WO2020062406A1 - Appareil d'imagerie de tomographie par cohérence optique et procédé basé sur un micro-dispositif miroir numérique - Google Patents

Appareil d'imagerie de tomographie par cohérence optique et procédé basé sur un micro-dispositif miroir numérique Download PDF

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Publication number
WO2020062406A1
WO2020062406A1 PCT/CN2018/113061 CN2018113061W WO2020062406A1 WO 2020062406 A1 WO2020062406 A1 WO 2020062406A1 CN 2018113061 W CN2018113061 W CN 2018113061W WO 2020062406 A1 WO2020062406 A1 WO 2020062406A1
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Prior art keywords
light
sample
coherence tomography
fiber coupler
optical coherence
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PCT/CN2018/113061
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English (en)
Chinese (zh)
Inventor
苏胜飞
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深圳市太赫兹科技创新研究院
深圳市太赫兹科技创新研究院有限公司
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Publication of WO2020062406A1 publication Critical patent/WO2020062406A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods

Definitions

  • the invention relates to the field of optoelectronic technology, in particular to an optical coherence tomography imaging device based on a digital micromirror device and an optical coherence tomography method based on a digital micromirror device using the optical coherence tomography imaging device.
  • Optical coherence tomography is an emerging imaging technology in the past decade. It has attracted more and more attention because of its advantages such as high resolution, no damage, and non-contact measurement.
  • This imaging technology uses the basic principle of a weak coherent optical interferometer. Its core components are a broadband light source and a Michelson interferometer. During the signal acquisition process, coherent light from a broadband light source is divided into two parts in the Michelson interferometer. One is The reference light is reflected by the detector, and the other part enters the sample as the detection light. The reflected light or scattered light at different sample depths forms an interference spectrum with the reference light. The detected interference spectrum is analyzed to obtain the depth information of the sample. Or two-dimensional scanning of the sample to obtain the final three-dimensional information of the sample.
  • the laser galvanometer In the OCT scanning imaging system, two-sided laser galvanometer reflection is usually used to achieve two-dimensional scanning.
  • the laser galvanometer consists of an XY optical scanning head, an electronic drive amplifier, and an optical reflecting lens.
  • the signals provided by the computer control computer controller pass through The driving amplifier circuit drives the optical scanning head, thereby controlling the deflection of the laser beam in the XY plane.
  • This method is actually an analog signal, and the optical scanning head has problems such as gain error and repeatability error during scanning.
  • the object of the present invention is to provide an optical coherence tomography imaging device based on a digital micromirror device, which aims to solve the poor accuracy of scanning results caused by the optical scanning head's gain error and repeatability error during scanning in the prior art. technical problem.
  • An optical coherence tomography apparatus based on a digital micromirror device including:
  • An optical fiber coupler configured to divide the light emitted by the broadband light source into reference light and sample light and send the light separately;
  • a reference arm for receiving and collimating the reference light and making the collimated reference light return to the reference return light along the original path to the fiber coupler, including a reference light for receiving and collimating the reference light
  • a first collimating lens and a reflector for reflecting the collimated reference light toward the first collimating lens, the reference return light and the reference light being coupled at the first collimating lens;
  • a sample arm for receiving, collimating the sample light and reflecting the collimated sample light to the sample surface, so that the sample light reaching the sample surface becomes a Sample return light, the reference return light interferes with the sample return light in the fiber coupler;
  • the sample arm includes a digital micromirror device for reflecting the collimated sample light toward the sample;
  • a micromirror controller for controlling a switch of the digital micromirror device
  • a detector connected to the fiber coupler
  • a computer connected to the detector.
  • the optical coherence tomography apparatus further includes a reference arm control mechanism, and the reference arm control mechanism includes a first adjustment component for adjusting a distance between the first collimating lens and the reflector, and for adjusting The second adjusting component of the tilt angle of the reflector.
  • the sample arm further includes a second collimating lens for receiving and collimating the sample light and an imaging lens for focusing the sample light reflected by the digital micromirror device onto the sample surface,
  • the digital micromirror device is disposed between the second collimating lens and the imaging lens and is located on a side of the imaging lens facing away from the sample.
  • an included angle between the reflected light of the digital micromirror device and the incident light of the digital micromirror device is 90 degrees.
  • the broadband light source is a super-radiation light emitting diode, a femtosecond laser, or a light emitting diode.
  • the detector is a spectrometer, a charge coupled element or a photodiode.
  • optical fiber coupler is a 2 ⁇ 2 single-mode optical fiber coupler.
  • a splitting ratio of the optical fiber coupler is 50:50.
  • the optical coherence tomography imaging device provided by the present invention has the beneficial effect that, compared with the prior art, an optical coherence tomography imaging device based on a digital micromirror device provided by the present invention includes a broadband light source, a fiber coupler, and a reference arm.
  • Sample arm, micromirror controller, detector, and computer where the sample arm includes a digital micromirror device for reflecting sample light, the digital micromirror device is a digital micromirror device chip with millions of tiny microchips on it Three-dimensional information of the sample can be obtained after each mirror is scanned.
  • the structure is simple and easy to implement, avoids the scanning error generated by the optical scanning head, and is controlled by the pure digital signal of the digital micromirror device. Stability and accuracy of sample scan imaging results.
  • the optical coherence tomography method provided by the present invention has the beneficial effect that, compared with the prior art, an optical coherence tomography method based on a digital micromirror device proposed by the present invention uses the above-mentioned optical coherence tomography device,
  • the sample arm scans the sample through a plurality of tiny mirrors on the digital micromirror device. After each mirror is scanned, the three-dimensional information of the sample can be obtained.
  • the imaging method is controlled by the pure digital signal of the digital micromirror device. Finally, a high-precision image of the sample is obtained, the control is simple and easy to operate, and the sample scanning efficiency is high.
  • FIG. 1 is a schematic structural diagram of an optical coherence tomography apparatus based on a digital micromirror device according to an embodiment of the present invention.
  • first and second are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as “first” and “second” may explicitly or implicitly include one or more of the features.
  • connection shall be understood in a broad sense unless otherwise specified and defined, for example, they may be fixed connections, detachable connections, or integrated; they may be mechanical
  • connection may also be an electrical connection; it may be a direct connection or an indirect connection through an intermediate medium, which may be the internal connection of the two elements or the interaction between the two elements.
  • intermediate medium which may be the internal connection of the two elements or the interaction between the two elements.
  • FIG. 1 it is a preferred embodiment provided by the present invention.
  • An optical coherence tomography apparatus based on a digital micromirror device 8 provided in this embodiment includes a broadband light source 1, a fiber coupler 3, a reference arm 4, a sample arm, a micromirror controller 12, a detector 2, and a computer 11
  • the optical fiber coupler 3 is configured to receive the light emitted by the broadband light source 1 and divide it into reference light and sample light.
  • the broadband light source 1 may be a super-radiation light emitting diode capable of emitting low-coherent light. It is a femtosecond laser or a light-emitting diode, and is not limited here.
  • the broadband light source 1 may be connected to an input end of a fiber coupler 3 through an optical fiber, where the fiber coupler 3 is, but is not limited to, a splitting ratio of 50:50. 2 ⁇ 2 single-mode fiber coupler 3; the reference arm 4 is first used to receive and collimate the reference light, and then the collimated reference light becomes the reference return light that is returned to the fiber coupler 3 along the original path.
  • the reference light needs to be collimated, otherwise, the intensity of the reference return light returned to the fiber coupler 3 is too weak to generate interference light with a sufficient intensity with the sample return light; meanwhile, the sample arm receives and collimates the sample light. Rear, The collimated sample light is reflected to the surface of sample 10.
  • the surface of sample 10 will reflect or scatter the sample light, and the sample arm will receive the light reflected or scattered by the surface of sample 10 and turn it back to the fiber coupling along the original path.
  • the sample return light of the optical fiber coupler 3 interferes with the reference return light and the sample return light in the fiber coupler 3. It should be noted that the sample light also needs to be collimated, otherwise the sample return light intensity returned to the fiber coupler 3 is too strong.
  • the role of sample light is to reflect on the sample 10 through the digital micromirror device 8 for sampling; specifically, the sample arm includes a digital micromirror device 8 (Digital Micromirror Device 8) for reflecting the collimated sample light toward the sample 10 (DMD for short), the digital micromirror device 8 here is a type of optical switch, and the rotary switch 6 is used to open and close the optical switch. There are millions of tiny mirrors 6, each of which is 6 After the scanning is completed, the three-dimensional information of the sample 10 can be obtained; the micromirror controller 12 is used to control the on and off of the digital micromirror device 8. Specifically, the sample light comes out of the optical fiber and is directed toward the six mirrors of the digital micromirror device 8.
  • the micromirror controller 12 controls the digital micromirror device 8 to open, light can enter the optical fiber at the other end through a symmetrical optical path; when the digital micromirror device 8 needs to be closed, the micromirror controller 12 will control the digital micromirror device 8
  • the mirror 6 generates a small rotation. After the light is reflected, it cannot enter the other end of the symmetry, and the optical switch is turned off.
  • the input end of the detector 2 is connected to the optical fiber coupler 3.
  • the detector 2 can be selected as Spectrometer, detector 2 can also be a charge-coupled element or a photodiode, which is not limited here; computer 11 is connected to the output of detector 2, and computer 11 is but is not limited to a host computer (see Figure 1, Figure 1 The middle arrows show the optical paths of the reference light, sample light, reference return light, and sample return light).
  • the structure of the optical coherence tomography imaging device is simple and easy to implement, avoiding scanning the sample 10 by using an optical scanning head, thereby reducing the gain error or repeatability error of the analog signal during scanning, and purely digitizing the digital micromirror device 8
  • the signal control improves the stability and accuracy of the 10-scan imaging results of the sample.
  • the reference arm 4 includes a first collimating lens 5 for receiving and collimating reference light, and a reflection for directing the collimated reference light toward the first collimating lens 5.
  • Mirror 6 is the first collimator lens 5 of the reference arm 4 at the exit of one of the optical fibers of the fiber coupler 3 (hereinafter referred to as the reference arm 4 fiber).
  • the light is collimated.
  • the collimated reference light is reflected by the reflector 6 and recoupled with the first collimator lens 5 to enter the optical fiber of the reference arm 4 again.
  • the distance between a collimating lens 5 can adjust the light intensity and the optical path of the reference return light.
  • the optical coherence tomography apparatus further includes a reference arm control mechanism (not shown), and the reference arm control mechanism includes a first adjustment component (not shown) for adjusting a distance between the first collimator lens 5 and the reflector 6. And a second adjustment component (not shown) for adjusting the inclination angle of the reflector 6; specifically, the first adjustment component may include a working platform, two sliding members, and two corresponding one-to-one correspondence with the two sliding members, respectively. The driving component, the two sliding members are arranged on the working platform and are independent of each other.
  • the two driving components respectively control the two sliding members to slide on or off the working platform; more specifically, the two sliding members are the first sliding members
  • the two sliding members are the first sliding members
  • the second slider the first collimating lens 5 is fixedly mounted on the first slider
  • the reflecting mirror 6 is fixedly mounted on the second slider
  • the two driving components are respectively the first components for controlling the sliding of the first slider.
  • a driving component and a second driving component for controlling the sliding of the second slider so that the position of the first collimating lens 5 can be changed by the first driving component, and the position of the mirror 6 can be changed by the second driving component
  • the first drive component and the second drive component can be electric actuators, and the specific structural composition is not limited here; of course, the two slides and two drive components described above can also be replaced with one slide and used for A driving component that controls the movement of the slider, that is, only one of the first collimating lens 5 and the reflecting mirror 6 needs to be controlled.
  • the specific movement of the first collimating lens 5 or the reflecting mirror 6 is not the only one here.
  • the optical path difference between the sample return light and the reference return light can be adjusted. Only when this optical path difference is within a few millimeters can it be measured, and the light intensity can be The adjustment is achieved by rotating the angle of the mirror 6, and its fundamental role is to adjust the light intensity of the interference spectrum.
  • the structure of the reference arm control mechanism is simple and easy to implement, which helps to improve the accuracy of the interference spectrum, the depth information of the sample 10, and the three-dimensional information of the sample 10.
  • the sample 10 has high scanning efficiency.
  • the sample arm further includes a second collimating lens 7 for receiving and collimating the sample light, and a lens for focusing the sample light reflected by the digital micromirror device 8 onto the surface of the sample 10.
  • the imaging lens 9 and the digital micromirror device 8 are disposed between the second collimating lens 7 and the imaging lens 9 and located on the side of the imaging lens 9 facing away from the sample 10; specifically, another optical fiber (hereinafter referred to as a sample) of the optical fiber coupler 3
  • the second collimator lens 7 of the sample arm is at the exit of the arm fiber, and its role is to collimate the sample light output from the sample arm fiber; it is located on the side of the second collimator lens 7 facing away from the fiber of the sample arm.
  • Micromirror device 8 the collimated sample light is used to illuminate the digital micromirror device 8.
  • Each tiny mirror 6 on the digital micromirror device 8 can be flipped independently, and the micromirror controller 12 can control each Each mirror 6 is flipped to realize the scanning function.
  • the digital mirror device 8 corresponding to the scanning point is controlled to the mirror 6 at the ON position, and all other numbers Micromirror equipment 8
  • the mirrors are all in the OFF state (optionally, the mirror 6 is “ON” when the angle is +12 degrees, and the mirror 6 is “OFF” when the angle is -12 degrees); in the digital micromirror device
  • An imaging lens 9 is provided after 8 to focus the sample light reflected by the digital micromirror device 8 on the surface of the sample 10. In the system operation, the imaging lens 9 actually images the digital micromirror device 8 on the sample 10.
  • the angle between the reflected light of the digital micromirror device 8 and the incident light of the digital micromirror device 8 is 90 degrees. This structure is beneficial to the digital micromirror device 8, the second collimating lens 7, and The placement of the imaging lens 9 and the construction of the sample arm facilitate scanning of the sample 10.
  • optical coherence tomography imaging method based on the digital micromirror device 8 proposed by the present invention adopts the above-mentioned optical coherence tomography imaging device and includes the following steps:
  • the fiber coupler 3 separates the light emitted by the broadband light source 1 into a reference light and a sample light;
  • the reference arm 4 changes the reference light to the reference return light returned to the fiber coupler 3;
  • the sample arm reflects the sample light to the surface of the sample 10 through the digital micromirror device 8 and changes the sample light reaching the surface of the sample 10 to the sample return light returned to the fiber coupler 3;
  • the reference return light and the sample return light interfere in the fiber coupler 3 to form interference light;
  • the interference light in the fiber coupler 3 is detected by the detector 2 to form a spectrally resolved interference pattern
  • the computer 11 receives and processes the spectral analysis interference pattern, and then displays the sample 10 image.
  • the sample arm scans the sample 10 through a plurality of tiny mirrors 6 on the digital micromirror device 8. After each mirror 6 is scanned, the three-dimensional information of the sample 10 can be obtained; the imaging method uses digital The pure digital signal control of the micromirror device 8 finally acquires a high-precision image of the sample 10, the control is simple and easy to operate, and the sample 10 has high scanning efficiency.
  • the present invention proposes a method for performing OCT scanning by using a digital micromirror device 8 for a two-dimensional scanning implementation manner of spectral analysis OCT, thereby obtaining three-dimensional information of the sample 10.
  • the broadband light source 1 provides weakly coherent light to the system, and the fiber coupler 3 is used to divide the coherent light into reference light and sample light and receive interference light.
  • the reference arm 4 here is used for adjustment The difference between the optical path length of the sample light and the reference light.
  • the reference arm 4 includes a first collimating lens 5 and a reflecting mirror 6, and a first collimating lens in the sample arm is used for collimating the sample light.
  • a digital micromirror device 8 is used for The collimated sample light is reflected and scanned, and the imaging lens 9 focuses the sample light from the digital micromirror device 8 on the sample 10.
  • the second collimating lens 7, the digital micromirror device 8, and the imaging lens 9 are also used as the light return system to receive the sample light.
  • the low-coherent light from the broadband light source 1 is divided into two beams through a 2x2 fiber coupler 3.
  • One of the beams is reference light.
  • the role of the reference light is to interfere with the sample light to generate an interference spectrum.
  • the reference light enters the reference arm. 4.
  • the first collimating lens 5 is provided at the fiber exit of the reference arm 4.
  • the first collimating lens 5 collimates the reference light emitted from the optical fiber of the reference arm 4.
  • the collimated reference light after collimation is reflected by the reflector 6 And the first collimating lens 5 are recoupled into the optical fiber of the reference arm 4; the other beam is sample light, the sample light passes through the sample arm, and the sample light also needs to pass through the second collimating lens 7 for collimation.
  • the micro-mirror 6 on one side can reflect the collimated sample light onto the sample 10 for sampling.
  • the coherent spectra of the sampled sample return light and the reference return light pass through the fiber coupler 3, collected by the spectrometer, and then processed by the host computer. After the depth information of a sample 10 is scanned by all the small mirrors 6 of the entire digital micromirror device 8, the three-dimensional information of the sample 10 can finally be obtained.

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Abstract

La présente invention concerne un appareil d'imagerie de tomographie par cohérence optique basé sur un micro-dispositif miroir numérique et un procédé de tomographie par cohérence optique basé sur un micro-dispositif miroir numérique et mettant en œuvre l'appareil d'imagerie de tomographie par cohérence optique. L'appareil d'imagerie comprend une source de lumière large bande (1), un coupleur de fibre optique (3), un bras de référence (4), un bras d'échantillon, un contrôleur de micro miroir s(12), un détecteur (2), et un ordinateur (11). Le coupleur de fibre optique (3) est utilisé pour recevoir la lumière émise par la source de lumière large bande (1) et diviser la lumière en lumière de référence et lumière d'échantillon, le bras d'échantillon comprenant un micro-dispositif miroir numérique (8) pour réfléchir la lumière d'échantillon, le micro-dispositif miroir numérique (8) étant muni de millions de micro miroirs réfléchissants (6), et des informations tridimensionnelles d'un échantillon (10) peuvent être obtenues après qu'il soit balayé par tous les miroirs réfléchissants (6). L'appareil d'imagerie est commandé par des signaux numériques purs du micro-dispositif miroir numérique, l'erreur de balayage générée à l'aide d'une tête de balayage optique est évitée, et la stabilité et la précision du résultat d'imagerie basé sur le balayage de l'échantillon sont améliorées. Le procédé mettant en œuvre l'appareil d'imagerie est commandé de manière simple et fonctionne facilement, et présente une efficacité élevée d'imagerie d'échantillon.
PCT/CN2018/113061 2018-09-30 2018-10-31 Appareil d'imagerie de tomographie par cohérence optique et procédé basé sur un micro-dispositif miroir numérique WO2020062406A1 (fr)

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CN201811158366.6A CN109115723A (zh) 2018-09-30 2018-09-30 基于数字微镜设备的光学相干层析成像装置及成像方法
CN201811158366.6 2018-09-30

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CN112857410A (zh) * 2021-01-12 2021-05-28 中国科学院微电子研究所 一种数字化分布式干涉成像系统
CN113116303A (zh) * 2021-04-16 2021-07-16 佛山科学技术学院 一种甲襞微循环血管三维扫描分析系统及方法
CN113267142A (zh) * 2021-05-17 2021-08-17 东北大学秦皇岛分校 一种表面轮廓成像装置及成像方法
CN113267142B (zh) * 2021-05-17 2022-08-19 东北大学秦皇岛分校 一种表面轮廓成像装置及成像方法

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