CN105467544B - 一种用于高精度光学元件的多点柔性支撑装置 - Google Patents
一种用于高精度光学元件的多点柔性支撑装置 Download PDFInfo
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- CN105467544B CN105467544B CN201510960101.8A CN201510960101A CN105467544B CN 105467544 B CN105467544 B CN 105467544B CN 201510960101 A CN201510960101 A CN 201510960101A CN 105467544 B CN105467544 B CN 105467544B
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- 230000003287 optical effect Effects 0.000 title claims abstract description 37
- 238000003825 pressing Methods 0.000 claims abstract description 8
- 238000005516 engineering process Methods 0.000 claims abstract description 7
- 230000035882 stress Effects 0.000 claims description 4
- 230000008646 thermal stress Effects 0.000 claims description 3
- 238000010276 construction Methods 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 230000003319 supportive effect Effects 0.000 claims 1
- 238000009827 uniform distribution Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 9
- 238000010586 diagram Methods 0.000 description 4
- 238000001900 extreme ultraviolet lithography Methods 0.000 description 2
- BWGNESOTFCXPMA-UHFFFAOYSA-N Dihydrogen disulfide Chemical compound SS BWGNESOTFCXPMA-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/028—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510960101.8A CN105467544B (zh) | 2015-12-21 | 2015-12-21 | 一种用于高精度光学元件的多点柔性支撑装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201510960101.8A CN105467544B (zh) | 2015-12-21 | 2015-12-21 | 一种用于高精度光学元件的多点柔性支撑装置 |
Publications (2)
Publication Number | Publication Date |
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CN105467544A CN105467544A (zh) | 2016-04-06 |
CN105467544B true CN105467544B (zh) | 2017-12-26 |
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Family Applications (1)
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CN201510960101.8A Active CN105467544B (zh) | 2015-12-21 | 2015-12-21 | 一种用于高精度光学元件的多点柔性支撑装置 |
Country Status (1)
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CN (1) | CN105467544B (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106556911B (zh) * | 2016-11-25 | 2019-04-23 | 中国科学院长春光学精密机械与物理研究所 | 一种独立支撑单元以及光学元件支撑装置 |
CN109352553A (zh) * | 2018-10-19 | 2019-02-19 | 山东中衡光电科技有限公司 | 一种光学镜面球面隔膜支撑装置 |
CN109483221A (zh) * | 2018-11-23 | 2019-03-19 | 北京卫星制造厂有限公司 | 一种空间机械臂低应力装配系统及方法 |
CN111722476B (zh) * | 2019-03-22 | 2022-04-26 | 上海微电子装备(集团)股份有限公司 | 柔性连接件、柔性吸附装置及光刻系统 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10139805C1 (de) * | 2001-08-13 | 2002-10-10 | Jenoptik Laser Optik Sys Gmbh | Spannungsarme Linsenfassung |
TW200903068A (en) * | 2007-03-05 | 2009-01-16 | Canon Kk | Optical element holding apparatus |
CN102162900A (zh) * | 2011-05-18 | 2011-08-24 | 中国科学院长春光学精密机械与物理研究所 | 反射镜高精度装夹装置 |
CN102565980A (zh) * | 2010-12-30 | 2012-07-11 | 上海微电子装备有限公司 | 一种光学元件固定装置及其安装方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006113414A (ja) * | 2004-10-18 | 2006-04-27 | Canon Inc | 光学素子保持装置、鏡筒、露光装置及びマイクロデバイスの製造方法 |
-
2015
- 2015-12-21 CN CN201510960101.8A patent/CN105467544B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10139805C1 (de) * | 2001-08-13 | 2002-10-10 | Jenoptik Laser Optik Sys Gmbh | Spannungsarme Linsenfassung |
TW200903068A (en) * | 2007-03-05 | 2009-01-16 | Canon Kk | Optical element holding apparatus |
CN102565980A (zh) * | 2010-12-30 | 2012-07-11 | 上海微电子装备有限公司 | 一种光学元件固定装置及其安装方法 |
CN102162900A (zh) * | 2011-05-18 | 2011-08-24 | 中国科学院长春光学精密机械与物理研究所 | 反射镜高精度装夹装置 |
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CN105467544A (zh) | 2016-04-06 |
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Effective date of registration: 20241031 Address after: Room 1, No. 3033 Pudong Road, Economic and Technological Development Zone, Changchun City, Jilin Province, China 130012 Patentee after: Changguang Jizhi Optical Technology Co.,Ltd. Country or region after: China Address before: 130033, 3888 southeast Lake Road, Jilin, Changchun Patentee before: CHANGCHUN INSTITUTE OF OPTICS, FINE MECHANICS AND PHYSICS, CHINESE ACADEMY OF SCIENCE Country or region before: China |
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