WO2020097941A1 - 一种用于三维检测的光学引擎和三维检测设备 - Google Patents

一种用于三维检测的光学引擎和三维检测设备 Download PDF

Info

Publication number
WO2020097941A1
WO2020097941A1 PCT/CN2018/116042 CN2018116042W WO2020097941A1 WO 2020097941 A1 WO2020097941 A1 WO 2020097941A1 CN 2018116042 W CN2018116042 W CN 2018116042W WO 2020097941 A1 WO2020097941 A1 WO 2020097941A1
Authority
WO
WIPO (PCT)
Prior art keywords
optical engine
light beam
dmd
dimensional detection
light
Prior art date
Application number
PCT/CN2018/116042
Other languages
English (en)
French (fr)
Inventor
吴俊�
李文静
董永红
Original Assignee
北京闻亭泰科技术发展有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 北京闻亭泰科技术发展有限公司 filed Critical 北京闻亭泰科技术发展有限公司
Priority to US17/282,406 priority Critical patent/US20210385427A1/en
Priority to PCT/CN2018/116042 priority patent/WO2020097941A1/zh
Priority to EP18940151.6A priority patent/EP3882566A4/en
Priority to CN201880098334.3A priority patent/CN112867905A/zh
Priority to JP2021518164A priority patent/JP2022504127A/ja
Publication of WO2020097941A1 publication Critical patent/WO2020097941A1/zh

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N13/00—Stereoscopic video systems; Multi-view video systems; Details thereof
    • H04N13/20—Image signal generators
    • H04N13/204—Image signal generators using stereoscopic image cameras
    • H04N13/254—Image signal generators using stereoscopic image cameras in combination with electromagnetic radiation sources for illuminating objects
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/04—Prisms
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/005—Projectors using an electronic spatial light modulator but not peculiar thereto
    • G03B21/008—Projectors using an electronic spatial light modulator but not peculiar thereto using micromirror devices
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/14—Details
    • G03B21/147—Optical correction of image distortions, e.g. keystone

Definitions

  • the embodiments of the present specification relate to the field of three-dimensional inspection equipment, and in particular to an optical engine for three-dimensional inspection.
  • Three-dimensional inspection is a three-dimensional measurement technology for products. It is mainly used to scan the spatial shape and structure of objects to obtain the spatial coordinates of the object surface. Its important significance is that it can convert the three-dimensional information of the real object into a digital signal that can be directly processed by the computer, and provides a very convenient and fast means for the digitization of the real object.
  • Three-dimensional inspection technology can achieve non-contact measurement, and has the advantages of fast speed and high accuracy, and its measurement results can be directly interfaced with a variety of software, which makes it popular today in the increasingly popular application of technologies such as CAD, CAM, CIMS, etc. .
  • the three-dimensional laser detector As a three-dimensional detection equipment, the three-dimensional laser detector has the characteristics of high precision, low environmental requirements, non-contact, etc., and has developed rapidly in recent years.
  • the core part of the 3D laser detector is the optical engine, and the DMD (Digital Micromirror Device) optical modulator is one of the most critical components in the optical engine.
  • the DMD is exclusively controlled by Texas Instruments (TI) in the United States And developed digital image chip, it integrates the micro-electromechanical structure circuit unit, made by using COMS, SRAM memory unit.
  • TI Texas Instruments
  • SRAM SRAM memory unit
  • the three-dimensional inspection optical engine on the market is bulky; and the spatial position of the optical engine and the projection surface is parallel.
  • an effective spatial arrangement cannot be achieved.
  • an optical engine for three-dimensional detection including: a light source for emitting a light beam; a DMD light modulator for digital pulse width modulation of the light beam incident thereon; illumination optics A system that irradiates the light beam evenly on the DMD light modulator; a projection imaging system receives the reflected light beam from the DMD light modulator and projects the reflected light beam on the projection surface; wherein, the DMD light modulator and the The light exit surface of the illumination optical system is at a slight angle ⁇ , so that the optical path structure formed by the equivalent DMD light modulator, the lens positioning surface of the projection imaging system and the projection surface satisfies Sham's law.
  • the light source may be a blue LED.
  • the optical engine further includes a collimating lens group to convert the divergent light beam emitted by the light source into a parallel light beam.
  • the optical engine further includes a turning device to turn the parallel light beam.
  • the turning device may include a microlens array, a mirror, and a relay lens.
  • the illumination optical system includes a reflective total internal reflection RTIR prism.
  • a three-dimensional optical inspection device including at least one optical engine as described in the first aspect.
  • the beneficial effect of the optical engine according to the embodiment of the present invention is that it has the characteristics of small size and can realize oblique scanning.
  • FIG. 1 is a schematic diagram of an optical engine for three-dimensional detection according to an embodiment of the present invention.
  • FIG. 2 is an equivalent schematic diagram of an optical engine used for three-dimensional detection that satisfies Sham ’s law.
  • FIG. 1 is a schematic diagram of an optical engine for three-dimensional detection according to an embodiment of the present invention.
  • the optical engine includes a blue LED 1, a collimating lens group 2, a microlens array 3, a mirror 4, a relay lens 5, a RTIR prism 6, a DMD light modulator 7, and a projection imaging system 8.
  • the center wavelength of the light beam emitted by the blue LED 1 is, for example, 460 nanometers (nm), and the luminous power of the blue LED 1 is, for example, 5.5 watts (w).
  • the divergent blue light beam is converted into a blue parallel light beam.
  • Blue LED can provide higher optical engine power.
  • light sources other than blue LEDs can also be used, such as white LEDs.
  • the parallel beam of blue light then passes through the microlens array 3, and the microlens array 3 can converge the parallel beam.
  • the light beam condensed by the microlens array 3 reaches the mirror 4, and the mirror 4 turns the light beam after the microlens array 3 converges.
  • the mirror 4 helps to change the direction of the optical path, so that the space of the optical engine is compressed and the volume is reduced.
  • the converted light beam reaches the relay lens 5, and the relay lens 5 converges the converted light beam of the mirror 4.
  • the mirror 4 and the relay lens 5 can be used to collimate, converge, and / or turn the light beam.
  • the re-converged light beam is uniformly irradiated on the DMD light modulator 7 through the RTIR (Reflected Total Internal Reflection) prism 6 and the light beam reflected by the DMD light modulator enters the RTIR prism again.
  • the RTIR prism has a surface close to the critical angle of reflection, on which a certain angle beam undergoes total internal reflection and other angle beams pass through the surface.
  • the light beam that enters the RTIR prism 6 through the lens 5 will pass through when it enters the hypotenuse of the right-angle prism of the RTIR prism 6 and then enter the DMD7. After the DMD7 reflects the light beam, it will pass through the hypotenuse of the right-angle prism Total reflection.
  • the incident illumination beam and the outgoing imaging beam can be separated from each other.
  • the light beam emitted from the RTIR prism 6 will be incident on the projection imaging system 8.
  • RTIR prisms can also be used instead of RTIR prisms.
  • TIR prisms can be used instead of RTIR prisms.
  • the benefit of RTIR prisms is that it can eliminate the influence of the gap between the glued surfaces of the two prisms on the image quality of the projection surface 9.
  • the working mode of the DMD light modulator 7 is mainly to adjust the rotation position of each micromirror on the chip according to different signals transmitted to the CMOS chip by the back-end circuit, so that the light irradiated on the micromirror is selectively reflected to different directions, thereby To achieve the effect of digital pulse width modulation of the beam.
  • the DMD light modulator 7 and the RTIR prism 6 form a slight angle ⁇ , the purpose is to make the optical path structure satisfy Sham's law.
  • the projection imaging system 8 projects the pattern on the DMD light modulator 7 onto the projection surface 10.
  • the projection imaging system 8 may include several optical lenses, and its function is to project the figure on the DMD light modulator 7 on the projection surface 9 according to a certain magnification, wherein the optical axis of the projection imaging system 8 and the projection surface 9
  • the normal angle of is ⁇ , which can achieve oblique scanning.
  • the distance from the DMD light modulator 7 'to the main surface of the projection imaging system 8 be t
  • the distance from the projection surface 9 to the main surface of the projection imaging system 8 be d
  • the focal length of the projection imaging system 8 be f.
  • the projection surface 9 reaches the projection imaging system 8
  • the distance d of the main surface is 133.09mm
  • the equivalent DMD light modulator 7 ', the lens positioning surface 10, and the projection surface 9 intersect in a straight line L, and the optical path structure satisfies Sham's law. Since the light beam from the equivalent DMD light modulator 7 'is in focus on the projection surface, the image captured based on the projection surface will be fully clear.
  • the volume of the optical engine of the embodiment of the present invention is greatly reduced.
  • the size of the optical engine is, for example, 105 mm * 80 mm * 55 mm.
  • the object is rotated at a point where the projection surface intersects with the extension line of the optical path, whereby a stereoscopic image of the surface of the object can be obtained.
  • two optical engines are disposed symmetrically with respect to the normal of the projection surface in the three-dimensional detection device, so that a considerable part of the stereo image on the surface of the object can be directly obtained.
  • a stereoscopic image of the entire surface of the object can be obtained. Since there is a certain angle between the optical engine and the projection plane, the optical engine can be effectively spatially arranged in the three-dimensional detection device.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

一种用于三维检测的光学引擎和三维检测设备，光学引擎包括有沿光路顺次设置的光源(1)、照明光学系统(6)、DMD光调制器(7)，投影成像系统(8)和投影面(9)。光源发出的光经过准直、转折或汇聚等多个步骤，均匀地照射在DMD光调制器上，投影成像系统把经过DMD光调制器调制的光束投射在投影面上。光学引擎具有体积小、可以实现倾斜扫描等特点。

Description

一种用于三维检测的光学引擎和三维检测设备 技术领域
本说明书实施例涉及三维检测设备领域，具体涉及一种用于三维检测的光学引擎。
背景技术
三维检测是一种产品三维尺寸的测量技术，主要用于对物体空间外形和结构进行扫描，以获得物体表面的空间坐标。它的重要意义在于能够将实物的立体信息转换为计算机能直接处理的数字信号，为实物数字化提供了相当方便快捷的手段。三维检测技术能实现非接触测量，且具有速度快、精度高的优点，而且其测量结果能直接与多种软件接口，这使它在CAD、CAM、CIMS等技术应用日益普及的今天很受欢迎。
作为一种三维检测设备，三维激光检测仪具有精度高、对环境要求低、非接触等特点，近年来发展速度迅猛。三维激光检测仪的核心部分是光学引擎，而DMD(数字微镜器件，Digital Micro-mirror Device)光调制器是光学引擎中最关键的部件之一，DMD是由美国德州仪器(TI)独家掌握并开发的数字图像芯片，它整合了微机电结构电路单元，利用COMS、SRAM记忆单元所制成。当DMD正常工作的时候，光通过光学部件照射到DMD上，布满在DMD表面上的体积微小、可电路控制转动的镜片便会通过转动来反射光线，再配合照明光学系统和投影成像系统便能投射出需要的画面图案。
目前市面上的三维检测光学引擎体积大；而且光学引擎与投影面空间位置是平行的，当三维检测设备使用两个或者两个以上光学引擎时，无法实现有效的空间排布。
发明内容
根据本发明的第一方面，提供一种用于三维检测的光学引擎，包括：光源，用于发射光束；DMD光调制器,用于对入射在其上的光束进行数字脉冲宽度调制；照明光学系统，将光束均匀照射在所述DMD光调制器上；投影成像系统，接收来自所述DMD光调制器的反射光束并且将反射光束投射在投影面；其中，所述DMD光调制器与所述照明光学系统的光出射面呈一个微小的角度α，使得等效的DMD光调制器、投影成像系统的镜头定位面和投影面构成的光路结构满足沙姆定律。
在一个实施例中，光源可以是蓝光LED。
在一个实施例中，光学引擎还包括准直透镜组，将由所述光源所发出的发散光束转变为平行光束。
在一个实施例中，光学引擎还包括转折装置，对所述平行光束进行转折。所述转折装置可以包括微透镜阵列、反光镜和中继透镜。
在一个实施例中，所述照明光学系统包括反射式全内反射RTIR棱镜。
根据本发明的第二方面，提供一种三维光学检测设备，其包括至少一个如第一方面所述的光学引擎。
根据本发明实施例的光学引擎有益效果在于：具有体积小以及可以实现倾斜扫描等特点。
附图说明
为了使本申请实施例中的技术方案及优点更加清楚明白，以下结合附图对本申请的示例性实施例进行进一步详细的说明，显然，所描述的实施例仅是本申请的一部分实施例，而不是所有实施例的穷举。
图1是根据本发明实施例的用于三维检测的光学引擎示意图。
图2为一种用于三维检测的光学引擎满足沙姆定律的等效示意图。
具体实施方式
下面通过附图和实施例，对本实用新型的技术方案做进一步的详细描述。
图1是根据本发明实施例的用于三维检测的光学引擎示意图。如图1所示，光学引擎包括蓝光LED1、准直透镜组2、微透镜阵列3、反光镜4、中继透镜5、RTIR棱镜6、DMD光调制器7以及投影成像系统8。
蓝光LED1发出的光束中心波长为例如460纳米(nm)，蓝光LED1的发光功率为例如5.5瓦特(w)。经过准直透镜组2后，蓝光发散光束转变为蓝光平行光束。蓝光LED可以提供较高的光学引擎功率。当然，蓝光LED以外的其它光源也可以采用，比如白光LED。
蓝光平行光束再经过微透镜阵列3，微透镜阵列3可以将平行光束会聚。
经过微透镜阵列3会聚之后的光束到达反光镜4，反光镜4对微透镜阵列3汇聚之后的光束进行转折。反射镜4有助于改变光路方向，使得光学引擎的空间有所压缩，体积得以降低。
转折后的光束到达中继透镜5，中继透镜5对反光镜4转折后的光束进行会聚。
当然，除微透镜阵列3、反射镜4和中继透镜5外，可以采用其它类型的匀光和/或转折装置将光束进行准直、会聚和/或转折。
再次会聚后的光束经RTIR(反射式全内反射,Reflected Total Internal Reflection)棱镜6均匀地照射在DMD光调制器7上，由DMD光调制器反射的光束再次进入RTIR棱镜。RTIR棱镜具有接近反射临界角的表面，在该表面上，某个角度光束经历全内反射而其它角度的光束通过该表面。具体地说，由透镜5进入RTIR棱镜6的光束在入射到RTIR棱镜6的直角三棱镜斜边的时候会全部透过然后入射在DMD7上，经DMD7反射后光束再次经过直角三棱镜斜边时会发生全反射。借助于RTIR棱镜，入射的照射光束和出射的成像用光束得以相互分离。从RTIR棱镜6出射的光束将入射到投影成像系统8上。
当然，其它类型的棱镜也可以用于代替RTIR棱镜。比如，TIR棱镜可以 用于代替RTIR棱镜，当然RTIR棱镜的好处是可以消除两个棱镜胶合面的间隙对于投影面9图形质量的影响。
DMD光调制器7的工作方式主要是依据后端电路传递给CMOS芯片的不同信号,调控片上每个微镜的旋转位置，进而使得照射在微镜上的光线有选择地反射到不同方向,从而达到对光束进行数字脉冲宽度调制的效果。
所述DMD光调制器7与RTIR棱镜6呈一个微小的角度α，目的是让光路结构满足沙姆定律。
最后，由投影成像系统8把DMD光调制器7上的图案投射在投影面10上。所述投影成像系统8可以包含若干个光学透镜，其作用是把DMD光调制器7上的图形按照一定的放大倍数投射在投影面9上，其中，投影成像系统8的光轴与投影面9的法线夹角为β，由此可以实现倾斜扫描。
设DMD光调制器7’到投影成像系统8主面的距离为t，投影面9到投影成像系统8主面的距离为d，投影成像系统8的焦距为f。
根据物像关系公式：1/t+1/d＝1/f  ①
根据示意图中的几何关系得到：t/tanα＝d/tanβ  ②
联合关系式①与关系式②，消掉t，得到α与β的关系为：
α＝atan[f*tanβ/(d-f)]
在一个例子中，如图2所示，投影成像系统的光轴与投影面的法线夹角为β＝30°，投影成像系统8的焦距f＝17.94mm，投影面9到投影成像系统8主面的距离d＝133.09mm，对应的DMD光调制器与RTIR棱镜的夹角为α＝5.14°。最终，经RTIR棱镜反射后等效DMD光调制器7’，镜头定位面10，投影面9三个平面相交于一条直线L，其光路结构满足沙姆定律。由于来自等效DMD光调制器7’的光束合焦于投影面，因此基于投影面所捕获的影像将是全面清晰的。
由于转折装置的采用，本发明实施例的光学引擎的体积大为缩小。在一个例子中，光学引擎的尺寸为，例如，105mm*80mm*55mm。
将上述的光学引擎应用在三维检测设备中，可以获得清晰的物体表面空间图像。
在一个实施例中，通过在三维检测设备中设置旋转装置，使得物体在投影面与光路延长线相交点处旋转，由此，可以获得物体表面的立体图像。
在另一个实施例中，在三维检测设备中相对投影面的法线左右对称地设置两个光学引擎，如此可以直接获得物体表面的相当一部分立体图像。当然，借助于旋转装置，可以获得全部的物体表面的立体图像。由于光学引擎与投影平面之间存在一定的夹角，因此在三维检测设备中可以有效地对光学引擎进行空间排布。
虽然前文以物体旋转为例，对三维检测的情况做了描述。但是，也可以通过引擎旋转的方式来扫描到物体的不同侧面，得到物体的实际形状。
最后所应说明的是，以上实施例仅用以说明本发明的技术方案而非限制，尽管参照较佳实施例对本发明进行了详细说明，本领域的普通技术人员应当理解，可以对本发明的技术方案进行修改或者等同替换，而不脱离本发明技术方案的精神和范围。

Claims (7)

  1. 一种用于三维检测的光学引擎，其特征在于，包括：
    光源(1)，用于发射光束；
    数字微镜器件DMD光调制器(7),用于对入射在其上的光束进行数字脉冲宽度调制；
    照明光学系统(6)，将光束均匀照射在所述DMD光调制器(7)上；
    投影成像系统(8)，接收来自所述DMD光调制器(7)的出射光束并且将出射光束投射在投影面(9)；
    其中，所述DMD光调制器(7)与所述照明光学系统的光出射面呈一个微小的角度(α)，使得等效的DMD光调制器(7’)、投影成像系统的镜头定位面(10)和投影面(9)构成的光路结构满足沙姆定律。
  2. 根据权利要求1所述的一种用于三维检测的光学引擎，其特征在于：所述光源(1)为蓝光LED。
  3. 根据权利要求1所述的一种用于三维检测的光学引擎，其特征在于：光学引擎还包括准直透镜组(2)，将由所述光源(1)所发出的发散光束转变为平行光束。
  4. 根据权利要求1所述的一种用于三维检测的光学引擎，其特征在于：光学引擎还包括转折装置(3，4，5)，对所述光束进行转折。
  5. 根据权利要求4所述的一种用于三维检测的光学引擎，其特征在于：所述转折装置包括微透镜阵列(3)、反光镜(4)和中继透镜(5)；其中微透镜阵列将光束会聚到反光镜，中继透镜将来自反光镜的光束会聚。
  6. 根据权利要求1所述的一种用于三维检测的光学引擎，其特征在于：所述照明光学系统包括反射式全内反射RTIR棱镜(6)，用于允许光束通过并且照射到DMD光调制器上，并且使来自DMD光调制器的出射光束和入射光束分离。
  7. 一种三维检测设备，包括至少一个如权利要求1-6之一的光学引擎。
PCT/CN2018/116042 2018-11-16 2018-11-16 一种用于三维检测的光学引擎和三维检测设备 WO2020097941A1 (zh)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US17/282,406 US20210385427A1 (en) 2018-11-16 2018-11-16 Optical Engine for 3D Detection and 3D Detection Device
PCT/CN2018/116042 WO2020097941A1 (zh) 2018-11-16 2018-11-16 一种用于三维检测的光学引擎和三维检测设备
EP18940151.6A EP3882566A4 (en) 2018-11-16 2018-11-16 OPTICAL THREE-DIMENSIONAL DETECTION MACHINE AND THREE-DIMENSIONAL DETECTION DEVICE
CN201880098334.3A CN112867905A (zh) 2018-11-16 2018-11-16 一种用于三维检测的光学引擎和三维检测设备
JP2021518164A JP2022504127A (ja) 2018-11-16 2018-11-16 ３ｄ検出用光学エンジンおよび３ｄ検出デバイス

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2018/116042 WO2020097941A1 (zh) 2018-11-16 2018-11-16 一种用于三维检测的光学引擎和三维检测设备

Publications (1)

Publication Number Publication Date
WO2020097941A1 true WO2020097941A1 (zh) 2020-05-22

Family

ID=70730383

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2018/116042 WO2020097941A1 (zh) 2018-11-16 2018-11-16 一种用于三维检测的光学引擎和三维检测设备

Country Status (5)

Country Link
US (1) US20210385427A1 (zh)
EP (1) EP3882566A4 (zh)
JP (1) JP2022504127A (zh)
CN (1) CN112867905A (zh)
WO (1) WO2020097941A1 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113156753A (zh) * 2021-04-30 2021-07-23 博众精工科技股份有限公司 一种投影系统及投影仪
CN114217497A (zh) * 2021-12-10 2022-03-22 广景视睿科技（深圳）有限公司 一种微型投影光机

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105698707A (zh) * 2014-11-28 2016-06-22 上海航天动力科技工程有限公司 一种光栅三维形貌测量仪及其应用
CN106443691A (zh) * 2016-09-09 2017-02-22 西安交通大学 一种基于数字微镜器件dmd的三维成像系统及成像方法
CN106568395A (zh) * 2016-10-26 2017-04-19 西南科技大学 一种数字光栅与物理光栅相结合微小物体表面三维测量系统
CN107607040A (zh) * 2017-08-11 2018-01-19 天津大学 一种适用于强反射表面的三维扫描测量装置及方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7236285B2 (en) * 2004-02-12 2007-06-26 Seiko Epson Corporation Light modulation device and optical display device, and light modulation method and image display method
JP4677724B2 (ja) * 2004-02-17 2011-04-27 セイコーエプソン株式会社 投射型表示装置、及び投射型表示装置の制御方法
JP3640391B1 (ja) * 2004-08-27 2005-04-20 株式会社林創研 照明光学装置
TWI305843B (en) * 2006-04-24 2009-02-01 Young Optics Inc Dlp projection apparatus
CN103529629B (zh) * 2012-08-30 2015-12-16 广景科技有限公司 Dlp微型投影机
JP2014106094A (ja) * 2012-11-27 2014-06-09 Keyence Corp 形状測定装置
JP5780659B2 (ja) * 2013-06-13 2015-09-16 ヤマハ発動機株式会社 ３次元形状測定装置
JP2015148570A (ja) * 2014-02-07 2015-08-20 株式会社ミツトヨ 光学式プローブ、取付カバー、および形状測定装置
CN206115128U (zh) * 2016-05-13 2017-04-19 北京闻亭泰科技术发展有限公司 一种数字光处理3d打印光学系统
CN106064476B (zh) * 2016-05-31 2018-08-14 北京闻亭泰科技术发展有限公司 一种基于3d打印机的调整装置及方法
JP6658351B2 (ja) * 2016-06-29 2020-03-04 株式会社リコー 画像表示装置およびヘッドアップディスプレイシステム
JP6736424B2 (ja) * 2016-08-26 2020-08-05 株式会社キーエンス 三次元測定装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105698707A (zh) * 2014-11-28 2016-06-22 上海航天动力科技工程有限公司 一种光栅三维形貌测量仪及其应用
CN106443691A (zh) * 2016-09-09 2017-02-22 西安交通大学 一种基于数字微镜器件dmd的三维成像系统及成像方法
CN106568395A (zh) * 2016-10-26 2017-04-19 西南科技大学 一种数字光栅与物理光栅相结合微小物体表面三维测量系统
CN107607040A (zh) * 2017-08-11 2018-01-19 天津大学 一种适用于强反射表面的三维扫描测量装置及方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP3882566A4 *

Also Published As

Publication number Publication date
CN112867905A (zh) 2021-05-28
JP2022504127A (ja) 2022-01-13
EP3882566A4 (en) 2022-06-15
US20210385427A1 (en) 2021-12-09
EP3882566A1 (en) 2021-09-22

Similar Documents

Publication Publication Date Title
WO2015172536A1 (zh) 直线型dlp微型投影机
WO2015172537A1 (zh) Dlp微型投影机
US9863759B2 (en) Illumination apparatus, pattern irradiation device, and system
US9557630B1 (en) Projection system with refractive beam steering
JP2004258666A5 (zh)
US20180164562A1 (en) Confocal microscopy system with vari-focus optical element
KR101188202B1 (ko) 프로젝션 디스플레이 장치의 광학계
WO2013053171A1 (zh) Dlp微型投影机及其投影方法
WO2018176613A1 (zh) 一种红外投影系统
WO2020097941A1 (zh) 一种用于三维检测的光学引擎和三维检测设备
TWI591417B (zh) 投影機
TW201508244A (zh) 光學影像擷取模組、對位方法及觀測方法
US8215777B2 (en) Light guide module and projection apparatus having the same
TW201303364A (zh) 投影裝置及其分光單元以及合光單元
JP3414164B2 (ja) 液晶プロジェクタ
JPH10301056A (ja) 投・受光装置
CN106990661A (zh) 一种用于三维扫描的dlp投影系统
WO2021078300A1 (zh) 三维扫描仪和三维扫描方法
US20060268417A1 (en) A Refractive Scheme for Dual Lamp High Brightness Projection System
JP7314659B2 (ja) 測距装置および撮影装置
WO2013183156A1 (ja) 投写型表示装置
CN113671782B (zh) 一种投影设备
CN115996283B (zh) 无需外接激光器及摄像模组的可触控交互的投影光机
CN214409568U (zh) 一种单色激光投影系统及3d相机
JP2017078733A (ja) 投写光学装置、およびプロジェクター

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 18940151

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2021518164

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

ENP Entry into the national phase

Ref document number: 2018940151

Country of ref document: EP

Effective date: 20210616