WO2020137262A1 - Dispositif de vibration et dispositif de détection optique - Google Patents

Dispositif de vibration et dispositif de détection optique Download PDF

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Publication number
WO2020137262A1
WO2020137262A1 PCT/JP2019/045250 JP2019045250W WO2020137262A1 WO 2020137262 A1 WO2020137262 A1 WO 2020137262A1 JP 2019045250 W JP2019045250 W JP 2019045250W WO 2020137262 A1 WO2020137262 A1 WO 2020137262A1
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WIPO (PCT)
Prior art keywords
body cover
vibration
vibrating
translucent body
holding member
Prior art date
Application number
PCT/JP2019/045250
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English (en)
Japanese (ja)
Inventor
仁志 坂口
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株式会社村田製作所
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Publication of WO2020137262A1 publication Critical patent/WO2020137262A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B15/00—Special procedures for taking photographs; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B17/00—Details of cameras or camera bodies; Accessories therefor
    • G03B17/02—Bodies
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B17/00—Details of cameras or camera bodies; Accessories therefor
    • G03B17/02—Bodies
    • G03B17/08—Waterproof bodies or housings
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B17/00—Details of cameras or camera bodies; Accessories therefor
    • G03B17/56—Accessories

Definitions

  • the present invention relates to a vibration device and an optical detection device capable of removing water drops and the like by mechanical vibration.
  • Japanese Patent Application Laid-Open No. 2004-242242 discloses a liquid droplet removing device in which a piezoelectric element is attached to a drip-proof cover arranged in front of an image sensor. By vibrating the drip-proof cover, water drops in the visual field of the image sensor are removed. The drip-proof cover is held by the support frame. The image pickup device is arranged in an internal space formed by the drip-proof cover and the support frame.
  • the piezoelectric element is directly attached to the drip-proof cover. Therefore, the part of the drip-proof cover outside the field of view of the image sensor vibrates, and the vibration efficiency may be significantly deteriorated. Further, since the portion outside the visual field of the drip-proof cover is held by the support frame, it is difficult to suppress damping of vibration.
  • An object of the present invention is to provide a vibrating device and an optical detection device that can efficiently vibrate a cover to which water drops and the like adhere.
  • the vibrating device is a translucent body cover, and a mass addition member that is directly or indirectly connected to the translucent body cover and is provided so as to form an internal space together with the translucent body cover.
  • a member and a piezoelectric element that vibrates the translucent cover are provided.
  • the optical detection device includes a vibrating device configured according to the present invention, and an optical detection element arranged so that the translucent body cover includes a detection region.
  • the present invention it is possible to provide a vibrating device and an optical detection device capable of efficiently vibrating a cover to which water droplets and the like adhere.
  • FIG. 1 is a front sectional view of a vibrating device according to a first embodiment of the present invention.
  • FIG. 2 is an exploded perspective view of the vibration device according to the first embodiment of the present invention.
  • FIG. 3 is a diagram showing the relationship between the mass ratio M2/M1 and the magnitude of displacement at the center of the translucent body cover in the first embodiment of the present invention and the comparative example.
  • FIG. 4 is a vibration displacement diagram of the vibration device of the comparative example.
  • FIG. 5 is a vibration displacement diagram of the vibration device according to the first embodiment of the present invention in which the mass ratio M2/M1 is 1.7.
  • FIG. 6 is a vibration displacement diagram of the vibration device according to the first embodiment of the present invention in which the mass ratio M2/M1 is 2.2.
  • FIG. 7 is a front sectional view of a vibrating device according to a modification of the first embodiment of the present invention.
  • FIG. 8 is a front sectional view of a vibrating device according to a second embodiment of the present invention.
  • FIG. 9 is a vibration displacement diagram of the vibrating section according to the second embodiment of the present invention.
  • FIG. 10 is a figure which shows the relationship between the position in the axial direction, and the magnitude
  • FIG. 11 is a vibration displacement diagram of the vibration device according to the second embodiment of the present invention.
  • FIG. 12 is a vibration displacement diagram of the vibrating device according to the first modification of the second embodiment of the present invention.
  • FIG. 13 is a diagram showing the relationship between the position in the axial direction and the magnitude of displacement in the holding members of the second embodiment and the first modification of the present invention.
  • FIG. 14 is a diagram showing the relationship between the position in the axial direction and the magnitude of the radial component in the displacement in the holding members of the second embodiment and the first modified example of the present invention.
  • FIG. 15 is a figure which shows the relationship between the position in the axial direction and the magnitude
  • FIG. 16 is a figure which shows the relationship between the elastic energy ratio and the displacement of the bottom part in a holding member in the holding member of the 2nd Embodiment and 1st modification of this invention.
  • FIG. 17 is a vibration displacement diagram when the vibrating device according to the second embodiment of the present invention is externally fixed at the bottom of the holding member.
  • FIG. 18 is a front sectional view of a vibrating device according to a second modification of the second embodiment of the present invention.
  • FIG. 19 is a front sectional view of a vibrating device according to a third modification of the second embodiment of the present invention.
  • 20 is a front sectional view of a vibrating device according to a fourth modification of the second embodiment of the present invention.
  • FIG. 21 is a front sectional view of a vibrating device according to a fifth modification of the second embodiment of the present invention.
  • FIG. 22 is a front sectional view of a vibrating device according to a sixth modified example of the second embodiment of the present invention.
  • FIG. 18 is a front sectional view of a vibrating device according to a second modification of the second embodiment of the present invention.
  • FIG. 19 is a front sectional view of a vibrating device according to a
  • FIG. 23 is a front sectional view of a vibrating device according to a seventh modification of the second embodiment of the present invention.
  • FIG. 24 is a perspective view of an imaging device according to the third embodiment of the present invention.
  • FIG. 25 is a front sectional view of an imaging device according to the third embodiment of the present invention.
  • FIG. 1 is a front cross-sectional view of the vibration device according to the first embodiment.
  • FIG. 2 is an exploded perspective view of the vibration device according to the first embodiment.
  • a control circuit described later may be omitted.
  • the vibrating device 1 shown in FIG. 1 is a vibrating device that removes water droplets or foreign matter from the field of view of the image sensor by moving water droplets or foreign matter by vibration or atomizing water droplets or the like.
  • the vibrating device 1 includes a translucent body cover 2, a piezoelectric element 3, a mass addition member 6, and a control circuit 7 electrically connected to the piezoelectric element 3.
  • the translucent body cover 2, the piezoelectric element 3, and the mass addition member 6 constitute an internal space.
  • An optical detection element such as an image pickup element is arranged in this internal space.
  • the internal space is not limited to a sealed space, and a space partially open to the outside is also an internal space.
  • the internal space of the vibration device 1 is open to the outside on the side of the mass addition member 6.
  • the translucent body cover 2 has a dome shape.
  • the shape of the translucent body cover 2 in a plan view is circular.
  • the translucent body cover 2 has a bottom surface 2b.
  • the translucent body cover 2 has a flange portion 2c provided near the bottom surface 2b.
  • the flange portion 2c has a first surface 2d and a second surface facing each other.
  • the second surface of the flange portion 2c is included in the bottom surface 2b.
  • the shape of the translucent body cover 2 is not limited to the above, and may be, for example, a flat plate shape.
  • the shape of the translucent body cover 2 in plan view may be, for example, a polygon.
  • the translucent body cover 2 does not need to have the flange portion 2c.
  • the translucent cover 2 is made of soda lime glass.
  • the material of the translucent body cover 2 is not limited to the above, and for example, translucent plastic, glass such as quartz or boroic acid, or translucent ceramic can be used.
  • the light-transmitting property in this specification refers to a light-transmitting property through which at least an energy ray having a wavelength detected by an optical detection element such as the above-described image pickup element or light is transmitted.
  • the piezoelectric element 3 is attached to the bottom surface 2b of the translucent body cover 2.
  • the piezoelectric element 3 has an annular piezoelectric body 4.
  • the piezoelectric body 4 is made of PZT. It should be noted that the material of the piezoelectric body 4 is not limited to the above, and may be made of an appropriate piezoelectric ceramic such as PT or (K,Na)NbO 3 or an appropriate piezoelectric single crystal such as LiTaO 3 or LiNbO 3. Good.
  • the shape of the piezoelectric body 4 is not limited to the above.
  • the piezoelectric element 3 has a first electrode 5a provided on one main surface of the piezoelectric body 4 and a second electrode 5b provided on the other main surface.
  • the first electrode 5a and the second electrode 5b are annular and are provided so as to face each other.
  • the first electrode 5a and the second electrode 5b are electrically connected to the control circuit 7, respectively.
  • the control circuit 7 drives the piezoelectric element 3 in a resonance state.
  • the first electrode 5a and the second electrode 5b are made of 42Ni.
  • the first electrode 5a and the second electrode 5b may be made of a metal material other than 42Ni.
  • the first electrode 5a and the second electrode 5b may be electrodes made of a metal thin film such as Ag or Au formed by a sputtering method or the like.
  • one annular piezoelectric element 3 is provided, but the present invention is not limited to this.
  • a plurality of rectangular plate-shaped piezoelectric elements may be provided along the outer peripheral edge of the translucent body cover 2 in plan view.
  • the piezoelectric element 3 is attached to the translucent body cover 2 on the side of the first electrode 5a.
  • the mass adding member 6 is attached to the second electrode 5b side of the piezoelectric element 3.
  • the mass addition member 6 is indirectly connected to the translucent body cover 2 via the piezoelectric element 3.
  • the mass addition member 6 has a cylindrical shape.
  • the mass addition member 6 has a first opening end surface 6a and a second opening end surface 6b that face each other. Of the first opening end surface 6a and the second opening end surface 6b, the first opening end surface 6a is located on the light-transmitting body cover 2 side.
  • the piezoelectric element 3 is attached to the first opening end surface 6a.
  • a direction connecting the first opening end surface 6a and the second opening end surface 6b is defined as an axial direction Z
  • a direction orthogonal to the axial direction Z is defined as a radial direction X
  • the direction X may be described as the direction X orthogonal to the axial direction Z.
  • the mass addition member 6 has an outer side surface 6c located outside in the radial direction X and an inner side surface 6d located inside in the radial direction X.
  • the mass addition member 6 is provided so as to form an internal space together with the translucent body cover 2.
  • the mass addition member 6 is indirectly connected to the translucent body cover 2 over the entire circumferential direction.
  • the shape of the mass addition member 6 is not limited to a cylindrical shape, and may be, for example, a rectangular tube shape.
  • the mass addition member 6 is made of SUS420J2.
  • the material of the mass adding member 6 is not limited to the above, and may be a metal other than the above or an appropriate ceramic.
  • the mass addition member 6 may be used as the second electrode of the piezoelectric element 3. In this case, the second electrode 5b of the piezoelectric element 3 shown in FIGS. 1 and 2 may not be provided.
  • control circuit 7 drives the piezoelectric element 3 in the resonance state.
  • the vibration device 1 does not necessarily have to have the control circuit 7, and the piezoelectric element 3 may be driven by a signal from the outside.
  • the feature of this embodiment is that the mass addition member 6 is connected to the translucent body cover 2 so as to form an internal space together with the translucent body cover 2. As a result, it is possible to efficiently vibrate the translucent body cover 2 to which water drops and the like adhere. This will be described below by comparing the present embodiment with a comparative example.
  • the comparative example differs from the first embodiment in that the mass addition member 6 is not provided.
  • the mass of the translucent body cover 2 is M1
  • the total mass of the mass adding member 6 and the piezoelectric element 3 is M2.
  • a plurality of vibration devices 1 having the configuration of the first embodiment having different mass ratios M2/M1 were produced. Further, a vibration device of a comparative example was manufactured. In the plurality of vibration devices, the magnitude of displacement at the center of the light-transmitting body cover 2 was compared. When comparing the magnitudes of the displacements, the voltage applied to the piezoelectric element 3 was an AC voltage with an amplitude of 20 V, and the vibration frequency was around 60 kHz, which is the resonance frequency of the vibration device 1. The simulation was performed by the finite element method using a three-dimensional model.
  • FIG. 3 is a diagram showing the relationship between the mass ratio M2/M1 and the magnitude of displacement at the center of the translucent body cover 2 in the first embodiment and the comparative example.
  • the displacement ratio in FIG. 3 is a ratio based on the magnitude of displacement at the center of the translucent body cover 2 of the comparative example.
  • the black circle plots show the respective results of the first embodiment, and the white plots show the results of the comparative example.
  • the displacement ratio is larger than 1 in the first embodiment.
  • the displacement of the translucent body cover 2 in the first embodiment is larger than the displacement of the translucent body cover 2 in the comparative example.
  • the mass ratio M2/M1 is 0.9 or more and 1.9 or less
  • the displacement ratio is 1.5 or more, and it can be seen that the displacement is particularly large.
  • the translucent body cover 2 can be efficiently vibrated.
  • FIG. 4 is a vibration displacement diagram of the vibration device of the comparative example.
  • FIG. 5 is a vibration displacement diagram of the vibration device according to the first embodiment in which the mass ratio M2/M1 is 1.7.
  • FIG. 6 is a vibration displacement diagram of the vibration device according to the first embodiment in which the mass ratio M2/M1 is 2.2. 4 to 6, it is shown that the displacement is larger as the color is closer to white. The same applies to other vibration displacement diagrams.
  • the displacement on the bottom surface 2b side of the translucent body cover 2 is large, and the displacement at the center is small.
  • a portion A between the center of the translucent body cover 2 and the bottom surface 2b serves as a vibration node, and the bottom surface 2b side vibrates with the vibration node serving as a fulcrum.
  • the large displacement portions are dispersed, and the vibration efficiency of the central portion is low.
  • the mass addition member 6 is connected to the bottom surface 2b side of the translucent body cover 2. As described above, it is possible to suppress the dispersion of the portion having a large displacement, and it is possible to intensively vibrate the center of the translucent body cover 2. Therefore, the translucent body cover 2 can be efficiently vibrated.
  • the mass ratio M2/M1 is preferably 0.9 or more and 1.9 or less.
  • the center of the light-transmitting body cover 2 can be further concentrated and vibrated, and the light-transmitting body cover 2 can be vibrated more efficiently. ..
  • the arrangement of the piezoelectric element 3 is not limited between the translucent body cover 2 and the mass addition member 6.
  • the piezoelectric element 3 is provided on the flange portion 2c of the translucent body cover 2. More specifically, the piezoelectric element 3 is provided on the first surface 2d of the flange portion 2c that faces the bottom surface 2b.
  • the mass addition member 6 is directly connected to the translucent body cover 2. Also in this case, the light-transmitting body cover 2 can be efficiently vibrated as in the first embodiment.
  • FIG. 8 is a front sectional view of the vibration device according to the second embodiment.
  • the present embodiment is different from the first embodiment in that a holding member 18 that holds a vibrating portion including the translucent body cover 2, the piezoelectric element 3, and the mass addition member 6 is provided. Except for the above points, the vibration device 11 of the present embodiment has the same configuration as the vibration device 1 of the first embodiment.
  • the holding member 18 holds the mass addition member 6.
  • the holding member 18 has a connecting portion 18a connected to the outer side surface 6c of the mass adding member 6, a spring portion 18b connected to the connecting portion 18a, and a bottom portion 18c connected to the spring portion 18b.
  • the connecting portion 18a has an annular shape.
  • the spring portion 18b and the bottom portion 18c have a cylindrical shape extending in the axial direction Z.
  • the shape of each part of the holding member 18 is not limited to the above.
  • the connecting portion 18a may have, for example, a frame shape other than the annular shape.
  • the spring portion 18b and the bottom portion 18c may have a shape such as a rectangular tube shape, for example.
  • the cross section of the holding member 18 of the vibration device 11 along the axial direction Z has a substantially L-shape. More specifically, when the thickness of each portion of the holding member 18 is set to be the thickness along the direction orthogonal to the direction in which the respective portions of the holding member 18 extend, in the holding member 18, the thickness of the bottom portion 18c. Is thicker than the wall thickness of the spring portion 18b. Thereby, the spring portion 18b is more easily deformed than the bottom portion 18c.
  • the thickness of the bottom portion 18c of the holding member 18 increases from the spring portion 18b side toward the inside in the radial direction X.
  • the outer diameters of the spring portion 18b and the bottom portion 18c are the same, and the inner diameter of the bottom portion 18c is smaller than the inner diameter of the spring portion 18b.
  • the vibration device 11 can be downsized.
  • the bottom portion 18c may be thicker in the radial direction X from the spring portion 18b side.
  • the holding member 18 is made of SUS420J2.
  • the material of the holding member 18 is not limited to the above, and may be a metal other than the above or an appropriate ceramic.
  • the holding member 18 may be integrally formed, or each part may be separately formed.
  • the rigidity of the material of the bottom portion 18c is higher than the rigidity of the material of the spring portion 18b, so that the spring portion 18b may be more easily deformed than the bottom portion 18c.
  • the holding member 18 is connected to a portion other than the vibration node of the vibrating portion. This is shown with reference to FIGS. 9 and 10 below.
  • simulation was performed using a two-dimensional axisymmetric model. In the simulation, the voltage applied to the piezoelectric element 3 was 20 V, and the frequency of vibration was set to about 60 kHz which is the resonance frequency of the vibration device 11.
  • FIG. 9 is a vibration displacement diagram of the vibrating section in the second embodiment.
  • FIG. 10 is a diagram showing the relationship between the axial position and the magnitude of displacement in the mass adding member of the vibrating unit according to the second embodiment.
  • FIG. 9 shows a portion corresponding to half of the cross section shown in FIG.
  • Each vibration displacement diagram other than FIG. 9 below may show a portion corresponding to half of the cross section along the axial direction of the vibration device.
  • Position B in FIGS. 9 and 10 indicates the axial position of the first opening end face of the mass addition member, and position C indicates the axial position of the second opening end face.
  • the position B is 0 mm and the position C is 4 mm.
  • the solid line in FIG. 10 indicates the magnitude of the displacement
  • the broken line indicates the magnitude of the radial component X in the displacement
  • the alternate long and short dash line indicates the axial component in the displacement.
  • the mass addition member 6 is displaced by 0.7 ⁇ m to 2 ⁇ m. This displacement is about 4% to 12% of the maximum value of the displacement of the translucent body cover 2. It can be seen that in the mass addition member 6, there is no vibration node having a displacement magnitude of 0.
  • the holding member 18 is connected to the position shown by the chain double-dashed line in FIG. More specifically, the holding member 18 is connected to a portion where the position of the mass adding member 6 in the axial direction is 1 mm or more and 1.5 mm or less. In this way, the holding member 18 is connected to a portion other than the vibration node of the mass adding member 6 in the vibrating portion. However, when the mass adding member 6 of the vibrating portion has a vibration node, the holding member 18 may be connected to the vibration node portion.
  • the vibrating section in the present embodiment is indirectly fixed to the outside or the like via the holding member 18.
  • the vibration device 11 has the mass addition member 6 connected to the translucent body cover 2 as in the first embodiment.
  • damping can be effectively suppressed when the vibrating portion is fixed to the outside or the like. Therefore, it is possible to more efficiently vibrate the translucent body cover 2 to which water drops and the like adhere.
  • the details will be described below.
  • the effect of suppressing damping in the vibration device according to the first modification of the second embodiment is also shown.
  • the vibrating device of the first modified example is configured similarly to the vibrating device 11 of the second embodiment except that the spring portion and the bottom portion of the holding member have the same thickness.
  • FIG. 11 is a vibration displacement diagram of the vibration device according to the second embodiment.
  • FIG. 12 is a vibration displacement diagram of the vibrating device according to the first modification of the second embodiment.
  • Position D in FIGS. 11 and 12 indicates the axial position of the connecting portion of the holding member, and position E indicates the axial position of the second opening end face. The same applies to drawings other than FIGS. 11 and 12.
  • the bottom portion 18c of the holding member 18 is not substantially displaced. As shown in FIG. 12, the displacement is also suppressed in the bottom portion 28c of the holding member 28A in the first modified example.
  • FIG. 13 is a diagram showing the relationship between the position in the axial direction and the magnitude of displacement in the holding members of the second embodiment and the first modification.
  • FIG. 14 is a diagram showing the relationship between the position in the axial direction and the magnitude of the radial component in the displacement in the holding members of the second embodiment and the first modified example.
  • FIG. 15 is a diagram showing the relationship between the position in the axial direction and the magnitude of the axial component in the displacement in the holding members of the second embodiment and the first modified example.
  • the position D is 0 mm and the position E is 8 mm.
  • a portion having a position of 5 mm or more in the axial direction corresponds to the bottom portion. 13 to 15, the solid line shows the result of the second embodiment, and the broken line shows the result of the first modification.
  • the displacement of the connecting portion 18a of the holding member 28A indicated by the position D is about 1.6 ⁇ m.
  • the displacement becomes smaller as it gets closer to the bottom portion 28c from the connection portion 18a.
  • the displacement is about 0.4 ⁇ m or less at the bottom portion 28c where the position in the axial direction Z is 5 mm or more.
  • the displacement at the bottom portion 28c can be reduced by about 75% as compared with the displacement at the connection portion 18a.
  • the radial component of the vibration is absorbed by the spring property of the spring portion 18b, and the vibrating component near the position of 6.5 mm in the axial direction X. It can be seen that is 0 ⁇ m.
  • the component of the displacement in the axial direction Z is about 0.3 ⁇ m.
  • the above-mentioned absorption of vibration by the spring portion 18b means that most of the vibration propagated from the mass adding member 6 via the connecting portion 18a can be the vibration in the spring portion 18b. Thereby, it is possible to make it difficult for the vibration to leak to the bottom portion 28c.
  • the displacement can be suppressed to 0.03 ⁇ m at the bottom portion 18c whose position in the axial direction Z is 5 mm or more.
  • the vibration propagated from the mass adding member 6 via the connecting portion 18a can be reduced by about 98%.
  • both the X-direction component and the Z-direction component of the displacement can be suppressed to 0.02 ⁇ m.
  • vibration can be absorbed by the elasticity of the spring portion 18b as in the first modification, and the bottom portion 18c itself is less likely to be deformed.
  • the holding member 18 of the vibration device 11 has a spring portion 18b having a small elastic constant and easily deformed, and a bottom portion 18c having a large elastic constant and hard to deform. Thereby, most of the strain energy applied to the holding member 18 from the side of the mass addition member 6 can be converted into elastic energy in the spring portion 18b, and the bottom portion 18c can be made difficult to displace as described above. ..
  • damping can be effectively suppressed by providing a difference in elastic constant between the spring portion 18b and the bottom portion 18c of the holding member 18.
  • E1 be the elastic energy of the spring portion 18b and E2 be the elastic energy of the bottom portion 18c when an external force is applied to the holding member 18.
  • the elastic energy ratio E1/E2 of the holding member 18 was set to 46.
  • the displacement of the bottom portion 18c is changed. It was measured.
  • FIG. 16 is a diagram showing the relationship between the elastic energy ratio and the displacement of the bottom of the holding member in the holding members of the second embodiment and the first modification. Note that the displacement ratio in FIG. 16 is a ratio based on the displacement in the first modified example in which the spring portion and the bottom portion are uniformly configured.
  • the black circle plot shows the result of the second embodiment, and the white plot shows the result of the first modification.
  • the elastic energy ratio E1/E2 is 2 or more.
  • the displacement ratio based on the first modification is less than 1, and the displacement at the bottom portion 18c can be further suppressed.
  • the elastic energy ratio E1/E2 is preferably 2 or more.
  • the elastic energy ratio E1/E2 is more preferably 6 or more.
  • the displacement ratio can be about 0.5 or less. Therefore, the displacement of the bottom portion 18c can be suppressed more effectively, and the occurrence of vibration damping can be suppressed even more effectively when the bottom portion 18c is fixed to the outside or the like.
  • FIG. 17 is a vibration displacement diagram when the vibration device according to the second embodiment is externally fixed at the bottom of the holding member.
  • the bottom of the holding member was fixed to a member made of PPS-FG40 (polyphenylene sulfide-glass 40%) having a machine Q of 10.
  • the member is shown as the outer side F.
  • the vibration state is almost the same when the vibration device 11 is not fixed to the external F and when it is fixed to the external F at the bottom portion 18c of the holding member 18. You can see that it does not change. More specifically, when the vibration device 11 is not fixed to the outside F, the displacement of the center of the translucent body cover 2 was 18.6 ⁇ m. As shown in FIG. 17, when the vibrating device 11 was fixed to the outside F at the bottom portion 18c, the center displacement of the translucent body cover 2 was 18.6 ⁇ m. As described above, in the second embodiment, since damping can be effectively suppressed, it is understood that the vibration of the translucent body cover 2 is less likely to be attenuated due to being fixed to the outside. Therefore, the translucent body cover 2 can be vibrated more efficiently.
  • second to seventh modified examples of the second embodiment will be shown in which only the configuration of the holding member is different from that of the second embodiment. Also in the second to seventh modifications, damping can be suppressed as in the second embodiment, and the translucent body cover 2 can be vibrated more efficiently.
  • 18 to 23 described below are axially symmetric two-dimensional cross-sectional views along the axial direction Z of the vibration device.
  • the holding member 28B is connected to the translucent body cover 2. More specifically, the cross section of the connecting portion 28a of the holding member 28B along the axial direction Z has a substantially U-shape.
  • the connection portion 28a has a first connection surface 28d and a second connection surface 28e that face each other.
  • the connection portion 28a is provided so as to sandwich the flange portion 2c of the translucent body cover 2 between the first connection surface 28d and the second connection surface 28e.
  • the first connection surface 28d is connected to the first surface 2d of the flange portion 2c.
  • the second connection surface 28e is connected to the bottom surface 2b of the translucent body cover 2.
  • the thickness of the bottom portion 18c of the holding member 28C increases from the spring portion 18b side toward the outside in the radial direction X.
  • the inner diameters of the spring portion 18b and the bottom portion 18c are the same, and the outer diameter of the bottom portion 18c is larger than the outer diameter of the spring portion 18b.
  • the connecting portion 18a of the holding member 28D is connected to the inner side surface 6d of the mass adding member 6.
  • the wall thickness of the bottom portion 18c increases from the spring portion 18b side toward the outside in the radial direction X, similarly to the third modification.
  • the cross section of the spring portion 28b of the holding member 28E along the axial direction Z has a meandering shape.
  • the spring property of the spring portion 28b can further absorb the vibration, and the vibration from the side of the mass addition member 6 is less likely to leak to the bottom portion 18c.
  • the holding member 28F extends in the radial direction X.
  • the connecting portion 18a is located on the innermost side in the radial direction X of the holding member 28F, and the bottom portion 18c is located on the outermost side in the radial direction X.
  • the spring portion 28b is located between the connecting portion 18a and the bottom portion 18c.
  • the shape of the cross section of the spring portion 28b along the axial direction Z is a meandering shape, as in the fifth modification.
  • the holding member 28F is located inside the mass addition member 6 in the axial direction Z. As a result, the size of the vibration device along the axial direction Z can be reduced.
  • the material of the connecting portion 18a and the spring portion 18b of the holding member 28G and the material of the bottom portion 18c are different. More specifically, the spring constant of the material of the bottom portion 18c is higher than the spring constant of the material of the spring portion 18b.
  • FIG. 24 is a perspective view of an imaging device according to the third embodiment.
  • FIG. 25 is a front sectional view of the imaging device according to the third embodiment.
  • the imaging device 30 as an optical detection device includes a vibrating device 31 and an image pickup element 30A arranged in the internal space of the vibrating device 31.
  • the vibrating device 31 according to the present embodiment differs from the vibrating device 11 according to the second embodiment in that the vibrating device 31 includes the case member 32. Except for the points described above, the vibration device 31 of the present embodiment has the same configuration as the vibration device 11 of the second embodiment.
  • the case member 32 includes a first case part 33 having a substantially cylindrical shape, a second case part 34 having a substantially rectangular tube shape connected to the first case part 33, and a second case part 34. And a plate-shaped third case portion 35 connected to the case portion 34.
  • An external connection member 36 is connected to the third case portion 35 of the case member 32.
  • the second case portion 34 is located near the portion connected to the first case portion 33 and extends inward in the direction X orthogonal to the axial direction Z. Have.
  • the bottom portion 18c of the holding member 18 of the vibration device 31 is fixed to the fixing portion 34a.
  • the case member 32 indirectly holds the vibrating portion including the translucent body cover 2, the piezoelectric element 3, and the mass addition member 6 via the holding member 18.
  • the case member 32 may directly hold the vibrating portion.
  • the first case portion 33 has a top plate portion 33a including an opening 33c.
  • the top plate portion 33a is arranged so as to face the flange portion 2c of the translucent body cover 2.
  • the top plate portion 33a and the flange portion 2c overlap each other.
  • the top plate portion 33a and the flange portion 2c are not in contact with each other.
  • the vibration of the translucent body cover 2 is unlikely to be disturbed.
  • a part of the dome-shaped portion of the translucent body cover 2 projects outward from the opening 33c of the first case portion 33.
  • the third case portion 35 is arranged so as to seal the opening of the second case portion 34.
  • the case member 32 is made of resin.
  • the configuration and material of the case member 32 are not limited to the above, and may be any as long as they can form an internal space together with other portions of the vibrating device 31 and can arrange the image pickup device 30A in the internal space.
  • the first circuit board 37a and the second circuit board 37b facing each other are arranged in the internal space of the case member 32.
  • the first circuit board 37a and the second circuit board 37b are connected by a connection wiring 37c.
  • the first circuit board 37a is connected to the image sensor 30A.
  • the first circuit board 37a or the second circuit board 37b includes a circuit that drives the imaging element 30A.
  • the first circuit board 37a or the second circuit board 37b may include a control circuit 7 that drives the piezoelectric element 3 in a resonance state.
  • the wiring 38 extends from the external connection member 36 into the internal space of the case member 32.
  • the wiring 38 penetrates through the third case portion 35 and the second circuit board 37b.
  • the wiring 38 is electrically connected to the second circuit board 37b.
  • the image pickup device 30A, the first circuit board 37a, and the second circuit board 37b are electrically connected to the outside.
  • the image pickup device 30A can be, for example, a CMOS, a CCD, a bolometer, a thermopile, or the like that receives light of any wavelength in the visible region to the far infrared region.
  • Examples of the imaging device 30 include a camera, a Radar device, a LIDAR device, and the like.
  • an optical detection element that optically detects energy rays other than the image pickup element 30A may be arranged in the internal space of the vibration device 31.
  • the energy rays to be detected may be active energy rays such as electromagnetic waves and infrared rays.
  • the detection region of the optical detection element is included in the translucent body cover 2.
  • the light-transmitting body cover 2 includes the field of view of the image sensor 30A as a detection region.
  • the vibration device 31 of the present embodiment has the same vibrating section and holding member 18 as in the second embodiment. Further, as in the case shown in FIG. 17, the bottom portion 18c of the holding member 18 is fixed to the fixing portion 34a of the case member 32, and vibration damping is unlikely to occur. Since the imaging device 30 includes the vibrating device 31, it is possible to efficiently vibrate the translucent body cover 2 to which water droplets and the like adhere.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

L'invention concerne un dispositif de vibration qui peut faire vibrer efficacement un couvercle sur lequel sont déposées des gouttelettes d'eau, etc.　Un dispositif de vibration 1 selon la présente invention comprend : un couvercle de corps de transmission de lumière 2; un élément d'additif de masse 6 qui est directement ou indirectement lié au couvercle de corps de transmission de lumière 2, et est disposé de façon à former un espace interne conjointement avec le couvercle de corps transmettant la lumière 2; et un élément piézoélectrique 3 qui fait vibrer le couvercle de corps transmettant la lumière 2.
PCT/JP2019/045250 2018-12-28 2019-11-19 Dispositif de vibration et dispositif de détection optique WO2020137262A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-246749 2018-12-28
JP2018246749 2018-12-28

Publications (1)

Publication Number Publication Date
WO2020137262A1 true WO2020137262A1 (fr) 2020-07-02

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012140967A1 (fr) * 2011-04-11 2012-10-18 株式会社村田製作所 Structure support d'actionneur et dispositif de pompe
WO2017110563A1 (fr) * 2015-12-24 2017-06-29 株式会社村田製作所 Dispositif de vibration, procédé pour piloter ce dernier et caméra
WO2017149933A1 (fr) * 2016-03-03 2017-09-08 株式会社村田製作所 Dispositif vibrant, procédé d'entraînement de celui-ci et caméra

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012140967A1 (fr) * 2011-04-11 2012-10-18 株式会社村田製作所 Structure support d'actionneur et dispositif de pompe
WO2017110563A1 (fr) * 2015-12-24 2017-06-29 株式会社村田製作所 Dispositif de vibration, procédé pour piloter ce dernier et caméra
WO2017149933A1 (fr) * 2016-03-03 2017-09-08 株式会社村田製作所 Dispositif vibrant, procédé d'entraînement de celui-ci et caméra

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