WO2020073968A1 - Laser gas detection apparatus and correction method therefor - Google Patents

Laser gas detection apparatus and correction method therefor Download PDF

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Publication number
WO2020073968A1
WO2020073968A1 PCT/CN2019/110440 CN2019110440W WO2020073968A1 WO 2020073968 A1 WO2020073968 A1 WO 2020073968A1 CN 2019110440 W CN2019110440 W CN 2019110440W WO 2020073968 A1 WO2020073968 A1 WO 2020073968A1
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laser
current
lasers
gas
wavelength
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PCT/CN2019/110440
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French (fr)
Chinese (zh)
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陶俊
向少卿
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上海禾赛光电科技有限公司
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Publication of WO2020073968A1 publication Critical patent/WO2020073968A1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation

Definitions

  • the invention relates to the field of gas analysis and detection. More specifically, the invention relates to a laser gas detection device.
  • Tunable diode laser absorption spectroscopy is an optical and spectroscopic measurement method that uses laser light in absorption spectroscopy.
  • TDLAS utilizes the narrow linewidth and fast tuning characteristics of semiconductor lasers, and can detect gas quickly by detecting an isolated vibrational absorption line that absorbs molecules.
  • TDLAS technology to measure the gas concentration is very extensive, including atmospheric detection, automobile exhaust gas measurement, hazardous gas leak detection, gas concentration measurement in the flue and so on.
  • gas leak detection from the bottom of the building to high-rise residential buildings or the use of drones to measure the gas concentration of ground targets
  • the present invention provides a laser gas detection device that can perform individual wavelength scanning correction on a plurality of lasers after aging, so that the absorption peaks formed after each laser beam is collected can be well Superimposed to reduce or prevent the overall quality of the laser signal from deteriorating.
  • the inventors found that the deterioration of the overall quality of the laser signal is mainly due to the change in the scanning range of the wavelength scan due to aging.
  • the change of the wavelength scanning range will cause the shift of the absorption peak position in different laser spectra.
  • the drifted absorption peak will cause the peak splitting phenomenon of the laser signal superposition result, which will affect the analysis of the light intensity signal and ultimately cause the signal quality. Deterioration.
  • the laser gas detection device includes: a plurality of lasers; a control part, which is electrically connected to the plurality of lasers, can control the plurality of lasers to perform synchronized wavelength scanning, and the target absorption peak of the gas to be measured
  • the center wavelength is preset to occupy the first relative position in the scan waveform of the wavelength scan; one or more beam splitting components, the output optical paths of multiple lasers all pass through the beam splitting component to split the laser beam emitted by each laser into probe light and Reference light; one or more gas absorption cells, each light path of the reference light passes through the gas absorption cell, and the gas absorption cell is filled with the gas to be measured; one or more detectors are arranged after each reference light passes through the gas absorption cell
  • the optical path of the control section is electrically connected to the detector, which can determine the second relative position occupied by the target absorption peak of the gas to be measured in the light intensity signal waveform collected by the detector; the control section also includes a position correction
  • Combined use of multiple lasers can produce a laser light source with high emission power.
  • the technical solution provided by the present invention adopts a position correction module to deviate from the absorption peak of different lasers due to aging Correction is performed to enable the final main detector to receive the absorption peak signal at the same or substantially the same time, to prevent peak splitting of the laser signal generated by the final superposition, to effectively improve the overall quality of the laser signal, and to prevent some lasers from aging. Serious deterioration of signal quality.
  • the laser gas detection device includes a current driving device, which is electrically connected to a plurality of lasers and a control unit, and can perform current scanning according to a control signal output by the control unit to drive a plurality of lasers to perform Wavelength scanning.
  • the current adjustment method realizes the adjustment of the wavelength scan by changing the injection current of the laser, and has extremely high adjustment response speed and low device cost.
  • the position correction module includes a current correction unit, which is electrically connected to the current driving device, and can adjust the current scanning range of the current driving device to adjust the wavelength scanning of the laser.
  • the current correction unit is used for position correction, which has extremely high response rate and accuracy.
  • a current correction unit is used to correct the current scanning range, and the device conversion difficulty and cost are low.
  • the scanning waveform of the current scanning is a triangular wave or a sawtooth wave
  • the current correction unit superimposes the amplitude offset on the basis of the scanning waveform to determine the Correspondence, adjust the scanning range of the wavelength scan accordingly.
  • the corresponding adjustment of the scan range of the wavelength scan refers to translation of the scan range of the wavelength scan.
  • the triangular or sawtooth waveform is used for current scanning, which can linearly adjust the wavelength scanning range, which is convenient for the calculation of the adjustment amount.
  • control unit further includes a current offset calculation unit that can obtain a constant-amplitude offset according to the offset of the second relative position from the first relative position.
  • the temperature of the laser is adjustable
  • the position correction module includes a temperature correction unit, which can input a temperature control current to the laser to scan the wavelength of the laser according to the correspondence between the laser wavelength and the temperature Make adjustments.
  • the scanning range of the wavelength can be adjusted in a larger range, so that the laser gas detection device can cope with the situation where the absorption peak deviates more seriously.
  • the laser includes a temperature sensor
  • the temperature correction unit is electrically connected to the temperature sensor, and can deviate from the temperature of the laser obtained by the temperature sensor and the deviation amount of the second relative position from the first relative position
  • the laser outputs temperature control current.
  • the laser gas detection device further includes a laser component bracket, and the laser component bracket has a plurality of bracket units arranged in parallel, and the bracket unit is installed and fixed with the spectroscopic component, the gas absorption cell, and the detector, one or more The two detectors are electrically connected to the same circuit board, and the circuit board is mounted on the outer shell of the laser gas detection device.
  • the laser component bracket has multiple laser mounting ports, and the multiple lasers are detachably connected to the laser component bracket through the laser mounting port. It is convenient to replace in time when some lasers fail. At the same time, the number of lasers can be easily adjusted to meet the requirements of the number of lasers in different usage scenarios and improve the universality of laser gas detection devices.
  • the laser gas detection device includes: a plurality of lasers; a control section, electrically connected to the plurality of lasers, capable of controlling the plurality of lasers to perform synchronized wavelength scanning, and the center wavelength of the target absorption peak of the gas to be measured
  • the first relative position is preset in the scan waveform of the wavelength scan
  • the current driving device is electrically connected to the multiple lasers and the control part, and can perform current scanning according to the control signal output by the control part to drive the multiple lasers to perform Wavelength scanning
  • one or more beam splitting components, the exiting optical paths of multiple lasers pass through the beam splitting components to split the laser beam emitted from each laser into probe light and reference light
  • one or more gas absorption cells each reference The light path of the light passes through the gas absorption cell, and the gas absorption cell is filled with the gas to be measured
  • one or more detectors are arranged on the light path after each reference light passes through the gas absorption cell
  • the control part is electrically connected to the detector and can Determine the second
  • the current correction unit is electrically connected to the current drive device and can adjust the current scan range of the current drive device.
  • the temperature correction unit can input a temperature control current to the laser to The wavelength scanning of the laser is adjusted; the position correction module is preset with an adjustment threshold. If the second relative position deviates from the first relative position by less than the adjustment threshold, the position correction module uses a current correction unit to perform position correction; if the second relative position deviates The deviation amount of the first relative position is greater than the adjustment threshold, and the position correction module uses the temperature correction unit or the temperature correction unit and the current correction unit to perform position correction.
  • the position correction module of the laser gas detection device uses a temperature correction unit and a current correction unit to correct the wavelength scanning range of the laser.
  • the current correction unit performs correction, and when the deviation amount of the absorption peak is large, the temperature correction unit is turned on to correct the wavelength scanning state of the laser within a large adjustment range.
  • the invention also provides a correction method of a laser gas detection device for a laser gas detection device installed with multiple lasers.
  • the correction method includes the following steps:
  • Multiple lasers perform synchronous wavelength scanning, wherein the center wavelength of the target absorption peak of the gas to be measured occupies the first relative position by default in the scanning waveform of the wavelength scanning;
  • the wavelength scanning of one or more lasers is independently adjusted.
  • FIG. 1 is a schematic diagram of the photoelectric structure of a laser assembly of a laser gas detection device in an embodiment of the present invention
  • FIG. 2 is a waveform diagram of the driving current signal in the embodiment of FIG. 1;
  • FIG. 3 is a waveform diagram of a wavelength scanning signal in the embodiment of FIG. 1;
  • FIG. 4 is a schematic diagram of the laser signal waveform of the aged laser received by the detector in the embodiment of FIG. 1;
  • FIG. 5 is a schematic structural diagram of a feedback control loop of a laser gas detection device in another embodiment of the present invention.
  • FIG. 6 is a schematic diagram of the installation structure of the laser assembly in the embodiment of FIG. 1;
  • FIG. 7 is a schematic structural diagram of a laser gas detection device used to implement laser position correction in an embodiment of the present invention.
  • FIG. 8 is a flowchart of the operation method of the position correction structure in the embodiment of FIG. 7.
  • the inventor found that the technical problem was mainly due to the change of the scanning range of the wavelength scan brought about by aging, which caused the drift of the absorption peak position, and the absorption peak after the drift Peak splitting will occur in the signal superposition result of each laser, and this superposition result will affect the analysis of the light intensity signal, causing the overall quality of the laser signal to deteriorate.
  • each laser when the laser gas detection device is shipped, each laser is configured to perform strictly synchronized wavelength scanning.
  • the plurality of lasers are current-tuning lasers of the same model, and by controlling the driving current of each laser to scan synchronously, the plurality of lasers are synchronized to perform wavelength scanning with the same scanning range.
  • the synchronized wavelength scanning process can be strictly executed when the instrument is shipped from the factory, but with the increase of use time, each current tuned laser will show different degrees of aging, and the aging phenomenon will change the wavelength-current correlation function of the current tuned laser .
  • the lasers are loaded with synchronized scanning current, the obtained wavelength scanning range is not completely synchronized, and the wavelength-current correlation function of some lasers changes greatly, resulting in a specific absorption within the same scanning period.
  • the wavelengths occupy different positions in the wavelength scan.
  • the laser signal collected by the photodetector will divide multiple absorption peaks in the same period. This form of laser signal has poor quality and will seriously affect the subsequent gas concentration analysis.
  • an absorption line with a center wavelength of 1653.72 nm is selected, the corresponding temperature value is 22.9 ° C, and the current value is 70 mA; the laser scans the range of 20-120 mA, where the wavelength value corresponding to 20 mA is 1653.478 nm, The current value corresponding to 120mA is 1654.076nm.
  • the center wavelength of the absorption line (corresponding to the current value of 70mA) will occupy the center position in the wavelength scanning curve, that is, the 1 / 2T position; and when the laser is aging, 20 -120mA current value scanning range will correspond to different wavelength scanning range, and then the current value corresponding to the center wavelength of 1653.72nm will also change, such as 50mA, at this time, the absorption peak is located at 1 / 4T position, if another laser If the absorption peak remains in place, the photodetector of the final instrument will detect the gas absorption signal at the sampling points at different times in the same cycle, that is, the collected laser signal will exhibit multiple absorptions occupying different positions in a cycle Peak, which seriously affects the subsequent calculation and analysis of gas concentration.
  • the present invention provides a laser gas detection device, including: a plurality of lasers; a control section, electrically connected to the plurality of lasers, capable of controlling the plurality of lasers to perform synchronous wavelength scanning, and the target absorption peak of the gas to be measured
  • the center wavelength presupposes to occupy the first relative position in the scanning waveform of the wavelength scan
  • the splitting component the splitting components are provided on the output optical paths of multiple lasers to split the laser beam emitted from each laser into probe light and reference light
  • Gas absorption cell each light path of reference light is equipped with gas absorption cell, and the gas absorption cell is filled with gas to be measured
  • detector each light path of reference light passing through the gas absorption cell is provided with detector
  • control part It is electrically connected to the detector, which can determine the second relative position occupied by the target absorption peak of
  • multiple lasers can be used to form a laser light source group with higher emission power.
  • a beam splitting device is used to split the beam emitted by each laser into reference light and detection light. The position of the absorption peak in the reference light after the absorption cell is detected, and the wavelength scan of each laser is independently adjusted according to the detection information, and then the relative position of the absorption peak in the finally received laser signal is adjusted to solve The problem of signal quality degradation.
  • the laser gas detection device includes a plurality of lasers 100, and each laser 100 is provided with an independent control loop for adjusting the wavelength scanning state of the laser .
  • the control circuit of each laser 100 is provided with a beam splitter 102, which can split the laser beam 300 emitted by the laser 100 into the detection light 302 and the reference light 304.
  • the surface of the spectroscopic component 102 is coated with an antireflection film to further increase the light intensity of the detection light 302.
  • the antireflection coating on the surface of the beam splitting member 101 can make the detection light 302 and the reference light 304 have an intensity ratio of 99: 1 or more.
  • the sample of the state of the probe light 302 is analyzed, and the wavelength scanning state of the probe light 302 is monitored.
  • a gas absorption cell 104 is provided on the path after the reference light 304 is separated, and the gas absorption cell 104 is filled with the gas to be measured. After the reference light 304 passes through the gas absorption cell 104, light of a specific wavelength is selectively absorbed by the gas and carried The reference light 304 with gas absorption information is received by the detector 106. The detector 106 converts the received light intensity signal of the reference light 304 into an electrical signal and transmits it to the control unit 200. The control unit 200 can perform analog-to-digital conversion on the electrical signal reflecting the light intensity information of the reference light 304 and generate a drive according to the analysis result The signal is used to control the wavelength scanning state of the laser 100.
  • the above structure constitutes a control loop for beam splitting, detection, feedback, and control of the laser 100.
  • the target gas to be measured by the laser gas detection device is methane gas.
  • the reference light 304 After passing through the methane gas, the reference light 304 will have characteristic absorption around 1653.72 nm, and there is no interference absorption peak near the center wavelength, so The absorption peak with the center wavelength of 1653.72 nm is selected as the target absorption peak of the gas to be measured in this embodiment.
  • the laser gas detection device can combine easily accessible lasers into a laser light source group with higher emission power through multiple laser simultaneous scanning methods to deal with natural gas leakage inspection in some specific environments, such as from the bottom of the building to the high-rise of the residential building Carry out natural gas leak detection or use a drone to perform natural gas pipeline leak inspection on ground targets, etc.
  • the laser gas detection device for different gas to be tested according to actual needs, and the optional gas to be tested includes ammonia, carbon monoxide, hydrogen and other gases.
  • the technician can also select different absorption peaks of the gas to be measured as target absorption peaks, and only need to adjust parameters such as the type of laser, the center wavelength of the laser wavelength scan, and the scanning range.
  • the laser 100 used in the laser gas detection device in this embodiment is a current tuning laser, and the control unit 200 can independently control the current modulation signal applied to each laser 100.
  • the current modulation signal uses a sawtooth wave signal for low frequency scanning.
  • the minimum value of the drive current obtained by the factory-set low-frequency scan signal is 20 mA, and the maximum value is 120 mA.
  • the laser 100 is driven to perform linear or substantially linear wavelength scanning.
  • the corresponding waveform of the wavelength scanning is shown in FIG. 3 As shown.
  • the center wavelength of the target absorption peak of the gas to be measured is 1653.72 nm, and the operating current value of the laser 100 corresponding to this wavelength is 70 mA. That is, the center wavelength of the target absorption peak is preset to occupy the first relative position in the scan waveform of the wavelength scan as a position of 1/2 cycle.
  • the first relative position refers to the ratio of the center wavelength of the target absorption peak in the wavelength-time curve of the wavelength scan to the period duration T within a scan period.
  • each laser 100 With the occurrence of the aging phenomenon, although each laser 100 is still loaded with the same synchronous scanning current signal, due to the different aging degree of each laser 100, its wavelength-current correlation function will change to varying degrees, resulting in a final wavelength scanning curve A certain degree of deviation occurs.
  • the detector 106 converts the received light signal whose light intensity changes with time into an electrical signal, and then converts it into a digital signal by the control unit 200, and the resulting light intensity (normalized) -sampling point curve is shown in FIG. 4 Show. Due to aging, although the laser 100 is still driven by a current of 20-120 mA, the scanning range of the wavelength scanning signal it actually emits drifts to 1653.582-1654.207 nm.
  • the target absorption peak with a center wavelength of 1653.72 nm will also drift from the original 1/2 period position to the second relative position of 1/4 period.
  • the second relative position refers to the ratio n / N of the sampling points n of the target absorption peak in the sampled digital signal to the total number N of sampling points in a cycle.
  • the “relative position” in the first relative position and the second relative position means that the specific absorption wavelength or the target absorption peak is in the target signal related to the wavelength (such as the current signal and the wavelength signal in this embodiment)
  • the corresponding target parameters (such as t, n) account for the proportion of the total number of target parameters (such as T, N) in a cycle.
  • the target signal and the target parameter can be selected according to actual conditions, and the above changes do not exceed the protection scope of the present invention without departing from the gist of the present invention.
  • the laser gas detection device in this embodiment further includes a position correction module 202, which can correct the second relative position of the target absorption peak.
  • the parameter adjusted by the position correction module 202 is the scanning range of the driving current of the laser 100.
  • the scanning range of the driving current of the laser 100 is adjusted by superimposing an equal amplitude offset on the basis of the original driving current signal, that is, increasing or decreasing an equal amount of current on the basis of the original driving current signal.
  • the position correction module 202 can uniformly reduce the corresponding scanning current at each time, for example, adjust the current scanning range from the original 20-120 mA to 17-117mA, so that the scanning range of the wavelength returns to 1653.478-1654.076nm.
  • the final detector of the laser gas detection device will collect the absorption peak signal at the same or substantially the same time Therefore, the absorption peak signals of the lasers 100 can be superimposed well, avoiding that the absorption peaks in the final laser signal fall at different relative positions, thereby increasing the difficulty of analyzing the laser signal and reducing the signal quality.
  • each laser 100 is driven by a linear triangular wave or sawtooth wave signal
  • the technician can select other types of waveforms for wavelength scanning according to the actual situation, such as sine waves or combined waveforms, etc. As long as the waveform can scan a specific wavelength range and facilitate later calculation and analysis.
  • the laser 100 is a current-tuned laser.
  • the current-tuned laser may be a sampling grating distributed Bragg reflection laser, an auxiliary grating directional coupling back-sampling reflection laser, a distributed feedback laser, or other suitable current-tunable laser.
  • the laser 100 may also be other types of tunable lasers, such as tunable lasers using temperature control technology or mechanical control technology. Accordingly, the adjustment method of the wavelength scanning range of the laser 100 can also be adjusted according to actual conditions, such as the type of the laser 100, the adjustable wavelength range, and other factors, such as temperature adjustment, current adjustment, mechanical adjustment, or a combination of adjustment methods.
  • the spectroscopic component 102, the gas absorption cell 104, the detector 106 and other components can also be configured as one or more according to actual needs, and are shared by different lasers 100 without departing from the present invention Under the premise of the gist, the change of the number of such components should be understood as not exceeding the protection scope of the present invention.
  • the control unit 200 integrates a current source for driving the laser 100.
  • a separate current driving device 400 may also be used to drive each laser.
  • the control unit 200 includes a position correction module 202 that is electrically connected to the detector 106 corresponding to each laser 100 and can modulate the current signal according to the light intensity signal collected by the detector 106.
  • the specific modulation method The first embodiment has been described in detail, and can be used until now, and will not be repeated here.
  • the current drive device 400 is connected to the control unit 200, and the signal modulated by the position correction module 202 is transmitted to the current drive device 400.
  • the modulated signal includes the drive signal of each laser 100, and the current drive device 400 is independently based on the drive signal Each laser 100 is driven.
  • the current driving device 400 may also be configured as one or more and shared by different lasers 100.
  • a plurality of lasers 100 are connected to different interfaces of the current driving device 400, and the current driving device 400 can independently adjust the driving current of each laser 100 according to the received driving signal of the control section 200.
  • this embodiment provides a laser gas detection device that uses a plurality of lasers 100 in combination to generate a laser light source with high emission power, and uses a position correction module 202 to absorb absorption peaks generated by different lasers 100 due to aging The deviation is corrected to make the relative position of the absorption peak of each laser return to the preset state, so that each absorption peak can be superimposed on the finally collected light intensity-sampling point signal, improve the signal quality, and reduce the analysis difficulty .
  • the laser gas detection device has a laser assembly bracket 500 for mounting a laser array and a feedback control component.
  • the laser assembly bracket 500 includes a plurality of bracket units 502 arranged in parallel, and each bracket unit 502 is mounted with a spectroscopic component 102.
  • the laser assembly holder 500 also has a screw hole that matches the thread of the laser 100, that is, the laser mounting port 504, which can be used for laser 100 detachable connection.
  • the design of the support unit 502 and the detachable laser makes the device design and production process more flexible, the cost of the mold is lower, and the replacement and maintenance of the laser are also more convenient.
  • the laser mounting ports 504 are arranged in parallel, so that each laser 100 mounted on the mounting port 504 keeps the exit optical path parallel, and a collimating lens 506 is further installed on the exit optical path of each laser 100 to further improve the parallelism of the exiting light.
  • the lasers emitted from each channel can be combined or emitted individually, and can be flexibly configured according to the actual situation.
  • each bracket unit 502 is also installed with a separate circuit board 108 electrically connected to the detector 106 for driving the detector 106 and converting the analog signal obtained by the detector 106 according to the light intensity signal into a digital signal And send the digital signal to the control part 200 of the instrument.
  • multiple detectors 106 may also be electrically connected to the same circuit board 108, which may be installed at the outer casing (not shown in the figure) of the laser gas detection device to achieve Better heat dissipation effect.
  • This embodiment provides a laser gas detection device that uses a combination of current and temperature to adjust the wavelength scanning range.
  • the mechanical structure and the circuit structure other than the position correction module can follow the related structure of the laser gas detection device in Embodiment 1. I won't repeat them here.
  • the laser 100 used in the laser gas detection device in this embodiment is a current tunable laser, and a semiconductor refrigerator (ThermoElectric Cooler, TEC) is integrated in the laser 100.
  • the temperature control current input by the semiconductor refrigerator can adjust the temperature of the laser 100.
  • the sensitivity of the laser 100 to adjust the wavelength scan by temperature is 0.09nm / °C, which can achieve a wider range of wavelength adjustment, but the response speed is relatively slow and not accurate; and the sensitivity of adjusting the wavelength scan by changing the current is 0.01nm / mA, although the response speed is fast and accurate, but the adjustable wavelength range is narrow.
  • a temperature correction unit 2028 is used to control the temperature control current input to the laser 100 to coarsely adjust the wavelength of the laser 100; and a current correction unit 2026 is used to control the current intensity of the laser 100 to control the laser 100 Fine-tune the wavelength.
  • the position correction module 202 includes a deviation amount calculation unit 2020, a current offset amount calculation unit 2022, a temperature control current calculation unit 2024, a current correction unit 2026, and a temperature correction unit 2028.
  • the analog signal generated by the detector 106 is A / D converted by the analog-to-digital conversion module 206 of the control unit 200 and then sent to the deviation amount calculation unit 2020 of the position correction module 202.
  • the deviation amount calculation unit 2020 calculates the deviation amount ⁇ of the second relative position from the first relative position, and selectively adjusts the wavelength scanning range using current or temperature according to the magnitude relationship between the deviation amount ⁇ and a preset adjustment threshold ⁇ .
  • the position correction module 202 When the deviation ⁇ is less than or equal to the preset adjustment threshold ⁇ , the position correction module 202 will use the current offset method to fine-tune the wavelength scan range.
  • the deviation amount calculation unit 2020 sends the deviation amount signal to the current offset amount calculation unit 2022, and the current offset amount calculation unit 2022 can calculate the constant amplitude offset amount of the current for wavelength sweep adjustment according to the deviation amount ⁇ , and the The constant amplitude offset is sent to the current correction unit 2026, and the current correction unit 2026 is connected to the current driving device 400, which can superimpose the constant amplitude offset on the original current drive signal to adjust the wavelength scanning range.
  • the position correction module 202 When the deviation ⁇ is greater than the preset adjustment threshold ⁇ , the position correction module 202 will use the method of changing the temperature of the laser 100 for coarse adjustment.
  • the deviation amount calculation unit 2020 sends the deviation amount result to the temperature control current calculation unit 2024, which can calculate the final temperature control input to the laser 100 based on the deviation amount ⁇ and the actual temperature of the laser 100 Current, and send the calculation result to the temperature correction unit 2028, and the temperature correction unit 2028 performs output adjustment of the temperature-controlled current.
  • the temperature correction unit 2028 sends the laser 100
  • the analog signal of the detector 106 can be re-acquired and subjected to analog-to-digital conversion, and then the ⁇ - ⁇ size determination step and adjustment step until the deviation ⁇ is less than or equal to the adjustment threshold ⁇ , then use
  • the current correction unit 2026 fine-tunes the wavelength.
  • the calibration process of the wavelength scan is configured to start up and shut down after the calibration is completed to save power.
  • the technician can also configure the operating frequency of the calibration process according to the actual working conditions of the laser 100.

Abstract

A laser gas detection apparatus. Multiple lasers (100) are used for synchronously scanning. The lasers (100) are used for forming a laser light source group having a high transmit power; meanwhile, a light splitting device is used for splitting a light beam emitted by each laser (100) into a reference light (304) and a detection light (302). The position of an absorbing peak in the reference light (304) passing through a gas absorbing pool (104) is detected and the wavelength scanning of each laser (100) is regulated independently according to detection information so as to adjust the relative position of the absorbing peak in the finally received laser signal, which solves the signal quality deterioration problem.

Description

激光气体检测装置及校正方法Laser gas detection device and correction method 技术领域Technical field
本发明涉及气体分析检测领域,更详细地说,本发明涉及一种激光气体检测装置。The invention relates to the field of gas analysis and detection. More specifically, the invention relates to a laser gas detection device.
背景技术Background technique
可调谐二极管激光吸收光谱技术(TDLAS)是一种将激光应用于吸收光谱测量技术的光学和光谱学测量方法。TDLAS利用半导体激光窄线宽和快速调谐的特性,通过检测吸收分子的一条孤立的振转吸收线,可以实现对气体的快速检测。Tunable diode laser absorption spectroscopy (TDLAS) is an optical and spectroscopic measurement method that uses laser light in absorption spectroscopy. TDLAS utilizes the narrow linewidth and fast tuning characteristics of semiconductor lasers, and can detect gas quickly by detecting an isolated vibrational absorption line that absorbs molecules.
利用TDLAS技术对气体浓度进行测量的应用十分广泛,包括大气检测、汽车尾气测量、危险气体泄漏检测、烟道内气体浓度测量等等。一些特定的应用场景(例如从楼底对居民楼高层进行气体泄漏检测或利用无人机对地面目标进行气体浓度测量)中常需要使用探测距离较远的激光气体检测装置。The application of TDLAS technology to measure the gas concentration is very extensive, including atmospheric detection, automobile exhaust gas measurement, hazardous gas leak detection, gas concentration measurement in the flue and so on. In some specific application scenarios (such as gas leak detection from the bottom of the building to high-rise residential buildings or the use of drones to measure the gas concentration of ground targets), it is often necessary to use a laser gas detection device with a long detection distance.
为了增大探测距离,部分激光气体检测装置采用多个激光器同时工作的方式增大发射功率,然而,在实现本发明的过程中,发明人发现,单纯地提高激光器的数量虽然能够有效地增大发射功率,但同时带来了以下问题:随着使用时间的增加,检测装置获得的激光信号整体质量严重劣化。In order to increase the detection distance, some laser gas detection devices use multiple lasers to increase the transmission power. However, in the process of implementing the present invention, the inventor found that simply increasing the number of lasers can effectively increase Transmit power, but at the same time brings the following problem: With the increase of use time, the overall quality of the laser signal obtained by the detection device is seriously degraded.
发明内容Summary of the invention
鉴于现有技术的上述问题,本发明提供了一种激光气体检测装置,能够对老化后的多个激光器进行单独的波长扫描的校正,使各路激光被收集后形成的吸收峰能够很好地叠加,减少或防止激光信号整体质量劣化。In view of the above-mentioned problems in the prior art, the present invention provides a laser gas detection device that can perform individual wavelength scanning correction on a plurality of lasers after aging, so that the absorption peaks formed after each laser beam is collected can be well Superimposed to reduce or prevent the overall quality of the laser signal from deteriorating.
在创立本发明的过程中,发明人发现,激光信号整体质量的劣化主要源自老化带来的波长扫描的扫描范围的变化。波长扫描范围的变化会引起不同激光光谱中吸收峰位置的漂移,漂移后的吸收峰将使得激光器的信号叠加结果出现分峰现象,该叠加结果将影响光强信号的分析,最 终造成信号质量的劣化。In the process of creating the present invention, the inventors found that the deterioration of the overall quality of the laser signal is mainly due to the change in the scanning range of the wavelength scan due to aging. The change of the wavelength scanning range will cause the shift of the absorption peak position in different laser spectra. The drifted absorption peak will cause the peak splitting phenomenon of the laser signal superposition result, which will affect the analysis of the light intensity signal and ultimately cause the signal quality. Deterioration.
为了解决上述问题,本发明的技术方案提供的激光气体检测装置包括:多个激光器;控制部,与多个激光器电连接,能够控制多个激光器进行同步的波长扫描,待测气体目标吸收峰的中心波长在波长扫描的扫描波形中预设占据第一相对位置;一个或多个分光部件,多个激光器的出射光路均经过分光部件,以将每个激光器出射的激光分束为探测光和参考光;一个或多个气体吸收池,各路参考光的光路均经过气体吸收池,气体吸收池内充有待测气体;一个或多个探测器,配置在各路参考光经过气体吸收池后的光路上;控制部与探测器电连接,能够确定待测气体的目标吸收峰在探测器采集得到的光强信号波形中占据的第二相对位置;控制部还包括位置校正模块,位置校正模块与多个激光器电连接,能够根据第二相对位置偏离第一相对位置的偏离量,独立地对一个或多个激光器的波长扫描进行调节。In order to solve the above problems, the laser gas detection device provided by the technical solution of the present invention includes: a plurality of lasers; a control part, which is electrically connected to the plurality of lasers, can control the plurality of lasers to perform synchronized wavelength scanning, and the target absorption peak of the gas to be measured The center wavelength is preset to occupy the first relative position in the scan waveform of the wavelength scan; one or more beam splitting components, the output optical paths of multiple lasers all pass through the beam splitting component to split the laser beam emitted by each laser into probe light and Reference light; one or more gas absorption cells, each light path of the reference light passes through the gas absorption cell, and the gas absorption cell is filled with the gas to be measured; one or more detectors are arranged after each reference light passes through the gas absorption cell The optical path of the control section is electrically connected to the detector, which can determine the second relative position occupied by the target absorption peak of the gas to be measured in the light intensity signal waveform collected by the detector; the control section also includes a position correction module, a position correction module Electrically connected to multiple lasers, capable of deviating from the first relative position according to the second relative position, independently A plurality of lasers or wavelength scan can be adjusted.
多个激光器联用可以产生发射功率较高的激光光源,本发明提供的技术方案为了消除多个激光器联用而产生的信号质量问题,采用位置校正模块对不同激光器因老化而产生的吸收峰偏离进行校正,使最终主探测器能够在相同或基本相同的时间接收到吸收峰信号,防止最终叠加产生的激光信号产生分峰现象,有效提高了激光信号的整体质量,防止部分激光器老化造成的整体信号质量的严重劣化。Combined use of multiple lasers can produce a laser light source with high emission power. In order to eliminate the signal quality problems caused by the combined use of multiple lasers, the technical solution provided by the present invention adopts a position correction module to deviate from the absorption peak of different lasers due to aging Correction is performed to enable the final main detector to receive the absorption peak signal at the same or substantially the same time, to prevent peak splitting of the laser signal generated by the final superposition, to effectively improve the overall quality of the laser signal, and to prevent some lasers from aging. Serious deterioration of signal quality.
在本发明的较优技术方案中,激光气体检测装置包括电流驱动装置,电流驱动装置与多个激光器及控制部电连接,能够根据控制部输出的控制信号进行电流扫描,以驱动多个激光器进行波长扫描。电流调节方式通过改变激光器的注入电流来实现波长扫描的调节,具有极高的调节响应速度和较低的装置成本。In a preferred technical solution of the present invention, the laser gas detection device includes a current driving device, which is electrically connected to a plurality of lasers and a control unit, and can perform current scanning according to a control signal output by the control unit to drive a plurality of lasers to perform Wavelength scanning. The current adjustment method realizes the adjustment of the wavelength scan by changing the injection current of the laser, and has extremely high adjustment response speed and low device cost.
进一步地,在本发明的较优技术方案中,位置校正模块包括电流校正单元,电流校正单元与电流驱动装置电连接,能够调节电流驱动装置的电流扫描范围,以对激光器的波长扫描进行调节。采用电流校正单元进行位置校正,具有极高的响应速率和准确性。此外,采用电流校正单元对电流扫描范围进行校正,其装置改装难度和成本较低。Further, in a preferred technical solution of the present invention, the position correction module includes a current correction unit, which is electrically connected to the current driving device, and can adjust the current scanning range of the current driving device to adjust the wavelength scanning of the laser. The current correction unit is used for position correction, which has extremely high response rate and accuracy. In addition, a current correction unit is used to correct the current scanning range, and the device conversion difficulty and cost are low.
更进一步地,在本发明的较优技术方案中,电流扫描的扫描波形为三角波或锯齿波,电流校正单元通过在扫描波形基础上叠加等幅偏置量,以根据激光器激光波长与驱动电流的对应关系,相应地调节波长扫描的 扫描范围。在一些实施例中,所述相应地调节波长扫描的扫描范围是指对波长扫描的扫描范围进行平移。采用三角波或锯齿波波形进行电流扫描,能够线性地对波长的扫描范围进行调节,方便调整量的计算。Furthermore, in the preferred technical solution of the present invention, the scanning waveform of the current scanning is a triangular wave or a sawtooth wave, and the current correction unit superimposes the amplitude offset on the basis of the scanning waveform to determine the Correspondence, adjust the scanning range of the wavelength scan accordingly. In some embodiments, the corresponding adjustment of the scan range of the wavelength scan refers to translation of the scan range of the wavelength scan. The triangular or sawtooth waveform is used for current scanning, which can linearly adjust the wavelength scanning range, which is convenient for the calculation of the adjustment amount.
可选的,控制部还包括电流偏置量计算单元,能够根据第二相对位置偏离第一相对位置的偏离量,得到等幅偏置量。Optionally, the control unit further includes a current offset calculation unit that can obtain a constant-amplitude offset according to the offset of the second relative position from the first relative position.
在本发明的较优技术方案中,激光器的温度可调节,位置校正模块包括温度校正单元,温度校正单元能够向激光器输入控温电流,以根据激光器波长与温度的对应关系,对激光器的波长扫描进行调节。采用温度调节方式,能够在较大范围内调节波长的扫描范围,使得激光气体检测装置能够应对吸收峰偏离较为严重的情况。In the preferred technical solution of the present invention, the temperature of the laser is adjustable, and the position correction module includes a temperature correction unit, which can input a temperature control current to the laser to scan the wavelength of the laser according to the correspondence between the laser wavelength and the temperature Make adjustments. Using the temperature adjustment method, the scanning range of the wavelength can be adjusted in a larger range, so that the laser gas detection device can cope with the situation where the absorption peak deviates more seriously.
进一步地,在本发明的较优技术方案中,激光器包括温度传感器,温度校正单元与温度传感器电连接,能够根据温度传感器得到的激光器的温度、第二相对位置偏离第一相对位置的偏离量向激光器输出控温电流。采用具有温度传感器的激光器进行温度调节,能够更加精确地配合波长与温度、电流的关系,调节激光器的波长扫描。Further, in a preferred technical solution of the present invention, the laser includes a temperature sensor, the temperature correction unit is electrically connected to the temperature sensor, and can deviate from the temperature of the laser obtained by the temperature sensor and the deviation amount of the second relative position from the first relative position The laser outputs temperature control current. Using a laser with a temperature sensor for temperature adjustment can more accurately match the relationship between the wavelength, temperature and current, and adjust the wavelength scan of the laser.
在本发明的较优技术方案中,激光气体检测装置还包括激光组件支架,激光组件支架具有多个并行设置的支架单元,支架单元与分光部件、气体吸收池以及探测器安装固定,一个或多个探测器电连接至同一电路板,电路板安装于激光气体检测装置的外壳体。通过以上安装方式,电路板的散热性能得到有效地提升。In a preferred technical solution of the present invention, the laser gas detection device further includes a laser component bracket, and the laser component bracket has a plurality of bracket units arranged in parallel, and the bracket unit is installed and fixed with the spectroscopic component, the gas absorption cell, and the detector, one or more The two detectors are electrically connected to the same circuit board, and the circuit board is mounted on the outer shell of the laser gas detection device. Through the above installation methods, the heat dissipation performance of the circuit board is effectively improved.
进一步地,在本发明的较优技术方案中,激光组件支架具有多个激光器安装口,多个激光器通过激光器安装口与激光组件支架可拆装连接。方便在部分激光器失效时及时更换,同时能够方便地调整激光器的数量选择,以应对不同使用情境下的激光器数量要求,提高激光气体检测装置的普适性。Further, in a preferred technical solution of the present invention, the laser component bracket has multiple laser mounting ports, and the multiple lasers are detachably connected to the laser component bracket through the laser mounting port. It is convenient to replace in time when some lasers fail. At the same time, the number of lasers can be easily adjusted to meet the requirements of the number of lasers in different usage scenarios and improve the universality of laser gas detection devices.
在本发明的较优技术方案中,激光气体检测装置包括:多个激光器;控制部,与多个激光器电连接,能够控制多个激光器进行同步的波长扫描,待测气体目标吸收峰的中心波长在波长扫描的扫描波形中预设占据第一相对位置;电流驱动装置,电流驱动装置与多个激光器及控制部电连接,能够根据控制部输出的控制信号进行电流扫描,以驱动多个激光器进行波长扫描;一个或多个分光部件,多个激光器的出射光路上均经过分光部件,以将每个激光器出射的激光分束为探测光和参考光;一个 或多个气体吸收池,各路参考光的光路上均经过气体吸收池,气体吸收池内充有待测气体;一个或多个探测器,配置在各路参考光经过气体吸收池后的光路上;控制部与探测器电连接,能够确定待测气体的目标吸收峰在探测器采集得到的光强信号波形中占据的第二相对位置;控制部还包括:位置校正模块,位置校正模块与多个激光器电连接,能够根据所述第二相对位置偏离所述第一相对位置的偏离量,独立地对一个或多个激光器的波长扫描进行调节;位置校正模块包括电流校正单元和温度校正单元,电流校正单元与电流驱动装置电连接,能够调节电流驱动装置的电流扫描范围,温度校正单元能够向激光器输入控温电流,以对激光器的波长扫描进行调节;位置校正模块预设有调节阈值,若第二相对位置偏离第一相对位置的偏离量小于调节阈值,位置校正模块采用电流校正单元进行位置校正;若第二相对位置偏离第一相对位置的偏离量大于调节阈值,位置校正模块使用温度校正单元或同时使用温度校正单元和电流校正单元进行位置校正。In a preferred technical solution of the present invention, the laser gas detection device includes: a plurality of lasers; a control section, electrically connected to the plurality of lasers, capable of controlling the plurality of lasers to perform synchronized wavelength scanning, and the center wavelength of the target absorption peak of the gas to be measured The first relative position is preset in the scan waveform of the wavelength scan; the current driving device is electrically connected to the multiple lasers and the control part, and can perform current scanning according to the control signal output by the control part to drive the multiple lasers to perform Wavelength scanning; one or more beam splitting components, the exiting optical paths of multiple lasers pass through the beam splitting components to split the laser beam emitted from each laser into probe light and reference light; one or more gas absorption cells, each reference The light path of the light passes through the gas absorption cell, and the gas absorption cell is filled with the gas to be measured; one or more detectors are arranged on the light path after each reference light passes through the gas absorption cell; the control part is electrically connected to the detector and can Determine the second phase occupied by the target absorption peak of the gas to be measured in the light intensity signal waveform collected by the detector The control section further includes: a position correction module, which is electrically connected to the plurality of lasers and can independently deviate from one or more lasers according to the deviation amount of the second relative position from the first relative position The wavelength scanning is adjusted; the position correction module includes a current correction unit and a temperature correction unit. The current correction unit is electrically connected to the current drive device and can adjust the current scan range of the current drive device. The temperature correction unit can input a temperature control current to the laser to The wavelength scanning of the laser is adjusted; the position correction module is preset with an adjustment threshold. If the second relative position deviates from the first relative position by less than the adjustment threshold, the position correction module uses a current correction unit to perform position correction; if the second relative position deviates The deviation amount of the first relative position is greater than the adjustment threshold, and the position correction module uses the temperature correction unit or the temperature correction unit and the current correction unit to perform position correction.
本较优技术方案中,激光气体检测装置的位置校正模块同时使用温度校正单元和电流校正单元对激光器的波长扫描范围进行校正,在吸收峰偏离量较小时,通过校正速度较快且较为精确的电流校正单元进行校正,而在吸收峰偏离量较大时,开启温度校正单元,在较大的调节范围内校正激光器的波长扫描状态。通过以上方式,该激光气体检测装置能够根据不同的老化情况针对性地进行调整校正,同时满足了调节速度、调节精度和调节范围的要求。In this preferred technical solution, the position correction module of the laser gas detection device uses a temperature correction unit and a current correction unit to correct the wavelength scanning range of the laser. When the deviation of the absorption peak is small, the correction speed is faster and more accurate. The current correction unit performs correction, and when the deviation amount of the absorption peak is large, the temperature correction unit is turned on to correct the wavelength scanning state of the laser within a large adjustment range. In the above manner, the laser gas detection device can be adjusted and corrected according to different aging conditions, and at the same time meet the requirements of adjustment speed, adjustment accuracy and adjustment range.
本发明还提供了一种激光气体检测装置的校正方法,用于安装有多个激光器的激光气体检测装置,该校正方法包括以下步骤:The invention also provides a correction method of a laser gas detection device for a laser gas detection device installed with multiple lasers. The correction method includes the following steps:
多个激光器进行同步的波长扫描,其中,待测气体目标吸收峰的中心波长在波长扫描的扫描波形中预设占据第一相对位置;Multiple lasers perform synchronous wavelength scanning, wherein the center wavelength of the target absorption peak of the gas to be measured occupies the first relative position by default in the scanning waveform of the wavelength scanning;
将多个激光器出射的激光光束分束为探测光和参考光;Split the laser beams emitted by multiple lasers into probe light and reference light;
将多路参考光通过充有待测气体的气体吸收池;Pass multiple reference lights through the gas absorption cell filled with the gas to be measured;
对通过气体吸收池后的各路参考光的光强信号进行检测;Detect the intensity signal of each reference light after passing through the gas absorption cell;
确定待测气体的目标吸收峰在参考光光强信号波形中占据的第二相对位置;Determine the second relative position occupied by the target absorption peak of the gas to be measured in the reference light intensity signal waveform;
根据第二相对位置偏离第一相对位置的偏离量,独立地对一个或多个激光器的波长扫描进行调节。According to the deviation amount of the second relative position from the first relative position, the wavelength scanning of one or more lasers is independently adjusted.
附图说明BRIEF DESCRIPTION
图1是本发明一个实施例中的激光气体检测装置的激光组件的光电结构示意图;1 is a schematic diagram of the photoelectric structure of a laser assembly of a laser gas detection device in an embodiment of the present invention;
图2是图1实施例中驱动电流信号的波形图;2 is a waveform diagram of the driving current signal in the embodiment of FIG. 1;
图3是图1实施例中波长扫描信号的波形图;3 is a waveform diagram of a wavelength scanning signal in the embodiment of FIG. 1;
图4是图1实施例中探测器接收的老化后的激光器的激光信号波形示意图;4 is a schematic diagram of the laser signal waveform of the aged laser received by the detector in the embodiment of FIG. 1;
图5是本发明另一个实施例中的激光气体检测装置的反馈控制回路的结构示意图;5 is a schematic structural diagram of a feedback control loop of a laser gas detection device in another embodiment of the present invention;
图6是图1实施例中的激光组件的安装结构示意图;6 is a schematic diagram of the installation structure of the laser assembly in the embodiment of FIG. 1;
图7是本发明的一个实施例中的激光气体检测装置用于实现激光器的位置校正的结构示意图;7 is a schematic structural diagram of a laser gas detection device used to implement laser position correction in an embodiment of the present invention;
图8是图7实施例中的位置校正结构的运行方法流程图。FIG. 8 is a flowchart of the operation method of the position correction structure in the embodiment of FIG. 7.
附图标记:Reference mark:
100-激光器,102-分光部件,104-气体吸收池,106-探测器,108-电路板,200-控制部,202-位置校正模块,206-模数转换模块,2020-偏离量计算单元,2022-电流偏置量计算单元,2024-控温电流计算单元,2026-电流校正单元,2028-温度校正单元,300-激光,302-探测光,304-参考光,400-电流驱动装置,500-激光组件支架,502-支架单元,504-激光器安装口,506-准直透镜。100-laser, 102-spectral component, 104-gas absorption cell, 106-detector, 108-circuit board, 200-control section, 202-position correction module, 206-analog-to-digital conversion module, 2020-deviation calculation unit, 2022-current offset calculation unit, 2024-temperature control current calculation unit, 2026-current correction unit, 2028-temperature correction unit, 300-laser, 302-detection light, 304-reference light, 400-current drive device, 500 -Laser assembly holder, 502-stand unit, 504-laser mounting port, 506-collimating lens.
具体实施方式detailed description
如背景技术所述,由于激光器的功率有限,为了增大激光气体检测装置的探测距离,技术人员可以通过多个激光器同时工作的方式实现。然而,单纯地提高激光器的数量同时会带来一定的问题,即随着仪器的老化,激光信号的整体质量劣化明显。As described in the background art, due to the limited power of the laser, in order to increase the detection distance of the laser gas detection device, technicians can achieve this by using multiple lasers to work simultaneously. However, simply increasing the number of lasers also brings certain problems, that is, as the instrument ages, the overall quality of the laser signal deteriorates significantly.
在实现本发明的过程中,发明人通过对该技术问题的研究,发现该技术问题主要源自老化带来的波长扫描的扫描范围的变化,进而引起吸收峰位置的漂移,漂移后的吸收峰将使得各个激光器的信号叠加结果出现分峰现象,该叠加结果将影响光强信号的分析,造成激光信号的整体 质量劣化。In the process of realizing the present invention, the inventor found that the technical problem was mainly due to the change of the scanning range of the wavelength scan brought about by aging, which caused the drift of the absorption peak position, and the absorption peak after the drift Peak splitting will occur in the signal superposition result of each laser, and this superposition result will affect the analysis of the light intensity signal, causing the overall quality of the laser signal to deteriorate.
具体来说,激光气体检测装置在出厂时,各激光器被配置为执行严格同步的波长扫描。在一些实施例中,所述多个激光器为相同型号的电流调谐激光器,通过控制各激光器的驱动电流同步扫描,使多个激光器执行同步且扫描范围相同的波长扫描。该同步的波长扫描过程在仪器刚出厂时可被严格执行,但随着使用时间的增加,各电流调谐激光器将出现不同程度的老化,老化现象将使电流调谐激光器的波长-电流相关函数发生变化。伴随着老化现象的产生,各激光器虽然加载了同步的扫描电流,但得到的波长扫描范围却并不完全同步,部分激光器的波长-电流相关函数变化较大,致使在同一扫描周期内,特定吸收波长在波长扫描中占据的位置不同。此时,光检测器收集到的激光信号中,将在同一周期内分出多个吸收峰,这种形式的激光信号质量较差,将严重影响后续的气体浓度分析。Specifically, when the laser gas detection device is shipped, each laser is configured to perform strictly synchronized wavelength scanning. In some embodiments, the plurality of lasers are current-tuning lasers of the same model, and by controlling the driving current of each laser to scan synchronously, the plurality of lasers are synchronized to perform wavelength scanning with the same scanning range. The synchronized wavelength scanning process can be strictly executed when the instrument is shipped from the factory, but with the increase of use time, each current tuned laser will show different degrees of aging, and the aging phenomenon will change the wavelength-current correlation function of the current tuned laser . With the generation of aging phenomenon, although the lasers are loaded with synchronized scanning current, the obtained wavelength scanning range is not completely synchronized, and the wavelength-current correlation function of some lasers changes greatly, resulting in a specific absorption within the same scanning period. The wavelengths occupy different positions in the wavelength scan. At this time, the laser signal collected by the photodetector will divide multiple absorption peaks in the same period. This form of laser signal has poor quality and will seriously affect the subsequent gas concentration analysis.
举例来说,在一个实施例中,选用中心波长为1653.72nm的吸收谱线,对应的温度值为22.9℃,电流值70mA;激光器扫描20-120mA范围,其中20mA对应的波长值为1653.478nm,而120mA对应的电流值为1654.076nm,在出厂时,吸收谱线的中心波长(对应70mA电流值)在波长扫描曲线中将占据中心位置,即1/2T位置;而当激光器发生老化时,20-120mA的电流值扫描范围将对应不同的波长扫描范围,进而导致1653.72nm的中心波长对应的电流值也将发生变化,例如50mA,此时,吸收峰位于1/4T位置,若另一激光器的吸收峰仍保持原位,则最终仪器的光检测器将在同一周期内不同时间的采样点处检测到气体吸收信号,即收集到的激光信号将在一个周期内呈现多个占据不同位置的吸收峰,严重影响后续气体浓度的计算分析。For example, in one embodiment, an absorption line with a center wavelength of 1653.72 nm is selected, the corresponding temperature value is 22.9 ° C, and the current value is 70 mA; the laser scans the range of 20-120 mA, where the wavelength value corresponding to 20 mA is 1653.478 nm, The current value corresponding to 120mA is 1654.076nm. At the time of shipment, the center wavelength of the absorption line (corresponding to the current value of 70mA) will occupy the center position in the wavelength scanning curve, that is, the 1 / 2T position; and when the laser is aging, 20 -120mA current value scanning range will correspond to different wavelength scanning range, and then the current value corresponding to the center wavelength of 1653.72nm will also change, such as 50mA, at this time, the absorption peak is located at 1 / 4T position, if another laser If the absorption peak remains in place, the photodetector of the final instrument will detect the gas absorption signal at the sampling points at different times in the same cycle, that is, the collected laser signal will exhibit multiple absorptions occupying different positions in a cycle Peak, which seriously affects the subsequent calculation and analysis of gas concentration.
通过以上分析,发明人发现,激光信号质量的劣化源自部分激光器老化导致的吸收峰位置的互相错开。为了解决上述问题,本发明提供了一种激光气体检测装置,包括:多个激光器;控制部,与多个激光器电连接,能够控制多个激光器进行同步的波长扫描,待测气体目标吸收峰的中心波长在波长扫描的扫描波形中预设占据第一相对位置;分光部件,多个激光器的出射光路上均设置有分光部件,以将每个激光器出射的激光分束为探测光和参考光;气体吸收池,各路参考光的光路上均设置有气体吸收池,气体吸收池内充有待测气体;探测器,各路参考光经过气 体吸收池后的光路上均设置有探测器;控制部与探测器电连接,能够确定待测气体的目标吸收峰在探测器采集得到的光强信号波形中占据的第二相对位置;控制部还包括位置校正模块,位置校正模块与多个激光器电连接,响应于第二相对位置偏离第一相对位置,位置校正模块能够独立地对相应的激光器的波长扫描进行调节。Through the above analysis, the inventors found that the deterioration of the laser signal quality results from the shift of the absorption peak positions caused by the aging of some lasers. In order to solve the above problems, the present invention provides a laser gas detection device, including: a plurality of lasers; a control section, electrically connected to the plurality of lasers, capable of controlling the plurality of lasers to perform synchronous wavelength scanning, and the target absorption peak of the gas to be measured The center wavelength presupposes to occupy the first relative position in the scanning waveform of the wavelength scan; the splitting component, the splitting components are provided on the output optical paths of multiple lasers to split the laser beam emitted from each laser into probe light and reference light; Gas absorption cell, each light path of reference light is equipped with gas absorption cell, and the gas absorption cell is filled with gas to be measured; detector, each light path of reference light passing through the gas absorption cell is provided with detector; control part It is electrically connected to the detector, which can determine the second relative position occupied by the target absorption peak of the gas to be measured in the light intensity signal waveform collected by the detector; the control part also includes a position correction module, which is electrically connected to multiple lasers , In response to the second relative position deviating from the first relative position, the position correction module can independently respond to the corresponding excitation The wavelength scan of the optical device is adjusted.
采用多个激光器同步扫描的方式,能够采用多个激光器形成发射功率较高的激光光源组,同时利用分光设备,将每路激光器发射出的光束分束为参考光和探测光,通过对经过气体吸收池后的参考光中吸收峰所处位置进行检测,并根据检测信息独立地对每个激光器的波长扫描进行调节,进而调整吸收峰在最终接收到的激光信号中所处的相对位置,解决信号质量的劣化问题。Using multiple lasers to scan synchronously, multiple lasers can be used to form a laser light source group with higher emission power. At the same time, a beam splitting device is used to split the beam emitted by each laser into reference light and detection light. The position of the absorption peak in the reference light after the absorption cell is detected, and the wavelength scan of each laser is independently adjusted according to the detection information, and then the relative position of the absorption peak in the finally received laser signal is adjusted to solve The problem of signal quality degradation.
以下,一边参照附图一边大致说明本发明的优选实施例。另外,本发明的实施例并不限定于下述实施例,能够采用在本发明的技术构思范围内的各种各样的实施例。Hereinafter, preferred embodiments of the present invention will be roughly described with reference to the drawings. In addition, the embodiments of the present invention are not limited to the following embodiments, and various embodiments within the scope of the technical idea of the present invention can be adopted.
实施例一Example one
本实施例提供了一种激光气体检测装置,如图1所示,该激光气体检测装置包括多个激光器100,每个激光器100配置有独立的控制回路,用于对激光器的波长扫描状态进行调节。This embodiment provides a laser gas detection device. As shown in FIG. 1, the laser gas detection device includes a plurality of lasers 100, and each laser 100 is provided with an independent control loop for adjusting the wavelength scanning state of the laser .
具体地,每条激光器100的控制回路上设置有分光部件102,该分光部件102能够将激光器100射出的激光300分束为探测光302和参考光304。其中,分光部件102表面镀有增透膜,以进一步增大探测光302光强。本实施例中,分光部件101表面镀增透膜可以使探测光302与参考光304具有99:1以上的光强比,参考光304由于与探测光302经同一激光300分束获得,可以作为分析探测光302状态的样本,对探测光302的波长扫描状态进行监测。Specifically, the control circuit of each laser 100 is provided with a beam splitter 102, which can split the laser beam 300 emitted by the laser 100 into the detection light 302 and the reference light 304. Among them, the surface of the spectroscopic component 102 is coated with an antireflection film to further increase the light intensity of the detection light 302. In this embodiment, the antireflection coating on the surface of the beam splitting member 101 can make the detection light 302 and the reference light 304 have an intensity ratio of 99: 1 or more. The sample of the state of the probe light 302 is analyzed, and the wavelength scanning state of the probe light 302 is monitored.
参考光304被分出后的路径上设置有气体吸收池104,气体吸收池104内充有待测气体,参考光304通过气体吸收池104后,特定波长的光会被气体选择性吸收,携带有气体吸收信息的参考光304被探测器106接收。探测器106将接收到的参考光304的光强信号转换为电信号传送至控制部200,控制部200可以对反映参考光304光强信息的电信号进行模数转换,并根据分析结果生成驱动信号,以控制激光器100的波长扫描状态,以上结构构成对激光器100进行分束、检测、反馈和控制的 控制回路。A gas absorption cell 104 is provided on the path after the reference light 304 is separated, and the gas absorption cell 104 is filled with the gas to be measured. After the reference light 304 passes through the gas absorption cell 104, light of a specific wavelength is selectively absorbed by the gas and carried The reference light 304 with gas absorption information is received by the detector 106. The detector 106 converts the received light intensity signal of the reference light 304 into an electrical signal and transmits it to the control unit 200. The control unit 200 can perform analog-to-digital conversion on the electrical signal reflecting the light intensity information of the reference light 304 and generate a drive according to the analysis result The signal is used to control the wavelength scanning state of the laser 100. The above structure constitutes a control loop for beam splitting, detection, feedback, and control of the laser 100.
本实施例中,激光气体检测装置目标测量的待测气体为甲烷气体,参考光304在经过甲烷气体后,将在1653.72nm附近产生特征吸收,且在该中心波长附近不存在干扰吸收峰,因此选择以1653.72nm为中心波长的吸收峰作为本实施例中待测气体的目标吸收峰。该激光气体检测装置通过多个激光同步扫描的方式,能够将易于取得的激光器组合成发射功率较高的激光光源组,以应对一些特定环境下的天然气泄漏检查,诸如从楼底对居民楼高层进行天然气泄漏检测或利用无人机对地面目标进行天然气管道泄漏检查等等。当然,本领域的技术人员也可以根据实际需要,针对不同的待测气体设计该激光气体检测装置,可选的待测气体包括氨气、一氧化碳、氢气等气体。此外,技术人员对于同一待测气体,也可以选择待测气体的不同的吸收峰作为目标吸收峰,仅需对激光器的类型、激光器波长扫描的中心波长、扫描范围等参数进行调整即可。In this embodiment, the target gas to be measured by the laser gas detection device is methane gas. After passing through the methane gas, the reference light 304 will have characteristic absorption around 1653.72 nm, and there is no interference absorption peak near the center wavelength, so The absorption peak with the center wavelength of 1653.72 nm is selected as the target absorption peak of the gas to be measured in this embodiment. The laser gas detection device can combine easily accessible lasers into a laser light source group with higher emission power through multiple laser simultaneous scanning methods to deal with natural gas leakage inspection in some specific environments, such as from the bottom of the building to the high-rise of the residential building Carry out natural gas leak detection or use a drone to perform natural gas pipeline leak inspection on ground targets, etc. Of course, those skilled in the art can also design the laser gas detection device for different gas to be tested according to actual needs, and the optional gas to be tested includes ammonia, carbon monoxide, hydrogen and other gases. In addition, for the same gas to be measured, the technician can also select different absorption peaks of the gas to be measured as target absorption peaks, and only need to adjust parameters such as the type of laser, the center wavelength of the laser wavelength scan, and the scanning range.
以下参考图2-图4,进一步介绍本实施例提供的控制回路对激光器100波长扫描的控制方式。本实施例中的激光气体检测装置采用的激光器100为电流调谐激光器,控制部200能够独立控制对每个激光器100施加的电流调制信号。The following further describes the control method of the laser 100 wavelength scanning by the control loop provided by this embodiment with reference to FIGS. 2 to 4. The laser 100 used in the laser gas detection device in this embodiment is a current tuning laser, and the control unit 200 can independently control the current modulation signal applied to each laser 100.
本实施例中,电流调制信号采用锯齿波信号进行低频扫描。参考图2,出厂预设的低频扫描信号得到的驱动电流的最小值为20mA,最大值为120mA,驱动激光器100进行线性或基本上是线性的波长扫描,相应的波长扫描的扫描波形如图3所示。待测气体目标吸收峰的中心波长为1653.72nm,与该波长对应的激光器100的工作电流值为70mA。即,目标吸收峰的中心波长在波长扫描的扫描波形中预设占据的第一相对位置为1/2周期的位置。本实施例中,第一相对位置是指在一个扫描周期内,目标吸收峰的中心波长在波长扫描的波长-时间曲线中对应的时间占周期时长T的比例。In this embodiment, the current modulation signal uses a sawtooth wave signal for low frequency scanning. Referring to FIG. 2, the minimum value of the drive current obtained by the factory-set low-frequency scan signal is 20 mA, and the maximum value is 120 mA. The laser 100 is driven to perform linear or substantially linear wavelength scanning. The corresponding waveform of the wavelength scanning is shown in FIG. 3 As shown. The center wavelength of the target absorption peak of the gas to be measured is 1653.72 nm, and the operating current value of the laser 100 corresponding to this wavelength is 70 mA. That is, the center wavelength of the target absorption peak is preset to occupy the first relative position in the scan waveform of the wavelength scan as a position of 1/2 cycle. In this embodiment, the first relative position refers to the ratio of the center wavelength of the target absorption peak in the wavelength-time curve of the wavelength scan to the period duration T within a scan period.
伴随着老化现象的发生,各激光器100虽然仍加载相同的同步扫描电流信号,但各激光器100由于老化程度的不同,其波长-电流相关函数将出现不同程度的变化,导致最终波长扫描的扫描曲线发生一定程度的偏移。探测器106将接收到的光强随时间变化的光信号转换为电信号后,再由控制部200转换为数字信号,得到的光强(已归一化处理)-采样点曲线如图4所示。由于老化,该激光器100虽然仍由20-120mA的电流 驱动,但其实际发出的波长扫描信号的扫描范围漂移至1653.582-1654.207nm。相应地,中心波长为1653.72nm的目标吸收峰也将由原1/2周期位置漂移至1/4周期的第二相对位置。本实施例中,第二相对位置是指目标吸收峰在经采样的数字信号中所处的采样点n占一个周期内的采样点总数量N的比例n/N。With the occurrence of the aging phenomenon, although each laser 100 is still loaded with the same synchronous scanning current signal, due to the different aging degree of each laser 100, its wavelength-current correlation function will change to varying degrees, resulting in a final wavelength scanning curve A certain degree of deviation occurs. The detector 106 converts the received light signal whose light intensity changes with time into an electrical signal, and then converts it into a digital signal by the control unit 200, and the resulting light intensity (normalized) -sampling point curve is shown in FIG. 4 Show. Due to aging, although the laser 100 is still driven by a current of 20-120 mA, the scanning range of the wavelength scanning signal it actually emits drifts to 1653.582-1654.207 nm. Accordingly, the target absorption peak with a center wavelength of 1653.72 nm will also drift from the original 1/2 period position to the second relative position of 1/4 period. In this embodiment, the second relative position refers to the ratio n / N of the sampling points n of the target absorption peak in the sampled digital signal to the total number N of sampling points in a cycle.
需要说明的是,第一相对位置及第二相对位置中的“相对位置”是指特定吸收波长或目标吸收峰在与波长相关的目标信号(如本实施例中的电流信号、波长信号)中所对应的目标参数(如t,n)占一个周期内目标参数的总数(如T,N)的比例。在本发明的其他实施例中,该目标信号和目标参数可以根据实际情况进行选取,在不偏离本发明主旨的前提下,以上变化均不超出本发明的保护范围。It should be noted that the “relative position” in the first relative position and the second relative position means that the specific absorption wavelength or the target absorption peak is in the target signal related to the wavelength (such as the current signal and the wavelength signal in this embodiment) The corresponding target parameters (such as t, n) account for the proportion of the total number of target parameters (such as T, N) in a cycle. In other embodiments of the present invention, the target signal and the target parameter can be selected according to actual conditions, and the above changes do not exceed the protection scope of the present invention without departing from the gist of the present invention.
为了实现对于目标吸收峰第二相对位置的校正,本实施例中的激光气体检测装置还包括位置校正模块202,能够对目标吸收峰的第二相对位置进行校正。具体的,该位置校正模块202调整的参数为激光器100驱动电流的扫描范围。通过独立地调整每一老化偏离的激光器100驱动电流的扫描范围,使每个激光器100发出的激光的波长扫描范围平移回原来的1653.478-1654.076nm。In order to realize the correction of the second relative position of the target absorption peak, the laser gas detection device in this embodiment further includes a position correction module 202, which can correct the second relative position of the target absorption peak. Specifically, the parameter adjusted by the position correction module 202 is the scanning range of the driving current of the laser 100. By independently adjusting the scanning range of the driving current of each aging deviation laser 100, the wavelength scanning range of the laser light emitted by each laser 100 is shifted back to the original 1654.378-1654.076 nm.
本实施例中,激光器100驱动电流的扫描范围的调整方式为在原有驱动电流信号的基础上叠加等幅偏置量,即在原驱动电流信号的基础上增大或减少相等量的电流。举例来说,对于扫描范围偏离至1653.582-1654.207nm的激光器100,位置校正模块202能够均匀地调低其每一时间下对应的扫描电流,例如,将电流扫描范围从原来的20-120mA调至17-117mA,从而使波长的扫描范围回到1653.478-1654.076nm。相应地,由于调整后的各激光器100的波长扫描范围相同,且均采用波形为锯齿波的线性扫描信号,最终激光气体检测装置的主探测器将在相同或基本相同的时间收集到吸收峰信号,从而使得各激光器100的吸收峰信号能够很好地叠加,避免最终的激光信号中吸收峰落在不同相对位置,进而增大对激光信号分析的难度,降低信号质量。In this embodiment, the scanning range of the driving current of the laser 100 is adjusted by superimposing an equal amplitude offset on the basis of the original driving current signal, that is, increasing or decreasing an equal amount of current on the basis of the original driving current signal. For example, for the laser 100 whose scanning range deviates to 1653.582-1654.207 nm, the position correction module 202 can uniformly reduce the corresponding scanning current at each time, for example, adjust the current scanning range from the original 20-120 mA to 17-117mA, so that the scanning range of the wavelength returns to 1653.478-1654.076nm. Correspondingly, since the adjusted wavelength scanning range of each laser 100 is the same, and the linear scanning signal with a sawtooth waveform is used, the final detector of the laser gas detection device will collect the absorption peak signal at the same or substantially the same time Therefore, the absorption peak signals of the lasers 100 can be superimposed well, avoiding that the absorption peaks in the final laser signal fall at different relative positions, thereby increasing the difficulty of analyzing the laser signal and reducing the signal quality.
需要说明的是,虽然本实施例中,各激光器100采用线性的三角波或锯齿波信号进行驱动,但技术人员可以根据实际情况,选择其他类型的波形进行波长扫描,如正弦波或组合波形等,只要该波形能够扫描特定的波长范围且便于后期计算分析即可。It should be noted that although in this embodiment, each laser 100 is driven by a linear triangular wave or sawtooth wave signal, the technician can select other types of waveforms for wavelength scanning according to the actual situation, such as sine waves or combined waveforms, etc. As long as the waveform can scan a specific wavelength range and facilitate later calculation and analysis.
本实施例中,激光器100为电流调谐激光器。具体地,电流调谐激光器可以是采样光栅分布布拉格反射激光器、辅助光栅定向耦合背向取样反射激光器、分布反馈激光器或其他合适的可电流调谐的激光器。In this embodiment, the laser 100 is a current-tuned laser. Specifically, the current-tuned laser may be a sampling grating distributed Bragg reflection laser, an auxiliary grating directional coupling back-sampling reflection laser, a distributed feedback laser, or other suitable current-tunable laser.
在本发明的其他实施例中,激光器100也可以是其他类型的可调谐激光器,例如采用温度控制技术或机械控制技术的可调谐激光器。相应地,对激光器100的波长扫描范围的调节方式也可以根据实际情况,如激光器100的类型、可调节波长范围等因素予以调整,如采用温度调节、电流调节、机械调节或其组合调节方式。此外,在本发明的其他实施例中,分光部件102、气体吸收池104、探测器106等部件也可以根据实际需要设置为一个或多个,并被不同激光器100所共用,在不偏离本发明主旨的前提下,此类组件数量的变换均应理解为未超出本发明的保护范围。In other embodiments of the present invention, the laser 100 may also be other types of tunable lasers, such as tunable lasers using temperature control technology or mechanical control technology. Accordingly, the adjustment method of the wavelength scanning range of the laser 100 can also be adjusted according to actual conditions, such as the type of the laser 100, the adjustable wavelength range, and other factors, such as temperature adjustment, current adjustment, mechanical adjustment, or a combination of adjustment methods. In addition, in other embodiments of the present invention, the spectroscopic component 102, the gas absorption cell 104, the detector 106 and other components can also be configured as one or more according to actual needs, and are shared by different lasers 100 without departing from the present invention Under the premise of the gist, the change of the number of such components should be understood as not exceeding the protection scope of the present invention.
本实施例中,控制部200集成有用于驱动激光器100的电流源,在本发明的其他实施例中,还可以采用单独的电流驱动装置400驱动各个激光器。参考图5,控制部200包括位置校正模块202,位置校正模块202与每个激光器100对应的探测器106电连接,能够根据探测器106收集的光强信号对电流信号进行调制,具体的调制方法实施例一中已有详尽描述,可沿用至此,此处不再赘述。电流驱动装置400与控制部200连接,经位置校正模块202调制后的信号传输至电流驱动装置400,调制后的信号包含每个激光器100的驱动信号,电流驱动装置400根据该驱动信号,独立地对每个激光器100进行驱动。In this embodiment, the control unit 200 integrates a current source for driving the laser 100. In other embodiments of the present invention, a separate current driving device 400 may also be used to drive each laser. Referring to FIG. 5, the control unit 200 includes a position correction module 202 that is electrically connected to the detector 106 corresponding to each laser 100 and can modulate the current signal according to the light intensity signal collected by the detector 106. The specific modulation method The first embodiment has been described in detail, and can be used until now, and will not be repeated here. The current drive device 400 is connected to the control unit 200, and the signal modulated by the position correction module 202 is transmitted to the current drive device 400. The modulated signal includes the drive signal of each laser 100, and the current drive device 400 is independently based on the drive signal Each laser 100 is driven.
此外,在本发明的另一些实施例中,电流驱动装置400也可以被配置为一个或多个,并被不同激光器100所共用。多个激光器100与该电流驱动装置400的不同接口连接,电流驱动装置400可以根据接收到的控制部200的驱动信号独立地调节每个激光器100的驱动电流。In addition, in other embodiments of the present invention, the current driving device 400 may also be configured as one or more and shared by different lasers 100. A plurality of lasers 100 are connected to different interfaces of the current driving device 400, and the current driving device 400 can independently adjust the driving current of each laser 100 according to the received driving signal of the control section 200.
通过以上方式,本实施例提供了一种激光气体检测装置,使用多个激光器100联用以产生发射功率较高的激光光源,同时采用位置校正模块202对不同激光器100因老化而产生的吸收峰偏离进行校正,使每路激光的吸收峰的相对位置均回到预设状态,从而使各吸收峰能够很好地在最终收集的光强-采样点信号中叠加,提高信号质量,降低分析难度。In the above manner, this embodiment provides a laser gas detection device that uses a plurality of lasers 100 in combination to generate a laser light source with high emission power, and uses a position correction module 202 to absorb absorption peaks generated by different lasers 100 due to aging The deviation is corrected to make the relative position of the absorption peak of each laser return to the preset state, so that each absorption peak can be superimposed on the finally collected light intensity-sampling point signal, improve the signal quality, and reduce the analysis difficulty .
本实施例还提供了激光气体检测装置中由激光器100形成的激光器阵列及其配套的反馈控制部件的机械安装结构。如图6所示,激光气体 检测装置具有供激光器阵列和反馈控制部件安装的激光组件支架500,该激光组件支架500包括多个并行设置的支架单元502,每个支架单元502安装有一块分光部件102、一个气体吸收池104和一个对参考光304光强进行监测的探测器106,此外,激光组件支架500上还具有与激光器100的螺纹配合的螺口,即激光器安装口504,能够供激光器100可拆装连接。支架单元502和可拆装激光器的设计使得装置设计和生产过程更加灵活,模具成本更加低廉,激光器的更换维修也更加便捷。各激光器安装口504平行设置,进而使得安装在该安装口504的各激光器100保持出射光路平行,各激光器100的出射光路上还安装有准直透镜506,以进一步提高出射光的平行度。各路出射激光可以合束也可以单独射出,可以根据实际情况灵活配置。This embodiment also provides a mechanical installation structure of the laser array formed by the laser 100 and the associated feedback control component in the laser gas detection device. As shown in FIG. 6, the laser gas detection device has a laser assembly bracket 500 for mounting a laser array and a feedback control component. The laser assembly bracket 500 includes a plurality of bracket units 502 arranged in parallel, and each bracket unit 502 is mounted with a spectroscopic component 102. A gas absorption cell 104 and a detector 106 that monitors the intensity of the reference light 304. In addition, the laser assembly holder 500 also has a screw hole that matches the thread of the laser 100, that is, the laser mounting port 504, which can be used for laser 100 detachable connection. The design of the support unit 502 and the detachable laser makes the device design and production process more flexible, the cost of the mold is lower, and the replacement and maintenance of the laser are also more convenient. The laser mounting ports 504 are arranged in parallel, so that each laser 100 mounted on the mounting port 504 keeps the exit optical path parallel, and a collimating lens 506 is further installed on the exit optical path of each laser 100 to further improve the parallelism of the exiting light. The lasers emitted from each channel can be combined or emitted individually, and can be flexibly configured according to the actual situation.
本实施例中,每个支架单元502还安装有与探测器106电连接的单独的电路板108,用于驱动探测器106,并将探测器106根据光强信号得到的模拟信号转换为数字信号,并将数字信号发送至仪器的控制部200。在本发明的另一实施例中,多个探测器106还可以电连接至同一电路板108,该电路板108可以安装在激光气体检测装置的外壳体(图中未示出)处,以实现更好的散热效果。In this embodiment, each bracket unit 502 is also installed with a separate circuit board 108 electrically connected to the detector 106 for driving the detector 106 and converting the analog signal obtained by the detector 106 according to the light intensity signal into a digital signal And send the digital signal to the control part 200 of the instrument. In another embodiment of the present invention, multiple detectors 106 may also be electrically connected to the same circuit board 108, which may be installed at the outer casing (not shown in the figure) of the laser gas detection device to achieve Better heat dissipation effect.
实施例二Example 2
本实施例提供了一种激光气体检测装置,联合使用电流和温度对波长扫描范围进行调节,其机械结构以及位置校正模块以外的电路结构均可以沿用实施例一中激光气体检测装置的相关结构,此处不再赘述。This embodiment provides a laser gas detection device that uses a combination of current and temperature to adjust the wavelength scanning range. The mechanical structure and the circuit structure other than the position correction module can follow the related structure of the laser gas detection device in Embodiment 1. I won't repeat them here.
以下结合附图介绍本实施例中激光气体检测装置的位置校正模块202的结构,以及其如何配合使用电流、温度两种调节参数进行波长校正。参考图7和图8,本实施例中的激光气体检测装置所采用的激光器100为电流可调谐激光器,且激光器100内集成有半导体制冷器(Thermo Electric Cooler,TEC),通过控制向激光器100的半导体制冷器输入的控温电流,可以对激光器100的温度进行调节。The structure of the position correction module 202 of the laser gas detection device in this embodiment is described below with reference to the drawings, and how it is used in conjunction with two adjustment parameters of current and temperature to perform wavelength correction. Referring to FIGS. 7 and 8, the laser 100 used in the laser gas detection device in this embodiment is a current tunable laser, and a semiconductor refrigerator (ThermoElectric Cooler, TEC) is integrated in the laser 100. The temperature control current input by the semiconductor refrigerator can adjust the temperature of the laser 100.
其中,激光器100通过温度对波长扫描进行调节的灵敏度为0.09nm/℃,可以实现较宽的波长调节范围,但响应速度相对较慢且不够精确;而通过改变电流对波长扫描进行调节的灵敏度则为0.01nm/mA,虽然响应速度快且精确,但可调节的波长范围较窄。本实施例中采用温度 校正单元2028,控制向激光器100输入的控温电流,以对激光器100的波长进行粗调;而采用电流校正单元2026,控制驱动激光器100的电流强度,以对激光器100的波长进行微调。Among them, the sensitivity of the laser 100 to adjust the wavelength scan by temperature is 0.09nm / ℃, which can achieve a wider range of wavelength adjustment, but the response speed is relatively slow and not accurate; and the sensitivity of adjusting the wavelength scan by changing the current is 0.01nm / mA, although the response speed is fast and accurate, but the adjustable wavelength range is narrow. In this embodiment, a temperature correction unit 2028 is used to control the temperature control current input to the laser 100 to coarsely adjust the wavelength of the laser 100; and a current correction unit 2026 is used to control the current intensity of the laser 100 to control the laser 100 Fine-tune the wavelength.
具体地,位置校正模块202包括偏离量计算单元2020、电流偏置量计算单元2022、控温电流计算单元2024、电流校正单元2026和温度校正单元2028。其中,探测器106产生的模拟信号经控制部200的模数转换模块206进行A/D转换后,被发送至位置校正模块202的偏离量计算单元2020。偏离量计算单元2020计算第二相对位置偏离第一相对位置的偏离量Δ,根据偏离量Δ与预设的调节阈值δ的大小关系,选择性地使用电流或温度对波长扫描范围进行调节。Specifically, the position correction module 202 includes a deviation amount calculation unit 2020, a current offset amount calculation unit 2022, a temperature control current calculation unit 2024, a current correction unit 2026, and a temperature correction unit 2028. The analog signal generated by the detector 106 is A / D converted by the analog-to-digital conversion module 206 of the control unit 200 and then sent to the deviation amount calculation unit 2020 of the position correction module 202. The deviation amount calculation unit 2020 calculates the deviation amount Δ of the second relative position from the first relative position, and selectively adjusts the wavelength scanning range using current or temperature according to the magnitude relationship between the deviation amount Δ and a preset adjustment threshold δ.
当偏离量Δ小于等于预设的调节阈值δ时,位置校正模块202将使用电流偏置的方法进行对波长扫描范围的微调。偏离量计算单元2020将偏离量信号发送至电流偏置量计算单元2022,电流偏置量计算单元2022能够根据偏离量Δ计算用于进行波长扫描调节的电流的等幅偏置量,并将该等幅偏置量发送至电流校正单元2026,电流校正单元2026与电流驱动装置400连接,能够将该等幅偏置量叠加在原电流驱动信号上,实现对波长扫描范围的调节。When the deviation Δ is less than or equal to the preset adjustment threshold δ, the position correction module 202 will use the current offset method to fine-tune the wavelength scan range. The deviation amount calculation unit 2020 sends the deviation amount signal to the current offset amount calculation unit 2022, and the current offset amount calculation unit 2022 can calculate the constant amplitude offset amount of the current for wavelength sweep adjustment according to the deviation amount Δ, and the The constant amplitude offset is sent to the current correction unit 2026, and the current correction unit 2026 is connected to the current driving device 400, which can superimpose the constant amplitude offset on the original current drive signal to adjust the wavelength scanning range.
当偏离量Δ大于预设的调节阈值δ时,位置校正模块202将使用改变激光器100温度的方法进行粗调。当使用温度调节时,偏离量计算单元2020将偏离量结果发送至控温电流计算单元2024,控温电流计算单元2024能够根据偏离量Δ和激光器100的实际温度计算出最终向激光器100输入的控温电流,并将计算结果发送至温度校正单元2028,由温度校正单元2028执行控温电流的输出调节。When the deviation Δ is greater than the preset adjustment threshold δ, the position correction module 202 will use the method of changing the temperature of the laser 100 for coarse adjustment. When temperature adjustment is used, the deviation amount calculation unit 2020 sends the deviation amount result to the temperature control current calculation unit 2024, which can calculate the final temperature control input to the laser 100 based on the deviation amount Δ and the actual temperature of the laser 100 Current, and send the calculation result to the temperature correction unit 2028, and the temperature correction unit 2028 performs output adjustment of the temperature-controlled current.
需要说明的是,当偏离量计算单元2020计算得到的偏离量Δ大于预设的调节阈值δ,即需要使用温度调节进行粗调时,在完成粗调过程之后,即在温度校正单元2028向激光器100输入控温电流的步骤之后,可以重新获取探测器106的模拟信号并进行模数转换,以及之后的Δ-δ大小判定步骤和调节步骤,直至偏离量Δ小于等于调节阈值δ时,再使用电流校正单元2026对波长进行微调。It should be noted that, when the deviation Δ calculated by the deviation calculation unit 2020 is greater than the preset adjustment threshold δ, that is, temperature adjustment is required for coarse adjustment, after the coarse adjustment process is completed, the temperature correction unit 2028 sends the laser 100 After the step of inputting the temperature control current, the analog signal of the detector 106 can be re-acquired and subjected to analog-to-digital conversion, and then the Δ-δ size determination step and adjustment step until the deviation Δ is less than or equal to the adjustment threshold δ, then use The current correction unit 2026 fine-tunes the wavelength.
本实施例中,波长扫描的校正过程被配置为开机运行,并在校正完成后关闭,以节约电量。当然,技术人员也可以根据激光器100的实际工作情况,配置该校正过程的运行频率。In this embodiment, the calibration process of the wavelength scan is configured to start up and shut down after the calibration is completed to save power. Of course, the technician can also configure the operating frequency of the calibration process according to the actual working conditions of the laser 100.
至此,已经结合附图描述了本发明的技术方案,但是,本领域技术人员容易理解的是,本发明的保护范围显然不局限于这些具体实施例。在不偏离本发明的原理的前提下,本领域技术人员可以对相关技术特征作出等同的更改或替换,这些更改或替换之后的技术方案都将落入本发明的保护范围之内。So far, the technical solutions of the present invention have been described with reference to the accompanying drawings, but it is easily understood by those skilled in the art that the scope of protection of the present invention is obviously not limited to these specific embodiments. Without departing from the principle of the present invention, those skilled in the art can make equivalent changes or replacements to the related technical features, and the technical solutions after these changes or replacements will fall within the protection scope of the present invention.

Claims (10)

  1. 一种激光气体检测装置,其特征在于,包括:A laser gas detection device, characterized in that it includes:
    多个激光器;Multiple lasers;
    控制部,与所述多个激光器电连接,能够控制所述多个激光器进行同步的波长扫描,待测气体目标吸收峰的中心波长在所述波长扫描的扫描波形中预设占据第一相对位置;The control part is electrically connected to the plurality of lasers and can control the plurality of lasers to perform synchronous wavelength scanning. The center wavelength of the target absorption peak of the gas to be measured is preset to occupy the first relative position in the scanning waveform of the wavelength scanning ;
    一个或多个分光部件,多个所述激光器的出射光路均经过所述分光部件,以将每个所述激光器出射的激光分束为探测光和参考光;One or more beam splitting components, the output optical paths of a plurality of the lasers all pass through the beam splitting components, so as to split the laser beam emitted by each laser into detection light and reference light;
    一个或多个气体吸收池,各路所述参考光的光路均经过所述气体吸收池,所述气体吸收池内充有待测气体;One or more gas absorption cells, each light path of the reference light passes through the gas absorption cell, and the gas absorption cell is filled with the gas to be measured;
    一个或多个探测器,配置在各路所述参考光经过所述气体吸收池后的光路上;One or more detectors, which are arranged on the optical paths after the reference light passes through the gas absorption cell;
    所述控制部与所述探测器电连接,能够确定待测气体的目标吸收峰在所述探测器采集得到的光强信号波形中占据的第二相对位置;The control part is electrically connected to the detector, and can determine the second relative position occupied by the target absorption peak of the gas to be measured in the light intensity signal waveform collected by the detector;
    所述控制部还包括位置校正模块,所述位置校正模块与所述多个激光器电连接,能够根据所述第二相对位置偏离所述第一相对位置的偏离量,独立地对一个或多个激光器的波长扫描进行调节。The control unit further includes a position correction module, which is electrically connected to the plurality of lasers, and can independently adjust one or more of the deviations from the first relative position according to the second relative position. The wavelength sweep of the laser is adjusted.
  2. 如权利要求1所述的激光气体检测装置,其特征在于,所述激光气体检测装置包括电流驱动装置,所述电流驱动装置与所述多个激光器及所述控制部电连接,能够根据所述控制部输出的控制信号进行电流扫描,以驱动所述多个激光器进行波长扫描。The laser gas detection device according to claim 1, wherein the laser gas detection device includes a current drive device, and the current drive device is electrically connected to the plurality of lasers and the control unit, and is capable of The control signal output by the control unit performs current scanning to drive the plurality of lasers to perform wavelength scanning.
  3. 如权利要求2所述的激光气体检测装置,其特征在于,所述位置校正模块包括电流校正单元,所述电流校正单元与所述电流驱动装置电连接,能够调节所述电流驱动装置的电流扫描范围,以对所述激光器的波长扫描进行调节。The laser gas detection device according to claim 2, wherein the position correction module includes a current correction unit electrically connected to the current drive device and capable of adjusting the current scan of the current drive device Range to adjust the wavelength sweep of the laser.
  4. 如权利要求3所述的激光气体检测装置,其特征在于,所述电流扫描的扫描波形为三角波或锯齿波,所述电流校正单元通过在所述扫描波形基础上叠加等幅偏置量,以相应地调节波长扫描的扫描范围。The laser gas detection device according to claim 3, characterized in that the scanning waveform of the current scanning is a triangular wave or a sawtooth wave, and the current correction unit superimposes an equal amplitude offset on the basis of the scanning waveform to Adjust the scanning range of the wavelength scan accordingly.
  5. 如权利要求4所述的激光气体检测装置,其特征在于,所述位置校正模块包括电流偏置量计算单元,能够根据所述第二相对位置偏离所述第一相对位置的偏离量,得到所述等幅偏置量。The laser gas detection device according to claim 4, wherein the position correction module includes a current offset calculation unit that can obtain the obtained value according to the deviation of the second relative position from the first relative position Describe the offset of equal amplitude.
  6. 如权利要求1-5中任一项所述的激光气体检测装置,其特征在于,所述激光器的温度可调节,所述位置校正模块包括温度校正单元,所述温度校正单元能够向所述激光器输入控温电流,以对所述激光器的波长扫描进行调节。The laser gas detection device according to any one of claims 1 to 5, wherein the temperature of the laser is adjustable, and the position correction module includes a temperature correction unit, the temperature correction unit is capable of A temperature control current is input to adjust the wavelength scan of the laser.
  7. 如权利要求6所述的激光气体检测装置,其特征在于,所述激光器包括温度传感器,所述温度校正单元与所述温度传感器电连接,能够根据所述温度传感器得到的激光器的温度、所述第二相对位置偏离所述第一相对位置的偏离量向所述激光器输出控温电流。The laser gas detection device according to claim 6, wherein the laser includes a temperature sensor, the temperature correction unit is electrically connected to the temperature sensor, and the temperature of the laser and the temperature can be obtained from the temperature sensor according to the temperature sensor. The deviation amount of the second relative position from the first relative position outputs a temperature control current to the laser.
  8. 如权利要求1-5中任一项所述的激光气体检测装置,其特征在于,所述激光气体检测装置还包括激光组件支架,所述激光组件支架具有多个并行设置的支架单元,所述支架单元与所述分光部件、所述气体吸收池以及所述探测器安装固定,一个或多个所述探测器电连接至同一电路板,所述电路板安装于所述激光气体检测装置的外壳体。The laser gas detection device according to any one of claims 1 to 5, characterized in that the laser gas detection device further comprises a laser component support, the laser component support has a plurality of support units arranged in parallel, the The bracket unit is installed and fixed with the spectroscopic component, the gas absorption cell, and the detector, one or more of the detectors are electrically connected to the same circuit board, and the circuit board is mounted on the housing of the laser gas detection device body.
  9. 一种激光气体检测装置的校正方法,所述激光气体检测装置包括多个激光器,其特征在于,所述校正方法包括以下步骤:A correction method for a laser gas detection device, the laser gas detection device includes a plurality of lasers, characterized in that the correction method includes the following steps:
    多个激光器进行同步的波长扫描,其中,待测气体目标吸收峰的中心波长在波长扫描的扫描波形中预设占据第一相对位置;Multiple lasers perform synchronous wavelength scanning, wherein the center wavelength of the target absorption peak of the gas to be measured occupies the first relative position by default in the scanning waveform of the wavelength scanning;
    将多个激光器出射的激光光束分束为探测光和参考光;Split the laser beams emitted by multiple lasers into probe light and reference light;
    将多路参考光通过充有待测气体的气体吸收池;Pass multiple reference lights through the gas absorption cell filled with the gas to be measured;
    对通过气体吸收池后的各路参考光的光强信号进行检测;Detect the intensity signal of each reference light after passing through the gas absorption cell;
    确定待测气体的目标吸收峰在参考光光强信号波形中占据的第二相对位置;Determine the second relative position occupied by the target absorption peak of the gas to be measured in the reference light intensity signal waveform;
    根据第二相对位置偏离第一相对位置的偏离量,独立地对一个或多个激光器的波长扫描进行调节。According to the deviation amount of the second relative position from the first relative position, the wavelength scanning of one or more lasers is independently adjusted.
  10. 一种激光气体检测装置,其特征在于,包括:A laser gas detection device, characterized in that it includes:
    多个激光器;Multiple lasers;
    控制部,与所述多个激光器电连接,能够控制所述多个激光器进行同步的波长扫描,待测气体目标吸收峰的中心波长在所述波长扫描的扫描波形中预设占据第一相对位置;The control part is electrically connected to the plurality of lasers and can control the plurality of lasers to perform synchronous wavelength scanning. The center wavelength of the target absorption peak of the gas to be measured is preset to occupy the first relative position in the scanning waveform of the wavelength scanning ;
    电流驱动装置,所述电流驱动装置与所述多个激光器及所述控制部电连接,能够根据所述控制部输出的控制信号进行电流扫描,以驱动所述多个激光器进行波长扫描;A current driving device, the current driving device is electrically connected to the plurality of lasers and the control unit, and can perform current scanning according to the control signal output by the control unit to drive the plurality of lasers to perform wavelength scanning;
    一个或多个分光部件,多个所述激光器的出射光路均经过所述分光部件,以将每个所述激光器出射的激光分束为探测光和参考光;One or more beam splitting components, the output optical paths of a plurality of the lasers all pass through the beam splitting components, so as to split the laser beam emitted by each laser into detection light and reference light;
    一个或多个气体吸收池,各路所述参考光的光路均经过所述气体吸收池,所述气体吸收池内充有待测气体;One or more gas absorption cells, each light path of the reference light passes through the gas absorption cell, and the gas absorption cell is filled with the gas to be measured;
    一个或多个探测器,配置在各路所述参考光经过所述气体吸收池后的光路上;One or more detectors, which are arranged on the optical paths after the reference light passes through the gas absorption cell;
    所述控制部与所述探测器电连接,能够确定待测气体的目标吸收峰在所述探测器采集得到的光强信号波形中占据的第二相对位置;所述控制部还包括:The control unit is electrically connected to the detector, and can determine the second relative position occupied by the target absorption peak of the gas to be measured in the light intensity signal waveform collected by the detector; the control unit further includes:
    位置校正模块,所述位置校正模块与所述多个激光器电连接,能够根据所述第二相对位置偏离所述第一相对位置的偏离量,独立地对一个或多个激光器的波长扫描进行调节;所述位置校正模块包括电流校正单元和温度校正单元,所述电流校正单元与所述电流驱动装置电连接,能够调节所述电流驱动装置的电流扫描范围,所述温度校正单元能够向所述激光器输入控温电流,以对所述激光器的波长扫描进行调节;所述位置校正模块预设有调节阈值,若所述第二相对位置偏离所述第一相对位置的偏离量小于所述调节阈值,所述位置校正模块采用电流校正单元进行位置校正;若所述第二相对位置偏离所述第一相对位置的偏离量大于所述调节阈值,所述位置校正模块使用所述温度校正单元或同时使用所述温度校正单元和所述电流校正单元进行位置校正。A position correction module, which is electrically connected to the plurality of lasers, and can independently adjust the wavelength scan of one or more lasers according to the deviation amount of the second relative position from the first relative position The position correction module includes a current correction unit and a temperature correction unit, the current correction unit is electrically connected to the current drive device, can adjust the current scanning range of the current drive device, the temperature correction unit can A temperature control current is input to the laser to adjust the wavelength scan of the laser; the position correction module is preset with an adjustment threshold, if the deviation of the second relative position from the first relative position is less than the adjustment threshold , The position correction module adopts a current correction unit for position correction; if the deviation amount of the second relative position from the first relative position is greater than the adjustment threshold, the position correction module uses the temperature correction unit or at the same time Position correction is performed using the temperature correction unit and the current correction unit.
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