WO2020077627A1 - Capteur de fluide acoustique - Google Patents

Capteur de fluide acoustique Download PDF

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Publication number
WO2020077627A1
WO2020077627A1 PCT/CN2018/111066 CN2018111066W WO2020077627A1 WO 2020077627 A1 WO2020077627 A1 WO 2020077627A1 CN 2018111066 W CN2018111066 W CN 2018111066W WO 2020077627 A1 WO2020077627 A1 WO 2020077627A1
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fluid
acoustic
hollow cylindrical
ultrasonic
fluid sensor
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PCT/CN2018/111066
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English (en)
Chinese (zh)
Inventor
蔡飞燕
林勤
李飞
夏向向
周伟
孟龙
郑海荣
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中国科学院深圳先进技术研究院
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Priority to PCT/CN2018/111066 priority Critical patent/WO2020077627A1/fr
Publication of WO2020077627A1 publication Critical patent/WO2020077627A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids

Definitions

  • the invention relates to the technical field of fluid detection, in particular to an acoustic fluid sensor.
  • acoustic fluid sensors In the fields of biochemical detection, clinical medicine, environmental monitoring and food safety monitoring, the use of acoustic fluid sensors to quickly and accurately detect fluid parameters (such as composition, density, elastic modulus, sound velocity and viscosity, etc.) has important application value. Acoustic fluid sensors change in the properties (such as mechanical, chemical, and electrical properties) of the surrounding fluid medium, and can detect shifts in resonance modes such as frequency, amplitude, and phase to realize fluid sensing and detection.
  • acoustic fluid sensors mainly include surface wave sensors, Lamb wave sensors and phononic crystal sensors.
  • the surface wave fluid sensor uses the wave propagating on the surface of the piezoelectric substrate, and detects the parameter to be measured by the physical and chemical parameters disturbing the propagation characteristics of the acoustic wave.
  • the Lamb wave sensor utilizes the sound wave of the Lamb wave propagating in the thin plate, and is excited by the interdigital transducer placed on one surface of the piezoelectric thin plate and propagates in the piezoelectric thin plate.
  • Acoustic artificial structures are artificially designed composite structural materials that utilize the effects of Bragg scattering in periodic structures and local resonance in single structures to achieve flexible control of acoustic and elastic waves It is a research hotspot that has received much attention in the fields of physics and materials science in recent years.
  • the relevant physical properties of the acoustic artificial structure can be "manually tailored", which provides a solid physical foundation for the development of new functional devices.
  • Highly sensitive sensors are a major application direction of acoustic artificial structures in new functional devices.
  • the traditional acoustic fluid sensor has the defects of low quality factor and low sensitivity.
  • An embodiment of the present invention provides an acoustic fluid sensor to solve the defect of low quality factor existing in a conventional acoustic fluid sensor.
  • the acoustic fluid sensor includes:
  • Acoustic sensing device experimental container, ultrasonic transmitting device, ultrasonic receiving device and computing processing device;
  • the acoustic sensing device includes a hollow cylindrical shell for containing a load fluid, and a silicone tube provided at both ends of the hollow cylindrical shell and forming a through cavity therewith;
  • the experimental container is used to contain environmental fluid, the hollow cylindrical shell is immersed in the environmental fluid, and the acoustic sensing device is disposed between the ultrasonic transmitting device and the ultrasonic receiving device;
  • the ultrasonic wave emitting device emits ultrasonic waves into the environmental fluid to excite the load fluid in the hollow cylindrical shell to form a Scholte-Stoneley circumferential wave.
  • the Scholte-Stoneley circumferential wave satisfies the phase matching condition
  • the hollow A standing wave is formed around the cylindrical shell to generate a local sound field
  • the ultrasonic receiving device receives ultrasonic waves after passing through the acoustic sensing device;
  • the calculation processing device determines the normalized transmission spectrum data according to the first transmission spectrum data and the second transmission spectrum data, and determines the quality factor of the acoustic fluid sensor according to the normalized transmission spectrum data; wherein, the The first transmission spectrum data refers to the transmission spectrum data of the ultrasonic waves received by the ultrasonic receiving device when the acoustic sensing device and the load fluid are not included, and the second transmission spectrum data includes the acoustic sensing device and the load fluid The transmission spectrum data of the ultrasonic wave received by the ultrasonic receiving device at that time.
  • the acoustic fluid sensor includes an acoustic sensing device, an experimental container, an ultrasonic transmitting device, an ultrasonic receiving device, and a calculation processing device;
  • the acoustic sensing device includes a hollow cylindrical housing for containing a load fluid, and a Silicone tubes at both ends of the hollow cylindrical shell and forming a through cavity therethrough.
  • an ultrasonic wave transmitting device is used to transmit ultrasonic waves to the environmental fluid to excite the load fluid in the hollow cylindrical shell to form a Scholte-Stoneley circumferential wave.
  • the hollow cylindrical shell A local sound field is generated around the standing wave, and the local sound field generated at this time has a greater degree of coupling with the load fluid. Therefore, the quality factor and sensitivity of the acoustic fluid sensor can be improved, which is suitable for highly sensitive sensing of trace fluids.
  • FIG. 1 is a functional block diagram of an acoustic fluid sensor provided by an embodiment of the present invention
  • FIG. 2 is a schematic diagram of an acoustic fluid sensor provided by an embodiment of the present invention.
  • FIG. 3 shows a schematic diagram of the phase velocity dispersion curve of the Scholte-Stoneley circumferential wave provided by an embodiment of the present invention
  • 5a is a three-dimensional schematic diagram of a hollow cylindrical housing of an acoustic fluid sensor according to an embodiment of the present invention
  • 5b is a schematic plan view of a hollow cylindrical housing of an acoustic fluid sensor provided by an embodiment of the present invention.
  • 6a-6d are schematic diagrams of the relationship between the solution concentration, density, and sound velocity of the four standard fluids of sample 1, sample 2, sample 3, and NaI solution provided by embodiments of the present invention
  • FIG. 9 is a schematic diagram of the resonance frequency and the transmission amplitude of the NaI solution provided by the embodiment of the present invention at different solution concentrations in actual experiments.
  • a load fluid was injected into the hollow cylindrical shell.
  • the load fluid inside the hollow cylindrical shell (standard fluid or to be measured) (Fluid) excites the Scholte-Stoneley circumferential wave that circulates along the hollow cylindrical shell.
  • the phase velocity of the Scholte–Stoneley circumferential wave satisfies the phase matching condition, the Scholte–Stoneley circumferential wave will form a standing wave in the circumferential direction of the hollow cylindrical shell, thereby generating a localized strong field around the hollow cylindrical shell.
  • the inner diameter and outer diameter of the hollow cylindrical shell, the strong local sound field, and the interaction of ultrasonic waves and matter determine the changes in fluid density and acoustic velocity (especially the changes in density) of the acoustic fluid sensor system of the hollow cylindrical shell structure. ) Is more sensitive. When a fluid with a significant density change is selected, the resonance transmission peak will shift significantly. Therefore, the acoustic fluid sensor with a hollow cylindrical shell structure has a high sensitivity. Using the strong local sound field of the hollow cylindrical shell structure, the application of the hollow cylindrical shell structure to the new highly sensitive and trace fluid sensors can be realized.
  • FIG. 1 shows a functional module of an acoustic fluid sensor provided by an embodiment of the present invention. For ease of description, only parts related to the embodiment of the present invention are shown. The details are as follows:
  • the acoustic fluid sensor includes an acoustic sensing device, an experimental container, an ultrasonic transmitting device, an ultrasonic receiving device, and a calculation processing device.
  • the acoustic sensing device includes a hollow cylindrical shell for containing a load fluid, and a silicone tube provided at both ends of the hollow cylindrical shell and forming a through cavity therewith.
  • the load fluid is a standard fluid with known parameters
  • the standard fluid is used to determine the relationship between the resonance frequency and the fluid density or fluid concentration.
  • the density and concentration of the fluid to be measured can be inferred based on the measured resonance frequency of the fluid to be measured.
  • the standard fluid may be water, NaI solution (sodium iodide solution), or other mixed solutions.
  • the experimental container is used to contain environmental fluid, the hollow cylindrical shell is immersed in the environmental fluid, and the acoustic sensing device is disposed between the ultrasonic transmitting device and the ultrasonic receiving device.
  • the environmental fluid may be water, NaI solution (sodium iodide solution), or other mixed solutions.
  • the ultrasonic wave emitting device emits ultrasonic waves into the environmental fluid to excite the load fluid in the hollow cylindrical shell to form a Scholte-Stoneley circumferential wave.
  • the Scholte-Stoneley circumferential wave satisfies the phase matching condition
  • the hollow A standing wave is formed around the cylindrical shell to generate a local sound field
  • the ultrasonic receiving device receives ultrasonic waves passing through the acoustic sensing device.
  • the calculation processing device determines the normalized transmission spectrum data according to the first transmission spectrum data and the second transmission spectrum data, and determines the quality factor of the acoustic fluid sensor according to the normalized transmission spectrum data; wherein, the The first transmission spectrum data refers to the transmission spectrum data of the ultrasonic waves received by the ultrasonic receiving device when the acoustic sensing device and the load fluid are not included, and the second transmission spectrum data includes the acoustic sensing device and the load fluid The transmission spectrum data of the ultrasonic wave received by the ultrasonic receiving device at that time.
  • the working principle of the acoustic fluid sensor is: under the excitation of ultrasonic waves, the load fluid in the hollow cylindrical shell forms a Scholte-Stoneley circumferential wave.
  • the Scholte-Stoneley circumferential wave satisfies the phase matching condition, the hollow cylindrical shell A standing wave is formed around the body to generate a local sound field, and the ultrasonic wave passing through the hollow cylindrical shell has a resonance transmission peak in the frequency spectrum.
  • the load fluid is a standard fluid with known parameters, and the standard fluid is used to confirm the relationship between the resonance frequency and the fluid density or fluid concentration.
  • the density and concentration of the fluid to be measured can be inferred based on the measured resonance frequency of the fluid to be measured. That is, the resonance frequency of the acoustic fluid sensor is measured using a standard fluid with known parameters, and then the fluid to be measured is injected into the hollow cylindrical housing, and the parameters of the fluid to be measured are inferred according to the resonance frequency.
  • the acoustic fluid sensor Based on the working principle of the acoustic fluid sensor, it can be known that only under the excitation of ultrasonic waves, the loaded fluid in the hollow cylindrical shell forms a Scholte-Stoneley circumferential wave. When the Scholte-Stoneley circumferential wave satisfies the phase matching condition, the hollow A standing wave is formed around the cylindrical shell to generate a local sound field.
  • the acoustic fluid sensor can achieve the purpose of detection only when the frequency spectrum of the ultrasonic wave passing through the hollow cylindrical shell has a resonance transmission peak.
  • the ratio of the inner diameter to the outer diameter of the hollow cylindrical shell in the acoustic fluid sensor is a key factor affecting the degree of coupling between the local sound field and the load fluid, and also a key factor affecting the strength of the local sound field.
  • the inventors found that the greater the ratio of the inner diameter to the outer diameter of the hollow cylindrical shell in the acoustic fluid sensor, that is, the thinner the hollow cylindrical shell, the stronger the intensity of the local sound field generated by the formation of standing waves around the hollow cylindrical shell .
  • Tests have shown that the acoustic fluid sensor provided by the present invention has a higher quality factor and sensitivity compared to traditional acoustic fluid sensors. Especially for fluids whose density and acoustic velocity change are opposite, the acoustic fluid sensor has higher sensitivity.
  • the material of the hollow cylindrical shell includes polymethyl methacrylate PMMA, copper, aluminum, and steel.
  • the material of the hollow cylindrical shell further includes glass.
  • the material of the hollow cylindrical shell is transparent quartz glass. The transparent quartz glass is used as the manufacturing material of the hollow cylindrical shell, which is convenient for real-time inspection and monitoring of the chemical reaction of different fluids with color changes during the experiment, and it is more flexible to carry the fluid to adapt to different application occasions.
  • the ratio of the inner diameter to the outer diameter of the hollow cylindrical shell is between 0.5-1. The inventors found that the thinner the hollow cylindrical shell of the acoustic fluid sensor, the stronger the intensity of the local sound field generated by forming standing waves around the hollow cylindrical shell.
  • the ultrasonic transmission device includes a signal generator, a power amplifier, and an ultrasonic transmission probe.
  • the signal generator is used to generate a pulse signal
  • the power amplifier is used to amplify the pulse signal to excite the ultrasonic transmitting probe to generate ultrasonic waves.
  • the ultrasonic receiving device includes an ultrasonic receiving probe and an analog-to-digital conversion module, the ultrasonic receiving probe is used to receive ultrasonic waves after passing through the acoustic sensing device; The ultrasonic analog quantity after passing through the acoustic sensing device is converted into an electrical signal.
  • the acoustic fluid sensor further includes a carrier fixing device, and the carrier fixing device is used for supporting and fixing the acoustic sensor device between the ultrasonic transmitting device and the ultrasonic receiving device.
  • the bearing fixing device can on the one hand fix the acoustic sensing device between the ultrasonic transmitting device and the ultrasonic receiving device, on the other hand, it can also ensure that the ultrasonic wave can pass through the hollow cylindrical housing of the acoustic fluid sensor.
  • the bearing fixing device includes an acoustically transparent membrane, the acoustically transparent membrane is fixedly disposed under the hollow cylindrical shell, and the acoustically transparent membrane is disposed parallel to the bottom plane of the experimental container.
  • the environmental fluid and the load fluid are the same fluid or different fluids.
  • the environmental fluid in the experimental container may be water, and the load fluid in the hollow cylindrical shell is NaI solution; or both the NaI solution in the experimental container and the hollow cylindrical shell, or the experimental container and the hollow cylindrical shell All are water, etc.
  • the present invention does not specifically limit this.
  • the quality factor of the acoustic fluid sensor is determined as follows:
  • the quality factor of the acoustic fluid sensor is determined according to the resonance frequency and the bandwidth of the acoustic fluid sensor.
  • the eigen equation means that if the operator acts on the function equal to a constant g multiplied by the function, the equation is the eigen equation of the system, where the function is called the eigen function of the operator, g is the positive value of the operator corresponding to the eigenfunction.
  • the bandwidth of the sensor, ⁇ is the angular frequency of the acoustic fluid sensor.
  • the angular frequency ⁇ can be determined by the intrinsic equation of the acoustic fluid sensor.
  • the intrinsic equation of the acoustic fluid sensor is:
  • n is the number of resonance modes
  • ⁇ is the lowest-order solution of the eigen equation
  • D n is a square matrix with multiple rows and columns and multiple nonzero elements.
  • the D n is a matrix with six rows and six columns and 28 non-zero elements as follows:
  • d 62 2n [J n (k L2 b) -k L2 bJ ' n (k L2 b)];
  • d 63 2n [Y n (k L2 b) -k L2 bY ′ n (k L2 b)];
  • k T2 ⁇ / c T2 ;
  • ⁇ 1 is the density of the ambient fluid
  • ⁇ 2 is the density of the hollow cylindrical shell
  • ⁇ 3 is the density of the loaded fluid
  • J n is the Bessel function of the nth order of the eigen equation
  • J ′ n is the derivative of the diagonal frequency ⁇ of J n
  • Y n is the first kind of Hankel function of the nth order of the eigen equation
  • Y ′ n is the derivative of Y n diagonal frequency ⁇
  • c 1 is the acoustic velocity of the ambient fluid
  • c L2 And c T2 are the longitudinal and transverse wave velocities of the hollow cylindrical shell
  • c 3 is the acoustic velocity of the loaded fluid
  • k 1 is the wave number of the ambient fluid
  • k L2 and k T2 are the longitudinal waves of the
  • Wave number and shear wave wave number, k 3 is the wave number of the load fluid. All the above parameters are known parameters except the angular frequency ⁇ . Therefore, the angular frequency ⁇ of the acoustic fluid sensor can be determined by the above-mentioned eigen equation of the acoustic fluid sensor.
  • the Scholte-Stoneley circumferential wave satisfies the phase matching condition under the following conditions:
  • c p is the phase velocity of the Scholte-Stoneley circumferential wave.
  • FIG. 2 shows a schematic structural diagram of an acoustic fluid sensor provided by an embodiment of the present invention. For ease of description, only parts related to the embodiment of the present invention are shown. Details are as follows:
  • the acoustic fluid sensor includes a hollow cylindrical housing, a silicone tube provided at both ends of the hollow cylindrical housing and forming a through cavity therewith, and an experimental container.
  • the ultrasonic transmitting device includes a signal generator, a power amplifier and an ultrasonic transmitting probe
  • the ultrasonic receiving device includes an ultrasonic receiving probe and an analog-to-digital conversion module
  • the calculation processing device is a computer device.
  • the acoustic fluid sensor further includes a sound-transmitting membrane disposed at the bottom of the hollow cylindrical housing for carrying the hollow cylindrical housing.
  • the two ends of the hollow cylindrical shell are provided with silicone tubes, and the silicone tube and the hollow cylindrical shell form a through cavity.
  • the two ends of the silicone tube far away from the hollow cylindrical shell are respectively connected to a syringe for injecting a load fluid (standard fluid or fluid to be measured), and a recoverer for recovering the load fluid.
  • a load fluid standard fluid or fluid to be measured
  • a recoverer for recovering the load fluid.
  • the experimental container is of rectangular parallelepiped type, and contains environmental fluid (such as water).
  • environmental fluid such as water
  • the silicone fluid is connected to the syringe and the two ends of the collector to expose the environmental fluid during the experiment.
  • the ultrasonic transmitting probe and the ultrasonic receiving probe are respectively installed on two opposite side walls of the experimental container.
  • the hollow cylindrical shell is arranged between the ultrasonic generating probe and the ultrasonic receiving probe.
  • the signal generator generates a pulse signal, and the power amplifier amplifies the pulse signal to excite the ultrasonic transmitting probe to transmit ultrasonic waves into the environmental fluid, and excite the load fluid in the hollow cylindrical shell to form a Scholte-Stoneley circumferential wave.
  • an ultrasonic receiving probe receives the ultrasonic wave after passing through the acoustic sensing device, and the analog-to-digital conversion module will pass through the acoustic transmission
  • the ultrasonic analog quantity after the sensing device is converted into an electrical signal
  • the computer device converts the electrical signal from the time domain to the frequency domain, and calculates the spectrum data of the ultrasonic wave after passing through the acoustic sensing device.
  • the calculation processing device determines the normalized transmission spectrum data according to the first transmission spectrum data and the second transmission spectrum data, and determines the quality factor of the acoustic fluid sensor according to the normalized transmission spectrum data; wherein, the The first transmission spectrum data refers to the transmission spectrum data of the ultrasonic waves received by the ultrasonic receiving device when the acoustic sensing device and the load fluid are not included, and the second transmission spectrum data includes the acoustic sensing device and the load fluid The transmission spectrum data of the ultrasonic wave received by the ultrasonic receiving device at that time.
  • FIG. 3 shows a schematic diagram of the dispersion curve of the Scholte-Stoneley circumferential wave provided by an embodiment of the present invention. For ease of description, only the parts related to the embodiment of the present invention are shown. The details are as follows:
  • the local sound field and the load fluid standard fluid Or the fluid to be measured
  • the greater the coupling the higher the quality factor of the acoustic fluid sensor, the better the sensitivity, and the more suitable it is for the properties of highly sensitive sensing of trace fluids.
  • Embodiments of the present invention are illustrated in FIG. 3.
  • both the environmental fluid and the standard fluid are selected as water
  • the density of the hollow cylindrical shell ⁇ 2 2200 kg / m 3
  • the transverse wave velocity of the hollow cylindrical shell It is c T2 5640m / s.
  • the acoustic fluid sensor shown in Fig. 3 is measured in three cases where the ratio of the inner diameter to the outer diameter of the hollow cylindrical shell is 3: 4, 4: 5 and 9:10
  • the phase velocity dispersion curve of the Scholte-Stoneley circumferential wave generated around the hollow cylindrical shell (the phase velocity divided by the sound velocity of water is normalized). It can be drawn from Figure 3 that the larger the ratio of the inner diameter to the outer diameter of the hollow cylindrical shell, that is, the thinner the shell, the smaller the phase velocity of the Scholte-Stoneley circumferential wave is than the value of the acoustic velocity of the peripheral fluid.
  • the energy distribution of the resonance sound pressure field of the thinner cylindrical shell is more localized on the inner and outer walls of the cylindrical shell.
  • the greater the coupling between the field strength of the local sound field and the loaded fluid the higher the quality factor of the acoustic fluid sensor and the better the sensitivity. Therefore, the thinner the hollow cylindrical shell, the quality factor of the acoustic fluid sensor The higher the sensitivity, the better, and the more suitable for highly sensitive sensing of trace fluids.
  • the circumferential waves whose phase velocity is less than the acoustic velocity of the environmental fluid (water) are all non-leakage waves, most of their energy can be localized on the surface of the hollow cylindrical shell, and the phase velocity is less than that of the environmental fluid (water) Acoustic velocity, the more localized their capabilities are, the more suitable they are for fluid sensing.
  • the smaller the circumferential resonance mode n the more localized the energy, the more suitable for fluid sensing.
  • the following simulation experiments and actual experiments of the present invention adopt the third circumferential resonance mode.
  • FIG. 5a is a three-dimensional schematic view of a hollow cylindrical shell provided by an embodiment of the present invention
  • FIG. 5b is a schematic plan view of a hollow cylindrical shell provided by an embodiment of the present invention.
  • L is the length of the hollow cylindrical shell, and a and b are the outer diameter and the inner diameter of the hollow cylindrical shell, respectively.
  • An embodiment of the present invention also provides a manufacturing process of an acoustic sensing device. For ease of description, only parts related to the embodiment of the present invention are shown. The details are as follows:
  • Step S1 Put the A glue and the B glue in a preset ratio (for example, a ratio of 10: 1) into a vacuum deaerator and stir to mix to form a colloidal PDMS (English full name: polydimethylsiloxane, referred to as PDMS, Chinese full name: poly two Methyl siloxane).
  • a preset ratio for example, a ratio of 10: 1
  • PDMS polydimethylsiloxane
  • Chinese full name poly two Methyl siloxane
  • Step S2 smearing the gel-like PDMS on both ends of the hollow cylindrical shell, and covering the two ends of the hollow cylindrical shell with a silicone tube, the silicone tube and the hollow cylindrical shell forming a through cavity .
  • Step S3 Put the hollow cylindrical shells with silicone tubes at both ends into a constant temperature drying oven at a preset temperature (for example, 85 ° C.) to dry for a preset time interval (about 30 minutes).
  • a preset temperature may also be other temperature values, such as 80 ° C or 90 ° C
  • the set time interval may also be other time intervals, such as 25 minutes or 40 minutes, etc. .
  • a hollow cylindrical shell with silicone tubes at both ends is placed in a constant temperature drying oven at 80 ° C for about 40 minutes.
  • a sensing system of a hollow cylindrical shell with silicone tubes at both ends is formed.
  • the thickness of the hollow cylindrical shell should be thin enough and the size should be small enough.
  • the ratio of the inner diameter to the outer diameter of the hollow cylindrical shell should be large enough to make the hollow The intensity of the local sound field generated around the cylindrical shell is strong enough.
  • Step 1 Without the hollow cylindrical shell and the silicone tube, turn on the ultrasonic transmitting device, the ultrasonic receiving device, and the calculation processing device.
  • Step 2 The signal generator in the ultrasonic transmitting device generates a pulse signal, and the power amplifier amplifies the pulse signal to excite the ultrasonic transmitting probe to generate ultrasonic waves.
  • Step 3 After passing the environmental fluid in the experimental container, the ultrasonic waves are received by the ultrasonic receiving probe of the ultrasonic receiving device, and the ultrasonic waves are converted into electrical signals by the analog-to-digital conversion circuit.
  • Step 4 Use the 5800 acquisition card to collect electrical signals.
  • the calculation and processing device converts the electrical signals collected by the 5800 acquisition card from the time domain through the Fourier transform to the corresponding frequency domain.
  • the 5800 acquisition card is used for electrical signal acquisition, and the calculation processing device uses the MATLAB program to convert the electrical signal collected by the 5800 acquisition card from the time domain through the Fourier transform to the corresponding frequency domain, collect the effective frequency signal, and collect the collected signal
  • the signal receiving device is preferably a computer-controlled pulse transmission receiver
  • the data processing is preferably a computer to obtain the first transmission spectrum data when the hollow cylindrical shell and the silicone tube are not included. It is experimentally measured that the resonance frequency of an acoustic fluid sensor containing a hollow cylindrical shell structure at a given concentration is 2.122MHz-2.252MHz.
  • the frequency of the 5800 capture card to be higher than 0.1MHz and lower than 5MHz, that is, only the frequency higher than 0.1MHz and lower than 5MHz is allowed to pass. Therefore, the signal transmitted by the ultrasonic transmitting probe and the signal received by the ultrasonic receiving probe are within this frequency range.
  • Step 5 Install the ultrasonic generating probe, the ultrasonic receiving probe and the sound-transmitting membrane on the fixing bracket, and the sound-transmitting membrane is used to carry and fix the hollow cylindrical housing between the ultrasound transmitting probe and the ultrasound receiving probe .
  • the acoustic sensing device made of steps S1 to S3 including a hollow cylindrical shell and a silicone tube is placed in the middle of the ultrasonic generating probe and the ultrasonic receiving probe, so as to ensure that most of the energy of the ultrasonic wave emitted by the ultrasonic generating probe can After passing through the sensing system of the hollow cylindrical shell, most of the ultrasonic waves are finally received by the ultrasonic receiving device.
  • Step 6 Immerse the assembled ultrasonic generating probe, hollow cylindrical shell, and ultrasonic receiver in an experimental container filled with environmental fluid. During the experiment, standard fluid is injected into the hollow cylindrical shell through a syringe through a silicone tube.
  • 6a-6d are schematic diagrams showing the relationship between the concentration, density, and sound velocity of the four standard fluids of sample 1, sample 2, sample 3, and NaI solution provided by an embodiment of the present invention. For ease of explanation, only the implementation of the present invention is shown. The relevant parts of the example are detailed as follows:
  • the acoustic fluid sensor system is most sensitive to the density change of the fluid, so the environmental fluid is determined as water
  • the fluids were set as Sample 1, Sample 2, Sample 3, and NaI solution.
  • Figure 6a shows the fluid density and fluid sound velocity of sample 1 with the concentration (select the density and sound velocity data at 6%, 30%, 40% and 45% concentration, and perform the density and sound velocity data Fit to get the change curve of solution concentration, density and acoustic velocity);
  • Figure 6b shows the fluid density and fluid acoustic velocity of sample 2 with concentration (selected concentrations are 6%, 30%, 40% and 45% concentration) Density and sound velocity data under the following conditions, and the density and sound velocity data are fitted to obtain the solution concentration, density and sound velocity relationship) change curve;
  • Figure 6c shows the fluid density of sample 3, fluid sound velocity with concentration (Choose density and sound velocity data at concentrations of 6%, 30%, 40% and 45%, and fit the density and sound velocity data to obtain the relationship between solution concentration, density and sound velocity);
  • Fig. 6d shows the fluid density and fluid sound velocity of NaI solution with the concentration (select the density and sound velocity data at concentrations of 6%, 30%, 40% and 45%, and fit the density
  • Step 7 In the case of including the hollow cylindrical shell and the silicone tube, turn on the ultrasonic transmitting device, the ultrasonic receiving device, and the calculation processing device.
  • Step 8 The signal generator in the ultrasonic transmitting device generates a pulse signal, and the power amplifier amplifies the pulse signal to excite the ultrasonic transmitting probe to generate ultrasonic waves.
  • Step 9 After passing through the hollow cylindrical shell, the ultrasonic waves are received by the ultrasonic receiving probe, and the ultrasonic waves are converted into electrical signals by the analog-to-digital conversion circuit.
  • Step 10 Use the 5800 acquisition card to collect electrical signals.
  • the computer device converts the electrical signals collected by the 5800 acquisition card from the time domain to the corresponding frequency domain through Fourier transform, and acquires the hollow cylindrical shell and the silicone tube. The second transmission spectrum data at the time.
  • Step 11 The computer device normalizes the first transmission spectrum data and the second transmission spectrum data to obtain the normalized transmission spectrum data, and determines the quality of the acoustic fluid sensor according to the normalized transmission spectrum data factor.
  • the load fluid is a standard fluid with known parameters, and the standard fluid is used to determine the relationship between the resonance frequency and the fluid density or fluid concentration.
  • the standard fluid with known parameters to determine the relationship between the resonance frequency and the fluid density or fluid concentration.
  • Fluid that is, the fluid to be tested is injected into the hollow cylindrical shell from the syringe through the silicone tube during the experiment, and repeating steps 5 to 10, the parameters of the fluid to be measured (such as the fluid density or Fluid sound velocity, etc.).
  • the invention has been verified by simulation experiments and actual experiments, and is in line with the expected results, and proved feasible.
  • FIG. 7 is a schematic diagram showing the relationship between the solution concentration and resonance frequency of four different standard fluids provided by an embodiment of the present invention. For ease of explanation, only relevant parts of the embodiment of the present invention are shown. Details are as follows:
  • sample 1, sample 2, sample 3, and NaI solution are selected for simulation experiment verification.
  • the simulation experiments of sample 1, sample 2, sample 3 and NaI solution at different solution concentrations selected 6%, 30%, 40% and 45% respectively in the embodiment of the present invention were determined respectively Resonance frequency at the time of verification.
  • simulation experiment verification is mainly performed on COMSOL Multiphysics software (COMSOL Multiphysics is multiphysics simulation analysis software).
  • COMPOSOL Multiphysics is multiphysics simulation analysis software.
  • the local field strength of the acoustic sensor system is obtained a set of transmission spectrum data; and then the two sets of transmission spectrum data are normalized to obtain the normalized transmission spectrum data, that is, the normalized transmission spectrum chart.
  • sample 1 is a hypothetical fluid
  • the density of the hypothetical fluid is 1046.3kg / m 3 , and it remains unchanged during the simulation experiment.
  • Sample 2 is a hypothetical fluid.
  • the acoustic velocity of the hypothetical fluid is 1483 m / s, and it remains unchanged during the simulation experiment.
  • Figure 7 shows that the density of the hypothetical fluid increases from 1046.3 kg / m 3 to 1290.7 kg. / m 3 , 1427.1 kg / m 3 , and 1506.2 kg / m 3 at the resonance frequency shift curve of the acoustic fluid sensor.
  • Sample 3 is a hypothetical fluid.
  • Figure 7 shows that the density of the hypothetical fluid increases from 1046.3kg / m 3 to 1290.7kg / m 3 , 1427.1kg / m 3 , 1506.2kg / m 3 , and the sound velocity from 1524m / s
  • the resonance frequency shift curves of the acoustic fluid sensor when the changes are 1494m / s, 1486.5m / s and 1483m / s.
  • Fig. 7 also shows the resonance frequency shift curve of the acoustic fluid sensor at concentrations of 6%, 30%, 40% and 45% of the NaI solution.
  • FIG. 8 is a schematic diagram of the resonance frequency and transmission amplitude of the NaI solution simulated and calculated at different solution concentrations provided by the embodiment of the present invention. For ease of description, only the parts related to the embodiment of the present invention are shown. The details are as follows:
  • FIG. 8 it is the transmission spectrum diagram of the acoustic fluid sensor obtained by the simulation calculation of the NaI solution at the concentrations of 6%, 30%, 40%, and 45%, respectively. It can be seen from the figure that the resonance frequency of the acoustic fluid sensor verified by the simulation experiment is between 2.12MHz-2.25MHz. Through the analysis and calculation of the transmission spectrum shown in FIG. 8, the quality factor of the acoustic fluid sensor verified by the simulation experiment is about 126; at the same time, the acoustic verification of the simulation experiment can also be obtained by the transmission spectrum shown in FIG. 8.
  • the maximum offset value of the resonance frequency of the fluid sensor (that is, the sensitivity is the difference between the maximum resonance frequency and the minimum resonance frequency shown in Figure 8) is about 0.13MHz (that is, the difference between the maximum resonance frequency 2.25MHz and the minimum resonance frequency 2.12MHz) ).
  • this new type of acoustic fluid sensor with a hollow cylindrical housing not only has a high quality factor, but also has a high sensitivity, thus verifying the feasibility of theoretical simulation.
  • FIG. 9 is a schematic diagram of the resonance frequency and transmission amplitude of the NaI solution provided by the embodiment of the present invention at different solution concentrations in actual experiments. For ease of explanation, only the relevant parts of the embodiment of the present invention are shown. The details are as follows:
  • FIG. 9 are transmission spectrum diagrams of acoustic fluid sensors obtained by actual experiments of NaI solutions at concentrations of 6%, 30%, 40%, and 45%, respectively. It can be seen from the figure that the resonance frequency of the acoustic fluid sensor in the actual experiment is between 2.10MHz-2.24MHz, which is basically consistent with the resonance frequency of the acoustic fluid sensor calculated by simulation is 2.12MHz-2.25MHz.
  • the transmission amplitude of the transmission spectrum of the acoustic fluid sensor obtained in the actual experiment is attenuated compared to the transmission amplitude of the transmission spectrum of the acoustic fluid sensor obtained by the simulation calculation, because the theoretical calculation is based on the ideal environment, and the actual experiment has acoustic scattering Or the amplitude attenuation caused by absorption, etc., is also in line with common sense, thus verifying the feasibility of the experiment.
  • the acoustic fluid sensor with high sensitivity and high quality factor proposed by the present invention is a novel acoustic fluid sensor with a hollow cylindrical housing structure.
  • the acoustic fluid sensor not only has the advantages of miniature size and local strong field; at the same time, the size of the hollow cylindrical shell is variable, and when the system size becomes larger or smaller, the properties of the system will not change, only the operating frequency will be Proportional shift to meet the resonance frequency of different sections.
  • the size design of the hollow cylindrical shell structure is a key condition for the phase matching of the resonance of the circumferential wave around the hollow cylindrical shell.
  • a new type of acoustic fluid sensor with a hollow cylindrical shell structure proposed by the present invention is not only sensitive to fluids with significant density changes, but also can detect fluids with the same or opposite trends in density and sound velocity. As well as detecting a fluid whose density is constant and changing only the sound velocity, or a fluid whose sound velocity is constant and changing only the density, etc.
  • the fluid to be measured may be a trace amount, only filled in a hollow cylindrical shell, and the environmental fluid may include common fluids such as water, and may also be in and around the cylindrical shell The environment is filled with the fluid to be measured.
  • the new acoustic fluid sensor based on the hollow cylindrical shell structure with high sensitivity and high quality factor proposed by the present invention can generate a local strong field to enhance the interaction between the acoustic wave and the substance, thereby improving the detection sensitivity and the acoustic fluid sensor The ability to respond quickly.
  • the novel acoustic fluid sensor including a hollow cylindrical shell structure proposed by the present invention not only has a higher resonance frequency shift (ie sensitivity), but also has a high quality factor.
  • the new acoustic fluid sensor based on the hollow cylindrical shell structure with high sensitivity and high quality factor proposed by the present invention may be suitable for diagnosis, biochemical detection, clinical medical diagnosis, environmental monitoring, and food safety monitoring in biomedical engineering in the future And industrial measurement.
  • the novel acoustic fluid sensor provided with a hollow cylindrical shell structure proposed by the present invention has high stability, compact structure, simple process, low cost, and is easy for large-scale industrial production.
  • the invention can use the quartz glass of the transparent pipe as the material of the hollow cylindrical shell, which is convenient for real-time monitoring of the chemical reactions of different fluids with color changes, and can carry fluids more flexibly to adapt to different application occasions.
  • the acoustic fluid sensor provided with a hollow cylindrical shell structure proposed by the present invention not only has high sensitivity, that is, high frequency offset, but also has a high quality factor.
  • the acoustic fluid sensor based on the hollow cylindrical shell structure with high sensitivity and high quality factor is an important direction for future research.
  • the acoustic fluid sensor provided with a hollow cylindrical shell structure proposed by the present invention is an acoustic fluid sensor that is relatively sensitive to fluids with significant density changes.
  • the system can detect the fluid's density, elastic modulus, sound velocity, viscosity and other properties, and use these parameters to further infer the fluid's composition, concentration and other derived properties.
  • the acoustic fluid sensor in the embodiment of the present invention includes an acoustic sensing device, an experimental container, an ultrasonic transmitting device, an ultrasonic receiving device, and a calculation processing device;
  • the acoustic sensing device includes a hollow cylindrical shell for containing a load fluid Body, and a silicone tube provided at both ends of the hollow cylindrical shell and forming a through cavity therewith.
  • an ultrasonic wave transmitting device is used to transmit ultrasonic waves to the environmental fluid to excite the load fluid in the hollow cylindrical shell to form a Scholte-Stoneley circumferential wave.
  • the Scholte-Stoneley circumferential wave meets the phase matching condition, A local sound field is generated around the standing wave, and the local sound field generated at this time has a greater degree of coupling with the load fluid. Therefore, the quality factor and sensitivity of the acoustic fluid sensor can be improved, which is suitable for highly sensitive sensing of trace fluids.
  • the embodiments of the present invention may be provided as methods, systems, or computer program products. Therefore, the present invention may take the form of an entirely hardware embodiment, an entirely software embodiment, or an embodiment combining software and hardware. Moreover, the present invention may take the form of a computer program product implemented on one or more computer usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer usable program code.
  • computer usable storage media including but not limited to disk storage, CD-ROM, optical storage, etc.
  • These computer program instructions may also be stored in a computer readable memory that can guide a computer or other programmable data processing device to work in a specific manner, so that the instructions stored in the computer readable memory produce an article of manufacture including an instruction device, the instructions The device implements the functions specified in one block or multiple blocks of the flowchart one flow or multiple flows and / or block diagrams.
  • These computer program instructions can also be loaded onto a computer or other programmable data processing device, so that a series of operating steps are performed on the computer or other programmable device to produce computer-implemented processing, which is executed on the computer or other programmable device
  • the instructions provide steps for implementing the functions specified in one block or multiple blocks of the flowchart one flow or multiple flows and / or block diagrams.

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

L'invention concerne un capteur de fluide acoustique, comprenant un appareil de détection acoustique, un conteneur expérimental, un appareil de transmission ultrasonore, un appareil de réception ultrasonore et un appareil de traitement informatique, l'appareil de détection acoustique comprenant un boîtier cylindrique creux pour contenir un fluide de charge, et des tubes de gel de silice disposés au niveau de deux extrémités du boîtier cylindrique creux et formant un canal à cavité pénétrée avec le boîtier cylindrique creux ; l'appareil de transmission ultrasonore transmet une onde ultrasonore à un fluide environnemental pour exciter le fluide de charge dans le boîtier cylindrique creux pour former une onde circonférentielle de Scholte-Stoneley, et lorsque l'onde circonférentielle de Scholte-Stoneley satisfait une condition de mise en correspondance de phase, des ondes stationnaires sont formées entourant le boîtier cylindrique creux pour générer un champ sonore local ; et l'appareil de traitement informatique détermine un facteur de qualité du capteur de fluide acoustique en fonction des données de spectre de transmission normalisées. Le champ sonore local généré dans la présente invention présente un degré de couplage relativement élevé avec le fluide de charge, ce qui peut améliorer le facteur de qualité et la sensibilité du capteur de fluide acoustique, et est approprié pour une détection hautement sensible d'un fluide à l'état de trace.
PCT/CN2018/111066 2018-10-19 2018-10-19 Capteur de fluide acoustique WO2020077627A1 (fr)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012185083A (ja) * 2011-03-07 2012-09-27 Osaka Gas Co Ltd 流体識別装置及び流体識別方法
CN103604728A (zh) * 2013-11-06 2014-02-26 河海大学常州校区 基于流固界面波的泥沙颗粒粒径检测装置及方法
CN106324090A (zh) * 2016-08-05 2017-01-11 深圳先进技术研究院 一种声学流体传感器

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012185083A (ja) * 2011-03-07 2012-09-27 Osaka Gas Co Ltd 流体識別装置及び流体識別方法
CN103604728A (zh) * 2013-11-06 2014-02-26 河海大学常州校区 基于流固界面波的泥沙颗粒粒径检测装置及方法
CN106324090A (zh) * 2016-08-05 2017-01-11 深圳先进技术研究院 一种声学流体传感器

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
IZBICKI JEAN-LOUIS ET AL.: "Analysis of Resonances Related to Scholte-Stoneley Waves around Circular Cylindrical Shells", THE JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, vol. 90, no. 5, 30 November 1991 (1991-11-30), pages 2602, XP055703263, DOI: 10.1121/1.402389 *

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