WO2020090342A1

WO2020090342A1 - Sensor device

Info

Publication number: WO2020090342A1
Application number: PCT/JP2019/039093
Authority: WO
Inventors: 侑佐藤; 絢也川口
Original assignee: 住友理工株式会社
Priority date: 2018-10-31
Filing date: 2019-10-03
Publication date: 2020-05-07
Also published as: JP2020069580A

Abstract

Provided is a sensor device having a novel configuration, the sensor device making it possible to sense proximity of a detection subject in a broad range through use of a capacitive planar sensor, and to detect the detection subject up to the same distance as at an intermediate portion of the planar sensor even at an end portion thereof. A sensor device 10 provided with a capacitive planar sensor 12, wherein the sensor device is provided with an auxiliary sensor 14 that operates through a detection principle different from that for the planar sensor 12, and a detection region 24 of the auxiliary sensor 14 includes a non-sensitive area 32 derived from an end part of the planar sensor 12.

Description

Sensor device

The present invention relates to a sensor device that detects the approach of a detection target.

Conventionally, a sensor device that detects the approach of a detection target has been known. For example, in Japanese Patent No. 59889993 (Patent Document 1), the robot arm and the operator are detected by detecting the approach of the operator to the robot arm. It has been proposed to prevent such collisions.

By the way, the sensor device may also employ a capacitance type sensor that detects the approach of a detection target based on a change in capacitance. The electrostatic capacitance type sensor can detect a detection target over a wide area by being provided so as to spread in a plane, for example.

For example, in a moving body that is automatically controlled to move, such as a robot arm, by mounting a capacitance type sensor on the surface, a detection target such as an operator can be approached over a wide range of the surface of the moving body. It becomes possible to detect.

However, as a result of the inventor's study, the capacitive planar sensor has a new problem that the detection target may not be detected at a certain distance even if the detection target is the same. In particular, industrial machines such as robot arms require detection at a fixed distance from the viewpoint of balancing work efficiency and safety, so the existence of an area where the detection target cannot be detected at a fixed distance becomes a greater problem. ..

Japanese Patent No. 59889993

The present invention has been made in view of the above circumstances, and a problem to be solved is to effectively detect the approach of a detection target in a wide area over the entire surface by a capacitance type planar sensor. An object of the present invention is to provide a sensor device having a novel structure that enables the above.

The following describes aspects of the present invention made to solve such problems. The constituent elements used in each of the following aspects can be used in any combination as much as possible.

That is, a first aspect of the present invention is a sensor device including a capacitance type planar sensor, the auxiliary sensor having a detection principle different from that of the planar sensor, and the detection area of the auxiliary sensor. Includes a dead area due to the end of the planar sensor.

According to the sensor device having the structure according to the first aspect as described above, the proximity of the detection target can be detected at a substantially constant distance over a wide range on the surface by the electrostatic capacitance type planar sensor. Will be possible.

While the capacitance type planar sensor can detect a wide area, the problem that there is a dead area (dead zone) of the detection target is that the change in the capacitance due to the detection target acts three-dimensionally. It was found that this is because the area of influence of the planar sensor is related to the detection level. That is, in the outer peripheral edge portion that is the end portion of the planar sensor, the facing area to the detection target is substantially smaller than the intermediate portion, so that the detectable distance is shortened and the dead area is formed. In this embodiment, a configuration is adopted in which the insensitive area peculiar to the capacitance type planar sensor is supplemented by using another auxiliary sensor having a different detection principle. Therefore, even when the detection target approaches the end portion of the planar sensor, it is possible to detect the detection target at the same distance or at a longer distance as when the intermediate position of the planar sensor approaches.

Moreover, since the auxiliary sensor is a sensor based on a different detection principle other than the capacitance type, even if the auxiliary sensor and the planar sensor are arranged close to each other, each sensor due to interference between the planar sensor and the auxiliary sensor Can be prevented from affecting the detection performance of.

A second aspect of the present invention is the sensor device according to the first aspect, wherein the auxiliary sensor is a directional sensor.

According to the second aspect, since the sensor is a directional sensor, for example, the overlapping of the detection area of the planar sensor and the detection area of the auxiliary sensor is suppressed, or the detection is unnecessary in the first place in avoiding a collision. It is possible to set the detection area of the auxiliary sensor that supplements the dead area of the planar sensor so as to prevent the sensor detection area from spreading to the point where unnecessary warnings are issued.

A third aspect of the present invention is the sensor device according to the second aspect, wherein the auxiliary sensor is a reflective photoelectric sensor.

According to the third aspect, since the auxiliary sensor is a reflective photoelectric sensor that detects the approach of the detection target by detecting the reflected light reflected by the detection target, the detection area of the auxiliary sensor is sufficiently large. It can be set to a distance. Further, for example, by adopting a photoelectric sensor that detects a detection target based on reflection of visible light or infrared laser, it is possible to set a detection region having high directivity, and to detect the detection region of the planar sensor. It is possible to suppress unnecessary duplication of.

According to a fourth aspect of the present invention, in the sensor device according to any one of the first to third aspects, the planar sensor and the auxiliary sensor are both provided on a movable body that is movable. There is something.

According to the fourth aspect, the approach of the detection target to the moving body can be detected by the combination of the detection area of the planar sensor and the detection area of the auxiliary sensor regardless of the position of the moving body.

According to a fifth aspect of the present invention, in the sensor device according to any one of the first to fourth aspects, at least one of the planar sensor and the auxiliary sensor is moved by a movable body that is movable. It is provided on a possible access member.

According to the fifth aspect, for example, when the detection target is likely to be sandwiched between a moving body such as a robot arm and an approaching member such as a wall, the detection target is approached between the moving body and the approaching member. Can be detected.

According to the present invention, the approach of the detection target can be effectively detected in a wide area over the entire surface by the electrostatic capacitance type planar sensor.

The perspective view which shows the sensor apparatus as 1st embodiment of this invention. FIG. 4 is a cross-sectional view showing the sensor device shown in FIG. 1 in a state of being attached to a link, and a view corresponding to a II-II cross section of FIG. 3. III-III sectional drawing of FIG. FIG. 2 is a front view of a robot arm equipped with the sensor device shown in FIG. 1. Sectional drawing which shows the sensor apparatus as 2nd embodiment of this invention in the mounting state to a robot arm and a wall. The perspective sectional view showing the sensor apparatus as a third embodiment of the present invention in the state of being attached to the robot arm. The bottom view of the sensor apparatus shown in FIG.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

1 to 3 show a sensor device 10 as a first embodiment of the present invention. The sensor device 10 is configured to include a planar sensor 12 and an auxiliary sensor 14.

The planar sensor 12 is a sensor having a first detection region 16 extending in a wide range as shown by a thin solid line in FIGS. 2 and 3, and detects the approach of the detection target A based on the change in capacitance. It is a capacitance type sensor. That is, when the detection target A, which is a conductor such as a human body, approaches the planar sensor 12, the sensor electrode 20 of the planar sensor 12, which will be described later, and the detection target A form a capacitor. As a result, in the state in which the detection voltage is applied to the sensor electrode 20, the capacitance increases as the detection target A approaches the planar sensor 12, so that the detection target A is detected based on the change in the capacitance. The approach can be detected.

The first detection region 16, which is the detection region of the planar sensor 12, is a region where the electrostatic capacitance detected by the planar sensor 12 when the detection target A enters is larger than a preset threshold value. The distance from the outer edge of the first detection region 16 shown by the thin solid line in FIGS. 2 and 3 to the planar sensor 12 is set according to a preset threshold value of capacitance or the like. The threshold value of the capacitance is, for example, based on the required detection area 17 that can avoid the contact between the detection target A and the link 36 of the robot arm 34 described later by the detection of the proximity of the detection target A. It is set so as to spread outside the detection required area 17 in the central portion.

Further, the planar sensor 12 has a substantially semi-cylindrical shape as a whole, the sensor electrode 20 is fixed to the outer peripheral surface of the substantially semi-cylindrical insulator layer 18, and the ground electrode is provided on the inner peripheral surface. 22 has a fixed structure.

The insulator layer 18 is made of an insulating material such as a rubber elastic body or a resin elastomer, and has a sheet shape. The insulator layer 18 is flexible and has flexibility.

The sensor electrode 20 is made of a conductive rubber or conductive resin, a conductive metal foil, or the like, in which a base material such as a rubber elastic body or a resin elastomer is mixed with a conductive filler such as silver powder or carbon black. The sensor electrode 20 is flexible and flexible. A protective layer that covers the outer peripheral surface of the sensor electrode 20 may be provided to prevent deterioration of the sensor electrode 20. Further, by covering the outer peripheral surface of the sensor electrode 20 with a buffer layer having a buffer property, it is possible to further improve safety.

Like the sensor electrode 20, the ground electrode 22 is made of a flexible conductor and is grounded to the ground potential. By providing the ground electrode 22, noise is reduced when the approach of the detection target A is detected, as will be described later.

The auxiliary sensor 14 is a sensor that detects the approach of the detection target A based on a detection principle different from the planar sensor 12, that is, a detection principle other than the capacitance type. The auxiliary sensor 14 is preferably a directional sensor. That is, the second detection area 24, which is the detection area of the auxiliary sensor 14, must extend substantially linearly without widening even at a position away from the auxiliary sensor 14, as shown by a thin solid line in FIGS. Is desirable.

As the auxiliary sensor 14, for example, a reflective photoelectric sensor that detects the approach of the detection target A by detecting the reflected light from the detection target A is preferably adopted. The reflective photoelectric sensor includes, for example, a light projecting unit that projects light rays such as visible light and infrared rays, and a light receiving unit that converts incident light rays into electric signals and detects the electric signals. In the reflective photoelectric sensor, when the detection target A enters the second detection area 24, the light beam projected from the light projecting unit is reflected by the detection target A, and the light receiving unit detects the reflected light. Thus, the approach of the detection target A is detected. When a reflective photoelectric sensor is used as the auxiliary sensor 14, the light beam projected from the light projecting portion is preferably a laser having excellent directivity.

The auxiliary sensor 14 is fixed to the insulator layer 18 of the planar sensor 12, for example. Specifically, for example, in the planar sensor 12, a plurality of cutouts 26 are provided at the ends of the sensor electrodes 20, and the auxiliary sensor 14 is exposed at the portion where the cutouts 26 are formed. Is stuck to. In the present embodiment, the plurality of auxiliary sensors 14 are arranged at substantially equal intervals in the axial direction at both ends of the planar sensor 12 in the circumferential direction. Furthermore, the plurality of auxiliary sensors 14 are arranged at substantially equal intervals in the circumferential direction at both ends of the planar sensor 12 in the axial direction.

The sensor device 10 including the planar sensor 12 and the auxiliary sensor 14 has an entire detection area 28 that is an area in which the detection target A can be detected when the detection target A approaches. The entire detection area 28 is an area formed by the first detection area 16 and the second detection area 24. The first detection area 16 and the second detection area 24 are indicated by thin lines in FIGS.

The first detection region 16 has a substantially semi-cylindrical shape that extends from the outer peripheral surface of the planar sensor 12 to the outer peripheral side and extends in the circumferential direction. The first detection region 16 has a short distance from the surface of the planar sensor 12 at both ends in the circumferential direction and both ends in the axial direction. That is, at a position close to the end of the planar sensor 12, the area of the capacitor constituted by the detection target A and the sensor electrode 20 becomes small, so that the capacitance of the capacitor becomes small. In other words, the planar sensor 12 has a smaller electrostatic capacitance detection level at the end portion than at the central portion. Since the planar sensor 12 detects the approach of the detection target A when the capacitance of the capacitor exceeds a preset threshold value, the first detection region 16 set by the threshold value is a planar state. In the vicinity of the end of the sensor 12, the distance from the planar sensor 12 becomes short and narrows.

Thus, the first detection region 16 is narrower near the end of the planar sensor 12, so that the first detection region 16 is closer to the detection-needed area 17 near the end of the planar sensor 12. The area is narrow and the dead area 32 of the planar sensor 12 is formed. The detection-needed area 17 is an area in which the approach of the detection target A should be detected, as indicated by the alternate long and short dash line in FIGS. By detecting, the contact between the detection target A and the link 36 of the robot arm 34, which will be described later, can be safely avoided. The detection required area 17 of the present embodiment is set at a substantially constant distance from the planar sensor 12 attached to the link 36.

The dead area 32 is shown in FIGS. 2 and 3 by being colored in light black, and is located in the detection required area 17 where the approach of the detection target A should be detected, and cannot be detected by the planar sensor 12. Is. The first detection region 16 has an intermediate portion that is the same as the detection required area 17 or extends outside the detection required area 17. Therefore, when the first detection area 16 is widened so as to eliminate the dead area 32, the intermediate portion of the first detection area 16 largely expands outward with respect to the detection required area 17, and the detection target located at a long distance. A may be unnecessarily detected.

The second detection area 24 extends toward the outer circumference in the radial direction of the planar sensor 12. Since the auxiliary sensor 14 is a directional sensor, the second detection region 24 extends substantially linearly. Since the auxiliary sensor 14 is arranged at the end of the planar sensor 12, the second detection region 24 includes the dead area 32 of the planar sensor 12. As shown in FIGS. 2 and 3, the second detection area 24 does not include the entire dead area 32 of the planar sensor 12, but is not included in the second detection area 24 in the dead area 32. The area is narrow enough. Preferably, the detection target A cannot enter the dead area 32 without entering either the first detection area 16 or the second detection area 24.

As shown in FIG. 4, the sensor device 10 is attached to a link 36 as a moving body that constitutes the robot arm 34. The robot arm 34 has a structure in which a plurality of links including a link 36 are connected by a joint so as to be relatively displaceable, and the links 36 are movable by automatic control. Then, the ground electrode 22 is superimposed and fixed on the surface of the link 36, so that both the planar sensor 12 and the auxiliary sensor 14 of the sensor device 10 are attached to the robot arm 34. The sensor device 10 is preferably removably attached to the link 36. For example, the sensor device 10 can be detachably attached to the link 36 by means of an adhesive tape, a surface fastener, fitting by the unevenness provided on the overlapping surface of the ground electrode 22 and the link 36, or the like.

By mounting the sensor device 10 on the link 36 of the robot arm 34, the entire detection area 28 of the sensor device 10 is set on the outer circumference of the link 36 that is substantially cylindrical. As a result, the approach of the detection target A to the link 36 is detected by the sensor device 10.

The detection target A is not particularly limited, but is, for example, a person (worker) who works near the robot arm 34. When the detection target A enters the entire detection region 28 of the sensor device 10 and the approach of the detection target A is detected by the sensor device 10, a control device (not shown) connected to the sensor device 10 moves the robot arm 34. It is supposed to be an emergency stop. However, the response when the sensor device 10 detects the approach of the detection target A is not particularly limited. Specifically, for example, it may be control of the robot arm 34 such that the moving speed of the robot arm 34 is reduced or the moving direction of the robot arm 34 is changed so as to move away from the detection target A. If the worker is a worker, it is possible to respond to the detection target A by notifying the approach by sound or light.

As described above, when the sensor device 10 is attached to the link 36 of the robot arm 34, the approach of the detection target A can be detected by the sensor device 10, and thus the contact between the link 36 and the detection target A can be prevented.

Since the sensor device 10 includes the planar sensor 12, the approach of the detection target A can be comprehensively detected in a wide range by the wide first detection region 16 of the planar sensor 12. Moreover, since the planar sensor 12 is of the electrostatic capacitance type, the approach of the detection target A can be accurately detected.

At the position close to the end of the planar sensor 12, the detectable distance is shortened to form the dead area 32, but the second detection region 24 spreads to the dead area 32 due to the end of the planar sensor 12. ing. Therefore, in the whole where the sensor device 10 is provided, the approach of the detection target A can be detected at a substantially constant distance from the outer peripheral surface of the link 36. Therefore, the detection target A is not detected at a position closer to the end of the planar sensor 12, and the detection target A can be detected at a sufficiently distant position, so that the detection target A and the link 36 are brought into contact with each other. It is avoided and the safety is improved.

Moreover, the entire detection area 28 that is capable of being detected in the detection area 17 over such an entire area is realized without expanding the first detection area 16. That is, the first detection area 16 can be widened so that the dead area 32 is not formed inside the detection area 17, but in that case, the first detection area 16 in the middle portion becomes unnecessary. It becomes wide. However, in the sensor device 10 of the present embodiment, the dead area 32 of the planar sensor 12 is formed inside the detection required area 17, and the dead area 32 is covered by the second detection area 24. Therefore, it is possible to prevent the intermediate portion of the first detection region 16 from becoming unnecessarily wide. As a result, the detection accuracy of the planar sensor 12 can be improved and the cost can be reduced.

In the sensor device 10, since the auxiliary sensor 14 is a sensor having a detection principle different from that of the planar sensor 12, the sensor device 10 is compared with the case where both the planar sensor 12 and the auxiliary sensor 14 are capacitive sensors. Thus, the interference between the planar sensor 12 and the auxiliary sensor 14 is prevented. Therefore, the detection accuracy can be improved.

In the present embodiment, since both the planar sensor 12 and the auxiliary sensor 14 are attached to the link 36, a substantially constant entire detection area 28 is set around the link 36 regardless of the position or orientation of the link 36. .. Therefore, according to the sensor device 10, the detection performance does not change due to the movement of the link 36, and the approach of the detection target A can be stably detected. In particular, since the detection principles of the planar sensor 12 and the auxiliary sensor 14 are different, they do not interfere with each other even when they are arranged close to each other. Therefore, both the planar sensor 12 and the auxiliary sensor 14 are attached to the link 36. However, the detection target A can be effectively detected.

FIG. 5 shows a sensor device 40 as a second embodiment of the present invention. The sensor device 40 includes the planar sensor 12 mounted on the link 36 forming the robot arm 34, and the auxiliary sensor 14 mounted on the wall 42 that is an approaching member. In the following description, members and parts that are substantially the same as those in the first embodiment are designated by the same reference numerals in the drawings, and description thereof is omitted.

The sensor device 40 of the present embodiment performs the first detection when the detection target A enters between the link 36 and the wall body 42 in the state of FIG. 5 in which the link 36 of the robot arm 34 approaches the wall body 42. The detection target A is detected by the area 16 and the second detection area 24. The first detection area 16 and the second detection area 24 are indicated by thin solid lines in FIG.

The wall 42 is immovably provided, and is arranged at a position where the link 36 is close enough to sandwich the detection target A. Then, the auxiliary sensor 14 is provided at a portion of the wall 42 that the link 36 approaches. When the link 36 approaches the wall 42, the auxiliary sensor 14 covers the dead area 32 (area indicated by thin ink in FIG. 5) that the first detection area 16 attached to the link 36 does not reach. Has a detection area 24. In this embodiment, since the auxiliary sensor 14 is attached to the wall 42, the planar sensor 12 is attached to the link 36 of the robot arm 34, but the auxiliary sensor 14 is not attached. Furthermore, the sensor electrode 20 of the planar sensor 12 does not include the notch 26 of the above embodiment.

According to the sensor device 40 according to the present embodiment as described above, when the link 36 of the robot arm 34 approaches the wall 42, the detection target A such as an operator enters between the link 36 and the wall 42. It can detect if not. Therefore, the detection target A can be prevented from being caught between the link 36 of the robot arm 34 and the wall 42.

In particular, when the robot arm 34 is close to the wall 42, the second detection area 24 attached to the wall 42 spreads to the dead area 32 due to the end of the planar sensor 12 attached to the robot arm 34. ing. Therefore, even if the detection target A enters the blind area 32, the detection target A is detected by the auxiliary sensor 14.

The robot arm 34 provided with the link 36 can be moved by a preset movement pattern by automatic control. As a result, the link 36 approaches the wall 42 at a predetermined position and orientation, and when the link 36 approaches the wall 42, the dead area 32 of the planar sensor 12 moves to the second area. It is covered by the detection area 24.

The detection function of the intrusion of the detection target A into the second detection area 24 by the auxiliary sensor 14 is turned on, for example, when the robot arm 34 (link 36) approaches the wall body 42, and the wall body 42 of the robot arm 34 is turned on. It is desirable to control so that it is turned off in the state of being separated from. With such a configuration, for example, in consideration of the movement pattern of the link 36 of the robot arm 34 preset by the work program of the robot, the detection signal from the auxiliary sensor 14 is output only during the time when the link 36 approaches the wall 42. It can be realized by enabling it. Alternatively, the sensor for detecting the approach of the link 36 to the wall 42 is configured by using the planar sensor 12 or another sensor, and the detection condition of the approach state of the link 36 to the wall 42 is used. Alternatively, the detection signal from the auxiliary sensor 14 may be validated.

The approaching member is not limited to the wall body 42 exemplified in this embodiment. For example, the approaching member is not limited to an immovable object such as the wall 42, and may be another robot arm or the like.

It is also possible to provide both the surface sensor 12 and the auxiliary sensor 14 on the wall 42. However, by providing either the planar sensor 12 or the auxiliary sensor 14 on the link 36, not only when the link 36 is located near the wall 42, but also when the link 36 is located far from the wall 42, Also, it is possible to detect the approach of the detection target A to the link 36.

FIG. 6 shows a sensor device 50 as a third embodiment of the present invention. The sensor device 50 is attached to the end portion of a robot arm 52 as a moving body. More specifically, the sensor device 50 is attached to the sensor mounting body 54 of the robot arm 52.

The sensor mounting body 54 is provided so as to surround the outer peripheral side of the end portion including the end effector 56 of the robot arm 52, and is connected to the robot arm 52 in the radial direction. The distal end portion and the proximal end portion of the sensor mounting body 54 are formed in a curved shape that inclines toward the inner circumference as going outward in the axial direction (vertical direction in FIG. 6) of the sensor mounting body 54, which has a substantially cylindrical shape. ing. The tip portion of the end effector 56 projects from the lower opening 58 of the sensor mounting body 54 to the tip side and is exposed to the outside. A sensor device 50 including the planar sensor 12 and the auxiliary sensor 14 is attached to the sensor mounting body 54.

The planar sensor 12 is attached to the outer peripheral surface of the sensor mounting body 54 in a stacked state. As a result, the first detection region 16 shown by the thin solid line in FIG. 6 is formed. The first detection region 16 extends to the outer peripheral side and the tip side of the sensor mounting body 54. The first detection region 16 extends to the tip side of the end effector 56 of the robot arm 52.

A plurality of auxiliary sensors 14 are attached to the tip of the sensor mounting body 54. As shown in FIG. 7, the auxiliary sensor 14 is provided in the peripheral portion of the lower opening 58 of the sensor mounting body 54, and a plurality of auxiliary sensors 14 are provided dispersed in the circumferential direction. As shown by the thin solid line in FIG. 6, the second detection region 24 extends toward the tip side and extends beyond the end effector 56 of the robot arm 52 to the tip side.

The second detection area 24 is set to include the dead area 32 of the planar sensor 12 (area shown by thin ink in FIG. 6) as shown by a thin line in FIG. That is, the first detection region 16 is narrowed on the tip side (the end portion on the lower opening 58 side of the sensor mounting body 54), and the annular dead area 32 is formed on the tip side. Then, the plurality of second detection regions 24 are set to extend toward the tip side including the dead area 32. The plurality of second detection areas 24 need not cover the entire dead area 32, and may be set so that the detection target A that has entered the dead area 32 can be effectively detected.

According to the sensor device 50 according to the present embodiment as described above, not only the detection target A approaching the robot arm 52 from the outer peripheral side but also the detection target A approaching the robot arm 52 from the tip side is detected. You can Particularly, when the detection target A is detected in a wide range by the electrostatic capacitance type planar sensor 12 and the detection target A approaches the robot arm 52 from the distal end side, the detection target A approaches from the outer peripheral side. Also, the detection target A is detected by the planar sensor 12.

Further, since the dead area 32 due to the tip end of the planar sensor 12 is covered by the plurality of second detection areas 24, particularly when the detection target A approaches the robot arm 52 from the tip side. In addition, the detection target A can be detected at a sufficiently distant position by the planar sensor 12 and the auxiliary sensor 14.

Since the dead area 32 of the planar sensor 12 is also formed by the end portion on the base end side, the auxiliary sensor 14 is provided on the end portion on the base end side of the sensor mounting body 54, and the dead area on the base end side is not provided. The area 32 can also be covered by the second detection area 24.

Although the embodiments of the present invention have been described in detail above, the present invention is not limited by the specific description thereof. For example, the planar sensor is not limited to the semi-cylindrical shape, and may be, for example, a flat plate shape or a substantially cylindrical shape. In the case where the planar sensor has a cylindrical shape with no circumferential end, the auxiliary sensor is arranged so as to cover the detection blank area formed at the axial end of the planar sensor.

 The target for mounting the sensor is not limited to the robot arm. Specifically, for example, the sensor may be worn on a worker's clothes, and when the worker wears the sensor device on the arm of the clothes, another member (such as a robot arm or The approach of the arm to a wall or the like) is detected by the sensor device.

The detection principle of the auxiliary sensor is not particularly limited as long as it is different from the planar sensor, and the auxiliary sensor is not limited to the reflection type photoelectric sensor as long as it is other than the capacitance type sensor. Specifically, for example, an auxiliary sensor that detects a detection target by electromagnetic waves or ultrasonic waves can be used. Further, for example, the auxiliary sensor can also be configured by detecting the detection target by image processing based on the image or video captured by the camera. In the detection by such image processing, the camera that constitutes the auxiliary sensor may be attached to, for example, the ceiling or the like, not attached to either the detection target or the moving body or the approaching member that should prevent the detection target from approaching.

Further, in the above-described embodiment, for example, when the link 36 is grounded so as to have the ground potential, the ground electrode 22 can be omitted. Further, if the link 36 is an insulator, the insulator layer 18 can be omitted. Furthermore, by further providing an active guard electrode between the insulator layer 18 and the ground electrode 22, it is possible to set the first detection region 16 so as to extend to a further distance. The active guard electrode is a conductor similar to the sensor electrode 20, and a voltage having the same phase as the detection voltage applied to the sensor electrode 20 is applied. The voltage applied to the active guard electrode is preferably a voltage of the same waveform having the same phase and amplitude as the voltage applied to the sensor electrode 20. Further, when the active guard electrode is provided, the active guard electrode and the ground electrode 22 are electrically insulated.

Further, the insulator layer 18, the sensor electrode 20, and the ground electrode 22 that form the planar sensor 12 are not limited to those having flexibility and deformability as in the above-described embodiment, but may be hard members or the like. Is also good. That is, in the above-described embodiment, the constituent members of the planar sensor 12 are made of a flexible and flexible material so that they can be deformed according to the shape along the mounting surface of the link 36 of the robot arm 34, for example. Thus, there are advantages that it can be easily applied to various mounting surfaces, and that the allowable range of dimensional error in manufacturing can be increased. On the other hand, for example, when the size or shape of the mounting target is fixed to some extent, or when the mounting target is individually designed, the constituent members of the planar sensor 12 are not flexible. It is also possible to improve the matching accuracy by forming it with a non-reinforcing member.

10, 40, 50: Sensor device, 12: Planar sensor, 14: Auxiliary sensor, 16: First detection area (detection area of planar sensor), 24: Second detection area (detection area of auxiliary sensor) , 32: dead area, 36: link (moving body), 42: wall body (approaching member), 52: robot arm (moving body), A: detection target

Claims

A sensor device comprising a capacitance type planar sensor,
Equipped with an auxiliary sensor whose detection principle is different from that of the planar sensor,
A sensor device, wherein a detection area of the auxiliary sensor includes a dead area due to an end portion of the planar sensor.
The sensor device according to claim 1, wherein the auxiliary sensor is a directional sensor.
The sensor device according to claim 2, wherein the auxiliary sensor is a reflective photoelectric sensor.
The sensor device according to any one of claims 1 to 3, wherein the planar sensor and the auxiliary sensor are both provided on a moving body that can be moved by automatic control.
5. The sensor device according to claim 1, wherein at least one of the planar sensor and the auxiliary sensor is provided on an approaching member with which a moving body that moves in a preset movement pattern approaches. ..