WO2020046191A1 - Réseau de nanofils piézorésistifs servant à la détection de mouvement - Google Patents

Réseau de nanofils piézorésistifs servant à la détection de mouvement Download PDF

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Publication number
WO2020046191A1
WO2020046191A1 PCT/SE2019/050796 SE2019050796W WO2020046191A1 WO 2020046191 A1 WO2020046191 A1 WO 2020046191A1 SE 2019050796 W SE2019050796 W SE 2019050796W WO 2020046191 A1 WO2020046191 A1 WO 2020046191A1
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Prior art keywords
nws
piezoresistive
liquid
gas
motion
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Application number
PCT/SE2019/050796
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English (en)
Inventor
Zhen Zhang
Shili Zhang
Qitao HU
Si CHEN
Original Assignee
Zhen Zhang
Shili Zhang
Hu Qitao
Chen Si
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Filing date
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Application filed by Zhen Zhang, Shili Zhang, Hu Qitao, Chen Si filed Critical Zhen Zhang
Publication of WO2020046191A1 publication Critical patent/WO2020046191A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G01L1/183—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material by measuring variations of frequency of vibrating piezo-resistive material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/205—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using distributed sensing elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites

Definitions

  • the present invention generally relates to motion sensing in or of a liquid or gas, and more particularly to a piezoresistive nanowire array device and a corresponding method for sensing motion in or of the liquid or gas.
  • Drug susceptibility tests prior to introduction of drug treatment can ensure correct selection of drugs for precise treatment. It can also prevent the development of drug resistance caused by abuse of the latest version of drugs.
  • a common way to test the drug susceptibility is to use bacteria/cell growth or behavior as an indicator for the presence of different drugs (such as the classic phenotypic antibiotic resistance profiling methodology via disk diffusion tests).
  • the traditional ways to exam the cell growth in colonies in culture media in the presence of different drugs usually take more than two days. They often fail to guide precise medical treatment in the early, often critical, stages of disease development. In addition, it may not be feasible to collect a large number of cells from a patient.
  • a device for sensing motion in or of a liquid or a gas comprising at least one array of parallel and spaced-apart piezo resistive nanowires (NWs) and at least two terminal contacts, where at least one of the piezoresistive NWs is suspended between and connected to the terminal contacts which are configured to be biased with an external voltage so that a current can flow through the piezoresistive NWs.
  • NWs piezo resistive nanowires
  • the device is configured such that motion in or of the liquid or gas, and / or motion of particles or biological bodies in the liquid or gas causes vibrations of the piezoresistive NWs, causing corresponding fluctuations in the resistance of the piezoresistive NWs and thereby fluctuations in the current flowing through the piezoresistive NWs when the terminal contacts are biased with an external voltage.
  • a method for sensing motion in or of a liquid or a gas comprises providing a device comprising at least one array of parallel and spaced-apart piezoresistive NWs and at least two terminal contacts, where at least one of the piezoresistive NWs is suspended between and connected to the terminal contacts, the device being configured such that motion in or of the liquid or gas, and/or motion of particles or biological bodies in the liquid or gas causes vibrations of the piezoresistive NWs, biasing the terminal contacts with an external voltage so that a current flows through the piezoresistive NWs, and monitoring fluctuations in the resistance of or in the current flowing through the piezoresistive NWs where the fluctuations in the current and resistance are caused by the corresponding vibrations of the piezoresistive NWs.
  • a method for drug susceptibility testing comprising sensing motion and activity of bacteria, single cells or single-cell organisms present in a liquid or gas by sensing motion in the liquid or gas according to the above method, with and without presence of a drug to be tested, comparing the motion and activity of the bacteria, single cells or single-cell organisms with and without presence of the drug to be tested and determining the susceptibility of the bacteria, single cells or single-cell organisms to the drug to be tested based on the comparison of the motion and activity of the bacteria, single cells or single-cell organisms with and without presence of the drug to be tested.
  • Measurements of motion of different particles in a liquid or gas and/or motion of the liquid or gas itself, e.g. flow rate in the liquid or gas, can be performed in real time and at a low cost with high sensitivity.
  • the measurements can utilize a simple two-terminal current-voltage configuration, without involvement of any complicated components.
  • Fig. 1 is a schematic illustration of a sensor chip comprising a suspended piezoresistive NW array device for sensing motion in or of a liquid or a gas, and/or motion of particles or biological bodies in the liquid or gas, according to an embodiment of the present disclosure.
  • Fig. 2a is a top-down view of a suspended piezoresistive NW array device according to Fig. 1, together with schematically illustrated living, i.e. moving, bacteria/ cells, and Fig. 2b is the same device together with dead, i.e. not moving, bacteria/ cells after drug injection.
  • Fig. 3 is a schematic diagram illustrating an example of possible current fluctuations caused by the movements/ activity of bacteria/ cells with time, before and after drug injection.
  • Fig. 4a is a schematic flow diagram of an example of a process flow for fabrication of a sensor chip comprising a suspended silicon NW array device according to an embodiment of the present disclosure.
  • Fig. 4b is a schematic illustration of how each part of the sensor chip is formed during each process step of the process flow of Fig. 4a.
  • Fig. 5 is a schematic illustration of an example of an alternative design for terminal contacts of a suspended piezoresistive NW array device according to an embodiment of the present disclosure.
  • Fig. 6a is a top-down view of a silicon NW (top) and a silicon NW array (bottom) before surface smoothing according to an embodiment of the present disclosure.
  • Fig. 6b is a top-down view of a silicon NW (top) and a silicon NW array (bottom) after surface smoothing according to an embodiment of the present disclosure.
  • Fig. 7 is a top-down view of a suspended piezoresistive NW array device according to an embodiment of the present disclosure.
  • Fig. 8a is a schematic illustration of a suspended piezoresistive NW array device with a bacteria/ cell collector according to an embodiment of the present disclosure.
  • Fig. 8b is a schematic illustration of a suspended piezoresistive NW array device with a bacteria/ cell collector according to another embodiment of the present disclosure.
  • Fig. 9 is a schematic flow diagram of a method for sensing motion in or of a liquid or gas, and/or motion of particles or biological bodies in the liquid or gas, according to an embodiment of the present disclosure.
  • Fig. 10 is a schematic flow diagram of a method for drug susceptibility testing according to an embodiment of the present disclosure.
  • the present invention generally relates to motion sensing in or of a fluid, such as a liquid or gas, and more particularly to a piezoresistive nanowire array device and a corresponding method for sensing motion in or of the liquid or gas.
  • a particular area of application for the invention is drug susceptibility testing based on motion sensing of bacteria, single cells or single-cell organisms present in the fluid, as a response to introduction of drugs.
  • an“electronic ear” is designed, based on a suspended silicon nanowire (SiNW) array, using the piezoresistive properties of silicon (Si), to detect/sense motion in a fluid, such as a liquid or gas, or motion of a particle or biological body in the liquid or gas, or motion of the liquid or gas itself, e.g. to measure the flow rate of a liquid or gas.
  • the array is configured to sense motion of particles or biological bodies smaller than 1 mm.
  • the particles or biological bodies are smaller than 0.5 mm.
  • the particles or biological bodies are smaller than 0.1 mm.
  • the particles or biological bodies are larger than 9 nm.
  • the particles or biological bodies are larger than 0. 1 pm.
  • the suspended nanowire array is configured to, or used to, sense motion of biological bodies in the liquid or gas.
  • the suspended nanowire array is configured to, or used to, sense motion and/or activity of bacteria, single cells, or single-cell organisms in the liquid or gas.
  • the suspended nanowire array is configured to, or used to, sense motion and/or activity of bacteria in the liquid or gas.
  • nanowires (NWs) of other piezo resistive materials such as other semiconductors, in the same manner. The motion and activity of living bacteria/ cells can cause vibration of the piezoresistive NWs, which are suspended for better sensitivity.
  • the vibration of the NWs can easily be monitored through corresponding changes/ fluctuations in resistance of the NWs, e.g. by biasing them with an external voltage and measuring the current flowing through the NWs.
  • This brief description underlines the working principle of this testing/sensing device as a so-called “electronic ear” to monitor the motion and activity of the bacteria/cells.
  • Injection/ introduction of an effective drug can inactivate or kill bacteria/ cells, i.e. the motion of the bacteria/ cells will be reduced or stopped. This will affect the vibrations of the NWs and therefore the effect of the drug can immediately be detected from the reduced frequency and / or amplitude of the resistance or current fluctuations in the suspended piezoresistive NWs.
  • the bacteria/ cells reside in a liquid.
  • the liquid is applied to the device.
  • the suspended piezoresistive NW array device can be used to sense motion of larger biological bodies such as protozoans, e.g. parasites and / or amoebas.
  • the physical dimensions (e.g. cross-sectional dimension, length and the spacing between the NWs) of the NW array can be altered to improve the detection sensitivity.
  • the NW device measurement can utilize a simple two-terminal current-voltage configuration, without involvement of any complicated reference electrode, electrochemical cell or optics.
  • CMOS Complementary Metal Oxide Semiconductor
  • Fig. 1 is a 3D schematic illustration of a sensor chip comprising a suspended piezo resistive nanowire (NW) array device 10 (“electronic ear”) for detecting/ sensing motion in or of a liquid or a gas according to an embodiment of the present disclosure.
  • the device 10 comprises a plurality of parallel and spaced-apart piezo resistive nanowires (NWs) 12 with length L forming an array of piezo resistive NWs, the NWs extending between and being connected to two terminal contacts 1 1 , which are biased with an external voltage V so that a current I flows through the NWs.
  • the piezoresistive NWs 12 in this embodiment are suspended at their ends, i.e.
  • each end of a NW is attached or integrated with a terminal contact but the rest of the NW is hanging freely. In some embodiments some of the NWs are not attached with their ends to the terminal contacts, as further described below.
  • the NWs 12 are straight and extending along a plane of the NW array. As illustrated in the embodiment of Fig. 1 the NWs 12 can be fabricated on the surface of a semiconductor substrate 100 (see below) and in this case the NWs can be parallel with the surface of the substrate 100 and suspended above the surface of the substrate 100.
  • the cross-section of the NWs is > 1 nm. The cross-section of the NWs is furthermore ⁇ 100 pm. In another embodiment the cross-section of the NWs is ⁇ 1 pm.
  • the length L of the NWs is > 10 nm in an embodiment.
  • the length L of the NWs is furthermore ⁇ 1 mm. In another embodiment the length L of the NWs is ⁇ 100 pm.
  • the separation between the NWs is > 10 nm.
  • the separation between the NWs is furthermore ⁇ 1 cm.
  • the separation between the NWs is ⁇ lmm. In another embodiment the separation between the NWs is ⁇ 100 pm.
  • the sensor chip is preferably provided with at least one microfluidic channel configured to carry a fluid, preferably a liquid, to the NW array for the detection of motion in the fluid or liquid.
  • a fluid preferably a liquid
  • the micro fluidic channel comprises an inlet to allow inflow of the fluid, and an outlet to permit outflow of the fluid.
  • microfluidic channels deliver a single type of drug to each individual electronic ear for a respective susceptibility test. This can rapidly generate the susceptibility profile of the tested drugs to a certain disease. Analysis of the current fluctuation spectrum in the frequency domain can also reveal more detailed information of the bacteria/ cells, such as species and concentration of the bacteria/cells.
  • Fig. 2a is a top-down view of a suspended piezoresistive NW array device according to Fig. 1, together with schematically illustrated living bacteria, single cells or single-cell organisms, and Fig. 2b is the same NW array device together with dead bacteria/cells after drug injection.
  • the living bacteria/ cells are moving and thereby causing the suspended nanowires to move/ vibrate, as illustrated by the dashed lines.
  • the bacteria/ cells are not moving anymore since they have been killed/ immobilized by an injected drug, and the nanowires are therefore also not moving/ vibrating.
  • Fig. 3 is a schematic diagram illustrating an example of possible/plausible fluctuations in current I (y-axis) of the detected movements/ activity for the bacteria/ cells with time t (x-axis) before and after a time point t d for drug injection (not actual measurements but for illustration only).
  • the movements of the bacteria/ cells can be detected by measuring the fluctuations in resistance or current flow in the nanowires.
  • the amplitude of the variations in current is expected to be smaller after the time point t d for drug injection.
  • Figs. 2a and 2b are shown directly above Fig. 3 for illustrative purposes, with Fig. 2a (living bacteria/ cells) positioned to the left of t d and Fig.
  • the frequency spectrum of the variations can also be analyzed. Patterns in frequency may be used to classify a species or its properties by comparing with a library of measured frequency responses.
  • Fig. 4a is a schematic flow diagram of an example of a process flow for fabrication of a suspended SiNW array device according to an embodiment of the present disclosure.
  • the process comprises a step S I of providing a Silicon- On-Insulator (SOI) wafer/ substrate, a step S2 of doping the Si layer to a target doping level, a step S3 of source/ drain (S/D) and SiNW channel patterning by use of e.g. lithography technique, a step S4 of Si and buried oxide (BOX) etching with the defined pattern and SiNW surface smoothing and a step S5 of S/D metallization and sensor surface passivation for an efficient bacteria/ cells movement detection.
  • SOI Silicon- On-Insulator
  • the process flow is not limited to the flow illustrated in Fig. 4a.
  • Fig. 4b is a schematic illustration of how the suspended SiNW array device is formed during each process step in the process flow in Fig. 4a.
  • a top-down view of the device is shown to the left, and a side view is shown to the right in Fig. 4b.
  • Step S I is illustrated with a wafer/ substrate 100 consisting of an Si layer 1 10 on top of a BOX layer 120 and bulk Si 1 10’.
  • Performing step S2 of doping in the top Si layer results in a layer 1 10” of n-type or p-type doped Si.
  • the target doping level of the doped Si layer is less than 10 20 /cm 3 in an embodiment.
  • the target doping level is furthermore higher than 0.
  • the target doping level is higher than 10 10 /cm 3 .
  • Patterning with a Hydrogen silsesquioxane (HSQ) layer 140 in step S3 results in a nanowire channel pattern connected with large S and D contact pads.
  • HSQ Hydrogen silsesquioxane
  • BOX wet etching to suspend the SiNWs
  • surface smoothing in step S4
  • a suspended SiNW array device 10 is obtained, and finally in step S5 the S and D contacts are metallized followed by a surface passivation to insulate the device from the liquid in the samples.
  • the whole device 10 should be covered by a thin passivation layer 130, and an additional passivation structure 130’ may also be used.
  • the passivation layer and/or structure may be made from e.g. an oxide or a photoresist.
  • FIG. 5 illustrates another example of contact design for a suspended piezoresistive NW array device 10 where one terminal shares a common contact 1 1 while the other terminal has separate contacts 1 G for each NW.
  • This latter design makes the NWs in the electronic ear individually addressable.
  • the figure illustrates how living bacteria/ cells 1 are causing two of the nanowires to vibrate/move (the vibration/ movement is illustrated with dashed lines), where the vibration/ movement is detected by biasing each nanowire with a respective voltage V l V2, ... and measuring the respective currents h, D, ... flowing through the nanowires, as described above.
  • Fig. 6a and 6b are top-down views of an SiNW (top part) and an SiNW array (bottom part) before (Fig. 6a) and after (Fig. 6b) surface smoothing to remove the defects on the SiNW surface according to an embodiment of the present disclosure.
  • a suspended piezoresistive NW array device may also comprise more than one piezoresistive NW array, where the NW arrays are arranged perpendicularly to each other to form a net structure.
  • Fig. 7 is a top-down view of a particular design of a suspended piezoresistive NW array device 10’ according to an embodiment of the present disclosure.
  • a first suspended NW array with piezoresistive NWs 12 extending between terminal contacts 1 1 is arranged perpendicularly to a second suspended NW array with piezoresistive NWs 12’ extending between support pads 14 such that the NWs of the first and second arrays are crossing/intersecting each other perpendicularly, forming a suspended piezoresistive NW net /matrix/ web.
  • This net/matrix structure can prevent the collapse of the suspended NWs.
  • the net/matrix structure further improves the strength of the device, and its resistance to impact damage.
  • the current measurement can in an embodiment be performed between the terminal contacts 11, while the support pads 14 are only used as a supporting structure, located at the ends of the NWs.
  • the support pads 14 are provided with electrical contacts allowing measurement of the piezoelectric resistance of the nanowires.
  • the support pads can then also be used as terminal contacts similar to the terminal contacts 1 1.
  • the support pads 14 and the terminal contacts 1 1 can in an embodiment be made identical.
  • the measurements of the piezoelectric resistance can be done between any of the contacts.
  • the NWs 12’ of the second suspended NW array are straight, parallel with the surface of the substrate 100 and suspended above the surface of the substrate 100.
  • the cross-section of the NWs of the second NW array illustrated in Fig. 7 is > 1 nm.
  • the cross-section of the NWs is furthermore ⁇ 100 pm.
  • the cross-section of the NWs is ⁇ 1 pm.
  • the length L of the NWs is > 10 nm in an embodiment.
  • the length L of the NWs is furthermore ⁇ 1 mm.
  • the length L of the NWs is ⁇ 100 pm.
  • the separation between the NWs is > 10 nm.
  • the separation between the NWs is furthermore ⁇ 1 cm.
  • the separation between the NWs is ⁇ 1mm.
  • the separation between the NWs is ⁇ 100 pm.
  • the dimensions of the first and the second NW arrays do not have to be identical.
  • multiple piezoresistive NW arrays or NW nets can be arranged on top of each other to form a 3 -dimensional multi-layer structure, i.e. the arrays and/or nets are stacked in a direction perpendicular to the planes of the NW arrays and/or nets such that the planes of the NW arrays and/or nets are parallel with each other.
  • Such a configuration can increase the capture cross-sections or volumes of the moving particles or bodies.
  • the separation between the layers is > 10 nm.
  • the separation between the layers is furthermore ⁇ 500 pm. Fig.
  • FIG. 8a is a schematic illustration of a suspended piezoresistive NW array device 10’ or“electronic ear” with a bacteria/cell collector design according to an embodiment of the present disclosure.
  • a suspended piezoresistive NW array device 10’ with a net structure as that illustrated in Fig. 7 is placed in-between a pair of metal electrodes 13.
  • Alternating current (AC) electric signals applied on the metal electrodes 13 can increase the detection sensitivity by generating a nonuniform electric field in the liquid or gas to collect bacteria/cells in the area close to the NW array/matrix between the metal electrodes 13.
  • AC Alternating current
  • Such a bacteria/cell collector design may also be used together with piezoresistive NW array devices 10 with only parallel NWs as those described in connection with Figs. 1-6.
  • the suspended piezoresistive NW array device 10’ with a net structure can also be provided with further support structures in the form of supporting pads/islands 14’ to prevent the net from collapsing.
  • the support islands should preferably be positioned at the intersections between the perpendicularly crossing NWs, as illustrated in Fig. 8a. Support structures such as these islands will increase the stability of the piezoresistive net, but there is also a risk that the sensitivity of the device will be decreased, since the NWs will be more rigid and therefore more difficult to be vibrated by motion in the liquid/gas.
  • Fig. 8b is a schematic illustration of a suspended piezoresistive array device 10’ with a bacteria/ cell collector design according to another embodiment of the present disclosure.
  • some of the NWs are not attached at their ends to the terminal contacts 1 1 or the support pads 14; instead these NWs are only supported at their intersections with perpendicularly crossing NWs.
  • at least one of the ends of at least one of the NWs 12 is unattached to the terminal contacts 11 and to the support pads 14. This will increase the sensitivity of the piezoresistive NW array device since the NWs will be easier to vibrate.
  • the net structure illustrated in Fig. 8b may also be provided with supporting islands 14’ as those illustrated in Fig. 8a, to prevent the net from collapsing.
  • at least one NW 12 must be extending between and connected to the terminal contacts 11.
  • the piezoresistive NW array devices illustrated in Fig. 8a and 8b may also be realized without the bacteria/ cell collector design.
  • Fig. 9 is a schematic flow diagram of a method for sensing motion of in or of a liquid or a gas according to an embodiment of the present invention.
  • the method comprises a step S10 of providing a device comprising at least one array of parallel and spaced-apart piezoresistive NWs and at least two terminal contacts, where at least one of the piezoresistive NWs is suspended between and connected to the terminal contacts, and the device is configured such that motion in or of the liquid or gas and/or motion of particles or biological bodies in the liquid or gas causes vibrations of the piezoresistive NWs, a step S20 of biasing the terminal contacts with an external voltage so that a current flows through the piezoresistive NWs, and a step S30 of monitoring fluctuations in the resistance of or in the current flowing through the piezoresistive NWs where the fluctuations in the resistance and current are caused by the corresponding vibrations of the piezoresistive NWs.
  • the step S30 of monitoring fluctuations in the resistance or current comprises measuring the amplitude of variations in the resistance or current and/or analyzing the frequency spectrum of the variations in the resistance or current.
  • Fig. 10 is a schematic flow diagram of a method for drug susceptibility testing according to an embodiment of the present invention.
  • the method comprises a step S100 of sensing motion and activity of bacteria, single cells or single cell organisms present in a liquid or a gas by sensing motion in the liquid or gas according to the method of Fig. 9, with and without presence of a drug to be tested, a step S200 of comparing the motion and activity of the bacteria, single cells or single-cell organisms with and without presence of the drug to be tested, and a step S300 of determining the susceptibility of the bacteria, single cells or single-cell organisms to the drug to be tested based on the comparison of the motion and activity of the bacteria, single cells or single-cell organisms with and without presence of the drug to be tested.
  • drug susceptibility testing can be done rapidly and at low cost with high sensitivity, by using a suspended piezoresistive nanowire array device for detecting motion of bacteria, cells or single-cell organisms as a response to the introduction of the drugs in question.
  • the invention may also be used in other applications such as measuring flow rate and / or fluctuations in flow rate in a fluid such as a liquid or gas in real time at a low cost and with high sensitivity.
  • the embodiments described above are merely given as examples, and it should be understood that the proposed technology is not limited thereto. It will be understood by those skilled in the art that various modifications, combinations and changes can be made to the embodiments without departing from the present scope as defined by the appended claims. In particular, different part solutions in the different embodiments can be combined in other configurations, where technically possible.

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  • General Physics & Mathematics (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)

Abstract

La présente invention porte sur un dispositif (10) permettant de détecter un mouvement dans un liquide ou un gaz, ou de ces derniers, comprenant au moins un réseau de nanofils (NW) piézorésistifs parallèles et espacés (12), et au moins deux contacts de borne (11), au moins un NW desdits NW étant suspendu entre les contacts de borne (11) et connecté à ces derniers qui sont destinés à être polarisés par une tension externe (V) de sorte qu'un courant (I) puisse passer dans les NW (12), le dispositif étant configuré de telle sorte qu'un mouvement dans le liquide ou le gaz, ou de ces derniers, et/ou un mouvement de particules ou de corps biologiques dans le liquide ou le gaz entraînent des vibrations des NW (12), de manière à engendrer des fluctuations correspondantes de la résistance des NW (12) et ainsi des fluctuations du courant (I) passant dans le NW (12) lorsque les contacts de borne (11) sont polarisés par la tension externe (V). L'invention porte également sur un procédé correspondant permettant de détecter un mouvement dans un liquide ou un gaz, ou de ces derniers, ainsi qu'un procédé de détection de mouvement et d'activité de bactéries, de cellules uniques ou d'organismes unicellulaires présents dans un liquide ou un gaz, conjointement avec un procédé d'essai de sensibilité médicamenteuse basé sur le procédé de détection de mouvement et d'activité de bactéries, de cellules uniques ou d'organismes unicellulaires.
PCT/SE2019/050796 2018-08-27 2019-08-27 Réseau de nanofils piézorésistifs servant à la détection de mouvement WO2020046191A1 (fr)

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Citations (4)

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US20050034529A1 (en) * 2003-05-07 2005-02-17 Hongxing Tang Strain sensors based on nanowire piezoresistor wires and arrays
US20110107841A1 (en) * 2009-11-12 2011-05-12 International Business Machines Corporation Piezoresistive strain sensor based nanowire mechanical oscillator
US20140182361A1 (en) * 2013-01-02 2014-07-03 California Institute Of Technology Piezoresistive nems array network
EP3259569A1 (fr) * 2015-02-18 2017-12-27 KOC Universitesi Capteur de force piézorésistif à axes multiples

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