JP6655692B1 - Laser processing machine and laser processing method - Google Patents

Abstract

An object of the present invention is to provide a laser beam machine capable of vibrating a laser beam with a predetermined vibration pattern with high accuracy. A moving mechanism moves a processing head for emitting a laser beam along a surface of the sheet metal relative to the sheet metal. The beam vibration mechanism (Lubano scanner unit 32) vibrates the laser beam irradiated on the sheet metal in a predetermined vibration pattern while relatively moving the processing head by the moving mechanisms 22 and 23. The moving mechanism control unit 505 controls the moving mechanisms 22 and 23 to relatively move the processing head at the first control cycle. The vibration control unit 504 controls the beam vibration mechanism so as to vibrate the laser beam in a predetermined vibration pattern in a second control cycle shorter than the first control cycle. [Selection diagram] FIG.

Description

  The present invention relates to a laser beam machine and a laser beam machining method.

  2. Description of the Related Art A laser processing machine that cuts a sheet metal with a laser beam emitted from a laser oscillator to produce a product having a predetermined shape has become widespread. Non-Patent Document 1 describes cutting a sheet metal while vibrating a laser beam in a predetermined vibration pattern.

JANUARY 2017 The FABRICATOR 67, Shaping the beam for the best cut

  When a laser beam machine cuts a sheet metal while vibrating a laser beam in a predetermined vibration pattern, it is required to vibrate the laser beam with a predetermined vibration pattern with high accuracy. An object of the present invention is to provide a laser beam machine and a laser beam machining method that can vibrate a laser beam with a preset vibration pattern with high accuracy.

The present invention provides a moving mechanism that moves a processing head that emits a laser beam relative to the sheet metal along a surface of the sheet metal , in order to cut a sheet metal to produce a product having a predetermined shape , A beam vibrating mechanism for vibrating a laser beam irradiating the sheet metal to produce the product in a predetermined vibration pattern while relatively moving the processing head by a moving mechanism; and a first control cycle for the processing head. A movement mechanism control unit that controls the movement mechanism so as to relatively move the laser beam, and a beam vibration mechanism that vibrates the laser beam in the predetermined vibration pattern in a second control cycle shorter than the first control cycle. And a vibration control unit for controlling the laser processing.

The present invention is a moving mechanism, in order to cut a sheet metal to produce a product having a predetermined shape , to move a processing head that emits a laser beam along the surface of the sheet metal relative to the sheet metal, While relatively moving the processing head by the moving mechanism, a beam vibration mechanism vibrates a laser beam irradiating the sheet metal to produce the product in a predetermined vibration pattern, the moving mechanism control unit, The movement mechanism is controlled so as to relatively move the processing head in a first control cycle, and a vibration control unit causes the laser beam to move in the predetermined vibration pattern in a second control cycle shorter than the first control cycle. A laser processing method for controlling the beam vibration mechanism so as to vibrate the laser beam.

  According to the laser beam machine and the laser beam machining method of the present invention, a laser beam can be vibrated with a preset vibration pattern with high accuracy.

FIG. 1 is a diagram illustrating an overall configuration example of a laser processing machine according to an embodiment. FIG. 2 is a perspective view showing a detailed configuration example of a collimator unit and a processing head in the laser processing machine of one embodiment. FIG. 3 is a diagram for explaining the displacement of the irradiation position of the laser beam on the sheet metal by the beam vibration mechanism. FIG. 4A is a diagram illustrating a parallel vibration pattern of a laser beam. FIG. 4B is a diagram showing an orthogonal vibration pattern of a laser beam. FIG. 4C is a diagram showing a circular vibration pattern of the laser beam. FIG. 4D is a diagram showing a C-shaped vibration pattern of the laser beam. FIG. 4E is a diagram showing a figure 8 vibration pattern of the laser beam. FIG. 5 is a diagram showing an actual vibration pattern when the orthogonal vibration pattern shown in FIG. 4B is used. FIG. 6 is a block diagram illustrating a functional configuration example of an NC device included in the laser processing machine of one embodiment. FIG. 7 is a diagram illustrating an example of the machining program. FIG. 8 is a diagram illustrating an example of the processing condition file. FIG. 9 is a table showing first parameters for determining each vibration pattern. FIG. 10 is a table showing a setting list for setting a vibration pattern number and a second parameter for determining each vibration pattern corresponding to each processing condition number. FIG. 11 is a diagram illustrating a relationship between a control cycle when the moving mechanism moves the processing head and a control cycle when the beam vibration mechanism vibrates the laser beam.

  Hereinafter, a laser processing machine and a laser processing method according to an embodiment will be described with reference to the accompanying drawings. In FIG. 1, a laser processing machine 100 includes a laser oscillator 10 that generates and emits a laser beam, a laser processing unit 20, and a process fiber 12 that transmits the laser beam emitted from the laser oscillator 10 to the laser processing unit 20. And

  In addition, the laser processing machine 100 includes an operation unit 40, an NC device 50, a processing program database 60, a processing condition database 70, an assist gas supply device 80, and a display unit 90. The NC device 50 is an example of a control device that controls each unit of the laser beam machine 100.

  As the laser oscillator 10, a laser oscillator that amplifies the excitation light emitted from the laser diode and emits a laser beam of a predetermined wavelength, or a laser oscillator that directly uses the laser beam emitted from the laser diode is preferable. The laser oscillator 10 is, for example, a solid-state laser oscillator, a fiber laser oscillator, a disk laser oscillator, or a direct diode laser oscillator (DDL oscillator).

  The laser oscillator 10 emits a 1 μm band laser beam having a wavelength of 900 nm to 1100 nm. Taking a fiber laser oscillator and a DDL oscillator as examples, the fiber laser oscillator emits a laser beam having a wavelength of 1060 nm to 1080 nm, and the DDL oscillator emits a laser beam having a wavelength of 910 nm to 950 nm.

  The laser processing unit 20 includes a processing table 21 on which a sheet metal W to be processed is placed, a gate-shaped X-axis carriage 22, a Y-axis carriage 23, a collimator unit 30 fixed to the Y-axis carriage 23, and a processing head 35. Having. The X-axis carriage 22 is configured to be movable on the processing table 21 in the X-axis direction. The Y-axis carriage 23 is configured to be movable on the X-axis carriage 22 in the Y-axis direction perpendicular to the X-axis. The X-axis carriage 22 and the Y-axis carriage 23 serve as a moving mechanism for moving the processing head 35 along the surface of the sheet metal W in the X-axis direction, the Y-axis direction, or any combined direction of the X-axis and the Y-axis. Function.

  Instead of moving the processing head 35 along the surface of the sheet metal W, the processing head 35 may be configured so that the position of the processing head 35 is fixed and the sheet metal W moves. The laser processing machine 100 only needs to have a moving mechanism that moves the processing head 35 relative to the surface of the sheet metal W.

  The processing head 35 has a circular opening 36a at the tip, and a nozzle 36 for emitting a laser beam through the opening 36a is attached. The sheet metal W is irradiated with the laser beam emitted from the opening 36 a of the nozzle 36. The assist gas supply device 80 supplies nitrogen, oxygen, a mixed gas of nitrogen and oxygen, or air to the processing head 35 as an assist gas. During processing of the sheet metal W, the assist gas is blown onto the sheet metal W from the opening 36a. The assist gas discharges the molten metal within the kerf width where the sheet metal W has melted.

  As shown in FIG. 2, the collimator unit 30 includes a collimation lens 31 that converts a divergent laser beam emitted from the process fiber 12 into parallel light (collimated light). The collimator unit 30 includes a galvano scanner unit 32 and a bend mirror 33 that reflects the laser beam emitted from the galvano scanner unit 32 downward in the Z-axis direction perpendicular to the X-axis and the Y-axis. The processing head 35 includes a converging lens 34 that converges the laser beam reflected by the bend mirror 33 and irradiates the laser beam onto the sheet metal W.

  In order to adjust the focal position of the laser beam, the focusing lens 34 is configured to be movable in a direction approaching the sheet metal W and in a direction away from the sheet metal W by a driving unit and a moving mechanism (not shown).

  The laser beam machine 100 is centered so that the laser beam emitted from the opening 36a of the nozzle 36 is located at the center of the opening 36a. In the reference state, the laser beam is emitted from the center of the opening 36a. The galvano scanner unit 32 functions as a beam vibration mechanism that vibrates the laser beam emitted from the opening 36a while traveling in the processing head 35, within the opening 36a. How the galvano scanner unit 32 vibrates the laser beam will be described later.

  The galvano scanner unit 32 includes a scan mirror 321 that reflects the laser beam emitted from the collimation lens 31, and a drive unit 322 that rotates the scan mirror 321 at a predetermined angle. Further, the galvano scanner unit 32 includes a scan mirror 323 that reflects the laser beam emitted from the scan mirror 321 and a drive unit 324 that rotates the scan mirror 323 to a predetermined angle.

  The driving units 322 and 324 can reciprocally oscillate the scan mirrors 321 and 323 in a predetermined angle range based on the control by the NC device 50, respectively. By causing one or both of the scan mirror 321 and the scan mirror 323 to reciprocate, the galvano scanner unit 32 vibrates the laser beam applied to the sheet metal W.

  The galvano scanner unit 32 is an example of a beam vibration mechanism, and the beam vibration mechanism is not limited to the galvano scanner unit 32 having a pair of scan mirrors.

  FIG. 3 shows a state in which one or both of the scan mirror 321 and the scan mirror 323 are tilted, and the position of the laser beam applied to the sheet metal W is displaced. In FIG. 3, a thin solid line bent by the bend mirror 33 and passing through the focusing lens 34 indicates the optical axis of the laser beam when the laser beam machine 100 is in the reference state.

  In detail, the angle of the optical axis of the laser beam incident on the bend mirror 33 changes by the operation of the galvano scanner unit 32 located in front of the bend mirror 33, and the optical axis is shifted from the center of the bend mirror 33. Come off. In FIG. 3, for simplification, the incident position of the laser beam on the bend mirror 33 before and after the operation of the galvano scanner unit 32 is set to the same position.

  It is assumed that the optical axis of the laser beam is displaced from the position shown by the thin solid line to the position shown by the thick solid line by the action of the galvano scanner unit 32. Assuming that the laser beam reflected by the bend mirror 33 is inclined at the angle θ, the irradiation position of the laser beam on the sheet metal W is displaced by the distance Δs. Assuming that the focal length of the focusing lens 34 is EFL (Effective Focal Length), the distance Δs is calculated by EFL × sin θ.

  When the galvano scanner unit 32 tilts the laser beam by the angle θ in the direction opposite to the direction shown in FIG. 3, the irradiation position of the laser beam on the sheet metal W is displaced by the distance Δs in the direction opposite to the direction shown in FIG. be able to. The distance Δs is a distance less than the radius of the opening 36a, and is preferably a distance equal to or less than the maximum distance defined as the maximum distance obtained by subtracting a predetermined margin from the radius of the opening 36a.

  The NC device 50 can vibrate the laser beam in a predetermined direction in the plane of the sheet metal W by controlling the driving units 322 and 324 of the galvano scanner unit 32. By vibrating the laser beam, a beam spot formed on the surface of the sheet metal W can be vibrated.

  The laser processing machine 100 configured as described above cuts the sheet metal W with the laser beam emitted from the laser oscillator 10 to produce a product having a predetermined shape. The laser beam machine 100 sets the focal point of the laser beam at an appropriate position within the sheet thickness of the sheet metal W below the upper surface of the sheet metal W, a predetermined distance above the upper surface, or below the upper surface by a predetermined distance. Then, the sheet metal is cut while vibrating the laser beam in a predetermined vibration pattern.

  The machining program database 60 stores a machining program for cutting the sheet metal W. The NC device 50 reads the machining program from the machining program database 60 and selects any one of the plurality of machining condition files stored in the machining condition database 70. The NC device 50 controls the laser processing machine 100 to cut the sheet metal W based on the processing program read out and the processing conditions set in the selected processing condition file.

  As described later, the laser processing machine 100 is configured to be able to set a vibration pattern of a laser beam in accordance with each processing condition set in a processing condition file. The display unit 90 displays setting items for setting a laser beam vibration pattern corresponding to each processing condition based on control by the NC device 50.

  An example of a vibration pattern in which the NC device 50 vibrates the laser beam by the galvano scanner unit 32 will be described with reference to FIGS. 4A to 4E. The cutting direction of the sheet metal W is defined as the x direction, and the direction perpendicular to the x direction in the plane of the sheet metal W is defined as the y direction. A vibration pattern is set for each processing condition of the processing condition file stored in the processing condition database 70, and the NC device 50 operates the galvano scanner unit to vibrate the laser beam with the vibration pattern set in the processing condition. 32.

  4A to 4E show a vibration pattern in a state where the processing head 35 is not moved in the x direction so that the vibration pattern can be easily understood. FIG. 4A is a vibration pattern in which the beam spot Bs is vibrated in the x direction in the groove Wk formed by the progress of the beam spot Bs. The vibration pattern shown in FIG. 4A is referred to as a parallel vibration pattern. At this time, the kerf width K1 of the groove Wk is substantially equal to the diameter of the beam spot Bs. If the frequency for vibrating the beam spot Bs in the direction parallel to the cutting progress direction is Fx and the frequency for vibrating in the direction perpendicular to the cutting progress direction is Fy, the parallel vibration pattern is a vibration pattern of Fx: Fy of 1: 0. .

  FIG. 4B is a vibration pattern for vibrating the beam spot Bs in the y direction. By oscillating the beam spot Bs in the y direction, the groove Wk has a kerf width K2 wider than the kerf width K1. The vibration pattern shown in FIG. 5 is referred to as an orthogonal vibration pattern. The orthogonal vibration pattern is a vibration pattern in which Fx: Fy is 0: 1.

  FIG. 4C is a vibration pattern that vibrates the beam spot Bs so that the beam spot Bs draws a circle. By oscillating the beam spot Bs in a circular shape, the groove Wk has a kerf width K3 wider than the kerf width K1. The vibration pattern shown in FIG. 4C is referred to as a circular vibration pattern. The circular vibration pattern is a vibration pattern in which Fx: Fy is 1: 1.

  FIG. 4D is a vibration pattern that vibrates the beam spot Bs so that the beam spot Bs draws the letter C. By vibrating the beam spot Bs in a C-shape, the groove Wk has a kerf width K4 wider than the kerf width K1. The vibration pattern shown in FIG. 4D is referred to as a C-shaped vibration pattern. The C-shaped vibration pattern is a vibration pattern in which Fx: Fy is 2: 1 (= 1: 1/2). Fy has a phase difference of 1 / 2π (= 90 °) from Fx.

  FIG. 4E is a vibration pattern that vibrates the beam spot Bs so that the beam spot Bs draws the numeral 8. By vibrating the beam spot Bs in a figure-eight shape, the groove Wk has a kerf width K5 wider than the kerf width K1. The vibration pattern shown in FIG. 4E is referred to as a figure-eight vibration pattern. The figure eight-shaped vibration pattern is a vibration pattern in which Fx: Fy is 2: 1.

  Actually, since the laser beam vibrates while the processing head 35 moves in the cutting direction, the vibration pattern is a vibration pattern obtained by adding a displacement in the cutting direction (x direction) to the vibration pattern shown in FIGS. 4A to 4E. Becomes Taking the orthogonal vibration pattern shown in FIG. 4B as an example, since the beam spot Bs vibrates in the y direction while moving in the x direction, the actual orthogonal vibration pattern becomes a vibration pattern as shown in FIG.

  Next, how an appropriate vibration pattern is set according to the processing conditions of the sheet metal W will be described with reference to FIGS. As shown in FIG. 6, the NC device 50 has the following functional components: an NC control unit 501, a pattern program generation unit 502, a pattern program holding unit 503, a vibration control unit 504, a movement mechanism control unit 505, and an oscillator control unit 506. , A processing condition setting unit 507, and a display control unit 508.

  When an instruction to read a machining program is given by the operation unit 40, the NC control unit 501 reads a machining program stored in the machining program database 60 created in advance to cut the sheet metal W. The machining program is configured by a plurality of commands represented by machine control codes as shown in FIG. 7 as an example.

  In FIG. 7, M102 is a command for selecting a processing condition file. Here, for example, an instruction is given to select a processing condition file named C-SUS3.0. M100 indicates a command to execute laser processing. The number with the letter E (E number) indicates a processing condition number to be described later. The command starting with G01 indicates a processing command of linear interpolation for moving the laser beam on a straight line connecting the start point and the end point specified by X and Y at the moving speed F.

  The command starting with G02 indicates a machining command of circular interpolation for moving at a moving speed F on an arc connecting the start point and the end point. Here, the former method is shown among the method of specifying an arc for specifying the radius of the arc and the method of specifying the arc by specifying the center of the arc.

  The processing condition database 70 stores a processing condition file named C-SUS3.0 shown in FIG. 8 and a plurality of other processing condition files. The processing condition file shown in FIG. 8 shows a state in which a parameter to be described later for determining a vibration pattern is not added. The parameter is an element for determining a specific way of vibrating according to the vibration pattern. First, an outline of a processing condition file in a state where a parameter for determining a vibration pattern is not added is as follows.

  As shown in FIG. 8, the processing condition file includes the name of the laser oscillator 10, the material and thickness of the sheet metal W, the nozzle type as the type of the nozzle 36, the nozzle diameter as the diameter of the opening 36a, and the focal length of the focusing lens 34. Including information. These pieces of information indicate conditions that are applied in common even when a processing condition of any processing condition number set in the processing condition file is selected. The processing condition file may include other information not shown in FIG.

  In the processing condition file, various conditions for processing the sheet metal W are set corresponding to a plurality of processing condition numbers. The processing condition number corresponds to the number (E number) to which the alphabet E of the processing program shown in FIG. 7 is added. 8, the speed indicates the processing speed (speed data) of the sheet metal W, which is the moving speed of the processing head 35. The output, frequency, and duty indicate the laser output (laser power) of the laser oscillator 10 and the frequency and duty at the time of pulse oscillation, respectively. The gas pressure and the gas type indicate the gas pressure and the gas type of the assist gas supplied by the assist gas supply device 80, respectively.

  The nozzle gap indicates the distance from the tip of the nozzle 36 to the upper surface of the sheet metal W. The tool diameter correction amount indicates a distance for displacing the laser beam from the end when scanning the laser beam along the end of the product. The tool diameter correction amount is a distance corresponding to the radius of the beam spot Bs. The focus correction amount indicates a distance by which the focus of the laser beam is displaced upward or downward from a reference position (0.00). Other conditions not shown in FIG. 8 may be set corresponding to each processing condition number.

  As shown in FIG. 9, the processing condition database 70 stores a first parameter for determining each vibration pattern in association with a vibration pattern number for selecting each vibration pattern. The vibration pattern number is pattern selection information for selecting a laser beam vibration pattern. The first parameter is a parameter for determining the shape of each vibration pattern. Here, the vibration pattern names are shown corresponding to the respective vibration pattern numbers for easy understanding, but it is not necessary that the processing condition database 70 store the vibration pattern names.

  In the processing condition database 70, the frequency ratio of the frequency oscillating in the x direction to the frequency oscillating in the y direction, and the frequency in the x direction and the y direction The phase difference with the vibration is set.

  When an operation for setting a parameter for determining a vibration pattern is performed by the operation unit 40, the processing condition setting unit 507 controls the display control unit 508 to display a setting list as shown in FIG. I do. As shown in FIG. 10, the setting list is used to select a vibration pattern number corresponding to each E number, and to set a second parameter for determining a vibration pattern of each vibration pattern number for each vibration pattern number. Here is a list. The second parameter is a parameter that determines the amplitude and frequency of each vibration pattern whose shape is determined by the first parameter.

  In FIG. 10, Qx indicates a set value for setting the amplitude in the x direction, and Qy indicates a set value for setting the amplitude in the y direction. For example, a circular vibration pattern having an amplitude of 90 (μm) in the x direction, an amplitude of 90 (μm) in the y direction, and a frequency of 3000 (Hz) is set as the processing condition of the E number E2.

  It is not necessary for the setting list to display all information corresponding to the processing condition numbers in the processing condition file shown in FIG. Only the E number may be displayed in the setting list, and the vibration pattern number and the second parameter may be associated with the E number.

  By operating the operation unit 40, the setter or serviceman of the manufacturer of the laser beam machine 100 displays the setting list shown in FIG. 10 on the display unit 90, and sets the vibration pattern number and the second parameter. be able to. It is preferable that the user of the laser beam machine 100 cannot perform an operation of displaying the setting items surrounded by the thick solid line on the display unit 90 and cannot see the setting items surrounded by the thick solid line. When the user operates the operation unit 40 to display the list of E numbers on the display unit 90, it is preferable that a list of processing conditions excluding the setting items surrounded by a thick solid line be displayed.

  The processing condition file to which the vibration pattern number for determining the vibration pattern and the second parameter are added as described above is written in the processing condition database 70. The processing condition database 70 is an example of a storage unit that stores a processing condition file to which a vibration pattern number and a second parameter are added. The processing condition file may be stored in another storage unit connected to the NC device 50.

  When the machining program shown in FIG. 7 is supplied to the NC control unit 501, information that associates the first parameter with each vibration pattern number shown in FIG. 9 and a machining condition file named C-SUS3.0 are stored. It is read from the processing condition database 70. A vibration pattern number and a second parameter are added to the processing condition file. The information and the processing condition file shown in FIG. 9 are supplied from the processing condition setting unit 507 to the NC control unit 501.

  The pattern program generation unit 502 generates a pattern program for vibrating the laser beam with a vibration pattern corresponding to all E numbers included in the machining program read by the NC control unit 501. The pattern program is a control code for operating the galvano scanner unit 32 and describes an instruction (process) for the computer. The pattern program generation unit 502 can generate a pattern program based on the first and second parameters supplied to the NC control unit 501. The pattern program generated by the pattern program generation unit 502 is supplied to and stored in the pattern program storage unit 503.

  After being instructed to execute laser processing by the processing program, the NC control section 501 supplies a vibration pattern number to the vibration control section 504 for each E number. The NC control unit 501 extracts information on the focal length of the focusing lens 34 necessary for determining the vibration pattern from the information included in the processing condition file, and supplies the information to the vibration control unit 504. It is preferable that the NC control unit 501 extracts information on the focus correction amount in addition to the information on the focal length, and supplies the information to the vibration control unit 504. Although not shown in FIG. 6, in order to adjust the focal position of the laser beam, the information on the focus correction amount is also used to control the driving unit of the focusing lens 34. Further, the NC control unit 501 supplies vector information for moving the laser beam to the vibration control unit 504 based on a processing command for moving the laser beam starting with G01 or G02 or the like.

  The vibration control unit 504 reads a pattern program corresponding to the vibration pattern number from the pattern program holding unit 503. The vibration control unit 504 controls the galvano scanner unit 32 based on the pattern program, the vector information, the focal length of the focusing lens 34, and the focus correction amount so as to vibrate the laser beam with the selected vibration pattern under the set conditions. The driving units 322 and 324 are controlled.

  An offset value indicating a distance by which the laser beam emitted from the opening 36a of the nozzle 36 is offset from the center of the opening 36a in at least one of the x direction and the y direction by a processing program or a processing condition file, or manually set by the operation unit 40. May be set. In this case, the NC control unit 501 supplies the offset values in the x direction and the y direction to the vibration control unit 504.

  A moving mechanism including the X-axis carriage 22 and the Y-axis carriage 23 (hereinafter, moving mechanisms 22 and 23) has driving units 220 and 230 for driving the moving mechanisms 22 and 23, respectively. The moving mechanism control unit 505 controls the driving units 220 and 230 based on a processing command for moving the laser beam, and moves the processing head 35. The moving mechanism control unit 505 controls the driving units 220 and 230 every 1 ms, for example, to move the processing head 35. Therefore, the cutting direction in which the laser beam cuts the sheet metal W is controlled at a control cycle of 1 ms (first control cycle).

  The vibration control unit 504 preferably controls the driving units 322 and 324 with a control cycle shorter than 1 ms, and controls the vibration of the laser beam with a control cycle shorter than 1 ms. FIG. 11 conceptually shows a state in which the moving mechanism control unit 505 moves the processing head 35 (laser beam) in an arc shape at a control cycle of 1 ms based on a processing command starting with G02 (or G03). The vibration control unit 504 controls the vibration of the laser beam at a control cycle of 10 μs (second control cycle), for example, 1/100 of 1 ms. By doing so, the laser beam can be vibrated with high accuracy in a pattern set in each vibration pattern every 10 μs.

  Note that the cycles in the first control cycle and the second control cycle can be set arbitrarily due to the motor amplifiers or motors of the NC device 50 and the moving mechanisms 22 and 23. Further, in order to further subdivide the first control cycle, another control cycle can be set between the first control cycle and the second control cycle.

  The present invention is not limited to the present embodiment described above, and can be variously modified without departing from the gist of the present invention. In the present embodiment, the parameters for determining how to vibrate according to the vibration pattern are divided into the first parameter and the second parameter. However, it is only necessary to determine the specific way to vibrate each vibration pattern. The way of setting the parameters is arbitrary. The functional configuration in the NC device 50 illustrated in FIG. 6 may be realized by the central processing unit of the NC device 50 executing a computer program stored in a non-transitory storage medium.

Reference Signs List 10 laser oscillator 20 laser processing unit 22 X-axis carriage (moving mechanism)
23 Y-axis carriage (moving mechanism)
Reference Signs List 30 Collimator unit 31 Collimation lens 32 Galvano scanner unit (beam vibration mechanism)
33 Bend mirror 34 Converging lens 35 Processing head 36 Nozzle 40 Operation unit 50 NC unit 60 Processing program database 70 Processing condition database (storage unit)
80 Assist gas supply device 100 Laser machine 321, 323 Scan mirror 220, 230, 322, 324 Drive unit 501 NC control unit 502 Pattern program generation unit 503 Pattern program holding unit 504 Vibration control unit 505 Moving mechanism control unit 506 Oscillator control unit 507 Processing condition setting unit 508 Display control unit W Sheet metal

Claims (2)

A moving mechanism that moves a processing head that emits a laser beam relative to the sheet metal along a surface of the sheet metal , in order to cut the sheet metal to produce a product having a predetermined shape ,
While relatively moving the processing head by the moving mechanism, a beam vibration mechanism that vibrates a laser beam applied to the sheet metal to produce the product in a predetermined vibration pattern,
A moving mechanism control unit that controls the moving mechanism to relatively move the processing head in a first control cycle;
A vibration control unit that controls the beam vibration mechanism so as to vibrate the laser beam in the predetermined vibration pattern in a second control cycle shorter than the first control cycle;
Laser processing machine equipped with. A moving mechanism moves a processing head that emits a laser beam relative to the sheet metal along a surface of the sheet metal , in order to cut the sheet metal to produce a product having a predetermined shape ,
While relatively moving the processing head by the moving mechanism, a beam vibration mechanism vibrates a laser beam irradiating the sheet metal to produce the product in a predetermined vibration pattern,
A moving mechanism control unit that controls the moving mechanism to relatively move the processing head in a first control cycle;
A laser processing method, wherein a vibration control unit controls the beam vibration mechanism so as to vibrate the laser beam in the predetermined vibration pattern in a second control cycle shorter than the first control cycle.

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