WO2020064052A1 - Laser processing device having optics protection and method for protecting the optics of a laser processing device - Google Patents

Laser processing device having optics protection and method for protecting the optics of a laser processing device Download PDF

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Publication number
WO2020064052A1
WO2020064052A1 PCT/DE2019/100803 DE2019100803W WO2020064052A1 WO 2020064052 A1 WO2020064052 A1 WO 2020064052A1 DE 2019100803 W DE2019100803 W DE 2019100803W WO 2020064052 A1 WO2020064052 A1 WO 2020064052A1
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WO
WIPO (PCT)
Prior art keywords
laser processing
processing device
protective window
optics
measuring chamber
Prior art date
Application number
PCT/DE2019/100803
Other languages
German (de)
French (fr)
Inventor
Marc-Gordon Griguhn
Michael Anders
Original Assignee
Scansonic Mi Gmbh
Thermacut, K. S.
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Publication date
Application filed by Scansonic Mi Gmbh, Thermacut, K. S. filed Critical Scansonic Mi Gmbh
Publication of WO2020064052A1 publication Critical patent/WO2020064052A1/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462Nozzles; Features related to nozzles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462Nozzles; Features related to nozzles
    • B23K26/1464Supply to, or discharge from, nozzles of media, e.g. gas, powder, wire
    • B23K26/1476Features inside the nozzle for feeding the fluid stream through the nozzle
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment
    • B23K26/706Protective screens

Definitions

  • the invention relates to a laser processing device with optics protection and a method for protecting the optics of a laser processing device. It is particularly suitable for laser cutting devices or for laser cutting.
  • cutting gas is directed as a process medium, which emerges from the cutting gas nozzle of the laser processing head under high pressure of up to 2500 kPa, together with the laser beam onto the workpiece to be cut.
  • the optics for beam shaping of the laser beam is separated in a known manner, see for example DE 44 26 458 A1 within the laser processing device by a sealed protective window from the pressurized working channel connected to the cutting gas nozzle in order to protect the valuable optical components from contamination, for example by Process splashes or vapors to protect.
  • Normal atmospheric pressure prevails in the area within the laser processing device in which the optical components are installed, here called optics chamber. Because of this, the protective window that shields or separates the normal pressure area of the optics chamber from the high pressure area of the working channel is exposed to high pressure differences.
  • This protective window is typically an easily exchangeable glass window provided with a protective window seal. Sealing defects, for example as a result of aging effects or signs of wear, can, however, contaminate the optics.
  • the contamination of the optical components of the laser processing device result in a power absorption of the laser, through which the laser processing heating head. This heating can ultimately lead to the destruction of the laser processing head. In addition, the absorbed laser power is missing in the machining process.
  • auxiliary protective window provides only a limited remedy, since in the event of defective seals the auxiliary protective windows are also exposed to increased pressure and the contamination of the optics is ultimately only delayed.
  • the object of the invention is to provide a laser processing device with optics protection and a method for protecting the optics of a laser processing device, which make it possible to detect sealing defects, in particular defects in the protective window seal, at an early stage.
  • the protective window seal should be easy and quick to replace.
  • the laser processing device with optical protection has a housing made of one or more housing elements; this is, for example, the housing of the laser processing head with the housing inserts inserted into it.
  • It also includes an optics chamber that receives the optics and a working channel pressurized with a process medium, from which the process medium flows, when used as intended, to the machining position of the workpieces to be machined with the laser.
  • the working channel is closed in a known manner by means of a protective window arranged in the beam path of the laser beam and inserted into the housing, ie. that is, the protective window shields the optics of the laser processing device against the access of the process medium.
  • the protective window is sealed with a protective window seal against the ingress of the process medium.
  • the protective window seal can consist of several sealing components.
  • An auxiliary protective window is also inserted in the beam path of the laser beam in the housing of the laser processing device.
  • the auxiliary protective window closes the optics chamber. It is arranged between the optics chamber and the protective window, at a distance from the protective window, so that an intermediate space is formed in the housing between the auxiliary protective window and the protective window.
  • a - preferably gas-tight - auxiliary protective window seal is attached to the auxiliary protective window and seals between the measuring chamber and the optics chamber.
  • the laser beam guided by the optics strikes the workpieces to be machined after passing through the optics chamber, the auxiliary protective window, the intermediate space, the protective window and the working channel.
  • the space formed in the housing between the protective window and the auxiliary protective window is a closed measuring chamber which is sealed against the ingress of process medium from the pressurized working channel by means of the preferably gastight protective window seal attached to the protective window.
  • a safety pressure sensor for determining the measuring chamber pressure is integrated in the measuring chamber.
  • the measuring chamber pressure is measured by means of the safety pressure sensor during operation of the laser processing device; If a predetermined measuring chamber pressure is exceeded or if a predetermined pressure increase in the measuring chamber occurs within a predetermined period of time, a warning signal is output to the machine operator and / or a stop signal for switching off the laser processing device. Likewise, the warning or switching off of the laser processing device can take place upon detection of a characteristic measurement chamber pressure-time curve.
  • Specified characteristic measuring chamber pressure-time profiles which are known, for example, for certain sealing errors or defects, can be stored in a control and regulating unit of the laser processing device, which, if the recorded measuring chamber pressure-time profile matches one of the stored, characteristic measuring chamber pressure -Time curves outputs the warning or stop signal.
  • the inventive laser processing device with optics protection and the method for protecting the optics of the laser processing device enable leaks in the protective window seal to be detected at an early stage and thus prevent the optics from being impaired by dirt. In the largely gas-tight measuring chamber, even small pressure changes can be detected using the safety pressure sensor.
  • the protective window seal can be replaced after detection of the defect; expensive optics repairs are avoided.
  • the measuring chamber has a pressure relief valve, which connects the measuring chamber to the ambient atmosphere in the event of an overload. If the protective window suddenly fails, this reduces the pressure load on the auxiliary protective window.
  • the protective window seal can comprise a first, axially sealing sealing element on the working channel side and a second sealing element on the measuring chamber side.
  • the first sealing element is, for example, a seal made of polytetrafluoroethylene (PTFE) with an integrated spring element.
  • the second sealing element which preferably consists of a metallic material, can be designed as a one-sided edge frame of the protective window.
  • the laser processing device with optical protection has a protective window drawer for releasable insertion into the housing of the laser processing device.
  • the protective window is interchangeably inserted in the protective window drawer together with the protective window seal.
  • This drawer construction which can also be used with other modules of a laser processing device, such as for example with fiber optic decoupling, auto focus, focusing or lens mounting in the sense of "plug & play", ensures easy replacement of the components. In addition to the saving of spare parts costs in the event of defects in individual components, this also allows a. also the installation of pre-adjusted modules with shorter repair times and thus ultimately increases the system availability of the laser processing device.
  • the drawer design is advantageously combined with the multi-part protective window seal, comprising the first, working channel-side, axial sealing sealing element and the second, measuring chamber-side sealing element, the first sealing element and the second sealing element of the protective window seal being supported on the adjacent housing elements when the protective window drawer is pushed in.
  • the first axially sealing sealing element is pre-stressed.
  • Fig. 2 the laser processing device with optical protection in drawer design in vertical section
  • Fig. 3 the detail of a sealing element of the protective window seal.
  • the laser processing device with optical protection according to FIG. 1 and FIG. 2 has the protective window drawer 1 with the inserted protective window 2 made of a glass material.
  • the protective window drawer 1 is pushed laterally into the housing of the laser processing head of the laser processing device (in the insertion direction F) formed from several housing elements 3, 8, 10.
  • the protective window 2 is arranged inside the laser processing head of the laser processing device, above the working channel 6 pressurized by the cutting gas with up to 2500 kPa, and closes the working channel 6.
  • the protective window seal 4, 5 comprises the first, axially sealing sealing element 5 and the second sealing element 4.
  • the second sealing element 4 consists of a metallic material; after the protective window drawer 1 has been pushed in, it is supported on the housing element 10 of the laser processing head and, by pressing against the housing insert 3 provided with a sealing surface, brings the first sealing element 5, which is provided with a sealing surface, under prestress.
  • the detail D designated in FIG. 2 is shown in FIG. 3 to clarify the structure of the first, axially sealing sealing element 5.
  • the sealing element 5 comprises a PTFE element and a spring element integrated therein.
  • the auxiliary protective window 9 is located according to FIG. 1 within the laser processing head below the optics, not shown, on the housing element 8 provided with a sealing surface.
  • the measuring chamber 7, in which the safety pressure sensor (not shown) is located, is located between the auxiliary protective window 9 and protective window 2.
  • the safety pressure sensor uses the safety pressure sensor to continuously monitor the laser work, for example during laser cutting. If the measuring chamber pressure rises significantly within a predetermined period of time compared to the atmospheric ambient pressure normally present in the measuring chamber 7, the machine user is informed by a warning signal and, if necessary, the laser is switched off.
  • the possibly defective sealing elements 4, 5 can be replaced after pulling out the protective window drawer 1.
  • the protective window drawer 1 is sealed off from the housing elements 3, 10 of the laser processing head by separate seals in the drawer level and at the drawer stop. This prevents the seals from crossing.

Abstract

The invention relates to a laser processing device having optics protection and to a method for protecting the optics of a laser processing device for early recognition of sealing defects. The laser processing device has a measurement chamber (7), which is formed between a protective window (2) and an auxiliary protective window (9) and has an integrated safety pressure sensor which facilitates a continuous measurement of the measurement chamber pressure during the operation of the laser processing device. If a predetermined safety pressure is exceeded within a predetermined time period in the measurement chamber (7), a warning signal is output and, if appropriate, the laser processing device is switched off. The easily repairable design of the laser processing device in a compartmental construction is particularly suitable for use in laser cutting.

Description

Laserbearbeitungsvorrichtung mit Optikschutz und Verfahren zum Schutz der Optik einer Laserbearbeitungsvorrichtung  Laser processing device with optics protection and method for protecting the optics of a laser processing device
Die Erfindung betrifft eine Laserbearbeitungsvorrichtung mit Optikschutz sowie ein Verfahren zum Schutz der Optik einer Laserbearbeitungsvorrichtung. Sie eignet sich besonders für Laserschneidvorrichtungen bzw. für das Laserschneiden. The invention relates to a laser processing device with optics protection and a method for protecting the optics of a laser processing device. It is particularly suitable for laser cutting devices or for laser cutting.
Bei Laserbearbeitungsverfahren wie dem Laserstrahlschneiden wird Schneidgas als Prozessmedium, welches unter hohem Druck von bis zu 2500 kPa aus der Schneid- gasdüse des Laserbearbeitungskopfes austritt, gemeinsam mit dem Laserstrahl auf das zu schneidende Werkstück gerichtet. Die Optik zur Strahlformung des Laser- strahls ist in bekannter Weise, siehe beispielsweise DE 44 26 458 A1 innerhalb der Laserbearbeitungsvorrichtung durch ein abgedichtetes Schutzfenster vom druckbe- aufschlagten, mit der Schneidgasdüse verbundenem Arbeitskanal getrennt, um die wertvollen optischen Komponenten vor Verschmutzungen, zum Beispiel durch Pro- zessspritzer oder -dämpfe, zu schützen. Im Bereich innerhalb der Laserbearbei- tungsvorrichtung, in dem die optischen Komponenten verbaut sind, hier Optikkam- mer genannt, herrscht normaler atmosphärischer Druck. Aufgrund dessen ist das den Normaldruckbereich der Optikkammer vom Hochdruckbereich des Arbeitskanals abschirmende bzw. trennende Schutzfenster hohen Druckunterschieden ausgesetzt. In laser processing methods such as laser beam cutting, cutting gas is directed as a process medium, which emerges from the cutting gas nozzle of the laser processing head under high pressure of up to 2500 kPa, together with the laser beam onto the workpiece to be cut. The optics for beam shaping of the laser beam is separated in a known manner, see for example DE 44 26 458 A1 within the laser processing device by a sealed protective window from the pressurized working channel connected to the cutting gas nozzle in order to protect the valuable optical components from contamination, for example by Process splashes or vapors to protect. Normal atmospheric pressure prevails in the area within the laser processing device in which the optical components are installed, here called optics chamber. Because of this, the protective window that shields or separates the normal pressure area of the optics chamber from the high pressure area of the working channel is exposed to high pressure differences.
Dieses Schutzfenster ist typischerweise ein mit einer Schutzfensterdichtung verse- henes, leicht wechselbares Glasfenster. Durch Dichtungsdefekte, zum Beispiel infol- ge von Alterungseffekten oder Verschleißerscheinungen, können allerdings Ver- schmutzungen in den Bereich der Optik gelangen. This protective window is typically an easily exchangeable glass window provided with a protective window seal. Sealing defects, for example as a result of aging effects or signs of wear, can, however, contaminate the optics.
Bekannt ist, ein zusätzliches Hilfsschutzfenster zwischen Schutzfenster und Optik vorzusehen, wodurch zwischen dem Arbeitskanal und der Optikkammer ein zusätzli- cher Zwischenraum ausgebildet ist. Trotz dieser Maßnahme kann - insbesondere beim Laserschneiden - nicht gänzlich verhindert werden, dass Verschmutzungen aufgrund des hohen Schneidgasdruckes in die Optikkammer eindringen. It is known to provide an additional auxiliary protective window between the protective window and the optics, as a result of which an additional intermediate space is formed between the working channel and the optics chamber. Despite this measure, especially when laser cutting, it cannot be completely prevented that contaminants enter the optics chamber due to the high cutting gas pressure.
Die Verschmutzungen der optischen Komponenten der Laserbearbeitungsvorrich- tung bewirken eine Leistungsabsorption des Lasers, durch die sich der Laserbearbei- tungskopf erwärmt. Diese Erwärmung kann letztlich bis zur Zerstörung des Laserbe- arbeitungskopfes führen. Zudem fehlt die absorbierte Laserleistung im Bearbeitungs- prozess. The contamination of the optical components of the laser processing device result in a power absorption of the laser, through which the laser processing heating head. This heating can ultimately lead to the destruction of the laser processing head. In addition, the absorbed laser power is missing in the machining process.
Es ist bekannt, zum Beispiel aus DE 299 03 385 U1 , DE 198 39 930 C1 oder DE 101 13 518 A1 , die Erwärmung im Laserbearbeitungskopf an verschiedenen Po- sitionen zu messen, das durch den Schmutz gestreute Licht sensorisch oder Be- schädigungen des Schutzfensters zu erfassen. It is known, for example from DE 299 03 385 U1, DE 198 39 930 C1 or DE 101 13 518 A1, to measure the heating in the laser processing head at different positions, the light scattered by the dirt as a sensor or damage to the protective window capture.
Auch bei Verwendung dieser bekannten Vorrichtungen und Verfahren zur Überwa- chung bzw. zum Schutz der Optik vor Überlastung bleiben Dichtungsdefekte über einen relativ langen Zeitraum unbemerkt, da Temperaturerhöhungen erst detektiert werden, wenn bereits merklichen Verschmutzungen vorliegen. Die kontaminierten optischen Komponenten müssen in der Folge regelmäßig ausgetauscht werden, da sich die Verschmutzungen durch den Laserstrahl in den Komponenten einbrennen und nicht mehr entfernen entfernen lassen. Aufgrund der dann notwendigen Spezial- reparaturen stehen die Laserbearbeitungsvorrichtungen häufig längere Zeit nicht zur Verfügung. Even when using these known devices and methods for monitoring or for protecting the optics against overload, sealing defects remain unnoticed over a relatively long period of time, since temperature increases are only detected when noticeable contamination is already present. As a result, the contaminated optical components must be replaced regularly, since the soiling can be burned into the components by the laser beam and cannot be removed. Due to the then necessary special repairs, the laser processing devices are often not available for a long time.
Der Einbau des Hilfsschutzfensters schafft nur bedingt Abhilfe, da im Fall defekter Dichtungen auch die Hilfsschutzfenster einem erhöhten Druck ausgesetzt sind und die Verschmutzung der Optik letztlich nur verzögert wird. The installation of the auxiliary protective window provides only a limited remedy, since in the event of defective seals the auxiliary protective windows are also exposed to increased pressure and the contamination of the optics is ultimately only delayed.
Aufgabe der Erfindung ist es, eine Laserbearbeitungsvorrichtung mit Optikschutz und ein Verfahren zum Schutz der Optik einer Laserbearbeitungsvorrichtung bereitzustel- len, die es ermöglichen, Dichtungsdefekte, insbesondere Defekte der Schutzfenster- dichtung, frühzeitig zu erkennen. Zudem soll die Schutzfensterdichtung einfach und schnell austauschbar sein. The object of the invention is to provide a laser processing device with optics protection and a method for protecting the optics of a laser processing device, which make it possible to detect sealing defects, in particular defects in the protective window seal, at an early stage. In addition, the protective window seal should be easy and quick to replace.
Diese Aufgabe wird durch eine Laserbearbeitungsvorrichtung mit den kennzeichnen- den Merkmalen nach Anspruch 1 sowie ein Verfahren zum Schutz der Optik der La- serbearbeitungsvorrichtung nach Anspruch 9 gelöst; zweckmäßige Weiterbildungen der Laserbearbeitungsvorrichtung sind in den Ansprüchen 2 bis 8 beschrieben. Die Laserbearbeitungsvorrichtung mit Optikschutz besitzt ein Gehäuse aus einem oder mehreren Gehäuseelementen; dies ist zum Beispiel das Gehäuse des Laserbe- arbeitungskopfes mit den darin eingefügten Gehäuseeinsätzen. This object is achieved by a laser processing device with the characterizing features according to claim 1 and a method for protecting the optics of the laser processing device according to claim 9; Expedient developments of the laser processing device are described in claims 2 to 8. The laser processing device with optical protection has a housing made of one or more housing elements; this is, for example, the housing of the laser processing head with the housing inserts inserted into it.
Sie umfasst weiterhin eine die Optik aufnehmende Optikkammer sowie einen mit ei- nem Prozessmedium druckbeaufschlagten Arbeitskanal, aus dem das Prozessmedi- um bei bestimmungsgemäßem Gebrauch zur Bearbeitungsposition der mit dem La- ser zu bearbeitenden Werkstücke strömt. It also includes an optics chamber that receives the optics and a working channel pressurized with a process medium, from which the process medium flows, when used as intended, to the machining position of the workpieces to be machined with the laser.
Der Arbeitskanal ist in bekannter Weise mittels eines im Strahlengang des Laser- strahls angeordneten, in das Gehäuse eingesetzten Schutzfensters verschlossen, d. h., das Schutzfenster schirmt die Optik der Laserbearbeitungsvorrichtung gegen den Zutritt des Prozessmediums ab. Um den Durchtritt des Prozessmediums auch an den Kontaktpositionen zwischen Schutzfenster und Gehäuse zu verhindern, ist das Schutzfenster mittels einer Schutzfensterdichtung gegen eindringendes Pro- zessmedium abgedichtet. Die Schutzfensterdichtung kann aus mehreren Dichtungs- komponenten bestehen. The working channel is closed in a known manner by means of a protective window arranged in the beam path of the laser beam and inserted into the housing, ie. that is, the protective window shields the optics of the laser processing device against the access of the process medium. In order to prevent the process medium from penetrating even at the contact positions between the protective window and the housing, the protective window is sealed with a protective window seal against the ingress of the process medium. The protective window seal can consist of several sealing components.
Weiterhin ist ein Hilfsschutzfenster im Strahlengang des Laserstrahls in das Gehäuse der Laserbearbeitungsvorrichtung eingesetzt. Das Hilfsschutzfenster verschließt die Optikkammer. Es ist zwischen der Optikkammer und dem Schutzfenster, beab- standet zum Schutzfenster, angeordnet, sodass zwischen Hilfsschutzfenster und Schutzfenster ein Zwischenraum im Gehäuse ausgebildet ist. In dem Zwischenraum und in der Optikkammer herrscht bei bestimmungsgemäßem Betrieb der Laserbear- beitungsvorrichtung atmosphärischer Normaldruck, während der Arbeitskanal unter dem hohen Druck des Prozessmediums steht. An auxiliary protective window is also inserted in the beam path of the laser beam in the housing of the laser processing device. The auxiliary protective window closes the optics chamber. It is arranged between the optics chamber and the protective window, at a distance from the protective window, so that an intermediate space is formed in the housing between the auxiliary protective window and the protective window. When the laser processing device is operated as intended, atmospheric normal pressure prevails in the intermediate space and in the optics chamber, while the working channel is under the high pressure of the process medium.
Am Hilfsschutzfenster ist eine - vorzugsweise gasdichte - Hilfsschutzfensterdichtung angebracht, die zwischen der Messkammer und der Optikkammer abdichtet. A - preferably gas-tight - auxiliary protective window seal is attached to the auxiliary protective window and seals between the measuring chamber and the optics chamber.
Der mittels der Optik gelenkte Laserstrahl trifft bei bestimmungsgemäßer Nutzung nach Durchtritt durch die Optikkammer, das Hilfsschutzfenster, den Zwischenraum, das Schutzfenster und den Arbeitskanal auf die zu bearbeitenden Werkstücke. Nach Maßgabe der Erfindung ist der im Gehäuse zwischen Schutzfenster und Hilfs- schutzfenster ausgebildete Zwischenraum eine geschlossene Messkammer, die mit- tels der am Schutzfenster angebrachten, vorzugsweise gasdichten Schutzfenster- dichtung gegen eindringendes Prozessmedium aus dem druckbeaufschlagten Ar- beitskanal abgedichtet ist. In die Messkammer ist ein Sicherheitsdrucksensor zur Be- stimmung des Messkammerdruckes integriert. When used as intended, the laser beam guided by the optics strikes the workpieces to be machined after passing through the optics chamber, the auxiliary protective window, the intermediate space, the protective window and the working channel. According to the invention, the space formed in the housing between the protective window and the auxiliary protective window is a closed measuring chamber which is sealed against the ingress of process medium from the pressurized working channel by means of the preferably gastight protective window seal attached to the protective window. A safety pressure sensor for determining the measuring chamber pressure is integrated in the measuring chamber.
Dem erfindungsgemäßen Verfahren zum Schutz der Optik der Laserbearbeitungs- vorrichtung zufolge wird der Messkammerdruck während des Betriebs der Laserbe- arbeitungsvorrichtung mittels des Sicherheitsdrucksensors gemessen; beim Über- schreiten eines vorgegebenen Messkammerdrucks bzw. bei einer vorgegebenen Druckerhöhung in der Messkammer innerhalb eines vorgegebenen Zeitraums wird ein Warnsignal an den Maschinenbediener und/oder ein Stoppsignal zur Abschaltung der Laserbearbeitungsvorrichtung ausgegeben. Gleichfalls kann die Warnung bzw. die Abschaltung der Laserbearbeitungsvorrichtung bei Detektion eines charakteristi- schen Messkammerdruck-Zeit-Verlaufs erfolgen. Vorgegebene charakteristische Messkammerdruck-Zeit-Verläufe, die zum Beispiel für bestimmten Dichtungsfehler bzw. -defekte bekannt sind, können in einer Steuerungs- und Regelungseinheit der Laserbearbeitungsvorrichtung hinterlegt sein, die bei Übereinstimmung des erfassten Messkammerdruck-Zeit-Verlaufs mit einem der hinterlegten, charakteristischen Messkammerdruck-Zeit-Verläufe das Warn- bzw. Stoppsignal ausgibt. According to the method according to the invention for protecting the optics of the laser processing device, the measuring chamber pressure is measured by means of the safety pressure sensor during operation of the laser processing device; If a predetermined measuring chamber pressure is exceeded or if a predetermined pressure increase in the measuring chamber occurs within a predetermined period of time, a warning signal is output to the machine operator and / or a stop signal for switching off the laser processing device. Likewise, the warning or switching off of the laser processing device can take place upon detection of a characteristic measurement chamber pressure-time curve. Specified characteristic measuring chamber pressure-time profiles, which are known, for example, for certain sealing errors or defects, can be stored in a control and regulating unit of the laser processing device, which, if the recorded measuring chamber pressure-time profile matches one of the stored, characteristic measuring chamber pressure -Time curves outputs the warning or stop signal.
Durch die erfindungsgemäße Laserbearbeitungsvorrichtung mit Optikschutz und das Verfahren zum Schutz der Optik der Laserbearbeitungsvorrichtung können frühzeitig Undichtigkeiten der Schutzfensterdichtung detektiert und somit eine Beeinträchtigung der Optik durch Verschmutzungen verhindert werden. In der weitestgehend gasdich- ten Messkammer können auch kleine Druckänderungen mittels des Sicherheits- drucksensors detektiert werden. The inventive laser processing device with optics protection and the method for protecting the optics of the laser processing device enable leaks in the protective window seal to be detected at an early stage and thus prevent the optics from being impaired by dirt. In the largely gas-tight measuring chamber, even small pressure changes can be detected using the safety pressure sensor.
Die Schutzfensterdichtung kann nach Erkennung des Defekts ausgetauscht werden; teure Reparaturen der Optik werden vermieden. The protective window seal can be replaced after detection of the defect; expensive optics repairs are avoided.
Es kann vorgesehen sein, das die Messkammer ein Überdruckventil aufweist, wel- ches die Messkammer im Überlastfall mit der Umgebungsatmosphäre verbindet. Dies reduziert bei schlagartigem Versagen des Schutzfensters die Druckbelastung des Hilfsschutzfensters. It can be provided that the measuring chamber has a pressure relief valve, which connects the measuring chamber to the ambient atmosphere in the event of an overload. If the protective window suddenly fails, this reduces the pressure load on the auxiliary protective window.
Weiterhin kann die Schutzfensterdichtung ein erstes, arbeitskanalseitiges, axialdich- tendes Dichtungselement und ein zweites, messkammerseitiges Dichtungselement umfassen. Das erste Dichtungselement ist beispielsweise eine Dichtung aus Polytet- rafluroethylen (PTFE) mit einem integrierten Federelement. Das zweite, vorzugswei- se aus einem metallischen Werkstoff bestehende Dichtungselement kann als einsei- tige Randfassung des Schutzfensters ausgebildet sein. Furthermore, the protective window seal can comprise a first, axially sealing sealing element on the working channel side and a second sealing element on the measuring chamber side. The first sealing element is, for example, a seal made of polytetrafluoroethylene (PTFE) with an integrated spring element. The second sealing element, which preferably consists of a metallic material, can be designed as a one-sided edge frame of the protective window.
In einer Ausgestaltung weist die Laserbearbeitungsvorrichtung mit Optikschutz eine Schutzfensterschublade zum lösbaren Einschieben in das Gehäuse der Laserbear- beitungsvorrichtung auf. Das Schutzfenster ist zusammen mit der Schutzfensterdich- tung auswechselbar in der Schutzfensterschublade eingesetzt. Diese Schubladen- konstruktion, die auch bei anderen Modulen einer Laserbearbeitungsvorrichtung, wie zum Beispiel bei der Lichtleitkabel-Entkopplung, dem Autofokus, der Fokussierung oder der Linsenfassung im Sinne eines„Plug & Play“ anwendbar ist, gewährleistet einen leichten Austausch der Komponenten. Dies ermöglicht neben der Einsparung von Ersatzteilkosten bei Defekten einzelner Komponenten u. a. auch den Einbau vor- justierter Module mit verkürzten Reparaturzeiten und erhöht somit letztlich die Sys- temverfügbarkeit der Laserbearbeitungsvorrichtung. In one configuration, the laser processing device with optical protection has a protective window drawer for releasable insertion into the housing of the laser processing device. The protective window is interchangeably inserted in the protective window drawer together with the protective window seal. This drawer construction, which can also be used with other modules of a laser processing device, such as for example with fiber optic decoupling, auto focus, focusing or lens mounting in the sense of "plug & play", ensures easy replacement of the components. In addition to the saving of spare parts costs in the event of defects in individual components, this also allows a. also the installation of pre-adjusted modules with shorter repair times and thus ultimately increases the system availability of the laser processing device.
Vorteilhafterweise ist die Schubladenbauweise mit der mehrteiligen Schutzfenster- dichtung, umfassend das erste, arbeitskanalseitige, axialdichtende Dichtungselement und das zweite, messkammerseitige Dichtungselement, kombiniert, wobei sich das erste Dichtungselement und das zweite Dichtungselement der Schutzfensterdichtung bei eingeschobener Schutzfensterschublade an den anliegenden Gehäuseelementen abstützen. Das erste axialdichtende Dichtungselement steht hierbei unter Vorspan- nung. The drawer design is advantageously combined with the multi-part protective window seal, comprising the first, working channel-side, axial sealing sealing element and the second, measuring chamber-side sealing element, the first sealing element and the second sealing element of the protective window seal being supported on the adjacent housing elements when the protective window drawer is pushed in. The first axially sealing sealing element is pre-stressed.
Die Erfindung ist nachfolgend anhand eines Ausführungsbeispiels und mit Bezug auf die Zeichnungen näher erläutert. Dazu zeigen: Fig. 1 : die Laserbearbeitungsvorrichtung mit Optikschutz in Schubladenbauweise im Vertikalschnitt, The invention is explained in more detail below using an exemplary embodiment and with reference to the drawings. To show: 1: the laser processing device with optical protection in drawer design in vertical section,
Fig. 2: die Laserbearbeitungsvorrichtung mit Optikschutz in Schubladenbauweise im Vertikalschnitt, und  Fig. 2: the laser processing device with optical protection in drawer design in vertical section, and
Fig. 3: das Detail eines Dichtungselementes der Schutzfensterdichtung.  Fig. 3: the detail of a sealing element of the protective window seal.
Die Laserbearbeitungsvorrichtung mit Optikschutz gemäß der Fig. 1 und der Fig. 2 weist die Schutzfensterschublade 1 mit dem eingesetztem Schutzfenster 2 aus ei- nem Glaswerkstoff auf. Die Schutzfensterschublade 1 ist seitlich in das aus mehre- ren Gehäuseelementen 3, 8, 10 gebildete Gehäuse des Laserbearbeitungskopfs der Laserbearbeitungsvorrichtung (in Einschubrichtung F) eingeschoben. Das Schutz- fenster 2 ist innerhalb des Laserbearbeitungskopfes der Laserbearbeitungsvorrich- tung, oberhalb des durch das Schneidgas mit bis zu 2500 kPa druckbeaufschlagten Arbeitskanals 6 angeordnet und verschließt den Arbeitskanal 6. The laser processing device with optical protection according to FIG. 1 and FIG. 2 has the protective window drawer 1 with the inserted protective window 2 made of a glass material. The protective window drawer 1 is pushed laterally into the housing of the laser processing head of the laser processing device (in the insertion direction F) formed from several housing elements 3, 8, 10. The protective window 2 is arranged inside the laser processing head of the laser processing device, above the working channel 6 pressurized by the cutting gas with up to 2500 kPa, and closes the working channel 6.
Die Schutzfensterdichtung 4, 5 umfasst das erste, axialdichtende Dichtungsele- ment 5 und das zweite Dichtungselement 4. Das zweite Dichtungselement 4 besteht aus einem metallischen Werkstoff; es stützt sich nach dem Einschieben der Schutz- fensterschublade 1 am Gehäuseelement 10 des Laserbearbeitungskopfes ab und bringt das als Federelement ausgebildete erste Dichtungselement 5 durch Andrü- cken gegen den mit einer Dichtfläche versehenen Gehäuseeinsatz 3 unter Vorspan- nung. The protective window seal 4, 5 comprises the first, axially sealing sealing element 5 and the second sealing element 4. The second sealing element 4 consists of a metallic material; after the protective window drawer 1 has been pushed in, it is supported on the housing element 10 of the laser processing head and, by pressing against the housing insert 3 provided with a sealing surface, brings the first sealing element 5, which is provided with a sealing surface, under prestress.
Das in der Fig. 2 bezeichnete Detail D ist in der Fig. 3 zur Verdeutlichung des Auf- baus des ersten, axialdichtenden Dichtungselements 5 wiedergegeben. Das Dich- tungselement 5 umfasst ein PTFE-Element und ein darin integriertes Federelement. The detail D designated in FIG. 2 is shown in FIG. 3 to clarify the structure of the first, axially sealing sealing element 5. The sealing element 5 comprises a PTFE element and a spring element integrated therein.
Das Hilfsschutzfenster 9 befindet sich gemäß der Fig. 1 innerhalb des Laserbearbei- tungskopfes unterhalb der nicht dargestellten Optik auf dem mit einer Dichtfläche versehenen Gehäuseelement 8. The auxiliary protective window 9 is located according to FIG. 1 within the laser processing head below the optics, not shown, on the housing element 8 provided with a sealing surface.
Zwischen Hilfsschutzfenster 9 und Schutzfenster 2 befindet sich die Messkammer 7, in der sich der nicht dargestellte Sicherheitsdrucksensor befindet. Mittels des Sicher- heitsdrucksensors wird kontinuierlich der Messkammerdruck während der Laserbe- arbeitung, zum Beispiel beim Laserschneiden, gemessen. Erhöht sich der Mess- kammerdruck innerhalb eines vorgegebenen Zeitraums signifikant gegenüber dem im Normalfall in der Messkammer 7 anliegenden atmosphärischen Umgebungsdruck wird der Maschinenanwender durch ein Warnsignal informiert und ggf. der Laser ab- geschaltet. Die eventuell defekten Dichtungselemente 4, 5 können nach dem Her- ausziehen der Schutzfensterschublade 1 getauscht werden. The measuring chamber 7, in which the safety pressure sensor (not shown) is located, is located between the auxiliary protective window 9 and protective window 2. Using the safety pressure sensor, the measuring chamber pressure is continuously monitored during the laser work, for example during laser cutting. If the measuring chamber pressure rises significantly within a predetermined period of time compared to the atmospheric ambient pressure normally present in the measuring chamber 7, the machine user is informed by a warning signal and, if necessary, the laser is switched off. The possibly defective sealing elements 4, 5 can be replaced after pulling out the protective window drawer 1.
Die Schutzfensterschublade 1 ist gegenüber den Gehäuseelementen 3, 10 des La- serbearbeitungskopfes durch getrennte Dichtungen in der Schubladenebene und am Schubladenanschlag abgedichtet. Dies vermeidet das Kreuzen der Dichtungen. The protective window drawer 1 is sealed off from the housing elements 3, 10 of the laser processing head by separate seals in the drawer level and at the drawer stop. This prevents the seals from crossing.
Liste der verwendeten Bezugszeichen List of the reference symbols used
1 Schutzfensterschublade 1 protective window drawer
2 Schutzfenster  2 protective windows
3 Gehäuse, Gehäuseelement, Gehäuseeinsatz mit Dichtfläche3 housing, housing element, housing insert with sealing surface
4 zweites Dichtungselement der Schutzfensterdichtung4 second sealing element of the protective window seal
5 erstes Dichtungselement der Schutzfensterdichtung 5 first sealing element of the protective window seal
6 Arbeitskanal  6 working channel
7 Messkammer mit Sicherheitsdrucksensor 7 measuring chamber with safety pressure sensor
8 Gehäuse, Gehäuseelement mit Dichtfläche 8 housing, housing element with sealing surface
9 Hilfsschutzfenster  9 auxiliary protection windows
10 Gehäuse, fest installiertes Gehäuseelement  10 housing, permanently installed housing element
F Einschubrichtung der Schutzfensterschublade F Direction of insertion of the protective window drawer
D Detail D detail

Claims

Patentansprüche Claims
1. Laserbearbeitungsvorrichtung mit Optikschutz, aufweisend ein Gehäuse aus ei- nem oder mehreren Gehäuseelementen (3, 8, 10), ein im Strahlengang des Laser- strahls in das Gehäuse eingesetztes, einen mit einem Prozessmedium druckbeauf- schlagten Arbeitskanal (6) abschließendes Schutzfenster (2) sowie ein im Strahlen- gang des Laserstrahls im Gehäuse eingesetztes, vom Schutzfenster (2) beabstande- tes Hilfsschutzfenster (9) zwischen einer die Optik der Laserbearbeitungsvorrichtung aufnehmenden Optikkammer und dem Schutzfenster (2), dadurch gekennzeichnet, dass der im Gehäuse zwischen Schutzfenster (2) und Hilfsschutzfenster (9) ausge- bildete Zwischenraum eine geschlossene Messkammer (7) mit einem integrierten Si- cherheitsdrucksensor ist, wobei die Messkammer (7) mittels einer am Schutzfens- ter (2) angebrachten Schutzfensterdichtung (4, 5) gegen eindringendes Prozessme- dium aus dem druckbeaufschlagten Arbeitskanal (6) abgedichtet ist, und wobei am Hilfsschutzfenster (9) eine Hilfsschutzfensterdichtung angebracht ist, die zwischen der Messkammer (7) und der Optikkammer abdichtet. 1. A laser processing device with optical protection, comprising a housing made of one or more housing elements (3, 8, 10), a protective window (6) inserted into the housing in the beam path of the laser beam and closing a working channel (6) pressurized with a process medium ( 2) and an auxiliary protective window (9) inserted in the beam path of the laser beam in the housing and spaced apart from the protective window (2) between an optical chamber receiving the optics of the laser processing device and the protective window (2), characterized in that the protective window (2) in the housing (2) and auxiliary protective window (9) is a closed measuring chamber (7) with an integrated security pressure sensor, the measuring chamber (7) being protected against intrusion by means of a protective window seal (4, 5) attached to the protective window (2) Process medium from the pressurized working channel (6) is sealed, and an H Protection window seal is attached, which seals between the measuring chamber (7) and the optics chamber.
2. Laserbearbeitungsvorrichtung mit Optikschutz nach Anspruch 1 , dadurch gekenn- zeichnet, dass die Messkammer (7) ein Überdruckventil aufweist, dass die Mess- kammer (7) im Überlastfall mit der Umgebungsatmosphäre verbindet. 2. Laser processing device with optical protection according to claim 1, characterized in that the measuring chamber (7) has a pressure relief valve that connects the measuring chamber (7) to the ambient atmosphere in the event of an overload.
3. Laserbearbeitungsvorrichtung mit Optikschutz nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die Schutzfensterdichtung (4, 5) und/oder die Hilfsschutzfens- terdichtung gasundurchlässig ausgeführt sind. 3. Laser processing device with optical protection according to claim 1 or 2, characterized in that the protective window seal (4, 5) and / or the auxiliary protective window seal are made impermeable to gas.
4. Laserbearbeitungsvorrichtung mit Optikschutz nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, dass die Schutzfensterdichtung (4, 5) ein erstes, arbeitska- nalseitiges, axialdichtendes Dichtungselement (5) und ein zweites, messkammersei- tiges Dichtungselement (4) umfasst. 4. Laser processing device with optical protection according to one of claims 1 to 3, characterized in that the protective window seal (4, 5) comprises a first, working-channel-side, axially sealing sealing element (5) and a second, measuring chamber-side sealing element (4).
5. Laserbearbeitungsvorrichtung mit Optikschutz nach Anspruch 4, dadurch gekenn- zeichnet, dass das erstes Dichtungselement (5) eine Dichtung aus Polytetrafluroethy- len mit einem integrierten Federelement ist. 5. Laser processing device with optical protection according to claim 4, characterized in that the first sealing element (5) is a seal made of polytetrafluroethylene with an integrated spring element.
6. Laserbearbeitungsvorrichtung mit Optikschutz nach Anspruch 4 oder 5, dadurch gekennzeichnet, dass zweite, aus einem metallischen Werkstoff bestehende Dich- tungselement (4) als einseitige Randfassung des Schutzfensters (2) ausgebildet ist. 6. Laser processing device with optical protection according to claim 4 or 5, characterized in that the second sealing element (4) made of a metallic material is designed as a one-sided edge frame of the protective window (2).
7. Laserbearbeitungsvorrichtung mit Optikschutz nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, dass die Laserbearbeitungsvorrichtung eine das auswech- selbare Schutzfenster (2) sowie die auswechselbare Schutzfensterdichtung (4, 5) tragende Schutzfensterschublade (1 ) zum lösbaren Einschieben in das Gehäuse der Laserbearbeitungsvorrichtung aufweist. 7. Laser processing device with optical protection according to one of claims 1 to 6, characterized in that the laser processing device has a protective window drawer (1) carrying the exchangeable protective window (2) and the exchangeable protective window seal (4) for releasable insertion into the housing of the laser processing device having.
8. Laserbearbeitungsvorrichtung mit Optikschutz nach Anspruch 7 sowie einem der Ansprüche 4 bis 6, dadurch gekennzeichnet, dass sich das erste Dichtungsele- ment (5) und das zweite Dichtungselement (4) der Schutzfensterdichtung (4, 5) bei eingeschobener Schutzfensterschublade (1 ) an den anliegenden Gehäuseelemen- ten (3, 10) abstützen, wobei das erste, axialdichtende Dichtungselement (5) unter Vorspannung steht. 8. Laser processing device with optical protection according to claim 7 and one of claims 4 to 6, characterized in that the first sealing element (5) and the second sealing element (4) of the protective window seal (4, 5) with inserted protective window drawer (1) support the adjacent housing elements (3, 10), whereby the first, axially sealing sealing element (5) is under prestress.
9. Verfahren zum Schutz der Optik einer Laserbearbeitungsvorrichtung nach einem der Ansprüche 1 bis 8, dadurch gekennzeichnet, dass Messkammerdruck kontinuier- lich während des Betriebs der Laserbearbeitungsvorrichtung mittels des Sicherheits- drucksensors gemessen wird, wobei bei Überschreitung eines vorgegebenen Si- cherheitsdrucks innerhalb eines vorgegebenen Zeitraums in der Messkammer (7) und/oder bei Detektion eines charakteristischen Messkammerdruck-Zeit-Verlaufs ein Warnsignal an den Maschinenbediener und/oder ein Stoppsignal zur Abschaltung der Laserbearbeitungsvorrichtung ausgegeben wird. 9. A method for protecting the optics of a laser processing device according to one of claims 1 to 8, characterized in that the measuring chamber pressure is measured continuously during the operation of the laser processing device by means of the safety pressure sensor, wherein if a predetermined security pressure is exceeded within a predetermined time period a warning signal to the machine operator and / or a stop signal for switching off the laser processing device is output in the measuring chamber (7) and / or when a characteristic measuring chamber pressure-time curve is detected.
- Hierzu ein Blatt Zeichnungen - - For this a sheet of drawings -
PCT/DE2019/100803 2018-09-28 2019-09-09 Laser processing device having optics protection and method for protecting the optics of a laser processing device WO2020064052A1 (en)

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