WO2020102783A1 - Bubble defect reduction - Google Patents

Bubble defect reduction Download PDF

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Publication number
WO2020102783A1
WO2020102783A1 PCT/US2019/061891 US2019061891W WO2020102783A1 WO 2020102783 A1 WO2020102783 A1 WO 2020102783A1 US 2019061891 W US2019061891 W US 2019061891W WO 2020102783 A1 WO2020102783 A1 WO 2020102783A1
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WIPO (PCT)
Prior art keywords
layer
light
exposing
etching
substrate
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PCT/US2019/061891
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French (fr)
Inventor
Akhil N. Singhal
Bart Jan Van Schravendijk
Girish A. Dixit
David C. Smith
Siva Krishnan KANAKASABAPATHY
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Lam Research Corp
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Lam Research Corp
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Priority to KR1020267007628A priority Critical patent/KR20260036629A/en
Priority to CN201980075195.7A priority patent/CN113016053B/en
Priority to US17/293,000 priority patent/US12248252B2/en
Priority to KR1020217018240A priority patent/KR102939729B1/en
Publication of WO2020102783A1 publication Critical patent/WO2020102783A1/en
Anticipated expiration legal-status Critical
Priority to US19/047,576 priority patent/US20250216788A1/en
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2041—Photolithographic processes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/40—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials
    • H10P76/408—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials characterised by their sizes, orientations, dispositions, behaviours or shapes
    • H10P76/4085—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials characterised by their sizes, orientations, dispositions, behaviours or shapes characterised by the processes involved to create the masks
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70033—Production of exposure light, i.e. light sources by plasma extreme ultraviolet [EUV] sources
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/69—Inorganic materials
    • H10P14/692—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses
    • H10P14/6938—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses the material containing at least one metal element, e.g. metal oxides, metal oxynitrides or metal oxycarbides
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/24—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials
    • H10P50/242—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials of Group IV materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0035—Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography

Definitions

  • the present disclosure relates generally to bubble defect reduction in depositing and/or etching a metal oxide (MO) layer on a photoresist on a substrate.
  • MO metal oxide
  • Atomic Layer Deposition is a deposition method that has the capability of controlling the thickness of thin films formed on semiconductor substrates on the order of one atomic mono-layer.
  • PEALD Plasma Enhanced ALD
  • PEALD uses chemical precursors, like ALD, in an RF- induced plasma to create the necessar ' chemical reactions to form the thin films in a highly controlled manner.
  • PEALD offers many advantages, including low- temperature processing, excellent conformity and thickness control of deposited layers, and a capability of pre- and post-deposition in-situ treatments
  • Multiple patterning is a technique to enhance feature density for integrated circuits (ICs) beyond the limits of photolithography.
  • Such multi- patterning techniques include, for example, pitch splitting, sidewall image transfer, self-aligned contacts, via patterning, layout splitting, and self-aligned double or quadruple paterning. It is expected that multi-patterning will be necessary for 10 nm and 7 nm node semiconductor processes and beyond.
  • SAQP Self-Aligned Quadruple Patterning
  • SADP Self-Aligned Double Patterning
  • Both SAQP and SADP require a substrate with multiple layers formed thereon.
  • the layers on tire substrate may include, from the botom layer up, a first carbon film referred to as an Ashable Hard Mask (AHM) or a Spin on Carbon layer (SOC), a Silicon Oxide (SiOi) layer, a second carbon (AHM/SOC) layer, and an Anti -Reflective Layer (ARL).
  • AHM Ashable Hard Mask
  • SOC Spin on Carbon layer
  • SiOi Silicon Oxide
  • AHM/SOC Second carbon
  • ARL Anti -Reflective Layer
  • SADP uses a photolithography step and additional etch steps to define spacer-like features on a substrate.
  • the first step is to deposit a resist material (also called a photoresist, or photoresist layer, referred to as PR herein) and then pattern, using photolithography, "mandrels" onto the top ARL layer on the substrate.
  • the mandrels typically have a pitch at or close to the limit of photolithography.
  • the mandrels are next covered with a deposition layer such as Silicon Oxide (SiCh).
  • SiCh Silicon Oxide
  • a "spacer etch” is subsequently perfomied, remo v ing (a) the horizontal surfaces of the S1O2 layer and (b) the PR. As a result, just the vertical surfaces of the S1O2 remain on the ARL layer. These vertical surfaces define "spacers,” which have a pitch finer than can be achieved with conventional photolithography.
  • SAQP is a continuation of the double paterning process.
  • the S1O2 spacers are used as a mask in an etch step removing the underlying ARL and second AHM layers except under the masked regions. Thereafter, the S1O2 spacers are removed, leaving second mandrels formed m the AHM layer. Another S1O2 layer is then deposited followed by another "spacer etch,” removing (a) the horizontal portions of the S1O2 layer and (b) the second mandrels. Hie result is a structure having S1O2 spacers formed on the underlying S1O2 layer. With the S AQP process, the pitch of the second SiCh spacers are finer than the first spacers and significantly beyond limits of conventional lithography.
  • multi-patterning offers significant benefits and helps extend the usefulness of conventional photolithography to next generation integrated circuitry
  • the various processes have their limitations.
  • the multi-patterning requires numerous deposition, photolithography, and etching steps to form the spacers.
  • the finer the pitch of the spacers generally the more photolithography-etch cycles are involved.
  • One potential way to do so is to adopt a MO to form spacers and deposit these directly on top of the PR layer.
  • MO is harder and of higher modulus than conventional silicon dioxide and allows thinner spacers to be created and used and can also provide the benefit of being able to be used in a second role as a second mandrel.
  • This approach of using a MO spacer to serve initially as a spacer followed thereafter by its use as mandrel is called spacer-on-spacer technology.
  • Certain methods of spacer-on- spacer technology that achie ve a requisite SAQP performance can be very beneficial cost-wise as they can eliminate many deposition, lithography, and etching steps and thus serve to pay for the cost advantage of this technology.
  • FIG. 1 is a schematic diagram showing bubble defects, according to some examples.
  • FIG. 2 is a block diagram illustrating operations in a method, according to an example embodiment.
  • bubble defect formation can be an issue in certain semiconductor manufacturing operations.
  • Current manufacturing techniques using spacers of silicon oxide (S1O2) sometimes have limitations when scaling down to accommodate shrinking technology nodes.
  • Other techniques involving MO spacers allow scalability in some examples but nevertheless present issues relating to the formation of bubble defects appearing in the PR layer during the etching of the MO downstream of a deposition phase.
  • the presence of such defects during etching can limit or prevent the use of otherwise helpful MOs such as tin oxide (SnOi) from being used in smaller scale operations or in a second role serving as a mandrel on the PR layer.
  • bubble defect formation may be caused by an interaction of ultraviolet (UV) light or radiation present in a plasma gas with electrons emitted by a MO layer at the interface between the MO layer and a PR during a dry etch chemistry.
  • the PR layer may be a positive tone PR which softens upon tire application of UV in a curing process.
  • UV ultraviolet
  • Bubble defect formation can be particularly significant when using a high-emission MO such as tin oxide as this material has a very high secondar ' electron emission coefficient. It is believed that the softening of the PR layer leads to outgassing as the material breaks down, which forms bubble defects during curing. Schematic pictures of bubble defects appearing in three example panes 100 may be seen in FIG. 1 of the accompanying drawings.
  • a UV precunng or pre-exposure operation is performed.
  • an example method 200 includes the performance of precuring or pre-exposure operations on a substrate such as a silicon wafer (Si) that includes a PR.
  • a wafer including the PR is exposed to UV before a MG layer is deposited onto the PR.
  • the precuring or pre-exposure operations may be performed in some examples during, or as a supplement to, an SAQP process, SADP process, or spacer-on-spacer process as described above.
  • a PR is exposed to UV light or radiation prior to deposition of a MG layer onto the PR and held immune to UV exposure by a plasma during or after deposition of the MO layer.
  • the preliminary or precuring UV exposure may be performed in an existing tool having a UV source, in an external chamber fitted with a UV source, or in a wafer-processing chamber having a plasma source, for example.
  • a suitable plasma source may include helium, argon, or nitrogen in an amount sufficient to generate UV for precuring purposes.
  • bubble defect reduction may be performed during, or in relation to, other phases in a semiconductor
  • bubble defect reduction including a precuring or pre -exposure operation is performed during or in relation to a deposition phase, a photolithography phase, an etching phase, or other wafer processing phase involving the use of plasma, for example.
  • bubble defect reduction including a precuring or pre -exposure operation is performed during or in relation to a combination of phases.
  • tin oxide as an example MO layer
  • the present disclosure may be employed on other types of films or layers, some of which may include MOs, metal nitrides, metal carbides, metal, and so forth. Further example layers or films also include dielectric material of metallic or non-metal!ic material.
  • the example wafer described in relation to FIG. 2 includes a layer or film of silicon material (Si). Other components or materials making up, or being included in, the illustrated Si, PR and MO layers, are possible.
  • some embodiments may include one or more of the following examples.
  • a method of processing a substrate, tire method comprising: applying a PR onto a surface of the substrate; pre-exposing the PR to UV light before depositing or etching a MO layer onto the PR; and depositing or etching a MO layer onto the PR subsequent to pre-exposing the PR to UV light.
  • MO layer onto the PR is performed immediately subsequent to the pre-exposure of UV light.
  • MO layer includes tin oxide.
  • a method of processing a substrate comprising: applying a PR onto a surface of the substrate; pre-exposing the PR to ultra violet (UV) light before depositing or etching a layer onto the PR; and depositing or etching a layer onto the PR subsequent to pre-exposing the PR to UV light.
  • UV ultra violet
  • the layer includes one or more of a MO layer, a metal nitride layer, a metal carbide layer, and a metal layer.
  • inventive subject matter may be referred to herein, individually and/or collectively, by the term‘"invention” merely for convenience and without intending to voluntarily limit the scope of this application to any single invention or inv entive concept if more than one is in fact disclosed.
  • invention merely for convenience and without intending to voluntarily limit the scope of this application to any single invention or inv entive concept if more than one is in fact disclosed.
  • This disclosure is intended to cover any and all adaptations or variations of various embodiments. Combinations of the above embodiments, and other embodiments not specifically described herein, will be apparent to those of skill in the art upon reviewing the above description.

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Abstract

In some examples, a method of processing a substrate comprises applying a photoresist (PR) onto a surface of the substrate, pre-exposing the PR to ultra violet (UV) light before depositing or etching a metal oxide (MO) layer onto the PR, and depositing or etching a MO layer onto the PR subsequent to pre-exposing the PR to UV light.

Description

BUBBLE DEFECT REDUCTION
CLAIM OF PRIORITY
[0001] This application claims the benefit of priority to United States
Patent Application No. 62/768,641, to Singhal et al, entitled“Bubble Defect Reduction” filed on November 16, 2018, which is incorporated by reference herein in its entirety.
FIELD
[0002] The present disclosure relates generally to bubble defect reduction in depositing and/or etching a metal oxide (MO) layer on a photoresist on a substrate.
BACKGROUND
[0003] The background description provided here is for the purpose of generally presenting the context of the disclosure. Work of the presently named inventors, to the extent it is described in this background section, as well as aspects of the description that may not otherwise qualify as prior art at the time of filing, are neither expressly nor impliedly admitted as prior art against the present disclosure.
[0004] Atomic Layer Deposition (ALD) is a deposition method that has the capability of controlling the thickness of thin films formed on semiconductor substrates on the order of one atomic mono-layer. Plasma Enhanced ALD (PEALD) is a further enhancement that enables improved film properties at lower temperatures. PEALD uses chemical precursors, like ALD, in an RF- induced plasma to create the necessar ' chemical reactions to form the thin films in a highly controlled manner. PEALD offers many advantages, including low- temperature processing, excellent conformity and thickness control of deposited layers, and a capability of pre- and post-deposition in-situ treatments
[0005] Multiple patterning is a technique to enhance feature density for integrated circuits (ICs) beyond the limits of photolithography. Such multi- patterning techniques include, for example, pitch splitting, sidewall image transfer, self-aligned contacts, via patterning, layout splitting, and self-aligned double or quadruple paterning. It is expected that multi-patterning will be necessary for 10 nm and 7 nm node semiconductor processes and beyond.
[0006] Self-Aligned Quadruple Patterning (SAQP) is essentially two cycles of a double patterning technique, often referred to as Self-Aligned Double Patterning (SADP). Both SAQP and SADP require a substrate with multiple layers formed thereon. For instance, the layers on tire substrate may include, from the botom layer up, a first carbon film referred to as an Ashable Hard Mask (AHM) or a Spin on Carbon layer (SOC), a Silicon Oxide (SiOi) layer, a second carbon (AHM/SOC) layer, and an Anti -Reflective Layer (ARL).
[0007] SADP uses a photolithography step and additional etch steps to define spacer-like features on a substrate. In the SADP process, the first step is to deposit a resist material (also called a photoresist, or photoresist layer, referred to as PR herein) and then pattern, using photolithography, "mandrels" onto the top ARL layer on the substrate. The mandrels typically have a pitch at or close to the limit of photolithography. The mandrels are next covered with a deposition layer such as Silicon Oxide (SiCh). A "spacer etch" is subsequently perfomied, remo v ing (a) the horizontal surfaces of the S1O2 layer and (b) the PR. As a result, just the vertical surfaces of the S1O2 remain on the ARL layer. These vertical surfaces define "spacers," which have a pitch finer than can be achieved with conventional photolithography.
[0008] SAQP is a continuation of the double paterning process. With
SAQP, the S1O2 spacers are used as a mask in an etch step removing the underlying ARL and second AHM layers except under the masked regions. Thereafter, the S1O2 spacers are removed, leaving second mandrels formed m the AHM layer. Another S1O2 layer is then deposited followed by another "spacer etch," removing (a) the horizontal portions of the S1O2 layer and (b) the second mandrels. Hie result is a structure having S1O2 spacers formed on the underlying S1O2 layer. With the S AQP process, the pitch of the second SiCh spacers are finer than the first spacers and significantly beyond limits of conventional lithography.
[0009] While multi-patterning offers significant benefits and helps extend the usefulness of conventional photolithography to next generation integrated circuitry, the various processes have their limitations. In particular, the multi-patterning requires numerous deposition, photolithography, and etching steps to form the spacers. The finer the pitch of the spacers, generally the more photolithography-etch cycles are involved. These additional steps significantly add to the cost and complexity of semiconductor fabrication.
[0010] As semiconductor manufacturers increasingly look to adopt
SAQP and SADP towards shrinking nodes even further, they are also looking at ways to reduce the cost of adopting this technology. One potential way to do so is to adopt a MO to form spacers and deposit these directly on top of the PR layer. MO is harder and of higher modulus than conventional silicon dioxide and allows thinner spacers to be created and used and can also provide the benefit of being able to be used in a second role as a second mandrel. This approach of using a MO spacer to serve initially as a spacer followed thereafter by its use as mandrel is called spacer-on-spacer technology. Certain methods of spacer-on- spacer technology that achie ve a requisite SAQP performance can be very beneficial cost-wise as they can eliminate many deposition, lithography, and etching steps and thus serve to pay for the cost advantage of this technology.
[0011] As part of this spacer-on-spacer technology, certain MOs can be used as spacer material to be deposited directly on top of a PR layer. Some examples have demonstrated that this can be done without causing damage to the PR material. But in some instances, particularly when performing a spacer etch on certain wafers, significant defects can arise. One problem relates to the creation of unwanted bubble defects. The present disclosure seeks to address at least this issue.
DESCRIPTION OF THE DRAWINGS
[0012] Some embodiments are illustrated by way of example and not limitation in the figures of the accompanying drawings:
[0013] FIG. 1 is a schematic diagram showing bubble defects, according to some examples.
[0014] FIG. 2 is a block diagram illustrating operations in a method, according to an example embodiment.
DESCRIPTION
[0015] The description that follows includes systems, methods, and techniques that embody illustrative embodiments of the present disclosure. In the following description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of example embodiments. It will be evident, however, to one skilled in the art that the present inventive subject mater may be practiced without these specific details.
[0016] A portion of the disclosure of this patent document contains material that is subject to copyright protection. The copyright owner has no objection to the facsimile reproduction by anyone of the patent document or the patent disclosure, as it appears in the Patent and Trademark Office patent files or records, but otherwise reserves all copyright rights whatsoever. The following notice applies to the software and data as described below' and m the drawings that form a part of this document: Lam Research Corporation 2018-2019, All Rights Reserved.
[0017] As mentioned abo ve, bubble defect formation can be an issue in certain semiconductor manufacturing operations. Current manufacturing techniques using spacers of silicon oxide (S1O2) sometimes have limitations when scaling down to accommodate shrinking technology nodes. Other techniques involving MO spacers allow scalability in some examples but nevertheless present issues relating to the formation of bubble defects appearing in the PR layer during the etching of the MO downstream of a deposition phase. The presence of such defects during etching can limit or prevent the use of otherwise helpful MOs such as tin oxide (SnOi) from being used in smaller scale operations or in a second role serving as a mandrel on the PR layer.
[0018] Without wishing to be bound by theory, it is believed that bubble defect formation may be caused by an interaction of ultraviolet (UV) light or radiation present in a plasma gas with electrons emitted by a MO layer at the interface between the MO layer and a PR during a dry etch chemistry. In certain instances, the PR layer may be a positive tone PR which softens upon tire application of UV in a curing process. When a MO is present on a PR layer, secondary electron emission from the MO layer is believed to interact with the positive tone PR and soften it under the action of the applied UV. Bubble defect formation can be particularly significant when using a high-emission MO such as tin oxide as this material has a very high secondar ' electron emission coefficient. It is believed that the softening of the PR layer leads to outgassing as the material breaks down, which forms bubble defects during curing. Schematic pictures of bubble defects appearing in three example panes 100 may be seen in FIG. 1 of the accompanying drawings.
[0019] In some examples, a UV precunng or pre-exposure operation is performed. With reference to FIG. 2, an example method 200 includes the performance of precuring or pre-exposure operations on a substrate such as a silicon wafer (Si) that includes a PR. A wafer including the PR is exposed to UV before a MG layer is deposited onto the PR. The precuring or pre-exposure operations may be performed in some examples during, or as a supplement to, an SAQP process, SADP process, or spacer-on-spacer process as described above.
In some examples, a PR is exposed to UV light or radiation prior to deposition of a MG layer onto the PR and held immune to UV exposure by a plasma during or after deposition of the MO layer. Some tested examples using this method completely or at least substantially eliminated bubble defects form occurring, as shown in the example pane 202 in FIG. 2.
[0020] The preliminary or precuring UV exposure may be performed in an existing tool having a UV source, in an external chamber fitted with a UV source, or in a wafer-processing chamber having a plasma source, for example. Other arrangements are possible. A suitable plasma source may include helium, argon, or nitrogen in an amount sufficient to generate UV for precuring purposes.
[0021] The above examples are merely exemplary and should not be considered limiting. Thus, in other examples, bubble defect reduction may be performed during, or in relation to, other phases in a semiconductor
manufacturing operation. In some examples, bubble defect reduction including a precuring or pre -exposure operation is performed during or in relation to a deposition phase, a photolithography phase, an etching phase, or other wafer processing phase involving the use of plasma, for example. In some examples, bubble defect reduction including a precuring or pre -exposure operation is performed during or in relation to a combination of phases.
[0022] Further, while some examples discussed above mention tin oxide as an example MO layer, the present disclosure may be employed on other types of films or layers, some of which may include MOs, metal nitrides, metal carbides, metal, and so forth. Further example layers or films also include dielectric material of metallic or non-metal!ic material. The example wafer described in relation to FIG. 2 includes a layer or film of silicon material (Si). Other components or materials making up, or being included in, the illustrated Si, PR and MO layers, are possible.
[0023] Thus, some embodiments may include one or more of the following examples.
[QQ24] 1. A method of processing a substrate, tire method comprising: applying a PR onto a surface of the substrate; pre-exposing the PR to UV light before depositing or etching a MO layer onto the PR; and depositing or etching a MO layer onto the PR subsequent to pre-exposing the PR to UV light.
[0025] 2. The method of example 1, wherein depositing or etching a
MO layer onto the PR is performed immediately subsequent to the pre-exposure of UV light.
[0026] 3. The method of example 1 or 2, wherein the substrate includes a silicon wafer.
[0027] 4. The method of any one of examples 1-3, wherein pre exposing the PR to UV light is performed during, or as a supplement to, a Self- Aligned Quadruple Patterning (SAQP) process.
[0028 ] 5. The method of any one of examples 1-4, wherein pre exposing the PR to UV light is performed during, or as a supplement to, a Self- Aligned Double Patterning (SADP) process.
[0029] 6. The method of any one of examples 1-5, wherein pre exposing the PR to UV light is performed during, or as a supplement to, a spacer-on-spacer process.
[0030] 7 The method of any one of examples 1-6, further comprising holding the PR immune to UV exposure during or after depositing or etching a MO layer onto the PR.
[0031] 8. The method of anyone of examples 1-7, wherein holding the PR immune to UV exposure includes holding the PR immune to UV exposure by a plasma.
[0032] 9. The method of any one of examples 1-8 , wherein pre exposing the PR to UV light before depositing or etching a MO later on-to the PR is performed in an existing substrate processing tool having a UV light source. [0033] 10. The method of any one of examples 1-9, wherein pre exposing the PR to UV light before depositing or etching a MO later on-to the PR is performed in an external chamber fitted with a UV light source.
[0034] 11. The method of any one of examples 1-10, wherein the substrate is processed in a substrate processing tool, the substrate processing tool including a plasma source for generating plasma, the plasma including a constituent in an amount sufficient to generate UV light for pre-exposing the PR to the UV light.
[0035] 12. The method of example 1 1, wherein the plasma constituent includes one or more constituents including helium, argon, and nitrogen.
[0036] 13. The method of any one of examples 1-12, wherein the
MO layer includes tin oxide.
[0037] 14. A method of processing a substrate, the method comprising: applying a PR onto a surface of the substrate; pre-exposing the PR to ultra violet (UV) light before depositing or etching a layer onto the PR; and depositing or etching a layer onto the PR subsequent to pre-exposing the PR to UV light.
[0038] 15. The method of example 14, wherein the layer includes one or more of a MO layer, a metal nitride layer, a metal carbide layer, and a metal layer.
[0039] Although various embodiments and examples have been described with reference to specific example embodiments and examples, it will be e vident that various modifications and changes may be made to these embodiments without departing from the broader scope of the disclosure.
Accordingly, the specification and drawings are to be regarded in an illustrative rather than a restrictive sense. The accompanying drawings that form a part hereof, show by way of illustration, and not of limitation, specific embodiments in which the subject matter may be practiced. The embodiments illustrated are described in sufficient detail to enable those skilled in the art to practice the teachings disclosed herein. Other embodiments may be utilized and derived therefrom, such that structural and logical substitutions and changes may be made without departing from the scope of this disclosure. This Detailed Description, therefore, is not to be taken in a limiting sense, and the scope of various embodiments is defined only by the appended claims, along with the full range of equivalents to which such claims are entitled.
100401 Such embodiments of the inventive subject matter may be referred to herein, individually and/or collectively, by the term‘"invention” merely for convenience and without intending to voluntarily limit the scope of this application to any single invention or inv entive concept if more than one is in fact disclosed. Thus, although specific embodiments have been illustrated and described herein, it should be appreciated that any arrangement calculated to achieve the same purpose may be substituted for the specific embodiments shown. This disclosure is intended to cover any and all adaptations or variations of various embodiments. Combinations of the above embodiments, and other embodiments not specifically described herein, will be apparent to those of skill in the art upon reviewing the above description.

Claims

1. A method of processing a substrate, the method comprising: applying a photoresist (PR) onto a surface of the substrate; pre-exposing the PR to ultra violet (UV) light before depositing or etching a metal oxide (MO) layer onto the PR; and depositing or etching a MO layer onto the PR subsequent to pre exposing the PR to UV light
2. lire method of claim i, wherein depositing or etching a MO layer onto the PR is performed immediately subsequent to the preexposure of UV light.
3. The method of claim 1, wherein the substrate includes a silicon wafer.
4. The method of claim 1 , wherein pre-exposing the PR to UV light is performed during, or as a supplement to, a Self-Aligned Quadruple Patterning (SAQP) process.
5. The method of claim 1, wherein pre-exposing the PR to UV light is performed during, or as a supplement to, a Self-Aligned Double Patterning (SADP) process.
6. Idle method of claim 1, wherein pre-exposing tire PR to UV light is performed during, or as a supplement to, a spacer-on-spacer process.
7. The method of claim 1, further comprising holding the PR immune to UV exposure during or after depositing or etching a MO layer onto the PR.
8. The method of claim 7, wherein holding the PR immune to UV exposure includes holding the PR immune to UV exposure by a plasma.
9. The method of claim 1 , wherein pre-exposing the PR to ultra violet (UV) light before depositing or etching a MO later on-to the PR is performed in an existing substrate processing tool having a UV light source.
10. The method of claim 1, wherein pre-exposing the PR to ultra violet (UV) light before depositing or etching a MO later onto the PR is performed in an external chamber fitted with a UV light source.
11. The method of claim 1, wherein the substrate is processed in a substrate processing tool, the substrate processing tool including a plasma source for generating plasma, the plasma including a constituent in an amount sufficient to generate UV light for pre-exposing the PR to the UV light.
12. The method of claim 1 1, wherein the plasma constituent includes one or more constituents including helium, argon, and nitrogen.
13. The method of claim 1, wherein the MO layer includes tin oxide.
14. A method of processing a substrate, the method comprising: applying a PR onto a surface of the substrate; pre-exposing the PR to ultra violet (UV) light before depositing or etching a layer onto the PR; and depositing or etching a layer onto the PR subsequent to pre- exposmg the PR to UV light.
15. The method of claim 14, wherein the layer includes one or more of a MO layer, a metal nitride layer, a metal carbide layer, and a metal layer.
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