WO2020110326A1 - Ni-based alloy softened powder, and method for producing said softened powder - Google Patents

Ni-based alloy softened powder, and method for producing said softened powder Download PDF

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WO2020110326A1
WO2020110326A1 PCT/JP2019/003833 JP2019003833W WO2020110326A1 WO 2020110326 A1 WO2020110326 A1 WO 2020110326A1 JP 2019003833 W JP2019003833 W JP 2019003833W WO 2020110326 A1 WO2020110326 A1 WO 2020110326A1
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phase
powder
less
based alloy
mass
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PCT/JP2019/003833
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French (fr)
Japanese (ja)
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敦夫 太田
今野 晋也
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三菱日立パワーシステムズ株式会社
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Priority to CN201980003092.XA priority Critical patent/CN111629852B/en
Priority to US16/623,897 priority patent/US20210340644A1/en
Priority to SG11202012579YA priority patent/SG11202012579YA/en
Priority to KR1020217002557A priority patent/KR102443966B1/en
Priority to EP19817113.4A priority patent/EP3685942A4/en
Priority to JP2020509554A priority patent/JP6826235B2/en
Publication of WO2020110326A1 publication Critical patent/WO2020110326A1/en

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    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C1/00Making non-ferrous alloys
    • C22C1/04Making non-ferrous alloys by powder metallurgy
    • C22C1/0433Nickel- or cobalt-based alloys
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C19/00Alloys based on nickel or cobalt
    • C22C19/03Alloys based on nickel or cobalt based on nickel
    • C22C19/05Alloys based on nickel or cobalt based on nickel with chromium
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/05Metallic powder characterised by the size or surface area of the particles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/14Treatment of metallic powder
    • B22F1/142Thermal or thermo-mechanical treatment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F5/00Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
    • B22F5/04Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product of turbine blades
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/16Making metallic powder or suspensions thereof using chemical processes
    • B22F9/18Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds
    • B22F9/20Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds starting from solid metal compounds
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C1/00Making non-ferrous alloys
    • C22C1/04Making non-ferrous alloys by powder metallurgy
    • C22C1/047Making non-ferrous alloys by powder metallurgy comprising intermetallic compounds
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C19/00Alloys based on nickel or cobalt
    • C22C19/03Alloys based on nickel or cobalt based on nickel
    • C22C19/05Alloys based on nickel or cobalt based on nickel with chromium
    • C22C19/051Alloys based on nickel or cobalt based on nickel with chromium and Mo or W
    • C22C19/055Alloys based on nickel or cobalt based on nickel with chromium and Mo or W with the maximum Cr content being at least 20% but less than 30%
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C19/00Alloys based on nickel or cobalt
    • C22C19/03Alloys based on nickel or cobalt based on nickel
    • C22C19/05Alloys based on nickel or cobalt based on nickel with chromium
    • C22C19/051Alloys based on nickel or cobalt based on nickel with chromium and Mo or W
    • C22C19/056Alloys based on nickel or cobalt based on nickel with chromium and Mo or W with the maximum Cr content being at least 10% but less than 20%
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C19/00Alloys based on nickel or cobalt
    • C22C19/03Alloys based on nickel or cobalt based on nickel
    • C22C19/05Alloys based on nickel or cobalt based on nickel with chromium
    • C22C19/051Alloys based on nickel or cobalt based on nickel with chromium and Mo or W
    • C22C19/057Alloys based on nickel or cobalt based on nickel with chromium and Mo or W with the maximum Cr content being less 10%
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/10Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of nickel or cobalt or alloys based thereon
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00Supplementary information concerning processes or compositions relating to powder metallurgy
    • B22F2998/10Processes characterised by the sequence of their steps
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00Aspects linked to processes or compositions used in powder metallurgy
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/02Making metallic powder or suspensions thereof using physical processes
    • B22F9/06Making metallic powder or suspensions thereof using physical processes starting from liquid material
    • B22F9/08Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
    • B22F9/10Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying using centrifugal force

Definitions

  • the present invention relates to a technology of a Ni (nickel) base alloy material, and more particularly to a Ni base alloy softening powder which is made of a strong precipitation strengthening Ni base alloy material and is suitable for powder metallurgy technology and a method for producing the softening powder. ..
  • Precipitation-strengthened Ni-based alloy materials are widely used as materials for turbine high-temperature members in order to satisfy various required mechanical properties.
  • strong precipitation strengthened Ni with a high ratio of ⁇ '(gamma prime) phase eg, Ni 3 (Al,Ti) phase
  • a base alloy material for example, a Ni base alloy material that precipitates 30% by volume or more of the ⁇ 'phase is used.
  • precision casting methods have been conventionally used for members such as turbine blades and turbine stationary blades from the viewpoint of creep characteristics.
  • hot forging methods have often been used for turbine disks and combustor members from the viewpoint of tensile properties and fatigue properties.
  • Patent Document 1 Japanese Patent Laid-Open No. 9-302450 discloses a method for producing a Ni-based superalloy article having a controlled grain size from a forging preform, which comprises mixing a ⁇ phase and a ⁇ ′ phase.
  • the superalloy preform was hot die forged at a strain rate of about 0.03 to about 10 per second, and the resulting hot die forging superalloy workpiece was isothermally forged.
  • a supersolvus heat treatment to produce a substantially uniform grain microstructure of approximately ASTM 6-8, and cooling the article from the supersolvus heat treatment temperature.
  • Patent Document 1 it is said that even a Ni-based alloy material having a high ⁇ 'phase volume ratio can be manufactured with a high manufacturing yield without cracking.
  • the technique of Patent Document 1 requires a special manufacturing apparatus and a long work time because the hot forging step of superplastic deformation at a low strain rate and the isothermal forging step thereafter are performed (that is, a long work time is required). , Equipment cost and process cost are high).
  • Patent Document 2 discloses a method for manufacturing a Ni-based alloy softening material composed of a Ni-based alloy having a ⁇ 'phase solid solution temperature of 1050°C or higher, in which the softening treatment is performed in the next step.
  • the first step of hot forging the Ni-based alloy material at a temperature lower than the solid solution temperature of the ⁇ 'phase which is a step performed in a temperature range lower than the melting temperature, and lower than the solid solution temperature of the ⁇ 'phase
  • the technique reported in Patent Document 2 can be said to be an epoch-making technique in that a strong precipitation strengthened Ni-based alloy material can be processed/formed at low cost.
  • the solid content of ⁇ 'phase is In the process of hot forging at a temperature lower than the melting temperature (temperature region where two phases of ⁇ phase and ⁇ 'coexist), a normal forging device (a forging device without a special heating and heat retaining mechanism) was used. In this case, the manufacturing yield is likely to decrease due to the temperature decrease during the forging process (their unwanted precipitation of the ⁇ 'phase).
  • one of the technologies for manufacturing compacts/moldings of difficult-to-process materials at low cost is powder metallurgy technology using metal powder.
  • Patent Document 3 US Pat. No. 5,649,280
  • a fine-grained Ni-base superalloy preform for example, a solidified metal powder preform
  • a heat treatment in a subsequent step to be uniform. Forging so as to give residual strain to form a fine structure with a small grain size, and a long-time subsolvus at a temperature higher than the recrystallization temperature and lower than the ⁇ 'phase solvus temperature for the forged material.
  • Patent Document 3 uses powder metallurgy as a means for refining the particle size of the preform to be forged in order to control the particle size of the final Ni-based superalloy material.
  • powder metallurgy as a means for refining the particle size of the preform to be forged in order to control the particle size of the final Ni-based superalloy material.
  • the strong precipitation strengthened Ni-based alloy material cannot be said to have extremely good moldability/moldability due to the hardness of each powder particle. Therefore, conventionally, when applying a powder metallurgy technique, high temperature and/or high pressure processing was required, and it was difficult to drastically reduce the manufacturing cost of a strong precipitation strengthening Ni-based alloy member. In other words, if there is a Ni-based alloy powder that has high formability/formability and is suitable for powder metallurgy, it is expected that the production cost of strong precipitation strengthened Ni-based alloy members will be dramatically reduced. To be done.
  • Ni-based alloy softening powder has a chemical composition such that the equilibrium precipitation amount at 700° C. of the ⁇ ′ phase that precipitates in the ⁇ phase that is the mother phase is 30% by volume or more and 80% by volume or less, and the average of the softening powder is Particle size is 5 ⁇ m or more 500 ⁇ m or less, the particles of the softening powder is a powder composed of a polycrystalline body of fine crystals of the ⁇ phase, 20% by volume or more of the ⁇ 'phase is deposited on the grain boundaries of the fine crystals of the ⁇ phase that constitute the particles, A Ni-based alloy softening powder, characterized in that the particles have a Vickers hardness at room temperature of 370 Hv or less.
  • the chemical composition is 5 mass% or more and 25 mass% or less of Cr (chrome), 0 mass% to 30 mass% or less of Co (cobalt), and 1 mass% or more and 8 mass% or less of Al (aluminum). ), and a total of 1% by mass or more and 10% by mass or less of Ti (titanium), Nb (niobium) and Ta (tantalum), 10% by mass or less of Fe (iron), and 10% by mass or less of Mo (molybdenum).
  • the chemical composition is such that the solid solution temperature of the ⁇ 'phase is 1100°C or higher.
  • the Ni-based alloy softening powder has a chemical composition such that the equilibrium precipitation amount of the ⁇ ′ phase at 700° C. is 45% by volume or more and 80% by volume or less.
  • the Vickers hardness at room temperature of the particles is 350 Hv or less.
  • Another aspect of the present invention is a method for producing the above Ni-based alloy softening powder,
  • the manufacturing method A precursor powder preparation step of preparing a precursor powder having powder particles having the above chemical composition and composed of a polycrystal of fine crystals of the ⁇ phase,
  • the precursor powder is heated to a temperature not lower than the melting point of the ⁇ phase above the solid solution temperature of the ⁇ ′ phase (in the present invention, referred to as high temperature), and the ⁇ ′ phase is referred to as the ⁇ phase.
  • the powder particles are subjected to a high temperature-slow cooling heat treatment for gradually cooling from the temperature to a temperature lower than the solid solution temperature of the ⁇ ′ phase at a cooling rate of 100° C./h or less.
  • a powder softening high temperature-annealing heat treatment step for producing the Ni-based alloy softening powder in which the ⁇ 'phase is deposited in an amount of 20% by volume or more on the grain boundaries of the fine crystals of the ⁇ phase constituting the A method for producing a softening powder of Ni-based alloy is provided.
  • Yet another aspect of the present invention is a method for producing the above Ni-based alloy softening powder,
  • the manufacturing method A single-phase precursor powder preparation step of preparing a single-phase precursor powder having a chemical composition and powder particles comprising a polycrystal of a single-phase fine crystal of the ⁇ phase, With respect to the single-phase precursor powder, by heating to a temperature lower than the solid solution temperature of 80° C. lower than the solid solution temperature of the ⁇ ′ phase (in the present invention, referred to as sub-high temperature).
  • a sub-high temperature-slow cooling heat treatment for gradually cooling at a cooling rate of 100° C./h or less from the temperature is performed.
  • a powder softening sub-high temperature-slow cooling heat treatment step for producing the Ni-based alloy softening powder in which the ⁇ 'phase is precipitated in an amount of 20% by volume or more, and a method for producing a Ni-based alloy softening powder, To do.
  • Yet another aspect of the present invention is a method for producing the above Ni-based alloy softening powder,
  • the manufacturing method A single-phase precursor powder preparation step of preparing a single-phase precursor powder having a chemical composition and powder particles comprising a polycrystal of a single-phase fine crystal of the ⁇ phase, With respect to the single-phase precursor powder, after heating to a temperature lower than the melting point of the ⁇ phase at a solid solution temperature of the ⁇ 'phase or higher, 100 to a temperature lower than the solid solution temperature of the ⁇ 'phase from the temperature.
  • the ⁇ 'phase is formed on the grain boundaries of the single phase fine crystal of the ⁇ phase constituting the particles of the single phase precursor powder.
  • a powder softening high temperature-annealing heat treatment step for producing the Ni-based alloy softening powder precipitated in an amount of 20% by volume or more.
  • the precursor powder preparing step or the single-phase precursor powder preparing step includes an atomizing element step.
  • the equilibrium precipitation amount of ⁇ ′ phase at 700° C., the solid solution temperature, and the melting point (solidus temperature) of the ⁇ phase are equilibrium determined by thermodynamic calculation based on the chemical composition of the Ni-based alloy material.
  • the amount of precipitation and the temperature can be used.
  • a powder having better moldability/moldability than before which is suitable for powder metallurgy, a Ni-based alloy softening powder and the softening powder
  • a manufacturing method can be provided. Further, by applying powder metallurgy technology using the Ni-based alloy softening powder, it becomes possible to provide a strong precipitation-strengthened Ni-based alloy member with a high production yield (that is, at a lower cost than conventional). ..
  • FIG. 3 is a schematic diagram showing an example of changes in the microstructure of Ni-based alloy powder in the manufacturing method according to the present invention.
  • FIG. 6 is a flow chart showing another example of steps of a method for manufacturing a Ni-based alloy member using the Ni-based alloy softening powder according to the present invention.
  • FIG. 3 is a schematic diagram showing an example of changes in the microstructure of the Ni-based alloy powder in the single-phase precursor powder preparation step-powder softening sub-high temperature-annealing heat treatment step.
  • FIG. 6 is a flow chart showing still another example of the steps of the method for producing a Ni-based alloy member using the Ni-based alloy softening powder according to the present invention.
  • FIG. 1 is a schematic diagram showing a relationship between a ⁇ phase and a ⁇ ′ phase in a precipitation strengthened Ni-based alloy material. (a) When the ⁇ ′ phase is precipitated in the crystal grains of the ⁇ phase, (b) ⁇ This is the case where the ⁇ ′ phase is precipitated on the grain boundaries of the crystal grains of the phase.
  • the atom 1 forming the ⁇ phase and the atom 2 forming the ⁇ ′ phase form the matching interface 3.
  • the ⁇ 'phase precipitates while lattice matching with the ⁇ phase).
  • Such a ⁇ 'phase is referred to as an intragranular ⁇ 'phase (sometimes referred to as a matched ⁇ 'phase).
  • the intragranular ⁇ 'phase is considered to hinder the movement of dislocations within the ⁇ -phase crystal grains because it forms the matching interface 3 with the ⁇ -phase, thereby improving the mechanical strength of the Ni-based alloy material. it is conceivable that.
  • the precipitation-strengthened Ni-based alloy material usually means the state shown in FIG.
  • the atoms forming the ⁇ phase are 1 and the atom 2 forming the ⁇ ′ phase form a non-coherent interface 4 (the ⁇ ′ phase is precipitated in a state not lattice-matched with the ⁇ phase).
  • a ⁇ 'phase is referred to as a grain boundary ⁇ 'phase (may be referred to as an intergranular ⁇ 'phase or an incoherent ⁇ 'phase).
  • the grain boundary ⁇ ′ phase does not hinder the movement of dislocations within the ⁇ phase crystal grain because it forms the non-coherent interface 4 with the ⁇ phase.
  • the grain boundary ⁇ 'phase hardly contributes to the strengthening of the Ni-based alloy material. From these facts, in the Ni-based alloy material, if the grain boundary ⁇ ′ phase is positively deposited instead of the intragranular ⁇ ′ phase, the alloy material becomes in a softened state and the formability is dramatically improved. be able to.
  • the present invention does not precipitate a grain boundary ⁇ ′ phase by performing hot forging in a two-phase coexisting temperature region of ⁇ phase/ ⁇ ′ phase on an alloy lump (ingot) as in Patent Document 2, Forming a precursor powder/single-phase precursor powder of a Ni-based alloy in which powder particles are composed of a polycrystal of ⁇ -phase fine crystals or single-phase fine crystals, and the precursor powder/single-phase precursor powder
  • a major feature of the softening powder is that the grain boundary ⁇ ′ phase is precipitated in an amount of 20% by volume or more on the grain boundaries of the fine crystals of the ⁇ phase constituting the powder particles by subjecting the powder to a predetermined heat treatment. It can be said that the Ni-based alloy precursor powder/single-phase precursor powder is one of the key points.
  • the precipitation of the ⁇ 'phase basically requires the diffusion and rearrangement of the atoms that form the ⁇ 'phase. It is considered that the ⁇ ′ phase preferentially precipitates in the ⁇ phase crystal grains, which requires a short rearrangement distance. Even if it is a cast material, it cannot be denied that the ⁇ 'phase is precipitated on the grain boundaries of the ⁇ -phase crystal.
  • the present inventors have earnestly studied a technique for suppressing the grain growth of ⁇ phase crystal grains even in the vicinity of the solid solution temperature of the ⁇ ′ phase or in the temperature region above the solid solution temperature.
  • the powder particles will be composed of a polycrystalline ⁇ -phase fine crystal (powder particles). It was found that the grain boundaries of the ⁇ -phase fine crystals exist inside the powder particles, which are composed of the ⁇ -phase fine crystals. Furthermore, such powder particles can suppress the grain growth of ⁇ phase fine crystals even if the temperature is raised to around the solid solution temperature of the ⁇ ′ phase or above the solid solution temperature (the powder particles are single crystal bodies of the ⁇ phase). It was found that the grain boundary ⁇ 'phase can be positively precipitated and grown on the grain boundaries of the ⁇ phase fine crystal by maintaining the polycrystal without changing the temperature) and gradually cooling from the temperature. .. The present invention is based on this finding.
  • FIG. 2 is a flow chart showing a process example of a method for manufacturing a Ni-based alloy member using the Ni-based alloy softening powder according to the present invention.
  • the manufacturing method of the Ni-based alloy member using the Ni-based alloy softening powder of the present invention is roughly a polycrystalline body having a predetermined chemical composition and powder particles of ⁇ -phase fine crystals.
  • a precursor powder preparation step (S1) for preparing a precursor powder composed of the above, and a predetermined high temperature-slow cooling heat treatment is applied to the precursor powder to precipitate 20% by volume or more of the grain boundary ⁇ 'phase.
  • the precursor powder preparation step S1 and the powder softening high temperature-slow cooling heat treatment step S2 are the method for producing the Ni-based alloy softening powder according to the present invention.
  • the precursor powder, the powder particles are composed of a polycrystalline ⁇ -phase fine crystals, ⁇ 'phase is not precipitated on the grain boundaries of the ⁇ -phase fine crystals (at least intentionally A powder in a state where the grain boundary ⁇ 'phase is not precipitated).
  • the softening powder refers to a powder in which 20% by volume or more of the grain boundary ⁇ 'phase is precipitated on the grain boundary of the ⁇ phase fine crystal.
  • FIG. 3 is a schematic diagram showing an example of changes in the microstructure of the Ni-based alloy powder in the manufacturing method according to the present invention.
  • the Ni-based alloy precursor powder prepared in the precursor powder preparing step is a powder having an average particle size of 500 ⁇ m or less, and the powder particles are composed of a polycrystal of ⁇ -phase fine crystals. Strictly speaking, it is strongly affected by the temperature history (eg, cooling rate) in the process of forming the precursor powder, but the ⁇ phase (consistent ⁇ ′ phase) is not precipitated in the ⁇ phase fine crystal. The fine crystals and the ⁇ phase fine crystals in which the ⁇ ′ phase in the grains are partially precipitated may coexist.
  • Intragranular ⁇ 'phase is not precipitated ⁇ -phase fine crystals or ⁇ -phase fine crystals in the region where intragranular ⁇ 'phase is not precipitated is the composition before the supersaturated state of ⁇ 'phase or ⁇ 'phase is formed. It is considered to be in a fluctuating state.
  • the particles of the precursor powder are basically composed of a polycrystal of ⁇ -phase fine crystals, but it cannot be ruled out that a part of the particles is composed of a ⁇ -phase single crystal. ..
  • the precursor powder most of the particles are composed of a polycrystal of gamma phase fine crystals, but particles composed of a gamma phase single crystal may be mixed.
  • the precursor powder is heated to a temperature above the solid solution temperature of the ⁇ 'phase and below the melting point of the ⁇ phase.
  • the heating temperature is equal to or higher than the solid solution temperature of the ⁇ 'phase, in terms of thermal equilibrium, all the ⁇ 'phases are solid-dissolved in the ⁇ phase to form the ⁇ phase single phase.
  • a softened powder in which 20% by volume or more of the grain boundary ⁇ ′ phase is precipitated on the grain boundaries of the ⁇ phase fine crystals of the powder particles is obtained. .. Since the softening powder has a sufficiently small amount of precipitation of the intragranular ⁇ 'phase, the mechanism of precipitation strengthening does not act, and the formability/formability is dramatically improved. Since the surface of the powder particle can be regarded as a kind of grain boundary of the ⁇ -phase fine crystal, the ⁇ ′ phase precipitated on the surface of the powder particle is also regarded as the grain boundary ⁇ ′ phase.
  • the softening powder obtained is used to apply a powder metallurgy technique to form a molded body having a desired shape (molding step S3).
  • the softening powder of the present invention has dramatically improved molding processability as compared with the conventional strong precipitation strengthening Ni-based alloy powder, the temperature and/or pressure during the molding process can be kept higher than the conventional one. Can also be lowered. This means that the apparatus cost and/or the process cost can be reduced in the molding process.
  • the formed body having the desired shape is subjected to solution heat treatment in which most of the grain boundary ⁇ 'phase is dissolved in the ⁇ phase (for example, the grain boundary ⁇ 'phase is set to 10% by volume or less).
  • an aging heat treatment for precipitating an intragranular ⁇ 'phase in an amount of 30% by volume or more in the crystal grains of the ⁇ phase is performed (solution treatment-aging heat treatment step S4).
  • solution treatment-aging heat treatment step S4 solution treatment-aging heat treatment step S4
  • a strong precipitation strengthened Ni-based alloy member having a desired shape and being sufficiently precipitation strengthened can be obtained.
  • the ease of the molding process by using the softening powder of the present invention leads to a reduction in the device cost, a reduction in the process cost, and an improvement in the production yield (that is, a reduction in the production cost of the Ni-based alloy member).
  • the obtained strong precipitation strengthened Ni-based alloy member can be suitably used as a next-generation turbine high temperature member (for example, turbine rotor blade, turbine stationary blade, rotor disk, combustor member, boiler member, heat resistant coating material).
  • a next-generation turbine high temperature member for example, turbine rotor blade, turbine stationary blade, rotor disk, combustor member, boiler member, heat resistant coating material.
  • the technique of Patent Document 2 intentionally leaves the coherent ⁇ ′ phase (intragranular ⁇ ′ phase) while precipitating the noncoherent ⁇ ′ phase (grain boundary ⁇ ′ phase, intergranular ⁇ ′ phase). Since a softened body is produced, highly precise control is required. On the other hand, the technique of the present invention produces a softened powder in which the intragranular ⁇ 'phase is once eliminated and then the grain boundary ⁇ 'phase is precipitated.
  • the softened powder can be obtained by the combination of the precursor powder forming step S1 with low industrial difficulty and the powder softening high temperature-slow cooling heat treatment step S2 with low industrial difficulty, it is more versatile than the technique of Patent Document 2. The cost is high and the cost of the entire manufacturing process can be reduced. In particular, it is effective for producing a softened powder made of a super strong precipitation strengthened Ni-based alloy material having a volume ratio of ⁇ 'phase of 45% by volume or more.
  • This step S1 is a step of preparing a Ni-based alloy precursor powder having a predetermined chemical composition (in particular, intentionally containing a predetermined amount of oxygen component).
  • a method/method for preparing the precursor powder basically the conventional method/method can be used.
  • the atomizing element process (S1b) is performed.
  • a classifier step (S1c) for making the particle size of the precursor powder uniform may be performed.
  • the oxygen content in the atomizing element process S1b It is preferable to control the oxygen content in the atomizing element process S1b.
  • the conventional method/method can be used except that the oxygen content in the Ni-based alloy is controlled.
  • a gas atomizing method or a centrifugal atomizing method while controlling the oxygen amount (oxygen partial pressure) in the atomizing atmosphere can be preferably used.
  • the content of the oxygen component in the precursor powder (sometimes referred to as the content rate) is preferably 0.003 mass% (30 ppm) or more and 0.05 mass% (500 ppm) or less, more preferably 0.005 mass% or more and 0.04 mass% or less. , More preferably 0.007 mass% or more and 0.02 mass% or less. If it is less than 0.003 mass %, the effect of suppressing the grain growth of ⁇ -phase fine crystals is small, and if it exceeds 0.05 mass %, the mechanical strength and ductility of the final Ni-based alloy member are reduced. It is considered that the oxygen atoms form a solid solution inside the powder particles or generate nuclei of oxide on the surface or inside.
  • the chemical composition of the Ni-based alloy one in which the ⁇ 'phase solid solution temperature is 1020°C or higher. It is more preferable to use a material having a temperature of 1050° C. or higher, and it is more preferable to use a material having a temperature of 1100° C. or higher. Details of the chemical composition other than oxygen components will be described later.
  • the average particle size of the precursor powder is preferably 5 ⁇ m or more and 500 ⁇ m or less, more preferably 10 ⁇ m or more and 300 ⁇ m or less, still more preferably 20 ⁇ m or more and 200 ⁇ m or less.
  • the average particle size of the precursor powder can be measured using, for example, a laser diffraction type particle size distribution measuring device.
  • the particles of the precursor powder basically consist of a polycrystalline body of ⁇ -phase fine crystals, and the average grain size of the ⁇ -phase fine crystals in the powder particles is 5 ⁇ m or more and 50 ⁇ m or less. Is preferred.
  • the ⁇ 'phase for example, a eutectic ⁇ 'phase that directly crystallizes from the liquid phase
  • the ⁇ 'phase precipitates on the grain boundaries of the ⁇ phase fine crystals. do not do.
  • step S2 the precursor powder prepared in the previous step S1 is heated to a temperature equal to or higher than the solid solution temperature of the ⁇ ′ phase to once dissolve the ⁇ ′ phase in the ⁇ phase, and then from the temperature. It is a step of producing a softened powder by generating and increasing the grain boundary ⁇ ′ phase by slow cooling.
  • the slow cooling start temperature is preferably lower than the melting point of the ⁇ -phase (below the solidus temperature) and 35°C higher than the solid-solution temperature of the ⁇ 'phase.
  • the temperature is preferably higher than or equal to the high temperature, and more preferably 25° C. or higher than the solid solution temperature of the ⁇ ′ phase.
  • the melting point of the ⁇ phase is lower than the “solid solution temperature of the ⁇ ′ phase +35°C” or the “solid solution temperature of the ⁇ ′ phase +25°C”, the “less than the melting point of the ⁇ phase” naturally takes precedence. ..
  • the heat treatment atmosphere is a non-oxidizing atmosphere (an atmosphere containing no partial pressure of oxygen that causes oxidation) to prevent undesired oxidation of the Ni-based alloy powder (oxidation exceeding the oxygen content controlled in the previous step S1). If there is no particular limitation, a reducing atmosphere (for example, hydrogen gas atmosphere) is more preferable.
  • the intragranular ⁇ 'phase does not completely disappear as a result of the high temperature-slow cooling heat treatment, and that it exists only slightly.
  • the grain boundary ⁇ ′ phase is precipitated in an amount of 20% by volume or more
  • the amount of the intragranular ⁇ ′ phase is 10% by volume or less
  • the molding processability in the subsequent molding process step is strongly hindered. It is acceptable because it does not.
  • the amount of the intragranular ⁇ 'phase present is more preferably 5% by volume or less, further preferably 3% by volume or less.
  • the precursor powder prepared in the precursor powder preparing step S1 contains more oxygen component as the alloy composition than the conventional Ni-based alloy material (see that it contains a large amount of oxygen component. Controlled by). Then, when such a precursor powder is subjected to a heat treatment at a solid solution temperature of the ⁇ 'phase or higher, it is considered that the contained oxygen atoms combine with the metal atoms of the alloy to form a local oxide.
  • the oxide formed at this time suppresses the grain boundary migration of ⁇ -phase fine crystals (that is, grain growth of ⁇ -phase fine crystals). That is, it is considered that even if the ⁇ 'phase disappears in this step S2, the coarsening of the ⁇ phase fine crystals can be prevented.
  • the strengthening mechanism of the precipitation strengthened Ni-based alloy material is that it contributes to strengthening by forming a coherent interface between the ⁇ phase and the ⁇ ′ phase, and the non-coherent interface does not contribute to strengthening.
  • the amount of intragranular ⁇ 'phase (coherent ⁇ 'phase) and increasing the amount of grain boundary ⁇ 'phase (intergranular ⁇ 'phase, non-coherent ⁇ 'phase) it has excellent moldability. A softened powder can be obtained.
  • ⁇ Lower cooling rate in the slow cooling process is more advantageous for precipitation and growth of grain boundary ⁇ 'phase.
  • the cooling rate is preferably 100° C./h or less, more preferably 50° C./h or less, even more preferably 10° C./h or less. If the cooling rate is higher than 100° C./h, the intragranular ⁇ ′ phase is preferentially precipitated and the effect of the present invention cannot be sufficiently obtained.
  • the precipitation amount of the intragranular ⁇ 'phase is preferably 10% by volume or less, and more preferably 5% by volume or less.
  • the precipitation amount of the ⁇ ′ phase can be measured by microstructural observation and image analysis (for example, ImageJ, public domain software developed by National Institutes of Health in the US).
  • the end temperature of the slow cooling process when the ⁇ 'phase solid solution temperature is relatively low 1020 °C or more and less than 1100 °C, a temperature lower than the ⁇ 'phase solid solution temperature by 50 °C or more is preferable, and the ⁇ 'phase solid solution A temperature lower than the temperature by 100° C. or more is more preferable, and a temperature lower than the ⁇ ′ phase solid solution temperature by 150° C. or more is further preferable.
  • the end temperature of the slow cooling process is preferably 100°C or more lower than the ⁇ 'phase solid solution temperature, and 150°C from the ⁇ 'phase solid solution temperature.
  • the lower temperature is more preferable, and the temperature lower than the ⁇ 'phase solid solution temperature by 200°C or more is further preferable. More specifically, it is preferable to gradually cool to a temperature of 1000°C or lower and 800°C or higher.
  • a higher cooling rate is preferable in order to suppress precipitation of the intragranular ⁇ 'phase during cooling (for example, to set the precipitation amount of the intragranular ⁇ 'phase to 10% by volume or less).
  • water cooling or gas cooling is preferable.
  • the Vickers hardness (Hv) of the softened powder at room temperature can be used as an index of moldability/moldability.
  • the softened powder obtained by performing this step S2 has a room temperature Vickers hardness even if it is a super strong precipitation strengthening Ni-based alloy material such that the equilibrium precipitation amount of the ⁇ 'phase at 700°C is 45% by volume or more. You can get less than 370 Hv.
  • the room temperature Vickers hardness is more preferably 350 Hv or less, and further preferably 330 Hv or less.
  • FIG. 4 is a flow chart showing another example of steps of the method for manufacturing a Ni-based alloy member using the Ni-based alloy softening powder according to the present invention.
  • another manufacturing method of the Ni-based alloy softening powder using the Ni-based alloy softening powder of the present invention is a manufacturing method of the Ni-based alloy softening powder (single-phase precursor powder preparation step S1′ and powder In the softening sub-high temperature-slow cooling heat treatment step S2'), unlike the step of FIG. 2, the forming step S3 and the solution-aging heat treatment step S4 are the same as those of FIG.
  • FIG. 5 is a schematic diagram showing an example of changes in the microstructure of the Ni-based alloy powder in steps S1' and S2'.
  • steps S1′ to S2′ that is, the other method for producing the Ni-based alloy softening powder according to the present invention
  • steps S1′ to S2′ that is, the other method for producing the Ni-based alloy softening powder according to the present invention
  • This step S1′ is a step of preparing a single-phase precursor powder having a predetermined chemical composition and powder particles composed of a single-phase microcrystalline polycrystal of ⁇ phase.
  • the single-phase precursor powder means a ⁇ -phase single-phase ( ⁇ ′) measured by a scanning electron microscope-energy dispersive X-ray analyzer (SEM-EDX) and/or an X-ray diffractometer (XRD). It means a powder that can be judged to have no phase detected). It does not require strictness at the level of transmission electron microscope (TEM) or scanning transmission electron microscope (STEM).
  • This step S1' includes a mother alloy ingot producing element step (S1a) similar to step S1, and an atomizing element step (S1'b) for forming a single-phase precursor powder, and if necessary, the step The classifier step (S1c) similar to S1 may be performed.
  • the atomizing element step S1'b is the same atomizing method as the atomizing element step S1b of step S1 except that the average cooling rate in the temperature range where the ⁇ 'phase is easily generated and precipitated (eg, 1100°C to 600°C) is controlled. Is available.
  • the average cooling rate to be controlled is preferably 500° C./min or higher, more preferably 1000° C./min or higher, further preferably 1500° C./min or higher, most preferably 2000° C./min or higher.
  • step S1' a single-phase precursor powder composed of a single-phase fine-crystal polycrystal of the ⁇ phase is obtained as shown in FIG.
  • the content of the oxygen component in the single-phase precursor powder, the average grain size, and the average crystal grain size of the single-phase fine crystals are the same as those of the precursor powder obtained in step S1.
  • step S2' is a Ni-based alloy in which 20 volume% or more of the grain boundary ⁇ 'phase is precipitated by subjecting the single-phase precursor powder prepared in the previous step S1' to a predetermined sub-high temperature-annealing heat treatment.
  • This is a step of producing a softened powder.
  • Sub-high temperature-slow cooling heat treatment is heating at a temperature 80°C lower than the solid solution temperature of the ⁇ 'phase to a temperature lower than the solid solution temperature, and then gradually cooled from that temperature at a cooling rate of 100°C/h or less. Heat treatment.
  • the heating temperature (that is, the gradual cooling start temperature) is more preferably 50° C.
  • the cooling rate in the slow cooling process is preferably 50° C./h or less, more preferably 10° C./h or less.
  • the grain boundary ⁇ 'phase preferentially nucleates and grows even when the slow cooling start temperature is in the sub-high temperature range (see Fig. 5). Further, regarding the gradual cooling end temperature in step S2′, the cooling from the gradual cooling end temperature, the precipitation amount of the grain boundary ⁇ ′ phase and the existing amount of the intragranular ⁇ ′ phase as a result of the sub-high temperature-gradual cooling heat treatment, It is similar to those of the softened powder obtained in S2.
  • the softened powder similar to the softened powder obtained in step S2 can be obtained by the sub-high temperature-slow cooling heat treatment for the single-phase precursor powder.
  • the exact mechanism has not been clarified at this stage, but it is possible that the single-phase precursor powder composed of a single-phase microcrystalline polycrystal of the ⁇ phase is an important point. Can be considered.
  • a temperature of 80° C. or more lower than the solid solution temperature of the ⁇ ′ phase and lower than the solid solution temperature (in the present invention, a sub-high temperature) Is considered to be a temperature range in which the degree of supercooling associated with the precipitation of the ⁇ 'phase is small.
  • Precipitation of the ⁇ 'phase (that is, intragranular ⁇ 'phase) in the ⁇ -phase crystal is considered to be a kind of homogeneous nucleation (at least a phenomenon similar to homogeneous nucleation).
  • the nucleation frequency of the intragranular ⁇ 'phase in the sub-high temperature region in the ⁇ -phase single-phase crystal is considered to be very low.
  • the sub-high temperature-slow cooling heat treatment for the single-phase precursor powder is performed by competing the homogeneous nucleation and the heterogeneous nucleation in the temperature region where the degree of supercooling of the ⁇ ′ phase is small, It is considered that the heat treatment is carried out by preferentially nucleating the grain boundary ⁇ 'phase due to the heterogeneous nucleation, and then grain-growing the nuclei generated in the slow cooling process.
  • the consideration (model) is considered to be applicable to "preferential nucleation of grain boundary ⁇ 'phase and subsequent grain growth of grain boundary ⁇ 'phase" in the powder softening high temperature-slow cooling heat treatment step S2.
  • FIG. 6 is a flow chart showing still another process example of the method for producing a Ni-based alloy member using the Ni-based alloy softening powder according to the present invention.
  • the manufacturing method of the Ni-based alloy member using the Ni-based alloy softening powder of the present invention is, in the production of the Ni-based alloy softening powder, after the single-phase precursor powder preparing step S1′.
  • the powder softening high temperature-slow cooling heat treatment step S2 is performed.
  • the forming step S3 and the solution heat treatment-aging heat treatment step S4 may be the same as those in FIG.
  • the chemical composition of the Ni-based alloy material used in the present invention will be described.
  • the Ni-based alloy material has a chemical composition such that the equilibrium precipitation amount of the ⁇ ′ phase at 700° C. is 30% by volume or more and 80% by volume or less. Specifically, in mass%, 5% or more and 25% or less of Cr, 0% or more and 30% or less of Co, 1% or more and 8% or less of Al, and the sum of Ti, Nb, and Ta is 1% or more and 10% or less.
  • the Cr component dissolves in the ⁇ phase and has the effect of improving the corrosion resistance and oxidation resistance by forming an oxide film (Cr 2 O 3 ) on the surface under the actual use environment of the Ni-based alloy material. ..
  • an oxide film Cr 2 O 3
  • excessive addition promotes the formation of a harmful phase, it is preferably 25% by mass or less.
  • the Co component is an element close to Ni and forms a solid solution in the ⁇ phase in the form of substitution with Ni, and has the effect of improving creep strength and corrosion resistance. Further, it also has the effect of lowering the solid solution temperature of the ⁇ 'phase, and improves the high temperature ductility. However, excessive addition promotes the formation of a harmful phase, so the content is preferably more than 0% and 30% by mass or less.
  • the Al component is an essential component for forming the ⁇ 'phase which is the precipitation strengthening phase of the Ni-based alloy. Furthermore, by forming an oxide film (Al 2 O 3 ) on the surface of the Ni-based alloy material in the actual use environment, it contributes to the improvement of oxidation resistance and corrosion resistance.
  • the amount is preferably 1% by mass or more and 8% by mass or less depending on the desired amount of ⁇ 'phase precipitation.
  • Ti component, Nb component and Ta component have the effect of forming ⁇ 'phase and improving high temperature strength like Al component. Further, the Ti component and the Nb component also have the effect of improving the corrosion resistance. However, since excessive addition promotes the formation of a harmful phase, it is preferable that the total amount of Ti, Nb, and Ta components is 1% by mass or more and 10% by mass or less.
  • the Mo component and W component have the effect of forming a solid solution in the ⁇ phase to improve the high temperature strength (solid solution strengthening), and it is preferable to add at least one of them.
  • the Mo component also has the effect of improving corrosion resistance.
  • the Mo component is 10 mass% or less and the W component is 8 mass% or less.
  • Zr component, B component, and C component strengthen the ⁇ -phase grain boundaries (strengthen the tensile strength in the direction perpendicular to the ⁇ -phase grain boundaries) and improve the high temperature ductility and creep strength. There is. However, since excessive addition deteriorates moldability, it is preferable that the Zr component is 0.1 mass% or less, B is 0.1 mass% or less, and C is 0.2 mass% or less.
  • the Hf component has the effect of improving oxidation resistance. However, since excessive addition promotes the formation of a harmful phase, it is preferable to set the content to 2% by mass or less.
  • Re component contributes to the solid solution strengthening of ⁇ phase and also has the effect of contributing to the improvement of corrosion resistance. However, excessive addition promotes the formation of harmful phases. In addition, since Re is an expensive element, increasing the amount of addition has the demerit of increasing the material cost of the alloy. Therefore, Re is preferably 5% by mass or less.
  • the O component is usually treated as an impurity and is a component to be reduced as much as possible, but in the present invention, as described above, the grain growth of the ⁇ phase fine crystal is suppressed and the formation of grain boundary ⁇ ′ phase grains is suppressed. It is an essential ingredient for promotion.
  • the O content is preferably 0.003 mass% or more and 0.05 mass% or less.
  • Residual components of the Ni-based alloy material become unavoidable impurities other than Ni and O components.
  • unavoidable impurities other than the O component include N (nitrogen), P (phosphorus), and S (sulfur).
  • Example 1 (Preparation of Ni-based alloy precursor powders PP1 to PP8 and single-phase precursor powders PP9 to PP10)
  • a master ingot (10 kg) was prepared by mixing, melting, and casting the Ni-based alloy raw materials. The dissolution was performed by the vacuum induction heating dissolution method. Next, the obtained master ingot was redissolved and a Ni-based alloy powder was produced by the gas atomizing method while controlling the oxygen partial pressure in the atomizing atmosphere.
  • Ni-based alloy powder is classified to select alloy powders having a particle size in the range of 25 to 150 ⁇ m, and Ni-based alloy precursor powders PP1 to PP8 and single-phase precursor powders PP9 to PP10 are prepared. .. Table 1 shows the chemical compositions of the obtained powders PP1 to PP10.
  • Example 2 (Production of Ni-based alloy softening powders of Examples 1 to 11 and Comparative Examples 1 to 12 and evaluation of molding processability)
  • the precursor powders PP1 to PP8 and the single-phase precursor powders PP9 to PP10 obtained in Experiment 1 were softened under the heat treatment conditions (slow cooling start temperature, slow cooling process cooling rate) shown in Table 2 below.
  • the Ni-based alloy softening powders of Examples 1 to 11 and Comparative Examples 1 to 12 were produced.
  • the end temperature of the slow cooling process was 950° C. except for Comparative Examples 1 and 12.
  • gas was rapidly cooled from the slow cooling start temperature to room temperature.
  • the precipitation amount of the grain boundary ⁇ 'phase was determined by observing the softened powder with an electron microscope and image analysis (ImageJ).
  • the room temperature Vickers hardness of the softened powder was measured by randomly extracting 10 particles and using a micro Vickers hardness meter (Akashi Seisakusho, Model: MVK-E). Of the 10 particles at room temperature Vickers hardness, the average value of the room temperature Vickers hardness of 8 particles excluding the maximum value and the minimum value was defined as the room temperature Vickers hardness of the softened powder. In the moldability evaluation, a room temperature Vickers hardness of 370 Hv or less was judged as "pass", and a room temperature Vickers hardness of more than 370 Hv was judged as "fail”.
  • Table 2 shows specifications and evaluation results of the Ni-based alloy softening powders of Examples 1 to 11 and Comparative Examples 1 to 12.
  • Table 2 shows specifications and evaluation results of the Ni-based alloy softening powders of Examples 1 to 11 and Comparative Examples 1 to 12.
  • the equilibrium precipitation amount and the solid solution temperature of the ⁇ 'phase at 700°C of the ⁇ 'phase are obtained from the alloy composition of Table 1 based on thermodynamic calculation.
  • the softening powders of Comparative Examples 1 to 7 in which the starting temperature and/or the cooling rate of the slow cooling process in the high temperature-slow cooling heat treatment were out of the range of the present invention were the precipitation amount of the grain boundary ⁇ 'phase. Is less than 20% by volume (instead, an increase in the amount of ⁇ 'phase precipitation in grains is confirmed), and the room temperature Vickers hardness is more than 370 Hv. As a result, the moldability was judged to be unacceptable. If the slow cooling start temperature (that is, the heating temperature) in the high temperature-slow cooling heat treatment is too low, or if the cooling rate in the slow cooling process is too high, the grain boundary ⁇ 'phase hardly precipitates and grows. It was confirmed that the sex could not be secured.
  • the softened powder of Comparative Example 8 in which the equilibrium precipitation amount of the ⁇ 'phase at 700°C deviates from the definition of the present invention, the softening powder of Comparative Example 8 has an equilibrium precipitation amount of the ⁇ 'phase of less than 30% by volume. It does not apply to the targeted strong precipitation strengthened Ni-based alloy materials. However, since the amount of ⁇ 'phase precipitation is absolutely small, there has been no particular problem in molding processability/molding processability.
  • the softened powders of Examples 8 to 9 using the single-phase precursor powders PP9 to PP10 have a grain size even if they are subjected to the sub-high temperature-annealing heat treatment in which the annealing start temperature is lower than the solid solution temperature of the ⁇ 'phase.
  • the precipitation amount of the boundary ⁇ 'phase is 20% by volume or more, and the room temperature Vickers hardness is 370 Hv or less. As a result, the moldability was judged to be acceptable. That is, the effect of the present invention was confirmed.
  • the softened powders of Examples 10 to 11 in which the high temperature-slow cooling heat treatment was applied to the single-phase precursor powders PP9 to PP10 also had the precipitation amount of the grain boundary ⁇ 'phase of 20% by volume or more, and the room temperature Vickers hardness. Is less than 370 Hv. As a result, the moldability was judged to be acceptable. That is, the effect of the present invention was confirmed.
  • the softening powders of Comparative Examples 9 to 12 in which the starting temperature or the cooling rate of the slow cooling process in the softening process did not satisfy the requirements of the present invention the precipitation of the grain boundary ⁇ 'phase was observed.
  • the amount is less than 20% by volume, and the room temperature Vickers hardness is more than 370 Hv.
  • the moldability was judged to be unacceptable. If the slow cooling start temperature in the sub-high temperature-slow cooling heat treatment is too low, or if the cooling rate in the slow cooling process in the high temperature-slow cooling heat treatment is too high, the grain boundary ⁇ 'phase hardly precipitates and grows, resulting in sufficient molding. It was confirmed that the workability could not be secured.

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Abstract

The present invention addresses the problem of providing: a Ni-based alloy softening powder which is a powder having better shaping processability/molding processability than before in spite of the fact that the powder is produced using a strongly precipitation-hardened Ni-based alloy material, and which is suitable for a powder metallurgy technique; and a method for producing the softened powder. The Ni-based alloy softened powder according to the present invention is a powder which has such a chemical composition that the equilibrium precipitation amount of a γ' phase precipitated in a γ phase that serves as a matrix phase becomes 30 to 80% by volume at 700°C, and has an average grain size of 5 to 500 μm, wherein each of grains of the softened powder is formed from a polycrystalline body of microcrystals of the γ phase, the powder being characterized in that the γ' phase is precipitated in an amount of 20% by volume or more on the grain boundaries of the microcrystals of the γ phase which constitute the grains, and the Vickers hardness of the grains at room temperature is 370 Hv or less.

Description

Ni基合金軟化粉末および該軟化粉末の製造方法Ni-based alloy softening powder and method for producing the softening powder
 本発明は、Ni(ニッケル)基合金材の技術に関し、特に、強析出強化Ni基合金材料からなり、かつ粉末冶金技術に好適なNi基合金軟化粉末および該軟化粉末の製造方法に関するものである。 TECHNICAL FIELD The present invention relates to a technology of a Ni (nickel) base alloy material, and more particularly to a Ni base alloy softening powder which is made of a strong precipitation strengthening Ni base alloy material and is suitable for powder metallurgy technology and a method for producing the softening powder. ..
 航空機や火力発電プラントのタービン(ガスタービン、蒸気タービン)において、熱効率向上を目指した主流体温度の高温化は一つの技術トレンドになっており、タービン高温部材における高温の機械的特性の向上は、重要な技術課題である。最も過酷な環境に曝されるタービン高温部材(例えば、タービン動翼、タービン静翼、ロータディスク、燃焼器部材、ボイラー部材)は、運転中の回転遠心力や振動や起動/停止に伴う熱応力を繰り返し受けることから、機械的特性(例えば、クリープ特性、引張特性、疲労特性)の向上は大変重要になる。 In turbines (gas turbines, steam turbines) of aircrafts and thermal power plants, increasing the main fluid temperature to improve thermal efficiency has become one technological trend. This is an important technical issue. High temperature turbine components exposed to the harshest environments (eg, turbine blades, turbine vanes, rotor disks, combustor components, boiler components) are subject to rotational centrifugal forces during operation and thermal stress associated with vibration and start/stop. Therefore, it is very important to improve mechanical properties (for example, creep property, tensile property, fatigue property).
 要求される種々の機械的特性を満たすため、タービン高温部材の材料としては、析出強化Ni基合金材が広く利用されている。特に高温特性が重要になる場合は、母相となるγ(ガンマ)相中に析出させるγ’(ガンマ プライム)相(例えばNi3(Al,Ti)相)の比率を高めた強析出強化Ni基合金材(例えば、γ’相を30体積%以上析出させるNi基合金材)が使用される。 Precipitation-strengthened Ni-based alloy materials are widely used as materials for turbine high-temperature members in order to satisfy various required mechanical properties. When high temperature characteristics are especially important, strong precipitation strengthened Ni with a high ratio of γ'(gamma prime) phase (eg, Ni 3 (Al,Ti) phase) to be precipitated in the γ(gamma) phase that is the matrix phase. A base alloy material (for example, a Ni base alloy material that precipitates 30% by volume or more of the γ'phase) is used.
 主たる製造方法としては、タービン動翼やタービン静翼のような部材では、クリープ特性の観点から、従来から精密鋳造法(特に、一方向凝固法、単結晶凝固法)が用いられてきた。一方、タービンディスクや燃焼器部材では、引張特性や疲労特性の観点から、しばしば熱間鍛造法が用いられてきた。 As a main manufacturing method, precision casting methods (particularly, unidirectional solidification method and single crystal solidification method) have been conventionally used for members such as turbine blades and turbine stationary blades from the viewpoint of creep characteristics. On the other hand, hot forging methods have often been used for turbine disks and combustor members from the viewpoint of tensile properties and fatigue properties.
 ただし、析出強化Ni基合金材は、高温部材の高温特性をより高めるためにγ’相の体積率を更に高めようとすると、加工性・成形性が悪化して、高温部材の製造歩留まりが低下する(すなわち製造コストが増大する)という弱点があった。そのため、高温部材の特性向上の研究と並行して、該高温部材を安定して製造する技術の研究も種々行われてきた。 However, in precipitation-strengthened Ni-based alloy materials, if the volume ratio of the γ'phase is further increased in order to further improve the high temperature characteristics of the high temperature member, the workability and formability deteriorate and the manufacturing yield of the high temperature member decreases. There is a weak point that it does (that is, manufacturing cost increases). Therefore, in parallel with the research on improving the characteristics of the high temperature member, various researches on techniques for stably manufacturing the high temperature member have been conducted.
 例えば、特許文献1(特開平9-302450)には、制御された結晶粒度を有するNi基超合金物品を鍛造用プリフォームから製造する方法であって、γ相とγ’相との混合物を含むミクロ組織、再結晶温度及びγ’ソルバス温度を有するNi基超合金プリフォームを準備し(ここで、γ’相はNi基超合金の少なくとも30容量%を占める)、約1600°F以上であるがγ’ソルバス温度よりは低い温度で、歪み速度を毎秒約0.03~約10として前記超合金プリフォームを熱間金型鍛造し、得られた熱間金型鍛造超合金工作物を等温鍛造して加工済物品を形成し、こうして仕上げた物品をスーパーソルバス熱処理して略ASTM 6~8の実質的に均一な粒子ミクロ組織を生成させ、物品をスーパーソルバス熱処理温度から冷却する、ことからなる方法が開示されている。 For example, Patent Document 1 (Japanese Patent Laid-Open No. 9-302450) discloses a method for producing a Ni-based superalloy article having a controlled grain size from a forging preform, which comprises mixing a γ phase and a γ′ phase. Prepare a Ni-base superalloy preform having a microstructure including, a recrystallization temperature and a γ'solvus temperature (where the γ'phase occupies at least 30% by volume of the Ni-base superalloy) and at about 1600°F or higher. However, at a temperature lower than the γ'solvus temperature, the superalloy preform was hot die forged at a strain rate of about 0.03 to about 10 per second, and the resulting hot die forging superalloy workpiece was isothermally forged. To form a processed article and subject the finished article to a supersolvus heat treatment to produce a substantially uniform grain microstructure of approximately ASTM 6-8, and cooling the article from the supersolvus heat treatment temperature. A method consisting of is disclosed.
特開平9-302450号公報Japanese Unexamined Patent Publication No. 9-302450 特許第5869624号公報Japanese Patent No. 5869624 米国特許第5649280号明細書US Pat. No. 5,649,280
 特許文献1によると、γ’相の体積率が高いNi基合金材であっても、ひび割れさせることなく高い製造歩留まりで鍛造品を製造できるとされている。しかしながら、特許文献1の技術は、低ひずみ速度による超塑性変形の熱間鍛造工程およびその後に等温鍛造工程を行うことから、特殊な製造装置が必要であるとともに長いワークタイムを必要とする(すなわち、装置コストおよびプロセスコストが高い)という弱点がある。 According to Patent Document 1, it is said that even a Ni-based alloy material having a high γ'phase volume ratio can be manufactured with a high manufacturing yield without cracking. However, the technique of Patent Document 1 requires a special manufacturing apparatus and a long work time because the hot forging step of superplastic deformation at a low strain rate and the isothermal forging step thereafter are performed (that is, a long work time is required). , Equipment cost and process cost are high).
 工業製品に対しては、当然のことながら低コスト化の強い要求があり、製品を低コストで製造する技術の確立は、最重要課題のうちの一つである。 Naturally, there is a strong demand for cost reduction for industrial products, and establishment of technology for manufacturing products at low cost is one of the most important issues.
 例えば、特許文献2(特許第5869624)には、γ’相の固溶温度が1050℃以上であるNi基合金からなるNi基合金軟化材の製造方法であって、次の工程で軟化処理を実施するためのNi基合金素材を準備する素材準備工程と、前記Ni基合金素材を軟化させて加工性を向上させる軟化処理工程と、を含み、前記軟化処理工程は、前記γ’相の固溶温度未満の温度領域でなされる工程であり、前記Ni基合金素材を前記γ’相の固溶温度未満の温度で熱間鍛造する第1の工程と、前記γ’相の固溶温度未満の温度から100℃/h以下の冷却速度で徐冷をすることにより前記Ni基合金の母相であるγ相の結晶粒の粒界上に析出した非整合なγ’相の結晶粒の量を増加させて20体積%以上としたNi基合金軟化材を得る第2の工程と、を含むことを特徴とするNi基合金軟化材の製造方法、が開示されている。特許文献2で報告された技術は、強析出強化Ni基合金材を低コストで加工・成形できるという点で画期的な技術と言える。 For example, Patent Document 2 (Patent No. 5869624) discloses a method for manufacturing a Ni-based alloy softening material composed of a Ni-based alloy having a γ'phase solid solution temperature of 1050°C or higher, in which the softening treatment is performed in the next step. A material preparation step of preparing a Ni-based alloy material to be carried out, and a softening treatment step of improving the workability by softening the Ni-based alloy material, the softening treatment step, the solid of the γ'phase. The first step of hot forging the Ni-based alloy material at a temperature lower than the solid solution temperature of the γ'phase, which is a step performed in a temperature range lower than the melting temperature, and lower than the solid solution temperature of the γ'phase The amount of incoherent γ'phase crystal grains precipitated on the grain boundaries of the γ phase crystal grain, which is the parent phase of the Ni-based alloy, by slow cooling at a cooling rate of 100°C/h or less from And a second step of obtaining a Ni-based alloy softening material whose content is increased to 20% by volume or more, and a manufacturing method of the Ni-based alloy softening material. The technique reported in Patent Document 2 can be said to be an epoch-making technique in that a strong precipitation strengthened Ni-based alloy material can be processed/formed at low cost.
 ただし、γ’相の体積率が45体積%以上のような超強析出強化Ni基合金材(例えば、γ’相を45~80体積%析出させるNi基合金材)では、γ’相の固溶温度未満の温度(γ相とγ’相との二相共存の温度領域)で熱間鍛造する工程において、通常の鍛造装置(特別な加熱保温機構を装備していない鍛造装置)を用いた場合に鍛造プロセス中の温度低下(それによるγ’相の望まない析出)に起因して製造歩留まりが低下し易い。 However, in the case of super-strong precipitation strengthened Ni-based alloy materials with a volume ratio of γ'phase of 45% by volume or more (for example, Ni-based alloy material that precipitates γ'phase in 45 to 80% by volume), the solid content of γ'phase is In the process of hot forging at a temperature lower than the melting temperature (temperature region where two phases of γ phase and γ'coexist), a normal forging device (a forging device without a special heating and heat retaining mechanism) was used. In this case, the manufacturing yield is likely to decrease due to the temperature decrease during the forging process (their unwanted precipitation of the γ'phase).
 近年における省エネルギーおよび地球環境保護の観点から、タービンの熱効率向上を目指した主流体温度の高温化や、タービン翼の長尺化によるタービンの高出力化は、今後ますます進展するものと思われる。それは、タービン高温部材の使用環境が今後ますます厳しくなることを意味し、タービン高温部材には、更なる機械的特性の向上が要求される。一方、前述したように、工業製品の低コスト化(特に、成形加工性/成型加工性の向上、製造歩留まりの向上)は最重要課題のうちの一つである。 From the viewpoint of energy saving and global environmental protection in recent years, it is expected that the main fluid temperature will be raised to improve the thermal efficiency of the turbine, and the turbine output will be increased by lengthening the turbine blades. That means that the usage environment of the turbine high temperature member will become more severe in the future, and the turbine high temperature member is required to have further improved mechanical properties. On the other hand, as described above, cost reduction of industrial products (in particular, improvement of molding processability/molding processability and improvement of manufacturing yield) is one of the most important issues.
 一方、難加工材料の成形体/成型体を低コストで製造する技術の一つとして、金属粉末を用いた粉末冶金技術がある。 On the other hand, one of the technologies for manufacturing compacts/moldings of difficult-to-process materials at low cost is powder metallurgy technology using metal powder.
 例えば、特許文献3(米国特許第5649280)には、微細粒Ni基超合金予備成形体(例えば、固めた金属粉末予備成形体)に対して、後工程の熱処理で完全に再結晶させて均一で微小粒径の微細組織を形成するための残留ひずみを付与するように鍛造する工程と、当該鍛造材に対して、再結晶温度より高くかつγ’相ソルバス温度より低い温度において長時間のサブソルバス熱処理を施す工程と、引き続いて、当該合金材中にγ’相を析出させ分布を制御するために当該サブソルバス温度から所定の冷却速度で冷却する工程とを行って、Ni基超合金材の粒径を制御する方法が開示されている。 For example, in Patent Document 3 (US Pat. No. 5,649,280), a fine-grained Ni-base superalloy preform (for example, a solidified metal powder preform) is completely recrystallized by a heat treatment in a subsequent step to be uniform. Forging so as to give residual strain to form a fine structure with a small grain size, and a long-time subsolvus at a temperature higher than the recrystallization temperature and lower than the γ'phase solvus temperature for the forged material. Performing a heat treatment step, and subsequently performing a step of precipitating a γ′ phase in the alloy material and cooling it at a predetermined cooling rate from the subsolvus temperature in order to control the distribution, and the particles of the Ni-based superalloy material A method of controlling the diameter is disclosed.
 しかしながら、特許文献3の方法は、最終的なNi基超合金材の粒径を制御するために、鍛造しようとする予備成形体の粒径を微細化する手段として粉末冶金技術を利用しているに過ぎず、難加工材料の成形加工性/成型加工性を向上させる技術は、教示・示唆されていない。 However, the method of Patent Document 3 uses powder metallurgy as a means for refining the particle size of the preform to be forged in order to control the particle size of the final Ni-based superalloy material. However, there is no teaching or suggestion of a technique for improving the moldability/moldability of difficult-to-process materials.
 強析出強化Ni基合金材料は、たとえ粉末であっても、各粉末粒子の硬さ故に成形加工性/成型加工性が極めて良好とは言い難い。そのため、従来は、粉末冶金技術を適用する際に高温および/または高圧力の加工が必要となり、強析出強化Ni基合金部材の製造コストを劇的に低減するのは困難であった。言い換えると、もしも成形加工性/成型加工性が高く粉末冶金技術に好適なNi基合金粉末が存在すれば、強析出強化Ni基合金部材の製造コストを劇的に低減できるようになることが期待される。 Even if it is a powder, the strong precipitation strengthened Ni-based alloy material cannot be said to have extremely good moldability/moldability due to the hardness of each powder particle. Therefore, conventionally, when applying a powder metallurgy technique, high temperature and/or high pressure processing was required, and it was difficult to drastically reduce the manufacturing cost of a strong precipitation strengthening Ni-based alloy member. In other words, if there is a Ni-based alloy powder that has high formability/formability and is suitable for powder metallurgy, it is expected that the production cost of strong precipitation strengthened Ni-based alloy members will be dramatically reduced. To be done.
 本発明は、かかる問題に鑑みてなされたものであり、その目的は、強析出強化Ni基合金材料を用いながら、従来よりも成形加工性/成型加工性が良好な粉末であり、粉末冶金技術に好適なNi基合金軟化粉末および該軟化粉末の製造方法を提供することにある。 The present invention has been made in view of the above problems, and an object thereof is a powder having a better formability/formability than the conventional one while using a strong precipitation strengthened Ni-based alloy material. Another object of the present invention is to provide a softened Ni-based alloy softening powder and a method for producing the softened powder.
 (I)本発明の一態様は、Ni基合金軟化粉末であって、
前記Ni基合金軟化粉末は、母相となるγ相中に析出するγ’相の700℃における平衡析出量が30体積%以上80体積%以下となる化学組成を有し、該軟化粉末の平均粒度が5μm以上500μm以下であり、該軟化粉末の粒子が前記γ相の微細結晶の多結晶体で構成される粉末であり、
前記粒子を構成する前記γ相の微細結晶の粒界上に20体積%以上の前記γ’相が析出しており、
前記粒子の室温のビッカース硬さが370 Hv以下であることを特徴とするNi基合金軟化粉末、を提供するものである。
(I) One aspect of the present invention is a Ni-based alloy softening powder,
The Ni-based alloy softening powder has a chemical composition such that the equilibrium precipitation amount at 700° C. of the γ′ phase that precipitates in the γ phase that is the mother phase is 30% by volume or more and 80% by volume or less, and the average of the softening powder is Particle size is 5μm or more 500μm or less, the particles of the softening powder is a powder composed of a polycrystalline body of fine crystals of the γ phase,
20% by volume or more of the γ'phase is deposited on the grain boundaries of the fine crystals of the γ phase that constitute the particles,
A Ni-based alloy softening powder, characterized in that the particles have a Vickers hardness at room temperature of 370 Hv or less.
 本発明は、上記のNi基合金軟化粉末(I)において、以下のような改良や変更を加えることができる。
(i)前記化学組成は、5質量%以上25質量%以下のCr(クロム)と、0質量%超30質量%以下のCo(コバルト)と、1質量%以上8質量%以下のAl(アルミニウム)と、合計1質量%以上10質量%以下のTi(チタン)、Nb(ニオブ)およびTa(タンタル)と、10質量%以下のFe(鉄)と、10質量%以下のMo(モリブデン)と、8質量%以下のW(タングステン)と、0.1質量%以下のZr(ジルコニウム)と、0.1質量%以下のB(ホウ素)と、0.2質量%以下のC(炭素)と、2質量%以下のHf(ハフニウム)と、5質量%以下のRe(レニウム)と、0.003質量%以上0.05質量%以下のO(酸素)とを含有し、残部がNiおよび不可避不純物からなる。
(ii)前記化学組成は、前記γ’相の固溶温度が1100℃以上となる化学組成である。
(iii)前記Ni基合金軟化粉末は、前記γ’相の700℃における前記平衡析出量が45体積%以上80体積%以下となる化学組成を有する。
(iv)前記粒子の室温のビッカース硬さが350 Hv以下である。
In the present invention, the following improvements and changes can be added to the above Ni-based alloy softening powder (I).
(I) The chemical composition is 5 mass% or more and 25 mass% or less of Cr (chrome), 0 mass% to 30 mass% or less of Co (cobalt), and 1 mass% or more and 8 mass% or less of Al (aluminum). ), and a total of 1% by mass or more and 10% by mass or less of Ti (titanium), Nb (niobium) and Ta (tantalum), 10% by mass or less of Fe (iron), and 10% by mass or less of Mo (molybdenum). , 8 mass% or less W (tungsten), 0.1 mass% or less Zr (zirconium), 0.1 mass% or less B (boron), 0.2 mass% or less C (carbon), and 2 mass% or less It contains Hf (hafnium), 5 mass% or less of Re (rhenium), and 0.003 mass% or more and 0.05 mass% or less of O (oxygen), and the balance is Ni and inevitable impurities.
(Ii) The chemical composition is such that the solid solution temperature of the γ'phase is 1100°C or higher.
(Iii) The Ni-based alloy softening powder has a chemical composition such that the equilibrium precipitation amount of the γ′ phase at 700° C. is 45% by volume or more and 80% by volume or less.
(Iv) The Vickers hardness at room temperature of the particles is 350 Hv or less.
 (II)本発明の他の一態様は、上記のNi基合金軟化粉末を製造する方法であって、
前記製造方法は、
前記化学組成を有し粉末粒子が前記γ相の微細結晶の多結晶体で構成される前駆体粉末を用意する前駆体粉末用意工程と、
前記前駆体粉末に対して、前記γ’相の固溶温度以上で前記γ相の融点未満の温度(本発明では、高温と称することにする)に加熱して前記γ’相を前記γ相中に固溶させた後、当該温度から前記γ’相の前記固溶温度より低い温度まで100℃/h以下の冷却速度で徐冷する高温-徐冷熱処理を施すことにより、前記粉末粒子を構成する前記γ相の微細結晶の粒界上に前記γ’相が20体積%以上析出した前記Ni基合金軟化粉末を作製する粉末軟化高温-徐冷熱処理工程と、を有することを特徴とするNi基合金軟化粉末の製造方法、を提供するものである。
(II) Another aspect of the present invention is a method for producing the above Ni-based alloy softening powder,
The manufacturing method,
A precursor powder preparation step of preparing a precursor powder having powder particles having the above chemical composition and composed of a polycrystal of fine crystals of the γ phase,
The precursor powder is heated to a temperature not lower than the melting point of the γ phase above the solid solution temperature of the γ′ phase (in the present invention, referred to as high temperature), and the γ′ phase is referred to as the γ phase. After the solid solution, the powder particles are subjected to a high temperature-slow cooling heat treatment for gradually cooling from the temperature to a temperature lower than the solid solution temperature of the γ′ phase at a cooling rate of 100° C./h or less. A powder softening high temperature-annealing heat treatment step for producing the Ni-based alloy softening powder in which the γ'phase is deposited in an amount of 20% by volume or more on the grain boundaries of the fine crystals of the γ phase constituting the A method for producing a softening powder of Ni-based alloy is provided.
 (III)本発明の更に他の一態様は、上記のNi基合金軟化粉末を製造する方法であって、
前記製造方法は、
前記化学組成を有し粉末粒子が前記γ相の単相微細結晶の多結晶体で構成される単相前駆体粉末を用意する単相前駆体粉末用意工程と、
前記単相前駆体粉末に対して、前記γ’相の固溶温度よりも80℃低い温度以上で該固溶温度未満の温度(本発明では、亜高温と称することにする)に加熱して、当該温度から100℃/h以下の冷却速度で徐冷する亜高温-徐冷熱処理を施すことにより、前記単相前駆体粉末の粒子を構成する前記γ相の単相微細結晶の粒界上に前記γ’相が20体積%以上析出した前記Ni基合金軟化粉末を作製する粉末軟化亜高温-徐冷熱処理工程と、を有することを特徴とするNi基合金軟化粉末の製造方法、を提供するものである。
(III) Yet another aspect of the present invention is a method for producing the above Ni-based alloy softening powder,
The manufacturing method,
A single-phase precursor powder preparation step of preparing a single-phase precursor powder having a chemical composition and powder particles comprising a polycrystal of a single-phase fine crystal of the γ phase,
With respect to the single-phase precursor powder, by heating to a temperature lower than the solid solution temperature of 80° C. lower than the solid solution temperature of the γ′ phase (in the present invention, referred to as sub-high temperature). On the grain boundary of the single-phase fine crystal of the γ-phase constituting the particles of the single-phase precursor powder, a sub-high temperature-slow cooling heat treatment for gradually cooling at a cooling rate of 100° C./h or less from the temperature is performed. And a powder softening sub-high temperature-slow cooling heat treatment step for producing the Ni-based alloy softening powder in which the γ'phase is precipitated in an amount of 20% by volume or more, and a method for producing a Ni-based alloy softening powder, To do.
 (IV)本発明の更に他の一態様は、上記のNi基合金軟化粉末を製造する方法であって、
前記製造方法は、
前記化学組成を有し粉末粒子が前記γ相の単相微細結晶の多結晶体で構成される単相前駆体粉末を用意する単相前駆体粉末用意工程と、
前記単相前駆体粉末に対して、前記γ’相の固溶温度以上で前記γ相の融点未満の温度に加熱した後、当該温度から前記γ’相の前記固溶温度より低い温度まで100℃/h以下の冷却速度で徐冷する高温-徐冷熱処理を施すことにより、前記単相前駆体粉末の粒子を構成する前記γ相の単相微細結晶の粒界上に前記γ’相が20体積%以上析出した前記Ni基合金軟化粉末を作製する粉末軟化高温-徐冷熱処理工程と、を有することを特徴とするNi基合金軟化粉末の製造方法、を提供するものである。
(IV) Yet another aspect of the present invention is a method for producing the above Ni-based alloy softening powder,
The manufacturing method,
A single-phase precursor powder preparation step of preparing a single-phase precursor powder having a chemical composition and powder particles comprising a polycrystal of a single-phase fine crystal of the γ phase,
With respect to the single-phase precursor powder, after heating to a temperature lower than the melting point of the γ phase at a solid solution temperature of the γ'phase or higher, 100 to a temperature lower than the solid solution temperature of the γ'phase from the temperature. By performing a high temperature-slow cooling heat treatment for slow cooling at a cooling rate of ℃/h or less, the γ'phase is formed on the grain boundaries of the single phase fine crystal of the γ phase constituting the particles of the single phase precursor powder. And a powder softening high temperature-annealing heat treatment step for producing the Ni-based alloy softening powder precipitated in an amount of 20% by volume or more.
 本発明は、上記のNi基合金軟化粉末の製造方法(II)~(IV)において、以下のような改良や変更を加えることができる。
(v)前記前駆体粉末用意工程または前記単相前駆体粉末用意工程は、アトマイズ素工程を含む。
INDUSTRIAL APPLICABILITY In the present invention, the following improvements and changes can be added to the above-mentioned production methods (II) to (IV) for softening Ni-based alloy powder.
(V) The precursor powder preparing step or the single-phase precursor powder preparing step includes an atomizing element step.
 なお、本発明において、γ’相の700℃における平衡析出量と固溶温度およびγ相の融点(固相線温度)は、Ni基合金材料の化学組成に基づいた熱力学計算から求められる平衡析出量および温度を用いることができる。 In the present invention, the equilibrium precipitation amount of γ′ phase at 700° C., the solid solution temperature, and the melting point (solidus temperature) of the γ phase are equilibrium determined by thermodynamic calculation based on the chemical composition of the Ni-based alloy material. The amount of precipitation and the temperature can be used.
 本発明によれば、強析出強化Ni基合金材料を用いながら、従来よりも成形加工性/成型加工性が良好な粉末であり、粉末冶金技術に好適なNi基合金軟化粉末および該軟化粉末の製造方法を提供することができる。また、当該Ni基合金軟化粉末を用いて粉末冶金技術を適用することにより、高い製造歩留まりで(すなわち、従来よりも低コストで)強析出強化Ni基合金部材を提供することができるようになる。 According to the present invention, while using a strong precipitation strengthened Ni-based alloy material, a powder having better moldability/moldability than before, which is suitable for powder metallurgy, a Ni-based alloy softening powder and the softening powder A manufacturing method can be provided. Further, by applying powder metallurgy technology using the Ni-based alloy softening powder, it becomes possible to provide a strong precipitation-strengthened Ni-based alloy member with a high production yield (that is, at a lower cost than conventional). ..
析出強化Ni基合金材中のγ相とγ’相との関係を示す模式図であり、(a)γ相の結晶粒内にγ’相が析出する場合、(b)γ相の結晶粒の粒界上にγ’相が析出する場合である。It is a schematic diagram which shows the relationship between (gamma) phase and (gamma)' phase in precipitation strengthening Ni base alloy material, (a) When (gamma)' phase precipitates in the crystal grain of (g) phase, (b) The crystal grain of (gamma) phase This is the case where the γ'phase is precipitated on the grain boundaries of. 本発明に係るNi基合金軟化粉末を用いるNi基合金部材の製造方法の工程例を示すフロー図である。It is a flow figure showing an example of a process of a manufacturing method of a Ni basis alloy member using a Ni basis alloy softening powder concerning the present invention. 本発明に係る製造方法におけるNi基合金粉末の微細組織の変化例を示す模式図である。FIG. 3 is a schematic diagram showing an example of changes in the microstructure of Ni-based alloy powder in the manufacturing method according to the present invention. 本発明に係るNi基合金軟化粉末を用いるNi基合金部材の製造方法の他の工程例を示すフロー図である。FIG. 6 is a flow chart showing another example of steps of a method for manufacturing a Ni-based alloy member using the Ni-based alloy softening powder according to the present invention. 単相前駆体粉末用意工程~粉末軟化亜高温-徐冷熱処理工程におけるNi基合金粉末の微細組織の変化例を示す模式図である。FIG. 3 is a schematic diagram showing an example of changes in the microstructure of the Ni-based alloy powder in the single-phase precursor powder preparation step-powder softening sub-high temperature-annealing heat treatment step. 本発明に係るNi基合金軟化粉末を用いるNi基合金部材の製造方法の更に他の工程例を示すフロー図である。FIG. 6 is a flow chart showing still another example of the steps of the method for producing a Ni-based alloy member using the Ni-based alloy softening powder according to the present invention.
 [本発明の基本思想]
 本発明は、特許文献2(特許第5869624)に記載されたγ’相析出Ni基合金材における析出強化/軟化のメカニズムをベースにしている。図1は、析出強化Ni基合金材中のγ相とγ’相との関係を示す模式図であり、(a)γ相の結晶粒内にγ’相が析出する場合、(b)γ相の結晶粒の粒界上にγ’相が析出する場合である。
[Basic idea of the present invention]
The present invention is based on the mechanism of precipitation strengthening/softening in the γ'phase precipitation Ni-based alloy material described in Patent Document 2 (Patent No. 5869624). FIG. 1 is a schematic diagram showing a relationship between a γ phase and a γ′ phase in a precipitation strengthened Ni-based alloy material. (a) When the γ′ phase is precipitated in the crystal grains of the γ phase, (b) γ This is the case where the γ′ phase is precipitated on the grain boundaries of the crystal grains of the phase.
 図1(a)に示したように、γ相の結晶粒内にγ’相が析出する場合、γ相を構成する原子1とγ’相を構成する原子2とが整合界面3を構成する(γ相に格子整合しながらγ’相が析出する)。このようなγ’相を粒内γ’相と称する(整合γ’相と称する場合もある)。粒内γ’相は、γ相と整合界面3を構成するが故にγ相結晶粒内での転位の移動を妨げると考えられ、それにより、Ni基合金材の機械的強度を向上させていると考えられる。析出強化したNi基合金材とは、通常、図1(a)の状態を意味する。 As shown in FIG. 1A, when the γ′ phase is precipitated in the crystal grains of the γ phase, the atom 1 forming the γ phase and the atom 2 forming the γ′ phase form the matching interface 3. (The γ'phase precipitates while lattice matching with the γ phase). Such a γ'phase is referred to as an intragranular γ'phase (sometimes referred to as a matched γ'phase). The intragranular γ'phase is considered to hinder the movement of dislocations within the γ-phase crystal grains because it forms the matching interface 3 with the γ-phase, thereby improving the mechanical strength of the Ni-based alloy material. it is conceivable that. The precipitation-strengthened Ni-based alloy material usually means the state shown in FIG.
 一方、図1(b)に示したように、γ相の結晶粒の粒界上に(言い換えると、γ相の結晶粒の間に)γ’相が析出する場合、γ相を構成する原子1とγ’相を構成する原子2とは非整合界面4を構成する(γ相と格子整合しない状態でγ’相が析出する)。このようなγ’相を粒界γ’相と称する(粒間γ’相や非整合γ’相と称する場合もある)。粒界γ’相は、γ相と非整合界面4を構成するためγ相結晶粒内での転位の移動を妨げない。その結果、粒界γ’相は、Ni基合金材の強化にほとんど寄与しないと考えられる。これらのことから、Ni基合金材において、粒内γ’相の代わりに粒界γ’相を積極的に析出させれば、該合金材が軟化した状態となり成形加工性を飛躍的に向上させることができる。 On the other hand, as shown in FIG. 1B, when the γ′ phase is precipitated on the grain boundaries of the γ phase crystal grains (in other words, between the γ phase crystal grains), the atoms forming the γ phase are 1 and the atom 2 forming the γ′ phase form a non-coherent interface 4 (the γ′ phase is precipitated in a state not lattice-matched with the γ phase). Such a γ'phase is referred to as a grain boundary γ'phase (may be referred to as an intergranular γ'phase or an incoherent γ'phase). The grain boundary γ′ phase does not hinder the movement of dislocations within the γ phase crystal grain because it forms the non-coherent interface 4 with the γ phase. As a result, it is considered that the grain boundary γ'phase hardly contributes to the strengthening of the Ni-based alloy material. From these facts, in the Ni-based alloy material, if the grain boundary γ′ phase is positively deposited instead of the intragranular γ′ phase, the alloy material becomes in a softened state and the formability is dramatically improved. be able to.
 本発明は、特許文献2のように合金塊(インゴット)に対してγ相/γ’相の二相共存温度領域の熱間鍛造を行うことによって粒界γ’相を析出させるのではなく、粉末粒子がγ相の微細結晶または単相微細結晶の多結晶体で構成されるNi基合金の前駆体粉末/単相前駆体粉末を形成すること、および該前駆体粉末/単相前駆体粉末に対して所定の熱処理を施すことによって粉末粒子を構成するγ相の微細結晶の粒界上に粒界γ’相を20体積%以上析出させた軟化粉末を作製することに大きな特徴がある。当該Ni基合金前駆体粉末/単相前駆体粉末がキーポイントの一つと言える。 The present invention does not precipitate a grain boundary γ′ phase by performing hot forging in a two-phase coexisting temperature region of γ phase/γ′ phase on an alloy lump (ingot) as in Patent Document 2, Forming a precursor powder/single-phase precursor powder of a Ni-based alloy in which powder particles are composed of a polycrystal of γ-phase fine crystals or single-phase fine crystals, and the precursor powder/single-phase precursor powder A major feature of the softening powder is that the grain boundary γ′ phase is precipitated in an amount of 20% by volume or more on the grain boundaries of the fine crystals of the γ phase constituting the powder particles by subjecting the powder to a predetermined heat treatment. It can be said that the Ni-based alloy precursor powder/single-phase precursor powder is one of the key points.
 γ’相の析出には、基本的にγ’相を形成する原子の拡散・再配列が必要であるため、鋳造材のようにγ相結晶粒が大きい場合には、通常、原子の拡散・再配列の距離が短くて済むγ相結晶粒内にγ’相が優先的に析出すると考えられる。なお、鋳造材であってもγ相結晶の粒界上にγ’相が析出することを否定するものではない。 The precipitation of the γ'phase basically requires the diffusion and rearrangement of the atoms that form the γ'phase. It is considered that the γ′ phase preferentially precipitates in the γ phase crystal grains, which requires a short rearrangement distance. Even if it is a cast material, it cannot be denied that the γ'phase is precipitated on the grain boundaries of the γ-phase crystal.
 一方、γ相結晶粒が微細になると、結晶粒界までの距離が短くなる上に、結晶粒の体積エネルギーに比して粒界エネルギーが高くなることから、γ’相形成原子がγ相の結晶粒内で固相拡散して再配列するよりも、γ相の結晶粒界上を拡散して該粒界上で再配列する方がエネルギー的に有利になり優先して起こり易くなると考えられる。 On the other hand, when the γ-phase crystal grains become finer, the distance to the crystal grain boundary becomes shorter, and the grain boundary energy becomes higher than the volume energy of the crystal grain. Rather than solid-phase diffusion and rearrangement within the crystal grains, it is considered that diffusion on the crystal grain boundaries of the γ phase and rearrangement on the grain boundaries has an energy advantage and is likely to occur preferentially. ..
 ここで、γ相の結晶粒界上でのγ’相形成を促進するためには、少なくともγ’相形成原子が拡散し易い温度領域(例えば、γ’相の固溶温度近傍)においてγ相結晶粒を微細な状態に維持する(言い換えると、γ相結晶粒の粒成長を抑制する)ことが重要になる。そこで、本発明者等は、γ’相の固溶温度近傍や固溶温度以上の温度領域であってもγ相結晶粒の粒成長を抑制する技術について鋭意研究を行った。 Here, in order to promote the formation of the γ′ phase on the grain boundary of the γ phase, at least in the temperature region where the γ′ phase forming atoms easily diffuse (for example, near the solid solution temperature of the γ′ phase) It is important to maintain the crystal grains in a fine state (in other words, suppress grain growth of γ-phase crystal grains). Therefore, the present inventors have earnestly studied a technique for suppressing the grain growth of γ phase crystal grains even in the vicinity of the solid solution temperature of the γ′ phase or in the temperature region above the solid solution temperature.
 その結果、所定量の酸素成分を制御して含有させたNi基合金粉末を形成することによって、粉末粒子がγ相微細結晶の多結晶体で構成されるようになること(粉末粒子が複数のγ相微細結晶からなる、粉末粒子の内部にγ相微細結晶の粒界が存在する状態になる)を見出した。さらに、そのような粉末粒子は、γ’相の固溶温度近傍や固溶温度以上の温度まで昇温してもγ相微細結晶の粒成長を抑制できること(粉末粒子がγ相の単結晶体とはならずに多結晶体を維持する)、および当該温度から徐冷することによって、γ相微細結晶の粒界上に粒界γ’相を積極的に析出・成長させられることを見出した。本発明は当該知見に基づくものである。 As a result, by forming a Ni-based alloy powder containing a controlled amount of a predetermined amount of oxygen component, the powder particles will be composed of a polycrystalline γ-phase fine crystal (powder particles It was found that the grain boundaries of the γ-phase fine crystals exist inside the powder particles, which are composed of the γ-phase fine crystals. Furthermore, such powder particles can suppress the grain growth of γ phase fine crystals even if the temperature is raised to around the solid solution temperature of the γ′ phase or above the solid solution temperature (the powder particles are single crystal bodies of the γ phase). It was found that the grain boundary γ'phase can be positively precipitated and grown on the grain boundaries of the γ phase fine crystal by maintaining the polycrystal without changing the temperature) and gradually cooling from the temperature. .. The present invention is based on this finding.
 以下、図面を参照しながら、本発明に係る実施形態を説明する。ただし、本発明はここで取り上げた実施形態に限定されることはなく、発明の技術的思想を逸脱しない範囲で、公知技術と適宜組み合わせたり公知技術に基づいて改良したりすることが可能である。 Hereinafter, embodiments according to the present invention will be described with reference to the drawings. However, the present invention is not limited to the embodiments taken up here, and can be appropriately combined with the known technology or improved based on the known technology without departing from the technical idea of the invention. ..
 [Ni基合金軟化粉末の製造方法]
 図2は、本発明に係るNi基合金軟化粉末を用いるNi基合金部材の製造方法の工程例を示すフロー図である。図2に示したように、本発明のNi基合金軟化粉末を用いたNi基合金部材の製造方法は、概略的に、所定の化学組成を有し粉末粒子がγ相微細結晶の多結晶体で構成される前駆体粉末を用意する前駆体粉末用意工程(S1)と、該前駆体粉末に対して所定の高温-徐冷熱処理を施すことにより粒界γ’相を20体積%以上析出させたNi基合金軟化粉末を作製する粉末軟化高温-徐冷熱処理工程(S2)と、該軟化粉末を用いて粉末冶金技術により所望の形状を有する成型加工体を形成する成型加工工程(S3)と、該成型加工体に対して粒界γ’相をγ相中に固溶させる溶体化熱処理およびγ相の結晶粒内に粒内γ’相を析出させる時効熱処理を施す溶体化-時効熱処理工程(S4)と、を有する。前駆体粉末用意工程S1と粉末軟化高温-徐冷熱処理工程S2とが、本発明に係るNi基合金軟化粉末の製造方法である。
[Production method of Ni-based alloy softening powder]
FIG. 2 is a flow chart showing a process example of a method for manufacturing a Ni-based alloy member using the Ni-based alloy softening powder according to the present invention. As shown in FIG. 2, the manufacturing method of the Ni-based alloy member using the Ni-based alloy softening powder of the present invention is roughly a polycrystalline body having a predetermined chemical composition and powder particles of γ-phase fine crystals. A precursor powder preparation step (S1) for preparing a precursor powder composed of the above, and a predetermined high temperature-slow cooling heat treatment is applied to the precursor powder to precipitate 20% by volume or more of the grain boundary γ'phase. A powder softening high temperature-slow cooling heat treatment step (S2) for producing a Ni-based alloy softened powder, and a molding processing step (S3) for forming a molded body having a desired shape by powder metallurgy technology using the softened powder. A solution-aging heat treatment step of subjecting the formed body to a solution heat treatment for forming a solid solution of a grain boundary γ'phase in the γ phase and an aging heat treatment for precipitating an intragranular γ'phase in the crystal grains of the γ phase (S4), and. The precursor powder preparation step S1 and the powder softening high temperature-slow cooling heat treatment step S2 are the method for producing the Ni-based alloy softening powder according to the present invention.
 なお、前駆体粉末とは、粉末粒子がγ相微細結晶の多結晶体で構成されているが、γ相微細結晶の粒界上にγ’相が析出していない状態(少なくとも意図的には粒界γ’相を析出させていない状態)の粉末を言う。軟化粉末とは、γ相微細結晶の粒界上に粒界γ’相が20体積%以上析出した状態の粉末を言う。 Incidentally, the precursor powder, the powder particles are composed of a polycrystalline γ-phase fine crystals, γ'phase is not precipitated on the grain boundaries of the γ-phase fine crystals (at least intentionally A powder in a state where the grain boundary γ'phase is not precipitated). The softening powder refers to a powder in which 20% by volume or more of the grain boundary γ'phase is precipitated on the grain boundary of the γ phase fine crystal.
 図3は、本発明に係る製造方法におけるNi基合金粉末の微細組織の変化例を示す模式図である。まず、前駆体粉末用意工程によって用意するNi基合金前駆体粉末は、平均粒度が500μm以下の粉末であり、粉末粒子がγ相微細結晶の多結晶体からなる。厳密には前駆体粉末が形成される過程の温度履歴(例えば、冷却速度)の影響を強く受けるが、該γ相微細結晶内にγ’相(整合γ’相)が析出していないγ相微細結晶と、粒内γ’相が一部析出しているγ相微細結晶とが混在することもある。粒内γ’相が析出していないγ相微細結晶やγ相微細結晶で粒内γ’相が析出していない領域は、γ’相の過飽和状態やγ’相が形成される前の組成ゆらぎ状態になっていると考えられる。 FIG. 3 is a schematic diagram showing an example of changes in the microstructure of the Ni-based alloy powder in the manufacturing method according to the present invention. First, the Ni-based alloy precursor powder prepared in the precursor powder preparing step is a powder having an average particle size of 500 μm or less, and the powder particles are composed of a polycrystal of γ-phase fine crystals. Strictly speaking, it is strongly affected by the temperature history (eg, cooling rate) in the process of forming the precursor powder, but the γ phase (consistent γ′ phase) is not precipitated in the γ phase fine crystal. The fine crystals and the γ phase fine crystals in which the γ′ phase in the grains are partially precipitated may coexist. Intragranular γ'phase is not precipitated γ-phase fine crystals or γ-phase fine crystals in the region where intragranular γ'phase is not precipitated is the composition before the supersaturated state of γ'phase or γ'phase is formed. It is considered to be in a fluctuating state.
 また、前駆体粉末の粒子は、基本的に1粒子がγ相微細結晶の多結晶体からなるが、一部に1粒子がγ相単結晶からなるものが混在することを否定するものではない。言い換えると、前駆体粉末は、大部分の粒子がγ相微細結晶の多結晶体からなるが、γ相単結晶からなる粒子が混在する可能性もある。 In addition, the particles of the precursor powder are basically composed of a polycrystal of γ-phase fine crystals, but it cannot be ruled out that a part of the particles is composed of a γ-phase single crystal. .. In other words, in the precursor powder, most of the particles are composed of a polycrystal of gamma phase fine crystals, but particles composed of a gamma phase single crystal may be mixed.
 次に、前駆体粉末をγ’相の固溶温度以上でγ相の融点未満の温度まで加熱昇温する。加熱温度がγ’相の固溶温度以上になると、熱平衡的には全てのγ’相がγ相中に固溶してγ相単相となる。本発明においては、この段階で粉末粒子がγ相微細結晶の多結晶体からなる状態を維持する(γ相微細結晶の過剰粗大化を防止する)ことが重要である。 Next, the precursor powder is heated to a temperature above the solid solution temperature of the γ'phase and below the melting point of the γ phase. When the heating temperature is equal to or higher than the solid solution temperature of the γ'phase, in terms of thermal equilibrium, all the γ'phases are solid-dissolved in the γ phase to form the γ phase single phase. In the present invention, at this stage, it is important to maintain the powder particles in a state of being a polycrystalline body of γ-phase fine crystals (preventing excessive coarsening of the γ-phase fine crystals).
 次に、当該加熱温度から100℃/h以下の冷却速度で徐冷すると、粉末粒子のγ相微細結晶の粒界上に20体積%以上の粒界γ’相が析出した軟化粉末が得られる。軟化粉末は、粒内γ’相の析出量が十分に少ないことから析出強化のメカニズムが作用せず、成形加工性/成型加工性が飛躍的に向上した状態となる。粉末粒子の表面はγ相微細結晶の粒界の一種と見なせることから、粉末粒子の表面上に析出したγ’相も粒界γ’相と見なす。 Next, by gradually cooling from the heating temperature at a cooling rate of 100° C./h or less, a softened powder in which 20% by volume or more of the grain boundary γ′ phase is precipitated on the grain boundaries of the γ phase fine crystals of the powder particles is obtained. .. Since the softening powder has a sufficiently small amount of precipitation of the intragranular γ'phase, the mechanism of precipitation strengthening does not act, and the formability/formability is dramatically improved. Since the surface of the powder particle can be regarded as a kind of grain boundary of the γ-phase fine crystal, the γ′ phase precipitated on the surface of the powder particle is also regarded as the grain boundary γ′ phase.
 なお、図2に示したように、次に、得られた軟化粉末を用い粉末冶金技術を適用して所望形状の成型加工体を形成する(成型加工工程S3)。このとき、本発明の軟化粉末は、従来の強析出強化Ni基合金粉末に比して成型加工性が飛躍的に向上していることから、成型加工の際の温度および/または圧力を従来よりも下げることができる。これは、成型加工にあたって、装置コストおよび/またはプロセスコストを低減できることを意味する。 As shown in FIG. 2, next, the softening powder obtained is used to apply a powder metallurgy technique to form a molded body having a desired shape (molding step S3). At this time, since the softening powder of the present invention has dramatically improved molding processability as compared with the conventional strong precipitation strengthening Ni-based alloy powder, the temperature and/or pressure during the molding process can be kept higher than the conventional one. Can also be lowered. This means that the apparatus cost and/or the process cost can be reduced in the molding process.
 その後、所望形状を有する成型加工体に対して、大部分の粒界γ’相をγ相中に固溶させる(例えば、粒界γ’相を10体積%以下にする)溶体化熱処理を施し、続いてγ相の結晶粒内に粒内γ’相を30体積%以上析出させる時効熱処理を施す(溶体化-時効熱処理工程S4)。その結果、所望形状を有しかつ十分に析出強化された強析出強化Ni基合金部材が得られる。本発明の軟化粉末を用いることによる成型プロセスの容易性は、装置コストの低減、プロセスコストの低減、製造歩留まりの向上(すなわち、Ni基合金部材の製造コストの低減)につながる。 After that, the formed body having the desired shape is subjected to solution heat treatment in which most of the grain boundary γ'phase is dissolved in the γ phase (for example, the grain boundary γ'phase is set to 10% by volume or less). Then, an aging heat treatment for precipitating an intragranular γ'phase in an amount of 30% by volume or more in the crystal grains of the γ phase is performed (solution treatment-aging heat treatment step S4). As a result, a strong precipitation strengthened Ni-based alloy member having a desired shape and being sufficiently precipitation strengthened can be obtained. The ease of the molding process by using the softening powder of the present invention leads to a reduction in the device cost, a reduction in the process cost, and an improvement in the production yield (that is, a reduction in the production cost of the Ni-based alloy member).
 得られる強析出強化Ni基合金部材は、次世代のタービン高温部材(例えば、タービン動翼、タービン静翼、ロータディスク、燃焼器部材、ボイラー部材、耐熱コーティング材)として好適に利用できる。 The obtained strong precipitation strengthened Ni-based alloy member can be suitably used as a next-generation turbine high temperature member (for example, turbine rotor blade, turbine stationary blade, rotor disk, combustor member, boiler member, heat resistant coating material).
 前述したように、特許文献2の技術は、整合γ’相(粒内γ’相)を意図的に残しながら非整合γ’相(粒界γ’相、粒間γ’相)を析出させた軟化体を作製するため、精度の高い制御が必要になる。これに対し、本発明の技術は、粒内γ’相を一旦消失させた後に粒界γ’相を析出させた軟化粉末を作製する。本発明では、工業的難度の低い前駆体粉末形成工程S1と工業的難度の低い粉末軟化高温-徐冷熱処理工程S2との組合せによって軟化粉末を得られることから、特許文献2の技術よりも汎用性が高く、製造プロセス全体としての低コスト化が可能である。特に、γ’相の体積率が45体積%以上のような超強析出強化Ni基合金材料からなる軟化粉末の製造に効果的である。 As described above, the technique of Patent Document 2 intentionally leaves the coherent γ′ phase (intragranular γ′ phase) while precipitating the noncoherent γ′ phase (grain boundary γ′ phase, intergranular γ′ phase). Since a softened body is produced, highly precise control is required. On the other hand, the technique of the present invention produces a softened powder in which the intragranular γ'phase is once eliminated and then the grain boundary γ'phase is precipitated. In the present invention, since the softened powder can be obtained by the combination of the precursor powder forming step S1 with low industrial difficulty and the powder softening high temperature-slow cooling heat treatment step S2 with low industrial difficulty, it is more versatile than the technique of Patent Document 2. The cost is high and the cost of the entire manufacturing process can be reduced. In particular, it is effective for producing a softened powder made of a super strong precipitation strengthened Ni-based alloy material having a volume ratio of γ'phase of 45% by volume or more.
 以下、上記S1~S2の各工程についてより詳細に説明する。 In the following, each step of S1 to S2 above will be described in more detail.
 (前駆体粉末用意工程S1)
 本工程S1は、所定の化学組成を有する(特に、所定量の酸素成分を意図的に含有させた)Ni基合金前駆体粉末を用意する工程である。前駆体粉末を用意する方法・手法としては、基本的に従前の方法・手法を利用できる。例えば、所定の化学組成となるように原料を混合・溶解・鋳造して母合金塊(マスターインゴット)を作製する母合金塊作製素工程(S1a)と、該母合金塊から前駆体粉末を形成するアトマイズ素工程(S1b)とを行えばよい。また、必要に応じて、前駆体粉末の粒度を揃えるための分級素工程(S1c)を行ってもよい。
(Precursor powder preparation step S1)
This step S1 is a step of preparing a Ni-based alloy precursor powder having a predetermined chemical composition (in particular, intentionally containing a predetermined amount of oxygen component). As a method/method for preparing the precursor powder, basically the conventional method/method can be used. For example, a master alloy ingot preparation step (S1a) of preparing a master alloy ingot by mixing, melting, and casting raw materials so as to have a predetermined chemical composition, and forming a precursor powder from the master alloy ingot. The atomizing element process (S1b) is performed. If necessary, a classifier step (S1c) for making the particle size of the precursor powder uniform may be performed.
 酸素含有量の制御はアトマイズ素工程S1bで行うことが好ましい。アトマイズ方法は、Ni基合金中の酸素含有量を制御する以外は従前の方法・手法を利用できる。例えば、アトマイズ雰囲気中の酸素量(酸素分圧)を制御しながらのガスアトマイズ法や遠心力アトマイズ法を好ましく用いることができる。 It is preferable to control the oxygen content in the atomizing element process S1b. As the atomizing method, the conventional method/method can be used except that the oxygen content in the Ni-based alloy is controlled. For example, a gas atomizing method or a centrifugal atomizing method while controlling the oxygen amount (oxygen partial pressure) in the atomizing atmosphere can be preferably used.
 前駆体粉末における酸素成分の含有量(含有率と称する場合もある)は、0.003質量%(30 ppm)以上0.05質量%(500 ppm)以下が望ましく、0.005質量%以上0.04質量%以下がより望ましく、0.007質量%以上0.02質量%以下が更に望ましい。0.003質量%未満ではγ相微細結晶の粒成長抑制の効果が少なく、0.05質量%超含有すると最終的なNi基合金部材の機械的強度や延性を低下させる。なお、酸素原子は、粉末粒子の内部に固溶したり表面や内部で酸化物の核を生成したりしていると考えられる。 The content of the oxygen component in the precursor powder (sometimes referred to as the content rate) is preferably 0.003 mass% (30 ppm) or more and 0.05 mass% (500 ppm) or less, more preferably 0.005 mass% or more and 0.04 mass% or less. , More preferably 0.007 mass% or more and 0.02 mass% or less. If it is less than 0.003 mass %, the effect of suppressing the grain growth of γ-phase fine crystals is small, and if it exceeds 0.05 mass %, the mechanical strength and ductility of the final Ni-based alloy member are reduced. It is considered that the oxygen atoms form a solid solution inside the powder particles or generate nuclei of oxide on the surface or inside.
 強析出強化の観点および粒界γ’相粒の形成の効率化の観点から、Ni基合金の化学組成としては、γ’相の固溶温度が1020℃以上となるものを採用することが好ましく、1050℃以上となるものを採用することがより好ましく、1100℃以上となるものを採用することが更に好ましい。酸素成分以外の化学組成の詳細については後述する。 From the viewpoint of strong precipitation strengthening and the efficiency of formation of grain boundary γ'phase grains, it is preferable to adopt, as the chemical composition of the Ni-based alloy, one in which the γ'phase solid solution temperature is 1020°C or higher. It is more preferable to use a material having a temperature of 1050° C. or higher, and it is more preferable to use a material having a temperature of 1100° C. or higher. Details of the chemical composition other than oxygen components will be described later.
 前駆体粉末の粒度は、平均粒度で、5μm以上500μm以下が好ましく、10μm以上300μm以下がより好ましく、20μm以上200μm以下が更に好ましい。前駆体粉末の平均粒度が5μm未満になると、次工程S2でのハンドリング性が低下するとともに、次工程S2中に粉末粒子同士が合体し易くなって軟化粉末の平均粒度の制御が難しくなる。前駆体粉末の平均粒径が500μm超になると、後の成型加工工程の際に成型加工体の形状制御性や形状精度が低下する要因となる。前駆体粉末の平均粒度は、例えば、レーザ回折式粒度分布測定装置を用いて測定することができる。 The average particle size of the precursor powder is preferably 5 μm or more and 500 μm or less, more preferably 10 μm or more and 300 μm or less, still more preferably 20 μm or more and 200 μm or less. When the average particle size of the precursor powder is less than 5 μm, the handling property in the next step S2 is deteriorated, and the powder particles are easily coalesced with each other during the next step S2, which makes it difficult to control the average particle size of the softened powder. If the average particle size of the precursor powder exceeds 500 μm, it becomes a factor that the shape controllability and the shape accuracy of the molded product are deteriorated in the subsequent molding process. The average particle size of the precursor powder can be measured using, for example, a laser diffraction type particle size distribution measuring device.
 なお、前述したように、前駆体粉末の粒子は、基本的に1粒子がγ相微細結晶の多結晶体からなるが、粉末粒子におけるγ相微細結晶の平均結晶粒径としては5μm以上50μm以下が好ましい。また、アトマイズ法のように急速凝固によって前駆体粉末を形成した場合、通常、γ相微細結晶の粒界上にγ’相(例えば、液相から直接晶出する共晶γ’相)は析出しない。 As described above, the particles of the precursor powder basically consist of a polycrystalline body of γ-phase fine crystals, and the average grain size of the γ-phase fine crystals in the powder particles is 5 μm or more and 50 μm or less. Is preferred. Further, when the precursor powder is formed by rapid solidification as in the atomization method, normally, the γ'phase (for example, a eutectic γ'phase that directly crystallizes from the liquid phase) precipitates on the grain boundaries of the γ phase fine crystals. do not do.
 (粉末軟化高温-徐冷熱処理工程S2)
 本工程S2は、前工程S1で用意した前駆体粉末に対して、γ’相の固溶温度以上の温度に加熱してγ’相をγ相中に一旦固溶させた後、当該温度から徐冷することで粒界γ’相を生成・増加させて軟化粉末を作製する工程である。本工程中におけるγ相微細結晶の望まない粗大化をできるだけ抑制するため、徐冷開始温度は、γ相の融点未満(固相線温度未満)が好ましく、γ’相の固溶温度より35℃高い温度以下がより好ましく、γ’相の固溶温度より25℃高い温度以下が更に好ましい。
(Powder softening high temperature-slow cooling heat treatment step S2)
In this step S2, the precursor powder prepared in the previous step S1 is heated to a temperature equal to or higher than the solid solution temperature of the γ′ phase to once dissolve the γ′ phase in the γ phase, and then from the temperature. It is a step of producing a softened powder by generating and increasing the grain boundary γ′ phase by slow cooling. In order to suppress undesired coarsening of the γ-phase fine crystals during this step as much as possible, the slow cooling start temperature is preferably lower than the melting point of the γ-phase (below the solidus temperature) and 35°C higher than the solid-solution temperature of the γ'phase. The temperature is preferably higher than or equal to the high temperature, and more preferably 25° C. or higher than the solid solution temperature of the γ′ phase.
 なお、γ相の融点が「γ’相の固溶温度+35℃」や「γ’相の固溶温度+25℃」よりも低い場合は、当然のことながら「γ相の融点未満」を優先する。 If the melting point of the γ phase is lower than the “solid solution temperature of the γ′ phase +35°C” or the “solid solution temperature of the γ′ phase +25°C”, the “less than the melting point of the γ phase” naturally takes precedence. ..
 熱処理雰囲気は、Ni基合金粉末の望まない酸化(前工程S1で制御した酸素含有量を超える酸化)を防止ための非酸化性雰囲気(酸化を生じさせるような分圧の酸素を含まない雰囲気)であれば特段の限定はなく、還元性雰囲気(例えば、水素ガス雰囲気)がより好ましい。 The heat treatment atmosphere is a non-oxidizing atmosphere (an atmosphere containing no partial pressure of oxygen that causes oxidation) to prevent undesired oxidation of the Ni-based alloy powder (oxidation exceeding the oxygen content controlled in the previous step S1). If there is no particular limitation, a reducing atmosphere (for example, hydrogen gas atmosphere) is more preferable.
 また、本工程S2は、高温-徐冷熱処理の結果として粒内γ’相が完全に消失せず、わずかに存在することまでを否定するものではない。例えば、粒界γ’相が20体積%以上析出していることを前提として、粒内γ’相の存在量が10体積%以下であれば、後の成型加工工程における成型加工性を強く阻害するものではないことから許容される。粒内γ’相の存在量は、5体積%以下がより好ましく、3体積%以下が更に好ましい。 Also, in this step S2, it cannot be denied that the intragranular γ'phase does not completely disappear as a result of the high temperature-slow cooling heat treatment, and that it exists only slightly. For example, assuming that the grain boundary γ′ phase is precipitated in an amount of 20% by volume or more, if the amount of the intragranular γ′ phase is 10% by volume or less, the molding processability in the subsequent molding process step is strongly hindered. It is acceptable because it does not. The amount of the intragranular γ'phase present is more preferably 5% by volume or less, further preferably 3% by volume or less.
 ここで、特許文献2の技術においては、溶解・鋳造・鍛造プロセスで得られるNi基合金鍛造素材をγ’相の固溶温度以上に加熱昇温すると、γ相結晶の粒界移動をピン止めしていたγ’相が消失するため、γ相結晶粒の急激な粗大化が生じ易い。その結果、本工程S2のようにγ’相の固溶温度以上に加熱昇温した後に徐冷を行っても、粒界γ’相の析出・成長はほとんど促進されない。 Here, in the technique of Patent Document 2, when the Ni-based alloy forging material obtained by the melting/casting/forging process is heated to a temperature higher than the solid solution temperature of the γ′ phase, the grain boundary movement of the γ phase crystal is pinned. Since the γ′ phase that has been removed disappears, the γ-phase crystal grains are likely to suddenly become coarse. As a result, precipitation/growth of the grain boundary γ′ phase is scarcely promoted even if the material is heated to or above the solid solution temperature of the γ′ phase and then gradually cooled as in this step S2.
 これに対し、本発明においては、前駆体粉末用意工程S1で用意した前駆体粉末が、合金組成として酸素成分を従来のNi基合金材よりも多く含有している(酸素成分を多く含有するように制御されている)。そして、そのような前駆体粉末に対してγ’相の固溶温度以上の熱処理を施すと、含有する酸素原子が合金の金属原子と化合して局所的な酸化物を形成すると考えられる。 On the other hand, in the present invention, the precursor powder prepared in the precursor powder preparing step S1 contains more oxygen component as the alloy composition than the conventional Ni-based alloy material (see that it contains a large amount of oxygen component. Controlled by). Then, when such a precursor powder is subjected to a heat treatment at a solid solution temperature of the γ'phase or higher, it is considered that the contained oxygen atoms combine with the metal atoms of the alloy to form a local oxide.
 このとき形成した酸化物はγ相微細結晶の粒界移動(すなわち、γ相微細結晶の粒成長)を抑制すると考えられる。すなわち、本工程S2においてγ’相を消失させても、γ相微細結晶の粗大化を防げると考えられる。 It is considered that the oxide formed at this time suppresses the grain boundary migration of γ-phase fine crystals (that is, grain growth of γ-phase fine crystals). That is, it is considered that even if the γ'phase disappears in this step S2, the coarsening of the γ phase fine crystals can be prevented.
 析出強化Ni基合金材の強化機構は、前述したように、γ相とγ’相とが整合界面を形成することで強化に寄与するというものであり、非整合界面は強化に寄与しない。粒内γ’相(整合γ’相)の量を減少させ、粒界γ’相(粒間γ’相、非整合γ’相)の量を増加させることで、優れた成型加工性を有する軟化粉末を得ることができる。 As described above, the strengthening mechanism of the precipitation strengthened Ni-based alloy material is that it contributes to strengthening by forming a coherent interface between the γ phase and the γ′ phase, and the non-coherent interface does not contribute to strengthening. By reducing the amount of intragranular γ'phase (coherent γ'phase) and increasing the amount of grain boundary γ'phase (intergranular γ'phase, non-coherent γ'phase), it has excellent moldability. A softened powder can be obtained.
 徐冷過程における冷却速度は低くする方が粒界γ’相の析出・成長に優位となる。冷却速度は、100℃/h以下が好ましく、50℃/h以下がより好ましく、10℃/h以下が更に好ましい。冷却速度が100℃/hより高いと、粒内γ’相が優先析出して、本発明の作用効果を十分に得ることができない。 ㆍLower cooling rate in the slow cooling process is more advantageous for precipitation and growth of grain boundary γ'phase. The cooling rate is preferably 100° C./h or less, more preferably 50° C./h or less, even more preferably 10° C./h or less. If the cooling rate is higher than 100° C./h, the intragranular γ′ phase is preferentially precipitated and the effect of the present invention cannot be sufficiently obtained.
 具体的には、優れた成形加工性/成型加工性を確保するため、粒界γ’相の析出量が20体積%以上となる温度以下まで徐冷することが好ましく、粒界γ’相の析出量を30体積%以上とすることがより好ましい。このとき、粒内γ’相の析出量は10体積%以下とすることが好ましく、5体積%以下がより好ましい。γ’相の析出量は、微細組織観察および画像解析(例えば、ImageJ、米国National Institutes of Health開発のパブリックドメインソフトウェア)により測定することができる。 Specifically, in order to secure excellent moldability/moldability, it is preferable to gradually cool the grain boundary γ′ phase to a temperature at which the precipitation amount is 20% by volume or more. It is more preferable that the amount of precipitation is 30% by volume or more. At this time, the precipitation amount of the intragranular γ'phase is preferably 10% by volume or less, and more preferably 5% by volume or less. The precipitation amount of the γ′ phase can be measured by microstructural observation and image analysis (for example, ImageJ, public domain software developed by National Institutes of Health in the US).
 徐冷過程の終了温度の例示としては、γ’相固溶温度が比較的低い1020℃以上1100℃未満の場合、γ’相固溶温度から50℃以上低い温度が好ましく、γ’相固溶温度から100℃以上低い温度がより好ましく、γ’相固溶温度から150℃以上低い温度が更に好ましい。また、γ’相固溶温度が比較的高い1100℃以上の場合、徐冷過程の終了温度は、γ’相固溶温度から100℃以上低い温度が好ましく、γ’相固溶温度から150℃以上低い温度がより好ましく、γ’相固溶温度から200℃以上低い温度が更に好ましい。より具体的には、1000℃以下800℃以上の温度まで徐冷することが好ましい。 As an example of the end temperature of the slow cooling process, when the γ'phase solid solution temperature is relatively low 1020 °C or more and less than 1100 °C, a temperature lower than the γ'phase solid solution temperature by 50 °C or more is preferable, and the γ'phase solid solution A temperature lower than the temperature by 100° C. or more is more preferable, and a temperature lower than the γ′ phase solid solution temperature by 150° C. or more is further preferable. Further, when the γ'phase solid solution temperature is 1100°C or higher which is relatively high, the end temperature of the slow cooling process is preferably 100°C or more lower than the γ'phase solid solution temperature, and 150°C from the γ'phase solid solution temperature. The lower temperature is more preferable, and the temperature lower than the γ'phase solid solution temperature by 200°C or more is further preferable. More specifically, it is preferable to gradually cool to a temperature of 1000°C or lower and 800°C or higher.
 徐冷終了温度からの冷却は、冷却中の粒内γ’相の析出を抑制するため(例えば、粒内γ’相の析出量を10体積%以下とするため)冷却速度が高い方が好ましく、例えば、水冷やガス冷が好ましい。 For cooling from the slow cooling end temperature, a higher cooling rate is preferable in order to suppress precipitation of the intragranular γ'phase during cooling (for example, to set the precipitation amount of the intragranular γ'phase to 10% by volume or less). For example, water cooling or gas cooling is preferable.
 成形加工性/成型加工性の指標としては、軟化粉末の室温におけるビッカース硬さ(Hv)を採用することができる。本工程S2を行うことで得られる軟化粉末は、γ’相の700℃における平衡析出量が45体積%以上となるような超強析出強化Ni基合金材料であっても、室温ビッカース硬さが370 Hv以下のものを得ることができる。当該室温ビッカース硬さが350 Hv以下となるようにすることがより好ましく、330 Hv以下となるようにすることが更に好ましい。 The Vickers hardness (Hv) of the softened powder at room temperature can be used as an index of moldability/moldability. The softened powder obtained by performing this step S2 has a room temperature Vickers hardness even if it is a super strong precipitation strengthening Ni-based alloy material such that the equilibrium precipitation amount of the γ'phase at 700°C is 45% by volume or more. You can get less than 370 Hv. The room temperature Vickers hardness is more preferably 350 Hv or less, and further preferably 330 Hv or less.
 図4は、本発明に係るNi基合金軟化粉末を用いるNi基合金部材の製造方法の他の工程例を示すフロー図である。図4に示したように、本発明のNi基合金軟化粉末を用いたNi基合金部材の他の製造方法は、Ni基合金軟化粉末の製造方法(単相前駆体粉末用意工程S1’および粉末軟化亜高温-徐冷熱処理工程S2’)において図2の工程と異なり、成型加工工程S3と溶体化-時効熱処理工程S4とを図2の工程と同じにするものである。図5は、工程S1’~S2’におけるNi基合金粉末の微細組織の変化例を示す模式図である。 FIG. 4 is a flow chart showing another example of steps of the method for manufacturing a Ni-based alloy member using the Ni-based alloy softening powder according to the present invention. As shown in FIG. 4, another manufacturing method of the Ni-based alloy softening powder using the Ni-based alloy softening powder of the present invention is a manufacturing method of the Ni-based alloy softening powder (single-phase precursor powder preparation step S1′ and powder In the softening sub-high temperature-slow cooling heat treatment step S2'), unlike the step of FIG. 2, the forming step S3 and the solution-aging heat treatment step S4 are the same as those of FIG. FIG. 5 is a schematic diagram showing an example of changes in the microstructure of the Ni-based alloy powder in steps S1' and S2'.
 以下、上記工程S1’~S2’(すなわち、本発明に係るNi基合金軟化粉末の他の製造方法)について、図4~5を参照しながら前述した工程S1~S2との差異の部分を中心に説明する。 Hereinafter, the steps S1′ to S2′ (that is, the other method for producing the Ni-based alloy softening powder according to the present invention) will be described focusing on the difference from the steps S1 to S2 described above with reference to FIGS. Explained.
 (単相前駆体粉末用意工程S1’)
 本工程S1’は、所定の化学組成を有し粉末粒子がγ相の単相微細結晶の多結晶体で構成される単相前駆体粉末を用意する工程である。本発明において、単相前駆体粉末とは、走査型電子顕微鏡-エネルギー分散型X線分析装置(SEM-EDX)および/またはX線回折装置(XRD)での測定によってγ相単相(γ’相が検出されない)と判断できる粉末を意味する。透過型電子顕微鏡(TEM)や走査型透過電子顕微鏡(STEM)レベルの厳密性を求めるものではない。
(Single-phase precursor powder preparation step S1')
This step S1′ is a step of preparing a single-phase precursor powder having a predetermined chemical composition and powder particles composed of a single-phase microcrystalline polycrystal of γ phase. In the present invention, the single-phase precursor powder means a γ-phase single-phase (γ′) measured by a scanning electron microscope-energy dispersive X-ray analyzer (SEM-EDX) and/or an X-ray diffractometer (XRD). It means a powder that can be judged to have no phase detected). It does not require strictness at the level of transmission electron microscope (TEM) or scanning transmission electron microscope (STEM).
 本工程S1’は、工程S1と同様の母合金塊作製素工程(S1a)と、単相前駆体粉末を形成するためのアトマイズ素工程(S1’b)とを行い、必要に応じて、工程S1と同様の分級素工程(S1c)を行えばよい。アトマイズ素工程S1’bは、γ’相が生成・析出し易い温度領域(例えば、1100℃~600℃)の平均冷却速度を制御する以外は、工程S1のアトマイズ素工程S1bと同様のアトマイズ方法を利用できる。制御する平均冷却速度としては、500℃/min以上が好ましく、1000℃/min以上がより好ましく、1500℃/min以上が更に好ましく、2000℃/min以上が最も好ましい。 This step S1' includes a mother alloy ingot producing element step (S1a) similar to step S1, and an atomizing element step (S1'b) for forming a single-phase precursor powder, and if necessary, the step The classifier step (S1c) similar to S1 may be performed. The atomizing element step S1'b is the same atomizing method as the atomizing element step S1b of step S1 except that the average cooling rate in the temperature range where the γ'phase is easily generated and precipitated (eg, 1100°C to 600°C) is controlled. Is available. The average cooling rate to be controlled is preferably 500° C./min or higher, more preferably 1000° C./min or higher, further preferably 1500° C./min or higher, most preferably 2000° C./min or higher.
 工程S1’(特に、アトマイズ素工程S1’b)の結果、図5に示したようにγ相の単相微細結晶の多結晶体からなる単相前駆体粉末が得られる。単相前駆体粉末における酸素成分の含有率、平均粒度、および単相微細結晶の平均結晶粒径に関しては、工程S1で得られる前駆体粉末のそれらと同様である。 As a result of the step S1' (particularly, the atomizing element step S1'b), a single-phase precursor powder composed of a single-phase fine-crystal polycrystal of the γ phase is obtained as shown in FIG. The content of the oxygen component in the single-phase precursor powder, the average grain size, and the average crystal grain size of the single-phase fine crystals are the same as those of the precursor powder obtained in step S1.
 (粉末軟化亜高温-徐冷熱処理工程S2’)
 本工程S2’は、前工程S1’で用意した単相前駆体粉末に対して、所定の亜高温-徐冷熱処理を施すことにより粒界γ’相を20体積%以上析出させたNi基合金軟化粉末を作製する工程である。亜高温-徐冷熱処理とは、γ’相の固溶温度よりも80℃低い温度以上で該固溶温度未満の温度に加熱して、当該温度から100℃/h以下の冷却速度で徐冷する熱処理である。加熱温度(すなわち徐冷開始温度)は、γ’相の固溶温度よりも50℃低い温度以上がより好ましく、γ’相の固溶温度よりも30℃低い温度以上が更に好ましい。徐冷過程の冷却速度は、工程S2と同様に、50℃/h以下がより好ましく、10℃/h以下が更に好ましい。
(Powder softening sub-high temperature-slow cooling heat treatment step S2')
This step S2' is a Ni-based alloy in which 20 volume% or more of the grain boundary γ'phase is precipitated by subjecting the single-phase precursor powder prepared in the previous step S1' to a predetermined sub-high temperature-annealing heat treatment. This is a step of producing a softened powder. Sub-high temperature-slow cooling heat treatment is heating at a temperature 80°C lower than the solid solution temperature of the γ'phase to a temperature lower than the solid solution temperature, and then gradually cooled from that temperature at a cooling rate of 100°C/h or less. Heat treatment. The heating temperature (that is, the gradual cooling start temperature) is more preferably 50° C. or more lower than the solid solution temperature of the γ′ phase, and further preferably 30° C. or more lower than the solid solution temperature of the γ′ phase. As in step S2, the cooling rate in the slow cooling process is preferably 50° C./h or less, more preferably 10° C./h or less.
 単相前駆体粉末を用いることから、徐冷開始温度が亜高温の温度領域であっても、粒界γ’相が優先的に核生成・粒成長する(図5参照)。また、工程S2’における徐冷終了温度、徐冷終了温度からの冷却、亜高温-徐冷熱処理の結果としての粒界γ’相の析出量および粒内γ’相の存在量に関しては、工程S2で得られる軟化粉末のそれらと同様である。 Since the single-phase precursor powder is used, the grain boundary γ'phase preferentially nucleates and grows even when the slow cooling start temperature is in the sub-high temperature range (see Fig. 5). Further, regarding the gradual cooling end temperature in step S2′, the cooling from the gradual cooling end temperature, the precipitation amount of the grain boundary γ′ phase and the existing amount of the intragranular γ′ phase as a result of the sub-high temperature-gradual cooling heat treatment, It is similar to those of the softened powder obtained in S2.
 ここで、単相前駆体粉末に対する亜高温-徐冷熱処理により、工程S2で得られる軟化粉末と同様の軟化粉末が得られる理由について、少し考察する。正確なメカニズムは現段階で未解明であるが、γ相の単相微細結晶の多結晶体で構成された単相前駆体粉末が重要ポイントになっている可能性があり、次のようなモデルが考えられる。 Here, a little consideration is given to the reason why the softened powder similar to the softened powder obtained in step S2 can be obtained by the sub-high temperature-slow cooling heat treatment for the single-phase precursor powder. The exact mechanism has not been clarified at this stage, but it is possible that the single-phase precursor powder composed of a single-phase microcrystalline polycrystal of the γ phase is an important point. Can be considered.
 γ相の単相結晶にとって(γ’相が実質的に存在しない状況において)、γ’相の固溶温度よりも80℃低い温度以上で該固溶温度未満の温度(本発明では、亜高温と称している)は、γ’相の析出に関する過冷度が小さい温度領域と考えられる。また、γ相結晶内でのγ’相(すなわち粒内γ’相)の析出は、均質核生成の一種(少なくとも均質核生成に類似の現象)と考えられる。言い換えると、γ相単相結晶内において、亜高温の領域における粒内γ’相の核生成頻度は非常に小さいと考えられる。 For a single-phase crystal of the γ phase (in the situation where the γ′ phase is substantially absent), a temperature of 80° C. or more lower than the solid solution temperature of the γ′ phase and lower than the solid solution temperature (in the present invention, a sub-high temperature) Is considered to be a temperature range in which the degree of supercooling associated with the precipitation of the γ'phase is small. Precipitation of the γ'phase (that is, intragranular γ'phase) in the γ-phase crystal is considered to be a kind of homogeneous nucleation (at least a phenomenon similar to homogeneous nucleation). In other words, the nucleation frequency of the intragranular γ'phase in the sub-high temperature region in the γ-phase single-phase crystal is considered to be very low.
 一方、γ相の単相微細結晶の粒界には、前述したように、酸素原子が偏在したり微小酸化物を形成したりしていると考えられる。この場合、微細結晶の粒界は、γ’相にとって不均質核生成サイトとして作用する可能性が高いと考えられる。さらに、熱力学の観点から、不均質核生成は均質核生成よりも活性化エネルギーがはるかに低いため、過冷度が小さい状態であっても核生成頻度が十分に高くなることが知られている。 On the other hand, it is considered that oxygen atoms are unevenly distributed or fine oxides are formed in the grain boundaries of the single-phase fine crystal of the γ phase, as described above. In this case, it is considered that the grain boundaries of the fine crystals are likely to act as heterogeneous nucleation sites for the γ'phase. Furthermore, from the viewpoint of thermodynamics, since the activation energy of heterogeneous nucleation is much lower than that of homogeneous nucleation, it is known that the nucleation frequency is sufficiently high even in a state of low supercooling. There is.
 これらを総合的に勘案すると、単相前駆体粉末に対する亜高温-徐冷熱処理とは、γ’相の過冷度が小さい温度領域で均質核生成と不均質核生成とを競合させることによって、不均質核生成に起因する粒界γ’相を優先的に核生成させた後、徐冷過程において生成した核を粒成長させる熱処理になっていると考えられる。当該考察(モデル)は、粉末軟化高温-徐冷熱処理工程S2における「粒界γ’相の優先的核生成およびその後の粒界γ’相の粒成長」に対しても適用できると考えられる。 Taking these into consideration comprehensively, the sub-high temperature-slow cooling heat treatment for the single-phase precursor powder is performed by competing the homogeneous nucleation and the heterogeneous nucleation in the temperature region where the degree of supercooling of the γ′ phase is small, It is considered that the heat treatment is carried out by preferentially nucleating the grain boundary γ'phase due to the heterogeneous nucleation, and then grain-growing the nuclei generated in the slow cooling process. The consideration (model) is considered to be applicable to "preferential nucleation of grain boundary γ'phase and subsequent grain growth of grain boundary γ'phase" in the powder softening high temperature-slow cooling heat treatment step S2.
 なお、本発明は、単相前駆体粉末に対して、粉末軟化高温-徐冷熱処理工程S2を適用することを否定するものではない。図6は、本発明に係るNi基合金軟化粉末を用いるNi基合金部材の製造方法の更に他の工程例を示すフロー図である。図6に示したように、本発明のNi基合金軟化粉末を用いたNi基合金部材の当該製造方法は、Ni基合金軟化粉末の製造において、単相前駆体粉末用意工程S1’の次に、粉末軟化高温-徐冷熱処理工程S2を行うものである。成型加工工程S3と溶体化-時効熱処理工程S4とは図2の工程と同じでよい。 Note that the present invention does not deny that the powder softening high temperature-slow cooling heat treatment step S2 is applied to the single-phase precursor powder. FIG. 6 is a flow chart showing still another process example of the method for producing a Ni-based alloy member using the Ni-based alloy softening powder according to the present invention. As shown in FIG. 6, the manufacturing method of the Ni-based alloy member using the Ni-based alloy softening powder of the present invention is, in the production of the Ni-based alloy softening powder, after the single-phase precursor powder preparing step S1′. The powder softening high temperature-slow cooling heat treatment step S2 is performed. The forming step S3 and the solution heat treatment-aging heat treatment step S4 may be the same as those in FIG.
 (Ni基合金軟化粉末の化学組成)
 本発明で用いるNi基合金材料の化学組成について説明する。当該Ni基合金材料は、700℃におけるγ’相の平衡析出量が30体積%以上80体積%以下となる化学組成を有する。具体的には、質量%で、5%以上25%以下のCr、0%超30%以下のCo、1%以上8%以下のAl、TiとNbとTaの総和が1%以上10%以下、10%以下のFe、10%以下のMo、8%以下のW、0.1%以下のZr、0.1%以下のB、0.2%以下のC、2%以下のHf、および5%以下のRe、および0.003%以上0.05%以下のOを含有し、残部がNiおよび不可避不純物である化学組成が好ましい。以下、各成分について説明する。
(Chemical composition of Ni-based alloy softening powder)
The chemical composition of the Ni-based alloy material used in the present invention will be described. The Ni-based alloy material has a chemical composition such that the equilibrium precipitation amount of the γ′ phase at 700° C. is 30% by volume or more and 80% by volume or less. Specifically, in mass%, 5% or more and 25% or less of Cr, 0% or more and 30% or less of Co, 1% or more and 8% or less of Al, and the sum of Ti, Nb, and Ta is 1% or more and 10% or less. Fe of 10% or less, Mo of 10% or less, W of 8% or less, Zr of 0.1% or less, B of 0.1% or less, C of 0.2% or less, Hf of 2% or less, and Re of 5% or less, And a chemical composition containing 0.003% or more and 0.05% or less O and the balance being Ni and inevitable impurities. Hereinafter, each component will be described.
 Cr成分は、γ相中に固溶すると共に、Ni基合金材の実使用環境下で表面に酸化物被膜(Cr2O3)を形成して耐食性と耐酸化性とを向上させる効果がある。タービン高温部材へ適用するためには、5質量%以上の添加が必須である。一方、過剰の添加は有害相の生成を助長するため、25質量%以下とすることが好ましい。 The Cr component dissolves in the γ phase and has the effect of improving the corrosion resistance and oxidation resistance by forming an oxide film (Cr 2 O 3 ) on the surface under the actual use environment of the Ni-based alloy material. .. In order to apply it to a turbine high temperature member, it is necessary to add 5 mass% or more. On the other hand, since excessive addition promotes the formation of a harmful phase, it is preferably 25% by mass or less.
 Co成分は、Niに近い元素でありNiと置換する形でγ相中に固溶し、クリープ強度を向上させると共に耐食性を向上させる効果がある。さらに、γ’相の固溶温度を下げる効果もあり、高温延性を向上する。ただし、過剰の添加は有害相の生成を助長するため、0%超30質量%以下とすることが好ましい。  The Co component is an element close to Ni and forms a solid solution in the γ phase in the form of substitution with Ni, and has the effect of improving creep strength and corrosion resistance. Further, it also has the effect of lowering the solid solution temperature of the γ'phase, and improves the high temperature ductility. However, excessive addition promotes the formation of a harmful phase, so the content is preferably more than 0% and 30% by mass or less.
 Al成分は、Ni基合金の析出強化相であるγ’相を形成するための必須成分である。さらに、Ni基合金材の実使用環境下で表面に酸化物被膜(Al2O3)を形成することで耐酸化性と耐食性との向上に寄与する。所望のγ’相析出量に応じて、1質量%以上8質量%以下とすることが好ましい。 The Al component is an essential component for forming the γ'phase which is the precipitation strengthening phase of the Ni-based alloy. Furthermore, by forming an oxide film (Al 2 O 3 ) on the surface of the Ni-based alloy material in the actual use environment, it contributes to the improvement of oxidation resistance and corrosion resistance. The amount is preferably 1% by mass or more and 8% by mass or less depending on the desired amount of γ'phase precipitation.
 Ti成分、Nb成分およびTa成分は、Al成分と同様にγ’相を形成し高温強度を向上させる効果がある。また、Ti成分およびNb成分は、耐食性を向上させる効果もある。ただし、過剰の添加は有害相の生成を助長するため、Ti、NbおよびTa成分の総和を1質量%以上10質量%以下とすることが好ましい。  Ti component, Nb component and Ta component have the effect of forming γ'phase and improving high temperature strength like Al component. Further, the Ti component and the Nb component also have the effect of improving the corrosion resistance. However, since excessive addition promotes the formation of a harmful phase, it is preferable that the total amount of Ti, Nb, and Ta components is 1% by mass or more and 10% by mass or less.
 Fe成分は、Co成分やNi成分と置換することで、合金の材料コストを低減する効果がある。ただし、過剰の添加は有害相の生成を助長するため、10質量%以下とすることが好ましい。 By replacing the Fe component with the Co component and Ni component, it has the effect of reducing the material cost of the alloy. However, excessive addition promotes the formation of a harmful phase, so it is preferably made 10 mass% or less.
 Mo成分およびW成分は、γ相中に固溶して高温強度を向上させる(固溶強化する)効果があり、少なくともどちらかは添加することが好ましい成分である。また、Mo成分は、耐食性を向上させる効果もある。ただし、過剰の添加は有害相の生成を助長したり延性や高温強度を低下させたりするため、Mo成分は10質量%以下、W成分は8質量%以下とすることが好ましい。 The Mo component and W component have the effect of forming a solid solution in the γ phase to improve the high temperature strength (solid solution strengthening), and it is preferable to add at least one of them. The Mo component also has the effect of improving corrosion resistance. However, since excessive addition promotes the formation of a harmful phase or reduces ductility and high temperature strength, it is preferable that the Mo component is 10 mass% or less and the W component is 8 mass% or less.
 Zr成分、B成分およびC成分は、γ相の結晶粒界を強化して(γ相の結晶粒界に垂直な方向の引張強さを強化して)、高温延性やクリープ強度を向上させる効果がある。ただし、過剰の添加は成形加工性を悪化させるため、Zr成分は0.1質量%以下、Bは0.1質量%以下、Cは0.2質量%以下とすることが好ましい。 Zr component, B component, and C component strengthen the γ-phase grain boundaries (strengthen the tensile strength in the direction perpendicular to the γ-phase grain boundaries) and improve the high temperature ductility and creep strength. There is. However, since excessive addition deteriorates moldability, it is preferable that the Zr component is 0.1 mass% or less, B is 0.1 mass% or less, and C is 0.2 mass% or less.
 Hf成分は、耐酸化性を向上させる効果がある。ただし、過剰の添加は有害相の生成を助長するため、2質量%以下とすることが好ましい。 The Hf component has the effect of improving oxidation resistance. However, since excessive addition promotes the formation of a harmful phase, it is preferable to set the content to 2% by mass or less.
 Re成分は、γ相の固溶強化に寄与すると共に、耐食性の向上に寄与する効果がある。ただし、過剰の添加は有害相の生成を助長する。また、Reは高価な元素であるため、添加量の増加は合金の材料コストを増加するデメリットがある。よって、Reは5質量%以下とすることが好ましい。  Re component contributes to the solid solution strengthening of γ phase and also has the effect of contributing to the improvement of corrosion resistance. However, excessive addition promotes the formation of harmful phases. In addition, since Re is an expensive element, increasing the amount of addition has the demerit of increasing the material cost of the alloy. Therefore, Re is preferably 5% by mass or less.
 O成分は、通常は不純物として扱われ、できるだけ低減しようとする成分であるが、本発明においては、前述したようにγ相微細結晶の粒成長を抑制して粒界γ’相粒の形成を促進するための必須成分である。O含有量は、0.003質量%以上0.05質量%以下とすることが好ましい。 The O component is usually treated as an impurity and is a component to be reduced as much as possible, but in the present invention, as described above, the grain growth of the γ phase fine crystal is suppressed and the formation of grain boundary γ′ phase grains is suppressed. It is an essential ingredient for promotion. The O content is preferably 0.003 mass% or more and 0.05 mass% or less.
 Ni基合金材の残部成分は、Ni成分およびO成分以外の不可避不純物となる。O成分以外の不可避不純物としては、例えば、N(窒素)、P(リン)、S(硫黄)が挙げられる。 Residual components of the Ni-based alloy material become unavoidable impurities other than Ni and O components. Examples of unavoidable impurities other than the O component include N (nitrogen), P (phosphorus), and S (sulfur).
 以下、種々の実験により本発明をさらに具体的に説明する。ただし、本発明はこれらの実験に限定されるものではない。 The present invention will be described in more detail below by various experiments. However, the present invention is not limited to these experiments.
 [実験1]
 (Ni基合金の前駆体粉末PP1~PP8、単相前駆体粉末PP9~PP10の作製)
 Ni基合金の原料を混合・溶解・鋳造してマスターインゴット(10 kg)を用意した。溶解は真空誘導加熱溶解法により行った。次に、得られたマスターインゴットを再溶解し、アトマイズ雰囲気中の酸素分圧を制御しながらのガスアトマイズ法によりNi基合金粉末を作製した。
[Experiment 1]
(Preparation of Ni-based alloy precursor powders PP1 to PP8 and single-phase precursor powders PP9 to PP10)
A master ingot (10 kg) was prepared by mixing, melting, and casting the Ni-based alloy raw materials. The dissolution was performed by the vacuum induction heating dissolution method. Next, the obtained master ingot was redissolved and a Ni-based alloy powder was produced by the gas atomizing method while controlling the oxygen partial pressure in the atomizing atmosphere.
 ガスアトマイズ法によるNi基合金粉末作製において、一部の合金粉末で1100℃~600℃の平均冷却速度が500℃/min以上であることを確認した。また、500℃/min以上の平均冷却速度を確認した合金粉末に対して、SEM-EDXを用いて1000倍の倍率で粉末粒子の微細組織を観察したところ、γ’相を検知できずγ相単相であると判断した。なお、ガスアトマイズ法による合金粉末作製時に平均冷却速度を確認しなかった粉末に対しては、粉末粒子の微細組織観察を行わなかった。 In the Ni-based alloy powder preparation by the gas atomization method, it was confirmed that some alloy powders had an average cooling rate of 1100°C to 600°C of 500°C/min or more. In addition, when observing the fine structure of the powder particles with SEM-EDX at a magnification of 1000 times, it was not possible to detect the γ'phase and the γ phase It was judged to be a single phase. The fine structure of the powder particles was not observed for the powder for which the average cooling rate was not confirmed during the production of the alloy powder by the gas atomization method.
 次に、得られたNi基合金粉末を分級して粒度が25~150μmの範囲の合金粉末を選別し、Ni基合金の前駆体粉末PP1~PP8および単相前駆体粉末PP9~PP10を用意した。得られた粉末PP1~PP10の化学組成を表1に示す。 Next, the obtained Ni-based alloy powder is classified to select alloy powders having a particle size in the range of 25 to 150 μm, and Ni-based alloy precursor powders PP1 to PP8 and single-phase precursor powders PP9 to PP10 are prepared. .. Table 1 shows the chemical compositions of the obtained powders PP1 to PP10.
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
 [実験2]
 (実施例1~11および比較例1~12のNi基合金軟化粉末の作製と成型加工性評価)
 実験1で得られた前駆体粉末PP1~PP8および単相前駆体粉末PP9~PP10に対して、後述する表2に示した熱処理条件(徐冷開始温度、徐冷過程の冷却速度)で粉末軟化処理を施して、実施例1~11および比較例1~12のNi基合金軟化粉末を作製した。徐冷過程の終了温度は、比較例1,12以外は950℃とした。比較例1,12では、徐冷開始温度から室温までガス冷却によって急冷した。
[Experiment 2]
(Production of Ni-based alloy softening powders of Examples 1 to 11 and Comparative Examples 1 to 12 and evaluation of molding processability)
The precursor powders PP1 to PP8 and the single-phase precursor powders PP9 to PP10 obtained in Experiment 1 were softened under the heat treatment conditions (slow cooling start temperature, slow cooling process cooling rate) shown in Table 2 below. By performing the treatment, the Ni-based alloy softening powders of Examples 1 to 11 and Comparative Examples 1 to 12 were produced. The end temperature of the slow cooling process was 950° C. except for Comparative Examples 1 and 12. In Comparative Examples 1 and 12, gas was rapidly cooled from the slow cooling start temperature to room temperature.
 得られた各Ni基合金軟化粉末に対して、微細組織観察(粒界γ’相の析出量)および室温ビッカース硬さ測定を行い、成型加工性を評価した。 For each softening powder of Ni-based alloy obtained, microstructure observation (grain boundary γ'phase precipitation amount) and room temperature Vickers hardness were measured to evaluate the formability.
 粒界γ’相の析出量は、軟化粉末の電子顕微鏡観察および画像解析(ImageJ)により求めた。軟化粉末の室温ビッカース硬さは、10粒子をランダムに抽出し、マイクロビッカース硬度計(株式会社明石製作所、型式:MVK-E)を用いて測定した。10粒子の室温ビッカース硬さのうち、最大値と最小値とを除いた8粒子の室温ビッカース硬さの平均値を、当該軟化粉末の室温ビッカース硬さとした。成型加工性評価は、370 Hv以下の室温ビッカース硬さを「合格」と判定し、370 Hv超の室温ビッカース硬さを「不合格」と判定した。 The precipitation amount of the grain boundary γ'phase was determined by observing the softened powder with an electron microscope and image analysis (ImageJ). The room temperature Vickers hardness of the softened powder was measured by randomly extracting 10 particles and using a micro Vickers hardness meter (Akashi Seisakusho, Model: MVK-E). Of the 10 particles at room temperature Vickers hardness, the average value of the room temperature Vickers hardness of 8 particles excluding the maximum value and the minimum value was defined as the room temperature Vickers hardness of the softened powder. In the moldability evaluation, a room temperature Vickers hardness of 370 Hv or less was judged as "pass", and a room temperature Vickers hardness of more than 370 Hv was judged as "fail".
 実施例1~11および比較例1~12のNi基合金軟化粉末の諸元および評価結果を表2に示す。表2において、γ’相の700℃におけるγ’相の平衡析出量および固溶温度は、表1の合金組成から熱力学計算に基づいて求めたものである。 Table 2 shows specifications and evaluation results of the Ni-based alloy softening powders of Examples 1 to 11 and Comparative Examples 1 to 12. In Table 2, the equilibrium precipitation amount and the solid solution temperature of the γ'phase at 700°C of the γ'phase are obtained from the alloy composition of Table 1 based on thermodynamic calculation.
Figure JPOXMLDOC01-appb-T000002
Figure JPOXMLDOC01-appb-T000002
 表2に示したように、高温-徐冷熱処理における徐冷過程の開始温度および/または冷却速度が本発明の規定を外れる比較例1~7の軟化粉末は、粒界γ’相の析出量が20体積%未満であり(その代わり、粒内γ’相析出量の増加が確認され)、室温ビッカース硬さが370 Hv超である。その結果、成型加工性が不合格と判定された。高温-徐冷熱処理における徐冷開始温度(すなわち、加熱温度)が低過ぎたり、徐冷過程の冷却速度が高過ぎたりすると、粒界γ’相がほとんど析出・成長しないため、十分な成型加工性が確保できないことが確認された。 As shown in Table 2, the softening powders of Comparative Examples 1 to 7 in which the starting temperature and/or the cooling rate of the slow cooling process in the high temperature-slow cooling heat treatment were out of the range of the present invention, were the precipitation amount of the grain boundary γ'phase. Is less than 20% by volume (instead, an increase in the amount of γ'phase precipitation in grains is confirmed), and the room temperature Vickers hardness is more than 370 Hv. As a result, the moldability was judged to be unacceptable. If the slow cooling start temperature (that is, the heating temperature) in the high temperature-slow cooling heat treatment is too low, or if the cooling rate in the slow cooling process is too high, the grain boundary γ'phase hardly precipitates and grows. It was confirmed that the sex could not be secured.
 700℃におけるγ’相の平衡析出量が本発明の規定を外れる前駆体粉末PP8を用いた比較例8の軟化粉末は、γ’相の平衡析出量が30体積%未満であり、本発明が対象とする強析出強化Ni基合金材料に当てはまらない。ただし、γ’相析出量が絶対的に少ないため、従来から成形加工性/成型加工性に特段の問題はない。 The softened powder of Comparative Example 8 in which the equilibrium precipitation amount of the γ'phase at 700°C deviates from the definition of the present invention, the softening powder of Comparative Example 8 has an equilibrium precipitation amount of the γ'phase of less than 30% by volume. It does not apply to the targeted strong precipitation strengthened Ni-based alloy materials. However, since the amount of γ'phase precipitation is absolutely small, there has been no particular problem in molding processability/molding processability.
 これら比較例1~8に対し、実施例1~7の軟化粉末では、いずれも粒界γ’相の析出量が20体積%以上であり、室温ビッカース硬さが370 Hv以下である。その結果、成型加工性が合格と判定された。すなわち、本発明の作用効果が確認された。 In contrast to Comparative Examples 1 to 8, in the softened powders of Examples 1 to 7, the precipitation amount of the grain boundary γ′ phase was 20% by volume or more, and the room temperature Vickers hardness was 370 Hv or less. As a result, the moldability was judged to be acceptable. That is, the effect of the present invention was confirmed.
 また、単相前駆体粉末PP9~PP10を用いた実施例8~9の軟化粉末は、徐冷開始温度をγ’相の固溶温度未満とした亜高温-徐冷熱処理であっても、粒界γ’相の析出量が20体積%以上であり、室温ビッカース硬さが370 Hv以下である。その結果、成型加工性が合格と判定された。すなわち、本発明の作用効果が確認された。 In addition, the softened powders of Examples 8 to 9 using the single-phase precursor powders PP9 to PP10 have a grain size even if they are subjected to the sub-high temperature-annealing heat treatment in which the annealing start temperature is lower than the solid solution temperature of the γ'phase. The precipitation amount of the boundary γ'phase is 20% by volume or more, and the room temperature Vickers hardness is 370 Hv or less. As a result, the moldability was judged to be acceptable. That is, the effect of the present invention was confirmed.
 さらに、単相前駆体粉末PP9~PP10に対して高温-徐冷熱処理を適用した実施例10~11の軟化粉末も、粒界γ’相の析出量が20体積%以上であり、室温ビッカース硬さが370 Hv以下である。その結果、成型加工性が合格と判定された。すなわち、本発明の作用効果が確認された。 Further, the softened powders of Examples 10 to 11 in which the high temperature-slow cooling heat treatment was applied to the single-phase precursor powders PP9 to PP10 also had the precipitation amount of the grain boundary γ'phase of 20% by volume or more, and the room temperature Vickers hardness. Is less than 370 Hv. As a result, the moldability was judged to be acceptable. That is, the effect of the present invention was confirmed.
 一方、単相前駆体粉末PP9~PP10を用いても軟化処理における徐冷過程の開始温度または冷却速度が本発明の規定を外れる比較例9~12の軟化粉末は、粒界γ’相の析出量が20体積%未満であり、室温ビッカース硬さが370 Hv超である。その結果、成型加工性が不合格と判定された。亜高温-徐冷熱処理における徐冷開始温度が低過ぎたり、高温-徐冷熱処理における徐冷過程の冷却速度が高過ぎたりすると、粒界γ’相がほとんど析出・成長しないため、十分な成型加工性が確保できないことが確認された。 On the other hand, even if the single-phase precursor powders PP9 to PP10 were used, the softening powders of Comparative Examples 9 to 12 in which the starting temperature or the cooling rate of the slow cooling process in the softening process did not satisfy the requirements of the present invention, the precipitation of the grain boundary γ'phase was observed. The amount is less than 20% by volume, and the room temperature Vickers hardness is more than 370 Hv. As a result, the moldability was judged to be unacceptable. If the slow cooling start temperature in the sub-high temperature-slow cooling heat treatment is too low, or if the cooling rate in the slow cooling process in the high temperature-slow cooling heat treatment is too high, the grain boundary γ'phase hardly precipitates and grows, resulting in sufficient molding. It was confirmed that the workability could not be secured.
 以上の結果から、本発明に係るNi基合金軟化粉末の製造方法を適用することで、強析出強化Ni基合金材料や超強析出強化Ni基合金材料であっても、良好な成形加工性/成型加工性を示す軟化粉末を提供できることが示された。当該Ni基合金軟化粉末を用いて粉末冶金技術を適用することにより、強析出強化Ni基合金部材を低コストで提供できることが期待される。 From the above results, by applying the method for producing a Ni-based alloy softening powder according to the present invention, even if it is a strong precipitation strengthening Ni-based alloy material or a super strong precipitation strengthening Ni-based alloy material, good moldability/ It has been shown that it is possible to provide a softened powder exhibiting moldability. It is expected that a strong precipitation strengthened Ni-based alloy member can be provided at low cost by applying powder metallurgy technology using the Ni-based alloy softening powder.
 上述した実施形態や実験例は、本発明の理解を助けるために説明したものであり、本発明は、記載した具体的な構成のみに限定されるものではない。例えば、実施形態の構成の一部を当業者の技術常識の構成に置き換えることが可能であり、また、実施形態の構成に当業者の技術常識の構成を加えることも可能である。すなわち、本発明は、本明細書の実施形態や実験例の構成の一部について、発明の技術的思想を逸脱しない範囲で、削除・他の構成に置換・他の構成の追加をすることが可能である。 The above-described embodiments and experimental examples are described to help understanding of the present invention, and the present invention is not limited to the specific configurations described. For example, a part of the configuration of the embodiment can be replaced with the configuration of the technical common sense of those skilled in the art, and the configuration of the technical common sense of those skilled in the art can be added to the configuration of the embodiment. That is, in the present invention, a part of the configuration of the embodiment or the experimental example of the present specification may be deleted, replaced with another configuration, or added with another configuration without departing from the technical idea of the invention. It is possible.
 1…γ相を構成する原子、2…γ’相を構成する原子、 3…γ相とγ’相との整合界面、4…γ相とγ’相との非整合界面。 1... Atoms that make up the γ phase, 2... Atoms that make up the γ'phase, 3... Coherent interface between the γ and γ'phases, 4... Non-coherent interface between the γ and γ'phases

Claims (13)

  1.  Ni基合金軟化粉末であって、
    前記Ni基合金軟化粉末は、母相となるγ相中に析出するγ’相の700℃における平衡析出量が30体積%以上80体積%以下となる化学組成を有し、該軟化粉末の平均粒度が5μm以上500μm以下であり、該軟化粉末の粒子が前記γ相の微細結晶の多結晶体で構成される粉末であり、
    前記粒子を構成する前記γ相の微細結晶の粒界上に20体積%以上の前記γ’相が析出しており、
    前記粒子の室温のビッカース硬さが370 Hv以下であることを特徴とするNi基合金軟化粉末。
    Ni-based alloy softening powder,
    The Ni-based alloy softening powder has a chemical composition such that the equilibrium precipitation amount at 700° C. of the γ′ phase that precipitates in the γ phase that is the mother phase is 30% by volume or more and 80% by volume or less, and the average of the softening powder is Particle size is 5μm or more 500μm or less, the particles of the softening powder is a powder composed of a polycrystalline body of fine crystals of the γ phase,
    20% by volume or more of the γ'phase is deposited on the grain boundaries of the fine crystals of the γ phase that constitute the particles,
    The Ni-based alloy softening powder, wherein the particles have a Vickers hardness at room temperature of 370 Hv or less.
  2.  請求項1に記載のNi基合金軟化粉末において、
    前記化学組成は、
    5質量%以上25質量%以下のCrと、
    0質量%超30質量%以下のCoと、
    1質量%以上8質量%以下のAlと、
    合計1質量%以上10質量%以下のTi、NbおよびTaと、
    10質量%以下のFeと、
    10質量%以下のMoと、
    8質量%以下のWと、
    0.1質量%以下のZrと、
    0.1質量%以下のBと、
    0.2質量%以下のCと、
    2質量%以下のHfと、
    5質量%以下のReと、
    0.003質量%以上0.05質量%以下のOとを含有し、
    残部がNiおよび不可避不純物からなることを特徴とするNi基合金軟化粉末。
    In the Ni-based alloy softening powder according to claim 1,
    The chemical composition is
    5 mass% or more and 25 mass% or less of Cr,
    Co of more than 0 mass% and 30 mass% or less,
    1% by mass or more and 8% by mass or less of Al,
    1% by mass or more and 10% by mass or less of Ti, Nb and Ta in total,
    Fe of 10 mass% or less,
    Mo of 10 mass% or less,
    W of 8 mass% or less,
    Zr of 0.1 mass% or less,
    B of 0.1 mass% or less,
    0.2% by mass or less of C,
    2% by mass or less of Hf,
    Re of 5 mass% or less,
    Contains 0.003% by mass or more and 0.05% by mass or less of O,
    A Ni-based alloy softening powder, the balance of which is Ni and inevitable impurities.
  3.  請求項1または請求項2に記載のNi基合金軟化粉末において、
    前記化学組成は、前記γ’相の固溶温度が1100℃以上となる化学組成であることを特徴とするNi基合金軟化粉末。
    In the Ni-based alloy softening powder according to claim 1 or 2,
    The Ni-based alloy softening powder, wherein the chemical composition is such that the solid solution temperature of the γ'phase is 1100°C or higher.
  4.  請求項3に記載のNi基合金軟化粉末において、
    前記Ni基合金軟化粉末は、前記γ’相の700℃における前記平衡析出量が45体積%以上80体積%以下となる化学組成を有することを特徴とするNi基合金軟化粉末。
    In the Ni-based alloy softening powder according to claim 3,
    The Ni-based alloy softening powder has a chemical composition such that the equilibrium precipitation amount of the γ′ phase at 700° C. is 45% by volume or more and 80% by volume or less.
  5.  請求項1から請求項4のいずれか一項に記載のNi基合金軟化粉末において、
    前記粒子の室温のビッカース硬さが350 Hv以下であることを特徴とするNi基合金軟化粉末。
    The Ni-based alloy softening powder according to any one of claims 1 to 4,
    The Ni-based alloy softening powder, wherein the particles have a Vickers hardness at room temperature of 350 Hv or less.
  6.  Ni基合金軟化粉末の製造方法であって、
    前記Ni基合金軟化粉末は、母相となるγ相中に析出するγ’相の700℃における平衡析出量が30体積%以上80体積%以下となる化学組成を有し、該軟化粉末の平均粒度が5μm以上500μm以下であり、該軟化粉末の粒子が前記γ相の微細結晶の多結晶体で構成される粉末であり、
    前記粒子の室温のビッカース硬さが370 Hv以下であり、
    前記製造方法は、
    前記化学組成を有し粉末粒子が前記γ相の微細結晶の多結晶体で構成される前駆体粉末を用意する前駆体粉末用意工程と、
    前記前駆体粉末に対して、前記γ’相の固溶温度以上で前記γ相の融点未満の温度に加熱して前記γ’相を前記γ相中に固溶させた後、当該温度から前記γ’相の前記固溶温度より低い温度まで100℃/h以下の冷却速度で徐冷する高温-徐冷熱処理を施すことにより、前記前駆体粉末の粒子を構成する前記γ相の微細結晶の粒界上に前記γ’相が20体積%以上析出した前記Ni基合金軟化粉末を作製する粉末軟化高温-徐冷熱処理工程と、を有することを特徴とするNi基合金軟化粉末の製造方法。
    A method for producing a Ni-based alloy softening powder,
    The Ni-based alloy softening powder has a chemical composition such that the equilibrium precipitation amount at 700° C. of the γ′ phase that precipitates in the γ phase that is the mother phase is 30% by volume or more and 80% by volume or less, and the average of the softening powder is Particle size is 5μm or more 500μm or less, the particles of the softening powder is a powder composed of a polycrystalline body of fine crystals of the γ phase,
    Room temperature Vickers hardness of the particles is 370 Hv or less,
    The manufacturing method,
    A precursor powder preparation step of preparing a precursor powder having powder particles having the above chemical composition and composed of a polycrystal of fine crystals of the γ phase,
    With respect to the precursor powder, after heating to a temperature below the melting point of the γ phase above the solid solution temperature of the γ'phase to form a solid solution of the γ'phase in the γ phase, the temperature from the temperature By performing a high temperature-slow cooling heat treatment for gradually cooling to a temperature lower than the solid solution temperature of the γ′ phase at a cooling rate of 100° C./h or less, the fine crystals of the γ phase constituting the particles of the precursor powder are formed. A powder softening high temperature-slow cooling heat treatment step of producing the Ni-based alloy softening powder in which 20% by volume or more of the γ'phase is precipitated on a grain boundary, the method for producing a Ni-based alloy softening powder.
  7.  Ni基合金軟化粉末の製造方法であって、
    前記Ni基合金軟化粉末は、母相となるγ相中に析出するγ’相の700℃における平衡析出量が30体積%以上80体積%以下となる化学組成を有し、該軟化粉末の平均粒度が5μm以上500μm以下であり、該軟化粉末の粒子が前記γ相の微細結晶の多結晶体で構成される粉末であり、
    前記粒子の室温のビッカース硬さが370 Hv以下であり、
    前記製造方法は、
    前記化学組成を有し粉末粒子が前記γ相の単相微細結晶の多結晶体で構成される単相前駆体粉末を用意する単相前駆体粉末用意工程と、
    前記単相前駆体粉末に対して、前記γ’相の固溶温度よりも80℃低い温度以上で該固溶温度未満の温度に加熱して、当該温度から100℃/h以下の冷却速度で徐冷する亜高温-徐冷熱処理を施すことにより、前記単相前駆体粉末の粒子を構成する前記γ相の単相微細結晶の粒界上に前記γ’相が20体積%以上析出した前記Ni基合金軟化粉末を作製する粉末軟化亜高温-徐冷熱処理工程と、を有することを特徴とするNi基合金軟化粉末の製造方法。
    A method for producing a Ni-based alloy softening powder,
    The Ni-based alloy softening powder has a chemical composition such that the equilibrium precipitation amount at 700° C. of the γ′ phase that precipitates in the γ phase that is the mother phase is 30% by volume or more and 80% by volume or less, and the average of the softening powder is Particle size is 5μm or more 500μm or less, the particles of the softening powder is a powder composed of a polycrystalline body of fine crystals of the γ phase,
    Room temperature Vickers hardness of the particles is 370 Hv or less,
    The manufacturing method,
    A single-phase precursor powder preparation step of preparing a single-phase precursor powder having a chemical composition and powder particles comprising a polycrystal of a single-phase fine crystal of the γ phase,
    The single-phase precursor powder is heated to a temperature lower than the solid solution temperature at a temperature 80°C lower than the solid solution temperature of the γ'phase, and a cooling rate of 100°C/h or lower from the temperature. By subjecting the single phase precursor powder to the sub-high temperature-slow cooling heat treatment, 20% by volume or more of the γ′ phase is precipitated on the grain boundaries of the single phase fine crystal of the γ phase that constitutes the particles of the single phase precursor powder. A method for producing a Ni-based alloy softening powder, comprising: a powder softening sub-high temperature-annealing heat treatment step for producing a Ni-based alloy softening powder.
  8.  Ni基合金軟化粉末の製造方法であって、
    前記Ni基合金軟化粉末は、母相となるγ相中に析出するγ’相の700℃における平衡析出量が30体積%以上80体積%以下となる化学組成を有し、該軟化粉末の平均粒度が5μm以上500μm以下であり、該軟化粉末の粒子が前記γ相の微細結晶の多結晶体で構成される粉末であり、
    前記粒子の室温のビッカース硬さが370 Hv以下であり、
    前記製造方法は、
    前記化学組成を有し粉末粒子が前記γ相の単相微細結晶の多結晶体で構成される単相前駆体粉末を用意する単相前駆体粉末用意工程と、
    前記単相前駆体粉末に対して、前記γ’相の固溶温度以上で前記γ相の融点未満の温度に加熱した後、当該温度から前記γ’相の前記固溶温度より低い温度まで100℃/h以下の冷却速度で徐冷する高温-徐冷熱処理を施すことにより、前記単相前駆体粉末の粒子を構成する前記γ相の単相微細結晶の粒界上に前記γ’相が20体積%以上析出した前記Ni基合金軟化粉末を作製する粉末軟化高温-徐冷熱処理工程と、を有することを特徴とするNi基合金軟化粉末の製造方法。
    A method for producing a Ni-based alloy softening powder,
    The Ni-based alloy softening powder has a chemical composition such that the equilibrium precipitation amount at 700° C. of the γ′ phase that precipitates in the γ phase that is the mother phase is 30% by volume or more and 80% by volume or less, and the average of the softening powder is Particle size is 5μm or more 500μm or less, the particles of the softening powder is a powder composed of a polycrystalline body of fine crystals of the γ phase,
    Room temperature Vickers hardness of the particles is 370 Hv or less,
    The manufacturing method,
    A single-phase precursor powder preparation step of preparing a single-phase precursor powder having a chemical composition and powder particles comprising a polycrystal of a single-phase fine crystal of the γ phase,
    With respect to the single-phase precursor powder, after heating to a temperature lower than the melting point of the γ phase at a solid solution temperature of the γ'phase or higher, 100 to a temperature lower than the solid solution temperature of the γ'phase from the temperature. By performing a high temperature-slow cooling heat treatment for slow cooling at a cooling rate of ℃/h or less, the γ'phase is formed on the grain boundaries of the single phase fine crystal of the γ phase constituting the particles of the single phase precursor powder. A method for producing a Ni-based alloy softening powder, comprising: a powder softening high temperature-annealing heat treatment step of producing the Ni-based alloy softening powder precipitated in an amount of 20% by volume or more.
  9.  請求項6から請求項8のいずれか一項に記載のNi基合金軟化粉末の製造方法において、
    前記化学組成は、
    5質量%以上25質量%以下のCrと、
    0質量%超30質量%以下のCoと、
    1質量%以上8質量%以下のAlと、
    合計1質量%以上10質量%以下のTi、NbおよびTaと、
    10質量%以下のFeと、
    10質量%以下のMoと、
    8質量%以下のWと、
    0.1質量%以下のZrと、
    0.1質量%以下のBと、
    0.2質量%以下のCと、
    2質量%以下のHfと、
    5質量%以下のReと、
    0.003質量%以上0.05質量%以下のOとを含有し、
    残部がNiおよび不可避不純物からなることを特徴とするNi基合金軟化粉末の製造方法。
    The method for producing a Ni-based alloy softening powder according to any one of claims 6 to 8,
    The chemical composition is
    5 mass% or more and 25 mass% or less of Cr,
    Co of more than 0 mass% and 30 mass% or less,
    1% by mass or more and 8% by mass or less of Al,
    1% by mass or more and 10% by mass or less of Ti, Nb and Ta in total,
    Fe of 10 mass% or less,
    Mo of 10 mass% or less,
    W of 8 mass% or less,
    Zr of 0.1 mass% or less,
    B of 0.1 mass% or less,
    0.2% by mass or less of C,
    2% by mass or less of Hf,
    Re of 5 mass% or less,
    Contains 0.003% by mass or more and 0.05% by mass or less of O,
    A method for producing a Ni-based alloy softening powder, characterized in that the balance comprises Ni and inevitable impurities.
  10.  請求項6から請求項9のいずれか一項に記載のNi基合金軟化粉末の製造方法において、
    前記前駆体粉末用意工程または前記単相前駆体粉末用意工程は、アトマイズ素工程を含むことを特徴とするNi基合金軟化粉末の製造方法。
    The method for producing a Ni-based alloy softening powder according to any one of claims 6 to 9,
    The precursor powder preparation step or the single-phase precursor powder preparation step includes an atomizing element step, and a method for manufacturing a Ni-based alloy softening powder.
  11.  請求項6から請求項10のいずれか一項に記載のNi基合金軟化粉末の製造方法において、
    前記化学組成は、前記γ’相の前記固溶温度が1100℃以上となる化学組成であることを特徴とするNi基合金軟化粉末の製造方法。
    The method for producing a Ni-based alloy softening powder according to any one of claims 6 to 10,
    The method for producing a Ni-based alloy softening powder, wherein the chemical composition is a chemical composition in which the solid solution temperature of the γ′ phase is 1100° C. or higher.
  12.  請求項11に記載のNi基合金軟化粉末の製造方法において、
    前記Ni基合金軟化粉末は、前記γ’相の700℃における前記平衡析出量が45体積%以上80体積%以下となる化学組成を有することを特徴とするNi基合金軟化粉末の製造方法。
    The method for producing a Ni-based alloy softening powder according to claim 11,
    The method for producing a Ni-based alloy softening powder, wherein the Ni-based alloy softening powder has a chemical composition such that the equilibrium precipitation amount of the γ′ phase at 700° C. is 45% by volume or more and 80% by volume or less.
  13.  請求項6から請求項12のいずれか一項に記載のNi基合金軟化粉末の製造方法において、
    前記粒子の室温のビッカース硬さが350 Hv以下であることを特徴とするNi基合金軟化粉末の製造方法。
    The method for producing a Ni-based alloy softening powder according to any one of claims 6 to 12,
    The method for producing a Ni-based alloy softening powder, wherein the particles have a Vickers hardness at room temperature of 350 Hv or less.
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