WO2020108508A1 - 一种光纤型空气粒子计数传感器系统 - Google Patents

一种光纤型空气粒子计数传感器系统 Download PDF

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WO2020108508A1
WO2020108508A1 PCT/CN2019/121132 CN2019121132W WO2020108508A1 WO 2020108508 A1 WO2020108508 A1 WO 2020108508A1 CN 2019121132 W CN2019121132 W CN 2019121132W WO 2020108508 A1 WO2020108508 A1 WO 2020108508A1
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optical fiber
laser
sensor system
particle counting
type air
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PCT/CN2019/121132
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English (en)
French (fr)
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马忠杰
惠旅锋
孙永祺
吴腾飞
朱文伟
尹荣鑫
潘恺
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苏州苏信环境科技有限公司
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Publication of WO2020108508A1 publication Critical patent/WO2020108508A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N2015/1486—Counting the particles

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  • the invention belongs to the technical field of air particle counting, and particularly relates to an optical fiber type air particle counting sensor system.
  • the air particle counter is an instrument used in the field of clean room environmental monitoring. Its function is to count and analyze the number of microscopic particles in the atmosphere in the clean environment, and make a clean level judgment on the clean environment according to international standards such as ISO14644-1. . In recent years, with the increasing demand for environmental cleanliness in microelectronics, precision machinery, fine chemicals, pharmaceutical production, food production and other fields, laser air particle counters have developed rapidly.
  • the laser particle counting sensors adopt a design structure in which a light source, a detector and a detection circuit board are directly arranged on the cavity. Because the high-current components such as air pumps and solenoid valves in the terminal products will generate strong electromagnetic interference, resulting in weak photoelectric signal distortion, affecting the counting efficiency and stability of the sensor.
  • the object of the present invention is to provide an air particle counting sensor system with a simple structure and strong resistance to electromagnetic interference.
  • An optical fiber type air particle counting sensor system includes a laser emitting component and a transmitting fiber, a sensor cavity, a receiving optical fiber and a photoelectric receiving component connected in sequence
  • the laser emitting component includes The connected laser emitting component cover, laser driving board terminal, laser driving circuit board, laser, aspheric mirror and laser emitting component case, the laser driving board terminal and the laser are both provided on the laser driving circuit board, so The aspheric mirror mentioned above is arranged on the shell of the laser emitting assembly.
  • the sensor cavity includes at least one cavity structural member, and a sampling tube interface, an air outlet interface, a laser incident end cap, a cylindrical mirror, a light trap, and a concave mirror are provided on the cavity structural member , Receiving objective lens, coupling lens and scattered light receiving end cover.
  • sampling tube interface, the cavity structural member and the air outlet tube interface are sequentially connected coaxially in the X direction
  • the light traps are sequentially connected coaxially in the Y direction
  • the concave mirror, the cavity structural member, the receiving objective lens, the coupling lens, and the scattered light receiving end cap are sequentially connected coaxially in the Z direction.
  • the photoelectric receiving component includes a photoelectric receiving component cover, a photoelectric receiving signal terminal, a photoelectric receiving circuit board, a photodetector, and a photoelectric receiving component case connected in this order.
  • the photoelectric receiving signal terminal, photoelectric The detector is arranged on the photoelectric receiving circuit board.
  • the laser emitting assembly is connected to the laser incident end cover through the emitting optical fiber.
  • the photoelectric receiving component is connected to the scattered light receiving end cover through the receiving optical fiber.
  • the emitting optical fiber is connected to the cover of the laser emitting assembly.
  • the receiving optical fiber is connected to the cover of the photoelectric receiving assembly.
  • both the transmitting optical fiber and the receiving optical fiber are multimode optical fibers.
  • the beneficial effect of the present invention is that the optical fiber type air particle counting sensor system of the present invention, through the modular design of the laser emitting component and the emitting fiber, the sensor cavity, the receiving fiber and the photoelectric receiving component, is convenient for product assembly, adjustment and maintenance And maintenance, improve work efficiency; can effectively isolate the electrical connection of the sensor, laser transmission, scattered light collection and transmission, and strong anti-interference ability.
  • FIG. 1 is a system composition diagram of an optical fiber type air particle counting sensor system of the present invention.
  • FIG. 2 is a composition diagram of a laser emitting component of an optical fiber type air particle counting sensor system of the present invention.
  • FIG. 3 is a composition diagram of a sensor cavity of an optical fiber type air particle counting sensor system of the present invention.
  • FIG. 4 is a composition diagram of a photoelectric receiving component of an optical fiber type air particle counting sensor system of the present invention.
  • FIG. 5 is a block diagram of a laser driving circuit of an optical fiber type air particle counting sensor system of the present invention.
  • FIG. 6 is a block diagram of a photoelectric receiving circuit of an optical fiber type air particle counting sensor system of the present invention.
  • 1-laser emitting assembly 2-emitting fiber, 3-sensor cavity, 4-receiving fiber, 5-photoelectric receiving assembly, 101-laser emitting assembly cover, 102-laser drive board terminal, 103-laser driving circuit Plate, 104-laser, 105-laser emitting module housing, 106-aspheric mirror, 301-cavity structure, 302-sampling tube interface, 303-vent tube interface, 304-laser incident end cap, 305-cylindrical mirror, 306-light trap, 307-concave mirror, 308-receiving objective lens, 309-coupling lens, 310-scattered light receiving end cover, 501-photoelectric receiving component cover, 502-photoelectric receiving signal terminal, 503-photoelectric receiving circuit board, 504-photodetector, 505-photoelectric receiver assembly shell.
  • a fiber-optic air particle counting sensor system a laser emitting component 1 and emitting light 2, a sensor cavity 3, a receiving optical fiber 4, a photoelectric receiving component 5 in order Connected, in which the transmitting optical fiber 2 and the receiving optical fiber 4 are all multi-mode optical fibers.
  • the laser emitting assembly 1 is formed by sequentially connecting a laser emitting assembly cover 101, a laser driving board terminal 102, a laser driving circuit board 103, a laser 104, an aspheric mirror 106, and a laser emitting assembly housing 105.
  • the laser drive board terminal 102 and the laser 104 are provided on the laser drive circuit board 103, and the aspheric mirror 106 is provided on the laser emitting module case 105.
  • the sensor cavity 3 is composed of a cavity structural member 301, which is provided with a sampling tube interface 302, an air outlet tube interface 303, a laser incident end cap 304, and a cylindrical surface
  • the sampling tube interface 302, the cavity structure 301, and the air outlet interface 303 are sequentially connected coaxially in the X direction; the laser incident end cap 304, the cylindrical mirror 305, the cavity structure 301, and the light trap 306 are sequentially connected coaxially in the Y direction ;
  • the concave mirror 307, the cavity structural member 301, the receiving objective lens 308, the coupling lens 309, and the scattered light receiving end cap 310 are sequentially connected coaxially in the Z direction.
  • the photoelectric receiving module 5 passes the photoelectric receiving module cover 501, the photoelectric receiving signal terminal 502, the photoelectric receiving circuit board 503, the photodetector 504, and the photoelectric receiving module case 505 in this order After being connected, the photoelectric receiving signal terminal 502 and the photodetector 504 are provided on the photoelectric receiving circuit board 503; wherein, the photodetector 504 uses a photodiode.
  • the laser drive circuit board is powered by 12V DC, converts the DC power to a constant current output, and then performs constant current drive on the laser.
  • the light beam is fine and bright, and the sensor counting effect is better.
  • the photoelectric receiving circuit board includes a reverse bias circuit, which is a reverse bias voltage for the photodetector 504.
  • the photodetector in this solution uses a photodiode; the current from the photodiode The signal is converted into a changed voltage signal by current and voltage conversion (I/V conversion), and then pre-amplified about 20 times, and then passed through a low-pass filter circuit to filter out the interference caused by background noise and then sent to the signal output Terminal. So far, the air particle scattered light signal has completed the conversion of the photoelectric signal, which is convenient for the development and application of subsequent products.

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  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
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Abstract

一种光纤型空气粒子计数传感器系统，属于空气粒子计数技术领域。该光纤型空气粒子计数传感器系统包括依次相连的激光发射组件（1）与发射光纤（2）、传感器腔体（3），接收光纤（4）和光电接收组件（5）；激光发射组件（1）包括依次连接的激光发射组件盖（101）、激光驱动板端子（102）、激光驱动电路板（103）、激光器（104）、非球面镜（106）、激光发射组件壳（105）依次连接而成，激光驱动板端子（102）和激光器（104）均设置在激光驱动电路板（103）上，非球面镜（106）设置在激光发射组件壳（105）上。该光纤型空气粒子计数传感器系统，通过模块化设计，便于装配、调节、维修及维护，提高工作效率；能够将传感器的电气连接、激光传输、散射光收集与传输有效地隔离，抗干扰能力强。

Description

一种光纤型空气粒子计数传感器系统
本申请要求了申请日为2018年11月29日，申请号为201811443269.1的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本发明属于空气粒子计数技术领域，特别是涉及一种光纤型空气粒子计数传感器系统。
背景技术
空气粒子计数器是用于洁净室环境监测领域的仪器，其功能是对洁净环境中大气中微观粒子的个数进行统计和分析，并根据ISO14644-1等国际标准对洁净环境做出洁净等级的判断。近年来，随着微电子、精密机械、精细化工、医药生产、食品生产等领域对环境洁净度需求的不断攀升，激光空气粒子计数器有了快速的发展。
作为激光空气粒子计数器的核心部件，激光空气粒子计数传感器的需求也在不断扩大。国内外各厂家不断优化传感器结构设计，提高传感器性能。在保证计数性能的前提下，提高稳定性、设计小型化、微型化、模块化、维修简单化成为了激光粒子计数传感器的重要发展方向。
目前，激光粒子计数传感器大多采用直接在腔体上设置光源、探测器及探测电路板的设计结构。由于终端产品中气泵、电磁阀等大电流零部件会产生很强的电磁干扰，导致微弱的光电信号失真，影响传感器的计数效率及稳定性。
发明内容
本发明的目的在于提供一种结构简单，抗电磁干扰能力强的空气粒子计数传感器系统。
为达到上述目的，本发明提供如下技术方案：一种光纤型空气粒子计数传感器系统包括依次相连的激光发射组件与发射光纤、传感器腔体，接收光纤和光电接收组件，所述激光发射组件包括依次连接的激光发射组件盖、激光驱动板端子、激光驱动电路板、激光器、非球面镜和激光发射组件壳，所述的激光 驱动板端子和所述激光器均设置在所述激光驱动电路板上，所述的非球面镜设置在激光发射组件壳上。
进一步地，所述的传感器腔体包括至少一个腔体结构件，在所述腔体结构件上设置有采样管接口、出气管接口、激光入射端盖、柱面镜、光陷阱、凹面反射镜、接收物镜、耦合透镜和散射光接收端盖。
进一步地，所述采样管接口、所述腔体结构件和所述出气管接口在X方向共轴依次连接，所述激光入射端盖、所述柱面镜、所述腔体结构件和所述光陷阱在Y方向共轴依次连接，所述凹面反射镜、所述腔体结构件、所述接收物镜、所述耦合透镜和所述散射光接收端盖在Z方向共轴依次连接。
进一步地，所述的光电接收组件包括依次连接的光电接收组件盖、光电接收信号端子、光电接收电路板、光电探测器和光电接收组件壳依次连接而成，所述的光电接收信号端子、光电探测器设置在所述光电接收电路板上。
进一步地，所述激光发射组件通过所述发射光纤连接在所述激光入射端盖上。
进一步地，所述光电接收组件通过所述接收光纤连接在所述散射光接收端盖上。
进一步地，所述发射光纤连接在所述激光发射组件盖上。
进一步地，所述接收光纤连接在所述光电接收组件盖上。
进一步地，所述的发射光纤和所述接收光纤均为多模光纤。
本发明的有益效果在于：本发明涉及的光纤型空气粒子计数传感器系统，通过激光发射组件与发射光纤、传感器腔体，接收光纤和光电接收组件的模块化设计，便于产品的装配、调节、维修及维护，提高工作效率；能够将传感器的电气连接、激光传输、散射光收集与传输有效地隔离，抗干扰能力强。
上述说明仅是本发明技术方案的概述，为了能够更清楚了解本发明的技术手段，并可依照说明书的内容予以实施，以下以本发明的较佳实施例并配合附图详细说明如后。
附图说明
图1是本发明的一种光纤型空气粒子计数传感器系统的系统组成图。
图2是本发明的一种光纤型空气粒子计数传感器系统的激光发射组件组成图。
图3是本发明的一种光纤型空气粒子计数传感器系统的传感器腔体组成图。
图4是本发明的一种光纤型空气粒子计数传感器系统的光电接收组件组成图。
图5是本发明的一种光纤型空气粒子计数传感器系统的激光驱动电路框图。
图6是本发明的一种光纤型空气粒子计数传感器系统的光电接收电路框图。
图中，1-激光发射组件，2-发射光纤，3-传感器腔体，4-接收光纤，5-光电接收组件，101-激光发射组件盖，102-激光驱动板端子，103-激光驱动电路板，104-激光器，105-激光发射组件壳，106-非球面镜，301-腔体结构件，302-采样管接口，303-出气管接口，304-激光入射端盖，305-柱面镜，306-光陷阱，307-凹面反射镜，308-接收物镜，309-耦合透镜，310-散射光接收端盖，501-光电接收组件盖，502-光电接收信号端子，503-光电接收电路板，504-光电探测器，505-光电接收组件壳。
具体实施方式
下面结合附图和实施例，对本发明的具体实施方式作进一步详细描述。以下实施例用于说明本发明，但不用来限制本发明的范围。
参照图1-图2，在本发明一较佳实施例中的一种光纤型空气粒子计数传感器系统，激光发射组件1与发射光2、传感器腔体3，接收光纤4，光电接收组件5依次相连，其中发射光纤2、接收光纤4均采用多模光纤。激光发射组件1通过激光发射组件盖101、激光驱动板端子102、激光驱动电路板103、激光器104、非球面镜106、激光发射组件壳105依次连接而成。激光驱动板端子102、激光器104设置在激光驱动电路板103上，非球面镜106设置在激光发射组件壳105上。
在上述实施例中，如图3所示，传感器腔体3由腔体结构件301组成，腔体结构件301上设置有采样管接口302、出气管接口303、激光入射端盖304、 柱面镜305、光陷阱306、凹面反射镜307、接收物镜308、耦合透镜309、散射光接收端盖310。采样管接口302、腔体结构件301、出气管接口303在X方向共轴依次连接；激光入射端盖304、柱面镜305、腔体结构件301、光陷阱306在Y方向共轴依次连接；凹面反射镜307、腔体结构件301、接收物镜308、耦合透镜309、散射光接收端盖310在Z方向共轴依次连接。
在上述实施例中，如图1和图4所示，的光电接收组件5通过光电接收组件盖501、光电接收信号端子502、光电接收电路板503、光电探测器504、光电接收组件壳505依次连接而成，的光电接收信号端子502、光电探测器504设置在光电接收电路板503上；其中，光电探测器504采用光电二极管。
在上述实施例中，如图2和图5所示，激光驱动电路板由12V直流供电，将直流电转换为恒流输出，再对激光器做恒流驱动，对于150mW的激光器，一般电流为105mA至120mA时，其光束细亮，传感器计数效果较好。
在上述实施例中，如图4和图6所示，光电接收电路板包括反偏电路，为光电探测器504反向偏压，本方案中的光电探测器采用光电二极管；光电二极管出来的电流信号，经过电流与电压转换(I/V转换)变成变化的电压信号，然后进行前置放大约20倍，再经低通滤波电路，滤除背景噪声带来的干扰，然后送到信号输出端子。至此，空气粒子散射光信号完成了光电信号的转换，便于后续产品的开发及应用。
以上所述实施例的各技术特征可以进行任意的组合，为使描述简洁，未对上述实施例中的各个技术特征所有可能的组合都进行描述，然而，只要这些技术特征的组合不存在矛盾，都应当认为是本说明书记载的范围。
以上所述实施例仅表达了本发明的几种实施方式，其描述较为具体和详细，但并不能因此而理解为对发明专利范围的限制。应当指出的是，对于本领域的普通技术人员来说，在不脱离本发明构思的前提下，还可以做出若干变形和改进，这些都属于本发明的保护范围。因此，本发明专利的保护范围应以所附权利要求为准。

Claims (9)

  1. 一种光纤型空气粒子计数传感器系统，其特征在于：所述光纤型空气粒子计数传感器系统包括依次相连的激光发射组件与发射光纤、传感器腔体，接收光纤和光电接收组件，所述激光发射组件包括依次连接的激光发射组件盖、激光驱动板端子、激光驱动电路板、激光器、非球面镜和激光发射组件壳，所述的激光驱动板端子和所述激光器均设置在所述激光驱动电路板上，所述的非球面镜设置在激光发射组件壳上。
  2. 根据权利要求1所述的光纤型空气粒子计数传感器系统，其特征在于：所述的传感器腔体包括至少一个腔体结构件，在所述腔体结构件上设置有采样管接口、出气管接口、激光入射端盖、柱面镜、光陷阱、凹面反射镜、接收物镜、耦合透镜和散射光接收端盖。
  3. 根据权利要求2所述的光纤型空气粒子计数传感器系统，其特征在于：所述采样管接口、所述腔体结构件和所述出气管接口在X方向共轴依次连接，所述激光入射端盖、所述柱面镜、所述腔体结构件和所述光陷阱在Y方向共轴依次连接，所述凹面反射镜、所述腔体结构件、所述接收物镜、所述耦合透镜和所述散射光接收端盖在Z方向共轴依次连接。
  4. 根据权利要求1所述的光纤型空气粒子计数传感器系统，其特征在于：所述的光电接收组件包括依次连接的光电接收组件盖、光电接收信号端子、光电接收电路板、光电探测器和光电接收组件壳依次连接而成，所述的光电接收信号端子、光电探测器设置在所述光电接收电路板上。
  5. 根据权利要求3所述的光纤型空气粒子计数传感器系统，其特征在于：所述激光发射组件通过所述发射光纤连接在所述激光入射端盖上。
  6. 根据权利要求3所述的光纤型空气粒子计数传感器系统，其特征在于：所述光电接收组件通过所述接收光纤连接在所述散射光接收端盖上。
  7. 根据权利要求1所述的光纤型空气粒子计数传感器系统，其特征在于：所述发射光纤连接在所述激光发射组件盖上。
  8. 根据权利要求4所述的光纤型空气粒子计数传感器系统，其特征在于：所述接收光纤连接在所述光电接收组件盖上。
  9. 根据权利要求1-8任一项所述的一种光纤型空气粒子计数传感器系统，其特征在于，所述的发射光纤和所述接收光纤均为多模光纤。
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