WO2020065982A1

WO2020065982A1 - Measurement apparatus and measurement method

Info

Publication number: WO2020065982A1
Application number: PCT/JP2018/036487
Authority: WO
Inventors: 鈴木　亮太; 江藤　力; 山田　聡; ひろみ清水; 純子渡辺
Original assignee: 日本電気株式会社
Priority date: 2018-09-28
Filing date: 2018-09-28
Publication date: 2020-04-02
Also published as: JP7180683B2; JPWO2020065982A1

Abstract

A measurement apparatus (30) comprises an odor sensor (10), a first measurement means (381) and a concentration control means (370). The odor sensor (10) detects a component included in a measurement target gas and a reference gas. The measurement target gas includes a first component (110) and a second component (120), and the reference gas includes the second component (120). The first measurement means (381) measures a concentration of the second component (120) in one of the measurement target gas and the reference gas. The concentration control means (370), on the basis of a measurement result from the first measurement means (381), controls the concentration of the second component (120) in at least the other of the measurement target gas and the reference gas.

Description

Measuring device and measuring method

The present invention relates to a measuring device and a measuring method.

技術 Technology has been developed to obtain information about gas by measuring gas with a sensor. In gas measurement, techniques for reducing the influence of components other than the target component are being studied.

Patent Document 1 describes a technique in which a gas sample containing moisture and an odor component is passed through an odor component collecting material to be supported, and then sent to a sensor by an inert gas. In addition, this document describes that the effect of moisture can be corrected by setting the amount of moisture carried on the odor component trapping material to a constant value.

Patent Document 2 discloses a detection output when a carrier gas containing no sample component is supplied to an odor detection unit via a dehumidifying unit, and a carrier gas containing a sample component is supplied to the odor detection unit via a dehumidifying unit. It is described that an odor detection process is performed based on a difference from the detection output when the odor detection is performed.

Patent Document 3 describes that a sterilization gas concentration is obtained by subtracting an amount corresponding to humidity from a detection value of a gas concentration sensor according to a detection value of a humidity sensor.

Patent Document 4 discloses an odor measurement device including means for adjusting the amount of water vapor in a gas to be measured.

JP-A-2002-350299 JP-A-11-125613 JP 2000-97906 A JP-A-10-111224

However, the techniques of Patent Documents 1 to 4 could not accurately exclude the influence of specific components. For example, in the technique of Patent Document 1, the amount of moisture carried on the odor component collecting material is not always constant. In the technique of Patent Document 2, the carrier gas containing no sample component and the carrier gas containing the sample component may not be precisely matched in dehumidification. In the technique of Patent Literature 3, the detection current value of the gas concentration sensor corresponding to the humidity value sometimes fluctuates due to another condition element. In the technique of Patent Document 4, the influence of moisture may not be sufficiently eliminated.

The present invention has been made in view of the above problems. An object of the present invention is to provide a technique for accurately eliminating the influence of a specific component in measurement with an odor sensor.

The first measuring device of the present invention comprises:
A measurement target gas containing a first component and a second component, and an odor sensor for detecting a component contained in a reference gas containing the second component;
A first measuring means for measuring the concentration of the second component, one of the measurement target gas and the reference gas,
A concentration control unit configured to control a concentration of the second component of at least the other of the measurement target gas and the reference gas based on a measurement result of the first measurement unit.

The second measuring device of the present invention comprises:
A measurement target gas containing a first component and a second component, and an odor sensor for detecting a component contained in a reference gas containing the second component;
A concentration control unit that controls a concentration of the second component of at least one of the measurement target gas and the reference gas based on a detection result of the odor sensor.

The first measuring method of the present invention comprises:
A measurement target gas containing the first component and the second component, and a component contained in the reference gas containing the second component are detected by an odor sensor;
One of the measurement target gas and the reference gas, the concentration of the second component is measured by a first measurement unit,
Based on the measurement result of the first measuring means, at least the concentration of the second component of the other of the measurement target gas and the reference gas is controlled.

The second measuring method of the present invention comprises:
A measurement target gas containing the first component and the second component, and a component contained in the reference gas containing the second component are detected by an odor sensor;
The concentration of the second component of at least one of the measurement target gas and the reference gas is controlled based on a detection result of the odor sensor.

According to the present invention, it is possible to provide a technique for accurately eliminating the influence of a specific component in measurement with an odor sensor.

The above and other objects, features and advantages will become more apparent from the preferred embodiments described below and the accompanying drawings.

FIG. 2 is a diagram illustrating a configuration of a measuring device according to the first embodiment. It is a figure which illustrates an odor sensor. It is a figure which illustrates time series data. FIG. 9 is a diagram showing the results of Experimental Example 1 for confirming the differential characteristics of the feature amounts obtained from the output of the odor sensor. FIG. 9 is a diagram showing the results of Experimental Example 2 for confirming the linearity of the feature obtained from the output of the odor sensor. FIG. 3 is a diagram illustrating a computer for realizing a measuring device. It is a figure which illustrates the composition of the measuring device concerning a 2nd embodiment. It is a figure which illustrates the composition of the measuring device concerning a 3rd embodiment. It is a figure which illustrates the composition of the measuring device concerning a 4th embodiment. It is a flowchart of the process which density control means performs in the 2nd processing example and the 3rd processing example. It is a figure for explaining the example of the method of performing Step S300 by a complementation method.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In all the drawings, the same components are denoted by the same reference numerals, and description thereof will not be repeated.

In the following description, the supply control unit 350, the derivation unit 360, and the concentration control unit 370 of the measuring device 30 are not shown in hardware units but in functional unit blocks unless otherwise specified. I have. The supply control means 350, the derivation means 360, and the concentration control means 370 of the measuring device 30 are a CPU of an arbitrary computer, a memory, a program for realizing the constituent elements of the drawing loaded in the memory, a hard disk for storing the program, and the like. It is realized by an arbitrary combination of hardware and software with a focus on a storage medium and a network connection interface. There are various modifications in the method and apparatus for realizing the method.

(First embodiment)
FIG. 1 is a diagram illustrating a configuration of a measuring device 30 according to the first embodiment. In this figure, data and signal paths are indicated by broken lines. The measurement device 30 includes the odor sensor 10, the first measurement unit 381, and the concentration control unit 370. The odor sensor 10 detects components contained in the gas to be measured and the reference gas. Here, the measurement target gas includes the first component 110 and the second component 120, and the reference gas includes the second component 120. The first measuring unit 381 measures the concentration of the second component 120 of one of the measurement target gas and the reference gas. The concentration control means 370 controls the concentration of the second component 120, at least the other of the measurement target gas and the reference gas, based on the measurement result of the first measurement means 381. This will be described in detail below.

In the measuring device 30 according to the present embodiment, the effect of the second component 120 on the measurement result can be reduced by making the concentration of the second component 120 in the reference gas close to the concentration of the second component 120 in the measurement target gas.

The measurement target gas is not particularly limited, but is, for example, a gas containing a carrier gas, the first component 110, and the second component 120. The reference gas is not particularly limited, but is, for example, a gas containing a carrier gas and the second component 120. Note that the measurement target gas and the reference gas may each further include other components. However, it is preferable that all the components contained in the gas to be measured are obtained by adding the first component 110 to all the components contained in the reference gas. The first component 110 is a component to be measured in particular. The carrier gas is, for example, an inert gas such as nitrogen or air. However, the second component 120 may be a component included in the carrier gas, such as, for example, moisture in the air.

The reference gas is, for example, a purge gas. The odor sensor 10 is purified by the purge gas. That is, the purge gas is a gas that can reduce the number of molecules of the first component 110 adsorbed on the functional portion (for example, the functional film) of the odor sensor 10 by supplying the gas to the odor sensor 10. The measurement target gas and the purge gas are sequentially supplied to the sensor. The order in which the measurement target gas and the purge gas are supplied to the sensor is not particularly limited. That is, the purge gas may be supplied following the measurement target gas, or the measurement target gas may be supplied following the purge gas.

FIG. 2 is a diagram illustrating the odor sensor 10. The odor sensor 10 has a receptor to which a molecule is attached, and a detection value is changed according to attachment and detachment of the molecule at the receptor. The time series data of the detection values output from the odor sensor 10 is referred to as time series data 14. Here, as necessary, the time-series data 14 is also described as Y, and the detected value at the time t is also described as y (t). Y is a vector in which y (t) is enumerated.

For example, the odor sensor 10 is a membrane-type surface stress (MSS) sensor. The MSS sensor has, as a receptor, a functional film to which a molecule adheres, and the stress generated in a support member of the functional film changes due to the attachment and detachment of the molecule to and from the functional film. The MSS sensor outputs a detection value based on the change in the stress. It should be noted that the odor sensor 10 is not limited to the MSS sensor but relates to the viscoelasticity and dynamic characteristics (mass, moment of inertia, etc.) of the members of the odor sensor 10 that occur in response to the attachment and detachment of molecules to and from the receptor. Any sensor that outputs a detection value based on a change in physical quantity may be used, and various types of sensors such as a cantilever type, a film type, an optical type, a piezo, and a vibration response can be adopted.

FIG. 3 is a diagram illustrating the time-series data 14. The time-series data 14 is time-series data in which the detection values output by the odor sensor 10 are arranged in the order in which the time output from the odor sensor 10 is earlier. However, the time-series data 14 may be data obtained by subjecting the time-series data of the detection values obtained from the odor sensor 10 to predetermined preprocessing. As the pre-processing, for example, filtering for removing a noise component from the time-series data can be employed.

The time series data 14 is obtained by an operation of exposing the odor sensor 10 to the gas to be measured and an operation of removing the gas to be measured from the odor sensor 10. Specifically, the time-series data 14 is obtained by sequentially supplying a measurement target gas and a reference gas to the same odor sensor 10.

(4) The operation of exposing the odor sensor 10 to the gas to be measured corresponds to the operation of supplying the gas to be measured to the odor sensor 10. On the other hand, the operation of removing the measurement target gas from the odor sensor 10 corresponds to the operation of supplying the reference gas to the odor sensor 10. In the example of this figure, data of the period P1 is obtained by supplying the gas to be measured to the odor sensor 10, and data of the period P2 is obtained by an operation of supplying the reference gas to the odor sensor 10. In the measurement of the gas to be measured by the odor sensor 10, the supply of the gas to be measured and the supply of the reference gas to the odor sensor 10 may be repeated to obtain a plurality of time-series data 14. Further, it is preferable to supply the reference gas to the odor sensor 10 even before supplying the gas to be measured to the odor sensor 10 for the first time.

The waveform of the time-series data 14 obtained in this manner includes a first state in which molecules in the gas to be measured are adsorbed to the functional part of the odor sensor 10 until a steady state (equilibrium state), and a reference gas in the functional part of the odor sensor 10. And the second state in which the molecules therein are adsorbed to a steady state (equilibrium state). Specifically, the first state is a state of a steady part in the period P1, and the second state is a state of a steady part in the period P2. The rising portion at the beginning of the period P1 is a transition portion from the second state to the first state, and the falling portion at the beginning of the period P2 is a transition portion from the first state to the second state. Therefore, the shapes of the rising portion and the falling portion are determined by the difference between the first state and the second state. That is, the output of the odor sensor 10 has a differential characteristic.

As described above, since the output of the odor sensor 10 has a differential characteristic, the measurement target gas including the first component 110 and the second component 120 and the reference gas including the second component 120 are sequentially transmitted to the same sensor. By supplying, the influence of the second component 120 on the measurement result of the odor sensor 10 can be reduced without performing special processing. The first component 110 is hardly contained in the reference gas, or even if it is contained, the partial pressure of the first component 110 contained in the reference gas is lower than the partial pressure of the first component 110 contained in the measurement target gas. It is preferred that the amount is relatively small. Specifically, the partial pressure of the first component 110 included in the reference gas is preferably 10% or less of the partial pressure of the first component 110 included in the measurement target gas. By doing so, even when the odor sensor 10 has a differential characteristic, the influence of the first component 110 on the measurement result of the odor sensor 10 is not reduced. That is, the difference between the partial pressure of the first component 110 in the measurement target gas and the partial pressure of the first component 110 in the reference gas indicates the magnitude of the relative influence of the first component 110 on the measurement result of the odor sensor 10. I have.

Since the output of the odor sensor 10 has a difference with respect to the concentration of each component in the gas, the concentration of the second component 120 in the gas to be measured is particularly close to the concentration of the second component 120 in the reference gas. Is preferred. By doing so, the influence of the second component 120 on the measurement result of the odor sensor 10 can be further reduced. That is, the absolute value of the difference between the partial pressure of the second component 120 in the measurement target gas and the partial pressure of the second component 120 in the reference gas is the relative magnitude of the influence of the second component 120 on the measurement result of the odor sensor 10. It represents the degree.

That is, it is preferable that the influence of the first component 110 on the measurement result of the odor sensor 10 is sufficiently larger than the influence of the second component 120. Specifically, the partial pressure P _subject of the second component 120 contained in the measurement target _gas, the partial pressure P _reference of the second component 120 in the _second and the reference _gas, the absolute value of the difference between the _second second The value obtained by dividing the saturated vapor pressure P of the component 120 by the saturation _{and the second} is the partial pressure P of the first component 110 contained in the measurement target gas, and the partial pressure P of the first component 110 contained in _{the first} and reference gases _{. the} difference between the _first saturated vapor pressure P _saturation of the first component _110, as compared with the value obtained by dividing the _first, preferably smaller. That is, it is preferable that | P _{target, second-} P _{reference, second} | / P _{saturation, second} <(P _{target, first} -P _{reference, first} ) / P _{saturation, and first} hold.

For example, when it is assumed that the measurement target gas contains the first component 110 at 25% or more of the saturated vapor pressure and the reference gas does not contain the first component 110, the | P _{target, the second} −P _{reference, the 2} | / P _{saturation, second} <0.25 is preferably satisfied. That is, in this case, it is preferable that the second component 120 included in the reference gas falls within ± 25 points as a percentage of the saturated vapor pressure as compared with the second component 120 included in the measurement target gas.

Note that the measurement target gas and the reference gas may include a plurality of components as the second component 120. In this case, for each component included as the second component 120, | P _{target, second-} P _{reference, second} | / P _{saturation, second} <(P _{target, first} -P _{reference, first} ) / P _{saturation , The first} holds.

は The second component 120 is not particularly limited, but the measurement target gas and the reference gas can each contain, for example, at least one of moisture and alcohol as the second component 120. Further, the first component 110 is not particularly limited. The measurement target gas may include a plurality of components as the first component 110.

For example, when the measurement target gas and the reference gas each contain moisture as the second component 120, the influence of moisture at the time of measurement can be reduced by reducing the influence. In addition, for example, when measuring and analyzing the vapor of sake with the odor sensor 10, by reducing the influence of moisture and alcohol, it is possible to accurately detect the aged aroma and fruit aroma.

In the process of analyzing the gas components from the detection results of the odor sensor 10, for example, a feature amount based on the time-series data 14 can be used. The feature amount is, for example, the time series data 14, data obtained by differentiating the time series data 14, or a set 寄与 of contribution values.

A set 寄与 of contribution values, which is an example of a feature value, will be described below. In the description of the set Ξ, the gas supplied to the odor sensor 10 is referred to as a target gas. Here, for explanation, the sensing by the odor sensor 10 is modeled as follows.
(1) The odor sensor 10 is exposed to a target gas containing K kinds of molecules.
(2) The concentration of each molecule k in the target gas is constant ρ _k .
(3) The odor sensor 10 can adsorb a total of N molecules.
(4) The number of molecules k attached to the odor sensor 10 at time t is n _k (t).

The change over time of the number n _k (t) of molecules k attached to the odor sensor 10 can be formulated as follows.

The first and second terms on the right-hand side of the equation (1) indicate the increase amount (number of molecules k newly attached to the odor sensor 10) and the decrease amount (separate from the odor sensor 10) per unit time. (The number of molecules k). Α _k and β _k are a rate constant representing the rate at which the molecule k adheres to the odor sensor 10 and a rate constant representing the rate at which the molecule k separates from the odor sensor 10, respectively.

Here, since the concentration ρ _k is constant, the number n _k (t) of the numerator k at the time t can be formulated from the above equation (1) as follows.

Assuming that no molecules are attached to the odor sensor 10 at time t ₀ (initial state), _nk (t) is expressed as follows.

検出 The detection value of the odor sensor 10 is determined by a physical quantity related to viscoelasticity such as stress acting on the odor sensor 10 due to molecules contained in the target gas and dynamic characteristics. Then, it is considered that the physical quantity of the odor sensor 10 by a plurality of molecules can be represented by a linear sum of contributions of the individual molecules to the physical quantity. However, it is considered that the contribution of the molecule to the physical quantity differs depending on the type of the molecule. That is, it can be said that the contribution of the molecule to the detection value of the odor sensor 10 differs depending on the type of the molecule.

Therefore, the detection value y (t) of the odor sensor 10 can be formulated as follows.

Here, both γ _k and ξ _k represent the contribution of the molecule k to the detection value of the odor sensor 10. Note that “rising” corresponds to the above-described period P1, and “falling” corresponds to the above-described period P2.

Here, if the time-series data 14 obtained from the odor sensor 10 sensing the target gas can be decomposed as in the above equation (4), the types of molecules contained in the target gas and the types of molecules contained in the target gas are included. Can understand the rate of That is, by the decomposition shown in Expression (4), data representing the characteristics of the target gas (that is, the characteristic amount of the target gas) is obtained.

Therefore, the time-series data 14 output by the odor sensor 10 includes a set of feature constants Θ = {θ ₁ , θ ₂ ,. . . , Θ _m }, it is decomposed as shown in the following equation (5). Note that the set of feature constants Θ may be predetermined or may be generated by the measurement device 30.

Here, _{ｉ i} is a contribution value representing the contribution of the characteristic constant θ _i to the detection value of the odor sensor 10.

By such decomposition, a contribution value ξ _i representing the contribution of each feature constant θ _i to the time series data 14 is calculated. The Ξ set of contribution value xi] _i, can be a feature quantity representing the feature of the target gas. A set of contribution values _{ｉ i} is represented, for example, by a feature vector Ξ = (ξ ₁ , ξ ₂ ,..., Ｍ _m ) listing ξ _i . However, the feature quantity of the target gas does not necessarily have to be represented as a vector.

Here, as the characteristic constant θ, the above-mentioned velocity constant β or a time constant τ which is the reciprocal of the velocity constant can be adopted. For each case where β and τ are used as θ, equation (5) can be expressed as follows.

As described above, since the contribution of the molecule to the detection value of the odor sensor 10 is considered to be different depending on the type of the molecule, the set 寄与 of the contribution values described above depends on the type of the molecule contained in the target gas and the mixture ratio thereof. It will be different depending on the situation. Therefore, the set 寄与 of contribution values can be used as information that can distinguish a gas in which a plurality of types of molecules are mixed, that is, as a feature amount of the gas. Further, since the conversion from the time-series data 14 to the set Ξ is a linear conversion, the differential described for the time-series data 14 is also maintained in the set Ξ.

Using the {set of contribution values} as the feature of the target gas has other advantages besides the advantage of being able to handle gases containing multiple types of molecules. First, there is an advantage that the degree of similarity between gases can be easily grasped. For example, if the feature amount of the target gas is represented by a vector, the degree of similarity between the gases can be easily grasped based on the distance between the feature vectors.

Using the {set of contribution values} as the feature quantity has the advantage that it is possible to make the time constant change and the change in the mixture ratio robust against the change in the mixture ratio. The “robustness” here is a property that “when the measurement environment or the measurement target slightly changes, the obtained feature amount also slightly changes”.

If the change in the mixture ratio is robust, for example, for a mixed gas in which two types of gases are mixed, if the mixture ratio of the gas is gradually changed, the characteristic amount will also gradually change. This property can be seen from the fact that in equation (4), the contribution value ξ _k is proportional to ρ _k representing the gas concentration, so that a small change in the concentration appears as a small change in the contribution value.

An example of a method of calculating the contribution value _ｉ _i of each feature constant θ _i will be described. For example, the deriving unit 360 generates a prediction model that predicts the detection value of the odor sensor 10 using all the contribution values _{ｉ i} (that is, the feature vector Ξ) as parameters. When generating the prediction model, the feature vector Ξ can be calculated by performing parameter estimation on the feature vector Ξ using the time-series data 14 that is observation data. An example of a prediction model in the case of using the rate constant β as the feature constant can be expressed by Expression (6). Further, an example of a prediction model when the time constant τ is used as the feature constant can be expressed by Expression (7).

{For example, the deriving unit 360 described later estimates the parameter により by the maximum likelihood estimation using the predicted value obtained from the prediction model and the observation value obtained from the odor sensor 10 (that is, the time-series data 14). For the maximum likelihood estimation, for example, the least square method can be used.

FIG. 4 is a diagram showing the results of Experimental Example 1 for confirming the differential characteristics of the feature amounts obtained from the output of the odor sensor 10. In this experimental example, for each of a plurality of combinations of the gas to be measured and the reference gas, a set 寄与 of contribution values is calculated from the time-series data 14 obtained by the odor sensor 10, and a first principal component analysis is performed. A feature amount vector having the feature amount and the second feature amount as elements was obtained. This figure is a graph in which the results of a plurality of combinations are plotted, with the horizontal axis representing the first feature value and the vertical axis representing the second feature value. The conditions of the gas to be measured and the reference gas are described in each plot in the form of (A, B). Here, A is a value obtained by standardizing the ethanol concentration of the measurement target gas, and B is the type of the reference gas. The vapor of the aqueous ethanol solution was used as the gas to be measured. Air (B is air) or water vapor (B is H ₂ O) was used as a reference gas. It should be noted that air was included in the measurement target gas and the reference gas even if not particularly described.

It can be seen that there is a relationship of F ₂ = F ₁ −F ₃ between the _three vectors F ₁ , F ₂ and F ₃ shown in the graph of FIG. That is, if the feature quantity vector is expressed as f (component of the gas to be measured, component of the reference gas), the relationship f (ethanol + water, water) = f (ethanol + water, air) −f (water, air) It was confirmed that holds. That is, it was confirmed that the characteristic amount obtained from the output of the odor sensor 10 has a differential characteristic.

Next, the linearity of the output of the odor sensor 10 will be described. In each of the first state and the second state, when the number of the adsorption sites of the odor sensor 10 is sufficiently large with respect to the number of the adsorbed molecules, the number of the adsorbed molecules of each component is changed according to the concentration of the other components. Not affected. Therefore, the output of the odor sensor 10 is linear with respect to the concentration of each component. Here, the concentration of each component in the gas is proportional to the concentration of each component. That is, the output of the odor sensor 10 has linearity with respect to the concentration of each component in the gas.

FIG. 5 is a diagram showing the results of Experimental Example 2 for confirming the linearity of the characteristic amount obtained from the output of the odor sensor 10. Experimental Example 2 is an estimated concentration of acetic acid and ethanol calculated from a characteristic amount obtained by measuring the vapor of a mixed solution of vinegar and an aqueous ethanol solution in the same manner as in a second example described later. In the graph of this figure, the horizontal axis is the estimated ethanol concentration calculated by the method described later from the derived feature amount. The vertical axis indicates the estimated acetic acid concentration calculated from the derived feature amount by a method described later. Each plot in the graph shows a coefficient when the characteristic amount of the vapor of the mixed solution is represented as a linear sum of the characteristic amount of only ethanol and the characteristic amount of only acetic acid. That is, each plot shows the estimated value of the partial pressure of each component when the measurement target gas is a mixed gas of ethanol and acetic acid. In each plot, the relative concentrations of ethanol (E) and vinegar (C) in the mixed solution are given in the form of (E, C). Specifically, the mixed solution is a solution in which a 5% ethanol aqueous solution E, vinegar (about 5% acetic acid aqueous solution) C, and water H are mixed at a volume ratio of E: C: H. However, E + C + H = 6. For example, (6,0) shows the result of measuring only a 5% ethanol aqueous solution, and (2,1) shows the result of measuring a mixed solution obtained by mixing 2 mL of a 5% ethanol aqueous solution, 1 mL of vinegar, and 3 mL of water. Show. In this figure, the lattice is also shown. When (E, C) is on a grid point at coordinates (E / 6, C / 6), it can be said that the density estimation is accurate.

では In this experimental example, it was confirmed that each plot was close to the lattice point shown along with this figure. Therefore, it can be said that the density could be estimated, although some errors were included.

From the above results, it was confirmed that the characteristic amount of the mixed solution of vinegar and ethanol aqueous solution can be represented by a linear sum of the characteristic amount of vinegar only and the characteristic amount of ethanol only. It was also confirmed that the coefficient of the linear sum reflected the mixing ratio (concentration ratio) in the mixed solution.

The measuring device 30 and the measuring method according to the present embodiment are not limited to Experimental Examples 1 and 2.

With reference to FIG. 1, the configuration of the measuring device 30 according to the present embodiment will be described in detail below. In the example of the figure, the measuring device 30 further includes a first supply unit 310, a second supply unit 320, a supply control unit 350, and a derivation unit 360. However, the configuration of the measuring device 30 is not limited to the example of this drawing.

The odor sensor 10 is contained in the container 101. Inside the container 101, one ends of a measurement target gas supply pipe 315 connected to the first supply means 310, a reference gas supply pipe 325 connected to the second supply means 320, and the exhaust pipe 102 are located. When the measurement target gas is supplied from the first supply unit 310 to the container 101 via the measurement target gas supply pipe 315, the odor sensor 10 is exposed to the measurement target gas. Further, when the reference gas is supplied from the second supply unit 320 to the container 101 via the reference gas supply pipe 325, the odor sensor 10 is exposed to the reference gas. The gas in the container 101 is discharged to the outside of the container 101 via the exhaust pipe 102.

The first supply unit 310 includes an object 313 and a container 314 containing the object 313. The object 313 may be solid or liquid. When the object 313 is a liquid, the object 313 is, for example, a solution in which the first component 110 is a solute and the second component 120 is a solvent. Further, a carrier gas supply pipe 312 is inserted into the container 314, and the carrier gas is supplied into the container 314 via the carrier gas supply pipe 312. By mixing at least the first component 110 with the carrier gas in the container 314, the first supply means 310 generates a gas to be measured. The second component 120 may be mixed with the carrier gas in the container 314, or may be contained in the carrier gas and introduced into the container 314. The other end of the gas supply pipe 315 to be measured is located in the container 314, and the gas in the container 314 is supplied to the odor sensor 10 as the gas to be measured.

A first pump 311 is provided in the middle of the gas supply pipe 315 for measurement, that is, between the first supply means 310 and the odor sensor 10. The first pump 311 switches the supply of the gas to be measured to the odor sensor 10. The first pump 311 may further adjust the supply amount of the gas to be measured to the odor sensor 10.

As described above, the first measuring unit 381 measures the concentration of the second component 120 of one of the measurement target gas and the reference gas. For example, when the second component 120 is water, the first measuring means 381 is a humidity sensor. In the example of this figure, the first measuring means 381 is provided in the middle of the measuring gas supply pipe 315, that is, between the first supplying means 310 and the odor sensor 10, and measures the concentration of the second component 120 of the measuring gas. I do. However, the first measurement unit 381 may be provided in the middle of the reference gas supply pipe 325, that is, between the second supply unit 320 and the odor sensor 10 to measure the concentration of the second component 120 of the reference gas.

As described above, the concentration control unit 370 controls at least the concentration of the second component 120, which is the other of the measurement target gas and the reference gas, based on the measurement result of the first measurement unit 381. That is, when the first measuring unit 381 measures the concentration of the second component 120 of only one of the measurement target gas and the reference gas as in the present embodiment, the concentration control unit 370 determines the other of the measurement target gas and the reference gas. At least the concentration of the second component 120 is controlled. At this time, the concentration control means 370 performs control such that the concentration of the second component 120 of the measurement target gas and the concentration of the second component 120 of the reference gas are made close to each other.

例 In the example of this figure, the first measuring means 381 measures the concentration of the second component 120 in the gas to be measured, and the concentration control means 370 controls the concentration of the second component 120 in the reference gas. Specifically, for example, the concentration of the second component 120 in the reference gas is controlled as described below. The second supply unit 320 includes a first adjustment gas supply unit 330 and a second adjustment gas supply unit 340. The second supply unit 320 supplies a mixed gas of the supply gas from the first adjustment gas supply unit 330 and the supply gas from the second adjustment gas supply unit 340 to the odor sensor 10 as a reference gas. Here, the concentration of the second component 120 in the supply gas from the first adjustment gas supply unit 330 is lower than the concentration of the second component 120 in the supply gas from the second adjustment gas supply unit 340. Therefore, the concentration control means 370 controls the concentration of the second component 120 of the reference gas by adjusting the mixing ratio of the supply gas from the first adjustment gas supply means 330 and the supply gas from the second adjustment gas supply means 340. It is possible.

The first adjusting gas supply means 330 includes a second component absorbing material 333 for absorbing the second component 120 and a container 334 for accommodating the second component absorbing material 333. Further, a carrier gas supply pipe 332 is inserted into the container 334, and the carrier gas is supplied into the container 334 by the carrier gas supply pipe 332. In the first adjustment gas supply unit 330, at least a part of the second component 120 in the carrier gas is absorbed by the second component absorption material 333, and thus the second component 120 of the gas supplied from the first adjustment gas supply unit 330 is used. Is lower than the concentration of the second component 120 of the carrier gas supplied from the carrier gas supply pipe 332 to the container 334. When the second component 120 is water, the second component absorbent 333 is, for example, silica gel.

The second adjustment gas supply means 340 includes a second component supply agent 343 for supplying the second component 120, and a container 344 for containing the second component supply agent 343. Further, a carrier gas supply pipe 342 is inserted into the container 344, and the carrier gas is supplied into the container 344 by the carrier gas supply pipe 342. Since the second component 120 is supplied to the carrier gas from the second component supply agent 343 in the second adjustment gas supply unit 340, the concentration of the second component 120 in the gas supplied from the second adjustment gas supply unit 340 is determined by the carrier. The concentration becomes higher than the concentration of the second component 120 of the carrier gas supplied from the gas supply pipe 342 to the container 344. When the second component 120 is water, the second component supply agent 343 is, for example, water. When the object 313 is a solution using the first component 110 as a solute and using the second component 120 as a solvent, the second component supply agent 343 is, for example, the solvent.

It is preferable that the components and component ratios of the carrier gas introduced into each container of the first supply unit 310, the first adjustment gas supply unit 330, and the second adjustment gas supply unit 340 are the same.

The reference gas supply pipe 325 is a pipe connecting the second supply means 320 and the container 101, and a reference gas is supplied from the second supply means 320 to the odor sensor 10 via the reference gas supply pipe 325. The reference gas supply pipe 325 branches into a reference gas supply pipe 325a and a reference gas supply pipe 325b on the second supply means 320 side. A first valve 371 is provided on the reference gas supply pipe 325a, and a second valve 372 is provided on the reference gas supply pipe 325b. The first valve 371 adjusts the amount of the supply gas from the first adjustment gas supply means 330 according to the first control value from the concentration control means 370. The second valve 372 adjusts the amount of the supply gas from the second adjustment gas supply means 340 according to the second control value from the concentration control means 370. The concentration control means 370 controls the first valve 371 and the second valve 372 to thereby adjust the mixing ratio of the reference gas to the supply gas from the first adjustment gas supply means 330 and the supply gas from the second adjustment gas supply means 340. To adjust. Then, the concentration control means 370 controls the concentration of the second component 120 of the reference gas.

The processing performed by the density control means 370 will be specifically described. The concentration control unit 370 acquires the concentration of the second component 120 from the first measurement unit 381. The storage unit 390 accessible from the density control unit 370 stores first reference information indicating the relationship between the density of the second component 120, the first control value, and the second control value. Here, the storage unit 390 may be provided in the measuring device 30 or may be provided outside the measuring device 30. The concentration control unit 370 controls the first valve 371 and the second valve 372 with the first control value and the second control value corresponding to the concentration acquired from the first measurement unit 381, respectively. By doing so, a reference gas having a concentration of the second component 120 close to the concentration measured by the first measuring unit 381 is supplied from the second supplying unit 320 to the odor sensor 10. The first reference information can be generated based on a previous experiment or calculation and stored in the storage unit 390. The first reference information is, for example, a mathematical expression or a table.

This figure shows an example in which the concentration control unit 370 controls the concentration of the second component 120 of the reference gas as described above. By controlling the concentration of the second component 120 of the reference gas by the concentration control means 370, measurement can be performed without changing the state of the gas to be measured. However, when the first measurement unit 381 measures the concentration of the second component 120 of the reference gas, the concentration control unit 370 may control the concentration of the second component 120 of the measurement target gas. In this case, for example, the first supply means 310 includes at least one of the first adjustment gas supply means 330 and the second adjustment gas supply means 340, and the gas generated from the object 313 and the first adjustment gas supply means 330 and the second The concentration control unit 370 adjusts the mixing ratio with the gas supplied from at least one of the adjustment gas supply units 340. In this case, for example, a carrier gas may be used as it is as the reference gas.

第 A second pump 321 is provided in the middle of the reference gas supply pipe 325, that is, between the second supply means 320 and the odor sensor 10. The second pump 321 switches the supply of the reference gas to the odor sensor 10. The second pump 321 may further adjust the supply amount of the reference gas to the odor sensor 10.

The supply control means 350 controls the first pump 311 and the second pump 321. Based on the control of the supply control unit 350, the supply timing of the measurement target gas to the odor sensor 10 and the supply timing of the reference gas are controlled. Specifically, the supply control unit 350 controls the first pump 311 and the second pump 321 to sequentially supply the measurement target gas and the reference gas to the odor sensor 10. For example, the supply control unit 350 alternately supplies the measurement target gas and the reference gas to the odor sensor 10 at a predetermined cycle. The deriving unit 360 may acquire a measurement result from the odor sensor 10 and acquire a signal indicating control timing of the first pump 311 and the second pump 321 from the supply control unit 350. In this case, the deriving unit 360 classifies the measurement result into first data, which is a result of detecting the measurement target gas, and second data, which is a result of detecting the reference gas, based on the acquired signal indicating the control timing. be able to.

構成 Note that the configuration of the supply control means 350 is not limited to the example shown in FIG. For example, a valve (electromagnetic valve) is provided instead of the first pump 311 and the second pump 321, and the supply control unit 350 may control the supply of gas by controlling the opening and closing of these valves. In this case, it is preferable that a pump for sucking the target gas and the reference gas be separately provided in the container 101.

The deriving unit 360 uses at least one of the first data that is the detection result of the gas to be measured by the odor sensor 10 and the second data that is the result of detection of the reference gas by the odor sensor 10 to include in the gas to be measured. Information about the first component 110 to be derived.

The information on the first component 110 may be information indicating the type of the first component 110 or a label indicating the odor of the first component 110 (hereinafter, also referred to as an “odor label”). , Information on the concentration of the first component 110.

For example, an odor label indicates the name of the substance that generates the odor. Specifically, when the substance that generates the first component is an apple, the odor label “apple” is specified. The substance that emits an odor is not limited to foods such as apples, but may be any substance such as a machine, a building material, a medicine, a mold, a burn, or garbage.

In addition, for example, the odor label may represent an abstract concept such as a place or a situation where the odor is emitted. For example, odor labels such as "Cafe Smell", "Pool Smell", "Blue Smell", "Smell like Closet", "Sweet Smell", "Live Smell", or "Smell on a Rainy Day" Conceivable.

On the other hand, the information on the concentration of the first component 110 may be an absolute value of the concentration, a relative value with respect to some reference, or a standardized value.

The processing performed by the deriving unit 360 will be described later in detail.

The configuration of the measuring device 30 according to the present embodiment is not limited to the example of FIG. For example, the object 313 may not be stored in the container 314, and the measuring device 30 may not include the container 314. In this case, for example, the end of the gas supply pipe 315 opposite to the odor sensor 10 side communicates with the external space, and the odor of the surrounding environment can be detected by the odor sensor 10. Specifically, the first supply unit 310 is, for example, an intake port that inhales air in the environment to be measured, and the air in the environment to be measured is supplied to the odor sensor 10 as the gas to be measured. In this case, the measurement target gas does not need to further include a carrier gas. Further, as the carrier gas of the second supply unit 320, for example, air in an environment that is not easily affected by the measurement target, air collected in advance, or generated gas can be used. For example, when the measurement target is the smell of indoor tobacco, outdoor air can be used as the carrier gas of the second supply unit 320 as the environment air that is not easily affected by the measurement target. An example of the generated gas is a mixed gas of pure nitrogen and oxygen. Then, the concentration control unit 370 controls the humidity of the reference gas, for example, in order to remove the influence of humidity in the environment of the measurement target.

測定 The measurement method according to the present embodiment will be described below. In the present measurement method, the odor sensor 10 detects a measurement target gas including the first component 110 and the second component 120 and a component included in the reference gas including the second component 120. In addition, the concentration of the second component 120 of one of the measurement target gas and the reference gas is measured by the first measurement unit 381. Then, based on the measurement result of the first measurement unit 381, at least the concentration of the second component 120 of the other of the measurement target gas and the reference gas is controlled.

This measurement method is realized by the measurement device 30. An operation example of the measuring device 30 will be described in detail below. Hereinafter, an example will be described in which the first measurement unit 381 measures the concentration of the second component 120 of the gas to be measured and the concentration control unit 370 controls the concentration of the second component 120 of the reference gas. Is not limited to this example.

When a measurement start operation is performed on the measurement device 30, the supply control unit 350 controls the first pump 311 and the second pump 321 so that the measurement target gas and the reference gas are sequentially supplied to the same odor sensor 10. Is done. Here, when the gas to be measured is supplied from the first supply unit 310 to the odor sensor 10, the concentration of the second component 120 of the gas to be measured is measured by the first measurement unit 381. Next, the reference gas whose concentration of the second component 120 is controlled by the concentration control means 370 is supplied to the odor sensor 10. By doing so, the measurement target gas and the reference gas in which the concentrations of the second components 120 are close to each other are supplied to the odor sensor 10.

By supplying the measurement target gas and the reference gas, the odor sensor 10 obtains, for example, the time-series data 14 as shown in FIG. The deriving unit 360 acquires the time series data 14 from the odor sensor 10 and acquires a signal indicating the drive timing of the first pump 311 and the second pump 321 from the supply control unit 350. Then, the deriving unit 360 divides the time-series data 14 into the first data and the second data based on the signal indicating the drive timing. Further, the deriving unit 360 converts at least one of the first data and the second data into a feature amount. The deriving means 360 can convert the first data and the second data into a set 寄与 of contribution values, for example, by the method described above. The deriving means 360 may further perform principal component analysis to reduce the dimension of the feature amount.

Hereinafter, a first example and a second example of a method in which the deriving unit 360 derives information on the first component 110 will be described. In the first example, the deriving means 360 derives the type or odor label of the first component 110. In the second example, the deriving unit 360 derives information on the type of the first component 110 and the concentration of the first component 110.

First, the first example will be described. In the first example, the deriving unit 360 uses the characteristic amount (hereinafter, also referred to as “the characteristic amount of the gas to be measured”) obtained from at least one of the first constant data and the second data and the odor information to measure. The odor label of the first component 110 in the gas is derived. The odor information is information in which the odor label is associated with the characteristic amount of the gas corresponding to the odor label, and is stored in advance in a storage device accessible from the deriving unit 360, for example. The odor information can be generated in advance from, for example, a result of a known measurement target gas.

The deriving means 360 extracts odor information indicating a characteristic amount similar to the characteristic amount of the measurement target gas from the odor information. Further, the deriving unit 360 specifies the odor label associated with the extracted odor information as the odor label of the first component 110.

Specifically, the deriving unit 360 can calculate the similarity between the characteristic amount of the measurement target gas and the characteristic amount indicated in the odor information, and can extract the odor information based on the calculated similarity. For example, the deriving unit 360 may extract odor information associated with a feature amount having the highest similarity, or may extract one or more odors associated with a feature amount having a similarity equal to or greater than a predetermined threshold. Information may be extracted. When the two feature amounts for which similarity is to be obtained are both sets Ξ and the sets of feature constants are the same, the similarity is, for example, the distance between vectors.

Next, a second example will be described. In the second example, the deriving unit 360 derives information on the concentration of the first component 110 in the measurement target gas using the characteristic amount of the measurement target gas and the unit component information. The unit component information is information indicating a feature amount of each unit component, and is stored in advance in a storage device accessible from the deriving unit 360, for example. The unit component information is information in which an identifier of the unit component is associated with a feature amount of the unit component. The feature amount of a unit component is a feature amount calculated for time-series data obtained by sensing a gas containing only the unit component with the odor sensor 10.

Here, it is assumed that a set of characteristic constants is common to the characteristic amount of the gas to be measured and the characteristic amount of each unit component. In this case, if the characteristic amount of the measurement target gas and the characteristic amount of each unit component are represented by a vector expression, the characteristic amount of the measurement target gas can be represented by a linear sum of the characteristic amounts of the unit components included in the measurement target gas. it is conceivable that. For example, when the measurement target gas includes the unit components 1 to k, it is considered that the characteristic amount of the measurement target gas can be expressed as follows.

Here, _{ｉ i} is a feature amount vector of the unit component i, and a _i is a concentration of the unit component i in the measurement target gas. Further, if configured measurement object gas is only one type of unit components are the k = 1, the Ξ _{g =} Ξ _1.

Therefore derivation means 360, using the unit component information, the feature amount vector .XI _g of the target gas, decomposed into a linear sum of the feature quantity vector .XI _i of one or more unit components. In this way, the deriving unit 360 specifies one or more unit components included in the measurement target gas as the first component 110. Here, various existing methods can be used as a method of decomposing a certain vector into a linear sum of known vectors (here, each feature amount vector indicated in unit component information). . For example, a least-squares method with a non-negative constraint represented by the following objective function can be used.

When specifying the concentration of a unit component, a vector A = (a ₁ , a ₂ ,..., A _k ) obtained by decomposition into the above-described linear sum is obtained as information representing the concentration of each unit component. be able to. The mixing ratio of the unit components can be represented by the ratio of these concentrations. Here, the concentration of the unit component is a value represented by (concentration of gas in air) × (concentration ratio of unit component in gas). That is, it means the relative concentration of the unit component with respect to the concentration of the gas in the air. In addition, the concentration of the unit component as used herein can be regarded as a ratio of the partial pressure of the unit component to the air pressure.

The deriving unit 360 may use both the first data and the second data, or only one of them, in order to derive information on the first component 110. However, it is preferable to use both in order to increase the derivation accuracy.

When the deriving means 360 derives information on the first component 110 using both the first data and the second data, the deriving means 360 obtains the feature vector _{ｕ u} obtained from the first data and the feature vector _{ｕ u} obtained from the second data. one vector obtained by connecting the feature vector .XI _d, may feature quantity of a measurement target gas. For example, in this case, deriving means _{_{360, Ξ u = (ξ u1,}} ξ u2, ..., ξ un) and _{_{Ξ d = (ξ d1, ξ}} d2, ..., ξ dn) were ligated .XI _c = (Ξ _u1 , _{ｕ u2} ,..., Ξ _un , _{ｄ d1} , ξ _d2 ,..., Ｄ _dn ) are calculated as characteristic quantities of the gas to be measured.

Further, the deriving unit 360 may calculate an average of the characteristic amount obtained from the first data and the characteristic amount obtained from the second data as the characteristic amount of the measurement target gas. _{_{That, Ξ avg = ((ξ u1}} + ξ d1) / 2, (ξ u2 + ξ d2) / 2, ..., (ξ un + ξ dn) / 2) a, wherein the amount of the measurement target gas. Here, in equation (4), since the definition of ξ is common between the rising and falling edges, the same feature amount is ideally obtained from the rising and falling time series data 14 and the falling time series data 14. Should be obtained, and the difference between Ξ _u and _{ｄ d} is considered to be due to measurement errors. Therefore, by calculating the average of _{ｕ u} and _{ｄ d} , the influence of the measurement error can be reduced.

The deriving unit 360 may further perform data processing for reducing the influence of the second component 120 on the derivation result using the first data and the second data.

The supply control unit 350, the derivation unit 360, and the concentration control unit 370 of the measurement device 30 are hardware (eg, a hard-wired electronic circuit) that implements each of the supply control unit 350, the derivation unit 360, and the concentration control unit 370. And the like, or may be realized by a combination of hardware and software (eg, a combination of an electronic circuit and a program that controls the electronic circuit). Hereinafter, a case where the supply control unit 350, the derivation unit 360, and the concentration control unit 370 of the measurement device 30 are realized by a combination of hardware and software will be further described.

FIG. 6 is a diagram exemplifying a computer 1000 for implementing the measuring device 30. The computer 1000 is an arbitrary computer. For example, the computer 1000 is a stationary computer such as a personal computer (PC) or a server machine. In addition, for example, the computer 1000 is a portable computer such as a smartphone or a tablet terminal. The computer 1000 may be a dedicated computer designed to implement the measuring device 30, or may be a general-purpose computer.

The computer 1000 has a bus 1020, a processor 1040, a memory 1060, a storage device storage 1080, an input / output interface 1100, and a network interface 1120. The bus 1020 is a data transmission path through which the processor 1040, the memory 1060, the storage device storage 1080, the input / output interface 1100, and the network interface 1120 mutually transmit and receive data. However, a method for connecting the processors 1040 and the like to each other is not limited to a bus connection.

The processor 1040 is various processors such as a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), and an FPGA (Field-Programmable Gate Array). The memory 1060 is a main storage device realized using a RAM (Random Access Memory) or the like. The storage device storage 1080 is an auxiliary storage device implemented using a hard disk, a solid state drive (SSD), a memory card, or a read only memory (ROM).

The input / output interface 1100 is an interface for connecting the computer 1000 and an input / output device. For example, an input device such as a keyboard and an output device such as a display device are connected to the input / output interface 1100. In addition, for example, the odor sensor 10 is connected to the input / output interface 1100. However, the odor sensor 10 does not necessarily need to be directly connected to the computer 1000. For example, the odor sensor 10 may store the time-series data 14 in a storage device shared with the computer 1000.

The network interface 1120 is an interface for connecting the computer 1000 to a communication network. The communication network is, for example, a LAN (Local Area Network) or a WAN (Wide Area Network). The method by which the network interface 1120 connects to the communication network may be a wireless connection or a wired connection.

Storage Device The storage 1080 stores program modules for realizing the supply control unit 350, the derivation unit 360, and the concentration control unit 370. The processor 1040 realizes a function corresponding to each program module by reading out each of these program modules into the memory 1060 and executing them.

Next, the operation and effect of the present embodiment will be described. According to the measuring device 30 according to the present embodiment, the concentration of the second component 120 in the reference gas and the concentration of the second component 120 in the measurement target gas are brought close to each other based on the measurement result of the first measuring unit 381, so that the second component 120 A desired component can be detected in a state in which the influence of is reduced.

(Second embodiment)
FIG. 7 is a diagram illustrating a configuration of the measuring device 30 according to the second embodiment. In this figure, data and signal paths are indicated by broken lines. The measuring device 30 according to the present embodiment is the same as the measuring device 30 according to the first embodiment except for the points described below. In the first embodiment, the first measuring unit 381 measures the concentration of the second component 120 of only one of the measurement target gas and the reference gas. On the other hand, in the present embodiment, the first measurement unit 381 further measures the concentration of the second component 120 of the other of the measurement target gas and the reference gas. Then, the concentration control unit 370 controls the concentration of the other second component 120 further based on the concentration of the other second component 120 measured by the first measurement unit 381. This will be described in detail below.

In the measuring device 30 according to the present embodiment, the first measuring unit 381 is provided, for example, in the container 101, so that both the concentration of the second component 120 of the measurement target gas and the concentration of the second component 120 of the reference gas are provided. Can be measured. That is, the first measuring unit 381 measures the concentration of the second component 120 of the measurement target gas when the measurement target gas is supplied to the odor sensor 10, and determines the reference when the reference gas is supplied to the odor sensor 10. The concentration of the second component 120 of the gas is measured.

Then, the concentration control unit 370 acquires the concentration of the second component 120 of the measurement target gas and the concentration of the second component 120 of the reference gas from the first measurement unit 381. Then, the concentration control unit 370 performs feedback control so that the difference between the concentration of the second component 120 of the measurement target gas and the concentration of the second component 120 of the reference gas becomes small. That is, the concentration control unit 370 calculates a difference between the concentration of the second component 120 of the measurement target gas and the concentration of the second component 120 of the reference gas, and sets at least the concentration of the measurement target gas and the reference gas such that the difference becomes small. The concentration of one second component 120 is adjusted. This figure shows an example in which the concentration controller 370 adjusts the concentration of the second component 120 of the reference gas.

Next, the operation and effect of the present embodiment will be described. In the present embodiment, the same operation and effect as those of the first embodiment can be obtained. In addition, by measuring and controlling the concentrations of the second components 120 of both the measurement target gas and the reference gas, the concentrations of the second components 120 of these gases can be brought closer to each other with higher accuracy.

(Third embodiment)
FIG. 8 is a diagram illustrating a configuration of the measuring device 30 according to the third embodiment. In this figure, data and signal paths are indicated by broken lines. The measuring device 30 according to the present embodiment is the same as the measuring device 30 according to the first embodiment except for the points described below. In the present embodiment, the measurement device 30 further includes a second measurement unit 382 that measures the concentration of the second component 120, which is the other of the measurement target gas and the reference gas. Then, the concentration control unit 370 controls the concentration of the other second component 120 based on the measurement result of the second measurement unit 382. This will be described in detail below.

測定 The measuring device 30 according to the present embodiment includes a second measuring unit 382 separately from the first measuring unit 381. The second measuring unit 382 measures the concentration of the second component 120 of a gas different from the gas measured by the first measuring unit 381 among the measurement target gas and the reference gas. For example, when the second component 120 is moisture, the second measuring means 382 is a humidity sensor. In the example of this figure, the second measuring means 382 is provided in the middle of the reference gas supply pipe 325, that is, between the second supply means 320 and the odor sensor 10, and measures the concentration of the second component 120 of the reference gas.

In the present embodiment, the concentration control unit 370 acquires the concentration of the second component 120 of the measurement target gas from the first measurement unit 381, and acquires the concentration of the second component 120 of the reference gas from the second measurement unit 382. Then, the concentration control unit 370 performs feedback control so that the difference between the concentration of the second component 120 of the measurement target gas and the concentration of the second component 120 of the reference gas becomes small. That is, the concentration control unit 370 calculates a difference between the concentration of the second component 120 of the measurement target gas and the concentration of the second component 120 of the reference gas, and sets at least the concentration of the measurement target gas and the reference gas such that the difference becomes small. The concentration of one second component 120 is adjusted. This figure shows an example in which the concentration controller 370 adjusts the concentration of the second component 120 of the reference gas.

Next, the operation and effect of the present embodiment will be described. In the present embodiment, the same operation and effect as those of the second embodiment can be obtained.

(Fourth embodiment)
FIG. 9 is a diagram illustrating a configuration of a measuring device 30 according to the fourth embodiment. In this figure, data and signal paths are indicated by broken lines. The measuring device 30 according to the present embodiment is the same as the measuring device 30 except that the concentration control unit 370 controls the concentration of the second component 120 of at least one of the measurement target gas and the reference gas based on the detection result of the odor sensor 10. This is the same as the measuring device 30 according to the first embodiment. This will be described in detail below.

濃度 The concentration of the second component 120 also affects the detection result of the odor sensor 10. That is, the odor sensor 10 can be used for detecting the concentration of the second component 120, and the odor sensor 10 can also serve as the first measuring unit 381 according to the second embodiment. In the present embodiment, the measuring device 30 may not include the first measuring unit 381 separate from the odor sensor 10. The concentration control unit 370 can make the concentrations of the second component 120 of the measurement target gas and the reference gas close to each other based on the detection result of the odor sensor 10.

処理 Examples of processing performed by the density control unit 370 according to the present embodiment include the following first processing example to third processing example.

In the first processing example, the concentration control unit 370 derives information on the concentration of the second component 120 of the measurement target gas based on the first data of the odor sensor 10, and based on the second data of the odor sensor 10, Information on the concentration of the second component 120 is derived. Then, feedback control is performed in the same manner as described in the second embodiment.

Specifically, the concentration control unit 370 acquires the time series data 14 from the odor sensor 10 and acquires a signal indicating the drive timing of the first pump 311 and the second pump 321 from the supply control unit 350. Then, the density control unit 370 divides 140 into first data and second data based on a signal indicating the drive timing. Further, the density control means 370 converts the first data and the second data into a feature amount. The density control means 370 can convert the first data and the second data into a set 寄与 of contribution values, for example, by the method described in the first embodiment. The density control unit 370 may further perform principal component analysis to reduce the dimension of the feature amount.

Further, the concentration control means 370 obtains information indicating the concentration of the second component 120 of the gas to be measured using the characteristic amount obtained from the first data and the second reference information. The information indicating the concentration of the second component 120 of the reference gas is obtained using the second reference information. The information on the density may be an absolute value of the density, a relative value with respect to some reference, or a standardized value. The second reference information is information indicating a relationship between the feature amount and information indicating the density of the second component 120, and is stored in advance in, for example, a storage unit 390 accessible from the density control unit 370. The second reference information is, for example, a mathematical expression or a table. The second reference information can be generated in advance from, for example, a detection result of the odor sensor 10 for a known gas.

Next, the concentration control unit 370 determines the concentration of the second component 120 of the measurement target gas based on the information indicating the derived concentration of the second component 120 of the measurement target gas and the information indicating the concentration of the second component 120 of the reference gas. The difference from the concentration of the second component 120 of the reference gas is calculated. Then, the concentration of at least one of the second components 120 of the measurement target gas and the reference gas is adjusted so that the calculated difference becomes small. This figure shows an example in which the concentration controller 370 adjusts the concentration of the second component 120 of the reference gas.

In the second processing example, the concentration control unit 370 controls at least one of the second and third odor sensors 10 so that the amplitude of the output waveform of the odor sensor 10 when the measurement target gas and the reference gas are alternately supplied to the odor sensor 10 is reduced. Control the concentration x of component 120. Unless otherwise described below, the “output waveform” indicates an output waveform of the odor sensor 10 when the measurement target gas and the reference gas are alternately supplied to the odor sensor 10. This will be described in detail below.

The output waveform is, for example, a waveform as shown in FIG. As described in the first embodiment, the output waveform of the odor sensor 10 has a differential characteristic. Therefore, by controlling the concentration x and reducing the amplitude of the output waveform, it is possible to reduce the difference between the above-described first state and the second state in which molecules are adsorbed to the functional portion of the odor sensor 10. This corresponds to reducing the number of adsorbed molecules of the second component 120 in the first state and the second state to each other, and reducing the influence of the second component 120 on the output waveform. As a result, the difference in the presence or absence of adsorption of the first component 110 can be made apparent in the output of the odor sensor 10.

For the sake of explanation, the concentration of the gas controlled by the concentration control means 370 is indicated by x. The output waveform of the odor sensor 10 when the concentration of the gas controlled by the concentration control means 370 is x is represented by the following vector y (x).

Here, the density control unit 370 may control the density x so as to reduce the effective value (Root Mean Square Value) of the output waveform as an example of the amount representing the amplitude of the output waveform. In this case, the square of the amplitude of the output waveform of the odor sensor 10 is expressed as F (y (x)) = || y (x) || ² . By controlling x so that F (y (x)) becomes smaller, the concentration of the second component 120 of the measurement target gas and the concentration of the second component 120 of the reference gas can be made closer to each other. A method of controlling x so that F (y (x)) becomes smaller will be described later in detail.

Note that the amount representing the amplitude of the output waveform is not limited to the above-described effective value, and any reference can be used. For example, a Peak to peak value can be used as the amplitude of the output waveform. In this case, the amplitude according to Peak-to peak value of the output waveform of the odor sensor 10 uses a time _{t 1} the value of the waveform is maximized, the time _{t 2} to the _{_{smallest, | y t1 (x) -y}} t2 ( x) |. In particular, _{t 1} is the end time of the region P1 in Fig. 3, _{t 2} is expected to be the end time of the region P2. Here, assuming that the output waveform is a scalar value (one-dimensional vector) y (x) = y _t1 (x) −y _t2 (x) instead of equation (10), the square of the amplitude based on the peak to peak value is F Since (y (x)) = || y (x) || ² , it is expressed in the same form as F (y (x)) described above, so that x is obtained by the same method as when the effective value is used as the amplitude. Can be controlled.

In the third processing example, the concentration control unit 370 detects the information indicating the response waveform of the odor sensor 10 to the first component 110 and the odor sensor 10 when the measurement target gas and the reference gas are alternately supplied to the odor sensor 10. Based on the output waveform, the concentration x of the second component 120 of one of the measurement target gas and the reference gas is controlled. This will be described in detail below.

In the present processing example, information indicating a response waveform of the odor sensor 10 to the first component 110 is stored in the storage unit 390 in advance. Note that the response waveform of the odor sensor 10 to the first component 110 is hereinafter also referred to as “first response waveform”. Information indicating the first response waveform can be obtained, for example, by supplying a gas consisting of only the first component 110 to the odor sensor 10 and purifying the odor sensor 10 by reducing the pressure of the atmosphere. Alternatively, the information indicating the first response waveform indicates the response of the odor sensor 10 to only the first component 110 calculated based on the detection result obtained by the odor sensor 10 for the known measurement target gas including the first component 110. It may be information. When the measurement target gas includes a plurality of components as the first component 110, information indicating the first response waveform of each component is stored in the storage unit 390 as _yj described later.

In this processing example, the density control unit 370 controls the density x so that the output waveform of the odor sensor 10 is represented as much as possible by a linear sum of the known first response waveforms. That is, the density control means 370 controls the density x so that F (y (x)) expressed by the following equation (11) becomes small. Note that a vector indicating the first response waveform is y _j (j = 1, 2,..., J), a vector indicating the output waveform of the odor sensor 10 with respect to the density x is y (x), and a _j is a coefficient. And

In this method, the finally obtained a _j corresponds to the information on the concentration of the first component 110. Therefore, the concentration control unit 370 can also serve as the derivation unit 360, and may output a _j as information on the concentration of the first component 110.

Note that if the projection operator of span {y ₁ ,..., Y _J } onto the orthogonal complement is P, then F (y (x)) = || Py (x) || ² holds.

{Circle around (2)} The second processing example corresponds to the case where J = 0 in this processing example.

方法 A method of controlling x so that F (y (x)) is reduced in the above-described second processing example and third processing example will be described below. The density control unit 370 can control the density x using, for example, a method using complementation (complementary method), a gradient method, or a binary search.

FIG. 10 is a flowchart of the processing performed by the density control unit 370 in the second processing example and the third processing example. When the measurement start operation is performed on the measurement device 30, the concentration control unit 370 first determines x in the initial state (step S100). X in the initial state is arbitrary, and can be, for example, x = 0.

Next, the concentration control means 370 controls, for example, the concentration of the second component 120 of the reference gas so that the gas is supplied at the determined x. Then, the time series data 14 is obtained from the odor sensor 10 as y (x) (step S200).

(4) Next, the density control means 370 determines the next x based on the obtained y (x) (step S300). How to determine the next x will be described later in detail.

Next, the density control means 370 determines whether or not the end condition is satisfied (step S400). If it is determined in step S400 that the termination condition is satisfied, the density control unit 370 terminates the process and fixes x. Then, the supply of the measurement target gas and the reference gas to the odor sensor 10 is continued using the fixed x, and the measurement is performed. In this case, the deriving means 360 may derive the information on the first component 110 using only at least one of the first data and the second data obtained after x is fixed, or over a period before and after x is fixed. , The first component 110 may be derived.

{However, when it is determined in step S400 that the termination condition is satisfied, the measurement device 30 may terminate the measurement.

The termination conditions include, for example, that a termination command operation has been performed on the measuring device 30 by the user, that the difference between the current x and the next x is less than a predetermined reference, and that the number of repetitions of step S200 is For example, exceeding a predetermined number of times.

(4) If it is determined in step S400 that the termination condition is not satisfied, the density control unit 370 performs step S200 again using the next x determined in step S300.

Step S300 is performed using, for example, a method using interpolation, a gradient method, or a binary search. Hereinafter, each method will be described in detail.

FIG. 11 is a diagram for describing an example of a method of performing step S300 by the complement method. The complementary method, density control means 370 in the first loop and the step S200 of the second loop, using x ₁ and x _2, respectively as extremes example. For example the minimum achievable x in the measuring device 30 and x _1, can be a maximum value and x _2.

Next, x used in the third and subsequent loops is determined as follows. First, it arranged x in the loop until it _ascending, x 1, · · ·, and _{x n.} Then, y (x ₁ ),..., Y (x _n ) are complemented. The interpolation may be linear interpolation, or may be performed by another interpolation method such as a spline. The function obtained by complementation is defined as y _c (x). Then, x at which F (y _c (x)) is minimized is defined as the next x.

Specifically, for example, when linear interpolation is used to determine x _{n + 1} as the next x, F ((1−t) y (x _p ) −t (x _{p + 1} )) is minimized to (p, t) ( p = 1,..., n−1, 0 ≦ t <1), and the next x may be set to x _{n + 1} = (1-t) x _p + tx _{p + 1} .

Next, an example of a method of performing step S300 by the gradient method will be described below.

In this example, the storage unit 390 previously stores information indicating a response waveform of the odor sensor 10 to the second component 120. Note that the response waveform of the odor sensor 10 to the second component 120 is also referred to as a “second response waveform” below. Information indicating the second response waveform can be obtained, for example, by supplying a gas consisting of only the second component 120 to the odor sensor 10 and purifying the odor sensor 10 by reducing the pressure of the atmosphere. Alternatively, the information indicating the second response waveform indicates the response of the odor sensor 10 to only the second component 120 calculated based on the detection result obtained by the odor sensor 10 for the known measurement target gas including the second component 120. It may be information.

情報 If the information indicating the second response waveform is a vector z, the following equation (12) is expected to be satisfied for a small change in x.

At this time, F (y (x + Δx)) is represented by the following equation (13). That is, the slope of F (y (x)) is approximated by 2z · Py (x). Therefore, the following x is determined by using a certain constant η and x _{n + 1} = x _n -η2z · Py (x _n ). Note that the constant η can be determined in advance.

Next, an example of a method of performing step S300 in the binary search will be described below.

勾配 In the gradient method described above, if z · Py (x) is positive, the next x decreases, and if z · Py (x) is negative, the next x increases. That is, it is considered that when z · Py (x) is positive, the target x is smaller than the current x, and when z · Py (x) is negative, the target x is larger than the current x. A binary search is performed using this concept.

In the present example using the binary search, density control means 370 in step S200 of first loop and second loop, to obtain a y (x) using the lower limit x _l and the upper limit x _h as x, respectively. Here, a sufficiently wide gap between the lower x _l and upper x _h. For example the minimum achievable x in the measuring device 30 and x _l, can be a maximum value and x _h. However, the lower limit _xl and the upper limit _xh are not limited to this example.

For the obtained y (x), z · Py (x l) is negative, z · Py _{(x h)} is expected to be positive. If the result is not if so, further spread acquires again y (x) and the distance between the lower x _l and upper x _h.

Then, x used in the third and subsequent loops is the midpoint of the lower limit x _l and upper x _h. That is, x obtained by x = ( _xl + _xh ) / 2 is defined as the next x. Then, y (x) is further obtained in step S200. Moreover, to calculate the value of the density control means 370 with the y (x) is acquired z · Py (x), if z · Py (x) is positive, and the x and new maximum _{x h.} On the other hand, when z · Py (x) is negative, x is set as a new lower limit _xl . In the next step S300, the based on the new _{x l} and _{_{x h, x = (x l}} + x h) / 2 from the following relationship x is determined.

In this example, to become equal to or less than the reference interval between x _l and x _h is predetermined, it may be termination condition in step S400.

Next, the operation and effect of the present embodiment will be described. In the present embodiment, the same operation and effect as those of the first embodiment can be obtained. In addition, there is no need to provide the first measuring means 381 separately from the odor sensor 10.

Although the embodiments of the present invention have been described above with reference to the drawings, they are merely examples of the present invention, and various configurations other than the above can be adopted. For example, the embodiments described above can be combined in a range where the contents do not conflict with each other.

Some or all of the above embodiments may be described as in the following supplementary notes, but are not limited thereto.
1. A measurement target gas containing a first component and a second component, and an odor sensor for detecting a component contained in a reference gas containing the second component;
A first measuring means for measuring the concentration of the second component, one of the measurement target gas and the reference gas,
A measuring apparatus comprising: a concentration control unit configured to control a concentration of the second component of at least the other of the measurement target gas and the reference gas based on a measurement result of the first measurement unit.
2. 1. In the measuring device described in the above,
Further comprising a second measuring means for measuring the concentration of the other of the second component,
The measuring device, wherein the concentration control means further controls the concentration of the other second component based on a measurement result of the second measurement means.
3. 1. In the measuring device described in the above,
The first measuring means further measures the concentration of the other second component,
A measuring device for controlling the concentration of the other second component based on the concentration of the other second component measured by the first measuring device.
4. A measurement target gas containing a first component and a second component, and an odor sensor for detecting a component contained in a reference gas containing the second component;
A measurement device comprising: a concentration control unit configured to control a concentration of the second component of at least one of the measurement target gas and the reference gas based on a detection result of the odor sensor.
5. 4. In the measuring device described in the above,
The concentration control unit is configured to reduce a concentration of the at least one second component so that an amplitude of an output waveform of the odor sensor when the measurement target gas and the reference gas are alternately supplied to the odor sensor is reduced. Measuring device to control.
6. 4. In the measuring device described in the above,
The concentration control means is configured to determine a response waveform of the odor sensor to the first component, and an output waveform of the odor sensor when the measurement target gas and the reference gas are alternately supplied to the odor sensor. A measuring device for controlling the concentration x of the second component of one of the measurement target gas and the reference gas.
7. 6. In the measuring device described in the above,
When a vector indicating the response waveform is y _j , a vector indicating the output waveform with respect to the density x is y (x), and a _j is a coefficient, the density control unit determines the value of F by the equation (11). A measuring device for controlling the concentration x so that (y (x)) becomes small.
8. 7. In the measuring device described in the above,
The measuring device for controlling the concentration x by using a complementary method, a gradient method, or a binary search.
9. 1. From 8. In the measurement device according to any one of,
The measurement device, wherein the measurement target gas and the reference gas each contain moisture as the second component.
10. 1. To 9. In the measurement device according to any one of,
A measuring device for controlling the concentration of the second component of the reference gas;
11. 1. To 10. In the measurement device according to any one of,
The measuring device, wherein the reference gas is a purge gas.
12. 1. To 11. In the measurement device according to any one of,
By using at least one of first data that is a detection result of the gas to be measured by the odor sensor and second data that is a detection result of the reference gas by the odor sensor, the gas contained in the gas to be measured is used. A measuring device further comprising a deriving unit for deriving information on the first component.
13. 1. To 12. In the measurement device according to any one of,
The partial pressure of the second component contained in the measurement target gas is P _{target and second} , the partial pressure of the second component contained in the reference gas is P _{reference and second} , and _the partial pressure of the second component is The saturated vapor pressure is P _{saturated, second, the} partial pressure of the first component contained in the gas to be measured is P _{target, the first} , and the partial pressure of the first component contained in the reference gas is P _{Reference, first} , when the saturated vapor pressure of the first component is P _{saturation, first} , | P _{target, second} -P _{reference, second} | / P _{saturation, second} <(P _{target, second 1-} P _{Reference, 1st} ) / P _{Saturation, a} measuring device in which _{the first} holds.
14． A measurement target gas containing the first component and the second component, and a component contained in the reference gas containing the second component are detected by an odor sensor;
One of the measurement target gas and the reference gas, the concentration of the second component is measured by a first measurement unit,
A measurement method for controlling at least the concentration of the second component of the other of the measurement target gas and the reference gas based on a measurement result of the first measurement unit.
15. 14． In the measurement method described in
The concentration of the second component is further measured by second measuring means,
A measuring method for controlling the concentration of the other second component based on the measurement result of the second measuring means.
16. 14． In the measurement method described in
The first measuring means further measures the concentration of the other second component,
A measuring method for controlling the concentration of the other second component based on the concentration of the other second component measured by the first measuring means.
17． A measurement target gas containing the first component and the second component, and a component contained in the reference gas containing the second component are detected by an odor sensor;
A measurement method for controlling a concentration of the second component of at least one of the measurement target gas and the reference gas based on a detection result of the odor sensor.
18. 17． In the measurement method described in
A measurement method for controlling the concentration of the at least one second component such that the amplitude of the output waveform of the odor sensor when the measurement target gas and the reference gas are alternately supplied to the odor sensor is reduced.
19. 17． In the measurement method described in
The measurement target gas is measured based on information indicating a response waveform of the odor sensor to the first component and an output waveform of the odor sensor when the measurement target gas and the reference gas are alternately supplied to the odor sensor. And a measuring method for controlling the concentration x of the second component of one of the reference gases.
20. 19. In the measurement method described in
When a vector indicating the response waveform is y _j , a vector indicating the output waveform with respect to density x is y (x), and a _j is a coefficient, F (y (x)) represented by Expression (11) A measurement method for controlling the concentration x so as to reduce.
21. 20. In the measurement method described in
A measurement method in which the concentration x is controlled using a complementary method, a gradient method, or a binary search.
22. 14． To 21. In the measurement method according to any one of,
The measurement method, wherein the measurement target gas and the reference gas each contain moisture as the second component.
23. 14． To 22. In the measurement method according to any one of,
A measuring method for controlling the concentration of the second component of the reference gas.
24. 14． To 23. In the measurement method according to any one of,
The measuring method, wherein the reference gas is a purge gas.
25. 14． To 24. In the measurement method according to any one of,
Furthermore, by using at least one of the first data that is the detection result of the gas to be measured by the odor sensor and the second data that is the detection result of the reference gas by the odor sensor, it is included in the gas to be measured. A measurement method for deriving information on the first component to be performed.
26. 14． To 25. In the measurement method according to any one of,
The partial pressure of the second component contained in the measurement target gas is P _{target and second} , the partial pressure of the second component contained in the reference gas is P _{reference and second} , and _the partial pressure of the second component is The saturated vapor pressure is P _{saturated, second, the} partial pressure of the first component contained in the gas to be measured is P _{target, the first} , and the partial pressure of the first component contained in the reference gas is P _{Reference, first} , when the saturated vapor pressure of the first component is P _{saturation, first} , | P _{target, second} -P _{reference, second} | / P _{saturation, second} <(P _{target, second 1-} P _{reference, 1st} ) / P _{saturation, a} measurement method in which _{the first} holds.

Claims

A measurement target gas containing a first component and a second component, and an odor sensor for detecting a component contained in a reference gas containing the second component;
A first measuring means for measuring the concentration of the second component, one of the measurement target gas and the reference gas,
A measuring apparatus comprising: a concentration control unit configured to control a concentration of the second component of at least the other of the measurement target gas and the reference gas based on a measurement result of the first measurement unit.
The measuring device according to claim 1,
Further comprising a second measuring means for measuring the concentration of the other of the second component,
The measuring device, wherein the concentration control means further controls the concentration of the other second component based on a measurement result of the second measurement means.
The measuring device according to claim 1,
The first measuring means further measures the concentration of the other second component,
A measuring device for controlling the concentration of the other second component based on the concentration of the other second component measured by the first measuring device.
A measurement target gas containing a first component and a second component, and an odor sensor for detecting a component contained in a reference gas containing the second component;
A measurement device comprising: a concentration control unit configured to control a concentration of the second component of at least one of the measurement target gas and the reference gas based on a detection result of the odor sensor.
The measuring device according to claim 4,
The concentration control unit is configured to reduce a concentration of the at least one second component so that an amplitude of an output waveform of the odor sensor when the measurement target gas and the reference gas are alternately supplied to the odor sensor is reduced. Measuring device to control.
The measuring device according to claim 4,
The concentration control means is configured to determine a response waveform of the odor sensor to the first component, and an output waveform of the odor sensor when the measurement target gas and the reference gas are alternately supplied to the odor sensor. A measuring device for controlling the concentration x of the second component of one of the measurement target gas and the reference gas.
The measuring device according to claim 6,
When a vector indicating the response waveform is y j , a vector indicating the output waveform with respect to density x is y (x), and a j is a coefficient, the density control unit is expressed by the following equation (c1). A measuring device for controlling the concentration x so that F (y (x)) becomes smaller.
The measuring device according to claim 7,
The measuring device for controlling the concentration x by using a complementary method, a gradient method, or a binary search.
The measuring device according to any one of claims 1 to 8,
The measurement device, wherein the measurement target gas and the reference gas each contain moisture as the second component.
The measuring device according to any one of claims 1 to 9,
A measuring device for controlling the concentration of the second component of the reference gas;
The measuring device according to any one of claims 1 to 10,
The measuring device, wherein the reference gas is a purge gas.
The measuring device according to any one of claims 1 to 11,
By using at least one of first data that is a detection result of the gas to be measured by the odor sensor and second data that is a detection result of the reference gas by the odor sensor, the gas contained in the gas to be measured is used. A measuring device further comprising a deriving unit for deriving information on the first component.
The measuring device according to any one of claims 1 to 12,
The partial pressure of the second component contained in the measurement target gas is P target and second , the partial pressure of the second component contained in the reference gas is P reference and second , and the partial pressure of the second component is The saturated vapor pressure is P saturated, second, the partial pressure of the first component contained in the gas to be measured is P target, the first , and the partial pressure of the first component contained in the reference gas is P Reference, first , when the saturated vapor pressure of the first component is P saturation, first , | P target, second -P reference, second | / P saturation, second <(P target, second 1- P Reference, 1st ) / P Saturation, a measuring device in which the first holds.
A measurement target gas containing the first component and the second component, and a component contained in the reference gas containing the second component are detected by an odor sensor;
One of the measurement target gas and the reference gas, the concentration of the second component is measured by a first measurement unit,
A measurement method for controlling at least the concentration of the second component of the other of the measurement target gas and the reference gas based on a measurement result of the first measurement unit.
In the measurement method according to claim 14,
The concentration of the second component is further measured by second measuring means,
A measuring method for controlling the concentration of the other second component based on the measurement result of the second measuring means.
In the measurement method according to claim 14,
The first measuring means further measures the concentration of the other second component,
A measuring method for controlling the concentration of the other second component based on the concentration of the other second component measured by the first measuring means.
A measurement target gas containing the first component and the second component, and a component contained in the reference gas containing the second component are detected by an odor sensor;
A measurement method for controlling a concentration of the second component of at least one of the measurement target gas and the reference gas based on a detection result of the odor sensor.
In the measuring method according to claim 17,
A measurement method for controlling the concentration of the at least one second component such that the amplitude of the output waveform of the odor sensor when the measurement target gas and the reference gas are alternately supplied to the odor sensor is reduced.
In the measuring method according to claim 17,
The measurement target gas is measured based on information indicating a response waveform of the odor sensor to the first component and an output waveform of the odor sensor when the measurement target gas and the reference gas are alternately supplied to the odor sensor. And a measuring method for controlling the concentration x of the second component of one of the reference gases.
In the measuring method according to claim 19,
When a vector indicating the response waveform is y j , a vector indicating the output waveform with respect to density x is y (x), and a j is a coefficient, F (y (x )) Is a measurement method for controlling the concentration x so as to reduce.
In the measuring method according to claim 20,
A measurement method in which the concentration x is controlled using a complementary method, a gradient method, or a binary search.
The measurement method according to any one of claims 14 to 21,
The measurement method, wherein the measurement target gas and the reference gas each contain moisture as the second component.
The measurement method according to any one of claims 14 to 22,
A measuring method for controlling the concentration of the second component of the reference gas.
The measurement method according to any one of claims 14 to 23,
The measuring method, wherein the reference gas is a purge gas.
In the measurement method according to any one of claims 14 to 24,
Furthermore, by using at least one of the first data that is the detection result of the gas to be measured by the odor sensor and the second data that is the detection result of the reference gas by the odor sensor, it is included in the gas to be measured. A measurement method for deriving information on the first component to be performed.
The measurement method according to any one of claims 14 to 25,
The partial pressure of the second component contained in the measurement target gas is P target and second , the partial pressure of the second component contained in the reference gas is P reference and second , and the partial pressure of the second component is The saturated vapor pressure is P saturated, second, the partial pressure of the first component contained in the gas to be measured is P target, the first , and the partial pressure of the first component contained in the reference gas is P Reference, first , when the saturated vapor pressure of the first component is P saturation, first , | P target, second -P reference, second | / P saturation, second <(P target, second 1- P reference, 1st ) / P saturation, a measurement method in which the first holds.