WO2020073603A1 - Capteur capacitif de vitesse de rotation de type lc basé sur une mesure de force centripète - Google Patents

Capteur capacitif de vitesse de rotation de type lc basé sur une mesure de force centripète Download PDF

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Publication number
WO2020073603A1
WO2020073603A1 PCT/CN2019/078282 CN2019078282W WO2020073603A1 WO 2020073603 A1 WO2020073603 A1 WO 2020073603A1 CN 2019078282 W CN2019078282 W CN 2019078282W WO 2020073603 A1 WO2020073603 A1 WO 2020073603A1
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WO
WIPO (PCT)
Prior art keywords
speed sensor
rotational speed
capacitive
capacitor
mass
Prior art date
Application number
PCT/CN2019/078282
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English (en)
Chinese (zh)
Inventor
董蕾
黄庆安
王立峰
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东南大学
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Application filed by 东南大学 filed Critical 东南大学
Publication of WO2020073603A1 publication Critical patent/WO2020073603A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed

Definitions

  • the invention relates to the technical field of sensors, in particular to an LC-type rotation speed sensor based on capacitive centripetal force measurement.
  • the rotation speed sensor is a sensor that converts the rotation speed of a rotating object into electrical output.
  • the speed sensor is an indirect measurement device, which can be manufactured by mechanical, electrical, magnetic, optical and hybrid methods. According to the different signal forms, the speed sensor can be divided into analog and digital.
  • Capacitive sensors use various types of capacitors as sensing elements, a conversion device that converts measured physical or mechanical quantities into changes in capacitance, which is actually a capacitor with variable parameters. Capacitive sensors are widely used in the measurement of displacement, angle, vibration, speed, pressure, composition analysis, medium characteristics, etc. The most commonly used are parallel plate capacitors or cylindrical capacitors.
  • Passive wireless sensors do not require power supply, and perform signal coupling through inductive coupling. Therefore, it has two natural advantages: first, it does not require electrical connection; second, it does not need to replace the battery, so it has theoretically unlimited life. It is precisely because of these two essential advantages that passive wireless sensors have unparalleled advantages in some special application environments, such as closed environments, mechanical rotating structures and so on.
  • the present invention provides an LC-type rotational speed sensor based on capacitive centripetal force measurement.
  • the LC-type rotational speed sensor includes an inductor and a capacitive sensitive structure; the capacitive sensitive structure and the inductor are connected in series to form an LC resonance The loop; the capacitive sensing structure includes a movable upper electrode and a fixed lower electrode; the lower electrode is attached to a radial surface of a rotating member, and the movable upper electrode is radially aligned with the lower electrode.
  • the movable upper electrode includes a mass.
  • the displacement of the upper plate of the capacitor is Where k is the force constant and F is the centrifugal force.
  • the capacitance change value of the LC speed sensor is Where A is the area directly facing the two plates of the capacitor, ⁇ is the dielectric constant, and the displacement d of the plate on the capacitor.
  • the invention also provides a method for measuring the rotation speed of an LC-type rotation speed sensor.
  • the LC-type rotation speed sensor includes an inductor and a capacitive sensitive structure; the capacitive sensitive structure is connected in series with the inductor to form an LC resonance circuit; and the capacitive sensitive
  • the structure includes a mass formed by a movable upper electrode and a fixed lower electrode; the lower electrode is attached to a radial surface of a rotating part; and the rotational speed measurement method includes:
  • the displacement of the upper plate of the capacitor is Where k is the force constant and F is the centrifugal force.
  • the capacitance change value of the LC speed sensor is Where A is the area directly facing the two plates of the capacitor, ⁇ is the dielectric constant, and the displacement d of the plate on the capacitor. .
  • the LC type rotation speed sensor of the present invention changes the sensitive capacitance value by the centrifugal force exerted on the mass by the rotating parts, thereby affecting the resonance frequency of the LC resonance circuit.
  • the sensor has a simple structure and high detection sensitivity.
  • Figure 1 is an initial state diagram of the present invention
  • Figure 2 is a diagram of changes in the structure of the sensitive capacitor during rotation.
  • the present invention provides an LC-type rotational speed sensor based on capacitive centripetal force measurement, which includes an inductor 1 and a capacitive sensitive structure 2; the capacitive sensitive structure 2 and the inductor 1 are connected in series to form an LC resonant circuit; and capacitive sensitive Structure 2 includes a mass formed by a movable upper electrode 21 and a fixed lower electrode 22; the lower electrode 22 is attached to the radial surface of the rotating member 3, the mass 21 and the lower electrode 22 are radially aligned; the rotation of the rotating member 3 During the movement, the distance between the mass 21 and the lower electrode 22 under the action of centrifugal force changes, so that the capacitance value of the capacitive sensitive structure 2 changes, resulting in a change in the resonance frequency of the LC series resonant circuit. Since the centrifugal force F received by the mass 21 has a linear relationship with the square of the speed w, as shown in formula (1),
  • the change in capacitance value is related to the square of the speed, that is, the change in speed will be transmitted to the change in capacitance in the form of square, so the sensitivity of the speed sensor is higher.
  • each resonance peak or resonance frequency is established.
  • the frequency value of each resonance peak needs to be monitored and compared with the calibration value to obtain the speed to be measured The change.
  • the mass 21 of the sensitive capacitor is subjected to a centrifugal force, and the centrifugal force is proportional to the rotation speed w 2 .
  • the mass 21 is shifted away from the lower electrode 22, so that the distance between the two plates of the sensitive capacitor becomes larger and the capacitance value becomes smaller, resulting in a change in the resonance of the LC series resonance circuit.
  • the speed of rotation affects the displacement of the mass, and thus the size of the sensitive capacitor. Since the rotation speed is transmitted to the change of the capacitance value with the relationship of w 2 , the sensitivity of the LC rotation speed sensor is obviously improved.
  • the invention also provides a rotation speed measurement method using the LC rotation speed sensor of Embodiment 1.
  • the rotation speed measurement method includes:
  • the LC-type rotation speed sensor of the present invention changes the sensitive capacitance value by the centrifugal force exerted on the mass by the rotating component, thereby affecting the resonance frequency of the LC resonance circuit.
  • the sensor has a simple structure and high detection sensitivity.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

La présente invention concerne un capteur capacitif de vitesse de rotation de type LC basé sur une mesure de force centripète. Le capteur de vitesse de rotation de type LC comprend un inducteur et une structure sensible capacitive ; la structure sensible capacitive et l'inducteur sont raccordés en série pour former un circuit de résonance LC ; la structure sensible capacitive comprend une masse formée par une électrode supérieure mobile et une électrode inférieure fixe ; l'électrode inférieure est fixée à une surface radiale d'un élément rotatif et l'électrode supérieure mobile est alignée radialement sur l'électrode inférieure. Le capteur de vitesse de rotation de type LC de la présente invention modifie une valeur de capacité sensible au moyen de l'élément rotatif exerçant une force centrifuge sur la masse, ce qui permet d'affecter la fréquence de résonance du circuit de résonance LC. La présente invention présente une structure simple et une sensibilité de détection élevée.
PCT/CN2019/078282 2018-10-11 2019-03-15 Capteur capacitif de vitesse de rotation de type lc basé sur une mesure de force centripète WO2020073603A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201811184056 2018-10-11
CN201811184056.1 2018-10-11

Publications (1)

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WO2020073603A1 true WO2020073603A1 (fr) 2020-04-16

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WO (1) WO2020073603A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9953088B2 (en) 2012-05-14 2018-04-24 Apple Inc. Crowd sourcing information to fulfill user requests
US10568032B2 (en) 2007-04-03 2020-02-18 Apple Inc. Method and system for operating a multi-function portable electronic device using voice-activation
CN114088968A (zh) * 2021-11-23 2022-02-25 东南大学 一种基于负泊松比材料的高灵敏度lc柔性转速传感器

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003042804A (ja) * 2001-06-29 2003-02-13 Robert Bosch Gmbh 強磁性材料から成る構成部材を検出するための方法および回路装置
CN105953934A (zh) * 2016-04-26 2016-09-21 东南大学 一种基于热双层执行梁的lc式无源无线温度传感器
CN107765036A (zh) * 2017-09-27 2018-03-06 东南大学 电感双端固支梁无线无源加速度传感器
CN108487898A (zh) * 2018-01-16 2018-09-04 中国地质大学（武汉） 一种基于离心力的井底转速传感器

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003042804A (ja) * 2001-06-29 2003-02-13 Robert Bosch Gmbh 強磁性材料から成る構成部材を検出するための方法および回路装置
CN105953934A (zh) * 2016-04-26 2016-09-21 东南大学 一种基于热双层执行梁的lc式无源无线温度传感器
CN107765036A (zh) * 2017-09-27 2018-03-06 东南大学 电感双端固支梁无线无源加速度传感器
CN108487898A (zh) * 2018-01-16 2018-09-04 中国地质大学（武汉） 一种基于离心力的井底转速传感器

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10568032B2 (en) 2007-04-03 2020-02-18 Apple Inc. Method and system for operating a multi-function portable electronic device using voice-activation
US9953088B2 (en) 2012-05-14 2018-04-24 Apple Inc. Crowd sourcing information to fulfill user requests
CN114088968A (zh) * 2021-11-23 2022-02-25 东南大学 一种基于负泊松比材料的高灵敏度lc柔性转速传感器

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