WO2020044548A1

WO2020044548A1 - Atomic force microscope

Info

Publication number: WO2020044548A1
Application number: PCT/JP2018/032400
Authority: WO
Inventors: 酒井　信明
Original assignee: オリンパス株式会社
Priority date: 2018-08-31
Filing date: 2018-08-31
Publication date: 2020-03-05

Abstract

This atomic force microscope (1) comprises: a holder (2) for holding a cantilever tip (4); a scanning mechanism (2) for holding the holder and moving the cantilever in a scanning motion within a liquid sample by moving the holder; a housing (10) that accommodates the scanning mechanism, has an opening part (14) having an opening (13) formed on the sample stage side thereof, and has the holder disposed therein so as to protrude to the outside through the opening; a first elastic member (61) that seals the gap between the inner surface of the opening and the holder on the cantilever-tip side of the holder; and a second elastic member (62) that seals the gap between the inner surface of the opening and the holder further to the scanning-mechanism side than the first elastic member.

Description

Atomic force microscope

The present invention relates to an atomic force microscope used for observing a sample in a liquid.

The scanning probe microscope (SPM) is a scanning microscope that obtains information on the surface of a sample by mechanically scanning a mechanical probe on the surface of the sample by a scanning mechanism. The scanning probe microscope performs raster scanning of the mechanical probe and the sample relatively in the X and Y directions, obtains surface information of a desired sample region through the mechanical probe, and displays the mapping on a monitor. It is configured.

The scanning probe microscope is a general term for a scanning tunneling microscope (STM), an atomic force microscope (AFM), a scanning magnetic force microscope (MFM), a scanning near-field light microscope (SNOM), and the like. AFM is the most widely used device. The AFM includes a cantilever having a mechanical probe at a free end, an optical displacement sensor for detecting displacement of the cantilever, and a scanning mechanism for relatively scanning the mechanical probe and the sample as main mechanical mechanisms. Have. The most widely used optical displacement sensors are optical lever type optical displacement sensors. The optical lever-type optical displacement sensor has a simple configuration and high displacement detection sensitivity. In the AFM, a light beam having a diameter of several μm to several tens μm is irradiated onto the cantilever, and the direction of reflection of the light beam changes according to the warpage of the lever. The reflected light is caught by a two-segment light detector or the like, and the operation of a mechanical probe at the free end of the cantilever is detected and output as an electric signal. By scanning the scanning mechanism in the X and Y axes while controlling the scanning mechanism in the Z axis direction so that the output of the electric signal is constant, the state of the irregularities on the sample surface is mapped and displayed on the monitor of the computer.

When observing a biological sample in a liquid by AFM, it is common to observe the biological sample in combination with an inverted optical microscope. This is because the inverted optical microscope observation is effective not only for obtaining the knowledge of the sample but also for positioning the cantilever at a specific portion of the sample. Such an AFM often uses a lever scan type scanning mechanism that scans the cantilever in the XYZ-axis directions so as to be compatible with various biological samples and sample substrates.

For example, in the atomic force microscope of Patent Document 1, a cantilever chip provided with a cantilever is held in a holder provided in a scanning mechanism. The housing is provided with a through-hole, and an elastic member is filled between the holder and the through-hole to prevent liquid from entering the inside of the housing. The cantilever chip is placed in a liquid, and the cantilever is scanned in each of the X-axis, Y-axis, and Z-axis directions by a scanning mechanism held by the housing.

Japanese Patent No. 5974094

原子 In the atomic force microscope of Patent Document 1, the cantilever and the elastic member come into direct contact with a liquid such as a biological sample observation solution. These liquids are, for example, a buffer or a culture medium, and contain a sample other than the sample bound and measured as a substrate, and components (eg, salt and sugar) contained in the liquid. Therefore, in order to prevent these samples and components from affecting the next observation, it is necessary to clean the periphery of the elastic member every observation. The elastic member is wiped off with a cleaning paper or a cleaning cloth. On the other hand, since the cantilever is scanned by a piezoelectric element or the like, the housing needs to be waterproof. However, since the elastic member is formed of a soft member such as silicone rubber, the elastic member is liable to be worn and deteriorated by cleaning with a cleaning paper or a cleaning cloth for each observation. As a result of the abrasion and deterioration of the elastic member, the waterproofness of the housing cannot be maintained, and liquid infiltrates into the housing, leading to a failure of the scanning mechanism.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide an atomic force capable of maintaining waterproofness in a housing even when cleaning a liquid contact portion every observation. It is to provide a microscope.

The atomic force microscope according to the first aspect of the present invention is a scanning probe microscope that measures a sample placed on a sample stage in a liquid, and a holder that holds a cantilever tip provided with a cantilever. A scanning mechanism that holds the holder and moves the holder along the X axis, the Y axis, and the Z axis that are orthogonal to each other to scan the cantilever, and the scanning mechanism is housed, and an opening is provided on the sample stage side. A housing having an opening formed therein, wherein the holder is disposed so as to protrude to the outside through the opening, and a first elasticity for sealing a gap between the inner surface of the opening and the holder on the cantilever chip side of the holder. A member, and a second elastic member that seals the gap between the inner surface of the opening and the holder closer to the scanning mechanism than the first elastic member.

According to a second aspect of the present invention, in the atomic force microscope according to the first aspect, the opening has a cylindrical portion protruding toward the sample stage, and the holder passes through the cylindrical portion. It may be arranged so as to protrude toward the sample stage.

According to a third aspect of the present invention, in the atomic force microscope according to the second aspect, the first elastic member may be disposed in the gap between the inner surface of the cylindrical portion and the holder.

According to a fourth aspect of the present invention, in the atomic force microscope according to the second aspect, the cylindrical portion may be detachable from the housing.

According to a fifth aspect of the present invention, in the atomic force microscope according to the first aspect, the first elastic member may be made of a material having higher wear resistance than the second elastic member.

According to a sixth aspect of the present invention, in the atomic force microscope according to the first aspect, the second elastic member may be made of a material having higher chemical resistance than the first elastic member.

A seventh aspect of the present invention is the atomic force microscope according to the third aspect, wherein the first elastic member is disposed in the gap between the inner surface of the protruding end of the cylindrical portion and the holder. Good.

According to the present invention, it is possible to provide an atomic force microscope capable of maintaining waterproofness inside a housing even when a liquid contact portion is cleaned for each observation.

It is a schematic diagram which shows the outline | summary of the observation system using the atomic force microscope which concerns on 1st embodiment. FIG. 1 is a schematic diagram illustrating a configuration of an atomic force microscope according to a first embodiment. It is a top view of the cantilever chip | tip of 1st embodiment. It is a side view of a cantilever chip of a first embodiment. FIG. 2 is a schematic view of the atomic force microscope according to the first embodiment as viewed from a sample stage side. It is a fragmentary sectional view showing a modification of an opening of an atomic force microscope of a first embodiment. It is a schematic diagram which shows the structure of the atomic force microscope of a second embodiment. It is the schematic diagram which looked at the atomic force microscope of the modification of 2nd embodiment from the sample stage side. It is the schematic diagram which looked at the atomic force microscope of the modification of 2nd embodiment from the sample stage side.

(First embodiment)
Hereinafter, the atomic force microscope 1 according to the first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a schematic diagram illustrating an overview of an observation system using an atomic force microscope 1 according to the present embodiment. FIG. 2 is a schematic diagram illustrating an outline of the atomic force microscope 1 according to the present embodiment. As shown in FIG. 1, the atomic force microscope 1 according to the present embodiment may be used with an inverted optical microscope 90 which is an optical microscope. Specifically, it may be used in an observation system 500 that simultaneously performs fluorescence observation with the inverted optical microscope 90 and observation of a moving image generated based on the scanning result of the atomic force microscope 1.

In the observation system 500, the sample 201 contained in the liquid 200 is observed with an inverted optical microscope 90 for fluorescence observation, and the physical characteristics of the sample 201 are observed with an atomic force microscope (AFM). The observation system 500 includes an inverted optical microscope 90, an atomic force microscope 1, a controller 96, a computer 97, and a monitor 98.

The inverted optical microscope 90 is a known inverted optical microscope, and is mainly used for fluorescence observation of the sample 201 in the liquid 200. The inverted optical microscope 90 includes a microscope main body 91 and a microscope stage 92. A microscope stage 92 is provided above the microscope body 91. A sample stage 99 is provided on the microscope stage 92. The sample table 99 is made of, for example, a slide glass, and the sample 201 to be measured is arranged together with the liquid 200. The microscope main body 91 is provided with an objective lens 93, a revolver 94, and an epi-illumination light source 95.

The sample 201 to be measured is, for example, a biological sample such as a cell or a biomolecule, a polymer material, a thin film (coating) material, or the like. In the case of a biological sample, in order to maintain the biological activity of the sample, the sample 201 is placed on the sample table 99 in a state of being placed in the liquid 200, and the cantilever 42 described later operates the sample 201 in the liquid 200.

原子 As shown in FIG. 1, the atomic force microscope 1 is disposed above the inverted optical microscope 90. As shown in FIGS. 1 and 2, the atomic force microscope 1 is an apparatus that can scan a sample 201 in a liquid 200 with a cantilever 42 and observe the shape of the sample 201. The atomic force microscope 1 includes a cantilever tip 4, a holder 2, a scanning mechanism 5, and a housing 10.

FIG. 3 is a top view of the cantilever chip 4. FIG. 4 is a side view of the cantilever chip 4. As shown in FIGS. 3 and 4, the cantilever tip 4 includes a substrate 41, a cantilever 42, and a probe 43. One end of a cantilever 42 is connected to the substrate 41. The probe 43 is provided at a free end of the cantilever 42. The cantilever chip 4 is held by the holder 2. Specifically, the substrate 41 is bonded to the first end 21 of the holder 2 with an adhesive such as wax. The cantilever chip 4 is detachably held on the holder 2. The cantilever chip 4 is held by the holder 2 at a position where the inclination angle of the substrate 41 is 5 to 15 degrees, preferably 10 to 15 degrees with respect to the XY plane.

The holder 2 is a member that holds the cantilever chip 4 and is held by the scanning mechanism 5 as described above. The holder 2 is formed of a light and hard material such as ceramic or aluminum. The holder 2 is held movably along an X axis, a Y axis, and a Z axis orthogonal to each other by the operation of a scanning mechanism 5 described later.

The scanning mechanism 5 is a mechanism that moves the holder 2 to scan the cantilever 42. As shown in FIG. 2, the scanning mechanism 5 is housed inside the housing 10 and supported by the housing 10 at a predetermined position. The scanning mechanism 5 includes an XY movable section 51, an X actuator 52, a Y actuator 53, and a Z actuator 54.

The XY movable section 51 is configured to be movable along the X axis and the Y axis. The X actuator 52 is a drive source that drives the XY movable section 51 along the X axis. The Y actuator 53 is a drive source that drives the XY movable section 51 along the Y axis. The Z actuator 54 is held by the XY movable section 51. The holder 2 is fixed to the moving end (sample stage side end) of the Z actuator 54, and the scanning mechanism 5 holds the holder 2. With this configuration, the scanning mechanism 5 moves the holder 2 along the X axis, the Y axis, and the Z axis. Since the holder 2 holds the cantilever chip 4, the cantilever 42 can scan the sample 201 in the liquid 200 as the holder 2 moves.

(4) The housing 10 is arranged above the sample table 99 so as to be spaced apart therefrom. The scanning mechanism 5 is housed in the housing 10. The scanning mechanism 5 is supported inside the housing 10 by the fixed end (not shown) of the X actuator 52 and the fixed end of the Y actuator 53 being supported by the housing 10.

As shown in FIG. 2, the casing 10 has an opening 14 having an opening 13 in the first wall 11 on the sample stage 99 side (the surface on the sample stage 99 side). The opening 13 has an opening area through which the holder 2 can be inserted. The opening 14 has a cylindrical portion 15 protruding toward the sample stage 99 (outside of the housing 10). The opening 13 opens to the protruding end 151 of the cylindrical portion 15 along the Z direction, and communicates with the inside and outside of the housing 10. FIG. 5 is a schematic diagram of the atomic force microscope 1 viewed from the sample table 99 side. In FIG. 5, the illustration of the sample stage 99 is omitted. As shown in FIG. 5, the opening 13 and the tubular portion 15 have, for example, a rectangular tubular shape. The tubular portion 15 only needs to cover the second end 22 of the holder 2 on the side of the connection portion with the Z actuator 54, and the shape is not limited to a rectangular tubular shape. Various deformation | transformation, such as a cylindrical shape, are possible for the cylindrical part 15, for example.

ホルダ The holder 2 is inserted through the opening 13. The holder 2 has a first end 21 on which the cantilever chip 4 is provided, protruding more toward the sample table 99 side (outside the housing 10) than the cylindrical portion 15. The cantilever chip 4 is arranged below the cylindrical portion 15.

第一 A first elastic member 61 and a second elastic member 62 are provided in a gap S between the opening 13 and the outer surface of the holder 2. The first elastic member 61 is arranged on the sample table 99 side of the holder 2, and the second elastic member 62 is arranged on the second end 22 side of the holder 2 and closer to the scanning mechanism 5 than the first elastic member 61. Have been. As shown in FIG. 5, the first elastic member 61 closes the gap S between the holder 2 and the opening 13 over the entire circumference. Similarly, the second elastic member 62 closes the gap S between the holder 2 and the opening 13 over the entire circumference.

The first elastic member 61 seals the gap S between the inner surface 131 of the opening 13 and the holder 2 on the first end 21 side of the holder 2 (on the side of the cantilever chip 4 of the holder 2). The second elastic member 62 seals a gap S between the inner surface 131 of the opening 13 and the holder 2 on the scanning mechanism 5 side of the first elastic member 61. The sealing here refers to closing the gap S between the inner surface 131 of the opening 13 and the holder 2 in order to prevent liquid from entering. The first elastic member 61 and the second elastic member 62 seal the gap S at a level that prevents liquid infiltration so as not to hinder the movement of the holder 2 along the X axis, the Y axis, and the Z axis that are orthogonal to each other.

The first elastic member 61 and the second elastic member 62 are soft, rubber-like adhesives suitable for waterproofing. The first elastic member 61 and the second elastic member 62 are each filled with an adhesive at a predetermined position of the gap S between the inner surface 131 of the opening 13 and the holder 2, dried and cured, and function as a waterproof material. Specifically, the first elastic member 61 is filled so as not to overflow onto the sample table 99 side (outside of the cylindrical portion) of the cylindrical portion 15. The second elastic member 62 fills a gap S between the holder 2 and the inner surface 131 of the opening 13 near the first wall 11 of the housing 10. The first elastic member 61 contacts the liquid 200 at the time of observation.

The first elastic member 61 and the second elastic member 62 are made of, for example, different materials. The first elastic member 61 has characteristics that are particularly excellent in wear resistance, and has characteristics that are more excellent in wear resistance than the second elastic member 62. For the first elastic member 61, for example, natural rubber is used. The second elastic member 62 has particularly excellent properties in chemical resistance, and is more excellent in chemical resistance than the first elastic member 61. As the second elastic member 62, for example, silicone rubber is used.

FIG. 2 shows an example in which the first elastic member 61 and the second elastic member 62 are arranged apart from each other in the Z direction. However, the first elastic member 61 and the second elastic member 62 may be separate members and may be arranged side by side in the Z direction, and the first elastic member 61 and the second elastic member 62 may be arranged close to each other. . Further, the first elastic member 61 and the second elastic member 62 may be formed of the same material.

筐体 As shown in FIG. 2, the housing 10 has a through hole 16 in the first wall 11. An optical transmission plate 17 is fixed to the through hole 16. The optical transmission plate 17 is an optically transparent plate formed of glass or resin. The optical transmission plate 17 is adhered and fixed to the housing 10 by closing the through hole 16 so as to maintain waterproofness.

変位 A displacement detector 80 for detecting the displacement of the cantilever 42 is provided in the housing 10 above the through hole 16. The displacement detection unit 80 includes a light source 81, a split detector 82, and a condenser lens 83. The light source 81 emits detection light L81 for detecting the displacement of the cantilever 42. The split detector 82 is a detector that receives the reflected light L82 from the cantilever 42. The condenser lens 83 is held by the XY movable section 51. The condenser lens 83 is formed of, for example, a single lens.

(4) The condenser lens 83 collects the detection light L81 emitted from the light source 81 and irradiates the light to the cantilever 42. The reflected light L82 from the cantilever 42 is incident on the split detector 82.

Next, the operation of the atomic force microscope 1 of the present embodiment will be described.
During observation, when the liquid 200 is injected between the first wall 11 of the housing 10 and the sample table 99 on which the sample 201 is arranged, the liquid 200 is held between the first wall 11 and the sample table 99. Thus, a liquid cell 204 is formed. The liquid cell 204 is formed in a region including the through hole 16 and the opening 14. Therefore, at the time of observation, when the liquid cell 204 is formed, the optical transmission plate 17, the cantilever chip 4, the lower part of the holder 2, the cylindrical portion 15, and the first elastic member 61 are located in the liquid cell 204.

(4) The holder 2 is moved by the scanning mechanism 5, and the cantilever 42 and the sample 201 are brought close to each other in the liquid cell 204 until an interaction occurs between the sample 201 and the probe 43 of the cantilever 42. In this state, the detection light L81 emitted from the light source 81 is condensed by the condensing lens 83, passes through the optical transmission plate 17, and irradiates the cantilever 42 to form a condensed spot on the cantilever 42. The reflected light L82 of the detection light L81 applied to the cantilever 42 is transmitted through the optical transmission plate 17 and is incident on the split detector 82 via the condenser lens 83. The split detector 82 outputs to the controller 96 a displacement signal reflecting the Z displacement of the cantilever 42 caused by the interaction between the sample 201 and the probe 43 of the cantilever 42.

The controller 96 transmits a scanning signal for raster scanning to the X actuator 52 and the Y actuator 53 of the scanning mechanism 5. The X actuator 52 and the Y actuator 53 receive the scanning signal from the controller 96, drive the XY movable unit 51 so that the cantilever chip 4 moves in the XY plane, and perform raster scanning of the cantilever 42.

At this time, the controller 96 receives the displacement signal of the cantilever 42 from the split detector 82, and supplies a scanning signal corresponding to the received displacement signal to the Z actuator 54. The Z actuator 54 receives the scanning signal from the controller 96 and moves the cantilever chip 4 along the Z axis.

The computer 97 acquires physical information such as the surface shape and the internal shape of the sample 201 based on the displacement signal of the cantilever 42 and the scanning signal of the scanning mechanism 5, generates an image signal, and displays the image signal on the monitor 98.

In the observation system 500, a known fluorescence observation operation by the inverted optical microscope 90 is performed in parallel with the operation of the atomic force microscope 1 described above. The computer 97 receives the fluorescence observation information by the inverted optical microscope 90 and displays the observation result by the atomic force microscope 1 and the fluorescence observation result by the inverted optical microscope 90 on the monitor 98.

After the measurement of the sample 201 is completed, the cantilever chip 4 is removed from the holder 2 and the portion of the liquid cell 204 that has touched the liquid 200, particularly the holder 2, the cylindrical portion 15, the first elastic member 61, and the optical transmission plate 17 are removed. Clean with a cleaning paper or cleaning cloth.

In the atomic force microscope 1 according to the present embodiment, two

elastic members

61 and 62 are provided in the gap S between the inner surface 131 of the opening 13 and the holder 2 in the Z direction. It is sealed with an elastic member 61 and a second elastic member 62. That is, the gap S between the opening 13 of the housing 10 and the holder 2 is double sealed by the first elastic member 61 and the second elastic member 62. Therefore, waterproof performance inside the housing 10 in which the scanning mechanism 5 including the electronic material is accommodated can be secured. In particular, even if the first elastic member 61 is worn and deteriorated or damaged as a result of the cleaning after the observation, and the liquid is immersed in the gap S inside the cylindrical portion 15, the inside of the housing 10 (the scanning mechanism of the cylindrical portion 15). Since the second elastic member 62 is provided on the (5th) side, it is possible to prevent liquid from entering the inside of the housing 10. As a result, even if it is repeatedly used, the infiltration of the liquid into the inside of the housing 10 hardly occurs, that is, the atomic force microscope 1 with high waterproofness is provided.

In the atomic force microscope 1 according to the present embodiment, since the first elastic member 61 has particularly excellent wear resistance, it is difficult to clean the first elastic member 61 using a cleaning paper or a cleaning cloth after observation. Also, wear deterioration is suppressed. Furthermore, since the first elastic member 61 is filled so as not to overflow to the outside of the cylindrical portion 15 (to the sample table 99 side), damage due to catching of a cleaning paper, a cleaning cloth, or the like during cleaning after observation is suppressed. . Even if the liquid is immersed in the inside of the cylindrical portion 15, the second elastic member 62 has particularly high chemical resistance, so that the waterproof property in the housing 10 is maintained.

Since the atomic force microscope 1 according to the present embodiment includes the cylindrical portion 15 in the opening 14, a space for providing the first elastic member 61 and the second elastic member 62 is secured, and the waterproof property inside the housing 10 is improved. It can certainly be increased.

In the above embodiment, the example in which the opening 15 has the tube portion 15 is shown, but the tube portion 15 is not an essential component. For example, when the first wall 11 of the housing 10 has a sufficient thickness as in the modification shown in FIG. 6, the first elastic member 61 and the second elastic member 62 It may be arranged on the inner surface 131 in the Z direction.

(Second embodiment)
An atomic force microscope 1A according to the second embodiment will be described. FIG. 7 is a schematic diagram illustrating a configuration of an atomic force microscope 1A according to the second embodiment. FIG. 8 is a schematic diagram of the atomic force microscope 1A of the second embodiment viewed from the sample table 99 side. In FIG. 8, the illustration of the sample stage 99 is omitted. In the following description, portions having the same configuration as that of the atomic force microscope 1 according to the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

原子 The atomic force microscope 1A according to the present embodiment is different from the first embodiment in the aspect of the opening. In the first embodiment, an example in which the opening 14 is provided with the cylindrical portion 15 formed integrally with the first wall 11 has been described. However, in the atomic force microscope 1A according to the present embodiment, the cylindrical portion 15A has a housing. 10A and another member. The cylindrical portion 15A is provided detachably with respect to the first wall 11.

As shown in FIG. 7, an opening 13A is formed in the first wall 11, and a cylindrical member 150 is provided on the surface of the first wall 11 on the sample table 99 side, around the opening 13A. I have. The tubular member 150 includes a tubular portion 155 having a hollow portion penetrating in the Z direction while being attached to the first wall 11, and an attaching portion 154 to the first wall portion 11. With the tubular member 150 attached to the first wall 11, the periphery of the opening 13A is surrounded by the tubular member 150. An opening 14A is formed by the opening 13A and the cylindrical member 150.

第二 As shown in FIG. 7, the second elastic member 62 is disposed between the inner surface of the opening 13A and the holder 2, and seals the gap S. The first elastic member 61 is disposed between the inner surface 153 of the opening of the cylindrical member 150 and the holder 2 and seals the gap S. The first elastic member 61 is adhered to the inner surface 153 of the tubular member 150 and is in close contact with the holder 2.

The cylindrical member 150 is attached to the housing 10A with, for example, a removable adhesive. Alternatively, as shown in FIG. 8, the tubular member 150 may be configured to be fixed to the housing 10A with screws 152.

の他 In addition, the tubular member 150 may have a configuration in which a plurality of

components

150a and 150b are assembled into a tubular shape as shown in FIG.

使用 The mode of use when observing the atomic force microscope 1A according to the present embodiment is the same as in the first embodiment. After the observation, the cantilever 42 is removed from the holder 2 and the cylindrical member 150 and the first elastic member 61 are cleaned with a cleaning paper, a cleaning cloth, or the like. When the first elastic member 61 and the cylindrical portion 15A are worn or deteriorated after repeated use, the cylindrical member 150 is removed from the housing 10A. Since the first elastic member 61 is adhered to the cylindrical member 150 and is in close contact with the holder 2, when the cylindrical member 150 is detached from the housing 10A, the first elastic member 61 Deviates from 10A. Thus, the cylindrical portion 15A is configured to be replaceable. Then, when the new tubular member 150 is fixed to the housing 10A, the state becomes observable again.

原子 The atomic force microscope 1A according to the present embodiment can secure waterproof performance inside the housing 10A in which the scanning mechanism 5 including the electronic material is housed, as in the first embodiment. In particular, even if the first elastic member 61 is worn and deteriorated or damaged as a result of the cleaning after the observation, and the liquid is immersed in the gap S inside the cylindrical portion 15, the inside of the housing 10 (the scanning mechanism of the cylindrical portion 15). Since the second elastic member 62 is provided on the (5th) side, it is possible to prevent liquid from entering the inside of the housing 10A. As a result, even if it is repeatedly used, the liquid does not easily enter the inside of the housing 10A, that is, the atomic force microscope 1 with high waterproofness is provided.

In the atomic force microscope 1A of the present embodiment, since the cylindrical portion 15A is detachable from the housing 10A, when the first elastic member 61 and the cylindrical portion 15A are worn or deteriorated after repeated use, the cylindrical portion 15A is removed. 15A is replaceable.

In the above embodiment, an example is described in which the liquid cell 204 is formed between the sample table 99 and the housing 10 and the cantilever chip 42 is disposed in the liquid 200. However, the configuration of the sample table is not limited to this. The sample stage 99 may have a configuration capable of holding the sample 201 and the liquid 200. For example, a container capable of storing the sample 201 and the liquid 200 is provided on the sample stage 99, and the cantilever chip 42 is arranged in the liquid in the container. May be used.

In the above-described embodiment, the atomic force microscope 1 used in the observation system 500 has been exemplified. However, the atomic force microscope of the present invention is not limited to the case used in the observation system 500. It can be suitably used for a force microscope.

As described above, one embodiment of the present invention has been described. However, the technical scope of the present invention is not limited to the above-described embodiment, and various modifications may be made to each component without departing from the spirit of the present invention. , Can be deleted, or the components of each embodiment can be combined.

(4) It is possible to provide an atomic force microscope capable of maintaining waterproofness in a housing even when a liquid contact portion is cleaned for each observation.

DESCRIPTION OF

SYMBOLS

1, 1A Atomic force microscope 4 Cantilever tip 2 Holder 5

Scanning mechanism

10,

10A Housing

13,

13A Opening

14, 14A Opening 15 Tube part 42 Cantilever 61 First elastic member 62 Second elastic member 150 Tube member (tube part) )

Claims

A scanning probe microscope for measuring a sample placed on a sample stage in a liquid,
A holder for holding a cantilever chip provided with a cantilever,
A scanning mechanism that holds the holder and moves the holder along the X axis, the Y axis, and the Z axis orthogonal to each other to scan the cantilever;
A housing in which the scanning mechanism is housed, an opening having an opening on the sample stage side is formed, and the holder is arranged to protrude to the outside through the opening;
A first elastic member that seals a gap between the inner surface of the opening and the holder on the cantilever tip side of the holder,
A second elastic member that seals the gap between the inner surface of the opening and the holder on the scanning mechanism side with respect to the first elastic member,
Atomic force microscope equipped with.
The opening has a cylindrical portion protruding toward the sample stage,
The atomic force microscope according to claim 1, wherein the holder is arranged so as to protrude toward the sample stage through the cylindrical portion.
The atomic force microscope according to claim 2, wherein the first elastic member is disposed in the gap between the inner surface of the cylindrical portion and the holder.
The atomic force microscope according to claim 2, wherein the cylindrical portion is detachable from the housing.
The atomic force microscope according to claim 1, wherein the first elastic member is made of a material having higher wear resistance than the second elastic member.
The atomic force microscope according to claim 1, wherein the second elastic member is made of a material having higher chemical resistance than the first elastic member.
The atomic force microscope according to claim 3, wherein the first elastic member is disposed in the gap between the inner surface of the protruding end of the cylindrical portion and the holder.