WO2020178096A1 - Sensor device and method for operating a sensor device - Google Patents
Sensor device and method for operating a sensor device Download PDFInfo
- Publication number
- WO2020178096A1 WO2020178096A1 PCT/EP2020/055020 EP2020055020W WO2020178096A1 WO 2020178096 A1 WO2020178096 A1 WO 2020178096A1 EP 2020055020 W EP2020055020 W EP 2020055020W WO 2020178096 A1 WO2020178096 A1 WO 2020178096A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- sensor
- temperature
- heating element
- sensor device
- measurement value
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 38
- 238000010438 heat treatment Methods 0.000 claims abstract description 76
- 238000005259 measurement Methods 0.000 claims description 36
- 239000000758 substrate Substances 0.000 claims description 26
- 230000007613 environmental effect Effects 0.000 claims description 14
- 230000001419 dependent effect Effects 0.000 claims description 10
- 238000012360 testing method Methods 0.000 claims description 9
- 150000001875 compounds Chemical class 0.000 claims description 6
- 238000004092 self-diagnosis Methods 0.000 claims description 6
- 238000009835 boiling Methods 0.000 claims description 4
- 229910044991 metal oxide Inorganic materials 0.000 claims description 4
- 150000004706 metal oxides Chemical class 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 2
- 230000002265 prevention Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 description 20
- 238000004519 manufacturing process Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 5
- 239000000356 contaminant Substances 0.000 description 4
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 1
- 230000006735 deficit Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000012855 volatile organic compound Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits
- G01N27/123—Circuits particularly adapted therefor, e.g. linearising circuits for controlling the temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0031—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
- G01D3/028—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure
- G01D3/036—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure on measuring arrangements themselves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/007—Arrangements to check the analyser
Definitions
- a sensor device comprising a MOX sensor advantageously further comprises an environmental sensor such as a humidity sensor, in order to enable readjustment of the measurement of the gas sensor .
- the maximum set point is several tens of degrees above the ambient temperature.
- This enables processes for the second sensor such as calibration over a large range of temperatures and relative humidity conditions, reconditioning through evaporation of contaminants, aging-prevention and self-diagnosis.
- present day environmental sensors often employ monolithically integrated heating elements that allow for a temperature delta of merely up to 5-10 °C. The above-mentioned processes in this case cannot be performed efficiently such that additional means of heating up such sensors are necessary if the above-mentioned
- the substrate body 9 may be of a material with significant thermal conductivity such that the heating element 4 also increases the temperature of the second sensor 3.
- the heat conductivity between the heating element 4 and the second sensor 3 may be dimensioned such that a maximum temperature increase of the second sensor 3 induced by the heating element 4 is in the order of several tens degrees Celsius.
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Pathology (AREA)
- Physics & Mathematics (AREA)
- Immunology (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Combustion & Propulsion (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US17/433,856 US20220128502A1 (en) | 2019-03-06 | 2020-02-26 | Sensor Device and Method for Operating A Sensor Device |
| CN202080018713.4A CN113557430A (zh) | 2019-03-06 | 2020-02-26 | 传感器设备及用于操作传感器设备的方法 |
| EP20706000.5A EP3935381A1 (de) | 2019-03-06 | 2020-02-26 | Sensorvorrichtung und verfahren zum betreiben einer sensorvorrichtung |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP19161056.7A EP3705885A1 (de) | 2019-03-06 | 2019-03-06 | Sensorvorrichtung und verfahren zum betreiben einer sensorvorrichtung |
| EP19161056.7 | 2019-03-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2020178096A1 true WO2020178096A1 (en) | 2020-09-10 |
Family
ID=65717913
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/EP2020/055020 WO2020178096A1 (en) | 2019-03-06 | 2020-02-26 | Sensor device and method for operating a sensor device |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20220128502A1 (de) |
| EP (2) | EP3705885A1 (de) |
| CN (1) | CN113557430A (de) |
| WO (1) | WO2020178096A1 (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102018108723A1 (de) * | 2018-04-12 | 2019-10-17 | Tdk Corporation | Sensorvorrichtung, Verfahren zum Betreiben einer Sensorvorrichtung und elektronische Baugruppe, die eine Sensorvorrichtung aufweist |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19642107A1 (de) * | 1996-10-12 | 1998-04-16 | Ahlers Horst Doz Dr Ing Habil | Steuerbare Sensoranordnungen |
| US5898101A (en) * | 1995-07-27 | 1999-04-27 | Motorola, Inc. | Method of operating chemical sensors |
| DE102005042485A1 (de) * | 2005-09-07 | 2007-03-15 | Robert Bosch Gmbh | Sensoranordnung für einen Mediensensor, Ölzustandssensor und Verfahren zur Herstellung einer Sensoranordnung |
| US20160169704A1 (en) * | 2013-06-27 | 2016-06-16 | Robert Bosch Gmbh | Method for operating a sensor array |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7692148B2 (en) * | 2005-01-26 | 2010-04-06 | Analog Devices, Inc. | Thermal sensor with thermal barrier |
| DE102012001060A1 (de) * | 2011-10-24 | 2013-04-25 | Hydrometer Gmbh | Verfahren zur Korrektur von Offset-Drift-Effekten einer thermischen Messeinrichtung, thermische Messeinrichtung und Gasdurchflussmessgerät |
| US9006000B2 (en) * | 2012-05-03 | 2015-04-14 | Sandisk Technologies Inc. | Tj temperature calibration, measurement and control of semiconductor devices |
| US20140374848A1 (en) * | 2013-06-24 | 2014-12-25 | Wen Shi Koh | Semiconductor sensor device with metal lid |
| US9417309B1 (en) * | 2013-11-27 | 2016-08-16 | Xilinx, Inc. | Test structure and method for calibrating three-dimensional thermography fault isolation tool |
| CN105043439A (zh) * | 2015-05-29 | 2015-11-11 | 歌尔声学股份有限公司 | 传感器集成装置及其生产方法 |
| CN205342406U (zh) * | 2016-02-17 | 2016-06-29 | 明光旭升科技有限公司 | 一种用于传感器封装的工装 |
| KR20180055941A (ko) * | 2016-11-16 | 2018-05-28 | 삼성디스플레이 주식회사 | 통합 센서를 갖는 플렉서블 표시장치 및 그의 제조방법 |
| CN206590895U (zh) * | 2017-03-13 | 2017-10-27 | 歌尔科技有限公司 | 一种组合传感器 |
-
2019
- 2019-03-06 EP EP19161056.7A patent/EP3705885A1/de active Pending
-
2020
- 2020-02-26 CN CN202080018713.4A patent/CN113557430A/zh active Pending
- 2020-02-26 US US17/433,856 patent/US20220128502A1/en active Pending
- 2020-02-26 WO PCT/EP2020/055020 patent/WO2020178096A1/en unknown
- 2020-02-26 EP EP20706000.5A patent/EP3935381A1/de active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5898101A (en) * | 1995-07-27 | 1999-04-27 | Motorola, Inc. | Method of operating chemical sensors |
| DE19642107A1 (de) * | 1996-10-12 | 1998-04-16 | Ahlers Horst Doz Dr Ing Habil | Steuerbare Sensoranordnungen |
| DE102005042485A1 (de) * | 2005-09-07 | 2007-03-15 | Robert Bosch Gmbh | Sensoranordnung für einen Mediensensor, Ölzustandssensor und Verfahren zur Herstellung einer Sensoranordnung |
| US20160169704A1 (en) * | 2013-06-27 | 2016-06-16 | Robert Bosch Gmbh | Method for operating a sensor array |
Also Published As
| Publication number | Publication date |
|---|---|
| US20220128502A1 (en) | 2022-04-28 |
| EP3705885A1 (de) | 2020-09-09 |
| CN113557430A (zh) | 2021-10-26 |
| EP3935381A1 (de) | 2022-01-12 |
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