WO2020135860A1 - Procédé d'optimisation de guide d'ondes et réticule de guide d'ondes cruciforme - Google Patents

Procédé d'optimisation de guide d'ondes et réticule de guide d'ondes cruciforme Download PDF

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Publication number
WO2020135860A1
WO2020135860A1 PCT/CN2019/129825 CN2019129825W WO2020135860A1 WO 2020135860 A1 WO2020135860 A1 WO 2020135860A1 CN 2019129825 W CN2019129825 W CN 2019129825W WO 2020135860 A1 WO2020135860 A1 WO 2020135860A1
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waveguide
quasi
section
cone section
adiabatic
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PCT/CN2019/129825
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English (en)
Chinese (zh)
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吴文扬
李蒙
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中兴光电子技术有限公司
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12145—Switch

Definitions

  • the invention relates to the field of optoelectronic technology, in particular to a method for optimizing waveguides and cross waveguide crossovers.
  • Silicon-based photonic integrated chips are widely used, such as optical network switches.
  • the optical network switch can complete the function of switching the optical signal without switching to the digital field, and has great application prospects, such as all-optical networks, data centers, and optical interconnections.
  • Silicon photonic switches are composed of optical waveguides of different lengths, multiple optical switch units, and multiple waveguide cross structures. The waveguide cross-over structure with lower insertion loss and lower crosstalk is essential.
  • Commonly used waveguide cross structures include multi-layer waveguide cross structures and single-layer waveguide cross structures.
  • the multi-layer waveguide cross structure has extremely low crosstalk and insertion loss, but the preparation process is complicated.
  • the single-layer waveguide cross structure is composed of a waveguide cross (Crossing) and a waveguide taper (Taper).
  • the cross structure waveguide is often wider than the single-mode waveguide to reduce insertion loss.
  • the waveguide crossing optimized according to the principle of Multimode Interference has the characteristics of low insertion loss and small size, but the process tolerance is also small and has a certain wavelength dependence; in order to reduce the waveguide For the insertion loss of the cross, a wide-width waveguide cross region can be used.
  • a wide-width waveguide cross region can be used.
  • a very long linear or exponential waveguide tapered taper is generally used. Small insertion loss and large process tolerance are achieved, but the size is large.
  • Embodiments of the present invention provide a method for optimizing a waveguide and a cross-waveguide crossover. Compared with related technologies, the waveguide size and insertion loss can be reduced.
  • An embodiment of the present invention provides a method for optimizing a waveguide, including:
  • the transmission matrix T of the quasi-adiabatic waveguide segment of the target length is determined according to the transmission matrix of each straight waveguide and the coupling transmission matrix between two adjacent straight waveguides;
  • the shape of the quasi-insulated waveguide cone section is determined according to the shape model and the optimized parameters.
  • An embodiment of the present invention provides a cross waveguide cross-connect, including:
  • the first waveguide includes a first input quasi-insulated waveguide cone section, a first cross-region waveguide section and a first output quasi-insulated waveguide cone section, and the first input quasi-insulated waveguide cone section includes a narrow mouth and a wide mouth and passes The wide opening is connected to the first end of the first cross-sectional waveguide section, and the first output quasi-insulated waveguide cone section includes a narrow port and a wide opening and passes through the wide opening to the first cross-sectional waveguide The second end of the segment is connected;
  • the second waveguide includes a second input quasi-insulated waveguide cone section, a second cross-region waveguide section and a second output quasi-insulated waveguide cone section, and the second input quasi-insulated waveguide cone section includes a narrow mouth and a wide mouth and passes The wide opening is connected to the third end of the second cross-sectional waveguide section, and the second output quasi-insulated waveguide cone section includes a narrow opening and a wide opening and passes through the wide opening to the second cross-sectional waveguide The fourth end of the segment is connected;
  • the shapes of the first input quasi-adiabatic waveguide cone section, the first output quasi-adiabatic waveguide cone section, the second input quasi-adiabatic waveguide cone section and the second output quasi-adiabatic waveguide cone section are all determined by the method of optimizing the waveguide described above.
  • FIG. 1 is a flowchart of a method for optimizing a waveguide according to Embodiment 1 of the present invention
  • Figure 2-a is a schematic diagram of a decomposition of a quasi-insulated waveguide cone section in an embodiment of the present invention
  • Figure 2-b is a schematic diagram of another decomposition of the quasi-insulated waveguide cone section in the embodiment of the present invention.
  • FIG. 3 is a schematic diagram of a cross waveguide crossover according to Embodiment 2 of the present invention.
  • FIG. 4 is a diagram of the relationship between the width of the cross region of the waveguide and the insertion loss in an embodiment of the present invention
  • Figure 5-a is a schematic diagram of a ridge waveguide in Example 1 of the present invention.
  • Fig. 5-b is a schematic diagram of the simulation of the relationship between the parameters of the width and length of the optimized quasi-insulated waveguide taper (Taper) in Example 1 of the present invention
  • 5-c is a schematic diagram of the simulation of the fundamental mode insertion loss of the optimized quasi-insulated waveguide cone section in Example 1 of the present invention.
  • Fig. 5-d is a schematic diagram of the fundamental mode insertion loss simulation of the cross-waveguide crossover (WC 1) based on the optimized quasi-insulated waveguide cone section in Example 1 of the present invention
  • 6-a is a schematic diagram of the simulation of the relationship between the parameters of the width and length of the optimized quasi-insulated waveguide taper (Taper) in Example 2 of the present invention
  • 6-b is a schematic diagram of the simulation of the fundamental mode insertion loss of the optimized quasi-insulated waveguide cone section in Example 2 of the present invention.
  • 6-c is a schematic diagram of the simulation of the fundamental mode insertion loss of the cross waveguide crossover (WC 1) based on the optimized quasi-insulated waveguide cone section in Example 2 of the present invention;
  • FIG. 7-a is a schematic diagram of the simulation of the relationship between the parameters of the width and length of the optimized quasi-insulated waveguide taper (Taper) in Example 3 of the present invention
  • 7-b is a schematic diagram of simulation of the fundamental mode insertion loss of the optimized quasi-insulated waveguide cone section in Example 3 of the present invention.
  • 7-c is a schematic diagram of a simulation of the fundamental mode insertion loss of a cross-waveguide crossover (WC 1) based on an optimized quasi-insulated waveguide cone section in Example 3 of the present invention
  • FIG. 8-a is a schematic diagram of simulation of the relationship between parameters of the width and length of the optimized quasi-insulated waveguide taper (Taper) in Example 4 of the present invention.
  • 8-b is a schematic diagram of the simulation of the fundamental mode insertion loss of the optimized quasi-insulated waveguide cone section in Example 4 of the present invention.
  • 8-c is a schematic diagram of the simulation of the fundamental mode insertion loss of the cross waveguide crossover (WC 1) based on the optimized quasi-insulated waveguide cone section in Example 4 of the present invention.
  • Quasi-adiabatic waveguide refers to a waveguide whose structure changes slowly and the propagation mode does not undergo useless mode conversion.
  • quasi-adiabatic waveguides often use very long tapers to meet quasi-adiabatic conditions.
  • the application realizes the rapid insulation effect of the quasi-insulated waveguide, and the mode conversion characteristics are used to change the shape of the cone section, so that the useless mode conversion in mode propagation is reduced, so that the quasi-insulation condition is satisfied on the shorter length of the cone section.
  • This application uses the transmission matrix method to quickly complete the optimization of the shape of the quasi-adiabatic waveguide cone section with multiple modes, to maximize the retention of TE0 fundamental mode component propagation, and to reduce insertion loss.
  • an embodiment of the present invention provides a method for optimizing a waveguide, including:
  • step S110 the tapered section of the quasi-adiabatic waveguide with gradually varying width is decomposed into N sections of straight waveguides, and the shape model of each section of straight waveguide is set;
  • Step S120 Determine the transmission matrix T of the quasi-adiabatic waveguide cone segment of the target length according to the transmission matrix of each straight waveguide and the coupling transmission matrix between two adjacent straight waveguides;
  • Step S130 Optimize the parameters of the shape model of the quasi-insulated waveguide cone section according to the insertion loss index of the quasi-insulated waveguide cone section;
  • Step S140 Determine the shape of the quasi-insulated waveguide cone section according to the shape model and the optimized parameters.
  • the shape model includes the following first model or second model:
  • the first model is the first model
  • a 1 ⁇ A 9 are the parameters of the first model
  • a 1 ⁇ A 15 are the parameters of the second model
  • the width of the first straight waveguide is equal to the width of the first port of the tapered section of the quasi-insulated waveguide.
  • the width of the last straight waveguide is equal to the width of the second port of the tapered section of the quasi-insulated waveguide.
  • the determining the transmission matrix T of the quasi-adiabatic waveguide segment of the target length according to the transmission matrix of each straight waveguide and the coupling transmission matrix between two adjacent straight waveguides includes:
  • the quasi-adiabatic tapered section of the target length includes continuous m-section straight waveguides, determine the transmission matrix of the m-section straight waveguide and the coupling transmission matrix between two adjacent sections of straight waveguides;
  • the transmission matrix T of the quasi-adiabatic waveguide cone of the target length is determined in the following way:
  • P i is the transmission matrix of the i-th straight waveguide
  • T i is the coupling transmission matrix between the i-th straight waveguide and the adjacent i+1-th straight waveguide
  • ⁇ is the multiplication symbol.
  • P i and T i are both n*n-dimensional matrices, n is the order of modes existing in the waveguide, and the larger the n, the more accurate the calculation of the transmission matrix.
  • the spatial distribution of the electric field magnetic field of each order mode can be obtained.
  • the modulus square of each element value of the T i matrix is obtained, according to the coupled mode theory to give each matrix element values T i.
  • the non-diagonal elements are zero, and the diagonal elements are respectively k m is the propagation constant of the m-th mode field in the waveguide, and L i is the length of the i-th waveguide.
  • the insertion loss index of the quasi-insulated waveguide cone segment includes:
  • the fundamental matrix insertion loss of the transmission matrix T of the overall quasi-adiabatic waveguide cone section is the smallest; where the overall quasi-adiabatic waveguide cone section includes all straight waveguides.
  • the insertion loss index of the quasi-insulated waveguide cone segment includes:
  • the fundamental matrix insertion loss of the transmission matrix of all quasi-adiabatic waveguides in the local cone section is less than the insertion loss threshold, and the fundamental mode insertion loss of the transmission matrix of the overall quasi-adiabatic waveguide cone section is the smallest;
  • the j-th quasi-adiabatic waveguide partial cone segment refers to: a continuous j-segment straight waveguide from the first-segment straight waveguide to the end of the m- th j-th straight waveguide.
  • the embodiment of the present invention uses the transmission matrix method to calculate the conversion between the modes in the tapered section (Taper). Practical research shows that this conversion is bidirectional, and the magnitude of higher-order mode components changes with the oscillation of the propagation direction, and the amplitude of the oscillation is affected by the shape of the taper. Therefore, by optimizing the shape of the cone segment, the fundamental mode component at the output end is maximized; at the same time, in order to achieve a high tolerance, the shape of the cone segment with a small amplitude variation of the mode component can be selected.
  • an embodiment of the present invention provides a cross waveguide cross-connector, including: a first waveguide 1 and a second waveguide 2 having the same structure, the first waveguide 1 and the second waveguide 2 perpendicularly cross at the center;
  • the first waveguide 1 includes a first input quasi-insulated waveguide cone section 11, a first cross-region waveguide section 12 and a first output quasi-insulated waveguide cone section 13, the first input quasi-insulated waveguide cone section includes a narrow mouth and A wide mouth is connected to the first end of the first cross-sectional waveguide segment through the wide mouth.
  • the first output quasi-insulated waveguide cone section includes a narrow mouth and a wide mouth and passes through the wide mouth and the first The second end of a cross-section waveguide segment is connected;
  • the second waveguide 2 includes a second input quasi-adiabatic waveguide cone section 21, a second crossing region waveguide section 22 and a second output quasi-adiabatic waveguide cone section 23, and the second input quasi-adiabatic waveguide cone section includes a narrow mouth and A wide mouth is connected to the third end of the waveguide section of the second intersection region through the wide mouth, and the second output quasi-insulated waveguide cone section includes a narrow mouth and a wide mouth and passes through the wide mouth and the first The fourth end of the waveguide section in the two-cross region is connected
  • the shapes of the first input quasi-adiabatic waveguide cone section, the first output quasi-adiabatic waveguide cone section, the second input quasi-adiabatic waveguide cone section and the second output quasi-adiabatic waveguide cone section are all determined by the method of optimizing the waveguide described above;
  • the insertion loss of the cross waveguide crossover comes from the tapered section (Taper) and the cross section of the waveguide (Crossing).
  • Fig. 4 shows the relationship between the width of the cross region of the waveguide and the insertion loss of the fundamental mode of the region, where the horizontal axis (x) is the width of the cross region, the unit is micrometer (um), and the vertical axis (TE0IL) is The insertion loss of the fundamental mode in the cross region is in dB.
  • the wider the waveguide cross region is, the smaller the fundamental mode propagation loss is, and the change is more and more gentle.
  • the insertion loss of the waveguide cross region is ⁇ 0.1dB.
  • Using a wider waveguide cross region can reduce the insertion loss of the waveguide cross, but a wider waveguide cross requires a longer waveguide cone section.
  • the insertion loss of the fundamental mode of the taper mainly comes from the non-adiabatic propagation of the mode between the input and output single-mode waveguide and the wide waveguide in the cross section of the waveguide, so that the conversion of the fundamental mode to the higher-order mode occurs.
  • the embodiment of the present invention adopts a fast insulating waveguide cone section, thereby greatly reducing the mode conversion loss in the tape section (Taper) and shortening the length of the cone section.
  • the first input quasi-insulated waveguide cone section, the first output quasi-insulated waveguide cone section, the second input quasi-insulated waveguide cone section, and the second output quasi-insulated waveguide cone section have a wide mouth greater than or equal to 4 microns.
  • the cross waveguide crossover has rotational symmetry: the cross waveguide crossover is rotated 90 degrees in a plane composed of the propagation direction of the first waveguide and the propagation direction of the second waveguide Coincides with before rotation.
  • the optical field of the intersection area is not constrained in a direction perpendicular to the propagation direction of the optical path.
  • both the first waveguide and the second waveguide are: a ridge waveguide; or the first waveguide and the second waveguide are: a strip waveguide.
  • the cross waveguide interleavers provided in Examples 1 to 4 below include a first waveguide and a second waveguide having the same structure, and the first waveguide and the second waveguide intersect perpendicularly at the center.
  • the first waveguide includes a first input quasi-adiabatic waveguide cone segment, a first cross-region waveguide segment and a first output quasi-adiabatic waveguide cone segment
  • a second waveguide includes a second input quasi-adiabatic waveguide cone segment, and a second cross-region waveguide segment
  • the second output quasi-insulated waveguide cone section the first input quasi-insulated waveguide cone section gradually changes from the first width to the second width, and the width of the waveguide section in the first intersection region is the second width
  • the first The output quasi-insulated waveguide tapered section gradually changes from the second width to the first width
  • the second input quasi-insulated waveguide tapered section gradually changes from the first width to the second width
  • the width of the second cross-sectional waveguide section is the second Width, the second output quasi-insulated waveguide
  • the width of the intersection region is 6 microns
  • the lengths of the first input quasi-insulated waveguide cone section, the first output quasi-insulated waveguide cone section, the second input quasi-insulated waveguide cone section, and the second output quasi-insulated waveguide cone section are all It is 100 microns
  • the narrow mouth of each quasi-insulated waveguide cone is 0.5 microns wide and 6 microns wide.
  • both the first waveguide and the second waveguide are symmetrical shallow etched silicon waveguides.
  • 131 is the ridge waveguide area
  • 132 is the shallow etched waveguide area
  • the two sides of the shallow etched area are symmetrical
  • the total width is 8um wider than the ridge waveguide, 4um on each side
  • the difference between the height of the ridge waveguide and the shallow etched area is the etched depth
  • the etching depth is 70 nm
  • the waveguide height is 220 nm
  • the input and output waveguide width is 0.5 ⁇ m
  • the cross section of the waveguide is 6 ⁇ m wide
  • the upper and lower claddings are silicon oxide.
  • the shape model of each quasi-adiabatic waveguide cone section in this example uses the function of the first model:
  • the insertion loss index of the transmission matrix is used to optimize the shape model parameters of the adiabatic waveguide cone.
  • the cone section of the quasi-adiabatic waveguide is decomposed into a combination of multiple straight waveguides, the width difference between two adjacent straight waveguides is 0.05um, and the transmission matrix T of the entire quasi-adiabatic waveguide cone section is determined according to the transmission matrix of each straight waveguide;
  • the j-th quasi-adiabatic waveguide partial cone segment refers to: a continuous j-segment straight waveguide from the first-segment straight waveguide to the end of the m- th j-th straight waveguide.
  • the width of the intersection area is 8 microns
  • the lengths of the first input quasi-insulated waveguide cone section, the first output quasi-insulated waveguide cone section, the second input quasi-insulated waveguide cone section, and the second output quasi-insulated waveguide cone section are all It is 100 microns
  • the narrow mouth of each quasi-insulated waveguide cone has a width of 0.5 microns and a wide mouth of 8 microns.
  • Both the first waveguide and the second waveguide are symmetrical shallow etched silicon waveguides with an etch depth of 70 nm, a waveguide height of 220 nm, a width of 0.5 ⁇ m for input and output waveguides, a width of 6 ⁇ m for the cross section of the waveguide, and a total width of the shallow etched waveguide area greater than that of the ridge waveguide 8um wide, the upper and lower cladding is silicon oxide.
  • the shape model of each quasi-insulated waveguide cone section in this example uses the function of the second model:
  • the insertion loss index of the transmission matrix is used to optimize the shape model parameters of the adiabatic waveguide cone.
  • the cone section of the quasi-adiabatic waveguide is decomposed into a combination of multiple straight waveguides, the width difference between two adjacent straight waveguides is 0.05um, and the transmission matrix T of the entire quasi-adiabatic waveguide cone section is determined according to the transmission matrix of each straight waveguide;
  • the j-th quasi-adiabatic waveguide partial cone segment refers to: a continuous j-segment straight waveguide from the first-segment straight waveguide to the end of the m- th j-th straight waveguide.
  • the width of the intersection region is 6 microns
  • the lengths of the first input quasi-insulated waveguide cone section, the first output quasi-insulated waveguide cone section, the second input quasi-insulated waveguide cone section, and the second output quasi-insulated waveguide cone section are all It is 150 microns
  • the narrow mouth of each quasi-insulated waveguide cone is 0.5 microns wide and 6 microns wide.
  • Both the first waveguide and the second waveguide are symmetrical shallow etched silicon waveguides with an etch depth of 70 nm, a waveguide height of 220 nm, a width of 0.5 ⁇ m for input and output waveguides, a width of 6 ⁇ m for the cross section of the waveguide, and a total width of the shallow etched waveguide area greater than that of the ridge waveguide 8um wide, the upper and lower cladding is silicon oxide.
  • the shape model of each quasi-insulated waveguide cone section in this example uses the function of the second model:
  • the insertion loss index of the transmission matrix is used to optimize the shape model parameters of the adiabatic waveguide cone.
  • the cone section of the quasi-adiabatic waveguide is decomposed into a combination of multiple straight waveguides, the width difference between two adjacent straight waveguides is 0.05um, and the transmission matrix T of the entire quasi-adiabatic waveguide cone section is determined according to the transmission matrix of each straight waveguide;
  • the j-th quasi-adiabatic waveguide partial cone segment refers to: a continuous j-segment straight waveguide from the first-segment straight waveguide to the end of the m- th j-th straight waveguide.
  • Fig. 7-c after optimizing the shape of the quasi-adiabatic waveguide taper (Taper), the simulation results of the fundamental mode insertion loss of the cross waveguide crossover (WC3) based on the optimized quasi-adiabatic waveguide taper are shown in the figure, where, The horizontal axis is Wavelength, the unit is micrometer (um), and the vertical axis is the insertion loss (Insertion) of the fundamental mode of the cross waveguide crossover (WC 3).
  • the insertion loss of the fundamental mode of the cross-waveguide cross-over device (WC3) based on the optimized quasi-adiabatic tapered section is ⁇ 0.06dB.
  • the width of the intersection area is 8 microns
  • the lengths of the first input quasi-insulated waveguide cone section, the first output quasi-insulated waveguide cone section, the second input quasi-insulated waveguide cone section, and the second output quasi-insulated waveguide cone section are all It is 150 microns
  • the narrow mouth of each quasi-insulated waveguide cone is 0.5 microns wide and 8 microns wide.
  • Both the first waveguide and the second waveguide are symmetrical shallow etched silicon waveguides with an etch depth of 70 nm, a waveguide height of 220 nm, a width of 0.5 ⁇ m for input and output waveguides, a width of 8 ⁇ m for the cross section of the waveguide, and a difference in width between adjacent two straight waveguides of 0.05 um, the upper and lower cladding is silicon oxide.
  • the shape model of each quasi-insulated waveguide cone section in this example uses the function of the second model:
  • the insertion loss index of the transmission matrix is used to optimize the shape model parameters of the adiabatic waveguide cone.
  • the quasi-adiabatic waveguide cone segment is decomposed into a combination of multi-section straight waveguides, the width difference between two adjacent straight waveguides is 0.05um, and the transmission matrix T of the entire quasi-adiabatic waveguide cone section is determined according to the transmission matrix of each straight waveguide;
  • the j-th quasi-adiabatic waveguide partial cone segment refers to: a continuous j-segment straight waveguide from the first-segment straight waveguide to the end of the m- th j-th straight waveguide.
  • Fig. 8-c after optimizing the shape of the quasi-adiabatic waveguide taper (Taper), the simulation results of the fundamental mode insertion loss of the cross waveguide crossover (WC 4) based on the optimized quasi-adiabatic waveguide taper are shown in the figure, where, The horizontal axis is Wavelength, the unit is micrometer (um), and the vertical axis is the insertion loss (Insertion) of the fundamental mode of the cross waveguide crossover (WC 4). Based on the optimized quasi-adiabatic waveguide cone section of the WC 4 (WC), the fundamental mode insertion loss is ⁇ 0.047dB.
  • an embodiment of the present invention provides a method for optimizing a waveguide and a cross waveguide crossover, which decomposes a tapered section of a quasi-adiabatic waveguide with a gradually varying width into an N-section straight waveguide, and sets the shape model of each section of the straight waveguide, according to
  • the transmission matrix of each straight waveguide and the coupling transmission matrix between two adjacent straight waveguides determine the transmission matrix T of the quasi-adiabatic waveguide cone segment of the target length, and optimize the quasi-adiabatic waveguide cone according to the insertion loss index of the quasi-adiabatic waveguide cone segment
  • the parameters of the shape model of the segment determine the shape of the cone section of the quasi-insulated waveguide according to the shape model and the optimized parameters.
  • the waveguide size and insertion loss can be reduced.
  • the insertion loss of the optimized shape of the quasi-insulated waveguide cone section is significantly reduced; for the wide opening size of the quasi-insulated waveguide cone section, the length of the optimized shape of the quasi-insulated waveguide cone section is significantly reduced.
  • Such software may be distributed on computer-readable media, which may include computer storage media (or non-transitory media) and communication media (or transitory media).
  • computer storage medium includes both volatile and nonvolatile implemented in any method or technology for storing information such as computer readable instructions, data structures, program modules, or other data Sex, removable and non-removable media.
  • Computer storage media include but are not limited to RAM, ROM, EEPROM, flash memory or other memory technologies, CD-ROM, digital versatile disk (DVD) or other optical disk storage, magnetic cartridges, magnetic tape, magnetic disk storage or other magnetic storage devices, or may Any other medium used to store desired information and accessible by a computer.
  • the communication medium generally contains computer readable instructions, data structures, program modules, or other data in a modulated data signal such as a carrier wave or other transmission mechanism, and may include any information delivery medium .

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Abstract

La présente invention concerne un procédé d'optimisation d'un guide d'ondes et un réticule de guide d'ondes cruciforme. Le procédé d'optimisation d'un guide d'ondes comprend les étapes consistant à : diviser un cône de guide d'ondes quasi-adiabatique ayant une largeur changeant progressivement en N guides d'ondes droits et régler un modèle de forme pour chaque guide d'ondes droit (S110), le modèle de forme du ième guide d'ondes droit étant Li=f(Wi), 1≤i≤N, Li étant la longueur du ième guide d'ondes droit dans une direction de propagation de guide d'ondes, Wi étant la largeur de la section transversale du ième guide d'ondes droit, et la section transversale étant perpendiculaire à la direction de propagation de guide d'ondes ; déterminer, selon une matrice de transmission de chaque guide d'ondes droit et une matrice de transmission de couplage entre deux guides d'ondes rectilignes adjacents, une matrice de transmission T du cône de guide d'ondes quasi-adiabatique ayant une longueur cible (S120) ; optimiser, en fonction d'un indice de perte d'insertion du cône de guide d'ondes quasi-adiabatique, un paramètre du modèle de forme du cône de guide d'ondes quasi-adiabatique (S130) ; et déterminer la forme du cône de guide d'ondes quasi-adiabatique selon le modèle de forme et le paramètre optimisé (S140).
PCT/CN2019/129825 2018-12-29 2019-12-30 Procédé d'optimisation de guide d'ondes et réticule de guide d'ondes cruciforme WO2020135860A1 (fr)

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CN112987289B (zh) * 2021-02-05 2022-09-20 中国科学院微电子研究所 一种波导结构的参数优化方法
CN115308839B (zh) * 2022-08-10 2023-07-21 吉林大学 一种基于二氧化硅/聚合物嵌入波导平台的多端口波导交叉器件及其制备方法

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