WO2020039512A1 - Moving body driving control system - Google Patents

Moving body driving control system Download PDF

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Publication number
WO2020039512A1
WO2020039512A1 PCT/JP2018/030933 JP2018030933W WO2020039512A1 WO 2020039512 A1 WO2020039512 A1 WO 2020039512A1 JP 2018030933 W JP2018030933 W JP 2018030933W WO 2020039512 A1 WO2020039512 A1 WO 2020039512A1
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WIPO (PCT)
Prior art keywords
speed
movement
moving body
section
moving
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PCT/JP2018/030933
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French (fr)
Japanese (ja)
Inventor
隆志 城戸
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株式会社Fuji
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Application filed by 株式会社Fuji filed Critical 株式会社Fuji
Priority to PCT/JP2018/030933 priority Critical patent/WO2020039512A1/en
Priority to JP2020537931A priority patent/JP6937921B2/en
Publication of WO2020039512A1 publication Critical patent/WO2020039512A1/en

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    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00Control of position or direction
    • G05D3/12Control of position or direction using feedback

Definitions

  • the present specification has a function of operating a dynamic brake to perform braking when servo control becomes impossible during servo control for moving a moving body to a target position using a servo motor or a linear servo motor as a drive source.
  • the term “servo motor” simply means either a rotary servo motor or a linear servo motor (linear servo motor).
  • a moving body drive control system using a servo motor as a driving source drives a servo motor to move a moving body to a target position, as described in Japanese Patent Application Laid-Open No. 2016-213993. If servo control becomes impossible due to a sensor error or power failure during servo control, the dynamic brake is activated to short-circuit the motor winding terminals, thereby braking the servo motor and moving Stop moving.
  • the braking force of the servomotor by the dynamic brake is smaller than the braking force of the servo control, so that the braking distance by the dynamic brake is longer than the braking distance by the servo control. For this reason, when the target position is set near the movement limit position (mechanical end) of the moving body and the servo control is executed, when the servo control becomes impossible near the target position, the dynamic brake is activated.
  • the moving body does not sufficiently decelerate until the moving body reaches the movement limit position and collides vigorously with a stopper or the like at the movement limit position, and the impact may damage the mechanism of the driving device. is there.
  • a function of operating a dynamic brake to perform braking when servo control becomes impossible during servo control for moving a moving body to a target position using a servo motor or a linear servo motor as a driving source A target position setting unit that sets the target position; and a reduction in acceleration, a moving speed, and a deceleration section of an acceleration section of the moving body until the moving body is moved to the target position.
  • a control unit for controlling a speed wherein the control unit sets a section within a predetermined distance to a movement limit position of the moving body as a speed limit section that limits the movement speed to a predetermined speed limit or less,
  • the target position setting unit sets the target position in the speed limit section so as to move the moving body in the direction of the movement limit position in the speed limit section. Wherein said target position if in accordance with a distance Lbl between the movement limit position is obtained so as to correct the deceleration.
  • the distance Lbl between the target position and the movement limit position is corrected in accordance with the following formula, so that control can be performed such that the deceleration is increased as the target position is closer to the movement limit position, and the moving speed of the moving object in the speed limit section is reduced.
  • FIG. 1 is a perspective view showing a configuration of a main part of a component mounter in one embodiment.
  • FIG. 2 is a block diagram showing a configuration of a control system of the component mounter.
  • FIG. 3 is a diagram illustrating the relationship between the speed limit and the speed command in the speed limit section.
  • FIG. 4 is a flowchart showing the flow of the processing of the deceleration correction program in the speed limit section.
  • a component supply device 12 that supplies components is set detachably.
  • the component supply device 12 to be set in the component mounter 11 may be any of a tray feeder, a tape feeder, a bulk feeder, a stick feeder, and the like, and of course, a plurality of types of feeders may be mixed.
  • the component mounter 11 includes a conveyor 13 for transporting a circuit board (not shown), a mounting head 14 (moving body) for mounting components supplied by the component supply device 12 on the circuit board, and a mounting head 14.
  • a mounting head moving device 15 for moving in the X-axis direction (transfer direction of the circuit board) and a Y-axis direction perpendicular to the X-axis direction, and a nozzle station 16 for mounting a suction nozzle (not shown) for replacement are provided. ing.
  • a suction nozzle (not shown) for sucking a component supplied by the component supply device 12 is exchangeably held by the mounting head 14.
  • the component mounter 11 is provided with a component imaging camera 17 for imaging the component held by the suction nozzle from below, and the mounting head 14 is provided with a mark imaging camera 18 for imaging a reference position mark or the like of the circuit board. Is provided.
  • the mounting head 14 is provided with a Z-axis slide 24 driven in the Z-axis direction (up-down direction) by a Z-axis motor 22.
  • the suction nozzle is moved by lowering / elevating the Z-axis slide 24 during a component suction operation or a component mounting operation. Is lowered / elevated.
  • the mounting head moving device 15 includes an X-axis slide device 26 using an X-axis servo motor 25 as a drive source, and a Y-axis slide device 28 using a Y-axis linear servo motor 27 as a drive source.
  • the X-axis slide device 26 rotates the X-axis ball screw 29 by the X-axis servo motor 25 to move the X-axis slide (not shown) to which the mounting head 14 is attached along the X-axis guide 30 in the X-axis direction. Move.
  • the X-axis guide 30 is supported by a Y-axis guide 31 of a Y-axis slide device 28 so as to be slidable in the Y-axis direction, and has a X-axis slide 32 attached to a mover 33 of the Y-axis linear servomotor 27.
  • the shaft guide 30 is connected.
  • the X-axis slide device 26 is moved in the Y-axis direction along the Y-axis guide 31 by the Y-axis linear servomotor 27.
  • the stator 34 of the Y-axis linear servomotor 27 is provided with two rows of magnets facing each other across the mover 33 so as to extend parallel to the Y-axis direction.
  • the control device 41 of the component mounter 11 is mainly configured by a computer, and includes an input device 42 such as a keyboard, a mouse, and a touch panel, a display device 43 such as an LCD, an EL, and a CRT, and an operation of each function of the component mounter 11. Is connected to a storage device 44 such as a hard disk device for storing various control programs for controlling the deceleration and a deceleration correction program in the speed limit section shown in FIG.
  • a storage device 44 such as a hard disk device for storing various control programs for controlling the deceleration and a deceleration correction program in the speed limit section shown in FIG.
  • the control device 41 of the component mounter 11 controls operations of the X-axis servo motor 25, the Y-axis linear servo motor 27, the Z-axis motor 22 and the like of the mounting head moving device 15 to perform mounting.
  • the head 14 is moved between the component suction position on the component supply device 12 side and the component mounting position on the circuit board to execute the component suction operation and the component mounting operation.
  • the X-axis servo motor 25 and the Y-axis linear servo motor 27, which are the driving sources of the mounting head moving device 15, have a servo control due to some cause such as a sensor abnormality or power failure during the servo control for moving the mounting head 14 to the target position.
  • a dynamic brake function is provided for short-circuiting the terminals of the motor winding and braking the motor when the motor cannot be executed.
  • the control device 41 of the component mounter 11 functions as a target position setting unit that sets a target position at which the mounting head 14 is moved, and accelerates, moves, and decelerates in an acceleration section until the mounting head 14 is moved to the target position. It also functions as a control unit that controls the deceleration of the section. As shown in FIG. 3, the control device 41 of the component mounter 11 limits the moving speed of a section within a predetermined limit distance from the movement limit position (mechanical end) of the mounting head 14 to a predetermined speed limit or less. When a target position is set in the speed limit section so as to move the mounting head 14 in the direction of the movement limit position in the speed limit section, the speed is determined according to the distance Lbl between the target position and the movement limit position. Thus, the deceleration Bi ⁇ is corrected by the following equation (1).
  • Z is the slope of a straight line indicating the change characteristic of the speed limit in the speed limit section
  • Lbl is the distance between the target position and the movement limit position
  • Vend ⁇ is the allowable speed which is the speed limit at the movement limit position.
  • the length of the speed limit section (limit distance) is set based on the braking characteristics of the dynamic brake.
  • the speed limit in the speed limit section linearly decreases from the speed limit section start position toward the movement limit position such that the movement speed at the movement limit position becomes a predetermined allowable speed Vend #. It is set as follows.
  • the allowable speed Vend # at the movement limit position is set to the movement speed of the mounting head 14 such that even if the mounting head 14 collides with a stopper or the like at the movement limit position, the impact does not damage the mechanism of the mounting head moving device 15. I have.
  • This allowable speed Vend # may be a constant value set by the manufacturer or may be changed by the user.
  • the control device 41 of the component mounter 11 performs mounting by acceleration after the start of movement.
  • the speed is switched from acceleration to deceleration, and the command speed profile is corrected so that the trajectory of the moving speed is in contact with a straight line indicating the change characteristic of the speed limit within the deceleration section.
  • the moving speed is not limited to the speed limit or less, and the speed is accelerated to the maximum speed within a range where the deceleration to the target position by the servo control is possible. For this reason, if the servo control becomes infeasible near the maximum speed, the mounting head 14 is not sufficiently decelerated until the mounting head 14 reaches the movement limit position even if the dynamic brake is actuated. 14 may collide vigorously, and the impact may damage the mounting head moving device 15.
  • the movement of the mounting head 14 when the movement of the mounting head 14 is started in the direction of the movement limit position within the speed limit section, the movement of the mounting head 14 is accelerated after the movement is started. Before the speed reaches the speed limit, the speed is switched from acceleration to deceleration, and the command speed profile is corrected so that the trajectory of the moving speed is in contact with a straight line indicating the change characteristic of the speed limit within the deceleration section.
  • the dynamic brake is activated in the speed limit section
  • the moving speed of the mounting head 14 is limited to the speed limit or less, and the mounting head 14 is moved for a short time until it reaches the stopper at the movement limit position.
  • the moving speed can be sufficiently reduced by the dynamic brake, and the speed (impact force) at which the mounting head 14 collides with the stopper or the like at the movement limit position can be sufficiently reduced.
  • the control device 41 of the component mounter 11 repeatedly executes the deceleration correction program in the speed limit section in FIG. 4 at a predetermined cycle while the component mounter 11 is operating, thereby moving the mounting head 14 within the speed limit section. Each time a target position is set within the speed limit section so as to move in the direction of the position, the deceleration is corrected to correct the commanded speed profile.
  • the processing content of the deceleration correction program in the speed limit section in FIG. 4 will be described.
  • step 101 the mounting head 14 is moved in the direction of the movement limit position in the speed limit section. It is determined whether or not the target position has been set within the speed limit section. For example, if the target position is not within the speed limit section, or if the moving direction of the mounting head 14 is in the opposite direction to the movement limit position even when the target position is within the speed limit section, “ No, the program is terminated.
  • the mounting head 14 Since there is no possibility of collision with a position stopper or the like, the deceleration is not corrected.
  • step 101 if it is determined “Yes” in step 101, if the servo control cannot be executed for some reason during the servo control, the mounting head 14 may be moved to the stopper at the movement limit position even if the dynamic brake is activated. Since there is a possibility of collision, the routine proceeds to step 102, where the deceleration is corrected by the above equation (1). After that, the process proceeds to step 103, in which the moving speed of the mounting head 14 is switched from acceleration to deceleration before the moving speed of the mounting head 14 reaches the speed limit due to the acceleration after the start of the movement, and the trajectory of the moving speed changes the speed characteristic of the speed limit within the deceleration section. The command speed profile is corrected so as to be in contact with the indicated straight line, and the program ends.
  • the position between the target position and the movement limit position is set. Since the deceleration is corrected in accordance with the distance Lbl, it is possible to perform control such that as the target position is closer to the movement limit position, the deceleration is increased and the movement speed of the mounting head 14 in the speed limit section is reduced. Become. For this reason, even if the servo control becomes impossible near the target position set in the speed limit section and the dynamic brake is actuated, the mounting head 14 is moved in a short section until the mounting head 14 reaches the stopper at the movement limit position.
  • the moving speed of the mounting head 14 can be sufficiently reduced by the dynamic brake, and the speed (impact force) at which the mounting head 14 collides with a stopper or the like at the movement limit position can be sufficiently reduced.
  • the mounting head moving device 15 can be prevented from being damaged due to collision with the stopper or the like.
  • an appropriate deceleration can be set according to the distance Lbl between the target position and the movement limit position.
  • the change characteristic of the speed limit in the speed limit section is set by a straight line, but may be set by a curve such as a quadratic curve.
  • the deceleration is corrected under predetermined conditions for the X-axis servo motor 25 and the Y-axis linear servo motor 27.
  • the Z-axis motor 22 is configured by a servo motor or a linear servo motor.
  • the deceleration of the Z-axis motor 22 may be corrected under the same conditions.
  • the scope of application of the present invention is not limited to the component mounter 11, but may be applied to devices (such as solder printing machines) in each process arranged on a component mounting line for producing a component mounted board.
  • the present invention may be applied to devices in each process of a production line other than a component mounting line.
  • the present invention can be applied to any device. It can be implemented by applying the invention.
  • the present invention is not limited to the present embodiment.
  • the configuration of the moving body driving device (mounting head moving device 15) may be appropriately changed, and various changes may be made without departing from the gist. It goes without saying that you can do it.
  • 11 Component mounting machine
  • 12 Component supply device
  • 14 Mounting head (moving body)
  • 15 Mounting head moving device
  • 25 X-axis servo motor
  • 26 X-axis slide device
  • 27 Y-axis linear servo motor
  • 28 Y-axis slide device
  • 41 Control device (target position setting unit, control unit)

Abstract

The present invention is provided with a function for operating a dynamic brake and braking, when a servo control is unexecutable while the servo control is performed which moves a moving body (14) to a target position by taking a servo motor (25) or a linear servo motor (27) as a driving source. A control unit (41), which controls the servo motor or the linear servo motor, takes a section within a prescribed distance from a movement limit position of the moving body as a speed limit section in which moving speed is limited to a prescribed speed limit or lower, and corrects deceleration according to the distance between a target position and the movement limit position, when the target position is set within the speed limit section so that the moving body is moved toward the movement limit position within the speed limit section.

Description

移動体駆動制御システムMobile drive control system
 本明細書は、サーボモータ又はリニアサーボモータを駆動源として移動体を目標位置へ移動させるサーボ制御中にそのサーボ制御が実行不能になったときにダイナミックブレーキを作動させて制動する機能を備えた移動体駆動制御システムに関する技術を開示したものである。以下の説明で、単に「サーボモータ」という場合は、回転型のサーボモータとリニアサーボモータ(リニア型のサーボモータ)のどちらかを意味する。 The present specification has a function of operating a dynamic brake to perform braking when servo control becomes impossible during servo control for moving a moving body to a target position using a servo motor or a linear servo motor as a drive source. This discloses a technique relating to a moving body drive control system. In the following description, the term “servo motor” simply means either a rotary servo motor or a linear servo motor (linear servo motor).
 一般に、サーボモータを駆動源とする移動体駆動制御システムは、特許文献1(特開2016-213993号公報)に記載されているように、サーボモータを駆動して移動体を目標位置へ移動させるサーボ制御中に、センサの異常や停電等が発生して、サーボ制御が実行不能になると、ダイナミックブレーキが作動してモータ巻線の端子間を短絡させることで、サーボモータを制動して移動体の移動を停止させるようにしている。 Generally, a moving body drive control system using a servo motor as a driving source drives a servo motor to move a moving body to a target position, as described in Japanese Patent Application Laid-Open No. 2016-213993. If servo control becomes impossible due to a sensor error or power failure during servo control, the dynamic brake is activated to short-circuit the motor winding terminals, thereby braking the servo motor and moving Stop moving.
特開2016-213993号公報JP 2016-213993 A
 一般に、サーボモータのダイナミックブレーキによる制動力は、サーボ制御による制動力よりも小さいため、ダイナミックブレーキによる制動距離は、サーボ制御による制動距離よりも長くなる。このため、目標位置が移動体の移動限界位置(メカエンド)付近に設定されてサーボ制御が実行されている場合に、目標位置の近くでサーボ制御が実行不能になったときにダイナミックブレーキが作動しても、移動体が移動限界位置に到達するまでに十分に減速されずに移動限界位置のストッパ等に移動体が勢い良く衝突してしまい、その衝撃で駆動装置の機構が損傷する可能性がある。 Generally, the braking force of the servomotor by the dynamic brake is smaller than the braking force of the servo control, so that the braking distance by the dynamic brake is longer than the braking distance by the servo control. For this reason, when the target position is set near the movement limit position (mechanical end) of the moving body and the servo control is executed, when the servo control becomes impossible near the target position, the dynamic brake is activated. However, there is a possibility that the moving body does not sufficiently decelerate until the moving body reaches the movement limit position and collides vigorously with a stopper or the like at the movement limit position, and the impact may damage the mechanism of the driving device. is there.
 上記課題を解決するために、サーボモータ又はリニアサーボモータを駆動源として移動体を目標位置へ移動させるサーボ制御中にそのサーボ制御が実行不能になったときにダイナミックブレーキを作動させて制動する機能を備えた移動体駆動制御システムにおいて、前記目標位置を設定する目標位置設定部と、前記移動体を前記目標位置へ移動させるまでの前記移動体の加速区間の加速度、移動速度及び減速区間の減速度を制御する制御部とを備え、前記制御部は、前記移動体の移動限界位置に対して所定距離内の区間を、前記移動速度を所定の制限速度以下に制限する速度制限区間とし、前記目標位置設定部が前記速度制限区間内で前記移動体を前記移動限界位置の方向に移動させるように前記速度制限区間内に前記目標位置を設定した場合に前記目標位置と前記移動限界位置との間の距離Lblに応じて前記減速度を補正するようにしたものである。 In order to solve the above-mentioned problem, a function of operating a dynamic brake to perform braking when servo control becomes impossible during servo control for moving a moving body to a target position using a servo motor or a linear servo motor as a driving source. A target position setting unit that sets the target position; and a reduction in acceleration, a moving speed, and a deceleration section of an acceleration section of the moving body until the moving body is moved to the target position. And a control unit for controlling a speed, wherein the control unit sets a section within a predetermined distance to a movement limit position of the moving body as a speed limit section that limits the movement speed to a predetermined speed limit or less, The target position setting unit sets the target position in the speed limit section so as to move the moving body in the direction of the movement limit position in the speed limit section. Wherein said target position if in accordance with a distance Lbl between the movement limit position is obtained so as to correct the deceleration.
 この場合、ダイナミックブレーキ作動時に移動体が移動限界位置のストッパ等に衝突することを防止するために、速度制限区間内の制限速度を下げ過ぎると、速度制限区間内で移動体の移動速度が遅くなり過ぎて生産性が低下する。 In this case, if the speed limit in the speed limit section is excessively reduced to prevent the moving body from colliding with a stopper or the like at the movement limit position when the dynamic brake is activated, the moving speed of the moving body in the speed limit section decreases. It becomes too much and the productivity decreases.
 その点、上記構成では、速度制限区間内で移動体を移動限界位置の方向に移動させるように速度制限区間内に目標位置が設定された場合に目標位置と移動限界位置との間の距離Lblに応じて減速度を補正するようにしたので、目標位置が移動限界位置に近いほど、減速度を大きくして速度制限区間内の移動体の移動速度を低下させるという制御が可能となる。このため、速度制限区間内に設定された目標位置の近くでサーボ制御が実行不能になってダイナミックブレーキが作動した場合でも、移動体が移動限界位置のストッパ等に到達するまでの短い区間で、ダイナミックブレーキにより移動体の移動速度を十分に減速することができて、移動体が移動限界位置のストッパ等に衝突する速度(衝撃力)を十分に低下させることができる。しかも、目標位置と移動限界位置との間の距離Lblに応じて減速度を補正するため、目標位置と移動限界位置との間の距離Lblに応じた適正な減速度を設定することができて、速度制限区間内の移動体の移動速度の低下を必要最小限に抑えることができ、移動速度の低下による生産性の低下を最小限に抑えることができる。 In that regard, in the above configuration, when the target position is set in the speed limit section so as to move the moving body in the direction of the movement limit position in the speed limit section, the distance Lbl between the target position and the movement limit position The deceleration is corrected in accordance with the following formula, so that control can be performed such that the deceleration is increased as the target position is closer to the movement limit position, and the moving speed of the moving object in the speed limit section is reduced. For this reason, even if the servo control becomes impossible near the target position set in the speed limit section and the dynamic brake is actuated, in a short section until the moving body reaches the stopper at the movement limit position, The moving speed of the moving body can be sufficiently reduced by the dynamic brake, and the speed (impact force) at which the moving body collides with the stopper at the movement limit position can be sufficiently reduced. In addition, since the deceleration is corrected according to the distance Lbl between the target position and the movement limit position, an appropriate deceleration can be set according to the distance Lbl between the target position and the movement limit position. In addition, it is possible to minimize the decrease in the moving speed of the moving object in the speed limited section, and to minimize the decrease in productivity due to the decrease in the moving speed.
図1は一実施例における部品実装機の主要部の構成を示す斜視図である。FIG. 1 is a perspective view showing a configuration of a main part of a component mounter in one embodiment. 図2は部品実装機の制御系の構成を示すブロック図である。FIG. 2 is a block diagram showing a configuration of a control system of the component mounter. 図3は速度制限区間内の制限速度と速度指令との関係を説明する図である。FIG. 3 is a diagram illustrating the relationship between the speed limit and the speed command in the speed limit section. 図4は速度制限区間内減速度補正プログラムの処理の流れを示すフローチャートである。FIG. 4 is a flowchart showing the flow of the processing of the deceleration correction program in the speed limit section.
 以下、本明細書で開示する移動体駆動制御システムを部品実装機11に搭載した一実施例を説明する。 Hereinafter, an embodiment in which the moving object drive control system disclosed in this specification is mounted on the component mounter 11 will be described.
 まず、図1に基づいて部品実装機11の構成を説明する。
 部品実装機11には、部品を供給する部品供給装置12が着脱可能にセットされる。部品実装機11にセットする部品供給装置12は、トレイフィーダ、テープフィーダ、バルクフィーダ、スティックフィーダ等のいずれであっても良く、勿論、複数種類のフィーダを混載するようにしても良い。部品実装機11には、回路基板(図示せず)を搬送するコンベア13と、部品供給装置12によって供給される部品を回路基板に実装する実装ヘッド14(移動体)と、この実装ヘッド14をX軸方向(回路基板の搬送方向)とその直角方向であるY軸方向に移動させる実装ヘッド移動装置15と、交換用の吸着ノズル(図示せず)を載置するノズルステーション16等が設けられている。
First, the configuration of the component mounter 11 will be described with reference to FIG.
In the component mounter 11, a component supply device 12 that supplies components is set detachably. The component supply device 12 to be set in the component mounter 11 may be any of a tray feeder, a tape feeder, a bulk feeder, a stick feeder, and the like, and of course, a plurality of types of feeders may be mixed. The component mounter 11 includes a conveyor 13 for transporting a circuit board (not shown), a mounting head 14 (moving body) for mounting components supplied by the component supply device 12 on the circuit board, and a mounting head 14. A mounting head moving device 15 for moving in the X-axis direction (transfer direction of the circuit board) and a Y-axis direction perpendicular to the X-axis direction, and a nozzle station 16 for mounting a suction nozzle (not shown) for replacement are provided. ing.
 実装ヘッド14には、部品供給装置12によって供給される部品を吸着する吸着ノズル(図示せず)が交換可能に保持される。部品実装機11には、吸着ノズルに保持した部品を下方から撮像する部品撮像用のカメラ17が設けられ、実装ヘッド14には、回路基板の基準位置マーク等を撮像するマーク撮像用のカメラ18が設けられている。 (4) A suction nozzle (not shown) for sucking a component supplied by the component supply device 12 is exchangeably held by the mounting head 14. The component mounter 11 is provided with a component imaging camera 17 for imaging the component held by the suction nozzle from below, and the mounting head 14 is provided with a mark imaging camera 18 for imaging a reference position mark or the like of the circuit board. Is provided.
 実装ヘッド14には、Z軸モータ22でZ軸方向(上下方向)に駆動されるZ軸スライド24が設けられ、部品吸着動作時や部品実装動作時にZ軸スライド24の下降/上昇によって吸着ノズルが下降/上昇されるようになっている。 The mounting head 14 is provided with a Z-axis slide 24 driven in the Z-axis direction (up-down direction) by a Z-axis motor 22. The suction nozzle is moved by lowering / elevating the Z-axis slide 24 during a component suction operation or a component mounting operation. Is lowered / elevated.
 実装ヘッド移動装置15は、X軸サーボモータ25を駆動源とするX軸スライド装置26と、Y軸リニアサーボモータ27を駆動源とするY軸スライド装置28とから構成されている。X軸スライド装置26は、X軸サーボモータ25でX軸ボールねじ29を回転させて、実装ヘッド14が取り付けられたX軸スライド(図示せず)をX軸ガイド30に沿ってX軸方向に移動させる。X軸ガイド30は、Y軸スライド装置28のY軸ガイド31にY軸方向にスライド可能に支持され、且つ、Y軸リニアサーボモータ27の可動子33に取り付けられたY軸スライド32に、X軸ガイド30が連結されている。これにより、Y軸リニアサーボモータ27によってX軸スライド装置26がY軸ガイド31に沿ってY軸方向に移動されるようになっている。Y軸リニアサーボモータ27の固定子34には、可動子33を挟んで対向する2列の磁石の列がY軸方向に平行に延びるように設けられている。 The mounting head moving device 15 includes an X-axis slide device 26 using an X-axis servo motor 25 as a drive source, and a Y-axis slide device 28 using a Y-axis linear servo motor 27 as a drive source. The X-axis slide device 26 rotates the X-axis ball screw 29 by the X-axis servo motor 25 to move the X-axis slide (not shown) to which the mounting head 14 is attached along the X-axis guide 30 in the X-axis direction. Move. The X-axis guide 30 is supported by a Y-axis guide 31 of a Y-axis slide device 28 so as to be slidable in the Y-axis direction, and has a X-axis slide 32 attached to a mover 33 of the Y-axis linear servomotor 27. The shaft guide 30 is connected. Thus, the X-axis slide device 26 is moved in the Y-axis direction along the Y-axis guide 31 by the Y-axis linear servomotor 27. The stator 34 of the Y-axis linear servomotor 27 is provided with two rows of magnets facing each other across the mover 33 so as to extend parallel to the Y-axis direction.
 部品実装機11の制御装置41は、コンピュータを主体として構成され、キーボード、マウス、タッチパネル等の入力装置42と、LCD、EL、CRT等の表示装置43と、部品実装機11の各機能の動作を制御する各種制御プログラムや後述する図4の速度制限区間内減速度補正プログラムを記憶するハードディスク装置等の記憶装置44が接続されている。 The control device 41 of the component mounter 11 is mainly configured by a computer, and includes an input device 42 such as a keyboard, a mouse, and a touch panel, a display device 43 such as an LCD, an EL, and a CRT, and an operation of each function of the component mounter 11. Is connected to a storage device 44 such as a hard disk device for storing various control programs for controlling the deceleration and a deceleration correction program in the speed limit section shown in FIG.
 部品実装機11の制御装置41は、稼働中(生産中)に、実装ヘッド移動装置15のX軸サーボモータ25とY軸リニアサーボモータ27とZ軸モータ22等の動作を制御して、実装ヘッド14を部品供給装置12側の部品吸着位置と回路基板上の部品実装位置との間を移動させて部品吸着動作と部品実装動作を実行する。実装ヘッド移動装置15の駆動源であるX軸サーボモータ25とY軸リニアサーボモータ27には、実装ヘッド14を目標位置へ移動させるサーボ制御中にセンサの異常や停電等の何らかの原因によりサーボ制御が実行不能になったときにモータ巻線の端子間を短絡させて制動するダイナミックブレーキの機能が搭載されている。 During operation (during production), the control device 41 of the component mounter 11 controls operations of the X-axis servo motor 25, the Y-axis linear servo motor 27, the Z-axis motor 22 and the like of the mounting head moving device 15 to perform mounting. The head 14 is moved between the component suction position on the component supply device 12 side and the component mounting position on the circuit board to execute the component suction operation and the component mounting operation. The X-axis servo motor 25 and the Y-axis linear servo motor 27, which are the driving sources of the mounting head moving device 15, have a servo control due to some cause such as a sensor abnormality or power failure during the servo control for moving the mounting head 14 to the target position. A dynamic brake function is provided for short-circuiting the terminals of the motor winding and braking the motor when the motor cannot be executed.
 部品実装機11の制御装置41は、実装ヘッド14を移動させる目標位置を設定する目標位置設定部として機能すると共に、実装ヘッド14を目標位置へ移動させるまでの加速区間の加速度、移動速度及び減速区間の減速度を制御する制御部としても機能する。部品実装機11の制御装置41は、図3に示すように、実装ヘッド14の移動限界位置(メカエンド)に対して所定の制限距離内の区間を、移動速度を所定の制限速度以下に制限する速度制限区間とし、速度制限区間内で実装ヘッド14を移動限界位置の方向に移動させるように速度制限区間内に目標位置を設定した場合に目標位置と移動限界位置との間の距離Lblに応じて減速度Bi を次の(1)式により補正するようにしている。 The control device 41 of the component mounter 11 functions as a target position setting unit that sets a target position at which the mounting head 14 is moved, and accelerates, moves, and decelerates in an acceleration section until the mounting head 14 is moved to the target position. It also functions as a control unit that controls the deceleration of the section. As shown in FIG. 3, the control device 41 of the component mounter 11 limits the moving speed of a section within a predetermined limit distance from the movement limit position (mechanical end) of the mounting head 14 to a predetermined speed limit or less. When a target position is set in the speed limit section so as to move the mounting head 14 in the direction of the movement limit position in the speed limit section, the speed is determined according to the distance Lbl between the target position and the movement limit position. Thus, the deceleration Bi て is corrected by the following equation (1).
     Bi =2・Z(Z・Lbl+Vend ) ……(1) {Bi} = 2 · Z (Z · Lbl + Vend) (1)
 ここで、Zは速度制限区間内の制限速度の変化特性を示す直線の傾き、Lblは目標位置と移動限界位置との間の距離、Vend は移動限界位置における制限速度である許容速度である。 {Where, Z is the slope of a straight line indicating the change characteristic of the speed limit in the speed limit section, Lbl is the distance between the target position and the movement limit position, and Vend} is the allowable speed which is the speed limit at the movement limit position.
 速度制限区間内に目標位置が設定された場合でも、その目標位置への実装ヘッド14の移動方向が移動限界位置とは反対方向である場合は、実装ヘッド14が移動限界位置のストッパ等に衝突するおそれはないため、上記(1)式による減速度の補正は行われない。 Even when the target position is set within the speed limit section, if the mounting head 14 moves to the target position in a direction opposite to the movement limit position, the mounting head 14 collides with a stopper or the like at the movement limit position. Since there is no danger of deceleration, the deceleration is not corrected by the above equation (1).
 速度制限区間の長さ(制限距離)は、ダイナミックブレーキの制動特性に基づいて設定されている。本実施例では、速度制限区間内の制限速度は、移動限界位置における移動速度が所定の許容速度Vend となるように速度制限区間開始位置から移動限界位置に向かって制限速度が直線的に低下するように設定されている。また、移動限界位置における許容速度Vend は、実装ヘッド14が移動限界位置のストッパ等に衝突しても、その衝撃で実装ヘッド移動装置15の機構が損傷しない実装ヘッド14の移動速度に設定されている。この許容速度Vend は、メーカー側で設定した一定値としても良いし、ユーザー側で変更できるようにしても良い。 の 長 The length of the speed limit section (limit distance) is set based on the braking characteristics of the dynamic brake. In the present embodiment, the speed limit in the speed limit section linearly decreases from the speed limit section start position toward the movement limit position such that the movement speed at the movement limit position becomes a predetermined allowable speed Vend #. It is set as follows. The allowable speed Vend # at the movement limit position is set to the movement speed of the mounting head 14 such that even if the mounting head 14 collides with a stopper or the like at the movement limit position, the impact does not damage the mechanism of the mounting head moving device 15. I have. This allowable speed Vend # may be a constant value set by the manufacturer or may be changed by the user.
 更に、部品実装機11の制御装置41は、図3に示すように、速度制限区間内で実装ヘッド14の移動を移動限界位置の方向に向かって開始する場合は、移動開始後の加速により実装ヘッド14の移動速度が制限速度に到達する前に加速から減速に切り替え、その減速区間内で移動速度の軌跡が制限速度の変化特性を示す直線に接するように指令速度プロファイルを補正する。 Further, as shown in FIG. 3, when the movement of the mounting head 14 is started in the direction of the movement limit position within the speed limit section, the control device 41 of the component mounter 11 performs mounting by acceleration after the start of movement. Before the moving speed of the head 14 reaches the speed limit, the speed is switched from acceleration to deceleration, and the command speed profile is corrected so that the trajectory of the moving speed is in contact with a straight line indicating the change characteristic of the speed limit within the deceleration section.
 ところで、速度制限区間が設けられていない従来システムでは、図3に点線で示すように、速度制限区間に相当する区間で実装ヘッド14の移動を移動限界位置の方向に向かって開始する場合でも、その移動速度が制限速度以下に制限されず、サーボ制御による目標位置への減速停止が可能な範囲内で最大速度まで加速される。このため、最大速度付近でサーボ制御が実行不能になると、ダイナミックブレーキが作動しても、実装ヘッド14が移動限界位置に到達するまでに十分に減速されずに移動限界位置のストッパ等に実装ヘッド14が勢い良く衝突してしまい、その衝撃で実装ヘッド移動装置15が損傷する可能性がある。 By the way, in the conventional system in which the speed limit section is not provided, as shown by the dotted line in FIG. 3, even when the movement of the mounting head 14 is started toward the movement limit position in the section corresponding to the speed limit section, The moving speed is not limited to the speed limit or less, and the speed is accelerated to the maximum speed within a range where the deceleration to the target position by the servo control is possible. For this reason, if the servo control becomes infeasible near the maximum speed, the mounting head 14 is not sufficiently decelerated until the mounting head 14 reaches the movement limit position even if the dynamic brake is actuated. 14 may collide vigorously, and the impact may damage the mounting head moving device 15.
 その点、本実施例では、図3に示すように、速度制限区間内で実装ヘッド14の移動を移動限界位置の方向に向かって開始する場合は、移動開始後の加速により実装ヘッド14の移動速度が制限速度に到達する前に加速から減速に切り替え、その減速区間内で移動速度の軌跡が制限速度の変化特性を示す直線に接するように指令速度プロファイルを補正する。これにより、速度制限区間内のどの位置でダイナミックブレーキが作動しても、実装ヘッド14の移動速度が制限速度以下に制限され、実装ヘッド14が移動限界位置のストッパ等に到達するまでの短い区間で、ダイナミックブレーキにより移動速度を十分に減速することができて、実装ヘッド14が移動限界位置のストッパ等に衝突する速度(衝撃力)を十分に低下させることができる。 In this regard, in the present embodiment, as shown in FIG. 3, when the movement of the mounting head 14 is started in the direction of the movement limit position within the speed limit section, the movement of the mounting head 14 is accelerated after the movement is started. Before the speed reaches the speed limit, the speed is switched from acceleration to deceleration, and the command speed profile is corrected so that the trajectory of the moving speed is in contact with a straight line indicating the change characteristic of the speed limit within the deceleration section. As a result, no matter where the dynamic brake is activated in the speed limit section, the moving speed of the mounting head 14 is limited to the speed limit or less, and the mounting head 14 is moved for a short time until it reaches the stopper at the movement limit position. Thus, the moving speed can be sufficiently reduced by the dynamic brake, and the speed (impact force) at which the mounting head 14 collides with the stopper or the like at the movement limit position can be sufficiently reduced.
 部品実装機11の制御装置41は、部品実装機11の稼働中に図4の速度制限区間内減速度補正プログラムを所定周期で繰り返し実行することで、速度制限区間内で実装ヘッド14を移動限界位置の方向に移動させるように速度制限区間内に目標位置を設定する毎に減速度を補正して指令速度プロファイルを補正する。以下、図4の速度制限区間内減速度補正プログラムの処理内容を説明する。 The control device 41 of the component mounter 11 repeatedly executes the deceleration correction program in the speed limit section in FIG. 4 at a predetermined cycle while the component mounter 11 is operating, thereby moving the mounting head 14 within the speed limit section. Each time a target position is set within the speed limit section so as to move in the direction of the position, the deceleration is corrected to correct the commanded speed profile. Hereinafter, the processing content of the deceleration correction program in the speed limit section in FIG. 4 will be described.
 部品実装機11の制御装置41は、図4の速度制限区間内減速度補正プログラムを起動すると、まず、ステップ101で、速度制限区間内で実装ヘッド14を移動限界位置の方向に移動させるように速度制限区間内に目標位置が設定されたか否かを判定する。例えば、目標位置が速度制限区間内ではない場合や、目標位置が速度制限区間内であっても実装ヘッド14の移動方向が移動限界位置とは反対方向である場合は、上記ステップ101で、「No」と判定して、本プログラムを終了する。つまり、目標位置が速度制限区間内ではない場合や、目標位置が速度制限区間内であっても実装ヘッド14の移動方向が移動限界位置とは反対方向である場合は、実装ヘッド14が移動限界位置のストッパ等に衝突するおそれはないため、減速度の補正は行われない。 When the control device 41 of the component mounter 11 starts the deceleration correction program in the speed limit section in FIG. 4, first, in step 101, the mounting head 14 is moved in the direction of the movement limit position in the speed limit section. It is determined whether or not the target position has been set within the speed limit section. For example, if the target position is not within the speed limit section, or if the moving direction of the mounting head 14 is in the opposite direction to the movement limit position even when the target position is within the speed limit section, “ No, the program is terminated. That is, when the target position is not within the speed limit section, or when the moving direction of the mounting head 14 is opposite to the movement limit position even when the target position is within the speed limit section, the mounting head 14 Since there is no possibility of collision with a position stopper or the like, the deceleration is not corrected.
 一方、上記ステップ101で、「Yes」と判定した場合には、サーボ制御中に何らかの原因によりサーボ制御が実行不能になると、ダイナミックブレーキが作動しても実装ヘッド14が移動限界位置のストッパ等に衝突するおそれがあるため、ステップ102に進み、前記(1)式によって減速度を補正する。この後、ステップ103に進み、移動開始後の加速により実装ヘッド14の移動速度が制限速度に到達する前に加速から減速に切り替え、その減速区間内で移動速度の軌跡が制限速度の変化特性を示す直線に接するように指令速度プロファイルを補正して、本プログラムを終了する。 On the other hand, if it is determined “Yes” in step 101, if the servo control cannot be executed for some reason during the servo control, the mounting head 14 may be moved to the stopper at the movement limit position even if the dynamic brake is activated. Since there is a possibility of collision, the routine proceeds to step 102, where the deceleration is corrected by the above equation (1). After that, the process proceeds to step 103, in which the moving speed of the mounting head 14 is switched from acceleration to deceleration before the moving speed of the mounting head 14 reaches the speed limit due to the acceleration after the start of the movement, and the trajectory of the moving speed changes the speed characteristic of the speed limit within the deceleration section. The command speed profile is corrected so as to be in contact with the indicated straight line, and the program ends.
 ところで、ダイナミックブレーキ作動時に実装ヘッド14が移動限界位置のストッパ等に衝突することを防止するために、速度制限区間内の制限速度を下げ過ぎると、速度制限区間内で実装ヘッド14の移動速度が遅くなり過ぎて生産性が低下する。 By the way, in order to prevent the mounting head 14 from colliding with a stopper or the like at the movement limit position during the dynamic braking operation, if the speed limit in the speed limit section is excessively lowered, the movement speed of the mounting head 14 in the speed limit section becomes lower. Too slow and productivity drops.
 その点、本実施例では、速度制限区間内で実装ヘッド14を移動限界位置の方向に移動させるように速度制限区間内に目標位置が設定された場合に目標位置と移動限界位置との間の距離Lblに応じて減速度を補正するようにしたので、目標位置が移動限界位置に近いほど、減速度を大きくして速度制限区間内の実装ヘッド14の移動速度を低下させるという制御が可能となる。このため、速度制限区間内に設定された目標位置の近くでサーボ制御が実行不能になってダイナミックブレーキが作動した場合でも、実装ヘッド14が移動限界位置のストッパ等に到達するまでの短い区間で、ダイナミックブレーキにより実装ヘッド14の移動速度を十分に減速することができて、実装ヘッド14が移動限界位置のストッパ等に衝突する速度(衝撃力)を十分に低下させることができ、移動限界位置のストッパ等への衝突による実装ヘッド移動装置15の損傷を防止できる。しかも、目標位置と移動限界位置との間の距離Lblに応じて減速度を補正するため、目標位置と移動限界位置との間の距離Lblに応じた適正な減速度を設定することができて、速度制限区間内の実装ヘッド14の移動速度の低下を必要最小限に抑えることができ、移動速度の低下による生産性の低下を最小限に抑えることができる。 In this regard, in this embodiment, when the target position is set in the speed limit section so as to move the mounting head 14 in the direction of the movement limit position in the speed limit section, the position between the target position and the movement limit position is set. Since the deceleration is corrected in accordance with the distance Lbl, it is possible to perform control such that as the target position is closer to the movement limit position, the deceleration is increased and the movement speed of the mounting head 14 in the speed limit section is reduced. Become. For this reason, even if the servo control becomes impossible near the target position set in the speed limit section and the dynamic brake is actuated, the mounting head 14 is moved in a short section until the mounting head 14 reaches the stopper at the movement limit position. The moving speed of the mounting head 14 can be sufficiently reduced by the dynamic brake, and the speed (impact force) at which the mounting head 14 collides with a stopper or the like at the movement limit position can be sufficiently reduced. The mounting head moving device 15 can be prevented from being damaged due to collision with the stopper or the like. In addition, since the deceleration is corrected according to the distance Lbl between the target position and the movement limit position, an appropriate deceleration can be set according to the distance Lbl between the target position and the movement limit position. In addition, it is possible to minimize the decrease in the moving speed of the mounting head 14 in the speed limited section, and to minimize the decrease in productivity due to the decrease in the moving speed.
 尚、本実施例では、速度制限区間内の制限速度の変化特性を直線で設定したが、2次曲線等の曲線で設定しても良い。 In the present embodiment, the change characteristic of the speed limit in the speed limit section is set by a straight line, but may be set by a curve such as a quadratic curve.
 また、本実施例では、X軸サーボモータ25とY軸リニアサーボモータ27について、所定条件下で減速度を補正するようにしたが、Z軸モータ22をサーボモータ又はリニアサーボモータで構成した場合には、Z軸モータ22についても、同様の条件で減速度を補正するようにしても良い。 Further, in the present embodiment, the deceleration is corrected under predetermined conditions for the X-axis servo motor 25 and the Y-axis linear servo motor 27. However, when the Z-axis motor 22 is configured by a servo motor or a linear servo motor. Alternatively, the deceleration of the Z-axis motor 22 may be corrected under the same conditions.
 その他、本発明の適用範囲は、部品実装機11に限定されず、部品実装基板を生産する部品実装ラインに配列した各工程の装置(半田印刷機等)に適用しても良く、更には、部品実装ライン以外の生産ラインの各工程の装置等に適用しても良く、要は、移動体をサーボモータで駆動する移動体駆動装置を搭載した装置であれば、その用途を問わず、本発明を適用して実施できる。 In addition, the scope of application of the present invention is not limited to the component mounter 11, but may be applied to devices (such as solder printing machines) in each process arranged on a component mounting line for producing a component mounted board. The present invention may be applied to devices in each process of a production line other than a component mounting line. In short, as long as the device is equipped with a moving body driving device that drives a moving body by a servomotor, the present invention can be applied to any device. It can be implemented by applying the invention.
 その他、本発明は、本実施例に限定されず、例えば、移動体駆動装置(実装ヘッド移動装置15)の構成を適宜変更しても良い等、要旨を逸脱しない範囲内で種々変更して実施できることは言うまでもない。 In addition, the present invention is not limited to the present embodiment. For example, the configuration of the moving body driving device (mounting head moving device 15) may be appropriately changed, and various changes may be made without departing from the gist. It goes without saying that you can do it.
 11…部品実装機、12…部品供給装置、14…実装ヘッド(移動体)、15…実装ヘッド移動装置、25…X軸サーボモータ、26…X軸スライド装置、27…Y軸リニアサーボモータ、28…Y軸スライド装置、41…制御装置(目標位置設定部,制御部) 11: Component mounting machine, 12: Component supply device, 14: Mounting head (moving body), 15: Mounting head moving device, 25: X-axis servo motor, 26: X-axis slide device, 27: Y-axis linear servo motor, 28: Y-axis slide device, 41: Control device (target position setting unit, control unit)

Claims (6)

  1.  サーボモータ又はリニアサーボモータを駆動源として移動体を目標位置へ移動させるサーボ制御中にそのサーボ制御が実行不能になったときにダイナミックブレーキを作動させて制動する機能を備えた移動体駆動制御システムにおいて、
     前記目標位置を設定する目標位置設定部と、
     前記移動体を前記目標位置へ移動させるまでの前記移動体の加速区間の加速度、移動速度及び減速区間の減速度を制御する制御部とを備え、
     前記制御部は、前記移動体の移動限界位置に対して所定距離内の区間を、前記移動速度を所定の制限速度以下に制限する速度制限区間とし、前記目標位置設定部が前記速度制限区間内で前記移動体を前記移動限界位置の方向に移動させるように前記速度制限区間内に前記目標位置を設定した場合に前記目標位置と前記移動限界位置との間の距離Lblに応じて前記減速度を補正する、移動体駆動制御システム。
    A moving body drive control system having a function of operating a dynamic brake to perform braking when servo control becomes impossible during servo control for moving a moving body to a target position using a servo motor or a linear servo motor as a drive source At
    A target position setting unit for setting the target position,
    A control unit that controls acceleration of an acceleration section of the moving body until moving the moving body to the target position, moving speed, and deceleration of a deceleration section,
    The control unit may set a section within a predetermined distance from the movement limit position of the moving object as a speed limit section that limits the moving speed to a predetermined speed limit or less, and the target position setting unit may set the target position setting unit within the speed limit section. When the target position is set in the speed limit section so as to move the moving body in the direction of the movement limit position, the deceleration is performed according to a distance Lbl between the target position and the movement limit position. Moving control system.
  2.  前記制御部は、前記移動限界位置における前記移動速度が所定の許容速度Vend となるように前記速度制限区間内の前記制限速度を前記移動限界位置に向かって低下させるように設定する、請求項1に記載の移動体駆動制御システム。 2. The control unit sets the speed limit in the speed limit section to decrease toward the movement limit position such that the movement speed at the movement limit position becomes a predetermined allowable speed Vend. 3. 4. A moving body drive control system according to claim 1.
  3.  前記制御部は、前記速度制限区間内の前記制限速度を前記移動限界位置に向かって直線的に低下させるように設定し、前記減速度を次式により算出する、請求項2に記載の移動体駆動制御システム。
      前記減速度=2・Z(Z・Lbl+Vend )
       ここで、Zは前記制限速度の変化特性線の傾き
           Lblは前記目標位置と前記移動限界位置との間の距離
           Vend は前記移動限界位置における前記許容速度
    The moving body according to claim 2, wherein the control unit sets the speed limit in the speed limit section to linearly decrease toward the movement limit position, and calculates the deceleration by the following equation. Drive control system.
    The deceleration = 2 · Z (Z · Lbl + Vend)
    Here, Z is the slope of the change characteristic line of the speed limit Lbl is the distance between the target position and the movement limit position Vend is the allowable speed at the movement limit position
  4.  前記制御部は、前記速度制限区間内で前記移動体の移動を前記移動限界位置の方向に向かって開始する場合は、移動開始後の加速により前記移動速度が前記制限速度に到達する前に加速から減速に切り替え、その減速区間内で前記移動速度の軌跡が前記制限速度の変化特性線に接するように指令速度プロファイルを補正する、請求項2又は3に記載の移動体駆動制御システム。 When the movement of the moving body is started in the direction of the movement limit position within the speed limit section, the control unit accelerates the movement speed before the movement speed reaches the speed limit by acceleration after the start of movement. 4. The moving body drive control system according to claim 2, wherein the command speed profile is corrected such that the speed is switched from deceleration to deceleration and the trajectory of the moving speed is in contact with the change characteristic line of the speed limit within the deceleration section.
  5.  前記速度制限区間の長さである前記所定距離は、前記ダイナミックブレーキの制動特性に基づいて設定されている、請求項1乃至4のいずれかに記載の移動体駆動制御システム。 The moving body drive control system according to any one of claims 1 to 4, wherein the predetermined distance that is the length of the speed limit section is set based on a braking characteristic of the dynamic brake.
  6.  前記移動体は、部品実装機の実装ヘッドである、請求項1乃至5のいずれかに記載の移動体駆動制御システム。 The moving body drive control system according to claim 1, wherein the moving body is a mounting head of a component mounting machine.
PCT/JP2018/030933 2018-08-22 2018-08-22 Moving body driving control system WO2020039512A1 (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6450383A (en) * 1987-08-20 1989-02-27 Toshiba Corp Heating cooker
JPH03276214A (en) * 1990-03-26 1991-12-06 Canon Inc Positioning controller and information recording/ reproducing device using the same
JPH04148209A (en) * 1990-10-08 1992-05-21 Amada Metrecs Co Ltd Clamp speed setting method for positioning device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6450383A (en) * 1987-08-20 1989-02-27 Toshiba Corp Heating cooker
JPH03276214A (en) * 1990-03-26 1991-12-06 Canon Inc Positioning controller and information recording/ reproducing device using the same
JPH04148209A (en) * 1990-10-08 1992-05-21 Amada Metrecs Co Ltd Clamp speed setting method for positioning device

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