WO2020062508A1 - 提取组件及坩埚提取装置、坩埚提取方法 - Google Patents

提取组件及坩埚提取装置、坩埚提取方法 Download PDF

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Publication number
WO2020062508A1
WO2020062508A1 PCT/CN2018/116639 CN2018116639W WO2020062508A1 WO 2020062508 A1 WO2020062508 A1 WO 2020062508A1 CN 2018116639 W CN2018116639 W CN 2018116639W WO 2020062508 A1 WO2020062508 A1 WO 2020062508A1
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WIPO (PCT)
Prior art keywords
transmission shaft
rigid
crucible
extraction
balls
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2018/116639
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English (en)
French (fr)
Inventor
乔小平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Application filed by Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd filed Critical Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
Priority to US16/245,238 priority Critical patent/US10968509B2/en
Publication of WO2020062508A1 publication Critical patent/WO2020062508A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J1/00—Manipulators positioned in space by hand
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Definitions

  • the present application relates to the field of machinery, in particular to the field of panel manufacturing technology, and in particular, to an extraction assembly, a crucible extraction device, and a crucible extraction method.
  • OLED Organic Light-Emitting Diode, Organic light emitting diode
  • OLED Organic Light emitting diode
  • physical meteorological deposition method is generally used.
  • Vader Deposition, PVD realizes the evaporation of organic materials to form various layer structures of OLED devices.
  • the organic material is placed in a crucible in a vacuum chamber and heated, and a film is formed on the substrate after sublimation, vaporization, or deposition.
  • the vacuum chamber is provided with an opening, and its diameter (radial dimension) is generally 6-20 mm, and the opening diameter is small.
  • a special extraction tool is required to remove the crucible from the opening and add organic materials.
  • FIG. 1 is a schematic structural diagram of an extraction tool according to an embodiment of the prior art.
  • the extraction tool 10 includes a transmission shaft 11, an elastic piece 12 and a handle 13.
  • the upper end of the transmission shaft 11 is connected to the handle 13.
  • the transmission shaft 11 can be moved up and down and a lower end is provided with a protrusion 111.
  • An end of the handle 13 can be rotated around an axis, an elastic piece 12 is disposed around the transmission shaft 11 and an upper end thereof is connected to a bracket 14.
  • the transmission shaft 11 is moved upward.
  • the projection 111 at the lower end of the transmission shaft 11 propels the elastic sheet 12 so that the radial size of the elastic sheet 12 becomes larger.
  • the elastic sheet 12 will be caught inside the crucible opening and continue to move up
  • the transmission shaft 11 can take the crucible out of the opening of the vacuum chamber.
  • the elastic piece 12 is easily deformed, it is difficult to maintain the extraction effect, and the structure of the extraction tool 10 is complicated.
  • the present application provides an extraction assembly, a crucible extraction device, and a crucible extraction method, which can still have a good extraction effect after repeated use, and have a simple structure and easy operation.
  • An extraction assembly is used to extract a container having an opening.
  • the extraction assembly includes a transmission shaft, at least two rigid balls, and a support member carrying the rigid balls.
  • Two of the at least two rigid balls The transmission shafts are located on opposite sides of the transmission shaft, and the diameters of the two rigid balls are located on the same diameter of the transmission shaft.
  • the transmission shafts can move back and forth in a direction perpendicular to the opening of the container.
  • the transmission shaft transmits the rigid ball when the transmission shaft moves in a first direction.
  • the radial size of the two rigid balls is larger than the opening size of the container.
  • the rigid balls are out of contact, and the radial size of the two rigid balls may be smaller than the opening size of the container.
  • an extraction component for extracting a container having an opening includes a transmission shaft, at least two rigid balls, and a support member carrying the rigid balls, the at least two rigid Two of the balls are located on opposite sides of the transmission shaft, and the diameters of the two rigid balls are located on the same diameter of the transmission shaft, and the transmission shaft can reciprocate in a direction perpendicular to the opening of the container
  • the transmission shaft moves in the first direction
  • the rigid ball is transmitted
  • the radial size of the two rigid balls is larger than the opening size of the container
  • the transmission shaft is in a second direction opposite to the first direction.
  • the radial size of the two rigid balls may be smaller than the opening size of the container.
  • the extraction component includes a transmission shaft, at least two rigid balls, and a support for carrying the rigid balls. Two of the at least two rigid balls are located on opposite sides of the transmission shaft. And the diameters of the two rigid balls are located on the same diameter of the transmission shaft, and the transmission shaft can move back and forth in a direction perpendicular to the crucible opening;
  • the radial dimension of the two rigid balls is kept larger than the opening dimension of the crucible, and the extraction component is moved in a second direction opposite to the first direction until the crucible is taken out.
  • the extraction component designed in the present application includes a transmission shaft, at least two rigid balls, and a support member carrying the rigid balls. Two of the at least two rigid balls are divided on opposite sides of the transmission shaft, and two The diameter of the rigid ball is located on the same diameter of the transmission shaft.
  • the transmission shaft can move back and forth in a direction perpendicular to the opening of the container. As long as the transmission shaft moves in the first direction, the rigid ball can be driven to move outside the transmission shaft.
  • the container such as a crucible can be taken out, and the structure is simple , Easy to operate, and the rigid ball is not easy to deform, and can still have a good extraction effect after repeated use.
  • FIG. 1 is a schematic structural diagram of an extraction tool according to an embodiment of the prior art
  • FIG. 2 is a schematic structural diagram of an extraction component according to an embodiment of the present application.
  • FIG. 3 is a schematic cross-sectional view of the extraction component shown in FIG. 2;
  • FIG. 4 is a schematic flowchart of a crucible extraction method according to an embodiment of the present application.
  • the main purpose of this application is to design an extraction assembly including a transmission shaft, at least two rigid balls, and a support member carrying the rigid balls.
  • Two of the at least two rigid balls are divided on opposite sides of the transmission shaft, and two The diameter of the rigid ball is located on the same diameter of the transmission shaft.
  • the transmission shaft can move back and forth in a direction perpendicular to the opening of the container.
  • the rigid ball can be driven to move outside the transmission shaft until The radial size of the two rigid balls on the same diameter of the transmission shaft is larger than the opening size of the container, and then the container can be taken out by moving the extraction component in a second direction opposite to the first direction.
  • the structure is simple, easy to operate, and rigid. The ball is not easily deformed, and can still have a good extraction effect after repeated use.
  • the containers to which this application applies include, but are not limited to, crucibles required for manufacturing OLED devices.
  • the directional terms used throughout this application, such as “up” and “down”, are used to better describe the technical solutions of various embodiments and are not intended to limit the scope of protection of this application.
  • FIG. 2 is a schematic structural diagram of an extraction component according to an embodiment of the present application.
  • the extraction assembly 20 of this embodiment includes a transmission shaft 21, four rigid balls 22, and a supporting member 23 carrying the four rigid balls 22.
  • the transmission shaft 21 may be a rod-shaped member with a circular cross-section, and the lower end is a tip.
  • the support member 23 may be a hollow cylindrical sleeve inside, and the transmission shaft 21 is inserted into the sleeve 23. Inside the cylinder wall 231.
  • the radial dimension of the sleeve 23 and the diameter dimension of the transmission shaft 21 are similar.
  • the cylinder wall 231 of the sleeve 23 can limit that the transmission shaft 21 can only move up and down, but cannot move left and right.
  • the inner wall of the cylinder wall 231 may be provided with threads, and the outer surface of the transmission shaft 21 is also provided with threads.
  • the cylinder wall 231 and the transmission shaft 21 may be fitted by threads, and by rotating the transmission shaft 21 in different directions
  • the transmission shaft 21 can be moved up and down relative to the cylinder wall 231. For example, when the transmission shaft 21 is rotated counterclockwise, the transmission shaft 21 can be moved up relative to the cylinder wall 231; and when the transmission shaft 21 is rotated clockwise, the transmission shaft 21 can be moved down relative to the cylinder wall 231.
  • the sleeve 23 further includes a plurality of extension portions 232 connected to the cylinder wall 231 and extending toward the center of the sleeve 23, and these extension portions 232 are arranged in two directions in the first direction indicated by the arrow in the figure.
  • the rigid balls 22 are sandwiched between two layers of extensions 232.
  • each extension 232 may be composed of four horizontal pieces, two of which are located on the upper level and the other two horizontal pieces are located on the lower level. These four horizontal pieces are surrounded by a rigid ball 22, thereby limiting The rigid ball 22 can only move back and forth in the radial direction of the sleeve 23, that is, each rigid ball 22 can only move back and forth along the figure, and cannot move up and down.
  • each rigid ball 22 is exactly the same, and their cross sections are oval.
  • the long axis of each rigid ball 22 is set along the diameter direction of the transmission shaft 21.
  • four rigid balls 22 having a circular cross section may also be used.
  • the four rigid balls 22 are arranged in groups of two, and the two rigid balls 22 of each group are arranged on opposite sides of the transmission shaft 21, and the long axes of the two rigid balls 22 are located on the same line of the transmission shaft 21. Diameter. In FIG. 3, two rigid balls 22 arranged up and down are a group, and two rigid balls 22 arranged left and right are a group, and the diameters (long axes) of the two sets of rigid balls 22 are perpendicular.
  • the lower ends of the rigid ball 22 and the supporting member 23 are inserted into the crucible 30, and then the transmission shaft 21 is moved in the first direction x.
  • the tip of the transmission shaft 21 is inserted into the gap between the four rigid balls 22,
  • the shaft 21 moves downward.
  • the side wall of the tip of the transmission shaft 21 contacts the four rigid balls 22 and drives the four rigid balls 22 such that the four rigid balls 22 move outward.
  • the radial dimension of 22 that is, the distance between the outermost sides of the two rigid balls 22
  • the radial dimension of each group of rigid balls 22 is kept larger than the opening dimension of the container.
  • the rigid ball 22 of this embodiment is less likely to deform, and can still have a good extraction effect after repeated use.
  • the rigid ball 22 may be made of a metal with higher hardness.
  • the transmission shaft 21 moves in a second direction opposite to the first direction x until the tip of the transmission shaft 21 comes out of contact with the four rigid balls 22, and at this time moves up
  • the extraction component 20, the four rigid balls 22 move inward due to the action of the opening edge of the crucible 30, and the radial size of each group of rigid balls 22 is smaller than the opening size of the crucible 30, and the extraction component 20 can be removed from the crucible 30 Take out.
  • a rotating handle 24 may be provided on the upper end of the transmission shaft 21, and the rotating handle 24 may be vertically disposed on an end of the transmission shaft 21 away from the rigid ball 22.
  • the rotating shaft 24 can be operated to move the transmission shaft 21 up and down.
  • the application also provides an extraction component according to another embodiment.
  • the extraction assembly of this embodiment is provided with only two rigid balls 22, which are respectively disposed on opposite sides of the transmission shaft 21, and The diameters of the two rigid balls 22 are located on the same diameter of the transmission shaft 21 (or the sleeve 23).
  • the present application also provides a crucible extraction device according to an embodiment.
  • the crucible extraction device may include the above-mentioned extraction component, so it also has at least the same beneficial effects as the extraction component.
  • the crucible extraction method may include the following steps S41 to S44.
  • S41 Provide an extraction assembly, the extraction assembly includes a transmission shaft, at least two rigid balls, and a support member carrying the rigid balls, and two of the at least two rigid balls are divided on opposite sides of the transmission shaft, And the diameters of the two rigid balls are located on the same diameter of the transmission shaft, and the transmission shaft can reciprocate in a direction perpendicular to the crucible opening.
  • the crucible extraction method of this embodiment may be based on the extraction component of any of the foregoing embodiments, such as the extraction component 20, and here, the crucible extraction method of this embodiment has at least the same beneficial effects as it does.
  • the method for extracting the crucible further includes: moving the transmission shaft in the second direction so that the transmission shaft is out of contact with the rigid ball, and continuing to move the extraction component upward, because the rigid ball is exposed to the crucible opening The edge moves and moves inward.
  • the radial size of each group of rigid balls is smaller than the opening size of the crucible, and the extraction component can be taken out of the crucible.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Crushing And Grinding (AREA)

Abstract

一种提取组件（20）及坩埚提取装置、坩埚提取方法。所述提取组件（20）包括传动轴（21）、至少两个刚性球（22）及承载刚性球的支撑件（23），所述至少两个刚性球（22）中的两个分设于传动轴（21）的相对两侧，且两个刚性球（22）的直径位于传动轴（21）的同一条直径上，传动轴（21）可沿垂直于容器开口的方向往返运动。

Description

提取组件及坩埚提取装置、坩埚提取方法
【技术领域】
本申请涉及机械领域，具体涉及面板制造技术领域，尤其涉及一种提取组件及坩埚提取装置、坩埚提取方法。
【背景技术】
OLED（Organic Light-Emitting Diode, 有机发光二极管）技术具有自发光、轻薄、易于实现柔性显示等特点，是一种具有良好发展前景的显示技术。在OLED面板的制程中，一般采用物理气象沉积法（Physical Vader Deposition, PVD）实现有机材料的蒸镀，以此形成OLED器件的各个层结构。具体地，有机材料放置于真空腔室的坩埚中加热，并经过升华或者气化、沉积等过程后在衬底上成膜。在实际应用场景中，真空腔室设置有开口，其直径（径向尺寸）一般为6-20mm，开口直径较小，需要专门的提取工具才能将坩埚从开口取出并添加有机材料。
图1是现有技术一实施例的提取工具的结构示意图。如图1所示，所述提取工具10包括传动轴11、弹片12及手柄13，传动轴11的上端均与手柄13连接，传动轴11可以上下移动且其下端设置有向外延伸的突起111，手柄13的一端可以绕轴转动，弹片12围绕传动轴11设置且其上端与一支架14连接。手柄13向上移动时带动传动轴11上移，传动轴11下端的突起111将弹片12撑开，使得弹片12的径向尺寸变大，此时弹片12会卡在坩埚开口的内侧，继续上移传动轴11，即可将坩埚从真空腔室的开口中取出。但是，随着使用次数及时间的增加，弹片12易发生变形，难以保持提取效果，并且该提取工具10的构造复杂。
【发明内容】
鉴于此，本申请提供一种提取组件及坩埚提取装置、坩埚提取方法，能够在反复使用后仍具有良好的提取效果，且构造简单，易于操作。
本申请一实施例的提取组件，用于提取具有开口的容器，所述提取组件包括传动轴、至少两个刚性球及承载所述刚性球的支撑件，所述至少两个刚性球中的两个分设于所述传动轴的相对两侧，且两个刚性球的直径位于所述传动轴的同一条直径上，所述传动轴可沿垂直于所述容器开口的方向往返运动，其中，所述传动轴沿第一方向移动时传动所述刚性球，所述两个刚性球的径向尺寸大于所述容器的开口尺寸，所述传动轴沿与第一方向相反的第二方向移动时与所述刚性球脱离接触，所述两个刚性球的径向尺寸可小于所述容器的开口尺寸。
本申请一实施例的坩埚提取装置，其提取组件用于提取具有开口的容器，所述提取组件包括传动轴、至少两个刚性球及承载所述刚性球的支撑件，所述至少两个刚性球中的两个分设于所述传动轴的相对两侧，且两个刚性球的直径位于所述传动轴的同一条直径上，所述传动轴可沿垂直于所述容器开口的方向往返运动，其中，所述传动轴沿第一方向移动时传动所述刚性球，所述两个刚性球的径向尺寸大于所述容器的开口尺寸，所述传动轴沿与第一方向相反的第二方向移动时与所述刚性球脱离接触，所述两个刚性球的径向尺寸可小于所述容器的开口尺寸。
本申请一实施例的坩埚提取方法，包括：
提供一提取组件，所述提取组件包括传动轴、至少两个刚性球及承载所述刚性球的支撑件，所述至少两个刚性球中的两个分设于所述传动轴的相对两侧，且两个刚性球的直径位于所述传动轴的同一条直径上，所述传动轴可沿垂直于所述坩埚开口的方向往返运动；
将所述支撑件的一端和所述刚性球插置于所述坩埚中；
沿第一方向移动所述传动轴以传动所述刚性球，使得所述两个刚性球的径向尺寸大于所述坩埚的开口尺寸；
保持所述两个刚性球的径向尺寸大于所述坩埚的开口尺寸，并沿与第一方向相反的第二方向移动所述提取组件直至取出所述坩埚。
有益效果：本申请设计提取组件包括传动轴、至少两个刚性球及承载刚性球的支撑件，所述至少两个刚性球中的两个分设于所述传动轴的相对两侧，且两个刚性球的直径位于所述传动轴的同一条直径上，传动轴可沿垂直于容器开口的方向往返运动，只需传动轴沿第一方向移动，刚性球即可被传动向传动轴的外侧移动，直至位于传动轴的同一直径上的两个刚性球的径向尺寸大于容器的开口尺寸，然后沿与第一方向相反的第二方向移动所述提取组件就可将坩埚等容器取出，构造简单，易于操作，并且刚性球不易发生形变，能够在反复使用后仍具有良好的提取效果。
【附图说明】
图1是现有技术一实施例的提取工具的结构示意图；
图2是本申请一实施例的提取组件的结构示意图；
图3是图2所示提取组件的横截面示意图；
图4是本申请一实施例的坩埚提取方法的流程示意图。
【具体实施方式】
本申请的主要目的是：设计提取组件包括传动轴、至少两个刚性球及承载刚性球的支撑件，所述至少两个刚性球中的两个分设于传动轴的相对两侧，且两个刚性球的直径位于传动轴的同一条直径上，传动轴可沿垂直于容器开口的方向往返运动，只需传动轴沿第一方向移动，刚性球即可被传动向传动轴的外侧移动，直至位于传动轴的同一直径上的两个刚性球的径向尺寸大于容器的开口尺寸，然后沿与第一方向相反的第二方向移动提取组件就可将容器取出，构造简单，易于操作，并且刚性球不易发生形变，能够在反复使用后仍具有良好的提取效果。
本申请所适用的容器包括但不限于制造OLED器件所需的坩埚。下面以容器为坩埚为例，结合本申请实施例中的附图，对本申请所提供的各个示例性的实施例的技术方案进行清楚、完整地描述。在不冲突的情况下，下述各个实施例及其技术特征可以相互组合。并且，本申请全文所采用的方向性术语，例如“上”、“下”等，均是为了更好的描述各个实施例的技术方案，并非用于限制本申请的保护范围。
图2是本申请一实施例的提取组件的结构示意图。如图2所示，本实施例的提取组件20包括传动轴21、四个刚性球22以及承载所述四个刚性球22的支撑件23。其中，传动轴21可以为横截面呈圆形的杆状构件，且其下端为尖端，对应地，支撑件23可以为内部中空的圆柱状套筒，传动轴21插置于该套筒23的筒壁231内。本实施例可设置套筒23的径向尺寸与传动轴21的直径尺寸相近，于此，套筒23的筒壁231可以限定传动轴21只能上下移动，而无法左右移动。
其中，该筒壁231的内壁可以设置有螺纹，而传动轴21的外表面也设置有螺纹，筒壁231和传动轴21可以通过螺纹实现套合，并且，通过沿不同方向旋拧传动轴21，传动轴21可相对于筒壁231上移和下移。例如，逆时针旋拧传动轴21，传动轴21可相对于筒壁231上移；而顺时针旋拧传动轴21，传动轴21可相对于筒壁231下移。
所述套筒23还包括与筒壁231连接且朝向所述套筒23中心延伸的多个延伸部232，这些延伸部232沿图中箭头所示的第一方向x分上下两层设置，四个刚性球22夹设于两层延伸部232之间。
其中，延伸部232的作用是承载及限位各个刚性球22。具体而言，每一延伸部232可以由四个水平件构成，其中两个水平件位于上层，另外两个水平件位于下层，这四个水平件围设于一刚性球22的四周，从而限制该刚性球22只能在套筒23的径向上往返运动，即每一刚性球22只能沿图中左右往返运动，而无法上下移动。
结合图3所示，所述四个刚性球22完全相同，其截面呈椭圆形，每一刚性球22的长轴沿传动轴21的直径方向设置。当然，其他实施例也可以选用截面呈圆形的四个刚性球22。
所述四个刚性球22为两两分组设置，且每一组的两个刚性球22分设于传动轴21的相对两侧，且这两个刚性球22的长轴位于传动轴21的同一条直径上。图3中上下设置的两个刚性球22为一组，左右设置的两个刚性球22为一组，这两组刚性球22的直径（长轴）相垂直。
本实施例将刚性球22和支撑件23的下端插置于坩埚30中，然后沿第一方向x移动传动轴21，传动轴21的尖端插置于四个刚性球22的空隙，随着传动轴21的下移，传动轴21的尖端的侧壁与四个刚性球22接触并传动这四个刚性球22，使得这四个刚性球22向外移动，当每一组的两个刚性球22的径向尺寸（即两个刚性球22的最外侧之间的距离）大于所述坩埚30的开口尺寸时，保持每一组刚性球22的径向尺寸大于容器的开口尺寸这一状态，沿与第一方向x相反的第二方向移动提取组件20，即可将坩埚30从真空腔室的开口中取出。
基于上述，相比较于图1所示的弹片12，本实施例的刚性球22不易发生形变，能够在反复使用后仍具有良好的提取效果。在实际应用场景中，为了进一步提高刚性球22保持不易发生形变的特性，本实施例可以采用硬度较高的金属制成刚性球22。
继续参阅图2和图3，在将坩埚30取出之后，传动轴21沿与第一方向x相反的第二方向移动，直至传动轴21的尖端与四个刚性球22脱离接触，此时上移提取组件20，四个刚性球22因受到坩埚30开口边缘的作用而向内移动，每一组刚性球22的径向尺寸小于所述坩埚30的开口尺寸，即可将提取组件20从坩埚30中取出。
为了便于移动传动轴21，如图2所示，本实施例可在传动轴21的上端设置旋柄24，所述旋柄24可以垂直设置于传动轴21远离刚性球22的一端，用户只需操作旋柄24即可实现传动轴21的上移及下移。
本申请还提供另一实施例的提取组件。在前述提取组件20的描述基础上，但与其不同的是，本实施例的提取组件仅设置有两个刚性球22，这两个刚性球22分设于所述传动轴21的相对两侧，且这两个刚性球22的直径位于传动轴21（或者套筒23）的同一条直径上。
本申请还提供一实施例的坩埚提取装置，该坩埚提取装置可以包括上述提取组件，因此其也至少具有与提取组件相同的有益效果。
图4是本申请一实施例的坩埚提取方法的流程示意图。请参阅图4，所述坩埚提取方法可以包括以下步骤S41~S44。
S41：提供一提取组件，所述提取组件包括传动轴、至少两个刚性球及承载所述刚性球的支撑件，所述至少两个刚性球中的两个分设于传动轴的相对两侧，且两个刚性球的直径位于传动轴的同一条直径上，所述传动轴可沿垂直于坩埚开口的方向往返运动。
S42：将支撑件的一端和刚性球插置于坩埚中。
S43：沿第一方向移动传动轴以传动刚性球，使得两个刚性球的径向尺寸大于坩埚的开口尺寸。
S44：保持两个刚性球的径向尺寸大于坩埚的开口尺寸，并沿与第一方向相反的第二方向移动提取组件直至取出坩埚。
本实施例的坩埚提取方法可以基于上述前述任一实施例的提取组件，例如提取组件20，于此，本实施例的坩埚提取方法至少具有与其相同的有益效果。
并且，在取出所述坩埚之后，所述坩埚提取方法还包括：沿所述第二方向移动传动轴以使所述传动轴与刚性球脱离接触，继续上移提取组件，刚性球因受到坩埚开口边缘的作用而向内移动，每一组刚性球的径向尺寸小于所述坩埚的开口尺寸，即可将提取组件从坩埚中取出。
应理解，以上所述仅为本申请的实施例，并非因此限制本申请的专利范围，凡是利用本申请说明书及附图内容所作的等效结构或等效流程变换，例如各实施例之间技术特征的相互结合，或直接或间接运用在其他相关的技术领域，均同理包括在本申请的专利保护范围内。

Claims (16)

  1. 一种提取组件，用于提取具有开口的容器，其中，所述提取组件包括传动轴、至少两个刚性球及承载所述刚性球的支撑件，所述至少两个刚性球中的两个分设于所述传动轴的相对两侧，且两个刚性球的直径位于所述传动轴的同一条直径上，所述传动轴可沿垂直于所述容器开口的方向往返运动，其中，所述传动轴沿第一方向移动时传动所述刚性球，所述两个刚性球的径向尺寸大于所述容器的开口尺寸，所述传动轴沿与第一方向相反的第二方向移动时与所述刚性球脱离接触，所述两个刚性球的径向尺寸可小于所述容器的开口尺寸。
  2. 根据权利要求1所述的提取组件，其中，所述刚性球的数量为四个，四个所述刚性球两两分组设置，且任一组的两个刚性球的直径位于所述传动轴的同一条直径上。
  3. 根据权利要求1所述的提取组件，其中，所述刚性球的截面呈圆形或椭圆形。
  4. 根据权利要求2所述的提取组件，其中，所述支撑件为套筒，所述套筒包括筒壁及与所述筒壁连接且朝向所述套筒中心延伸的多个延伸部，所述多个延伸部在套筒的延伸方向上分两层设置，所述刚性球夹设于两层延伸部之间，且可沿所述套筒的径向往返运动。
  5. 根据权利要求4所述的提取组件，其中，所述传动轴插置于所述套筒的筒壁内，且两者通过螺纹实现套合。
  6. 根据权利要求2所述的提取组件，其中，所述传动轴邻近所述刚性球的一端为尖端。
  7. 根据权利要求1所述的提取组件，其中，所述提取组件还包括旋柄，所述旋柄垂直设置于所述传动轴远离所述刚性球的一端。
  8. 一种坩埚提取装置，其中，所述坩埚提取装置包括提取组件，用于提取具有开口的容器，其中，所述提取组件包括传动轴、至少两个刚性球及承载所述刚性球的支撑件，所述至少两个刚性球中的两个分设于所述传动轴的相对两侧，且两个刚性球的直径位于所述传动轴的同一条直径上，所述传动轴可沿垂直于所述容器开口的方向往返运动，其中，所述传动轴沿第一方向移动时传动所述刚性球，所述两个刚性球的径向尺寸大于所述容器的开口尺寸，所述传动轴沿与第一方向相反的第二方向移动时与所述刚性球脱离接触，所述两个刚性球的径向尺寸可小于所述容器的开口尺寸。
  9. 根据权利要求8所述的坩埚提取装置，其中，所述刚性球的数量为四个，四个所述刚性球两两分组设置，且任一组的两个刚性球的直径位于所述传动轴的同一条直径上。
  10. 根据权利要求8所述的坩埚提取装置，其中，所述刚性球的截面呈圆形或椭圆形。
  11. 根据权利要求9所述的坩埚提取装置，其中，所述支撑件为套筒，所述套筒包括筒壁及与所述筒壁连接且朝向所述套筒中心延伸的多个延伸部，所述多个延伸部在套筒的延伸方向上分两层设置，所述刚性球夹设于两层延伸部之间，且可沿所述套筒的径向往返运动。
  12. 根据权利要求11所述的坩埚提取装置，其中，所述传动轴插置于所述套筒的筒壁内，且两者通过螺纹实现套合。
  13. 根据权利要求9所述的坩埚提取装置，其中，所述传动轴邻近所述刚性球的一端为尖端。
  14. 根据权利要求8所述的坩埚提取装置，其中，所述提取组件还包括旋柄，所述旋柄垂直设置于所述传动轴远离所述刚性球的一端。
  15. 一种坩埚提取方法，其中，所述坩埚提取方法包括：
    提供一提取组件，所述提取组件包括传动轴、至少两个刚性球及承载所述刚性球的支撑件，所述至少两个刚性球中的两个分设于所述传动轴的相对两侧，且两个刚性球的直径位于所述传动轴的同一条直径上，所述传动轴可沿垂直于所述坩埚开口的方向往返运动；
    将所述支撑件的一端和所述刚性球插置于所述坩埚中；
    沿第一方向移动所述传动轴以传动所述刚性球，使得所述两个刚性球的径向尺寸大于所述坩埚的开口尺寸；
    保持所述两个刚性球的径向尺寸大于所述坩埚的开口尺寸，并沿与第一方向相反的第二方向移动所述提取组件直至取出所述坩埚。
  16. 根据权利要求15所述的坩埚提取方法，其中，在取出所述坩埚之后，所述坩埚提取方法还包括：
    沿所述第二方向移动所述传动轴以使所述传动轴与所述刚性球脱离接触，所述两个刚性球的径向尺寸小于所述容器的开口尺寸，并将所述支撑件的一端和所述刚性球从所述坩埚被取出。
PCT/CN2018/116639 2018-09-27 2018-11-21 提取组件及坩埚提取装置、坩埚提取方法 Ceased WO2020062508A1 (zh)

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