WO2020140340A1 - 紧凑型折反式无热化成像光谱仪 - Google Patents

紧凑型折反式无热化成像光谱仪 Download PDF

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WO2020140340A1
WO2020140340A1 PCT/CN2019/081154 CN2019081154W WO2020140340A1 WO 2020140340 A1 WO2020140340 A1 WO 2020140340A1 CN 2019081154 W CN2019081154 W CN 2019081154W WO 2020140340 A1 WO2020140340 A1 WO 2020140340A1
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convex
plano
lens
imaging spectrometer
prism
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PCT/CN2019/081154
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English (en)
French (fr)
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朱嘉诚
沈为民
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苏州大学
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Priority to US17/419,757 priority Critical patent/US11579423B2/en
Publication of WO2020140340A1 publication Critical patent/WO2020140340A1/zh

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0804—Catadioptric systems using two curved mirrors
    • G02B17/0808—Catadioptric systems using two curved mirrors on-axis systems with at least one of the mirrors having a central aperture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0216—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using light concentrators or collectors or condensers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/14—Generating the spectrum; Monochromators using refracting elements, e.g. prisms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2823—Imaging spectrometer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/22—Telecentric objectives or lens systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1208—Prism and grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors

Definitions

  • the present invention relates to a compact fold-back type athermal imaging spectrometer suitable for large field of view, high signal-to-noise ratio, and high temperature adaptability, which belongs to the field of spectral imaging technology.
  • Spectral imaging technology is an emerging field that integrates spectral spectroscopy technology and space imaging technology. It greatly expands the application range of people in the field of aerospace remote sensing, agricultural and forestry resource detection, mineral resources and geological exploration, military detectives, etc.
  • the traditional dispersion-type imaging spectrometer structure forms are: plane grating C-T type, convex grating Offner type, concave grating Dyson type and so on. These structural spectrometers have better performance at medium and short slits and medium relative apertures, but in the case of long slits and large relative apertures, there is a large aberration, the spectral image is easily distorted, and the instrument size varies The slit growth and the relative aperture increase sharply.
  • traditional fold-back imaging spectrometers such as Dyson-type imaging spectrometers, are generally affected by the temperature of the imaging quality. A strict temperature control system is required to ensure its stable image quality.
  • Imaging spectrometers used in the field of hyperspectral remote sensing generally require high geometric and physical parameters such as the weight and volume of the instrument. Excessive volume and weight lead to a sharp increase in the cost of production, manufacturing, and emission of the instrument. Reducing refrigeration equipment can greatly reduce the load pressure of the platform, which also puts forward higher requirements on the temperature adaptability of the imaging spectrometer, requiring it to maintain stable image quality in a larger temperature range.
  • the concave grating Dyson device is a folding imaging spectrometer, which can obtain a large relative aperture, but the slit is short, and it is difficult to reach more than 20mm, and this spectrometer Performance is greatly affected by temperature changes;
  • Chinese invention patent CN102183304B "a kind of cylindrical astigmatism The optical path structure of the grid dispersive imaging spectrometer” and the document “Research on aberration correction of the satellite-borne Cheney-Turner imaging spectrometer” ([J].
  • planar grating Czerny-Tumer device is also a total reflection structure, but its slit length is very short, and the relative aperture is small, which cannot meet the needs of hyperspectral remote sensing applications with large signal field and high signal-to-noise ratio. Therefore, there is an urgent need to provide a Large relative aperture, long slit, compact and non-thermal imaging spectrometer, to meet the requirements of miniaturization, large width, high spatial resolution, high signal-to-noise ratio, and strong temperature adaptability in hyperspectral remote sensing applications.
  • the present invention provides a large relative aperture, long slit, good imaging quality, compact structure, strong temperature adaptability, etc., which can meet the requirements of large width, high signal-to-noise ratio, and small size.
  • An imaging spectrometer for hyperspectral remote sensing that requires high temperature and no heat.
  • the technical solution for achieving the above object of the invention is to provide a compact folding-refractive athermal imaging spectrometer, which includes an incident slit, an object prism, a plano-convex lens, a meniscus lens, a thick folding mirror, a convex grating, Image square prism, filter and focal plane; the exit plane of the object square prism is glued to the plane of the plano-convex lens; the convex surface of the plano-convex lens is glued to the concave surface of the meniscus lens; the convex surface of the meniscus lens and the concave of the thick folding mirror The surface is glued; the convex grating is directly engraved on the convex surface of the meniscus or the convex surface of the plano-convex lens; the plane of incidence of the image square prism is glued to the plane of the plano-convex lens;
  • the telecentric light is incident from the slit, folded or refracted by the object-side prism into the plano-convex lens; after being refracted by the plano-convex lens and the meniscus lens, after being reflected by the thick folding mirror, it is incident on the convex grating in the form of a concentrated beam;
  • the convergent light beam is diffracted by a convex grating to achieve spectral splitting;
  • the divergent light beam obtained after the splitting is sequentially folded by a thick folding mirror, the meniscus lens and the flat convex lens are refracted, and enters the image-side prism;
  • the beam is folded or refracted by the prism, After filtering through the filter, the image is formed on the focal plane to realize spectral imaging;
  • the material thermal expansion coefficient " 3 is equal, or meets:
  • a 3 ax a x + bx a 2 , [0011] where a and b are proportional coefficients, the value range of a is 0.4 ⁇ 0.6, and the value range of b is 0.4 ⁇ 0.6.
  • a compact fold-back type thermal imaging imaging spectrometer according to the present invention, the object side prism, plano-convex lens and image side prism are the same material.
  • the object-side prism corresponds to the image-side prism, and is a folding prism or a rectangular prism.
  • Plano-convex lenses, meniscus lenses, thick folding mirrors and convex gratings have the same optical axis.
  • the ratio of the radius of curvature of the meniscus lens concave surface to the convex surface is 0.75 to 0.95.
  • the ratio of the radius of curvature of the concave surface and the convex surface of the thick folding mirror is 0.45 to 0.55.
  • the convex grating is a linear groove scribed grating or a curved groove holographic grating.
  • the imaging spectrometer system F number range is 1.5 to 5.
  • the width of the imaging spectrometer in the direction of the slit is less than twice the length of the slit.
  • the principle of the present invention is: the use of fully submerged folding optical path based on Offner device, compact structure, and greatly improve the relative aperture of the imaging spectrometer; the use of high refractive index meniscus lens to improve the traditional Offner spectrometer astigmatism with The problem that the slit grows sharply increases to realize the spectral imaging of the long slit; the thermal expansion coefficient of each refractive element material is optimized to stabilize the image quality of the imaging spectrometer in a large temperature range and realize no heating; suitable for a large field of view, High signal-to-noise ratio and high temperature adaptability are required for hyperspectral remote sensing applications.
  • the imaging spectrometer provided by the present invention has a long slit, which can acquire a wide-spectrum, high spatial resolution and high-spectrum remote sensing image, and the spectral image has a small phase difference and high fidelity.
  • the relative aperture is large, the imaging spectrometer has a strong light collection capability, has a high signal-to-noise ratio, and the captured spectral image has low noise and high contrast.
  • the width of the imaging spectrometer in the slit direction is less than twice the length of the slit, which is the condition for the splicing of multiple spectrometers, and the field of view stitching can be realized to meet the application of ultra-large width requirements.
  • the material used for the optical element is optimized for the coefficient of thermal expansion, the system is not heated, and the image quality can be kept stable in a large temperature range.
  • the imaging spectrometer system is formed by gluing optical elements, without mechanical parts, this integrated and modular
  • the assembly and use of components is very convenient, and the application can be expanded on the basis of a single component.
  • FIG. 1 is a front view of the optical path of a compact fold-back athermal imaging spectrometer provided by an embodiment of the present invention
  • FIG. 2 is a top view of the optical path of a compact fold-back athermal imaging spectrometer provided by an embodiment of the present invention
  • FIG. 3 is an MTF curve at -40°C of a compact foldback athermal imaging spectrometer provided by an embodiment of the present invention
  • FIG. 4 is an MTF curve of a compact fold-back athermal imaging spectrometer provided by an embodiment of the present invention at 20°C;
  • FIG. 5 is an MTF curve of a compact fold-back athermal imaging spectrometer provided by an embodiment of the present invention at 80°C;
  • FIG. 6 is an optical system when the object-side optical path and the image-side optical path of the compact folding-back athermal imaging spectrometer provided by an embodiment of the present invention are not folded;
  • FIG. 7 is an optical system when the grating of the compact fold-back thermal imaging spectrometer provided by the embodiment of the present invention is located on the convex surface of the plano-convex lens;
  • FIGS. 1 and 2 are respectively a front view and an optical path plan view of the optical path of the compact reentrant thermal imaging spectrometer provided in this embodiment;
  • the imaging spectrometer includes an entrance slit 2, an object-side prism 3, and a plano-convex lens 4, meniscus lens 5, thick folding mirror 6, convex grating 7, image square prism 8, filter 9 and focal plane 10,
  • 3.1 is The object prism entrance surface
  • 3.2 is the object prism reflection surface
  • 3.3 is the object prism exit surface
  • 4.1 is a plano-convex lens plane
  • 4.2 is a plano-convex lens convex surface
  • 5.1 is a meniscus lens concave surface
  • 5.2 It is the convex surface of the meniscus lens
  • 6.1 is the concave surface of the thick folding mirror
  • 6.2 is the convex surface of the thick folding mirror
  • 8.1 is the entrance surface of the image side prism
  • 8.2 is the reflection surface of the image side prism
  • the exit surface 3.3 of the object prism is glued with the plane 4.1 of the plano-convex lens; the convex surface 4.2 of the plano-convex lens is glued with the concave surface 5.1 of the meniscus lens; the convex surface 5.2 of the meniscus lens is glued with the concave surface 6.1 of the thick folding mirror; the convex grating 7 is directly engraved on the bend On the convex surface of the moon mirror 5.2; the image plane prism incidence plane 8.1 is glued to the plano-convex lens plane 4.1; the length direction of the entrance slit 2 and the scoring direction of the convex grating 7 are both perpendicular to the paper surface.
  • the telecentric light 1 enters from the slit 2 and is folded or refracted by the object-side prism 3 to enter the plano-convex lens 4; it is refracted by the plano-convex lens 4 and the meniscus lens 5 and reflected by the thick folding mirror 6 after being folded, and then enters into the form of a convergent beam
  • the convex grating 7 On the convex grating 7; the converged light beam is diffracted by the convex grating 7 to achieve spectral splitting; the divergent beam obtained after the splitting is sequentially folded by the thick folding mirror 6, the meniscus lens 5 and the flat convex lens 4 are refracted, and enters the image square prism 8
  • the light beam is folded or refracted by the prism 8 and filtered by the filter 9, and then imaged on the focal plane 10 to achieve spectral imaging.
  • the convex grating 7 is a linear groove scribed grating or a curved groove holographic grating. Both the central field of view chief ray of the incident grating and the central field of view after diffraction of the grating are within the main section of the grating, that is, the paper surface.
  • the plano-convex lens 4, the meniscus lens 5, the thick folding mirror 6 and the convex grating 7 are coaxial; the entrance slit 2 and the focal plane 10 are off-axis, and the amount of off-axis ensures that the convex spherical grating 7 does not block the beams on both sides.
  • slit length 32mm
  • Image plane dispersion width 3.6mm
  • Detector pixel size 15pm ⁇ 15 ⁇ m.
  • FIG. 2 it is a plan view of the optical path of the compact fold-back type athermal imaging spectrometer provided by this embodiment.
  • the entire imaging spectrometer including the entrance slit 2 and the image plane 10 is symmetrical about the optical axis 11; the spatial dimensional imaging magnification of the imaging spectrometer is 1:1, and the spatial dimension length of the image plane 10 and the entrance narrow The length of slit 2 is equal; the width of the slit direction of the imaging spectrometer is 59 mm, which is less than twice the length of the slit.
  • FIG. 3 Referring to FIG. 3, FIG. 4 and FIG. 5, respectively, the modulation transfer function curves of the optical system provided in this embodiment at temperatures of -40°C, 20°C, and 80°C.
  • the imaging spectrometer detects The modulation transfer function at the Nyquist frequency of 33.3 Lp/mm is greater than 0.85, close to the diffraction limit, the image quality is excellent, and the image quality is basically independent of temperature Change and change to achieve no heat.
  • FIG. 6 it is an optical system when the object-side optical path and the image-side optical path of the compact fold-back athermal imaging spectrometer provided by the present invention are not folded. It has an object square prism 3 behind the slit, which is a rectangular prism; and an image square prism 8 before the filter, which is a rectangular prism.
  • the parameters of its plano-convex lens, meniscus lens and thick folding mirror are the same as those of the imaging spectrometer shown in Fig. 1, and the imaging performance and other optical properties are the same as those of the imaging spectrometer shown in Fig. 1.
  • FIG. 7 it is an optical system when the grating of the compact fold-back thermal imaging imaging spectrometer provided by this embodiment is located on the convex surface of the plano-convex lens. It includes the entrance slit 2, object-side prism 3, plano-convex lens 4, meniscus lens 5, thick folding mirror 6, convex grating 27, image-side prism 8, filter 9 and focal plane 10, 3.1 as described
  • the entrance surface of the object prism, 3.2 is the reflection surface of the object prism, 3.3 is the exit surface of the object prism;
  • 4.1 is the plane of the plano-convex lens, 4.2 is the convex surface of the plano-convex lens; 5.1 is the concave surface of the meniscus lens, and 5.2 is the curved surface
  • the convex surface of the moon lens; 6.1 is the concave surface of the thick folding mirror; 6.2 is the convex surface of the thick folding mirror; 8.1 is the entrance surface of the image side prism, 8.2 is the reflection surface of the
  • the exit surface 3.3 of the object prism is glued to the plane 4.1 of the plano-convex lens; the convex surface 4.2 of the plano-convex lens is glued to the concave surface 5.1 of the meniscus lens; the convex surface 5.2 of the meniscus lens is glued to the concave surface 6.1 of the thick folding mirror; the convex grating 7 is directly engraved On the convex surface 4.2 of the plano-convex lens; the image plane prism incidence plane 8.1 is glued to the plano-convex lens plane 4.1; the length direction of the entrance slit 2 and the scoring direction of the convex grating 7 are both perpendicular to the paper surface.
  • the telecentric light 1 enters from the slit 2 and is folded or refracted by the object-side prism 3 to enter the plano-convex lens 4; it is refracted by the plano-convex lens 4 and the meniscus lens 5 and reflected by the thick folding mirror 6 and then enters again in the form of a concentrated beam It reaches the meniscus lens 5 and refracts it onto the convex grating 7; the convergent beam is diffracted by the convex grating 7 to achieve spectral splitting; the divergent beams obtained after the splitting are sequentially refracted by the meniscus lens 5 and the thick folding mirror 6 folds On the contrary, the meniscus lens 5 and the flat convex lens 4 are refracted and enter the image-side prism 8; the light beam is folded or refracted by the prism 8 and filtered by the filter 9, and then imaged on the focal plane 10 to realize spectral imaging.
  • the convex grating 7 is a linear groove scribed grating or a curved groove holographic grating. Both the central field of view principal rays of the incident grating and the central field of view after diffraction of the grating are within the main section of the grating, that is, the paper surface. Plano-convex lens 4, meniscus lens 5, thick folding mirror 6 and convex grating 7 are coaxial; the entrance slit 2 and the focal plane 10 are off-axis, and the off-axis amount ensures that the convex spherical grating 7 does not block the beams on both sides.
  • This embodiment provides a compact folding back type thermal imaging spectrometer when the grating is located on the convex surface of the plano-convex lens
  • the academic system indicators are as follows:
  • slit length 50mm
  • Image plane dispersion width 7.2 mm
  • Detector pixel size 2 4 onx 24 im.
  • the off-axis amount of the entrance slit is 22.4 mm, and the distance from the prism is 3 mm; the thickness of the plano-convex lens is 26 mm, and the radius of curvature of its rear surface is 26.4 mm; the thickness of the meniscus lens is 11.4 mm, and its rear surface The radius of curvature is 65.2mm; the thickness of the thick folding mirror is 57.3mm, and the radius of curvature of its rear surface is 122.5mm; the density of the convex grating groove is 85 lp/mm.

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  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
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Abstract

一种紧凑型折反式无热化成像光谱仪，从狭缝（2）入射的远心光线（1），由物方棱镜（3）折叠或折射进入平凸透镜（4）；经平凸透镜（4）和弯月透镜（5）折射及厚折反镜（6）折反射后，以会聚光束的形式入射到凸面光栅（7）上，衍射后实现光谱分光；发散光束依次通过厚折反镜（6）折反，弯月透镜（5）和平凸透镜（4）折射，进入像方棱镜（8）；经折叠或折射并滤光后，成像于焦平面（10），实现光谱成像。该光谱仪采用基于Offner装置的全浸没的折反式光路，结构紧凑，并大大提高成像光谱仪的相对孔径；采用高折射率的弯月透镜，实现长狭缝的光谱成像；各折射元件材料热膨胀系数经优选，使成像光谱仪在大温度范围内像质稳定，实现无热化；适用于大视场，高信噪比，高温度适性应要求的高光谱遥感应用。

Description

紧凑型折反式无热化成像光谱仪 技术领域
[0001] 本发明涉及一种适用于大视场， 高信噪比， 高温度适性应要求的紧凑型折反式 无热化成像光谱仪， 属于光谱成像技术领域。
背景技术
[0002] 光谱成像技术是综合了光谱分光技术和空间成像技术的新兴领域， 它极大地拓 宽了人们在航天遥感领域、 农林资源探测、 矿物资源与地质勘探、 军事侦探等 方面的应用范围。
[0003] 传统的色散型成像光谱仪结构形式主要有： 平面光栅 C-T型， 凸面光栅 Offner 型、 凹面光栅 Dyson型等。 这些结构形式的光谱仪在中短狭缝和中等相对孔径时 有较好的性能， 但在长狭缝和大相对孔径的情况下， 存在较大的像差， 光谱图 像易失真， 并且仪器尺寸随狭缝增长和相对孔径增大而急剧增大。 另外， 传统 折反式成像光谱仪， 如 Dyson型成像光谱仪， 成像质量通常受温度影响较大， 需 要严格的温控系统来保证它的像质稳定。
[0004] 应用于高光谱遥感领域的成像光谱仪一般对仪器的重量、 体积等几何物理参数 要求较高， 过大的体积和重量导致仪器的生产、 制造、 发射等成本急剧增加。 削减制冷设备能极大的减小平台的负载压力， 这也对成像光谱仪的温度适应性 提出了更高的要求， 要求其能在较大的温度范围内保持稳定的像质。
[0005] 5见有文献所报道的成像光谱仪中， 大相对孔径、 长狭缝和结构紧凑通常无法同 时满足。 参见文献“小型 Offner光谱成像系统的设计” ( [J].光学 ·精密工程, 2005, 13(6): 650) 和“Offner成像光谱仪的设计方法” ( [J].光学学报, 2010 (4):
1148-1152) , 报道了传统中短狭缝凸面光栅 Offner装置， 为全反射结构， 狭缝 长度不足 20mm; 文献“红外成像光谱测量中 Dyson光学系统的研究进展” ( [J].光 谱学与光谱分析, 2012, 32(2): 548-552) 中的凹面光栅 Dyson装置为折反式成像光 谱仪， 能够获得大相对孔径， 但狭缝较短， 很难长达 20mm以上， 并且这种光谱 仪性能受温度变化影响很大； 中国发明专利 CN102183304B“一种柱面消像散光 栅色散性成像光谱仪光路结构”和文献“星载车尔尼-特纳型成像光谱仪像差校正 的研究” ( [J].光学学报 , 2009, 29(1): 35-40) 中公开的平面光栅 Czerny-Tumer装置 ， 也为全反射结构， 但它狭缝长度很短， 且相对孔径较小， 无法满足大视场高 信噪比的高光谱遥感应用需求。 因此， 亟需提供一种大相对孔径， 长狭缝， 紧 凑型且无热化的成像光谱仪， 以满足高光谱遥感应用中对仪器小型化、 大幅宽 、 高空间分辨率、 高信噪比、 温度适应性强的需求。
发明概述
技术问题
问题的解决方案
技术解决方案
[0006] 本发明针对现有技术存在的不足， 提供一种具有大相对孔径、 长狭缝、 成像质 量好、 结构紧凑、 温度适应性强等特点， 能满足大幅宽、 高信噪比、 小型化、 无热化要求的高光谱遥感用成像光谱仪。
[0007] 为实现上述发明目的技术方案是提供一种紧凑型折反式无热化成像光谱仪， 它 包括入射狭缝， 物方棱镜， 平凸透镜， 弯月透镜， 厚折反镜， 凸面光栅， 像方 棱镜， 滤光片和焦平面； 物方棱镜的出射平面与平凸透镜的平面胶合； 平凸透 镜的凸面与弯月透镜的凹表面胶合； 弯月透镜的凸表面与厚折反镜的凹表面胶 合； 凸面光栅直接刻在弯月镜的凸表面或平凸透镜的凸表面上； 像方棱镜的入 射平面与平凸透镜的平面胶合；
[0008] 远心光线从狭缝入射， 由物方棱镜折叠或折射进入平凸透镜； 经平凸透镜和弯 月透镜折射， 厚折反镜折反射后， 以会聚光束的形式入射到凸面光栅上； 所述 的会聚光束经过凸面光栅衍射后实现光谱分光； 分光后得到的发散光束依次通 过厚折反镜折反， 弯月透镜和平凸透镜折射， 进入像方棱镜； 所述光束经棱镜 折叠或折射， 经滤光片滤光后， 成像于焦平面， 实现光谱成像；
[0009] 所述的弯月透镜的折射率大于平凸透镜和厚折反镜的折射率； 所述的平凸透镜 的材料热膨胀系数 A， 弯月透镜的材料热膨胀系数《2和厚折反镜的材料热膨胀 系数《3相等， 或满足：
[0010] a3= ax ax+ bx a2 ， [0011] 其中， a和 b为比例系数， a的取值范围为 0.4〜 0.6， b的取值范围为 0.4〜 0.6。
[0012] 本发明所述的一种紧凑型折反式无热化成像光谱仪， 其物方棱镜， 平凸透镜和 像方棱镜为同种材料。
[0013] 物方棱镜与像方棱镜对应， 为折叠棱镜或直方棱镜。
[0014] 平凸透镜， 弯月透镜， 厚折反镜和凸面光栅同光轴。
[0015] 弯月透镜凹表面与凸表面曲率半径之比为 0.75〜 0.95。
[0016] 厚折反镜凹表面与凸表面曲率半径之比为 0.45〜 0.55。
[0017] 凸面光栅为直线槽刻划光栅或曲线槽全息光栅。
[0018] 成像光谱仪系统 F数范围为 1.5〜 5。
[0019] 成像光谱仪在狭缝方向的宽度小于狭缝长度的两倍。
[0020] 本发明的原理是： 采用基于 Offner装置的全浸没的折反式光路， 结构紧凑， 并 大大提高成像光谱仪的相对孔径； 采用高折射率的弯月透镜， 改善传统 Offner光 谱仪像散随狭缝增长而急剧增大的问题， 实现长狭缝的光谱成像； 各折射元件 材料热膨胀系数经优选， 使成像光谱仪在大温度范围内像质稳定， 实现无热化 ; 适用于大视场， 高信噪比， 高温度适性应要求的高光谱遥感应用。
发明的有益效果
有益效果
[0021] 与现有技术相比， 本发明的优点在于：
[0022] 1.本发明提供的成像光谱仪狭缝长， 能够获取大幅宽、 高空间分辨率高光谱遥 感图像， 且光谱图像相差小， 保真度高。
[0023] 2.相对孔径大， 成像光谱仪集光能力强， 具有高信噪比， 拍摄的光谱图像噪声 小， 对比度高。
[0024] 3.采用全浸没的折反式结构， 系统十分紧凑， 大大减小生产研制成本。 且成像 光谱仪在狭缝方向的宽度小于狭缝长度的两倍， 这是多台光谱仪拼接的条件， 能够实现视场拼接以满足超大幅宽需求的应用。
[0025] 4.光学元件所用材料对热膨胀系数优选过， 系统无热化， 能够在大的温度范围 内保持像质稳定。
[0026] 5.成像光谱仪系统由光学元件胶合而成， 无机械部件， 这种集成化、 模块化的 组件装调和使用十分方便， 可在单组件基础上拓展应用。
对附图的简要说明
附图说明
[0027] 图 1是本发明实施例提供的紧凑型折返式无热化成像光谱仪的光路主视图； [0028] 图 2是本发明实施例提供的紧凑型折返式无热化成像光谱仪的光路俯视图； [0029] 图 3是本发明实施例提供的紧凑型折返式无热化成像光谱仪在 -40°C时的 MTF曲 线；
[0030] 图 4是本发明实施例提供的紧凑型折返式无热化成像光谱仪在 20°C时的 MTF曲 线；
[0031] 图 5是本发明实施例提供的紧凑型折返式无热化成像光谱仪在 80°C时的 MTF曲 线；
[0032] 图 6是本发明实施例提供的紧凑型折返式无热化成像光谱仪物方光路和像方光 路未折叠时的光学系统；
[0033] 图 7是本发明实施例提供的紧凑型折返式无热化成像光谱仪光栅位于平凸透镜 凸面时的光学系统；
[0034] 图中， 1、 入射远心光线； 2、 狭缝； 3、 物方棱镜； 3.1、 物方棱镜入射面； 3.2 、 物方棱镜反射面； 3.3、 物方棱镜出射面； 4、 平凸透镜； 4.1、 平凸透镜平面 ; 4.2、 平凸透镜凸表面； 5、 弯月透镜； 5.1、 弯月透镜凹表面； 5.2、 弯月透镜 凸表面； 6、 厚折反镜； 6.1、 厚折反镜凹表面； 6.2、 厚折反镜凸表面； 7、 凸面 光栅； 8、 像方棱镜； 8.1、 像方棱镜入射面； 8.2、 像方棱镜反射面； 8.3、 像方 棱镜出射面； 9、 滤光片； 10、 焦平面； 11、 光轴。
发明实施例
本发明的实施方式
[0035] 下面结合附图和实施例对本发明技术方案作进一步描述。
[0036] 实施例 1
[0037] 参见附图 1和 2, 它们分别为本实施例提供的紧凑型折返式无热化成像光谱仪的 光路主视图和光路俯视图； 成像光谱仪包括入射狭缝 2, 物方棱镜 3 , 平凸透镜 4 ， 弯月透镜 5 , 厚折反镜 6 , 凸面光栅 7 , 像方棱镜 8 , 滤光片 9和焦平面 10, 3.1为 所述物方棱镜入射面， 3.2为所述物方棱镜反射面， 3.3为所述物方棱镜出射面； 4.1为平凸透镜平面， 4.2为平凸透镜凸表面； 5.1为弯月透镜凹表面， 5.2为弯月 透镜凸表面； 6.1为厚折反镜凹表面， 6.2为厚折反镜凸表面； 8.1为像方棱镜入 射面， 8.2为像方棱镜反射面， 8.3为像方棱镜出射面。 物方棱镜出射面 3.3与平凸 透镜平面 4.1胶合； 平凸透镜凸表面 4.2与弯月透镜凹表面 5.1胶合； 弯月透镜凸表 面 5.2与厚折反镜凹表面 6.1胶合； 凸面光栅 7直接刻在弯月镜凸表面 5.2上； 像方 棱镜入射平面 8.1与平凸透镜平面 4.1胶合； 入射狭缝 2的长度方向和凸面光栅 7的 刻线方向均垂直于纸面。 远心光线 1从狭缝 2入射， 由物方棱镜 3折叠或折射进入 平凸透镜 4; 经平凸透镜 4和弯月透镜 5折射， 厚折反镜 6折反射后， 以会聚光束 的形式入射到凸面光栅 7上； 所述的会聚光束经过凸面光栅 7衍射后实现光谱分 光； 分光后得到的发散光束依次通过厚折反镜 6折反， 弯月透镜 5和平凸透镜 4折 射， 进入像方棱镜 8 ; 所述光束经棱镜 8折叠或折射， 并由滤光片 9滤光后， 成像 于焦平面 10, 实现光谱成像。 凸面光栅 7为直线槽刻划光栅或曲线槽全息光栅， 入射光栅的中心视场主光线和光栅衍射后的中心视场主光线均在光栅主截面即 纸面内。 平凸透镜 4、 弯月透镜 5、 厚折反镜 6和凸面光栅 7共轴； 入射狭缝 2和焦 平面 10离轴， 其离轴量保证凸球面光栅 7不对两侧的光束形成遮拦。
[0038] 本实施例提供的紧凑型折反式无热化成像光谱仪相关指标如下：
[0039] 光谱范围： 0.4 on〜 4on;
[0040] 系统 F数： 2.7 ;
[0041] 狭缝长度： 32mm；
[0042] 光谱分辨率： 2.5nm;
[0043] 像平面色散宽度： 3.6mm;
[0044] 探测器像元大小： 15pmxl5^im。
[0045] 本实施例中各光学元件的具体光学参数参见表 1， 表中“表面”表示各光学表面 代号； “曲率半径”表示各光学面半径大小； “材料”表示该光学元件所用材料； “ 距离”表示该光学面顶点到下一个光学面顶点的横向距离； 凸面光栅 7刻线密度为
186 lp/mm。
[0046] 表 1紧凑型折反式无热化成像光谱仪光学参数 [] [表 1]
Figure imgf000008_0001
[0047] 参见附图 2, 为本实施例提供的紧凑型折反式无热化成像光谱仪光路俯视图。
由图 2可以看出， 包括入射狭缝 2和像平面 10在内的整个成像光谱仪关于光轴 11 对称； 该成像光谱仪空间维成像放大率为 1: 1， 像平面 10空间维长度与入射狭缝 2 长度相等； 该成像光谱仪狭缝方向宽度为 59mm， 小于狭缝长度的两倍。
[0048] 参见附图 3， 图 4和图 5， 分别为本实施例提供的光学系统在温度为 -40°C， 20°C 和 80°C时的调制传递函数曲线， 该成像光谱仪在探测器奈奎斯特频率 33.3 Lp/mm 处的调制传递函数大于 0.85 , 接近衍射极限， 成像质量优良， 像质基本不随温度 变化而变化， 实现无热化。
[0049] 参见附图 6 , 它是本发明提供的紧凑型折返式无热化成像光谱仪物方光路和像 方光路未折叠时的光学系统。 它在狭缝后有物方棱镜 3 , 它为直方棱镜； 滤光片 前有像方棱镜 8 , 它为直方棱镜。 它的平凸透镜， 弯月透镜和厚折反镜参数都与 图 1所示成像光谱仪参数相同， 成像性能和其它光学性能和图 1所示成像光谱仪 相同。
[0050] 实施例 2
[0051] 参见附图 7 , 它是本实施例提供的紧凑型折返式无热化成像光谱仪光栅位于平 凸透镜凸面时的光学系统。 它包括包括入射狭缝 2, 物方棱镜 3 , 平凸透镜 4, 弯 月透镜 5 , 厚折反镜 6 , 凸面光栅 27 , 像方棱镜 8 , 滤光片 9和焦平面 10, 3.1为所 述物方棱镜入射面， 3.2为所述物方棱镜反射面， 3.3为所述物方棱镜出射面； 4.1 为平凸透镜平面， 4.2为平凸透镜凸表面； 5.1为弯月透镜凹表面， 5.2为弯月透镜 凸表面； 6.1为厚折反镜凹表面， 6.2为厚折反镜凸表面； 8.1为像方棱镜入射面 ， 8.2为像方棱镜反射面， 8.3为像方棱镜出射面。 物方棱镜出射面 3.3与平凸透镜 平面 4.1胶合； 平凸透镜凸表面 4.2与弯月透镜凹表面 5.1胶合； 弯月透镜凸表面 5. 2与厚折反镜凹表面 6.1胶合； 凸面光栅 7直接刻在平凸透镜凸表面 4.2上； 像方棱 镜入射平面 8.1与平凸透镜平面 4.1胶合； 入射狭缝 2的长度方向和凸面光栅 7的刻 线方向均垂直于纸面。 远心光线 1从狭缝 2入射， 由物方棱镜 3折叠或折射进入平 凸透镜 4; 经平凸透镜 4和弯月透镜 5折射， 厚折反镜 6折反射后， 以会聚光束的 形式再次入射到弯月透镜 5上， 再折射至凸面光栅 7上； 所述的会聚光束经过凸 面光栅 7衍射后实现光谱分光； 分光后得到的发散光束依次通过弯月透镜 5折射 ， 厚折反镜 6折反， 弯月透镜 5和平凸透镜 4折射， 进入像方棱镜 8 ; 所述光束经 棱镜 8折叠或折射， 并由滤光片 9滤光后， 成像于焦平面 10, 实现光谱成像。 凸 面光栅 7为直线槽刻划光栅或曲线槽全息光栅， 入射光栅的中心视场主光线和光 栅衍射后的中心视场主光线均在光栅主截面即纸面内。 平凸透镜 4、 弯月透镜 5 、 厚折反镜 6和凸面光栅 7共轴； 入射狭缝 2和焦平面 10离轴， 其离轴量保证凸球 面光栅 7不对两侧的光束形成遮拦。
[0052] 本实施例提供的光栅位于平凸透镜凸面时的紧凑型折返式无热化成像光谱仪光 学系统指标如下：
[0053] 光谱范围： lpm〜 2.5 n;
[0054] 系统 F数： 2.7 ;
[0055] 狭缝长度： 50mm；
[0056] 光谱分辨率： 5nm；
[0057] 像平面色散宽度： 7.2mm；
[0058] 探测器像元大小： 24 onx24 im。
[0059] 本实施例中入射狭缝离轴量为 22.4mm， 距棱镜距离为 3mm; 平凸透镜厚度为 2 6mm， 其后表面曲率半径为 26.4mm; 弯月透镜厚度为 11.4mm， 其后表面曲率半 径为 65.2mm; 厚折反镜厚度为 57.3mm， 其后表面曲率半径为 122.5mm; 凸面光 栅槽密度为 85 lp/mm。

Claims

权利要求书
[权利要求 1] 一种紧凑型折反式无热化成像光谱仪， 其特征在于： 它包括入射狭缝 （2） ， 物方棱镜 （3） ， 平凸透镜 （4） ， 弯月透镜 （5） ， 厚折反镜 （6） 凸面光栅 （7） 像方棱镜 （8） 滤光片 （9） 和焦平面 （10 ） ; 物方棱镜 （3） 的出射平面 （3.3） 与平凸透镜 （4） 的平面 （4.1 ） 胶合； 平凸透镜 （4） 的凸面 （4.2） 与弯月透镜 （5） 的凹表面 （5. 1） 胶合； 弯月透镜 （5） 的凸表面 （5.2） 与厚折反镜 （6） 的凹表面 胶合； 凸面光栅 （7） 直接刻在弯月镜 （5） 的凸表面 （5.2） 或平凸 透镜 （4） 的凸表面 （4.2） 上； 像方棱镜 （8） 的入射平面 （8.1） 与 平凸透镜 （4） 的平面 （4.1） 胶合；
远心光线 （1） 从狭缝 （2） 入射， 由物方棱镜 （3） 折叠或折射进 入平凸透镜 （4） ; 经平凸透镜 （4） 和弯月透镜 （5） 折射， 厚折反 镜 （6） 折反射后， 以会聚光束的形式入射到凸面光栅 （7） 上； 所述 的会聚光束经过凸面光栅 （7） 衍射后实现光谱分光； 分光后得到的 发散光束依次通过厚折反镜 （6） 折反， 弯月透镜 （5） 和平凸透镜 （ 4） 折射， 进入像方棱镜 （8） ; 所述光束经棱镜 （8） 折叠或折射， 经滤光片 （9） 滤光后， 成像于焦平面 （10） 实现光谱成像； 所述的弯月透镜 （5） 的折射率大于平凸透镜 （4） 和厚折反镜 （6） 的折射率； 所述的平凸透镜 （4） 的材料热膨胀系数％
， 弯月透镜 （5） 的材料热膨胀系数《2和厚折反镜 （6） 的材料热膨 胀系数《3相等， 或满足：
a3= ax ax+ bx a2
其中， a和 b为比例系数， a的取值范围为 0.4〜 0.6 , b的取值范围为 0.4
〜 0.6。
[权利要求 2] 根据权利要求 1所述的一种紧凑型折反式无热化成像光谱仪， 其特征 在于： 物方棱镜 （3） 平凸透镜 （4） 和像方棱镜 （8） 为同种材料
[权利要求 3] 根据权利要求 1所述的一种紧凑型折反式无热化成像光谱仪， 其特征 在于： 物方棱镜 （3） 与像方棱镜 （8） 对应， 为折叠棱镜或直方棱镜
[权利要求 4] 根据权利要求 1所述的一种紧凑型折反式无热化成像光谱仪， 其特征 在于： 平凸透镜 （4） ， 弯月透镜 （5） ， 厚折反镜 （6） 和凸面光栅 （7） 同光轴 （11） 。
[权利要求 5] 根据权利要求 1所述的一种紧凑型折反式无热化成像光谱仪， 其特征 在于： 弯月透镜 （5） 凹表面 （5.1） 与凸表面 （5.2） 曲率半径之比为
0.75〜 0.95。
[权利要求 6] 根据权利要求 1所述的一种紧凑型折反式无热化成像光谱仪， 其特征 在于： 厚折反镜 （6） 凹表面 （6.1） 与凸表面 （6.2） 曲率半径之比为
0.45〜 0.55。
[权利要求 7] 根据权利要求 1所述的一种紧凑型折反式无热化成像光谱仪， 其特征 在于： 凸面光栅 （7） 为直线槽刻划光栅或曲线槽全息光栅。
[权利要求 8] 根据权利要求 1所述的一种紧凑型折反式无热化成像光谱仪， 其特征 在于： 成像光谱仪系统 F数范围为 1.5〜 5。
[权利要求 9] 根据权利要求 1所述的一种紧凑型折反式无热化成像光谱仪， 其特征 在于： 所述成像光谱仪在狭缝方向的宽度小于狭缝长度的两倍。
PCT/CN2019/081154 2018-12-31 2019-04-02 紧凑型折反式无热化成像光谱仪 WO2020140340A1 (zh)

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