WO2020021924A1

WO2020021924A1 - Laser machining device and laser machining method

Info

Publication number: WO2020021924A1
Application number: PCT/JP2019/024556
Authority: WO
Inventors: 山梨　貴昭; 厚司舟木; アンドレアスクノール
Original assignee: 株式会社アマダホールディングス
Priority date: 2018-07-24
Filing date: 2019-06-20
Publication date: 2020-01-30
Also published as: DE102018212281A1

Abstract

A delaying device delays a movement command signal for causing a machining head to move in a relative manner. A low-pass filter allows only low-frequency components from the movement command signal to pass and generates a main movement command signal. A subtraction device subtracts the main movement command signal from the delayed movement command signal and generates an auxiliary movement command signal for displacing the position of a laser beam in an opening by means of a beam displacement mechanism. A movement mechanism control unit controls a movement mechanism of the machining head so that the machining head moves in a relative manner on the basis of the main movement command signal. A displacement control unit controls the beam displacement mechanism so that the position of a laser beam, which is emitted through an opening of a nozzle, in the opening is displaced on the basis of the auxiliary movement command signal.

Description

Laser processing machine and laser processing method

The present disclosure relates to a laser processing machine and a laser processing method for processing a sheet metal by a laser beam.

2. Description of the Related Art A laser processing machine that cuts a sheet metal with a laser beam emitted from a laser oscillator to produce a product having a predetermined shape has become widespread. The laser processing machine cuts the sheet metal into a predetermined shape by moving the processing head along a surface of the sheet metal by a moving mechanism of the processing head.

U.S. Pat. No. 6,982,536

大きな Large inertia occurs at the time of acceleration when the processing head in a stopped state starts moving or at the time of deceleration when the moving processing head stops. Therefore, for example, when cutting a sheet metal by bending the cutting direction at a right angle, it is impossible to cut a corner while maintaining a predetermined moving speed (cutting speed) of the processing head. Therefore, when cutting the sheet metal by bending the cutting direction at an angle equal to or less than a predetermined angle, the laser processing machine needs to temporarily stop or significantly reduce the speed of the processing head at the corner and then change the moving direction of the processing head. There is. The same applies to the case where the laser beam machine sharply changes the cutting progress direction like a hairpin shape and cuts a sheet metal in a curved shape.

When the laser processing machine bends the sheet metal by bending the cutting progress direction at a corner below a predetermined angle, or when cutting the sheet metal in a curved shape by changing the cutting direction rapidly, the sheet metal cannot be cut at high speed Therefore, the processing time becomes longer. Even when the laser processing machine cuts such a shape, it is required to cut the sheet metal as fast as possible to shorten the processing time.

According to a first aspect of one or more embodiments, a processing head having an opening at a tip end and a nozzle for emitting a laser beam for cutting a sheet metal through the opening, A moving mechanism that relatively moves the processing head with respect to a surface, a beam displacement mechanism that moves in the processing head and displaces a position in the opening of a laser beam emitted from the opening, A delay device for delaying a movement command signal for relatively moving the processing head by a movement mechanism; and by passing only a low frequency component of the movement command signal, the processing mechanism relatively moves the processing head by the movement mechanism. A low-pass filter for generating a main movement command signal to be subtracted, and subtracting the main movement command signal from the delayed movement command signal delayed by the delay unit A movement command dividing unit having a subtractor for generating a sub-movement command signal for displacing the position of the laser beam emitted from the opening in the opening by the beam displacement mechanism in the opening; and the main movement command signal. A movement mechanism control unit that controls the movement mechanism to relatively move the processing head based on the position of the laser beam emitted from the opening based on the sub-movement command signal. And a displacement control unit that controls the beam displacement mechanism to displace the laser beam.

According to a second aspect of one or more embodiments, a control device for controlling a laser beam machine has an opening at a tip end based on a machining program, and a laser for cutting a sheet metal from the opening. Generating a movement command signal for moving a processing head to which a nozzle for emitting a beam is attached relative to a surface of the sheet metal, generating a delayed movement command signal by delaying the movement command signal, By passing only the low frequency component in the movement command signal, a main movement command signal for relatively moving the machining head is generated, and the main movement command signal is subtracted from the delayed movement command signal, thereby A sub-movement command signal for displacing the position of the laser beam emitted from the opening in the opening is generated, and the processing head is synchronized based on the main movement command signal. Laser processing method of controlling the laser processing machine to cut the sheet metal by moving the laser beam emitted from the opening based on the sub-movement command signal and displacing the position in the opening based on the sub-movement command signal Is provided.

According to the laser beam machine and the laser beam machining method of one or more embodiments, the sheet metal is cut by bending the cutting direction at a corner portion equal to or less than a predetermined angle, or the sheet metal is formed by rapidly changing the cutting direction. Even in the case of cutting in a curved shape, the sheet metal can be cut at a higher speed than before, and the processing time can be shortened.

FIG. 1 is a diagram illustrating an overall configuration example of a laser processing machine according to one or more embodiments. FIG. 2 is a perspective view illustrating a detailed configuration example of a collimator unit and a processing head in a laser processing machine according to one or more embodiments. FIG. 3 is a diagram for explaining the displacement of the irradiation position of the laser beam on the sheet metal by the beam vibration mechanism. FIG. 4 is a block diagram illustrating an example of a functional internal configuration of the NC device included in the laser beam machine according to the first embodiment. FIG. 5 is a diagram illustrating an example of cutting a sheet metal by the laser processing machine and the laser processing method according to the first embodiment. FIG. 6 is a diagram illustrating an example of a division process of a movement command signal by the laser processing machine and the laser processing method according to the first embodiment. FIG. 7 is a block diagram illustrating an example of a functional internal configuration of an NC device included in the laser beam machine according to the second embodiment. FIG. 8 is a diagram illustrating a parallel vibration pattern of a laser beam. FIG. 9 is a diagram illustrating an example of cutting a sheet metal by the laser processing machine and the laser processing method according to the second embodiment. FIG. 10 is a diagram illustrating an example of a process of dividing a movement command signal by the laser beam machine and the laser beam machining method according to the second embodiment.

Hereinafter, a laser beam machine and a laser beam machining method according to one or more embodiments will be described with reference to the accompanying drawings.

In FIG. 1, a laser processing machine 100 includes a laser oscillator 10 that generates and emits a laser beam, a laser processing unit 20, and a process fiber 12 that transmits the laser beam emitted from the laser oscillator 10 to the laser processing unit 20. And

The laser beam machine 100 also includes an operation unit 40, an NC device 50, a machining program database 60, a machining condition database 70, and an assist gas supply device 80. The NC device 50 is an example of a control device that controls each unit of the laser beam machine 100.

As the laser oscillator 10, a laser oscillator that amplifies the excitation light emitted from the laser diode and emits a laser beam of a predetermined wavelength, or a laser oscillator that directly uses the laser beam emitted from the laser diode is preferable. The laser oscillator 10 is, for example, a solid-state laser oscillator, a fiber laser oscillator, a disk laser oscillator, or a direct diode laser oscillator (DDL oscillator).

The laser oscillator 10 emits a 1 μm band laser beam having a wavelength of 900 nm to 1100 nm. Taking a fiber laser oscillator and a DDL oscillator as examples, the fiber laser oscillator emits a laser beam having a wavelength of 1060 nm to 1080 nm, and the DDL oscillator emits a laser beam having a wavelength of 910 nm to 950 nm.

The laser processing unit 20 includes a processing table 21 on which a sheet metal W to be processed is placed, a gate-shaped X-axis carriage 22, a Y-axis carriage 23, a collimator unit 30 fixed to the Y-axis carriage 23, and a processing head 35. Having. The sheet metal W is made of, for example, stainless steel. The material and thickness of the sheet metal W are not particularly limited.

The X-axis carriage 22 is configured to be movable on the processing table 21 in the X-axis direction. The Y-axis carriage 23 is configured to be movable on the X-axis carriage 22 in the Y-axis direction perpendicular to the X-axis. The X-axis carriage 22 and the Y-axis carriage 23 serve as a moving mechanism that moves the processing head 35 along the surface of the sheet metal W in the X-axis direction, the Y-axis direction, or any combined direction of the X-axis and the Y-axis. Function.

Instead of moving the processing head 35 along the surface of the sheet metal W, the position of the processing head 35 may be fixed, and the sheet metal W may be configured to move. The laser processing machine 100 only needs to have a moving mechanism that moves the processing head 35 relative to the surface of the sheet metal W.

The processing head 35 has a circular opening 36a at the tip, and a nozzle 36 for emitting a laser beam through the opening 36a is attached. The sheet metal W is irradiated with the laser beam emitted from the opening 36 a of the nozzle 36. The assist gas supply device 80 supplies, for example, nitrogen to the processing head 35 as an assist gas. During processing of the sheet metal W, the assist gas is blown onto the sheet metal W from the opening 36a. The assist gas discharges the molten metal in the kerf where the sheet metal W has melted.

As shown in FIG. 2, the collimator unit 30 includes a collimation lens 31 that converts a divergent laser beam emitted from the process fiber 12 into parallel light (collimated light). The collimator unit 30 includes a galvano scanner unit 32 and a bend mirror 33 that reflects the laser beam emitted from the galvano scanner unit 32 downward in the Z-axis direction perpendicular to the X-axis and the Y-axis. The processing head 35 includes a converging lens 34 that converges the laser beam reflected by the bend mirror 33 and irradiates the laser beam onto the sheet metal W.

The laser beam machine 100 is centered so that the laser beam emitted from the opening 36a of the nozzle 36 is located at the center of the opening 36a. In the reference state, the laser beam is emitted from the center of the opening 36a. The galvano scanner unit 32 functions as a beam displacement mechanism that travels inside the processing head 35 and displaces the position of the laser beam emitted from the opening 36a within the opening 36a.

The galvano scanner unit 32 includes a scan mirror 321 that reflects the laser beam emitted from the collimation lens 31, and a drive unit 322 that rotates the scan mirror 321 to a predetermined angle. Further, the galvano scanner unit 32 includes a scan mirror 323 that reflects the laser beam emitted from the scan mirror 321 and a drive unit 324 that rotates the scan mirror 323 to a predetermined angle.

The

drive units

322 and 324 can also cause the scan mirrors 321 and 323 to reciprocate in a predetermined angular range based on the control by the NC device 50, respectively. By causing one or both of the scan mirror 321 and the scan mirror 323 to reciprocate, the galvano scanner unit 32 can vibrate the laser beam applied to the sheet metal W. That is, the NC device 50 can cause the galvano scanner unit 32 to function as a beam vibration mechanism that vibrates the laser beam emitted from the opening 36a while traveling in the processing head 35 and inside the opening 36a.

The galvano scanner unit 32 is an example of a beam displacement mechanism and a beam vibration mechanism, and the beam displacement mechanism and the beam vibration mechanism are not limited to the galvano scanner unit 32.

FIG. 3 shows a state where one or both of the scan mirror 321 and the scan mirror 323 are tilted, and the position of the laser beam applied to the sheet metal W is displaced. In FIG. 3, a thin solid line bent by the bend mirror 33 and passing through the focusing lens 34 indicates the optical axis of the laser beam when the laser beam machine 100 is in the reference state.

In detail, the angle of the optical axis of the laser beam incident on the bend mirror 33 changes by the operation of the galvano scanner unit 32 located in front of the bend mirror 33, and the optical axis is shifted from the center of the bend mirror 33. Come off. In FIG. 3, for simplification, the incident position of the laser beam on the bend mirror 33 before and after the operation of the galvano scanner unit 32 is set to the same position.

It is assumed that the optical axis of the laser beam is displaced from the position indicated by the thin solid line to the position indicated by the thick solid line due to the action of the galvano scanner unit 32. Assuming that the laser beam reflected by the bend mirror 33 is inclined at the angle θ, the irradiation position of the laser beam on the sheet metal W is displaced by the distance Δs. Assuming that the focal length of the focusing lens 34 is EFL (Effective Focal Length), the distance Δs is calculated by EFL × sinθ.

When the galvano scanner unit 32 tilts the laser beam by the angle θ in the direction opposite to the direction shown in FIG. 3, the irradiation position of the laser beam on the sheet metal W is displaced by the distance Δs in the direction opposite to the direction shown in FIG. be able to. The distance Δs is a distance less than the radius of the opening 36a, and is preferably a distance equal to or less than the maximum distance defined as the maximum distance obtained by subtracting a predetermined margin from the radius of the opening 36a.

By controlling the driving

units

322 and 324 of the galvano scanner unit 32, the NC device 50 can displace the laser beam applied to the sheet metal W, thereby displacing the beam spot formed on the surface of the sheet metal W. it can. In addition, the NC device 50 can vibrate the laser beam in a predetermined direction in the plane of the sheet metal W to vibrate a beam spot formed on the plane of the sheet metal W.

<First embodiment>
In the laser beam machine 100 configured as described above, the sheet metal W is cut by bending the cutting direction at a corner portion equal to or less than a predetermined angle, or the sheet metal W is cut in a curved shape by changing the cutting direction abruptly. In this case, a description will be given of a laser processing method according to the first embodiment, which can cut the sheet metal W at high speed. The laser beam machine 100 that cuts a sheet metal W using the laser beam machining method of the first embodiment is the laser beam machine of the first embodiment. In the first embodiment, the galvano scanner unit 32 functions only as a beam displacement mechanism.

において In the first embodiment, the NC device 50 has a functional internal configuration shown in FIG. The NC device 50 includes a movement control unit 501, a movement command division unit 503, a movement mechanism control unit 505, and a displacement control unit 506. The movement command division unit 503 includes a delay unit 5031, a low-pass filter (hereinafter, LPF) 5032, and a subtractor 5033.

As shown in FIG. 5, a processing program for starting to cut the sheet metal W at the position P1, cutting the sheet metal W straight to the position P2, bending the cutting direction at the position P2 by 90 degrees, and cutting the sheet metal W straight to the position P3. Is created as an example. A straight line from the position P1 to the position P2 is in the X-axis direction, and a straight line from the position P2 to the position P3 is in the Y-axis direction.

In FIG. 4, a machining program, an instruction signal for instructing start of machining, and machining conditions are input to the movement control unit 501. The movement control unit 501 generates a movement command signal as shown in FIG. 6A based on the machining program.

The movement command signal includes an acceleration command for accelerating the processing head 35 to the moving speed specified by the processing conditions over a period from time t1 to time t2 after the stopped processing head 35 starts moving. The movement command signal includes a constant speed movement command for moving the processing head 35 at a constant moving speed. The movement command signal includes a deceleration command for decelerating and stopping the processing head 35 over the time from time t7 to time t12.

The movement command signal shown in FIG. 6A is used for both cutting in the X-axis direction from the position P1 to the position P2 in FIG. 5 and cutting in the Y-axis direction from the position P2 to the position P3 in FIG. That is, the movement command signal shown in FIG. 6A is a movement command signal in the X-axis direction or the Y-axis direction.

The movement command signal generated by the movement control unit 501 is input to the movement command division unit 503. The delay unit 5031 delays the movement command signal by a delay time Tdly from time t1 to time t3 and supplies the signal to the subtractor 5033. The LPF 5032 generates a main movement command signal shown in FIG. 6B by executing a filtering process for passing only low frequency components in the movement command signal shown in FIG. 6A. The main movement command signal is a movement command signal for moving the processing head 35. FIG. 6B shows a movement command signal delayed by a two-dot chain line (hereinafter, a delay movement command signal).

As shown in FIG. 6 (b), the main movement command signal has a time t1 to t6 longer than the time from the time t1 to the time t2 of the acceleration command in the movement command signal shown in FIG. 6 (a). And an acceleration command for accelerating the machining head 35 to a moving speed specified by the machining condition. The main movement command signal includes a constant speed movement command for moving the machining head 35 at a constant moving speed during a period from time t6 to time t7. The main movement command signal is obtained by decelerating the machining head 35 over a time period from time t7 to time t12 longer than a time period from time t7 to time t8 of the deceleration command in the movement command signal shown in FIG. Includes deceleration command to stop.

The subtractor 5033 generates the sub-movement command signal shown in FIG. 6C by subtracting the main-movement command signal from the delayed-movement command signal. The sub movement command signal is a movement command signal for displacing the beam spot Bs shown in FIG. 5 by the galvano scanner unit 32. In the sub-movement command signal shown in FIG. 6C, the negative portions of the time from time t1 to time t4 and the time from time t10 to time t12 indicate that the beam spot Bs moves in the moving direction of the processing head 35. This is a reverse movement command for displacing to the opposite side. Of the sub-movement command signal, the positive portions of the time from time t4 to time t6 and the time from time t7 to time t10 are forward movement commands for displacing the beam spot Bs in the movement direction of the processing head 35.

(4) As shown in FIG. 4, the moving mechanism including the X-axis carriage 22 and the Y-axis carriage 23 has driving units 220 and 230 for driving the X-axis carriage 22 and the Y-axis carriage 23, respectively. The moving mechanism control unit 505 controls the driving units 220 and 230 based on the main movement command signal to move the processing head 35. The displacement control unit 506 controls the driving

units

322 and 324 of the galvano scanner unit 32 based on the sub-movement command signal to displace the beam spot Bs.

As described above, when cutting the sheet metal W as shown in FIG. 5, the laser processing machine 100 moves the processing head 35 by the main movement command signal shown in FIG. The beam spot Bs is displaced by the indicated sub-movement command signal.

In FIG. 5, when the laser processing machine 100 starts cutting the sheet metal W at the position P1, the processing head 35 moves toward the position P2 according to the main movement command signal. A groove Wk having a diameter of the beam spot Bs as a kerf width is formed in the sheet metal W.

Immediately after the cutting of the sheet metal W is started, the beam spot Bs is displaced rearward with respect to the moving direction of the processing head 35 in the opening 36a of the nozzle 36 indicated by the two-dot chain line and then displaced forward in accordance with the sub-movement command signal. Then, it returns to the center of the opening 36a. Thereafter, in a state where the beam spot Bs is located at the center of the opening 36a, the processing head 35 moves at a constant speed in accordance with the constant speed movement command of the main movement command signal.

と When the processing head 35 approaches the position P2, the beam spot Bs is displaced forward in the opening 36a and reaches the position P2 according to the sub-movement command signal. The processing head 35 continues to move in the X-axis direction, and the beam spot Bs returns to the center of the opening 36a after being displaced rearward in the opening 36a in accordance with the sub-movement command signal. After the beam spot Bs is located at the position P2, the beam spot Bs is displaced in the opening 36a so as to offset the amount of movement of the processing head 35 in the X-axis direction. Therefore, the beam spot Bs is located at a straight line portion from the position P2 to the position P3 to form the groove Wk.

Similarly, also in the movement in the Y-axis direction from the position P2 to the position P3, the processing head 35 moves according to the main movement command signal, and the beam spot Bs is displaced within the opening 36a according to the sub movement command signal.

Thereby, as can be seen from the movement locus of the opening 36a indicated by the two-dot chain line, a straight line portion from the position P1 to a position a predetermined distance before the position P2 and a position after a predetermined distance from the position P2 The processing head 35 moves linearly in a straight line portion from to the position P3. At the corner of the position P2, the processing head 35 moves in a curved shape on the inner corner side of the corner of the position P2 as indicated by an arrow line. Therefore, there is no need to temporarily stop or significantly reduce the processing head 35 at the corner of the position P2, and the moving direction of the processing head 35 can be changed while maintaining the predetermined moving speed.

By the way, the delay time Tdly is determined by the acceleration (or deceleration represented by the gradient from time t7 to time t12) of the main movement command signal represented by the gradient from time t1 to time t6, and the beam spot Bs by the aperture 36a. It is set according to the distance that can be displaced within.

As described above, according to the first embodiment, when the laser processing machine cuts the sheet metal by bending the cutting progress direction at a corner that is equal to or less than a predetermined angle, the NC device 50 is configured to use a processing head that generates a large inertia. Is moved, the beam spot Bs is displaced by the galvano scanner unit 32 that generates only a small inertia. Therefore, there is no need to greatly decelerate or accelerate the processing head. Accordingly, the sheet metal W can be cut at a higher speed than in the related art, so that the processing time can be shortened. FIG. 5 shows a case where the corner is at 90 degrees, but the same applies to the case where the cutting progress direction is bent at an acute angle of less than 90 degrees to cut the sheet metal W. The same applies to the case where the sheet metal W is cut into a shape.

<Second embodiment>
The laser beam machine 100 that cuts the sheet metal W using the laser beam machining method of the second embodiment is the laser beam machine of the second embodiment. In the second embodiment, the galvano scanner unit 32 functions as a beam vibration mechanism and a beam displacement mechanism. The NC device 50 causes the galvano scanner unit 32 to function as one of a beam vibration mechanism and a beam displacement mechanism in a time-division manner.

において In the second embodiment, the NC device 50 has a functional internal configuration shown in FIG. 7, the same parts as those of FIG. 4 are denoted by the same reference numerals, and the description thereof may be omitted. As shown in FIG. 7, the NC device 50 includes a movement control unit 501, an operation switching control unit 502, a movement command division unit 503, a switching unit 504, a movement mechanism control unit 505, and a vibration / displacement control unit 507. The vibration / displacement control unit 507 has functions of both a vibration control unit and a displacement control unit.

In FIG. 7, the operation switching control unit 502 receives a machining program, an instruction signal, and a movement command signal. The operation switching control unit 502 generates a switching control signal for switching whether the galvano scanner unit 32 functions as a beam vibration mechanism or a beam displacement mechanism, and supplies the switching control signal to the switching unit 504 and the vibration / displacement control unit 507.

加工 The vibration / displacement control unit 507 receives processing conditions for specifying a vibration pattern when the galvano scanner unit 32 functions as a beam vibration mechanism. Details of the vibration pattern will be described later.

When the switching control signal indicates that the galvano scanner unit 32 functions as a beam vibration mechanism, the switching unit 504 connects to the terminal Ta and supplies a movement command signal to the moving mechanism control unit 505. The moving mechanism control unit 505 controls the driving units 220 and 230 based on the movement command signal to move the processing head 35. At this time, the vibration / displacement control unit 507 controls the driving

units

322 and 324 so as to vibrate the laser beam in a vibration pattern specified by the processing conditions.

The galvano scanner unit 32 vibrates the laser beam as shown in FIG. The cutting direction of the sheet metal W is defined as the x direction, and the direction perpendicular to the x direction in the plane of the sheet metal W is defined as the y direction. FIG. 8 shows a vibration pattern without moving the processing head 35 in the x direction so that the vibration pattern can be easily understood. The galvano scanner unit 32 vibrates the beam spot Bs in the x direction within the groove Wk formed by the progress of the beam spot Bs. This vibration pattern is called a parallel vibration pattern. In practice, the laser beam is vibrated in a parallel vibration pattern while the processing head 35 moves in the cutting direction.

When the switching control signal indicates that the galvano scanner unit 32 functions as a beam displacement mechanism, the switching unit 504 is connected to the terminal Tb, and transmits the main movement command signal generated by the movement command dividing unit 503 to the moving mechanism control unit 505. To supply. The moving mechanism control unit 505 controls the driving units 220 and 230 based on the main movement command signal to move the processing head 35. At this time, the vibration / displacement control unit 507 controls the driving

units

322 and 324 such that the galvano scanner unit 32 displaces the beam spot Bs based on the sub-movement command signal generated by the movement command division unit 503.

As shown in FIG. 9, the operation switching control unit 502 cuts the sheet metal W without displacing the beam spot Bs in the opening 36a from the position P1 to the position P2 and the position P2 to the position P3. Is controlled to vibrate the beam spot Bs in a parallel vibration pattern. Specifically, the operation switching control unit 502 determines that the machining head 35 starts moving in the X-axis direction and ends at a predetermined distance before the processing ends, and also starts and ends moving in the Y-axis direction. The beam spot Bs is controlled so as to vibrate in a parallel vibration pattern, except for portions at predetermined distances before the beam spot Bs.

After the relative movement of the processing head 35 is started by the NC device 50, the processing head 35 is moved by a predetermined distance for a first period, and the processing head 35 is moved by a predetermined distance before the relative movement is completed. The period in which only the movement is performed is referred to as a second period. The NC device 50 (the operation switching control unit 502 and the vibration / displacement control unit 507) controls the laser processing machine 100 to vibrate the laser beam in a third period excluding the first and second periods.

The operation of the NC device 50 shown in FIG. 7 will be described with reference to FIG. FIG. 10 shows an example of the operation of the NC device 50. The machining program input to the NC device 50 includes an X-axis movement command signal shown in FIG. 10A and a Y-axis movement command signal shown in FIG. When the laser beam machine 100 vibrates the beam spot Bs in a parallel vibration pattern, the sheet metal W can be cut faster than when the beam spot Bs is not vibrated. The moving speed (cutting speed) of the processing head 35 set by the X-axis movement command signal and the Y-axis movement command signal is set relatively high.

The X-axis movement command signal includes a deceleration command for a period from time t21 to time t23, and the Y-axis movement command signal includes an acceleration command for a period from time t23 to time t28. The movement control unit 501 generates the X-axis movement command signal shown in (b) based on the X-axis movement command signal shown in (a) of FIG. 10, and generates the X-axis movement command signal shown in (e) ( A Y-axis movement command signal shown in f) is generated.

切替 As shown in FIG. 10 (i), the switching unit 504 is connected to the terminal Ta before time t21, and is switched to the terminal Tb at time t21. As shown in FIG. 10 (j), before the time t21, the parallel vibration for vibrating the beam spot Bs in the parallel vibration pattern is turned on, and at the time t21, the parallel vibration is turned off.

The X-axis movement command signal shown in FIG. 10B includes a deceleration command from time t21 to time t22, a constant speed movement command from time t22 to time t24, and an X-axis movement command signal from time t24 to time t26. And a time deceleration command. In the constant speed movement command from time t22 to time t24, the moving speed of the processing head 35 is reduced because the high speed set in the processing program is set to the normal moving speed, As in the embodiment, the processing head 35 is moved by the main movement command signal, and the beam spot Bs is displaced in the opening 36a by the sub movement command signal.

The movement command dividing unit 503 generates an X-axis main movement command signal shown in FIG. 10C and an X-axis sub-movement command signal shown in FIG. The X-axis main movement command signal includes a deceleration command for decelerating and stopping the processing head 35 over a period from time t23 to t27 longer than a period from time t24 to time t26. The X-axis sub-movement command signal includes a forward movement command for a time from time t23 to time t25 and a reverse movement command for a time from time t25 to time t27.

The Y-axis movement command signal shown in (f) of FIG. 10 includes an acceleration command from time t24 to time t26, a constant speed movement command from time t26 to time t29, and a constant speed command from time t29 to time t30. And a time acceleration command. In the constant speed movement command from time t26 to time t29, the reason why the moving speed of the processing head 35 is made lower than the moving speed at the time of the constant speed movement set in the processing program is as shown in FIG. The reason is that the moving speed is reduced in the X-axis main movement command signal shown in ()).

The movement command dividing unit 503 generates a Y-axis main movement command signal shown in (g) of FIG. 10 and a Y-axis sub-movement command signal shown in (h) of FIG. The Y-axis main movement command signal includes an acceleration command for accelerating the processing head 35 over a period from time t23 to t27 longer than a period from time t24 to time t26. The Y-axis sub-movement command signal includes a backward movement command from time t23 to time t25 and a forward movement command from time t25 to time t27.

切替 As shown in FIG. 10 (i), the switching unit 504 is switched to the terminal Ta at time t30. As shown in FIG. 10 (j), the parallel vibration is turned on again at time t30.

As described above, in the second embodiment, the operation switching control unit 502 switches between the first state in which the galvano scanner unit 32 functions as a beam displacement mechanism and the second state in which the galvano scanner unit 32 functions as a beam vibration mechanism. When in the second state, the vibration / displacement control unit 507 controls the galvano scanner unit 32 so as to vibrate the laser beam in a direction parallel to the cutting direction of the sheet metal W.

When the switching unit 504 is in the first state, the moving mechanism control unit 505 controls the moving mechanism of the processing head 35 based on the main movement command signal generated by the movement command dividing unit 503. A main movement command signal is supplied to the control unit 505. When in the second state, the switching unit 504 controls the movement mechanism so that the movement mechanism control unit 505 controls the movement mechanism based on a movement command signal that is not divided into a main movement command signal and a sub movement command signal. A movement command signal is supplied to the mechanism control unit 505.

According to the second embodiment, the laser beam is vibrated in the parallel vibration pattern in the third period in which the sheet metal W is cut without dividing the movement command signal into the main movement command signal and the sub movement command signal. Can be cut at a higher speed, and the processing time can be shortened.

The present invention is not limited to the above-described embodiment, and can be variously modified without departing from the gist of the present invention.

The entire disclosure of patent application No. 10/2018/212 / 281.4 filed in the Federal Republic of Germany on July 24, 2018 is hereby incorporated by reference.

Reference Signs List 10 laser oscillator 12 process fiber 20 laser processing unit 22 X-axis carriage (moving mechanism)
23 Y-axis carriage (moving mechanism)
30 collimator unit 31 collimation lens 32 galvano scanner unit (beam displacement mechanism, beam vibration mechanism)
33 Bend mirror 34 Focusing lens 35 Processing head 36 Nozzle 36a Opening 40 Operation unit 50 NC device (control device)
Reference Signs List 60 processing program database 70 processing condition database 80 assist gas supply device 100

laser processing machine

321, 323

scan mirror

322, 324 drive unit 501 movement control unit 502 operation switching control unit 503 movement command division unit 504 switching unit 505 moving mechanism control unit 506 Displacement controller 507 Vibration / displacement controller (displacement controller, vibration controller)
5031 delay unit 5032 low-pass filter 5033 subtractor W sheet metal

Claims

A processing head having an opening at the tip, and a nozzle for emitting a laser beam for cutting a sheet metal from the opening is attached,
A moving mechanism for relatively moving the processing head with respect to the surface of the sheet metal,
A beam displacement mechanism that travels in the processing head and displaces a position in the opening of the laser beam emitted from the opening,
A delay device that delays a movement command signal for relatively moving the processing head by the moving mechanism, and by passing only a low-frequency component in the movement command signal, the processing mechanism relatively moves the processing head. A low-pass filter that generates a main movement command signal to be moved, and a laser beam emitted from the aperture by the beam displacement mechanism by subtracting the main movement command signal from the delayed movement command signal delayed by the delay unit. A movement command division unit having a subtractor that generates a sub-movement command signal that displaces a position in the opening,
A moving mechanism control unit that controls the moving mechanism to relatively move the processing head based on the main movement command signal;
Based on the sub-movement command signal, a displacement control unit that controls the beam displacement mechanism to displace the position of the laser beam emitted from the opening in the opening,
Laser processing machine equipped with.
A beam vibration mechanism that vibrates a laser beam emitted from the opening in the opening,
An operation switching control unit that switches between a first state for operating the beam displacement mechanism and a second state for operating the beam vibration mechanism;
A vibration control unit that controls the beam vibration mechanism so as to vibrate a laser beam in a direction parallel to a cutting direction of the sheet metal when the operation switching control unit is in the second state;
When the first state is set by the operation switching control unit, the moving mechanism control unit controls the moving mechanism based on the main movement command signal so that the moving mechanism control unit controls the main movement command signal. And when the operation switching control unit is in the second state, the moving mechanism control unit controls the moving mechanism so that the moving mechanism control unit controls the moving mechanism based on the movement command signal. A switching unit for supplying a command signal;
The laser beam machine according to claim 1, further comprising:
A galvano scanner unit functioning as both the beam displacement mechanism and the beam vibration mechanism,
The displacement control unit, when being in the first state by the operation switching control unit, operates the galvano scanner unit as the beam displacement mechanism,
The laser processing machine according to claim 2, wherein the vibration control unit operates the galvano scanner unit as the beam vibration mechanism when the operation switching control unit sets the vibration control unit in the second state.
The control device that controls the laser processing machine,
Based on a processing program, a processing head having an opening at a tip end and having a nozzle for emitting a laser beam for cutting a sheet metal through the opening is attached to a surface of the sheet metal. Generate a movement command signal,
A delayed movement command signal is generated by delaying the movement command signal,
By passing only low frequency components in the movement command signal, a main movement command signal for relatively moving the processing head is generated,
By subtracting the main movement command signal from the delayed movement command signal, a sub-movement command signal for displacing the position of the laser beam emitted from the opening in the opening is generated,
The processing head is relatively moved based on the main movement command signal, and the position of the laser beam emitted from the opening in the opening is displaced within the opening based on the sub-movement command signal to cause the sheet metal to move. A laser processing method for controlling the laser processing machine to perform cutting.
A first period in which the control device moves the processing head by a predetermined distance after the relative movement of the processing head is started by the movement command signal, and ends the relative movement of the processing head; The laser beam emitted from the opening is vibrated in a direction parallel to a cutting direction of the sheet metal during a third period except for a second period in which the processing head is moved by a predetermined distance before the laser beam is moved. The laser processing method according to claim 4, which controls the processing machine.