WO2020106027A1 - Real-time device for counting foreign materials in fluid by using filter medium - Google Patents

Abstract

The present invention proposes a real-time device for counting foreign materials in a fluid by using a filter medium, the device comprising: an optical unit (100); an optical housing (200) formed in a hollow shape and receiving the optical unit (100) thereinto; a light radiation unit (300) provided under the optical housing (200) and radiating light toward filter paper (510); a filter medium support porous plate (520) provided under the light radiation unit (300), supporting and fixing the filter paper (510) to allow the filter paper (510) to be stably placed thereon, and having multiple holes; a detector holder (500) for fixing the filter medium support porous plate (520); a sample fluid suctioning hole (530) disposed at a fluid introduction region (531) above the filter medium support porous plate (520) of the detector holder (500); a sample fluid discharging hole (540) disposed at a fluid discharge region (541) under the filter medium support porous plate (520) of the detector holder (500); and a fluid suctioning pump (570) capable of suctioning and discharging a sample fluid, whereby time-specific foreign material changes of a sample can be observed.

Description

Real-time foreign material counting device in fluid using filter media

The present invention relates to a real-time foreign matter counting device in a fluid using a filter medium, and more specifically, to a system for counting the surface of the filter medium at the same time as filtration to count foreign matter through real-time monitoring and observation coefficients in the case of gas, and light in the case of liquids The present invention relates to a real-time foreign material counting device using a filter material that stops counting when a liquid passes through and controls the passage of a liquid when the refraction is too severe to count simultaneously with filtration.

In general, as the industry advances, the need to control particles, such as dust, increases not only in the office environment but also in the production site, and the production site is always kept clean to prevent particles from adversely affecting the product. A Clean Room was introduced.

Such a clean room is a space where pollution control is performed by controlling the concentration of airborne particles within the specified cleanliness level limit, and controls and manages the environment composition such as temperature, humidity, room pressure, illuminance, noise, and vibration as needed. It refers to the space where it is performed, and is currently being introduced and operated in various industries such as semiconductors, LCD displays, aviation, pharmaceuticals, hospitals, and food.

In particular, in the high-tech industry, which includes nano-level highly precise processes such as semiconductor manufacturing processes and LCD display manufacturing processes, even small environmental conditions at the manufacturing site can significantly affect the quality of products, which is required in clean rooms. Cleanliness is increasingly being strengthened. For example, in semiconductor manufacturing processes, pattern defects caused by particles oscillating from an automation device or the like deposited on a wafer surface have been pointed out as a major cause of a decrease in product yield.

As described above, when particles are present at a site where a product is manufactured, it may fall into the product during the manufacturing process and cause fatal product defects. These particles are produced at the ceiling, walls, floors, and Accumulated in measurement equipment, various tools, etc., attached to the worker's clothing surface, causing movement of airflow due to movement of robots, workers, products, and spatial temperature, accumulating on the surface of workers, objects, or adjacent parts This is because the surface particles that have been inverted are contaminated and cause product defects.

Therefore, there is a need for a method to enable an inspector to accurately and reliably detect foreign substances and to count foreign substances.

As a prior document related to this, U.S. Patent No. 552538, published on October 19, 1993 (hereinafter referred to as [Patent Document 1]) discloses a particle counting method and apparatus on the surface. The above [Patent Document 1] relates to a particle counting method and apparatus on a surface, and a configuration of a particle counter is disclosed in which particles are filtered through a laser diode light source counter and a filter when the sample surface is sucked through an air pump through a scanner.

In addition, Korean Patent Registration No. 10-1042143, Announcement Date of June 16, 2011 (hereinafter referred to as [Patent Document 2]) discloses a foreign material inspection device for a flat panel display device. [Patent Document 2] relates to a foreign material inspector of a flat panel display device, which is disposed on the side of the substrate and receives light reflected from the foreign material irradiated from the photometric generating unit and the photometric generating unit that irradiates light parallel to the upper surface of the substrate In order to measure the size of the foreign material by detecting the intensity of the light received on the imaging lens and the imaging lens disposed on the substrate, a flat panel display comprising imaging means disposed on the imaging lens. It shows the foreign body inspection machine of the device.

In addition, Korean Patent Registration No. 10-1809009, Announcement Date of December 15, 2017 (hereinafter referred to as [Patent Document 3]) discloses a surface foreign matter detector of a transparent or translucent film.

[Patent Document 3] relates to a surface foreign matter detector of a transparent or translucent film. As shown in FIG. 3, the surface foreign matter detector of a transparent or translucent film includes an optical unit and an optical housing accommodating the optical unit from the inside. , A light emitting unit for irradiating light with the film, and a film holder made of a light-absorbing material capable of providing a seating surface so that the film can be seated on the top and capable of absorbing light or reflecting a predetermined ratio or less, , It shows that the holder supporter is manufactured using a material capable of generating a certain amount of static electricity between foreign substances floating in the surrounding ball to prevent the foreign substances floating or scattering in the surrounding working space from being conducted to the film side.

However, the conventional method and apparatus for counting particles on the surface of [Patent Document 1] is to count the particles on the surface, and has a problem that the original shape or shape of the particles is unknown.

In addition, the foreign material inspection machine of [Patent Document 2] is difficult to have sufficient reliability in the foreign material inspection accuracy, and has a problem in that the inspection results fluctuate depending on the working environment requirements around the inspection site.

In addition, the foreign matter detector of [Patent Document 3] had a problem in that it was difficult to investigate the occurrence of foreign matters according to various condition changes because it was impossible to observe the foreign matter change of the inspection object by time.

In addition, when observing the foreign matter of the inspection object, there was a hassle of checking it with a microscope after detaching it from the device, and in the process of separating and moving the filter from the device, the foreign material adheres to the filter and generates an error in the experiment. It is difficult to transport the sample when the distance from the back counting device is far away. In particular, in the case of a dangerous substance such as a chemical agent to be filtered, there is a problem that the transport of the sample is dangerous or a lot of attention and cost are required to maintain safety.

[Advanced technical literature]

[Patent Document]

(Patent Document 1) [Patent Document 1] U.S. Patent Registration No. 552538, Publication Date 1993.10.19.

(Patent Document 2) [Patent Document 2] Korean Registered Patent No. 10-1042143, Announcement Date 2011. 06. 16.

(Patent Document 3) [Patent Document 3] Korean Registered Patent No. 10-1809009, Announcement Date 2017. 12. 15.

In the present invention, as developed to solve this conventional problem, the surface of the filter medium is counted simultaneously with filtration, real-time monitoring and observation counting is possible in the case of gas, and in the case of liquids, light refraction is severe and counting simultaneously with filtration. The object of the present invention is to provide a fluid real-time foreign material counting device using a filter medium that stops counting when a liquid passes by controlling the passage of the liquid and proceeds counting when stopping the passage of the liquid when it is not possible.

According to an aspect of the present invention for achieving the above object, a real-time foreign matter counting device in a fluid using a filter medium, the optical unit 100; An optical housing 200 accommodating the optical unit 100 therein and comprising a through phenomenon; A light irradiation unit 300 provided on the lower side of the optical housing 200 to irradiate light toward the filter paper 510; It is provided on the lower side of the light irradiation unit 300, the filter paper 510 is fixed to support the filter paper 510 so that it can be seated on the upper, and the filter medium supporting perforated plate 520 having a plurality of holes; A detector holder 500 for fixing the filter medium supporting perforated plate 520; A sample fluid inlet 530 disposed in the fluid inflow region 531 of the upper side of the perforated plate 520 of the filter holder of the detector holder 500; And a sample fluid outlet (540) disposed in the fluid discharge area (541) below the filter medium supporting perforated plate (520) of the detector holder (500). to provide.

Preferably, it is characterized in that it is possible to observe the change in the foreign matter of the sample over time by further including a fluid suction pump 570 to suck and discharge the sample fluid in real time.

More preferably, when the sample fluid is a liquid, it is characterized by controlling the passage of the liquid through the fluid suction pump 570 to stop the counting when the liquid passes, and to advance the counting when the liquid is stopped.

In addition, preferably, the detector holder 500 is composed of a top transparent cover 550 to count foreign matter in the optical unit 100, the side of the detector holder 500 is a metering irradiation unit It is characterized in that it is composed of a side transparent cover 560 to irradiate light from the side.

Also, preferably, it is possible to observe the change in the foreign material of the sample in real time with the sample fluid; When the counting is terminated, the fluid inlet 530 for introducing the sample fluid and the fluid outlet 540 for discharging the sample fluid are blocked with a plug to store a foreign material sample or move for analysis.

Also preferably, the detector holder 500 is provided with a fluid inlet 530 in the fluid inlet region 531; The fluid outlet 540 is disposed in the fluid discharge area 541 and the positions of the fluid inlet 530 and the fluid outlet 540 may be selectively configured according to the type of sample fluid; It is characterized by counting the surface of the filter medium at the same time as filtration.

In addition, preferably, the filter paper is replaced with a filter material using a membrane filter, so that foreign matter larger than the hole can be collected and collected, and at the same time as the process of collecting particles, the collected particles are automatically counted. do.

In addition, preferably, the filter paper is replaced by using a filter medium so that particles contained in the fluid adhere to the surface of the plate material so that they can be counted, and at the same time as the process of collecting particles, the collected particles are automatically counted. do.

In addition, preferably, it is characterized in that the plate is made of a material similar to the surface of the product to be protected to prevent defects by predicting the effect on the product.

In addition, preferably, it is characterized in that by coating the pressure-sensitive adhesive on the plate material to increase the efficiency of collecting the particles contained in the fluid.

In the present invention, due to the real-time foreign matter counting device in the fluid using the filter medium, first, the foreign matter change in the sample can be observed over time by counting the surface of the filter medium at the same time as filtration without separating the filtration device, and secondly, the gas is monitored in real time. And observation count is possible. Third, in the case of liquids, counting can be stopped by counting by stopping the counting when the liquid passes and counting when the liquid is stopped by controlling the passage of the liquid even when the counting cannot proceed simultaneously with filtration. Fourth, it is possible to prevent foreign matter from adhering to the filter in the process of separating and moving the filter from the filtration device. Fifth, many precautions are taken to maintain safety even when the filtration target is a dangerous chemical or dangerous substance that transports the sample. And it is possible to reduce the cost, and sixth, by using a filter material similar to the surface of the product to be protected, there is an increased effect of preventing defects by predicting the effect on the product.

1 is a perspective view of a real-time foreign matter counting device in a fluid using a filter medium according to an embodiment of the present invention

Figure 2 is a schematic cross-sectional view of a real-time foreign matter counting device in a fluid using a filter medium according to an embodiment of the present invention

Figure 3 is a real-time foreign matter counting device configuration in the fluid using a filter medium according to an embodiment of the present invention

Figure 4 is a light irradiation unit configuration of the real-time foreign matter counting device in the fluid using a filter medium according to an embodiment of the present invention

5 is a side cross-sectional view schematically showing a detector holder according to an embodiment of the present invention

6 is a perspective view schematically showing a detector holder according to an embodiment of the present invention

7 is a three-dimensional view of a real-time foreign matter counting device in a fluid using a filter medium according to an embodiment of the present invention

8 is a view showing another example of FIG. 7.

9 is a constitutional counting method according to the type of filter media

10 is a detector holder configuration embodiment

In the present invention will be described in detail with reference to the accompanying drawings.

The real-time foreign matter counting device in the fluid using the filter medium of the present invention will be described in detail with reference to FIGS. 1 to 3.

1 is a perspective view of a real-time foreign matter counting device in a fluid using a filter medium according to an embodiment of the present invention, and FIG. 2 is a schematic cross-sectional view of a real-time foreign material counting device in a fluid using a filter medium according to an embodiment of the present invention. A configuration diagram of a real-time foreign matter counting device in a fluid using a filter medium according to an embodiment of the present invention, and FIG. 4 is a configuration diagram of a light irradiation unit of a real-time foreign matter counting device in a fluid using a filter medium according to an embodiment of the present invention.

1 and 2, a real-time foreign matter counting device in a fluid using a filter medium according to an embodiment of the present invention, the foreign matter attached to the filter paper 510 of the detector holder 500 through which the foreign matter detection sample passes As a detection, the optical unit 100 and the optical unit 100 are accommodated inside and the optical housing 200 having a through shape is provided below the optical housing 200 to irradiate light with a filter paper 510, but filter paper A light irradiation unit 300 capable of irradiating light toward the filter paper 510 in a direction surrounding the periphery of the 510, and provided on the lower side of the light irradiation unit 300, the filter paper is supported and fixed so that the filter paper can be seated on the upper part, and is fixed. The perforated filter medium supporting perforated plate 520, the detector holder 500 for fixing the filter medium supporting perforated plate 520, and the filter medium supporting perforated plate 520 of the detector holder 500 to the upper side (上 側) A detector that supports the sample fluid inlet 530 and the sample fluid outlet 540 and the detector holder 500 that are disposed under the filter medium supporting perforated plate 520 of the detector holder 500. It is a technical feature to include a holder supporter 600.

First, the optical unit 100 can be applied to various instruments such as a microscope, a magnifier, and an image sensor, and in an embodiment of the present invention, as an example, the focal length can be easily applied to a microscope.

Next, the optical housing 200 is made of a through phenomenon in which the inside is empty so that the optical unit 100 can be accommodated therein, and the optical housing 200 has an inspector measuring the focal length of the optical unit 100, that is, the microscope. If necessary, an adjustment switch 210 is provided so as to be easily adjustable, and a separate display 250 may be provided to further enlarge an image detected from the optical unit 100 so that an inspector can easily check the image.

Referring to Figure 3, the detector holder 500, the optical unit 100 is disposed on the top can count the foreign matter detected on the filter paper 510, the filter material supporting perforated plate (520) to fix and support the filter paper (510) ) Is provided, and the filter paper 510 is seated above the perforated plate 520 of the filter medium.

In addition, the upper side of the detector holder 500 is irradiated with the direct light source through the optical unit 100, the side of the detector holder 500 indicates that the light source side light is irradiated through the first and second photometric irradiation units (310 320).

In addition, the detector holder 500 is configured with a fluid inlet 530 for introducing sample fluid, and the sample fluid is filtered through a filter paper 510 supported on the upper side of the perforated plate 520 of the filter medium. The fluid passed to the lower side of the filter medium supporting perforated plate 520 discharges the sample fluid to the fluid inlet 530 of the detector holder 500, and simultaneously filters the surface of the filter paper 510 to count the fluid in real time. It is characterized by a technical feature that foreign matter counting is possible.

4, the light irradiation unit 300, the first to the first to irradiate light corresponding to the circumferential direction including the left and right and front and rear direction of the filter medium supporting perforated plate 520 of the detector holder 500 It includes four light metering irradiation units (310,320,330,340) and first to fourth light diffusion plates (311,321,331,341) that diffuse light emitted from the first to fourth light metering irradiation units (310,320,330,340).

In addition, an opening 350 is formed in the central region of the light irradiation unit 300 to partially insert the lower end of the optical housing 200, an empty space is provided to interlock with the opening 350, and a detector is located below the empty space. The holder 500 is inserted and positioned.

In addition, the light blocking plate 400 is provided to extend beyond a certain length to the outside of the photometric irradiation unit, may be made of a light absorbing material capable of absorbing light or reflecting a predetermined ratio or less, and having a predetermined or higher thermal conductivity It is made of a thermally conductive material and can radiate heat generated from the photometric irradiation unit to the outside.

In the present invention, by irradiating light toward the perforated plate 520 of the filter medium in the surrounding direction of the detector holder 500, foreign matter can be more reliably detected, and measurement reliability can be improved.

In addition, the first to fourth metering irradiation units 310, 320, 330, and 340 are positioned above the filter media supporting perforated plate 520 while the filter paper 510 is disposed on the filter media supporting perforated plate 520, and metering from the upper side than the filter paper Since the irradiation unit irradiates light, it is possible to prevent a problem that a part of the sample fluid is out of the light irradiation range and the foreign matter count is omitted.

Next, FIG. 5 is a side cross-sectional view schematically showing a detector holder according to an embodiment of the present invention, FIG. 6 is a perspective view schematically showing a detector holder according to an embodiment of the present invention, and FIG. 7 is an embodiment of the present invention It is a three-dimensional view of a real-time foreign matter counting device in a fluid using a filter medium according to the present invention, and FIG. 8 is a view showing another example of FIG.

Next, the detector holder 500 of the present invention may be formed in a shape of a hexahedron, a cylinder, a polyhedron, and the like, as shown in FIGS. 5 to 8, the detector holder 500 is a filter medium for supporting and fixing the filter paper 510 The perforated perforated plate 520 is provided, and the upper transparent cover 550 is configured at the top of the detector holder 500 so that the optical unit 100 can count foreign substances in the filter paper 510, and the detector holder 500 ) It is a technical feature that the side transparent cover 560 is configured to irradiate light from the side through the first to fourth side light irradiation units 310, 320, 330 and 340.

In addition, a fluid inlet 530 for introducing sample fluid to the detector holder 500 and a fluid outlet 540 for discharging sample fluid are configured, and a fluid suction pump 570 is configured to be connected to the fluid outlet 540. Can be. Referring to FIG. 7, the fluid inlet 530 for introducing the sample fluid flows in the lateral direction of the detector holder 500, and referring to FIG. 8, the fluid inlet 530 for introducing the sample fluid is the detector holder 500 It shows that it flows in from the upper direction.

In addition, the detector holder 500 flows in and out of the sample fluid, and when the sample fluid is a gas, real-time monitoring and observation coefficients are possible. If it is not possible to count at the same time, it is possible to control the passage of the liquid through the fluid suction pump 570 to stop counting when the liquid passes, and proceed to counting when the liquid passes, so that it is possible to observe the change in the foreign object of the inspection object over time. Technical features.

In addition, when the counting ends, the fluid inlet 530 for introducing the sample fluid and the fluid outlet 540 for discharging the sample fluid may be blocked with a plug to store a foreign material sample or move for analysis.

In addition, the detector holder 500 can be observed through the optical unit 100 at the top and is provided with a top transparent cover 550 for direct light irradiation, and the side is metered to irradiate light through the light irradiation unit 300 It shows that the irradiation side transparent cover 560 is arrange | positioned.

In addition, looking at the fluid flow direction 580, the fluid inlet 530 is disposed on the upper side of the perforated plate 520 of the filter medium support of the detector holder 500 so that the sample fluid is sucked into the detector holder 500, The foreign matter detected through the filter paper 510 and the fluid that has passed through the filter paper 510 and the filter medium supporting perforated plate 520 is sample fluid on the lower side of the filter medium supporting perforated plate 520 of the detector holder 500. Discharge port 540 is disposed to discharge the fluid, it is a technical feature to control the suction and discharge of the fluid through the fluid suction pump (570).

In addition, the present invention does not require transport of a sample, such as a case where the sample is transported and then counted by an observation counting device after filtration, and the observation count is performed simultaneously with filtration, especially when the object to be filtered is a dangerous substance such as a chemical. In addition, there is an advantage in that a lot of attention and cost can be saved to maintain safety for transport of the sample.

Next, FIG. 9 is a configuration diagram of a foreign matter counting method according to a type of filter medium, and FIG. 10 is a configuration example of a detector holder.

Referring to FIG. 9, the counting method is different depending on the type of the filter medium, and as shown in FIGS. 9 (a) and 9 (b), the filter medium is larger than a pore in the case of a membrane filter 511. 9 (c) and 9 (d), the plate holder 512 has no hole and thus does not pass air, so the detector holder ( 500) is placed with some space inside, and indicates that particles contained in the fluid are attached and counted on the surface of the plate material 512, and the material of the plate material 512 is to be collected using a material similar to the surface of the product to be protected. There is an increased effect that can prevent the defect by predicting the effect on the product by checking the case where the particles in the fluid cause a defect, and it is technical to automatically count the collected particles at the same time as the process of collecting the particles. It is characterized by.

In addition, it is possible to increase the collection efficiency by coating an adhesive on the plate material 512, and when the plate material 512 is a plastic plate material, static electricity is generated on the surface of the plate according to friction with air, and the plate material is rubbed due to electrostatic attraction. The technical feature is that the effect of collecting particles in the passing fluid occurs.

Referring to FIG. 10, the arrangement of the fluid inlet 530 and the fluid outlet 540 of the detector holder may be differently configured as an embodiment of the detector holder, and the filter holder supporting perforated plate 520 of the detector holder 500 may be moved upward. The filter paper 510 is disposed, and the upper portion of the filter paper 510 is divided into a fluid inflow region 531 and a lower portion of the filter media supporting perforated plate 520 as a fluid discharge region 541. Can be.

In FIG. 10 (a), the fluid inlet 530 is disposed in the upward direction of the fluid inflow region 531, and the fluid outlet 540 is disposed in the lateral direction of the fluid discharge region 541, and in FIG. 10 (b) The fluid inlet 530 is disposed in an upward direction of the fluid inflow region 531, and the fluid outlet 540 is disposed in a downward direction of the fluid discharge region 541, and the fluid inflow region 531 in FIG. 10 (c). The fluid inlet 530 is disposed in the lateral direction of the fluid outlet, the fluid outlet 540 is disposed in the lateral direction of the fluid discharge area 541, and the fluid intake port in the lateral direction of the fluid inlet area 531 in FIG. 10 (d). 530 is disposed, and indicates that the fluid outlet 540 is disposed in the downward direction of the fluid discharge area 541. Therefore, it is a technical feature that the fluid inlet 530 and the fluid outlet 540 of the detector holder 500 can be selectively configured according to the sample fluid.

The present invention can be applied to a real-time foreign matter counting device in a fluid using a filter medium by various modifications by a person having ordinary knowledge in this field, and it is recognized that the technically easily deformable technology is also within the scope of the present patent. Will have to do.

Claims (10)

1. In the foreign matter counting device,

   Optical unit 100;

   An optical housing 200 accommodating the optical unit 100 therein and comprising a through phenomenon;

   A light irradiation unit 300 provided on the lower side of the optical housing 200 to irradiate light toward the filter paper 510;

   It is provided on the lower side of the light irradiation unit 300, the filter paper 510 is fixed to support the filter paper 510 so that it can be seated on the upper, and the filter medium supporting perforated plate 520 having a plurality of holes;

   A detector holder 500 for fixing the filter medium supporting perforated plate 520;

   A sample fluid inlet 530 disposed in the fluid inflow region 531 of the upper side of the perforated plate 520 of the filter holder of the detector holder 500; And

   Real-time foreign matter counting device in a fluid using a filter medium including a sample fluid outlet (540) disposed in a fluid discharge area (541) under the filter medium support perforated plate (520) of the detector holder (500).
2. According to claim 1,

   Real-time foreign matter counting device in the fluid using a filter medium, characterized in that it is possible to observe the change in the foreign matter of the sample over time by further including a fluid suction pump (570) to suck and discharge the sample fluid in real time.
3. According to claim 2,

   When the sample fluid is a liquid, the flow of the liquid is controlled through the fluid suction pump 570 to stop counting when the liquid passes, and counting is performed in real time using a filter medium, characterized in that the counting is performed when the liquid is stopped. Device.
4. According to claim 1,

   The detector holder 500 is composed of a top transparent cover 550 to count foreign substances in the optical unit 100, and a side light irradiation unit irradiates light from the side of the detector holder 500. Real-time foreign matter counting device in the fluid using a filter medium, characterized in that it consists of a side transparent cover (560) to be able to.
5. According to claim 2,

   The sample fluid can be observed in real time to change the foreign matter in the sample;

   When the counting is terminated, the fluid inlet 530, through which the sample fluid is introduced, and the fluid outlet 540, through which the sample fluid is discharged, are blocked with a plug to store a foreign material sample or move it for analysis. Real-time foreign material counting device.
6. According to claim 3,

   The detector holder 500 is provided with a fluid inlet 530 in the fluid inlet region 531;

   The fluid outlet 540 is disposed in the fluid discharge area 541, and the positions of the fluid inlet 530 and the fluid outlet 540 may be selectively configured according to the type of sample fluid;

   Real-time foreign material counting device in a fluid using a filter medium, characterized in that the surface of the filter paper is counted simultaneously with filtration.
7. According to claim 1,

   A fluid using a filter medium that replaces the filter paper to collect foreign particles larger than the hole using a membrane filter to collect particles and to automatically count the collected particles at the same time. Real-time foreign material counting device.
8. According to claim 1,

   A fluid using a filter medium that replaces the filter paper so that particles contained in the fluid are adhered to the surface of the plate using a plate material to be counted, and at the same time collecting particles, the collected particles are automatically counted. Real-time foreign material counting device.
9. The method of claim 8,

   Real-time foreign matter counting device in a fluid using a filter medium, characterized in that to prevent defects by predicting the effect on the product using a material similar to the surface of the product to be protected.
10. The method of claim 8,

    Real-time foreign matter counting device in a fluid using a filter medium, characterized in that to increase the efficiency of collecting the particles contained in the fluid by coating the pressure-sensitive adhesive on the plate.

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