WO2020078042A1 - 一种光学镜面球面隔膜支撑装置 - Google Patents

一种光学镜面球面隔膜支撑装置 Download PDF

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Publication number
WO2020078042A1
WO2020078042A1 PCT/CN2019/094117 CN2019094117W WO2020078042A1 WO 2020078042 A1 WO2020078042 A1 WO 2020078042A1 CN 2019094117 W CN2019094117 W CN 2019094117W WO 2020078042 A1 WO2020078042 A1 WO 2020078042A1
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Prior art keywords
diaphragm
support
cylinder
spherical
spherical diaphragm
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PCT/CN2019/094117
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English (en)
French (fr)
Inventor
程刚
金祖进
顾伟
徐世昌
张来宾
康彬
郭锋
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Shandong Zhongheng Optoelectronic Technology Co Ltd
China University of Mining and Technology CUMT
China University of Mining and Technology Beijing CUMTB
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Shandong Zhongheng Optoelectronic Technology Co Ltd
China University of Mining and Technology CUMT
China University of Mining and Technology Beijing CUMTB
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Publication of WO2020078042A1 publication Critical patent/WO2020078042A1/zh
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING, OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders

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  • the invention relates to an optical mirror surface support device, in particular to an optical mirror surface spherical diaphragm support device, which is particularly suitable for processing support of large optical mirror surfaces and belongs to the technical field of optical mirror surface processing equipment.
  • optical parts as core components have been widely used in military reconnaissance, aerospace and many civilian fields, such as projectors and camera lenses, viewfinders, telescopes and other fields, and modern optical systems It is rapidly developing in the direction of large diameter, high precision, high resolution and high power, and the demand for large optical mirrors is increasing. Therefore, the processing accuracy of optical mirrors has a higher standard.
  • the difficulty of supporting the main mirror also increases.
  • mechanical support and hydraulic support are mostly used as the main support methods.
  • the support devices used are mostly traditional hydraulic cylinders or diaphragm cylinders. These support devices inevitably have axial friction during the support process.
  • the output support force of each support device changes, which affects the processing accuracy of the optical mirror surface; and the support shaft of the support device itself cannot balance the radial load applied by the optical main mirror, so the radial support device needs to be installed, which leads to
  • the support structure is complex, it is difficult to adapt to some special processing environments, and the maintenance cost is high; and the tool has a certain impact force during the processing process. It is difficult for the traditional hydraulic cylinder to effectively absorb and unload the impact. When the instantaneous impact force is large, it is easy to make The optical mirror surface was damaged by the impact of the tool.
  • the present invention provides an optical mirror spherical diaphragm support device, which can realize the height support and posture adjustment during the processing of large optical main mirrors, and can provide accurate and adjustable during the processing
  • the supporting force and supporting height can simultaneously absorb the impact of the cutter on the mirror surface during the processing, and improve the processing accuracy of the optical mirror surface.
  • an optical mirror spherical diaphragm support device of the present invention includes a plurality of support cylinders evenly distributed at the lower end of the optical mirror surface.
  • the support cylinders are diaphragm support cylinders.
  • Each diaphragm support cylinder includes a spherical diaphragm, a cover plate and The cylinder block is open at the upper end and closed at the lower end.
  • the edge of the spherical diaphragm is pressed against the opening of the cylinder block by an annular cover plate, and the cover plate and the spherical diaphragm are fastened to the edge of the cylinder block by screws to support the diaphragm
  • the inside of the cylinder forms a closed cavity; the spherical apex of the spherical diaphragm is higher than the top of the cover plate, and the spherical diaphragm is made of a high-toughness elastic material; the sidewall of the cylinder is provided with an inlet and an outlet for filling and Discharge the medium in the cylinder.
  • the optical mirror surface is supported by multiple diaphragm support cylinders. Due to the gravity of the optical mirror surface itself, the top of the spherical diaphragm has a certain deformation. The spherical diaphragm and the optical mirror surface are in surface contact, so the support device is receiving When the radial force exerted by the optical mirror surface, there is a certain friction between the spherical diaphragm and the optical mirror surface, and the spherical diaphragm can produce a certain deformation in the radial direction, so it can balance the radial force applied by the mirror surface to the support device.
  • the filling amount can be controlled by an external system And the internal pressure of the cylinder block; because the diaphragm support cylinder does not have the internal friction resistance caused by mechanical friction during the traditional oil cylinder or cylinder support process during the support process, thereby eliminating the difference in output support force caused by the different internal resistance of the support device itself , So the support accuracy is higher; when the mirror is subjected to When the impact force is caused by tool vibration and other factors, the surface of the spherical diaphragm and the optical mirror surface also receives this impact.
  • the compressed medium in the closed cavity of the diaphragm support cylinder will be further compressed by the force.
  • the radius of deformation will be reduced, so that the impact force applied by the tool vibration is unloaded.
  • the spherical diaphragm will quickly restore the support position without impact due to the elasticity, which not only has good response performance, but also reduces the mirror surface due to tool impact The damage caused.
  • the medium filled in the cylinder is hydraulic oil or compressed gas. Because the hydraulic oil and gas have good fluidity and can make the spherical diaphragm have the same spherical radius during expansion and contraction, the spherical diaphragm can be expanded and contracted by adjusting the internal pressure of the diaphragm support cylinder sealing cavity to different degrees to adjust The purpose of the axial support stiffness and support height of the support device.
  • a sealing ring is installed at the connection between the edge of the spherical diaphragm and the cylinder.
  • the sealing ring can further improve the sealing performance of the diaphragm support cylinder, at the same time, it can buffer the pressing force exerted by the cover plate and the cylinder body during the installation of the spherical diaphragm, prevent the surface of the spherical diaphragm from being crushed, and further extend the service life of the spherical diaphragm.
  • the spherical diaphragm may use rubber material.
  • a plurality of diaphragm support cylinders evenly arranged at the lower end of the optical mirror surface constitute a support surface, and the support surface is divided into three sectors with an angle of 120 °.
  • the number of diaphragm support cylinders 8 in each sector is the same, and each sector
  • the performance parameters of each diaphragm support cylinder are the same and are connected in series, so as to form three separate control areas, and the height and posture of the mirror surface are adjusted by adjusting the support parameters of each sector support device.
  • the invention can realize the height support and posture adjustment during the processing of the large optical main mirror, and can provide accurate and adjustable support force and support height during the mirror surface processing through the multi-point arrangement, which not only has good flexible support performance, but also the diaphragm There is no mechanical friction during the axial movement of the support cylinder, which reduces the unevenness of the support force caused by energy loss. At the same time, the friction force between the spherical diaphragm and the mirror support in the radial direction can be used without affecting the axial support performance.
  • the radial applied load balances the radial applied load on the basis of; the spherical diaphragm can also absorb the impact of the cutter on the mirror surface during the processing and make a rapid response.
  • the invention greatly improves the processing accuracy of the optical mirror surface and the use of the support device Longevity, while reducing costs.
  • FIG. 1 is a schematic diagram of the structure of the diaphragm support cylinder in the present invention.
  • FIG. 2 is a schematic view of the state of the supporting optical mirror of the present invention.
  • an optical mirror spherical diaphragm support device includes a plurality of support cylinders evenly distributed at the lower end of the optical mirror surface 9, the support cylinder is a diaphragm support cylinder 8, and each diaphragm support cylinder 8 includes a spherical surface
  • the diaphragm 1, the cover plate 3 and the cylinder block 5 are open at the upper end and closed at the lower end.
  • the edge of the spherical diaphragm 1 is pressed against the opening of the cylinder block 5 by the ring-shaped cover plate 3, and the cover plate is screwed 3 and the spherical diaphragm 1 are fastened to the edge of the cylinder 5 to make the diaphragm support cylinder form a closed cavity; the spherical vertex of the spherical diaphragm 1 is higher than the top of the cover plate 3, and the spherical diaphragm 1 is made of a high-toughness elastic material Into the side wall of the cylinder 5 is provided with an inlet 6 and an outlet 7 for filling and discharging the medium in the cylinder, respectively.
  • the optical mirror surface 9 is supported by a plurality of diaphragm support cylinders 8. Due to the gravity of the optical mirror surface 9 itself, the top of the spherical diaphragm 1 has a certain deformation, and the spherical diaphragm 1 and the optical mirror surface 9 are in surface contact Therefore, when the supporting device is subjected to the radial force exerted by the optical mirror 9, there is a certain friction between the spherical diaphragm 1 and the optical mirror 9, and the spherical diaphragm 1 can produce a certain deformation in the radial direction, so it can be balanced
  • the radial force exerted by the mirror facing the support device; filling the inner cavity of the cylinder through the inlet 6 on the side wall of the cylinder 5 to make the inside of the cylinder have a certain pressure, thereby adjusting the support rigidity of the support device, in order to make each support
  • the support force of the cylinder is the same, the fill
  • the compressed medium in the closed cavity of the diaphragm support cylinder 8 will be affected by the force
  • the radius of deformation of the spherical diaphragm 1 will be reduced, thereby unloading the impact force exerted by the vibration of the cutter.
  • the spherical diaphragm 1 will quickly restore the support position without impact due to elasticity, which not only has good response performance , It can also reduce the damage of the mirror surface caused by the impact of the tool.
  • the medium filled in the cylinder 5 is hydraulic oil or compressed gas. Because the hydraulic oil and gas have good fluidity, the spherical diaphragm 1 can have the same spherical radius during expansion and contraction. Therefore, the internal pressure of the sealed cavity of the diaphragm support cylinder 8 can be adjusted to cause the spherical diaphragm 1 to expand and contract to different degrees. To adjust the axial support stiffness and support height of the support device.
  • a sealing ring 4 is installed at the connection between the edge of the spherical diaphragm 1 and the cylinder 5.
  • the sealing ring 4 can further improve the sealing performance of the diaphragm support cylinder 8 and at the same time can buffer the squeezing force exerted by the cover plate 3 and the cylinder body 5 during the installation of the spherical diaphragm 1, prevent the surface of the spherical diaphragm 1 from being crushed, and further extend the spherical diaphragm Service life.
  • the spherical diaphragm 1 may use rubber material.
  • a plurality of diaphragm support cylinders 8 evenly arranged at the lower end of the optical mirror surface 9 constitute a support surface, and divide the support surface into three sectors with an angle of 120 °.
  • the number of diaphragm support cylinders 8 in each sector is the same, each fan
  • the diaphragm support cylinders 8 in the area have the same performance parameters and are connected in series, so as to form three separate control areas, and the height and posture of the mirror surface are adjusted by adjusting the support parameters of the sector support devices respectively.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)

Abstract

一种光学镜面球面隔膜支撑装置，包括若干均布在光学镜面（9）下端的支撑缸，该支撑缸为隔膜支撑缸（8），每个隔膜支撑缸（8）均包括球面隔膜（1）、盖板（3）和缸体（5），缸体（5）上端开口，下端封闭，球面隔膜（1）的边沿被环形的盖板（3）压紧在缸体（5）的开口处，并利用螺钉（2）将盖板（3）和球面隔膜（1）紧固在缸体（5）边缘，使隔膜支撑缸内部构成一个封闭腔体；球面隔膜（1）的球面顶点高于盖板（3）顶部，且球面隔膜（1）由高韧性的弹性材料制成；缸体（5）的侧壁上开设有进口（6）和出口（7），分别用于填充和排出缸体内的介质。该光学镜面球面隔膜支撑装置可实现大型光学主镜加工过程中高度支撑和位姿调整，并可在加工过程中提供精确可调节的支撑力和支撑高度，同时能够吸收加工过程中刀具对镜面造成的冲击，提高光学镜面的加工精度。

Description

一种光学镜面球面隔膜支撑装置 技术领域
本发明涉及一种光学镜面的支撑装置，具体涉及一种光学镜面球面隔膜支撑装置，尤其适用于大型光学镜面的加工支撑，属于光学镜面加工设备技术领域。
背景技术
随着光学技术的飞速发展，作为核心元件的曲面光学零件在军事侦察领域、航空航天领域以及众多民用领域，譬如投影仪和照相机镜头，取景器，望远镜等领域均得到广泛应用，而且现代光学系统正朝着大口径、高精度、高分辨率及高功率的方向快速发展，对大型光学镜面的需求日益增长，因此对光学镜面的加工精度有了更高标准。但是在大口径和光学镜面的加工过程中，主镜的支撑难度也随之增加。目前在光学主镜的支撑过程中大多使用机械支撑和液压支撑作为主要支撑方式，使用的支撑装置多为传统的液压缸或者隔膜缸，这些支撑装置在支撑过程中难以避免地存在轴向摩擦，造成各支撑装置的输出支撑力发生变化，影响光学镜面的加工精度；而且支撑装置的支撑轴本身不能平衡光学主镜所施加的径向负载，因此还需要安装径向支撑装置，这就导致了支撑结构复杂，对一些特殊的加工环境难以适应，维护成本较高；且刀具在加工过程中存在一定的冲击力，传统的液压缸难以有效吸收并卸载冲击，当瞬时冲击力较大时容易使光学镜面被刀具冲击造成损坏。
发明内容
为了克服现有技术存在的各种不足，本发明提供一种光学镜面球面隔膜支撑装置，可实现大型光学主镜加工过程中高度支撑和位姿调整，并可在加工过程中提供精确可调节的支撑力和支撑高度，同时能够吸收加工过程中刀具对镜面造成的冲击，提高光学镜面的加工精度。
为了解决上述问题，本发明一种光学镜面球面隔膜支撑装置，包括若干均布在光学镜面下端的支撑缸，所述支撑缸为隔膜支撑缸，每个隔膜支撑缸均包括球面隔膜、盖板和缸体，所述缸体上端开口，下端封闭，球面隔膜的边沿被环形的盖板压紧在缸体的开口处，并利用螺钉将盖板和球面隔膜紧固在缸体边缘，使隔膜支撑缸内部构成一个封闭腔体；球面隔膜的球面顶点高于盖板顶部，且所述球面隔膜由高韧性的弹性材料制成；缸体的侧壁上开设有进口和出口，分别用于填充和排出缸体内的介质。
光学镜面加工过程中，光学镜面被多个隔膜支撑缸支撑，由于光学镜面本身的重力作用，使球面隔膜的顶部具有一定的变形，球面隔膜与光学镜面之间为面接触，因此支撑装置在受到光学镜面所施加的径向力时，由于球面隔膜和光学镜面之间存在一定的摩擦力，且球面隔膜能够在径向上产生一定的变形，因此在能够平衡镜面对支撑装置所施加的径向力；通过缸体侧壁上的进口向缸体内腔填充介质使缸体内部具有一定的压强，从而调节支撑装置的支撑刚度，为了使各支撑缸支撑力相同，可以通过外部系统控制填充量和缸体内部压强；由于隔膜支撑缸在支撑过程中不存在传统油缸或者气缸支撑过程中由于机械摩擦所导致的内部摩擦阻力，从而消除了由于支撑装置自身内部阻力不同所导致的输出支 撑力不同，因此支撑精度更高；当镜面在加工过程中受到由于刀具振动以及其他因素所导致的冲击力时，球面隔膜与光学镜面接触的面也接收到此冲击，此时隔膜支撑缸的密闭腔体内的压缩介质会因受力而进一步压缩，球面隔膜的变形的半径会缩小，从而将刀具振动施加的冲击力卸载掉，当冲击力消失时，球面隔膜会由于弹性迅速恢复无冲击的支撑位置，不仅具有良好的响应性能，还能够减少镜面因刀具冲击所造成的损坏。
进一步的，缸体内充填的介质为液压油或者压缩气体。由于液压油和气体有良好的流动性，能够使球面隔膜在伸缩过程中球面半径相同，因此可以通过调整隔膜支撑缸密封腔体的内部压强来使球面隔膜产生不同程度的伸缩，从而起到调整支撑装置的轴向支撑刚度和支撑高度的目的。
进一步的，球面隔膜边沿与缸体的连接处安装有密封圈。密封圈能够进一步提升隔膜支撑缸的密封性能，同时能够缓冲球面隔膜安装过程中所受到盖板与缸体施加的挤压力，防止压溃球面隔膜表面，进一步延长球面隔膜的使用寿命。
优选的，所述球面隔膜可以采用橡胶材料。
多个均匀布置在光学镜面下端的隔膜支撑缸构成支撑面，并将支撑面均分为三个角度为120°的扇区，各扇区内的隔膜支撑缸8数量相同，每个扇区内的各隔膜支撑缸性能参数相同且串联连通，从而形成三个单独控制区域，通过分别调整各扇区支撑装置的支撑参数来调整镜面的高度和位姿。
本发明可实现大型光学主镜加工过程中高度支撑和位姿调整，通过多点布置可在镜面加工过程中提供精确可调节的支撑力和支撑高度，不仅具有很好的柔性支撑性能，而且隔膜支撑缸在轴向运动过程中不存在机械摩擦，减少了能量损失带来的支撑力不均衡现象，同时在径向上依靠球面隔膜与镜面支撑之间的摩擦力，可以在不影响轴向支撑性能的基础上通过径向的受力变形平衡径向施加的负载；球面隔膜还能够吸收加工过程中刀具对镜面造成的冲击并作出迅速响应，本发明大大提高光学镜面的加工精度以及支撑装置的使用寿命，同时降低了成本。
附图说明
图1为本发明中隔膜支撑缸结构示意图；
图2为本发明支撑光学镜面状态示意图；
图中：1、球面隔膜；2、螺钉；3盖板；4、密封圈；5、缸体；6、进口；7、出口；8、隔膜支撑缸；9、光学镜面。
具体实施方式
下面结合附图和具体实施例对本发明做详细的阐述。
如图1和图2所示，一种光学镜面球面隔膜支撑装置，包括若干均布在光学镜面9下端的支撑缸，所述支撑缸为隔膜支撑缸8，每个隔膜支撑缸8均包括球面隔膜1、盖板3和缸体5，所述缸体5上端开口，下端封闭，球面隔膜1的边沿被环形的盖板3压紧在缸体5的开口处，并利用螺钉2将盖板3和球面隔膜1紧固在缸体5边缘，使隔膜支撑缸内部构成一个封闭腔体；球面隔膜1的球面顶点高于盖板3顶部，且所述球面隔膜1由高韧性的弹性材料制成；缸体5的侧壁上开设有进口6和出口7，分别用于填充和排出缸体内的介质。
光学镜面加工过程中，光学镜面9被多个隔膜支撑缸8支撑，由于光学镜面9本身的重力作用，使球面隔膜1的顶部具有一定的变形，球面隔膜1与光学镜面9之间为面接触，因此支撑装置在受到光学镜面9所施加的径向力时，由于球面隔膜1和光学镜面9之间存在一定的摩擦力，且球面隔膜1能够在径向上产生一定的变形，因此在能够平衡镜面对支撑装置所施加的径向力；通过缸体5侧壁上的进口6向缸体内腔填充介质使缸体内部具有一定的压强，从而调节支撑装置的支撑刚度，为了使各支撑缸支撑力相同，可以通过外部系统控制填充量和缸体内部压强；由于隔膜支撑缸8在支撑过程中不存在传统油缸或者气缸支撑过程中由于机械摩擦所导致的内部摩擦阻力，从而消除了由于支撑装置自身内部阻力不同所导致的输出支撑力不同，因此支撑精度更高；当镜面在加工过程中受到由于刀具振动以及其他因素所导致的冲击力时，球面隔膜1与光学镜面9接触的面也接收到此冲击，此时隔膜支撑缸8的密闭腔体内的压缩介质会因受力而进一步压缩，球面隔膜1的变形的半径会缩小，从而将刀具振动施加的冲击力卸载掉，当冲击力消失时，球面隔膜1会由于弹性迅速恢复无冲击的支撑位置，不仅具有良好的响应性能，还能够减少镜面因刀具冲击所造成的损坏。
进一步的，缸体5内充填的介质为液压油或者压缩气体。由于液压油和气体有良好的流动性，能够使球面隔膜1在伸缩过程中球面半径相同，因此可以通过调整隔膜支撑缸8密封腔体的内部压强来使球面隔膜1产生不同程度的伸缩，从而起到调整支撑装置的轴向支撑刚度和支撑高度的目的。
如图1所示，球面隔膜1边沿与缸体5的连接处安装有密封圈4。密封圈4能够进一步提升隔膜支撑缸8的密封性能，同时能够缓冲球面隔膜1安装过程中所受到盖板3与缸体5施加的挤压力，防止压溃球面隔膜1表面，进一步延长球面隔膜的使用寿命。
优选的，所述球面隔膜1可以采用橡胶材料。
多个均匀布置在光学镜面9下端的隔膜支撑缸8构成支撑面，并将支撑面均分为三个角度为120°的扇区，各扇区内的隔膜支撑缸8数量相同，每个扇区内的各隔膜支撑缸8性能参数相同且串联连通，从而形成三个单独控制区域，通过分别调整各扇区支撑装置的支撑参数来调整镜面的高度和位姿。

Claims (5)

  1. 一种光学镜面球面隔膜支撑装置，包括若干均布在光学镜面(9)下端的支撑缸，其特征在于，所述支撑缸为隔膜支撑缸(8)，每个隔膜支撑缸(8)均包括球面隔膜(1)、盖板(3)和缸体(5)，所述缸体(5)上端开口，下端封闭，球面隔膜(1)的边沿被环形的盖板(3)压紧在缸体(5)的开口处，并利用螺钉(2)将盖板(3)和球面隔膜(1)紧固在缸体(5)边缘，使隔膜支撑缸内部构成一个封闭腔体；球面隔膜(1)的球面顶点高于盖板(3)顶部，且所述球面隔膜(1)由高韧性的弹性材料制成；缸体(5)的侧壁上开设有进口(6)和出口(7)，分别用于填充和排出缸体内的介质。
  2. 根据权利要求1所述的光学镜面球面隔膜支撑装置，其特征在于，缸体(5)内充填的介质为液压油或者压缩气体。
  3. 根据权利要求2所述的光学镜面球面隔膜支撑装置，其特征在于：球面隔膜(1)边沿与缸体(5)的连接处安装有密封圈(4)。
  4. 根据权利要求3所述的光学镜面球面隔膜支撑装置，其特征在于，所述球面隔膜(1)可以采用橡胶材料。
  5. 根据权利要求1至4任一权利要求所述的光学镜面球面隔膜支撑装置，其特征在于，多个均匀布置在光学镜面(9)下端的隔膜支撑缸(8)构成支撑面，并将支撑面均分为三个角度为120°的扇区，各扇区内的隔膜支撑缸(8)数量相同，每个扇区内的各隔膜支撑缸(8)性能参数相同且串联连通，从而形成三个单独控制区域，通过分别调整各扇区支撑装置的支撑参数来调整镜面的高度和位姿。
PCT/CN2019/094117 2018-10-19 2019-07-01 一种光学镜面球面隔膜支撑装置 Ceased WO2020078042A1 (zh)

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