL 3 through the pressure changes of the two pressure sensors, and then according to the parallel spacing d 2 , the tilt angle change of the inclinometer around the Y axis can be determined as Δθ 2 = arctan [(ΔL 3 -ΔL 2 )/d 2 ];
当三个压强传感器顶部通过柔性绳或两端铰接的弹性杆连接到容器内部的顶板时，在重力作用下，三个压强传感器的轴线始终竖直，不随着被测物体的倾斜发生转动；三个压强传感器的轴线与水平面的三个交点不在一条直线上；所述密闭容器的底部装有液体，所述三个压强传感器测压膜片或波登管端面膜片浸入液体中，并且距离容器底部相等；当所述三个压强传感器的轴线与顶板的三个交点构成一个直角三角形时，两个直角边分别是倾斜方向的X轴和Y轴；第一个压强传感器和第二个压强传感器轴线的平行间距为d 1，第二个压强传感器和第三个压强传感器之间轴线的平行间距为d 2；当倾斜仪绕着X轴和Y轴均发生倾斜后，第一个压强传感器和第二个压强传感器浸入液体的深度也会发生变化，所以两个压强传感器测出的压强也会发生变化，通过两个压强传感器的压强变化量求出浸入深度的变化量ΔL 1和ΔL 2，再根据平行间距d 1的大小，可以确定出倾斜仪绕X轴的倾斜角度变化量Δθ 1＝arcsin[(ΔL 2-ΔL 1)/d 1]；第二个压强传感器和第三个压强传感器浸入液体的深度也会发生变化，所以两个压强传感器测出的压强也会发生变化，通过两个压强传感器的压强变化量求出浸入深度的变化量ΔL 2和ΔL 3，再根据平行间距d 2的大小，可以确定出倾斜仪绕Y轴的倾斜角度变化量Δθ 2＝arcsin[(ΔL 3-ΔL 2)/d 2]。 When the tops of the three pressure sensors are connected to the top plate inside the container through flexible ropes or elastic rods hinged at both ends, under the action of gravity, the axes of the three pressure sensors are always vertical and do not rotate with the inclination of the measured object; The three intersections of the axes of the pressure sensors and the horizontal plane are not on a straight line; the bottom of the closed container is filled with liquid, and the pressure measuring diaphragms of the three pressure sensors or the end diaphragms of the Bourdon tube are immersed in the liquid and are away from the container. The bottoms are equal; when the three intersections of the axes of the three pressure sensors and the top plate form a right-angled triangle, the two right-angle sides are the X-axis and Y-axis in the tilt direction respectively; the first pressure sensor and the second pressure sensor The parallel distance between the axes is d 1 , and the parallel distance between the second pressure sensor and the third pressure sensor is d 2 ; when the inclinometer is tilted around the X axis and Y axis, the first pressure sensor and The depth of the second pressure sensor immersed in the liquid will also change, so the pressure measured by the two pressure sensors will also change, and the immersion depth changes ΔL 1 and ΔL 2 can be obtained from the pressure changes of the two pressure sensors. Then according to the size of the parallel distance d 1 , the tilt angle change of the inclinometer around the X axis can be determined Δθ 1 = arcsin[(ΔL 2 -ΔL 1 )/d 1 ]; the second pressure sensor and the third pressure sensor The depth of immersion in the liquid will also change, so the pressure measured by the two pressure sensors will also change. The changes in the immersion depth ΔL 2 and ΔL 3 are obtained from the pressure changes of the two pressure sensors, and then according to the parallel distance d The size of 2 can determine the tilt angle change of the inclinometer around the Y axis Δθ 2 = arcsin[(ΔL 3 -ΔL 2 )/d 2 ].
在本申请的一种实施方式中，所述腔长测量装置应用于滑移计中；In an embodiment of the present application, the cavity length measuring device is used in a slip gauge;
使用两个电介质腔的腔长测量装置做成测量单向水平滑移量以及纵向分离量的滑移计；针对介质A相当于介质B在轴向和法向的相对位移，其中，介质A与滑移计载体固定，介质B与双斜面载体固定；两个腔长测量装置分别为第一腔长测量装置和第二腔长测量装置，每个腔长测量装置的外壳和内杆导体区域的端面在一个平面上，该平面为第二反射点所在的平面，而且该平面平行于导体反射面；两个斜孔是固定到介质A上的滑移计载体的两个斜孔，分别通过并固定第一腔长测量装置和第二腔长测量装置的外壳，两个斜孔的轴线垂直于两个斜面；所述双斜面是固定到介质B上的双斜面载体的两个导体材料做成的斜面，分别为第一斜面和第二斜面，双斜面的两个斜面分别为第一腔长测量装置和第二腔长测量装置对应的第一导体反射面和第二导体反射面；The cavity length measuring device using two dielectric cavities is made into a slip meter that measures the amount of unidirectional horizontal slip and the amount of longitudinal separation; for medium A, it is equivalent to the relative displacement of medium B in the axial and normal directions. Among them, medium A and The slip gauge carrier is fixed, and the medium B is fixed with the double-inclined carrier; the two cavity length measuring devices are the first cavity length measuring device and the second cavity length measuring device. The shell and inner rod conductor area of each cavity length measuring device The end surface is on a plane, the plane is the plane where the second reflection point is located, and the plane is parallel to the conductor reflection surface; the two oblique holes are two oblique holes of the slip gauge carrier fixed to the medium A, which pass through the parallel The housings of the first cavity length measuring device and the second cavity length measuring device are fixed, and the axes of the two inclined holes are perpendicular to the two inclined planes; the double inclined planes are made of two conductor materials fixed to the double inclined plane carrier on the medium B The inclined planes are the first inclined plane and the second inclined plane, and the two inclined planes of the double inclined plane are the first conductor reflecting surface and the second conductor reflecting surface corresponding to the first cavity length measuring device and the second cavity length measuring device;
所述滑移计载体固定在介质A上，第一腔长测量装置的外壳固定在滑移计载体的第一斜孔内，第二腔长测量装置的外壳固定在滑移计载体的第二斜孔内，所述第一腔长测量装置外壳和内杆的端面正对且平行于第一斜面，所述第二腔长测量装置外壳和内杆的端面正对且平行于第二斜面，所述第一斜面与所述第二斜面为双斜面载体的两个斜面，所述双斜面载体固定在介质B上；所述两个斜面的法向量构成的二阶矩阵
Figure PCTCN2019078351-appb-000001
的秩等于2，其中，所述第一斜面的法向量为(l 1,n 1) T，第二斜面的法向量为(l 2,n 2) T，所述两个斜面相对于水平面的倾斜角度θ 1和θ 2在-90°到90°之间； The slip gauge carrier is fixed on the medium A, the shell of the first cavity length measuring device is fixed in the first inclined hole of the slip gauge carrier, and the shell of the second cavity length measuring device is fixed on the second cavity of the slip gauge carrier. In the oblique hole, the end faces of the housing and the inner rod of the first cavity length measuring device are directly opposite and parallel to the first inclined plane, and the end faces of the housing and the inner rod of the second cavity length measuring device are directly opposite and parallel to the second inclined plane, The first inclined plane and the second inclined plane are two inclined planes of a double inclined plane carrier, and the double inclined plane carrier is fixed on the medium B; a second-order matrix formed by the normal vectors of the two inclined planes
Figure PCTCN2019078351-appb-000001
The rank of is equal to 2, where the normal vector of the first inclined plane is (l 1 , n 1 ) T , the normal vector of the second inclined plane is (l 2 , n 2 ) T , and the two inclined planes are relative to the horizontal plane. The inclination angles θ 1 and θ 2 are between -90° and 90°;
所述第一腔长测量装置用于测量该装置的第二反射点到第一导体反射面的距离变化量，即电介质腔的腔长变化量为Δd 1，所述第二腔长测量装置用于测量该装置的第二反射点到第二导体反射面的距离变化量，即电介质腔的腔长变化量为Δd 2；两个距离变化量，即电介质腔的腔长变化量Δd 1和Δd 2，均可通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长得到；通过所述两个电介质腔的腔长变化量和两个斜面的法向量，能够得到所述介质A相对于所述介质B的水平滑移量Δx和纵向分离量Δz： The first cavity length measuring device is used to measure the distance change from the second reflection point of the device to the first conductor reflection surface, that is, the cavity length change of the dielectric cavity is Δd 1 , and the second cavity length measuring device uses To measure the distance change from the second reflection point of the device to the second conductor reflection surface, that is, the cavity length change of the dielectric cavity is Δd 2 ; two distance changes, namely the dielectric cavity cavity length change Δd 1 and Δd 2. Both can be obtained through the resonant frequency/cavity length of the open hollow coaxial cable-Fabry Perot cavity; through the cavity length change of the two dielectric cavities and the normal vector of the two inclined planes, Obtain the horizontal slip amount Δx and the longitudinal separation amount Δz of the medium A relative to the medium B:
Figure PCTCN2019078351-appb-000002
Figure PCTCN2019078351-appb-000002
在本申请的一种实施方式中，所述腔长测量装置应用于滑移计中；In an embodiment of the present application, the cavity length measuring device is used in a slip gauge;
使用三个电介质腔的腔长测量装置做成测量双向水平滑移量以及纵向分离量的滑移计；针对介质A相当于介质B在平面两个方向以及法向的相对位移，其中，介质A与滑移计载体固定，介质B与三斜面载体固定；三个腔长测量装置分别为第一腔长测量装置、第二腔长测量装置和第三腔长测量装置，每个腔长测量装置的外壳和内杆导体区域的端面在一个平面上，该平面为第二反射点所在的平面，而且该平面平行于导体反射面；三个斜孔是固定到介质A上的滑移计载体的三个斜孔，分别通过并固定第一腔长测量装置、第二腔长测量装置和第三腔长测量装置的外壳，三个斜孔的轴线垂直于三个斜面；所述三个斜面是固定到介质B上的三斜面载体上的三个导体材料做成的斜面，分别为第一斜面、第二斜面和第三斜面，三斜面的三个斜面分别为第一腔长测量装置、第二腔长测量装置和第三腔长测量装置对应的第一导体反射面、第二导体反射面和第三导体反射面；The cavity length measuring device using three dielectric cavities is made into a slip meter that measures the amount of bidirectional horizontal slip and the amount of longitudinal separation; for medium A, it is equivalent to the relative displacement of medium B in the two directions of the plane and the normal direction. Among them, medium A It is fixed with the slip gauge carrier, and the medium B is fixed with the three-slope carrier; the three cavity length measuring devices are the first cavity length measuring device, the second cavity length measuring device and the third cavity length measuring device, each cavity length measuring device The shell and the end surface of the inner rod conductor area are on a plane, which is the plane where the second reflection point is located, and the plane is parallel to the conductor reflection surface; the three oblique holes are fixed to the slip gauge carrier on the medium A The three inclined holes respectively pass through and fix the housings of the first cavity length measuring device, the second cavity length measuring device and the third cavity length measuring device. The axes of the three inclined holes are perpendicular to the three inclined planes; the three inclined planes are The three inclined planes made of the three-inclined carrier fixed to the medium B are the first inclined plane, the second inclined plane and the third inclined plane. The three inclined planes of the three inclined planes are the first cavity length measuring device and the second inclined plane. The first conductor reflecting surface, the second conductor reflecting surface and the third conductor reflecting surface corresponding to the two-cavity length measuring device and the third cavity length measuring device;
所述滑移计载体固定在介质A上，第一腔长测量装置的外壳固定在滑移计载体的第一斜孔内，第二腔长测量装置的外壳固定在滑移计载体的第二斜孔内，第三腔长测量装置的外壳固定在滑移计载体的第三斜孔内，所述第一腔长测量装置外壳和内杆的端面正对且平行于第一斜面，所述第二腔长测量装置外壳和内杆的端面正对且平行于第二斜面，所述第三腔长测量装置外壳和内杆的端面正对且平行于第三斜面，所述第一斜面、所述第二斜面与所述第三斜面为三斜面载体的三个斜面，所述三斜面载体固定在介质B上；所述三个斜面的法向量构成的三阶矩阵
Figure PCTCN2019078351-appb-000003
的秩等于3，其中，所述第一斜面的法向量为(l 1,m 1,n 1) T，第二斜面的法向量为(l 2,m 2,n 2) T，第三斜面的法向量为(l 3,m 3,n 3) T，所述三个斜面相对于水平面的倾斜角度θ 1、θ 2和θ 3在-90°到90°之间； The slip gauge carrier is fixed on the medium A, the shell of the first cavity length measuring device is fixed in the first inclined hole of the slip gauge carrier, and the shell of the second cavity length measuring device is fixed on the second cavity of the slip gauge carrier. In the oblique hole, the housing of the third cavity length measuring device is fixed in the third oblique hole of the slip gauge carrier, and the end faces of the housing and the inner rod of the first cavity length measuring device are directly opposite and parallel to the first inclined plane. The end faces of the housing and the inner rod of the second cavity length measuring device are directly opposite and parallel to the second inclined plane. The end faces of the housing and the inner rod of the third cavity length measuring device are directly opposite and parallel to the third inclined plane. The first inclined plane, The second inclined plane and the third inclined plane are three inclined planes of a three inclined plane carrier, and the three inclined plane carrier is fixed on the medium B; a third-order matrix formed by the normal vectors of the three inclined planes
Figure PCTCN2019078351-appb-000003
The rank of is equal to 3, where the normal vector of the first inclined plane is (l 1 ,m 1 ,n 1 ) T , the normal vector of the second inclined plane is (l 2 ,m 2 ,n 2 ) T , the third inclined plane The normal vector of is (l 3 , m 3 , n 3 ) T , and the inclination angles θ 1 , θ 2 and θ 3 of the three inclined surfaces relative to the horizontal plane are between -90° and 90°;
所述第一腔长测量装置用于测量该装置的第二反射点到第一导体反射面的距离变化量，即电介质腔的腔长变化量为Δd 1，所述第二腔长测量装置用于测量该装置的第二反射点到第二导体反射面的距离变化量，即电介质腔的腔长变化量为Δd 2，所述第三腔长测量装置用于测量该装置的第二反射点到第三导体反射面的距离变化量，即电介质腔的腔长变化量为Δd 3；三个距离变化量，即电介质腔的腔长变化量Δd 1、Δd 2和Δd 3，均可通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长得到；通过所述三个电介质腔的腔长变化量和三个斜面的法向量，能够得到所述第一物体相对于所述第二物体的水平滑移量Δx、Δy和纵向分离量Δz： The first cavity length measuring device is used to measure the distance change from the second reflection point of the device to the first conductor reflection surface, that is, the cavity length change of the dielectric cavity is Δd 1 , and the second cavity length measuring device uses To measure the change in the distance from the second reflection point of the device to the reflection surface of the second conductor, that is, the change in the cavity length of the dielectric cavity is Δd 2 , the third cavity length measuring device is used to measure the second reflection point of the device The distance change from the reflective surface of the third conductor, that is, the cavity length change of the dielectric cavity is Δd 3 ; the three distance changes, namely the cavity length change of the dielectric cavity Δd 1 , Δd 2 and Δd 3 , can all be opened The resonant frequency/cavity length of the hollow coaxial cable-Fabry-Perot cavity can be obtained; the first object can be obtained by the cavity length variation of the three dielectric cavities and the normal vectors of the three inclined planes The horizontal slip amount Δx, Δy and the longitudinal separation amount Δz relative to the second object:
Figure PCTCN2019078351-appb-000004
Figure PCTCN2019078351-appb-000004
在本申请的一种实施方式中，所述腔长测量装置应用于基于弹簧和膜片的位移传感器中；In an embodiment of the present application, the cavity length measuring device is applied to a displacement sensor based on a spring and a diaphragm;
所述位移传感器通过弹簧和膜片，将较大的位移变化量转换成较小的膜片挠度变化量；膜片靠近电介质腔的腔长测量装置的一侧为导体反射面；使用测量第二反射点到导体反射面距离的电介质腔的腔长测量装置做成位移传感器，腔长测量装置外壳和内杆的左端面连接解调装置，右端面为第二反射点，第二反射点的右边一定距离处放有膜片，膜片和外壳内杆的轴线重合，膜片的左端面为导体反射面；膜片的右端面连接有一个顶着膜片中心点的推杆，推杆的右边有支挡结构，支挡结构的右边是弹簧，弹簧右边是带有一个支挡结构的探杆；The displacement sensor uses a spring and a diaphragm to convert a larger displacement change into a smaller diaphragm deflection change; the side of the diaphragm close to the cavity length measuring device of the dielectric cavity is the conductor reflection surface; The cavity length measuring device of the dielectric cavity from the reflection point to the conductor reflection surface is made into a displacement sensor. The cavity length measuring device shell and the left end surface of the inner rod are connected to the demodulation device, the right end surface is the second reflection point, and the right end of the second reflection point A diaphragm is placed at a certain distance. The axis of the diaphragm and the inner rod of the housing coincide. The left end of the diaphragm is the reflective surface of the conductor; the right end of the diaphragm is connected with a push rod against the center point of the diaphragm, and the right side of the push rod There is a retaining structure, the right side of the retaining structure is a spring, and the right side of the spring is a probe with a retaining structure;
当位移发生变化时，探杆移动，弹簧的压缩量发生变化，弹力发生变化，通过推杆使得作用到膜片上的力发生变化，最终使得膜片的挠度发生变化，从而使得导体反射面到第二反射点之间的距离发生变化，即电介质腔的腔长发生变化，最终使得开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生变化，通过标定可以得到谐振频率/谐振腔腔长和位移之间的关系；When the displacement changes, the probe moves, the compression of the spring changes, and the elastic force changes. The push rod causes the force acting on the diaphragm to change, and finally changes the deflection of the diaphragm, so that the reflective surface of the conductor changes. The distance between the second reflection points changes, that is, the cavity length of the dielectric cavity changes, and finally the resonant frequency/cavity length of the open hollow coaxial cable-Fabry-Perot cavity changes. The calibration can be Obtain the relationship between resonant frequency/resonant cavity length and displacement;
当外壳端面有扩口时，可以通过加大膜片的直径来增加位移传感器的灵敏度。When there is a flaring on the end surface of the housing, the sensitivity of the displacement sensor can be increased by increasing the diameter of the diaphragm.
在本申请的一种实施方式中，所述腔长测量装置应用于基于斜面结构的位移传感器中；In an embodiment of the present application, the cavity length measuring device is applied to a displacement sensor based on a slope structure;
使用斜面作为导体反射面，腔长测量装置的外壳和内杆的轴线垂直于斜面；斜面与位移计所测量的水平位移方向之间有一个夹角θ，θ的范围是-90°到90°之间，即斜面可以向左倾斜，也可以向右倾斜，位移计的轴线始终垂直于斜面，位移计的量程越大，θ越小；当位移发生变化时，斜面将水平方向较大的位移变化量，变成斜面在斜面法线方向较小的移动量；使用测量第二反射点到导体反射面之间距离的电介质腔的腔长测量装置做成位移传感器，腔长测量装置的外壳和内杆导体区域的端面在一个平面上，该平面为第二反射点所在的平面，而且该平面平行于导体反射面，即腔长测量装置的轴线平行于斜面的法线；斜面为导体反射面；Use the inclined plane as the conductor reflection surface, the axis of the housing and the inner rod of the cavity length measuring device is perpendicular to the inclined plane; there is an angle θ between the inclined plane and the horizontal displacement direction measured by the displacement meter, and the range of θ is -90° to 90° The inclined plane can be inclined to the left or right. The axis of the displacement meter is always perpendicular to the inclined plane. The larger the range of the displacement meter, the smaller the θ; when the displacement changes, the inclined plane will shift in the horizontal direction. The amount of change becomes a small amount of movement of the inclined plane in the direction of the normal line of the inclined plane; the cavity length measuring device of the dielectric cavity that measures the distance between the second reflection point and the conductor reflection surface is used to make a displacement sensor, the housing of the cavity length measuring device and The end surface of the inner rod conductor area is on a plane, which is the plane where the second reflection point is located, and the plane is parallel to the conductor reflection surface, that is, the axis of the cavity length measuring device is parallel to the normal line of the slope; the slope is the reflection surface of the conductor ；
斜面的倾斜角度是已知量θ，当位移计探杆的水平位移量为w时，开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生变化，从而得到腔长测量装置第二反射点到导体反射面的距离变化量，即电介质腔的腔长变化量为Δd＝w·sinθ；通过谐振频率/谐振腔腔长的变化量可确定第二反射点到导体反射面之间电介质腔的腔长变化量Δd的大小，从而确定位移的大小；在电介质腔的腔长的最大值和最小值不变的情况下，通过减小斜面斜率的方法增大位移传感器的量程。The inclination angle of the inclined plane is a known quantity θ. When the horizontal displacement of the displacement meter probe is w, the resonant frequency/length of the resonant cavity of the open hollow coaxial cable-Fabry-Perot resonator changes, thereby obtaining The change in the distance from the second reflection point of the cavity length measuring device to the reflective surface of the conductor, that is, the change in the cavity length of the dielectric cavity is Δd=w·sinθ; the change in the resonant frequency/cavity length can determine the second reflection point to The amount of change Δd in the cavity length of the dielectric cavity between the reflective surfaces of the conductor is used to determine the magnitude of the displacement; when the maximum and minimum cavity length of the dielectric cavity remain unchanged, the displacement is increased by reducing the slope of the slope The range of the sensor.
在本申请的一种实施方式中，所述腔长测量装置应用于基于折叠杠杆结构的位移传感器中；In an embodiment of the present application, the cavity length measuring device is applied to a displacement sensor based on a folding lever structure;
折叠杠杆折数较少的一侧折叠的端面固定有导体反射面，能够将轴线方向较大的位移变化量，变成导体反射面在轴线方向较小的移动量；使用测量第二反射点到导体反射面距离的电介质腔的腔长测量装置做成位移传感器，从左往右依次是解调装置、电介质腔的腔长测量装置、M个折叠、折叠的固定点、N个折叠和探杆；腔长测量装置的外壳和内杆导体区域的端面在一个平面上，该平面为第二反射点所在的 平面，而且该平面平行于导体反射面，即腔长测量装置的轴线垂直于导体反射面，腔长测量装置的轴线和折叠端面探杆的运动方向相同；The folded end face of the folding lever on the side with the smaller number of folds is fixed with a conductor reflecting surface, which can change the larger displacement change in the axial direction into a smaller movement of the conductor reflecting surface in the axial direction; use the measurement of the second reflection point to The cavity length measuring device of the dielectric cavity of the distance from the conductor reflection surface is made into a displacement sensor. From left to right, there are the demodulation device, the cavity length measuring device of the dielectric cavity, M folds, fold fixed points, N folds and probe rods. The shell of the cavity length measuring device and the end surface of the inner rod conductor area are on a plane, which is the plane where the second reflection point is located, and the plane is parallel to the conductor reflection surface, that is, the axis of the cavity length measuring device is perpendicular to the conductor reflection The axis of the cavity length measuring device is the same as the movement direction of the folded end face probe;
通过折叠杠杆结构对位移进行折减；折叠杠杆有多个转轴，折叠杠杆结构的固定点靠近导体反射面，固定点到导体反射面之间有M个折叠，固定点到位移传感器探头之间有N个折叠；固定点到位移传感器探头之间的每一个折叠的长度的一半为L；固定点到导体反射面之间的每一个折叠的长度的一半为a；如果右边的探杆移动的位移量为w，那么，第二反射点到导体反射面之间的距离变化量，即电介质腔的腔长变化量Δd为：The displacement is reduced by the folding lever structure; the folding lever has multiple rotating shafts, the fixed point of the folding lever structure is close to the conductor reflection surface, there are M folds between the fixed point and the conductor reflection surface, and there are between the fixed point and the displacement sensor probe N folds; half of the length of each fold between the fixed point and the displacement sensor probe is L; half of the length of each fold between the fixed point and the reflective surface of the conductor is a; the displacement if the probe on the right moves The amount is w, then the change in the distance between the second reflection point and the reflective surface of the conductor, that is, the change in cavity length of the dielectric cavity Δd is:
Figure PCTCN2019078351-appb-000005
Figure PCTCN2019078351-appb-000005
通过开放式空心同轴电缆-法布里珀罗谐振腔的腔长变化量可确定第二反射点到导体反射面之间的距离变化量，即电介质腔的腔长变化量为Δd，由于第二反射点到导体反射面之间，电介质腔的腔长变化范围有限，所以位移传感器的量程越大，Na与ML的比值越小；位移变化量和电介质腔的腔长变化量始终成正比。The cavity length variation of the open hollow coaxial cable-Fabry Perot cavity can determine the distance variation between the second reflection point and the conductor reflection surface, that is, the cavity length variation of the dielectric cavity is Δd, because the first Between the second reflection point and the reflective surface of the conductor, the cavity length of the dielectric cavity has a limited variation range, so the larger the range of the displacement sensor, the smaller the ratio of Na to ML; the displacement change is always proportional to the cavity length change of the dielectric cavity.
在本申请的一种实施方式中，所述腔长测量装置应用于基于齿轮和齿条结构的位移传感器中；In an embodiment of the present application, the cavity length measuring device is applied to a displacement sensor based on a gear and rack structure;
齿轮和齿条结构由以下至少一种机械结构组成：齿轮、双层齿轮、齿条、蜗杆，所述齿轮和齿条结构将较大的位移变化量进行折减，使得第二反射点到导体反射面之间的距离发生较小的变化，其变化量为Δd，即电介质腔的腔长变化量为Δd；位移变化量和Δd始终成正比；电介质腔的腔长测量装置的外壳和内杆导体区域的端面在一个平面上，该平面为第二反射点所在的平面，而且该平面平行于导体反射面，即腔长测量装置的轴线垂直于导体反射面；The gear and rack structure consists of at least one of the following mechanical structures: gears, double-layer gears, racks, and worms. The gears and rack structures reduce the large displacement changes so that the second reflection point is to the conductor The distance between the reflective surfaces changes slightly, and the change is Δd, that is, the change of the cavity length of the dielectric cavity is Δd; the displacement change is always proportional to Δd; the housing and inner rod of the cavity length measuring device of the dielectric cavity The end surface of the conductor area is on a plane, the plane is the plane where the second reflection point is located, and the plane is parallel to the conductor reflection surface, that is, the axis of the cavity length measuring device is perpendicular to the conductor reflection surface;
位移传感器的探杆带有第一齿条，位移发生变化时，带动第一齿条移动，第一齿条对接双层齿轮上的大直径齿轮，双层齿轮上的小直径齿轮对接第二齿条，第二齿条的端面固定有导体反射面，导体反射面的轴线与腔长测量装置外壳和内杆的轴线平行，且腔长测量装置固定到基板上；探杆的位移发生较大变化时，通过双层齿轮进行位移折减，使得带有导体反射面的第二齿条发生较小的位移变化，即第二反射点到导体反射面之间的距离发生较小的变化，变化量为Δd；通过标定，可以得到位移变化量与Δd之间的线性关系式；如果位移传感器的量程较大，一个双层齿轮对位移的折减不够，可通过多个双层齿轮的组合对位移进行折减；或者，The probe rod of the displacement sensor has a first rack. When the displacement changes, the first rack is driven to move. The first rack is connected to the large-diameter gear on the double-layer gear, and the small-diameter gear on the double-layer gear is connected to the second tooth. The end surface of the second rack is fixed with a conductor reflecting surface, the axis of the conductor reflecting surface is parallel to the axis of the cavity length measuring device shell and the inner rod, and the cavity length measuring device is fixed on the substrate; the displacement of the probe rod changes greatly At this time, the displacement reduction is carried out by the double-layer gear, so that the second rack with the conductor reflection surface has a smaller displacement change, that is, the distance between the second reflection point and the conductor reflection surface has a smaller change. Is Δd; through calibration, the linear relationship between the displacement change and Δd can be obtained; if the range of the displacement sensor is large, and the reduction of the displacement by a double-layer gear is not enough, the displacement can be adjusted by the combination of multiple double-layer gears Make a reduction; or,
位移传感器的探杆带有第一齿条，位移发生变化时，带动第一齿条移动，第一齿条对接带有蜗杆的第一齿轮，第一齿轮和蜗杆共用一个转轴，第一齿轮转动带动蜗杆转动；蜗杆对接第二齿轮，较大的位移通过蜗杆进行折减，带动第二齿轮发生较小转动；第二齿轮对接第二齿条，第二齿条的端面是导体反射面，导体反射面的轴线与腔长测量装置外壳和内杆的轴线平行，且腔长测量装置固定到基板上；通过标定，可得到位移量与电介质腔的腔长变化量Δd之间的线性关系式。The probe of the displacement sensor has a first rack. When the displacement changes, the first rack is driven to move. The first rack is connected to the first gear with a worm. The first gear and the worm share a rotating shaft, and the first gear rotates Drive the worm to rotate; the worm is connected to the second gear, and the larger displacement is reduced by the worm, which drives the second gear to rotate slightly; the second gear is connected to the second rack, and the end surface of the second rack is the reflective surface of the conductor. The axis of the reflecting surface is parallel to the axis of the housing and the inner rod of the cavity length measuring device, and the cavity length measuring device is fixed on the substrate; through calibration, the linear relationship between the displacement and the cavity length change Δd of the dielectric cavity can be obtained.
在本申请的一种实施方式中，所述腔长测量装置应用于折射率传感器中，所述折射率传感器为第一种折射率传感器或第二种折射率传感器；In an embodiment of the present application, the cavity length measuring device is applied to a refractive index sensor, and the refractive index sensor is a first type of refractive index sensor or a second type of refractive index sensor;
在第一种折射率传感器中，电介质腔的腔长测量装置的外壳和内杆在左，导体反射面在右，每个腔长测量装置的内杆导体区域的右端面作为第二反射点，内杆导体区域的端面和导体反射面之间不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接；外壳导体区域的端面和内杆端面是同一个平面，或者外壳导体区域的端面在内杆端面的右边，外壳和导体反射面之间用导体连接或者用绝缘体连接或者不连接；导体反射面在第二反射点的右端，第二反射点所在的平面平行于导体反射面，第二反射点和导体反射面之间的几何距离d保持不变，即电介质腔的几何腔长d保持不变；第二反射点左端的外壳和内杆之间带有密封结构，使得待测折射率的液体或固体或气体均填充在第二反射点所在平面与导体反射面之间；因为填充物的折射率不同，所以会导致放入填充物前后，测出的电介质腔的实际腔长发生变化，该腔长大小d'与折射率的大小有关，从而导致开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生变化，通过谐振频率/谐振腔腔长的大小，可以确定第二反射点和导体反射面之间的距离d'，即放入填充物后，电介质腔的腔长为d'，通过d和d'的比值可以得到填充的液体或固体或气体的折射率；外壳和导体反射面之间部分连接或全部连接，导体反射面的结构至少包括多孔结构；In the first type of refractive index sensor, the housing and inner rod of the cavity length measuring device of the dielectric cavity are on the left, the conductor reflection surface is on the right, and the right end surface of the inner rod conductor area of each cavity length measuring device is used as the second reflection point. The end surface of the inner rod conductor area is not in contact with the reflective surface of the conductor, or connected by an insulator, or connected by a conductor with a resistivity greater than or equal to a preset threshold; the end surface of the outer conductor area and the inner rod end surface are the same plane, or the outer conductor The end face of the area is on the right side of the inner rod end face, and the shell and the conductor reflection surface are connected with a conductor or insulator or not connected; the conductor reflection surface is at the right end of the second reflection point, and the plane where the second reflection point is parallel to the conductor reflection The geometric distance d between the second reflection point and the conductor reflection surface remains unchanged, that is, the geometric cavity length d of the dielectric cavity remains unchanged; a sealing structure is provided between the outer shell and the inner rod at the left end of the second reflection point, so that The liquid or solid or gas of the refractive index to be measured is filled between the plane where the second reflection point is located and the reflective surface of the conductor; because the refractive index of the filler is different, it will cause the actual measurement of the dielectric cavity before and after the filling The cavity length changes. The cavity length d'is related to the refractive index, which causes the resonant frequency/cavity length of the open hollow coaxial cable-Fabry-Perot cavity to change. The length of the cavity can determine the distance d'between the second reflection point and the reflective surface of the conductor, that is, after putting the filler, the cavity length of the dielectric cavity is d', which can be obtained by the ratio of d and d' The refractive index of liquid or solid or gas; the shell and the reflective surface of the conductor are partially connected or fully connected, and the structure of the reflective surface of the conductor includes at least a porous structure;
在第二种折射率传感器中，外壳和内杆在左，导体反射面在右，内杆的导体区域和导体反射面连接，外壳导体区域的端面在内杆端面的左边，即在导体反射面的左边，此时每个传感器的外壳导体区域的右端面作为第二反射点；外壳导体区域的端面和导体反射面之间不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接；第二反射点所在的平面平行于导体反射面，第二反射点和导体反射面之间的几何距离d保持不变，即电介质腔的腔长不变；外壳与内杆之间在第二反射点左端的区域内带有密封结构，使得待测折射率的液体或固体或气体均填充在第二反射点所在平面与导体反射面之间；因为填充 物折射率不同，所以会导致放入填充物前后，开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔长发生变化，电介质腔的几何腔长d不变，放入填充物后，测出的电介质腔的腔长为d'，通过d和d'的比值可以得到填充的液体或固体或气体的折射率。In the second type of refractive index sensor, the shell and the inner rod are on the left, the conductor reflection surface is on the right, the conductor area of the inner rod is connected to the conductor reflection surface, and the end surface of the shell conductor area is on the left side of the inner rod end surface, that is, on the conductor reflection surface At this time, the right end surface of the housing conductor area of each sensor is used as the second reflection point; the end surface of the housing conductor area and the conductor reflection surface are not in contact, or connected with an insulator, or used with a resistivity greater than or equal to a preset threshold Conductor connection; the plane of the second reflection point is parallel to the reflection surface of the conductor, and the geometric distance d between the second reflection point and the reflection surface of the conductor remains unchanged, that is, the cavity length of the dielectric cavity does not change; There is a sealing structure in the area at the left end of the second reflection point, so that the liquid or solid or gas of the refractive index to be measured is filled between the plane where the second reflection point is located and the reflective surface of the conductor; because the refractive index of the filler is different, it will cause Before and after inserting the filler, the resonant frequency/length of the open hollow coaxial cable-Fabry Perot cavity changes, and the geometric cavity length d of the dielectric cavity remains unchanged. After inserting the filler, the measured dielectric The cavity length of the cavity is d', and the refractive index of the filled liquid or solid or gas can be obtained by the ratio of d and d'.
在本申请的一种实施方式中，所述腔长测量装置应用于测量腐蚀的传感器中；测量腐蚀的传感器具有以下两种工况：In an embodiment of the present application, the cavity length measuring device is applied to a sensor for measuring corrosion; the sensor for measuring corrosion has the following two working conditions:
第一种工况是导体反射面发生腐蚀，测量腐蚀的传感器的结构与折射率传感器的结构相同，第二反射点和导体反射面之间的距离保持不变，即电介质腔的几何腔长d不变；在第二反射点和导体反射面之间之间的电介质腔为空腔，导体反射面的载体是实心的，或者做成孔隙结构，以加大腐蚀面积，增加传感器的灵敏度；导体反射面的材料为能够发生腐蚀的材料；外壳与导体反射面之间采用部分连接，或者用孔隙结构连接，使得液体或气体更容易浸入电介质腔内部；导体反射面的材料发生腐蚀后，会产生腐蚀产物，使得第二反射点到导体反射面之间电介质腔腔内的电介质的折射率发生变化，从而改变开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长，通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长的变化量，可测出电介质腔的腔长变化量，并得到折射率的变化量，从而确定腐蚀程度；The first working condition is the corrosion of the reflective surface of the conductor. The structure of the sensor for measuring corrosion is the same as that of the refractive index sensor. The distance between the second reflection point and the reflective surface of the conductor remains unchanged, that is, the geometric cavity length of the dielectric cavity d No change; the dielectric cavity between the second reflection point and the reflective surface of the conductor is a cavity, and the carrier of the reflective surface of the conductor is solid or made into a porous structure to increase the corrosion area and increase the sensitivity of the sensor; The material of the reflective surface is a material that can be corroded; the shell and the reflective surface of the conductor are partially connected or connected with a pore structure to make it easier for liquid or gas to penetrate into the dielectric cavity; the material of the reflective surface of the conductor will be corroded. Corrosion products change the refractive index of the dielectric in the dielectric cavity between the second reflection point and the conductor reflection surface, thereby changing the resonant frequency/cavity length of the open hollow coaxial cable-Fabry-Perot cavity , Through the change of the resonant frequency/length of the cavity of the open hollow coaxial cable-Fabry-Perot resonator, the change of the cavity length of the dielectric cavity can be measured, and the change of the refractive index can be obtained to determine the corrosion degree;
第二种工况是导体反射面不发生腐蚀，当导体反射面的载体不发生腐蚀时，要保证外界的腐蚀产物能够浸入外壳和导体反射面之间的电介质腔区域；导体反射面为孔隙结构，或者，外壳与导体反射面之间采用部分连接或者用孔隙结构连接；当腐蚀产物浸入外壳和导体反射面之间的电介质腔腔内时，该区域的折射率发生改变，从而改变开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长，通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长的变化量和电介质腔的几何腔长d的大小，可测出折射率的变化量，从而确定腐蚀程度。The second working condition is that the reflective surface of the conductor does not corrode. When the carrier of the reflective surface of the conductor does not corrode, it is necessary to ensure that external corrosion products can penetrate into the dielectric cavity area between the shell and the reflective surface of the conductor; the reflective surface of the conductor has a porous structure , Or, the shell and the reflective surface of the conductor are partially connected or connected by a pore structure; when the corrosion product is immersed in the dielectric cavity between the shell and the reflective surface of the conductor, the refractive index of this area changes, thereby changing the open hollow Coaxial cable-Fabry-Perot resonant cavity resonant frequency/cavity length, through the open hollow coaxial cable-Fabry-Perot resonant cavity resonant frequency/resonant cavity length change and dielectric cavity The size of the geometric cavity length d can be used to measure the change in refractive index to determine the degree of corrosion.
附图说明Description of the drawings
图1为本申请实施例提供的传感器的原理示意图，外壳、内杆和导体反射面之间均无导体连接的工况；FIG. 1 is a schematic diagram of the principle of a sensor provided by an embodiment of the application, with no conductor connection between the outer shell, the inner rod and the conductor reflection surface;
图2(a)为外壳和内杆分别与导体反射面之间用绝缘体或电阻率较大的导体连通的工况；Figure 2(a) is the working condition where the shell and the inner rod are respectively connected with the reflective surface of the conductor with an insulator or a conductor with a larger resistivity;
图2(b)为外壳与导体反射面之间有导体连通且内杆和导体反射面之间用绝缘体或电阻率较大的导体连通的工况；Figure 2(b) shows the case where there is a conductor connection between the shell and the conductor reflection surface, and the inner rod and the conductor reflection surface are connected by an insulator or a conductor with a larger resistivity;
图2(c)为内杆与导体反射面之间有导体连通且外壳和导体反射面之间用绝缘体或电阻率较大的导体连通的工况；Figure 2(c) shows the working condition where there is a conductor connection between the inner rod and the conductor reflecting surface, and the shell and the conductor reflecting surface are connected with an insulator or a conductor with a larger resistivity;
图3(a)为本申请实施例的开放式空心同轴电缆-法布里珀罗谐振腔的反射或透射振幅谱Figure 3(a) is the reflection or transmission amplitude spectrum of the open hollow coaxial cable-Fabry-Perot resonator according to an embodiment of the application
图3(b)为本申请实施例一阶谐振频率与电介质腔腔长(介电层厚度)之间的关系曲线图；FIG. 3(b) is a graph of the relationship between the first-order resonance frequency and the length of the dielectric cavity (the thickness of the dielectric layer) in an embodiment of the application;
图4(a)为外壳常用的断面图；Figure 4 (a) is a cross-sectional view of the shell commonly used;
图4(b)为内杆和端面反射片的常用断面图；Figure 4(b) is a common sectional view of the inner rod and end reflector;
图5为常用的反射点的断面图；Figure 5 is a cross-sectional view of commonly used reflection points;
图6为外壳与外壳，或者内杆与内杆连接处的示意图；Figure 6 is a schematic diagram of the connection between the housing and the housing, or the inner rod and the inner rod;
图7(a)为本申请实施例的反射式带有同轴电缆和解调主板的电介质腔的腔长测量装置的结构示意图；FIG. 7(a) is a schematic structural diagram of a reflection type dielectric cavity measuring device with a coaxial cable and a demodulation main board according to an embodiment of the application;
图7(b)为本申请实施例的反射式带有解调主板且解调主板直接连接传感器的电介质腔的腔长测量装置的结构示意图；FIG. 7(b) is a schematic structural diagram of a reflective cavity length measuring device with a demodulation main board and the demodulation main board is directly connected to the dielectric cavity of the sensor according to an embodiment of the application;
图7(c)为本申请实施例的解调主板直接连接在传感器外壳壁上的电介质腔的腔长测量装置的结构示意图；FIG. 7(c) is a schematic structural diagram of a cavity length measuring device in which the demodulation main board is directly connected to the wall of the sensor housing according to an embodiment of the application;
图8(a)为本申请实施例的第一种透射或正反馈环路式电介质腔的腔长测量装置的结构示意图；FIG. 8(a) is a schematic structural diagram of a first transmission or positive feedback loop dielectric cavity length measuring device according to an embodiment of the application;
图8(b)为本申请实施例的第二种透射或正反馈环路式电介质腔的腔长测量装置的结构示意图；FIG. 8(b) is a schematic structural diagram of a second transmission or positive feedback loop dielectric cavity length measurement device according to an embodiment of the application;
图8(c)为本申请实施例的第三种透射或正反馈环路式电介质腔的腔长测量装置的结构示意图；Fig. 8(c) is a schematic structural diagram of a third transmission or positive feedback loop type dielectric cavity cavity length measurement device according to an embodiment of the application;
图8(d)为本申请实施例的第四种透射或正反馈环路式电介质腔的腔长测量装置的结构示意图；FIG. 8(d) is a schematic structural diagram of a fourth transmission or positive feedback loop dielectric cavity length measurement device according to an embodiment of the application;
图9(a)为本申请实施例的外壳和内杆端面是同一断面工况的结构示意图；Figure 9 (a) is a structural schematic diagram of the case and the end face of the inner rod of the embodiment of the application being the same section;
图9(b)为本申请实施例的外壳和内杆端面是不同断面工况的结构示意图；Figure 9(b) is a structural schematic diagram of the outer shell and the inner rod end face of the embodiment of the application in different cross-sectional working conditions;
图9(c)为本申请实施例的外壳和内杆端面带有扩径结构的示意图，即膜片式压强传感器和声波传感器的结构示意图；Fig. 9(c) is a schematic diagram of the outer shell and the inner rod end surface with an enlarged diameter structure of the embodiment of the application, that is, the schematic diagram of the diaphragm pressure sensor and the acoustic wave sensor;
图9(d)为本申请实施例的外壳和内杆端面带有扩径结构且电介质腔的腔内带有介质的示意图；FIG. 9(d) is a schematic diagram of the housing and the end face of the inner rod with an enlarged diameter structure and the dielectric cavity with the medium in the cavity of the embodiment of the application;
图9(e)为本申请实施例的内杆和外壳导体发反射片之间连接导体且外壳和导体反射面之间有导体或绝缘体介质的示意图；Fig. 9(e) is a schematic diagram of the conductor connected between the inner rod and the outer shell conductor reflection sheet in the embodiment of the application, and there is a conductor or insulator medium between the outer shell and the conductor reflection surface;
图10(a)为本申请实施例的C型波登管压强传感器的结构示意图；Figure 10 (a) is a schematic structural diagram of a C-type Bourdon tube pressure sensor according to an embodiment of the application;
图10(b)为本申请实施例的螺旋波登管压强传感器的结构示意图；Fig. 10(b) is a schematic structural diagram of a spiral Bourdon tube pressure sensor according to an embodiment of the application;
图11为本申请实施例的加速度传感器的结构示意图；FIG. 11 is a schematic structural diagram of an acceleration sensor according to an embodiment of the application;
图12(a)为本申请实施例的第一种流速传感器的结构示意图；Fig. 12(a) is a schematic structural diagram of a first flow velocity sensor according to an embodiment of the application;
图12(b)为本申请实施例的第二种流速传感器的结构示意图；Fig. 12(b) is a schematic structural diagram of a second flow velocity sensor according to an embodiment of the application;
图12(c)为本申请实施例的第三种流速传感器的结构示意图；Fig. 12(c) is a schematic structural diagram of a third flow velocity sensor according to an embodiment of the application;
图13(a)为本申请实施例的第一种测力传感器的结构示意图；Fig. 13(a) is a schematic structural diagram of the first load cell according to an embodiment of the application;
图13(b)为本申请实施例的第二种测力传感器的结构示意图；Fig. 13(b) is a schematic structural diagram of a second load cell according to an embodiment of the application;
图14为本申请实施例的应变计的结构示意图；FIG. 14 is a schematic structural diagram of a strain gauge according to an embodiment of the application;
图15(a)为本申请实施例的第二种水平放置的单向倾斜仪的结构示意图；Fig. 15(a) is a schematic structural diagram of a second horizontally placed unidirectional inclinometer according to an embodiment of the application;
图15(b)为本申请实施例的第一种水平放置的单向倾斜仪的结构示意图；Figure 15(b) is a schematic structural diagram of the first horizontally placed unidirectional inclinometer according to an embodiment of the application;
图16为本申请实施例的水平放置的双向倾斜仪的结构示意图；16 is a schematic structural diagram of a horizontally placed bidirectional inclinometer according to an embodiment of the application;
图17(a)为本申请实施例的基于压强传感器的第二种单向倾斜仪的结构示意图；Figure 17(a) is a schematic structural diagram of a second type of unidirectional inclinometer based on a pressure sensor according to an embodiment of the application;
图17(b)为本申请实施例的基于压强传感器的第二种双向倾斜仪的结构示意图；Figure 17(b) is a schematic structural diagram of a second type of bidirectional inclinometer based on a pressure sensor according to an embodiment of the application;
图18(a)为本申请实施例的XZ方向滑移计的结构示意图；Figure 18 (a) is a schematic diagram of the structure of the XZ direction slip gauge according to an embodiment of the application;
图18(b)为本申请实施例的XYZ方向滑移计的结构示意图；Figure 18(b) is a schematic diagram of the structure of the XYZ direction slip gauge according to the embodiment of the application;
图19(a)为本申请实施例的基于弹簧和膜片的第一种位移传感器的结构示意图；Figure 19 (a) is a schematic structural diagram of a first displacement sensor based on a spring and a diaphragm according to an embodiment of the application;
图19(b)为本申请实施例的基于弹簧和膜片的第二种位移传感器的结构示意图；FIG. 19(b) is a schematic structural diagram of a second displacement sensor based on a spring and a diaphragm according to an embodiment of the application;
图20(a)为本申请实施例的基于斜面进行位移折减的位移传感器的结构示意图；Fig. 20(a) is a schematic structural diagram of a displacement sensor based on inclined plane for displacement reduction according to an embodiment of the application;
图20(b)为本申请实施例的基于折叠式杠杆结构进行位移折减的位移传感器的结构示意图；Figure 20(b) is a schematic structural diagram of a displacement sensor based on a folding lever structure for displacement reduction according to an embodiment of the application;
图20(c)为本申请实施例的基于双层齿轮进行位移折减的位移传感器的结构示意图；Figure 20(c) is a schematic structural diagram of a displacement sensor based on double-layer gears for displacement reduction according to an embodiment of the application;
图20(d)为本申请实施例的基于蜗杆进行位移折减的位移传感器的结构示意图；Figure 20(d) is a schematic structural diagram of a displacement sensor based on a worm for displacement reduction according to an embodiment of the application;
图21为本申请实施例的测量折射率或腐蚀的传感器的结构示意图。FIG. 21 is a schematic structural diagram of a sensor for measuring refractive index or corrosion according to an embodiment of the application.
附图标记说明：Description of reference signs:
1-外壳，可以是空心管，杆，弹簧或者其他形状的连续导体；2-内杆，可以是空心、实心，也可以是弹簧或者其他形状的连续导体；3-第一反射点，可以是导体或者绝缘体，可以与外壳或者内杆连接，也可以不连接，可以是任意形状或者多个零件的组合体；4-第二反射点，属性同第一反射点；5-谐振腔，内部可以是气体或者液体；6-同轴电缆转接头；7-同轴电缆转接头的中心信号针；8-传输用的同轴电缆；9-解调主板，解调频谱的仪器，可以是矢量网络(简称矢网)分析仪，或标量微波分析仪，或测量和解调频谱的解调电路板，不包含传输用的同轴电缆等传输线；10-第二反射点、电介质腔和反射面构成的系统；11-导体反射面，通常使用导体材料，特殊情况下也可以是半导体或绝缘体；12-电介质腔，内部可以填充不导电的固体、气体、液体等绝缘体材料；13-外壳或内杆和导体反射面之间的填充物，可以是固体、气体、液体，可以是导体，也可以是绝缘体；14-接线端子；15-反射面的载体；16-射频同轴电缆转接头；17-外壳1和内杆2端面的密封装置，可以是导体，也可以是绝缘体；可以是闭合或者非闭合结构，也可以是作为端面的同轴线缆转接头；20-波登管，可以是C型波登管，也可以是螺旋波登管等各种波登管；21-将波登管固定到外壳上的连接件；22-波登管底座；23-加压口；24-用来固定反射面载体的零件；25-铰；26-用来夹住波登管的夹具；27-质量块；31-挡板；32-外壳壁或容器壁；33-流体；34-梁或较厚膜片；35-测力计固定点；36-测力计加载点；37-连接在外壳上的零件，用下固定零件38；38-被流体冲击的物体；39-铰接点；40-连接第二反射点载体的带铰零件；41-应变计的第一限位片，与左端外壳61固定；42-应变计的第二限位片，与右端外壳62固定；51-外壳端面的导体扩展环；52-质量块；53-柔性绳或弹性杆；54-吊线架(支架)；55-双向倾斜仪的质量块；56-柔性绳或弹性杆与顶板和质量块的固定点；57-固定电介质腔的腔长测量装置的刚性竖杆，与传感器和顶板刚性连接；58-刚性顶板，或连接并固定几个电介质腔的腔长测量装置的刚体；59-容器；60-单个压强传感器；61-固定电介质腔的腔长测量装置的带斜孔的载体；62-滑移计的密封装置；63-滑移计下半部分带斜面的载体；64-与滑移计载体61固定的介质A；65-与滑移计载体63固定的介质B；67-双向滑移计的第一个斜面；68-双向滑移计的第二个斜面；69-双向滑移计的第三个斜面；71-弹簧的第一固定端；72-弹簧；73-弹簧的第二固定端，74-位移传感器探杆；75-直线运动轴承；81-斜面；82-位移传感器外壳；83-支挡块体；84-直线运动轴承的外壳；85-直线运动轴承；86-密封装置，可以是密封胶圈等零件；87-固定同轴电缆位移传感器外壳的固定装置；88-防晃滑块；89-位移传感器端面的密封塞；91-杠杆结构的固定点，只限制位移，不限制转动；92-固定点91与位移传感器传动杆96之间的杠杆结构；93-固定点91与位移传感器探杆95之间的杠杆结构；94-杠杆结构12与位移传感器探杆95之间的连接铰点；95-位移传感器探杆；96-位移传感器传动杆；100-解调装置，表示解调谐 振腔的腔长的仪器的统称，包括所有基于反射、或透射、或环路的解调主板，以及传感器连接到解调主板的传输同轴电缆等传输线；101-单个液位传感器，包括传感器主体和解调装置；102-带第一齿条的位移传感器探杆；103-第一齿条；104-双层齿轮上的大齿轮；105-双层齿轮上的小齿轮；106-双层齿轮的固定到基板上的转轴；107-第二齿条；108-第二齿条位移传感器传动杆；109-使位移传感器探杆102只发生轴向移动的约束装置，固定到外壳1上，常用直线运动轴承等；110-齿轮；111-齿轮和蜗杆的共用转轴；112-与蜗杆同轴的齿轮；113-与齿轮同轴的蜗杆；114-约束转轴111的轴承；115-与齿条和探杆连接的支挡块体；116-齿轮、齿条、蜗杆和位移传感器谐振腔部分等零件的安装载体。1- The outer shell, which can be a hollow tube, rod, spring or other continuous conductor; 2- The inner rod, which can be hollow, solid, or a spring or a continuous conductor of other shapes; 3- The first reflection point, which can be Conductor or insulator, which can be connected to the shell or inner rod, or not connected, can be any shape or a combination of multiple parts; 4- The second reflection point, with the same properties as the first reflection point; 5- Resonant cavity, the inside can be It is gas or liquid; 6-coaxial cable adapter; 7-center signal pin of coaxial cable adapter; 8-coaxial cable for transmission; 9-demodulation main board, demodulation spectrum instrument, which can be vector network (Referred to as Vector Network) analyzer, or scalar microwave analyzer, or demodulation circuit board for measuring and demodulating spectrum, does not include transmission lines such as coaxial cables for transmission; 10-second reflection point, dielectric cavity and reflection surface System; 11-Conductor reflective surface, usually conductive materials, in special cases can also be semiconductors or insulators; 12-Dielectric cavity, which can be filled with non-conductive solid, gas, liquid and other insulator materials; 13-Shell or inner rod The filler between the reflective surface of the conductor and the reflective surface of the conductor can be solid, gas, or liquid, a conductor or an insulator; 14-terminal; 15-reflection surface carrier; 16-radio frequency coaxial cable adapter; 17- The sealing device on the end faces of the shell 1 and the inner rod 2 can be a conductor or an insulator; it can be a closed or non-closed structure, or a coaxial cable adapter as an end face; 20-Bourdon tube, can be C Type Bourdon tube, it can also be a variety of Bourdon tubes such as spiral Bourdon tube; 21-connecting piece for fixing the Bourdon tube to the shell; 22-Bourdon tube base; 23-pressure port; 24-used Parts for fixing the reflective surface carrier; 25-hinge; 26-fixture used to clamp the Bourdon tube; 27-mass; 31-baffle; 32-shell wall or container wall; 33-fluid; 34-beam or more Thick diaphragm; 35- dynamometer fixing point; 36- dynamometer loading point; 37- parts connected to the shell, fixed parts 38; 38- objects impacted by fluid; 39- hinge point; 40- Hinged parts connected to the second reflection point carrier; 41- the first limiting piece of the strain gauge, which is fixed to the left end shell 61; 42- the second limiting piece of the strain gauge, which is fixed to the right end shell 62; 51- the end of the shell Conductor expansion ring; 52-mass block; 53-flexible rope or elastic rod; 54-suspended wire frame (support); 55-mass block of two-way inclinometer; 56-fixed point of flexible rope or elastic rod with top plate and mass; 57-Fix the rigid vertical rod of the cavity length measuring device of the dielectric cavity, rigidly connected with the sensor and the top plate; 58-Rigid top plate, or the rigid body of the cavity length measuring device connecting and fixing several dielectric cavities; 59-container; 60-single Pressure sensor; 61-Carrier with oblique hole for fixing the cavity length measuring device of dielectric cavity; 62-Slipmeter sealing device; 63-Carrier with slope in the lower part of the slipmeter; 64-Carrier with slipmeter 61 Fixed medium A; 65-fixed with slip gauge carrier 63 Fixed medium B; 67-the first slope of the two-way slip gauge; 68-the second slope of the two-way slip gauge; 69-the third slope of the two-way slip gauge; 71-the first fixed end of the spring; 72-spring; 73-the second fixed end of the spring, 74-displacement sensor probe; 75-linear motion bearing; 81-inclined plane; 82-displacement sensor housing; 83-stop block body; 84-linear motion bearing housing 85- Linear motion bearing; 86- Sealing device, which can be parts such as sealing rubber ring; 87- Fixing device for fixing the shell of coaxial cable displacement sensor; 88- Anti-shake slider; 89- Sealing plug on the end face of displacement sensor; 91 -The fixed point of the lever structure only restricts displacement, not rotation; 92- the lever structure between the fixed point 91 and the displacement sensor transmission rod 96; 93- the lever structure between the fixed point 91 and the displacement sensor rod 95; 94 -The connecting hinge point between the lever structure 12 and the displacement sensor rod 95; 95-displacement sensor rod; 96-displacement sensor transmission rod; 100-demodulation device, a collective term for the instrument that demodulates the cavity length of the resonant cavity, Including all demodulation motherboards based on reflection, transmission, or loop, and transmission lines such as transmission coaxial cables connecting the sensor to the demodulation motherboard; 101-single liquid level sensor, including the sensor body and demodulation device; 102-band A rack-and-pinion displacement sensor probe; 103-the first rack; 104-the large gear on the double-layer gear; 105-the small gear on the double-layer gear; 106-the shaft of the double-layer gear fixed to the base plate; 107 -Second rack; 108-Second rack displacement sensor transmission rod; 109-Constraining device to make the displacement sensor probe 102 only move axially, fixed to the housing 1, usually linear motion bearings, etc.; 110-Gear; 111-The common rotating shaft of the gear and the worm; 112-The gear coaxial with the worm; 113-The worm coaxial with the gear; 114-the bearing that restrains the rotating shaft 111; 115-the block body connected with the rack and the probe; 116-Mounting carrier for parts such as gears, racks, worms and displacement sensor resonant cavity parts.
具体实施方式detailed description
本申请实施例提供了一种新型的基于微波原理测量电介质腔的腔长(电介质层厚度)测量装置，其中，电介质腔的腔长测量装置包含有传感器和解调装置，其中，传感器包含开放式空心同轴电缆-法布里珀罗谐振腔、第一反射点、第二反射点、导体反射面和电介质腔，通过本申请实施例的电介质腔的腔长测量装置能够通过对电介质腔的腔长进行测量，再结合一些机械设计，从而做成测量各个物理参数的传感器。本申请实施例结合电介质腔的腔长测量装置以及辅助的机械设计，可以将腔长测量装置改装成如下传感器：膜片式压强传感器、波登管压强传感器、加速度传感器、流速传感器、测力传感器(也称为测力计)、应变计、倾斜仪、滑移传感器、位移传感器、折射率传感器和腐蚀传感器等各种传感器。The embodiments of the present application provide a new type of measuring device for measuring the cavity length (dielectric layer thickness) of a dielectric cavity based on the microwave principle. The cavity length measuring device of the dielectric cavity includes a sensor and a demodulation device, and the sensor includes an open type Hollow coaxial cable-Fabry-Perot resonant cavity, first reflection point, second reflection point, conductor reflection surface and dielectric cavity, the cavity length measurement device of the dielectric cavity of the embodiment of the application can pass through the cavity of the dielectric cavity Long-term measurement, combined with some mechanical design, so as to make a sensor that measures various physical parameters. The embodiment of the application combines the cavity length measurement device of the dielectric cavity and the auxiliary mechanical design, and the cavity length measurement device can be modified into the following sensors: diaphragm pressure sensor, Bourdon tube pressure sensor, acceleration sensor, flow rate sensor, load cell (Also called dynamometer), strain gauges, inclinometers, slip sensors, displacement sensors, refractive index sensors, and corrosion sensors.
本申请实施例的技术方案中，传感器基于不同的机械传动模式能够高精度的测出压强、流速、力、应变、倾斜角度、滑移、位移、折射率的大小以及腐蚀等参数，测量的原理是基于开放式空心同轴电缆-法布里珀罗谐振腔的原理，这里，传感器除了包含开放式空心同轴电缆-法布里珀罗谐振腔(也可以简称为谐振腔)、第一反射点、第二反射点、导体反射面和电介质腔以外，还包含一个外壳、一个内杆(可有可无)，这里，开放式空心同轴电缆-法布里珀罗谐振腔的结构方便制作，两个反射点(即第一反射点和第二反射点)不发生相对移动(一般，两个反射点的位置固定不变)，利用导体反射面的移动，即改变电介质腔的腔长(介质层的厚度)，可以测量静力和动力作用下的压强、流速、力、应变、倾斜角度和折射率等物理量。电介质腔腔内的电介质可以是导体或绝缘体，可以是固体、液体或气体。此外，传感器的温度补偿非常方便，并且不受电磁等因素的影响。本申请实施例设计的传感器，具有精度高、抗干扰能力强和耐久性强等优点，具有广泛的应用前景，特别适用于高精度测量结构静力和动力作用下的力学性能以及折射率。由于传感器采用的材料性能稳定，可以轻易实现在零下六十度到零上数百度之间工作，通过更换制作材料可在更大的温度范围内工作。总而言之，本申请实施例的传感器不受任何电磁信号的干扰，温度对其影响也极小，并且温度补偿非常容易实现。In the technical solution of the embodiment of the present application, the sensor can measure pressure, flow rate, force, strain, tilt angle, slip, displacement, refractive index, corrosion and other parameters with high accuracy based on different mechanical transmission modes. The principle of measurement It is based on the principle of an open hollow coaxial cable-Fabry Perot cavity. Here, the sensor includes an open hollow coaxial cable-Fabry Perot cavity (also referred to as a resonant cavity) and the first reflection In addition to the point, the second reflection point, the reflection surface of the conductor and the dielectric cavity, it also includes an outer shell and an inner rod (optional). Here, the structure of the open hollow coaxial cable-Fabry Perot cavity is convenient to manufacture , The two reflection points (that is, the first reflection point and the second reflection point) do not move relative to each other (generally, the positions of the two reflection points are fixed), and the movement of the conductor reflection surface is used to change the cavity length of the dielectric cavity ( The thickness of the medium layer), which can measure the pressure, flow velocity, force, strain, tilt angle and refractive index under static and dynamic forces. The dielectric in the dielectric cavity can be a conductor or an insulator, and can be a solid, liquid or gas. In addition, the temperature compensation of the sensor is very convenient and is not affected by factors such as electromagnetics. The sensor designed in the embodiment of the present application has the advantages of high accuracy, strong anti-interference ability, and strong durability, and has a wide range of application prospects, and is particularly suitable for high-precision measurement of mechanical properties and refractive index of structures under static and dynamic forces. Due to the stable performance of the material used in the sensor, it can easily work between minus sixty degrees and hundreds of degrees above zero, and can work in a larger temperature range by changing the material. In a word, the sensor of the embodiment of the present application is not interfered by any electromagnetic signal, the temperature influence on it is minimal, and temperature compensation is very easy to realize.
本申请实施例中的开放式空心同轴电缆-法布里珀罗谐振腔，类似于传统的光学法布里珀罗谐振腔，与光学法布里珀罗谐振腔不同的是，开放式空心同轴电缆-法布里珀罗谐振腔基于微波原理。微波在空心同轴电缆由两个反射点为高反射点形成的一个法布里珀罗腔中产生谐振，谐振频谱与腔长相干，在两个反射点之间距离保持不变的情况下，谐振频率/谐振腔腔长也会受到第二反射点到导体反射面之间距离的影响，即受到电介质腔的腔长影响，其中第二反射点介于第一反射点和导体反射面之间。该开放式空心同轴电缆-法布里珀罗谐振腔属于多路干涉造成的谐振现象，具有解调精度高，信噪比高，解调装置性价比高等特点。因此通过对谐振频谱/谐振腔腔长的分析可以得到高精度的电介质腔腔长。本申请实施例通过一系列机械结构将不同的物理量转换为电介质腔的腔长变化量，从而完成对各个物理量的高精度测量。所述传感器包括开放式空心同轴电缆-法布里珀罗谐振腔、第一反射点、第二反射点、导体反射面、电介质腔；其中，所述第一反射点设置在所述开放式空心同轴电缆-法布里珀罗谐振腔内部的第一位置处，所述第二反射点设置在所述开放式空心同轴电缆-法布里珀罗谐振腔内部的第二位置处，所述导体反射面设置在所述开放式空心同轴电缆-法布里珀罗谐振腔内部的第三位置处，所述第一反射点和所述第二反射点之间不发生相对移动，所述第一反射点和所述第二反射点的反射率大于等于预设阈值，即第一反射点和第二反射点为高反射点；所述第二反射点与所述导体反射面之间为电介质腔，该电介质腔腔内的电介质可以是导体或绝缘体，可以是固体、液体或气体；所述导体反射面能够发生移动或变形，导致所述电介质腔的腔长发生变化。The open hollow coaxial cable-Fabry-Perot resonant cavity in the embodiment of this application is similar to the traditional optical Fabry-Perot resonant cavity. The difference from the optical Fabry-Perot resonant cavity is that the open hollow The coaxial cable-Fabry Perot cavity is based on the microwave principle. Microwaves resonate in a Fabry-Perot cavity formed by two reflection points as high reflection points on a hollow coaxial cable. The resonance frequency spectrum is coherent with the cavity length. When the distance between the two reflection points remains unchanged, The resonant frequency/cavity length will also be affected by the distance between the second reflection point and the conductor reflection surface, that is, the cavity length of the dielectric cavity, where the second reflection point is between the first reflection point and the conductor reflection surface . The open hollow coaxial cable-Fabry Perot resonator is a resonance phenomenon caused by multi-channel interference, and has the characteristics of high demodulation accuracy, high signal-to-noise ratio, and high cost-effective demodulation device. Therefore, a high-precision dielectric cavity length can be obtained by analyzing the resonance frequency spectrum/cavity length. The embodiment of the present application converts different physical quantities into the cavity length variation of the dielectric cavity through a series of mechanical structures, thereby completing high-precision measurement of each physical quantity. The sensor includes an open hollow coaxial cable-Fabry Perot cavity, a first reflection point, a second reflection point, a conductor reflection surface, and a dielectric cavity; wherein, the first reflection point is set in the open At a first position inside the hollow coaxial cable-Fabry-Perot cavity, the second reflection point is set at a second position inside the open-type hollow coaxial cable-Fabry-Perot cavity, The conductor reflection surface is arranged at a third position inside the open hollow coaxial cable-Fabry Perot cavity, and there is no relative movement between the first reflection point and the second reflection point, The reflectivity of the first reflection point and the second reflection point is greater than or equal to a preset threshold, that is, the first reflection point and the second reflection point are high reflection points; the second reflection point and the conductor reflection surface are different The space is a dielectric cavity. The dielectric in the dielectric cavity can be a conductor or an insulator, and can be solid, liquid or gas; the reflective surface of the conductor can move or deform, causing the cavity length of the dielectric cavity to change.
为了能够更加详尽地了解本申请实施例的特点与技术内容，下面结合附图对本申请实施例的实现进行详细阐述，所附附图仅供参考说明之用，并非用来限定本申请实施例。In order to have a more detailed understanding of the features and technical content of the embodiments of the present application, the implementation of the embodiments of the present application will be described in detail below in conjunction with the accompanying drawings. The attached drawings are for reference and explanation purposes only and are not used to limit the embodiments of the present application.
图1为本申请实施例提供的传感器的原理示意图，如图1所示，传感器包括：开放式空心同轴电缆-法布里珀罗谐振腔5、第一反射点3、第二反射点4、导体反射面11、电介质腔12。此外，传感器还包括：外壳1，内杆2。内杆2和外壳1的直径分别为2a和2b。静电电容由孔径上的同轴线的TEM(Transverse Electric and Magnetic)场激发。当孔径处的介电层无限厚时(即d→∞)，边缘电容的计算公式如公式(1) 所示：Fig. 1 is a schematic diagram of the principle of a sensor provided by an embodiment of the application. As shown in Fig. 1, the sensor includes: an open hollow coaxial cable-Fabry-Perot cavity 5, a first reflection point 3, and a second reflection point 4 , Conductor reflective surface 11, and dielectric cavity 12. In addition, the sensor also includes: a housing 1 and an inner rod 2. The diameters of the inner rod 2 and the outer shell 1 are 2a and 2b, respectively. The electrostatic capacitance is excited by the TEM (Transverse Electric and Magnetic) field of the coaxial line on the aperture. When the dielectric layer at the aperture is infinitely thick (ie d→∞), the calculation formula of fringe capacitance is shown in formula (1):
Figure PCTCN2019078351-appb-000006
Figure PCTCN2019078351-appb-000006
其中，ε 0为真空介电常数，ε r为相对介电常数，当孔径处的介电层的厚度为d时，如图1所示，由此产生的附加电容的计算公式如公式(2)所示： Among them, ε 0 is the vacuum dielectric constant, ε r is the relative dielectric constant, when the thickness of the dielectric layer at the aperture is d, as shown in Figure 1, the calculation formula for the resulting additional capacitance is as follows: ) Shows:
Figure PCTCN2019078351-appb-000007
Figure PCTCN2019078351-appb-000007
因此，开放式空心同轴电缆谐振腔的总边缘电容的计算公式如公式(3)所示：Therefore, the calculation formula for the total fringe capacitance of the open hollow coaxial cable resonant cavity is shown in formula (3):
C＝C 1+C 2            (3) C=C 1 +C 2 (3)
开放平面上的输入反射系数的计算公式如公式(4)所示：The calculation formula of the input reflection coefficient on the open plane is shown in formula (4):
Figure PCTCN2019078351-appb-000008
Figure PCTCN2019078351-appb-000008
其中Z 0是空心同轴电缆的特征阻抗。反射系数(S11)的计算公式如公式(5)所示： Where Z 0 is the characteristic impedance of the hollow coaxial cable. The calculation formula of reflection coefficient (S11) is shown in formula (5):
Figure PCTCN2019078351-appb-000009
Figure PCTCN2019078351-appb-000009
δ＝4πLf/C代表往返阶段的延迟，C是空气中的光速，L是金属柱(即第一反射点)和开口端(即第二反射点)之间的物理长度，f是空心同轴电缆内部传播的电磁波的频率，Γ 1和Γ 2是两个反射点(即第一反射点和第二反射点)的复合反射系数。 δ=4πLf/C represents the delay in the round-trip phase, C is the speed of light in the air, L is the physical length between the metal column (ie the first reflection point) and the open end (ie the second reflection point), f is the hollow coaxial The frequency of the electromagnetic wave propagating inside the cable, Γ 1 and Γ 2 are the composite reflection coefficients of the two reflection points (ie, the first reflection point and the second reflection point).
将开放式空心同轴电缆-法布里珀罗谐振腔的参数代入等式(5)，得到的反射谱如图3(a)所示，这里重点研究一阶谐振频率，也可以研究二阶、三阶等谐振频率。Substituting the parameters of the open hollow coaxial cable-Fabry Perot cavity into equation (5), the reflection spectrum obtained is shown in Figure 3(a). Here, the first-order resonance frequency is mainly studied, and the second-order , Third-order and other resonant frequencies.
调整距离d并跟踪相应的一阶谐振频率。一阶谐振频率与电介质腔的腔长(介电层的厚度)之间的关系(即第二反射点到导体反射面之间的距离)如图3(b)所示。在模拟中电介质腔(介电层)内的介质为空气。使用开放式空心同轴电缆-法布里珀罗谐振腔制作传感器的基本思想是基于从反射振幅谱或透射振幅谱可以精确计算出电介质腔的腔长(介电层的厚度)。Adjust the distance d and track the corresponding first-order resonance frequency. The relationship between the first-order resonance frequency and the cavity length of the dielectric cavity (the thickness of the dielectric layer) (that is, the distance between the second reflection point and the reflective surface of the conductor) is shown in Figure 3(b). In the simulation, the medium in the dielectric cavity (dielectric layer) is air. The basic idea of using an open hollow coaxial cable-Fabry Perot cavity to make a sensor is based on the accurate calculation of the cavity length (the thickness of the dielectric layer) of the dielectric cavity from the reflection amplitude spectrum or the transmission amplitude spectrum.
以下结合具体结构对本申请实施例的用微波原理测量电介质腔的腔长测量装置进行详细描述，本申请实施例的腔长测量装置包括：传感器、解调装置。在本申请的全部实施例中：The cavity length measurement device for measuring the dielectric cavity using the microwave principle in the embodiment of the present application will be described in detail below with reference to the specific structure. The cavity length measurement device of the embodiment of the present application includes a sensor and a demodulation device. In all the embodiments of this application:
1)外壳1或内杆2可以是一个导体零件，也可以是多个导体零件连接在一起的组合部件(确保连接处的导电性)，可见，外壳1或内杆2分别是一个连续导体。全部图中画的一个导体零件未必代表一个简单的导体零件，也可以代表多个导体零件通过不同连接方式组成的复合导体零件。1) The outer shell 1 or the inner rod 2 can be a conductor part, or a composite part of multiple conductor parts connected together (to ensure the conductivity of the connection). It can be seen that the outer shell 1 or the inner rod 2 is a continuous conductor respectively. A conductor part drawn in all the drawings does not necessarily represent a simple conductor part, but may also represent a composite conductor part composed of multiple conductor parts through different connection methods.
2)关于导体反射面的移动：2) About the movement of the reflective surface of the conductor:
所述传感器包括开放式空心同轴电缆-法布里珀罗谐振腔5、第一反射点3、第二反射点4、电介质腔12、导体反射面11，其中，所述第一反射点3设置在所述开放式空心同轴电缆-法布里珀罗谐振腔内部的第一位置处，所述第二反射点4设置在所述谐振腔内部的第二位置处，所述第一位置和所述第二位置固定不变；所述第一反射点3和所述第二反射点4的反射率大于等于预设阈值；所述导体反射面11与第二反射点4之间隔有电介质腔12(介电层)，第二反射点4和导体反射面11之间的距离可以发生变化，即电介质腔的腔长可以发生变化，变化方式可以通过导体反射面的移动或变形来实现；所述电介质腔的腔长变化可以使开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生变化，通过对谐振频率/谐振腔腔长变化量可以确定电介质腔的腔长变化量；所述解调装置与所述传感器的相连，用于对所述传感器内的微波信号进行分析，得到所述开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长。在本申请实施例中提到的各种类型的传感器均可使用这样的结构。The sensor includes an open hollow coaxial cable-Fabry-Perot cavity 5, a first reflection point 3, a second reflection point 4, a dielectric cavity 12, and a conductor reflection surface 11, wherein the first reflection point 3 Is arranged at a first position inside the open hollow coaxial cable-Fabry Perot cavity, the second reflection point 4 is arranged at a second position inside the cavity, and the first position And the second position are fixed; the reflectivity of the first reflection point 3 and the second reflection point 4 is greater than or equal to a preset threshold; the conductor reflection surface 11 and the second reflection point 4 are separated by a dielectric In the cavity 12 (dielectric layer), the distance between the second reflection point 4 and the conductor reflection surface 11 can be changed, that is, the cavity length of the dielectric cavity can be changed, and the change mode can be realized by the movement or deformation of the conductor reflection surface; The cavity length change of the dielectric cavity can change the resonant frequency/cavity length of the open hollow coaxial cable-Fabry-Perot resonant cavity, and the dielectric cavity can be determined by changing the resonant frequency/cavity length The amount of cavity length change; the demodulation device is connected to the sensor to analyze the microwave signal in the sensor to obtain the resonance of the open hollow coaxial cable-Fabry Perot cavity Frequency / cavity length. Various types of sensors mentioned in the embodiments of this application can use such a structure.
3)关于传感器中解调装置的解调主板：3) Regarding the demodulation motherboard of the demodulation device in the sensor:
所述传感器的解调主板9由高性能处理器、微波发射模块和微波接收模块构成；可以是矢量网络(简称矢网)分析仪，或标量微波分析仪，或测量和解调频谱的解调电路板，不包含传输用的同轴电缆等传输线。所述解调主板9通过对谐振频谱的解调获得传感器中开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长，进而得到电介质腔的腔长。解调装置100则表示解调谐振腔腔长的仪器统称，包括所有基于反射、或透射、或环路的解调主板9，射频同轴电缆转接头，以及传感器连接到解调主板的传输同轴电缆8等传输线，具体介绍每种传感器时，用解调装置100表示所有类型的解调主板和传感器与解调主板之间所有的连接方法。The demodulation main board 9 of the sensor is composed of a high-performance processor, a microwave transmitting module and a microwave receiving module; it can be a vector network (referred to as vector network) analyzer, or a scalar microwave analyzer, or a demodulator for measuring and demodulating spectrum. The circuit board does not include transmission lines such as coaxial cables for transmission. The demodulation main board 9 obtains the resonant frequency/cavity length of the open hollow coaxial cable-Fabry-Perot resonant cavity in the sensor by demodulating the resonant frequency spectrum, thereby obtaining the cavity length of the dielectric cavity. The demodulation device 100 refers to the general name of the instrument that demodulates the cavity length of the resonant cavity, including all the demodulation boards 9 based on reflection, or transmission, or loops, RF coaxial cable adapters, and the transmission of the sensor connected to the demodulation board. For transmission lines such as the shaft cable 8, when each sensor is specifically introduced, the demodulation device 100 is used to represent all types of demodulation motherboards and all connection methods between the sensors and the demodulation motherboard.
4)关于传感器的谐振方式：4) About the resonance mode of the sensor:
本申请的所有实施例中介绍的传感器均有反射式和透射式的连接方式，所述透射式腔长测量装置至少具有以下模式：正反馈环路模式、无环路模式。进一步，在正反馈环路中可具有两个反射点、或者一个反射点、或者没有反射点。当所述正反馈环路有两个反射点时，射频同轴电缆转接头通常连接在两个 反射点之间的外壳上，所述解调主板用于测量所述两个反射点之间的谐振腔的腔长，该腔长受到电介质腔腔长的影响；当只有一个反射点时，连接波形放大器使用的射频同轴电缆转接头通常连接在该反射点和射频同轴电缆转接头之间的外壳上。当所述正反馈环路没有反射点时，连接波形放大器使用的射频同轴电缆转接头通常连接在射频同轴电缆转接头和传感器另一端面之间的外壳上，所述解调主板用于测量所述正反馈环路的周长。该结构可以应用于本申请阐述的膜片式压强传感器、波登管压强传感器、加速度传感器、流速传感器、测力传感器(也称为测力计)、应变计、倾斜仪、滑移传感器、位移传感器、折射率传感器、气体吸附传感器和腐蚀传感器等各种传感器。The sensors introduced in all the embodiments of the present application have reflective and transmissive connection modes, and the transmissive cavity length measuring device has at least the following modes: positive feedback loop mode and no loop mode. Further, there may be two reflection points, or one reflection point, or no reflection points in the positive feedback loop. When the positive feedback loop has two reflection points, the RF coaxial cable adapter is usually connected to the shell between the two reflection points, and the demodulation main board is used to measure the difference between the two reflection points. The cavity length of the resonant cavity is affected by the length of the dielectric cavity; when there is only one reflection point, the RF coaxial cable adapter used to connect the waveform amplifier is usually connected between the reflection point and the RF coaxial cable adapter On the shell. When the positive feedback loop has no reflection point, the RF coaxial cable adapter used to connect the waveform amplifier is usually connected to the housing between the RF coaxial cable adapter and the other end of the sensor, and the demodulation main board is used for Measure the circumference of the positive feedback loop. This structure can be applied to the diaphragm pressure sensor, Bourdon tube pressure sensor, acceleration sensor, flow rate sensor, load cell (also called dynamometer), strain gauge, inclinometer, slip sensor, displacement described in this application Sensors, refractive index sensors, gas adsorption sensors and corrosion sensors and other sensors.
在本申请以下实施例中，大多情况仅用反射式的连接方式进行举例，实际上每种传感器的保护范围均有以上介绍的反射式和透射式的连接方式，透射式腔长测量装置至包括正反馈环路模式、和无环路模式，其中正反馈环路包括两个反射点、一个反射点和没有反射点三种工况。In the following embodiments of this application, in most cases, only reflective connection methods are used as examples. In fact, the protection range of each sensor has the reflective and transmissive connection methods described above. The transmissive cavity length measuring device includes Positive feedback loop mode and no loop mode, where the positive feedback loop includes three working conditions of two reflection points, one reflection point and no reflection point.
本申请所有的实施例也都包含有内杆和无内杆两种工况，以下实施例均用有内杆的工况来进行举例。All the embodiments of the present application also include two working conditions of inner rod and no inner rod. The following embodiments all use the working conditions of inner rod as examples.
实施例一：用微波原理测量电介质腔的腔长测量装置Example 1: Cavity length measuring device for measuring dielectric cavity using microwave principle
电介质腔的腔长测量装置包括：传感器、解调装置；其中，传感器部分包括开放式空心同轴电缆-法布里珀罗谐振腔5、第一反射点3、第二反射点4、电介质腔12、导体反射面11；解调装置部分包括解调主板9，可选地，还包括同轴电缆等传输线；其中，所述第一反射点3设置在所述开放式空心同轴电缆-法布里珀罗谐振腔内部的第一位置处，所述第二反射点4设置在所述开放式空心同轴电缆-法布里珀罗谐振腔内部的第二位置处，所述第一位置和所述第二位置固定不变；所述第一反射点3和所述第二反射点4的反射率大于等于预设阈值；所述第一反射点3靠近解调主板9，所述导体反射面11与第二反射点之间4隔有电介质腔12；所述解调主板9与所述传感器相连，用于对所述传感器内的微波信号进行分析，得到所述传感器中开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长，其中，所述传感器中开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长为所述第一反射点与所述第二反射点之间的距离，该腔长受到电介质腔12的腔长影响，即受到介电层厚度的影响。The cavity length measuring device of the dielectric cavity includes: a sensor, a demodulation device; wherein the sensor part includes an open hollow coaxial cable-Fabry Perot cavity 5, a first reflection point 3, a second reflection point 4, and a dielectric cavity 12. Conductor reflection surface 11; the demodulation device part includes a demodulation main board 9, and optionally, a transmission line such as a coaxial cable; wherein, the first reflection point 3 is set on the open hollow coaxial cable-method The second reflection point 4 is set at a second position inside the open-type hollow coaxial cable-Fabry-Perot cavity at a first position inside the Bryperot cavity, the first position And the second position are fixed; the reflectivity of the first reflection point 3 and the second reflection point 4 is greater than or equal to a preset threshold; the first reflection point 3 is close to the demodulation main board 9, and the conductor There is a dielectric cavity 12 between the reflective surface 11 and the second reflective point 4; the demodulation main board 9 is connected to the sensor, and is used to analyze the microwave signal in the sensor to obtain an open hollow in the sensor The resonant frequency/length of the resonant cavity of the coaxial cable-Fabry-Perot cavity, wherein the resonant frequency/length of the resonant cavity of the open hollow coaxial cable-Fabry-Perot cavity in the sensor For the distance between the first reflection point and the second reflection point, the cavity length is affected by the cavity length of the dielectric cavity 12, that is, is affected by the thickness of the dielectric layer.
本实施例中的电介质腔的腔长测量装置分为以下三种类型：The cavity length measuring device of the dielectric cavity in this embodiment is divided into the following three types:
1)反射式腔长测量装置，在所述反射式腔长测量装置中：1) A reflective cavity length measuring device, in the reflective cavity length measuring device:
所述传感器的一端连接第一射频同轴电缆转接头，所述解调主板的一端通过同轴电缆连接所述第一射频同轴电缆转接头；所述传感器的外壳壁直接连接解调主板，即外壳壁可以通过第二射频同轴电缆转接头连接解调主板，也可以直接连接解调主板；或者，One end of the sensor is connected to a first radio frequency coaxial cable adapter, one end of the demodulation main board is connected to the first radio frequency coaxial cable adapter through a coaxial cable; the housing wall of the sensor is directly connected to the demodulation main board, That is, the shell wall can be connected to the demodulation main board through the second radio frequency coaxial cable adapter, or it can be directly connected to the demodulation main board; or,
所述传感器的一端直接连接在解调主板上，即传感器的一端可以通过第一射频同轴电缆转接头连接解调主板，也可以直接连接解调主板；所述传感器的外壳壁连接第二射频同轴电缆转接头，所述第二射频同轴电缆转接头通过同轴电缆连接所述解调主板；或者，One end of the sensor is directly connected to the demodulation main board, that is, one end of the sensor can be connected to the demodulation main board through the first radio frequency coaxial cable adapter, or directly connected to the demodulation main board; the housing wall of the sensor is connected to the second radio frequency A coaxial cable adapter, the second radio frequency coaxial cable adapter is connected to the demodulation main board through a coaxial cable; or,
所述传感器的一端直接连接在解调主板上，即传感器的一端可以通过第一射频同轴电缆转接头连接解调主板，也可以直接连接解调主板；所述传感器的外壳壁上直接连接解调主板，即外壳壁可以通过第二射频同轴电缆转接头连接解调主板，也可以直接连接解调主板。One end of the sensor is directly connected to the demodulation main board, that is, one end of the sensor can be connected to the demodulation main board through the first radio frequency coaxial cable adapter, or it can be directly connected to the demodulation main board; the housing wall of the sensor is directly connected to the demodulation main board. The modulation main board, that is, the shell wall can be connected to the demodulation main board through the second radio frequency coaxial cable adapter, or directly connected to the demodulation main board.
所述传感器包括外壳加内杆时，所述外壳和所述内杆的一端均与所述射频同轴电缆转接头连接，所述射频同轴电缆转接头通过同轴电缆连接所述解调主板；或者所述外壳和所述内杆的第一端直接与解调主板连接，即外壳和内杆的第一端可以通过第一射频同轴电缆转接头连接解调主板，也可以直接连接解调主板。所述第一反射点和所述第二反射点至少有一部分设置在所述外壳加内杆的包络范围之内；When the sensor includes a housing and an inner rod, both ends of the housing and the inner rod are connected to the radio frequency coaxial cable adapter, and the radio frequency coaxial cable adapter is connected to the demodulation main board through a coaxial cable Or the first end of the housing and the inner rod is directly connected to the demodulation motherboard, that is, the first end of the housing and the inner rod can be connected to the demodulation motherboard through the first radio frequency coaxial cable adapter, or directly connected to the demodulation motherboard Adjust the motherboard. At least a part of the first reflection point and the second reflection point are arranged within the envelope range of the outer shell and the inner rod;
所述传感器只有外壳且没有内杆时，所述外壳的一端与所述射频同轴电缆转接头连接，所述射频同轴电缆转接头通过同轴电缆连接所述解调主板；或者外壳的第一端直接与解调主板连接，即外壳的第一端可以通过第一射频同轴电缆转接头连接解调主板，也可以直接连接解调主板。所述第一反射点和所述第二反射点设置在所述外壳的包络范围之内。When the sensor has only a housing and no inner rod, one end of the housing is connected to the radio frequency coaxial cable adapter, and the radio frequency coaxial cable adapter is connected to the demodulation main board through a coaxial cable; or the first part of the housing One end is directly connected to the demodulation main board, that is, the first end of the housing can be connected to the demodulation main board through the first radio frequency coaxial cable adapter, or directly connected to the demodulation main board. The first reflection point and the second reflection point are arranged within the envelope range of the housing.
其中，所述解调主板为：矢量网络分析仪、或微波发生源加标量网络分析仪、或微波时域反射仪、或解调电路板；所述传感器的另一端为开放结构、或者密封结构，外壳和内杆的端面对着导体反射面，第二反射点和导体反射面之间为电介质腔。Wherein, the demodulation main board is: a vector network analyzer, or a microwave generating source plus scalar network analyzer, or a microwave time domain reflectometer, or a demodulation circuit board; the other end of the sensor is an open structure or a sealed structure , The ends of the shell and the inner rod face the conductor reflection surface, and the dielectric cavity is formed between the second reflection point and the conductor reflection surface.
2)透射式腔长测量装置，在所述透射式腔长测量装置中：2) Transmission type cavity length measuring device, in the transmission type cavity length measuring device:
所述传感器的一端连接第一射频同轴电缆转接头，所述传感器的外壳壁连接第二射频同轴电缆转接头，所述解调主板的一端通过同轴电缆连接所述第一射频同轴电缆转接头，所述解调主板的另一端通过同轴电缆连接所述第二射频同轴电缆转接头；或者，One end of the sensor is connected to a first radio frequency coaxial cable adapter, the housing wall of the sensor is connected to a second radio frequency coaxial cable adapter, and one end of the demodulation main board is connected to the first radio frequency coaxial cable through a coaxial cable. A cable adapter, the other end of the demodulation main board is connected to the second radio frequency coaxial cable adapter through a coaxial cable; or,
所述传感器的一端连接第一射频同轴电缆转接头，所述解调主板的一端通过同轴电缆连接所述第一射频同轴电缆转接头；所述传感器的外壳壁直接连接解调主板，即外壳壁可以通过第二射频同轴电缆转接头连接解调主板，也可以直接连接解调主板；或者，One end of the sensor is connected to a first radio frequency coaxial cable adapter, one end of the demodulation main board is connected to the first radio frequency coaxial cable adapter through a coaxial cable; the housing wall of the sensor is directly connected to the demodulation main board, That is, the shell wall can be connected to the demodulation main board through the second radio frequency coaxial cable adapter, or it can be directly connected to the demodulation main board; or,
所述传感器的一端直接连接在解调主板上，即传感器的一端可以通过第一射频同轴电缆转接头连接解调主板，也可以直接连接解调主板；所述传感器的外壳壁连接第二射频同轴电缆转接头，所述第二射 频同轴电缆转接头通过同轴电缆连接所述解调主板；或者，One end of the sensor is directly connected to the demodulation main board, that is, one end of the sensor can be connected to the demodulation main board through the first radio frequency coaxial cable adapter, or can be directly connected to the demodulation main board; the housing wall of the sensor is connected to the second radio frequency A coaxial cable adapter, the second radio frequency coaxial cable adapter is connected to the demodulation main board through a coaxial cable; or,
所述传感器的一端直接连接在解调主板上，即传感器的一端可以通过第一射频同轴电缆转接头连接解调主板，也可以直接连接解调主板；所述传感器的外壳壁上直接连接解调主板，即外壳壁可以通过第二射频同轴电缆转接头连接解调主板，也可以直接连接解调主板。One end of the sensor is directly connected to the demodulation main board, that is, one end of the sensor can be connected to the demodulation main board through the first radio frequency coaxial cable adapter, or it can be directly connected to the demodulation main board; the housing wall of the sensor is directly connected to the demodulation main board. The modulation main board, that is, the shell wall can be connected to the demodulation main board through the second radio frequency coaxial cable adapter, or directly connected to the demodulation main board.
所述腔长测量装置至少具有以下模式：正反馈环路模式、无环路模式；其中，The cavity length measuring device has at least the following modes: positive feedback loop mode and no loop mode; wherein,
所述正反馈环路模式中，所述解调主板包括：定向耦合器、波形放大器、计频器/频谱仪，这些元器件有多种连接方式。例如，所述第一射频同轴电缆转接头与所述定向耦合器连接、所述波形放大器以及所述第二射频同轴电缆转接头依次连接，所述计频器/频谱仪与所述定向耦合器连接；In the positive feedback loop mode, the demodulation main board includes: a directional coupler, a waveform amplifier, and a frequency counter/spectrometer. These components have multiple connection modes. For example, the first radio frequency coaxial cable adapter is connected to the directional coupler, the waveform amplifier and the second radio frequency coaxial cable adapter are connected in sequence, and the frequency counter/spectrometer is connected to the directional coupler. Coupler connection;
在所述无环路模式中，所述解调主板为矢量网络分析仪、或标量微波分析仪、或解调电路板。In the loop-free mode, the demodulation main board is a vector network analyzer, or a scalar microwave analyzer, or a demodulation circuit board.
进一步，所述正反馈环路模式包括：微波正反馈环路、基于光电振荡器的正反馈环路；其中，Further, the positive feedback loop mode includes: a microwave positive feedback loop and a positive feedback loop based on an optoelectronic oscillator; wherein,
在所述微波正反馈环路中，包括：同轴电缆环路、微波定向耦合器、微波放大器或者微波功率分离器、计频器/频谱仪，所述解调主板中的各器件通过同轴电缆环路或带环路的电路板连接；The microwave positive feedback loop includes: a coaxial cable loop, a microwave directional coupler, a microwave amplifier or a microwave power splitter, a frequency counter/spectrometer, and the components in the demodulation main board pass coaxially Cable loop or circuit board connection with loop;
在所述基于光电振荡器的正反馈环路中，包括：高速光电解调器、激光或发光二极管光源、光纤环路、光纤耦合器、微波放大器或者光学放大器、微波定向耦合器或者微波功率分离器、计频器/频谱仪，所述解调主板中的各器件通过光纤环路连接。The positive feedback loop based on the optoelectronic oscillator includes: high-speed optoelectronic demodulator, laser or light emitting diode light source, fiber loop, fiber coupler, microwave amplifier or optical amplifier, microwave directional coupler or microwave power separation Each component in the demodulation main board is connected by an optical fiber loop.
结构上，所述传感器包括外壳和内杆时，所述外壳和所述内杆的第一端均与第一射频同轴电缆转接头连接，所述第一射频同轴电缆转接头通过第一同轴电缆连接到解调主板上；或者所述外壳和所述内杆的第一端均不通过同轴电缆与解调主板连接，即外壳和内杆的第一端可以通过第一射频同轴电缆转接头连接解调主板，也可以直接连接解调主板。所述外壳壁与第二射频同轴电缆转接头连接，所述第二射频同轴电缆转接头通过第二同轴电缆连接到解调主板上；或者所述外壳壁不通过同轴电缆与解调主板连接，即外壳壁可以通过第二射频同轴电缆转接头连接解调主板，也可以直接连接解调主板。所述第一反射点和所述第二反射点至少有一部分设置在所述外壳加内杆的包络范围之内；Structurally, when the sensor includes a housing and an inner rod, the first ends of the housing and the inner rod are both connected to the first radio frequency coaxial cable adapter, and the first radio frequency coaxial cable adapter passes through the first radio frequency coaxial cable adapter. The coaxial cable is connected to the demodulation main board; or the first end of the housing and the inner rod are not connected to the demodulation main board through a coaxial cable, that is, the first end of the housing and the inner rod can be connected to the demodulation main board through the first radio frequency. The shaft cable adapter is connected to the demodulation main board, or it can be directly connected to the demodulation main board. The housing wall is connected to a second radio frequency coaxial cable adapter, and the second radio frequency coaxial cable adapter is connected to the demodulation main board through a second coaxial cable; or the housing wall is not connected to the demodulation board through a coaxial cable. The main board connection is adjusted, that is, the housing wall can be connected to the demodulation main board through the second RF coaxial cable adapter, or directly connected to the demodulation main board. At least a part of the first reflection point and the second reflection point are arranged within the envelope range of the outer shell and the inner rod;
所述传感器只有外壳且没有内杆时，所述外壳的第一端均与第一射频同轴电缆转接头连接，所述第一射频同轴电缆转接头通过第一同轴电缆连接到解调主板上；或者所述外壳的第一端均不通过同轴电缆与解调主板连接，即外壳的第一端可以通过第一射频同轴电缆转接头连接解调主板，也可以直接连接解调主板。所述外壳壁与第二射频同轴电缆转接头连接，所述第二射频同轴电缆转接头通过第二同轴电缆连接到解调主板上；或者所述外壳壁不通过同轴电缆与解调主板连接，即外壳壁可以通过第二射频同轴电缆转接头连接解调主板，也可以直接连接解调主板。所述第一反射点和所述第二反射点至少有一部分设置在所述外壳的包络范围之内。When the sensor has only a housing and no inner rod, the first end of the housing is connected to the first radio frequency coaxial cable adapter, and the first radio frequency coaxial cable adapter is connected to the demodulator through the first coaxial cable. On the motherboard; or the first end of the housing is not connected to the demodulation motherboard through a coaxial cable, that is, the first end of the housing can be connected to the demodulation motherboard through the first RF coaxial cable adapter, or directly connected to the demodulation motherboard Motherboard. The housing wall is connected to a second radio frequency coaxial cable adapter, and the second radio frequency coaxial cable adapter is connected to the demodulation main board through a second coaxial cable; or the housing wall is not connected to the demodulation board through a coaxial cable. The main board connection is adjusted, that is, the housing wall can be connected to the demodulation main board through the second RF coaxial cable adapter, or directly connected to the demodulation main board. At least a part of the first reflection point and the second reflection point are arranged within the envelope range of the housing.
本实施例中，各个核心器件的标号如下：外壳1、内杆2、第一反射点3、第二反射点4、开放式空心同轴电缆-法布里珀罗谐振腔5、导体反射面11、电介质腔12、矢量网络分析仪或标量微波分析仪或解调电路板等解调主板9，其中：In this embodiment, the labels of each core device are as follows: shell 1, inner rod 2, first reflection point 3, second reflection point 4, open hollow coaxial cable-Fabry Perot cavity 5, conductor reflection surface 11. Dielectric cavity 12, vector network analyzer or scalar microwave analyzer or demodulation circuit board, etc. demodulation main board 9, of which:
外壳1是指连接到射频同轴电缆转接头外圈的连续导体，该导体可以是管，可以是半圆管，可以是弹簧，可以是一根杆，也可以是多个导体通过导电的连接件连接而成的组合导体。例如：两个或多个嵌套的导体管，两个或多个通过金属连接件连通的导体管，等等。图4(a)列举了外壳常用的断面图。图6列举了多个零件构成外壳时，不同段外壳之间常用的连接方式。 Shell 1 refers to the continuous conductor connected to the outer ring of the RF coaxial cable adapter. The conductor can be a tube, a semi-circular tube, a spring, a rod, or a connecting piece through which multiple conductors pass through. Combined conductor formed by connection. For example: two or more nested conductor tubes, two or more conductor tubes connected by metal connectors, etc. Figure 4 (a) lists the commonly used cross-sectional views of the shell. Figure 6 lists the commonly used connection methods between different sections of the housing when multiple parts form the housing.
内杆2也是连续导体，与外壳1同样，内杆2也可以是不同几何形状，断面形状可以是圆形、矩形或者半圆形等等，可以是直杆，可以是弹簧等曲线杆，也可以是多个导体连接在一起的连接件。特殊情况下，腔长测量装置可以不用内杆，通过解调主板对信号解调仍然可以测出需要的参数。图4(b)列举了内杆常用的断面图。图6列举了多个零件构成内杆时，不同段内杆之间常用的连接方式。The inner rod 2 is also a continuous conductor. Like the outer shell 1, the inner rod 2 can also have different geometric shapes. The cross-sectional shape can be round, rectangular or semicircular, etc., can be a straight rod, a curved rod such as a spring, or It can be a connector in which multiple conductors are connected together. In special cases, the cavity length measuring device can be used without an inner rod, and the required parameters can still be measured by demodulating the signal through the demodulation main board. Figure 4(b) lists the commonly used cross-sectional views of the inner rod. Figure 6 lists the commonly used connection methods between different sections of the inner rod when multiple parts constitute the inner rod.
第一反射点3指的是在外壳和内杆的包络范围之内的一些物体，可以是各种形状，可以是不同大小，可以是不同材料的导体或绝缘体，也可以是多个零件的组合。只要能起到反射作用即可。如果反射点是连通外壳和内杆的导体，那么这一点的反射率就会很高，如果不是连通外壳和内杆导体，反射率会低一些。优选的，所述第一反射点是一个尺寸小于预设面积的断面，至少可以通过一根或多根圆杆或者方杆垂直于传感器内杆的轴线方向放置，或者在外壳和内杆之间固定一个有一定透射率的多孔结构，所述第一反射点覆盖所述外壳和所述内杆之间区域的面积小于所述外壳和所述内杆之间包络面积；所述第一反射点对所述外壳和所述内杆构成短路，或者所述外壳和所述内杆之间连接件的电阻大于等于预设阈值。也可以通过改变所述内杆断面形状和尺寸来调节反射率，可去掉在所述外壳和所述内杆之间添加的第一反射点，将射频同轴电缆转接头与所述外壳和所述内杆连接处作为第一反射点；其中，将射频同轴电缆转接头与所述外壳和所述内杆连接处作为第一反射点时，所述内杆直径与所述外壳内径比值介于0到1之间。The first reflection point 3 refers to some objects within the envelope of the outer shell and the inner rod, which can be of various shapes, different sizes, conductors or insulators of different materials, or multiple parts. combination. As long as it can play a reflective role. If the reflection point is a conductor connecting the shell and the inner rod, then the reflectivity of this point will be high, if it is not connecting the shell and the inner rod conductor, the reflectivity will be lower. Preferably, the first reflection point is a cross-section with a size smaller than a preset area, and at least can be placed perpendicular to the axis of the sensor inner rod through one or more round rods or square rods, or between the housing and the inner rod A porous structure with a certain transmittance is fixed, and the area of the first reflection point covering the area between the outer shell and the inner rod is smaller than the envelope area between the outer shell and the inner rod; the first reflection The point forms a short circuit between the shell and the inner rod, or the resistance of the connecting piece between the shell and the inner rod is greater than or equal to a preset threshold. The reflectivity can also be adjusted by changing the cross-sectional shape and size of the inner rod. The first reflection point added between the housing and the inner rod can be removed, and the RF coaxial cable adapter can be connected to the housing and the The connection of the inner rod is used as the first reflection point; wherein, when the connection between the radio frequency coaxial cable adapter and the housing and the inner rod is used as the first reflection point, the ratio of the diameter of the inner rod to the inner diameter of the housing is intermediate Between 0 and 1.
图5列举了反射点常用的断面图，图中阴影部分为反射点。第一反射点为固定点。Figure 5 lists commonly used cross-sectional views of reflection points, and the shaded parts in the figure are reflection points. The first reflection point is a fixed point.
所述第二反射点4是外壳端面，或内杆端面，或外壳和内杆导体区域的端面，当外壳或内杆端面断 面在一个平面上且该端面距离导体反射面有一定距离，或者外壳或内杆有一个与导体反射面之间短路连接且另一个元件的端面距离导体反射面有一定距离，此时的第二反射点4为外壳或内杆与导体反射面有一定距离的元件的端面平面；当外壳或内杆端面断面不在一个平面上且外壳和内杆均不和导体反射面短路连接，此时的第二反射点4为外壳和内杆端面平面之间的一个点。第二反射点为固定点。The second reflection point 4 is the end face of the shell, or the end face of the inner rod, or the end face of the conductor area of the shell and the inner rod, when the end face of the shell or the inner rod is on a plane and the end face is at a certain distance from the conductor reflection surface, or the shell Or the inner rod has a short-circuit connection with the reflective surface of the conductor, and the end surface of the other element is at a certain distance from the reflective surface of the conductor. At this time, the second reflection point 4 is the element with a certain distance between the shell or the inner rod and the reflective surface of the conductor. End surface plane; when the shell or inner rod end face section is not on the same plane and neither the shell nor the inner rod is short-circuited with the conductor reflection surface, the second reflection point 4 at this time is a point between the shell and the inner rod end face plane. The second reflection point is a fixed point.
开放式空心同轴电缆-法布里珀罗谐振腔5指的是第一反射点和第二反射点之间，同时在外壳和内杆之间的谐振腔，一般谐振腔内的介质为真空、气体、液体或者固体。Open hollow coaxial cable-Fabry Perot cavity 5 refers to the cavity between the first reflection point and the second reflection point, and between the shell and the inner rod. Generally, the medium in the cavity is vacuum , Gas, liquid or solid.
导体反射面11指的是与外壳或内杆端面保持一定距离，要确保外壳和内杆的包络面沿着轴线方向扫掠出的柱体，与导体反射面所在区域有一定的交集。外壳1和内杆2中，至少有一个与导体反射面11之间不发生短路。导体反射面11可以是单个导体，该导体可以带孔，可以是各种形状；也可以是多个不连接的导体或多个使用绝缘体连接的导体。The conductor reflection surface 11 refers to a cylinder that is kept at a certain distance from the shell or the end surface of the inner rod. It is necessary to ensure that the envelope surface of the shell and the inner rod is swept along the axial direction and has a certain intersection with the area where the conductor reflection surface is located. At least one of the outer shell 1 and the inner rod 2 does not have a short circuit with the conductor reflection surface 11. The conductor reflective surface 11 may be a single conductor, which may be perforated, and may be of various shapes; it may also be a plurality of unconnected conductors or a plurality of conductors connected by insulators.
电介质腔12即为介电层，是在第二反射点4与导体反射面11之间的区域，可以填充绝缘的气体、液体或固体。通过测量开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长，可以确定电介质腔的腔长及其变化量。The dielectric cavity 12 is the dielectric layer, which is the area between the second reflection point 4 and the conductor reflection surface 11, which can be filled with insulating gas, liquid or solid. By measuring the resonant frequency/cavity length of the open hollow coaxial cable-Fabry Perot cavity, the cavity length of the dielectric cavity and its variation can be determined.
矢量网络分析仪或标量微波分析仪或解调电路板9是测量开放式空心同轴电缆-法布里珀罗谐振腔的反射振幅谱或透射振幅谱的装置。The vector network analyzer or scalar microwave analyzer or demodulation circuit board 9 is a device for measuring the reflection amplitude spectrum or the transmission amplitude spectrum of the open hollow coaxial cable-Fabry Perot cavity.
图1示意出了本申请实施例提供的传感器中的核心元件，包括外壳1、内杆2、第一反射点3、第二反射点4、导体反射面11、电介质腔12和开放式空心同轴电缆-法布里珀罗谐振腔5。其中，所述第一反射点3设置在所述开放式空心同轴电缆-法布里珀罗谐振腔内部的第一位置处，所述第二反射点4设置在所述开放式空心同轴电缆-法布里珀罗谐振腔内部的第二位置处，所述导体反射面11在所述开放式空心同轴电缆-法布里珀罗谐振腔内部的第三位置处，所述第一反射点3和第二反射点4固定不动，所述导体反射面11能够发生移动，使得电介质腔的腔长发生变化，从而影响开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长。Figure 1 illustrates the core elements of the sensor provided by the embodiments of the present application, including a housing 1, an inner rod 2, a first reflection point 3, a second reflection point 4, a conductor reflection surface 11, a dielectric cavity 12, and an open hollow concentric Shaft cable-Fabry Perot cavity 5. Wherein, the first reflection point 3 is arranged at a first position inside the open hollow coaxial cable-Fabry Perot cavity, and the second reflection point 4 is arranged on the open hollow coaxial cable. At the second position inside the cable-Fabry-Perot cavity, the conductor reflection surface 11 is at the third position inside the open hollow coaxial cable-Fabry-Perot cavity, and the first The reflection point 3 and the second reflection point 4 are fixed, the conductor reflection surface 11 can move, so that the cavity length of the dielectric cavity changes, thereby affecting the resonance of the open hollow coaxial cable-Fabry Perot cavity Frequency / cavity length.
图2(a)为外壳1和内杆2分别与导体反射面11之间用绝缘体或电阻率较大的导体连通的工况；此时外壳内杆的导体区域与导体反射面11之间可以填充绝缘或导电的固体、液体或气体。13表示电介质。Figure 2 (a) shows the case where the shell 1 and the inner rod 2 are respectively connected to the reflective surface 11 of the conductor with an insulator or a conductor with larger resistivity; at this time, the conductive area of the rod in the shell and the reflective surface 11 can be Fill with insulating or conductive solid, liquid or gas. 13 represents dielectric.
图2(b)为外壳1与导体反射面11之间有导体连通且内杆2和导体反射面11之间用绝缘体或电阻率电阻率大于等于预设阈值的导体连通的工况；此时内杆的导体区域与导体反射面11之间可以填充固体、液体或气体。13表示绝缘体或电阻率电阻率大于等于预设阈值的导体。Figure 2(b) shows a working condition where there is a conductor connection between the housing 1 and the conductor reflecting surface 11 and the inner rod 2 and the conductor reflecting surface 11 are connected by an insulator or a conductor with a resistivity greater than or equal to a preset threshold; Solid, liquid or gas can be filled between the conductor area of the inner rod and the conductor reflection surface 11. 13 indicates an insulator or a conductor whose resistivity is greater than or equal to a preset threshold.
图2(c)为内杆2与导体反射面11之间有导体连通且外壳1和导体反射面11之间用绝缘体或电阻率电阻率大于等于预设阈值的导体连通的工况；此时外壳的导体区域与导体反射面11之间可以填充绝缘的固体、液体或气体。13表示绝缘体或电阻率电阻率大于等于预设阈值的导体。Figure 2(c) shows the working condition where there is a conductor connection between the inner rod 2 and the conductor reflecting surface 11, and the shell 1 and the conductor reflecting surface 11 are connected by an insulator or a conductor with a resistivity greater than or equal to a preset threshold; An insulating solid, liquid or gas can be filled between the conductor area of the shell and the conductor reflection surface 11. 13 indicates an insulator or a conductor whose resistivity is greater than or equal to a preset threshold.
图3(a)为微波原理测量电介质腔的腔长时，开放式空心同轴电缆-法布里珀罗谐振腔的反射或透射振幅谱图。这里重点研究一阶谐振频率，即低频对应的峰，也可以研究二阶、三阶等谐振频率。Figure 3(a) shows the reflection or transmission amplitude spectrum of the open hollow coaxial cable-Fabry Perot cavity when the cavity length of the dielectric cavity is measured by the microwave principle. The focus here is on the first-order resonance frequency, that is, the peak corresponding to the low frequency, and the second-order and third-order resonance frequencies can also be studied.
图3(b)为一阶谐振频率f与电介质腔腔长d(介电层厚度)之间的关系(即金属板与同轴电缆开口端之间的距离)曲线图。可见，电介质腔的腔长越小，谐振频率变化的越快，传感器越灵敏。Figure 3(b) is a graph showing the relationship between the first-order resonance frequency f and the dielectric cavity length d (dielectric layer thickness) (that is, the distance between the metal plate and the open end of the coaxial cable). It can be seen that the smaller the cavity length of the dielectric cavity, the faster the resonance frequency changes, and the more sensitive the sensor.
图4(a)表示常用的外壳1的断面图，可以是圆环、方框或者各种不规则形状，外壳甚至可以是弹簧或者一个圆杆。也可以分成多个导体连接在一起的组合，只要满足连续导体即可。Fig. 4(a) shows a cross-sectional view of a commonly used housing 1, which can be a ring, a box or various irregular shapes, and the housing can even be a spring or a round rod. It can also be divided into a combination of multiple conductors connected together, as long as the continuous conductor is satisfied.
图4(b)表示常用内杆2或导体反射面11的断面图，内杆可以是空心的，也可以实心的，断面可以是多种样式，常用的断面有圆形、矩形和正多边形。内杆2可以是弹簧等空间曲线结构。内杆2也可以分成多个导体连接在一起的组合，只要满足连续导体即可。导体反射面的尺寸通常大于等于外壳的尺寸，外壳包络区域在导体反射面上的投影通常在导体反射面的区域内。Figure 4(b) shows a cross-sectional view of the commonly used inner rod 2 or the reflective surface 11 of the conductor. The inner rod can be hollow or solid. The cross-section can be in various styles. The commonly used cross-sections are round, rectangular and regular polygon. The inner rod 2 may be a spring or other space curve structure. The inner rod 2 can also be divided into a combination of multiple conductors connected together, as long as the continuous conductor is satisfied. The size of the reflective surface of the conductor is usually greater than or equal to the size of the housing, and the projection of the envelope area of the housing on the reflective surface of the conductor is usually in the area of the reflective surface of the conductor.
图5是常用的反射点3的断面图，可以是各种形状。反射点可以是导体，也可以是绝缘体，只要有一分部在外壳1和内杆2的包络范围内即可；反射点可以与外壳和/或内杆接触，也可以不接触。以常用的外壳1是圆筒和内杆是圆杆的情况为例，反射点可以是填充在外壳1和内杆2之间的圆筒体或圆环体，也可以是一个遮盖部分外壳1和内杆2之间空腔的物体，比如图6中的第3、4和5幅图所示的一个小圆杆或者多孔圆片等等。Figure 5 is a cross-sectional view of a commonly used reflection point 3, which can be of various shapes. The reflection point can be a conductor or an insulator, as long as a part is within the envelope of the housing 1 and the inner rod 2; the reflection point may be in contact with the housing and/or the inner rod or not. Taking the case where the shell 1 is a cylinder and the inner rod is a round rod as an example, the reflection point can be a cylinder or a circular ring filled between the shell 1 and the inner rod 2, or it can be a cover part of the shell 1. Objects in the cavity between the inner rod 2 and the inner rod 2, such as a small round rod or a porous disc as shown in the 3rd, 4th and 5th pictures in Fig. 6.
图6是外壳1或内杆2分段连接以后，外壳与外壳连接，或者内杆与内杆连接处的示意图。图7中画出了常用的是连接方式，包括搭接、错位、嵌套、或者用转轴连接，以及用导体波纹管连接，总之当分段的外壳1或内杆2的不同段之间发生相对移动或转动时，满足外壳1或内杆2的导电连续性即可。Fig. 6 is a schematic diagram of the connection between the housing and the housing or the connection between the inner rod and the inner rod after the housing 1 or the inner rod 2 is connected in sections. Figure 7 shows the commonly used connection methods, including overlapping, dislocation, nesting, or connecting with a rotating shaft, and connecting with a conductor bellows. In short, when the different sections of the segmented shell 1 or inner rod 2 occur During relative movement or rotation, the conductivity continuity of the housing 1 or the inner rod 2 can be satisfied.
图7(a)至图7(c)为本申请实施例的反射式电介质腔的腔长测量装置的结构示意图。解调主板9可以是矢量网络分析仪或标量微波分析仪或解调电路板等元器件。7(a) to 7(c) are schematic structural diagrams of a cavity length measuring device for a reflective dielectric cavity according to an embodiment of the application. The demodulation main board 9 can be a vector network analyzer, a scalar microwave analyzer, or a demodulation circuit board.
图7(a)为带有同轴电缆和解调主板的电介质腔的腔长测量装置的结构示意图。所述腔长测量装置中的传感器包括开放式空心同轴电缆-法布里珀罗谐振腔(简称谐振腔)5、第一反射点3、第二反射点4，电介质腔12，导体反射面11。其中，所述第一反射点3设置在所述开放式空心同轴电缆-法布里珀罗谐振 腔内部的第一位置处，所述第二反射点4设置在所述开放式空心同轴电缆-法布里珀罗谐振腔内部的第二位置处，所述导体反射面11在所述开放式空心同轴电缆-法布里珀罗谐振腔内部的第三位置处，所述第一反射点3和第二反射点4固定不动且两个反射点之间不发生相对移动，所述导体反射面11能够相对第二反射点4发生移动；所述第一反射点3和所述第二反射点4的反射率大于等于预设阈值。所述解调主板9与所述传感器相连，用于对所述传感器内的微波信号进行分析，得到所述传感器的腔长，其中，所述传感器的腔长为所述第一反射点3与所述第二反射点4之间的距离，且该距离受到第二反射点4和导体反射面11之间距离变化的影响。当第一反射点3和第二反射点4之间距离不变且第二反射点4和导体反射面11之间距离发生变化时，谐振频率/谐振腔腔长会发生变化，一阶谐振频率电介质腔的腔长(介电层的厚度)之间的关系(即第二反射点到导体反射面之间的距离)如图3(b)所示，从而确定第二反射点4和导体反射面11之间的距离。Fig. 7(a) is a schematic structural diagram of a cavity length measuring device with a dielectric cavity with a coaxial cable and a demodulation main board. The sensor in the cavity length measuring device includes an open hollow coaxial cable-Fabry Perot cavity (referred to as the cavity) 5, a first reflection point 3, a second reflection point 4, a dielectric cavity 12, and a conductor reflection surface 11. Wherein, the first reflection point 3 is arranged at a first position inside the open hollow coaxial cable-Fabry Perot cavity, and the second reflection point 4 is arranged on the open hollow coaxial cable. At the second position inside the cable-Fabry-Perot cavity, the conductor reflection surface 11 is at the third position inside the open hollow coaxial cable-Fabry-Perot cavity, and the first The reflection point 3 and the second reflection point 4 are fixed and there is no relative movement between the two reflection points. The conductor reflection surface 11 can move relative to the second reflection point 4; the first reflection point 3 and the The reflectivity of the second reflection point 4 is greater than or equal to a preset threshold. The demodulation main board 9 is connected to the sensor, and is used to analyze the microwave signal in the sensor to obtain the cavity length of the sensor, where the cavity length of the sensor is equal to the first reflection point 3 and The distance between the second reflection point 4 and the distance is affected by the change of the distance between the second reflection point 4 and the conductor reflection surface 11. When the distance between the first reflection point 3 and the second reflection point 4 is constant and the distance between the second reflection point 4 and the conductor reflection surface 11 changes, the resonance frequency/cavity length will change, and the first-order resonance frequency The relationship between the cavity length (the thickness of the dielectric layer) of the dielectric cavity (that is, the distance between the second reflection point and the reflective surface of the conductor) is shown in Figure 3(b) to determine the second reflection point 4 and the conductor reflection The distance between faces 11.
图7(b)为本申请实施例的反射式带有解调主板且解调主板直接连接传感器的电介质腔的腔长测量装置的结构示意图。直接将解调主板9放在传感器的端面，解调主板与传感器之间无需同轴电缆连接，即传感器可以通过第一射频同轴电缆转接头连接解调主板，也可以直接连接解调主板。使用解调电路9即可得到谐振频率/谐振腔腔长，通过接线端子14可以连接其他设备对数据进行传输。FIG. 7(b) is a schematic structural diagram of a reflective cavity length measuring device with a demodulation main board and the demodulation main board is directly connected to the dielectric cavity of the sensor according to an embodiment of the application. The demodulation main board 9 is directly placed on the end face of the sensor, and there is no need for a coaxial cable connection between the demodulation main board and the sensor, that is, the sensor can be connected to the demodulation main board through the first RF coaxial cable adapter, or directly connected to the demodulation main board. The demodulation circuit 9 can be used to obtain the resonance frequency/cavity length, and other devices can be connected to transmit data through the connection terminal 14.
图7(c)为本申请实施例的解调主板直接连接在传感器外壳壁上的电介质腔的腔长测量装置的结构示意图。传感器的一端是外壳1和内杆2端面的密封装置17，密封装置17可以是导体，可以是绝缘体，可以是闭合或者非闭合结构，也可以是作为端面的同轴线缆转接头。传感器的另一端是第二反射点4、电介质腔12和导体反射面11。直接将解调主板9连接在外壳壁上，关于连接方法，可以通过一个同轴射频转接头16连接解调主板9和外壳壁，同轴射频转接头16的端面是插入到外壳内部的，转接头的在外壳内的端面可以连接一个导体延长杆，以便增加插入外壳内部的导体长度；也可以将传感器的外壳壁直接连接解调主板。解调主板9与传感器之间无需同轴电缆8连接，使用解调主板9即可得到谐振频率/谐振腔腔长。Fig. 7(c) is a schematic structural diagram of a cavity length measuring device in which the demodulation main board is directly connected to the wall of the sensor housing according to an embodiment of the application. One end of the sensor is a sealing device 17 on the end faces of the housing 1 and the inner rod 2. The sealing device 17 can be a conductor, an insulator, a closed or non-closed structure, or a coaxial cable adapter as an end face. The other end of the sensor is the second reflection point 4, the dielectric cavity 12 and the conductor reflection surface 11. Directly connect the demodulation motherboard 9 to the shell wall. Regarding the connection method, you can connect the demodulation motherboard 9 and the shell wall through a coaxial RF adapter 16. The end surface of the coaxial RF adapter 16 is inserted into the shell. The end surface of the connector in the housing can be connected to a conductor extension rod to increase the length of the conductor inserted into the housing; the housing wall of the sensor can also be directly connected to the demodulation main board. There is no need to connect the coaxial cable 8 between the demodulation main board 9 and the sensor, and the resonant frequency/resonant cavity length can be obtained by using the demodulation main board 9.
图8(a)至图8(d)是基于透射或正反馈环路的电介质腔的腔长测量装置的结构示意图。基于透射或正反馈环路的电介质腔的腔长测量装置中，腔长测量装置中的传感器包括开放式空心同轴电缆-法布里珀罗谐振腔(简称谐振腔)、第一反射点3、第二反射点4，电介质腔12，导体反射面11，传感器部分和反射式的结构相同，区别在于解调部分的连接方式不同。具体的，射频同轴电缆转接头6在外壳1和内杆2的左端与外壳1和内杆2连接，另一个射频同轴电缆转接头16接到外壳的壁上，而非在右端面。当没有内杆2时，指的就是射频同轴电缆转接头6在外壳1的左端与外壳1连接，另一个射频同轴电缆转接头16接到外壳的壁上，而非在右端面。当有两个反射点3和4时，测量的是两个反射点之间的谐振腔的腔长，该谐振腔的腔长受到第二反射点4和导体反射面11之间距离的影响，即受到电介质腔腔长的影响。当只有一个反射点4时，测量的是环路周长。Fig. 8(a) to Fig. 8(d) are structural schematic diagrams of a cavity length measuring device of a dielectric cavity based on a transmission or a positive feedback loop. In the cavity length measurement device of the dielectric cavity based on the transmission or positive feedback loop, the sensor in the cavity length measurement device includes an open hollow coaxial cable-Fabry Perot cavity (referred to as the cavity), the first reflection point 3 The second reflection point 4, the dielectric cavity 12, the conductor reflection surface 11, the sensor part and the reflection type have the same structure, and the difference lies in the connection mode of the demodulation part. Specifically, the radio frequency coaxial cable adapter 6 is connected to the housing 1 and the inner rod 2 at the left ends of the housing 1 and the inner rod 2, and the other radio frequency coaxial cable adapter 16 is connected to the wall of the housing instead of on the right end surface. When there is no inner rod 2, it means that the radio frequency coaxial cable adapter 6 is connected to the housing 1 at the left end of the housing 1, and the other radio frequency coaxial cable adapter 16 is connected to the wall of the housing instead of on the right end. When there are two reflection points 3 and 4, the measurement is the cavity length of the resonant cavity between the two reflection points. The cavity length of the resonant cavity is affected by the distance between the second reflection point 4 and the conductor reflection surface 11. That is, it is affected by the length of the dielectric cavity. When there is only one reflection point 4, the circumference of the loop is measured.
图8(a)是第一种透射或正反馈环路式电介质腔的腔长测量装置的环路结构示意图，解调主板9通过两根同轴电缆8连接到左端同轴电缆转接头6和外壳壁上的射频同轴电缆转接头16上；图8(b)是第二种透射或正反馈环路式电介质腔的腔长测量装置的环路结构示意图，解调主板9一端连接在外壳外壳壁上连接的射频同轴电缆转接头16上，另一端用同轴电缆8连接到左端同轴电缆转接头6上；图8(c)是第三种透射或正反馈环路式电介质腔的腔长测量装置的环路结构示意图，解调主板9一端连接在外壳1和内杆2的端面，另一端通过同轴电缆8连接到外壳壁上同轴电缆转接头16上；图8(d)是第四种透射或正反馈环路式电介质腔的腔长测量装置的环路结构示意图，解调主板9一端连接在外壳1和内杆2的端面，另一端连接在外壳外壳壁上连接的射频同轴电缆转接头16上。从功能上来说，图8(a)至图8(d)所示的四种结构的功能完全相同。其中，解调主板9连接传感器端部或外壳壁时，可以通过射频同轴电缆转接头连接，也可以直接连接。Figure 8(a) is a schematic diagram of the loop structure of the first transmission or positive feedback loop type dielectric cavity cavity length measurement device. The demodulation main board 9 is connected to the left end coaxial cable adapter 6 and the left end through two coaxial cables 8 On the RF coaxial cable adapter 16 on the shell wall; Figure 8(b) is a schematic diagram of the loop structure of the second transmission or positive feedback loop type dielectric cavity cavity length measuring device. One end of the demodulation main board 9 is connected to the shell The RF coaxial cable adapter 16 is connected to the wall of the housing, and the other end is connected to the left coaxial cable adapter 6 with a coaxial cable 8; Figure 8(c) is the third transmission or positive feedback loop dielectric cavity Schematic diagram of the loop structure of the cavity length measuring device, one end of the demodulation main board 9 is connected to the end faces of the housing 1 and the inner rod 2, and the other end is connected to the coaxial cable adapter 16 on the housing wall through a coaxial cable 8; Figure 8( d) is a schematic diagram of the loop structure of the fourth transmission or positive feedback loop type dielectric cavity cavity length measurement device. One end of the demodulation main board 9 is connected to the end faces of the housing 1 and the inner rod 2, and the other end is connected to the housing wall Connect the radio frequency coaxial cable to the adapter 16. In terms of function, the functions of the four structures shown in Fig. 8(a) to Fig. 8(d) are completely the same. Wherein, when the demodulation main board 9 is connected to the end of the sensor or the housing wall, it can be connected via a radio frequency coaxial cable adapter or directly.
本申请随后介绍的各种传感器的反射式、透射式或正反馈环路式的解调原理均使用解调装置100来代替，重点强调机械结构的设计。The reflective, transmissive or positive feedback loop demodulation principles of various sensors described later in this application are all replaced by the demodulation device 100, with emphasis on the design of the mechanical structure.
图9(a)为本申请实施例的外壳和内杆端面是同一断面工况的结构示意图。内杆2和导体反射面11不接触。此时，无论外壳1和导体反射面11之间是填充导体还是绝缘体，第二反射点4均为内杆2的端面。反之，如果外壳1和导体反射面11不接触。此时，无论内杆2和导体反射面11之间是填充导体还是绝缘体，第二反射点4均为外壳1的端面。Fig. 9(a) is a schematic structural diagram of the case and the end face of the inner rod in the embodiment of the application in the same section. The inner rod 2 and the conductor reflection surface 11 are not in contact. At this time, regardless of whether the space between the shell 1 and the conductor reflection surface 11 is filled with a conductor or an insulator, the second reflection point 4 is the end surface of the inner rod 2. On the contrary, if the housing 1 and the conductor reflection surface 11 are not in contact. At this time, regardless of whether the space between the inner rod 2 and the conductor reflection surface 11 is filled with a conductor or an insulator, the second reflection point 4 is the end surface of the housing 1.
图9(b)为本申请实施例的外壳和1内杆2的导体区域端面是不同断面工况的结构示意图，此时外壳1和内杆2和导体反射面11之间均不接触或由绝缘体连接，或先连接绝缘体，再连接导体，总之外壳内杆连接端面解调装置100的导体区域不与导体反射面11接触。当外壳1和内杆2端面与到导体反射面11之间非接触或使用绝缘体连接时，第二反射点4在外壳1端面和内杆2端面之间。Figure 9(b) is a structural schematic diagram of the shell and the conductor area end surface of the inner rod 2 of the embodiment of the application are different cross-sectional working conditions. At this time, the shell 1 and the inner rod 2 and the conductor reflection surface 11 are not in contact or caused by The insulator is connected, or the insulator is connected first, and then the conductor is connected. In short, the conductor area of the rod connection end face demodulation device 100 in the housing does not contact the conductor reflection surface 11. When the end faces of the shell 1 and the inner rod 2 are in non-contact with the reflective surface 11 of the conductor or are connected using an insulator, the second reflection point 4 is between the end face of the shell 1 and the end face of the inner rod 2.
图9(c)为本申请实施例的外壳1和内杆2端面带有扩径结构的示意图。通过扩径，可以加大导体反射面11的直径，即高灵敏度膜片式压强传感器和声波传感器等基于膜片挠度变化的传感器的结构示意 图。外壳和内杆一端连接解调装置100；外壳的另一端连接有膜片15，连接材料可以是导体，也可以是绝缘体，只要膜片的导体反射面11一侧有导体即可；第一反射点3固定在外壳和内杆端面4与解调装置100之间，第二反射点4为外壳1或内杆2的端面，两个反射点均为固定点；膜片15靠近外壳1和内杆2的第一侧面为导体反射面11；内杆2端面与膜片15的第一侧面无导体连接，有一个较小的距离。所述膜片15的另一面，即第二侧面，是受压的一面，且所述膜片与内杆的端面有一定距离，处于非接触状态，或使用绝缘体填充，所述膜片是导体。原理是当压强发生改变时，第二反射点4到膜片的第一侧面11之间的介质腔的腔长也会发生变化，从而改变谐振腔的谐振频率/谐振腔腔长，通过谐振腔的腔长的变化量确定压强的大小。Fig. 9(c) is a schematic diagram of the outer shell 1 and the inner rod 2 with an enlarged diameter structure on the end faces of the embodiment of the application. By expanding the diameter, the diameter of the reflective surface 11 of the conductor can be increased, that is, a schematic diagram of the structure of sensors based on changes in diaphragm deflection such as high-sensitivity diaphragm pressure sensors and acoustic wave sensors. One end of the housing and the inner rod is connected to the demodulation device 100; the other end of the housing is connected with a diaphragm 15. The connecting material can be a conductor or an insulator, as long as there is a conductor on the side of the conductor reflection surface 11 of the diaphragm; Point 3 is fixed between the housing and inner rod end face 4 and the demodulation device 100. The second reflection point 4 is the end face of the housing 1 or the inner rod 2. Both reflection points are fixed points; the diaphragm 15 is close to the housing 1 and the inner rod. The first side surface of the rod 2 is a conductor reflection surface 11; the end surface of the inner rod 2 is not connected to the first side surface of the diaphragm 15 with a conductor, and there is a small distance. The other side of the diaphragm 15, the second side, is the side under pressure, and the diaphragm is at a certain distance from the end surface of the inner rod, in a non-contact state, or filled with an insulator, the diaphragm is a conductor . The principle is that when the pressure changes, the cavity length of the dielectric cavity between the second reflection point 4 and the first side surface 11 of the diaphragm will also change, thereby changing the resonant frequency/cavity length of the resonant cavity. The amount of change in the cavity length determines the pressure.
图9(d)为本申请实施例的外壳和内杆端面带有扩径结构且电介质腔12的腔内带有介质的示意图；整体结构和图9(c)意义，只是在外壳1内杆2端面与膜片之间的电介质腔12填充有介质，当外壳内杆端面与膜片第一侧面的距离不变时，改变介质的折射率会影响电介质腔的腔长，从而影响谐振腔的谐振频率/谐振腔腔长。所以可以用来制作测量折射率和腐蚀等参数的传感器。Figure 9(d) is a schematic diagram of the housing and the inner rod end face of the embodiment of the application with an enlarged diameter structure and the dielectric cavity 12 with a medium; the overall structure and the meaning of Figure 9(c) are only in the housing 1 2 The dielectric cavity 12 between the end face and the diaphragm is filled with a medium. When the distance between the end face of the rod in the housing and the first side of the diaphragm does not change, changing the refractive index of the medium will affect the cavity length of the dielectric cavity, thereby affecting the resonant cavity Resonance frequency / cavity length. So it can be used to make sensors for measuring refractive index and corrosion parameters.
图9(e)为本申请实施例的内杆、外壳与导体反射片之间连接导体且外壳和导体反射面之间有导体或绝缘体介质的示意图；当外壳和内杆端面是一个断面时，外壳、内杆与导体反射面11均不接触或中间有绝缘体时，第二反射点4均为外壳1的端面。当内杆2和导体反射面11不接触或中间有绝缘体时，无论外壳1和导体反射面11之间是填充导体还是绝缘体，第二反射点4均为内杆2的端面。当外壳1和导体反射面11不接触或中间有绝缘体时，无论内杆2和导体反射面11之间的电介质腔12内填充导体还是绝缘体，第二反射点4均为外壳1的端面。Figure 9(e) is a schematic diagram of the inner rod, the outer shell and the conductor reflector connecting the conductor and the conductor or insulator medium between the outer shell and the reflective surface of the conductor in the embodiment of the application; when the outer shell and the inner rod end face are the same section, When the shell, the inner rod and the conductor reflection surface 11 are not in contact or there is an insulator in between, the second reflection points 4 are all the end surfaces of the shell 1. When the inner rod 2 and the conductor reflection surface 11 are not in contact or there is an insulator in between, regardless of whether the shell 1 and the conductor reflection surface 11 are filled with conductor or insulator, the second reflection point 4 is the end surface of the inner rod 2. When the shell 1 and the conductor reflection surface 11 are not in contact or there is an insulator in between, no matter whether the dielectric cavity 12 between the inner rod 2 and the conductor reflection surface 11 is filled with a conductor or an insulator, the second reflection point 4 is the end surface of the shell 1.
实施二：压强传感器Implementation 2: Pressure sensor
压强传感器包括实施例一所述的电介质腔的腔长测量装置，其中，所述传感器的谐振频率/谐振腔腔长变化量表征所述导体反射面相对于所述第二反射点的位移，即电介质腔的腔长变化量，该腔长的变化量表征压强。The pressure sensor includes the cavity length measuring device of the dielectric cavity according to the first embodiment, wherein the resonant frequency of the sensor/the cavity length change of the resonant cavity represents the displacement of the conductor reflection surface relative to the second reflection point, that is, the dielectric The cavity length change amount of the cavity, and the cavity length change amount represents the pressure.
1)基于膜片的第一种压强传感器1) The first pressure sensor based on diaphragm
如图9(a)和图9(c)所示，基于膜片15挠度变化的第一种压强传感器，外壳1和内杆2的主体是导体，外壳1和内杆2一端连接解调装置100；外壳的另一端连接有膜片15，外壳与膜片中间的连接材料可以是导体，也可以是绝缘体；第一反射点3固定在外壳和内杆端面与解调装置100之间，即第一位置处；第二反射点4为外壳1或内杆2的端面，即第二位置处，第一反射点和第二反射点均为固定点；通常情况下，外壳内杆的导体区域的端面平面在同一平面上，该平面为第二反射点，外壳1的端面和导体反射面11之间有绝缘材料作为支撑；或者外壳1的导体区域直接和导体反射面11之间连接且内杆2的端面平面到导体反射面11之间有一定的距离，即外壳1比内杆2长，此时第二反射点4为内杆2的端面平面，总之，膜片的外圈是固定到外壳端面的，膜片中间区域不接触内杆，受压后挠度可以发生变化。膜片15靠近外壳和内杆的第一侧面为导体反射面11，即第三位置处；内杆端面4与膜片的第一侧面(导体反射面)不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接，常用不接触的结构，即内杆端面4与膜片的第一侧面(导体反射面)之间有一个较小的距离，内杆2端面与导体反射面11之间的空间为电介质腔12。图中所述膜片的第一侧面，即左面，作为导体反射面11；第二侧面，即右面，则是受压的一面。外壳内杆的轴线垂直于导体反射面11，内杆2的端面平行于导体反射面11且和导体反射面之间有一定的距离。原理是当压强发生改变时，膜片挠度发生变化，第二反射点4到膜片的第一侧面11之间的距离也会发生变化，即电介质腔的腔长发生变化，从而改变谐振频率/谐振腔腔长，通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长变化量确定电介质腔的腔长变化量，从而确定压强的大小。膜片15变形后，第一侧面/导体反射面11通常由平面变成曲面，所以改变的挠度也受到膜片各个点挠度的综合影响，介于最小挠度和最大挠度之间。As shown in Figure 9(a) and Figure 9(c), the first type of pressure sensor based on the change in the deflection of the diaphragm 15, the main body of the housing 1 and the inner rod 2 are conductors, and one end of the housing 1 and the inner rod 2 is connected to a demodulation device 100; The other end of the housing is connected to a diaphragm 15, and the connecting material between the housing and the diaphragm can be a conductor or an insulator; the first reflection point 3 is fixed between the housing and the end face of the inner rod and the demodulation device 100, namely At the first position; the second reflection point 4 is the end surface of the housing 1 or the inner rod 2, that is, at the second position, the first reflection point and the second reflection point are both fixed points; under normal circumstances, the conductor area of the rod in the housing The end face plane of the shell 1 is on the same plane, which is the second reflection point, and the end face of the housing 1 and the conductor reflective surface 11 are supported by insulating materials; or the conductor area of the housing 1 is directly connected to the conductor reflective surface 11 and is internal There is a certain distance between the end plane of the rod 2 and the reflective surface 11 of the conductor, that is, the outer shell 1 is longer than the inner rod 2. At this time, the second reflection point 4 is the end plane of the inner rod 2. In short, the outer ring of the diaphragm is fixed to At the end of the shell, the middle area of the diaphragm does not touch the inner rod, and the deflection can change after being compressed. The first side of the diaphragm 15 close to the housing and the inner rod is the conductor reflection surface 11, that is, at the third position; the inner rod end surface 4 does not contact the first side of the diaphragm (conductor reflection surface), or is connected with an insulator, or used Conductor connection with resistivity greater than or equal to a preset threshold is usually a non-contact structure, that is, there is a small distance between the inner rod end surface 4 and the first side surface (conductor reflection surface) of the diaphragm, and the inner rod 2 end surface reflects the conductor The space between the faces 11 is the dielectric cavity 12. The first side of the diaphragm in the figure, that is, the left side, serves as the conductor reflection surface 11; the second side, that is, the right side, is the side under pressure. The axis of the rod in the shell is perpendicular to the conductor reflection surface 11, and the end surface of the inner rod 2 is parallel to the conductor reflection surface 11 and has a certain distance from the conductor reflection surface. The principle is that when the pressure changes, the deflection of the diaphragm changes, and the distance between the second reflection point 4 and the first side surface 11 of the diaphragm also changes, that is, the cavity length of the dielectric cavity changes, thereby changing the resonance frequency/ The cavity length of the resonant cavity is determined by the resonant frequency/cavity length change of the open hollow coaxial cable-Fabry-Perot resonant cavity to determine the cavity length change of the dielectric cavity, thereby determining the pressure. After the diaphragm 15 is deformed, the first side/conductor reflecting surface 11 usually changes from a flat surface to a curved surface. Therefore, the changed deflection is also affected by the comprehensive influence of the deflection of each point of the diaphragm, which is between the minimum deflection and the maximum deflection.
基于膜片15位移和挠度的传感器，当膜片厚度较大时，外壳和内杆的端面平面在同一个平面上，该平面即为第二反射点4。在外壳1和膜片15的连接处有一个刚度较小的弹性垫圈13，通过压力压缩弹性垫圈13，再加上膜片15本身的挠度变化，共同改变膜片15到内杆4端面的距离，从而改变开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长。Based on the displacement and deflection of the diaphragm 15, when the thickness of the diaphragm is large, the end surfaces of the housing and the inner rod are on the same plane, which is the second reflection point 4. There is an elastic washer 13 with less rigidity at the junction of the outer shell 1 and the diaphragm 15. The elastic washer 13 is compressed by pressure, and the deflection of the diaphragm 15 itself is changed to jointly change the distance between the diaphragm 15 and the end surface of the inner rod 4 , Thereby changing the resonant frequency/cavity length of the open hollow coaxial cable-Fabry Perot cavity.
为了增大压强传感器的灵敏度，可以采用以下几种方法，一是减少膜片15的第一侧面/导体反射面11与第二反射点4之间的初始距离，即减少电介质腔12的初始长度；二是改变膜片厚度，减小膜片厚度可以增加灵敏度，增加膜片厚度可以减小灵敏度；三是增大膜片直径，加大外壳1端面处的内径和外径，在扩径结构的端面外圈连接较直径大于等于外壳直径的膜片，膜片的外圈与扩径结构的端面密封连接，如图9(c)所示。In order to increase the sensitivity of the pressure sensor, the following methods can be used. One is to reduce the initial distance between the first side surface of the diaphragm 15/conductor reflection surface 11 and the second reflection point 4, that is, to reduce the initial length of the dielectric cavity 12 ; The second is to change the thickness of the diaphragm, reducing the thickness of the diaphragm can increase the sensitivity, and increasing the thickness of the diaphragm can reduce the sensitivity; the third is to increase the diameter of the diaphragm, increase the inner diameter and outer diameter of the end surface of the housing 1, in the expanded diameter structure The outer ring of the end face is connected to a diaphragm with a diameter greater than or equal to the diameter of the housing, and the outer ring of the diaphragm is sealed to the end face of the expanded diameter structure, as shown in Figure 9(c).
2)基于波登管的第二种压强传感器2) The second pressure sensor based on Bourdon tube
如图10(a)和(b)所示，基于波登管挠度变化带动导体反射面发生移动的第二种压强传感器，带 有电介质腔的传感器的外壳1和内杆2一端连接解调装置100；外壳1和内杆2的另一端4是切断的端面，外壳1和内杆2的端面在同一个平面上，该端面为第二反射点，第一反射点和第二反射点均为固定点；第一反射点3固定在外壳和内杆端面(第二反射点)与解调装置之间，第二反射点4为外壳或内杆的端面，两个反射点均为固定点；采用波登管20测量压强，压强作用到加压口23，当压强变化时，波登管20的端面或管上某一点会产生一定的移动量；研究波登管上A点的移动，那么在A点固定连接一个导体反射面11，该导体反射面11的载体15为刚体，导体反射面11的法线平行于压强改变后波登管在A点处的移动方向；导体反射面11与外壳1和内杆2的端面均不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接，并有一个较小的距离，即电介质腔12的腔长；导体反射面11与第二反射点4之间的空间为电介质腔12；导体反射面11的法线平行于外壳1和内杆2的轴线。As shown in Fig. 10(a) and (b), the second type of pressure sensor is based on the change of the deflection of the Bourdon tube to drive the reflective surface of the conductor to move. The housing 1 and the inner rod 2 of the sensor with a dielectric cavity are connected to a demodulation device. 100; The other end 4 of the outer shell 1 and the inner rod 2 is a cut end face, the end faces of the outer shell 1 and the inner rod 2 are on the same plane, the end face is the second reflection point, the first reflection point and the second reflection point are both Fixed point; the first reflection point 3 is fixed between the shell and the end face of the inner rod (second reflection point) and the demodulation device, the second reflection point 4 is the end face of the shell or the inner rod, and both reflection points are fixed points; The Bourdon tube 20 is used to measure the pressure, and the pressure acts on the pressure port 23. When the pressure changes, the end face of the Bourdon tube 20 or a certain point on the tube will produce a certain amount of movement; study the movement of point A on the Bourdon tube, then A conductor reflection surface 11 is fixedly connected to point A. The carrier 15 of the conductor reflection surface 11 is a rigid body. The normal line of the conductor reflection surface 11 is parallel to the moving direction of the Bourdon tube at point A after the pressure changes; the conductor reflection surface 11 and The end surfaces of the outer shell 1 and the inner rod 2 are not in contact, or are connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold, and there is a small distance, that is, the cavity length of the dielectric cavity 12; the reflective surface of the conductor 11 The space between the second reflection point 4 and the second reflection point 4 is the dielectric cavity 12; the normal of the conductor reflection surface 11 is parallel to the axis of the housing 1 and the inner rod 2.
将电介质腔的腔长测量装置和波登管基座21固定到一个刚性物体上，即两者不发生相对移动，也可以将波登管20通过连接件21固定到腔长测量装置的外壳1上，加压口23外露接触外界的液体或气体，其他零件固定到一个密闭的腔体内。由于导体反射面11的法线、外壳和内杆的轴线、以及A点的移动方向均平行，所以当压强发生改变时，波登管上A点会发生移动，带动导体反射面11沿着外壳内杆的轴线方向发生移动，导致导体反射面11到第二反射点4之间的距离发生变化，即电介质腔的腔长发生变化，从而改变从而改变开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长，通过谐振频率/谐振腔腔长的变化量确定电介质腔的腔长变化量，从而确定压强的大小。所述波登管的类型包括C型波登管、或螺旋型波登管、或其他形状的波登管，例如麻花型波登管、或圆形波登管。The cavity length measuring device of the dielectric cavity and the Bourdon tube base 21 are fixed to a rigid object, that is, the two do not move relative to each other, or the Bourdon tube 20 can be fixed to the housing 1 of the cavity length measuring device through the connecting piece 21 On the upper side, the pressurizing port 23 is exposed to the outside liquid or gas, and other parts are fixed in a closed cavity. Since the normal line of the reflective surface 11 of the conductor, the axis of the shell and the inner rod, and the moving direction of point A are all parallel, when the pressure changes, point A on the Bourdon tube will move, driving the reflective surface 11 along the shell The axial direction of the inner rod moves, resulting in a change in the distance between the conductor reflection surface 11 and the second reflection point 4, that is, the cavity length of the dielectric cavity changes, thereby changing and changing the open hollow coaxial cable-Fabriper The resonant frequency/resonant cavity length of the resonant cavity is determined by the change of the resonant frequency/resonant cavity length to determine the cavity length change of the dielectric cavity, thereby determining the pressure. The type of the Bourdon tube includes a C-shaped Bourdon tube, a spiral Bourdon tube, or a Bourdon tube of other shapes, such as a twisted Bourdon tube or a round Bourdon tube.
相比膜片式压强传感器，对于同样量程的压强传感器，施加同样的压强，由于膜片的挠度远小于波登管上某一定的移动量，所以基于波登管的压强传感器可以大大提高传感器的灵敏度和精度。波登管类型包括C型波登管，如图10(a)所示；为了有更高对的灵敏度，波登管也可以使用C型组合波登管、或螺旋型波登管、或麻花型波登管、或圆形波登管等各种形状的波登管。其中螺旋型波登管如图10(b)所示，螺旋线的轴线和外壳内杆的轴向重合。也可以使用其他形状的波登管，只要是弯管或折线管，均可满足利用管的挠度测量压强的要求。Compared with the diaphragm pressure sensor, for the pressure sensor of the same range, the same pressure is applied. Since the deflection of the diaphragm is much smaller than a certain amount of movement on the Bourdon tube, the pressure sensor based on the Bourdon tube can greatly improve the performance of the sensor. Sensitivity and accuracy. Bourdon tube types include C-type Bourdon tube, as shown in Figure 10(a); in order to have a higher sensitivity, Bourdon tube can also use C-type combined Bourdon tube, spiral Bourdon tube, or twist Bourdon tubes of various shapes, such as type Bourdon tubes or round Bourdon tubes. The spiral Bourdon tube is shown in Figure 10(b), and the axis of the spiral is coincident with the axis of the rod in the housing. Bourdon tubes of other shapes can also be used, as long as it is a bent tube or a broken line tube, it can meet the requirements of using the deflection of the tube to measure the pressure.
实施例三：加速度传感器Embodiment three: acceleration sensor
图11为本申请实施例的加速度传感器示意图，外壳1和内杆2一端连接解调装置100；外壳的另一端连接有膜片或梁15等带有一定刚度的结构，可以铰接连接，也可以刚性连接，连接材料13可以是导体，也可以是绝缘体，导体反射面11和外壳1的包络区域在外壳内杆轴线的法向平面上的投影有一定的交集；第一反射点3固定在外壳和内杆端面与解调装置之间，第二反射点4为外壳或内杆的端面平面4，两个反射点均为固定点；膜片或梁15靠近外壳1和内杆2的第一侧面为导体反射面11；内杆2的端面与膜片或梁15的第一侧面之间无导体连接，有一个较小的距离，内杆端面4与膜片第一侧面11之间的区域为电介质腔12。膜片或梁15第二侧面中心处固定有一个质量为m的质量块27，质量块27在轴向加速度为a的情况下，会块对膜片或梁产生力F，F＝ma。使得膜片或梁15的中心点挠度发生变化，从而使得导体反射面11到第二反射点4之间的距离发生变化，即电介质腔12的腔长发生变化，最终使得开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生改变。通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长的变化量可以确定电介质腔的腔长变化量，从而确定加速度的大小。11 is a schematic diagram of an acceleration sensor according to an embodiment of the application. One end of the housing 1 and the inner rod 2 is connected to the demodulation device 100; the other end of the housing is connected with a structure with a certain rigidity such as a diaphragm or a beam 15, which can be hinged or connected For rigid connection, the connecting material 13 can be a conductor or an insulator. The projection of the reflection surface 11 of the conductor and the envelope area of the housing 1 on the normal plane of the rod axis in the housing has a certain intersection; the first reflection point 3 is fixed at Between the shell and inner rod end face and the demodulation device, the second reflection point 4 is the end face plane 4 of the shell or the inner rod, and both reflection points are fixed points; the diaphragm or beam 15 is close to the first part of the shell 1 and the inner rod 2. One side is the conductor reflection surface 11; there is no conductor connection between the end surface of the inner rod 2 and the first side surface of the diaphragm or beam 15, and there is a small distance between the inner rod end surface 4 and the first side surface 11 of the diaphragm. The area is the dielectric cavity 12. A mass 27 with a mass of m is fixed at the center of the second side of the diaphragm or beam 15. When the axial acceleration is a, the mass 27 will generate a force F on the diaphragm or beam, F=ma. The deflection of the center point of the diaphragm or beam 15 is changed, so that the distance between the conductor reflection surface 11 and the second reflection point 4 is changed, that is, the cavity length of the dielectric cavity 12 is changed, and finally the open hollow coaxial cable -The resonant frequency/length of the Fabry-Perot cavity is changed. Through the open hollow coaxial cable-Fabry Perot resonant cavity resonant frequency / resonant cavity cavity length change can determine the dielectric cavity cavity length change, thereby determining the magnitude of the acceleration.
膜片的直径或梁的长度与外壳的外径或外壳端面扩径区域的外径相等，膜片厚度加大，或梁的刚度加大，或质量块的重量减小，都可以降低加速度传感器的灵敏度，适合大量程加速度的测量；膜片通过扩大直径或梁通过增大长度，膜片厚度减小或梁的刚度减小，质量块的重量加大，可以增大加速度传感器的灵敏度，适合小量程加速度的测量。当膜片直径加大时，可以采用外壳端面加上一个喇叭口或扩大直径的导体等扩径结构来实现，膜片的外圈与扩径结构的端面密封连接；当梁的长度增加时，外壳端面要沿着直径方向，向两边分别增加一个悬臂支撑，两个支撑的端面用来作为梁的两个支点，采用连接件13进行连接，两端可以刚性连接，也可以做成两端铰接的简支梁；或者做成悬臂梁，悬臂梁端面固定有质量块，质量块靠近外壳和内杆端面的一侧是导体反射面。The diameter of the diaphragm or the length of the beam is equal to the outer diameter of the shell or the outer diameter of the expanded diameter area of the shell end. The increase in the thickness of the diaphragm, or the rigidity of the beam, or the weight of the mass can reduce the acceleration sensor. The sensitivity is suitable for the measurement of a large range of acceleration; by expanding the diameter of the diaphragm or increasing the length of the beam, the thickness of the diaphragm decreases or the stiffness of the beam decreases, and the weight of the mass block increases, which can increase the sensitivity of the acceleration sensor. Small range acceleration measurement. When the diameter of the diaphragm is increased, it can be realized by adding a bell mouth or an expanded diameter conductor on the end surface of the shell. The outer ring of the diaphragm is connected to the end surface of the expanded diameter structure in a sealed manner; when the length of the beam increases, The end face of the shell should be along the diameter direction, add a cantilever support to both sides respectively. The two support end faces are used as the two fulcrums of the beam, and the connecting piece 13 is used for connection. The two ends can be rigidly connected or can be made into two ends hinged. Or it can be made into a cantilever beam, the end surface of the cantilever beam is fixed with a mass block, and the side of the mass block close to the shell and the end surface of the inner rod is the conductor reflection surface.
实施例四：流速传感器Embodiment 4: Flow rate sensor
这里介绍两种流速传感器，第一种是利用流体在挡板附近产生附加压强，通过采用实施例二中的压强传感器测量附加压强的来测定流速的大小；第二种是利用不同流速产生不同的推力，通过测量力的大小确定流速。Two flow rate sensors are introduced here. The first is to use fluid to generate additional pressure near the baffle. The pressure sensor in the second embodiment is used to measure the additional pressure to determine the flow rate; the second is to use different flow rates to generate different For thrust, the flow rate is determined by measuring the magnitude of the force.
图12(a)和(b)为本申请实施例的第一种基于测量压强的流速传感器，使用实施例二介绍的压强传感器进行改装，利用不同流速产生的压强不同，通过测量压强的大小得到流速。在流体从左到右运动的情况下，在图12(a)所述压强传感器旁边右侧固定挡板31，使流体15冲击到挡板时，在压强传感器的所在位移产生附加压强，利用挡板左边固定的压强传感器的膜片15在不同压强下产生的不同挠度测出 所述挡板左边的附加压强，通过附加压强的大小确定流速。压强传感器可以使用膜片式压强传感器，也可以使用波登管式压强传感器。当压强传感器的轴线与流体15流向有一个夹角时，可以不使用挡板，直接通过测量压强的大小反映流速的大小，如图12(b)所示。压强传感器可以使用实施例二介绍的膜片式压强传感器或波登管式压强传感器。所述流速传感器至少包括板孔流速传感器、或U型管压差流速传感器等不同结构的流速传感器。Figure 12 (a) and (b) are the first flow rate sensor based on measuring pressure according to an embodiment of the application. The pressure sensor introduced in the second embodiment is used for modification, and the pressure generated by different flow rates is different, which is obtained by measuring the pressure Flow rate. When the fluid moves from left to right, fix the baffle 31 on the right side next to the pressure sensor in Figure 12(a), so that when the fluid 15 impacts the baffle, additional pressure is generated at the displacement of the pressure sensor. The different deflection of the diaphragm 15 of the pressure sensor fixed on the left side of the plate under different pressures measures the additional pressure on the left side of the baffle, and the flow rate is determined by the magnitude of the additional pressure. The pressure sensor can use a diaphragm pressure sensor or a Bourdon tube pressure sensor. When there is an angle between the axis of the pressure sensor and the flow direction of the fluid 15, the baffle may not be used, and the flow rate can be directly reflected by measuring the pressure, as shown in Figure 12(b). The pressure sensor can use the diaphragm pressure sensor or the Bourdon tube pressure sensor introduced in the second embodiment. The flow rate sensor includes at least a plate hole flow rate sensor, or a U-shaped pipe differential pressure flow rate sensor and other flow rate sensors with different structures.
图12(c)为本申请实施例的第二种基于测力的流速传感器，第一反射点固定在外壳和内杆端面与解调装置100之间，第二反射点4为外壳或内杆的端面，第一反射点和第二反射点均为固定点；流速不同，则对插入流体中的探杆端面探头38的推力不同，使得探头移动距离发生变化，且探杆上的一点会绕着铰39发生转动，所述铰通过连接零件37固定到传感器的外壳1上，探杆的另一端连接导体反射面11的载体15，所述导体反射面11和内杆端面(第二反射点)4之间不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接，导体反射面11和外壳1之间由弹性材料连接，弹性材料可以是导体，也可以是绝缘体。测量时，第一种原理是：当外壳1和导体反射面11之间连接有弹性介质13时，探头38的移动会带动探杆发生转动，从而带动探杆另一头39发生反向移动，带动导体反射面11的载体15发生移动，导致导体反射面11和外壳1之间的弹性材料13发生拉伸或压缩量，改变了导体反射面11到内杆端面第二反射点4的距离，即改变了电介质腔12的腔长；第二种原理是：13为刚度较大的材料，受力时只有极小的拉伸或压缩量，导体反射面11的载体15是较薄的膜片，流体推动探头38产生的力带动探杆另一头39发生反向移动，通过连接第二反射点载体的带铰零件40挤压膜片的中心点，使膜片15的挠度发生变化，电介质腔的腔长发生变化，最终使得开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生变化。通过测量开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长确定电介质腔的腔长变化量，即膜片的挠度变化量，从而确定流速的大小。这两个原理，均利用流速越大，对探头产生的推力越大，柔性导体材料的拉伸或压缩量也会越大，或膜片中心点挠度越大，电介质腔的腔长变化量也越大；通过测量开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长变化量确定第二反射点4到导体反射面11之间即电介质腔12的腔长，从而确定流速的大小。Figure 12(c) is a second type of force-based flow velocity sensor according to an embodiment of the application. The first reflection point is fixed between the housing and the end face of the inner rod and the demodulation device 100, and the second reflection point 4 is the housing or the inner rod. The first reflection point and the second reflection point are both fixed points; when the flow velocity is different, the thrust of the probe 38 on the end face of the probe inserted in the fluid is different, which causes the probe moving distance to change, and a point on the probe will go around The hinge 39 is rotated, the hinge is fixed to the housing 1 of the sensor through the connecting part 37, the other end of the probe rod is connected to the carrier 15 of the conductor reflection surface 11, the conductor reflection surface 11 and the inner rod end surface (the second reflection point 4) There is no contact between 4, or connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold. The reflective surface 11 of the conductor and the housing 1 are connected by an elastic material. The elastic material can be a conductor or an insulator. When measuring, the first principle is: when an elastic medium 13 is connected between the housing 1 and the reflective surface 11 of the conductor, the movement of the probe 38 will drive the probe rod to rotate, thereby driving the other end 39 of the probe rod to move in the opposite direction and drive The movement of the carrier 15 of the conductor reflection surface 11 causes the elastic material 13 between the conductor reflection surface 11 and the housing 1 to stretch or compress, which changes the distance between the conductor reflection surface 11 and the second reflection point 4 of the inner rod end surface, namely The cavity length of the dielectric cavity 12 is changed; the second principle is: 13 is a material with greater rigidity, and there is only a very small amount of stretching or compression when stressed, and the carrier 15 of the conductor reflection surface 11 is a thinner diaphragm. The force generated by the fluid pushing the probe 38 drives the other end 39 of the probe rod to move in the reverse direction. The hinged part 40 connected to the second reflection point carrier squeezes the center point of the diaphragm, so that the deflection of the diaphragm 15 changes. The cavity length changes, and finally the resonant frequency/cavity length of the open hollow coaxial cable-Fabry Perot cavity changes. By measuring the resonant frequency/cavity length of the open hollow coaxial cable-Fabry-Perot resonant cavity, the cavity length change of the dielectric cavity, that is, the deflection change of the diaphragm, is determined, and the flow velocity is determined. These two principles both use the greater the flow rate, the greater the thrust generated on the probe, the greater the stretch or compression of the flexible conductor material, or the greater the deflection of the center point of the diaphragm, the greater the change in the length of the dielectric cavity. The greater; the cavity length between the second reflection point 4 and the conductor reflection surface 11, that is, the dielectric cavity 12, is determined by measuring the resonant frequency of the open hollow coaxial cable-Fabry-Perot cavity/cavity length change, To determine the size of the flow rate.
实施例五：测力计Example 5: Force gauge
这里介绍两种测力计，利用外壳的刚度和变形，或利用外壳端面梁或膜片的刚度和挠度，可以做出测力计。Here are two kinds of dynamometers, which can be made by using the stiffness and deformation of the shell, or the stiffness and deflection of the beam or diaphragm of the shell.
如图13(a)所示，第一种测力计，利用外壳1端面连接的梁或膜片15的刚度和挠度做出的小量程测力计，整体结构与实施例三中介绍的加速度传感器类似。外壳1和内杆2一端连接解调装置100；外壳1的另一端连接有膜片或梁15等带有一定刚度的结构，连接材料可以是导体，也可以是绝缘体；第一反射点固定在外壳和内杆端面与解调装置100之间，第二反射点为外壳1或内杆2的端面，两个反射点均为固定点，所以第二反射点4到导体反射面11之间的距离变化量等于第一反射点3到导体反射面11之间的距离变化量；膜片或梁15靠近外壳1和内杆2的第一侧面为导体反射面11；内杆2的端面与膜片或梁15的第一侧面11之间的电介质腔12无导体连接，有一个较小的距离。当膜片或梁15的中心点受到作用力F时，膜片或梁15的中心点挠度发生变化，从而使得导体反射面11到内杆端面(第二反射点)4之间的距离发生变化，即电介质腔的腔长发生变化，最终使得开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生改变。通过谐振频率/谐振腔腔长变化量可以确定第二反射点4到导体反射面11之间电介质腔的腔长变化量，从而确定力的大小。As shown in Figure 13(a), the first type of dynamometer is a small-range dynamometer that uses the stiffness and deflection of the beam or diaphragm 15 connected to the end face of the housing 1. The overall structure is the same as the acceleration introduced in the third embodiment. The sensor is similar. One end of the housing 1 and the inner rod 2 is connected to the demodulation device 100; the other end of the housing 1 is connected to a structure with a certain rigidity, such as a diaphragm or a beam 15, and the connection material can be a conductor or an insulator; the first reflection point is fixed at Between the end face of the housing and the inner rod and the demodulation device 100, the second reflection point is the end face of the housing 1 or the inner rod 2. Both reflection points are fixed points, so the distance between the second reflection point 4 and the conductor reflection surface 11 The distance change is equal to the distance change between the first reflection point 3 and the conductor reflection surface 11; the first side of the diaphragm or beam 15 close to the housing 1 and the inner rod 2 is the conductor reflection surface 11; the end surface of the inner rod 2 and the film The dielectric cavity 12 between the first side 11 of the sheet or beam 15 has no conductor connection and has a small distance. When the center point of the diaphragm or beam 15 receives a force F, the deflection of the center point of the diaphragm or beam 15 changes, so that the distance between the conductor reflection surface 11 and the inner rod end surface (second reflection point) 4 changes , That is, the cavity length of the dielectric cavity changes, and finally the resonant frequency/cavity length of the open hollow coaxial cable-Fabry Perot cavity changes. The cavity length variation of the dielectric cavity between the second reflection point 4 and the conductor reflection surface 11 can be determined by the resonant frequency/the cavity length variation, thereby determining the magnitude of the force.
如图13(b)所示，第二种测力计，利用外壳1的刚度和变形做出的大量程测力计。外壳和内杆一端连接解调装置100；外壳的另一端连接一个导体反射面11，导体反射面的载体36可以很厚，近似认为是刚体；第一反射点3固定在外壳和内杆端面与解调装置之间，第二反射点4为内杆2的端面，两个反射点均为固定点，所以第二反射点4到导体反射面11之间的距离变化量等于第一反射点3到导体反射面11之间的距离变化量；导体反射面11与外壳1固定且不和内杆2接触，内杆2的端面距离导体反射面有一定的距离；当导体反射面11的载体36受到拉力或压力时，外壳1会发生拉伸或压缩，外壳材料的弹性为E，材料受拉压区域的净面积为A，从第一反射点3到导体反射面11之间的距离为L，受力后谐振频率发生，通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长变化量可以确定第二反射点4到导体反射面11之间电介质腔的腔长的变化量，从而得到导体反射面到内杆端面(第二反射点)之间的距离变化量为Δd，求出的作用力为F＝EA·Δd/L。As shown in Figure 13(b), the second type of dynamometer is a large-range dynamometer made by using the rigidity and deformation of the housing 1. One end of the housing and the inner rod is connected to the demodulation device 100; the other end of the housing is connected to a conductor reflection surface 11, the carrier 36 of the conductor reflection surface can be very thick, which can be regarded as a rigid body; the first reflection point 3 is fixed on the end surface of the housing and the inner rod. Between the demodulation devices, the second reflection point 4 is the end surface of the inner rod 2, and both reflection points are fixed points, so the distance change between the second reflection point 4 and the conductor reflection surface 11 is equal to the first reflection point 3. The amount of change in the distance to the reflective surface 11 of the conductor; the reflective surface 11 of the conductor is fixed to the shell 1 and does not contact the inner rod 2, and the end surface of the inner rod 2 is at a certain distance from the reflective surface of the conductor; when the carrier 36 of the reflective surface 11 is When subjected to tension or pressure, the housing 1 will stretch or compress. The elasticity of the housing material is E, the net area of the tension and compression area of the material is A, and the distance from the first reflection point 3 to the conductor reflection surface 11 is L , The resonant frequency occurs after the force is applied. The resonant frequency/cavity length change of the open hollow coaxial cable-Fabry Perot cavity can determine the dielectric cavity between the second reflection point 4 and the conductor reflection surface 11 The change of the cavity length, the change in the distance between the conductor reflection surface and the inner rod end surface (the second reflection point) is obtained as Δd, and the calculated force is F=EA·Δd/L.
实施例六：应变计Example 6: Strain gauge
如图14所示，所述传感器内具有第一反射点3、第二反射点4、导体反射面11，第一反射点3固定在外壳和内杆端面与解调装置100之间，第二反射点4为外壳1或内杆2的端面，第一反射点和第二反射点均为固定点；其中，所述第一反射点3附近的外壳外部固定凸起的结构作为第一固定点41，通常情 况下，第一反射点3和第一固定点41在同一位置或相距不远；所述导体反射面11处的外壳外部固定凸起的结构作为第二固定点42，通常情况下，导体反射面11和第二固定点42在同一位置或相距不远。所述第一固定点41和所述第二固定点42之间的距离为L；所述第二反射点4为内杆2的端面，距离导体反射面11有一定距离，第二反射点4与导体反射面11之间不接触，中间是电介质腔12，也可以在第二反射点4和导体反射面11之间的电介质腔腔内填充固体或液体；外壳1和内杆2的一端或外壳的外壳壁上连接解调装置100。外壳1可以由两段导体材料构成，两段外壳之间采用嵌套结构或导体波纹管43等结构连接；外壳1也可以不分段，应变发生变化时，外壳材料发生拉伸或压缩；内杆是一个刚体，不分段，第二反射面4为内杆端面。As shown in Figure 14, the sensor has a first reflection point 3, a second reflection point 4, and a conductor reflection surface 11. The first reflection point 3 is fixed between the housing and the inner rod end surface and the demodulation device 100, and the second The reflection point 4 is the end surface of the housing 1 or the inner rod 2, and the first reflection point and the second reflection point are both fixed points; wherein the fixed protrusion structure on the outside of the housing near the first reflection point 3 serves as the first fixed point 41. Normally, the first reflecting point 3 and the first fixing point 41 are at the same position or not far apart; the structure of the fixed protrusion on the outer shell of the conductor reflecting surface 11 is used as the second fixing point 42, usually , The conductor reflection surface 11 and the second fixed point 42 are at the same position or not far apart. The distance between the first fixed point 41 and the second fixed point 42 is L; the second reflection point 4 is the end surface of the inner rod 2 and has a certain distance from the conductor reflection surface 11, and the second reflection point 4 There is no contact with the conductor reflection surface 11, and the dielectric cavity 12 is in the middle. The dielectric cavity between the second reflection point 4 and the conductor reflection surface 11 can also be filled with solid or liquid; one end of the housing 1 and the inner rod 2 or The demodulation device 100 is connected to the shell wall of the shell. The shell 1 can be composed of two pieces of conductive material, and the two shells are connected by a nested structure or a conductive bellows 43; the shell 1 may not be segmented. When the strain changes, the shell material will be stretched or compressed; The rod is a rigid body and is not segmented, and the second reflecting surface 4 is the end surface of the inner rod.
通过所述第一固定点41和所述第二固定42点能够将所述应变计固定到待检测的物体上或者埋入待检测的介质中，例如固定到钢筋上或混凝土内，第一固定点41和第二固定42之间的初始距离为L，点所述待检测的物体或介质发生应变时能够带动所述两个固定点发生相对移动Δd，从而带动所述第一反射点3和导体反射面11之间发生相对位移Δd，由于第一反射点3和第二反射点4之间的距离固定，所以第一反射点3和导体反射面11之间发生的相对位移等于第二反射点4和导体反射面11之间发生的相对位移，即电介质腔的腔长发生变化，通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长变化量可以确定第二反射点4到导体反射面11之间电介质腔的腔长的变化量Δd，从而得到导体反射面到内杆端面的距离的变化量为Δd，从而得到应变的大小为ε＝Δd/L。Through the first fixing point 41 and the second fixing point 42, the strain gauge can be fixed to the object to be tested or buried in the medium to be tested, for example, fixed to steel bars or concrete, the first fixing The initial distance between the point 41 and the second fixing 42 is L. When the object or medium to be detected is strained, the two fixed points can be driven to move Δd relative to each other, thereby driving the first reflection point 3 and The relative displacement Δd between the conductor reflection surface 11 occurs. Since the distance between the first reflection point 3 and the second reflection point 4 is fixed, the relative displacement between the first reflection point 3 and the conductor reflection surface 11 is equal to the second reflection The relative displacement between point 4 and the reflective surface 11 of the conductor, that is, the cavity length of the dielectric cavity changes, can be determined by the resonant frequency of the open hollow coaxial cable-Fabry-Perot cavity/cavity length change The change in the cavity length of the dielectric cavity between the second reflection point 4 and the conductor reflection surface 11 is Δd, and the change in the distance between the conductor reflection surface and the inner rod end surface is Δd, and the strain is obtained as ε=Δd/L .
实施例七：倾斜仪Embodiment 7: Inclinometer
1)基于柔性绳或弹性杆的第一种水平放置的单向倾斜仪1) The first horizontally placed unidirectional inclinometer based on flexible rope or elastic rod
所述传感器内具有第一反射点3、第二反射点4、导体反射面11，第一反射点3固定在外壳和内杆端面与解调装置100之间，第二反射点4为外壳1和内杆2的端面，第一反射点和第二反射点均为固定点；优选的，外壳1和内杆2的端面是同一个断面，该断面为第二反射点4。外壳1上固定有支架54，用来悬挂柔性绳或两端铰接的弹性杆53，重物52悬挂在柔性绳或两端铰接的弹性杆53的下方。重物52靠近外壳1和内杆2端面4的第一端面为导体材料制作的导体反射面11。当被测物体带动倾斜仪发生倾斜时，支架54和第二反射4点会随着被测物体发生倾斜，导体反射面4和重物52则在重力作用下保持原状态或仅发生转动，因此导体反射面4和重物52会左相对第二反射点4发生移动，从而使得导体反射面11到第二反射点4之间的距离发生变化，即电介质腔12的腔长发生变化，最终使得开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生变化，通过谐振频率/谐振腔腔长的变化量，可以确定电介质腔12的腔长变化量，从而确定倾斜角度的大小。如图15(a)所示，第一种工况：导体反射面11与第二反射点4对应的端面平行放置时，采用左右放置的两根或更多平行且等长的柔性绳或两端铰接的弹性杆53悬挂重物，柔性绳或弹性杆53与支架54和重物的四个连接点构成的平面平行于外壳和内杆的轴线；当这些等长柔性绳或两端铰接的弹性杆53在支架54上的固定点的连线不垂直于外壳1和内杆2的轴线时，倾斜角度改变后，导体反射面11与第二反射点4对应的端面始终平行，更方便测量和标定。优选的，采用两根等长柔性绳或两端铰接的弹性杆42，且这两根柔性绳或两端铰接的弹性杆53在支架54上的固定点的连线平行于外壳1和内杆2的轴线。此时柔性绳或两端铰接的弹性杆53的长度为L，当所述倾斜仪的倾斜角度在所述两根柔性绳或两端铰接的弹性杆53构成的平面上发生变化时，导体反射面11始终平行于外壳1和内杆2的端面，通过谐振频率/谐振腔腔长变化量可求出第二反射点4与导体反射面之间的距离变化量，即电介质腔的腔长变化量为Δd，从而得到倾斜角度的变化量为Δθ＝arcsin(Δd/L)。The sensor has a first reflection point 3, a second reflection point 4, and a conductor reflection surface 11. The first reflection point 3 is fixed between the housing and the inner rod end surface and the demodulation device 100, and the second reflection point 4 is the housing 1. As for the end surface of the inner rod 2, the first reflection point and the second reflection point are both fixed points; preferably, the end surfaces of the housing 1 and the inner rod 2 are the same section, which is the second reflection point 4. A bracket 54 is fixed on the housing 1 to hang a flexible rope or an elastic rod 53 hinged at both ends, and a weight 52 is suspended under the flexible rope or an elastic rod 53 hinged at both ends. The first end surface of the weight 52 close to the end surface 4 of the outer shell 1 and the inner rod 2 is a conductive reflective surface 11 made of conductive material. When the measured object drives the inclinometer to tilt, the bracket 54 and the second reflection point 4 will tilt with the measured object, and the conductor reflection surface 4 and the weight 52 will remain in the original state or only rotate under the action of gravity, so The conductor reflection surface 4 and the weight 52 will move to the left relative to the second reflection point 4, so that the distance between the conductor reflection surface 11 and the second reflection point 4 changes, that is, the cavity length of the dielectric cavity 12 changes, and finally The resonant frequency/cavity length of the open hollow coaxial cable-Fabry-Perot cavity changes, and the cavity length change of the dielectric cavity 12 can be determined by the change of the resonant frequency/cavity length. The size of the tilt angle. As shown in Figure 15(a), the first working condition: when the conductor reflecting surface 11 and the corresponding end surface of the second reflecting point 4 are placed in parallel, two or more parallel and equal length flexible ropes or two The end hinged elastic rod 53 hangs the weight, the plane formed by the four connection points of the flexible rope or elastic rod 53 and the bracket 54 and the weight is parallel to the axis of the outer shell and the inner rod; when these equal-length flexible ropes or hinged ends When the connecting line of the fixed point of the elastic rod 53 on the bracket 54 is not perpendicular to the axis of the housing 1 and the inner rod 2, after the tilt angle is changed, the conductor reflection surface 11 and the corresponding end surface of the second reflection point 4 are always parallel, which is more convenient for measurement And calibration. Preferably, two flexible ropes of equal length or elastic rods 42 hinged at both ends are used, and the connection between the fixed points of the two flexible ropes or the elastic rods 53 hinged at both ends on the bracket 54 is parallel to the housing 1 and the inner rod. 2 axis. At this time, the length of the flexible rope or the elastic rod 53 hinged at both ends is L. When the tilt angle of the inclinometer changes on the plane formed by the two flexible ropes or the elastic rod 53 hinged at both ends, the conductor reflects The surface 11 is always parallel to the end surfaces of the housing 1 and the inner rod 2. The change in the distance between the second reflection point 4 and the reflection surface of the conductor can be obtained by the change in the resonant frequency/cavity length, that is, the change in the cavity length of the dielectric cavity The amount is Δd, so that the amount of change in the inclination angle is Δθ=arcsin(Δd/L).
如图15(b)所示，第二种工况：采用前后放置的两根等长柔性绳53悬挂重物，两根柔性绳与直接和重物的四个固定点构成的平面垂直于外壳和内杆的轴线；或采用两端刚接的弹性杆53，弹性杆数量可以是一根弹性杆，或两根弹性杆，或多根弹性杆，弹性杆的两端与支架和重物刚性连接。柔性绳或两端刚接的弹性杆53的长度为L，底部悬挂重物52，倾斜角度改变后，导体反射面11与第二反射点4对应的端面之间的夹角会发生变化。柔性绳或两端刚接的弹性杆长度为L，当所述倾斜仪的倾斜角度在所述两根柔性绳或两端刚接的弹性杆53构成的平面上发生变化时，通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长变化量可求出第二反射点4与导体反射面11之间的电介质腔12的腔长的变化量Δd，需要通过标定得到距离变化量Δd与倾斜角度变化量Δθ之间的关系。As shown in Figure 15(b), the second working condition: two equal-length flexible ropes 53 placed front and rear are used to suspend the heavy object, and the plane formed by the two flexible ropes and the four fixed points directly and the heavy object is perpendicular to the shell And the axis of the inner rod; or use elastic rods 53 with just-connected ends. The number of elastic rods can be one elastic rod, or two elastic rods, or multiple elastic rods. Both ends of the elastic rod are rigid with the bracket and the weight. connection. The length of the flexible rope or the elastic rod 53 just connected at both ends is L, and the weight 52 is hung on the bottom. After the inclination angle is changed, the angle between the conductor reflection surface 11 and the corresponding end surface of the second reflection point 4 will change. The length of the flexible rope or the elastic rod just connected at both ends is L. When the inclination angle of the inclinometer changes on the plane formed by the two flexible ropes or the elastic rod 53 just connected at both ends, it passes through the open hollow The resonant frequency of the coaxial cable-Fabry-Perot resonant cavity/cavity length variation can be obtained by obtaining the cavity length variation Δd of the dielectric cavity 12 between the second reflection point 4 and the conductor reflection surface 11, which needs to be passed The calibration obtains the relationship between the distance change Δd and the tilt angle change Δθ.
2)基于柔性绳或弹性杆的第一种水平放置的双向倾斜仪2) The first horizontally placed bidirectional inclinometer based on flexible rope or elastic rod
如图16所示，采用两个不平行且水平放置的电介质腔的腔长测量装置，分别刚性固定到倾斜仪的顶板、底面或侧壁58上。两个腔长测量装置101，外壳和内杆在同一个端面上，该端面作为第二反射点。第一种工况，顶板58固定有至少三根或三根以上等长且平行的柔性绳或两端铰接的弹性杆53，且柔性绳或两端铰接的弹性杆53与顶板58或重物55的所有固定点不在一条直线上，此时电介质腔的腔长变化量只与绳长/杆长和倾角有关，与绳或杆的数量以及位置无关，为了方便加工，优选使用三根平行且等长的柔性绳或两端铰接的弹性杆。等长的柔性绳或两端铰接的弹性杆53底部悬挂重物55，且重物55有与等 长柔性绳或两端铰接的弹性杆53平行的竖直面分别作为两个腔长测量装置的导体反射面11，由导体材料制作；第二种工况，使用一根或多根弹性杆刚性连接顶板和重物，且重物上的两个导体反射面的法线不平行；As shown in Fig. 16, two non-parallel and horizontally placed dielectric cavities are used to measure the length of the cavity, which are respectively rigidly fixed to the top plate, bottom surface or side wall 58 of the inclinometer. For the two cavity length measuring devices 101, the outer shell and the inner rod are on the same end surface, and the end surface serves as the second reflection point. In the first working condition, the top plate 58 is fixed with at least three or more equal-length and parallel flexible ropes or elastic rods 53 hinged at both ends, and the flexible ropes or the elastic rods 53 hinged at both ends are connected to the top plate 58 or the weight 55. All fixed points are not in a straight line. At this time, the change of the cavity length of the dielectric cavity is only related to the rope length/pole length and inclination angle, and has nothing to do with the number and position of the rope or the rod. Flexible rope or elastic rod with hinged ends. A weight 55 is hung on the bottom of a flexible rope of equal length or an elastic rod 53 hinged at both ends, and the weight 55 has vertical planes parallel to the flexible rope of equal length or the elastic rod 53 hinged at both ends as two cavity length measuring devices. The conductor reflection surface 11 is made of conductive material; in the second working condition, one or more elastic rods are used to rigidly connect the top plate and the weight, and the normals of the two conductor reflection surfaces on the weight are not parallel;
第一种工况：使用三根平行且等长的柔性绳或两端铰接的弹性杆53连接顶板58和重物55，柔性绳或弹性杆分别与顶板和重物固定的三个固定点构成的两个三角形是全等三角形。将所述倾斜仪固定到被测物体上，为了方便加工，使用三根平行且等长的柔性绳或两端铰接的弹性杆53，柔性绳或两端铰接的弹性的长度为L；或使用三根等长的弹性杆53，弹性与顶板58和重物55均采用铰接连接。当所述三根柔性绳或两端铰接的弹性杆55与顶板和重物的三个交点不在一条直线上时，两个倾斜方向分别为绕X轴倾斜和绕Y轴倾斜；三根绳下方悬挂有一个重物11，重物其中作为导体反射面11的两个面的法线分别为X轴和Y轴。两个腔长测量装置101的外壳内杆的端面在同一断面上，且轴线分别垂直于这两个导体反射面11，两个腔长测量装置的外壳和内杆的端面与这两个导体反射面保持一定的距离，即电介质腔的腔长。当倾斜仪绕着X轴和Y轴均发生倾斜后，两个腔长测量装置的第二反射点到导体反射面之间的距离发生变化，使得开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生变化，可求出两个腔长测量装置的第二反射4点到导体反射面11之间电介质腔12的腔长变化量分别为Δd 1和Δd 2。通过第一个腔长测量装置的第二反射点到导体反射面之间电介质腔的腔长变化量Δd 1和绳或杆长度L的大小，可确定出倾斜仪绕X轴的倾斜角度变化量Δθ 1＝arcsin(Δd 1/L)；通过第二个腔长测量装置的第二反射点到导体反射面之间电介质腔的腔长变化量Δd 2和绳或杆长度L的大小，可确定出倾斜仪绕Y轴的倾斜角度变化量Δθ 2＝arcsin(Δd 2/L)。只要柔性绳或两端铰接的弹性杆平行且等长，数量大于等于3根，且所有柔性绳或两端铰接的弹性杆57与顶板58和重物55的固定点的连线不在一条直线上，两个方向的倾斜角度均可使用该工况的计算方法求得。其中，当使用三个或以上与顶板固定点不在一条直线上的平行且等长的弹性杆铰接连接顶板和重物时，计算方法同所述第一种工况； The first working condition: use three parallel and equal length flexible ropes or elastic rods 53 with hinged ends to connect the top plate 58 and the weight 55. The flexible ropes or elastic rods are respectively formed by three fixed points fixed to the top plate and the weight. The two triangles are congruent triangles. Fix the inclinometer to the object to be measured. To facilitate processing, use three parallel and equal length flexible ropes or elastic rods 53 with hinged ends. The length of the flexible rope or the elasticity hinged at both ends is L; or use three The elastic rod 53 of equal length is hingedly connected with the top plate 58 and the weight 55. When the three flexible ropes or the elastic rods 55 hinged at both ends and the three intersections of the top plate and the weight are not in a straight line, the two tilt directions are tilt around the X axis and tilt around the Y axis; A weight 11, the normals of the two surfaces of the weight as the conductor reflection surface 11 are the X axis and the Y axis, respectively. The end faces of the inner rods of the two cavity length measuring devices 101 are on the same section, and the axes are perpendicular to the two conductor reflection surfaces 11, and the end faces of the housing and the inner rod of the two cavity length measuring devices reflect the two conductors. The surface maintains a certain distance, that is, the cavity length of the dielectric cavity. When the inclinometer is tilted around the X-axis and Y-axis, the distance between the second reflection point of the two cavity length measuring devices and the reflection surface of the conductor changes, making the open hollow coaxial cable-Fabry Perot The resonant frequency/length of the resonant cavity changes, and the cavity length changes of the dielectric cavity 12 between the second reflection point 4 of the two cavity length measuring devices and the conductor reflection surface 11 can be calculated as Δd 1 and Δd 2 respectively . Through the change of the cavity length Δd 1 of the dielectric cavity between the second reflection point of the first cavity length measuring device and the reflection surface of the conductor and the length of the rope or rod L, the change of the tilt angle of the inclinometer around the X axis can be determined Δθ 1 = arcsin(Δd 1 /L); through the second reflection point of the second cavity length measuring device to the conductor reflection surface of the dielectric cavity cavity length change Δd 2 and the rope or rod length L can be determined The tilt angle change of the inclinometer around the Y axis Δθ 2 = arcsin(Δd 2 /L). As long as the flexible ropes or the elastic rods hinged at both ends are parallel and equal in length, the number is greater than or equal to 3, and all the flexible ropes or the elastic rods hinged at both ends 57 and the fixed points of the top plate 58 and the weight 55 are not in a straight line , The inclination angles in both directions can be calculated using the calculation method of this working condition. Wherein, when three or more parallel and equal-length elastic rods that are not on a straight line with the top plate fixed point are used to articulate the top plate and the heavy object, the calculation method is the same as the first working condition;
第二种工况：使用弹性杆53刚性连接顶板58和重物55，将所述倾斜仪固定到被测物体上，使用一根弹性杆，或两根弹性杆，或三根以上弹性杆，弹性杆长度均为L，弹性杆53与顶板和重物刚性连接。当倾斜仪绕着X轴和Y轴均发生倾斜后，通过两个腔长测量装置的谐振频率变化量可求出第二反射点4与导体反射面11之间的电介质腔12的腔长变化量Δd 1和Δd 2，需要通过标定得到两个介质腔的腔长变化量Δd 1、Δd 2与倾斜角度变化量Δθ 1、Δθ 2之间的关系。 The second working condition: use the elastic rod 53 to rigidly connect the top plate 58 and the weight 55, and fix the inclinometer to the object to be measured. Use one elastic rod, or two elastic rods, or more than three elastic rods. The length of the rod is L, and the elastic rod 53 is rigidly connected with the top plate and the weight. When the inclinometer is tilted around both the X axis and the Y axis, the cavity length change of the dielectric cavity 12 between the second reflection point 4 and the conductor reflection surface 11 can be obtained by the resonant frequency changes of the two cavity length measuring devices amount Δd 1 and Δd 2, need to be calibrated by two medium chambers cavity length variation Δd 1, Δd 2 and inclined angle variation Δθ 1, Δθ 2, the relationship between.
当使用三个或以上与顶板固定点不在一条直线上的弹性杆铰接连接顶板和重物时，计算方法同第一种工况。When three or more elastic rods that are not in a straight line with the top plate fixed point are used to hinge the top plate and the heavy object, the calculation method is the same as the first working condition.
3)基于压强传感器的第二种单向倾斜仪3) The second one-way inclinometer based on pressure sensor
如图17(a)所示，利用压强差的原理，使用两个压强传感器做成单向倾斜仪，所述倾斜仪包括一个固定到被测物体上的密闭容器59，所述密闭容器的底部有一定深度的液体33，利用倾斜后，两个压强传感器的压强差值来确定倾斜角度，这样可以消除温度的影响，无需温度补偿。采用按照实施例二介绍的压强传感器，外界端面结构可以使用扩孔的，也可以使用不扩孔的，还可以使用波登管压强传感器。As shown in Figure 17(a), using the principle of pressure difference, two pressure sensors are used to make a unidirectional inclinometer. The inclinometer includes a closed container 59 fixed to the object to be measured. The bottom of the closed container For the liquid 33 with a certain depth, after tilting, the pressure difference between the two pressure sensors is used to determine the tilt angle, which can eliminate the influence of temperature without temperature compensation. Using the pressure sensor introduced according to the second embodiment, the external end surface structure can be used with or without reaming, or a Bourdon tube pressure sensor.
当两个压强传感器刚性固定到容器内部的顶板、底板或侧面时，两个压强传感器随着被测物体的倾斜发生转动。两个压强传感器左右放置，两个压强传感器轴线平行且两条轴线的平行间距为d。外壳和内杆的端面在下方，两个测压膜片15或波登管端面膜片浸入液体中，并且距离容器59的底部相等。当被测物体带动密闭容器59在两个压强传感器的轴线构成的平面内发生倾斜时，两个压强传感器浸入液体的深度也会发生变化，所以两个压强传感器测出的压强也会发生变化；又由于两个压强传感器的轴线始终平行，所以两个压强传感器的轴线间距随着倾斜角度的变化也会发生变化。通过测量开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长变化量确定第二反射点4到导体反射面11之间电介质腔12的腔长变化量，根据压强传感器标定的数据，得到两个压强传感器的压强变化量，求出浸入深度的变化量ΔL 1和ΔL 2，ΔL 1和ΔL 2有正负号，最终可确定出倾斜角度的变化量为Δθ＝arctan[(ΔL 2-ΔL 1)/d]。 When the two pressure sensors are rigidly fixed to the top, bottom or sides of the container, the two pressure sensors rotate with the inclination of the measured object. The two pressure sensors are placed left and right, the axes of the two pressure sensors are parallel and the parallel distance between the two axes is d. The end faces of the outer shell and the inner rod are below, and the two pressure measuring diaphragms 15 or the end face diaphragms of the Bourdon tube are immersed in the liquid, and the distance from the bottom of the container 59 is equal. When the measured object drives the closed container 59 to tilt in the plane formed by the axes of the two pressure sensors, the depth of the two pressure sensors immersed in the liquid will also change, so the pressure measured by the two pressure sensors will also change; Since the axes of the two pressure sensors are always parallel, the distance between the axes of the two pressure sensors will also change with the change of the tilt angle. Determine the cavity length variation of the dielectric cavity 12 between the second reflection point 4 and the conductor reflection surface 11 by measuring the resonant frequency of the open hollow coaxial cable-Fabry-Perot resonant cavity/the cavity length variation, according to the pressure From the sensor calibration data, the pressure changes of the two pressure sensors are obtained, and the changes of immersion depth ΔL 1 and ΔL 2 are obtained . ΔL 1 and ΔL 2 have positive and negative signs. Finally, the change in tilt angle can be determined as Δθ= arctan[(ΔL 2 -ΔL 1 )/d].
当两个左右放置的压强传感器的顶部通过柔性绳或两端铰接的弹性杆53连接到容器59内部的顶板时，两个固定点之间的间距是d，在重力作用下，两个压强传感器的轴线始终竖直，不随着被测物体的倾斜发生转动。外壳和内杆的端面在下方，两个测压膜片或波登管端面膜片15浸入液体33中，并且距离容器底部相等。当被测物体带动密闭容器在两个压强传感器的轴线构成的平面内发生倾斜时，两个压强传感器浸入液体的深度也会发生变化，所以两个压强传感器测出的压强也会发生变化，通过两个压强传感器的压强变化量求出浸入深度的变化量ΔL 1和ΔL 2，最终可确定出倾斜角度的变化量为Δθ＝arcsin[(ΔL 2-ΔL 1)/d]。 When the tops of the two pressure sensors placed on the left and right are connected to the top plate inside the container 59 by flexible ropes or elastic rods 53 hinged at both ends, the distance between the two fixed points is d. Under the action of gravity, the two pressure sensors The axis of is always vertical and does not rotate with the tilt of the measured object. The end faces of the outer shell and the inner rod are below, and the two pressure measuring diaphragms or Bourdon tube end diaphragms 15 are immersed in the liquid 33 and are equal to the bottom of the container. When the measured object drives the airtight container to tilt in the plane formed by the axes of the two pressure sensors, the depth of the two pressure sensors immersed in the liquid will also change, so the pressure measured by the two pressure sensors will also change. The pressure changes of the two pressure sensors obtain the changes of immersion depth ΔL 1 and ΔL 2 , and finally the change of the inclination angle can be determined as Δθ=arcsin[(ΔL 2 -ΔL 1 )/d].
4)基于压强传感器的第二种双向倾斜仪4) The second two-way inclinometer based on pressure sensor
如图17(b)所示，利用压强差的原理，使用三个压强传感器做成双向倾斜仪，所述倾斜仪包括一个固定到被测物体上的密闭容器，所述密闭容器的底部有一定深度的液体，利用倾斜后，三个压强传感器的压强差值来确定倾斜角度，这样可以消除温度的影响，无需温度补偿。As shown in Figure 17(b), using the principle of pressure difference, three pressure sensors are used to make a two-way inclinometer. The inclinometer includes a closed container fixed to the measured object, and the bottom of the closed container has a certain For deep liquids, after tilting, the pressure difference of the three pressure sensors is used to determine the tilt angle, which can eliminate the influence of temperature without temperature compensation.
当三个压强传感器刚性固定到容器内部时，三个压强传感器随着被测物体的倾斜发生转动。只要三个压强传感器的轴线与水平面的三个交点不在一条直线上，均可做成双向倾斜仪；所述密闭容器的底部装有液体，所述三个压强传感器测压膜片或波登管端面膜片浸入液体中，并且距离容器底部相等。当所述三个压强传感器的轴线与水平面的三个交点构成一个直角三角形时，两个直角边分别是倾斜方向的X轴和Y轴，该结构方便标定和加工制作，为优选结构，三个压强传感器的分布图如图17(b)所示；第一个压强传感器和第二个压强传感器轴线的平行间距为d 1，第二个压强传感器和第三个压强传感器之间轴线的平行间距为d 2；当倾斜仪绕着X轴和Y轴均发生倾斜后，第一个压强传感器和第二个压强传感器浸入液体的深度也会发生变化，所以两个压强传感器测出的压强也会发生变化，通过两个压强传感器的压强变化量求出浸入深度的变化量ΔL 1和ΔL 2，再根据平行间距d 1的大小，可以确定出倾斜仪绕X轴的倾斜角度的变化量为Δθ 1＝arctan[(ΔL 2-ΔL 1)/d 1]；第二个压强传感器和第三个压强传感器浸入液体的深度也会发生变化，所以两个压强传感器测出的压强也会发生变化，通过两个压强传感器的压强变化量求出浸入深度的变化量ΔL 2和ΔL 3，再根据平行间距d 2的大小，可以确定出倾斜仪绕Y轴倾斜角度的变化量为Δθ 2＝arctan[(ΔL 3-ΔL 2)/d 2]。 When the three pressure sensors are rigidly fixed to the inside of the container, the three pressure sensors rotate with the inclination of the measured object. As long as the three intersections of the axes of the three pressure sensors and the horizontal plane are not in a straight line, it can be made into a two-way inclinometer; the bottom of the closed container is filled with liquid, and the three pressure sensors are pressure measuring diaphragms or Bourdon tubes The end face film is immersed in the liquid and is equal to the bottom of the container. When the three intersections of the axes of the three pressure sensors and the horizontal plane form a right-angled triangle, the two right-angled sides are the X-axis and Y-axis in the oblique direction respectively. This structure is convenient for calibration and processing and is a preferred structure. The distribution diagram of the pressure sensor is shown in Figure 17(b); the parallel distance between the axis of the first pressure sensor and the second pressure sensor is d 1 , the parallel distance between the axis of the second pressure sensor and the third pressure sensor Is d 2 ; when the inclinometer is tilted around the X axis and Y axis, the depth of the first pressure sensor and the second pressure sensor immersed in the liquid will also change, so the pressure measured by the two pressure sensors will also If changes occur, the immersion depth changes ΔL 1 and ΔL 2 are obtained from the pressure changes of the two pressure sensors, and then according to the parallel spacing d 1 , the change in the tilt angle of the inclinometer around the X axis can be determined as Δθ 1 = arctan[(ΔL 2 -ΔL 1 )/d 1 ]; the depth of the second pressure sensor and the third pressure sensor immersed in the liquid will also change, so the pressure measured by the two pressure sensors will also change, The immersion depth changes ΔL 2 and ΔL 3 are obtained by the pressure changes of the two pressure sensors, and then according to the parallel spacing d 2 , the change in the tilt angle of the inclinometer around the Y axis can be determined as Δθ 2 = arctan[ (ΔL 3 -ΔL 2 )/d 2 ].
当三个压强传感器顶部通过柔性绳或两端铰接的弹性杆连接到容器内部的顶板时，在重力作用下，三个压强传感器的轴线始终竖直，不随着被测物体的倾斜发生转动。三个压强传感器的轴线与水平面的三个交点不在一条直线上；所述密闭容器的底部装有液体，所述三个压强传感器测压膜片或波登管端面膜片浸入液体中，并且距离容器底部相等。当所述三个压强传感器的轴线与顶板的三个交点构成一个直角三角形时，两个直角边分别是倾斜方向的X轴和Y轴；第一个压强传感器和第二个压强传感器轴线的平行间距为d 1，第二个压强传感器和第三个压强传感器之间轴线的平行间距为d 2；当倾斜仪绕着X轴和Y轴均发生倾斜后，第一个压强传感器和第二个压强传感器浸入液体的深度也会发生变化，所以两个压强传感器测出的压强也会发生变化，通过两个压强传感器的压强变化量求出浸入深度的变化量ΔL 1和ΔL 2，再根据平行间距d 1的大小，可以确定出倾斜仪绕X轴的倾斜角度变化量Δθ 1＝arcsin[(ΔL 2-ΔL 1)/d 1]；第二个压强传感器和第三个压强传感器浸入液体的深度也会发生变化，所以两个压强传感器测出的压强也会发生变化，通过两个压强传感器的压强变化量求出浸入深度的变化量ΔL 2和ΔL 3，再根据平行间距d 2的大小，可以确定出倾斜仪绕Y轴倾斜角度变化量Δθ 2＝arcsin[(ΔL 3-ΔL 2)/d 2]。 When the tops of the three pressure sensors are connected to the top plate inside the container through flexible ropes or elastic rods hinged at both ends, the axes of the three pressure sensors are always vertical under the action of gravity and do not rotate with the inclination of the measured object. The three intersections of the axes of the three pressure sensors and the horizontal plane are not on a straight line; the bottom of the airtight container is filled with liquid, the pressure measuring diaphragms of the three pressure sensors or the end diaphragms of the Bourdon tube are immersed in the liquid, and the distance The bottom of the container is equal. When the axes of the three pressure sensors and the three intersections of the top plate form a right triangle, the two right angle sides are the X axis and the Y axis in the tilt direction; the axes of the first pressure sensor and the second pressure sensor are parallel The distance is d 1 , and the parallel distance between the axis of the second pressure sensor and the third pressure sensor is d 2 ; when the inclinometer is tilted around the X axis and Y axis, the first pressure sensor and the second The depth of the pressure sensor immersed in the liquid will also change, so the pressure measured by the two pressure sensors will also change. The changes in the immersion depth ΔL 1 and ΔL 2 are obtained from the pressure changes of the two pressure sensors, and then according to the parallel The distance d 1 can determine the tilt angle change of the inclinometer around the X axis Δθ 1 = arcsin[(ΔL 2 -ΔL 1 )/d 1 ]; the second pressure sensor and the third pressure sensor immersed in the liquid The depth will also change, so the pressure measured by the two pressure sensors will also change. The changes in the immersion depth ΔL 2 and ΔL 3 are obtained from the pressure changes of the two pressure sensors, and then according to the parallel distance d 2 , It can be determined that the tilt angle of the inclinometer around the Y axis changes Δθ 2 = arcsin[(ΔL 3 -ΔL 2 )/d 2 ].
实施例八：滑移传感器Embodiment 8: Slip Sensor
1)单向滑移计1) One-way slip gauge
如图18(a)所示，使用两个测量第二反射点4到导体反射面11之间距离的电介质腔的腔长测量装置，做成测量单向水平滑移量以及纵向分离量的滑移计，研究介质A相当于介质B在轴向和法向的相对位移。64是与滑移计载体61固定的介质A；65是与双斜面载体63固定的介质B；所述的两个电腔长测量装置，分别为第一腔长测量装置和第二腔长测量装置。每个位移传感器的外壳1和内杆2导体区域的端面在一个平面上，即第二反射点4所在的平面，而且该平面平行于导体反射面11。所述两个斜孔是固定到介质A上的滑移计载体61的两个斜孔，分别通过并固定第一腔长测量装置和第二腔长测量装置的外壳，两个斜孔的轴线垂直于两个斜面。所述双斜面是固定到介质B上的双斜面载体63的两个导体材料做成的斜面，分别为第一斜面和第二斜面，双斜面的两个斜面分别为第一腔长测量装置和第二腔长测量装置对应的第一导体反射面和第二导体反射面。As shown in Figure 18(a), two dielectric cavities measuring the distance between the second reflection point 4 and the conductor reflecting surface 11 are used to measure the length of the cavity to measure the unidirectional horizontal slip and the vertical separation. With a shift gauge, the study medium A is equivalent to the relative displacement of medium B in the axial and normal directions. 64 is the medium A fixed to the slip gauge carrier 61; 65 is the medium B fixed to the double inclined carrier 63; the two electrical cavity length measuring devices are the first cavity length measuring device and the second cavity length measuring device. Device. The end surfaces of the conductor area of the housing 1 and the inner rod 2 of each displacement sensor are on a plane, that is, the plane where the second reflection point 4 is located, and the plane is parallel to the conductor reflection surface 11. The two oblique holes are two oblique holes of the slip gauge carrier 61 fixed to the medium A, which respectively pass through and fix the housings of the first cavity length measuring device and the second cavity length measuring device. The axes of the two oblique holes Perpendicular to the two inclined planes. The double-inclined surface is made of two conductor materials of the double-inclined carrier 63 fixed to the medium B, which are the first inclined surface and the second inclined surface. The two inclined surfaces of the double-inclined surface are the first cavity length measuring device and The first conductor reflecting surface and the second conductor reflecting surface corresponding to the second cavity length measuring device.
所述滑移计载体61固定在介质A上，第一腔长测量装置的外壳固定在滑移计载体61的第一斜孔内，所述第二腔长测量装置的外壳固定在滑移计载体61的第二斜孔内，所述第一腔长测量装置外壳和内杆的端面正对且平行于第一斜面，所述第二腔长测量装置外壳1和内杆2的端面正对且平行于第二斜面，所述第一斜面与所述第二斜面为双斜面载体63的两个斜面，所述双斜面载体63固定在介质B上；所述两个斜面的法向量构成的二阶矩阵
Figure PCTCN2019078351-appb-000010
的秩等于2，其中，所述第一斜面的法向量为(l 1,n 1) T，第二斜面的法向量为(l 2,n 2) T，所述两个斜面相对于水平面的倾斜角度θ 1和θ 2在-90°到90°之间； The slip gauge carrier 61 is fixed on the medium A, the housing of the first cavity length measuring device is fixed in the first inclined hole of the slip gauge carrier 61, and the housing of the second cavity length measuring device is fixed on the slip gauge. In the second oblique hole of the carrier 61, the end surfaces of the housing and the inner rod of the first cavity length measuring device are directly opposite and parallel to the first oblique surface, and the end surfaces of the housing 1 and the inner rod 2 of the second cavity length measuring device are directly opposite to each other. And parallel to the second inclined plane, the first inclined plane and the second inclined plane are the two inclined planes of the double inclined plane carrier 63, and the double inclined plane carrier 63 is fixed on the medium B; the normal vectors of the two inclined planes are formed Second-order matrix
Figure PCTCN2019078351-appb-000010
The rank of is equal to 2, where the normal vector of the first inclined plane is (l 1 , n 1 ) T , the normal vector of the second inclined plane is (l 2 , n 2 ) T , and the two inclined planes are relative to the horizontal plane. The inclination angles θ 1 and θ 2 are between -90° and 90°;
所述第一腔长测量装置用于测量该装置的第二反射点4到第一导体反射面11(第一斜面)的距离变化量，即电介质腔的腔长变化量为Δd 1，所述第二腔长测量装置用于测量该装置的第二反射点4到第二导体反射面11(第二斜面)的距离变化量，即电介质腔的腔长变化量为Δd 2。两个距离变化量，即电介质腔的腔长变化量Δd 1和Δd 2，均可通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长得到。通过所述两个距离变化量(电介质腔的腔长变化量)和两个斜面的法向量，能够得到所述介质A相对于所述介质B的水平滑移量Δx和纵向分离量Δz： The first cavity length measuring device is used to measure the distance change from the second reflection point 4 of the device to the first conductor reflection surface 11 (first slope), that is, the cavity length change of the dielectric cavity is Δd 1 , The second cavity length measuring device is used to measure the distance change from the second reflection point 4 of the device to the second conductor reflection surface 11 (second slope), that is, the cavity length change of the dielectric cavity is Δd 2 . The two distance changes, namely the cavity length changes Δd 1 and Δd 2 of the dielectric cavity, can be obtained by the resonant frequency/cavity length of the open hollow coaxial cable-Fabry Perot cavity. Through the two distance changes (the cavity length change of the dielectric cavity) and the normal vectors of the two slopes, the horizontal slip amount Δx and the longitudinal separation amount Δz of the medium A relative to the medium B can be obtained:
Figure PCTCN2019078351-appb-000011
Figure PCTCN2019078351-appb-000011
图18(a)为本申请实施例的单向滑移计的示意图。本实施例研究的就是介质A相对介质B的相对水平滑移量和相对纵向位移量。常用的是研究钢构件和混凝土之间的相对滑移，例如：A表示混凝土，B表示钢构件。单向滑移计主要包括：两个腔长测量装置；双斜面；固定腔长测量装置的带两个斜孔的载体61，固定的是腔长测量装置的外壳1，内杆可以通过61上的两个斜孔，而且这两个斜孔分别垂直于双斜面载体63的两个斜面11；滑移计的密封装置62，一般用较软的材料制作，防止滑移计上半部分相对下半部分发生滑移时，有水汽和粉尘等物体的浸入；滑移计下半部双斜面的载体63要固定到介质B上；两个双斜面在双斜面载体63上，两个斜面可以是相同角度，可以是不同角度，角度范围可以是-90°到90°之间；64是固定载体61的介质A。Figure 18(a) is a schematic diagram of a one-way slip gauge according to an embodiment of the application. This embodiment studies the relative horizontal slip and relative longitudinal displacement of medium A relative to medium B. It is commonly used to study the relative slip between steel members and concrete, for example: A means concrete, B means steel member. The unidirectional slip meter mainly includes: two cavity length measuring devices; double inclined planes; a carrier 61 with two inclined holes for fixing the cavity length measuring device, and the housing 1 of the cavity length measuring device is fixed, and the inner rod can pass through 61 The two inclined holes are perpendicular to the two inclined surfaces 11 of the double inclined surface carrier 63; the sealing device 62 of the slip gauge is generally made of softer material to prevent the upper part of the slip gauge from falling down. When half of the slippage occurs, water vapor and dust will be immersed; the carrier 63 of the lower half of the slip gauge should be fixed to the medium B; two double slopes are on the double slope carrier 63, the two slopes can be The same angle can be different angles, and the angle range can be between -90° and 90°; 64 is the medium A of the fixed carrier 61.
2)双向滑移计2) Two-way slip gauge
如图18(b)所示，与单向滑移计的原理一样，只是增加了第三个斜面。使用三个测量第二反射点4到导体反射面11之间距离的电介质腔的腔长测量装置，做成测量双向水平滑移量以及纵向分离量的滑移计，研究介质A相当于介质B在平面两个方向以及法向的相对位移。每个腔长测量装置的外壳和内杆导体区域的端面在一个平面上，即第二反射点所在的平面，而且该平面平行于导体反射面，即平行于斜面。所述三个斜孔是固定到介质A上的滑移计载体的三个斜孔，分别通过并固定第一腔长测量装置、第二腔长测量装置和第三腔长测量装置的外壳，三个斜孔的轴线垂直于三个斜面。所述三个斜面是固定到介质B上的三斜面载体上的三个斜面，分别为第一斜面、第二斜面和第三斜面，三斜面的三个斜面分别为第一腔长测量装置、第二腔长测量装置和第三腔长测量装置对应的第一导体反射面、第二导体反射面和第三导体反射面。As shown in Figure 18(b), the principle is the same as the one-way slip gauge, except that a third slope is added. Three cavity length measuring devices for measuring the distance between the second reflection point 4 and the conductor reflection surface 11 of the dielectric cavity are used to make a slip meter that measures the amount of bidirectional horizontal slip and vertical separation. The study medium A is equivalent to medium B The relative displacement in the two directions of the plane and the normal direction. The shell of each cavity length measuring device and the end surface of the inner rod conductor area are on a plane, that is, the plane where the second reflection point is located, and the plane is parallel to the conductor reflection surface, that is, parallel to the inclined plane. The three oblique holes are three oblique holes of the slip gauge carrier fixed to the medium A, which respectively pass and fix the housings of the first cavity length measuring device, the second cavity length measuring device and the third cavity length measuring device, The axes of the three inclined holes are perpendicular to the three inclined planes. The three inclined planes are the three inclined planes on the three inclined plane carrier fixed to the medium B, which are the first inclined plane, the second inclined plane and the third inclined plane. The three inclined planes of the three inclined planes are the first cavity length measuring device, The first conductor reflecting surface, the second conductor reflecting surface and the third conductor reflecting surface corresponding to the second cavity length measuring device and the third cavity length measuring device.
所述三个腔长测量装置通过外壳固定在三个斜孔内，所述三个腔长测量装置外壳和内杆的端面，即第二反射点，分别平行于三个斜面；所述三个斜面的法向量构成的三阶矩阵
Figure PCTCN2019078351-appb-000012
的秩等于3，其中，所述第一斜面的法向量为(l 1,m 1,n 1) T，第二斜面的法向量为(l 2,m 2,n 2) T，第三斜面的法向量为(l 3,m 3,n 3) T，所述三个斜面相对于水平面的倾斜角度θ 1、θ 2和θ 3在-90°到90°之间； The three cavity length measuring devices are fixed in three oblique holes through the housing, and the end faces of the housing and the inner rod of the three cavity length measuring devices, that is, the second reflection point, are respectively parallel to the three oblique surfaces; The third-order matrix formed by the normal vector of the inclined plane
Figure PCTCN2019078351-appb-000012
The rank of is equal to 3, where the normal vector of the first inclined plane is (l 1 ,m 1 ,n 1 ) T , the normal vector of the second inclined plane is (l 2 ,m 2 ,n 2 ) T , the third inclined plane The normal vector of is (l 3 , m 3 , n 3 ) T , and the inclination angles θ 1 , θ 2 and θ 3 of the three inclined surfaces relative to the horizontal plane are between -90° and 90°;
所述第一腔长测量装置用于测量该装置的第二反射点到第一导体反射面(第一斜面)的距离变化量，即电介质腔的腔长变化量为Δd 1，所述第二腔长测量装置用于测量该装置的第二反射点到第二导体反射面(第二斜面)的距离变化量，即电介质腔的腔长变化量为Δd 2，所述第三腔长测量装置用于测量该装置的第二反射点到第三导体反射面(第三斜面)的距离变化量，即电介质腔的腔长变化量为Δd 3；三个距离变化量，即电介质腔的腔长变化量Δd 1、Δd 2和Δd 3，均可通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长得到。通过所述三个距离变化量(电介质腔的腔长变化量)和三个斜面的法向量，能够得到所述第一物体相对于所述第二物体的水平滑移量Δx、Δy和纵向分离量Δz： The first cavity length measuring device is used to measure the distance change from the second reflection point of the device to the first conductor reflection surface (first inclined surface), that is, the cavity length change of the dielectric cavity is Δd 1 , and the second The cavity length measuring device is used to measure the distance change from the second reflection point of the device to the second conductor reflection surface (the second inclined surface), that is, the cavity length change of the dielectric cavity is Δd 2 , the third cavity length measuring device Used to measure the distance change from the second reflection point of the device to the third conductor reflection surface (third inclined plane), that is, the cavity length change of the dielectric cavity is Δd 3 ; three distance changes are the cavity length of the dielectric cavity The variation Δd 1 , Δd 2 and Δd 3 can all be obtained by the resonant frequency/length of the resonant cavity of the open hollow coaxial cable-Fabry Perot cavity. Through the three distance changes (the change of the cavity length of the dielectric cavity) and the normal vectors of the three slopes, the horizontal slip amount Δx, Δy and the longitudinal separation of the first object relative to the second object can be obtained Quantity Δz:
Figure PCTCN2019078351-appb-000013
Figure PCTCN2019078351-appb-000013
实施例九：位移传感器Example 9: Displacement sensor
1)基于弹簧和膜片的位移传感器1) Displacement sensor based on spring and diaphragm
如图19(a)和(b)所示，位移传感器通过弹簧72和膜片15，将较大的位移变化量转换成较小的膜片挠度变化量；膜片15靠近电介质腔的腔长测量装置的一侧为导体反射面11。使用一个测量第二反射点4到导体反射面11距离的电介质腔的腔长测量装置做成位移传感器。腔长测量装置外壳1和内杆2的左端面连接解调装置，右端面为第二反射点4，第二反射点4的右边一定距离处放有膜片15，膜片15的法线和外壳内杆的轴线重合，膜片15的左端面为导体反射面11。膜片15的右端面是一个顶着膜片中心点的推杆71，推杆的右边有支挡结构，支挡结构的右边是弹簧72，弹簧右边也有一个支挡结构73，该支挡机构和探杆74是一个零件。As shown in Figure 19 (a) and (b), the displacement sensor uses the spring 72 and the diaphragm 15 to convert a larger displacement change into a smaller diaphragm deflection change; the diaphragm 15 is close to the cavity length of the dielectric cavity One side of the measuring device is the conductor reflection surface 11. A cavity length measuring device for measuring the distance between the second reflection point 4 and the conductor reflection surface 11 of the dielectric cavity is used as a displacement sensor. The left end surface of the cavity length measuring device housing 1 and the inner rod 2 is connected to the demodulation device, the right end surface is the second reflection point 4, and a diaphragm 15 is placed at a certain distance to the right of the second reflection point 4. The normal line of the diaphragm 15 and The axes of the rods in the housing coincide, and the left end surface of the diaphragm 15 is the conductor reflection surface 11. The right end of the diaphragm 15 is a push rod 71 against the center point of the diaphragm. The right side of the push rod has a supporting structure, the right side of the supporting structure is a spring 72, and the right side of the spring also has a supporting structure 73. The supporting mechanism And the probe 74 are one part.
当位移发生变化时，探杆73移动，弹簧72的压缩量发生变化，弹力发生变化，通过推杆71，使得作用到膜片15上的力发生变化，最终使得膜片15的挠度发生变化，从而使得导体反射面到第二反射点之间的距离发生变化，即电介质腔的腔长发生变化，最终使得开放式空心同轴电缆-法布里珀罗谐振腔的 谐振频率/谐振腔腔长发生变化。通过标定，可以得到谐振频率/谐振腔腔长和位移之间的关系。When the displacement changes, the probe 73 moves, the compression amount of the spring 72 changes, and the elastic force changes. Through the push rod 71, the force acting on the diaphragm 15 changes, and finally the deflection of the diaphragm 15 changes. As a result, the distance between the reflection surface of the conductor and the second reflection point changes, that is, the cavity length of the dielectric cavity changes, and finally the resonant frequency/cavity length of the open hollow coaxial cable-Fabry-Perot cavity Changes. Through calibration, the relationship between resonant frequency/resonant cavity length and displacement can be obtained.
当外壳1端面有扩口时，可以加大膜片的直径，增加位移传感器的灵敏度，如图19(b)所示。When the end face of the housing 1 has a flared opening, the diameter of the diaphragm can be enlarged to increase the sensitivity of the displacement sensor, as shown in Figure 19(b).
2)基于斜面进行位移折减的位移传感器2) Displacement sensor based on inclined plane for displacement reduction
图20(a)为本申请实施例的反射式的通过斜面对位移进行折减的位移传感器的示意图。主要包括：实施例一中的电介质腔的腔长测量系统，斜面81，位移传感器探杆74，对探杆进行端面密封的密封圈86，直线轴承的外壳84，直线轴承85，支挡块体83，位移传感器外壳82，固定腔长测量装置上外壳1的固定装置87，防晃滑块88，弹簧72，位移传感器端面的密封塞89。位移传感器使用斜面作为导体反射面11，腔长测量装置的外壳1和内杆2的轴线垂直于斜面11。斜面11与位移计所测量的水平位移方向之间有一个夹角θ，θ的范围是-90°到90°之间，即斜面可以向左倾斜，也可以向右倾斜，位移计的轴线始终垂直于斜面，位移计的量程越大，θ越小。当位移发生变化时，位移折减原理是通过斜面将水平方向较大的位移变化量，变成斜面法线方向较小的移动量，即电介质腔12的腔长只发生较小的变化。其中腔长测量装置的外壳1和内杆2导体区域的端面在一个平面上，即第二反射点4所在的平面，而且该平面平行于导体反射面11，即腔长测量装置的轴线平行于斜面的法线。斜面靠近位移传感器的一侧为导体反射面11。FIG. 20(a) is a schematic diagram of a reflective displacement sensor that reduces the displacement of an inclined plane according to an embodiment of the application. It mainly includes: the cavity length measurement system of the dielectric cavity in the first embodiment, the inclined surface 81, the displacement sensor probe 74, the sealing ring 86 for sealing the end face of the probe, the linear bearing housing 84, the linear bearing 85, the supporting block body 83. Displacement sensor housing 82, fixing device 87 of housing 1 on the fixed cavity length measuring device, anti-shake slider 88, spring 72, and sealing plug 89 on the end face of the displacement sensor. The displacement sensor uses an inclined plane as the conductor reflection surface 11, and the axis of the housing 1 and the inner rod 2 of the cavity length measuring device is perpendicular to the inclined plane 11. There is an included angle θ between the inclined surface 11 and the horizontal displacement direction measured by the displacement meter. The range of θ is between -90° and 90°. That is, the inclined surface can be inclined to the left or right. The axis of the displacement meter is always Vertical to the inclined plane, the larger the range of the displacement meter, the smaller the θ. When the displacement changes, the principle of displacement reduction is to change the larger displacement in the horizontal direction into a smaller displacement in the normal direction of the inclined plane through the inclined plane, that is, the cavity length of the dielectric cavity 12 only changes slightly. The end surfaces of the conductor area of the housing 1 and the inner rod 2 of the cavity length measuring device are on a plane, that is, the plane where the second reflection point 4 is located, and the plane is parallel to the conductor reflection surface 11, that is, the axis of the cavity length measuring device is parallel to The normal of the slope. The side of the inclined surface close to the displacement sensor is the conductor reflection surface 11.
斜面的倾斜角度是已知量θ，当位移计探杆的水平位移量为w时，开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生变化，从而得到腔长测量装置第二反射点4到导体反射面/斜面11的距离变化量，即电介质腔的腔长变化量为Δd＝w·sinθ。通过谐振频率/谐振腔腔长的变化量可以确定第二反射点4到导体反射面11之间电介质腔的腔长的变化量Δd，得到位移的大小w＝Δd/sinθ。在电介质腔12的腔长的最大值和最小值不变的情况下，可以通过减小斜面斜率的方法增大位移传感器的量程。The inclination angle of the inclined plane is a known quantity θ. When the horizontal displacement of the displacement meter probe is w, the resonant frequency/length of the resonant cavity of the open hollow coaxial cable-Fabry-Perot resonator changes, thereby obtaining The variation of the distance from the second reflection point 4 of the cavity length measuring device to the conductor reflection surface/slope 11, that is, the variation of the cavity length of the dielectric cavity is Δd=w·sinθ. The variation Δd of the dielectric cavity between the second reflection point 4 and the conductor reflection surface 11 can be determined by the variation of the resonance frequency/cavity length, and the magnitude of the displacement w=Δd/sinθ is obtained. When the maximum and minimum cavity length of the dielectric cavity 12 remain unchanged, the range of the displacement sensor can be increased by reducing the slope of the slope.
3)基于折叠式杠杆结构进行位移折减的位移传感器3) Displacement sensor based on folding lever structure for displacement reduction
图20(b)为本申请实施例的基于折叠式杠杆结构进行位移折减的位移传感器的结构示意图。折叠杠杆折数较少的一侧折叠的端面固定有导体反射面11，能够将轴线方向较大的位移变化量，变成导体反射镜11在轴线方向较小的移动量。解调装置100在左边，从左往右依次是解调装置、电介质腔的腔长测量装置，导体反射镜、M个折叠、折叠的固定点、N个折叠和探杆。电介质腔的腔长测量装置的外壳1和内杆2的端面在一个平面上，即第二反射点4所在的平面，而且该平面平行于导体反射面11，即电介质腔的腔长测量装置的轴线垂直于导体反射面11，电介质腔的腔长测量装置的轴线和折叠端面探杆的运动方向相同。20(b) is a schematic structural diagram of a displacement sensor based on a folding lever structure for displacement reduction according to an embodiment of the application. A conductor reflecting surface 11 is fixed on the folded end face of the folding lever on the side with a smaller number of folds, which can change a larger displacement change in the axial direction into a smaller movement of the conductor mirror 11 in the axial direction. The demodulation device 100 is on the left, and from left to right are the demodulation device, the cavity length measuring device of the dielectric cavity, the conductor mirror, M folds, fold fixed points, N folds and probe rods. The end surfaces of the housing 1 and the inner rod 2 of the dielectric cavity length measuring device are on a plane, that is, the plane where the second reflection point 4 is located, and the plane is parallel to the conductor reflection surface 11, that is, the cavity length measuring device of the dielectric cavity The axis is perpendicular to the conductor reflection surface 11, and the axis of the cavity length measuring device of the dielectric cavity and the movement direction of the folded end surface probe are the same.
通过折叠杠杆结构对位移进行折减。折叠杠杆有多个转轴，由于电介质腔的腔长测量装置的第二反射点4到导体反射面11之间的电介质腔12的腔长变化量较小，所以折叠杠杆结构的固定转轴91是靠近导体反射面11的，即固定转轴91到导体反射面4对应的折叠数较少，有M个折叠，常用一个折叠结构92；折叠的固定转轴91到位移传感器探杆95这部分的折叠数较多，有N个折叠。此外，可以改变每个折叠结构的杆长。一般情况下，折叠的固定点到位移传感器探头这部分的折叠较长，每一个折叠的长度的一半为L；折叠的固定点到导体反射镜对应的折叠较短，每一个折叠的长度的一半为a。此时，右边的探杆移动的位移量为w，第二反射点4到导体反射面11之间的距离变化量，即电介质腔的腔长变化量Δd为：The displacement is reduced by folding the lever structure. The folding lever has multiple rotating shafts. Since the cavity length of the dielectric cavity 12 between the second reflection point 4 of the dielectric cavity measuring device and the conductor reflecting surface 11 varies little, the fixed rotating shaft 91 of the folding lever structure is close to The number of folds corresponding to the conductor reflecting surface 11, that is, the fixed rotating shaft 91 to the conductor reflecting surface 4 is relatively small, there are M folds, and one folding structure 92 is commonly used; the folding number of the folded fixed rotating shaft 91 to the displacement sensor rod 95 is relatively small Many, there are N folds. In addition, the rod length of each folding structure can be changed. In general, the fold from the fixed point of the fold to the displacement sensor probe is longer, and half of the length of each fold is L; the fold from the fixed point of the fold to the conductor mirror is shorter, and the length of each fold is half Is a. At this time, the displacement of the probe on the right is w, and the change in distance between the second reflection point 4 and the reflective surface 11 of the conductor, that is, the change in cavity length of the dielectric cavity Δd is:
Figure PCTCN2019078351-appb-000014
Figure PCTCN2019078351-appb-000014
位移变化量w和电介质腔的腔长变化量Δd成正比。通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长的变化量可以确定第二反射点到导体反射面之间的距离变化量Δd，即电介质腔的腔长变化量Δd。由于第二反射点4到导体反射面11之间的电介质腔的腔长变化范围有限，所以设计传感器时，位移传感器的量程越大，Na与ML的比值越小；位移变化量和电介质腔的腔长变化量始终成正比。The displacement variation w is proportional to the cavity length variation Δd of the dielectric cavity. The change in the distance between the second reflection point and the reflection surface of the conductor Δd can be determined by the change in the resonant frequency/length of the resonant cavity of the open hollow coaxial cable-Fabry-Perot cavity, that is, the cavity length of the dielectric cavity The amount of change Δd. Since the cavity length of the dielectric cavity between the second reflection point 4 and the conductor reflection surface 11 is limited, when designing the sensor, the larger the range of the displacement sensor, the smaller the ratio of Na to ML; the displacement variation and the dielectric cavity The amount of cavity length change is always proportional.
4)基于齿轮进行位移折减的位移传感器4) Displacement sensor based on gear for displacement reduction
基于齿轮进行位移折减的位移传感器，机械结构包括各种齿轮的组合，包含不同种类的齿轮或双层齿轮、齿条、蜗杆等构件，将较大的位移通过一系列的齿轮、齿条、蜗杆等构件对位移进行折减，使得第二反射点4到导体反射面11之间电介质腔12的腔长发生较小的变化，其变化量为Δd，即电介质腔的腔长变化量为Δd。位移变化量和Δd始终成正比。电介质腔的腔长测量装置的外壳和内杆导体区域的端面在一个断面上，即第二反射点4所在的平面，而且该平面平行于导体反射面11，即腔长测量装置的轴线垂直于导体反射面11。Displacement sensor based on gears for displacement reduction. The mechanical structure includes a combination of various gears, including different types of gears or double-layer gears, racks, worms and other components. Large displacements are passed through a series of gears, racks, and worms. The worm and other components reduce the displacement, so that the cavity length of the dielectric cavity 12 between the second reflection point 4 and the conductor reflection surface 11 has a small change, the amount of change is Δd, that is, the cavity length of the dielectric cavity is changed by Δd . The displacement change is always proportional to Δd. The housing of the cavity length measuring device of the dielectric cavity and the end surface of the conductor area of the inner rod are on a section, that is, the plane where the second reflection point 4 is located, and the plane is parallel to the conductor reflection surface 11, that is, the axis of the cavity length measuring device is perpendicular to Conductor reflection surface 11.
图20(c)为本申请实施例的基于双层齿轮进行位移折减的位移传感器的结构示意图。位移传感器探杆102通过固定在外壳1上的直线运动轴承109，探杆可以左右移动而不会晃动。位移传感器探杆102端面带有第一齿条103，位移发生变化时，带动第一齿条103移动，齿条103对接双层齿轮104上的大直径齿轮，双层齿轮上的小直径齿轮对接第二齿条107，该齿条的端面固定有导体反射面11的载体15，载体 的左端面为导体反射面11，导体反射面11的法线与腔长测量装置外壳1和内杆2的轴线平行，且腔长测量装置的外壳1、双层齿轮的转轴106和直线运动轴承84均固定到基板116上。位移发生较大变化时，通过双层齿轮进行位移折减，使得带有导体反射面的齿条发生较小的位移变化，即第二反射点4到导体反射面11之间的电介质腔12的腔长发生较小的变化，变化量为Δd。通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长的变化量，可以确定第二反射点到导体反射面之间的电介质腔12的腔长变化量Δd。通过标定，可以得到位移变化量与Δd之间的线性关系式。如果位移传感器的量程较大，一个双层齿轮对位移的折减不够，可以通过多个双层齿轮的组合对位移进行折减。FIG. 20(c) is a schematic structural diagram of a displacement sensor based on double-layer gears for displacement reduction according to an embodiment of the application. The displacement sensor rod 102 passes through the linear motion bearing 109 fixed on the housing 1, and the rod can move left and right without shaking. The displacement sensor rod 102 has a first rack 103 on the end surface. When the displacement changes, the first rack 103 is driven to move. The rack 103 is connected to the large-diameter gear on the double-layer gear 104, and the small-diameter gear on the double-layer gear is connected The second rack 107, the end of the rack is fixed with the carrier 15 of the conductor reflection surface 11, the left end of the carrier is the conductor reflection surface 11, the normal of the conductor reflection surface 11 and the cavity length measuring device housing 1 and the inner rod 2 The axes are parallel, and the housing 1 of the cavity length measuring device, the rotating shaft 106 of the double-layer gear and the linear motion bearing 84 are all fixed to the base plate 116. When the displacement changes greatly, the double-layer gear is used to reduce the displacement, so that the rack with the conductor reflection surface has a smaller displacement change, that is, the dielectric cavity 12 between the second reflection point 4 and the conductor reflection surface 11 The cavity length changes slightly, and the amount of change is Δd. Through the variation of the resonant frequency/length of the resonant cavity of the open hollow coaxial cable-Fabry-Perot cavity, the variation Δd of the cavity length of the dielectric cavity 12 between the second reflection point and the reflection surface of the conductor can be determined. Through calibration, the linear relationship between the displacement change and Δd can be obtained. If the range of the displacement sensor is large, and a double-layer gear can not reduce the displacement enough, the displacement can be reduced by the combination of multiple double-layer gears.
图20(d)为本申请实施例的基于蜗杆113进行位移折减的位移传感器的结构示意图。位移传感器探杆102带有第一齿条103，位移发生变化时，带动第一齿条103移动，第一齿条103对接带有蜗杆113的第一齿轮112，即一个齿轮112和一个蜗杆113共用一个转轴111，齿轮转动带动蜗杆转动。蜗杆113对接第二齿轮110，此时，较大的位移转通过蜗杆进行折减，带动第二齿轮110发生较小转动。第二齿轮110对接第二齿条107，第二齿条的端面是导体反射面的载体15，载体15的左端面是导体反射面11，导体反射面11的轴线与腔长测量装置外壳1和内杆2的轴线平行，且腔长测量装置的外壳1、齿轮106的转轴、蜗杆113的转轴111、固定转轴111的轴承114和两个直线运动轴承84均固定到基板116上。通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长的变化量可以确定第二反射点4到导体反射面11之间的电介质腔12的腔长变化量Δd。通过标定，可以得到位移变化量w与电介质腔的腔长变化量Δd之间的线性关系。FIG. 20(d) is a schematic structural diagram of a displacement sensor based on a worm 113 for displacement reduction according to an embodiment of the application. The displacement sensor probe 102 has a first rack 103. When the displacement changes, the first rack 103 is driven to move. The first rack 103 is connected to the first gear 112 with a worm 113, namely a gear 112 and a worm 113 Sharing a rotating shaft 111, the rotation of the gear drives the rotation of the worm. The worm 113 is connected to the second gear 110. At this time, the larger displacement is reduced by the worm, and the second gear 110 is driven to rotate slightly. The second gear 110 is connected to the second rack 107. The end surface of the second rack is the carrier 15 of the conductor reflection surface. The left end surface of the carrier 15 is the conductor reflection surface 11. The axis of the conductor reflection surface 11 and the cavity length measuring device housing 1 and The axis of the inner rod 2 is parallel, and the housing 1 of the cavity length measuring device, the rotating shaft of the gear 106, the rotating shaft 111 of the worm 113, the bearing 114 of the fixed rotating shaft 111, and the two linear motion bearings 84 are all fixed to the base plate 116. The change in cavity length of the dielectric cavity 12 between the second reflection point 4 and the conductor reflection surface 11 can be determined by the change in the resonant frequency/cavity length of the open hollow coaxial cable-Fabry-Perot cavity. . Through calibration, the linear relationship between the displacement change w and the cavity length change Δd of the dielectric cavity can be obtained.
实施例十：基于测量折射率的传感器Embodiment ten: sensor based on measuring refractive index
图21为本申请实施例的测量折射率或腐蚀的传感器的结构示意图。两者的原理相同，均在第二反射点到导体发射面之间距离不变的情况下，即电介质腔的腔长不变的情况下，通过测量第二反射点到导体反射面之间的电介质腔腔内填充的物质的折射率来反映这些参数。FIG. 21 is a schematic structural diagram of a sensor for measuring refractive index or corrosion according to an embodiment of the application. The principle of the two is the same. Under the condition that the distance between the second reflection point and the emission surface of the conductor is constant, that is, the cavity length of the dielectric cavity is constant, the distance between the second reflection point and the reflection surface of the conductor is measured. The refractive index of the material filled in the dielectric cavity reflects these parameters.
1)测量折射率的传感器1) Sensor for measuring refractive index
第一种折射率传感器，电介质腔的腔长测量装置的外壳1和内杆2在左，导体反射面11在右，每个腔长测量装置的内杆导体区域的右端面作为第二反射点4，内杆导体区域的端面4和导体反射面11之间不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接，即电介质腔腔内没有电阻率小于预设阈值的导体；外壳1导体区域的端面和内杆端面可以是同一个平面，也可以在内杆端面的右边，此时外壳和导体反射面之间可以用导体连接，也可以用绝缘体连接，也可以不连接。导体反射面11在第二反射点4的右端，第二反射点4所在的平面平行于导体反射面11，第二反射点4和导体反射面11之间的几何距离d保持不变，即电介质腔12的几何腔长d不变。第二反射点4左端的外壳1和内杆2之间带有密封结构116，使得待测折射率的液体、固体或气体均填充在第二反射点4所在平面与导体反射面11之间。由于电介质腔腔内填充物的折射率不同，所以导致放入填充物前后，测出的电介质腔的实际腔长发生变化，该腔长大小d'与折射率的大小有关，从而导致开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生变化。通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长的大小，可以确定第二反射点和导体反射面之间的距离d'，即放入填充物后，电介质腔的腔长为d'，通过d和d'的比值可以得到填充的液体或固体或气体的折射率。为了方便测量，外壳1和导体反射面11之间可以部分连接，导体反射面11的结构至少包括多孔结构，方便液体或气体渗入电介质腔的腔内，从而对折射率进行测量。The first type of refractive index sensor, the housing 1 and inner rod 2 of the dielectric cavity length measuring device are on the left, the conductor reflection surface 11 is on the right, and the right end surface of the inner rod conductor area of each cavity length measuring device is used as the second reflection point 4. There is no contact between the end surface 4 of the conductor area of the inner rod and the reflective surface 11 of the conductor, or connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold, that is, there is no resistivity less than a preset threshold in the dielectric cavity Conductor; the end face of the conductor area of the shell 1 and the end face of the inner rod can be the same plane, or the right side of the end face of the inner rod. At this time, the shell and the reflective surface of the conductor can be connected by a conductor, or an insulator, or not connection. The conductor reflection surface 11 is at the right end of the second reflection point 4, the plane of the second reflection point 4 is parallel to the conductor reflection surface 11, and the geometric distance d between the second reflection point 4 and the conductor reflection surface 11 remains unchanged, that is, the dielectric The geometric cavity length d of the cavity 12 remains unchanged. A sealing structure 116 is provided between the housing 1 and the inner rod 2 at the left end of the second reflection point 4 so that the liquid, solid or gas of the refractive index to be measured is filled between the plane where the second reflection point 4 is located and the conductor reflection surface 11. Since the refractive index of the filling in the dielectric cavity is different, the actual cavity length of the dielectric cavity measured before and after the filling is changed. The cavity length d'is related to the refractive index, resulting in an open hollow The resonant frequency/length of the coaxial cable-Fabry-Perot resonant cavity changes. The distance d'between the second reflection point and the reflective surface of the conductor can be determined through the resonant frequency of the open hollow coaxial cable-Fabry-Perot resonant cavity/the length of the resonant cavity, that is, after inserting the filler, The cavity length of the dielectric cavity is d', and the refractive index of the filled liquid or solid or gas can be obtained by the ratio of d and d'. In order to facilitate measurement, the housing 1 and the conductive reflective surface 11 may be partially connected. The structure of the conductive reflective surface 11 at least includes a porous structure to facilitate the penetration of liquid or gas into the cavity of the dielectric cavity to measure the refractive index.
第二种折射率传感器，外壳和内杆在左，内杆的导体区域和导体反射面11连接，外壳导体区域的端面在内杆端面的左边，即在导体反射面11的左边，此时每个传感器的外壳1导体区域的右端面作为第二反射点4；外壳导体区域的端面4和导体反射面11之间不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接。导体反射面11在第二反射点4的右端，第二反射点4所在的平面平行于导体反射面11，第二反射点4和导体反射面11之间的几何距离d保持不变，即电介质腔12的几何腔长d不变。外壳1与内杆2之间在第二反射点4左端的区域内带有密封结构116，使得待测折射率的液体、固体或气体均填充在第二反射点所在平面与导体反射面之间。电介质腔12的几何腔长d不变，放入填充物后，测出的电介质腔的腔长为d'，通过d和d'的比值可以得到填充的液体或固体或气体的折射率。In the second type of refractive index sensor, the shell and inner rod are on the left, the conductor area of the inner rod is connected to the conductor reflection surface 11, and the end surface of the conductor area of the shell is on the left side of the inner rod end surface, that is, on the left side of the conductor reflection surface 11. The right end surface of the conductor area of the housing 1 of the sensor is used as the second reflection point 4; the end surface 4 of the housing conductor area and the conductor reflection surface 11 are not in contact, or connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold . The conductor reflection surface 11 is at the right end of the second reflection point 4, the plane of the second reflection point 4 is parallel to the conductor reflection surface 11, and the geometric distance d between the second reflection point 4 and the conductor reflection surface 11 remains unchanged, that is, the dielectric The geometric cavity length d of the cavity 12 remains unchanged. There is a sealing structure 116 in the area at the left end of the second reflection point 4 between the shell 1 and the inner rod 2, so that the liquid, solid or gas of the refractive index to be measured is filled between the plane where the second reflection point is located and the reflective surface of the conductor . The geometric cavity length d of the dielectric cavity 12 does not change. After the filling is placed, the measured cavity length of the dielectric cavity is d'. The refractive index of the filled liquid or solid or gas can be obtained by the ratio of d and d'.
2)测量腐蚀的传感器2) Sensor to measure corrosion
第一种工况是导体反射面发生腐蚀。测量腐蚀的传感器结构与测量折射率的传感器的结构相同，第二反射点4和导体反射面11之间的距离d保持不变，即电介质腔12的几何腔长d不变。在第二反射点4和导体反射面之间11之间的电介质腔12为空腔，导体反射面11的载体15可以是实心的，也可以做成孔隙结构，加大腐蚀面积，增加传感器的灵敏度。导体反射面11的材料选择可以发生腐蚀的材料，例如建筑钢。外壳1与导体反射面11之间也采用部分连接或者用孔隙结构连接，使得液体或气体更容易浸入电介质腔内部。导体反射面11的材料发生腐蚀后，会产生腐蚀产物，例如铁锈，使得第二反射点4到导体 反射面11之间电介质腔12腔内的电介质的折射率发生变化，从而改变开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长。根据开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长的变化量，可测出电介质腔的腔长变化量，并得到折射率的变化量，从而确定腐蚀程度。The first working condition is corrosion on the reflective surface of the conductor. The structure of the sensor for measuring corrosion is the same as that of the sensor for measuring refractive index, and the distance d between the second reflection point 4 and the conductor reflection surface 11 remains unchanged, that is, the geometric cavity length d of the dielectric cavity 12 remains unchanged. The dielectric cavity 12 between the second reflection point 4 and the conductor reflection surface 11 is a cavity. The carrier 15 of the conductor reflection surface 11 can be solid or made into a porous structure to increase the corrosion area and increase the sensor Sensitivity. The material of the reflective surface 11 of the conductor is selected to be corroded, such as construction steel. The shell 1 and the conductor reflection surface 11 are also partially connected or connected with a pore structure, so that liquid or gas can more easily penetrate into the dielectric cavity. After the material of the conductive reflective surface 11 is corroded, corrosion products, such as rust, will be produced, which will change the refractive index of the dielectric in the dielectric cavity 12 between the second reflective point 4 and the conductive reflective surface 11, thereby changing the open hollow concentric Resonant frequency of the shaft cable-Fabry-Perot cavity/cavity length. According to the change of the resonant frequency/length of the resonant cavity of the open hollow coaxial cable-Fabry-Perot cavity, the change of the cavity length of the dielectric cavity can be measured, and the change of the refractive index can be obtained to determine the degree of corrosion .
第二种工况是导体反射面不发生腐蚀。当导体反射面11的载体15不发生腐蚀时，要保证外界的腐蚀产物可以浸入外壳1和导体反射面11之间的电介质腔区域。可以将导体反射面11做成孔隙结构，也可以将外壳1与导体反射面11之间采用部分连接或者用孔隙结构连接。当腐蚀产物浸入外壳1和导体反射面11之间的电介质腔12时，该区域的折射率发生改变，从而改变开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长。通过谐振频率/谐振腔腔长的变化量和电介质腔的几何腔长d的大小，可以测出折射率的变化量，从而确定腐蚀程度。The second working condition is that there is no corrosion on the reflective surface of the conductor. When the carrier 15 of the conductive reflective surface 11 does not corrode, it is necessary to ensure that external corrosion products can penetrate into the dielectric cavity area between the housing 1 and the conductive reflective surface 11. The conductive reflective surface 11 can be made into a pore structure, or the housing 1 and the conductive reflective surface 11 can be partially connected or connected by a pore structure. When the corrosion product immerses in the dielectric cavity 12 between the housing 1 and the conductor reflection surface 11, the refractive index of this area changes, thereby changing the resonant frequency of the open hollow coaxial cable-Fabry Perot cavity/cavity cavity long. Through the change of the resonant frequency/cavity length and the geometric cavity length d of the dielectric cavity, the change of the refractive index can be measured to determine the degree of corrosion.

Claims (32)

  1. 一种电介质腔的腔长测量装置，所述腔长测量装置包括：传感器、解调装置；其中，A cavity length measuring device for a dielectric cavity. The cavity length measuring device includes a sensor and a demodulation device; wherein,
    所述传感器包括开放式空心同轴电缆-法布里珀罗谐振腔、第一反射点、第二反射点、导体反射面、电介质腔；其中，所述第一反射点设置在所述开放式空心同轴电缆-法布里珀罗谐振腔内部的第一位置处，所述第二反射点设置在所述开放式空心同轴电缆-法布里珀罗谐振腔内部的第二位置处，所述导体反射面设置在所述开放式空心同轴电缆-法布里珀罗谐振腔内部的第三位置处，所述第一反射点和所述第二反射点之间不发生相对移动，所述第一反射点和所述第二反射点的反射率大于等于预设阈值；所述第二反射点与所述导体反射面之间为电介质腔，所述电介质腔腔内的电介质是导体或绝缘体，是固体、液体或气体；所述导体反射面能够发生移动或变形，导致所述电介质腔的腔长发生变化；所述电介质腔的腔内介质的折射率可以发生变化，导致所述电介质腔的腔长发生变化；The sensor includes an open hollow coaxial cable-Fabry Perot cavity, a first reflection point, a second reflection point, a conductor reflection surface, and a dielectric cavity; wherein, the first reflection point is set in the open At a first position inside the hollow coaxial cable-Fabry-Perot cavity, the second reflection point is set at a second position inside the open-type hollow coaxial cable-Fabry-Perot cavity, The conductor reflection surface is arranged at a third position inside the open hollow coaxial cable-Fabry Perot cavity, and there is no relative movement between the first reflection point and the second reflection point, The reflectivity of the first reflection point and the second reflection point is greater than or equal to a preset threshold; a dielectric cavity is formed between the second reflection point and the conductor reflection surface, and the dielectric in the dielectric cavity is a conductor Or an insulator, which is a solid, liquid or gas; the reflective surface of the conductor can move or deform, causing the cavity length of the dielectric cavity to change; the refractive index of the medium in the dielectric cavity can change, causing the The cavity length of the dielectric cavity changes;
    所述解调装置与所述传感器相连，所述解调装置包括解调主板和同轴电缆，用于对所述开放式空心同轴电缆-法布里珀罗谐振腔内的微波信号进行分析，得到所述开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔长，其中，所述开放式空心同轴电缆-法布里珀罗谐振腔的腔长为所述第一反射点与所述第二反射点之间的距离，且该距离受到所述第二反射点和所述导体反射面之间距离变化的影响；当所述第一反射点和所述第二反射点之间距离不变且所述第二反射点和所述导体反射面之间距离发生变化时，所述开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率会发生变化，基于所述谐振频率的变化量确定所述第二反射点和所述导体反射面之间的距离，所述第二反射点和所述导体反射面之间距离为所述电介质腔的腔长。The demodulation device is connected to the sensor, and the demodulation device includes a demodulation main board and a coaxial cable, and is used to analyze the microwave signal in the open hollow coaxial cable-Fabry Perot cavity , Obtain the resonant frequency/cavity length of the open hollow coaxial cable-Fabry Perot cavity, wherein the cavity length of the open hollow coaxial cable-Fabry Perot cavity is The distance between the first reflection point and the second reflection point, and the distance is affected by the change in the distance between the second reflection point and the conductor reflection surface; when the first reflection point and the second reflection point When the distance between the two reflection points is constant and the distance between the second reflection point and the conductor reflection surface changes, the resonant frequency of the open hollow coaxial cable-Fabry Perot cavity will change , Determining the distance between the second reflection point and the conductor reflection surface based on the change in the resonance frequency, and the distance between the second reflection point and the conductor reflection surface is the cavity length of the dielectric cavity .
  2. 根据权利要求1所述的电介质腔的腔长测量装置，其中，所述传感器还包括外壳、或者外壳加内杆，所述外壳为所述传感器的外导体，所述内杆为所述传感器的内导体；其中，The cavity length measuring device of the dielectric cavity according to claim 1, wherein the sensor further comprises a housing or a housing plus an inner rod, the housing is the outer conductor of the sensor, and the inner rod is the Inner conductor; where,
    所述开放式空心同轴电缆-法布里珀罗谐振腔的一端连接至射频同轴电缆转接头，所述射频同轴电缆转接头通过同轴电缆连接至所述解调主板；或者，所述开放式空心同轴电缆-法布里珀罗谐振腔的一端直接连接至解调主板上；One end of the open hollow coaxial cable-Fabry Perot cavity is connected to a radio frequency coaxial cable adapter, and the radio frequency coaxial cable adapter is connected to the demodulation main board through a coaxial cable; or, One end of the open hollow coaxial cable-Fabry Perot cavity is directly connected to the demodulation main board;
    所述开放式空心同轴电缆-法布里珀罗谐振腔的另一端，外壳端面与导体反射面之间用导体连接，内杆端面与导体反射面之间用绝缘体或电阻率大于等于预设阈值的导体连接，这种情况下，第二反射点是内杆导体区域的端面；或者，内杆端面与导体反射面之间用导体连接，外壳端面与导体反射面之间用绝缘体或电阻率大于等于预设阈值的导体连接，这种情况下，第二反射点是外壳导体区域的端面；或者，外壳和内杆端面与导体反射面之间均用绝缘体或电阻率大于等于预设阈值的导体连接且外壳和内杆的端面在同一断面上，这种情况下，第二反射点是外壳和内杆的端面；或者，外壳和内杆端面与导体反射面之间均用绝缘体或电阻率大于等于预设阈值的导体连接且外壳和内杆的端面不在同一断面上，这种情况下，第二反射点介于外壳端面和内杆端面之间。At the other end of the open hollow coaxial cable-Fabry Perot resonant cavity, the shell end surface and the conductor reflection surface are connected by a conductor, and the inner rod end surface and the conductor reflection surface are connected by an insulator or a resistivity greater than or equal to a preset Threshold conductor connection. In this case, the second reflection point is the end surface of the inner rod conductor area; alternatively, the inner rod end surface and the conductor reflection surface are connected by a conductor, and the shell end surface and the conductor reflection surface are connected with an insulator or resistivity Conductor connection greater than or equal to the preset threshold. In this case, the second reflection point is the end surface of the conductor area of the outer shell; or, between the end surface of the outer shell and the inner rod and the reflective surface of the conductor, an insulator or a resistivity greater than or equal to the preset threshold is used The conductors are connected and the end faces of the outer shell and the inner rod are on the same section. In this case, the second reflection point is the end faces of the outer shell and the inner rod; alternatively, insulators or resistivity are used between the end faces of the outer shell and the inner rod and the conductor reflection surface The conductors greater than or equal to the preset threshold are connected and the end faces of the outer shell and the inner rod are not on the same cross section. In this case, the second reflection point is between the end face of the outer shell and the end face of the inner rod.
  3. 根据权利要求1所述的电介质腔的腔长测量装置，其中，所述腔长测量装置为反射式腔长测量装置，在所述反射式腔长测量装置中：The cavity length measuring device of a dielectric cavity according to claim 1, wherein the cavity length measuring device is a reflective cavity length measuring device, and in the reflective cavity length measuring device:
    所述传感器的一端连接射频同轴电缆转接头，所述射频同轴电缆转接头通过同轴电缆连接所述解调主板；或者，所述传感器的一端直接连接在解调主板上，即传感器的一端可以通过第一射频同轴电缆转接头连接解调主板，也可以直接连接解调主板；或者，所述解调主板直接连接在贯穿外壳壁的同轴射频转接头上，该同轴射频转接头有一段导体插入到外壳内部；One end of the sensor is connected to a radio frequency coaxial cable adapter, and the radio frequency coaxial cable adapter is connected to the demodulation main board through a coaxial cable; or, one end of the sensor is directly connected to the demodulation main board, that is, the sensor's One end can be connected to the demodulation main board through the first radio frequency coaxial cable adapter, or it can be directly connected to the demodulation main board; or, the demodulation main board is directly connected to the coaxial radio frequency adapter that penetrates the shell wall, and the coaxial radio frequency converter The connector has a section of conductor inserted into the shell;
    所述传感器的另一端为第二反射点和导体反射面。The other end of the sensor is a second reflection point and a conductor reflection surface.
  4. 根据权利要求1所述的电介质腔的腔长测量装置，其中，所述腔长测量装置为透射式腔长测量装置，在所述透射式腔长测量装置中：The cavity length measuring device for a dielectric cavity according to claim 1, wherein the cavity length measuring device is a transmissive cavity length measuring device, and in the transmissive cavity length measuring device:
    所述传感器的一端连接第一射频同轴电缆转接头，所述传感器的外壳壁连接第二射频同轴电缆转接头，所述解调主板的一端通过同轴电缆连接所述第一射频同轴电缆转接头，所述解调主板的另一端通过同轴电缆连接所述第二射频同轴电缆转接头；或者，One end of the sensor is connected to a first radio frequency coaxial cable adapter, the housing wall of the sensor is connected to a second radio frequency coaxial cable adapter, and one end of the demodulation main board is connected to the first radio frequency coaxial cable through a coaxial cable. A cable adapter, the other end of the demodulation main board is connected to the second radio frequency coaxial cable adapter through a coaxial cable; or,
    所述传感器的一端连接第一射频同轴电缆转接头，所述解调主板的一端通过同轴电缆连接所述第一射频同轴电缆转接头；所述传感器的外壳壁直接连接解调主板，即外壳壁可以通过第二射频同轴电缆转接头连接解调主板，也可以直接连接解调主板；或者，One end of the sensor is connected to a first radio frequency coaxial cable adapter, one end of the demodulation main board is connected to the first radio frequency coaxial cable adapter through a coaxial cable; the housing wall of the sensor is directly connected to the demodulation main board, That is, the shell wall can be connected to the demodulation main board through the second radio frequency coaxial cable adapter, or it can be directly connected to the demodulation main board; or,
    所述传感器的一端直接连接在解调主板上，即传感器的一端可以通过第一射频同轴电缆转接头连接解调主板，也可以直接连接解调主板；所述传感器的外壳壁连接第二射频同轴电缆转接头，所述第二射频同轴电缆转接头通过同轴电缆连接所述解调主板；或者，One end of the sensor is directly connected to the demodulation main board, that is, one end of the sensor can be connected to the demodulation main board through the first radio frequency coaxial cable adapter, or directly connected to the demodulation main board; the housing wall of the sensor is connected to the second radio frequency A coaxial cable adapter, the second radio frequency coaxial cable adapter is connected to the demodulation main board through a coaxial cable; or,
    所述传感器的一端直接连接在解调主板上，即传感器的一端可以通过第一射频同轴电缆转接头连接 解调主板，也可以直接连接解调主板；所述传感器的外壳壁上直接连接解调主板，即外壳壁可以通过第二射频同轴电缆转接头连接解调主板，也可以直接连接解调主板。One end of the sensor is directly connected to the demodulation main board, that is, one end of the sensor can be connected to the demodulation main board through the first radio frequency coaxial cable adapter, or it can be directly connected to the demodulation main board; the housing wall of the sensor is directly connected to the demodulation main board. The modulation main board, that is, the shell wall can be connected to the demodulation main board through the second radio frequency coaxial cable adapter, or directly connected to the demodulation main board.
  5. 根据权利要求4所述的电介质腔的腔长测量装置，其中，所述腔长测量装置为透射式腔长测量装置时，所述腔长测量装置至少具有以下模式：正反馈环路模式、无环路模式；其中，The cavity length measuring device of the dielectric cavity according to claim 4, wherein when the cavity length measuring device is a transmissive cavity length measuring device, the cavity length measuring device has at least the following modes: positive feedback loop mode, no Loop mode; where,
    在所述正反馈环路模式中，所述解调主板包括：定向耦合器、波形放大器、计频器/频谱仪；In the positive feedback loop mode, the demodulation main board includes: a directional coupler, a waveform amplifier, and a frequency counter/spectrometer;
    在所述无环路模式中，所述解调主板为矢量网络分析仪、或微波发生源加标量网络分析仪、或微波时域反射仪、或解调频谱的解调电路板。In the loop-free mode, the demodulation main board is a vector network analyzer, or a microwave generating source plus a scalar network analyzer, or a microwave time domain reflectometer, or a demodulation circuit board for demodulating spectrum.
  6. 根据权利要求5所述的电介质腔的腔长测量装置，其中，所述正反馈环路模式包括：微波正反馈环路、基于光电振荡器的正反馈环路；其中，The cavity length measuring device of a dielectric cavity according to claim 5, wherein the positive feedback loop mode includes: a microwave positive feedback loop and a positive feedback loop based on an optoelectronic oscillator; wherein,
    在所述微波正反馈环路中，包括：同轴电缆环路、微波定向耦合器、微波放大器或者微波功率分离器，所述解调主板中的各器件通过同轴电缆环路连接；The microwave positive feedback loop includes: a coaxial cable loop, a microwave directional coupler, a microwave amplifier or a microwave power splitter, and each device in the demodulation main board is connected by a coaxial cable loop;
    在所述基于光电振荡器的正反馈环路中，包括：高速光电解调器、激光或发光二极管光源、光纤环路、光纤耦合器、微波放大器或者光学放大器、微波定向耦合器或者微波功率分离器，所述解调主板中的各器件通过光纤环路连接。The positive feedback loop based on the optoelectronic oscillator includes: high-speed optoelectronic demodulator, laser or light emitting diode light source, fiber loop, fiber coupler, microwave amplifier or optical amplifier, microwave directional coupler or microwave power separation Each device in the demodulation main board is connected through an optical fiber loop.
  7. 根据权利要求1至6任一项所述的电介质腔的腔长测量装置，其中，所述传感器内具有：外壳或者外壳加内杆、导体反射面；其中，所述外壳由连续导体形成，所述内杆由连续导体形成，所述导体反射面由连续导体形成，所述连续导体为：单个导电零件、或者多个导电零件连接而成，或者绝缘体上的导体镀层，所述导电零件的材料为导电材料，所述导电材料至少包括：金属、非金属；非金属至少包括：石墨，或碳纤维，或导电陶瓷；The cavity length measuring device for a dielectric cavity according to any one of claims 1 to 6, wherein the sensor has: a housing or a housing plus an inner rod, and a conductor reflection surface; wherein the housing is formed of a continuous conductor, so The inner rod is formed by a continuous conductor, the reflective surface of the conductor is formed by a continuous conductor, the continuous conductor is: a single conductive part, or a plurality of conductive parts connected together, or a conductor plating on an insulator, and the material of the conductive part It is a conductive material, the conductive material includes at least: metal, non-metal; non-metal includes at least: graphite, or carbon fiber, or conductive ceramic;
    所述导体反射面的形状是实体结构，或者平面结构，或者曲面结构；所述导体反射面的形状是孔隙结构，或者圆形结构，或者长条形结构，或者多个导体拼接而成，或者导体和绝缘体拼接而成；所述导体反射面由单一导体材料构成，或者由不同种类的导体材料构成，或者由一部分导体材料和一部分绝缘体材料构成；所述导体反射面的导体区域是连续的或者非连续的；The shape of the conductor reflecting surface is a solid structure, or a plane structure, or a curved structure; the shape of the conductor reflecting surface is a porous structure, or a circular structure, or a long strip structure, or a plurality of conductors are spliced together, or The conductor and the insulator are spliced together; the conductor reflection surface is composed of a single conductor material, or is composed of different kinds of conductor materials, or is composed of a part of a conductor material and a part of an insulator material; the conductor area of the conductor reflection surface is continuous or Non-continuous
    所述导体反射面的摆放满足以下要求：要确保外壳和内杆的包络面沿着轴线方向扫掠出的柱体，与导体反射面所在区域有交集，其中，所述导体反射面与外壳和内杆的轴线垂直或者不垂直；所述导体反射面是平面或者是曲面；The placement of the conductor reflection surface meets the following requirements: it is necessary to ensure that the cylinder swept along the axial direction of the envelope surface of the outer shell and the inner rod has an intersection with the area where the conductor reflection surface is located. The axes of the shell and the inner rod are vertical or not; the conductor reflection surface is flat or curved;
    所述导体反射面与第二反射点之间端面距离的变化，通过以下至少一种方式来实现：所述导体反射面的移动；所述导体反射面的变形；所述导体反射面与第二反射点之间的电介质的折射率发生改变；The change of the end surface distance between the conductor reflection surface and the second reflection point is achieved by at least one of the following methods: movement of the conductor reflection surface; deformation of the conductor reflection surface; The refractive index of the dielectric between the reflection points changes;
    所述导体反射面的尺寸大于等于外壳的直径，对外壳的端面形成全覆盖；或者，所述导体反射面尺寸小于外壳的直径。The size of the conductor reflection surface is greater than or equal to the diameter of the shell, and forms a full coverage of the end surface of the shell; or, the size of the conductor reflection surface is smaller than the diameter of the shell.
  8. 根据权利要求7所述的电介质腔的腔长测量装置，其中，所述外壳的断面为闭合形状或者非闭合形状；The cavity length measuring device of the dielectric cavity according to claim 7, wherein the cross section of the housing is a closed shape or a non-closed shape;
    所述传感器包括外壳加内杆的情况下：When the sensor includes a housing and an inner rod:
    所述外壳包裹所述内杆，或者所述外壳不包裹所述内杆；The outer shell wraps the inner rod, or the outer shell does not wrap the inner rod;
    所述外壳和内杆是一个平面上的两条导体镀层，或者是空间上的两个导体平行杆；The outer shell and the inner rod are two conductor plating layers on a plane, or two conductor parallel rods in space;
    所述外壳与所述内杆同轴，或者所述外壳与所述内杆不同轴。The housing is coaxial with the inner rod, or the housing and the inner rod are not coaxial.
  9. 根据权利要求7所述的电介质腔的腔长测量装置，其中，The cavity length measuring device of the dielectric cavity according to claim 7, wherein:
    在所述第一反射点和所述第二反射点之间，以及所述外壳和所述内杆之间的开放式空心同轴电缆-法布里珀罗谐振腔内，填充的介质为以下之一：真空、气体、液体、固体；Between the first reflection point and the second reflection point, and the open hollow coaxial cable-Fabry-Perot cavity between the housing and the inner rod, the filling medium is as follows One: vacuum, gas, liquid, solid;
    在所述第二反射点与所述导体反射面之间的电介质腔腔内，填充的介质为以下之一：真空、气体、液体、固体。In the dielectric cavity between the second reflection point and the conductor reflection surface, the filled medium is one of the following: vacuum, gas, liquid, and solid.
  10. 根据权利要求7所述的电介质腔的腔长测量装置，其中，所述第一反射点和所述第二反射点设置在所述外壳和所述内杆之间；所述第二反射点是所述外壳或所述内杆的端面；或者，当所述外壳和所述内杆都不和所述导体反射面接触，且所述外壳和所述内杆的长度不同时，所述第二反射点介于所述外壳端面和所述内杆端面之间；其中，The cavity length measuring device of the dielectric cavity according to claim 7, wherein the first reflection point and the second reflection point are arranged between the housing and the inner rod; the second reflection point is The outer shell or the end surface of the inner rod; or, when neither the outer shell nor the inner rod is in contact with the conductor reflection surface, and the outer shell and the inner rod have different lengths, the second The reflection point is between the end face of the shell and the end face of the inner rod; wherein,
    所述绝缘体或电阻率大于等于预设阈值的导体是固体、液体或气体；对于所述第一反射点和所述第二反射点中的一个或两个反射点，反射点可以是导体或绝缘体，反射点与所述外壳和所述内杆满足如下位置关系：The insulator or the conductor with the resistivity greater than or equal to the preset threshold is solid, liquid or gas; for one or two of the first reflection point and the second reflection point, the reflection point may be a conductor or an insulator , The reflection point satisfies the following positional relationship with the outer shell and the inner rod:
    反射点与外壳和内杆均用电阻率小于预设阈值的导体连接；或者，The reflection point, the outer shell and the inner rod are both connected with a conductor whose resistivity is less than a preset threshold; or,
    反射点与外壳不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接，反射点与内杆用电阻率小于预设阈值的导体连接；或者，The reflection point is not in contact with the outer shell, or connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold, and the reflection point is connected with the inner rod with a conductor with a resistivity less than the preset threshold; or,
    反射点与内杆不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接，反射点与外壳用电阻率小于预设阈值的导体连接；或者，The reflection point is not in contact with the inner rod, or is connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold, and the reflection point is connected with the shell with a conductor with a resistivity less than the preset threshold; or,
    反射点与外壳和内杆均不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接；The reflection point is not in contact with the shell and the inner rod, or connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold;
    所述第二反射点和所述导体反射面满足如下位置关系：The second reflection point and the conductor reflection surface satisfy the following positional relationship:
    外壳和内杆与导体反射面均不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接，且外壳和内杆的导体区域的端面是同一个平面时，第二反射点为外壳和内杆的共同端面；或者，When the shell and the inner rod are not in contact with the reflective surface of the conductor, or are connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold, and the end faces of the conductor area of the shell and the inner rod are on the same plane, the second reflection point Is the common end face of the outer shell and the inner rod; or,
    外壳和内杆与导体反射面均不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接，且外壳和内杆的导体区域的端面不是同一个平面时，第二反射点为外壳端面和内杆端面之间的一个点；或者，When the shell and the inner rod are not in contact with the reflective surface of the conductor, or are connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold, and the end faces of the conductor area of the shell and the inner rod are not the same plane, the second reflection point Is a point between the end face of the outer shell and the end face of the inner rod; or,
    外壳与导体反射面用电阻率小于预设阈值的导体连接，且内杆与导体反射面不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接时，第二反射点为内杆的端面；或者，When the shell and the reflective surface of the conductor are connected with a conductor with a resistivity less than the preset threshold, and the inner rod is not in contact with the reflective surface of the conductor, or connected with an insulator, or connected with a conductor with a resistivity greater than or equal to the preset threshold, the second reflection point is The end face of the inner rod; or,
    外壳与导体反射面不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接，且内杆与导体反射面用电阻率小于预设阈值的导体连接时，第二反射点为外壳的端面。When the shell is not in contact with the reflective surface of the conductor, or connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold, and the inner rod and the reflective surface of the conductor are connected with a conductor with a resistivity less than the preset threshold, the second reflection point is The end face of the shell.
  11. 根据权利要求3所述的电介质腔的腔长测量装置，其中，在反射式腔长测量装置中：The cavity length measuring device for a dielectric cavity according to claim 3, wherein, in the reflective cavity length measuring device:
    所述传感器包括外壳加内杆时，所述外壳和所述内杆的第一端均与所述射频同轴电缆转接头连接，所述射频同轴电缆转接头通过同轴电缆连接所述解调主板；或者所述外壳和所述内杆的第一端直接与解调主板连接，即外壳和内杆的第一端可以通过第一射频同轴电缆转接头连接解调主板，也可以直接连接解调主板；所述第一反射点和所述第二反射点至少有一部分设置在所述外壳加内杆的包络范围之内；When the sensor includes a housing and an inner rod, both the housing and the first end of the inner rod are connected to the radio frequency coaxial cable adapter, and the radio frequency coaxial cable adapter is connected to the solution through a coaxial cable. Or the first end of the housing and the inner rod is directly connected to the demodulation motherboard, that is, the first end of the housing and the inner rod can be connected to the demodulation motherboard through the first RF coaxial cable adapter, or directly Connecting to the demodulation main board; at least a part of the first reflection point and the second reflection point are set within the envelope range of the housing and the inner rod;
    所述传感器只有外壳且没有内杆时，所述外壳的第一端与所述射频同轴电缆转接头连接，所述射频同轴电缆转接头通过同轴电缆连接所述解调主板；或者外壳的第一端直接与解调主板连接，即外壳的第一端可以通过第一射频同轴电缆转接头连接解调主板，也可以直接连接解调主板；所述第一反射点和所述第二反射点设置在所述外壳的包络范围之内。When the sensor has only a housing and no inner rod, the first end of the housing is connected to the radio frequency coaxial cable adapter, and the radio frequency coaxial cable adapter is connected to the demodulation main board through a coaxial cable; or the housing The first end of the housing is directly connected to the demodulation main board, that is, the first end of the housing can be connected to the demodulation main board through the first radio frequency coaxial cable adapter, or can be directly connected to the demodulation main board; the first reflection point and the second The two reflection points are arranged within the envelope range of the shell.
  12. 根据权利要求4和5所述的电介质腔的腔长测量装置，其中，在透射式腔长测量装置中，所述腔长测量装置至少具有以下模式：正反馈环路模式、无环路模式：The cavity length measuring device for a dielectric cavity according to claims 4 and 5, wherein, in the transmissive cavity length measuring device, the cavity length measuring device has at least the following modes: a positive feedback loop mode and a no loop mode:
    所述传感器包括外壳和内杆时，所述外壳和所述内杆的第一端均与第一射频同轴电缆转接头连接，所述第一射频同轴电缆转接头通过第一同轴电缆连接到解调主板上；或者所述外壳和所述内杆的第一端均直接与解调主板连接，即外壳和内杆的第一端可以通过第一射频同轴电缆转接头连接解调主板，也可以直接连接解调主板；所述外壳壁与第二射频同轴电缆转接头连接，所述第二射频同轴电缆转接头通过第二同轴电缆连接到解调主板上；或者所述外壳壁直接与解调主板连接，即外壳壁可以通过第二射频同轴电缆转接头连接解调主板，也可以直接连接解调主板；所述第一反射点和所述第二反射点至少有一部分设置在所述外壳加内杆的包络范围之内；When the sensor includes a housing and an inner rod, the first ends of the housing and the inner rod are both connected to a first radio frequency coaxial cable adapter, and the first radio frequency coaxial cable adapter passes through the first coaxial cable Connect to the demodulation main board; or both the housing and the first end of the inner rod are directly connected to the demodulation main board, that is, the first end of the housing and the inner rod can be connected to the demodulation main board through a first radio frequency coaxial cable adapter The main board can also be directly connected to the demodulation main board; the housing wall is connected to the second radio frequency coaxial cable adapter, and the second radio frequency coaxial cable adapter is connected to the demodulation main board through the second coaxial cable; or The housing wall is directly connected to the demodulation main board, that is, the housing wall can be connected to the demodulation main board through a second radio frequency coaxial cable adapter, or directly connected to the demodulation main board; the first reflection point and the second reflection point are at least A part is arranged within the envelope range of the outer shell and the inner rod;
    所述传感器只有外壳且没有内杆时，所述外壳的第一端与第一射频同轴电缆转接头连接，所述第一射频同轴电缆转接头通过第一同轴电缆连接到解调主板上；或者所述外壳的第一端直接与解调主板连接，即外壳的第一端可以通过第一射频同轴电缆转接头连接解调主板，也可以直接连接解调主板；所述外壳壁与第二射频同轴电缆转接头连接，所述第二射频同轴电缆转接头通过第二同轴电缆连接到解调主板上；或者所述外壳壁直接与解调主板连接，即外壳壁可以通过第二射频同轴电缆转接头连接解调主板，也可以直接连接解调主板；所述第一反射点和所述第二反射点至少有一部分设置在所述外壳的包络范围之内；When the sensor has only a housing and no inner rod, the first end of the housing is connected to the first radio frequency coaxial cable adapter, and the first radio frequency coaxial cable adapter is connected to the demodulation main board through the first coaxial cable On; or the first end of the housing is directly connected to the demodulation motherboard, that is, the first end of the housing can be connected to the demodulation motherboard through the first radio frequency coaxial cable adapter, or directly connected to the demodulation motherboard; the housing wall Connected to the second radio frequency coaxial cable adapter, the second radio frequency coaxial cable adapter is connected to the demodulation main board through the second coaxial cable; or the housing wall is directly connected to the demodulation main board, that is, the housing wall can be The demodulation main board is connected through the second radio frequency coaxial cable adapter, or it can be directly connected to the demodulation main board; at least a part of the first reflection point and the second reflection point are arranged within the envelope range of the housing;
    其中，所述第二射频同轴电缆转接头设置在所述第一反射点和所述第二反射点之间。Wherein, the second radio frequency coaxial cable adapter is arranged between the first reflection point and the second reflection point.
  13. 根据权利要求7所述的电介质腔的腔长测量装置，其中，The cavity length measuring device of the dielectric cavity according to claim 7, wherein:
    所述第一反射点为导体，且与所述内杆和所述外壳均连接，使所述内杆和所述外壳之间短路；所述第二反射点为所述外壳或所述内杆的端面；The first reflection point is a conductor and is connected to both the inner rod and the outer shell, so as to make a short circuit between the inner rod and the outer shell; the second reflection point is the outer shell or the inner rod End face
    当所述外壳为闭合形状时，所述外壳内部形状是圆形或矩形，所述内杆断面也是圆形或矩形，所述第一反射点在所述外壳和所述内杆之间构成短路，所述第二反射点是所述外壳或所述内杆端面断开形成的高反射；When the housing is in a closed shape, the internal shape of the housing is circular or rectangular, the cross-section of the inner rod is also circular or rectangular, and the first reflection point forms a short circuit between the housing and the inner rod , The second reflection point is a high reflection formed by the disconnection of the end surface of the outer shell or the inner rod;
    所述第一反射点是一个尺寸小于预设面积的断面，至少可以通过一根或多根圆杆或者方杆垂直于传感器内杆的轴线方向放置，或者在外壳和内杆之间固定一个有一定透射率的多孔结构，所述第一反射点覆盖所述外壳和所述内杆之间区域的面积小于所述外壳和所述内杆之间包络面积；所述第一反射点对所述外壳和所述内杆构成短路，或者所述外壳和所述内杆之间连接件的电阻大于等于预设阈值，或者所述外壳和内杆之间无连接件；所述第二反射点是外壳端面，或内杆端面，或外壳导体区域的端面和内杆导体区域的端面之间的一个点；所述导体反射面与所述外壳和所述内杆不同时用电阻率小于预设阈值的导体连接；The first reflection point is a cross-section with a size smaller than a preset area. At least one or more round rods or square rods can be placed perpendicular to the axis of the inner rod of the sensor, or a cross section can be fixed between the housing and the inner rod. With a porous structure with a certain transmittance, the area of the first reflection point covering the area between the outer shell and the inner rod is smaller than the envelope area between the outer shell and the inner rod; The outer shell and the inner rod form a short circuit, or the resistance of the connecting piece between the outer shell and the inner rod is greater than or equal to a preset threshold, or there is no connecting piece between the outer shell and the inner rod; the second reflection point It is the end face of the outer shell, or the end face of the inner rod, or a point between the end face of the outer shell conductor area and the end face of the inner rod conductor area; the conductor reflection surface is different from the outer shell and the inner rod with a resistivity less than a preset Threshold conductor connection;
    所述第一反射点和所述第二反射点的位置固定，通过改变所述导体反射面到第二反射点之间的距离，能够实现对位移、或应变、或压强、或角度、或液位、或流速的测量；其中，通过以下至少一种方式改变所述导体反射面到所述第二反射点之间的距离：所述导体反射面的移动，所述导体反射面的变形，所述导体反射面和第二反射点之间的介质的折射率的改变。The positions of the first reflection point and the second reflection point are fixed. By changing the distance between the conductor reflection surface and the second reflection point, the displacement, strain, pressure, angle, or liquid can be adjusted. Measurement of the position or flow velocity; wherein the distance between the conductor reflection surface and the second reflection point is changed by at least one of the following methods: the movement of the conductor reflection surface, the deformation of the conductor reflection surface, and the The change in the refractive index of the medium between the reflective surface of the conductor and the second reflective point.
  14. 根据权利要求7所述的电介质腔的腔长测量装置，其中，The cavity length measuring device of the dielectric cavity according to claim 7, wherein:
    通过改变所述内杆断面形状和尺寸来调节反射率，可去掉在所述外壳和所述内杆之间添加的第一反射点，将射频同轴电缆转接头与所述外壳和所述内杆连接处作为第一反射点；其中，将射频同轴电缆转接头与所述外壳和所述内杆连接处作为第一反射点时，所述内杆直径与所述外壳内径比值介于0到1之间；或者，By changing the cross-sectional shape and size of the inner rod to adjust the reflectivity, the first reflection point added between the housing and the inner rod can be removed, and the radio frequency coaxial cable adapter can be connected to the housing and the inner rod. The rod connection is used as the first reflection point; where, when the connection between the radio frequency coaxial cable adapter and the housing and the inner rod is used as the first reflection point, the ratio of the diameter of the inner rod to the inner diameter of the housing is between 0 Between 1; or,
    将第一反射点设置在所述外壳和所述内杆连接射频同轴电缆转接头的位置；或者，将第一反射点设置在所述外壳和所述内杆连接解调频谱的解调电路板的位置，其中，外壳和内杆的第一端面直接连接解调电路板，或者外壳和内杆的第一端面通过射频同轴电缆转接头连接解调电路板。The first reflection point is set at the position where the housing and the inner rod are connected to the RF coaxial cable adapter; or the first reflection point is set at the housing and the inner rod to connect the demodulation circuit of the demodulation spectrum The position of the board, wherein the housing and the first end face of the inner rod are directly connected to the demodulation circuit board, or the first end face of the housing and the inner rod is connected to the demodulation circuit board through a radio frequency coaxial cable adapter.
  15. 根据权利要求2至7中任一项所述的电介质腔的腔长测量装置，其中，所述腔长测量装置应用于压强传感器中；The cavity length measuring device for a dielectric cavity according to any one of claims 2 to 7, wherein the cavity length measuring device is applied to a pressure sensor;
    外壳和内杆一端连接解调装置；外壳的另一端连接膜片，连接材料是导体或者是绝缘体，膜片是导体或者膜片的第一侧面有导体镀膜；第一反射点固定在外壳和内杆端面与解调装置之间，第二反射点为外壳或内杆的端面，第一反射点和第二反射点均为固定点；膜片靠近外壳和内杆的第一侧面为导体反射面；内杆端面与膜片的第一侧面不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接，第二反射点与导体反射面之间的空间为电介质腔；膜片的第二侧面是受压的一面，且膜片与内杆的端面之间有一定距离，处于非接触状态，或使用电阻率小于预设阈值的液体或固体填充，即电介质腔的腔内是气体、液体或固体；当压强发生改变时，膜片挠度发生变化，第二反射点到膜片的第一侧面之间的距离会发生变化，即电介质腔的腔长发生变化，从而改变开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔长，通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长变化量确定电介质腔的腔长变化量，从而确定压强的大小；膜片变形后，第一侧面由平面变成曲面，其中，膜片的挠度变化量受到膜片各个点挠度的影响，膜片的挠度变化量介于最小挠度和最大挠度之间；One end of the housing and the inner rod is connected to the demodulation device; the other end of the housing is connected to a diaphragm, the connection material is a conductor or an insulator, the diaphragm is a conductor or the first side of the diaphragm is coated with a conductor; the first reflection point is fixed on the housing and the inner Between the rod end surface and the demodulation device, the second reflection point is the end surface of the shell or the inner rod, the first reflection point and the second reflection point are both fixed points; the first side of the diaphragm close to the shell and the inner rod is the conductor reflection surface The end face of the inner rod is not in contact with the first side surface of the diaphragm, or is connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold, and the space between the second reflection point and the reflective surface of the conductor is a dielectric cavity; the diaphragm The second side is the side under pressure, and there is a certain distance between the diaphragm and the end surface of the inner rod, in a non-contact state, or filled with liquid or solid with a resistivity less than a preset threshold, that is, the cavity of the dielectric cavity is Gas, liquid or solid; when the pressure changes, the deflection of the diaphragm changes, and the distance between the second reflection point and the first side of the diaphragm changes, that is, the cavity length of the dielectric cavity changes, thereby changing the open type Hollow coaxial cable-Fabry-Perot resonant cavity resonant frequency/resonant cavity length, the cavity of the dielectric cavity is determined by the resonant frequency/resonant cavity length change of the open hollow coaxial cable-Fabry-Perot resonant cavity The amount of change is long to determine the size of the pressure; after the diaphragm is deformed, the first side surface changes from a flat surface to a curved surface. The deflection change of the diaphragm is affected by the deflection of each point of the diaphragm, and the deflection change of the diaphragm is between the smallest Between deflection and maximum deflection;
    其中，通过以下几种方式能够增大压强传感器的灵敏度：一是减少膜片的第一侧面与第二反射点之间的初始距离；二是减小膜片厚度；三是增大膜片直径，加大外壳端面处的内径和外径，在扩径结构的端面外圈连接直径大于等于外壳直径的膜片，膜片的外圈与扩径结构的端面密封连接。Among them, the sensitivity of the pressure sensor can be increased in the following ways: one is to reduce the initial distance between the first side of the diaphragm and the second reflection point; the second is to reduce the thickness of the diaphragm; the third is to increase the diameter of the diaphragm , Enlarge the inner diameter and outer diameter at the end face of the shell, connect the outer ring of the end face of the expanded diameter structure to a diaphragm with a diameter greater than or equal to the diameter of the shell, and the outer ring of the diaphragm is sealed to the end face of the expanded diameter structure.
  16. 根据权利要求2至7中任一项所述的电介质腔的腔长测量装置，其中，所述腔长测量装置应用于压强传感器中；The cavity length measuring device for a dielectric cavity according to any one of claims 2 to 7, wherein the cavity length measuring device is applied to a pressure sensor;
    外壳和内杆一端连接解调装置；外壳和内杆的另一端是切断的端面，不连接任何物体；第一反射点固定在外壳和内杆端面与解调装置之间，第二反射点为外壳或内杆的端面，第一反射点和第二反射点均为固定点；采用波登管测量压强，波登管的端面或管上的一点会产生一定的移动量；针对波登管上A点的移动，在A点固定连接一个导体反射面，该导体反射面为刚体，导体反射面的法线平行于压强改变后波登管在A点处的移动方向；导体反射面与外壳和内杆的端面均不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接，并有一定距离；导体反射面与第二反射点之间的空间为电介质腔；导体反射面的法线平行于外壳和内杆的轴线；One end of the shell and the inner rod is connected to the demodulation device; the other end of the shell and the inner rod is a cut end face, not connected to any objects; the first reflection point is fixed between the shell and the end face of the inner rod and the demodulation device, and the second reflection point is The end face of the outer shell or inner rod, the first reflection point and the second reflection point are fixed points; the pressure is measured by the Bourdon tube, the end face of the Bourdon tube or a point on the tube will produce a certain amount of movement; for the Bourdon tube For the movement of point A, a conductor reflection surface is fixedly connected to point A. The conductor reflection surface is a rigid body. The normal line of the conductor reflection surface is parallel to the moving direction of the Bourdon tube at point A after the pressure changes; the conductor reflection surface and the shell The end faces of the inner rods are not in contact, or are connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold, and have a certain distance; the space between the conductor reflection surface and the second reflection point is a dielectric cavity; the conductor reflection surface The normal of is parallel to the axis of the shell and the inner rod;
    将电介质腔的腔长测量装置和波登管基座固定到一个刚性物体上，腔长测量装置和波登管基座不发生相对移动；由于导体反射面的法线、外壳和内杆的轴线、以及A点的移动方向均平行，所以当压强发生改变时，波登管上A点会发生移动，带动导体反射面发生移动，导致导体反射面到第二反射点之间的距离发生变化，即电介质腔的腔长发生变化，从而改变开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长，通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长变化量确定电介质腔的腔长变化量，从而确定压强的大小；所述波登管的类型至少包括C型波登管、或C型组合波登管、或螺旋型波登管、或麻花型波登管、或圆形波登管。Fix the cavity length measuring device and the Bourdon tube base of the dielectric cavity to a rigid object. The cavity length measuring device and the Bourdon tube base do not move relative to each other; due to the normal of the conductor reflection surface, the shell and the axis of the inner rod The moving directions of, and point A are parallel, so when the pressure changes, point A on the Bourdon tube will move, driving the conductor reflection surface to move, resulting in a change in the distance between the conductor reflection surface and the second reflection point. That is, the cavity length of the dielectric cavity changes, thereby changing the resonant frequency/cavity length of the open hollow coaxial cable-Fabry-Perot cavity. The resonant frequency/cavity length variation determines the cavity length variation of the dielectric cavity, thereby determining the pressure; the type of the Bourdon tube includes at least a C-shaped Bourdon tube, a C-shaped combined Bourdon tube, or a spiral type Bourdon tube, or twist-type Bourdon tube, or round Bourdon tube.
  17. 根据权利要求2至7中任一项所述的电介质腔的腔长测量装置，其中，所述腔长测量装置应用于加速度传感器中；The cavity length measuring device for a dielectric cavity according to any one of claims 2 to 7, wherein the cavity length measuring device is applied to an acceleration sensor;
    外壳和内杆一端连接解调装置；外壳的另一端连接带有一定刚度的结构，所述结构至少包括膜片或梁，连接材料是导体或者是绝缘体；第一反射点固定在外壳和内杆端面与解调装置之间，第二反射点为外壳或内杆的端面，第一反射和第二反射点均为固定点；膜片或梁靠近外壳和内杆的第一侧面为导体反射面；内杆端面与膜片或梁的第一侧面无导体连接，有一定距离；膜片或梁第二侧面中心处固定有一个质量为m的质量块，质量块在加速度为a的情况下，会对膜片或梁产生力F，F＝ma，使得膜片或梁的中心点挠度发生变化，从而使得导体反射面到第二反射点之间的距离发生变化，即电介质腔的腔长发生变化，最终使得开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生变化，通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长变化量确定电介质腔的腔长变化量，从而确定加速度的大小；One end of the shell and the inner rod is connected with a demodulation device; the other end of the shell is connected with a structure with a certain rigidity, the structure at least includes a diaphragm or a beam, and the connecting material is a conductor or an insulator; the first reflection point is fixed on the shell and the inner rod Between the end face and the demodulation device, the second reflection point is the end face of the shell or the inner rod, the first reflection and the second reflection point are both fixed points; the first side of the diaphragm or beam close to the shell and the inner rod is the conductor reflection surface ; The end face of the inner rod is connected to the first side of the diaphragm or beam without a conductor, and there is a certain distance; a mass of m is fixed at the center of the second side of the diaphragm or beam, and the mass is at acceleration a. A force F is generated on the diaphragm or beam, F=ma, so that the deflection of the center point of the diaphragm or beam changes, so that the distance between the conductor reflection surface and the second reflection point changes, that is, the cavity length of the dielectric cavity changes. The change finally causes the resonant frequency/cavity length of the open hollow coaxial cable-Fabry-Perot cavity to change, through the open hollow coaxial cable-Fabry-Perot cavity resonant frequency/cavity The cavity length change determines the cavity length change of the dielectric cavity, thereby determining the magnitude of the acceleration;
    膜片的直径或梁的长度与外壳的外径或外壳端面扩径区域的外径相等，增大膜片厚度或梁的刚度，减小质量块的重量，加速度传感器的灵敏度会降低，适合大量程加速度的测量；扩大膜片直径或增大梁 的长度，减小膜片厚度或梁的刚度，增加质量块的重量，加速度传感器的灵敏度会增大，适合小量程加速度的测量；当增大膜片直径时，可采用外壳端面加上一个扩径结构来实现，所述扩径结构至少包括喇叭口或扩大直径的导体，膜片的外圈与扩径结构的端面密封连接；当增加梁的长度时，外壳端面要沿着直径方向，向两边分别增加一个悬臂支撑，两个支撑的端面用来作为梁的两个支点，采用连接件进行连接，两端采用刚性连接或者做成两端铰接的简支梁；或者做成悬臂梁，悬臂梁端面固定有质量块，质量块靠近外壳和内杆端面的一侧是导体反射面。The diameter of the diaphragm or the length of the beam is equal to the outer diameter of the shell or the outer diameter of the expanded diameter area of the shell end. Increase the thickness of the diaphragm or the stiffness of the beam, reduce the weight of the mass, and the sensitivity of the acceleration sensor will decrease, which is suitable for a large number of Acceleration measurement; expand the diameter of the diaphragm or increase the length of the beam, reduce the thickness of the diaphragm or the stiffness of the beam, increase the weight of the mass, and the sensitivity of the acceleration sensor will increase, which is suitable for the measurement of small-scale acceleration; The diameter of the sheet can be realized by adding an enlarged diameter structure to the end surface of the shell. The enlarged diameter structure includes at least a bell mouth or an enlarged diameter conductor, and the outer ring of the diaphragm is connected to the end surface of the enlarged diameter structure in a sealed manner; When the length is long, the end surface of the shell should be along the diameter direction, add a cantilever support to both sides, the two support end surfaces are used as the two fulcrums of the beam, and the connecting piece is used to connect, the two ends are rigidly connected or the two ends are hinged. Or it can be made into a cantilever beam, the end surface of the cantilever beam is fixed with a mass block, and the side of the mass block close to the shell and the end surface of the inner rod is the conductor reflection surface.
  18. 根据权利要求7或15所述的电介质腔的腔长测量装置，其中，所述腔长测量装置应用于流速传感器中，所述流速传感器为第一种流速传感器或第二种流速传感器；The cavity length measuring device of the dielectric cavity according to claim 7 or 15, wherein the cavity length measuring device is applied to a flow velocity sensor, and the flow velocity sensor is a first type flow velocity sensor or a second type flow velocity sensor;
    在第一种流速传感器中，使用压强传感器进行改装，利用不同流速产生的压强不同，通过测量压强的大小得到流速；所述流速传感器至少包括板孔流速传感器、或U型管压差流速传感器；在流体从左到右运动的情况下，在所述压强传感器旁边固定挡板，使流体冲击到挡板时产生附加压强，利用挡板左边固定的压强传感器测出所述挡板左边的附加压强，通过附加压强的大小确定流速；In the first type of flow rate sensor, the pressure sensor is used for modification, and the pressure generated by different flow rates is used to obtain the flow rate by measuring the size of the pressure; the flow rate sensor includes at least a plate hole flow rate sensor or a U-shaped pipe differential pressure flow rate sensor; When the fluid moves from left to right, the baffle is fixed next to the pressure sensor, so that additional pressure is generated when the fluid impacts the baffle, and the additional pressure on the left side of the baffle is measured by the pressure sensor fixed on the left side of the baffle , Determine the flow rate by the size of the additional pressure;
    在第二种流速传感器中，第一反射点固定在外壳和内杆端面与解调装置之间，第二反射点为外壳或内杆的端面，第一反射点和第二反射点均为固定点；流速不同，则对插入流体中的探杆端面探头的推力不同，使得探头移动距离发生变化，且探杆上的一点会绕着铰发生转动，所述铰通过连接零件固定到传感器的外壳上，探杆的另一端连接导体反射面，所述导体反射面和内杆端面之间不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接；其中，在第二种流速传感器的第一种结构中：导体反射面和外壳之间由弹性材料连接，弹性材料是导体或者是绝缘体；测量时，探头的移动会带动探杆发生转动，从而带动探杆另一头发生反向移动，带动导体反射面发生移动，导致导体反射面和外壳之间的弹性材料发生拉伸或压缩，从而改变了导体反射面到第二反射点之间的距离，即改变了电介质腔的腔长；其中，流速越大，对探头产生的推力越大，柔性导体材料的拉伸或压缩量也会越大，电介质腔的腔长变化量也越大，从而使得同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长变化量也越大；在第二种流速传感器的第二种结构中：外壳连接膜片，第二反射点是内杆端面，导体反射面的载体是膜片，流体推动探头产生的力带动探杆另一头发生反向移动，通过连接第二反射点载体的带铰零件挤压膜片的中心点，使膜片的挠度发生变化，电介质腔的腔长发生变化，从而使得同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生变化；所述第一种结构和所述第二种结构均通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长变化量确定电介质腔的腔长变化量，从而确定流速的大小。In the second type of flow rate sensor, the first reflection point is fixed between the housing and the end face of the inner rod and the demodulation device, the second reflection point is the end face of the housing or the inner rod, and the first and second reflection points are fixed Point; the flow rate is different, the thrust of the probe on the end face of the probe inserted in the fluid is different, so that the moving distance of the probe changes, and a point on the probe will rotate around the hinge, the hinge is fixed to the housing of the sensor by connecting parts The other end of the probe rod is connected to the reflective surface of the conductor, and the reflective surface of the conductor and the end surface of the inner rod are not in contact, or connected with an insulator, or connected with a conductor with a resistivity greater than or equal to a preset threshold; wherein, in the second type In the first structure of the flow sensor: the reflective surface of the conductor and the shell are connected by an elastic material, the elastic material is a conductor or an insulator; during measurement, the movement of the probe will drive the probe to rotate, thereby driving the other end of the probe to reverse To move, drive the conductor reflection surface to move, causing the elastic material between the conductor reflection surface and the shell to stretch or compress, thereby changing the distance between the conductor reflection surface and the second reflection point, that is, changing the cavity of the dielectric cavity Long; among them, the greater the flow rate, the greater the thrust generated on the probe, the greater the stretch or compression of the flexible conductor material, and the greater the change in the cavity length of the dielectric cavity, so that the coaxial cable-Fabry The resonant frequency/length of the resonant cavity of the Perot cavity will change more; in the second structure of the second flow velocity sensor: the shell is connected to the diaphragm, the second reflection point is the end surface of the inner rod, and the carrier of the reflection surface of the conductor It is a diaphragm. The force generated by the fluid pushing the probe drives the other end of the probe to move in the opposite direction. The hinged part connected to the second reflection point carrier squeezes the center point of the diaphragm to change the deflection of the diaphragm. The cavity length changes, so that the resonant frequency/cavity length of the coaxial cable-Fabry-Perot resonant cavity changes; the first structure and the second structure both pass through an open hollow coaxial cable -The resonant frequency of the Fabry-Perot resonant cavity/cavity length variation determines the cavity length variation of the dielectric cavity, thereby determining the size of the flow velocity.
  19. 根据权利要求2至7中任一项所述的电介质腔的腔长测量装置，其中，所述腔长测量装置应用于测力计中，所述测力计为第一种测力计或第二种测力计；The cavity length measuring device for a dielectric cavity according to any one of claims 2 to 7, wherein the cavity length measuring device is applied to a dynamometer, and the dynamometer is a first type dynamometer or a second dynamometer. Two types of dynamometers;
    第一种测力计，是利用外壳端面梁或膜片的刚度和挠度做出的测力计；外壳和内杆一端连接解调装置；外壳的另一端连接有带有一定刚度的结构，所述结构至少包括膜片或梁，连接材料是导体或者是绝缘体；第一反射点固定在外壳和内杆端面与解调装置之间，第二反射点为外壳或内杆的端面，第一反射点和第二反射点均为固定点，所以第二反射点到导体反射面之间的距离变化量等于第一反射点到导体反射面之间的距离变化量；膜片或梁靠近外壳和内杆的第一侧面为导体反射面；内杆端面与膜片或梁的第一侧面之间的电介质腔无导体连接，有一定距离；当膜片或梁的中心点受到作用力F时，膜片或梁的中心点挠度发生变化，从而使得导体反射面到第二反射点之间的距离发生变化，即电介质腔的腔长发生变化，最终使得开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生变化，通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长变化量确定电介质腔的腔长变化量，从而确定力的大小；The first type of dynamometer is a dynamometer made using the stiffness and deflection of the shell end beam or diaphragm; one end of the shell and the inner rod is connected with a demodulation device; the other end of the shell is connected with a structure with a certain rigidity, so The structure at least includes a diaphragm or a beam, the connecting material is a conductor or an insulator; the first reflection point is fixed between the shell and the end face of the inner rod and the demodulation device, and the second reflection point is the end face of the shell or the inner rod. The point and the second reflection point are both fixed points, so the change in the distance between the second reflection point and the reflection surface of the conductor is equal to the change in the distance between the first reflection point and the reflection surface of the conductor; the diaphragm or beam is close to the housing and the inner surface. The first side of the rod is the conductor reflection surface; the dielectric cavity between the end face of the inner rod and the diaphragm or the first side of the beam has no conductor connection, and there is a certain distance; when the center point of the diaphragm or the beam receives a force F, the diaphragm The deflection of the center point of the sheet or beam changes, so that the distance between the reflective surface of the conductor and the second reflective point changes, that is, the cavity length of the dielectric cavity changes, and finally the open hollow coaxial cable-Fabry Perot The resonant frequency/cavity length of the resonant cavity changes, and the cavity length change of the dielectric cavity is determined by the resonant frequency of the open hollow coaxial cable-Fabry-Perot resonant cavity/cavity length change to determine the force the size of;
    第二种测力计，是利用外壳的刚度和变形做出的测力计；外壳和内杆一端连接解调装置；外壳的另一端连接一个导体反射面，导体反射面的载体的厚度大于等于预设阈值；第一反射点固定在外壳和内杆端面与解调装置之间，第二反射点为内杆的端面，第一反射点和第二反射点均为固定点，所以第二反射点到导体反射面之间的距离变化量等于第一反射点到导体反射面之间的距离变化量；导体反射面与外壳固定且不和内杆接触，第二反射点与导体反射面之间有一定的距离；当导体反射面的载体受到拉力或压力时，外壳会发生拉伸或压缩，外壳材料的弹性为E，净面积为A，从第一反射点到导体反射面之间的距离为L，受力后，开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生变化，基于开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长的变化量，确定导体反射面到内杆端面之间的距离的变化量，即电介质腔的腔长变化量为Δd，求出的作用力为F＝EA·Δd/L。The second type of dynamometer is a dynamometer made by using the rigidity and deformation of the shell; one end of the shell and the inner rod is connected with the demodulation device; the other end of the shell is connected with a conductive reflective surface, and the thickness of the carrier of the conductive reflective surface is greater than or equal Preset threshold; the first reflection point is fixed between the shell and the end face of the inner rod and the demodulation device, the second reflection point is the end face of the inner rod, the first reflection point and the second reflection point are both fixed points, so the second reflection The change in the distance between the point and the reflective surface of the conductor is equal to the change in the distance between the first reflective point and the reflective surface of the conductor; the reflective surface of the conductor is fixed to the outer shell and does not contact the inner rod, and the second reflective point is between the reflective surface of the conductor There is a certain distance; when the carrier of the reflective surface of the conductor is stretched or compressed, the shell will be stretched or compressed. The elasticity of the shell material is E, the net area is A, and the distance from the first reflection point to the reflective surface of the conductor Is L. After the force is applied, the resonant frequency/cavity length of the open hollow coaxial cable-Fabry-Perot cavity changes, based on the resonant frequency of the open hollow coaxial cable-Fabry-Perot cavity /The amount of change in the cavity length of the resonant cavity determines the amount of change in the distance between the conductor reflection surface and the end surface of the inner rod, that is, the cavity length change of the dielectric cavity is Δd, and the calculated force is F=EA·Δd/L.
  20. 根据权利要求2至7中任一项所述的电介质腔的腔长测量装置，其中，所述腔长测量装置应用于应变计中；The cavity length measuring device of the dielectric cavity according to any one of claims 2 to 7, wherein the cavity length measuring device is applied to a strain gauge;
    所述传感器内具有第一反射点、第二反射点、导体反射面，第一反射点固定在外壳和内杆端面与解调装置之间，第二反射点为外壳或内杆的端面，第一反射点和第二反射点均为固定点；其中，所述第一反射点处的外壳外部固定凸起的结构作为第一固定点，所述导体反射面处的外壳外部固定凸起的结构作 为第二固定点，所述第一固定点和所述第二固定点之间的距离为L；所述第二反射点为内杆的端面，距离导体反射面有一定距离，第二反射点与导体反射面之间不接触，中间是电介质腔，或者，在第二反射点和导体反射面之间的电介质腔腔内填充固体或液体；外壳和内杆的一端或外壳的外壳壁上连接解调装置；外壳分段，由两段导体材料构成，两段导体材料之间采用嵌套结构或导体波纹管连接，或者，外壳不分段，应变发生变化时，外壳材料发生拉伸或压缩；内杆是一个刚体，不分段，第二反射点为内杆端面；The sensor has a first reflection point, a second reflection point, and a conductor reflection surface. The first reflection point is fixed between the housing and the end face of the inner rod and the demodulation device, and the second reflection point is the end face of the housing or the inner rod. A reflection point and a second reflection point are both fixed points; wherein the first reflection point at the outer housing fixed protrusion structure is used as the first fixed point, the conductor reflection surface at the outer housing fixed protrusion structure As the second fixed point, the distance between the first fixed point and the second fixed point is L; the second reflection point is the end surface of the inner rod, and there is a certain distance from the conductor reflection surface, the second reflection point There is no contact with the reflective surface of the conductor, with a dielectric cavity in the middle, or the dielectric cavity between the second reflection point and the reflective surface of the conductor is filled with solid or liquid; the shell and one end of the inner rod or the shell wall of the shell are connected Demodulation device; the shell is segmented, composed of two pieces of conductive material, and the two pieces of conductive material are connected by a nested structure or a conductive corrugated pipe, or the shell is not segmented, and the shell material is stretched or compressed when the strain changes ; The inner rod is a rigid body, not segmented, and the second reflection point is the end face of the inner rod;
    通过所述第一固定点和所述第二固定点能够将所述应变计固定到待检测的物体上或者埋入待检测的介质中，所述待检测的物体或介质发生应变时能够带动所述第一固定点和所述第二固定点发生相对移动，从而带动第一反射点和导体反射面之间发生相对位移Δd，由于第一反射点和第二反射点之间的距离固定，第一反射点和导体反射面之间发生的相对位移等于第二反射点和导体反射面之间发生的相对位移，即电介质腔的腔长发生变化，通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长变化量可求出电介质腔的腔长变化量Δd，从而得到应变的大小为ε＝Δd/L。The strain gauge can be fixed to the object to be detected or buried in the medium to be detected through the first fixed point and the second fixed point. When the object or medium to be detected strains, it can drive the strain gauge. The first fixed point and the second fixed point move relative to each other, thereby driving a relative displacement Δd between the first reflection point and the conductor reflection surface. Since the distance between the first reflection point and the second reflection point is fixed, The relative displacement between a reflection point and the reflective surface of the conductor is equal to the relative displacement between the second reflection point and the reflective surface of the conductor, that is, the cavity length of the dielectric cavity changes, through the open hollow coaxial cable-Fabriper The resonant frequency of the resonant cavity/the resonant cavity length change amount can be obtained the cavity length change amount Δd of the dielectric cavity, and the magnitude of the strain is ε=Δd/L.
  21. 根据权利要求2至7中任一项所述的电介质腔的腔长测量装置，其中，所述腔长测量装置应用于单向倾斜仪中；采用一个测量电介质腔的腔长测量装置做成单向倾斜仪；The cavity length measuring device for a dielectric cavity according to any one of claims 2 to 7, wherein the cavity length measuring device is applied to a unidirectional inclinometer; a cavity length measuring device for measuring the dielectric cavity is used to make a single Inclinometer
    所述传感器内具有第一反射点、第二反射点、导体反射面，第一反射点固定在外壳和内杆端面与解调装置之间，第二反射点为外壳和内杆的端面，第一反射点和第二反射点均为固定点；外壳上固定有支架，用来悬挂柔性绳或两端铰接的弹性杆，重物悬挂在柔性绳或两端铰接的弹性杆的下方；重物靠近外壳和内杆端面的第一端面为导体材料制作的导体反射面；当被测物体带动倾斜仪发生倾斜时，支架和第二反射点会随着被测物体发生倾斜，导体反射面和重物则在重力作用下保持原状态或仅发生转动，因此导体反射面和重物会相对第二反射点发生移动，从而使得导体反射面到第二反射点之间的距离发生变化，即电介质腔的腔长发生变化，最终使得开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生变化，通过谐振频率/谐振腔腔长变化量确定倾斜角度的大小；The sensor has a first reflection point, a second reflection point, and a conductor reflection surface. The first reflection point is fixed between the shell and the end face of the inner rod and the demodulation device. The second reflection point is the end face of the shell and the inner rod. The first reflection point and the second reflection point are both fixed points; a bracket is fixed on the shell to hang a flexible rope or an elastic rod hinged at both ends, and the weight is suspended under the flexible rope or the elastic rod hinged at both ends; The first end face close to the end face of the shell and the inner rod is a conductive reflective surface made of conductive material; when the measured object drives the inclinometer to tilt, the bracket and the second reflective point will tilt with the measured object, and the conductive reflective surface will become heavy. The object remains in its original state or only rotates under the action of gravity. Therefore, the reflective surface of the conductor and the heavy object will move relative to the second reflective point, so that the distance between the reflective surface of the conductor and the second reflective point changes, that is, the dielectric cavity The cavity length changes, and finally the resonant frequency/cavity length of the open hollow coaxial cable-Fabry-Perot cavity changes, and the tilt angle is determined by the resonant frequency/cavity length change;
    导体反射面与第二反射点对应的端面平行放置时，以下第一种工况采用两根或更多等长柔性绳或两端铰接的弹性杆悬挂重物，当这些等长柔性绳或两端铰接的弹性杆在支架上的固定点的连线不垂直于外壳和内杆的轴线时，倾斜角度改变后，导体反射面与第二反射点对应的端面始终平行；以下第二种工况采用前后放置的两根等长柔性绳悬挂重物，两根柔性绳与支架和重物的四个固定点构成的平面垂直于外壳和内杆的轴线，或两端刚接的弹性杆悬挂重物，倾斜角度改变后，导体反射面与第二反射点对应的端面之间的夹角会发生变化；When the conductor reflection surface is placed parallel to the end surface corresponding to the second reflection point, the following first working condition uses two or more equal length flexible ropes or elastic rods hinged at both ends to suspend heavy objects. When these equal length flexible ropes or two When the connecting line of the fixed point of the end-hinged elastic rod on the bracket is not perpendicular to the axis of the shell and the inner rod, after the inclination angle is changed, the reflection surface of the conductor and the corresponding end surface of the second reflection point are always parallel; the following second working condition Two flexible ropes of equal length placed front and rear are used to suspend the weight. The plane formed by the two flexible ropes, the bracket and the four fixed points of the weight is perpendicular to the axis of the shell and the inner rod, or the elastic rod just connected at both ends is used to suspend the weight. After the tilt angle is changed, the angle between the reflective surface of the conductor and the corresponding end surface of the second reflective point will change;
    第一种工况：将所述倾斜仪固定到被测物体上，使用两根平行且等长的左右放置的柔性绳或两端铰接的弹性杆，柔性绳或弹性杆与支架和重物的四个连接点构成的平面平行于外壳和内杆的轴线；弹性杆与支架和重物均采用铰接连接，柔性绳或两端铰接的弹性杆的长度为L，当所述倾斜仪的倾斜角度在所述两根柔性绳或两端铰接的弹性杆构成的平面上发生变化时，导体反射面始终平行于外壳和内杆的端面，通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长变化量确定第二反射点与导体反射面之间的距离变化量，即电介质腔的腔长变化量为Δd，从而得到倾斜角度的变化量为Δθ＝arcsin(Δd/L)；The first working condition: fix the inclinometer to the object to be measured, use two parallel and equal length flexible ropes placed on the left and right or elastic rods hinged at both ends, the flexible rope or elastic rod and the support and the weight The plane formed by the four connection points is parallel to the axis of the shell and the inner rod; the elastic rod is connected with the bracket and the weight by hinge connection, the length of the flexible rope or the elastic rod hinged at both ends is L, when the tilt angle of the inclinometer When a change occurs on the plane formed by the two flexible ropes or the elastic rods hinged at both ends, the reflective surface of the conductor is always parallel to the end faces of the outer shell and the inner rod, through the open hollow coaxial cable-Fabry Perot cavity The change in the resonant frequency/the length of the resonant cavity determines the change in the distance between the second reflection point and the reflective surface of the conductor, that is, the change in the cavity length of the dielectric cavity is Δd, so that the change in the tilt angle is Δθ=arcsin(Δd /L);
    第二种工况：将所述倾斜仪固定到被测物体上，采用前后放置的两根等长柔性绳或两端铰接的弹性杆悬挂重物，两根柔性绳或弹性杆与直接和重物的四个固定点构成的平面垂直于外壳和内杆的轴线；或采用两端刚接的弹性杆，弹性杆数量可以是一根弹性杆，或两根弹性杆，或多根弹性杆，弹性杆的两端与支架和重物刚性连接，柔性绳或两端刚接的弹性杆长度为L，当所述倾斜仪的倾斜角度发生变化时，通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长变化量确定开放式空心同轴电缆-法布里珀罗谐振腔第二反射点与导体反射面之间的距离变化量，即电介质腔的腔长变化量为Δd，需要通过标定得到距离变化量Δd与倾斜角度变化量Δθ之间的关系。The second working condition: fix the inclinometer to the object to be measured, and use two equal-length flexible ropes or elastic rods hinged at both ends to suspend the heavy objects. Two flexible ropes or elastic rods and direct weight The plane formed by the four fixed points of the object is perpendicular to the axis of the shell and the inner rod; or elastic rods with just-connected ends are used. The number of elastic rods can be one elastic rod, or two elastic rods, or multiple elastic rods. The two ends of the elastic rod are rigidly connected with the bracket and the weight. The length of the flexible rope or the elastic rod just connected at both ends is L. When the tilt angle of the inclinometer changes, the open hollow coaxial cable-Fabry The change in the resonant frequency/length of the resonant cavity of the Perot cavity determines the change in the distance between the second reflection point of the open hollow coaxial cable-Fabry-Perot resonant cavity and the reflective surface of the conductor, that is, the cavity length of the dielectric cavity The change is Δd, and the relationship between the distance change Δd and the tilt angle change Δθ needs to be obtained through calibration.
  22. 根据权利要求21所述的电介质腔的腔长测量装置，其中，所述腔长测量装置应用于双向倾斜仪中；The cavity length measuring device of the dielectric cavity according to claim 21, wherein the cavity length measuring device is applied to a two-way inclinometer;
    采用两个不平行且水平放置的电介质腔的腔长测量装置，分别刚性固定到倾斜仪的顶板、底面或侧壁上；两个腔长测量装置，外壳和内杆在同一个端面上，该端面作为第二反射点；以下第一种工况，顶板固定有至少三根平行且等长的柔性绳或两端铰接的弹性杆，且柔性绳或两端铰接的弹性杆与顶板或重物的所有固定点不在一条直线上，此时电介质腔的腔长变化量只与绳长/杆长和倾角有关，与绳或杆的数量以及位置无关；柔性绳或两端铰接的弹性杆底部悬挂重物，且重物上有与柔性绳或两端铰接的弹性杆平行的竖直面，这两个竖直面分别作为两个腔长测量装置的导体反射面，由导体材料制作；以下第二种工况，使用一根或多根弹性杆刚性连接顶板和重物，且重物上的两个导体反射面不平行；The cavity length measuring device adopts two non-parallel and horizontally placed dielectric cavities, which are rigidly fixed to the top, bottom or side wall of the inclinometer respectively; the two cavity length measuring devices, the shell and the inner rod are on the same end surface, the The end surface is used as the second reflection point; in the first working condition below, the top plate is fixed with at least three parallel and equal length flexible ropes or elastic rods hinged at both ends, and the flexible rope or the elastic rods hinged at both ends are connected to the roof or heavy objects. All fixed points are not on a straight line. At this time, the cavity length change of the dielectric cavity is only related to the rope length/pole length and inclination angle, and has nothing to do with the number and position of the rope or rod; the flexible rope or the elastic rod hinged at both ends is suspended from the bottom. The weight has vertical surfaces parallel to the flexible rope or the elastic rods hinged at both ends. These two vertical surfaces are respectively used as the conductor reflection surfaces of the two cavity length measuring devices and are made of conductive materials; the following second In a working condition, one or more elastic rods are used to rigidly connect the top plate and the weight, and the two conductor reflection surfaces on the weight are not parallel;
    第一种工况：使用平行且等长柔性绳或两端铰接的弹性杆连接顶板和重物，将所述倾斜仪固定到被测物体上，使用三根平行且等长的柔性绳或两端铰接的弹性杆，即三根柔性绳或两端铰接的弹性杆分别与顶板和重物连接的三个点构成的两个三角形全等，柔性绳或两端铰接的弹性杆长度为L；当所述三根柔性绳或两端铰接的弹性杆与顶板的三个交点不在一条直线上时，两个倾斜方向分别为绕X轴倾斜和绕Y 轴倾斜；三根绳下方悬挂有一个重物，作为导体反射面的两个面的法线分别为X轴和Y轴；两个电介质腔的腔长测量装置的轴线分别垂直于这两个导体反射面，两个腔长测量装置的外壳和内杆的端面与这两个导体反射面保持一定的距离；当倾斜仪绕着X轴和Y轴均发生倾斜后，两个腔长测量装置的第二反射点到导体反射面之间的距离发生变化，使得开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生变化，可求出两个腔长测量装置的第二反射点到导体反射面之间的距离变化量，即电介质腔的腔长变化量分别为Δd 1和Δd 2；通过第一个腔长测量装置的第二反射点到导体反射面之间的距离变化量Δd 1和绳长L的大小，可确定出倾斜仪绕X轴的倾斜角度变化量Δθ 1＝arcsin(Δd 1/L)；通过第二个腔长测量装置的第二反射点到导体反射面之间的电介质腔的腔长变化量Δd 2和绳长L的大小，可确定出倾斜仪绕Y轴的倾斜角度变化量Δθ 2＝arcsin(Δd 2/L)；只要柔性绳或两端铰接的弹性杆的数量大于等于3根，所有柔性绳或两端铰接的弹性杆都等长且平行放置，且所有柔性绳或两端铰接的弹性杆与顶板的固定点的连线不在一条直线上，两个方向的倾斜角度均可使用该工况的计算方法求得；其中，当使用三个或以上与顶板固定点不在一条直线上的平行且等长的弹性杆铰接连接顶板和重物时，计算方法同所述第一种工况； The first working condition: Use parallel and equal length flexible ropes or elastic rods hinged at both ends to connect the top plate and the heavy object, fix the inclinometer to the measured object, use three parallel and equal length flexible ropes or both ends Articulated elastic rods, that is, three flexible ropes or elastic rods hinged at both ends are connected to the top plate and the weight at three points formed by two triangles congruent, the length of the flexible rope or the elastic rod hinged at both ends is L; When the three intersections of the three flexible ropes or the elastic rods hinged at both ends and the top plate are not in a straight line, the two tilt directions are tilt around the X axis and tilt around the Y axis; there is a heavy object hanging below the three ropes as a conductor The normals of the two surfaces of the reflecting surface are the X axis and the Y axis respectively; the axis of the cavity length measuring device of the two dielectric cavities is perpendicular to the two conductor reflecting surfaces, and the shell and the inner rod of the two cavity length measuring devices The end surface keeps a certain distance from the two conductor reflection surfaces; when the inclinometer is tilted around the X axis and Y axis, the distance between the second reflection point of the two cavity length measuring devices and the conductor reflection surface changes. The resonant frequency/cavity length of the open hollow coaxial cable-Fabry Perot cavity is changed, and the distance change between the second reflection point of the two cavity length measuring devices and the conductor reflection surface can be obtained , That is, the cavity length change of the dielectric cavity is Δd 1 and Δd 2 respectively ; the distance change Δd 1 and the rope length L from the second reflection point of the first cavity length measuring device to the conductor reflection surface can be Determine the inclination angle change of the inclinometer around the X axis Δθ 1 = arcsin(Δd 1 /L); the cavity length change of the dielectric cavity between the second reflection point of the second cavity length measuring device and the reflective surface of the conductor Δd 2 and rope length L can determine the tilt angle change of the inclinometer around the Y axis Δθ 2 = arcsin(Δd 2 /L); as long as the number of flexible ropes or elastic rods hinged at both ends is greater than or equal to 3, All flexible ropes or elastic rods hinged at both ends are of equal length and placed in parallel, and all flexible ropes or elastic rods hinged at both ends are not in a straight line with the fixed point of the top plate, and tilt angles in both directions can be used The calculation method of this working condition is obtained; among them, when three or more parallel and equal-length elastic rods that are not in a straight line with the fixed point of the top plate are used to articulate the top plate and the heavy object, the calculation method is the same as the first method. condition;
    第二种工况：使用弹性杆刚性连接顶板和重物，将所述倾斜仪固定到被测物体上，使用一根弹性杆，或两根弹性杆，或三根以上弹性杆，弹性杆长度均为L，弹性杆与顶板和重物刚性连接；当倾斜仪绕着X轴和Y轴均发生倾斜后，通过两个腔长测量装置的谐振频率/谐振腔腔长变化量可求出第二反射点与导体反射面之间的距离变化量，即电介质腔的腔长变化量为Δd 1和Δd 2，需要通过标定得到两个介质腔的腔长变化量Δd 1、Δd 2与倾斜角度变化量Δθ 1、Δθ 2之间的关系。 The second working condition: Use an elastic rod to rigidly connect the top plate and a heavy object, and fix the inclinometer to the object to be measured. Use one elastic rod, or two elastic rods, or more than three elastic rods. The lengths of the elastic rods are all Is L, the elastic rod is rigidly connected to the top plate and the weight; when the inclinometer is tilted around both the X-axis and the Y-axis, the second can be obtained by the resonant frequency/variation of the resonant cavity length of the two cavity length measuring devices The change in the distance between the reflection point and the reflective surface of the conductor, that is, the change in the cavity length of the dielectric cavity is Δd 1 and Δd 2. The cavity length changes Δd 1 , Δd 2 and the tilt angle of the two dielectric cavities need to be calibrated The relationship between the quantities Δθ 1 and Δθ 2 .
  23. 根据权利要求15或16所述的电介质腔的腔长测量装置，其中，所述腔长测量装置应用于单向倾斜仪中；The cavity length measuring device of the dielectric cavity according to claim 15 or 16, wherein the cavity length measuring device is applied to a unidirectional inclinometer;
    使用两个压强传感器做成单向倾斜仪，所述倾斜仪包括一个固定到被测物体上的密闭容器，所述密闭容器的底部有一定深度的液体，所述倾斜仪利用两个压强传感器的压强差值来确定倾斜角度，这样可以消除温度的影响，无需温度补偿；Use two pressure sensors to make a unidirectional inclinometer, the inclinometer includes a closed container fixed to the object to be measured, the bottom of the closed container has a certain depth of liquid, the inclinometer uses two pressure sensors The pressure difference is used to determine the inclination angle, which can eliminate the influence of temperature without temperature compensation;
    当两个压强传感器刚性固定到容器内部的顶板、底板或侧面时，两个压强传感器随着被测物体的倾斜发生转动；两个压强传感器左右放置，两个压强传感器轴线平行且两条轴线的平行间距为d；外壳和内杆的端面在下方，两个测压膜片或波登管端面膜片浸入液体中，并且距离容器底部相等；当被测物体带动密闭容器在两个压强传感器的轴线构成的平面内发生倾斜时，两个压强传感器浸入液体的深度也会发生变化，所以两个压强传感器测出的压强也会发生变化；又由于两个压强传感器的轴线始终平行，所以两个压强传感器的轴线间距随着倾斜角度的变化也会发生变化；通过两个压强传感器的压强变化量求出浸入深度的变化量ΔL 1和ΔL 2，最终得到倾斜角度的变化量为Δθ＝arctan[(ΔL 2-ΔL 1)/d]； When the two pressure sensors are rigidly fixed to the top, bottom or sides of the container, the two pressure sensors rotate with the inclination of the object to be measured; the two pressure sensors are placed on the left and right, and the two pressure sensors are parallel to each other. The parallel distance is d; the end faces of the outer shell and the inner rod are below, and the two pressure measuring diaphragms or the end face diaphragms of the Bourdon tube are immersed in the liquid, and the distance from the bottom of the container is equal; when the measured object drives the airtight container in the two pressure sensors When the plane formed by the axis is tilted, the depth of the two pressure sensors immersed in the liquid will also change, so the pressure measured by the two pressure sensors will also change; and because the axes of the two pressure sensors are always parallel, the two pressure sensors are always parallel. The axis spacing of the pressure sensor will also change with the change of the tilt angle; the changes in the immersion depth ΔL 1 and ΔL 2 are obtained from the pressure changes of the two pressure sensors, and the change in the tilt angle is finally obtained as Δθ=arctan[ (ΔL 2 -ΔL 1 )/d];
    当两个左右放置的压强传感器的顶部通过柔性绳或两端铰接的弹性杆连接到容器内部的顶板时，两个固定点之间的间距是d，在重力作用下，两个压强传感器的轴线始终竖直，不随着被测物体的倾斜发生转动；外壳和内杆的端面在下方，两个测压膜片或波登管端面膜片浸入液体中，并且距离容器底部相等；当被测物体带动密闭容器在两个压强传感器的轴线构成的平面内发生倾斜时，两个压强传感器浸入液体的深度也会发生变化，所以两个压强传感器测出的压强也会发生变化，通过两个压强传感器的压强变化量求出浸入深度的变化量ΔL 1和ΔL 2，最终得到倾斜角度的度变化量为Δθ＝arcsin[(ΔL 2-ΔL 1)/d]。 When the tops of the two pressure sensors placed on the left and right are connected to the top plate inside the container by flexible ropes or elastic rods hinged at both ends, the distance between the two fixed points is d. Under the action of gravity, the axis of the two pressure sensors It is always vertical and does not rotate with the tilt of the measured object; the end faces of the outer shell and the inner rod are below, and the two pressure measuring diaphragms or Bourdon tube end diaphragms are immersed in the liquid and are equal to the bottom of the container; when the measured object When the airtight container is driven to tilt in the plane formed by the axes of the two pressure sensors, the depth of the two pressure sensors immersed in the liquid will also change, so the pressure measured by the two pressure sensors will also change, through the two pressure sensors Calculate the change in immersion depth ΔL 1 and ΔL 2 from the pressure change of, and finally get the degree change of the inclination angle as Δθ=arcsin[(ΔL 2 -ΔL 1 )/d].
  24. 根据权利要求15或16所述的电介质腔的腔长测量装置，其中，所述腔长测量装置应用于双向倾斜仪中；The cavity length measuring device of the dielectric cavity according to claim 15 or 16, wherein the cavity length measuring device is applied to a two-way inclinometer;
    使用三个压强传感器做成双向倾斜仪，所述倾斜仪包括一个固定到被测物体上的密闭容器，所述密闭容器的底部有一定深度的液体，所述倾斜后利用三个压强传感器的压强差值来确定倾斜角度，这样可以消除温度的影响，无需温度补偿；Three pressure sensors are used to make a two-way inclinometer. The inclinometer includes a closed container fixed to the object to be measured. The bottom of the closed container has a certain depth of liquid. After the tilt, the pressure of the three pressure sensors is used. The difference is used to determine the tilt angle, which can eliminate the influence of temperature without temperature compensation;
    当三个压强传感器刚性固定到容器内部时，三个压强传感器随着被测物体的倾斜发生转动；三个压强传感器的轴线与水平面的三个交点不在一条直线上；所述密闭容器的底部装有液体，所述三个压强传感器测压膜片或波登管端面膜片浸入液体中，并且距离容器底部相等；当所述三个压强传感器的轴线与水平面的三个交点构成一个直角三角形时，两个直角边分别是倾斜方向的X轴和Y轴；第一个压强传感器和第二个压强传感器轴线的平行间距为d 1，第二个压强传感器和第三个压强传感器之间轴线的平行间距为d 2；当倾斜仪绕着X轴和Y轴均发生倾斜后，第一个压强传感器和第二个压强传感器浸入液体的深度也会发生变化，所以两个压强传感器测出的压强也会发生变化，通过两个压强传感器的压强变化量求出浸入深度的变化量ΔL 1和ΔL 2，再根据平行间距d 1的大小，可以确定出倾斜仪绕X轴的倾斜角度变化量为Δθ 1＝arctan[(ΔL 2-ΔL 1)/d 1]；第二个压强传感器和第三个压强传感器浸入液体的深度也会发生变化，所以两个压强传感器测出的压强也会发生变化，通过两个压强传感器的压强变化量求出浸入深度的变化量ΔL 2和ΔL 3，再根据平行间距d 2的大小，可以确定出倾斜仪绕Y轴的倾斜角度变化量为Δθ 2＝arctan[(ΔL 3-ΔL 2)/d 2]； When the three pressure sensors are rigidly fixed to the inside of the container, the three pressure sensors rotate with the inclination of the measured object; the three intersections of the axes of the three pressure sensors and the horizontal plane are not in a straight line; the bottom of the closed container is installed When there is liquid, the three pressure sensor pressure measuring diaphragms or the Bourdon tube end diaphragm are immersed in the liquid and are equal to the bottom of the container; when the three intersections of the axes of the three pressure sensors and the horizontal plane form a right triangle , The two right-angle sides are the X-axis and Y-axis in the tilt direction respectively; the parallel distance between the axis of the first pressure sensor and the second pressure sensor is d 1 , the axis between the second pressure sensor and the third pressure sensor The parallel spacing is d 2 ; when the inclinometer is tilted around the X axis and Y axis, the depth of the first pressure sensor and the second pressure sensor immersed in the liquid will also change, so the pressure measured by the two pressure sensors Changes will also occur. The changes in immersion depth ΔL 1 and ΔL 2 are obtained from the pressure changes of the two pressure sensors, and then according to the parallel spacing d 1 , the tilt angle change of the inclinometer around the X axis can be determined as Δθ 1 = arctan[(ΔL 2 -ΔL 1 )/d 1 ]; the depth of the second pressure sensor and the third pressure sensor immersed in the liquid will also change, so the pressure measured by the two pressure sensors will also change Calculate the immersion depth changes ΔL 2 and ΔL 3 through the pressure changes of the two pressure sensors, and then according to the parallel spacing d 2 , the tilt angle change of the inclinometer around the Y axis can be determined as Δθ 2 = arctan [(ΔL 3 -ΔL 2 )/d 2 ];
    当三个压强传感器顶部通过柔性绳或两端铰接的弹性杆连接到容器内部的顶板时，在重力作用下， 三个压强传感器的轴线始终竖直，不随着被测物体的倾斜发生转动；三个压强传感器的轴线与水平面的三个交点不在一条直线上；所述密闭容器的底部装有液体，所述三个压强传感器测压膜片或波登管端面膜片浸入液体中，并且距离容器底部相等；当所述三个压强传感器的轴线与顶板的三个交点构成一个直角三角形时，两个直角边分别是倾斜方向的X轴和Y轴；第一个压强传感器和第二个压强传感器轴线的平行间距为d 1，第二个压强传感器和第三个压强传感器之间轴线的平行间距为d 2；当倾斜仪绕着X轴和Y轴均发生倾斜后，第一个压强传感器和第二个压强传感器浸入液体的深度也会发生变化，所以两个压强传感器测出的压强也会发生变化，通过两个压强传感器的压强变化量求出浸入深度的变化量ΔL 1和ΔL 2，再根据平行间距d 1的大小，可以确定出倾斜仪绕X轴的倾斜角度变化量Δθ 1＝arcsin[(ΔL 2-ΔL 1)/d 1]；第二个压强传感器和第三个压强传感器浸入液体的深度也会发生变化，所以两个压强传感器测出的压强也会发生变化，通过两个压强传感器的压强变化量求出浸入深度的变化量ΔL 2和ΔL 3，再根据平行间距d 2的大小，可以确定出倾斜仪绕Y轴的倾斜角度变化量Δθ 2＝arcsin[(ΔL 3-ΔL 2)/d 2]。 When the tops of the three pressure sensors are connected to the top plate inside the container by flexible ropes or elastic rods hinged at both ends, under the action of gravity, the axes of the three pressure sensors are always vertical and do not rotate with the tilt of the measured object; The three intersections of the axes of the pressure sensors and the horizontal plane are not on a straight line; the bottom of the closed container is filled with liquid, and the pressure measuring diaphragms of the three pressure sensors or the end diaphragms of the Bourdon tube are immersed in the liquid and are away from the container. The bottoms are equal; when the three intersections of the axes of the three pressure sensors and the top plate form a right-angled triangle, the two right-angle sides are the X-axis and Y-axis in the tilt direction respectively; the first pressure sensor and the second pressure sensor The parallel distance between the axes is d 1 , and the parallel distance between the second pressure sensor and the third pressure sensor is d 2 ; when the inclinometer is tilted around the X axis and Y axis, the first pressure sensor and The depth of the second pressure sensor immersed in the liquid will also change, so the pressure measured by the two pressure sensors will also change, and the immersion depth changes ΔL 1 and ΔL 2 can be obtained from the pressure changes of the two pressure sensors. Then according to the size of the parallel distance d 1 , the tilt angle change of the inclinometer around the X axis can be determined Δθ 1 = arcsin[(ΔL 2 -ΔL 1 )/d 1 ]; the second pressure sensor and the third pressure sensor The depth of immersion in the liquid will also change, so the pressure measured by the two pressure sensors will also change. The changes in the immersion depth ΔL 2 and ΔL 3 are obtained from the pressure changes of the two pressure sensors, and then according to the parallel distance d The size of 2 can determine the tilt angle of the inclinometer around the Y axis Δθ 2 = arcsin[(ΔL 3 -ΔL 2 )/d 2 ]
  25. 根据权利要求2至7中任一项所述的电介质腔的腔长测量装置，其中，所述腔长测量装置应用于滑移计中；The cavity length measuring device for a dielectric cavity according to any one of claims 2 to 7, wherein the cavity length measuring device is applied to a slip meter;
    使用两个电介质腔的腔长测量装置做成测量单向水平滑移量以及纵向分离量的滑移计；针对介质A相当于介质B在轴向和法向的相对位移，其中，介质A与滑移计载体固定，介质B与双斜面载体固定；两个腔长测量装置分别为第一腔长测量装置和第二腔长测量装置，每个腔长测量装置的外壳和内杆导体区域的端面在一个平面上，该平面为第二反射点所在的平面，而且该平面平行于导体反射面；两个斜孔是固定到介质A上的滑移计载体的两个斜孔，分别通过并固定第一腔长测量装置和第二腔长测量装置的外壳，两个斜孔的轴线垂直于两个斜面；所述双斜面是固定到介质B上的双斜面载体的两个导体材料做成的斜面，分别为第一斜面和第二斜面，双斜面的两个斜面分别为第一腔长测量装置和第二腔长测量装置对应的第一导体反射面和第二导体反射面；The cavity length measuring device using two dielectric cavities is made into a slip meter that measures the amount of unidirectional horizontal slip and the amount of longitudinal separation; for medium A, it is equivalent to the relative displacement of medium B in the axial and normal directions. Among them, medium A and The slip gauge carrier is fixed, and the medium B is fixed with the double-inclined carrier; the two cavity length measuring devices are the first cavity length measuring device and the second cavity length measuring device. The shell and inner rod conductor area of each cavity length measuring device The end surface is on a plane, the plane is the plane where the second reflection point is located, and the plane is parallel to the conductor reflection surface; the two oblique holes are two oblique holes of the slip gauge carrier fixed to the medium A, which pass through the parallel The housings of the first cavity length measuring device and the second cavity length measuring device are fixed, and the axes of the two inclined holes are perpendicular to the two inclined planes; the double inclined planes are made of two conductor materials fixed to the double inclined plane carrier on the medium B The inclined planes are the first inclined plane and the second inclined plane, and the two inclined planes of the double inclined plane are the first conductor reflecting surface and the second conductor reflecting surface corresponding to the first cavity length measuring device and the second cavity length measuring device;
    所述滑移计载体固定在介质A上，第一腔长测量装置的外壳固定在滑移计载体的第一斜孔内，第二腔长测量装置的外壳固定在滑移计载体的第二斜孔内，所述第一腔长测量装置外壳和内杆的端面正对且平行于第一斜面，所述第二腔长测量装置外壳和内杆的端面正对且平行于第二斜面，所述第一斜面与所述第二斜面为双斜面载体的两个斜面，所述双斜面载体固定在介质B上；所述两个斜面的法向量构成的二阶矩阵
    Figure PCTCN2019078351-appb-100001
    的秩等于2，其中，所述第一斜面的法向量为(l 1,n 1) T，第二斜面的法向量为(l 2,n 2) T，所述两个斜面相对于水平面的倾斜角度θ 1和θ 2在-90°到90°之间；     The slip gauge carrier is fixed on the medium A, the shell of the first cavity length measuring device is fixed in the first inclined hole of the slip gauge carrier, and the shell of the second cavity length measuring device is fixed on the second cavity of the slip gauge carrier. In the oblique hole, the end faces of the housing and the inner rod of the first cavity length measuring device are directly opposite and parallel to the first inclined plane, and the end faces of the housing and the inner rod of the second cavity length measuring device are directly opposite and parallel to the second inclined plane, The first inclined plane and the second inclined plane are two inclined planes of a double inclined plane carrier, and the double inclined plane carrier is fixed on the medium B; a second-order matrix formed by the normal vectors of the two inclined planes
    Figure PCTCN2019078351-appb-100001
    The rank of is equal to 2, where the normal vector of the first inclined plane is (l 1 , n 1 ) T , the normal vector of the second inclined plane is (l 2 , n 2 ) T , and the two inclined planes are relative to the horizontal plane. The inclination angles θ 1 and θ 2 are between -90° and 90°;
    所述第一腔长测量装置用于测量该装置的第二反射点到第一导体反射面的距离变化量，即电介质腔的腔长变化量为Δd 1，所述第二腔长测量装置用于测量该装置的第二反射点到第二导体反射面的距离变化量，即电介质腔的腔长变化量为Δd 2；两个距离变化量，即电介质腔的腔长变化量Δd 1和Δd 2，均可通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长得到；通过所述两个电介质腔的腔长变化量和两个斜面的法向量，能够得到所述介质A相对于所述介质B的水平滑移量Δx和纵向分离量Δz： The first cavity length measuring device is used to measure the distance change from the second reflection point of the device to the first conductor reflection surface, that is, the cavity length change of the dielectric cavity is Δd 1 , and the second cavity length measuring device uses To measure the distance change from the second reflection point of the device to the second conductor reflection surface, that is, the cavity length change of the dielectric cavity is Δd 2 ; two distance changes, namely the dielectric cavity cavity length change Δd 1 and Δd 2. Both can be obtained through the resonant frequency/cavity length of the open hollow coaxial cable-Fabry Perot cavity; through the cavity length change of the two dielectric cavities and the normal vector of the two inclined planes, Obtain the horizontal slip amount Δx and the longitudinal separation amount Δz of the medium A relative to the medium B:
    Figure PCTCN2019078351-appb-100002
    Figure PCTCN2019078351-appb-100002
  26. 根据权利要求2至7中任一项所述的电介质腔的腔长测量装置，其中，所述腔长测量装置应用于滑移计中；The cavity length measuring device for a dielectric cavity according to any one of claims 2 to 7, wherein the cavity length measuring device is applied to a slip meter;
    使用三个电介质腔的腔长测量装置做成测量双向水平滑移量以及纵向分离量的滑移计；针对介质A相当于介质B在平面两个方向以及法向的相对位移，其中，介质A与滑移计载体固定，介质B与三斜面载体固定；三个腔长测量装置分别为第一腔长测量装置、第二腔长测量装置和第三腔长测量装置，每个腔长测量装置的外壳和内杆导体区域的端面在一个平面上，该平面为第二反射点所在的平面，而且该平面平行于导体反射面；三个斜孔是固定到介质A上的滑移计载体的三个斜孔，分别通过并固定第一腔长测量装置、第二腔长测量装置和第三腔长测量装置的外壳，三个斜孔的轴线垂直于三个斜面；所述三个斜面是固定到介质B上的三斜面载体上的三个导体材料做成的斜面，分别为第一斜面、第二斜面和第三斜面，三斜面的三个斜面分别为第一腔长测量装置、第二腔长测量装置和第三腔长测量装置对应的第一导体反射面、第二导体反射面和第三导体反射面；The cavity length measuring device using three dielectric cavities is made into a slip meter that measures the amount of bidirectional horizontal slip and the amount of longitudinal separation; for medium A, it is equivalent to the relative displacement of medium B in the two directions of the plane and the normal direction. Among them, medium A It is fixed with the slip gauge carrier, and the medium B is fixed with the three-slope carrier; the three cavity length measuring devices are the first cavity length measuring device, the second cavity length measuring device and the third cavity length measuring device, each cavity length measuring device The shell and the end surface of the inner rod conductor area are on a plane, which is the plane where the second reflection point is located, and the plane is parallel to the conductor reflection surface; the three oblique holes are fixed to the slip gauge carrier on the medium A The three inclined holes respectively pass through and fix the housings of the first cavity length measuring device, the second cavity length measuring device and the third cavity length measuring device. The axes of the three inclined holes are perpendicular to the three inclined planes; the three inclined planes are The three inclined planes made of the three-inclined carrier fixed to the medium B are the first inclined plane, the second inclined plane and the third inclined plane. The three inclined planes of the three inclined planes are the first cavity length measuring device and the second inclined plane. The first conductor reflecting surface, the second conductor reflecting surface and the third conductor reflecting surface corresponding to the two-cavity length measuring device and the third cavity length measuring device;
    所述滑移计载体固定在介质A上，第一腔长测量装置的外壳固定在滑移计载体的第一斜孔内，第二腔长测量装置的外壳固定在滑移计载体的第二斜孔内，第三腔长测量装置的外壳固定在滑移计载体的第三斜孔内，所述第一腔长测量装置外壳和内杆的端面正对且平行于第一斜面，所述第二腔长测量装置外壳和内杆的端面正对且平行于第二斜面，所述第三腔长测量装置外壳和内杆的端面正对且平行于第三斜面，所述第一斜面、所述第二斜面与所述第三斜面为三斜面载体的三个斜面，所述三斜面载体固定在介 质B上；所述三个斜面的法向量构成的三阶矩阵
    Figure PCTCN2019078351-appb-100003
    的秩等于3，其中，所述第一斜面的法向量为(l 1,m 1,n 1) T，第二斜面的法向量为(l 2,m 2,n 2) T，第三斜面的法向量为(l 3,m 3,n 3) T，所述三个斜面相对于水平面的倾斜角度θ 1、θ 2和θ 3在-90°到90°之间；     The slip gauge carrier is fixed on the medium A, the shell of the first cavity length measuring device is fixed in the first inclined hole of the slip gauge carrier, and the shell of the second cavity length measuring device is fixed on the second cavity of the slip gauge carrier. In the oblique hole, the housing of the third cavity length measuring device is fixed in the third oblique hole of the slip gauge carrier, and the end faces of the housing and the inner rod of the first cavity length measuring device are directly opposite and parallel to the first inclined plane. The end faces of the housing and the inner rod of the second cavity length measuring device are directly opposite and parallel to the second inclined plane. The end faces of the housing and the inner rod of the third cavity length measuring device are directly opposite and parallel to the third inclined plane. The first inclined plane, The second inclined plane and the third inclined plane are three inclined planes of a three inclined plane carrier, and the three inclined plane carrier is fixed on the medium B; a third-order matrix formed by the normal vectors of the three inclined planes
    Figure PCTCN2019078351-appb-100003
    The rank of is equal to 3, where the normal vector of the first inclined plane is (l 1 ,m 1 ,n 1 ) T , the normal vector of the second inclined plane is (l 2 ,m 2 ,n 2 ) T , the third inclined plane The normal vector of is (l 3 , m 3 , n 3 ) T , and the inclination angles θ 1 , θ 2 and θ 3 of the three inclined surfaces relative to the horizontal plane are between -90° and 90°;
    所述第一腔长测量装置用于测量该装置的第二反射点到第一导体反射面的距离变化量，即电介质腔的腔长变化量为Δd 1，所述第二腔长测量装置用于测量该装置的第二反射点到第二导体反射面的距离变化量，即电介质腔的腔长变化量为Δd 2，所述第三腔长测量装置用于测量该装置的第二反射点到第三导体反射面的距离变化量，即电介质腔的腔长变化量为Δd 3；三个距离变化量，即电介质腔的腔长变化量Δd 1、Δd 2和Δd 3，均可通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长得到；通过所述三个电介质腔的腔长变化量和三个斜面的法向量，能够得到所述第一物体相对于所述第二物体的水平滑移量Δx、Δy和纵向分离量Δz： The first cavity length measuring device is used to measure the distance change from the second reflection point of the device to the first conductor reflection surface, that is, the cavity length change of the dielectric cavity is Δd 1 , and the second cavity length measuring device uses To measure the change in the distance from the second reflection point of the device to the reflection surface of the second conductor, that is, the change in the cavity length of the dielectric cavity is Δd 2 , the third cavity length measuring device is used to measure the second reflection point of the device The distance change from the reflective surface of the third conductor, that is, the cavity length change of the dielectric cavity is Δd 3 ; the three distance changes, namely the cavity length change of the dielectric cavity Δd 1 , Δd 2 and Δd 3 , can all be opened The resonant frequency/cavity length of the hollow coaxial cable-Fabry-Perot cavity can be obtained; the first object can be obtained by the cavity length variation of the three dielectric cavities and the normal vectors of the three inclined planes The horizontal slip amount Δx, Δy and the longitudinal separation amount Δz relative to the second object:
    Figure PCTCN2019078351-appb-100004
    Figure PCTCN2019078351-appb-100004
  27. 根据权利要求2至7中任一项所述的电介质腔的腔长测量装置，其中，所述腔长测量装置应用于基于弹簧和膜片的位移传感器中；The cavity length measuring device of a dielectric cavity according to any one of claims 2 to 7, wherein the cavity length measuring device is applied to a displacement sensor based on a spring and a diaphragm;
    所述位移传感器通过弹簧和膜片，将较大的位移变化量转换成较小的膜片挠度变化量；膜片靠近电介质腔的腔长测量装置的一侧为导体反射面；使用测量第二反射点到导体反射面距离的电介质腔的腔长测量装置做成位移传感器，腔长测量装置外壳和内杆的左端面连接解调装置，右端面为第二反射点，第二反射点的右边一定距离处放有膜片，膜片和外壳内杆的轴线重合，膜片的左端面为导体反射面；膜片的右端面连接有一个顶着膜片中心点的推杆，推杆的右边有支挡结构，支挡结构的右边是弹簧，弹簧右边是带有一个支挡结构的探杆；The displacement sensor uses a spring and a diaphragm to convert a larger displacement change into a smaller diaphragm deflection change; the side of the diaphragm close to the cavity length measuring device of the dielectric cavity is the conductor reflection surface; The cavity length measuring device of the dielectric cavity from the reflection point to the conductor reflection surface is made into a displacement sensor. The cavity length measuring device shell and the left end surface of the inner rod are connected to the demodulation device, the right end surface is the second reflection point, and the right end of the second reflection point A diaphragm is placed at a certain distance. The axis of the diaphragm and the inner rod of the housing coincide. The left end of the diaphragm is the reflective surface of the conductor; the right end of the diaphragm is connected with a push rod against the center point of the diaphragm, and the right side of the push rod There is a retaining structure, the right side of the retaining structure is a spring, and the right side of the spring is a probe with a retaining structure;
    当位移发生变化时，探杆移动，弹簧的压缩量发生变化，弹力发生变化，通过推杆使得作用到膜片上的力发生变化，最终使得膜片的挠度发生变化，从而使得导体反射面到第二反射点之间的距离发生变化，即电介质腔的腔长发生变化，最终使得开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生变化，通过标定可以得到谐振频率/谐振腔腔长和位移之间的关系；When the displacement changes, the probe moves, the compression of the spring changes, and the elastic force changes. The push rod causes the force acting on the diaphragm to change, and finally changes the deflection of the diaphragm, so that the reflective surface of the conductor changes. The distance between the second reflection points changes, that is, the cavity length of the dielectric cavity changes, and finally the resonant frequency/cavity length of the open hollow coaxial cable-Fabry-Perot cavity changes. The calibration can be Obtain the relationship between resonant frequency/resonant cavity length and displacement;
    当外壳端面有扩口时，可以通过加大膜片的直径来增加位移传感器的灵敏度。When there is a flaring on the end surface of the housing, the sensitivity of the displacement sensor can be increased by increasing the diameter of the diaphragm.
  28. 根据权利要求2至7中任一项所述的电介质腔的腔长测量装置，其中，所述腔长测量装置应用于基于斜面结构的位移传感器中；The cavity length measuring device of a dielectric cavity according to any one of claims 2 to 7, wherein the cavity length measuring device is applied to a displacement sensor based on a slope structure;
    使用斜面作为导体反射面，腔长测量装置的外壳和内杆的轴线垂直于斜面；斜面与位移计所测量的水平位移方向之间有一个夹角θ，θ的范围是-90°到90°之间，即斜面可以向左倾斜，也可以向右倾斜，位移计的轴线始终垂直于斜面，位移计的量程越大，θ越小；当位移发生变化时，斜面将水平方向较大的位移变化量，变成斜面在斜面法线方向较小的移动量；使用测量第二反射点到导体反射面之间距离的电介质腔的腔长测量装置做成位移传感器，腔长测量装置的外壳和内杆导体区域的端面在一个平面上，该平面为第二反射点所在的平面，而且该平面平行于导体反射面，即腔长测量装置的轴线平行于斜面的法线；斜面为导体反射面；Use the inclined plane as the conductor reflection surface, the axis of the housing and the inner rod of the cavity length measuring device is perpendicular to the inclined plane; there is an angle θ between the inclined plane and the horizontal displacement direction measured by the displacement meter, and the range of θ is -90° to 90° The inclined plane can be inclined to the left or right. The axis of the displacement meter is always perpendicular to the inclined plane. The larger the range of the displacement meter, the smaller the θ; when the displacement changes, the inclined plane will shift in the horizontal direction. The amount of change becomes a small amount of movement of the inclined plane in the direction of the normal line of the inclined plane; the cavity length measuring device of the dielectric cavity that measures the distance between the second reflection point and the conductor reflection surface is used to make a displacement sensor, the housing of the cavity length measuring device and The end surface of the inner rod conductor area is on a plane, which is the plane where the second reflection point is located, and the plane is parallel to the conductor reflection surface, that is, the axis of the cavity length measuring device is parallel to the normal line of the slope; the slope is the reflection surface of the conductor ；
    斜面的倾斜角度是已知量θ，当位移计探杆的水平位移量为w时，开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生变化，从而得到腔长测量装置第二反射点到导体反射面的距离变化量，即电介质腔的腔长变化量为Δd＝w·sinθ；通过谐振频率/谐振腔腔长的变化量可确定第二反射点到导体反射面之间电介质腔的腔长变化量Δd的大小，从而确定位移的大小；在电介质腔的腔长的最大值和最小值不变的情况下，通过减小斜面斜率的方法增大位移传感器的量程。The inclination angle of the inclined plane is a known quantity θ. When the horizontal displacement of the displacement meter probe is w, the resonant frequency/length of the resonant cavity of the open hollow coaxial cable-Fabry-Perot resonator changes, thereby obtaining The change in the distance from the second reflection point of the cavity length measuring device to the reflective surface of the conductor, that is, the change in the cavity length of the dielectric cavity is Δd=w·sinθ; the change in the resonant frequency/cavity length can determine the second reflection point to The amount of change Δd in the cavity length of the dielectric cavity between the reflective surfaces of the conductor is used to determine the magnitude of the displacement; when the maximum and minimum cavity length of the dielectric cavity remain unchanged, the displacement is increased by reducing the slope of the slope The range of the sensor.
  29. 根据权利要求2至7中任一项所述的电介质腔的腔长测量装置，其中，所述腔长测量装置应用于基于折叠杠杆结构的位移传感器中；The cavity length measuring device of a dielectric cavity according to any one of claims 2 to 7, wherein the cavity length measuring device is applied to a displacement sensor based on a folding lever structure;
    折叠杠杆折数较少的一侧折叠的端面固定有导体反射面，能够将轴线方向较大的位移变化量，变成导体反射面在轴线方向较小的移动量；使用测量第二反射点到导体反射面距离的电介质腔的腔长测量装置做成位移传感器，从左往右依次是解调装置、电介质腔的腔长测量装置、M个折叠、折叠的固定点、N个折叠和探杆；腔长测量装置的外壳和内杆导体区域的端面在一个平面上，该平面为第二反射点所在的平面，而且该平面平行于导体反射面，即腔长测量装置的轴线垂直于导体反射面，腔长测量装置的轴线和折叠端面探杆的运动方向相同；The folded end face of the folding lever on the side with the smaller number of folds is fixed with a conductor reflecting surface, which can change the larger displacement change in the axial direction into a smaller movement of the conductor reflecting surface in the axial direction; use the measurement of the second reflection point to The cavity length measuring device of the dielectric cavity of the distance from the conductor reflection surface is made into a displacement sensor. From left to right, there are the demodulation device, the cavity length measuring device of the dielectric cavity, M folds, fold fixed points, N folds and probe rods. The shell of the cavity length measuring device and the end surface of the inner rod conductor area are on a plane, which is the plane where the second reflection point is located, and the plane is parallel to the conductor reflection surface, that is, the axis of the cavity length measuring device is perpendicular to the conductor reflection The axis of the cavity length measuring device is the same as the movement direction of the folded end probe;
    通过折叠杠杆结构对位移进行折减；折叠杠杆有多个转轴，折叠杠杆结构的固定点靠近导体反射面，固定点到导体反射面之间有M个折叠，固定点到位移传感器探头之间有N个折叠；固定点到位移传感器探头之间的每一个折叠的长度的一半为L；固定点到导体反射面之间的每一个折叠的长度的一半为a；如果右边的探杆移动的位移量为w，那么，第二反射点到导体反射面之间的距离变化量，即电介质腔的腔长变化量Δd为：The displacement is reduced by the folding lever structure; the folding lever has multiple rotating shafts, the fixed point of the folding lever structure is close to the conductor reflection surface, there are M folds between the fixed point and the conductor reflection surface, and there are between the fixed point and the displacement sensor probe N folds; half of the length of each fold between the fixed point and the displacement sensor probe is L; half of the length of each fold between the fixed point and the reflective surface of the conductor is a; the displacement if the probe on the right moves The amount is w, then the change in the distance between the second reflection point and the reflective surface of the conductor, that is, the change in cavity length of the dielectric cavity Δd is:
    Figure PCTCN2019078351-appb-100005
    Figure PCTCN2019078351-appb-100005
    通过开放式空心同轴电缆-法布里珀罗谐振腔的腔长变化量可确定第二反射点到导体反射面之间的距离变化量，即电介质腔的腔长变化量为Δd，由于第二反射点到导体反射面之间，电介质腔的腔长变化范围有限，所以位移传感器的量程越大，Na与ML的比值越小；位移变化量和电介质腔的腔长变化量始终成正比。The cavity length variation of the open hollow coaxial cable-Fabry Perot cavity can determine the distance variation between the second reflection point and the conductor reflection surface, that is, the cavity length variation of the dielectric cavity is Δd, because the first Between the second reflection point and the reflective surface of the conductor, the cavity length of the dielectric cavity has a limited variation range, so the larger the range of the displacement sensor, the smaller the ratio of Na to ML; the displacement change is always proportional to the cavity length change of the dielectric cavity.
  30. 根据权利要求2至7中任一项所述的电介质腔的腔长测量装置，其中，所述腔长测量装置应用于基于齿轮和齿条结构的位移传感器中；The cavity length measuring device for a dielectric cavity according to any one of claims 2 to 7, wherein the cavity length measuring device is applied to a displacement sensor based on a gear and rack structure;
    齿轮和齿条结构由以下至少一种机械结构组成：齿轮、双层齿轮、齿条、蜗杆，所述齿轮和齿条结构将较大的位移变化量进行折减，使得第二反射点到导体反射面之间的距离发生较小的变化，其变化量为Δd，即电介质腔的腔长变化量为Δd；位移变化量和Δd始终成正比；电介质腔的腔长测量装置的外壳和内杆导体区域的端面在一个平面上，该平面为第二反射点所在的平面，而且该平面平行于导体反射面，即腔长测量装置的轴线垂直于导体反射面；The gear and rack structure consists of at least one of the following mechanical structures: gears, double-layer gears, racks, and worms. The gears and rack structures reduce the large displacement changes so that the second reflection point is to the conductor The distance between the reflective surfaces changes slightly, and the change is Δd, that is, the change of the cavity length of the dielectric cavity is Δd; the displacement change is always proportional to Δd; the housing and inner rod of the cavity length measuring device of the dielectric cavity The end surface of the conductor area is on a plane, the plane is the plane where the second reflection point is located, and the plane is parallel to the conductor reflection surface, that is, the axis of the cavity length measuring device is perpendicular to the conductor reflection surface;
    位移传感器的探杆带有第一齿条，位移发生变化时，带动第一齿条移动，第一齿条对接双层齿轮上的大直径齿轮，双层齿轮上的小直径齿轮对接第二齿条，第二齿条的端面固定有导体反射面，导体反射面的轴线与腔长测量装置外壳和内杆的轴线平行，且腔长测量装置固定到基板上；探杆的位移发生较大变化时，通过双层齿轮进行位移折减，使得带有导体反射面的第二齿条发生较小的位移变化，即第二反射点到导体反射面之间的距离发生较小的变化，变化量为Δd；通过标定，可以得到位移变化量与Δd之间的线性关系式；如果位移传感器的量程较大，一个双层齿轮对位移的折减不够，可通过多个双层齿轮的组合对位移进行折减；或者，The probe rod of the displacement sensor has a first rack. When the displacement changes, the first rack is driven to move. The first rack is connected to the large-diameter gear on the double-layer gear, and the small-diameter gear on the double-layer gear is connected to the second tooth. The end surface of the second rack is fixed with a conductor reflecting surface, the axis of the conductor reflecting surface is parallel to the axis of the cavity length measuring device shell and the inner rod, and the cavity length measuring device is fixed on the substrate; the displacement of the probe rod changes greatly At this time, the displacement reduction is carried out by the double-layer gear, so that the second rack with the conductor reflection surface has a smaller displacement change, that is, the distance between the second reflection point and the conductor reflection surface has a smaller change. Is Δd; through calibration, the linear relationship between the displacement change and Δd can be obtained; if the range of the displacement sensor is large, and the reduction of the displacement by a double-layer gear is not enough, the displacement can be adjusted by the combination of multiple double-layer gears Make a reduction; or,
    位移传感器的探杆带有第一齿条，位移发生变化时，带动第一齿条移动，第一齿条对接带有蜗杆的第一齿轮，第一齿轮和蜗杆共用一个转轴，第一齿轮转动带动蜗杆转动；蜗杆对接第二齿轮，较大的位移通过蜗杆进行折减，带动第二齿轮发生较小转动；第二齿轮对接第二齿条，第二齿条的端面是导体反射面，导体反射面的轴线与腔长测量装置外壳和内杆的轴线平行，且腔长测量装置固定到基板上；通过标定，可得到位移量与电介质腔的腔长变化量Δd之间的线性关系式。The probe of the displacement sensor has a first rack. When the displacement changes, the first rack is driven to move. The first rack is connected to the first gear with a worm. The first gear and the worm share a rotating shaft, and the first gear rotates Drive the worm to rotate; the worm is connected to the second gear, and the larger displacement is reduced by the worm, which drives the second gear to rotate slightly; the second gear is connected to the second rack, and the end surface of the second rack is the reflective surface of the conductor. The axis of the reflecting surface is parallel to the axis of the housing and the inner rod of the cavity length measuring device, and the cavity length measuring device is fixed on the substrate; through calibration, the linear relationship between the displacement and the cavity length change Δd of the dielectric cavity can be obtained.
  31. 根据权利要求2至7中任一项所述的电介质腔的腔长测量装置，其中，所述腔长测量装置应用于折射率传感器中，所述折射率传感器为第一种折射率传感器或第二种折射率传感器；The cavity length measuring device for a dielectric cavity according to any one of claims 2 to 7, wherein the cavity length measuring device is applied to a refractive index sensor, and the refractive index sensor is a first type of refractive index sensor or a second type of refractive index sensor. Two kinds of refractive index sensors;
    在第一种折射率传感器中，电介质腔的腔长测量装置的外壳和内杆在左，导体反射面在右，每个腔长测量装置的内杆导体区域的右端面作为第二反射点，内杆导体区域的端面和导体反射面之间不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接；外壳导体区域的端面和内杆端面是同一个平面，或者外壳导体区域的端面在内杆端面的右边，外壳和导体反射面之间用导体连接或者用绝缘体连接或者不连接；导体反射面在第二反射点的右端，第二反射点所在的平面平行于导体反射面，第二反射点和导体反射面之间的几何距离d保持不变，即电介质腔的几何腔长d保持不变；第二反射点左端的外壳和内杆之间带有密封结构，使得待测折射率的液体或固体或气体均填充在第二反射点所在平面与导体反射面之间；因为填充物的折射率不同，所以会导致放入填充物前后，测出的电介质腔的实际腔长发生变化，该腔长大小d'与折射率的大小有关，从而导致开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长发生变化，通过谐振频率/谐振腔腔长的大小，可以确定第二反射点和导体反射面之间的距离d'，即放入填充物后，电介质腔的腔长为d'，通过d和d'的比值可以得到填充的液体或固体或气体的折射率；外壳和导体反射面之间部分连接或全部连接，导体反射面的结构至少包括多孔结构；In the first type of refractive index sensor, the housing and inner rod of the cavity length measuring device of the dielectric cavity are on the left, the conductor reflection surface is on the right, and the right end surface of the inner rod conductor area of each cavity length measuring device is used as the second reflection point. The end surface of the inner rod conductor area is not in contact with the reflective surface of the conductor, or connected by an insulator, or connected by a conductor with a resistivity greater than or equal to a preset threshold; the end surface of the outer conductor area and the inner rod end surface are the same plane, or the outer conductor The end face of the area is on the right side of the inner rod end face, and the shell and the conductor reflection surface are connected with a conductor or insulator or not connected; the conductor reflection surface is at the right end of the second reflection point, and the plane where the second reflection point is parallel to the conductor reflection The geometric distance d between the second reflection point and the conductor reflection surface remains unchanged, that is, the geometric cavity length d of the dielectric cavity remains unchanged; a sealing structure is provided between the outer shell and the inner rod at the left end of the second reflection point, so that The liquid or solid or gas of the refractive index to be measured is filled between the plane where the second reflection point is located and the reflective surface of the conductor; because the refractive index of the filler is different, it will cause the actual measurement of the dielectric cavity before and after the filling The cavity length changes. The cavity length d'is related to the refractive index, which causes the resonant frequency/cavity length of the open hollow coaxial cable-Fabry-Perot cavity to change. The length of the cavity can determine the distance d'between the second reflection point and the reflective surface of the conductor, that is, after putting the filler, the cavity length of the dielectric cavity is d', which can be obtained by the ratio of d and d' The refractive index of liquid or solid or gas; the shell and the reflective surface of the conductor are partially connected or fully connected, and the structure of the reflective surface of the conductor includes at least a porous structure;
    在第二种折射率传感器中，外壳和内杆在左，导体反射面在右，内杆的导体区域和导体反射面连接，外壳导体区域的端面在内杆端面的左边，即在导体反射面的左边，此时每个传感器的外壳导体区域的右端面作为第二反射点；外壳导体区域的端面和导体反射面之间不接触、或用绝缘体连接、或用电阻率大于等于预设阈值的导体连接；第二反射点所在的平面平行于导体反射面，第二反射点和导体反射面之间的几何距离d保持不变，即电介质腔的腔长不变；外壳与内杆之间在第二反射点左端的区域内带有密封结构，使得待测折射率的液体或固体或气体均填充在第二反射点所在平面与导体反射面之间；因为填充物折射率不同，所以会导致放入填充物前后，开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔 长发生变化，电介质腔的几何腔长d不变，放入填充物后，测出的电介质腔的腔长为d'，通过d和d'的比值可以得到填充的液体或固体或气体的折射率。In the second type of refractive index sensor, the shell and the inner rod are on the left, the conductor reflection surface is on the right, the conductor area of the inner rod is connected to the conductor reflection surface, and the end surface of the shell conductor area is on the left side of the inner rod end surface, that is, on the conductor reflection surface At this time, the right end surface of the housing conductor area of each sensor is used as the second reflection point; the end surface of the housing conductor area and the conductor reflection surface are not in contact, or connected with an insulator, or used with a resistivity greater than or equal to a preset threshold Conductor connection; the plane of the second reflection point is parallel to the reflection surface of the conductor, and the geometric distance d between the second reflection point and the reflection surface of the conductor remains unchanged, that is, the cavity length of the dielectric cavity does not change; There is a sealing structure in the area at the left end of the second reflection point, so that the liquid or solid or gas of the refractive index to be measured is filled between the plane where the second reflection point is located and the reflective surface of the conductor; because the refractive index of the filler is different, it will cause Before and after inserting the filler, the resonant frequency/length of the open hollow coaxial cable-Fabry Perot cavity changes, and the geometric cavity length d of the dielectric cavity remains unchanged. The cavity length of the cavity is d', and the refractive index of the filled liquid or solid or gas can be obtained by the ratio of d and d'.
  32. 根据权利要求31所述的电介质腔的腔长测量装置，其中，所述腔长测量装置应用于测量腐蚀的传感器中；测量腐蚀的传感器具有以下两种工况：The cavity length measuring device of the dielectric cavity according to claim 31, wherein the cavity length measuring device is applied to a sensor for measuring corrosion; the sensor for measuring corrosion has the following two working conditions:
    第一种工况是导体反射面发生腐蚀，测量腐蚀的传感器的结构与折射率传感器的结构相同，第二反射点和导体反射面之间的距离保持不变，即电介质腔的几何腔长d不变；在第二反射点和导体反射面之间之间的电介质腔为空腔，导体反射面的载体是实心的，或者做成孔隙结构，以加大腐蚀面积，增加传感器的灵敏度；导体反射面的材料为能够发生腐蚀的材料；外壳与导体反射面之间采用部分连接，或者用孔隙结构连接，使得液体或气体更容易浸入电介质腔内部；导体反射面的材料发生腐蚀后，会产生腐蚀产物，使得第二反射点到导体反射面之间电介质腔腔内的电介质的折射率发生变化，从而改变开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长，通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长的变化量，可测出电介质腔的腔长变化量，并得到折射率的变化量，从而确定腐蚀程度；The first working condition is the corrosion of the reflective surface of the conductor. The structure of the sensor for measuring corrosion is the same as that of the refractive index sensor. The distance between the second reflection point and the reflective surface of the conductor remains unchanged, that is, the geometric cavity length of the dielectric cavity d No change; the dielectric cavity between the second reflection point and the reflective surface of the conductor is a cavity, and the carrier of the reflective surface of the conductor is solid or made into a porous structure to increase the corrosion area and increase the sensitivity of the sensor; The material of the reflective surface is a material that can be corroded; the shell and the reflective surface of the conductor are partially connected or connected with a pore structure to make it easier for liquid or gas to penetrate into the dielectric cavity; the material of the reflective surface of the conductor will be corroded. Corrosion products change the refractive index of the dielectric in the dielectric cavity between the second reflection point and the conductor reflection surface, thereby changing the resonant frequency/cavity length of the open hollow coaxial cable-Fabry-Perot cavity , Through the change of the resonant frequency/length of the cavity of the open hollow coaxial cable-Fabry-Perot resonator, the change of the cavity length of the dielectric cavity can be measured, and the change of the refractive index can be obtained to determine the corrosion degree;
    第二种工况是导体反射面不发生腐蚀，当导体反射面的载体不发生腐蚀时，要保证外界的腐蚀产物能够浸入外壳和导体反射面之间的电介质腔区域；导体反射面为孔隙结构，或者，外壳与导体反射面之间采用部分连接或者用孔隙结构连接；当腐蚀产物浸入外壳和导体反射面之间的电介质腔腔内时，该区域的折射率发生改变，从而改变开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长，通过开放式空心同轴电缆-法布里珀罗谐振腔的谐振频率/谐振腔腔长的变化量和电介质腔的几何腔长d的大小，可测出折射率的变化量，从而确定腐蚀程度。The second working condition is that the reflective surface of the conductor does not corrode. When the carrier of the reflective surface of the conductor does not corrode, it is necessary to ensure that external corrosion products can penetrate into the dielectric cavity area between the shell and the reflective surface of the conductor; the reflective surface of the conductor has a porous structure , Or, the shell and the reflective surface of the conductor are partially connected or connected by a pore structure; when the corrosion product is immersed in the dielectric cavity between the shell and the reflective surface of the conductor, the refractive index of this area changes, thereby changing the open hollow Coaxial cable-Fabry-Perot resonant cavity resonant frequency/cavity length, through the open hollow coaxial cable-Fabry-Perot resonant cavity resonant frequency/resonant cavity length change and dielectric cavity The size of the geometric cavity length d can be used to measure the change in refractive index to determine the degree of corrosion.
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