WO2020177400A1

WO2020177400A1 - Full-day imaging detector with multi-functional window, and method for preparing same

Info

Publication number: WO2020177400A1
Application number: PCT/CN2019/120445
Authority: WO
Inventors: 刘卫国; 王卓曼; 刘欢; 白民宇; 韩军; 王曦; 梁海锋; 安妍
Original assignee: 西安工业大学
Priority date: 2019-03-05
Filing date: 2019-11-23
Publication date: 2020-09-10
Also published as: CN109887944B; CN109887944A; ZA202102811B

Abstract

Provided are a full-day imaging detector with a multi-functional window, and a method for preparing same. The full-day imaging detector comprises a multi-functional window (1) and a detection portion (2). The multi-functional window (1) comprises a micro-lens array (3), a window body (4) and an optical filter array (5), wherein the micro-lens array (3) is integrated on an upper surface of the window body (4), a top surface of each micro-lens unit is of a spherical crown structure, the projection of the spherical crown is square from a top view, and the square projections of spherical crowns of adjacent micro-lens units from the top view are connected; the optical filter array (5) is plated on a lower surface of the window body (4); and the optical filter array (5) comprises four types of optical filters, including three types of band-pass optical filters of single-color visible light in combination with an infrared waveband, and an infrared optical filter. The detection portion (2) is constituted of a pixel unit array, wherein each pixel unit comprises four types of sub-pixel units, and the four types of sub-pixel units directly face the four types of optical filters in a one-to-one correspondence mode. Further provided are a method for preparing a micro-lens array and a detection method for a detector. Full-day detection can be realized.

Description

All-day imaging detector with multifunctional window and preparation method thereof

Technical field

The invention belongs to the technical field of photoelectric detection, and specifically relates to an all-time imaging detector with a multifunctional window and a preparation method thereof.

Background technique

The photodetector detects the change in the conductivity of the irradiated material caused by radiation. Photoelectric detectors have a wide range of uses. In the visible or near-infrared band, they are mainly used for imaging and detection, industrial automatic control, photometric measurement, etc.; in the infrared band, they are mainly used for infrared thermal imaging and infrared remote sensing.

Traditional photodetectors are composed of discrete windows, microlens arrays, filter arrays and pixel unit arrays, which need to be assembled separately to form the detectors. The window is designed for the detector to penetrate light waves and isolate the air for vacuum packaging. The microlens array below the window can penetrate the detected light waveband. Below the microlens array is an array of different filters. Below the filter array is an array of pixel units on the substrate. The pixel unit array detects incident light waves. Each pixel unit is composed of a combination of multiple sub-pixel units and regions. The pixel unit of the existing visible light detector consists of three sub-pixel units that can detect red light (R), green light (G), and blue light (B), which are called red light (R) sub-pixel units, and green light (G) Sub-pixel unit, blue light (B) Sub-pixel unit, the filter above each sub-pixel unit filters the incident light waves, and selectively transmits red light, green light, and blue light, respectively, called red light filter Sheet (R), green filter (G), blue filter (B). The three kinds of filters are arranged correspondingly above the three kinds of sub-pixel units, and are aligned up and down. A micro lens array is also arranged above the filter to converge the incident light. The array of three kinds of filters is located directly above the pixel unit array, the red filter (R) is facing the red (R) sub-pixel unit, and the green filter (G) is facing the green (G) sub-pixel unit. Pixel unit, the blue light filter (B) is facing the blue light (B) sub-pixel unit. Correspondingly, each micro lens faces the sub-pixel unit directly below. By designing different permutations and combinations of red light (R), green light (G), and blue light (B) sub-pixel units, color detection imaging in the visible light band is realized. The sub-pixel unit performs photoelectric conversion on the incident light wave and detects it. The sensitive layer is made of visible light or infrared detection materials, and the working band of the sub-pixel unit is determined by the sensitive layer. Common photodetector devices are visible light imaging or single-wavelength infrared devices. Windows, microlens arrays and filters can only pass through a single wavelength, and their band coverage is narrow, which cannot be used both day and night. The window, microlens array and filter are discrete devices with low integration.

In order to solve the problem of photoelectric detection in the whole day, the existing visible light-infrared imaging detector, the visible light imaging system working during the day and the infrared imaging system working at night are generally separated, and the visible light and infrared are detected independently in two light paths For imaging, the window can only work in a single visible or infrared band, and then the visible light image and the infrared image are synthesized by a computer using image registration and fusion methods. This method will cause the imaging system to be large in size, heavy in weight, and high in power consumption, which limits the scope of application. Therefore, it fails to meet the demand for a small, light, and low power single chip, all-day imaging detector. The detector window used for all-day imaging devices must meet the requirements of daytime visible light color imaging and night infrared imaging. The window, microlens array, and filter array are integrated to reduce their occupied space, shorten installation steps, and simplify installation Craft.

Among them, the patent CN201510609809 filed by STMicroelectronics in 2015 proposed a method of using IR sub-pixel unit detection signals to separately correct R, G, and B sub-pixel unit detection signals. As shown in Figure 1, through R, G The light of the B filter contains part of the stray light IR. By correcting this part of the stray light, the detection signal of the R, G, B sub-pixel unit is as pure as possible, but the window, microlens array and filter are Discrete devices are not integrated; since the spectral range of the light-transmitting filter is only 1.1μm in the infrared band, it cannot cover near infrared, shortwave infrared, midwave infrared and longwave infrared. Therefore, the detector using the filter of the invention can only work in the daytime, and cannot achieve full-time detection.

Summary of the invention

The purpose of the present invention is to provide a full-time imaging detector with multifunctional windows and a preparation method thereof, which integrates the window, microlens array, and filter array to solve the problem that the detector in the prior art can only work during the day. The problem of detection all day long cannot be realized.

In order to achieve the above objective, the technical scheme of the present invention is as follows:

An all-day imaging detector with a multifunctional window, including a multifunctional window and a detection part. The multifunctional window includes a microlens array, a window body and a filter array; the microlens array is integrated on the upper surface of the window body, each The top surface of each microlens unit is a spherical cap structure, the top view projection of the spherical cap is square, and the squares of the top view projection of the adjacent microlens unit spherical caps are connected; the filter array is plated on the lower surface of the window body; The filter array includes four types of filters, which are three kinds of band-pass filters for monochromatic visible light combined with infrared bands and one type of infrared filter; the detection part is composed of an array of pixel units, each pixel unit It includes four sub-pixel units, and the four sub-pixel units are directly opposite to the four filters.

Further, the four types of filters are R+IR filters, G+IR filters, B+IR filters, and IR filters, respectively, and the four sub-pixel units are R+IR, respectively. Sub-pixel unit, G+IR sub-pixel unit, B+IR sub-pixel unit and IR sub-pixel unit.

Further, each sub-pixel unit is composed of a wide-spectrum sensitive layer, electrodes, and integrated circuits.

The preparation method of the above-mentioned microlens array is as follows. First, the copper is prepared into a copper template with a concave curved surface by a single-point diamond turning method, and then a broad spectrum transmission material layer is chemically vapor deposited on the copper template, and the copper template is removed after the temperature is reduced. The obtained broad-spectrum transmission material layer includes two parts: a microlens array and a window body, and a filter array is plated on the back of the window body in regions to finally obtain a multifunctional window with broad-spectrum transmission performance.

The detection method of the above-mentioned detector is as follows. When the detector works during the day, the detection signal of the sub-pixel unit corresponding to the R+IR filter, G+IR filter, and B+IR filter is subtracted from the corresponding IR filter. The sub-pixel unit detects the signal to obtain the true colors of R, G, B; when the detector works at night, the R+IR filter, G+IR filter, B+IR filter and IR filter can transmit infrared , The four sub-pixel units below them simultaneously detect infrared, and the detectors work normally at night.

Compared with the prior art, the present invention has the following beneficial effects:

1. The present invention adopts a microlens array that can transmit light waves in the visible to infrared wavelengths, which has a converging effect on light. The microlens array corresponds to the filter array and the sub-pixel array, and it will originally fall in the gap of the sub-pixel unit and the electrode. The light from the non-light sensitive area converges to the light sensitive area in the middle of the sub-pixel unit, which improves the utilization of incident light waves;

2. The single-piece window of the present invention can realize wide-spectrum transmission and filtering, color separation, convergence and other functions from visible light to infrared. At the same time, the single-piece structure reduces the optical loss such as scattering and absorption compared with the multi-piece structure; The device takes into account two working modes of daytime color and nighttime infrared, which can realize full-time imaging detection;

3. The front surface of the window of the present invention is processed with a microlens array, and the back surface is coated with a small volume, high integration, can shorten the assembly steps, simplify the installation process, and have good process compatibility;

4. The present invention adopts the way that the microlens array is upward and the filter is downward, which avoids the problem that the film is easy to fall off, and at the same time makes the filter and the detection unit closer.

Description of the drawings

Figure 1 is a schematic diagram of the color pixel layout of the pixel array in the patent of STMicroelectronics;

Figure 2 is a diagram of the overall structure of an all-sky imaging detector with multifunctional windows;

Figure 3 is a front view of the multifunctional window;

Figure 4 is a top view of the multifunctional window;

Figure 5 is a working principle diagram of an all-day imaging detector with multi-function windows;

Fig. 6 is a schematic diagram of the working mode of the filter unit in the daytime;

Figure 7 is a schematic diagram of the working mode of the filter unit at night;

Figure 8 is a spectrum diagram of the B+IR filter area;

Figure 9 is a spectral diagram of the G+IR filter area;

Figure 10 is a spectrum diagram of the R+IR filter area;

Figure 11 is a spectrum diagram of the IR filter region;

Figure 12 is a flow chart of the preparation of the multifunctional window.

detailed description

The present invention will be described in detail below with reference to the drawings and specific embodiments.

The basic principles and ideas of this application are: the upper surface of the detector window is a microlens array, which has a condensing effect on light, which can improve light utilization; the lower surface of the window is a filter for both visible light color imaging and infrared imaging, which can Both day and night; the pixel unit has two working modes, R+IR (red light + infrared light), G+IR (green light + infrared light) and B+IR (blue light + infrared light) three sub-pixel units during daytime work The obtained detection signal can subtract the part of the detection signal obtained by the IR (infrared light) sub-pixel unit, so as to ensure that the detection signal of the R+IR, G+IR, B+IR sub-pixel unit presents true colors; the visible light signal is very weak when working at night , Four filters can transmit infrared, and the four sub-pixel units below it can detect infrared at the same time, which can work normally at night;

In order to achieve the above objectives, the present invention adopts the following technical solutions:

As shown in Figure 2, an all-sky imaging detector with a multifunctional window is composed of a multifunctional window 1 and a detection part 2.

As shown in Figures 3 and 4, the upper surface of the multifunctional window 1 is integrated with a microlens array 3, the middle is the window body 4, and the lower surface of the window is plated with four kinds of filter arrays 5, which are three kinds of monochromatic visible light plus infrared Band pass filter and an infrared filter. The structure of each unit in the microlens array 3 is a spherical cap with a square edge, the side length of the square is 20um×20um, the radius of curvature of the spherical cap is 150um, and the height of the spherical cap is 3um; the microlens can transmit visible light to infrared Wide spectrum.

The working process of the imaging detector of the present invention is as follows:

As shown in Figure 5, the incident light wave passes through the microlens array 3 and the window body 4 above the detector. Each microlens converges the light beam and sends it to the filter array 5. The four kinds of filter arrays affect the incident light wave. Filter separately, R+IR filter can transmit visible red light and infrared, G+IR filter can transmit visible green and infrared, B+IR filter can transmit visible blue and infrared, IR filter The light sheet can transmit infrared. The microlens condenses the light that originally fell in the non-light sensitive areas such as the gap of the sub-pixel unit and the electrode to the light sensitive area in the middle of the sub-pixel unit, which improves the utilization rate of incident light waves.

The microlens adopts a wide-spectrum transmission material from visible light to infrared, which can transmit visible light in the wavelength range of 390nm to 780nm, and the infrared wavelength range is 780nm to 12um; the broad-spectrum transmission material is magnesium fluoride, zinc sulfide, and fluoride Broad-spectrum transmission materials such as beryllium, potassium chloride and zinc selenide.

The detection part 2 of the detector is an array of pixel units that can work all day long. Each square pixel unit is composed of four square sub-pixel units, which are R+IR sub-pixel units, G+IR sub-pixel units, and B+IR. The sub-pixel unit and the IR sub-pixel unit are insulated from each other. Each sub-pixel unit is composed of a broad spectrum sensitive layer, electrodes and integrated circuits. The incident light wave passes through the upper electrode that is conductive and transparent to visible light and infrared, and then passes through the photosensitive layer composed of visible light and infrared sensitive materials to excite the detection film of the photosensitive layer for photoelectric conversion, generating photo-generated carriers, under the action of electric field , The photogenerated carriers flow out to form a photocurrent, which is collected by the electrodes and then derived.

As shown in Figures 6 and 7, the detection signal of the sub-pixel unit corresponding to the R+IR, G+IR, and B+IR filter unit can be subtracted from the sub-pixel unit corresponding to the IR filter unit when the detector is working during the day. The detection signal part, so as to ensure that the R, G, and B detection signals present true colors, see the spectrograms in Figure 8-11; due to the weak visible light signal during night work, the four filters can transmit infrared, and the four filters below it Two sub-pixel units detect infrared at the same time, which can work normally at night;

The preparation method of the multifunctional window 1 is as follows:

As shown in Figure 12, the copper template 6 is prepared by single-point diamond turning method, and then the zinc sulfide broad-spectrum transmission material layer 7 is chemically vapor deposited on the copper template 6, and the copper template 6 is removed after the temperature is reduced. The broad-spectrum transmission material layer 7 includes the microlens array 3 and the window body 4. A filter array 5 is plated on the lower surface of the window body 4, and finally a multifunctional window 1 meeting the requirements is obtained. The structure of the microlens unit is a spherical cap with a square edge, the square side length is 20um×20um, and the spherical cap curvature radius It is 150um and the height of the spherical cap is 3um. The microlens can transmit a broad spectrum from visible light to infrared. The position of the microlens corresponds to the position of the bandpass filter unit, and they all correspond to the pixel unit of the detector when installed, as shown in FIG. 5.

The filter is on the lower surface of the window body, three of the four filters are band-pass filter films for both monochromatic visible light and infrared, and one is an infrared film; the number of layers of the film ranges from 2 to 50 layers, including endpoint values; the filter unit is a 2×2 sub-array, including R+IR filters, G+IR filters, B+IR filters, and IR filters. The R+IR filter can transmit visible red and infrared light, the G+IR filter can transmit visible green light and infrared, the B+IR filter can transmit visible blue and infrared, and the IR filter can transmit Through infrared.

Please refer to FIG. 2, an all-weather imaging detector with a multi-function window of the present invention includes a multi-function window 1 and a detection part 2.

Please refer to FIG. 3, the multifunctional window 1 includes a micro lens array 3, a window body 4 and a filter array 5.

The invention provides an all-day imaging detector with a multifunctional window, and its preparation includes the preparation of the multifunctional window and the preparation of the detection part.

The specific preparation method of the multifunctional window includes the following steps:

Step 1: Select window material.

In order to have a higher transmittance in the wide spectrum range of 390nm to 12um, a wide spectrum zinc sulfide material grown by chemical vapor deposition is selected.

Step 2: Prepare the lens part.

Broad-spectrum zinc sulfide is grown on the template by chemical vapor deposition.

(1) The process of preparing templates. As shown in Figure 12, the template material is made of metal copper, and then prepared by single-point diamond turning. The prepared copper template with concave curved surface 6 Shape: spherical crown with square edge, square side length 20um×20um, spherical crown shape: curvature Radius: 150um, spherical cap height: 3um.

(2) Chemical vapor deposition of zinc sulfide broad spectrum transmission material layer 7, as shown in Fig. 12.

(3) Cooling and demoulding. The difference between the expansion coefficients of metallic copper and zinc sulfide is used for cooling and demolding to obtain a zinc sulfide tube spectral transmission material layer 7 that meets the requirements, as shown in Figure 12.

Step 3: Coating the filter array film.

(1) Pre-treating the lower surface of the zinc sulfide broadband transmission material layer finally obtained in step 2. Including the grinding, polishing and cleaning of zinc sulfide glass, the treatment process is strictly in accordance with the cold processing technology of optical components and semiconductor cleaning specifications.

(2) Glue and pre-baking. Using AZ5214E photoresist, using domestic KW-4A desktop homogenizer, homogenize the glue under the action of centrifugal force of rotation. Drop three to four drops of photoresist onto the center of the lower surface of the zinc sulfide glass 21, and then set the rotating speed to low speed 500/15 (rpm/s) and high speed 4500/50 (rpm/s) to make the photoresist evenly coated. Apply to the lower surface of the zinc sulfide glass 21. Using MIRAKTMT The molyne hot plate, pre-baking at 100℃ for 60s.

(3) Exposure. Since the sidewall profile of the photoresist is more sensitive to the exposure dose, the exposure time needs to be calculated according to the light intensity of the mercury lamp light source of the lithography machine and the rated exposure dose during exposure. When the exposure time is short, the pattern size becomes smaller; and when the exposure time increases, the pattern size gradually increases due to the diffraction effect. When the exposure time is 10s and the development time is 55s, the lithography pattern is the best, which meets the requirements of complete pattern, accurate size, and neat edges.

(4) Reverse baking. The zinc sulfide glass 17 is reverse-baked. Its purpose is to cause cross-linking reaction in the area not covered by the mask and change the dissolving ability of the photoresist in the developer. At the right temperature, the crosslinking reaction can proceed. Choose 115℃ as the best reversal baking temperature.

(5) Pan exposure. Without using a mask, the zinc sulfide glass 17 after reversal baking is placed in a Q4000 lithography machine for exposure to change the dissolution performance of the photoresist in the unexposed area. Set the pan exposure time to 11s.

(6) Development. The lower surface of the zinc sulfide glass 17 is developed. Using KMP PD238-Ⅱ developer, because the developer has a dissolving effect on the photoresist, when the development time is not appropriate, it is prone to underdevelopment, incomplete development, overdevelopment, etc. Therefore, the development time must be controlled, the best The development time is controlled between 50-60s.

(7) Hard film. Place the developed zinc sulfide glass 17 on a hot plate, set the temperature of the hot plate to 120°C, harden the film for 20 minutes, and take it out to cool down naturally.

(8) The thin film is coated with visible red light and infrared light. The R+IR film system is plated on the flat R+IR area 4 under the window material.

(9) Remove glue and wash photoresist. After the pattern transfer is completed, the photoresist has completed its mission. In order to carry out a new round of pattern transfer, the photoresist needs to be removed to prepare for the next photolithography.

(10) An R+IR film is formed in the R+IR region.

(11) Repeat the above steps (1)-(7).

(12) Plating a thin film that can transmit visible green light and infrared light. G+IR film system is plated on the plane G+IR area 5 under the window material.

(13) Remove glue and wash photoresist. After the pattern transfer is completed, the photoresist has completed its mission. In order to carry out a new round of pattern transfer, the photoresist needs to be removed to prepare for the next photolithography.

(14) A G+IR film is formed in the G+IR region.

(15) Repeat the above steps (1)-(7).

(16) Thin film that is transparent to visible blue and infrared. B+IR film system is plated on the flat B+IR area 6 under the window material.

(17) Remove glue and wash photoresist. In order to perform a new round of pattern transfer, the photoresist needs to be removed to prepare for the next photolithography.

(18) A B+IR film is formed on the B+IR area.

(19) Repeat the above steps (1)-(7).

(20) Plating infrared film. The flat IR area 7 is plated with IR film under the window material.

(21) Remove glue and wash photoresist. After the pattern transfer is completed, the coating of the last area is completed, and the excess photoresist can be washed away.

(22) An IR film is formed on the IR area.

(23) Complete the preparation of the detection window.

The detection part is an array composed of four kinds of pixel units. The pixel unit is composed of a substrate, a metal lower electrode, a photosensitive layer, and an upper electrode. The lower electrode uses metallic copper as the material, and the sensitive layer uses graphene.

There are many types and styles of substrates, so I won't repeat them here.

The preparation of the pixel unit array includes the following steps:

Step 1: The metal bottom electrode is a metal copper film, and a metal copper film is prepared on the substrate by chemical vapor deposition or electroless plating, which can conduct electricity.

Step two, the photosensitive layer is made of materials sensitive to visible light and infrared, and graphene is used for illustration. Put the finished substrate on the quartz plate, put the quartz plate into the quartz tube of the vacuum tube furnace, make it at the center of the temperature zone, connect and fix the flanges at both ends of the quartz tube, turn on the vacuum pump and start vacuuming When the vacuum of the system drops below 10Pa, start to feed in methane and hydrogen, adjust the methane and hydrogen to 40sccm:40sccm, and continue to mix the two gases for a period of time. After the pressure stabilizes, turn off the methane gas and turn on the tube furnace switch , Start the stage heating stage; when the temperature rises to the holding stage, annealing the copper is beneficial to the growth of graphene in the growth stage. Methane gas is introduced into the growth stage. After the growth is completed, the methane is turned off and enter the cooling stage. After self-heating and cooling to room temperature, turn off the hydrogen and vacuum pump, and take out the substrate. The surface of the copper film is covered with a layer of graphene.

Step 3: The upper electrode is made of a material that is conductive and transparent to visible light to near-infrared, including a grid of one-dimensional conductive nanowire materials in various forms, covering the graphene. The one-dimensional conductive nanowire grid is formed by randomly arranging one-dimensional conductive nanowires, the mesh can transmit visible light and near infrared, and the grid wires can conduct electricity; the one-dimensional conductive nanowires include carbon nanotubes, Silver nanowire and gold nanowire.

The carbon nanotubes and ethanol are uniformly mixed by ultrasonic to form a suspension, and the substrate with the graphene film is immersed in the suspension. The immersion depth is below the surface of the liquid. After the ethanol is volatilized, a grid of carbon nanotubes is formed as the upper electrode .

Step four, etching the upper electrode, the sensitive layer and the metal lower electrode between the sub-pixel units.

A 50nm zinc sulfide passivation layer is prepared by chemical vapor deposition, and the passivation layer is carved into a square pattern by photolithography and etching, corresponding to the sub-pixel unit, and the patterned passivation layer is used as a masking layer. The electrode, the sensitive layer and the metal bottom electrode are patterned to form an array of sub-pixel units that are isolated from each other in two vertical directions along the plane. Four adjacent sub-pixel units of R+IR, G+IR, B+IR, and IR form one Pixel array unit, the pixel array can realize the detection function of the detector.

By assembling the obtained multifunctional window with the detection part, an all-day imaging detector with multifunctional window can be prepared.

The upper surface of the window body of the present invention is provided with a microlens array corresponding to the position of the filter array. The microlens array condenses the light that originally fell in the non-photosensitive areas such as the gap of the sub-pixel unit and the electrode to the light in the middle of the sub-pixel unit. The sensitive area improves the utilization of incident light waves. The whole structure integrates the window body, the filter and the micro lens array into a whole, has a small volume, a high degree of integration, shortens the assembly steps, simplifies the installation process, and has good process compatibility.

The above uses specific examples to illustrate the present invention, which are only used to help understand the present invention and not to limit the present invention. For those skilled in the art to which the present invention belongs, according to the idea of the present invention, several simple deductions, modifications or substitutions can also be made.

Claims

The all-day imaging detector with multi-function window includes a multi-function window (1) and a detection part (2), characterized in that the multi-function window (1) includes a microlens array (3), a window body (4) and The filter array (5); the micro lens array (3) is integrated on the upper surface of the window body (4), the top surface of each micro lens unit is a spherical cap structure, and the top view projection of the spherical cap is square, adjacent The spherical cap of the microlens unit is connected with the squares projected from above; the filter array (5) is plated on the lower surface of the window body (4); the filter array (5) includes four kinds of filters, respectively It is three kinds of monochromatic visible light combined with infrared band pass filter and one kind of infrared filter; the detection part is composed of an array of pixel units, each pixel unit includes four sub-pixel units, four sub-pixel units and The four kinds of filters are facing one by one.
The all-sky imaging detector with multifunctional windows according to claim 1, wherein the four kinds of filters are R+IR filter, G+IR filter, and B+IR filter. The four sub-pixel units are R+IR sub-pixel units, G+IR sub-pixel units, B+IR sub-pixel units, and IR sub-pixel units, respectively.
The all-sky imaging detector with multifunctional window according to claim 1 or 2, wherein each sub-pixel unit is composed of a broad spectrum sensitive layer, an electrode and an integrated circuit.
The all-day imaging detector with multifunctional window according to claim 1, characterized in that the preparation method of the microlens array (3) is as follows: firstly, the copper is prepared with a concave curved surface by a single point diamond turning method The copper template (6) is then chemically vapor deposited on the copper template (6), and then the broad-spectrum transmission material layer (7) is deposited. After completion, the temperature is lowered to remove the copper template (6). The resulting broad-spectrum transmission material layer (7) includes micro The lens array (3) and the window body (4) are two parts, and the filter array (5) is plated on the back of the window body (4) in different areas, and finally a multifunctional window (1) with broad spectrum transmission performance is obtained.
The all-sky imaging detector with multifunctional windows according to claim 2, characterized in that, the detection method of the detector is as follows: when the detector works during the day, the R+IR filter and the G+IR filter , The detection signal of the sub-pixel unit corresponding to the B+IR filter subtracts the detection signal of the sub-pixel unit corresponding to the IR filter to obtain the true colors of R, G, B; when the detector works at night, the R+IR filter The infrared filter, G+IR filter, B+IR filter and IR filter can all transmit infrared. The four sub-pixel units below them respond to infrared signals simultaneously, and the detector works normally at night.