WO2020181777A1 - Sensing and execution integrated bionic flexible actuator and method for preparing same - Google Patents

Sensing and execution integrated bionic flexible actuator and method for preparing same Download PDF

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Publication number
WO2020181777A1
WO2020181777A1 PCT/CN2019/113164 CN2019113164W WO2020181777A1 WO 2020181777 A1 WO2020181777 A1 WO 2020181777A1 CN 2019113164 W CN2019113164 W CN 2019113164W WO 2020181777 A1 WO2020181777 A1 WO 2020181777A1
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bionic
layer
sensing
flexible actuator
adhesive
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PCT/CN2019/113164
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French (fr)
Chinese (zh)
Inventor
韩志武
刘林鹏
张俊秋
王大凯
孙涛
王可军
牛士超
侯涛
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吉林大学
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B1/00—Layered products having a non-planar shape
    • B32B1/08—Tubular products
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/18—Layered products comprising a layer of metal comprising iron or steel
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B25/00—Layered products comprising a layer of natural or synthetic rubber
    • B32B25/04—Layered products comprising a layer of natural or synthetic rubber comprising rubber as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
    • B32B3/26—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer
    • B32B3/30—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer characterised by a layer formed with recesses or projections, e.g. hollows, grooves, protuberances, ribs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/16—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance

Definitions

  • the present disclosure relates to the field of actuators, and in particular to a flexible actuator integrated with bionic sensing and execution and a preparation method thereof.
  • actuators that can be driven by external stimuli such as electricity, heat, light or humidity to produce deformation.
  • external stimuli such as electricity, heat, light or humidity
  • This type of actuator that relies on the properties of smart materials to perceive environmental information and realizes actuation not only cannot intelligently recognize signals, but also cannot make intelligent and controllable execution behaviors based on environmental signals. From the perspective of bionics, this is also contrary to the approach taken by living creatures from perception to execution. Higher organisms perceive external environmental signals, such as sound, vibration, light, etc., through the receptors distributed on their body surface.
  • the executing agency conducts execution processing.
  • execution processing In biology, it is rare to use the inherent characteristics of materials to realize the whole process of perception and execution, but most of them realize the function of perception and execution by sensing signals through sensors and executing processing by actuators.
  • people’s hands are distributed with various receptors, such as tactile receptors, pressure receptors, pain receptors, etc. These receptors act as media for perceiving information from the outside world, and the muscle fibers on the hands act as actuators.
  • the two are integrated to realize the integration of perception and execution.
  • the perception here is intelligent, capable of high-precision, high-sensitive resolution, controllable execution, and different degrees of execution strength can be achieved according to specific working conditions.
  • the technical problem to be solved by the present disclosure is to provide a bionic sensing and execution integrated flexible actuator and a preparation method thereof in view of the above-mentioned defects of the prior art, aiming to solve the problem that the actuator in the prior art cannot realize the integration of sensing and execution.
  • the problem of chemistry is to provide a bionic sensing and execution integrated flexible actuator and a preparation method thereof in view of the above-mentioned defects of the prior art, aiming to solve the problem that the actuator in the prior art cannot realize the integration of sensing and execution.
  • the problem of chemistry is to provide a bionic sensing and execution integrated flexible actuator and a preparation method thereof in view of the above-mentioned defects of the prior art, aiming to solve the problem that the actuator in the prior art cannot realize the integration of sensing and execution.
  • a bionic sensing execution integrated flexible actuator which includes: an IPMC actuation layer, an adhesive layer arranged on the IPMC actuation layer, and a bionic strain sensing element arranged on the adhesive layer; the bionic strain transmission
  • the sensing element includes: a flexible base layer disposed on the IPMC actuation layer, a bionic V-groove array is disposed on the flexible base layer, a conductive layer disposed on the flexible base layer, and a conductive layer disposed on the conductive layer On the first electrode.
  • the IPMC actuation layer includes: a perfluorosulfonic acid proton exchange membrane and a second electrode arranged on the perfluorosulfonic acid proton exchange membrane.
  • the bionic sensing execution integrated flexible actuator wherein the thickness of the perfluorosulfonic acid proton exchange membrane is 100-300 ⁇ m.
  • the flexible base layer is made of the following materials: epoxy resin, thermoplastic polyurethane, polyacrylate, polyvinylidene fluoride, polystyrene, polyamide, poly Imide, polyethylene terephthalate, styrene-butadiene-styrene block copolymer, styrene-isoprene-styrene block copolymer, styrene-ethylene-butene -Styrenic block copolymer, styrene-ethylene-propylene-styrene block copolymer, natural rubber, styrene butadiene rubber, butadiene rubber, isoprene rubber, silicone rubber, neoprene, butyl rubber, butadiene rubber Nitrile rubber, ethylene propylene rubber, fluororubber, polydimethylsiloxane, styrene-based thermoplastic e
  • bionic sensing execution integrated flexible actuator wherein the bionic V-shaped groove has a depth of 150-250 nm and a width of 800-1200 nm.
  • the integrated flexible actuator for implementing bionic sensing wherein the thickness of the conductive layer is 40-60 nm.
  • the conductive layer is made of the following materials: carbon nanoparticles, gold nanoparticles, platinum nanoparticles, silver nanoparticles, copper nanoparticles, aluminum-boron alloys, aluminum One or more of chromium alloy, iron-manganese alloy, aluminum-chromium-yttrium alloy, and silver-copper-palladium alloy.
  • the bionic sensing execution integrated flexible actuator wherein the adhesive layer is a-cyanoacrylate instant adhesive, anaerobic adhesive, acrylic structural adhesive, ethyl acrylate adhesive, epoxy acrylate adhesive, Epoxy resin glue, polyurethane glue, amino resin glue, phenolic resin glue, acrylic resin glue, furan resin glue, resorcinol-formaldehyde resin glue, xylene-formaldehyde resin glue, saturated polyester glue, composite resin glue, One or more of polyimide glue, urea-formaldehyde resin glue, nitrile polymer glue, polysulfide rubber adhesive, polyvinyl chloride adhesive, polybutadiene glue, and vinyl chloride adhesive.
  • the adhesive layer is a-cyanoacrylate instant adhesive, anaerobic adhesive, acrylic structural adhesive, ethyl acrylate adhesive, epoxy acrylate adhesive, Epoxy resin glue, polyurethane glue, amino resin glue, phenolic resin glue, acrylic resin glue, furan resin glue, re
  • the bionic strain sensing element is bonded to the IPMC actuation layer through the adhesive layer.
  • the IPMC actuation layer is prepared by the following steps:
  • the perfluorosulfonic acid proton exchange membrane with the second electrode is subjected to a lithium ion replacement reaction to obtain an IPMC actuation layer.
  • the lithium ion replacement reaction of the perfluorosulfonic acid proton exchange membrane with the second electrode to obtain an IPMC actuation layer includes:
  • the perfluorosulfonic acid proton exchange membrane with the second electrode is immersed in a lithium chloride solution for lithium ion replacement reaction to obtain an IPMC actuation layer.
  • the method for preparing the integrated flexible actuator for biomimetic sensing execution wherein the concentration of the lithium chloride solution is 2 to 4 mol/L.
  • the bionic strain sensing element is prepared by the following steps:
  • a conductive layer is sputtered on the flexible base layer and then the first electrode is connected to obtain a bionic strain sensing element.
  • the method for manufacturing the integrated flexible actuator with bionic sensing execution, wherein the spin-coating a flexible material on the reverse structure template includes:
  • Hardener is added to the flexible material and spin-coated on the reverse structure template.
  • the manufacturing method of the bionic sensing execution integrated flexible actuator wherein the mass ratio of the flexible material and the hardener is 8-12:1.
  • the output resistance of the super-sensitive bionic strain sensing element changes.
  • the IPMC actuation layer is automatically activated, and an appropriate voltage is applied to the actuator, and the actuator realizes the actuation effect.
  • the actuation bending of the IPMC actuation layer occurs, it will further drive the deformation of the bionic strain element layer bonded on its surface, thereby changing the output resistance value of the bionic strain sensing element.
  • the degree of actuation and the output resistance value show a one-to-one mapping relationship. According to the output resistance value, the degree of actuation of the actuator can be obtained indirectly, so as to achieve the purpose of integration of perception and execution and intelligent controllability of actuation.
  • Fig. 1 is a first structural schematic diagram of an integrated flexible actuator with bionic sensing execution in the present disclosure.
  • Fig. 2 is a second structural schematic diagram of an integrated flexible actuator with bionic sensing execution in the present disclosure.
  • Fig. 3 is an enlarged view of A in Fig. 2.
  • Fig. 4 is an AFM diagram of the bionic V-shaped groove in the present disclosure.
  • Figure 5 is a cross-sectional view of the bionic V-groove in the present disclosure.
  • FIGS. 1 to 5 Please refer to FIGS. 1 to 5 at the same time.
  • the present disclosure provides some embodiments of an integrated flexible actuator for bionic sensing execution.
  • receptors to perceive signals is a unique way of sensing in organisms. These receptors are usually formed by coupling structure and material. The structure is fine and the material is rigid and flexible. In addition, unlike the response stimulus source of the existing stimulus response actuator, a considerable part of living beings rely on vibration signals to perceive the external environment, that is, the response of vibration stimulation.
  • the typical representative is the scorpion with a 430 million-year evolutionary history in nature. Due to environmental pressures, scorpions gradually evolve into nocturnal creatures, and the habit of frequent haunts at night has caused the scorpion's visual system to be highly degraded.
  • the media in the scorpion’s living environment are discontinuous media.
  • the desert scorpion lives in an environment full of sand, and the rainforest scorpion lives in an environment with layers of deciduous leaves, plus the environment.
  • the noisy signals generated by the diversity of other species in the scorpion make the scorpion’s ability to perceive external signals through the receptors and distinguish effective signals more sensitive and excellent.
  • the specific form of this slit susceptor is a slit array distributed in a radial fan shape.
  • Electroactive Polymers is a type of material that can produce various forms of mechanical response through the change of the internal structure of the material under the induction of an external electric field, and can realize the mutual conversion of electrical energy and mechanical energy.
  • Ionic Polymer-Metal Composites IPMC is one of the electroactive polymers.
  • IPMC is one of the electroactive polymers.
  • the scientific applications developed by IPMC are mainly man-machine interfaces, aircraft applications, controllable fabrics, robots, biomedicine, etc. It can be seen that IPMC polymer actuators have immeasurable application prospects.
  • the integrated flexible actuator for bionic sensing and execution of the present disclosure includes: an IPMC actuation layer 10, an adhesive layer 20 arranged on the IPMC actuation layer 10, and an adhesive layer
  • the depth of the bionic V-shaped groove is 150-250 nm, and the width is 800-1200 nm.
  • X in Figure 5 represents the width of the bionic V-groove.
  • the vibration wave drives the flexible sensor to deform.
  • This deformation is specifically expressed as stretching or squeezing, and the distance between the two walls of the slit structure Will change, and the contact state of the conductive layer 32 distributed on the two walls of the slit will also change, thereby changing the number and path of electronic conductive paths, and finally manifesting as a change in the resistance of the overall bionic strain sensing element, output to the computer terminal instantaneous
  • the resistance signal changes.
  • the degree of change of the resistance signal changes with the vibration intensity of the vibration source. Therefore, different resistance intervals can be set in the control program of the information processing system, and each resistance interval corresponds to a voltage value.
  • the actuator that is, the IPMC actuation layer 10
  • the actuator will be automatically activated, and the corresponding voltage will be applied to the actuator to start the actuation effect.
  • the actuation bending of the IPMC actuation layer occurs, it will further drive the deformation of the bionic strain element layer bonded on its surface, thereby changing the output resistance value of the bionic strain sensing element.
  • the degree of actuation and the output resistance value show a one-to-one mapping relationship. According to the output resistance value, the degree of actuation of the actuator can be obtained indirectly, so as to achieve the purpose of integration of perception and execution and intelligent controllability of actuation.
  • the IPMC actuation layer 10 includes: a perfluorosulfonic acid proton exchange membrane 11 and a second electrode 12 arranged on the perfluorosulfonic acid proton exchange membrane 11.
  • the IPMC actuation layer 10 is prepared using the following steps:
  • step S111 the perfluorosulfonic acid proton exchange membrane 11 is pretreated.
  • perfluorosulfonic acid proton exchange membrane 11 Use the perfluorosulfonic acid proton exchange membrane 11 with a thickness of 100-300 ⁇ m, and cut it, then use ultrasonic to clean the surface of the perfluorosulfonic acid proton exchange membrane 11, and remove organic impurities: soak in a mass fraction of 5-10 % Hydrogen peroxide solution for 3 to 6 hours, then put it in deionized water and boil for one hour. Then remove the inorganic ions: put it in a sulfuric acid solution with a mass fraction of 3 to 5% and fully soak for 4 to 8 hours. Finally, swelling and cleaning: put in deionized water and boil for one hour. The pretreatment of the perfluorosulfonic acid proton exchange membrane 11 is completed.
  • Step S112 plating the second electrode 12 on the perfluorosulfonic acid proton exchange membrane 11.
  • a metal electrode that is, the second electrode 12 is plated on the surface of the perfluorosulfonic acid proton exchange membrane 11 by a chemical method.
  • the treated perfluorosulfonic acid proton exchange membrane 11 is immersed in a tetraammonium platinum chloride aqueous solution with a mass fraction of 5-10% for more than 24 hours.
  • Step S113 immersing the perfluorosulfonic acid proton exchange membrane 11 with the second electrode 12 in a lithium chloride solution to perform a lithium ion replacement reaction to obtain an IPMC actuation layer 10.
  • Lithium ion replacement soak the dried perfluorosulfonic acid proton exchange in 2 ⁇ 4mol/L lithium chloride solution for more than 24 hours, so that the ions exchanged by the mobile ions in the solution are completely lithium ions, and the lithium ion replacement is completed.
  • the response is the IMPC actuator.
  • the bionic strain sensing element 30 is prepared in the following steps:
  • the ethanol heating temperature is 80°C, and the heating time is 8-16h. Due to the solvent induction method and the linear molecular chain characteristics of polystyrene, a regular V-shaped groove array structure appears on the surface of the polystyrene cover, and then ultrasonic cleaning is used Its surface.
  • epoxy resin AB glue is used to prepare the reverse structure template.
  • the epoxy resin AB glue is mixed uniformly at a mass ratio of 3:1, it is put into a polystyrene cover, and vacuumed by a vacuum box. The deaeration time is 2h. Then, put it into an oven for curing, the curing temperature is 50°C, and the curing time is 7-9h.
  • the film formed by curing the epoxy resin AB glue (that is, the reverse structure template) can be separated from the V-shaped groove array template by mechanical means.
  • the reverse structure template has a V-shaped convex that matches the V-shaped groove array. Up.
  • the flexible material is epoxy resin, thermoplastic polyurethane, polyacrylate, polyvinylidene fluoride, polystyrene, polyamide, polyimide, polyethylene terephthalate, styrene-butylene Diene-styrene block copolymer, styrene-isoprene-styrene block copolymer, styrene-ethylene-butylene-styrene block copolymer, styrene-ethylene-propylene-styrene type Block copolymer, natural rubber, styrene butadiene rubber, butadiene rubber, isoprene rubber, silicone rubber, neoprene rubber, butyl rubber, nitrile rubber, ethylene propylene rubber, fluorine rubber, polydimethylsiloxane, One or more of styrene-based thermoplastic elastomer, olefin-based thermoplastic e
  • a hardener is added to the flexible material.
  • the flexible material and the hardener are mixed in a mass ratio of 8-12:1, they are spin-coated on the reverse structure template by a spin coater.
  • the structure template has a V-shaped convex side.
  • defoaming treatment and heating treatment where vacuum defoaming is used, the heating temperature is 70-90°C, and the heating time is 3-5h.
  • the reverse structure template is mechanically removed. Since the reverse structure template has V-shaped protrusions, the flexible material layer has a V-shaped groove array structure consistent with the V-shaped groove array template.
  • the thickness of the flexible material layer is 150-250 ⁇ m.
  • S124 Sputter the conductive layer 32 on the flexible base layer 31 and then connect the first electrode 33 to obtain the bionic strain sensing element 30.
  • the conductive layer 32 is made of the following materials: carbon nanoparticles, gold nanoparticles, platinum nanoparticles, silver nanoparticles, copper nanoparticles, aluminum-boron alloys, aluminum-chromium alloys, iron-manganese alloys, aluminum-chromium-yttrium alloys , One or more of silver-copper-palladium alloys.
  • the conductive layer 32 can enhance the bonding force between the flexible material and the first electrode 33.
  • the thickness of the conductive layer 32 is 40-60 nm. According to economic considerations, silver is selected as the target material to spray a thin film of silver particles with a thickness of about 50 nm.
  • the bionic strain sensing element 30 is connected to the IPMC actuation layer 10 via the adhesive layer 20.
  • the adhesive layer 20 is a-cyanoacrylate instant adhesive, anaerobic adhesive, acrylic structural adhesive, ethyl acrylate adhesive, epoxy acrylate adhesive, epoxy resin adhesive, polyurethane adhesive, amino resin adhesive, phenolic resin Glue, acrylic resin glue, furan resin glue, resorcinol-formaldehyde resin glue, xylene-formaldehyde resin glue, saturated polyester glue, composite resin glue, polyimide glue, urea-formaldehyde resin glue, nitrile polymer One or more of glue, polysulfide rubber adhesive, polyvinyl chloride adhesive, polybutadiene glue, and vinyl chloride adhesive.
  • the present disclosure also provides a method for manufacturing the bionic sensing and execution integrated flexible actuator as described in any of the above embodiments, including the following steps:
  • the present disclosure provides a bionic sensory execution integrated flexible actuator and a preparation method thereof.
  • the flexible actuator includes: an IPMC actuation layer, and an adhesive disposed on the IPMC actuation layer Layer and a bionic strain sensing element arranged on the adhesive layer;
  • the bionic strain sensing element comprises: a flexible base layer arranged on the IPMC actuation layer, and a bionic V-shaped groove array is arranged on the flexible base layer , A conductive layer arranged on the flexible base layer and a first electrode arranged on the conductive layer. Because when the external vibration wave is transmitted to the bionic strain sensing element, the resistance of the bionic strain sensing element changes.
  • the IPMC actuation layer is automatically activated, and the corresponding voltage is applied to the actuator to start the actuation effect.
  • the IPMC actuation layer is actuated to bend, it will further drive the deformation of the bionic strain element layer, thereby changing the output resistance value of the bionic strain sensing element.
  • the actuation degree and the output resistance value show a one-to-one mapping relationship, so as to achieve sensing Perform the purpose of integration and actuation of intelligent and controllable.

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Abstract

Provided are a sensing and execution integrated bionic flexible actuator and a method for preparing same. The flexible actuator comprises: an IPMC actuating layer, an adhesive layer provided on the IPMC actuating layer, and a bionic strain sensing element provided on the adhesive layer. The bionic strain sensing element comprises: a flexible substrate layer provided on the IPMC actuating layer, wherein a bionic V-shaped groove array is provided on the flexible substrate layer; a conductive layer provided on the flexible substrate layer; and a first electrode provided on the conductive layer. When an external vibration wave is transmitted to the bionic strain sensing element, and the output resistance of the bionic strain sensing element reaches a preset value, the IPMC actuating layer is automatically started, and is subjected to actuated bending, and further drives a bionic strain sensing element layer to deform. An actuation degree of the actuator can be indirectly learned according to an output resistance value, thereby achieving the purposes of the integration of sensing and execution, and intelligent and controllable actuation.

Description

一种仿生感知执行一体化柔性致动器及其制备方法Bionic sensing execution integrated flexible actuator and preparation method thereof 技术领域Technical field
本公开涉及致动器领域，尤其涉及的是一种仿生感知执行一体化柔性致动器及其制备方法。The present disclosure relates to the field of actuators, and in particular to a flexible actuator integrated with bionic sensing and execution and a preparation method thereof.
背景技术Background technique
近年来，研究者们发展了多种致动器，它们能够被电、热、光或湿度等外界刺激所驱动而产生形变。然而目前所报道的大部分致动器都只是依靠智能材料的本身属性去感知环境信息并且实现致动效果。这种依靠智能材料的本身属性去感知环境信息并且实现致动的致动器不但无法智能识别信号，也无法根据环境信号做出智能可控的执行行为。从仿生角度来看，这也是有悖于生物所采取从感知到执行的方式的。高等生物通过分布在其体表的感受器感知外界的环境信号，如声音、振动、光线等，这些感受器将这些信号进行编码后经神经元传输到中枢神经系统进行信息解码翻译处理，之后传递信息于执行机构进行执行处理。在生物中，鲜有单独利用材料自身的固有特性去实现整个感知与执行的过程，而是大部分通过感受器感知信号，执行机构执行处理的方式实现感知执行的功能。如人的手上分布着各种不同的感受器，如触觉感受器、压觉感受器、痛觉感受器等，这些感受器充当着感知外界信息的媒介，而手上的肌肉纤维等则充当着执行器的角色，两者合为一体，实现了感知执行的一体化。这里的感知是智能的，可高精度、高灵敏分辨的，执行是可控的，可根据具体工况实现不同程度的执行力度的。In recent years, researchers have developed a variety of actuators that can be driven by external stimuli such as electricity, heat, light or humidity to produce deformation. However, most of the actuators reported so far rely on the properties of smart materials to perceive environmental information and achieve the actuation effect. This type of actuator that relies on the properties of smart materials to perceive environmental information and realizes actuation not only cannot intelligently recognize signals, but also cannot make intelligent and controllable execution behaviors based on environmental signals. From the perspective of bionics, this is also contrary to the approach taken by living creatures from perception to execution. Higher organisms perceive external environmental signals, such as sound, vibration, light, etc., through the receptors distributed on their body surface. These receptors encode these signals and transmit them to the central nervous system for information decoding and translation processing, and then transmit the information to the central nervous system. The executing agency conducts execution processing. In biology, it is rare to use the inherent characteristics of materials to realize the whole process of perception and execution, but most of them realize the function of perception and execution by sensing signals through sensors and executing processing by actuators. For example, people’s hands are distributed with various receptors, such as tactile receptors, pressure receptors, pain receptors, etc. These receptors act as media for perceiving information from the outside world, and the muscle fibers on the hands act as actuators. The two are integrated to realize the integration of perception and execution. The perception here is intelligent, capable of high-precision, high-sensitive resolution, controllable execution, and different degrees of execution strength can be achieved according to specific working conditions.
因此，现有致动器还有待于提高和发展。Therefore, existing actuators need to be improved and developed.
发明内容Summary of the invention
本公开要解决的技术问题在于，针对现有技术的上述缺陷，提供一种仿生感知执行一体化柔性致动器及其制备方法，旨在解决现有技术中致动器无法实现感知和执行一体化的问题。The technical problem to be solved by the present disclosure is to provide a bionic sensing and execution integrated flexible actuator and a preparation method thereof in view of the above-mentioned defects of the prior art, aiming to solve the problem that the actuator in the prior art cannot realize the integration of sensing and execution. The problem of chemistry.
本公开解决技术问题所采用的技术方案如下：The technical solutions adopted by the present disclosure to solve the technical problems are as follows:
一种仿生感知执行一体化柔性致动器，其中，包括：IPMC致动层、设置在所述IPMC致动层上胶粘剂层以及设置在胶粘剂层上的仿生应变传感元件；所述仿生应变传感元件包括：设置在所述IPMC致动层上的柔性基底层，所述柔性基底层上设置有仿生V型槽阵列，设置在所述柔性基底层上的导电层以及设置在所述导电层上的第一电极。A bionic sensing execution integrated flexible actuator, which includes: an IPMC actuation layer, an adhesive layer arranged on the IPMC actuation layer, and a bionic strain sensing element arranged on the adhesive layer; the bionic strain transmission The sensing element includes: a flexible base layer disposed on the IPMC actuation layer, a bionic V-groove array is disposed on the flexible base layer, a conductive layer disposed on the flexible base layer, and a conductive layer disposed on the conductive layer On the first electrode.
所述的仿生感知执行一体化柔性致动器，其中，所述IPMC致动层包括：全氟磺酸质子交换膜、设置在所述全氟磺酸质子交换膜上的第二电极。In the integrated flexible actuator for bionic sensing execution, the IPMC actuation layer includes: a perfluorosulfonic acid proton exchange membrane and a second electrode arranged on the perfluorosulfonic acid proton exchange membrane.
所述的仿生感知执行一体化柔性致动器，其中，所述全氟磺酸质子交换膜的厚度为100-300μm。The bionic sensing execution integrated flexible actuator, wherein the thickness of the perfluorosulfonic acid proton exchange membrane is 100-300 μm.
所述的仿生感知执行一体化柔性致动器，其中，所述柔性基底层采用如下材料制成：环氧树脂、热塑性聚氨酯、聚丙烯酸酯、聚偏氟乙烯、聚苯乙烯、聚酰胺、聚酰亚胺、聚对苯二甲酸乙二醇酯、苯乙烯-丁二烯-苯乙烯嵌段共聚物、苯乙烯-异戊二烯-苯乙烯嵌段共聚物、苯乙烯-乙烯-丁烯-苯乙烯嵌段共聚物、苯乙烯-乙烯-丙烯-苯乙烯型嵌段共聚物、天然橡胶、丁苯橡胶、顺丁橡胶、异戊橡胶、硅橡胶、氯丁橡胶、丁基橡胶、丁腈橡胶、乙丙橡胶、氟橡胶、聚二甲基硅氧烷、苯乙烯类热塑性弹性体、烯烃类热塑性弹性体、二烯类热塑性弹性体、氯乙烯类热塑性弹性体、聚酰胺类热塑性弹性体或热塑性硫化橡胶中的一种或多种。The integrated flexible actuator for bionic sensing execution, wherein the flexible base layer is made of the following materials: epoxy resin, thermoplastic polyurethane, polyacrylate, polyvinylidene fluoride, polystyrene, polyamide, poly Imide, polyethylene terephthalate, styrene-butadiene-styrene block copolymer, styrene-isoprene-styrene block copolymer, styrene-ethylene-butene -Styrenic block copolymer, styrene-ethylene-propylene-styrene block copolymer, natural rubber, styrene butadiene rubber, butadiene rubber, isoprene rubber, silicone rubber, neoprene, butyl rubber, butadiene rubber Nitrile rubber, ethylene propylene rubber, fluororubber, polydimethylsiloxane, styrene-based thermoplastic elastomer, olefin-based thermoplastic elastomer, diene-based thermoplastic elastomer, vinyl chloride-based thermoplastic elastomer, polyamide-based thermoplastic elastomer One or more of body or thermoplastic vulcanizate.
所述的仿生感知执行一体化柔性致动器，其中，所述仿生V型槽的深度为150-250nm，宽度为800-1200nm。The bionic sensing execution integrated flexible actuator, wherein the bionic V-shaped groove has a depth of 150-250 nm and a width of 800-1200 nm.
所述的仿生感知执行一体化柔性致动器，其中，所述导电层的厚度为40-60nm。The integrated flexible actuator for implementing bionic sensing, wherein the thickness of the conductive layer is 40-60 nm.
所述的仿生感知执行一体化柔性致动器，其中，所述导电层采用如下材料制成：碳纳米粒子、金纳米粒子、铂纳米粒子、银纳米粒子、铜纳米粒子、铝硼合金、铝铬合金、铁锰合金、铝铬钇合金、银铜钯合金中的一种或多种。The integrated flexible actuator for biomimetic sensing execution, wherein the conductive layer is made of the following materials: carbon nanoparticles, gold nanoparticles, platinum nanoparticles, silver nanoparticles, copper nanoparticles, aluminum-boron alloys, aluminum One or more of chromium alloy, iron-manganese alloy, aluminum-chromium-yttrium alloy, and silver-copper-palladium alloy.
所述的仿生感知执行一体化柔性致动器，其中，所述胶粘剂层为a-氰基丙烯酸酯瞬干胶、厌氧胶、丙烯酸结构胶、乙基丙烯酸酯胶粘剂、环氧丙烯酸酯胶、环氧树脂胶、聚氨酯胶、氨基树脂胶、酚醛树脂胶、丙烯酸树脂胶、呋喃树脂胶、间苯二酚-甲醛树 脂胶、二甲苯-甲醛树脂胶、饱聚酯胶、复合型树脂胶、聚酰亚胺胶、脲醛树脂胶、丁腈聚合物胶、聚硫橡胶粘合剂、聚氯乙烯胶粘剂、聚丁二烯胶、氯乙烯胶粘剂中的一种或多种。The bionic sensing execution integrated flexible actuator, wherein the adhesive layer is a-cyanoacrylate instant adhesive, anaerobic adhesive, acrylic structural adhesive, ethyl acrylate adhesive, epoxy acrylate adhesive, Epoxy resin glue, polyurethane glue, amino resin glue, phenolic resin glue, acrylic resin glue, furan resin glue, resorcinol-formaldehyde resin glue, xylene-formaldehyde resin glue, saturated polyester glue, composite resin glue, One or more of polyimide glue, urea-formaldehyde resin glue, nitrile polymer glue, polysulfide rubber adhesive, polyvinyl chloride adhesive, polybutadiene glue, and vinyl chloride adhesive.
一种如上述任意一项所述的仿生感知执行一体化柔性致动器制备方法，其特征在于，包括以下步骤：A method for preparing an integrated flexible actuator with bionic sensing execution as described in any one of the above, characterized in that it comprises the following steps:
制备IPMC致动层和仿生应变传感元件；Preparation of IPMC actuation layer and bionic strain sensing element;
将仿生应变传感元件通过胶粘剂层与IPMC致动层粘接。The bionic strain sensing element is bonded to the IPMC actuation layer through the adhesive layer.
所述的仿生感知执行一体化柔性致动器的制备方法，其中，所述IPMC致动层采用如下步骤制备：In the method for preparing the integrated flexible actuator for biomimetic sensing execution, the IPMC actuation layer is prepared by the following steps:
对全氟磺酸质子交换膜进行预处理；Pretreatment of perfluorosulfonic acid proton exchange membrane;
在全氟磺酸质子交换膜上镀第二电极；Plating the second electrode on the perfluorosulfonic acid proton exchange membrane;
将带有第二电极的全氟磺酸质子交换膜进行锂离子置换反应得到IPMC致动层。The perfluorosulfonic acid proton exchange membrane with the second electrode is subjected to a lithium ion replacement reaction to obtain an IPMC actuation layer.
所述的仿生感知执行一体化柔性致动器的制备方法，其中，所述将带有第二电极的全氟磺酸质子交换膜进行锂离子置换反应得到IPMC致动层，包括：In the method for preparing an integrated flexible actuator for biomimetic sensing and execution, wherein the lithium ion replacement reaction of the perfluorosulfonic acid proton exchange membrane with the second electrode to obtain an IPMC actuation layer includes:
将带有第二电极的全氟磺酸质子交换膜浸泡在氯化锂溶液中进行锂离子置换反应得到IPMC致动层。The perfluorosulfonic acid proton exchange membrane with the second electrode is immersed in a lithium chloride solution for lithium ion replacement reaction to obtain an IPMC actuation layer.
所述的仿生感知执行一体化柔性致动器的制备方法，其中，所述氯化锂溶液的浓度为2～4mol/L。The method for preparing the integrated flexible actuator for biomimetic sensing execution, wherein the concentration of the lithium chloride solution is 2 to 4 mol/L.
所述的仿生感知执行一体化柔性致动器的制备方法，其中，所述仿生应变传感元件采用如下步骤制备：In the manufacturing method of the integrated flexible actuator with bionic sensing and execution, the bionic strain sensing element is prepared by the following steps:
将装有乙醇的容器上放置聚苯乙烯材质上盖，然后加热乙醇，在上盖上形成V型槽阵列得到V型槽阵列模板；Place a polystyrene top cover on a container with ethanol, and then heat the ethanol to form a V-shaped groove array on the top cover to obtain a V-shaped groove array template;
以V型槽阵列模板制备反结构模板；Prepare anti-structure template with V-groove array template;
在反结构模板上旋涂柔性材料后进行脱泡处理和加热处理，并去除反结构模板得到柔性基底层；After spin-coating flexible material on the reverse structure template, perform defoaming and heating treatment, and remove the reverse structure template to obtain a flexible base layer;
在柔性基底层上溅射导电层后接入第一电极得到仿生应变传感元件。A conductive layer is sputtered on the flexible base layer and then the first electrode is connected to obtain a bionic strain sensing element.
所述的仿生感知执行一体化柔性致动器的制备方法，其中，所述在反结构模板上旋涂柔性材料，包括：The method for manufacturing the integrated flexible actuator with bionic sensing execution, wherein the spin-coating a flexible material on the reverse structure template includes:
在柔性材料中加入硬化剂，并旋涂在反结构模板上。Hardener is added to the flexible material and spin-coated on the reverse structure template.
所述的仿生感知执行一体化柔性致动器的制备方法，其中，所述柔性材料和所述硬化剂的质量比为8-12:1。The manufacturing method of the bionic sensing execution integrated flexible actuator, wherein the mass ratio of the flexible material and the hardener is 8-12:1.
有益效果：由于当外界振动波传输到仿生应变传感元件上时，超灵敏仿生应变传感元件输出电阻发生改变。当输出电阻达到预设值时，自动启动IPMC致动层，开始给致动器加上合适的电压，致动器实现致动效果。当IPMC致动层出现致动弯曲时，将进一步带动粘接在其表面的仿生应变元件层发生形变，从而改变仿生应变传感元件的输出电阻值，致动程度与输出电阻值呈现一一映射关系。根据输出的电阻值即可间接获知致动器的致动程度，从而达到实现感知执行一体化且致动智能可控的目的。Beneficial effects: When the external vibration wave is transmitted to the bionic strain sensing element, the output resistance of the super-sensitive bionic strain sensing element changes. When the output resistance reaches the preset value, the IPMC actuation layer is automatically activated, and an appropriate voltage is applied to the actuator, and the actuator realizes the actuation effect. When the actuation bending of the IPMC actuation layer occurs, it will further drive the deformation of the bionic strain element layer bonded on its surface, thereby changing the output resistance value of the bionic strain sensing element. The degree of actuation and the output resistance value show a one-to-one mapping relationship. According to the output resistance value, the degree of actuation of the actuator can be obtained indirectly, so as to achieve the purpose of integration of perception and execution and intelligent controllability of actuation.
附图说明Description of the drawings
图1是本公开中一种仿生感知执行一体化柔性致动器的第一结构示意图。Fig. 1 is a first structural schematic diagram of an integrated flexible actuator with bionic sensing execution in the present disclosure.
图2是本公开中一种仿生感知执行一体化柔性致动器的第二结构示意图。Fig. 2 is a second structural schematic diagram of an integrated flexible actuator with bionic sensing execution in the present disclosure.
图3是图2中A处的放大图。Fig. 3 is an enlarged view of A in Fig. 2.
图4是本公开中仿生V型槽的AFM图。Fig. 4 is an AFM diagram of the bionic V-shaped groove in the present disclosure.
图5是本公开中仿生V型槽截面图。Figure 5 is a cross-sectional view of the bionic V-groove in the present disclosure.
具体实施方式detailed description
为使本公开的目的、技术方案及优点更加清楚、明确，以下参照附图并举实施例对本公开进一步详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本公开，并不用于限定本公开。In order to make the objectives, technical solutions and advantages of the present disclosure clearer and clearer, the present disclosure will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present disclosure, but not used to limit the present disclosure.
请同时参阅图1-图5，本公开提供了一种仿生感知执行一体化柔性致动器的一些实施例。Please refer to FIGS. 1 to 5 at the same time. The present disclosure provides some embodiments of an integrated flexible actuator for bionic sensing execution.
实施例1Example 1
利用感受器感知信号是生物身上独特的感知方式，这些感受器通常是结构与材料耦合而成，结构精细、材料刚柔并济。此外，与现有刺激型响应致动器的响应刺激源不同的是，相当一部分生物是依靠振动信号去感知外界环境的，即振动刺激响应。典型的代表是自然界中有着四亿三千万年进化历史的蝎子。由于环境压力迫使蝎子逐渐演变成夜行性生物，经常在夜间出没的习性导致蝎子的视觉系统已经高度退化。研究发现在其步足上存在一种缝感受器，使得蝎子可以依靠这种感受器实现对周围物体产生的振动进行感知定位，根据振动波的频率、幅值等特征识别振源的基本信息，从而达到替代视觉系统的功能。更需强调的是，由于蝎子生活环境中的介质大多数属于非连续性介质，如沙漠蝎生存在沙子遍布的环境中，雨林蝎生存在落叶层层分布的环境中，再加上所处环境中其它物种多样性所产生的嘈杂信号，使得蝎子的这种通过感受器感知外界信号并甄别有效信号的能力更加灵敏优异。而这种缝感受器具体形态表现为呈放射状扇形分布的缝阵列。Using receptors to perceive signals is a unique way of sensing in organisms. These receptors are usually formed by coupling structure and material. The structure is fine and the material is rigid and flexible. In addition, unlike the response stimulus source of the existing stimulus response actuator, a considerable part of living beings rely on vibration signals to perceive the external environment, that is, the response of vibration stimulation. The typical representative is the scorpion with a 430 million-year evolutionary history in nature. Due to environmental pressures, scorpions gradually evolve into nocturnal creatures, and the habit of frequent haunts at night has caused the scorpion's visual system to be highly degraded. The study found that there is a slit receptor on its feet, so that the scorpion can rely on this receptor to perceive and locate the vibration generated by the surrounding objects, and identify the basic information of the vibration source according to the characteristics of the frequency and amplitude of the vibration wave, so as to achieve Replace the function of the visual system. What needs to be emphasized is that most of the media in the scorpion’s living environment are discontinuous media. For example, the desert scorpion lives in an environment full of sand, and the rainforest scorpion lives in an environment with layers of deciduous leaves, plus the environment. The noisy signals generated by the diversity of other species in the scorpion make the scorpion’s ability to perceive external signals through the receptors and distinguish effective signals more sensitive and excellent. The specific form of this slit susceptor is a slit array distributed in a radial fan shape.
电活性聚合物(Electroactive Polymers/EAP)是一类能够在外电场诱导下，通过材料内部构造改变产生多种形式的力学响应的材料,可以实现电能和机械能的相互转换。离子聚合物金属复合物材料(Ionic Polymer-Metal Composites/IPMC)是电活性聚合物中的一种。目前IPMC被开发的科学应用主要有人-机械界面、飞行器应用、可控制织物、机器人、生物医疗等。可见，IPMC聚合物致动器具有不可估量的应用前景。Electroactive Polymers (EAP) is a type of material that can produce various forms of mechanical response through the change of the internal structure of the material under the induction of an external electric field, and can realize the mutual conversion of electrical energy and mechanical energy. Ionic Polymer-Metal Composites (IPMC) is one of the electroactive polymers. At present, the scientific applications developed by IPMC are mainly man-machine interfaces, aircraft applications, controllable fabrics, robots, biomedicine, etc. It can be seen that IPMC polymer actuators have immeasurable application prospects.
利用蝎子优异感知振动的缝感受器，结合IPMC优异的致动性能，开发出一种高度仿生的感知执行一体化柔性致动器是在实现结构仿生与功能仿生有机统一的方向上更进一步。Using the scorpion's excellent vibration sensing slit sensor, combined with the excellent actuation performance of IPMC, the development of a highly bionic integrated flexible actuator for sensing and execution is a further step in realizing the organic unity of structural bionics and functional bionics.
如图1-图3所示，本公开的一种仿生感知执行一体化柔性致动器，包括：IPMC致动层10、设置在所述IPMC致动层10上胶粘剂层20以及设置在胶粘剂层20上的仿生应变传感元件30；所述仿生应变传感元件30包括：设置在所述IPMC致动层10上的柔性基底层31，所述柔性基底层31上设置有仿生V型槽阵列(即仿蝎子缝结构)，设置在所述柔性基底层31上的导电层32以及设置在所述导电层32上的第一电极33。如图4和图5所示，所述仿生V型槽的深度为150-250nm，宽度为800-1200nm。图5中X 表示仿生V型槽的宽度。As shown in FIGS. 1 to 3, the integrated flexible actuator for bionic sensing and execution of the present disclosure includes: an IPMC actuation layer 10, an adhesive layer 20 arranged on the IPMC actuation layer 10, and an adhesive layer The bionic strain sensing element 30 on the 20; the bionic strain sensing element 30 includes: a flexible base layer 31 disposed on the IPMC actuation layer 10, and a bionic V-shaped groove array is disposed on the flexible base layer 31 (Ie, a scorpion-like slit structure), a conductive layer 32 disposed on the flexible base layer 31 and a first electrode 33 disposed on the conductive layer 32. As shown in FIGS. 4 and 5, the depth of the bionic V-shaped groove is 150-250 nm, and the width is 800-1200 nm. X in Figure 5 represents the width of the bionic V-groove.
当外界振动波传输到感知机构(即本公开的仿生应变传感元件)上时，振动波带动柔性传感器发生形变，这种形变具体表现为拉伸或挤压，缝结构两壁之间的距离将发生变化，在缝两壁上分布的导电层32接触状态也将发生变化，从而改变电子的导电通路数目与路径，最终表现为整体仿生应变传感元件的电阻发生改变，输出到电脑端的瞬时电阻信号发生变化。电阻信号的变化程度随着振动源的振动强度改变而随之改变，因此可在信息处理系统的控制程序中设置不同电阻区间，每个电阻区间对应一个电压值。当瞬时电阻位于某个预设的电阻区间时，将自动启动执行机构，即IPMC致动层10，开始给致动器加上相应的电压，开始实现致动效果。当IPMC致动层出现致动弯曲时，将进一步带动粘接在其表面的仿生应变元件层发生形变，从而改变仿生应变传感元件的输出电阻值，致动程度与输出电阻值呈现一一映射关系。根据输出的电阻值即可间接获知致动器的致动程度，从而达到实现感知执行一体化且致动智能可控的目的。When the external vibration wave is transmitted to the sensing mechanism (ie the bionic strain sensing element of the present disclosure), the vibration wave drives the flexible sensor to deform. This deformation is specifically expressed as stretching or squeezing, and the distance between the two walls of the slit structure Will change, and the contact state of the conductive layer 32 distributed on the two walls of the slit will also change, thereby changing the number and path of electronic conductive paths, and finally manifesting as a change in the resistance of the overall bionic strain sensing element, output to the computer terminal instantaneous The resistance signal changes. The degree of change of the resistance signal changes with the vibration intensity of the vibration source. Therefore, different resistance intervals can be set in the control program of the information processing system, and each resistance interval corresponds to a voltage value. When the instantaneous resistance is located in a preset resistance interval, the actuator, that is, the IPMC actuation layer 10, will be automatically activated, and the corresponding voltage will be applied to the actuator to start the actuation effect. When the actuation bending of the IPMC actuation layer occurs, it will further drive the deformation of the bionic strain element layer bonded on its surface, thereby changing the output resistance value of the bionic strain sensing element. The degree of actuation and the output resistance value show a one-to-one mapping relationship. According to the output resistance value, the degree of actuation of the actuator can be obtained indirectly, so as to achieve the purpose of integration of perception and execution and intelligent controllability of actuation.
本公开的一个较佳实施例中，所述IPMC致动层10包括：全氟磺酸质子交换膜11、设置在所述全氟磺酸质子交换膜11上的第二电极12。In a preferred embodiment of the present disclosure, the IPMC actuation layer 10 includes: a perfluorosulfonic acid proton exchange membrane 11 and a second electrode 12 arranged on the perfluorosulfonic acid proton exchange membrane 11.
具体地，所述IPMC致动层10采用如下步骤制备：Specifically, the IPMC actuation layer 10 is prepared using the following steps:
步骤S111、对全氟磺酸质子交换膜11进行预处理。In step S111, the perfluorosulfonic acid proton exchange membrane 11 is pretreated.
采用厚度为100-300μm的全氟磺酸质子交换膜11，并对其进行裁剪，然后采用超声波清洗全氟磺酸质子交换膜11的表面，并去除有机杂质：浸泡在质量分数为5～10％的过氧化氢溶液中3～6个小时后，再放入去离子水中煮沸一个小时。然后去除无机离子：放入质量分数为3～5％的硫酸溶液中充分浸泡4～8个小时。最后进行溶胀与清洗：放入去离子水中煮沸一个小时。完成对全氟磺酸质子交换膜11的预处理。Use the perfluorosulfonic acid proton exchange membrane 11 with a thickness of 100-300μm, and cut it, then use ultrasonic to clean the surface of the perfluorosulfonic acid proton exchange membrane 11, and remove organic impurities: soak in a mass fraction of 5-10 % Hydrogen peroxide solution for 3 to 6 hours, then put it in deionized water and boil for one hour. Then remove the inorganic ions: put it in a sulfuric acid solution with a mass fraction of 3 to 5% and fully soak for 4 to 8 hours. Finally, swelling and cleaning: put in deionized water and boil for one hour. The pretreatment of the perfluorosulfonic acid proton exchange membrane 11 is completed.
步骤S112、在全氟磺酸质子交换膜11上镀第二电极12。Step S112, plating the second electrode 12 on the perfluorosulfonic acid proton exchange membrane 11.
在对全氟磺酸质子交换膜11进行预处理后，采用化学方法在全氟磺酸质子交换膜11表面镀金属电极，即第二电极12。After the perfluorosulfonic acid proton exchange membrane 11 is pretreated, a metal electrode, that is, the second electrode 12, is plated on the surface of the perfluorosulfonic acid proton exchange membrane 11 by a chemical method.
具体地，(1)将处理后的全氟磺酸质子交换膜11浸泡在质量分数为5～10％的四铵合氯化铂水溶液中24个小时以上。Specifically, (1) The treated perfluorosulfonic acid proton exchange membrane 11 is immersed in a tetraammonium platinum chloride aqueous solution with a mass fraction of 5-10% for more than 24 hours.
(2)选用异丙醇助化学镀方法完成全氟磺酸质子交换膜11表面金属电极的制备。将全氟磺酸质子交换膜11被转移至异丙醇与水的混合液的水浴中，异丙醇与水的体积比固定在1:3。全氟磺酸质子交换膜11在异丙醇溶液中充分膨胀后，重复加入5～10ml质量分数为百分之五的硼氢化钠水溶液至少10次进行金属离子的还原，硼氢化钠溶液加入时间间隔约为30分钟。还原过程中，不停地用玻璃棒剧烈搅拌混合溶液，并将温度保持在40℃左右。(2) The preparation of the metal electrode on the surface of the perfluorosulfonic acid proton exchange membrane 11 is completed by using the isopropanol-assisted electroless plating method. The perfluorosulfonic acid proton exchange membrane 11 is transferred to a water bath of a mixture of isopropanol and water, and the volume ratio of isopropanol to water is fixed at 1:3. After the perfluorosulfonic acid proton exchange membrane 11 is fully expanded in isopropanol solution, add 5-10ml of 5% by mass sodium borohydride aqueous solution for at least 10 times to reduce metal ions, adding time for sodium borohydride solution The interval is about 30 minutes. During the reduction process, the mixed solution was vigorously stirred with a glass rod continuously and the temperature was kept at about 40°C.
(3)重复步骤(1)和(2)，以得到表面质量较好的金属电极。(3) Repeat steps (1) and (2) to obtain a metal electrode with better surface quality.
步骤S113、将带有第二电极12的全氟磺酸质子交换膜11浸泡在氯化锂溶液中进行锂离子置换反应得到IPMC致动层10。Step S113, immersing the perfluorosulfonic acid proton exchange membrane 11 with the second electrode 12 in a lithium chloride solution to perform a lithium ion replacement reaction to obtain an IPMC actuation layer 10.
具体地，(1)将表面带有第二电极12的全氟磺酸质子交换膜11放入去离子水中洗涤，再干燥。Specifically, (1) The perfluorosulfonic acid proton exchange membrane 11 with the second electrode 12 on the surface is washed in deionized water, and then dried.
(2)锂离子置换：将干燥后的全氟磺酸质子交换浸泡在2～4mol/L氯化锂溶液中24小时以上，使溶液移动离子被交换的离子完全为锂离子，完成锂离子置换反应，即得IMPC致动器。(2) Lithium ion replacement: soak the dried perfluorosulfonic acid proton exchange in 2～4mol/L lithium chloride solution for more than 24 hours, so that the ions exchanged by the mobile ions in the solution are completely lithium ions, and the lithium ion replacement is completed. The response is the IMPC actuator.
所述仿生应变传感元件30采用如下步骤制备：The bionic strain sensing element 30 is prepared in the following steps:
S121、将装有乙醇的容器上放置聚苯乙烯制上盖，然后加热乙醇，在上盖上形成V型槽阵列得到V型槽阵列模板；S121. Put a polystyrene top cover on a container containing ethanol, and then heat the ethanol to form a V-shaped groove array on the top cover to obtain a V-shaped groove array template;
具体地，乙醇加热温度为80℃，加热时间为8-16h，由于溶剂诱导法与聚苯乙烯线性分子链特性，聚苯乙烯制上盖表面出现规则的V型槽阵列结构，然后采用超声波清洗其表面。Specifically, the ethanol heating temperature is 80°C, and the heating time is 8-16h. Due to the solvent induction method and the linear molecular chain characteristics of polystyrene, a regular V-shaped groove array structure appears on the surface of the polystyrene cover, and then ultrasonic cleaning is used Its surface.
S122、以V型槽阵列模板制备反结构模板。S122, preparing a reverse structure template using a V-shaped groove array template.
具体地，本公开中采用环氧树脂AB胶制备反结构模板，将环氧树脂AB胶以3:1的质量比混合均匀后，放入聚苯乙烯制上盖中，并通过真空箱进行真空脱泡，脱泡时间为2h。然后，放入烘箱中进行固化，固化温度为50℃，固化时间为7-9h。环氧树脂AB胶固化后，可以采用机械方式将环氧树脂AB胶固化形成的膜(即反结构模板)与V型槽阵列模板分离，反结构模板具有与V型槽阵列配合的V型凸起。Specifically, in the present disclosure, epoxy resin AB glue is used to prepare the reverse structure template. After the epoxy resin AB glue is mixed uniformly at a mass ratio of 3:1, it is put into a polystyrene cover, and vacuumed by a vacuum box. The deaeration time is 2h. Then, put it into an oven for curing, the curing temperature is 50°C, and the curing time is 7-9h. After the epoxy resin AB glue is cured, the film formed by curing the epoxy resin AB glue (that is, the reverse structure template) can be separated from the V-shaped groove array template by mechanical means. The reverse structure template has a V-shaped convex that matches the V-shaped groove array. Up.
S123、在反结构模板上旋涂柔性材料后进行脱泡处理和加热处理，并去除反结构模板得到柔性基底层31。S123: After spin-coating a flexible material on the reverse structure template, perform defoaming treatment and heating treatment, and remove the reverse structure template to obtain the flexible base layer 31.
具体地，所述柔性材料为环氧树脂、热塑性聚氨酯、聚丙烯酸酯、聚偏氟乙烯、聚苯乙烯、聚酰胺、聚酰亚胺、聚对苯二甲酸乙二醇酯、苯乙烯-丁二烯-苯乙烯嵌段共聚物、苯乙烯-异戊二烯-苯乙烯嵌段共聚物、苯乙烯-乙烯-丁烯-苯乙烯嵌段共聚物、苯乙烯-乙烯-丙烯-苯乙烯型嵌段共聚物、天然橡胶、丁苯橡胶、顺丁橡胶、异戊橡胶、硅橡胶、氯丁橡胶、丁基橡胶、丁腈橡胶、乙丙橡胶、氟橡胶、聚二甲基硅氧烷、苯乙烯类热塑性弹性体、烯烃类热塑性弹性体、二烯类热塑性弹性体、氯乙烯类热塑性弹性体、聚酰胺类热塑性弹性体或热塑性硫化橡胶中的一种或多种。Specifically, the flexible material is epoxy resin, thermoplastic polyurethane, polyacrylate, polyvinylidene fluoride, polystyrene, polyamide, polyimide, polyethylene terephthalate, styrene-butylene Diene-styrene block copolymer, styrene-isoprene-styrene block copolymer, styrene-ethylene-butylene-styrene block copolymer, styrene-ethylene-propylene-styrene type Block copolymer, natural rubber, styrene butadiene rubber, butadiene rubber, isoprene rubber, silicone rubber, neoprene rubber, butyl rubber, nitrile rubber, ethylene propylene rubber, fluorine rubber, polydimethylsiloxane, One or more of styrene-based thermoplastic elastomer, olefin-based thermoplastic elastomer, diene-based thermoplastic elastomer, vinyl chloride-based thermoplastic elastomer, polyamide-based thermoplastic elastomer, or thermoplastic vulcanizate.
为了加快柔性材料的固化，在柔性材料中加入硬化剂，柔性材料与硬化剂以质量比8-12:1的比例混合后，通过旋涂机旋涂在反结构模板上，具体旋涂在反结构模板上具有V型凸起的一面。然后进行脱泡处理和加热处理，这里采用真空脱泡，加热温度为70-90℃，加热时间为3-5h。最后采用机械方式去除反结构模板，由于反结构模板上有V型凸起，那么柔性材料层具有与V型槽阵列模板一致的V型槽阵列结构。通过控制柔性材料的加入量，可以得到不同厚度的柔性材料层，本实施例中，柔性材料层的厚度为150-250μm。In order to accelerate the curing of the flexible material, a hardener is added to the flexible material. After the flexible material and the hardener are mixed in a mass ratio of 8-12:1, they are spin-coated on the reverse structure template by a spin coater. The structure template has a V-shaped convex side. Then carry out defoaming treatment and heating treatment, where vacuum defoaming is used, the heating temperature is 70-90℃, and the heating time is 3-5h. Finally, the reverse structure template is mechanically removed. Since the reverse structure template has V-shaped protrusions, the flexible material layer has a V-shaped groove array structure consistent with the V-shaped groove array template. By controlling the amount of the flexible material added, flexible material layers of different thicknesses can be obtained. In this embodiment, the thickness of the flexible material layer is 150-250 μm.
S124、在柔性基底层31上溅射导电层32后接入第一电极33得到仿生应变传感元件30。S124: Sputter the conductive layer 32 on the flexible base layer 31 and then connect the first electrode 33 to obtain the bionic strain sensing element 30.
具体地，所述导电层32采用如下材料制成：碳纳米粒子、金纳米粒子、铂纳米粒子、银纳米粒子、铜纳米粒子、铝硼合金、铝铬合金、铁锰合金、铝铬钇合金、银铜钯合金中的一种或多种。导电层32可以增强柔性材料与第一电极33之间的结合力。所述导电层32的厚度为40-60nm，根据经济性考量选择银作为靶材，喷涂约为50nm厚度的银粒子薄膜。Specifically, the conductive layer 32 is made of the following materials: carbon nanoparticles, gold nanoparticles, platinum nanoparticles, silver nanoparticles, copper nanoparticles, aluminum-boron alloys, aluminum-chromium alloys, iron-manganese alloys, aluminum-chromium-yttrium alloys , One or more of silver-copper-palladium alloys. The conductive layer 32 can enhance the bonding force between the flexible material and the first electrode 33. The thickness of the conductive layer 32 is 40-60 nm. According to economic considerations, silver is selected as the target material to spray a thin film of silver particles with a thickness of about 50 nm.
在IPMC致动层10和仿生应变传感元件30制备完后，将仿生应变传感元件30通过胶粘剂层20与IPMC致动层10连接。After the IPMC actuation layer 10 and the bionic strain sensing element 30 are prepared, the bionic strain sensing element 30 is connected to the IPMC actuation layer 10 via the adhesive layer 20.
所述胶粘剂层20为a-氰基丙烯酸酯瞬干胶、厌氧胶、丙烯酸结构胶、乙基丙烯酸 酯胶粘剂、环氧丙烯酸酯胶、环氧树脂胶、聚氨酯胶、氨基树脂胶、酚醛树脂胶、丙烯酸树脂胶、呋喃树脂胶、间苯二酚-甲醛树脂胶、二甲苯-甲醛树脂胶、饱聚酯胶、复合型树脂胶、聚酰亚胺胶、脲醛树脂胶、丁腈聚合物胶、聚硫橡胶粘合剂、聚氯乙烯胶粘剂、聚丁二烯胶、氯乙烯胶粘剂中的一种或多种。The adhesive layer 20 is a-cyanoacrylate instant adhesive, anaerobic adhesive, acrylic structural adhesive, ethyl acrylate adhesive, epoxy acrylate adhesive, epoxy resin adhesive, polyurethane adhesive, amino resin adhesive, phenolic resin Glue, acrylic resin glue, furan resin glue, resorcinol-formaldehyde resin glue, xylene-formaldehyde resin glue, saturated polyester glue, composite resin glue, polyimide glue, urea-formaldehyde resin glue, nitrile polymer One or more of glue, polysulfide rubber adhesive, polyvinyl chloride adhesive, polybutadiene glue, and vinyl chloride adhesive.
实施例2Example 2
本公开还提供了一种如上述任意一实施例所述仿生的感知执行一体化柔性致动器的制备方法，包括以下步骤：The present disclosure also provides a method for manufacturing the bionic sensing and execution integrated flexible actuator as described in any of the above embodiments, including the following steps:
S100、制备IPMC致动层10和仿生应变传感元件30，具体如上所述。S100, preparing the IPMC actuation layer 10 and the bionic strain sensing element 30, as described above.
S200、将仿生应变传感元件30通过胶粘剂层20与IPMC致动层10连接，具体如上所述。S200: Connect the bionic strain sensing element 30 to the IPMC actuation layer 10 through the adhesive layer 20, which is specifically described above.
综上所述，本公开所提供的一种仿生的感知执行一体化柔性致动器及其制备方法，所述柔性致动器包括：IPMC致动层、设置在所述IPMC致动层上胶粘剂层以及设置在胶粘剂层上的仿生应变传感元件；所述仿生应变传感元件包括：设置在所述IPMC致动层上的柔性基底层，所述柔性基底层上设置有仿生V型槽阵列，设置在所述柔性基底层上的导电层以及设置在所述导电层上的第一电极。由于当外界振动波传输到仿生应变传感元件上时，仿生应变传感元件的电阻发生改变。相应地，自动启动IPMC致动层，开始给致动器加上相应的电压，开始实现致动效果。当IPMC致动层出现致动弯曲时，将进一步带动仿生应变元件层发生形变，从而改变仿生应变传感元件的输出电阻值，致动程度与输出电阻值呈现一一映射关系，从而达到实现感知执行一体化且致动智能可控的目的。To sum up, the present disclosure provides a bionic sensory execution integrated flexible actuator and a preparation method thereof. The flexible actuator includes: an IPMC actuation layer, and an adhesive disposed on the IPMC actuation layer Layer and a bionic strain sensing element arranged on the adhesive layer; the bionic strain sensing element comprises: a flexible base layer arranged on the IPMC actuation layer, and a bionic V-shaped groove array is arranged on the flexible base layer , A conductive layer arranged on the flexible base layer and a first electrode arranged on the conductive layer. Because when the external vibration wave is transmitted to the bionic strain sensing element, the resistance of the bionic strain sensing element changes. Correspondingly, the IPMC actuation layer is automatically activated, and the corresponding voltage is applied to the actuator to start the actuation effect. When the IPMC actuation layer is actuated to bend, it will further drive the deformation of the bionic strain element layer, thereby changing the output resistance value of the bionic strain sensing element. The actuation degree and the output resistance value show a one-to-one mapping relationship, so as to achieve sensing Perform the purpose of integration and actuation of intelligent and controllable.
应当理解的是，本公开的应用不限于上述的举例，对本领域普通技术人员来说，可以根据上述说明加以改进或变换，所有这些改进和变换都应属于本公开所附权利要求的保护范围。It should be understood that the application of the present disclosure is not limited to the above examples, and those of ordinary skill in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the protection scope of the appended claims of the present disclosure.

Claims (15)

  1. 一种仿生感知执行一体化柔性致动器，其特征在于，包括：IPMC致动层、设置在所述IPMC致动层上胶粘剂层以及设置在胶粘剂层上的仿生应变传感元件；所述仿生应变传感元件包括：设置在所述IPMC致动层上的柔性基底层，所述柔性基底层上设置有仿生V型槽阵列，设置在所述柔性基底层上的导电层以及设置在所述导电层上的第一电极。A bionic sensing execution integrated flexible actuator, which is characterized by comprising: an IPMC actuation layer, an adhesive layer arranged on the IPMC actuation layer, and a bionic strain sensing element arranged on the adhesive layer; The strain sensing element includes: a flexible base layer arranged on the IPMC actuation layer, a bionic V-groove array is arranged on the flexible base layer, a conductive layer arranged on the flexible base layer, and a conductive layer arranged on the flexible base layer; The first electrode on the conductive layer.
  2. 根据权利要求1所述的仿生感知执行一体化柔性致动器，其特征在于，所述IPMC致动层包括：全氟磺酸质子交换膜、设置在所述全氟磺酸质子交换膜上的第二电极。The integrated flexible actuator with bionic sensing and execution according to claim 1, wherein the IPMC actuation layer comprises: a perfluorosulfonic acid proton exchange membrane, a perfluorosulfonic acid proton exchange membrane The second electrode.
  3. 根据权利要求1所述的仿生感知执行一体化柔性致动器，其特征在于，所述全氟磺酸质子交换膜的厚度为100-300μm。The integrated flexible actuator with bionic sensing execution according to claim 1, wherein the thickness of the perfluorosulfonic acid proton exchange membrane is 100-300 μm.
  4. 根据权利要求1所述的仿生感知执行一体化柔性致动器，其特征在于，所述柔性基底层采用如下材料制成：环氧树脂、热塑性聚氨酯、聚丙烯酸酯、聚偏氟乙烯、聚苯乙烯、聚酰胺、聚酰亚胺、聚对苯二甲酸乙二醇酯、苯乙烯-丁二烯-苯乙烯嵌段共聚物、苯乙烯-异戊二烯-苯乙烯嵌段共聚物、苯乙烯-乙烯-丁烯-苯乙烯嵌段共聚物、苯乙烯-乙烯-丙烯-苯乙烯型嵌段共聚物、天然橡胶、丁苯橡胶、顺丁橡胶、异戊橡胶、硅橡胶、氯丁橡胶、丁基橡胶、丁腈橡胶、乙丙橡胶、氟橡胶、聚二甲基硅氧烷、苯乙烯类热塑性弹性体、烯烃类热塑性弹性体、二烯类热塑性弹性体、氯乙烯类热塑性弹性体、聚酰胺类热塑性弹性体或热塑性硫化橡胶中的一种或多种。The integrated flexible actuator for bionic sensing execution according to claim 1, wherein the flexible base layer is made of the following materials: epoxy resin, thermoplastic polyurethane, polyacrylate, polyvinylidene fluoride, polystyrene Ethylene, polyamide, polyimide, polyethylene terephthalate, styrene-butadiene-styrene block copolymer, styrene-isoprene-styrene block copolymer, benzene Ethylene-ethylene-butylene-styrene block copolymer, styrene-ethylene-propylene-styrene block copolymer, natural rubber, styrene butadiene rubber, butadiene rubber, isoprene rubber, silicone rubber, neoprene rubber , Butyl rubber, nitrile rubber, ethylene propylene rubber, fluororubber, polydimethylsiloxane, styrene thermoplastic elastomer, olefin thermoplastic elastomer, diene thermoplastic elastomer, vinyl chloride thermoplastic elastomer , One or more of polyamide thermoplastic elastomer or thermoplastic vulcanizate.
  5. 根据权利要求1所述的仿生感知执行一体化柔性致动器，其特征在于，所述仿生V型槽的深度为150-250nm，宽度为800-1200nm。The integrated flexible actuator for bionic sensing and execution according to claim 1, wherein the bionic V-shaped groove has a depth of 150-250 nm and a width of 800-1200 nm.
  6. 根据权利要求1所述的仿生感知执行一体化柔性致动器，其特征在于，所述导电层的厚度为40-60nm。The integrated flexible actuator with bionic sensing execution according to claim 1, wherein the thickness of the conductive layer is 40-60 nm.
  7. 根据权利要求1所述的仿生感知执行一体化柔性致动器，其特征在于，所述导电层采用如下材料制成：碳纳米粒子、金纳米粒子、铂纳米粒子、银纳米粒子、铜纳米粒子、铝硼合金、铝铬合金、铁锰合金、铝铬钇合金、银铜钯合金中的一种或多种。The integrated flexible actuator for bionic sensing execution according to claim 1, wherein the conductive layer is made of the following materials: carbon nanoparticles, gold nanoparticles, platinum nanoparticles, silver nanoparticles, copper nanoparticles , Aluminum-boron alloy, aluminum-chromium alloy, iron-manganese alloy, aluminum-chromium-yttrium alloy, silver-copper-palladium alloy.
  8. 根据权利要求1所述的仿生感知执行一体化柔性致动器，其特征在于，所述胶粘剂层为a-氰基丙烯酸酯瞬干胶、厌氧胶、丙烯酸结构胶、乙基丙烯酸酯胶粘剂、环氧丙 烯酸酯胶、环氧树脂胶、聚氨酯胶、氨基树脂胶、酚醛树脂胶、丙烯酸树脂胶、呋喃树脂胶、间苯二酚-甲醛树脂胶、二甲苯-甲醛树脂胶、饱聚酯胶、复合型树脂胶、聚酰亚胺胶、脲醛树脂胶、丁腈聚合物胶、聚硫橡胶粘合剂、聚氯乙烯胶粘剂、聚丁二烯胶、氯乙烯胶粘剂中的一种或多种。The integrated flexible actuator with bionic sensing execution according to claim 1, wherein the adhesive layer is a-cyanoacrylate instant adhesive, anaerobic adhesive, acrylic structural adhesive, ethyl acrylate adhesive, Epoxy acrylate glue, epoxy resin glue, polyurethane glue, amino resin glue, phenolic resin glue, acrylic resin glue, furan resin glue, resorcinol-formaldehyde resin glue, xylene-formaldehyde resin glue, saturated polyester glue One or more of compound resin glue, polyimide glue, urea-formaldehyde resin glue, nitrile polymer glue, polysulfide rubber adhesive, polyvinyl chloride adhesive, polybutadiene glue, vinyl chloride adhesive .
  9. 一种如权利要求1-8任意一项所述的仿生感知执行一体化柔性致动器的制备方法，其特征在于，包括以下步骤：A method for preparing an integrated flexible actuator with bionic sensing execution according to any one of claims 1-8, characterized in that it comprises the following steps:
    制备IPMC致动层和仿生应变传感元件；Preparation of IPMC actuation layer and bionic strain sensing element;
    将仿生应变传感元件通过胶粘剂层与IPMC致动层粘接。The bionic strain sensing element is bonded to the IPMC actuation layer through the adhesive layer.
  10. 根据权利要求9所述的仿生感知执行一体化柔性致动器的制备方法，其特征在于，所述IPMC致动层采用如下步骤制备：The method for preparing an integrated flexible actuator with bionic sensing and execution according to claim 9, wherein the IPMC actuation layer is prepared by the following steps:
    对全氟磺酸质子交换膜进行预处理；Pretreatment of perfluorosulfonic acid proton exchange membrane;
    在全氟磺酸质子交换膜上镀第二电极；Plating the second electrode on the perfluorosulfonic acid proton exchange membrane;
    将带有第二电极的全氟磺酸质子交换膜进行锂离子置换反应得到IPMC致动层。The perfluorosulfonic acid proton exchange membrane with the second electrode is subjected to a lithium ion replacement reaction to obtain an IPMC actuation layer.
  11. 根据权利要求10所述的仿生感知执行一体化柔性致动器的制备方法，其特征在于，所述将带有第二电极的全氟磺酸质子交换膜进行锂离子置换反应得到IPMC致动层，包括：The method for preparing an integrated flexible actuator with bionic sensing execution according to claim 10, wherein the perfluorosulfonic acid proton exchange membrane with the second electrode is subjected to lithium ion replacement reaction to obtain an IPMC actuation layer ,include:
    将带有第二电极的全氟磺酸质子交换膜浸泡在氯化锂溶液中进行锂离子置换反应得到IPMC致动层。The perfluorosulfonic acid proton exchange membrane with the second electrode is immersed in a lithium chloride solution for lithium ion replacement reaction to obtain an IPMC actuation layer.
  12. 根据权利要求11所述的仿生感知执行一体化柔性致动器的制备方法，其特征在于，所述氯化锂溶液的浓度为2～4mol/L。The method for preparing an integrated flexible actuator with bionic sensing and execution according to claim 11, wherein the concentration of the lithium chloride solution is 2 to 4 mol/L.
  13. 根据权利要求9所述的仿生感知执行一体化柔性致动器的制备方法，其特征在于，所述仿生应变传感元件采用如下步骤制备：The method for preparing an integrated flexible actuator with bionic sensing and execution according to claim 9, wherein the bionic strain sensing element is prepared in the following steps:
    将装有乙醇的容器上放置聚苯乙烯制上盖，然后加热乙醇，在上盖上形成V型槽阵列得到V型槽阵列模板；Place a polystyrene top cover on a container with ethanol, and then heat the ethanol to form a V-shaped groove array on the top cover to obtain a V-shaped groove array template;
    以V型槽阵列模板制备反结构模板；Prepare anti-structure template with V-groove array template;
    在反结构模板上旋涂柔性材料后进行脱泡处理和加热处理，并去除反结构模板得到 柔性基底层；After spin-coating flexible material on the reverse structure template, perform defoaming and heating treatment, and remove the reverse structure template to obtain a flexible base layer;
    在柔性基底层上溅射导电层后接入第一电极得到仿生应变传感元件。A conductive layer is sputtered on the flexible base layer and then the first electrode is connected to obtain a bionic strain sensing element.
  14. 根据权利要求13所述的仿生感知执行一体化柔性致动器的制备方法，其特征在于，所述在反结构模板上旋涂柔性材料，包括：The method for manufacturing an integrated flexible actuator with bionic sensing and execution according to claim 13, wherein the spin-coating a flexible material on the reverse structure template comprises:
    在柔性材料中加入硬化剂，并旋涂在反结构模板上。Hardener is added to the flexible material and spin-coated on the reverse structure template.
  15. 根据权利要求11所述的仿生感知执行一体化柔性致动器的制备方法，其特征在于，所述柔性材料和所述硬化剂的质量比为8-12:1。The method for preparing an integrated flexible actuator with bionic sensing execution according to claim 11, wherein the mass ratio of the flexible material and the hardener is 8-12:1.
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