CN111307107B - Bionic hypersensitive strain sensor with visual effect and preparation method thereof - Google Patents

Bionic hypersensitive strain sensor with visual effect and preparation method thereof Download PDF

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CN111307107B
CN111307107B CN202010122016.5A CN202010122016A CN111307107B CN 111307107 B CN111307107 B CN 111307107B CN 202010122016 A CN202010122016 A CN 202010122016A CN 111307107 B CN111307107 B CN 111307107B
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layer
crack
thermochromic
template
effect
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CN111307107A (en
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张俊秋
孙涛
韩志武
侯涛
牛士超
穆正知
刘林鹏
孟宪存
张昌超
陈豫
秦晓静
王大凯
刘庆萍
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Jilin University
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Jilin University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/32Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring the deformation in a solid

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Abstract

The invention provides a bionic hypersensitive strain sensor with visual effect and a preparation method thereof, wherein the strain sensor comprises a thermochromic layer, a conductive functional layer and a crack structural layer for strain sensing, which are sequentially arranged from top to bottom; wherein the thermochromic layer has a regularly arranged hole structure; the upper surface of the crack structure layer is a regularly ordered crack array structure, and the upper surface of the crack structure layer is the surface of one side of the crack structure layer close to the conductive function layer; the conductive function layer is provided with two electrodes which are respectively arranged at two ends of the conductive function layer. According to the invention, the crack side wall of the crack structure layer is repeatedly opened and closed in the deformation process, so that the external micro strain is sensitively sensed, the strain sensing sensitivity and flexibility are greatly improved, the problem of sparse observation existing in the traditional rigid sensor is solved, and after the bionic hypersensitive strain sensor is deformed, the color of the thermochromic layer is changed by changing the temperature through joule heat, so that the strain effect visualization is realized.

Description

Bionic hypersensitive strain sensor with visual effect and preparation method thereof
Technical Field
The invention relates to the technical field of flexible sensors, in particular to a bionic hypersensitive strain sensor with visual effect and a preparation method thereof.
Background
In recent years, the interaction between people and various electronic products is increasing, and for the majority of users, it is becoming more and more important to convert the signals monitored by the sensor into clearly recognizable signals, such as color, texture, sound, taste, and the like. This requires that the sensing elements accurately detect external or body surface signal stimuli and quickly translate into a variety of information that can be directly recognized by the user.
At present, strain sensors receive minimal stimulation, and the need for signal visualization is great in various delicate fields, such as medical devices, including tumor growth monitoring, heart rate monitoring of clinical patients, respiratory monitoring, and safety devices, including crack detection of pipes and fault/explosion detection of mobile batteries. With the increasingly prominent importance of clear signal identification, the real-time monitoring of the working state of the sensing element by using the visualization of mechanical signals faces a great challenge. In order to read and identify mechanical signals, the traditional means usually needs complex signal processing circuits and sensors, is complex and time-consuming to operate, and needs a data acquisition system with high power consumption. In addition, the sensitivity coefficient of the current strain sensing element is insufficient, micro strain under a specific working condition cannot be detected, or the current strain sensing element cannot be perfectly attached to the surface of an object due to the influence of the material property of the current strain sensing element, so that the phenomenon of 'sparse observation' of the sensor exists.
Based on the above, the prior art has the problems that the sensitivity coefficient is insufficient for the detection and the receiving of the micro-stimulation, and the real-time visualization of the detection result cannot be realized.
The above drawbacks are expected to be overcome by those skilled in the art.
Disclosure of Invention
Technical problem to be solved
In order to solve the problems in the prior art, the invention provides a bionic hypersensitive strain sensor with a visualized effect and a preparation method thereof, and solves the problems that the sensitivity coefficient is insufficient for the detection and the receiving of micro stimulation and the real-time visualization of the detection result cannot be realized in the prior art.
(II) technical scheme
In order to achieve the purpose, the invention adopts the main technical scheme that:
in one aspect, the present invention provides a biomimetic hypersensitive strain sensor with visualized effect, comprising:
the thermochromic layer, the conductive functional layer and the crack structure layer are sequentially arranged from top to bottom;
wherein the thermochromic layer has a regularly arranged pore structure;
the upper surface of the crack structure layer is provided with a regularly ordered crack array structure, and the upper surface of the crack structure layer is the surface of one side of the crack structure layer close to the conductive function layer;
the conductive function layer is provided with two electrodes which are respectively arranged at two ends of the conductive function layer.
In an exemplary embodiment of the invention, the thermochromic layer has a three-dimensional pore structure with a pore diameter of 150-200 μm and a pore pitch of 50-100 μm.
In an exemplary embodiment of the invention, the crack array structure comprises a plurality of cracks, wherein the width of the cracks is 2-5 μm, the interval of the cracks is 10-15 μm, and the depth of the cracks is 3-4 μm.
On the other hand, the invention also provides a preparation method of the bionic hypersensitive strain sensor with visual effect, which comprises the following steps:
s1: manufacturing a first template with a regularly-arranged cylindrical structure;
s2: at least three thermochromic pigments and a prepolymer of polydimethylsiloxane PDMS in a mass ratio of 1: 2, adding a curing agent to obtain a flexible thermochromic compound;
s3: coating the flexible thermochromic compound on the first template, curing, and stripping from the first template to obtain a thermochromic layer;
s4: preparing a second template with a crack reverse structure on the surface, coating a flexible material on the second template, curing, stripping from the second template to obtain a crack structure layer, and forming a regular and ordered crack array structure on the upper surface of the crack structure layer exposed by stripping;
s5: depositing a metal layer on the upper surface of the crack structure layer by adopting a sputtering process to form a conductive function layer;
s6: and connecting the thermochromic layer obtained in the step S3 with the crack structure layer deposited with the conductive functional layer obtained in the step S5 by using a silane coupling agent to obtain the bionic hypersensitive strain sensor.
In an exemplary embodiment of the present invention, step S1 includes:
and forming regularly-arranged cylinder structures on the surface of the metal sheet by using a laser marking machine or a photoetching technology to obtain a first template, wherein the diameter of the cylinders is 150-200 mu m, and the distance between the cylinders is 50-100 mu m.
In an exemplary embodiment of the present invention, step S2 includes:
s21: taking four kinds of thermal discoloration pigments with the temperature of 22 ℃, 31 ℃, 33 ℃ and 45 ℃;
s22: and (3) mixing the four thermochromic pigments with a prepolymer of PDMS according to a mass ratio of 1: 2, mixing;
s23: the mixture in step S22 is mixed at a mass ratio of 10: 1, adding a curing agent and mixing to obtain the flexible thermochromic compound.
In an exemplary embodiment of the present invention, step S3 includes:
s31: coating the flexible thermochromic complex on the first template, and performing vacuum drying under 0.1 atmospheric pressure;
s32: heating the flexible thermochromic compound dried in the step S31 at 120 ℃ for 2 hours for curing;
s33: and peeling the cured film from the first template to obtain the thermochromic layer with a three-dimensional hole structure.
In an exemplary embodiment of the present invention, step S4 includes:
s41: cutting a regular crack structure on the surface of the metal sheet by using an ion focusing technology, wherein the width of the crack is 2-5 mu m, the interval of the crack is 10-15 mu m, and the depth of the crack is 3-4 mu m;
s42: a, B two components of epoxy resin AB glue are uniformly mixed according to the mass ratio of 3:1, and vacuum drying is carried out;
s43: coating the mixed and vacuum-dried epoxy resin AB glue on the surface of a prefabricated template, heating at 60 ℃ for 2 hours for curing, and preparing a second template with a crack reverse structure film on the surface, wherein the thickness of the film is 500 mu m;
s44: and (2) mixing a prepolymer of PDMS and a curing agent according to a mass ratio of 10: 1, and performing vacuum drying to obtain a flexible material;
s45: coating the flexible material on the surface of the second template, heating at 80 ℃ for 2 hours, and curing to prepare a PDMS film with a crack structure on the surface, wherein the thickness of the film is 400 μm;
s46: and stripping the PDMS film from the second template to obtain the crack structure layer, wherein the upper surface of the crack structure layer exposed by stripping forms a regular and ordered crack array structure.
In an exemplary embodiment of the present invention, step S6 includes:
s61: uniformly coating a silane coupling agent on the lower surface of the thermochromic layer, and pressing the thermochromic layer on the upper surface of the crack structure layer deposited with the conductive function layer to obtain a pressed structure;
s62: and curing the press-fit structure at 120 ℃ for 1 hour to obtain the bionic hypersensitive strain sensor.
(III) advantageous effects
The invention has the beneficial effects that: according to the bionic hypersensitive strain sensor with visual effect and the preparation method thereof, provided by the embodiment of the invention, the crack side wall of the crack structure layer is repeatedly opened and closed in the deformation process, so that the external micro strain is sensitively sensed, the strain sensing sensitivity and flexibility are greatly improved, the problem of poor visibility of the traditional rigid sensor is solved, and after the bionic hypersensitive strain sensor is deformed, the temperature is changed through joule heat, so that the color of the thermochromism layer is changed, and the strain effect is visualized.
Drawings
Fig. 1 is a schematic structural diagram of a bionic hypersensitivity sensor with visualized effect according to an embodiment of the present invention;
FIG. 2 is a block diagram of a thermochromic layer in accordance with an embodiment of the present invention;
FIG. 3 is a structural diagram of a fracture structure layer according to an embodiment of the present invention;
fig. 4 is a flowchart illustrating steps of a method for manufacturing a visual effect bionic hypersensitivity sensor according to another embodiment of the present invention;
FIG. 5 is a flowchart of step S2 according to another embodiment of the present invention;
FIG. 6 is a flowchart of step S3 according to another embodiment of the present invention;
FIG. 7 is a flowchart of step S4 according to another embodiment of the present invention;
fig. 8 is a flowchart of step S6 according to another embodiment of the present invention.
Description of reference numerals:
1: a thermochromic layer;
2: a conductive functional layer;
3: a fracture structural layer;
4: a left electrode;
5: a right electrode;
6: a wire;
11: a hole structure;
31: and (4) a crack array structure.
Detailed Description
For the purpose of better explaining the present invention and to facilitate understanding, the present invention will be described in detail by way of specific embodiments with reference to the accompanying drawings.
All technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
For the effect visualization flexible strain sensor, the defects of flexibility but not precision, precision but not flexibility are overcome, and the problems that strain signals are simple and readable, subsequent circuit processing is not needed and the like are solved.
Based on the problems, the invention adopts the bionics theory, and the scorpions evolve crack receptors on the body surfaces of the scorpions for activities of predation, risk avoidance, reproduction and the like after hundreds of millions of years of evolution and are very sensitive to external weak mechanical vibration signals. The invention is just a principle of simulating a crack receptor of a scorpion, prepares a crack structure layer with a regular crack structure as a sensing unit, realizes and simulates the strain sensing function of the scorpion, and has important significance for improving the sensitivity of a flexible strain sensor. Meanwhile, in order to realize the real-time monitoring of the flexible effect, the thermochromic layer is introduced to the upper layer of the crack structure layer, the temperature is changed through joule heat generated by the circuit, and the visualization of the strain effect is realized. In order to shorten the cooling time, a micron-sized hole structure is added on the thermochromic layer, so that the air convection is accelerated, and the uninterrupted strain effect is visualized.
Fig. 1 is a schematic structural diagram of a bionic hypersensitivity sensor with visual effect according to an embodiment of the present invention, as shown in fig. 1, the bionic hypersensitivity sensor 100 includes: the thermochromic display device comprises a thermochromic layer 1, a conductive functional layer 2 and a crack structural layer 3 for strain sensing, which are sequentially arranged from top to bottom.
As shown in fig. 1, the thermochromic layer 1 has a regularly arranged pore structure 11; the upper surface of the crack structure layer 3 is provided with a regularly ordered crack array structure 31, and the upper surface of the crack structure layer refers to the surface of the crack structure layer 3 close to one side of the conductive function layer 2; the conductive function layer 2 has two electrodes respectively disposed at two ends of the conductive function layer 2.
Taking the direction shown in fig. 1 as an example, the two electrodes are a left electrode 5 and a right electrode 6, and one lead 6 is led out from each of the two electrodes for connecting with a power supply.
It should be further noted that the region of the thermochromic layer 1 where the hole structures 11 are disposed and the region of the crack structure layer 3 where the crack array structures 31 are disposed are effective regions, and the two electrodes 5 and 6 of the conductive functional layer 2 are disposed at two ends of the conductive functional layer 2 and belong to regions outside the effective regions. Based on the above, the crack structure layer is used for strain sensing, so that the resistance of the sensing unit is changed, and the joule heat generated in the circuit is changed; the thermochromic layer changes color due to the change of heat generated in the circuit, and the visualization of the strain effect is realized.
In an exemplary embodiment of the invention, fig. 2 is a structural diagram of a thermochromic layer according to an embodiment of the invention, and as shown in fig. 2, the thermochromic layer 1 has a three-dimensional pore structure with a pore diameter of 150 to 200 μm and a pore pitch of 50 to 100 μm. Because the thermochromic layer has a three-dimensional hole structure, the convection of air can be accelerated, the temperature reduction is accelerated, and the uninterrupted strain effect monitoring is realized.
In addition, the circular holes are shown in fig. 2 of the present embodiment as an example, but in other embodiments of the present invention, the holes may also be circular-like shapes such as rounded rectangles, and the diameters and the intervals of the holes may satisfy the above conditions.
In an exemplary embodiment of the present invention, the three-dimensional hole structure of the thermochromic layer 1 is fabricated by using a surface film printing technique, and a template having a regularly arranged cylindrical structure on the surface is first fabricated by photolithography or focused ion beam, and a flexible composite material is poured onto the template under a certain pressure, so as to copy the regularly arranged hole structure to the thermochromic layer. The flexible composite material is prepared by mixing thermochromic dye and Polydimethylsiloxane (PDMS) according to a certain proportion.
In an exemplary embodiment of the invention, fig. 3 is a structural diagram of a crack structure layer in an embodiment of the invention, and as shown in fig. 3, a crack array structure of the crack structure layer includes a plurality of cracks, wherein a width of the crack is 2 to 5 μm, an interval of the cracks is 10 to 15 μm, and a depth of the crack is 3 to 4 μm. In FIG. 3, only two cracks are shown as an example, the width of the crack is 5 μm, the interval between the cracks is 10 μm, and the depth of the crack is 4 μm.
In addition, although the V-shaped crack is taken as an example shown in fig. 3 of the present embodiment, the resistance change of the V-shaped crack is obvious after the external stress changes, in other embodiments of the present invention, the V-shaped crack may be in a U shape, a semicircular shape, or the like, and the width and the depth of the crack may satisfy the above conditions.
In an exemplary embodiment of the invention, the regular and ordered crack array structure is manufactured by using a surface impression technology, a template with a regular crack structure on the surface is firstly processed by a precise micro-nano processing technology, and then a flexible material is poured on the template to copy the crack structure to the surface of a flexible substrate, wherein the flexible material is Polydimethylsiloxane (PDMS).
In an exemplary embodiment of the invention, the conductive functional layer 2 is made of silver or gold and has a thickness of 30-50 nm. Two copper sheet electrodes 5 and 6 are arranged at two ends of the conductive functional layer 2 and are used for being connected with a power supply through a lead.
In one exemplary embodiment of the present invention, the thermochromic layer 1 and the crack structure layer 3 formed with the conductive function layer may be bonded together by a silane coupling Agent (APTES).
Based on the above, fig. 4 is a flowchart illustrating steps of a method for preparing a visual effect bionic hypersensitive strain sensor according to another embodiment of the present invention, which specifically includes the following steps:
s1: manufacturing a first template with a regularly-arranged cylindrical structure;
s2: at least three thermochromic pigments and a prepolymer of polydimethylsiloxane PDMS in a mass ratio of 1: 2, adding a curing agent to obtain a flexible thermochromic compound;
s3: coating the flexible thermochromic compound on the first template, curing, and stripping from the first template to obtain a thermochromic layer;
s4: preparing a second template with a crack reverse structure on the surface, coating a flexible material on the second template, curing, stripping from the second template to obtain a crack structure layer, and forming a regular and ordered crack array structure on the upper surface of the crack structure layer exposed by stripping;
s5: depositing a metal layer on the upper surface of the crack structure layer by adopting a sputtering process to form a conductive function layer;
s6: and connecting the thermochromic layer obtained in the step S3 with the crack structure layer deposited with the conductive functional layer obtained in the step S5 by using a silane coupling agent to obtain the visual bionic super-sensitive strain sensor.
Based on the preparation method of the bionic hypersensitive strain sensor with visual effect, the sensor realizes the measurement of external micro strain signals and generates obvious color change in real time through the change of resistance signals of the sensor.
In an exemplary embodiment of the present invention, step S1 includes:
and forming regularly-arranged cylinder structures on the surface of the metal sheet by using a laser marking machine or a photoetching technology to obtain a first template, wherein the diameter of the cylinders is 150-200 mu m, and the distance between the cylinders is 50-100 mu m. The metal sheet takes an aluminum sheet as an example, an aluminum sheet with a smooth surface and no obvious defects is selected, and a laser marking machine is utilized to cut a regularly-arranged cylindrical structure on the surface of the aluminum sheet.
In an exemplary embodiment of the present invention, step S2 is to configure a flexible thermochromic composite, and fig. 5 is a flow chart of step S2 in another embodiment of the present invention, as shown in fig. 5, specifically including the following steps:
s21: four kinds of thermal discoloration pigments with the temperature of 22 ℃, 31 ℃, 33 ℃ and 45 ℃ are taken. Wherein the thermochromic pigments in the present example: bright red at 22 ℃, dark red at 31 ℃, pink at 33 ℃ and purple at 45 ℃, and taking red at 31 ℃ as an example, the color change form is colorless at the temperature of more than 31 ℃ and red at the temperature of less than 26 ℃.
S22: and (3) mixing the four thermochromic pigments with a prepolymer of PDMS according to a mass ratio of 1: 2, were mixed.
S23: the mixture in step S22 is mixed at a mass ratio of 10: 1, adding a curing agent and mixing to obtain the flexible thermochromic compound.
The kind and amount of the color-changing pigment selected in step S21 can be adjusted according to the application scenario, for example, the color-changing pigment can be a thermochromic pigment with three temperatures selected from the above four temperatures.
In an exemplary embodiment of the present invention, step S3 is to prepare a thermochromic layer having a three-dimensional pore structure by using a surface stamping technique, and fig. 6 is a flowchart of step S3 in another embodiment of the present invention, as shown in fig. 6, specifically including the following steps:
s31: the flexible thermochromic complex is coated on the first template and vacuum dried at 0.1 atmosphere. For example, a pre-prepared flexible thermochromic composite is spin-coated on the surface of a first template having a regularly arranged cylindrical structure, and then placed in a vacuum drying oven for 2 hours, with the pressure set at 0.1 atm, so that the flexible thermochromic composite is completely soaked.
S32: the flexible thermochromic composite after vacuum drying in step S31 is heated at 120 ℃ for 2 hours to be cured. For example, the flexible thermochromic composite is removed from the vacuum oven, placed in an oven, and heated at 120 ℃ for 2 hours to cure.
S33: and peeling the cured film from the first template to obtain the thermochromic layer with a three-dimensional hole structure.
In an exemplary embodiment of the present invention, step S4 is first to process a template with a regular crack array structure by using an ultra-precision processing apparatus or a focused ion beam technique. Then, a surface stamp technology is used to transfer the regular crack structure to the PDMS surface to obtain a crack structure layer, fig. 7 is a flowchart of step S4 in another embodiment of the present invention, and as shown in fig. 7, the method specifically includes the following steps:
s41: and cutting a regular crack structure on the surface of the metal sheet by using an ion focusing method. For example, an aluminum sheet with a smooth surface and no obvious defect is selected, and a regular crack structure is cut on the surface of the aluminum sheet by utilizing an ion focusing technology, wherein the width of the crack is 2-5 mu m, the interval of the crack is 10-15 mu m, and the depth of the crack is 3-4 mu m.
S42: a, B two components of epoxy resin AB glue are uniformly mixed according to the mass ratio of 3:1, and vacuum drying is carried out. For example, in this embodiment, epoxy AB glue is selected as the over-mold template, two components of the epoxy AB glue A, B are uniformly mixed according to a mass ratio of 3:1, and the mixed epoxy resin is put into a vacuum drying oven to be dried for 30 minutes to remove surface bubbles.
S43: and coating the mixed and vacuum-dried epoxy resin AB glue on the surface of the prefabricated template, and heating at 60 ℃ for 2 hours for curing to prepare a second template with a crack reverse structure film on the surface, wherein the thickness of the film is 500 mu m.
S44: and (2) mixing a prepolymer of PDMS and a curing agent according to a mass ratio of 10: 1, and performing vacuum drying to obtain the flexible material. For example, after mixing, the mixture is dried in a vacuum oven for 30 minutes to remove surface bubbles.
S45: and coating the flexible material on the surface of the second template, heating at 80 ℃ for 2 hours, and curing to prepare the PDMS film with a crack structure on the surface, wherein the thickness of the PDMS film is 400 μm. For example, the flexible material obtained by mixing PDMS and a curing agent is taken out of a vacuum drying oven, spin-coated on the surface of a template having a crack reverse structure, and then placed in an oven, and heated at 80 ℃ for 2 hours to be cured, so as to obtain a PDMS film having a crack structure on the surface.
S46: and stripping the PDMS film from the second template to obtain the crack structure layer, wherein the upper surface of the crack structure layer exposed by stripping forms a regular and ordered crack array structure.
In an exemplary embodiment of the present invention, in step S5, a metal layer is deposited on the upper surface of the crack structure layer by sputter coating to form a conductive function layer, and a left electrode and a right electrode are respectively attached to two ends of the conductive function layer, and an enameled wire is led out from each of the left electrode and the right electrode for connecting to a power supply.
In an exemplary embodiment of the invention, the step S6 couples the thermochromic thin film layer prepared in S4 and S5 and the crack structure layer deposited with the conductive layer together by using a silane coupling agent, resulting in a biomimetic hypersensitive strain sensor with visualized effect. Fig. 8 is a flowchart of step S6 in another embodiment of the present invention, as shown in fig. 8, which specifically includes the following steps:
s61: and uniformly coating a silane coupling agent on the lower surface of the thermochromic layer, and pressing the thermochromic layer on the upper surface of the crack structure layer deposited with the conductive function layer to obtain a pressed structure. Wherein the lower surface of the thermochromic layer refers to the surface close to one side of the conductive functional layer and the crack structural layer.
S62: and curing the press-fit structure at 120 ℃ for 1 hour to obtain the bionic hypersensitive strain sensor. For example, after lamination, two PDMS films are placed in an oven and cured at 120 ℃ for 1 hour.
And (4) obtaining the bionic hypersensitive strain sensor with visual effect according to the processing steps.
In summary, the bionic hypersensitive strain sensor with visualized effects and the preparation method thereof provided by the embodiment of the invention have the following effects:
(1) in effect feedback, the visual bionic hypersensitive strain sensor does not need a subsequent processing circuit, and when the visual bionic hypersensitive strain sensor deforms, the resistance of the visual bionic hypersensitive strain sensor changes, so that the temperature is changed through joule heat, the color of the thermochromatic layer is changed, the resistance change can be influenced according to the external stress change, the color change is caused by the joule heat change, the external stress change is reflected in real time through the color, and the visualization of the strain effect is realized.
(2) In the aspect of strain perception, the bionic hypersensitive strain sensor with visualized effect is inspired by a scorpion suture receptor, a regular crack structure is prepared on a flexible substrate, and the crack side wall is repeatedly opened and closed in the deformation process, so that the sensitive perception of external micro strain is realized, the sensitivity and flexibility of strain perception are greatly improved, and the problem of understandings of the traditional rigid sensor is solved.
(3) In the aspect of effect feedback time, the thermochromic layer of the bionic hypersensitive strain sensor with visualized effect has a three-dimensional hole structure, so that air convection can be accelerated, the cooling speed is accelerated, the temperature is rapidly reduced, and the visualization of the uninterrupted strain effect is realized. .
Other embodiments of the invention will be apparent to those skilled in the art from consideration of the specification and practice of the invention disclosed herein. This application is intended to cover any variations, uses, or adaptations of the invention following, in general, the principles of the invention and including such departures from the present disclosure as come within known or customary practice within the art to which the invention pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the invention being indicated by the following claims.
It will be understood that the invention is not limited to the precise arrangements described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the invention is limited only by the appended claims.

Claims (10)

1. A preparation method of a bionic hypersensitive strain sensor with visualized effect is characterized by comprising the following steps:
s1: manufacturing a first template with a regularly-arranged cylindrical structure;
s2: at least three thermochromic pigments and a prepolymer of polydimethylsiloxane PDMS in a mass ratio of 1: 2, adding a curing agent to obtain a flexible thermochromic compound;
s3: coating the flexible thermochromic compound on the first template, curing, and stripping from the first template to obtain a thermochromic layer;
s4: preparing a second template with a crack reverse structure on the surface, coating a flexible material on the second template, curing, stripping from the second template to obtain a crack structure layer, and forming a regular and ordered crack array structure on the upper surface of the crack structure layer exposed by stripping;
s5: depositing a metal layer on the upper surface of the crack structure layer by adopting a sputtering process to form a conductive function layer;
s6: and connecting the thermochromic layer obtained in the step S3 with the crack structure layer deposited with the conductive functional layer obtained in the step S5 by using a silane coupling agent to obtain the bionic hypersensitive strain sensor with a visual effect.
2. The method for preparing an effect-visualized biomimetic hypersensitivity sensor according to claim 1, wherein the step S1 comprises:
and forming regularly-arranged cylinder structures on the surface of the metal sheet by using a laser marking machine or a photoetching technology to obtain a first template, wherein the diameter of the cylinders is 150-200 mu m, and the distance between the cylinders is 50-100 mu m.
3. The method for preparing an effect-visualized biomimetic hypersensitivity sensor according to claim 1, wherein the step S2 comprises:
s21: taking four kinds of thermal discoloration pigments with the temperature of 22 ℃, 31 ℃, 33 ℃ and 45 ℃;
s22: and (3) mixing the four thermochromic pigments with a prepolymer of PDMS according to a mass ratio of 1: 2, mixing;
s23: the mixture in step S22 is mixed at a mass ratio of 10: 1, adding a curing agent and mixing to obtain the flexible thermochromic compound.
4. The method for preparing an effect-visualized biomimetic hypersensitivity sensor according to claim 1, wherein the step S3 comprises:
s31: coating the flexible thermochromic complex on the first template, and performing vacuum drying under 0.1 atmospheric pressure;
s32: heating the flexible thermochromic compound dried in the step S31 at 120 ℃ for 2 hours for curing;
s33: and peeling the cured film from the first template to obtain the thermochromic layer with a three-dimensional hole structure.
5. The method for preparing an effect-visualized biomimetic hypersensitivity sensor according to claim 1, wherein the step S4 comprises:
s41: cutting a regular crack structure on the surface of the metal sheet by using an ion focusing technology, wherein the width of the crack is 2-5 mu m, the interval of the crack is 10-15 mu m, and the depth of the crack is 3-4 mu m;
s42: a, B two components of epoxy resin AB glue are uniformly mixed according to the mass ratio of 3:1, and vacuum drying is carried out;
s43: coating the mixed and vacuum-dried epoxy resin AB glue on the surface of a prefabricated template, heating at 60 ℃ for 2 hours for curing, and preparing a second template with a crack reverse structure film on the surface, wherein the thickness of the film is 500 mu m;
s44: and (2) mixing a prepolymer of PDMS and a curing agent according to a mass ratio of 10: 1, and performing vacuum drying to obtain a flexible material;
s45: coating the flexible material on the surface of the second template, heating at 80 ℃ for 2 hours, and curing to prepare a PDMS film with a crack structure on the surface, wherein the thickness of the film is 400 μm;
s46: and stripping the PDMS film from the second template to obtain the crack structure layer, wherein the upper surface of the crack structure layer exposed by stripping forms a regular and ordered crack array structure.
6. The method for preparing an effect-visualized biomimetic hypersensitivity sensor according to claim 1, wherein the step S6 comprises:
s61: uniformly coating a silane coupling agent on the lower surface of the thermochromic layer, and pressing the thermochromic layer on the upper surface of the crack structure layer deposited with the conductive function layer to obtain a pressed structure;
s62: and curing the press-fit structure at 120 ℃ for 1 hour to obtain the bionic hypersensitive strain sensor.
7. A biomimetic hypersensitive strain sensor with visualized effect, which is prepared by the preparation method according to any one of claims 1 to 6; the biomimetic hypersensitivity strain sensor comprises:
the thermochromic layer, the conductive functional layer and the crack structure layer are sequentially arranged from top to bottom;
wherein the thermochromic layer has a regularly arranged pore structure;
the upper surface of the crack structure layer is provided with a regularly ordered crack array structure, and the upper surface of the crack structure layer is the surface of one side of the crack structure layer close to the conductive function layer;
the conductive function layer is provided with two electrodes which are respectively arranged at two ends of the conductive function layer.
8. The visual-effect biomimetic hypersensitivity sensor according to claim 7, wherein the thermochromic layer has a three-dimensional pore structure with a pore size of 150-200 μm and a pore pitch of 50-100 μm.
9. The visual-effect bionic hypersensitivity sensor according to claim 7, wherein the crack array structure comprises a plurality of cracks, the width of the cracks is 2-5 μm, the interval of the cracks is 10-15 μm, and the depth of the cracks is 3-4 μm.
10. The effect-visualized biomimetic hypersensitivity strain sensor according to claim 7, wherein the material of the conductive functional layer is silver or gold, and the thickness is 30-50 nm.
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